A high-precision micro-motion platform

Abstract

The invention relates to the field of control, and in particular to a high-precision micro-motion platform; the micro-motion platform comprises a top mounting platform and a bottom base, wherein an RY-axis rotating platform, an RZ-axis rotating platform, a Z-axis lifting platform, a Y-axis translation platform and an X-axis translation platform are arranged between the mounting platform and the base, the RY-axis rotating platform is connected to the Z-axis lifting platform, the Z-axis lifting platform is connected to the Y-axis translation platform through the RZ-axis rotating platform, the Y-axis translation platform is connected to the X-axis translation platform, the RY-axis rotating platform can realize a rotation angle around the Y-axis, the micro-motion platform of the invention belongs to a micro-motion platform of a pure mechanical structure, has strong environmental adaptability, high reliability and high precision, and can accurately adjust the displacement in three directions of the X-axis, the Y-axis and the Z-axis and the rotation angle changes around the Z-axis and the Y-axis.

Description

Technical Field

[0001] The invention relates to the field of control, and in particular to a high-precision micro-motion platform. Background Art

[0002] With the continuous development of science and technology, remote detection and positioning technology has been widely used in various fields, which further improves the accuracy requirements of the applied equipment. At present, most of the high-precision micro-motion platforms on the market are mainly electronically controlled. The disadvantages and advantages of electronically controlled equipment are relatively clear, and the requirements for the environment in which they are used are relatively high, which restricts the scope of application of electronically controlled equipment. Summary of the invention

[0003] In view of the problems mentioned in the prior art, the purpose of the present invention is to provide a high-precision micro-motion platform which is purely mechanical, not affected by the use environment factors, has high control accuracy, high reliability and stable control.

[0004] The present invention discloses a high-precision micro-motion platform, comprising an installation platform at the top and a base at the bottom. An RY-axis rotating platform, an RZ-axis rotating platform, a Z-axis lifting platform, a Y-axis translation platform and an X-axis translation platform are arranged between the installation platform and the base. The RY-axis rotating platform is connected to the Z-axis lifting platform, the Z-axis lifting platform is connected to the Y-axis translation platform through the RZ-axis rotating platform, the Y-axis translation platform is connected to the X-axis translation platform, the RY-axis rotating platform can realize a rotation angle around the Y-axis, the RZ-axis rotating platform can realize a rotation angle around the Z-axis, the X-axis translation platform, the Y-axis translation platform and the Z-axis lifting platform can respectively realize movement along the X-axis, the Y-axis and the Z-axis, and the displacement change and the angle change of the installation platform are realized by cooperating with a plurality of platforms.

[0005] Preferably, the RY-axis rotating platform also includes a RY-axis wedge block, a fixed block, a first fine-tuning screw, a first locking screw, and a first return spring. A rotation adjustment slot is provided on the RY-axis rotating platform, a first dovetail groove is provided at the bottom of the rotation adjustment slot, and a first guide rail is provided at the bottom of the first dovetail groove, wherein fixed blocks are provided at both ends of the first dovetail groove, and the first dovetail groove is also connected to a RY-axis wedge block of matching shape, the first fine-tuning screw is connected to the RY-axis wedge block through the first return spring, and the first locking screw is connected to one end of the RY-axis rotating platform.

[0006] Preferably, the Z-axis lifting platform also includes a Z-axis wedge block, a second locking screw, a second fine-tuning screw and a second return spring. A second dovetail groove is opened on the Z-axis lifting platform, and first countersunk grooves are also provided at both ends of the second dovetail groove, wherein the second dovetail groove is matched and connected with the first guide rail, the Z-axis wedge block passes through the first countersunk groove and cooperates with the first guide rail, the second fine-tuning screw is connected to the Z-axis wedge block, the second return spring is arranged between the second dovetail groove and the first guide rail, and the second locking screw is connected to one end of the Z-axis lifting platform.

