A polarization device and a polarization method

Abstract

Embodiments of the present disclosure relate to the polarization technology of polymer films, and particularly to a polarization device and a polarization method. The polarization device is used to polarize a workpiece to be polarized. The workpiece to be polarized includes a substrate and a polymer film formed on the substrate. The polarization device includes a preparation table, a polarization chamber, a transfer table, and a carrier table. Among them, the preparation table is used to place the carrier table that is about to enter the polarization chamber; the carrier table is used to place the workpiece to be polarized; the polarization chamber is used to polarize the polymer film of the workpiece to be polarized on the carrier table; the transfer table is used to place the polarized workpiece. The technical solution provided by the embodiments of the present disclosure achieves the effect of automated continuous production.

Description

Technical Field

[0001] Embodiments of the present disclosure relate to the polarization technology of polymer films, and particularly to a polarization device and a polarization method. Background Art

[0002] Polarization is an important step in the treatment of thin film materials. The main purpose is to make the molecular dipole moments with disordered orientations in the thin film material align in a specific direction (such as the direction of the polarization electric field), so that the thin film material has piezoelectric properties. Existing polarization devices polarize a single polymer film separately and do not achieve automated production of polarization.

[0003] Therefore, how to provide a polarization solution that can be continuously produced automatically has become a need in the existing technology. Summary of the Invention

[0004] Embodiments of the present disclosure provide a polarization device and a polarization method to achieve automated continuous production.

[0005] In a first aspect, embodiments of the present disclosure provide a polarization device for polarizing a to-be-polarized member. The to-be-polarized member includes a substrate and a polymer film formed on the substrate. The polarization device includes a preparation table, a polarization chamber, a transfer table, and a carrier table. Among them,

[0006] The preparation table is used to place the carrier table that is about to enter the polarization chamber;

[0007] The carrier table is used to place the to-be-polarized member;

[0008] The polarization chamber is used to polarize the polymer film of the to-be-polarized member on the carrier table;

[0009] The transfer table is used to place the polarized member after polarization.

[0010] In a second aspect, embodiments of the present disclosure further provide a polarization method, which uses the polarization device of the first embodiment of the present disclosure to polarize a to-be-polarized member. The to-be-polarized member includes a substrate and a polymer film formed on the substrate. The polarization device includes a preparation table, a polarization chamber, a transfer table, and a carrier table. The polarization method includes:

[0011] Placing the carrier table that is about to enter the polarization chamber on the preparation table;

[0012] Placing the to-be-polarized member on the carrier table;

[0013] After the carrier table enters the polarization chamber, the polarization chamber polarizes the polymer film of the to-be-polarized member on the carrier table;

[0014] After polarization is completed, placing the polarized member after polarization on the transfer table.

[0015] Compared with the prior art, in the embodiments of the present disclosure, by providing a polarization device and a polarization method, a preparation table is used to place the carrier table that is about to enter the polarization chamber; the carrier table is used to place the component to be polarized; the polarization chamber is used to polarize the polymer film of the component to be polarized on the carrier table; the transfer table is used to place the polarized component after polarization, realizing the automation of polarizing the component to be polarized. The polarization assembly includes a plurality of polarization modules arranged in an array, enabling the polarization device to polarize a component to be polarized with a relatively large area. When the component to be polarized is lifted by the second lifting device, the grounding of the polymer film of the component to be polarized is realized. The polarization steps are simple and the polarization effect is good. Description of the Drawings

[0016] Figure 1 It is a schematic structural diagram of the polarization device provided by the first embodiment of the present disclosure;

[0017] Figure 2 It is a schematic structural diagram of the substrate provided by the first embodiment of the present disclosure;

[0018] Figure 3 It is a schematic structural diagram of the carrier table provided by the first embodiment of the present disclosure;

[0019] Figure 4 It is a schematic structural diagram of the preparation table provided by the first embodiment of the present disclosure;

[0020] Figure 5 It is a schematic structural diagram of the polarization chamber provided by the first embodiment of the present disclosure;

[0021] Figure 6 It is a schematic structural diagram of the transfer table provided by the first embodiment of the present disclosure;

[0022] Figure 7 It is a schematic flowchart of the polarization method provided by the second embodiment of the present disclosure. Detailed Embodiments

[0023] The present invention will be further described in detail below with reference to the drawings and embodiments. It can be understood that the specific embodiments described herein are only used to explain the present invention, rather than limiting the present invention. Additionally, it should be noted that for the sake of description, only parts related to the present invention are shown in the drawings, rather than all the structures.

[0024] Before discussing the exemplary embodiments in more detail, it should be noted that some exemplary embodiments are described as processes or methods depicted as flowcharts. Although the flowcharts depict the steps as sequential processes, many of the steps can be implemented in parallel, concurrently, or simultaneously. In addition, the order of the steps can be rearranged. The process can be terminated when its operations are completed, but it can also have additional steps not included in the figures. The process can correspond to a method, function, procedure, subroutine, subprogram, and so on.

