A piezoelectric micro pump and gas control device

Abstract

The present invention relates to the field of fluid control, and in particular to a piezoelectric micropump and a gas control device. A piezoelectric micropump comprises: a resonant component, wherein the resonant component is composed of a plate component, a connecting component and a resonant component from the outside to the inside, one surface of the resonant component is a plane, and a concave structure is formed in the middle of the resonant component on the other surface of the resonant component, and air outlet holes are distributed on the connecting component; a piezoelectric vibrator, wherein the piezoelectric vibrator is stacked with the resonant component, the piezoelectric vibrator is close to the plane of the resonant component, and an air inlet hole is arranged on the piezoelectric vibrator, and the air inlet hole is directly opposite to the concave structure of the resonant component. The present invention solves the technical problem that it is difficult to simultaneously improve the output flow rate and output pressure of the piezoelectric micropump, that is, the low energy conversion efficiency.

Description

Technical Field

[0001] The invention relates to the field of fluid control, and in particular to a piezoelectric micro pump and a gas control device. Background Art

[0002] With the development of portable and wearable electronic devices, the size of electronic devices has been reduced a lot, especially the thickness requirement is thinner, which requires smaller basic components. Piezoelectric micropumps are more and more widely used in electronic devices, and miniaturization has put forward higher requirements for piezoelectric micropumps, such as low voltage, miniaturization and high output performance. However, if the piezoelectric micropump in the prior art needs to be miniaturized and low voltage, the output capacity (output pressure and output flow) of the piezoelectric pump will be reduced. For a piezoelectric micropump driven by constant power, the greater the output flow, the smaller the output pressure, and vice versa. Therefore, under the premise of low power and miniaturization, it is of great significance to simultaneously improve the output flow and output pressure of the piezoelectric pump, that is, the energy conversion efficiency. Summary of the invention

[0003] In order to solve the technical problem that it is difficult to simultaneously improve the output flow rate and output pressure of a piezoelectric micropump in the prior art, that is, the energy conversion efficiency is low, the present invention proposes a piezoelectric micropump and a gas control device, which effectively solve the above technical problems. The technical solution of the present invention is as follows:

[0004] A piezoelectric micro pump comprises: a resonance member, wherein the resonance member is composed of a plate member portion, a connection portion and a resonance portion from the outside to the inside, wherein one surface of the resonance member is a plane, and a concave structure is formed in the middle of the resonance portion on the other surface of the resonance member, and air outlet holes are distributed on the connection portion; a piezoelectric vibrator, wherein the piezoelectric vibrator is stacked with the resonance member, the piezoelectric vibrator is close to the plane of the resonance member, and an air inlet hole is arranged on the piezoelectric vibrator, and the air inlet hole is directly opposite to the concave structure of the resonance portion.

[0005] The stiffness of the connection part passing through the periphery of the resonance part is small, and a concave structure is formed in the middle of the resonance part. The stiffness of the connection part and the concave structure area is small. Under the action of the piezoelectric vibrator, the resonance part can be equivalent to a two-degree-of-freedom vibration system. When the piezoelectric vibrator bends and deforms in a direction away from the resonance part, the outer periphery of the resonance part with greater stiffness deforms in a direction close to the piezoelectric vibrator, and the concave structure on the resonance part deforms in a direction away from the piezoelectric vibrator, and the piezoelectric micropump inhales air. During the intake process, the outer periphery of the resonance part with greater stiffness bends and deforms in a direction close to the piezoelectric vibrator, and the outer periphery of the resonance part fits more closely with the piezoelectric vibrator, and there is less reverse leakage when inhaling gas; when the piezoelectric vibrator bends and deforms in a direction close to the resonance part, the outer periphery of the resonance part with greater stiffness deforms in a direction away from the piezoelectric vibrator, and the concave structure on the resonance part deforms in a direction close to the piezoelectric vibrator, and the piezoelectric micropump exhausts air. During the exhaust process, the concave structure deforms toward the bending deformation direction of the piezoelectric vibrator, the center of the piezoelectric vibrator and the concave structure of the resonance part fit more closely, the air inlet is completely closed, and there is less reverse leakage when the gas is exhausted, so the output pressure of the piezoelectric micropump can be increased dramatically. In addition, the connection part and the concave structure of the resonance part have low stiffness, which can increase the amplitude. The increase in amplitude can increase the amount of gas inhaled and exhausted, thereby increasing the output flow of the piezoelectric micropump.

[0006] Furthermore, the connecting portion is recessed relative to the adjacent plate portion and the resonance portion.

[0007] Furthermore, the resonance portion and the recessed structure thereon are both circular, and the resonance portion and the recessed structure are coaxial and arranged in the middle of the plate portion.

