Wafer transfer fixture for etching

Abstract

The present invention discloses a wafer transfer fixture for etching, comprising a support arm and a circular clamping ring mounted on the support arm for clamping a wafer, the clamping ring comprising a plurality of clamping ring segments, one end of each clamping ring segment is provided with an arc-shaped plug rod, and the other end is provided with a socket adapted to the arc-shaped plug rod, the plug rod of the clamping ring segment is inserted into the socket of another adjacent clamping ring segment, the inner bottom of each clamping ring segment is provided with a latching tongue, the bottom of the latching tongue is flush with the bottom of the clamping ring segment, and the inner thickness of the latching tongue gradually increases from the inside to the outside, wherein two adjacent clamping ring segments are mounted on the support arm, and the support arm and each clamping ring segment are provided with an opening and closing mechanism for driving the clamping ring segments to open and close. The transfer fixture can well clamp the wafer to prevent the wafer from loosening during the transfer process, and at the same time, it is no longer necessary to use a pin for lifting, and the reliability is higher.

Description

Technical Field

[0001] The invention relates to a wafer transfer fixture for etching, belonging to the technical field of semiconductors. Background Art

[0002] In the field of semiconductor etching technology, the wafer is the substrate of the semiconductor component "grain" or "chip". It is generally a wafer or other semiconductor wafer. The wafer needs to be transferred during the entire etching process, and the transfer fixture for transferring the wafer in the vacuum chamber is an arc-shaped support ring. Because it is an arc-shaped support ring, it has an opening, and the wafer is placed on a platform with a very shallow circular placement groove on the platform for placing the wafer, and three ejector pins are arranged on the platform within the range of the placement groove. When the ejector pin lifts the wafer, the support ring can be inserted from the bottom, and the opening avoids the three ejector pins. In this way, the wafer is supported by the support ring and then transferred to other positions.

[0003] Although this structure can complete the transfer, it still has some disadvantages. First, the support ring only supports the disc but is not fixed. Therefore, it may become loose during the transfer process. Second, this transfer fixture requires three ejectors to be set on the platform, and a lifting action is also required. This makes the action more complicated and the three ejectors are easily damaged, making maintenance very troublesome. Summary of the invention

[0004] The technical problem to be solved by the present invention is to provide a wafer transfer fixture for etching, which can well clamp the wafer to prevent the wafer from loosening during the transfer process, and also eliminates the need for ejector pins for lifting, thereby increasing reliability.

[0005] In order to solve the above technical problems, the technical solution of the present invention is: a wafer transfer fixture for etching, comprising a support arm and a circular clamping ring installed on the support arm for clamping the wafer, the clamping ring comprising a plurality of clamping ring segments, one end of each clamping ring segment is provided with an arc-shaped insertion rod, and the other end is provided with a socket adapted to the arc-shaped insertion rod, the insertion rod of the clamping ring segment is inserted into the socket of another adjacent clamping ring segment, and a latch tongue is provided at the inner bottom of each clamping ring segment, the bottom of the latch tongue is flush with the bottom of the clamping ring segment, and the inner thickness of the latch tongue gradually increases from the inside to the outside, wherein two adjacent clamping ring segments are installed on the support arm, and an opening and closing mechanism for driving the clamping ring segments to open and close is installed on the support arm and each clamping ring segment.

[0006] As a preferred solution, the opening and closing mechanism includes a compression spring mounted on each insertion rod, a traction wire is installed on the outer periphery of each clamping ring segment, and a rewinding and unwinding power device for driving the traction wire to rewind or unwind is installed on the support arm.

[0007] As a preferred solution, the rewinding and unwinding power device includes a reduction motor installed on the support arm, a reel is installed on the output shaft of the reduction motor, the traction wire is wound on the reel, and the reel is driven by the reduction motor to rotate forward and reverse.

