Integrated Terahertz Generation and Focusing Device and Near-Field Terahertz Scanning System

Abstract

The present invention discloses an integrated terahertz generation and focusing device and a near-field terahertz scanning system, comprising: a terahertz generation unit, a conversion unit, a focusing unit and an optical path pipeline; the terahertz generation unit is used for generating terahertz waves; the conversion unit is arranged on the light output optical path of the terahertz generation unit, and the conversion unit is used for converting the terahertz waves into parallel light beams and then guiding the parallel light beams to be emitted to the focusing unit; the focusing unit is used for focusing the parallel light beams to a preset position, and the terahertz generation unit, the conversion unit and the focusing unit are all fixedly arranged inside and outside the optical path pipeline correspondingly. The technical solution provided by the present invention realizes integration and fixation of the terahertz generation unit, the conversion unit and the focusing unit through the optical path pipeline, achieves the purpose of reducing the volume of the device, makes the device convenient to use in narrow spaces such as strong magnetic fields and extremely low temperatures, and has important significance in measurement applications in restricted spaces.

Description

Technical Field

[0001] The present invention relates to the technical field of microscopic systems, and more specifically, to an integrated terahertz generation and focusing device and a near-field terahertz scanning system. Background Art

[0002] The existing terahertz wave imaging is affected by the diffraction limit corresponding to the long wavelength, and the resolution is lower than that of visible light, only at the order of a few micrometers, which is much larger than the scale of micro-nano structure materials or biological tissues and cells, and cannot meet the requirements of high-precision observation. With the development of experimental physics, a near-field imaging method has been developed, which creatively combines terahertz light with a scanning probe microscope and can break through the diffraction limit to obtain a sub-wavelength resolution image.

[0003] R & D personnel hope to apply the combined measurement of terahertz light and a scanning probe microscope in a narrow space: such as in a magnet with a small aperture or in an environment of extremely low temperature and ultra-high vacuum, in order to achieve the purpose of testing physical properties under extreme conditions. However, when combining terahertz light and a scanning probe microscope, the existing terahertz generation optical path and focusing optical path are both relatively complex and occupy a relatively large volume, and it is not suitable to apply this combination method in a narrow space. Summary of the Invention

[0004] In view of this, the present invention provides an integrated terahertz generation and focusing device and a near-field terahertz scanning system, which integrate the terahertz generation unit and the focusing unit through a conversion unit, simplify the structure of the terahertz generation and focusing device, and thus reduce its volume and expand its application range.

[0005] To achieve the above object, the technical solution provided by the present invention is as follows:

[0006] An integrated terahertz generation and focusing device includes: a terahertz generation unit, a conversion unit, a focusing unit, and an optical path pipeline; the optical path pipeline includes: an intermediate pipeline arranged horizontally, and an input pipeline and an output pipeline respectively arranged vertically at both ends of the intermediate pipeline;

[0007] The terahertz generation unit is used to generate terahertz waves and is fixed inside the input port of the input pipeline;

[0008] The conversion unit is arranged on the light path of the terahertz generation unit. The conversion unit is used to convert the terahertz wave into a parallel light beam, and then split the parallel light beam into a first sub-parallel light beam and a second sub-parallel light beam with a phase difference, and guide both the first sub-parallel light beam and the second sub-parallel light beam out to the focusing unit. Wherein, the conversion unit includes: a convex lens arranged on the light path of the terahertz generation unit and fixed in the input pipeline, the terahertz generation unit is located at the focal point of the convex lens; a third reflector arranged on the light path of the convex lens and fixed at the corner of the input pipeline and the intermediate pipeline; a beam splitter arranged on the light path of the third reflector and fixed in the intermediate pipeline; and a fourth reflector arranged on the first beam splitting light path of the beam splitter and fixed in the intermediate pipeline, and a phase adjustment sub-unit arranged on the second beam splitting light path of the beam splitter and fixed outside the intermediate pipeline, the second beam splitting light path corresponds to the optical path hole of the intermediate pipeline. Wherein, the fourth reflector is used to reflect the first sub-parallel light beam and guide it out to the focusing unit; and the phase adjustment sub-unit includes: a displacement device and a fifth reflector arranged on the displacement device, wherein the displacement device drives the fifth reflector to displace to adjust the phase of the second sub-parallel light beam incident on the fifth reflector, and the fifth reflector reflects the second sub-parallel light beam to the focusing unit; the focusing unit is fixed outside the output port of the output pipeline.

[0009] The focusing unit is used to focus both the first sub-parallel light beam and the second sub-parallel light beam to a preset position.

[0010] Optionally, the integrated terahertz generation and focusing device further includes: a filter arranged on the light path of the third reflector, the beam splitter is arranged on the light path of the filter, and the filter is fixed in the intermediate pipeline.

[0011] Or, the integrated terahertz generation and focusing device further includes: a filter arranged on the light path of the convex lens, the third reflector is arranged on the light path of the filter, and the filter is fixed in the input pipeline.