[0008] Furthermore, the air inlet hole is coaxially arranged with the resonance part, and a groove is arranged around the air inlet hole on the surface of the piezoelectric vibrator close to the resonance part.

[0009] Furthermore, the groove is annular and is coaxially arranged with the air inlet hole. The outer diameter of the resonance portion is smaller than the outer diameter of the groove and larger than the inner diameter of the groove.

[0010] Furthermore, the piezoelectric vibrator includes a stacked substrate and a piezoelectric element, the substrate is located between the piezoelectric element and the resonance member, and an electrode assembly is provided at one end of the piezoelectric vibrator away from the resonance plate to supply power to the piezoelectric element.

[0011] Furthermore, a bottom plate is provided at one end of the electrode assembly away from the piezoelectric vibrator, an air intake hole is formed on the bottom plate, and a recess extending to the air intake hole is formed on the inner surface of the bottom plate.

[0012] A gas control device comprises: a piezoelectric micro pump; and a gas leakage valve, wherein the gas leakage valve is arranged on a side of the resonance component away from the piezoelectric vibrator, and the gas flowing out through the gas outlet of the piezoelectric micro pump enters the gas leakage valve.

[0013] Furthermore, the air leakage valve includes a valve housing, a diaphragm structure is arranged in the valve housing, the diaphragm structure divides the inner cavity of the valve housing into an air inlet side and an air outlet side, the diaphragm structure is provided with a mass block and an air flow channel, the valve housing located on the air inlet side is provided with an air inlet port, the valve housing located on the air outlet side is provided with an air storage port and an air outlet port, the mass block is located on the air outlet side and is aligned with the air outlet port, and also includes a one-way cut-off structure for controlling the air flow interruption of the air flow channel, when the air pressure on the air inlet side is greater than the air pressure on the air outlet side, the one-way cut-off structure controls the air flow on the air inlet side to flow to the air outlet side through the air flow channel, and the mass block is pushed to cover and close the air outlet.

[0014] Furthermore, the air leakage valve includes a valve housing, a diaphragm structure is arranged in the valve housing, the diaphragm structure divides the inner cavity of the valve housing into an air inlet side and an air outlet side, two air inlets are opened on the valve housing located on the air inlet side, and an air storage port and an air outlet are opened on the valve housing located on the air outlet side, one air inlet is arranged to align with the air outlet so that the diaphragm structure covers and closes the air outlet under the action of air pressure, an air flow channel is arranged on the diaphragm structure corresponding to the other air inlet, a cantilever beam valve plate is arranged in the air flow channel, and the other air inlet protrudes toward the cantilever beam valve plate and abuts against the cantilever beam valve plate to realize one-way flow of the air flow channel under the action of air pressure.

[0015] Furthermore, a protruding structure extends from the periphery of one end of the air leakage valve toward the piezoelectric micropump, and the protruding structure is connected to the piezoelectric micropump to form a cavity between the air leakage valve and the piezoelectric micropump, and the air outlet and the air inlet are both connected to the cavity.

[0016] Based on the above technical solution, the technical effects that can be achieved by the present invention are:

[0017] 1. The piezoelectric micropump of the present invention has a connection portion on the periphery of the resonance part, and a concave structure is formed in the middle of the resonance part. The connection portion and the concave structure area have low rigidity. Under the action of the piezoelectric vibrator, the resonance part can be equivalent to a two-degree-of-freedom vibration system. When the piezoelectric vibrator bends and deforms in a direction away from the resonance part, the outer periphery of the resonance part with greater rigidity deforms in a direction close to the piezoelectric vibrator, and the concave structure on the resonance part deforms in a direction away from the piezoelectric vibrator, and the piezoelectric micropump inhales air. During the intake process, the outer periphery of the resonance part with greater rigidity deforms in a direction close to the piezoelectric vibrator, and the outer periphery of the resonance part fits more closely with the piezoelectric vibrator, resulting in less reverse leakage when inhaling gas; when the piezoelectric vibrator bends and deforms in a direction close to the resonance part, the outer periphery of the resonance part with greater rigidity deforms in a direction away from the piezoelectric vibrator, and the concave structure on the resonance part deforms in a direction close to the piezoelectric vibrator, and the piezoelectric micropump exhausts air. During the exhaust process, the concave structure deforms toward the bending deformation direction of the piezoelectric vibrator, the center of the piezoelectric vibrator and the concave structure of the resonance part fit more closely, the air inlet is completely closed, and there is less reverse leakage when the gas is exhausted. In this way, the output pressure of the piezoelectric micropump can be increased dramatically. In addition, the connection part and the concave structure of the resonance part have low stiffness, which can increase the amplitude. The increase in amplitude can increase the amount of gas inhaled and exhausted, thereby increasing the output flow of the piezoelectric micropump;

