Fluid generating device for high-order resonance

Abstract

The present invention relates to the technical field of fluid control, and particularly to a fluid generating device with high-order resonance, which includes a substrate, a piezoelectric sheet, a spacer, and a diaphragm. The piezoelectric sheet and the substrate form an actuator. One end of the spacer close to the actuator is connected to the actuator, and the diaphragm is connected to the end of the spacer facing away from the actuator, so that a chamber is formed among the actuator, the groove portion, and the diaphragm. When the actuator vibrates under the excitation of an electrical signal, the vibration energy is transmitted to the diaphragm. On the one hand, the vibration of the actuator drives the fluid in the chamber to generate pressure fluctuations, and then the energy is transmitted to the diaphragm by causing the diaphragm to vibrate. More importantly, the energy is directly transmitted to the diaphragm through the mechanical coupling formed by the actuator and the diaphragm to achieve a higher flow output. At least one hole portion is respectively formed at at least two antinode positions or adjacent regions of the antinode positions of the diaphragm vibration, so that the utilization rate of the vibration energy is higher.

Description

Technical Field

[0001] The present invention relates to the technical field of fluid control, and particularly to a fluid generating device with high-order resonance. Background Art

[0002] In recent years, with the continuous and rapid development of 3C terminal products towards the direction of intelligence and lightness and thinness, the thermal load of internal electronic devices has gradually increased, and efficient heat dissipation has become a hot issue in current research. It is considered that placing a micro-fluid generating device using a piezoelectric transducer as an actuator as a heat dissipation device in the internal space of a terminal product can generate greater thermal benefits, but this also poses new requirements for the structural performance of such heat dissipation devices themselves.

[0003] The fluid pump disclosed in the Chinese patent with the publication number CN102597520A claims a gas generating device using a piezoelectric transducer as an actuator. Even if the actuator is small, it can obtain sufficient amplitude during the bending vibration process, thereby ensuring the output performance of the fluid pump; the blower disclosed in the Chinese patent with the publication number CN108317093A similarly claims a gas generating device using a resonant piezoelectric transducer as an actuator; in addition, in order to further improve the structural compactness and miniaturization degree of the piezoelectric-driven gas generating device, during the technology iteration process, there also appears a vertically supported micro-piezoelectric pump disclosed in the Chinese patent with the publication number CN209838655U and a staggered support structure and gas control device of a piezoelectric micro-pump disclosed in the Chinese patent with the patent number CN213063904U.

[0004] In the above patent documents, the gas generation principles are the same or similar, and the basic components constituting the gas generating device, or fluid pump, or blower, or micro-piezoelectric pump or fluid generating device are also the same or similar. At least they all include a piezoelectric actuator, a flexible plate (or called a resonance plate, flexible plate, thin-walled part, etc.) that can be deformed at the central position and nearby relatively arranged with the actuator at a gap, and side walls that enclose a chamber together with the actuator and the flexible plate. The actuator is elastically supported on the side walls by a support portion. A drainage hole for fluid to pass through is also provided on the flexible plate relative to the central area of the actuator. The actuator is supported on the side walls in a planar manner, or the actuator is vertically supported on the side walls. The actuator generates vibration under an external excitation. Along with the vibration of the actuator, the gas in the gap between the actuator and the flexible plate generates a pressure change, thereby causing the flexible plate centered on the drainage hole to resonate. Therefore, the vibration amplitude can be substantially increased, and thereby the flow rate can be increased.

[0005] However, in the above structure, the vibration energy of the actuator is transmitted to the flexible plate through the change of gas pressure in the gap, thereby forcing the flexible plate to resonate. Due to the existence of pneumatic damping, the vibration energy transmitted by fluid-solid coupling has a large loss, and the energy transfer efficiency is not high. At the same time, the effective working space of the above resonance system is mainly concentrated in the area of ​​the gap opposite to the central large amplitude of the piezoelectric actuator and the flexible plate, while the vibration energy of the area outside the central large amplitude area of ​​the piezoelectric actuator and the flexible plate is not effectively utilized, resulting in low overall energy utilization; the gap volume change under this structure is limited, and the flow output performance is poor. When used as a heat dissipation device, it cannot meet the use requirements. Summary of the invention

[0006] The technical problem to be solved by the present invention is: in order to solve the deficiencies in the prior art, a high-order resonant fluid generating device is now provided.

[0007] The technical solution adopted by the present invention to solve the technical problem is: a high-order resonant fluid generating device, comprising:

[0008] A substrate, with at least one piezoelectric sheet bonded to one or both sides of the surface in the thickness direction, the piezoelectric sheet and the substrate forming an actuator, the actuator having a first main surface and a second main surface arranged opposite to each other in the thickness direction, the piezoelectric sheet causing the actuator to vibrate under the excitation of an electrical signal;

[0009] A spacer, the first main surface or / and the second main surface are joined with the spacer, the spacer is connected to the actuator at one end close to the actuator, and the spacer and the actuator form a groove having an opening at one end away from the actuator;

[0010] and a diaphragm fixedly connected to an end of the spacer away from the actuator and covering the opening of the groove, so that a chamber is formed between the actuator, the groove and the diaphragm, and a hole portion communicating with the chamber penetrates through the region of the diaphragm opposite to the chamber;

[0011] When the actuator vibrates under the excitation of an electrical signal, it transfers vibration energy to the diaphragm to cause the diaphragm to vibrate in a high-order resonance mode with at least two antinodes, and at least one hole portion is formed in at least one antinode position A of the diaphragm vibration or in the vicinity of the antinode position A.

[0012] Further, at least one hole portion is formed at least at two antinode positions A of the diaphragm vibration or in the vicinity of the antinode position A.

[0013] Furthermore, at least one hole portion is formed at each antinode position A of the diaphragm vibration or at a region adjacent to the antinode position A.

[0014] Further, the spacer is a ring structure. The inner peripheral wall of the spacer and the actuator enclose a ring-shaped groove portion. One end of the spacer facing away from the actuator is entirely or partially joined to the diaphragm along the annular path of the groove portion.

[0015] Further, the spacer has a plurality of spacers, and each spacer is joined to the first main surface or the second main surface. The plurality of spacers are spaced along the annular path around the chamber to enclose the groove portion with the actuator, and one end of the spacer facing away from the actuator is entirely or partially joined to the diaphragm.

[0016] Further, the piezoelectric sheet is a ring structure with a central through hole, and the through hole is disposed opposite to the chamber.