[0012] Optionally, the optical path pipeline is provided with slits for fixing components, wherein the terahertz generation unit, the convex lens, the third reflector, the beam splitter, the fourth reflector and the filter are all inserted into the corresponding slits for fixing.

[0013] Correspondingly, the present invention further provides an integrated terahertz generation and focusing device, comprising: a terahertz generation unit, a conversion unit, a focusing unit, and an optical path pipeline; the optical path pipeline includes: a middle pipeline arranged horizontally, and an input pipeline and an output pipeline respectively arranged vertically at both ends of the middle pipeline;

[0014] The terahertz generation unit is used for generating terahertz waves and is fixed inside the input port of the input pipeline;

[0015] The conversion unit is arranged on the light output path of the terahertz generation unit. The conversion unit is used for converting the terahertz waves into parallel light beams and then guiding the parallel light beams to the focusing unit; wherein, a convex lens arranged on the light output path of the terahertz generation unit and fixed inside the input pipeline, the terahertz generation unit is located at the focal point of the convex lens; a first reflector arranged on the light output path of the convex lens and fixed at the corner of the input pipeline and the middle pipeline; a second reflector arranged on the light output path of the first reflector and fixed at the corner of the output pipeline and the middle pipeline; the focusing unit is arranged on the light output path of the second reflector and fixed outside the output port of the output pipeline;

[0016] The focusing unit is used for focusing the parallel light beams to a preset position.

[0017] Optionally, the integrated terahertz generation and focusing device further includes: a filter arranged on the light output path of the first reflector, the second reflector is arranged on the light output path of the filter, and the filter is fixed in the middle pipeline;

[0018] Alternatively, the integrated terahertz generation and focusing device further includes: a filter arranged on the light output path of the convex lens, the first reflector is arranged on the light output path of the filter, and the filter is fixed in the input pipeline.

[0019] Optionally, the optical path pipeline is provided with slits for fixing components, wherein the terahertz generation unit, the convex lens, the first reflector, the second reflector, and the filter are all inserted into the corresponding slits for fixing.

[0020] Correspondingly, the present invention further provides an integrated terahertz generation and focusing device, characterized in that it includes: a terahertz generation unit, a conversion unit, a focusing unit, and an optical path pipeline; the optical path pipeline includes: a vertical pipeline;

[0021] The terahertz generation unit is used for generating terahertz waves and is fixed inside the input port of the vertical pipeline;

[0022] The conversion unit is arranged on the light output path of the terahertz generation unit. The conversion unit is configured to convert the terahertz wave into a parallel light beam and then guide the parallel light beam to be emitted to the focusing unit. Wherein, the conversion unit includes: a convex lens arranged on the light output path of the terahertz generation unit and fixed in the vertical pipeline, and the terahertz generation unit is located at the focal point of the convex lens; the focusing unit is arranged on the light output path of the convex lens and fixed outside the output port of the vertical pipeline.

[0023] The focusing unit is configured to focus the parallel light beam to a preset position.

[0024] Optionally, the integrated terahertz generation and focusing device further includes: a filter arranged on the light output path of the convex lens, the focusing unit is arranged on the light output path of the filter, and the filter is fixed in the vertical pipeline.

[0025] Optionally, the optical path pipeline is provided with slits for fixing components, and the terahertz generation unit, the convex lens and the filter are all inserted into the corresponding slits for fixing.

[0026] Correspondingly, the present invention further provides a near-field terahertz scanning system, including:

[0027] The above integrated terahertz generation and focusing device;

[0028] A sample stage;

[0029] A scanning probe microscope. During the scanning process, the focusing unit is configured to focus the parallel light beam to the probe tip of the scanning probe microscope.

[0030] And an overall bracket, and the integrated terahertz generation and focusing device, the sample stage and the scanning probe microscope are all fixed on the overall bracket.

[0031] Compared with the prior art, the technical solution provided by the present invention has at least the following advantages:

