Magnet base, Hall ion source and magnet thermal protection device

Abstract

The present application relates to a magnet base, including a water-cooled outer cover; an upper sealing ring and a lower sealing ring are respectively provided at both ends of the water-cooled outer cover; the upper sealing ring is used to connect to the upper cover plate of the Hall ion source, and the lower sealing ring is used to connect to the bottom plate of the Hall ion source; the interior of the water-cooled outer cover is hollow, and the space inside the water-cooled outer cover is used to install the magnet; the water-cooled outer cover is arranged with a water channel around the space where the magnet is installed for wrapping; the water-cooled outer cover is also provided with a water inlet and a water outlet of the water channel; the water-cooled outer cover is used to isolate the external heat radiation from being transmitted to the internal magnet, and the magnet is water-cooled and dissipated through the water channel. This solution reduces the influence of external environmental heat radiation on the magnet, and prevents the risk of magnetic attenuation of the magnet due to heat radiation. In addition, the present application also provides a Hall ion source and a magnet thermal protection device, which makes the cooling structure of the anode simpler and the maintenance more convenient.

Description

Technical Field

[0001] The present application relates to the technical field of ion sources, and in particular to a magnet base, a Hall ion source and a magnet thermal protection device. Background Art

[0002] Ion source is an applied science and technology with wide applications, many types, many sciences involved, strong process technology, and rapid development. As a very common, simple and durable ion source type, Hall ion source is mostly used in the field of thin film deposition as a deposition auxiliary component to improve the physical properties of thin films.

[0003] refer to Figure 1 As shown in the figure, the basic principle of the traditional Hall ion source is: the magnetic field of the Hall effect is generated by a permanent magnet, the anode plasmatizes the process gas in cooperation with a strong axial magnetic field, and the plasmatized gas is accelerated by the anode to separate the gas ions and form an ion beam. Because the axial magnetic field is too strong, the Hall ion source ion beam needs to be supplemented with electrons to neutralize the ion flow. As shown in the figure, the common neutralization source is tungsten wire (cathode).

[0004] The ion current of the Hall ion source is almost proportional to the gas flow rate, and a larger ion current can be obtained. Permanent magnets are generally used for strong magnetic fields. However, the traditional Hall ion source uses a hot filament cathode, which generates a lot of heat. The anode current of the Hall ion source is large, and the anode itself generates a lot of heat. At the same time, when processing components at high temperatures, the external environment is also very large. Figure 2 As shown in the figure, the dotted arrows in the figure represent the influence of heat radiation from the external environment, anode and cathode radiation on the magnet. Permanent magnets lose their magnetism at high temperatures, and the high-temperature processing technology, external environment temperature, anode and cathode radiation heat, etc. are transferred to the magnet in large quantities, which can easily cause the magnet to lose its magnetism due to high temperature. Summary of the invention

[0005] The purpose of the present application is to solve one of the above-mentioned technical defects, especially the problem that a large amount of heat is conducted to the magnet, which easily causes the magnet to become overheated and lose its magnetism.

[0006] In order to achieve the above objectives, this application provides the following technical solutions:

[0007] A magnet base comprises a water-cooling outer cover; an upper sealing ring and a lower sealing ring are respectively provided at two ends of the water-cooling outer cover;

[0008] The upper sealing ring is used to be connected to the upper cover plate of the Hall ion source, and the lower sealing ring is used to be connected to the bottom plate of the Hall ion source;

[0009] The interior of the water-cooling outer cover is designed to be hollow, and the space inside the water-cooling outer cover is used to install the magnet; the water-cooling outer cover is arranged with a water channel around the space where the magnet is installed to wrap it; the water-cooling outer cover is also provided with a water inlet and a water outlet of the water channel;

[0010] The water-cooling outer cover is used to isolate external heat radiation from being transferred to the internal magnet, and to perform water cooling and heat dissipation on the magnet through the water channel.

[0011] In one embodiment, the upper sealing ring and the lower sealing ring are both provided with screw holes, and are respectively fixed to the upper cover plate and the bottom plate of the Hall ion source by screws.

[0012] In one embodiment, the water-cooling outer cover and its upper sealing ring and lower sealing ring are circular structures, and their cross-section is an "I" shape.

[0013] In one embodiment, the upper sealing ring and the lower sealing ring are provided with gas pipeline through holes for penetrating and installing the gas pipeline.

[0014] The magnet base places the magnet in a water-cooled environment, which provides perfect protection for the magnet. It also isolates the magnet from external heat sources, reduces the impact of external environmental heat radiation on the magnet, and prevents the risk of magnetic attenuation of the magnet due to thermal radiation.