[0017] Further, the diaphragm is made of a polymer material or a composite material composed of a polymer material and a metal material.

[0018] Further, the vibration of the higher-order resonance mode generated by the diaphragm is the vibration of the second-order resonance mode, the third-order resonance mode, the fourth-order resonance mode, the fifth-order resonance mode, the sixth-order resonance mode, the seventh-order resonance mode, the eighth-order resonance mode or the ninth-order resonance mode.

[0019] Further, it further includes an adapter for fixedly connecting to a terminal product;

[0020] The adapter is elastically connected to the area of the diaphragm opposite to the spacer portion, the actuator or the spacer portion;

[0021] Alternatively, the adapter is fixedly connected to the node position of the actuator vibration.

[0022] The adapter can adopt the following several solutions:

[0023] Solution 1, the adapter includes a frame portion for fixedly connecting to a terminal product:

[0024] The frame portion is provided with a plurality of elastic arms. One end of the elastic arm facing away from the frame portion is fixedly connected to the area of the diaphragm opposite to the spacer portion, the actuator or the spacer portion.

[0025] Further, a central opening is penetrated through the middle position of the frame portion;

[0026] At least a part of the actuator is located within the central opening. One end of the elastic arm is connected to the inner peripheral wall of the central opening, and the other end is fixedly connected to the outer peripheral wall of the actuator or the outer peripheral wall of the spacer portion.

[0027] Further, a central opening is penetrated through the middle position of the frame portion, and all the hole portions are disposed opposite to the central opening;

[0028] The actuator is located above the central opening. One end of the elastic arm is fixedly connected to the frame portion, and the other end is connected to one end of the actuator close to the frame portion.

[0029] In Solution 2, the adapter includes a holding portion for fixedly connecting to the terminal product.

[0030] The holding portion is joined at the nodal position of the vibration of the actuator, and the holding portion is joined on the side of the actuator facing away from the diaphragm.

[0031] There is one holding portion or two or more holding portions arranged at intervals.

[0032] In Solution 3, the adapter includes a diaphragm extension portion. The diaphragm extension portion includes a fixing portion and an elastic suspension portion. The fixing portion is for fixedly connecting to the terminal product, and the fixing portion surrounds the outer periphery of the diaphragm. One end of the suspension portion is connected to the inner peripheral wall of the fixing portion, and the other end is connected to the outer peripheral wall of the diaphragm, so that the diaphragm is elastically supported on the fixing portion along the horizontal direction through the cantilever portion.

[0033] Furthermore, there are a plurality of suspension portions, and an opening portion is formed between two adjacent suspension portions.

[0034] Furthermore, the diaphragm extension portion is integrally formed with the diaphragm.

[0035] In Solution 4, the adapter includes a diaphragm support portion. The diaphragm support portion is arranged on the side of the diaphragm facing away from the substrate. The diaphragm support portion includes a fixed support portion and a plurality of spaced cantilever portions. The fixed support portion is for fixedly connecting to the terminal product and is located outside the outer peripheral wall of the spacer portion. One end of the cantilever portion is connected to the fixed support portion, and the other end is connected to the area of the diaphragm on the side facing away from the substrate and opposite to the spacer portion, so that the diaphragm is elastically supported on the fixed portion along the horizontal direction through the cantilever portion.

[0036] The beneficial effects of the present invention are:

[0037] 1) In the fluid generating device with high-order resonance of the present invention, the diaphragm is fixedly connected to the actuator through the spacer. The vibration of the actuator causes the diaphragm to vibrate, and this process is accompanied by the transfer of energy. The vibration energy generated by the actuator under the excitation of an external electrical signal is, on the one hand, transmitted to the diaphragm by driving the fluid in the chamber to generate pressure fluctuations when the actuator vibrates, thereby causing the diaphragm to vibrate. More importantly, the energy is directly transmitted to the diaphragm through the mechanical coupling formed between the actuator and the diaphragm. Compared with the prior art that only relies on the fluid to transmit vibration energy, the energy transfer efficiency is higher. Under the same excitation conditions, it can cause the diaphragm to generate a larger amplitude to achieve a higher flow output. Under the same amplitude requirement, it can reduce the input power of the actuator, reduce heat generation, and improve the energy utilization rate, product stability, and service life.

[0038] 2) In the fluid generating device with high-order resonance of the present invention, the actuator generates vibration under external excitation and simultaneously transmits the vibration energy to the diaphragm, thereby causing the diaphragm to vibrate in a high-order resonance mode with at least two antinodes. At least one hole is formed at at least two antinode positions or adjacent regions of the diaphragm vibration. At this time, the effective working space of the chamber between the actuator and the diaphragm is not mainly concentrated in the central region of the diaphragm, but extends to a larger area compared with the central region, and the utilization rate of vibration energy is higher.

[0039] 3) The diaphragm of the fluid generating device with high-order resonance of the present invention is made of a polymer material or a composite material composed of a high molecular material and other metal materials. Compared with the metal flexible plate used in the prior art, the diaphragm structure has a higher elastic strain limit and is easy to obtain a larger amplitude, especially suitable for application scenarios with high requirements for flow output, such as the heat dissipation of intelligent 3C terminal products.

[0040] Through the following detailed description of the exemplary embodiments of the present application with reference to the accompanying drawings, other features and advantages of the present application will become clear. Description of the Drawings

[0041] The present invention will be further described below with reference to the drawings and embodiments.

[0042] Figure 1 It is a schematic structural diagram of the groove formed by the spacer and the substrate in Embodiment 1;

[0043] Figure 2 It is a schematic structural diagram of the spacer and the piezoelectric sheet arranged on the same side surface of the substrate in the thickness direction in Embodiment 1;

[0044] Figure 3Schematic diagram of the structure in which spacer portions for bonding to a substrate are provided on both main surfaces of the actuator in Example 1, and a piezoelectric sheet is provided on either surface of the substrate in the thickness direction;

[0045] Figure 4 Schematic diagram of the structure in which piezoelectric sheets and spacer portions are provided on both main surfaces of the actuator in Example 1, and the spacer portions are joined to the piezoelectric sheets;

[0046] Figure 5 Schematic diagram of the structure in which spacer portions are provided on both main surfaces of the actuator in Example 1, one of the spacer portions is joined to the piezoelectric sheet, and the other spacer portion is bonded to the substrate;

[0047] Figure 6 Schematic diagram of the independent discharge of fluid by each of the hole portions during operation;

[0048] Figure 7 Schematic diagram of the independent suction of fluid by each of the hole portions during operation;