[0008] As a preferred solution, the support arm includes a first support arm and a second support arm, one end of the first support arm and the second support arm are slidably mounted on a mounting base and are respectively provided with guide wheels, a guide structure is provided between the first support arm and the second arm for facilitating the mutual sliding of the first support arm and the second arm, the other ends of the first support arm and the second arm are fixedly connected to one end of two adjacent clamping ring segments, the traction wire is wrapped around the outer circumference of each clamping ring segment, and then passed through the guide wheel and wound around the winding wheel.

[0009] As a preferred solution, a wire through hole is provided on the outer periphery of each clamp ring segment, and a threading channel extending along the length direction is provided on the first arm and the second arm, and the traction wire passes through each wire through hole and the threading channel.

[0010] As a preferred solution, the guide structure includes a guide rod, and the guide rod runs through the first support arm and the second support arm.

[0011] As a preferred solution, the latch tongue is a triangular-shaped latch tongue, and the upper surface of the latch tongue is set to be a plane.

[0012] As a preferred solution, the specific structure in which one end of the first arm and the second arm are slidably installed on the mounting base is: two columns are arranged on the upper surface of the mounting base, and horizontal and mutually parallel mounting rods are installed on the upper ends of the columns. Two mounting tubes are arranged at the bottom of the first arm and the second arm, and the first arm and the second arm are mounted on the mounting rods through the mounting tubes to achieve sliding, and the angle between the first arm and the second arm is between 1-2°.

[0013] After adopting the above technical scheme, the effect of the present invention is as follows: a wafer transfer fixture for etching includes a support arm and a circular clamping ring installed on the support arm for clamping the wafer, the clamping ring includes a plurality of clamping ring segments, one end of each clamping ring segment is provided with an arc-shaped insertion rod, and the other end is provided with a socket adapted to the arc-shaped insertion rod, the insertion rod of the clamping ring segment is inserted into the socket of another adjacent clamping ring segment, and a tongue is provided at the inner bottom of each clamping ring segment, the bottom of the tongue is flush with the bottom of the clamping ring segment, and the inner thickness of the tongue gradually increases from the inside to the outside, wherein two adjacent clamping ring segments are installed on the support arm, and a driving clamp is installed on the support arm and each clamping ring segment. The ring segments open and close the opening and closing mechanism. Therefore, in the actual transfer process, it is only necessary to open a notch corresponding to the position of the latch tongue on the edge of the placement groove on the platform. The clamping ring moves to the top of the wafer and descends. At this time, the clamping ring segment is in an open state. Then, when the latch tongue falls into the notch, the clamping ring segments close together, so that the latch tongue pushes the wafer from the bottom of the wafer, so that the original wafer enters the supporting area of ​​the latch tongue, and the wafer is also lifted a short distance. At the same time, the clamping ring segments continue to move closer and clamp the edge of the wafer, so that the clamping is completed. The transfer fixture can clamp the wafer well to prevent the wafer from loosening during the transfer process. At the same time, there is no need to use a pin for lifting, and the reliability is higher.

[0014] Furthermore, since the opening and closing mechanism includes a compression spring sleeved on each insertion rod, a traction wire is installed on the periphery of each clamping ring segment, and a reeling and unreeling power device for driving the traction wire to be reeled or unreeled is installed on the support arm, the reeling and unreeling power device can wind the traction wire to close the clamping ring segment, and when unreeling the traction wire, the clamping ring segment expands under the elastic force of the compression spring, thereby realizing opening and closing, and its clamping force can be well controlled by the length of the reeling traction wire. At the same time, the compression spring is sleeved on the insertion rod, so when the compression spring is fully contracted, the compression spring can no longer be compressed, so that the limit clamping force of the clamping ring segment can be controlled, thereby avoiding excessive clamping force. The retraction or expansion stroke of the clamping ring segment is relatively small, so only the diameter of the insertion hole needs to be slightly larger than the insertion rod to meet the retraction or expansion of the clamping ring segment, which is convenient for clamping.