[0015] A Hall ion source comprises a magnet, an anode, a cathode, a magnet and a magnetic conductive block and the magnet base;

[0016] The upper sealing ring is connected to the upper cover plate of the Hall ion source, and the lower sealing ring is connected to the bottom plate of the Hall ion source;

[0017] The magnet is installed in the space inside the water-cooling outer cover of the magnet base, and the magnetic conductive block is installed between the magnet and the anode; the anode is installed on the upper cover plate;

[0018] The water-cooling outer cover isolates the magnet from the outside to prevent external heat radiation from being transferred to the magnet; the water channel performs water cooling and heat dissipation on the magnet.

[0019] In one embodiment, the magnet is a permanent magnet with a hollow structure;

[0020] The sealing surface of the upper sealing ring is connected to the upper cover plate through a sealing ring, and the sealing surface of the lower sealing ring is connected to the bottom plate through a sealing ring.

[0021] In one embodiment, the upper cover plate is made of a heat-conducting material, and the anode conducts heat to the upper cover plate;

[0022] The water-cooling outer cover is tightly fitted to the upper cover plate, and the upper cover plate conducts heat to the water-cooling outer cover and dissipates heat through the water channel.

[0023] In one embodiment, an insulating thermally conductive ceramic is installed between the contact portion between the anode and the upper cover plate, and a thermally conductive graphite sheet is also provided on the insulating thermally conductive ceramic;

[0024] The anode conducts heat to the upper cover plate through the insulating thermally conductive ceramic and the thermally conductive graphite sheet.

[0025] In one embodiment, the Hall ion source further comprises a shielding shell of pluggable design;

[0026] The shielding shell is made of magnetic conductive material and is fixed to the bottom plate by magnetic attraction.

[0027] The above-mentioned Hall ion source places the magnet in a water-cooled environment, which is perfectly protected. At the same time, the magnet is isolated from external heat sources, reducing the impact of external environmental heat radiation on the magnet, and preventing the magnet from attenuating due to heat radiation, thereby improving the overall stability of the Hall ion source. Furthermore, based on the cooling method of the anode, an indirect water cooling solution is provided to transfer the heat of the anode to the magnet base for water cooling and heat dissipation, making the cooling structure of the anode simpler and maintenance more convenient.

[0028] A magnet thermal protection device is used to protect the magnet of a Hall ion source, comprising a water-cooled outer cover with a hollow interior;

[0029] The space inside the water-cooling outer cover is used to install the magnet; the water-cooling outer cover is provided with a water channel around the space for installing the magnet to wrap it; the water-cooling outer cover is also provided with a water inlet and a water outlet of the water channel;

[0030] The water-cooling outer cover is used to isolate external heat radiation from being transferred to the internal magnet, and to perform water cooling and heat dissipation on the magnet through the water channel.

[0031] The above-mentioned magnet thermal protection device can be directly used to protect the magnet of the Hall ion source, improve the Hall ion source, etc. By placing the magnet in a water-cooled environment, it is perfectly protected. At the same time, the magnet is isolated from the external heat source, reducing the impact of external environmental thermal radiation on the magnet, and preventing the risk of magnetic attenuation of the magnet due to thermal radiation.

[0032] Additional aspects and advantages of the present application will be partially given in the following description, which will become apparent from the following description, or will be understood through the practice of the present application. BRIEF DESCRIPTION OF THE DRAWINGS

[0033] The above and / or additional aspects and advantages of the present application will become apparent and easily understood from the following description of the embodiments in conjunction with the accompanying drawings, in which:

[0034] Figure 1 It is a schematic diagram of the structure of a traditional Hall ion source;

[0035] Figure 2 It is a schematic diagram of the heat radiation to which the magnet is subjected;

[0036] Figure 3 is a schematic structural diagram of a magnet base according to an embodiment;

[0037] Figure 4 is a schematic cross-sectional view of the magnet base;

[0038] Figure 5 is a cross-sectional schematic diagram of a Hall ion source according to an embodiment;

[0039] Figure 6 It is a schematic diagram of the installation of the shielding shell;

[0040] Figure 7 It is a schematic diagram of the structure of a magnet thermal protection device. DETAILED DESCRIPTION

[0041] The embodiments of the present application are described in detail below, and examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present application, and cannot be interpreted as limiting the present application.

[0042] Those skilled in the art will appreciate that, unless otherwise stated, the singular forms "a", "an", "said" and "the" used herein may also include plural forms. It should be further understood that the term "comprising" used in the specification of the present application refers to the presence of the features, integers, steps, operations, but does not exclude the presence or addition of one or more other features, integers, steps, operations.

