A multifunctional wafer fixture

Abstract

The present invention discloses a multifunctional wafer clamp, which belongs to the field of chip processing technology, and comprises a first box body and a second box body which are rotatably connected, wherein the first box body and the second box body are both provided with a storage cavity and a pair of wafer clamping hooks installed in the storage cavity, wherein the wafer clamping hooks can extend from the storage cavity, and the wafer clamping hooks include a hook body whose direction can be adjusted. The present invention can clamp wafers placed vertically or horizontally, is convenient for storing unused wafer clamping hooks, is convenient to carry, and has various functions.

Description

Technical Field

[0001] The present invention belongs to the field of chip processing technology, and specifically relates to a multifunctional wafer fixture. Background Art

[0002] Wafer processing is an important part of the semiconductor manufacturing process. The wafer processing process involves many steps, including wafer removal, cleaning, gluing, drying and photolithography. In this process, the wafer is placed from a vertically placed multi-wafer box to a single wafer box or culture dish, and then adsorbed on the operating table. During the processing, flat-mouth tweezers are used to clamp the wafer, but the wafer is prone to slipping and breaking; in order to prevent the wafer from slipping, multiple clamps are often used in combination to achieve vertical and horizontal wafer clamping, but the number of clamps used is increased, which is not convenient for carrying and switching. Summary of the invention

[0003] The purpose of the present invention is to overcome the deficiencies in the prior art and provide a multifunctional wafer clamp that can clamp vertically or horizontally placed wafers, is convenient for storing unused wafer clamp hooks, is easy to carry, and has multiple functions.

[0004] The present invention provides the following technical solutions:

[0005] A multifunctional wafer clamp comprises a first box body and a second box body which are rotatably connected. The first box body and the second box body are both provided with a storage cavity and a pair of wafer clamping hooks installed in the storage cavity. The wafer clamping hooks can extend from the storage cavity, and the wafer clamping hooks include a hook body with adjustable direction.

[0006] Preferably, the storage cavity is in an open type, and the wafer clamp hook further comprises a first connecting rod rotatably connected to the hook body and a connecting post rotatably connected to the first connecting rod.

[0007] Preferably, the connecting column is installed in the storage cavity through a rotary column, and the rotation angle of the rotary column is 0-30°.

[0008] Preferably, a through hole is provided in the center of the connecting column, a concave rotating bracket is fixedly connected to the first connecting rod, a central axis passing through the through hole is provided on the rotating bracket, and an outer diameter of the central axis is smaller than a diameter of the through hole.

[0009] Preferably, the storage cavity is arranged inside the first box body and the second box body and is open at the ends, and the surfaces of the first box body and the second box body are provided with sliding grooves; the wafer clamp hook also includes a second connecting rod rotatably connected to the hook body and a sliding assembly fixed to the second connecting rod, and the sliding assembly can slide along the sliding groove.

[0010] Preferably, the sliding assembly includes a slider, a limiting column passing through the slider, and a push block fixedly connected to the limiting column, the push block is located outside the slide groove, the limiting column passes through the slide groove and can slide relative to the slide groove, and the slider is arranged in the storage cavity.

[0011] Preferably, the limiting column can move relative to the sliding block, and the inner wall of the storage cavity on one side opposite to the sliding groove is provided with two limiting grooves capable of engaging the limiting column, and the two limiting grooves correspond to two ends of the sliding groove.

[0012] Preferably, the storage cavity is arranged inside the first box body and the second box body and is open on both sides, and a pair of columns are provided at the end of the storage cavity; the wafer clamp hook also includes a third connecting rod rotatably connected to the hook body and a sleeve fixed to the third connecting rod, and the sleeve is sleeved on the outside of the column and can rotate relative to the column.

[0013] Preferably, the first box body and the second box body are relatively fixed by a locking assembly, and the locking assembly includes a locking shell and a locking block which are rotatably connected to the first box body and the second box body respectively through a rotating shaft; the locking shell includes a locking cavity and periodically distributed card grooves located on both sides of the locking cavity, the locking block can slide in the locking cavity, and the end of the locking block is provided with an elastic card block that can engage with the card groove.