[0007] Preferably, the RZ-axis rotation platform is installed in the Y-axis translation platform, and also includes an RZ-axis wedge block, a third locking screw, a third fine-tuning screw and a third return spring. A cylindrical pin is provided on one end of the RZ-axis rotation platform, and the cylindrical pin cooperates with the RZ-axis wedge block. The other end is also connected to the third return spring, wherein the third fine-tuning screw passes through the Y-axis translation platform and is connected to the RZ-axis wedge block, and the third locking screw is connected to one end of the RZ-axis rotation platform.

[0008] Preferably, a second guide rail is provided at the bottom of the Y-axis translation platform, a third dovetail groove is provided in the middle of the X-axis translation platform, and second recessed grooves are provided at both ends of the third dovetail groove. The second guide rail is adapted to the second recessed groove, and further includes a Y-axis wedge block, a fourth locking screw, a fourth fine-tuning screw and a fourth return spring. A first adjustment slot is also provided between the second guide rails, the Y-axis wedge block is arranged in the third dovetail groove, the fourth fine-tuning screw passes through the first adjustment slot and is connected to the Y-axis wedge block, wherein the fourth return spring is installed on one side of the second guide rail, and the fourth locking screw is arranged between the Y-axis translation platform and the X-axis translation platform.

[0009] Preferably, a third guide rail is provided at the bottom of the X-axis translation platform, a fourth dovetail groove is provided in the middle of the base, and third recessed grooves are provided at both ends of the third dovetail groove. The third guide rail is adapted to the third recessed groove and further includes an X-axis wedge block, a fifth locking screw, a fifth fine-tuning screw and a fifth return spring. A second adjustment slot is also provided on the third guide rail, and the fifth fine-tuning screw passes through the second adjustment slot and is connected to the X-axis wedge block, wherein the fifth return spring is installed on one side of the third guide rail, and the fifth locking screw is provided between the base and the X-axis translation platform.

[0010] Preferably, the RY-axis wedge block, the Z-axis wedge block, the RZ-axis wedge block, the Y-axis wedge block, and the X-axis wedge block are all provided with anti-backlash grooves.

[0011] Preferably, the first fine-tuning screw, the second fine-tuning screw, the third fine-tuning screw, the fourth fine-tuning screw, and the fifth fine-tuning screw are all engraved with a dividing disk.

[0012] Compared with the prior art, the present invention has achieved the following technical effects:

[0013] The micro-motion platform of the present invention is a micro-motion platform of pure mechanical structure, with strong environmental adaptability, high reliability and high precision, and can accurately adjust the displacement in the three directions of X-axis, Y-axis and Z-axis and the rotation angle change around the Z-axis direction and around the Y-axis direction. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 It is a schematic diagram of the structure of the device of the present invention.

[0015] Figure 2 It is a schematic diagram of the structure decomposition of the device of the present invention.

[0016] Figure 3 It is a cross-sectional schematic diagram of the present invention.

[0017] Figure 4 It is a schematic diagram of the structure of the RY-axis rotating platform of the present invention.

[0018] Figure 5 It is a schematic diagram of the structure of the RY shaft wedge block of the present invention.

[0019] Figure 6 It is a schematic diagram of the structure of the Z-axis lifting platform of the present invention.

[0020] Figure 7 This is a schematic diagram of the Z-axis wedge block structure of the present invention.

[0021] Figure 8 It is a schematic diagram of the structure of the RZ-axis rotating platform of the present invention.

[0022] Fig. 9 It is a schematic diagram of the structure of the RZ-axis wedge block of the present invention.

[0023] Fig.10 It is a schematic diagram of the structure of the Y-axis translation platform of the present invention.

[0024] Fig.11 It is a schematic diagram of the Y-axis wedge block structure of the present invention.

[0025] Fig.12 It is a schematic diagram of the structure of the X-axis translation platform of the present invention.

[0026] Fig.13 It is a schematic diagram of the X-axis wedge block structure of the present invention.