[0049] Figure 8 Schematic diagram of the structure and diaphragm vibration state of the fluid generating device with the diaphragm in the third-order resonance mode in Example 1;

[0050] Figure 9 Explosion schematic diagram of the fluid generating device with the diaphragm in the third-order resonance mode in Example 1;

[0051] Figure 10 Explosion schematic diagram of the fluid generating device with the diaphragm in the third-order resonance mode in Example 1 from another perspective;

[0052] Figure 11 Schematic diagram of the structure in which the diaphragm in Example 1 bulges and deforms in one direction in the second-order resonance mode;

[0053] Figure 12 Schematic diagram of the structure in which the diaphragm in Example 1 bulges and deforms in the other direction in the second-order resonance mode;

[0054] Figure 13 Schematic diagram of the structure in which the diaphragm in Example 1 bulges and deforms in one direction in the fourth-order resonance mode;

[0055] Figure 14 Schematic diagram of the structure in which the diaphragm in Example 1 bulges and deforms in the other direction in the fourth-order resonance mode;

[0056] Figure 15 Schematic diagram of the structure in which the diaphragm in Example 1 bulges and deforms in one direction in the second-order resonance mode when the short sides of the square diaphragm are fixed;

[0057] Figure 16 Schematic diagram of the structure that bulges and deforms in the other direction under the second-order resonance mode when both sides of the short side of the square diaphragm in Embodiment 1 are fixed;

[0058] Figure 17 Schematic diagram of the structure that bulges and deforms in one direction under the second-order resonance mode when both sides of the short side and the long side of the square diaphragm in Embodiment 1 are fixed;

[0059] Figure 18 Schematic diagram of the structure that bulges and deforms in the other direction under the second-order resonance mode when both sides of the short side and the long side of the square diaphragm in Embodiment 1 are fixed;

[0060] Figure 19 Schematic diagram of the structure that bulges and deforms in one direction under a higher-order resonance mode when both sides of the short side and the long side of the square diaphragm in Embodiment 1 are fixed;

[0061] Figure 20 Schematic diagram of the structure that bulges and deforms in the other direction under a higher-order resonance mode when both sides of the short side and the long side of the square diaphragm in Embodiment 1 are fixed;

[0062] Figure 21 Schematic diagram of the structure in Embodiment 2 where the spacer part is a plurality of spaced spacers;

[0063] Figure 22 Schematic diagram of the fluid generating device in Embodiment 3;

[0064] Figure 23 Schematic diagram of the structure of the fluid generating device with a frame part in a planar support manner in Embodiment 4;

[0065] Figure 24 Schematic diagram of the structure of the fluid generating device with a frame part in a vertical support manner in Embodiment 4;

[0066] Figure 25 Schematic diagram of the structure of the fluid generating device with a holding part in Embodiment 5;

[0067] Figure 26 Schematic diagram of the structure of the fluid generating device with a diaphragm extension part in Embodiment 6;

[0068] Figure 27 Schematic diagram of the structure in Embodiment 6 where a plurality of openings are formed at intervals along the circumferential direction of the suspension part;

[0069] Figure 28 Schematic diagram of the structure of the fluid generating device with a diaphragm support part in Embodiment 7;

[0070] Figure 29 Schematic diagram of the diaphragm support part in Embodiment 7;

[0071] In the figure: 1. Substrate;

[0072] 2. Piezoelectric sheet, 2-1. Cavity;

[0073] 3. Spacer, 3-1. Groove portion, 31. Spacer body;

[0074] 4. Diaphragm, 41. Hole portion;

[0075] 5. Chamber;

[0076] 6. Frame portion, 61. Elastic arm, 62. Central opening;

[0077] 7. Holding portion;

[0078] 8. Diaphragm extension, 81. Fixing portion, 82. Suspension portion, 83. Opening;

[0079] 9. Diaphragm support portion, 91. Fixed support portion, 92. Cantilever portion;

[0080] 10. Actuator, 10-1. First main surface, 10-2. Second main surface;

[0081] A. Antinode position, A1. Central antinode, A2. Annular antinode. Detailed implementation mode

[0082] Now, the present invention will be further described in detail with reference to the accompanying drawings. These drawings are all simplified schematic diagrams, only illustrating the basic structure of the present invention in a schematic manner. Therefore, they only show the components related to the present invention, and directions and references (such as up, down, left, right, etc.) can only be used to assist in the description of the features in the drawings. Therefore, the following detailed implementation mode is not adopted in a restrictive sense, and the scope of the claimed subject matter is only defined by the appended claims and their equivalent forms.

[0083] Embodiment 1, a fluid generating device with high-order resonance, which can be used as a fan, includes: a substrate 1, a piezoelectric sheet 2, a spacer 3, and a diaphragm 4;

[0084] As Figures 1 - 20 shown, at least one piezoelectric sheet 2 is bonded to one or both surfaces of the substrate 1 in the thickness direction. The piezoelectric sheet 2 can be a piezoelectric ceramic sheet. The piezoelectric sheet 2 and the substrate 1 form an actuator 10. The actuator 10 has a first main surface 10-1 and a second main surface 10-2 that are oppositely arranged in the thickness direction. When the piezoelectric sheet 2 is excited by an electrical signal, the actuator 10 is caused to vibrate;

[0085] The substrate 1 can be, but is not limited to, circular, rectangular, polygonal, elliptical, etc. In this embodiment, the substrate 1 is in the shape of a circular plate. A single piezoelectric sheet 2 can be joined to either surface of the substrate 1 in the thickness direction to form a piezoelectric single crystal actuator 10; or two piezoelectric sheets 2 are respectively arranged on both surfaces of the substrate 1 in the thickness direction to form a piezoelectric bimorph actuator 10; or a composite multi-layer piezoelectric actuator 10 and other structures formed by arranging multiple piezoelectric sheets 2 on the same surface of the substrate 1 in the thickness direction. Under the excitation of an external periodic electrical signal, the piezoelectric sheet 2 causes the actuator 10 to vibrate.

[0086] A spacer 3 is joined to the first main surface 10-1 or / and the second main surface 10-2. One end of the spacer 3 close to the actuator 10 is connected to the actuator 10, and a groove 3-1 with an opening facing away from one end of the actuator 10 is formed between the spacer 3 and the actuator 10.