[0015] Since the support arm includes a first support arm and a second support arm, one end of the first support arm and the second support arm are slidably installed on the installation base and are respectively equipped with guide wheels. A guide structure is arranged between the first support arm and the second arm to facilitate the mutual sliding of the first support arm and the second arm. The other ends of the first support arm and the second arm are fixedly connected to one end of two adjacent clamping ring segments. The traction steel wire is wrapped around the outer circumference of each clamping ring segment and then passed through the guide wheel and then wound around the winding wheel. The support arm can support the entire clamping ring well. At the same time, the first support arm and the second arm can slide slightly with the clamping ring segment. In the process of action, since the traction steel wire is used as power transmission, even if the first support arm and the second arm slide relative to each other, the power transmission is very stable.

[0016] Furthermore, since the guide structure comprises a guide rod which passes through between the first support arm and the second support arm, the first support arm and the second support arm can be guided and slid on the guide rod, so the movement is more reliable.

[0017] Furthermore, since the clamping tongue is a triangular-shaped clamping tongue, the upper surface of the clamping tongue is set to be a plane, so that the upper surface of the clamping tongue can better support the wafer. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] The present invention is further described below in conjunction with the accompanying drawings and embodiments.

[0019] Figure 1 is a three-dimensional structural diagram of an embodiment of the present invention;

[0020] Figure 2 is a top view of an embodiment of the present invention;

[0021] Figure 3 is a stereogram of the clamp ring segment;

[0022] Figure 4 It is a stereogram of the clamp ring segment from another angle;

[0023] Figure 5 It is a schematic diagram of the structure of the placement slot on the platform;

[0024] Figure 6 It is a stereogram of the tab;

[0025] In the attached figure: 1. Support arm; 2. Clamp ring; 21. Clamp ring section; 22. Tab; 221. Tip; 222. Flat surface; 23. Compression spring; 24. Wire through hole; 25. Plug hole; 26. Plug rod; 3. Base; 4. Reducer motor; 5. Guide wheel; 6. Column; 7. Mounting cylinder; 8. Guide rod; 9. Traction wire; 10. Winding wheel; 11. Placement groove; 12. Notch; 13. Mounting rod; 14. Disc. DETAILED DESCRIPTION

[0026] The present invention is further described in detail below through specific examples.

[0027] like Figures 1 to 6As shown, a wafer transfer fixture for etching includes a support arm 1 and a circular clamping ring 2 mounted on the support arm 1 for clamping a wafer 14, the clamping ring 2 includes a plurality of clamping ring segments 21, one end of each clamping ring segment 21 is provided with an arc-shaped insertion rod 26, and the other end is provided with a socket 25 adapted to the arc-shaped insertion rod 26, the insertion rod 26 of the clamping ring segment 21 is inserted into the socket 25 of another adjacent clamping ring segment 21, and the inner bottom of each clamping ring segment 21 is provided with a tongue 22, the bottom of the tongue 22 is flush with the bottom of the clamping ring segment 21, and the inner thickness of the tongue 22 gradually increases from the inside to the outside, and as shown in FIG. Figure 6 As shown, Figure 6 Schematic diagram of the structure of the enlarged state of the tongue 22, wherein the inner thickness of the tongue 22 gradually increases from the inside to the outside, so that a tip 221 is formed at its inner end, and the tongue 22 is a triangular tongue 22, and the upper surface of the tongue 22 is set to a plane 222.

[0028] For example Figure 5 As shown, using the transfer fixture in this embodiment, it is only necessary to slightly modify the placement groove 11 structure of the platform for placing the silicon wafer. If the placement groove 11 is a circular placement groove 11, it is only necessary to open several notches 12 that match the latch 22 on the groove wall of the placement groove 11. In this way, when the latch 22 enters the inside of the placement groove 11 from the outside of the placement groove 11 through the notch 12, the latch 22 will gradually enter the bottom of the wafer 14, and finally the flat surface 222 on the upper surface of the latch 22 is used to hold up the wafer 14, and at the same time, the snap ring section contacts the edge of the wafer 14, thereby completing the clamping. In this way, the wafer 14 is not easy to fall off, and at the same time, there is no need to set a number of ejectors and lifting mechanisms on the platform, which greatly improves reliability, and there is no need to replace the ejector during maintenance, which greatly saves the maintenance cost.