[0043] It will be understood by those skilled in the art that, unless otherwise defined, all terms (including technical and scientific terms) used herein have the same meaning as generally understood by those skilled in the art to which this application belongs. It should also be understood that terms such as those defined in common dictionaries should be understood to have meanings consistent with the meanings in the context of the prior art, and will not be interpreted with idealized or overly formal meanings unless specifically defined as here.

[0044] The magnetic field of the Hall ion source is mainly generated by a permanent magnet, using a hot filament as a source of free electrons. The hot cathode generates electrons by heating the filament, and the temperature can generally reach above 1000°C. The thermal radiation effect can easily cause the magnetic field of the permanent magnet to lose magnetism. At the same time, in the coating process, it will work simultaneously with multiple strong heat radiation components. For example, thermionic guns, thermal resistor evaporation components, and some processes, these equipment need to be heated to hundreds of degrees; in these high-temperature environments, the permanent magnet will be threatened by thermal radiation in all directions. In addition, the current of the anode is generally around 10A, the heat generated is large, and the radiation from the anode will affect the effect of the magnet.

[0045] Based on the above-mentioned problem that a large amount of heat is conducted to the magnet, which easily causes the magnet to lose its magnetism due to high temperature, the present application provides a magnet base for installing the magnet in the magnetic field of the Hall ion source, thereby reducing the influence of heat radiation on the magnet.

[0046] refer to Figure 3 and Figure 4 As shown, the magnet base provided in the present application includes a water-cooling outer cover 10; an upper sealing ring 110 and a lower sealing ring 120 are respectively provided at both ends of the water-cooling outer cover 10;

[0047] The upper sealing ring 110 is used to be connected to the upper cover plate 21 of the Hall ion source, and the lower sealing ring 120 is used to be connected to the bottom plate 22 of the Hall ion source;

[0048] The interior of the water-cooling housing 10 is hollow, and the space inside the water-cooling housing 10 is used to install the magnet 51; the water-cooling housing 10 is provided with a water channel 130 around the space where the magnet 51 is installed to wrap the space; the water-cooling housing 10 is also provided with a water inlet 1301 and a water outlet 1302 of the water channel 130;

[0049] The water-cooling outer cover 10 is used to isolate external heat radiation from being transferred to the internal magnet 51 , and to perform water cooling and heat dissipation on the magnet 51 through the water channel 130 .

[0050] The magnet base of the above embodiment can be used to protect the magnet 51 in the Hall ion source. In actual use, the magnet is placed in the hollow part of the water-cooling outer cover 10, and then installed in the Hall ion source, and then connected to the external inlet and outlet water pipes to perform water cooling on the magnet 51, providing a full protection structure for the magnet 51, so that the magnet 51 is in a water-cooling environment. The water-cooling outer cover 10 itself can isolate the magnet from the external heat source, thereby greatly reducing the temperature of the magnet 51.

[0051] In one embodiment, reference Figure 4As shown, it can be seen from the figure that the water-cooling outer cover 10 and its upper sealing ring 110 and lower sealing ring 120 are of an integrally formed design, and the water-cooling outer cover 10 and its upper sealing ring 110 and lower sealing ring 120 are circular structures, and their cross-section is an "I" shape.

[0052] Combination Figure 2 , Figure 3 and Figure 4 The upper sealing ring 110 and the lower sealing ring 120 are both provided with screw holes 102, which are respectively fixed to the upper cover plate 21 and the bottom plate 22 of the Hall ion source by screws. The upper sealing ring 110 and the lower sealing ring 120 are provided with gas pipeline through holes for penetrating and installing gas pipelines.

[0053] The magnet base of the above-mentioned embodiments can be used to improve the traditional Hall ion source. The magnet 51 is placed in the magnet base and combined with the protection of the water cooling structure, so as to fundamentally solve the influence of heat radiation from the external environment, the anode 23 and the cathode radiation on the magnet 51, and avoid the risk of the permanent magnet losing its magnetism at high temperature.

[0054] Based on the magnet base provided in the above embodiments, the present application also provides a Hall ion source; Figures 1 to 5 As shown, the Hall ion source includes a magnet 51, an anode 23, a cathode, a magnet conductive block 25 and a magnet base provided in any of the above embodiments;

[0055] The upper sealing ring 110 is connected to the upper cover plate 21 of the Hall ion source, and the lower sealing ring 120 is connected to the bottom plate 22 of the Hall ion source;

[0056] The magnet 51 is installed in the space inside the water-cooling outer cover 10 of the magnet base, and the magnetic conductive block 25 is installed between the magnet 51 and the anode 23; the anode 23 is installed on the upper cover 21;

[0057] The water-cooling cover 10 isolates the magnet 51 from the outside to prevent external heat radiation from being transferred to the magnet 51; the water channel 130 performs water cooling to dissipate heat for the magnet.