[0025] In addition, terms such as "first", "second", etc. may be used herein to describe various directions, actions, steps, or elements, etc., but these directions, actions, steps, or elements are not limited by these terms. These terms are only used to distinguish a first direction, action, step, or element from another direction, action, step, or element. For example, without departing from the scope of the present application, the first speed difference can be the second speed difference, and similarly, the second speed difference can be referred to as the first speed difference. Both the first speed difference and the second speed difference are speed differences, but they are not the same speed difference. The terms "first", "second", etc. should not be construed as indicating or implying relative importance or implicitly specifying the quantity of the indicated technical features. Thus, features defined with "first", "second" may explicitly or implicitly include one or more of such features. In the description of the present invention, the meaning of "a plurality" is at least two, such as two, three, etc., unless otherwise specifically defined.

[0026] Please refer to Figure 1 , a first embodiment of the present disclosure provides a polarization device 10 for polarizing a to-be-polarized member 15. The polarization device 10 includes a preparation table 11, a polarization chamber 12, a transfer table 13, and a carrier table 14. The polarization chamber 12 is located between the preparation table 11 and the transfer table 13. Among them, the preparation table 11 is used to place the carrier table 14 that is about to enter the polarization chamber 12; the carrier table 14 is used to place the to-be-polarized member 15; the polarization chamber 12 is used to polarize the polymer film of the to-be-polarized member 15 on the carrier table 14; the transfer table 13 is used to place the polarized member after polarization. Specifically, when the carrier table 14 is moved to the preparation table 11, the to-be-polarized member 15 is placed on the carrier table 14; when the carrier table 14 and the to-be-polarized member 15 are moved into the polarization chamber 12, the polarization chamber 12 polarizes the polymer film; after polarization is completed, when the carrier table 14 and the to-be-polarized member 15 are moved to the transfer table 13, the polarized member on the carrier table 14 is transferred away.

[0027] Please refer to Figure 2, the polarization component 15 to be polarized includes a substrate 151 and a polymer thin film (not shown in the figure) formed on the substrate 151. Preferably, the polymer thin film is formed in situ on the substrate 151. After the polarization component 15 to be polarized is polarized, it can be cut into multiple pieces. Since multiple regions are polarized simultaneously, the polarization speed is increased. The polymer thin film is formed in situ on the surface of a substrate 151, thereby obtaining the substrate 151 with the polarization film to be polarized, that is, the polarization component 15 to be polarized. This is a major difference from the prior art. In the prior art, the polarization of the polymer thin film is usually carried out by purchasing an existing finished polymer thin film product and then adhering it to the substrate 151 for polarization. Generally, this kind of finished polymer thin film needs to be stretched to have a certain stress first and then adhered to the substrate 151 for polarization. The thickness of the polymer thin film formed by this method is above 30μm, which does not adapt to the development trend of the existing electronic devices being thin and light. Moreover, for a piezoelectric sensing device using such a polarization film, due to the too thick piezoelectric sensing film, the resolution is relatively low. However, for the polymer thin film polarization method provided by the present invention, the polymer thin film is a thin film formed in situ on a substrate 151, such as being formed on the surface of the substrate 151 by conventional methods such as spin coating, screen printing, slit coating, etc. Therefore, a polymer thin film with a very thin thickness can be formed, and the basic thickness can be maintained below 9μm. Therefore, for a piezoelectric sensing device using such an in-situ formed polarization film, the resolution is greatly improved, and it is also convenient to realize a device composed of thin films with different thicknesses, thereby expanding the system design window of the device.

[0028] The polymer thin film is a ferroelectric polymer thin film, such as polyvinylidene fluoride PVDF; polyvinylidene fluoride trifluoroethylene PVDF-TrFE, polymethyl methacrylate PMMA, polytetrafluoroethylene TEFLON, etc.

[0029] The substrate 151 includes a substrate plate 1511, a grounding electrode 1512, and a grounding pin 1513. The grounding pin 1513 is located at the edge of the substrate plate 1511. The grounding pin 1513 and the grounding electrode 1512 are provided on the same surface of the substrate plate 1511, that is, the same side surface, and the grounding electrode 1512 and the grounding pin 1513 are electrically connected. The polymer thin film covers the grounding electrode 1512 and exposes at least part of the grounding pin 1513. The substrate 151 can be a glass substrate.