[0087] Specifically:

[0088] The spacer 3 can be joined to one or both surfaces of the substrate 1 that constitutes the actuator 10 in the thickness direction. At this time, it is not difficult to understand that the spacer 3 can be joined to one surface of the substrate 1 in the thickness direction or to the other surface of the substrate 1 in the thickness direction, as Figure 1 and Figure 2 shown. Of course, when there are multiple spacers 3 at the same time, for example, the fluid generating device of the present application can have a two-way working function. At this time, spacer 3s need to be provided on both main surfaces of the actuator 10, and the spacer 3s can be respectively arranged on both surfaces of the substrate 1 in the thickness direction, as Figure 3 shown; in this structure, when the spacer 3 and the piezoelectric sheet 2 are arranged on the same surface of the substrate 1 in the thickness direction, the piezoelectric sheet 2 is located in the groove 3-1 of the spacer 3. At the same time, the spacer 3 has a height protruding from the surface of the piezoelectric sheet 2, as Figure 2 and 3 shown; when the spacer 3 and the piezoelectric sheet 2 are respectively arranged on both surfaces of the substrate 1 in the thickness direction, there is no such limitation; the joining between the spacer 3 and the substrate 1 can be bonding or integrally formed.

[0089] In addition, the spacer 3 can also be joined to the surface of the piezoelectric sheet 2 that constitutes the actuator 10 and faces away from the actuator 10. In this structure, it is not difficult to understand that when the actuator 10 constitutes the piezoelectric single crystal sheet actuator 10 described above, the spacer 3 can be joined to the surface of the piezoelectric sheet 2 that constitutes the piezoelectric single crystal sheet actuator 10 and faces away from the substrate 1; when the actuator 10 constitutes the piezoelectric bimorph actuator 10 described above, the spacer 3 can be joined to the surface of either piezoelectric sheet 2 that constitutes the piezoelectric bimorph actuator 10 and faces away from the substrate 1. Of course, when there are multiple spacers 3, for example, the fluid generating device of the present application can have a two-way working function. At this time, the spacer 3 needs to be provided on both the first main surface 10-1 and the second main surface 10-2 of the actuator 10. The spacer 3 can be respectively provided on the surface of the two piezoelectric sheets 2 that constitute the piezoelectric bimorph actuator 10 and face away from the substrate 1, as Figure 4 shown.

[0090] In addition, it is not difficult to understand that when there are multiple spacers 3, the joining methods of the spacers 3 described above can also be combined with each other. For example, the fluid generating device of the present application can have a two-way working function. At this time, the spacer 3 needs to be provided on both the first main surface 10-1 and the second main surface 10-2 of the actuator 10. Among them, at least one spacer 3 is joined to the surface of the piezoelectric sheet 2 that constitutes the actuator 10 and faces away from the actuator 10, and at least one spacer 3 is joined to the surface of the substrate 1 that faces away from the actuator 10, as Figure 5 shown; in this structure, the joining between the spacer 3 and the substrate 1 can be bonding or integral molding.

[0091] Of course, the joining method of the spacer 3 is not limited to this. The joining method of the spacer 3 follows the principle that the end of the spacer 3 close to the actuator 10 is connected to the actuator 10, and the spacer 3 and the actuator 10 enclose a groove portion 3-1 with an opening at the end facing away from the actuator 10.

[0092] In this embodiment, the actuator 10 is configured as a piezoelectric single crystal sheet actuator 10, and there is one spacer 3. The spacer 3 is joined to the surface of the substrate 1 on the side where the second main surface 10-2 of the actuator 10 is located for illustration to facilitate understanding.

[0093] The spacer 3 is joined to the surface of the substrate 1 on the side where the second main surface 10-2 is located. The end of the spacer 3 close to the substrate 1 is connected to the substrate 1, and the spacer 3 and the substrate 1 enclose a groove portion 3-1 with an opening at the end facing away from the substrate 1, as Figure 1 shown; the joining between the spacer 3 and the substrate 1 can be bonding or integral molding. The spacer 3 is a ring structure, and the inner peripheral wall of the spacer 3 itself encloses the groove portion 3-1.

[0094] One end of the spacer portion 3 close to the substrate 1 is joined to the surface of the substrate 1 on the side where the second main surface 10-2 is located. The diaphragm 4 is connected to one end of the spacer portion 3 facing away from the substrate 1. Thus, the vibration of the actuator 10 can directly drive the spacer portion 3 and the diaphragm 4 to vibrate, so as to transfer the vibration energy to the diaphragm 4 by means of mechanical coupling.

[0095] The diaphragm 4 is connected to one end of the spacer portion 3 facing away from the substrate 1 and covers the opening of the groove portion 3-1, so that a chamber 5 is formed between the substrate 1, the groove portion 3-1 and the diaphragm 4. A hole portion 41 communicating with the chamber 5 penetrates through the region of the diaphragm 4 opposite to the chamber 5.

[0096] Thus, the diaphragm 4 is fixedly connected to the actuator 10 through the spacer portion 3. The vibration of the actuator 10 causes the diaphragm 4 to vibrate, and this process is accompanied by energy transfer. The vibration energy generated by the actuator 10 under the excitation of an external electrical signal is, on the one hand, transferred to the diaphragm 4 by the way that the vibration of the actuator 10 drives the fluid in the chamber 5 to generate a pressure change, and then promotes the diaphragm 4 to vibrate. More importantly, the energy is directly transferred to the diaphragm 4 by the mechanical coupling formed between the actuator 10 and the diaphragm 4. Compared with the prior art that only relies on the fluid to transfer the vibration energy, the energy transfer efficiency is higher. Under the same excitation conditions, it can promote the diaphragm 4 to generate a larger amplitude to achieve a higher flow output. Under the same amplitude requirement, it can reduce the input power of the actuator 10, reduce heat generation, and improve the energy utilization rate, product stability and service life.

[0097] When the actuator 10 vibrates under the excitation of an electrical signal, it transfers the vibration energy to the diaphragm 4 to cause the diaphragm 4 to vibrate in a higher-order resonance mode with at least two antinodes. The vibration of the higher-order resonance mode generated by the diaphragm 4 can be, but is not limited to, the vibration of the second-order resonance mode, the vibration of the third-order resonance mode, the vibration of the fourth-order resonance mode, the vibration of the fifth-order resonance mode, the vibration of the sixth-order resonance mode, the vibration of the seventh-order resonance mode, the vibration of the eighth-order resonance mode or the vibration of the ninth-order resonance mode. At least one hole portion 41 is formed at at least one antinode position A of the diaphragm 4 vibration or in the adjacent region of the antinode position A. The adjacent region of the antinode position A refers to the region that is close to the side where the antinode position A is located but does not include the antinode position A within the interval between the node position and the antinode position A of the diaphragm 4 vibration.