[0032] The present invention provides an integrated terahertz generation and focusing device and a near-field terahertz scanning system, including: a terahertz generation unit, a conversion unit, a focusing unit, and an optical path pipeline; the terahertz generation unit is used to generate terahertz waves; the conversion unit is arranged on the light output optical path of the terahertz generation unit, and the conversion unit is used to convert the terahertz waves into parallel light beams and then guide the parallel light beams to be emitted to the focusing unit; the focusing unit is used to focus the parallel light beams to a preset position, and the terahertz generation unit, the conversion unit, and the focusing unit are all fixedly arranged inside and outside the optical path pipeline correspondingly. As can be seen from the above content, the technical solution provided by the present invention simplifies the components of the terahertz generation and focusing device, and at the same time integrates and fixes the terahertz generation unit, the conversion unit, and the focusing unit through the optical path pipeline to achieve integration, and finally achieves the purpose of reducing the volume of the device, thereby making the device convenient to use in narrow spaces such as strong magnetic fields and extremely low temperatures, and has important significance in the measurement applications of restricted spaces. At the same time, the integration of the device is realized through the optical path pipeline, and the integrated terahertz generation and focusing device, the sample stage, and the scanning probe microscope are integrally fixed through an overall bracket. On the basis of ensuring the firmness of the overall structure of the device, it is further possible to reduce the optical path deviation phenomenon caused by vibrations and the like, and reduce the adverse effects during test measurements. In addition, the conversion unit provided by the present invention can realize two modes of splitting and non-splitting of parallel light beams; among them, the non-splitting mode can be applied to test measurements that do not require optical path delay; for the mode of splitting parallel light beams, the phase adjustment sub-unit is used to adjust the delay time of the optical path, so as to meet the requirements of different test measurements. BRIEF DESCRIPTION OF THE DRAWINGS

[0033] In order to more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the following will briefly introduce the drawings required for use in the description of the embodiments or the prior art. Obviously, the drawings in the following description are only the embodiments of the present invention. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained according to the provided drawings.

[0034] Figure 1 FIG. is a schematic structural diagram of an integrated terahertz generation and focusing device provided in Embodiment 1 of the present application;

[0035] Figure 2 FIG. is a schematic structural diagram of an integrated terahertz generation and focusing device provided in Embodiment 2 of the present application;

[0036] Figure 3 FIG. is a schematic structural diagram of an integrated terahertz generation and focusing device provided in Embodiment 3 of the present application;

[0037] Figure 4 FIG. is a schematic structural diagram of a near-field terahertz scanning system provided in Embodiment 4 of the present application. Detailed implementation manners

[0038] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part rather than all of the embodiments of the present invention. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts shall fall within the protection scope of the present invention.

[0039] As described in the background art, R & D personnel hope to apply the combined measurement of terahertz light and a scanning probe microscope to narrow spaces: such as applying it to magnets with small apertures, or applying it to an environment of extremely low temperature and ultra-high vacuum, so as to achieve the purpose of testing physical properties under extreme conditions. However, when combining terahertz light and a scanning probe microscope, the existing terahertz generation optical path and focusing optical path are both relatively complex and occupy a relatively large volume, making it unsuitable to apply this combination method to narrow spaces.

[0040] Based on this, the embodiments of the present application provide an integrated terahertz generation and focusing device and a near-field terahertz scanning system. By integrating the terahertz generation unit and the focusing unit through a conversion unit, the structure of the terahertz generation and focusing device is simplified, thereby reducing its volume and expanding its application scope. To achieve the above object, the technical solutions provided by the embodiments of the present application are as follows, specifically combined Figures 1 to 4 A detailed description of the technical solutions provided by the embodiments of the present application is given.

[0041] Embodiment 1

[0042] Refer to Figure 1 As shown, it is a schematic structural diagram of an integrated terahertz generation and focusing device provided by the embodiments of the present application. Among them, the integrated terahertz generation and focusing device includes: a terahertz generation unit 100, a conversion unit, a focusing unit 300, and an optical path pipeline; the optical path pipeline includes: a middle pipeline 520 arranged horizontally, and an input pipeline 510 and an output pipeline 530 respectively arranged vertically at both ends of the middle pipeline 520;

[0043] The terahertz generation unit 100 is used to generate terahertz waves and is fixed in the input port of the input pipeline 510;

[0044] The conversion unit is arranged on the light output path of the terahertz generation unit 100. The conversion unit is used to convert the terahertz waves into parallel light beams, and then split the parallel light beams into a first sub-parallel light beam and a second sub-parallel light beam with a phase difference, and guide both the first sub-parallel light beam and the second sub-parallel light beam to the focusing unit 300 for output;

[0045] The focusing unit 300 focuses both the first sub-parallel light beam and the second sub-parallel light beam to a preset position.

[0046] Reference Figure 1 As shown in the figure, the conversion unit provided in the embodiment of the present application includes:

[0047] A convex lens 210 disposed on the light output path of the terahertz generation unit 100 and fixed in the input pipeline 510, where the terahertz generation unit 100 is located at the focal point of the convex lens 210;

[0048] A third reflecting mirror 240 disposed on the light output path of the convex lens 210 and fixed at the corner of the input pipeline 510 and the intermediate pipeline 520;

[0049] A beam splitter 250 disposed on the light output path of the third reflecting mirror 240 and fixed in the intermediate pipeline 520;

[0050] And, a fourth reflecting mirror 260 disposed on the first beam splitting optical path (generating the first sub-parallel light beam) of the beam splitter 250 and fixed in the intermediate pipeline 520, and a phase adjustment sub-unit 270 disposed on the second beam splitting optical path (generating the second sub-parallel light beam) of the beam splitter 250 and fixed outside the intermediate pipeline 520 (such as fixed on the outer wall of the intermediate pipeline). Wherein, the fourth reflecting mirror 260 is used to reflect the first sub-parallel light beam and guide it to the focusing unit 300, and the phase adjustment sub-unit 270 is used to adjust the phase of the second sub-parallel light beam and guide it to the focusing unit 300.