[0027] Fig.14 It is a schematic diagram of the base structure of the present invention.

[0028] Fig.15 It is a schematic diagram of the indexing plate of the present invention.

[0029] Fig.16 It is a schematic diagram of the RZ axis rotation principle of the present invention.

[0030] Fig.17 It is a schematic diagram of the X-axis translation principle of the present invention.

[0031] Fig.18 It is a schematic diagram of the Z-axis lifting principle of the present invention.

[0032] Figure numerals: 1-installation platform; 2-RY axis rotating platform; 2.1-RY axis wedge block; 2.2-fixed block; 2.3-first fine-tuning screw; 2.5-rotation adjustment gap; 2.6-first dovetail groove; 2.7-first guide rail; 3-Z axis lifting platform; 3.1-Z axis wedge block; 3.2-second fine-tuning screw; 3.3-second return spring; 3.4-second locking screw; 3.5-second dovetail groove; 3.6-first sink groove; 4-RZ axis rotating platform; 4.1-RZ axis wedge block; 4.2-third fine-tuning screw; 4. 3-third locking screw; 4.4-third return spring; 5-Y-axis translation platform; 5.1-Y-axis wedge block; 5.2-fourth fine-tuning screw; 5.3-second guide rail; 6-X-axis translation platform; 6.1-X-axis wedge block; 6.2-fifth fine-tuning screw; 6.3-third dovetail groove; 6.4-second sink groove; 6.5-third guide rail; 6.6-fifth return spring; 6.7-fifth locking screw; 7-base; 7.1-fourth dovetail groove; 7.2-third sink groove; 8-anti-backlash groove; 9-dividing plate; 10-anti-backlash plate. DETAILED DESCRIPTION Example

[0033] The present invention discloses a high-precision micro-motion platform, comprising an installation platform 1 at the top and a base 7 at the bottom. An RY-axis rotating platform 2, an RZ-axis rotating platform 4, a Z-axis lifting platform 3, a Y-axis translation platform 5 and an X-axis translation platform 6 are arranged between the installation platform 1 and the base 7. The RY-axis rotating platform 2 is connected to the Z-axis lifting platform 3, the Z-axis lifting platform 3 is connected to the Y-axis translation platform 5 through the RZ-axis rotating platform 4, and the Y-axis translation platform 5 is connected to the X-axis translation platform 6. The RY-axis rotating platform 2 can realize a rotation angle around the Y-axis, the RZ-axis rotating platform 4 can realize a rotation angle around the Z-axis, the X-axis translation platform 6, the Y-axis translation platform 5 and the Z-axis lifting platform 3 can respectively realize movement along the X-axis, the Y-axis and the Z-axis, and the displacement change and the angle change of the installation platform 1 are realized by cooperating with a plurality of platforms.

[0034] In this embodiment, a carrier is placed on the installation platform 1. By arranging the RY-axis rotating platform 2, the Z-axis lifting platform 3, the RZ-axis rotating platform 4, the Y-axis translation platform 5, and the X-axis translation platform 6 in sequence, the installation platform 1 can be translated along the X-axis, Y-axis, and Z-axis and rotated around the Y and Z axes.

[0035] The RY-axis rotating platform 2 also includes an RY-axis wedge block 2.1, a fixed block 2.2, a first fine-tuning screw 2.3, a first locking screw, and a first return spring. A rotation adjustment slit 2.5 is provided on the RY-axis rotating platform 2. A first dovetail groove 2.6 is provided at the bottom of the rotation adjustment slit 2.5. A first guide rail 2.7 is provided at the bottom of the first dovetail groove 2.6. Fixed blocks 2.2 are provided at both ends of the first dovetail groove. The first dovetail groove is also connected to the RY-axis wedge block 2.1 of matching shape. The first fine-tuning screw 2.3 is connected to the RY-axis wedge block 2.1 through the first return spring, and the first locking screw is connected to one end of the RY-axis rotating platform 2.