[0018] 2. The piezoelectric micropump of the present invention, when the rigidity of the connecting part is small, the two-degree-of-freedom vibration system composed of the connecting part and the resonant part can have a higher natural frequency under the condition of small rigidity and small mass, so that the sound generated by the vibration is farther away from the audible range of the human ear, thereby effectively eliminating the noise audible to the human ear; in addition, the rigidity of the connecting part is small, which has a vibration isolation effect. When the resonant part resonates, the high-frequency vibration has little effect on other parts of the piezoelectric micropump, thereby avoiding collision when the piezoelectric micropump contacts the outside world and generating no other noise;

[0019] 3. The gas control device of the present invention can realize the stable transmission of the airflow of the leakage valve by cooperating with the leakage valve and the piezoelectric micropump. A mass block is arranged on the diaphragm structure of the leakage valve to reduce the natural frequency of the diaphragm structure, eliminate the higher frequency self-excited resonance, and achieve the effect of not generating sharp whistling; the lower frequency self-excited resonance is changed to the self-excited resonance with a frequency lower than 20Hz, so as to achieve the effect of not generating audible noise; by setting the airflow channel and the one-way cut-off structure for controlling the opening and closing of the airflow channel, only when the air pressure on the inlet side is greater than the air pressure on the outlet side, the airflow on the inlet side can flow to the outlet side through the airflow channel, otherwise, the airflow cannot flow from the outlet side to the inlet side through the airflow channel, so that the gas is controlled under the action of the pressure difference. One-way delivery of air flow, no other control components are required, and the structure is simple; by setting a one-way cut-off structure on the diaphragm structure, or setting a one-way cut-off structure that cooperates with the diaphragm structure on the valve housing, during the intake process, the air pressure on the intake side is greater than the air pressure on the outlet side, and the air pressure on the intake side pushes the one-way cut-off structure or separates the one-way cut-off structure from the diaphragm body to open the air flow channel. During this process, a certain pressure drop will be generated, so that the air pressure on the outlet side of the diaphragm structure is less than the air pressure on the intake side. Under the action of the pressure difference, the mass block on the diaphragm body will be pressed against the outlet, so that the outlet is closed;

[0020] 4. The gas control device of the present invention can also adopt a leaking valve with two air inlets on the valve housing located on the air inlet side, one air inlet is aligned with the air outlet so that the diaphragm structure covers and closes the air outlet under the action of air pressure, and the other air inlet is arranged corresponding to the cantilever beam valve plate on the diaphragm structure, and the one-way flow of air is realized by the protrusion of the air inlet abutting against the cantilever beam valve plate. During the air intake process, there is flow resistance when the air flow pushes the cantilever beam valve plate through the air inlet, which will produce a certain pressure drop, so that the air pressure in the air outlet side is lower than the air pressure in the air inlet side. Under the action of the pressure difference, the diaphragm structure will be pressed against the air outlet, so that the air outlet is closed;

[0021] 5. In the gas control device of the present invention, a protruding structure extends from the periphery of one end of the leakage valve facing the piezoelectric micropump, which can form a cavity to separate the piezoelectric micropump and the leakage valve. This does not affect the vibration of the resonant part of the piezoelectric micropump and can ensure that the airflow out of the piezoelectric micropump enters the leakage valve. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 An exploded view of the piezoelectric micropump of the present invention;

[0023] Figure 2 It is a schematic diagram of the structure of a piezoelectric vibrator;

[0024] Figure 3 is a schematic diagram of the structure of the base plate;

[0025] Figure 4 is a cross-sectional view of a piezoelectric micropump of the present invention;

[0026] Figure 5 FIG. 1 is a diagram showing an air intake state of a piezoelectric micropump of the present invention;

[0027] Figure 6 FIG. 1 is a diagram showing the gas outlet state of the piezoelectric micropump of the present invention;

[0028] Figure 7 is the main vibration mode of the resonant element of the present invention;

[0029] Figure 8 An exploded view of the gas control device of the present invention;

[0030] Fig. 9 is a cross-sectional view of a gas control device of the present invention;

[0031] Fig.10 A cross-sectional view of a gas leakage valve in another embodiment of a gas control device;

[0032] In the figure: 1-resonance member; 11-plate member; 12-connecting member; 121-air outlet; 13-resonance member; 131-groove structure; 2-piezoelectric vibrator; 21-substrate; 211-first through hole; 212-groove; 22-piezoelectric element; 221-second through hole; 3-electrode assembly; 31-first conductive portion; 311-first electrode; 32-second conductive portion; 321-second electrode; 322-internal electrode; 33-insulating portion; 4-bottom plate; 41-air inlet through hole; 42-recess; 5-convex structure; 6-leakage valve; 61-pump housing; 611-air inlet; 612-air outlet; 613-air storage port; 62-diaphragm structure; 621-mass block; 622-bump; 623-air flow channel; 63-cantilever beam valve plate; 631-valve plate body; 632-cantilever. DETAILED DESCRIPTION