[0051] As Figure 1 shown, the phase adjustment sub-unit 270 provided in the present application includes:

[0052] A displacement device 271;

[0053] And, a fifth reflecting mirror 272 disposed on the displacement device 271. Wherein, the displacement device 271 drives the fifth reflecting mirror 272 to displace to adjust the phase of the second sub-parallel light beam incident on the fifth reflecting mirror 272, and the fifth reflecting mirror 272 reflects the second sub-parallel light beam to the focusing unit 300; the focusing unit 300 is fixed outside the output port of the output pipeline 530.

[0054] It can be understood that, as shown in combination Figure 1 in the figure, the displacement device 271 drives the fifth reflecting mirror 272 to move up and down in the vertical direction, so as to change the phase of the second sub-parallel light beam incident on the fifth reflecting mirror 272.

[0055] In an embodiment of the present application, the displacement device provided by the present application may be a motor.

[0056] In an embodiment of the present application, the terahertz generation unit provided by the present application includes a photoconductive antenna or an optical crystal. And, the focusing unit provided by the embodiments of the present application is a reflective focusing mirror, and the present application does not make specific limitations thereto.

[0057] In an embodiment of the present application, as Figure 1 shown, the integrated terahertz generation and focusing device provided by the present application further includes: a filter mirror 220 disposed on the light output path of the third reflecting mirror 240, the beam splitter 250 is disposed on the light output path of the filter mirror 220, and the filter mirror 220 is fixed in the intermediate pipe 520;

[0058] Alternatively, the filter mirror provided by the embodiments of the present application may also be located on the light output path of the convex lens, that is, the integrated terahertz generation and focusing device further includes: a filter mirror disposed on the light output path of the convex lens, the third reflecting mirror is disposed on the light output path of the filter mirror, and the filter mirror is fixed in the input pipe.

[0059] It can be understood that the device provided by the embodiments of the present application is a terahertz generation and focusing device. Since the external ambient light and stray light have a great influence on the terahertz generation and focusing device, therefore, the optical path pipe included in the device provided by the embodiments of the present application may be a sealed optical path pipe, and its component devices are hermetically wrapped to avoid the influence of the external environment or other stray light on the optical path of the device. Among them, the optical path pipe may be a Z-shaped pipe composed of an input pipe, an intermediate pipe and an output pipe. And, the optical path pipe provided by the present application is provided with a slit for fixing components. Among them, the terahertz generation unit, the convex lens, the third reflecting mirror, the beam splitter, the fourth reflecting mirror and the filter mirror are all inserted into the corresponding slits for fixing, effectively reducing the influence of stray light on the terahertz generation and focusing device.

[0060] In an embodiment of the present application, the included angle between the third reflecting mirror and the convex lens provided by the present application is set at 45 degrees;

[0061] The included angle between the third reflecting mirror and the beam splitter is set at 90 degrees,

[0062] And, the included angle between the fourth reflecting mirror and the beam splitter is set at 45 degrees, and the fourth reflecting mirror reflects the first sub-parallel light beam to the beam splitter, and the beam splitter reflects the first sub-parallel light beam to the focusing unit.

[0063] Specifically, as Figure 1As shown in the figure, a terahertz generating unit 100 is provided at the orifice of the input pipeline 510. Above the terahertz generating unit 100, a convex lens 210 coaxial with the input pipeline 510 is arranged inside the input pipeline 510, and the terahertz generating unit 100 is arranged at the focal point of the convex lens 210. At the corner between the vertically arranged input pipeline 510 and the horizontally arranged intermediate pipeline 520, a third reflecting mirror 240 arranged at a 135-degree angle is provided, and the third reflecting mirror 240 reflects the parallel light beam in the vertical direction into a parallel light beam in the horizontal direction. Also, at the corner between the vertically arranged output pipeline 530 and the horizontally arranged intermediate pipeline 520, a beam splitter 250 arranged at a 45-degree angle is provided. A fourth reflecting mirror 260 vertically arranged inside the intermediate pipeline 520 is arranged in the light-transmitting and beam-splitting direction of the beam splitter 250; an optical path hole is provided in the intermediate pipeline 520 in the beam-reflecting and beam-splitting direction of the beam splitter 250, a fifth reflecting mirror 272 arranged horizontally is provided below the optical path hole, and a displacement device 271 is provided below the fifth reflecting mirror 272. A focusing unit 300 is provided at the orifice of the output pipeline 530. And a vertically placed filter 220 coaxial with the intermediate pipeline 520 is provided between the third reflecting mirror 240 and the beam splitter 250.