[0014] Preferably, the first box body is provided with a blade storage cavity on the side, and a blade that can be rotatably protruded is installed in the blade storage cavity.

[0015] Compared with the prior art, the present invention has the following beneficial effects:

[0016] (1) In the present invention, the first box body and the second box body equipped with wafer clamps can rotate relative to each other. When the first box body and the second box body are rotated to an angle of 180°, two wafer clamps in one of the boxes can be used to clamp a vertically placed wafer; when the first box body and the second box body are rotated to an angle less than 180°, four wafer clamps in the two boxes can be used to clamp a horizontally placed wafer, which has multiple functions.

[0017] (2) The wafer clamp hook includes a hook body with an adjustable direction, so as to adapt to wafer clamping of different sizes;

[0018] (3) The wafer clamp hook extends out of the storage cavity when used and is stored in the storage cavity when not in use. It can protect the wafer clamp hook from damage and is convenient for carrying;

[0019] (4) The wafer clamping of the present invention has good stability, the wafer is not easy to fall off and break, and does not need to be used in conjunction with other tools, making it easy to operate. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 It is a schematic diagram of the structure of the present invention in Example 1;

[0021] Figure 2 yes Figure 1 Schematic diagram of the structure of the middle connecting column;

[0022] Figure 3 yes Figure 1 A schematic structural diagram of the first connecting rod;

[0023] Figure 4 It is a schematic diagram of the structure of the hook body;

[0024] Figure 5 It is a structural diagram of the vertically placed wafer in the present invention in Example 1;

[0025] Figure 6 It is a structural diagram of the horizontally placed wafer in the present invention in Example 1;

[0026] Figure 7 It is a structural diagram of the second box body and the hook body in Example 2;

[0027] Figure 8 yes Figure 7 A schematic diagram of the structure of the second box body;

[0028] Fig. 9 yes Figure 7 A schematic diagram of the structure of the sliding component during sliding;

[0029] Fig.10 yes Figure 7 A schematic diagram of the structure of the middle sliding assembly when it is fixed;

[0030] Fig.11 It is a structural diagram of the second box body and the hook body in Example 3;

[0031] Fig.12 yes Fig.11 A schematic diagram of the structure of the second box body;

[0032] Fig.13 yes Fig.11 Schematic diagram of the structure of the neutral column;

[0033] Fig.14 is a schematic diagram of the structure of the locking shell;

[0034] Fig.15 It is a schematic diagram of the structure of the locking block;

[0035] Markings in the figure are: 1. first box body; 2. second box body; 3. connecting column; 4. first connecting rod; 5. hook body; 6. blade; 7. locking assembly; 71. locking shell; 72. locking block; 73. locking cavity; 74. card slot; 75. elastic card block; 76. rotating shaft; 8. sliding assembly; 81. push block; 82. limiting column; 83. sliding block; 9. column; 10. storage cavity; 11. blade storage cavity; 12. rotating column; 13. through hole; 14. rotating bracket; 15. central axis; 16. slide groove; 17. limiting groove; 18. second connecting rod; 19. third connecting rod; 20. sleeve. DETAILED DESCRIPTION

[0036] The present invention will be further described below in conjunction with the accompanying drawings. The following embodiments are only used to more clearly illustrate the technical solution of the present invention, and cannot be used to limit the protection scope of the present invention.

[0037] It should be noted that, in the description of the present invention, the directions or positional relationships indicated by terms such as "front", "rear", "left", "right", "up", "down", "inside" and "outside" are based on the directions or positional relationships shown in the accompanying drawings. They are only for the convenience of describing the present invention and do not require that the present invention must be constructed and operated in a specific direction. Therefore, they should not be understood as limitations on the present invention.