[0033] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all the embodiments. The following description of at least one exemplary embodiment is actually only illustrative and is by no means intended to limit the present invention and its application or use. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0034] It should be noted that the terms used herein are only for describing specific embodiments and are not intended to limit the exemplary embodiments according to the present application. As used herein, unless the context clearly indicates otherwise, the singular form is also intended to include the plural form. In addition, it should be understood that when the terms "comprise" and / or "include" are used in this specification, it indicates the presence of features, steps, operations, devices, components and / or combinations thereof.

[0035] Unless otherwise specifically stated, the relative arrangement of the parts and steps described in these embodiments, numerical expressions and numerical values ​​do not limit the scope of the present invention. At the same time, it should be understood that, for ease of description, the sizes of the various parts shown in the accompanying drawings are not drawn according to the actual proportional relationship. The technology, method and equipment known to ordinary technicians in the relevant field may not be discussed in detail, but in appropriate cases, the technology, method and equipment should be regarded as a part of the authorization specification. In all examples shown and discussed here, any specific value should be interpreted as being merely exemplary, rather than as a limitation. Therefore, other examples of exemplary embodiments may have different values. It should be noted that similar reference numerals and letters represent similar items in the following drawings, so once a certain item is defined in an accompanying drawing, it does not need to be further discussed in subsequent drawings.

[0036] In the description of the present invention, it is necessary to understand that the directions or positional relationships indicated by directional words such as "front, back, up, down, left, right", "lateral, vertical, perpendicular, horizontal" and "top, bottom" are usually based on the directions or positional relationships shown in the drawings. They are only for the convenience of describing the present invention and simplifying the description. Unless otherwise specified, these directional words do not indicate or imply that the devices or elements referred to must have a specific direction or be constructed and operated in a specific direction. Therefore, they cannot be understood as limiting the scope of protection of the present invention. The directional words "inside and outside" refer to the inside and outside relative to the contours of each component itself.

[0037] For ease of description, spatially relative terms such as "above", "above", "on the upper surface of", "above", etc. may be used here to describe the spatial positional relationship between a device or feature and other devices or features as shown in the figure. It should be understood that spatially relative terms are intended to include different orientations of the device in use or operation in addition to the orientation described in the figure. For example, if the device in the accompanying drawings is inverted, the device described as "above other devices or structures" or "above other devices or structures" will be positioned as "below other devices or structures" or "below other devices or structures". Thus, the exemplary term "above" can include both "above" and "below". The device can also be positioned in other different ways (rotated 90 degrees or in other orientations), and the spatially relative descriptions used here are interpreted accordingly.

[0038] In addition, it should be noted that the use of terms such as "first" and "second" to limit components is only for the convenience of distinguishing the corresponding components. If not otherwise stated, the above terms have no special meaning and therefore cannot be understood as limiting the scope of protection of the present invention.

[0039] Embodiment 1

[0040] like Figure 1-9 As shown, this embodiment discloses a piezoelectric micro pump, including a resonant element 1 and a piezoelectric vibrator 2. The resonant element 1 and the piezoelectric vibrator 2 are stacked, and the resonant element 1 vibrates driven by the piezoelectric vibrator 2 to achieve air intake and air exhaust.

[0041] The resonator 1 is in the shape of a plate as a whole. The resonator 1 is divided into a plate portion 11, a connecting portion 12 and a resonant portion 13 from the outside to the inside. In this embodiment, the outer contour of the plate portion 11 is a square. In addition, it can also be set to other shapes such as a circle, a rectangle, etc. The connecting portion 12 is annular, the outer end of the connecting portion 12 is connected to the plate portion 11, and the inner end of the connecting portion 12 is connected to the resonant portion 13. There are air outlet holes 121 distributed on the connecting portion 12. There can be multiple air outlet holes 121, which are evenly distributed on the connecting portion 12 along the circumferential direction; the resonant portion 13 is circular, and a recessed structure 131 is provided in the middle of the resonant portion 13. In general, the surface of the resonator 1 close to the piezoelectric vibrator 2 is a plane, and on the other surface of the resonator 1, the connecting portion 12 is recessed relative to the plate portion 11 and the resonant portion 13 connected thereto; the recessed structure 131 is also provided on this surface. Preferably, the recessed structure 131 is circular, and the recessed structure 131, the resonance part 13 and the connection part 12 are coaxial and arranged in the middle of the plate part 11. By setting the recessed structure 131 and the connection part 12, the rigidity of the recessed structure 131 and the connection part 12 is small, and a two-degree-of-freedom vibration system can be formed; in addition, the two-degree-of-freedom vibration system can have a higher natural frequency under small rigidity and small mass, so that the sound generated by the vibration is farther away from the audible range of the human ear, thereby effectively eliminating the audible noise of the human ear; secondly, the rigidity of the connection part is small, and it has a vibration isolation effect. When the resonance part resonates, the high-frequency vibration has little effect on other parts of the piezoelectric micropump, avoiding collision when the piezoelectric micropump contacts the outside world, and no other noise is generated. Preferably, the thickness of the resonance part 1 at the recessed structure 131 is equal to the thickness at the connection part 12.