[0064] As can be seen from the above, the technical solution provided by the embodiment of the present application integrates the terahertz generating unit, the conversion unit, and the focusing unit through the optical path pipeline, simplifies the structure of the terahertz generating and focusing device, thereby reducing its volume and expanding its application range. Also, in the integrated terahertz generating and focusing device provided by the first embodiment of the present application, the conversion unit can also split the parallel light beam into two sub-parallel light beams with a preset phase difference and guide them into the focusing unit; that is, the conversion unit provided by the embodiment of the present application, after converting the terahertz wave into a parallel light beam, is further used to split the parallel light beam into a first sub-parallel light beam and a second sub-parallel light beam with a phase difference, and guide the first sub-parallel light beam and the second sub-parallel light beam out to the focusing unit; wherein, the focusing unit is used to focus both the first sub-parallel light beam and the second sub-parallel light beam to a preset position, further expanding the application range of the device, such as meeting the experimental requirements of a pump-probe optical coupling scanning probe microscope.

[0065] Embodiment 2

[0066] Reference Figure 2 As shown in the figure, it is a schematic structural diagram of another integrated terahertz generating and focusing device provided by the embodiment of the present application. Among them, the integrated terahertz generating and focusing device includes: a terahertz generating unit 100, a conversion unit 200, a focusing unit 300, and an optical path pipeline; the optical path pipeline includes: a horizontally arranged intermediate pipeline 520, and an input pipeline 510 and an output pipeline 530 vertically arranged at both ends of the intermediate pipeline 520;

[0067] The terahertz generation unit 100 is configured to generate terahertz waves and is fixed within the input port of the input pipe 510;

[0068] The conversion unit is disposed on the light output path of the terahertz generation unit 100. The conversion unit is configured to convert the terahertz waves into parallel light beams and then guide the parallel light beams to be emitted to the focusing unit 300;

[0069] The focusing unit 300 is configured to focus the parallel light beams to a preset position.

[0070] Wherein, the conversion unit provided in the embodiment of the present application includes:

[0071] A convex lens 210 disposed on the light output path of the terahertz generation unit 100 and fixed within the input pipe 510. The terahertz generation unit 100 is located at the focal point of the convex lens 210;

[0072] A first reflecting mirror 231 disposed on the light output path of the convex lens 210 and fixed at the corner of the input pipe 510 and the intermediate pipe 520;

[0073] A second reflecting mirror 232 disposed on the light output path of the first reflecting mirror 231 and fixed at the corner of the output pipe 530 and the intermediate pipe 520; the focusing unit 300 is disposed on the light output path of the second reflecting mirror 232 and fixed outside the output port of the output pipe 530;

[0074] In an embodiment of the present application, the terahertz generation unit provided in the present application includes a photoconductive antenna or an optical crystal. Also, the focusing unit provided in the embodiment of the present application is a reflective focusing mirror, and no specific limitation is made thereto in this application.

[0075] In an embodiment of the present application, as Figure 2 shown, the integrated terahertz generation and focusing device provided in the present application further includes: a filter 220 disposed on the light output path of the first reflecting mirror 231. The second reflecting mirror 232 is disposed on the light output path of the filter 220, and the filter 220 is fixed within the intermediate pipe 520;

[0076] Alternatively, the filter provided in the embodiment of the present application may also be located on the light output path of the convex lens, that is, the integrated terahertz generation and focusing device further includes: a filter disposed on the light output path of the convex lens. The first reflecting mirror is disposed on the light output path of the filter, and the filter is fixed within the input pipe.

[0077] It can be understood that the device provided in the embodiments of the present application is a terahertz generation and focusing device. Since external ambient light and stray light have a great influence on the terahertz generation and focusing device, the optical path pipeline included in the device provided in the embodiments of the present application can be a sealed optical path pipeline, and its component devices are hermetically wrapped to avoid the influence of the external environment or other stray light on the optical path of the device. Among them, the optical path pipeline can be a Z-shaped pipeline composed of an input pipeline, an intermediate pipeline, and an output pipeline. In addition, the optical path pipeline provided in the present application is provided with slits for fixing components. Among them, the terahertz generation unit, convex lens, first reflector, second reflector, and filter are all inserted into the corresponding slits for fixation, effectively reducing the influence of stray light on the terahertz generation and focusing device.

[0078] In an embodiment of the present application, the first reflector and the second reflector provided in the present application can be arranged in parallel;

[0079] In addition, the included angle between the first reflector and the convex lens is set at 45 degrees.