[0098] In this embodiment, it is not limited that at least one hole portion 41 is formed at at least one antinode position A of the diaphragm 4 vibration or in the adjacent region of the antinode position A. It can also be that at least one hole portion 41 is respectively formed in at least two antinode positions A of the diaphragm 4 vibration or in the adjacent regions of the antinode position A. It can also be that at least one hole portion 41 is respectively formed in each antinode position A of the diaphragm 4 vibration or in the adjacent region of the antinode position A.

[0099] During operation, the piezoelectric sheet 2 causes the actuator 10 to vibrate under the excitation of an electrical signal, and transfers the vibration energy to the diaphragm 4, so as to cause the diaphragm 4 to generate vibrations in a higher-order resonance mode with at least two antinodes. The holes 41 formed at at least one antinode position A of the diaphragm 4 vibration or in the adjacent area of the antinode position A independently suck in and discharge fluid during the working process. When the area where the hole 41 is located deforms towards the side away from the actuator 10, the local volume of the chamber 5 in the area corresponding to the hole 41 becomes larger and the pressure decreases, and the external fluid enters the chamber 5 along the hole 41, as Figure 7 shown; when the area where the hole 41 is located deforms towards the side of the actuator 10, the local volume of the chamber 5 in the area corresponding to the hole 41 becomes smaller and the pressure increases, and the fluid sucked into the chamber 5 in the previous process is discharged from the chamber 5 along the hole 41 and has a certain momentum. The fluid with a certain momentum forms a jet after flowing out of the hole 41, and can entrain the surrounding fluid to further increase the output flow rate, as Figure 6 shown, and so on.

[0100] It should be noted that under this structure, the height of the chamber 5 in the thickness direction of the actuator 10 can be greater than the sum of the maximum displacement magnitudes of the actuator 10 and the diaphragm 4 during their opposite-direction vibration deformations, so as to avoid motion interference between the actuator 10 and the diaphragm 4 during vibration and make full use of the vibration energy. In addition, under this structure, if the height of the chamber 5 is too large, the pressure and flow rate of the fluid discharged from the chamber 5 through the hole 41 will decrease, which will affect the formation of the jet, and even the jet cannot be formed, and thus the surrounding fluid cannot be entrained, resulting in a decrease in the final output flow rate. Preferably, the height of the chamber 5 in the thickness direction of the actuator 10 is not greater than 20 times the sum of the maximum displacement magnitudes of the actuator 10 and the diaphragm 4 during their opposite-direction vibration deformations.

[0101] The vibration generated by the diaphragm 4 can be a vibration mode with central symmetry. For example, when the diaphragm 4 vibrates in a first-order resonance mode, the vibration displacement at the central position of the diaphragm 4 is the largest. Since there is only one central antinode A1, its effective working space is mainly concentrated in the area of the chamber 5 opposite to the central antinode A1 of the actuator 10 and the diaphragm 4, and the vibration energy in the area outside the central antinode A1 area of the actuator 10 and the diaphragm 4 is not effectively utilized, resulting in low overall energy utilization rate.

[0102] This situation can be effectively improved when the diaphragm 4 vibrates in a higher-order resonance mode. Because in the higher-order central symmetry resonance mode of the diaphragm 4, not only does it have a central antinode A1, but also has an annular antinode A2 surrounding the central antinode A1 at a position further outside the central antinode A1. The number of annular antinodes A2 is related to the order of the resonance mode;

[0103] The spacer portion 3 is a ring structure. The inner peripheral wall of the spacer portion 3 and the substrate 1 enclose a ring-shaped groove portion 3-1. One end of the spacer portion 3 facing away from the substrate 1 is entirely or partially joined to the diaphragm 4 on the annular path around the groove portion 3-1;

[0104] When one end of the ring-shaped spacer portion 3 facing away from the substrate 1 is entirely joined to the diaphragm 4 on the annular path around the groove portion 3-1:

[0105] The diaphragm 4 vibrates in a third-order resonance mode. The antinode positions A can be the central antinode A1 and the annular antinode A2 respectively. There is a central antinode A1 at the central position of the diaphragm 4, and there is also an annular antinode A2 surrounding the central antinode A1 at a position closer to the outside of the central antinode A1. At this time, since the vibration displacement of the diaphragm 4 is significantly increased compared with the prior art, even if the hole portion 41 is provided only at the central antinode A1 or in the adjacent area of the central antinode A1, or only at the annular antinode A2 or in the adjacent area of the annular antinode A2, a higher output flow rate can be obtained. Of course, preferably, the hole portion 41 is provided at the central antinode A1 and the annular antinode A2 or in their adjacent areas simultaneously, as Figures 8 - 10 shown ( Figure 8 In the figure, the curve W1 represents the limit position state in the first direction when each area where the hole portion 41 is located vibrates and deforms during the vibration of the diaphragm 4, and W2 represents the limit position state in the second direction opposite to the first direction when each area where the hole portion 41 is located vibrates and deforms during the vibration of the diaphragm 4). The effect that can be achieved is that the effective working space of the chamber 5 between the actuator 10 and the diaphragm 4 is no longer mainly concentrated in the central area of the diaphragm 4, but extends to a larger area compared with the central area, and the utilization rate of vibration energy is higher;

[0106] The vibration generated by the diaphragm 4 can also be a vibration in a higher-order resonance mode other than the central symmetric vibration mode. For example, when the diaphragm 4 vibrates in a second-order resonance mode, there are two antinodes distributed axially symmetrically. At this time, since the vibration displacement of the diaphragm 4 is significantly increased compared with the prior art, even if the hole portion 41 is provided only at one of the antinode positions A or in the adjacent area, a higher output flow rate can be obtained. Of course, preferably, the hole portion 41 is provided at the two axially symmetrically distributed antinode positions A or in the adjacent areas of the antinode positions A simultaneously, as Figures 11 - 12As shown, where "+" indicates that the diaphragm 4 bulges and deforms in one direction, "-" indicates that the diaphragm 4 bulges and deforms in the other direction, and the area circled by the long dash and two short dashes represents the area where the antinode position A is located; when the diaphragm 4 vibrates in the fourth-order resonance mode, there are four antinodes distributed axially symmetrically. Similarly, at this time, since the vibration displacement of the diaphragm 4 is significantly increased compared with the prior art, even if the hole portion 41 is provided only at one of the antinode positions A or in the adjacent area, a higher output flow rate can be obtained. Preferably, the hole portions 41 are provided simultaneously at the four antinode positions A distributed axially symmetrically or in the adjacent areas, as Figures 13 - 14 shown, the effect that can be achieved is that the effective working space of the chamber 5 between the actuator 10 and the diaphragm 4 is no longer mainly concentrated in the central area of the diaphragm 4, but extends to a larger area compared with the central area, and the utilization rate of vibration energy is higher;

