Processing device

Abstract

A processing device is provided that can reduce the operation errors of an operator. The processing device includes: an operation panel that displays an input screen (80) for inputting the processing conditions of a wafer; and a control unit that controls each structural element, and on a mask (86) that restricts the operation of this area of the input screen (80), the following are displayed: memo information (88a to 88c) that is input by the operator on the mask (86); and memo deletion buttons (90a to 90c) that have the function of deleting the memo information (88a to 88c) from the mask (86) or deleting the mask (86) from the input screen (80).

Description

Technical Field

[0001] The present invention relates to a processing apparatus having an input screen. Background Art

[0002] Generally, in processing apparatuses such as cutting apparatuses, laser processing apparatuses, and grinding apparatuses that process workpieces held by various chuck tables, the workpieces are processed by setting processing conditions consistent with the workpieces or their purposes. Such processing apparatuses have an operation panel with a touch panel type input screen for setting various processing conditions such as the speed of processing and the area to be processed, and appropriate processing conditions are selected and set from among a plurality of conditions by inputting to the input screen (for example, refer to Patent Document 1).

[0003] Patent Document 1: Japanese Unexamined Patent Application Publication No. 2013-074198

[0004] In addition, at a manufacturing site, multiple operators cooperate to operate various processing apparatuses for manufacturing, and perform operations based on manufacturing information (what to process today, which apparatus to use, when, how much to process, etc.). There are a very large number of setting items in processing apparatuses, and there are also many items that need attention. Therefore, when communicating precautions from other operators, stickers are made to avoid forgetting, but sometimes they are forgotten to be looked at, and thus it is desired to provide important attention information at a necessary moment to reduce operation errors of operators. Summary of the Invention

[0005] The present invention has been made in view of the above circumstances, and an object thereof is to provide a processing apparatus capable of reducing operation errors of operators.

[0006] To solve the above problems and achieve the object, the present invention is a processing apparatus having: a chuck table that holds a workpiece; a processing unit that processes the workpiece held by the chuck table; a touch panel that displays an input screen for inputting processing conditions of the workpiece; and a control unit that controls each structural element, wherein the control unit has: a screen registration unit that registers a plurality of the input screens; and a mask setting unit that sets a mask for each of the input screens, the mask covering a specified area of the input screen to restrict operations in the area of the input screen, and on the mask displayed by the mask setting unit, there are displayed: memo information input by an operator on the mask; and a deletion unit having a function of deleting the memo information from the mask or deleting the mask from the input screen.

[0007] In this configuration, the deletion unit may be a deletion button or a password input unit that inputs a password for deleting the memo information or the mask.

[0008] Alternatively, it can be set such that multiple of these masks can be displayed on one input screen, and it can be set such that the second mask can be deleted by operating the deletion part displayed on the first mask.

[0009] According to the present invention, memo information input by the operator is displayed on a mask that covers a specified area of the input screen to restrict operations on that area of the input screen. Therefore, the communication of precautions between operators can be easily achieved through the memo information displayed on the mask. In addition, a deletion part having a function of deleting the memo information from the mask or deleting the mask from the input screen is displayed on the mask. Therefore, after the operator confirms the content of the memo information, the mask can be deleted, thereby reducing the operation errors of the operator. BRIEF DESCRIPTION OF THE DRAWINGS

[0010] Figure 1 It is a diagram showing a structural example of the cutting device of the present embodiment.

[0011] Figure 2 It is a diagram showing a structural example of the display panel.

[0012] Figure 3 It is a functional block diagram of the control unit.

[0013] Figure 4 It is a diagram showing an example of the input screen.

[0014] Figure 5 It is a diagram for explaining the operation steps when setting a mask on the input screen.

[0015] Figure 6 It is a diagram for explaining the operation steps when setting a mask on the input screen.

[0016] Figure 7 It is a diagram for explaining the operation steps when setting memo information and a delete button on the mask.

[0017] Figure 8 It is a diagram for explaining the operation steps when setting memo information and a delete button on the mask.

[0018] Figure 9 It is a diagram for explaining the operation steps when setting memo information and a delete button on the mask.

[0019] Figure 10 It is a diagram for explaining the operation steps when deleting the memo information and the mask.

[0020] Figure 11 It is a diagram for explaining the operation steps when deleting the memo information and the mask.