[0038] Example 1

[0039] like Figure 1 As shown, a multifunctional wafer clamp includes a first box body 1 and a second box body 2 which are rotatably connected, and the angle formed between the two is in the range of 60-180°. The first box body 1 and the second box body 2 are both provided with a storage cavity 10 and a pair of wafer clamping hooks installed in the storage cavity 10. The wafer clamping hook can extend from the storage cavity 10, and the wafer clamping hook includes a hook body 5 whose direction can be adjusted, and the rotation angle range of the hook body 5 is 0-90°.

[0040] like Figure 1 and 2 As shown, the storage cavity 10 is open, and the wafer clamp hook further includes a first connecting rod 4 rotatably connected to the hook body 5 and a connecting column 3 rotatably connected to the first connecting rod 4. The connecting column 3 is installed in the storage cavity 10 through a rotating column 12, and the rotating angle of the rotating column 12 is 0-30°.

[0041] like Figure 2-4 As shown, a through hole 13 is provided in the center of the connecting column 3, and the first connecting rod 4 is fixedly connected with a concave rotating bracket 14. The rotating bracket 14 is provided with a central axis 15 passing through the through hole 13. The outer diameter of the central axis 15 is smaller than the diameter of the through hole 13, so that the first connecting rod 4 can rotate around the central axis 15 as the center, and the rotation angle range is 0-180°, so that the hook body 5 can be extended from the storage cavity 10.

[0042] like Figure 1 , 14 As shown in Figure 15, the first box body 1 and the second box body 2 are relatively fixed by a locking assembly 7. The locking assembly 7 includes a locking shell 71 and a locking block 72 which are rotatably connected to the first box body 1 and the second box body 2 respectively through a rotating shaft 76; the locking shell 71 includes a locking cavity 73 and periodically distributed card grooves 74 located on both sides of the locking cavity 73, and the locking block 72 can slide in the locking cavity 73. The end of the locking block 72 is provided with an elastic card block 75 that can be engaged with the card groove 74. The elastic card block 75 is T-shaped. Pressing the elastic card block 75 can compress it to achieve the sliding of the locking block 72 in the locking cavity 73. When no external force is applied to the elastic card block 75, the elastic card block 75 is stuck in the card groove 74, so that the first box body 1 and the second box body 2 are relatively fixed, and the wafer is prevented from slipping due to loosening during the clamping process.

[0043] like Figure 1 As shown, a blade storage cavity 11 is provided on the side of the first box body 1, and a rotatable and extended blade 6 is installed in the blade storage cavity 11. The rotation angle range of the blade 6 is 0-180 degrees. The blade 6 can be used to lift the wafer adsorbed on the platform without carrying additional tools, and at the same time can increase the functionality of the wafer clamp in this embodiment.

[0044] like Figure 5 As shown, the first box body 1 and the second box body 2 are rotated to an angle of 180°, and the positions of the two are fixed by the locking assembly 7; the first connecting rod 4 in the first box body 1 is rotated around the central axis 15 (connecting column 3) to extend the hook body 5 from the storage cavity 10, the connecting column 3 is rotated to adjust the angle between the two hook bodies 5, and then the hook body 5 is rotated to a suitable direction, at which time the vertically placed wafer can be clamped.

[0045] like Figure 6 As shown, in the same manner as in the previous section, the wafer clamping hooks in the first box body 1 and the second box body 2 are rotated out of the storage cavity 10 and adjusted to a suitable position; then the first box body 1 and the second box body 2 are rotated to an angle less than 180°, and the positions of the two are fixed by a locking assembly 7; after adjusting the direction of the hook body 5, the horizontally placed wafer can be smoothly clamped.

[0046] like Figure 1 As shown, for a wafer tightly adsorbed on the operating table, the blade 6 is first rotated and extended, and the wafer is lifted before clamping. After use, the wafer clamping hook can be stored in the storage cavity 10 by rotating the hook body 5, the connecting column 3 and the first connecting rod 4.