[0107] The actuator 10 generates vibration under an external excitation, and at the same time transmits the vibration energy to the diaphragm 4, thereby causing the diaphragm 4 to vibrate. The resonance mode of the cooperative vibration of the actuator 10 and the diaphragm 4 is related to the structural shape of the substrate 1, the structural shape of the diaphragm 4, and the bonding method between the two; the above factors do not constitute a limitation on the protection scope of the claims of the present invention. The substrate 1 can be, but is not limited to, circular, rectangular, polygonal, elliptical, etc. The shape of the diaphragm 4 can also be, but is not limited to, circular, rectangular, polygonal, elliptical, etc. The spacer 3 bonded between the substrate 1 and the diaphragm 4 can also be, but is not limited to, a circular ring structure, a rectangular ring structure, a polygonal ring structure, or an elliptical ring structure, etc.

[0108] Regarding the diaphragm 4 alone, the diaphragm 4 can be rectangular, and is fixedly connected to the substrate 1 through the spacer 3 on both sides of the short side of the diaphragm 4, and the two sides of the long side of the diaphragm 4 are not fixed:

[0109] When the diaphragm 4 vibrates in the second-order resonance mode, there are two antinodes distributed along the long side. At this time, since the vibration displacement of the diaphragm 4 is significantly increased compared with the prior art, even if the hole portion 41 is provided only at one of the antinode positions A or in the adjacent area of the antinode position A, a higher output flow rate can be obtained. Of course, preferably, the hole portions 41 are provided simultaneously at the two antinode positions A distributed along the long side or in the adjacent areas of the antinode position A, as Figures 15 - 16 shown;

[0110] When the diaphragm 4 vibrates in the third-order resonance mode, there are three antinodes distributed along the long side. At this time, since the vibration displacement of the diaphragm 4 is significantly increased compared with the prior art, even if the hole portion 41 is provided only at one of the antinode positions A or in the adjacent area of the antinode position A, a higher output flow rate can be obtained. Of course, preferably, the hole portions 41 are provided simultaneously at the three antinode positions A distributed along the long side or in the adjacent areas of the antinode position A.

[0111] For another example, still taking the diaphragm 4 alone as an example, when the diaphragm 4 is rectangular and both the short side and the long side of the diaphragm 4 are fixedly connected to the substrate 1 through the spacer portion 3:

[0112] When the diaphragm 4 vibrates in the second-order resonance mode, there are two antinodes distributed along the long side. At this time, since the vibration displacement of the diaphragm 4 is significantly increased compared with the prior art, even if the hole portion 41 is provided only at one of the antinode positions A of the diaphragm 4 or in the adjacent area of the antinode position A, a higher output flow rate can be obtained. Of course, preferably, the hole portions 41 are simultaneously provided at the two antinode positions A distributed along the long side of the diaphragm 4 or in the adjacent areas of the antinode position A, as Figures 17 - 18 shown;

[0113] When the diaphragm 4 vibrates in a higher-order resonance mode, there is also a resonance mode with six antinodes as Figures 19 - 20 shown. At this time, since the vibration displacement of the diaphragm 4 is significantly increased compared with the prior art, even if the hole portion 41 is provided only at one of the antinode positions A or in the adjacent area of the antinode position A, a higher output flow rate can be obtained. Of course, preferably, the hole portions 41 are simultaneously provided at the six antinode positions A or in the adjacent areas.

[0114] The diaphragm 4 can be made of metal film materials such as copper foil, titanium foil, stainless steel foil, etc. Preferably, the diaphragm 4 is made of a polymer material such as PET, PI, PPS, PEI, FEP or other polymer film materials, or the diaphragm 4 is made of a composite material composed of a polymer material and other metal materials such as PI copper clad laminate / membrane, PET copper clad laminate / membrane, PET nickel-plated plate / membrane, carbon fiber metal composite plate / membrane, etc. Whether it is a polymer material or a composite material composed of a polymer material and other materials, compared with metal materials, it shows the characteristics of light weight and high elastic strain limit. The ultimate amplitude during resonance is usually much higher than that of metal materials, and it is especially suitable for high requirements for flow output, such as heat dissipation of intelligent 3C terminal products.

[0115] Embodiment 2

[0116] As Figure 21 shown, the difference between Embodiment 2 and Embodiment 1 is that: the spacer portion 3 has a plurality of spacers 31. The spacers 31 are all joined to the surface on the side where the second main surface 10-2 of the substrate 1 is located by bonding or integral molding. One end of the spacer 31 close to the substrate 1 is connected to the substrate 1. The plurality of spacers 31 are spaced apart along an annular path to enclose a groove portion 3-1 with the actuator 10. One end of the spacer 31 facing away from the actuator 10 is wholly or partly joined to the diaphragm 4 on the annular path around the groove portion 3-1.

[0117] That is, the substrate 1, the diaphragm 4 and the spacer 3 form a chamber 5, and the spacer 3 forms the inner wall of the chamber 5. The inner wall of the chamber 5 can be closed and has no channel connected to the outside, and the spacer 3 is an annular structure; the inner wall of the chamber 5 can also be open, and the gaps between the multiple spacers 31 arranged at intervals form channels connected to the outside, and the channels connect the chamber 5.

[0118] Although, when the volume of chamber 5 increases, external gas can enter chamber 5 through the above-mentioned channel and flow toward the center of chamber 5, when the volume of chamber 5 decreases, the gas entering chamber 5 from the above-mentioned channel reverses its flow direction before reaching the area opposite to and adjacent to the hole 41 in chamber 5, and flows out of chamber 5 along the original route. Therefore, it will not have a substantial impact or the impact is very small on the suction and discharge of gas from the hole 41, so the inner wall of chamber 5 can be open.