[0030] The grounding electrodes 1512 include a plurality of them, and the grounding electrodes 1512 are arranged at matrix intervals on the substrate 1511. The polymer thin film is formed in situ on the surface of the substrate 1511 including the grounding electrodes 1512 and the grounding pins 1513. The polymer thin film covers the grounding electrodes 1512, and the polymer thin film may not cover or partially cover the grounding pins 1513. The grounding pins 1513 are in electrical contact through the grounding electrodes 1512 and the polymer thin film. The grounding electrodes 1512 can be in the shape of a sheet or a mesh. The shape of each of the grounding electrodes 1512 is the same as that of each of the multiple pieces of the to-be-polarized member 15 after being cut. When the grounding electrodes 1512 are grounded, the electric potential of the surface where the polymer thin film contacts the grounding electrodes 1512 is 0.

[0031] Please refer to Figure 3 , the carrier table 14 is in the shape of a flat plate. A carrier groove 141 is formed on the carrier table 14. At least two jacking holes 142 penetrating the thickness direction of the carrier table 14 are further formed at the bottom of the carrier groove 141. A grounding hole 143 is formed on the surface of the carrier table 14 opposite to the carrier groove 141. A carrier electrode 144 is further provided on the carrier table 14. At least part of the carrier electrode 144 is provided at the bottom of the grounding hole 143, and at least part of the carrier electrode 144 is provided on the side surface of the carrier groove 141. It can be understood that the carrier electrode 144 may or may not be provided at the bottom of the carrier groove 141. The carrier electrodes 144 at different positions are electrically connected to each other. The carrier groove 141 is used to place the to-be-polarized member 15. When the to-be-polarized member 15 is placed in the carrier groove 141, the to-be-polarized member 15 is higher than the carrier groove 141, or the to-be-polarized member 15 is flush with the surface of the edge step of the carrier groove 141. The jacking holes 142 are used for other devices to pass through and jack up the to-be-polarized member 15 in the carrier groove 141. The grounding hole 143 is used for other devices to be inserted to ground the circuit of the carrier electrode 144. Further, the grounding hole 143 is also used for other devices to be inserted to jack up the carrier table 14 while grounding the circuit. It can be understood that the carrier electrodes 144 can be provided at both the bottom and the side surface of the carrier,141. When the grounding hole 143 is formed, the grounding hole 143 is made deep enough, and the bottom of the grounding hole is the carrier electrode 144.

[0032] Please continue to refer to Figure 4, the preparation table 11 includes a first conveying device 112 and a first lifting device 111. The first lifting device 111 is located below the first conveying device 112. After the carrier table 14 moves to a preset first position under the action of the first conveying device 112, the first lifting device 111 rises through the conveying device and the lifting hole 142. The external first conveying device places the component to be polarized 15 on the first lifting device 111, and the first lifting device 111 descends so that the component to be polarized 15 is placed in the carrier slot 141. Preferably, the preparation table 11 further includes a first sensor for sensing the position of the carrier table 14. After the carrier table 14 reaches the first position, the first sensor stops the movement of the carrier table 14 through the first conveying device 112. The type of the first sensor is not limited, for example, it can be a limit sensor. It can be understood that the polarization device 10 may further include a control device, which is electrically connected to the first sensor and the first conveying device 112. When the control device senses through the first sensor that the carrier table 14 reaches the first position, the control device controls the first conveying device 112 to stop operating.

[0033] The first conveying device 112 includes a plurality of rollers (not labeled) arranged at intervals, with gaps between the rollers. When the rollers rotate, they can drive the carrier table 14 on the rollers to move. The gaps between the rollers are for the first lifting device 111 to pass through. The structure of the first conveying device 112 is not limited. For example, the first conveying device 112 can also be a conveyor belt including gaps. After the first lifting device 111 descends and the component to be polarized 15 is placed in the carrier slot 141, the first conveying device 112 operates to drive the carrier table 14 into the polarization chamber 12.

[0034] The first lifting device 111 includes a first ejector rod 1111 and a first motor (not shown in the figure). The first motor can drive the first ejector rod 1111 to move up and down. There can be a plurality of first ejector rods 1111. The number of the first ejector rods 1111 is the same as the number of the lifting holes 142, and the positions of the first ejector rods 1111 correspond to the positions of the lifting holes 142. When the first ejector rod 1111 moves up and down, the first ejector rod 1111 can pass through the lifting hole 142. When the first ejector rod 1111 rises through the lifting hole 142, the external first conveying device places the component to be polarized 15 on the first ejector rod 1111 of the first lifting device 111. Preferably, there are at least three first ejector rods 1111 and lifting holes 142, so that the component to be polarized 15 placed on the first ejector rod 1111 can be stable and not prone to tipping over.