[0058] In the Hall ion source of the above embodiment, the magnet is mainly protected by the magnet base, which fundamentally solves the influence of heat radiation from the external environment, the anode 23 and the cathode radiation on the magnet 51, avoids the risk of the permanent magnet losing its magnetism at high temperature, and thus can improve the overall stability of the Hall ion source.

[0059] In order to further improve the stability of the Hall ion source, more improvement schemes of the Hall ion source are described below in combination with the accompanying drawings and several embodiments.

[0060] In one embodiment, the magnet 51 of the Hall ion source can be a permanent magnet with a hollow structure; the hollow structure allows air to flow up and down the magnet 51, thereby further improving heat exchange and dissipating more heat through the water path 130.

[0061] Further, such as Figure 4 As shown, the sealing surface of the upper sealing ring 110 is connected to the upper cover plate 21 through a sealing ring, and the sealing surface of the lower sealing ring 120 is connected to the bottom plate 22 through a sealing ring; through the sealing design, it can be ensured that the magnet base and the ion source gas chamber are sealed and isolated, so that it can maintain stable working performance when used in a vacuum environment.

[0062] Considering the cooling requirements of the Hall ion source anode, traditional technologies often design water channels inside the anode to dissipate heat through water cooling. Due to the high voltage of the anode, the water channel connection requirements are high, and it is difficult to ensure sealing and insulation. In addition, the anode needs to be frequently disassembled and maintained. Excessive disassembly and assembly of the water channel can easily lead to component wear, water leakage and air leakage, making maintenance extremely inconvenient.

[0063] In order to solve the above defects, reduce the sealing and insulation costs and failure risks, and reduce the difficulty of anode disassembly and maintenance. Figure 5 As shown, the upper cover plate 21 of the Hall ion source can be made of a heat-conducting material, so that the anode 23 can transfer heat to the upper cover plate 21; the water-cooled outer cover 10 is tightly fitted with the upper cover plate 21, and the upper cover plate 21 transfers heat to the water-cooled outer cover 10, and dissipates heat through the water channel 130. Preferably, an insulating heat-conducting ceramic 28 can be installed between the contact portion between the anode 23 and the upper cover plate 21, and a heat-conducting graphite sheet 29 is also provided above and below the insulating heat-conducting ceramic 28; the anode 23 transfers heat to the upper cover plate 21 through the insulating heat-conducting ceramic 28 and the heat-conducting graphite sheet 29.

[0064] In the above embodiment, the internal structure of the Hall ion source is fully utilized, and an indirect water cooling solution is designed based on the cooling method of the anode 23. The water path 130 on the magnet base is used to dissipate heat. The heat of the anode 23 is transferred to the magnet base to the maximum extent by using thermal conductive materials, thereby eliminating the need to set the water path 130 in the anode 23, making the cooling structure of the anode 23 simpler and more convenient to maintain.

[0065] Based on the Hall ion source provided in the aforementioned embodiment, since the magnet base and the gas chamber are already strictly sealed, when setting up the external shielding shell 41, it can be installed in a more convenient way to reduce the difficulty of disassembly and maintenance.

[0066] In one embodiment, reference Figure 6As shown, the Hall ion source provided in the present application may also include a shielding shell 41 of a plug-in design; the shielding shell 41 is made of a magnetic conductive material, and the shielding shell 41 is fixed to the base plate 22 by magnetic attraction.

[0067] Combination Figure 2 and Figure 6 By comparing the structure of the shielding shell 41, it can be seen Figure 2 In order to achieve sealing, the bottom plate 22 and the entire shielding shell 41 are designed as an integrated whole, which is very inconvenient for disassembly and maintenance. Figure 6 In the structure shown, since the anode 23 part and the magnet base part are strictly sealed and isolated, the shielding shell 41 only needs to be fixed by magnetic attraction, which does not affect the overall sealing condition. The shielding shell 41 can be directly plugged in and out to achieve screwless installation.

[0068] An embodiment of the magnet thermal protection device is described below in conjunction with the accompanying drawings.

[0069] In order to improve the stability of the magnet in the Hall ion source and avoid the problem of the magnet losing its magnetism due to high temperature, the present application designs a magnet thermal protection device that can be directly used to protect the magnet of the Hall ion source.