[0119] Example 3

[0120] like Figure 22 As shown, the difference between Example 3 and Example 1 or 2 is that the piezoelectric sheet 2 is an annular structure with a hole 2-1 running through the center, and the hole 2-1 is arranged opposite to the chamber 5; the effect brought about by this is that the vibration displacement of the area where the actuator 10 is opposite to the hole 2-1 of the piezoelectric sheet 2 is much larger than the displacement at the periphery. At this time, if the effective vibration area of ​​the diaphragm 4 is also arranged to correspond to the hole 2-1 of the piezoelectric sheet 2, the diaphragm 4 can also produce a larger displacement after being excited, thereby, the chamber 5 can obtain a larger volume change, which can further increase the output flow rate to meet application requirements.

[0121] Example 4

[0122] like Figure 23 and 24 As shown, the difference between Embodiment 4 and Embodiment 1, 2 or 3 is that: it also includes an adapter for fixedly connecting with the terminal product;

[0123] The adapter is connected to the area on the diaphragm 4 that is opposite to the spacer 3, the actuator 10 or the spacer 3 or elastically;

[0124] The adapter includes a frame portion 6 for fixed connection with the terminal product:

[0125] The frame 6 is provided with a plurality of elastic arms 61, and one end of the elastic arm 61 facing away from the frame 6 is fixedly connected to the actuator 10, the spacer 3 or the area on the diaphragm 4 relative to the spacer 3; thereby, the functional components consisting of the actuator 10, the spacer 3 and the diaphragm 4 are elastically supported on the frame 6 in a substantially unconstrained manner, and the elastic support does not hinder the vibration of the various components constituting the functional components; the frame 6 is fixedly connected to the terminal product equipped with the fluid generating device.

[0126] As Figure 23 shown, the actuator 10 can be supported on the frame portion 6 in a planar support manner. A central opening 62 penetrates through the middle position of the frame portion 6. The actuator 10 is at least partially located in the central opening 62, which can reduce the overall thickness. One end of the elastic arm 61 is connected to the inner peripheral wall of the central opening 62, and the other end is fixedly connected to the outer peripheral wall of the actuator 10 or the outer peripheral wall of the spacer portion 3 or the outer peripheral wall of the diaphragm 4.

[0127] As Figure 24 shown, the actuator 10 can also be supported on the frame portion 6 in a vertical support manner. A central opening 62 penetrates through the middle position of the frame portion 6. At least the hole portion 41 of the diaphragm 4 is exposed at the central opening 62. The central opening 62 is disposed opposite to the hole portion 41; the actuator 10 is located above the central opening 62. One end of the elastic arm 61 is connected to the frame portion 6, and the other end is connected to one end of the actuator 10 close to the frame portion 6.

[0128] Example 5

[0129] As Figure 25 shown, the difference between Example 5 and Example 1 or 2 or 3 is that: it further includes an adapter for fixedly connecting to the terminal product;

[0130] The adapter is fixedly connected to the nodal position of the vibration of the actuator 10;

[0131] The adapter includes a holding portion 7 for fixedly connecting to the terminal product;

[0132] The holding portion 7 is joined to the nodal position of the vibration of the actuator 10. The holding portion 7 is joined to the side of the actuator 10 facing away from the diaphragm 4; when the piezoelectric sheet 2 is located on the side of the substrate 1 facing away from the spacer portion 3, the holding portion 7 can be joined to the nodal position of the vibration of the piezoelectric sheet 2. The holding portion 7 has one or two or more spaced apart. The side of the holding portion 7 facing away from the substrate 1 is fixedly connected to the terminal product equipped with the fluid generating device; thus, it is convenient for the customer to install the fluid generating device on the terminal product in a fixed form, and the structural stability can be improved.

[0133] Example 6

[0134] As Figures 26 - 27 shown, the difference between Example 6 and Example 1 or 2 or 3 is that: the adapter includes a diaphragm extension portion 8. The diaphragm extension portion 8 includes a fixing portion 81 and an elastic suspension portion 82. The fixing portion 81 is used for fixedly connecting to the terminal product, and the fixing portion 81 surrounds the outer periphery of the diaphragm 4. One end of the suspension portion 82 is connected to the inner peripheral wall of the fixing portion 81, and the other end is connected to the outer peripheral wall of the diaphragm 4, so that the diaphragm 4 is elastically supported on the fixing portion 81 in the horizontal direction through the cantilever portion 92;

[0135] There are a plurality of hanging portions 82 , and an opening 83 is formed between two adjacent hanging portions 82 .

[0136] Preferably, the diaphragm extension portion 8 is integrally formed with the diaphragm 4; the fixing portion 81 is fixedly connected to a terminal product equipped with the fluid generating device, thereby facilitating the customer to elastically install the fluid generating device on the terminal product, thereby improving the compactness of the structure and reducing the thickness.

[0137] Example 7

[0138] like Figures 28 - 29 As shown, the difference between Example 7 and Example 1, 2 or 3 is that: the adapter includes a diaphragm supporting portion 9, the diaphragm supporting portion 9 is arranged on the side of the diaphragm 4 away from the substrate 1, the diaphragm supporting portion 9 includes a fixed supporting portion 91 and a plurality of cantilever portions 92 arranged at intervals, the cantilever portions 92 can be distributed at intervals along the circumference of the chamber 5, the fixed supporting portion 91 is used for fixed connection with the terminal product, and is located on the outside of the outer peripheral wall of the partition portion 3, one end of the cantilever portion 92 is connected to the fixed supporting portion 91, and the other end is connected to the area of ​​the diaphragm 4 opposite to the partition portion 3 on the side away from the substrate 1, so that the diaphragm 4 is elastically supported on the fixed supporting portion 91 in the vertical direction through the cantilever portion 92; the fixed supporting portion 91 is fixedly connected to the terminal product equipped with the fluid generating device, so that the customer can flexibly install the fluid generating device on the terminal product, which can improve the compactness of the structure and reduce the thickness.

[0139] The above-mentioned ideal embodiments of the present invention are for inspiration. Through the above-mentioned description, relevant staff can make various changes and modifications without departing from the technical idea of ​​the present invention. The technical scope of the present invention is not limited to the contents of the specification, and its technical scope must be determined according to the scope of the claims.