[0035] Please refer to Figure 1 and Figure 5, the polarization chamber 12 includes a polarization component 121, a second conveying device 124, a second lifting device 123, and a top cover 122. The top cover 122 includes a conductive sheet 1221. The second lifting device 123 includes a grounding wire 1231. The second lifting device 123 is located below the second conveying device 124. The polarization component 121 is located above the second conveying device 124. The top cover 122 is located between the second conveying device 124 and the polarization component 121, that is, the polarization component 121 is located above the top cover 122. After the carrier table 14 is transported to a preset second position under the action of the second conveying device 124, the second lifting device 123 rises through the second conveying device 124 and inserts into the lifting hole 142, so that the carrier table 14 rises and contacts the top cover 122. The top cover 122 covers the grounding pin 1513 of the component 15 to be polarized on the carrier table 14 and exposes the polymer film of the component 15 to be polarized. The conductive sheet 1221 of the top cover 122 is in electrical contact with the grounding pin 1513 of the component 15 to be polarized and the carrier electrode 144 on the side of the carrier groove 141 at the same time. The grounding wire 1231 of the second lifting device 123 contacts the carrier electrode 144 at the bottom of the grounding hole 143. The polarization component 121 is used to polarize the polymer film. After the polarization is completed, the second lifting device 123 descends, and the component 15 to be polarized is moved to the transfer table 13 by the second conveying device 124. Preferably, the polarization chamber 12 further includes a second sensor for sensing the position of the carrier table 14. After the carrier table 14 reaches the second position, the second sensor stops the movement of the carrier table 14 through the second conveying device 124. The type of the second sensor is not limited. For example, it can be a limit sensor.

[0036] The structure of the second conveying device 124 can be the same as that of the first conveying device 112. For example, the second conveying device 124 includes a plurality of rollers arranged at intervals, so that there are gaps between the rollers. For example, the second conveying device 124 can also be a conveyor belt including gaps. The gaps are for the second lifting device 123 to pass through.

[0037] The second lifting device 123 further includes a second ejector rod (not labeled) and a second motor (not shown in the figure). The second motor can drive the second ejector rod to move up and down. The second ejector rod can include a plurality of them. The number of the second ejector rods is the same as the number of the grounding holes 143. The positions of the second ejector rods correspond to the positions of the grounding holes 143. When the second ejector rod moves up and down, the second ejector rod can insert into the grounding hole 143 to drive the carrier table 14 to move up and down. The grounding wire 1231 passes through the second ejector rod. One end of the grounding wire 1231 exposes from one end of the second ejector rod close to the polarization component 121. The other end of the grounding wire 1231 is grounded. When the second ejector rod rises, the grounding wire 1231 can be electrically conducted with the carrier electrode 144.

[0038] The shape of the top cover 122 is not limited. The top cover 122 enables electrical connection between the ground pin 1513 and the carrier electrode 144, so that the ground electrode 1512 of the component to be polarized 15 on the carrier stage 14 is grounded in sequence through the ground pin 1513, the conductive sheet 1221, the carrier electrode 144 and the ground wire 1231, providing a ground voltage for the lower surface of the polymer film. The top cover 122 covers the ground pin 1513 of the component to be polarized 15 on the carrier stage 14 and exposes the polymer film of the component to be polarized 15. Combining with the relatively uniform polarization voltage provided by the polarization assembly 121 on the upper surface of the polymer film, the polymer film is polarized.

[0039] The polarization assembly 121 includes a fixing device and a plurality of modular polarization modules. The fixing device and the plurality of polarization modules are detachably connected. The plurality of polarization modules are used to polarize multiple different regions of the component to be polarized. After a certain polarization module is damaged, it can be quickly replaced, facilitating production assembly and maintenance. Specifically, the plurality of polarization modules correspond to the positions of the plurality of ground electrodes 1512, and the plurality of polarization modules respectively polarize the polymer films on the plurality of ground electrodes 1512. Preferably, the plurality of polarization assemblies are arranged in an array, and the plurality of polarization modules arranged in an array correspond to the positions of the plurality of ground electrodes 1512 arranged in an array. One polarization module polarizes the polymer film on the surface of one ground electrode 1512. The shape of the plurality of polarization assemblies arranged in an array is preferably rectangular. Preferably, the plurality of polarization assemblies are located in the same plane. The polarization module includes a high-voltage electric field end and a low-voltage electric field end. The low-voltage electric field end is located between the top cover 122 and the high-voltage electric field end, and the high-voltage electric field end is located between the fixing device and the low-voltage electric field end, that is, the fixing device is located on the side of the polarization module away from the top cover 122 and the second lifting device 123. The low-voltage electric field end is also located above a preset second position. The potential of the high-voltage electric field end is higher than that of the low-voltage electric field end. The high-voltage electric field end is used to ionize the nearby ionizable gas to generate plasma. The ionizable gas can be air, nitrogen, argon or other ionizable gases. The low-voltage electric field end attracts charges from the plasma region and redistributes them evenly near the surface of the polymer film to be polarized, thereby forming a "virtual" electrode (a layer of charge cloud) near the surface of the polymer film to be polarized. A strong electric field is provided through this layer of virtual electrode to achieve uniform polarization of the polymer film to be polarized. It can be understood that the polarization module can include a high-voltage electric field end, a low-voltage electric field end and an ionizable gas. The high-voltage electric field end ionizes the ionizable gas to generate plasma, and the low-voltage electric field end evenly distributes the charges in the plasma.

