An in-situ measuring and dressing quick tool setting device and tool setting method for a polishing disc

Abstract

The present invention discloses a quick tool setting device and method for on-site measurement and dressing of a polishing disc. The tool setting device includes: a fixed seat, and a tool setting block, a moving adjustment device and a locking device arranged in the fixed seat. The tool setting block is fixed on the moving adjustment device. The moving adjustment device is used to adjust the vertical position and horizontal position of the tool setting block. The locking device is arranged below the moving adjustment device to lock the moving adjustment device. The tool setting method adjusts the positional relationship between the probe and the turning tool through the tool setting device to make the probe coordinates consistent with the turning tool coordinates. By the above method, the present invention lays a foundation for on-site dressing of the polishing disc, and plays a positive role in reducing the polishing disc dressing process, improving the dressing efficiency and dressing accuracy.

Description

Technical Field

[0001] The present invention relates to the field of thin crystal polishing processing equipment, and particularly to a quick tool setting device and method for on-site measurement and dressing of a polishing disc. Background Art

[0002] Planar components such as sapphire windows, silicon wafers, laser wafers, and KDP crystals are widely used in modern optics, microelectronics, aerospace and other fields. The market is huge and the potential for continuous growth is extremely large. Such planar components are typical difficult-to-process components with a large diameter-thickness ratio structure, and polishing processing methods need to be adopted to obtain high surface shape accuracy. By using a polishing disc surface shape measurement system to accurately measure the surface shape of the polishing disc, the surface shape of the polishing disc can be grasped in time, the dressing timing can be accurately determined, and at the same time, the dressing effect can be reflected, providing the processing accuracy of planar workpieces.

[0003] Traditional thin crystal polishing processing equipment does not involve on-site measurement and dressing of the polishing disc. The dressing of the polishing disc is mainly carried out by a dressing mechanism to dress the surface. The polishing disc to be dressed needs to be unloaded and reinstalled. There are deficiencies such as multiple processes, long dressing time, poor dressing surface shape accuracy, and low efficiency in this process. Summary of the Invention

[0004] Aiming at the problems of poor accuracy, long time, multiple processes, and low efficiency in the dressing of the polishing disc during the polishing of traditional crystal materials, the present invention proposes a tool setting device and method for quickly and efficiently performing on-site measurement and dressing of the polishing disc based on a polishing machine tool to improve the dressing efficiency and dressing accuracy of the polishing disc.

[0005] Since the process of tool setting is essentially a process of unifying the coordinates of the measuring head and the turning tool, a technical solution adopted by the invention is: to provide a quick tool setting device for on-site measurement and dressing of a polishing disc, including: a fixed seat, and a tool setting block, a moving adjustment device, and a locking device arranged in the fixed seat. The tool setting block is fixed on the moving adjustment device. The moving adjustment device is used to adjust the vertical position and horizontal position of the tool setting block. The locking device is arranged below the moving adjustment device to lock the moving adjustment device.

[0006] In a preferred embodiment of the present invention, the moving adjustment device includes a vertical moving slide and a horizontal fine adjustment slide, and the horizontal fine adjustment slide is arranged on the vertical moving slide.

[0007] In a preferred embodiment of the present invention, a group of guide rails are vertically symmetrically arranged in the fixed seat, sliders are arranged on the guide rails, and the vertical moving slide is located between the group of guide rails and is fixedly connected to the sliders.

[0008] In a preferred embodiment of the present invention, a guide post is fixed below the bottom of the vertical moving slide table. The lower end of the guide post extends into the locking device, and the guide post can be locked by rotating the locking handle on the locking device.

[0009] In a preferred embodiment of the present invention, a compression spring is also sleeved on the guide post. The upper end of the compression spring is fixedly connected to the vertical moving slide table, and the lower end is fixedly connected to the locking device.

[0010] In a preferred embodiment of the present invention, the horizontal fine-tuning slide table includes a base, a fine-tuning slider arranged in the chute of the base, and a fine-tuning knob connected to the fine-tuning slider. The base is fixed on the vertical moving slide table.