[0042] The piezoelectric vibrator 2 includes a substrate 21 and a piezoelectric element 22. The substrate 21 is arranged close to the resonator 1, and the piezoelectric element 22 is stacked on a side of the substrate 21 away from the resonator 1. An air inlet is arranged on the piezoelectric vibrator 2, and the air inlet specifically includes a first through hole 211 and a second through hole 221 that are interconnected. The first through hole 211 is arranged on the substrate 21, and the second through hole 221 is arranged on the piezoelectric element 22. The first through hole 211 and the second through hole 221 are interconnected to form the air inlet of the piezoelectric vibrator 2. Preferably, the substrate 21 is a square plate, the outer periphery of the substrate 21 is connected to the outer periphery of the resonator 1, the outer diameter of the piezoelectric element 22 is smaller than the side length of the substrate 21, the aperture of the first through hole 211 is smaller than the aperture of the second through hole 221, and the first through hole 211 and the second through hole 221 are coaxially connected.

[0043] Furthermore, a groove 212 is formed on the end surface of the substrate 21 near the resonator 1 around the second through hole 221. The groove 212 is annular and is coaxially arranged with the second through hole 221. In order to ensure that the piezoelectric micro pump does not leak during operation and to ensure stable transmission of the gas, the inner diameter of the groove 212 is smaller than the outer diameter of the resonator 13, and the outer diameter of the groove 212 is larger than the outer diameter of the resonator 13.

[0044] An electrode assembly 3 is provided at one end of the piezoelectric vibrator 2 away from the resonance member 1 to supply power to the piezoelectric element 22. Specifically, the electrode assembly 3 includes a first conductive portion 31, a second conductive portion 32 and an insulating portion 33, and the first conductive portion 31, the insulating portion 33 and the second conductive portion 32 are stacked in sequence from near to far on the end surface of the substrate 21 away from the resonance plate 1. A circular hole with a relatively large diameter is opened in the middle of the first conductive portion 31, the second conductive portion 32 and the insulating portion 33, and the outer diameter of the piezoelectric element 22 is smaller than the aperture of the circular hole of the first conductive portion 31, so that the piezoelectric element 22 can be located in the circular hole of the first conductive portion 31. A first electrode 311 extends from the periphery of the first conductive part 31, and the first conductive part 31 transmits current to the surface of the piezoelectric element 22 in contact with the substrate 21 through the substrate 21; a second electrode 321 extends from the periphery of the second conductive part 32, and an internal electrode 322 extends from the inner periphery of the second conductive part 32, and the internal electrode 322 is connected to the surface of the piezoelectric element 22 away from the substrate 21. When the first electrode 311 and the second electrode 321 are connected to power, the piezoelectric element 22 can be powered.

[0045] The end of the electrode assembly 3 away from the piezoelectric vibrator 2 is also provided with a bottom plate 4, which can seal the circular hole of the second conductive part 32, and the bottom plate 4 is provided with an air intake hole 41 to facilitate the entry of external airflow between the bottom plate 4 and the electrode assembly 3. Further, in order to facilitate the entry of airflow, there can be at least two air intake holes 41, and a recess 42 is further provided on the inner surface of the bottom plate 4, which extends to the air intake hole 41 to facilitate the entry of airflow.

[0046] During the operation of the piezoelectric micro pump of this embodiment, the region corresponding to the connecting portion 12 and the recessed structure 131 on the resonance member 1 has low stiffness and is prone to deformation. The resonance member 1 is equivalent to a two-degree-of-freedom vibration system, and the natural frequencies of the system are ω1 and ω2:

[0047]

[0048] Wherein: k1 is the equivalent stiffness of the connecting part, m1 is the equivalent mass of the connecting part and the resonant part excluding the part corresponding to the recessed structure, k2 is the equivalent stiffness of the resonant part corresponding to the recessed structure, and m2 is the equivalent mass of the resonant part corresponding to the recessed structure.