[0080] Specifically as Figure 2 shown, a terahertz generation unit 100 is provided at the nozzle of the input pipeline 510. Above the terahertz generation unit 100, a convex lens 210 coaxial with the input pipeline 510 is arranged inside the input pipeline 510, and the terahertz generation unit 100 is arranged at the focal point of the convex lens 210. At the corner between the vertically arranged input pipeline 510 and the horizontally arranged intermediate pipeline 520, a first reflector 231 arranged at a 135-degree angle is provided, and the first reflector 231 reflects the parallel light beam in the vertical direction into a parallel light beam in the horizontal direction. In addition, at the corner between the vertically arranged output pipeline 530 and the horizontally arranged intermediate pipeline 520, a second reflector 232 arranged at a 45-degree angle is provided, and there is a vertically placed filter 220 coaxial with the intermediate pipeline 520 between the first reflector 231 and the second reflector 232; among them, the second reflector 232 reflects the parallel light beam in the horizontal direction into a parallel light beam in the vertical direction, and outputs it to the focusing unit 300 located at the nozzle of the output pipeline 530 through the output pipeline 530.

[0081] As can be seen from the above, the technical solution provided in the embodiments of the present application integrates the terahertz generation unit, conversion unit, and focusing unit through the optical path pipeline, simplifies the structure of the terahertz generation and focusing device, thereby reducing its volume and expanding its application scope.

[0082] Embodiment III

[0083] Refer to Figure 3As shown in the figure, it is a schematic structural diagram of an integrated terahertz generation and focusing device provided by an embodiment of the present application. Among them, the integrated terahertz generation and focusing device includes: a terahertz generation unit 100, a conversion unit 200, a focusing unit 300, and an optical path pipeline; the optical path pipeline includes: a vertical pipeline 400;

[0084] The terahertz generation unit 100 is used to generate terahertz waves and is fixed inside the input port of the vertical pipeline 400;

[0085] The conversion unit is arranged on the light output path of the terahertz generation unit 100. The conversion unit is used to convert the terahertz waves into parallel light beams and then guide the parallel light beams to be emitted to the focusing unit 300;

[0086] The focusing unit 300 is used to focus the parallel light beams to a preset position.

[0087] Moreover, the conversion unit provided by the embodiment of the present application includes:

[0088] A convex lens 210 arranged on the light output path of the terahertz generation unit 100 and fixed inside the vertical pipeline 400. The terahertz generation unit 100 is located at the focal point of the convex lens 210. Furthermore, the convex lens 210 converts the terahertz waves into parallel light beams; the focusing unit 300 is arranged on the light output path of the convex lens 210 and fixed outside the output port of the vertical pipeline 400.

[0089] In an embodiment of the present application, the terahertz generation unit provided by the present application includes a photoconductive antenna or an optical crystal. Moreover, the focusing unit provided by the embodiment of the present application is a reflective focusing mirror, and no specific limitation is made in this regard.

[0090] In an embodiment of the present application, as Figure 3 shown, the integrated terahertz generation and focusing device provided by the present application further includes: a filter 220 arranged on the light output path of the convex lens 210. The focusing unit 300 is arranged on the light output path of the filter 220, and the filter 220 is fixed in the vertical pipeline 400.

[0091] It can be understood that the device provided in the embodiments of the present application is a terahertz generation and focusing device. Since the external ambient light and stray light have a great influence on the terahertz generation and focusing device, the optical path pipeline included in the device provided in the embodiments of the present application can be a sealed optical path pipeline, and its component devices are hermetically wrapped to avoid the influence of the external environment or other stray light on the optical path of the device. In addition, a slit for fixing components is provided on the optical path pipeline provided in the embodiments of the present application. Among them, the terahertz generation unit, the convex lens, and the filter are all inserted into the corresponding slits for fixation, effectively reducing the influence of stray light on the terahertz generation and focusing device.

[0092] Specifically, as Figure 2 shown, a terahertz generation unit 100 is provided at the lower nozzle of the vertical pipeline 400. Above the terahertz generation unit 100, a horizontally placed convex lens 210 is provided, where the terahertz generation unit 100 is located at the focal point of the convex lens 210. In addition, a horizontally placed filter 220 is provided above the convex lens 210, and a focusing unit 300 is provided above the filter 220.

[0093] As can be seen from the above, the present application Figure 1 The integrated terahertz generation and focusing device shown is composed of a terahertz generation unit, a convex lens, a filter, and a focusing unit. The structure of the terahertz generation and focusing device is simple and small in size, expanding the application range of the terahertz generation and focusing device.

[0094] Embodiment 4

[0095] Correspondingly, the embodiments of the present application also provide a near-field terahertz scanning system. Referring to Figure 4 shown, it is a schematic structural diagram of a near-field terahertz scanning system provided by the embodiments of the present application. Among them, the near-field terahertz scanning system includes:

[0096] The integrated terahertz generation and focusing device 1000 provided in any of the above embodiments;

[0097] A sample stage 2000;

[0098] A scanning probe microscope 3000. During the scanning process, the focusing unit 300 is used to focus the parallel light beam onto the probe tip 3001 of the scanning probe microscope 3000;

[0099] In addition, an overall bracket 4000, and the integrated terahertz generation and focusing device 1000, the sample stage 2000, and the scanning probe microscope 3000 are all fixed on the overall bracket 4000.