[0036] As shown in the figure, in this embodiment, the surface of the RY-axis wedge block 2.1 is arranged in an inclined plane, and the inclination angle of the inclined plane is adapted to the two rotation adjustment slits 2.5 provided on the RY-axis rotating platform 2, and the RY-axis wedge block 2.1 is matched with the first dovetail groove 2.6, and a through hole is provided on the side of the RY-axis wedge block 2.1, and the first fine-tuning screw 2.3 passes through the through hole and is connected to the RY-axis wedge block 2.1, wherein the end of the RY-axis wedge block 2.1 away from the first fine-tuning screw 2.3 is also provided with an anti-backlash piece 10, and the anti-backlash piece 10 can reduce the error during processing and manufacturing; during adjustment, the RY-axis wedge block 2.1 can be moved left and right by rotating the first fine-tuning screw 2.3, and the installed first reset spring plays a role of rotation reset. After adjusting to the specified angle, tighten the first locking screw to lock the rotation of the RY-axis rotating platform 2, so as to realize the change of the rotation angle of the installation platform 1 around the Y-axis. In this embodiment, the rotation angle range around the Y-axis is between 0° and 10°.

[0037] The Z-axis lifting platform 3 also includes a Z-axis wedge block 3.1, a second locking screw 3.4, a second fine-tuning screw 3.2 and a second return spring 3.3. A second dovetail groove 3.5 is opened on the Z-axis lifting platform 3, and first sink grooves 3.6 are also provided at both ends of the second dovetail groove 3.5, wherein the second dovetail groove 3.5 is matched and connected with the first guide rail 2.7, the Z-axis wedge block 3.1 passes through the first sink groove 3.6 and cooperates with the first guide rail 2.7, the second fine-tuning screw 3.2 is connected to the Z-axis wedge block 3.1, the second return spring 3.3 is arranged between the second dovetail groove 3.5 and the first guide rail 2.7, and the second locking screw 3.4 is connected to one end of the Z-axis lifting platform 3.

[0038] As shown in the figure, in this embodiment, when the RY-axis rotating platform 2 is connected to the Z-axis lifting platform 3, the first guide rail 2.7 at the bottom of the RY-axis rotating platform 2 is connected to the second dovetail groove 3.5 on the Z-axis lifting platform 3 through the Z-axis wedge block 3.1, so that the two platforms are connected. The first sink grooves 3.6 of the same shape and size are arranged at both ends of the second dovetail groove 3.5, which can facilitate the movement of the Z-axis wedge block 3.1. A through hole is provided on the Z-axis wedge block 3.1, and the through hole through which the second fine-tuning screw 3.2 passes is connected to the Z-axis wedge block 3.1, wherein the Z-axis wedge block 3.1 is also provided with an anti-backlash groove 8, and the anti-backlash groove 8 can be adjusted The screw is used to eliminate the gap between the second fine-tuning screw 3.2 and the Z-axis wedge block 3.1. The Z-axis wedge block 3.1 is also provided with a backlash eliminating piece 10 at the end away from the second fine-tuning screw 3.2, which can reduce the error during processing and manufacturing. When adjusting, the second return spring 3.3 is rotated to move the Z-axis wedge block 3.1, thereby raising the mounting platform 1. The second return spring 3.3 can play a role in resetting the Z-axis. After adjusting to the specified position, the second locking screw 3.4 is tightened to lock the Z-axis lifting and lowering, so that the mounting platform 1 can be translated along the Z-axis for a certain distance. In this embodiment, the distance range of the Z-axis translation is between 0 and 30 mm.