[0011] In a preferred embodiment of the present invention, a groove is formed on the upper end surface of the fine-tuning slider, and the tool setting block is fixed in the groove.

[0012] In a preferred embodiment of the present invention, an anti-collision spring plunger is further arranged in the fixed seat. The anti-collision spring plungers are respectively located above and below the slider, and are used to limit the up and down movement of the slider on the guide rail.

[0013] In a preferred embodiment of the present invention, the tool setting block is a V-shaped tool setting block with a V-shaped groove formed in the middle.

[0014] To solve the above technical problems, the present invention also provides a method for tool setting using the above-mentioned in-situ measurement and trimming quick tool setting device for the polishing disc, including the following steps:

[0015] S1. Install the tool setting device: Install the tool setting device on the polishing disc, and use a spirit level to make the upper plane of the tool setting block horizontal.

[0016] S2. Determine the relative coordinate of the turning tool tip on the Z axis: The system controls the polishing disc to drive the tool setting device to rotate to the 180° position, that is, the position facing the turning tool. Control the turning tool tip to contact the upper plane of the tool setting block and press down 5-10 mm. Rotate the locking handle on the locking device to lock the vertical moving slide table to lock the position of the tool setting block. The system sets the relative coordinate of the turning tool on the Z axis at this time as z = 0.

[0017] S3. Tool setting for the Z-axis position of the probe: The system controls the polishing disc to drive the tool setting device to rotate to the 45° position, control the probe to contact the upper plane of the tool setting block, and the system sets the relative coordinate of the probe on the Z axis at this time as z = 0, realizing the unification of the relative coordinate system of the probe and the turning tool in the Z-axis direction.

[0018] S4. Determine the absolute coordinate of the turning tool tip on the Y-axis: Control the polishing disc to drive the tool setting device to rotate to the 180° position. By controlling the movement of the turning tool and the horizontal fine-tuning slide, make the turning tool tip contact one side wall of the V-shaped groove in the tool setting block. The system records the relative coordinate z1 of the turning tool on the Z-axis and the absolute coordinate Y1 of the turning tool on the Y-axis at this time;

[0019] S5. Tool setting for the X-axis position of the probe: The system controls the polishing disc to drive the tool setting device to rotate to the 45° position, controls the probe to move downward along the Z-axis to the z1 position, and then controls the probe to move in the positive X-axis direction until it stops when it contacts one side wall of the V-shaped groove in the tool setting block. The system records the absolute coordinate X1 of the probe on the X-axis at this time;

[0020] S6. Unify the X-axis of the probe and the Y-axis of the turning tool: Control the polishing disc to drive the tool setting device to rotate to the 225° position, control the probe to move downward along the Z-axis to the z1 position, and then control the probe to move in the negative X-axis direction until it stops when it contacts one side wall of the V-shaped groove in the tool setting block. The system records the absolute coordinate X2 of the probe on the X-axis at this time;

[0021] The relative coordinate value of the X-axis of the probe is denoted as: where x is the relative coordinate value of the X-axis of the probe, and X is the absolute coordinate value of the X-axis of the probe;

[0022] The relative coordinate of the Y-axis of the turning tool is denoted as:

[0023] where y is the relative coordinate value of the Y-axis of the turning tool, Y is the absolute coordinate value of the Y-axis of the turning tool, and r is the radius of the spherical head of the contact end of the probe;

[0024] Thus, the relative coordinate systems of the Y-axis of the turning tool and the X-axis of the probe are unified, and the tool setting process of the turning tool and the probe is completed.