[0040] The polarization device 10 provided by the embodiments of the present application generates plasma by ionizing ionizable gas at the high-voltage electric field end, and at the same time, evenly distributes the charges in the plasma and guides them to the vicinity of the surface of the polymer thin film to be polarized through the low-voltage electric field end, forming a "virtual" electrode (a layer of charge cloud) near the surface of the polymer thin film to be polarized. A strong electric field is provided by this layer of virtual electrode to achieve uniform polarization of the thin film. Compared with the "direct polarization" of a single high-voltage electric field end, the "indirect polarization" equipped with a high-voltage electric field end and a low-voltage electric field end avoids the electric breakdown generated by the "direct polarization" at the pinhole and thinner thin films, and the electric breakdown will damage the microelectronic devices below the thin film; at the same time, the "indirect polarization" can also achieve large-area uniform polarization of the thin film. Thereby effectively improving the production qualification rate of the polarized film and realizing large-scale production; and the prepared polarized film has a strong piezoelectric effect and a long service life.

[0041] The electric potential of the high-voltage electric field end can be provided by a potential source. Preferably, the high-voltage electric field end is an array of needle electrodes or wire electrodes, which can ensure the obtained high electric field. And the distance between the high-voltage electric field end and the low-voltage electric field end is greater than the distance between the low-voltage electric field end and the carrier table 14. It can be understood that the distance between the low-voltage electric field end and the carrier table 14 is the distance when the carrier table 14 is lifted by the second lifting device 123.

[0042] Preferably, the low-voltage electric field end is a grid electrode end or a flat electrode end with a through portion. The low-voltage electric field end can determine the electric potential of the plane where the low-voltage electric field end is located and evenly distribute the electric field at the location of the low-voltage electric field end. It is only necessary to provide a through portion on the flat electrode end to allow charged ions to pass through. For example, a flat electrode formed by multiple parallel metal wires with a certain distance between them, and the interval between the multiple metal wires forms the through portion of the flat electrode. Preferably, the low-voltage electric field end is a grid electrode end, and the grid electrode end is a grid-shaped electrode. Preferably, the area of each grid on the grid-shaped electrode is 1-100 mm2, that is, when the grid is square, the side length of the grid is 1-10 mm.

[0043] Preferably, the distance between the low-voltage electric field end and the carrier table 14 is 1-10 mm. By determining the distance between the low-voltage electric field end and the carrier table 14, the in-film electric field formed in the polymer thin film can be better controlled, so that the in-film electric field is in a relatively high and stable state. Of course, further, the distance between the high-voltage electric field end and the low-voltage electric field end is greater than the distance between the low-voltage electric field end and the carrier table 14. Preferably, the distance between the high-voltage electric field end and the carrier table 14 is 10-500 mm, and optimally, the distance between the high-voltage electric field end and the carrier table 14 is 300 mm.

[0044] Better yet, the polarization chamber 12 also includes a first potential controller for controlling the potential at the high-voltage electric field end. It can be understood that the first potential controller is connected to a potential source, and the potential at the high-voltage electric field end can be controlled by controlling the potential of the potential source. Therefore, the potential at the high-voltage electric field end can be adjusted at any time through the first potential controller, and can be adjusted at any time during the polarization process, or adapted to different types of polymer films.

[0045] Preferably, the polymer film polarization device also includes a second potential controller for controlling the potential of the low-voltage electric field end, which can adjust the potential of the low-voltage electric field end at any time, and can be adjusted at any time during the polarization process, or adapt to different types of polymer films. The first potential controller and the second potential controller are coordinated to control the potential difference between the high-voltage electric field end, i.e., the potential source, and the low-voltage electric field end.

[0046] Preferably, the potential of the high-voltage electric field end is 5-50kV, and the potential of the low-voltage electric field end is 0.3-40kV. By determining the potential of the high-voltage electric field end and the potential of the low-voltage electric field end, the stability of the polarization process can be guaranteed. It should be noted here that, of course, it is still necessary to ensure that the potential of the high-voltage electric field end is higher than the potential of the low-voltage electric field end, and preferably, the potential of the high-voltage electric field end is 5-30kV higher than the potential of the low-voltage electric field end. For example, the potential of the high-voltage electric field end is 40kV, and the potential of the low-voltage electric field end is 12kV; or, the potential of the high-voltage electric field end is 30kV, and the potential of the low-voltage electric field end is 10kV; or, the potential of the high-voltage electric field end is 20kV, and the potential of the low-voltage electric field end is 7kV; or, the potential of the high-voltage electric field end is 15kV, and the potential of the low-voltage electric field end is 5kV. Among them, the better one is that the potential of the high-voltage electric field end is 20kV, and the potential of the low-voltage electric field end is 7kV. Under the potential of the high-voltage electric field end and the potential of the low-voltage electric field end, the stability of the polarization process is good and the performance of the obtained polarization film is good.