[0039] The RZ-axis rotating platform 4 is installed in the Y-axis translation platform 5, and also includes an RZ-axis wedge block 4.1, a third locking screw 4.3, a third fine-tuning screw 4.2 and a third return spring 4.4. A cylindrical pin is provided on one end of the RZ-axis rotating platform 4, and the cylindrical pin cooperates with the RZ-axis wedge block 4.1, and the other end is also connected to the third return spring 4.4, wherein the third fine-tuning screw 4.2 passes through the Y-axis translation platform 5 and is connected to the RZ-axis wedge block 4.1, and the third locking screw 4.3 is connected to one end of the RZ-axis rotating platform 4.

[0040] As shown in the figure, in this embodiment, the RZ-axis rotating platform 4 is installed on the Y-axis translation platform 5, and the RZ-axis rotating platform 4 is connected to the Y-axis translation platform 5 through a rotating shaft, and the rotating shaft is installed at the center of the RZ-axis rotating platform 4, wherein a through hole is opened on one side of the Y-axis translation platform 5, and the through hole is used for the third fine-tuning screw rod 4.2 to penetrate, and an anti-backlash spring is also provided between the third fine-tuning screw rod 4.2 and the Y-axis translation platform 5 to reduce the error, and the third fine-tuning screw rod 4.2 penetrates from the through hole and passes through the RZ-axis wedge block 4.1 and the RZ-axis rotating platform 5. The platform 4 is connected, and the third reset spring 4.4 is installed between the Y-axis translation platform 5 and the cylindrical pin, which can reset the RZ-axis rotation platform 4. When adjusting, the third fine-tuning screw 4.2 is rotated to move the RZ-axis wedge block 4.1, and the cylindrical pin on the RZ-axis rotation platform 4 is pushed to rotate the RZ-axis rotation platform 4, and the third locking screw 4.3 is tightened to lock the rotation of its RY-axis rotation platform 2, so as to realize the change of the rotation angle of the installation platform 1 around the Z-axis. In this embodiment, the rotation angle range around the Z-axis is between 0° and 90°.

[0041] A second guide rail 5.3 is provided at the bottom of the Y-axis translation platform 5, a third dovetail groove 6.3 is provided in the middle of the X-axis translation platform 6, and second sink grooves 6.4 are provided at both ends of the third dovetail groove 6.3. The second guide rail 5.3 is adapted to the second sink groove 6.4, and further comprises a Y-axis wedge block 5.1, a fourth locking screw, a fourth fine-tuning screw rod 5.2 and a fourth return spring. A first adjustment slit is also provided between the second guide rails 5.3, the Y-axis wedge block 5.1 is arranged in the third dovetail groove 6.3, the fourth fine-tuning screw rod 5.2 passes through the first adjustment slit and is connected to the Y-axis wedge block 5.1, wherein the fourth return spring is installed on one side of the second guide rail 5.3, and the fourth locking screw is arranged between the Y-axis translation platform 5 and the X-axis translation platform 6.

[0042] As shown in the figure, in this embodiment, the shape and size of the second guide rail 5.3 match the second sink groove 6.4. When connected, the second guide rail 5.3 is connected to the second sink groove 6.4, the third dovetail groove 6.3 of the X-axis translation platform 6 is connected to the Y-axis translation platform 5 through the Y-axis wedge block 5.1, and the fourth fine-tuning screw 5.2 passes through the X-axis translation platform 6 and is connected to the Y-axis wedge block 5.1, wherein the Y-axis wedge block 5.1 is also provided with an anti-backlash groove 8, and an anti-backlash screw is installed in the anti-backlash groove 8 to eliminate the fourth fine-tuning screw 5.2. When adjusting the gap between the Y-axis wedge block 5.1 and the Y-axis wedge block 5.1, the fourth fine-tuning screw 5.2 is rotated to make the Y-axis wedge block 5.1 and the second guide rail 5.3 move along the Y-axis, so that the installation platform 1 can be translated along the Y-axis. The Y-axis translation screw can also be reversed, and the Y-axis translation platform 5 can be reset under the action of the reset spring. After adjusting to the specified position, the fourth locking screw is tightened to lock the Y-axis translation platform 5, so that the installation platform 1 can be translated along the Y-axis for a certain distance. In this embodiment, the distance range of the Y-axis translation is between 0 and 30 mm.