[0025] The beneficial effects of the present invention are as follows: The tool setting device of the present invention adopts a structural design in which the tool setting block, the moving adjustment device, and the locking device cooperate with each other. Through the moving adjustment device, the vertical (Z-direction perpendicular to the polishing disc) position adjustment and the horizontal (radial direction along the polishing disc) position adjustment of the tool setting block can be realized, so as to adjust the positions of the probe and the turning tool on the polishing machine tool, unify the probe coordinates and the turning tool coordinates, that is, complete the unification of the measurement (probe) system coordinates and the turning tool system coordinates of the polishing machine tool, thereby laying a foundation for the in-situ dressing of the polishing disc and playing a positive role in reducing the polishing disc dressing process, improving the dressing efficiency and dressing accuracy. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1 is the front view of the tool setting device of the present invention;

[0027] Figure 2 is Figure 1 the isometric view of the tool setting device shown;

[0028] Figure 3 is Figure 1 The side view of the overall structure when the tool setting device shown is clamped on the polishing machine tool;

[0029] Figure 4 is Figure 1 The top view of the overall structure when the tool setting device shown is clamped on the polishing machine tool;

[0030] The markings of each component in the attached drawings are as follows: 1. Fixed seat, 2. Tool setting block, 21. V-shaped groove, 3. Moving adjustment device, 31. Vertical moving slide, 32. Horizontal fine adjustment slide, 321. Base, 3211. Trapezoidal slide groove, 322. Fine adjustment slider, 3221. Groove, 323. Fine adjustment knob, 4. Locking device, 41. Lock handle, 5. Guide rail, 6. Slide block, 7. Guide post, 8. Compression spring, 9. Anti-collision spring plunger. Specific embodiments

[0031] The following describes in detail the preferred embodiments of the present invention with reference to the attached drawings, so that the advantages and features of the present invention can be more easily understood by those skilled in the art, thereby making a clearer and more definite definition of the protection scope of the present invention.

[0032] Refer to Figure 1 and Figure 2 , the embodiments of the present invention include:

[0033] A quick tool setting device for in-situ measurement and dressing of a polishing disc, comprising: a fixed seat 1, and a tool setting block 2, a moving adjustment device 3 and a locking device 4 arranged in the fixed seat 1. The tool setting block 2 is fixed on the moving adjustment device 3. The moving adjustment device 2 is used to adjust the vertical position and horizontal position of the tool setting block 2. The locking device 4 is fixed at the bottom inside the fixed seat 1 and is located below the moving adjustment device 3 for locking the moving adjustment device 3.

[0034] Among them, the moving adjustment device 3 includes a vertical moving slide 31 and a horizontal fine adjustment slide 32, and the horizontal fine adjustment slide 32 is arranged on the vertical moving slide 31. Specifically, the horizontal fine adjustment slide 32 includes a base 321, a fine adjustment slider 322 and a fine adjustment knob 323. The lower end surface of the base 321 is fixed on the vertical moving slide 31. A trapezoidal chute 3211 matching the bottom of the fine adjustment slider 322 is provided on the upper end surface of the base 321. The fine adjustment knob 323 is connected to the side wall of the fine adjustment slider 322, and the horizontal moving position of the fine adjustment slider 322 on the trapezoidal chute 3211 is adjusted through a high-precision thread; a groove 3221 is provided on the upper end surface of the fine adjustment slider 322, and the tool setting block 2 is fixed in the groove 3221. The tool setting block 2 is a V-shaped tool setting block with a V-shaped groove 21 opened in the middle.

[0035] Continue to refer to Figure 1 , Figure 2 , a group of guide rails 5 are vertically and symmetrically fixed on the inner bottom of the fixed seat 1. Sliders 6 capable of moving up and down along the guide rails 5 are arranged on the guide rails 5. The vertical moving slide 31 is located between the group of guide rails and is fixedly connected to the slider 6; a guide post 7 is fixed below the bottom of the vertical moving slide 31. A compression spring 8 is sleeved on the guide post 7. The upper end of the compression spring 8 is fixed to the bottom of the vertical moving slide 31, and the lower end is fixed in the locking device 4; the guide rails 5 and the sliders 6 are used to guide the vertical movement of the vertical moving slide 31. The compression spring 8 is compressed when the vertical moving slide 31 moves downward, providing a rebound supporting force for the vertical moving slide 31. When the locking device 4 unlocks the guide post 7, the compression spring 8 can drive the vertical moving slide 31 to reset;

[0036] The lower end of the guide post 7 extends into the locking device 4. By rotating the lock handle 41 on the locking device 4, the guide post 7 can be locked and fixed, and then the vertical moving slide 31 can be locked to achieve the purpose of locking the position of the tool setting block 2; the locking device 4 can adopt a mechanical lock or an electromagnetic lock. When adopting a mechanical lock, the lock block arranged inside the locking device 4 is driven to expand and contract by the lock handle 41. When it extends, it locks the guide post 7, and when it contracts, it separates from the guide post 7 to release the guide post 7; when adopting an electromagnetic lock, the electromagnetic block arranged in the locking device 4 locks the guide post 7 when it is powered on and releases the guide post 7 when it is powered off.