[0070] refer to Figure 7 As shown, the magnet thermal protection device may include a water-cooled outer cover 10 with a hollow interior; the space inside the water-cooled outer cover 10 is used to install the magnet 51; the water-cooled outer cover 10 is arranged with a water channel 130 around the space where the magnet 51 is installed to wrap it; the water-cooled outer cover 10 is also provided with a water inlet 1301 and a water outlet 1302 of the water channel 130; the water-cooled outer cover 10 is used to isolate the external heat radiation from being transferred to the internal magnet 51, and the magnet 51 is water-cooled and dissipated through the water channel 130.

[0071] The magnet thermal protection device of the above embodiment can be used to improve the Hall ion source, so as to protect the magnet 51. The magnet 51 is placed in the hollow part of the water-cooling cover 10 and then reinstalled into the Hall ion source, and then connected to the external water inlet and outlet pipes to water-cool the magnet 51 to dissipate heat, providing a full protection structure for the magnet, so that the magnet 51 is in a water-cooled environment, and the water-cooling cover 10 itself can isolate the magnet 51 from the external heat source, thereby greatly reducing the temperature of the magnet 51. This technical solution can conveniently modify various Hall ion sources, making their working effect better and more stable.

[0072] Other embodiments of the magnet thermal protection device are similar to those of the above-mentioned magnet base and will not be described in detail here.

[0073] The above description is only a partial implementation method of the present application. It should be pointed out that for ordinary technicians in this technical field, several improvements and modifications can be made without departing from the principles of the present application. These improvements and modifications should also be regarded as the scope of protection of the present application.

Claims

1. A magnet base, characterized in that: It comprises a water-cooling outer cover; an upper sealing ring and a lower sealing ring are respectively provided at two ends of the water-cooling outer cover; The upper sealing ring is used to be connected to the upper cover plate of the Hall ion source, and the lower sealing ring is used to be connected to the bottom plate of the Hall ion source. The upper sealing ring and the lower sealing ring are both provided with screw holes, and are respectively fixed to the upper cover plate and the bottom plate of the Hall ion source by screws; The water-cooling outer cover and the upper sealing ring and the lower sealing ring are designed as an integral molding, and the water-cooling outer cover and the upper sealing ring and the lower sealing ring are circular structures, and their cross-sections are "I"-shaped; The interior of the water-cooling outer cover is designed to be hollow, and the space inside the water-cooling outer cover is used to install the magnet; the water-cooling outer cover is arranged with a water channel around the space where the magnet is installed to wrap it; the water-cooling outer cover is also provided with a water inlet and a water outlet of the water channel; The water-cooling outer cover is used to isolate external heat radiation from being transferred to the internal magnet, and to perform water cooling and heat dissipation on the magnet through the water channel.

2. The magnet base according to claim 1, characterized in that: The upper sealing ring and the lower sealing ring are provided with gas pipeline through holes for penetrating and installing the gas pipeline.

3. A Hall ion source, comprising a magnet, an anode, a cathode, a magnet and a magnetic conductive block, characterized in that: Also includes the magnet base according to any one of claims 1 to 2; The upper sealing ring is connected to the upper cover plate of the Hall ion source, and the lower sealing ring is connected to the bottom plate of the Hall ion source; The magnet is installed in the space inside the water-cooling outer cover of the magnet base, and the magnetic conductive block is installed between the magnet and the anode; the anode is installed on the upper cover plate; The water-cooled outer cover isolates the magnet from the outside, preventing external heat radiation from being transferred to the magnet; The water channel performs water cooling and heat dissipation on the magnet; The upper cover is made of heat-conducting material, and the anode conducts heat to the upper cover; the water-cooling cover is tightly fitted to the upper cover, and the upper cover conducts heat to the water-cooling cover and dissipates heat through the water channel.

4. The Hall ion source according to claim 3, characterized in that: The magnet is a permanent magnet with a hollow structure; The sealing surface of the upper sealing ring is connected to the upper cover plate through a sealing ring, and the sealing surface of the lower sealing ring is connected to the bottom plate through a sealing ring.

5. The Hall ion source according to claim 3, characterized in that: An insulating thermally conductive ceramic is installed between the contact portion between the anode and the upper cover plate, and a thermally conductive graphite sheet is also provided on the insulating thermally conductive ceramic; The anode conducts heat to the upper cover plate through the insulating thermally conductive ceramic and the thermally conductive graphite sheet.

6. The Hall ion source according to claim 3, characterized in that: Also included is a shielded housing with a pluggable design; The shielding shell is made of magnetic conductive material and is fixed to the bottom plate by magnetic attraction.

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