[0043] A third guide rail 6.5 is provided at the bottom of the X-axis translation platform 6, a fourth dovetail groove 7.1 is provided in the middle of the base 7, and third recessed grooves 7.2 are provided at both ends of the fourth dovetail groove 7.1. The third guide rail 6.5 is adapted to the third recessed groove 7.2, and further comprises an X-axis wedge block 6.1, a fifth locking screw 6.7, a fifth fine-tuning screw rod 6.2 and a fifth return spring 6.6. A second adjustment slot is also provided on the third guide rail 6.5, and the fifth fine-tuning screw rod 6.2 passes through the second adjustment slot and is connected to the X-axis wedge block 6.1, wherein the fifth return spring 6.6 is installed on one side of the third guide rail 6.5, and the fifth locking screw 6.7 is arranged between the base 7 and the X-axis translation platform 6.

[0044] As shown in the figure, in this embodiment, the shape and size of the third guide rail 6.5 match the second sink groove 6.4. When connected, the third guide rail 6.5 is connected to the third sink groove 7.2, the third dovetail groove 6.3 of the base 7 is connected to the X-axis translation platform 6 through the X-axis wedge block 6.1, and the fifth fine-tuning screw 6.2 passes through the base 7 and is connected to the Y-axis wedge block 5.1, wherein the X-axis wedge block 6.1 is also provided with an anti-backlash groove 8, and an anti-backlash screw is installed in the anti-backlash groove 8, which can eliminate the fifth fine-tuning screw 6.2 and the X-axis wedge When adjusting the gap between the blocks 6.1, the fifth fine-tuning screw 6.2 is rotated to make the X-axis wedge block 6.1 and the third guide rail 6.5 move along the X-axis, so that the installation platform 1 can be translated along the X-axis. The X-axis translation screw can also be reversed, and the Y-axis translation platform 5 can be reset under the action of the reset spring. After adjusting to the specified position, the fifth locking screw 6.7 is tightened to lock the Y-axis translation platform 5, so that the installation platform 1 can be translated along the X-axis for a certain distance. In this embodiment, the distance range of the X-axis translation is between 0 and 30 mm.

[0045] The RY axis wedge block 2.1, the Z axis wedge block 3.1, the RZ axis wedge block 4.1, the Y axis wedge block 5.1, and the X axis wedge block 6.1 are all provided with anti-backlash grooves 8. In this embodiment, the anti-backlash grooves 8 provided on the plurality of wedge blocks are provided with anti-backlash screws to eliminate the gap during connection and reduce the error.

[0046] The first fine-tuning screw 2.3, the second fine-tuning screw 3.2, the third fine-tuning screw, the fourth fine-tuning screw, and the fifth fine-tuning screw are all engraved with a dividing plate 9, and the setting of the dividing plate 9 can achieve precise control during adjustment.

[0047] When in use, place the load on the installation platform 1, and adjust the RY-axis rotation platform 2, Z-axis lifting platform 3, RZ-axis rotation platform 4, Y-axis translation platform 5, and X-axis translation platform 6 according to needs to achieve translation changes along the X, Y, and Z axes and angular rotation changes around the Y axis and Z axis.