[0037] In this embodiment, anti-collision spring plungers 9 are installed on both the inner bottom and the top of the fixed seat 1. The anti-collision spring plungers 9 are respectively located above and below the slider 6 and are used to limit the up and down movement of the slider 6 on the guide rail 5.

[0038] Next, in combination with the polishing machine tool, the method of tool setting using the tool setting device will be further introduced. Refer toFigure 3 , Figure 4 , the tool setting method includes the following steps:

[0039] S1. Install the tool setting device: Install the tool setting device on the polishing disc. A threaded hole is provided at the bottom of the fixed seat 1 of the tool setting device, and the tool setting device can be fixed on the polishing disc by means of screw connection. Use a spirit level to measure to ensure that the upper plane of the tool setting block 2 is horizontal;

[0040] S2. Determine the relative coordinate of the turning tool tip in the Z-axis: The system controls the polishing disc to drive the tool setting device to rotate to the 180° position, that is, the position facing the turning tool. Control the turning tool to move in the positive Y-axis direction until the turning tool tip stops above the upper plane of the tool setting block 2. Continue to control the turning tool to move downward along the Z-axis until the turning tool tip touches the upper plane of the tool setting block 2. After continuing to press down 5 - 10 mm, stop. Rotate the lock handle 41 on the locking device 4 to lock the vertical movement slide 31 to lock the position of the tool setting block 2. The system sets the relative coordinate z = 0 of the turning tool in the Z-axis at this time. After the coordinate conversion is completed, control the turning tool to move upward along the Z-axis to separate the turning tool tip from the tool setting block 2;

[0041] S3. Tool setting for the Z-axis position of the probe: The system controls the polishing disc to drive the tool setting device to rotate to the 45° position. Control the probe to move in the X-axis direction until the probe stops above the upper plane of the tool setting block 2. Continue to control the probe to move downward along the Z-axis. When the probe touches the upper plane of the tool setting block 2 and the system receives a trigger signal, the system sets the relative coordinate z = 0 of the probe in the Z-axis at this time, that is, the relative coordinate system of the probe and the turning tool in the Z-axis direction is unified;

[0042] S4. Determine the absolute coordinate of the turning tool tip in the Y-axis: Control the polishing disc to drive the tool setting device to rotate to the 180° position. Control the turning tool to move in the negative Y-axis direction until the turning tool tip stops above the V-shaped groove 21 in the tool setting block 2. Continue to control the turning tool to move downward along the Z-axis until the turning tool tip is located in the V-shaped groove. The system records the relative coordinate z1 of the turning tool in the Z-axis. Rotate the fine adjustment knob 323 to move the tool setting block 2 radially towards the center of the polishing disc. After one side wall of the V-shaped groove 21 in the tool setting block 2 touches the turning tool tip, lock the fine adjustment knob 323 to lock the position of the tool setting block 2. The system records the absolute coordinate Y1 of the turning tool in the Y-axis at this time. Then control the turning tool to move upward along the Z-axis to separate the turning tool tip from the tool setting block 2;

[0043] S5. Tool setting for the X-axis position of the probe: The system controls the polishing disc to drive the tool setting device to rotate to the 45° position, controls the probe to move along the X-axis direction until the probe is above the center line of the V-groove 21 in the tool setting block 2, continues to control the probe to move downward along the Z-axis to the z1 position, and then continues to control the probe to move in the positive X-axis direction until the probe touches one side wall of the V-groove in the tool setting block 2 and stops. At this time, the system receives the signal that the probe is triggered, and the system records the absolute coordinate X1 of the probe on the X-axis at this time. Then, the system controls the probe to move upward along the Z-axis to separate the probe from the tool setting block 2 and make the probe in a safe position to avoid accidental contact.