[0047] Preferably, the polarization chamber 12 further includes a current sensor for measuring the film current of the polymer film, and the polarization end point can be determined by monitoring the film current of the polymer film. The current sensor can be electrically connected to the ground wire 1231. Specifically, the polarization can be terminated by judging the change of the film current obtained in real time, such as the slope change. More preferably, the polymer film polarization device further includes a control processor (not shown) for receiving the film current data monitored by the aforementioned current sensor. It can be understood that the control processor and the current sensor can be directly connected through a data line to realize data transmission; wireless transmission methods, such as Bluetooth or WiFi, can also be used to realize data transmission. The control processor can be used to analyze the change curve of the film current, such as using the slope change of the film current to accurately determine the polarization end point.

[0048] It can be understood that the polarization chamber 12 further includes a housing, which provides a closed space for polarizing the to-be-polarized member 15. This housing is not a limitation of the embodiments of the present application, and the housing can be a box, a case, a barrel, or even a room. It can be understood that the housing includes an entrance door and an exit door for the carrier platform 14 and the to-be-polarized member 15 on the carrier platform 14 to enter, and for the carrier platform 14 and the polarized member after polarization to exit. It can be understood that after the to-be-polarized member 15 is polarized, it becomes a polarized member. Preferably, the top cover 122 is elastically connected to the housing. When the second lifting device 123 raises the carrier platform 14, the contact between the carrier platform 14 and the top cover 122 will not be a rigid contact, so that the carrier platform 14 and the top cover 122 will not be damaged. It can be understood that in order to ensure the accurate upward movement position of the carrier platform 14, a limit sensor can be used to control the number of rotation turns of the second motor, etc. to limit the stroke of the second ejector rod.

[0049] Please refer to Figure 6 , the transfer table 13 includes a third conveying device 132 and a third lifting device 131. The third lifting device 131 is located below the third conveying device 132. After the carrier platform 14 is conveyed to a preset third position under the action of the third conveying device 132, the third lifting device 131 rises through the third conveying device 132 and the lifting hole 142 to raise the carrier platform 14, and the external second conveying device transfers the polarized to-be-polarized member 15 away. Preferably, the transfer table 13 further includes a third sensor for sensing the position of the carrier platform 14. After the carrier platform 14 reaches the third position, the third sensor stops the movement of the carrier platform 14 through the third conveying device 132. The type of the third sensor is not limited, such as it can be a limit sensor.

[0050] The structure of the third conveying device 132 can be the same as that of the first conveying device 112. For example, the third conveying device 132 includes a plurality of rollers arranged at intervals, so that there are gaps between the rollers. For example, the third conveying device 132 can also be a conveyor belt including gaps. The gap is for the second lifting device 123 to pass through. After the second conveying device 124 conveys the carrier platform 14 over, the third conveying device 132 moves the carrier platform 14 to a preset third position.

[0051] The third lifting device 131 includes a third ejector rod 1311 and a third motor (not shown in the figure). The third motor can drive the first ejector rod 1111 to move up and down. There can be a plurality of third ejector rods 1311. The number of the third ejector rods 1311 is the same as the number of the lifting holes 142. The positions of the third ejector rods 1311 correspond to the positions of the lifting holes 142. When the third ejector rods 1311 move up and down, the first ejector rod 1111 can pass through the lifting holes 142. When the third ejector rods 1311 rise through the lifting holes 142, the external second conveying device transfers the polarized to-be-polarized member 15 away.

[0052] The polarization device 10 provided by an embodiment of the present disclosure includes a preparation table 11, a polarization chamber 12, a transfer table 13, and a carrier table 14. The polarization chamber 12 is located between the preparation table 11 and the transfer table 13. Among them, the preparation table 11 is used to place the carrier table 14 that is about to enter the polarization chamber 12; the carrier table 14 is used to place the item to be polarized 15; the polarization chamber 12 is used to polarize the polymer film of the item to be polarized 15 on the carrier table 14; the transfer table 13 is used to place the polarized item after polarization, realizing the automation of polarizing the item to be polarized 15. The polarization assembly 121 includes a plurality of polarization modules arranged in an array, enabling the polarization device 10 to polarize the item to be polarized 15 with a relatively large area. When the item to be polarized 15 is lifted by the second lifting device 123, the grounding of the polymer film of the item to be polarized 15 is achieved. The polarization steps are simple and the polarization effect is good.