[0100] In any of the above embodiments of the present application, the present application does not specifically limit the fixing manner of the provided terahertz generation unit, convex lens, filter, mirror, and beam splitter to the optical path pipeline. Among them, slits can be made on the optical path pipeline, and then the terahertz generation unit, convex lens, filter, mirror, and beam splitter are inserted into the corresponding slits. After adjusting the positions of the components in the slits, they are fixed by bonding or other means. On the basis of ensuring the firmness of the device, the position is fixed only by fine-tuning in the slits, ensuring that the manufacturing and assembly processes are simpler; alternatively, the optical path pipeline provided by the present application is composed of two half-structures divided along the optical path direction. Among them, after the terahertz generation unit, convex lens, filter, mirror, and beam splitter are fixed inside the tube of one half-structure, they are fixed in alignment with the other half-structure to fix the components in the pipeline of the optical path pipeline. The present application does not make specific limitations on this.

[0101] The present invention provides an integrated terahertz generation and focusing device and a near-field terahertz scanning system, including: a terahertz generation unit, a conversion unit, a focusing unit, and an optical path pipeline; the terahertz generation unit is used to generate terahertz waves; the conversion unit is arranged on the light output optical path of the terahertz generation unit, and the conversion unit is used to convert the terahertz waves into parallel light beams and then guide the parallel light beams out to the focusing unit; the focusing unit is used to focus the parallel light beams to a preset position, and the terahertz generation unit, the conversion unit, and the focusing unit are all fixed inside and outside the optical path pipeline correspondingly. As can be seen from the above content, the technical solution provided by the present invention simplifies the components of the terahertz generation and focusing device, and at the same time integrates and fixes the terahertz generation unit, the conversion unit, and the focusing unit through the optical path pipeline to achieve integration, and finally achieves the purpose of reducing the volume of the device. The size of the device can be as low as 60 mm; furthermore, it makes the device easy to use in narrow spaces such as strong magnetic fields and extremely low temperatures, and has important significance in measurement applications in limited spaces. At the same time, the integration of the device is achieved through the optical path pipeline, and the integrated terahertz generation and focusing device, the sample stage, and the scanning probe microscope are integrally fixed through an overall bracket. On the basis of ensuring the firmness of the overall structure of the device, it is further possible to reduce the optical path deviation phenomenon caused by vibrations and other factors, and reduce the adverse effects during test measurements. In addition, the conversion unit provided by the present application can achieve two modes of splitting and not splitting the parallel light beam; among them, the non-splitting mode can be applied to test measurements that do not require optical path delay; for the mode of splitting the parallel light beam, the phase adjustment sub-unit is used to adjust the delay time of the optical path, so as to meet the requirements of different test measurements.

[0102] The foregoing description of the disclosed embodiments enables those skilled in the art to practice or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Thus, the present invention is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. An integrated terahertz generation and focusing device, characterized in that Comprising: A terahertz generation unit, a conversion unit, a focusing unit, and an optical path pipeline; the optical path pipeline includes: an intermediate pipeline arranged horizontally, and an input pipeline and an output pipeline respectively arranged vertically at both ends of the intermediate pipeline; The terahertz generation unit is used to generate terahertz waves and is fixed within the input port of the input pipeline; the terahertz generation unit includes a photoconductive antenna or an optical crystal; The conversion unit is arranged on the light output path of the terahertz generation unit. The conversion unit is used to convert the terahertz wave into a parallel light beam, and then split the parallel light beam into a first sub-parallel light beam and a second sub-parallel light beam with a phase difference, and guide both the first sub-parallel light beam and the second sub-parallel light beam out to the focusing unit; wherein, the conversion unit includes: a convex lens arranged on the light output path of the terahertz generation unit and fixed within the input pipeline, and the terahertz generation unit is located at the focal point of the convex lens; a third reflector arranged on the light output path of the convex lens and fixed at the corner of the input pipeline and the intermediate pipeline; a beam splitter arranged on the light output path of the third reflector and fixed within the intermediate pipeline; and, a fourth reflector arranged on the first beam splitting light path of the beam splitter and fixed within the intermediate pipeline, and a phase adjustment sub-unit arranged on the second beam splitting light path of the beam splitter and fixed outside the intermediate pipeline, and the second beam splitting light path corresponds to the optical path hole of the intermediate pipeline; wherein, the fourth reflector is used to reflect the first sub-parallel light beam and guide it out to the focusing unit; and the phase adjustment sub-unit and the phase adjustment sub-unit includes: a displacement device and a fifth reflector arranged on the displacement device, wherein, the displacement device drives the fifth reflector to displace to adjust the phase of the second sub-parallel light beam incident on the fifth reflector, and the fifth reflector reflects the second sub-parallel light beam to the focusing unit; the focusing unit is fixed outside the output port of the output pipeline; The focusing unit is used to focus both the first sub-parallel light beam and the second sub-parallel light beam to a preset position.