[0044] S6. Unifying the X-axis of the probe and the Y-axis of the turning tool: The system controls the polishing disc to drive the tool setting device to rotate to the 225° position, controls the probe to move along the X-axis direction until the probe is above the center line of the V-groove in the tool setting block 2, continues to control the probe to move downward along the Z-axis to the z1 position, and then continues to control the probe to move in the negative X-axis direction until the probe touches the side wall of the V-groove 21 in the tool setting block 2. At this time, the system receives the signal that the probe is triggered, and the system records the absolute coordinate X2 of the probe on the X-axis at this time.

[0045] The relative coordinate value of the probe on the X-axis is denoted as: where x is the relative coordinate value of the probe on the X-axis, and X is the absolute coordinate value of the probe on the X-axis;

[0046] The relative coordinate of the Y-axis of the turning tool is denoted as:

[0047] where y is the relative coordinate value of the Y-axis of the turning tool, Y is the absolute coordinate value of the Y-axis of the turning tool, and r is the radius of the spherical head of the contact end of the probe.

[0048] Thus, the relative coordinate system of the Y-axis of the turning tool and the X-axis of the probe is unified, and the tool setting process of the turning tool and the probe is completed.

[0049] In summary, the present invention adjusts the positional relationship between the probe and the turning tool through the tool setting device, unifies the probe coordinates and the turning tool coordinates, that is, completes the unification of the coordinate system of the polishing machine measurement (probe) system and the turning tool system coordinate system, thereby laying a foundation for the in-situ dressing of the polishing disc, and playing a positive role in reducing the polishing disc dressing process, improving the dressing efficiency and dressing accuracy.

[0050] In the description of the present invention, it should be noted that the orientation or positional relationship indicated by the terms "upper", "lower", "left", "right", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings, or the orientation or positional relationship in which the product of the invention is customarily placed during use. It is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation on the present invention. The above are only the preferred embodiments of the present invention and are not used to limit the present invention. For those skilled in the art, the present invention can have various changes and modifications. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included within the protection scope of the present invention.

[0051] The above are only the embodiments of the present invention and do not limit the patent scope of the present invention. Any equivalent structure or equivalent process transformation made by using the content of the specification and drawings of the present invention, or directly or indirectly applied in other related technical fields, shall be included in the patent protection scope of the present invention by the same token.