[0053] Please refer to Figure 7 , the second embodiment of the present application is based on the foregoing embodiment and provides a polarization method. This polarization method is used to polarize the item to be polarized. This polarization method uses the polarization device of the foregoing embodiment. The item to be polarized includes a substrate and a polymer film formed on the substrate. The polarization device includes a preparation table, a polarization chamber, a transfer table, and a carrier table. This polarization method includes:

[0054] S1: Place the carrier table that is about to enter the polarization chamber on the preparation table;

[0055] S2: Place the item to be polarized on the carrier table;

[0056] S3: After the carrier table enters the polarization chamber, the polarization chamber polarizes the polymer film of the item to be polarized on the carrier table;

[0057] S4: After polarization is completed, place the polarized item on the transfer table.

[0058] In S1, no item to be polarized is placed on the carrier table placed on the preparation table.

[0059] In S2, when the carrier table is moved to the preparation table, the item to be polarized is placed on the carrier table.

[0060] In S3, the polarization chamber includes a polarization component, a second transfer device, a second lifting device, and a top cover. The top cover includes a conductive sheet, and the second lifting device includes a grounding wire. The second lifting device is located below the second transfer device, the polarization component is located above the second transfer device, and the top cover is located between the second transfer device and the polarization component. The carrier table is in the shape of a flat plate, and a carrier groove is formed on the carrier table. A grounding hole is formed on the surface of the carrier table opposite to the carrier groove, and a carrier electrode is further provided on the carrier table. At least part of the carrier electrode is arranged at the bottom of the grounding hole and on the side surface of the carrier groove. After the carrier table enters the polarization chamber, the polarization of the polymer film of the workpiece to be polarized on the carrier table by the polarization chamber includes:

[0061] The carrier table and the workpiece to be polarized enter the second preset position in the polarization chamber;

[0062] The second lifting device raises the carrier table and the workpiece to be polarized thereon, so that the workpiece to be polarized is in electrical contact with the conductive sheet of the top cover, the conductive sheet of the top cover is in electrical contact with the carrier electrode of the carrier table, and the carrier electrode is in electrical contact with the grounding wire of the second lifting device;

[0063] The polarization component polarizes the polymer film of the workpiece to be polarized.

[0064] In S4, after polarization is completed, after the carrier table and the workpiece to be polarized are moved to the transfer table, the polarized workpiece on the carrier table is transferred away.

[0065] The polarization method provided by the embodiments of the present disclosure, wherein the polarization device includes a preparation table, a polarization chamber, a transfer table, and a carrier table. The polarization chamber is located between the preparation table and the transfer table. The preparation table is used to place the carrier table ready to enter the polarization chamber; the carrier table is used to place the workpiece to be polarized; the polarization chamber is used to polarize the polymer film of the workpiece to be polarized on the carrier table; the transfer table is used to place the polarized workpiece, realizing the automation of polarizing the workpiece to be polarized. The polarization component includes a plurality of polarization modules arranged in an array, enabling the polarization device to polarize a workpiece to be polarized with a larger area. When the workpiece to be polarized is lifted by the second lifting device, grounding of the polymer film of the workpiece to be polarized is achieved. The polarization steps are simple and the polarization effect is good.

[0066] The above description is only the preferred embodiments of the present disclosure and the description of the applied technical principles. Those skilled in the art should understand that the scope of disclosure involved in the present disclosure is not limited to the technical solutions formed by the specific combination of the above technical features, and should also cover other technical solutions formed by any combination of the above technical features or their equivalent features without departing from the above disclosure concept. For example, the technical solutions formed by mutually replacing the above features with the (but not limited to) technical features with similar functions disclosed in the present disclosure.

[0067] Note that the above is only a preferred embodiment of the present invention and the technical principles applied. Those skilled in the art will understand that the present invention is not limited to the specific embodiments described herein. Various obvious changes, re-adjustments, and substitutions can be made by those skilled in the art without departing from the protection scope of the present invention. Therefore, although the present invention has been described in more detail through the above embodiments, the present invention is not limited to the above embodiments. Without departing from the concept of the present invention, more other equivalent embodiments can be included, and the scope of the present invention is determined by the scope of the appended claims.