2. The integrated terahertz generation and focusing device according to claim 1, characterized in that The integrated terahertz generation and focusing device further includes: a filter arranged on the light output path of the third reflector, the beam splitter is arranged on the light output path of the filter, and the filter is fixed within the intermediate pipeline; the included angle between the third reflector and the beam splitter is set at 90 degrees; Or, the integrated terahertz generation and focusing device further includes: a filter arranged on the light output path of the convex lens, the third reflector is arranged on the light output path of the filter, and the filter is fixed within the input pipeline.

3. The integrated terahertz generation and focusing device according to claim 2, wherein The optical path pipeline is provided with slits for fixing components, wherein, the terahertz generation unit, the convex lens, the third reflector, the beam splitter, the fourth reflector, and the filter are all inserted into the corresponding slits for fixing; the optical path pipeline is a sealed optical path pipeline.

4. An integrated terahertz generation and focusing device, characterized in that, Comprising: A terahertz generation unit, a conversion unit, a focusing unit, and an optical path pipeline; the optical path pipeline includes: a horizontally arranged intermediate pipeline, and an input pipeline and an output pipeline vertically arranged at both ends of the intermediate pipeline respectively; The terahertz generation unit is used for generating terahertz waves and is fixed inside the input port of the input pipeline; the terahertz generation unit includes a photoconductive antenna or an optical crystal; The conversion unit is arranged on the light output path of the terahertz generation unit. The conversion unit is used for converting the terahertz wave into a parallel light beam and then guiding the parallel light beam to be emitted to the focusing unit; wherein, a convex lens arranged on the light output path of the terahertz generation unit and fixed inside the input pipeline, the terahertz generation unit is located at the focal point of the convex lens; a first reflector arranged on the light output path of the convex lens and fixed at the corner of the input pipeline and the intermediate pipeline; a second reflector arranged on the light output path of the first reflector and fixed at the corner of the output pipeline and the intermediate pipeline; the focusing unit is arranged on the light output path of the second reflector and fixed outside the output port of the output pipeline; The focusing unit is used for focusing the parallel light beam to a preset position.

5. The integrated terahertz generation and focusing device according to claim 4, characterized in that The integrated terahertz generation and focusing device further includes: a filter arranged on the light output path of the first reflector, the second reflector is arranged on the light output path of the filter, and the filter is fixed in the intermediate pipeline; Or, the integrated terahertz generation and focusing device further includes: a filter arranged on the light output path of the convex lens, the first reflector is arranged on the light output path of the filter, and the filter is fixed in the input pipeline; the included angle between the first reflector and the convex lens is set at 45 degrees.

6. The integrated terahertz generation and focusing device according to claim 5, characterized in that The optical path pipeline is provided with slits for fixing components. Among them, the terahertz generation unit, the convex lens, the first reflector, the second reflector, and the filter are all inserted into the corresponding slits for fixing; the optical path pipeline is a sealed optical path pipeline.

7. An integrated terahertz generation and focusing device, characterized in that, Including: A terahertz generation unit, a conversion unit, a focusing unit, and an optical path pipeline; the optical path pipeline includes: a vertical pipeline; The terahertz generation unit is used for generating terahertz waves and is fixed inside the input port of the vertical pipeline; the terahertz generation unit includes a photoconductive antenna or an optical crystal; The conversion unit is arranged on the light output path of the terahertz generation unit. The conversion unit is used for converting the terahertz wave into a parallel light beam and then guiding the parallel light beam to be emitted to the focusing unit; wherein, the conversion unit includes: a convex lens arranged on the light output path of the terahertz generation unit and fixed inside the vertical pipeline, the terahertz generation unit is located at the focal point of the convex lens; the focusing unit is arranged on the light output path of the convex lens and fixed outside the output port of the vertical pipeline; The focusing unit is used for focusing the parallel light beam to a preset position.

8. The integrated terahertz generation and focusing device according to claim 7, characterized in that The integrated terahertz generation and focusing device further includes: a filter disposed on the light output path of the convex lens, the focusing unit is disposed on the light output path of the filter, and the filter is fixed in the vertical pipe; the focusing unit is a reflective focusing mirror.

9. The integrated terahertz generation and focusing device according to claim 8, wherein The optical path pipe is provided with slits for fixing components, wherein the terahertz generation unit, the convex lens and the filter are all inserted into the corresponding slits for fixing; the optical path pipe is a sealed optical path pipe.

10. A near-field terahertz scanning system, characterized in that, Comprising: The integrated terahertz generation and focusing device according to any one of claims 1 to 9; A sample stage; A scanning probe microscope, during scanning, the focusing unit is used to focus the parallel light beam onto the probe tip of the scanning probe microscope; And an overall bracket, the integrated terahertz generation and focusing device, the sample stage and the scanning probe microscope are all fixed on the overall bracket.

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