Claims

1. A method for tool setting using an in-situ measurement and dressing quick tool setting device for a polishing disc, characterized in that, The steps are as follows: S1. Install the tool setting device: Install the tool setting device on the polishing disc, and use a spirit level to make the upper plane of the tool setting block (2) horizontal; S2. Determine the relative coordinate of the tool tip of the turning tool on the Z-axis: The system controls the polishing disc to drive the tool setting device to rotate to the position directly opposite the turning tool, controls the tool tip of the turning tool to contact the upper plane of the tool setting block (2), and presses it down by 5 - 10 mm. Rotate the lock handle (41) on the locking device (4) to lock the vertical movement slide table (31) to lock the position of the tool setting block (2). The system sets the relative coordinate of the Z-axis of the turning tool at this time as z = 0; S3. Tool setting for the Z-axis position of the probe: The system controls the polishing disc to drive the tool setting device to rotate to position A, controls the probe to contact the upper plane of the tool setting block (2), and the system sets the relative coordinate of the Z-axis of the probe at this time as z = 0, realizing the unification of the relative coordinate system of the probe and the turning tool in the Z-axis direction; S4. Determine the absolute coordinate of the tool tip of the turning tool on the Y-axis: Control the polishing disc to drive the tool setting device to rotate to the position directly opposite the turning tool. By controlling the movement of the turning tool and the horizontal fine-tuning slide table, make the tool tip of the turning tool contact one side wall of the V-groove (21) in the tool setting block (2). The system records the relative coordinate z1 of the Z-axis of the turning tool and the absolute coordinate Y1 of the Y-axis of the turning tool at this time; S5. Tool setting for the X-axis position of the probe: The system controls the polishing disc to drive the tool setting device to rotate to position A, controls the probe to move downward along the Z-axis to the z1 position, and then controls the probe to move in the positive X-axis direction until it stops when it contacts one side wall of the V-groove (21) in the tool setting block (2). The system records the absolute coordinate X1 of the X-axis of the probe at this time; S6. Unify the X-axis of the probe and the Y-axis of the turning tool: Control the polishing disc to drive the tool setting device to rotate to position B which is 180° from position A, control the probe to move downward along the Z-axis to the z1 position, and then control the probe to move in the negative X-axis direction until it stops when it contacts one side wall of the V-groove (21) in the tool setting block (2). The system records the absolute coordinate X2 of the X-axis of the probe at this time; The relative coordinate value of the probe in the X-axis is denoted as: , where x is the relative coordinate value of the probe in the X-axis and X is the absolute coordinate value of the probe in the X-axis; The relative coordinate of the turning tool on the Y-axis is denoted as: , Where y is the relative coordinate value of the Y-axis of the turning tool, Y is the absolute coordinate value of the Y-axis of the turning tool, and r is the radius of the spherical head of the contact end of the probe; Thus, the relative coordinate system of the Y-axis of the turning tool and the X-axis of the probe is unified, and the tool setting process of the turning tool and the probe is completed; The on-site measurement and dressing quick tool setting device for the polishing disc includes: a fixed seat (1), a tool setting block (2), a moving adjustment device (3), and a locking device (4) arranged in the fixed seat (1). The tool setting block (2) is fixed on the moving adjustment device (3). The moving adjustment device (3) is used to adjust the vertical position and horizontal position of the tool setting block (2). The locking device (4) is arranged below the moving adjustment device (3) to lock the moving adjustment device (3). The moving adjustment device (3) includes a vertical moving slide (31) and a horizontal fine adjustment slide (32). The horizontal fine adjustment slide (32) is arranged on the vertical moving slide (31). A guide post (7) is fixed below the bottom of the vertical moving slide (31). The lower end of the guide post (7) extends into the locking device (4). By rotating the lock handle (41) on the locking device (4), the guide post (7) can be locked. The tool setting block (2) is a V-shaped tool setting block with a V-shaped groove (21) opened in the middle.

2. The method for tool setting using the in-situ measurement and dressing quick tool setting device of the polishing pad according to claim 1, characterized in that A group of guide rails (5) are vertically and symmetrically arranged in the fixed seat (1). Sliders (6) are arranged on the guide rails (5). The vertical moving slide (31) is located between the group of guide rails (5) and is fixedly connected to the sliders (6).

3. The method of tool setting using the in-situ measurement and dressing rapid tool setting device for polishing pad according to claim 1, characterized in that, A compression spring (8) is also sleeved on the guide post (7). The upper end of the compression spring (8) is fixedly connected to the vertical moving slide (31), and the lower end is fixedly connected to the locking device (4).

4. The method of tool setting using the in-situ measurement and dressing quick tool setting device for polishing pads according to claim 2, characterized in that The horizontal fine adjustment slide (32) includes a base (321), a fine adjustment slider (322) arranged in the chute of the base (321), and a fine adjustment knob (323) connected to the fine adjustment slider (322). The base (321) is fixed on the vertical moving slide (31).

5. The method of tool setting using the in-situ measurement and dressing quick tool setting device for polishing pads according to claim 4, characterized in that A groove (3221) is opened on the upper end surface of the fine adjustment slider (322). The tool setting block (2) is fixed in the groove (3221).

6. The method of tool setting using the in-situ measurement and dressing quick tool setting device for polishing pads according to claim 2, characterized in that, An anti-collision spring plunger (9) is also arranged in the fixed seat (1). The anti-collision spring plunger (9) is respectively located above and below the slider (6) and is used to limit the up and down movement of the slider (6) on the guide rail (5).

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