[0049] When the external driving frequency is ω2, the resonant element 1 resonates, and the vibration mode is the main vibration mode with a higher frequency, such as Figure 7 At this time, the outer periphery of the resonance part 13 and the concave structure 131 have opposite bending directions, when the outer periphery of the resonance part 13 moves upward, the concave structure 131 bends downward; when the outer periphery of the resonance part 13 moves downward, the concave structure 131 bends upward.

[0050] When the external driving frequency is ω2, when the piezoelectric vibrator 2 bends and deforms in a direction away from the resonance element 1, the outer circumference of the resonance part 13 deforms in a bending and deformation direction close to the piezoelectric vibrator 2, and the recessed structure 131 deforms in a bending and deformation direction away from the piezoelectric vibrator 2, and the piezoelectric micropump inhales gas; when the piezoelectric vibrator 2 bends and deforms in a direction close to the resonance element 1, the outer circumference of the resonance part 13 deforms in a bending and deformation direction away from the vibrator, and the recessed structure 131 deforms in a bending and deformation direction close to the piezoelectric vibrator 2, and the piezoelectric micropump discharges gas; the two processes alternately reciprocate to form a continuous outflow.

[0051] This embodiment also provides a gas control device, including the above-mentioned piezoelectric micropump and leakage valve 6, the leakage valve 6 is arranged on the side of the resonance element 1 away from the piezoelectric vibrator 2, and the gas flowing out through the outlet hole 121 of the piezoelectric micropump enters the leakage valve 6.

[0052] The air leakage valve 6 includes a valve housing 61, in which a diaphragm structure 62 is arranged. The diaphragm structure 62 divides the inner cavity of the valve housing 61 into an air inlet side and an air outlet side. A mass block 621 and an air flow channel 623 are provided on the diaphragm structure 62. An air inlet 611 is provided on the valve housing 61 located on the air inlet side, and an air storage port 613 and an air outlet 612 are provided on the valve housing 61 located on the air outlet side. The mass block 621 is located on the air outlet side and is aligned with the air outlet 612. It also includes a one-way cut-off structure for controlling the air flow interruption of the air flow channel 623. When the air pressure on the air inlet side is greater than the air pressure on the air outlet side, the one-way cut-off structure controls the air flow on the air inlet side to flow to the air outlet side through the air flow channel 623, and the mass block 621 is pushed to cover and close the air outlet 612.

[0053] Specifically, the outer end surface of the mass block 621 is close to the air outlet 612 or in contact with the air outlet 612; preferably, the mass block 621 is aligned with the center of the air outlet 612, and the air outlet 612 can be a circular air outlet, a triangular air outlet, a square air outlet, etc. The cross-section of the mass block 621 can be in various shapes. When the mass block 621 covers the air outlet 612, the range of the closest distance D from the edge of the mass block 621 to the edge of the air outlet 612 is 0.1mm≤D≤1mm. If the closest distance from the edge of the mass block 621 to the edge of the air outlet 612 is too small, the mass block 621 may not be able to well seal the air outlet 612 during the air intake process; if the closest distance from the edge of the mass block 621 to the edge of the air outlet 612 is too large, the flow capacity will be reduced. The one-way cut-off structure includes a protrusion 622 mounted on the diaphragm structure 62, the protrusion 622 extends on the air inlet side and the outer end of the protrusion 622 abuts against the inner wall of the valve housing 61, and the air flow channel 623 is arranged on the protrusion 622. In the initial state, the outer end of the protrusion 622 abuts against the valve housing 61 to close the air flow channel 623. When the air pressure on the air inlet side is greater than the air pressure on the air outlet side, the diaphragm structure 62 is deformed, the outer end of the protrusion 622 leaves the valve housing 61, and the air flow on the air inlet side can flow to the air outlet side through the air flow channel 623 on the protrusion 622. When the air is discharged, the air inlet stops taking in air, and the air flow in the air storage device connected to the air storage port 613 flows into the air outlet side in the valve housing 61 through the air storage port 613. At this time, the air pressure on the air outlet side is greater than the air pressure on the air inlet side. Under the action of the pressure difference, the protrusion 622 is pressed against the valve housing 61, and the air flow channel 623 is closed. At the same time, the diaphragm structure 62 is deformed under the action of the pressure difference, and the end face of the mass block 621 leaves the air outlet 612, the air outlet 612 opens, and the air flow on the air outlet side flows out of the leakage valve 6 through the air outlet 612, realizing the one-way delivery of the air flow. In addition to the structure of the leakage valve 6 mentioned above, the leakage valve structure in the patent with application number CN201920360661.3 can also be used for replacement.