[0029] Two adjacent clamping ring segments 21 are mounted on the support arm 1 , and an opening and closing mechanism for driving the clamping ring segments 21 to open and close is mounted on the support arm 1 and each clamping ring segment 21 .

[0030] In this embodiment, the opening and closing mechanism includes a compression spring 23 mounted on each insertion rod 26, a traction wire 9 is installed on the outer periphery of each clamping ring segment 21, and a reeling and unreeling power device for driving the traction wire 9 to reel or unreel is installed on the support arm 1. The opening and closing mechanism utilizes the traction of the traction wire 9 to achieve the closing of the clamping ring segments 21, and utilizes the elastic force of the compression spring 23 itself to achieve the opening of the clamping ring segments 21.

[0031] The sliding between the clamping ring segments 21 relies on the arc-shaped insertion rod 26 and the insertion hole 25. In this embodiment, the diameter change caused by the opening and closing of the clamping ring segments 21 does not need to be very large. Figure 2As shown in the dotted circle, the opening and closing of the clamp ring section 21 only requires the radial length of the tongue 22. Therefore, the size of the insertion hole 25 only needs to be slightly larger than the size of the insertion rod 26 to meet the sliding fit between the two.

[0032] like Figure 1 As shown, the reeling and winding power device includes a reduction motor 4 installed on the support arm 1, and a reel 10 is installed on the output shaft of the reduction motor 4. The traction wire 9 is wound on the reel 10, and the reel 10 is driven by the reduction motor 4 to rotate forward and reverse.

[0033] In this embodiment, the support arm 1 includes a first support arm and a second support arm, one end of the first support arm and the second support arm are slidably mounted on the mounting base 3 and are respectively installed with guide wheels 5, a guide structure is provided between the first support arm and the second support arm to facilitate the mutual sliding of the first support arm and the second support arm, the other end of the first support arm and the second support arm is fixedly connected to one end of two adjacent clamping ring segments 21, and the traction wire 9 is wound around the outer circumference of each clamping ring segment 21 and then passed through the guide wheel 5 before being wound around the winding wheel 10. In this embodiment, both ends of the traction wire 9 are wound around different winding wheels 10, and both winding wheels 10 are driven by a reduction motor 4, which is a servo reduction motor 4, which can well control the winding distance and thus control the clamping force. The guide structure includes a guide rod 8, which runs through between the first support arm and the second support arm. The specific structure of the first arm and the second arm, one end of which is slidably mounted on the mounting base 3, is as follows: two columns 6 are arranged on the upper surface of the mounting base 3, and a horizontal and mutually parallel mounting rod 13 is installed on the upper end of the column 6. Two mounting tubes 7 are arranged at the bottom of the first arm and the second arm, and the first arm and the second arm are mounted on the mounting rod 13 through the mounting tube 7 to achieve sliding, and the angle between the first arm and the second arm is between 1-2°. The first arm and the second arm have a certain angle, so that when the clamping ring section 21 is closed or opened, the sliding range between the first arm and the second arm at the end with the guide wheel 5 is relatively small, which is more conducive to the operation and winding of the steel wire.

[0034] In the present embodiment, the clamping force can be controlled not only by the servo reduction motor 4 but also by the length of the compression spring 23. Since the compression spring 23 is located between adjacent clamping ring segments 21, when the clamping ring segments 21 are retracted, the compression spring 23 is continuously compressed and becomes shorter. When the compression spring 23 is compressed to the limit, the compression spring 23 can no longer be compressed. At this time, the clamping force should be the limit. At this time, it is only necessary to select a suitable compression spring 23 to further control the clamping force and avoid damage to the wafer 14.