Claims

1. A high-precision micro-motion platform, characterized in that: It includes a mounting platform at the top and a base at the bottom. An RY-axis rotating platform, an RZ-axis rotating platform, a Z-axis lifting platform, a Y-axis translation platform and an X-axis translation platform are arranged between the mounting platform and the base. The RY-axis rotating platform is connected to the Z-axis lifting platform. The Z-axis lifting platform is connected to the Y-axis translation platform through the RZ-axis rotating platform. The Y-axis translation platform is connected to the X-axis translation platform. The RY-axis rotating platform can realize a rotation angle around the Y-axis. The RZ-axis rotating platform can realize a rotation angle around the Z-axis. The X-axis translation platform, the Y-axis translation platform and the Z-axis lifting platform can respectively realize movement along the X-axis, the Y-axis and the Z-axis. The displacement change and the angle change of the mounting platform are realized by cooperating with multiple platforms. The RY-axis rotating platform further comprises an RY-axis wedge block, a fixed block, a first fine-tuning lead screw, a first locking screw, and a first return spring; a rotation adjustment slot is provided on the RY-axis rotating platform; a first dovetail slot is provided at the bottom of the rotation adjustment slot; a first guide rail is provided at the bottom of the first dovetail slot; fixed blocks are provided at both ends of the first dovetail slot; the first dovetail slot is also connected to an RY-axis wedge block of matching shape; the first fine-tuning lead screw is connected to the RY-axis wedge block through a first return spring; and the first locking screw is connected to one end of the RY-axis rotating platform; The Z-axis lifting platform also includes a Z-axis wedge block, a second locking screw, a second fine-tuning screw and a second return spring. A second dovetail groove is provided on the Z-axis lifting platform, and first sink grooves are provided at both ends of the second dovetail groove, wherein the second dovetail groove is matched and connected with the first guide rail, the Z-axis wedge block passes through the first sink groove and matches with the first guide rail, the second fine-tuning screw is connected with the Z-axis wedge block, the second return spring is arranged between the second dovetail groove and the first guide rail, and the second locking screw is connected with one end of the Z-axis lifting platform; The RZ-axis rotating platform is installed in the Y-axis translation platform, and also includes an RZ-axis wedge block, a third locking screw, a third fine-tuning screw and a third return spring. A cylindrical pin is provided on one end of the RZ-axis rotating platform, and the cylindrical pin cooperates with the RZ-axis wedge block, and the other end is also connected to the third return spring, wherein the third fine-tuning screw passes through the Y-axis translation platform and is connected to the RZ-axis wedge block, and the third locking screw is connected to one end of the RZ-axis rotating platform; A second guide rail is provided at the bottom of the Y-axis translation platform, a third dovetail groove is provided in the middle of the X-axis translation platform, and second recessed grooves are provided at both ends of the third dovetail groove. The second guide rail is adapted to the second recessed groove, and further comprises a Y-axis wedge block, a fourth locking screw, a fourth fine-tuning lead screw and a fourth return spring. A first adjustment slit is provided between the second guide rails, the Y-axis wedge block is provided in the third dovetail groove, the fourth fine-tuning lead screw passes through the first adjustment slit and is connected to the Y-axis wedge block, wherein the fourth return spring is installed on one side of the second guide rail, and the fourth locking screw is provided between the Y-axis translation platform and the X-axis translation platform; A third guide rail is provided at the bottom of the X-axis translation platform, a fourth dovetail groove is provided in the middle of the base, and third recessed grooves are provided at both ends of the fourth dovetail groove. The third guide rail is adapted to the third recessed groove and further includes an X-axis wedge block, a fifth locking screw, a fifth fine-tuning screw and a fifth return spring. A second adjustment slot is also provided on the third guide rail, and the fifth fine-tuning screw passes through the second adjustment slot and is connected to the X-axis wedge block, wherein the fifth return spring is installed on one side of the third guide rail, and the fifth locking screw is provided between the base and the X-axis translation platform.

2. A high-precision micro-motion platform according to claim 1, characterized in that: The RY-axis wedge block, the Z-axis wedge block, the RZ-axis wedge block, the Y-axis wedge block, and the X-axis wedge block are all provided with anti-backlash grooves.

3. A high-precision micro-motion platform according to claim 2, characterized in that: The first fine-tuning lead screw, the second fine-tuning lead screw, the third fine-tuning lead screw, the fourth fine-tuning lead screw and the fifth fine-tuning lead screw are all engraved with dividing plates.

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