[0054] In order not to affect the movement of the piezoelectric micropump and prevent the leakage of the air flow, a protruding structure 5 is extended from the periphery of one end of the air leakage valve 6 facing the piezoelectric micropump, and the protruding structure 5 is connected to the piezoelectric micropump to form a cavity between the air leakage valve 6 and the piezoelectric micropump, and the air outlet 121 and the air inlet 611 are both connected to the above cavity. Preferably, the protruding structure 5 can be integrally formed with the valve housing 61 of the air leakage valve 6, or can be separately set. When the protruding structure 5 is separately set, the protruding structure 5 is a partition with a circular hole, and its two end surfaces are respectively connected to the air leakage valve 6 and the piezoelectric micropump.

[0055] Embodiment 2

[0056] like Fig.10As shown, this embodiment is basically the same as the first embodiment, and the only difference is that the structure of the air leakage valve 6 is different. The air leakage valve 6 in this embodiment includes a valve housing 61, and a diaphragm structure 62 is arranged in the valve housing 61. The diaphragm structure 62 divides the inner cavity of the valve housing 61 into an air inlet side and an air outlet side. Two air inlets 611 are opened on the valve housing 62 located on the air inlet side, and an air storage port 613 and an air outlet 612 are opened on the valve housing 62 located on the air outlet side. One air inlet 611 is arranged to align with the air outlet 612 so that the diaphragm structure 62 covers and closes the air outlet 612 under the action of air pressure. The diaphragm structure 62 corresponding to the other air inlet 611 is provided with an air flow channel 623, and a cantilever beam valve plate 63 is arranged in the air flow channel 623. The other air inlet 611 protrudes toward the cantilever beam valve plate 63 and abuts against the cantilever beam valve plate 63 to achieve one-way flow of the air flow channel 623 under the action of air pressure.

[0057] Specifically, the air outlet 612 may be arranged to protrude toward the diaphragm structure 62 so as to abut against the diaphragm structure 62 in the initial state to close the air outlet 612. The cantilever beam valve plate 63 includes a valve plate body 631 and a cantilever 632, and there are at least two cantilevers 632. The valve plate body 631 is arranged in the air flow channel 623 through the cantilever 632. Specifically, the valve plate body 631 may be circular, square, triangular, polygonal, etc., as long as it can cover the corresponding air inlet 611. At least two cantilevers 632 are evenly distributed along the edge of the valve plate body 631, one end of the cantilever 632 is connected to the valve plate body 631, and the other end of the cantilever 632 is connected to the hole wall of the air flow channel 623. Preferably, there are three cantilevers 632.

[0058] When air is inhaled, the two air inlets 611 take in air, and the air pressure on the air inlet side is greater than the air pressure on the air outlet side. The airflow lifts up the valve plate body 631, and the cantilever 632 of the cantilever beam valve plate 63 is elastically deformed. A small gap is generated between the valve plate body 631 and the protrusion of the air inlet 611. The pressure airflow flows through the small gap to enter the air inlet side, and then enters the air outlet side through the cantilever beam valve plate 63. The pressure airflow overcomes the pre-tightening force of the cantilever beam and flows through the small gap, so a pressure drop is generated, that is, the air pressure on the air outlet side is less than the air pressure on the air inlet side. Under the action of the pressure difference, the diaphragm body 631 is elastically deformed toward the air outlet 612, covering the air outlet 612. Since the air outlet 612 is closed, the airflow can only flow into the air storage device through the air storage port 613;

[0059] When exhausting, the two air inlets 611 stop intake of air, and the air flow in the air storage device flows through the air storage port 613 into the air outlet side inside the valve shell 61. Since the air inlet side stops intake of air, the air pressure on the air outlet side in the valve shell 61 is greater than the air pressure on the air inlet side. Under the action of the pressure difference, the valve plate structure 62 elastically deforms in the direction away from the air outlet 612, and the air outlet 612 opens. The valve plate body 631 covers the corresponding air inlet 611, and the air inlet 611 is closed. The air flow on the air outlet side flows out of the leakage valve through the air outlet 612, thereby realizing unidirectional air transport.

[0060] In addition to the above-mentioned air leakage valve structure, the air leakage valve structure in the patent with application number CN201920267347.0 can also be used for replacement.

[0061] The embodiments of the present invention are described in detail above in conjunction with the accompanying drawings, but the present invention is not limited to the above embodiments, and various changes can be made within the knowledge scope of ordinary technicians in this field without departing from the purpose of the present invention.