[0035] For example Figure 3 and Figure 4As shown, the outer periphery of each clamp ring segment 21 is provided with a steel wire through hole 24, and the first arm and the second arm are provided with a threading channel extending along the length direction thereof, and the traction steel wire 9 passes through each steel wire through hole 24 and the threading channel. In this way, the winding and traction of the traction steel wire 9 are smoother, and the steel wire exposed outside is more regular.

[0036] The specific structures of the servo reduction motor 4, winding wheel 10 and transition wheel mentioned in this embodiment are all current conventional technologies. The motor, specific structure and principle and corresponding servo motor control are disclosed in detail in the "Mechanical Design Manual, Fifth Edition", the 28th printing of the fifth edition in Beijing in April 2008. They all belong to the existing technology and their structures are clear.

[0037] The above-described embodiments are merely descriptions of preferred implementations of the present invention and are not intended to limit the scope of the present invention. Various modifications and alterations to the technical solutions of the present invention without departing from the spirit of the present invention should fall within the scope of protection defined by the claims of the present invention.

Claims

1. A wafer transfer fixture for etching, characterized in that: It includes a support arm and a circular clamping ring installed on the support arm for clamping a disc, the clamping ring includes a plurality of clamping ring segments, one end of each clamping ring segment is provided with an arc-shaped insertion rod, and the other end is provided with a socket adapted to the arc-shaped insertion rod, the insertion rod of the clamping ring segment is inserted into the socket of another adjacent clamping ring segment, and the inner bottom of each clamping ring segment is provided with a latch tongue, the bottom of the latch tongue is flush with the bottom of the clamping ring segment, and the inner thickness of the latch tongue gradually increases from the inside to the outside, wherein two adjacent clamping ring segments are installed on the support arm, and an opening and closing mechanism for driving the clamping ring segments to open and close is installed on the support arm and each clamping ring segment, the opening and closing mechanism includes a compression spring sleeved on each insertion rod, a traction wire is installed on the outer periphery of each clamping ring segment, and a rewinding and unwinding power device for driving the traction wire to rewind or unwind is installed on the support arm.

2. The wafer transfer fixture for etching as claimed in claim 1, characterized in that: The reeling and unreeling power device comprises a reduction motor mounted on the support arm, a reeling wheel is mounted on the output shaft of the reduction motor, the traction wire is wound on the reeling wheel, and the reeling wheel is driven by the reduction motor to rotate forward and reverse.

3. The wafer transfer fixture for etching as claimed in claim 2, characterized in that: The support arm includes a first support arm and a second support arm, one end of the first support arm and the second support arm are slidably mounted on a mounting base and are respectively provided with guide wheels, a guide structure is provided between the first support arm and the second arm for facilitating the mutual sliding of the first support arm and the second arm, the other ends of the first support arm and the second arm are fixedly connected to one end of two adjacent clamping ring segments, the traction wire is wrapped around the outer circumference of each clamping ring segment and then passed through the guide wheel and then wound around the winding wheel.

4. The wafer transfer fixture for etching as claimed in claim 3, characterized in that: A wire through hole is arranged on the outer periphery of each clamp ring segment, and a threading channel extending along the length direction thereof is arranged on the first arm and the second arm, and the traction wire passes through each wire through hole and the threading channel.

5. The wafer transfer fixture for etching as claimed in claim 4, characterized in that: The guide structure comprises a guide rod which passes through the first support arm and the second support arm.

6. The wafer transfer fixture for etching as claimed in claim 5, characterized in that: The clamping tongue is a triangular clamping tongue, and the upper surface of the clamping tongue is set to be a plane.

7. The wafer transfer fixture for etching as claimed in claim 6, characterized in that: The specific structure in which one end of the first arm and the second arm are slidably installed on the mounting base is as follows: two columns are arranged on the upper surface of the mounting base, and horizontal and mutually parallel mounting rods are installed on the upper ends of the columns. Two mounting tubes are arranged at the bottom of the first arm and the second arm, and the first arm and the second arm are mounted on the mounting rods through the mounting tubes to achieve sliding, and the angle between the first arm and the second arm is between 1-2°.

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