Claims

1. A polarization device for polarizing a to-be-polarized component, characterized in that: the to-be-polarized component includes a substrate and a polymer thin film formed on the substrate, and the polarization device includes a preparation table, a polarization chamber, a transfer table, and a carrying table, wherein, the preparation table is used for placing the carrying table that is to enter the polarization chamber; the carrying table is used for placing the to-be-polarized component; the polarization chamber is used for polarizing the polymer thin film of the to-be-polarized component on the carrying table; the transfer table is used for placing the polarized component after polarization; when the carrying table is moved to the preparation table, the to-be-polarized component is placed on the carrying table; when the carrying table and the to-be-polarized component are moved into the polarization chamber, the polarization chamber polarizes the polymer thin film; after polarization is completed, when the carrying table and the to-be-polarized component are moved to the transfer table, the polarized component on the carrying table is transferred away; the substrate includes a substrate plate, a grounding electrode, and a grounding pin. The grounding pin is located at the edge of the substrate plate. The grounding pin and the grounding electrode are disposed on the surface of the substrate plate. The polymer thin film covers the grounding electrode and exposes the grounding pin. The grounding electrode and the grounding pin are electrically connected; the carrying table is in a flat plate shape. A carrying groove is formed on the carrying table. At least two jacking holes penetrating the thickness direction of the carrying table are further formed at the bottom of the carrying groove. A grounding hole is further formed on the surface of the carrying table opposite to the carrying groove. A carrying electrode is further disposed on the carrying table. At least part of the carrying electrode is disposed at the bottom of the grounding hole and on the side surface of the carrying groove.

2. The polarization device according to claim 1, characterized in that: the preparation table includes a first conveying device and a first jacking device. The first jacking device is located below the first conveying device. After the carrying table is moved to a preset first position under the action of the first conveying device, the first jacking device rises through the first conveying device and the jacking holes. An external first conveying device places the to-be-polarized component on the first jacking device, and the first jacking device descends so that the to-be-polarized component is placed in the carrying groove.

3. The polarization device according to claim 1, characterized in that: The polarization chamber includes a polarization component, a second conveying device, a second lifting device, and a top cover. The top cover includes a conductive sheet. The second lifting device includes a grounding wire. The second lifting device is located below the second conveying device. The polarization component is located above the second conveying device. The top cover is located between the second conveying device and the polarization component. After the carrier table is conveyed to a preset second position under the action of the second conveying device, the second lifting device rises through the second conveying device and inserts into the lifting hole, so that the carrier table rises and contacts the top cover. The top cover covers the grounding pins of the component to be polarized on the carrier table and exposes the polymer film of the component to be polarized. The conductive sheet of the top cover is electrically contacted with the grounding pins and the carrier electrodes on the side of the carrier groove at the same time. The grounding wire of the second lifting device contacts the carrier electrode at the bottom of the grounding hole. The polarization component is used to polarize the polymer film.

4. The polarization device according to claim 1, wherein: The transfer table includes a third conveying device and a third lifting device. The third lifting device is located below the third conveying device. After the carrier table is conveyed to a preset third position under the action of the third conveying device, the third lifting device mechanism rises through the third conveying device and the lifting hole, so that the carrier table rises, and an external second conveying device transfers the component to be polarized away.

5. The polarization device according to claim 3, wherein: The polarization component includes a plurality of polarization modules arranged in an array. Each polarization module includes a high-voltage electric field end and a low-voltage electric field end. The low-voltage electric field end is located between the top cover and the high-voltage electric field end.

6. A polarization method, which uses the polarization device according to any one of claims 1 to 5 to polarize a component to be polarized, wherein: The component to be polarized includes a substrate and a polymer film formed on the substrate. The polarization device includes a preparation table, a polarization chamber, a transfer table, and a carrier table. The polarization method includes: Placing the carrier table to be prepared to enter the polarization chamber on the preparation table; Placing the component to be polarized on the carrier table; After the carrier table enters the polarization chamber, the polarization chamber polarizes the polymer film of the component to be polarized on the carrier table; After polarization is completed, placing the polarized component on the transfer table.

7. The polarization method according to claim 6, wherein: The polarization chamber includes a polarization component, a second conveying device, a second lifting device, and a top cover. The top cover includes a conductive sheet. The second lifting device includes a grounding wire. The second lifting device is located below the second conveying device. The polarization component is located above the second conveying device. The top cover is located between the second conveying device and the polarization component. The carrier table is in a flat plate shape. A carrier groove is formed in the carrier table. A grounding hole is formed on the surface of the carrier table opposite to the carrier groove. A carrier electrode is further provided on the carrier table. At least part of the carrier electrode is arranged at the bottom of the grounding hole and on the side surface of the carrier groove. After the carrier table enters the polarization chamber, the polarization of the polymer film of the polarization target on the carrier table by the polarization chamber includes: The carrier table and the polarization target enter the second preset position in the polarization chamber; The second lifting device raises the carrier table and the polarization target thereon, so that the polarization target is in electrical contact with the conductive sheet of the top cover. The conductive sheet of the top cover is in electrical contact with the carrier electrode of the carrier table. The carrier electrode is in electrical contact with the grounding wire of the second lifting device; The polarization component polarizes the polymer film of the polarization target.

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