Claims

1. A piezoelectric micropump, characterized in that: include: A resonance member (1), the resonance member (1) comprising, from the outside to the inside, a plate member portion (11), a connecting portion (12) and a resonance portion (13); one surface of the resonance member (1) is a plane; on another surface of the resonance member (1), a recessed structure (131) is formed in the middle of the resonance portion (13); air outlet holes (121) are distributed on the connecting portion (12); the connecting portion (12) is recessed relative to the adjacent plate member portion (11) and the resonance portion (13); and the recessed shape and the recessed structure (131) are arranged on the same surface; A piezoelectric vibrator (2), the piezoelectric vibrator (2) and the resonant component (1) being stacked, the piezoelectric vibrator (2) being close to a plane of the resonant component (1), the piezoelectric vibrator (2) being provided with an air inlet hole, the air inlet hole being directly opposite to the recessed structure (131) of the resonant portion (13).

2. A piezoelectric micropump according to claim 1, characterized in that: The resonance portion (13) and the recessed structure (131) thereon are both circular; the resonance portion (13) and the recessed structure (131) are coaxial and arranged in the middle of the plate portion (11).

3. A piezoelectric micropump according to claim 1, characterized in that: The air inlet hole is coaxially arranged with the resonance part (13), and a groove (212) is arranged around the air inlet hole on a surface of the piezoelectric vibrator (2) close to the resonance part (1).

4. A piezoelectric micropump according to claim 3, characterized in that: The groove (212) is annular, the groove (212) is coaxially arranged with the air inlet hole, and the outer diameter of the resonance part (13) is smaller than the outer diameter of the groove (212) and larger than the inner diameter of the groove (212).

5. A piezoelectric micropump according to any one of claims 1 to 4, characterized in that: The piezoelectric vibrator (2) comprises a substrate (21) and a piezoelectric element (22) which are stacked, the substrate (21) being located between the piezoelectric element (22) and the resonant member (1), and an electrode assembly (3) is provided at one end of the piezoelectric vibrator (2) away from the resonant member (1) to supply power to the piezoelectric element (22).

6. A piezoelectric micropump according to claim 5, characterized in that: A bottom plate (4) is provided at one end of the electrode assembly (3) away from the piezoelectric vibrator (2), an air intake hole (41) is formed on the bottom plate (4), and a recess (42) extending to the air intake hole (41) is formed on the inner surface of the bottom plate (4).

7. A gas control device, characterized in that: include: The piezoelectric micropump according to any one of claims 1 to 6; A gas leakage valve (6) is arranged on a side of the resonant element (1) away from the piezoelectric vibrator (2), and gas flowing out through the gas outlet hole (121) of the piezoelectric micro pump enters the gas leakage valve (6).

8. A gas control device according to claim 7, characterized in that: The air leakage valve (6) comprises a valve housing (61), wherein a diaphragm structure (62) is arranged in the valve housing (61), wherein the diaphragm structure (62) divides the inner cavity of the valve housing (61) into an air inlet side and an air outlet side, wherein a mass block (621) and an air flow channel (623) are arranged on the diaphragm structure (62), wherein an air inlet (611) is provided on the valve housing (61) located on the air inlet side, and an air storage port (613) and an air outlet (612) are provided on the valve housing (61) located on the air outlet side, wherein the mass block (621) is located on the air outlet side and is aligned with the air outlet (612), and further comprises a one-way stop structure for controlling the air flow interruption of the air flow channel (623), wherein when the air pressure on the air inlet side is greater than the air pressure on the air outlet side, the one-way stop structure controls the air flow on the air inlet side to flow to the air outlet side through the air flow channel (623), and the mass block (621) is pushed to cover and close the air outlet (612).

9. A gas control device according to claim 7, characterized in that: The air leakage valve (6) comprises a valve housing (61), a diaphragm structure (62) being arranged in the valve housing (61), the diaphragm structure (62) dividing the inner cavity of the valve housing (61) into an air inlet side and an air outlet side, two air inlets (611) being provided on the valve housing (61) on the air inlet side, and an air storage port (613) and an air outlet (612) being provided on the valve housing (61) on the air outlet side, one air inlet (611) being arranged to align with the air outlet (612) so that the diaphragm structure (62) The structure (62) covers and closes the air outlet (612) under the action of air pressure, and an air flow channel (623) is provided on the diaphragm structure (62) corresponding to the other air inlet (611), and a cantilever beam valve plate (63) is provided in the air flow channel (623), and the other air inlet (611) protrudes toward the cantilever beam valve plate (63) and abuts against the cantilever beam valve plate (63) to achieve one-way flow in the air flow channel (623) under the action of air pressure.

10. A gas control device according to any one of claims 8 to 9, characterized in that: A protruding structure (5) extends from the periphery of one end of the air leakage valve (6) toward the piezoelectric micropump, the protruding structure (5) is connected to the piezoelectric micropump so that a cavity is formed between the air leakage valve (6) and the piezoelectric micropump, and the air outlet (121) and the air inlet (611) are both connected to the cavity.

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