[0047] Example 2

[0048] like Figure 7As shown, a multifunctional wafer clamp includes a first box body and a second box body 2 which are rotatably connected, and the angle range that can be formed between the two is 60-180°. The first box body and the second box body 2 are relatively fixed by a locking assembly. The first box body and the second box body 2 are both provided with a storage cavity 10 and a pair of wafer clamping hooks installed in the storage cavity 10. The wafer clamping hook can extend from the storage cavity 10, and the wafer clamping hook includes a hook body 5 whose direction can be adjusted, and the rotation angle range of the hook body 5 is 0-90°.

[0049] like Figure 7 , 8 As shown, the storage cavity 10 is arranged inside the first box body and the second box body 2 and has open ends. The surfaces of the first box body and the second box body 2 are provided with slide grooves 16; the wafer clamp hook also includes a second connecting rod 18 rotatably connected to the hook body 5 and a sliding assembly 8 fixed to the second connecting rod 18, and the sliding assembly 8 can slide along the slide groove 16.

[0050] like Figure 8 , 9 As shown, the sliding assembly 8 includes a slider 83, a limiting column 82 passing through the slider 83, and a push block 81 fixedly connected to the limiting column 82, the push block 81 is located outside the slide slot 16, the limiting column 82 passes through the slide slot 16 and can slide relative to the slide slot 16, and the slider 83 is arranged in the storage cavity 10. The limiting column 82 can move relative to the slider 83, and the inner wall of the storage cavity 10 on one side opposite to the slide slot 16 is provided with two limiting grooves 17 capable of engaging the limiting column 82, and the two limiting grooves 17 correspond to the two ends of the slide slot 16.

[0051] like Figure 7-8 As shown, the first box body and the second box body 2 are rotated to an angle of 180° to lock the assembly to fix both; in the initial state, the limiting column 82 is stuck in the inner limiting slot (such as Fig.10 At this time, the push block 81 on the second box body 2 is pulled to disengage the limiting column 82 from the limiting slot (such as Fig. 9 As shown), push the push block 81 so that the sliding assembly 8 drives the hook body 5 to move out of the storage cavity 10. When it moves to the end of the slide slot 16, press the push block 81, and the limiting column 82 is stuck in the limiting slot 17 at the opening of the storage cavity 10. Then rotate the push block 81 to make the two hook bodies 5 form a suitable angle, and then rotate the hook body 5 to a suitable direction. At this time, the vertically placed wafer can be clamped. In the same way as above, push the wafer clamping hooks in the first box body and the second box body 2 out of the storage cavity 10; then rotate the first box body and the second box body 2 to an angle less than 180° to lock the position of the two; after adjusting the direction of the hook body 5, the horizontally placed wafer can be clamped smoothly. After use, push the sliding assembly 8 to retract the hook body 5 into the storage cavity 10 for storage.

[0052] Example 3

[0053] like Fig.11 As shown, a multifunctional wafer clamp includes a first box body and a second box body 2 which are rotatably connected, and the angle range that can be formed between the two is 60-180°. The first box body and the second box body 2 are relatively fixed by a locking assembly. The first box body and the second box body 2 are both provided with a storage cavity 10 and a pair of wafer clamping hooks installed in the storage cavity 10. The wafer clamping hook can extend from the storage cavity 10, and the wafer clamping hook includes a hook body 5 whose direction can be adjusted, and the rotation angle range of the hook body 5 is 0-90°.

[0054] like Figure 11-13 As shown, the storage cavity 10 is arranged inside the first box body and the second box body 2 and is open on both sides, and a pair of columns 9 are provided at the end of the storage cavity 10; the wafer clamp hook also includes a third connecting rod 19 rotatably connected to the hook body 5 and a sleeve 20 fixed to the third connecting rod 19, the sleeve 20 is sleeved on the outside of the column 9 and can rotate relative to the column 9, and the rotation angle range is 0-150°.