Claims

1. A high-order resonant fluid generating device, characterized in that: include: A substrate (1) having at least one piezoelectric sheet (2) bonded to one or both surfaces in a thickness direction, the piezoelectric sheet (2) and the substrate (1) forming an actuator (10), the actuator (10) having a first main surface (10-1) and a second main surface (10-2) arranged opposite to each other in the thickness direction, the piezoelectric sheet (2) causing the actuator (10) to vibrate under the stimulation of an electrical signal; A spacer (3), the first main surface (10-1) or / and the second main surface (10-2) being joined with the spacer, the spacer (3) being connected to the actuator (10) at one end close to the actuator (10), and the spacer (3) and the actuator (10) forming a groove (3-1) having an opening at one end facing away from the actuator (10); and a diaphragm (4) fixedly connected to an end of the spacer (3) away from the actuator (10) and covering the opening of the groove (3-1), so that a chamber (5) is formed between the actuator (10), the groove (3-1) and the diaphragm (4), and a hole (41) communicating with the chamber (5) is penetrated in a region of the diaphragm (4) opposite to the chamber (5); When the actuator (10) vibrates under the excitation of an electrical signal, it transmits vibration energy to the diaphragm (4), so as to cause the diaphragm (4) to generate vibration in a high-order resonance mode having at least two antinodes; At least one hole portion (41) is respectively formed at at least two antinode positions (A) of the vibration of the diaphragm (4) or in the vicinity of the antinode position (A); The holes (41) formed at the antinode position (A) or the vicinity of the antinode position (A) of the vibration of the diaphragm (4) respectively perform fluid suction and discharge relatively independently during operation.

2. The high-order resonant fluid generating device according to claim 1, characterized in that: At least one hole portion (41) is formed at each antinode position (A) of the vibration of the diaphragm (4) or at a region adjacent to the antinode position (A).

3. The high-order resonant fluid generating device according to claim 1, characterized in that: The spacer (3) is an annular structure, the inner peripheral wall of the spacer (3) and the actuator (10) enclose an annular groove (3-1), and one end of the spacer (3) away from the actuator (10) is fully or partially engaged with the diaphragm (4) on an annular path around the groove (3-1).

4. The high-order resonant fluid generating device according to claim 1, characterized in that: The spacer portion (3) has a plurality of spacers (31), each of which is bonded to the first main surface (10-1) or the second main surface (10-2). The plurality of spacers (31) are spaced and distributed along an annular path around the chamber (5) to enclose the groove portion (3-1) with the actuator (10), and one end of the spacer (31) facing away from the actuator (10) is fully or partially bonded to the diaphragm (4).

5. The high-order resonant fluid generating device according to claim 1, characterized in that: The piezoelectric sheet (2) is in the form of an annular structure with a cavity (2-1) running through the center, and the cavity (2-1) is arranged opposite to the chamber (5).

6. The high-order resonant fluid generating device according to claim 1, characterized in that: The diaphragm (4) is made of a polymer material, or a composite material consisting of a polymer material and a metal material.

7. The high-order resonant fluid generating device according to claim 1, characterized in that: The vibration of the high-order resonance mode generated by the diaphragm (4) is vibration of the second-order resonance mode, vibration of the third-order resonance mode, vibration of the fourth-order resonance mode, vibration of the fifth-order resonance mode, vibration of the sixth-order resonance mode, vibration of the seventh-order resonance mode, vibration of the eighth-order resonance mode or vibration of the ninth-order resonance mode.

8. The high-order resonant fluid generating device according to any one of claims 1 to 7, characterized in that: Also included is an adapter for fixed connection with a terminal product; The adapter is elastically connected to a region on the diaphragm (4) that is opposite to the spacer (3), the actuator (10) or the spacer (3); Alternatively, the adapter is fixedly connected to a node position of vibration of the actuator (10).

9. The high-order resonant fluid generating device according to claim 8, characterized in that: The adapter comprises a frame portion (6) for fixedly connecting to the terminal product: The frame portion (6) is provided with a plurality of elastic arms (61) having elasticity, and one end of the elastic arm (61) facing away from the frame portion (6) is fixedly connected to a region on the diaphragm (4) opposite to the spacer portion (3), the actuator (10) or the spacer portion (3).

10. The high-order resonant fluid generating device according to claim 9, characterized in that: A central opening (62) passes through the middle of the frame (6); The actuator (10) is at least partially located in the central opening portion (62), one end of the elastic arm (61) is connected to the inner peripheral wall of the central opening portion (62), and the other end is fixedly connected to the outer peripheral wall of the actuator (10) or the outer peripheral wall of the spacer portion (3).

11. The high-order resonant fluid generating device according to claim 9, characterized in that: A central opening (62) passes through the middle of the frame (6), and all the holes (41) are arranged opposite to the central opening (62); The actuator (10) is located above the central opening (62); one end of the elastic arm (61) is fixedly connected to the frame (6), and the other end is connected to an end of the actuator (10) close to the frame (6).

12. The high-order resonant fluid generating device according to claim 8, characterized in that: The adapter comprises a retaining portion (7) for fixedly connecting to the terminal product; The retaining portion (7) is engaged at a node position of vibration of the actuator (10), and the retaining portion (7) is engaged on a side of the actuator (10) facing away from the diaphragm (4); The retaining portion (7) comprises one or two or more retaining portions which are arranged at intervals.

13. The high-order resonant fluid generating device according to claim 8, characterized in that: The adapter comprises a diaphragm extension portion (8), the diaphragm extension portion (8) comprises a fixing portion (81) and an elastic suspension portion (82), the fixing portion (81) is used to be fixedly connected to a terminal product, and the fixing portion (81) surrounds the outer periphery of the diaphragm (4), one end of the suspension portion (82) is connected to the inner peripheral wall of the fixing portion (81), and the other end is connected to the outer peripheral wall of the diaphragm (4), so that the diaphragm (4) is elastically supported on the fixing portion (81) in a horizontal direction through the cantilever portion (92).

14. The high-order resonant fluid generating device according to claim 13, characterized in that: The suspension parts (82) are multiple, and an opening part (83) is formed between two adjacent suspension parts (82).

15. The high-order resonant fluid generating device according to claim 13, characterized in that: The diaphragm extension portion (8) is integrally formed with the diaphragm (4).

16. The high-order resonant fluid generating device according to claim 8, characterized in that: The adapter comprises a diaphragm support portion (9), wherein the diaphragm support portion (9) is arranged on a side of the diaphragm (4) facing away from the substrate (1), and the diaphragm support portion (9) comprises a fixed support portion (91) and a plurality of cantilever portions (92) arranged at intervals, wherein the fixed support portion (91) is used for fixed connection with a terminal product and is located outside the outer peripheral wall of the spacer portion (3), one end of the cantilever portion (92) is connected to the fixed support portion (91), and the other end is connected to a region of the diaphragm (4) facing away from the substrate (1) and opposite to the spacer portion (3), so that the diaphragm (4) is elastically supported on the fixed portion (81) in a horizontal direction through the cantilever portion (92).

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