[0055] like Figure 11-13 As shown, the first box body and the second box body 2 are rotated to an angle of 180°, and the locking assembly is used to fix the positions of the two; the wafer clamping hook in the second box body 2 is rotated to rotate the sleeve 20 around the column 9, the hook body 5 is turned out from the storage cavity 10 and forms a suitable angle, and then the hook body 5 is turned to a suitable direction, at which time the vertically placed wafer can be clamped. In the same manner as above, the wafer clamping hooks in the first box body and the second box body 2 are turned out from the storage cavity 10; then the first box body and the second box body 2 are rotated to an angle less than 180°, and the locking assembly is used to fix the positions of the two; after adjusting the direction of the hook body 5, the horizontally placed wafer can be clamped smoothly. After use, the hook body 5 can be retracted into the storage cavity 10 for storage by rotating it.

[0056] The above is only a preferred embodiment of the present invention. It should be pointed out that for ordinary technicians in this technical field, several improvements and modifications can be made without departing from the technical principles of the present invention. These improvements and modifications should also be regarded as the scope of protection of the present invention.

Claims

1. A multifunctional wafer clamp, characterized in that: The invention comprises a first box body and a second box body which are rotatably connected, wherein the angle formed between the first box body and the second box body is in the range of 60°-180°, wherein the first box body and the second box body are both provided with a storage cavity and a pair of wafer clamping hooks installed in the storage cavity, wherein the wafer clamping hooks can extend from the storage cavity, and wherein the wafer clamping hooks include a hook body whose direction can be adjusted; The first box body and the second box body are relatively fixed by a locking assembly, and the locking assembly includes a locking shell and a locking block which are rotatably connected to the first box body and the second box body respectively through a rotating shaft; the locking shell includes a locking cavity and periodically distributed card grooves located on both sides of the locking cavity, the locking block can slide in the locking cavity, and the end of the locking block is provided with an elastic card block which can engage with the card groove.

2. The multifunctional wafer clamp according to claim 1, characterized in that: The storage cavity is open, and the wafer clamp hook further includes a first connecting rod rotatably connected to the hook body and a connecting column rotatably connected to the first connecting rod.

3. The multifunctional wafer clamp according to claim 2, characterized in that: The connecting column is installed in the storage cavity through a rotating column, and the rotation angle of the rotating column is 0-30°.

4. The multifunctional wafer clamp according to claim 3, characterized in that: A through hole is provided in the center of the connecting column, a concave rotating bracket is fixedly connected to the first connecting rod, a central axis passing through the through hole is provided on the rotating bracket, and an outer diameter of the central axis is smaller than a diameter of the through hole.

5. The multifunctional wafer clamp according to claim 1, characterized in that: The storage cavity is arranged inside the first box body and the second box body and has open ends. The surfaces of the first box body and the second box body are provided with sliding grooves. The wafer clamp hook also includes a second connecting rod rotatably connected to the hook body and a sliding component fixed to the second connecting rod, and the sliding component can slide along the sliding groove.

6. The multifunctional wafer clamp according to claim 5, characterized in that: The sliding assembly includes a slider, a limiting column passing through the slider, and a push block fixedly connected to the limiting column, the push block is located outside the slide groove, the limiting column passes through the slide groove and can slide relative to the slide groove, and the slider is arranged in the storage cavity.

7. The multifunctional wafer chuck according to claim 6, characterized in that: The limiting column can move relative to the sliding block, and the inner wall of the storage cavity on one side opposite to the sliding groove is provided with two limiting grooves capable of engaging the limiting column, and the two limiting grooves correspond to two ends of the sliding groove.

8. The multifunctional wafer clamp according to claim 1, characterized in that: The storage cavity is arranged inside the first box body and the second box body and is open on both sides, and a pair of columns are provided at the ends of the storage cavity; the wafer clamp hook also includes a third connecting rod rotatably connected to the hook body and a sleeve fixed to the third connecting rod, and the sleeve is sleeved on the outside of the column and can rotate relative to the column.

9. The multifunctional wafer clamp according to any one of claims 1 to 8, characterized in that: A blade storage cavity is provided on the side of the first box body, and a blade capable of rotating and extending is installed in the blade storage cavity.

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