[0021] Description of Reference Numerals

[0022] 1: Cutting device (processing device); 4: Cassette; 8: Chuck table; 20: Cutting unit (processing unit); 21: Cutting tool; 30: Control unit; 32: Input screen registration unit (screen registration unit); 33: Display control unit; 34: Touch panel control unit; 38: Mask setting unit; 40: Operation panel (touch panel); 80: Input screen; 81: Data input area; 82: Input key area; 83a: Start key; 84a: Set / Release key; 85: Selection label; 86: First mask (mask); 87: Second mask (mask); 88a - 88c, 89: Memo information; 90a - 90c: Memo deletion button (deletion unit); 100: Wafer (workpiece). Detailed Description of the Embodiment

[0023] With reference to the accompanying drawings, the mode (embodiment) for implementing the present invention will be described in detail. The present invention is not limited by the content described in the following embodiments. In addition, among the structural elements described below, those that can be easily conceived by those skilled in the art and those that are substantially the same are included. In addition, the structures described below can be appropriately combined. In addition, various omissions, replacements, or changes of the structure can be made without departing from the gist of the present invention.

[0024] Figure 1 It is a diagram showing a structural example of the cutting device of the present embodiment. Figure 2 It is a diagram showing a structural example of the display panel. Figure 3 It is a functional block diagram of the control unit. As Figure 1 shown, the cutting device 1 as a processing device has a base 2 that supports each structure. An opening 2a is formed at a corner of the base 2, and a liftable cassette elevator 3 is provided in the opening 2a. A cassette 4 capable of accommodating a plurality of wafers (workpieces) 100 is placed on the upper surface of the cassette elevator 3. In addition, in this Figure 1 figure, for the sake of simplicity of explanation, only the outline of the cassette 4 is shown.

[0025] The wafer 100 is, for example, a disc-shaped semiconductor wafer with silicon as the base material, or an optical device wafer with sapphire, SiC (silicon carbide), etc. as the base material. On the front surface of the wafer 100, it is divided into a plurality of regions by mutually perpendicular (lattice-shaped) dicing lines, and devices such as ICs and LEDs are formed in each region. In addition, a dicing tape (adhesive tape) 101 having a diameter larger than that of the wafer 100 is pasted on the back surface of the wafer 100. In addition, an annular frame 102 is fixed to the outer peripheral portion of the dicing tape 101. Thus, the wafer 100 is supported by the annular frame 102 via the dicing tape 101.

[0026] An opening 2b having a rectangular shape that is long in the X-axis direction (processing feed direction) is formed adjacent to the cassette elevator 3. A moving table 5, a table moving mechanism 6 that moves the moving table 5 in the X-axis direction, and a dust and drip-proof cover 7 that covers the table moving mechanism 6 are provided within the opening 2b.

[0027] A chuck table 8 for sucking and holding the wafer 100 is provided on the moving table 5. Four jigs 9 for fixing a ring-shaped frame 102 that supports the wafer 100 are provided around the chuck table 8 from four directions.

[0028] The chuck table 8 is connected to a rotational drive source such as a motor (not shown) and rotates about a rotation axis that is substantially parallel to the Z-axis direction (height direction). If the moving table 5 is moved in the X-axis direction by the table moving mechanism 6, the chuck table 8 performs processing feed in the X-axis direction. The upper surface of the chuck table 8 serves as a holding surface 8a for holding the wafer 100. The holding surface 8a is formed substantially parallel to the X-axis direction and the Y-axis direction (indexing feed direction) and is connected to a suction source (not shown) through a flow path (not shown) formed inside the chuck table 8 and the like.

[0029] A wafer staging mechanism 10 for temporarily placing the wafer 100 is provided above the opening 2b. The wafer staging mechanism 10 is configured, for example, to include a pair of guide rails 10a, 10b that approach and separate from each other in the X-axis direction while maintaining a state parallel to the Y-axis direction. While the wafer 100 (frame 102) pulled out from the cassette 4 is placed on the guide rails 10a, 10b, the guide rails 10a, 10b approach each other in the X-axis direction (processing feed direction) and clamp it, thereby aligning the wafer 100 at a specified position.

[0030] A gantry-shaped first support structure 11 is disposed above the base 2 so as to straddle the opening 2b. A first rail 12 extending in the Y-axis direction is fixed to the front surface (the surface on the side of the wafer staging mechanism 10) of the first support structure 11, and a first transfer mechanism 14 is connected to the first rail 12 via a first moving mechanism 13 and the like. The first transfer mechanism 14 is lifted and lowered by the first moving mechanism 13 and moves in the Y-axis direction along the first rail 12.

[0031] The first transfer mechanism 14 is provided with a gripping mechanism 14a for gripping the frame 102 on the cassette 4 side. For example, if the frame 102 is gripped by the gripping mechanism 14a and the first transfer mechanism 14 is moved in the Y-axis direction, the wafer 100 stored in the cassette 4 can be pulled out onto the guide rails 10a, 10b of the wafer staging mechanism 10, or the wafer 100 placed on the guide rails 10a, 10b can be inserted into the cassette 4.

[0032] In addition, a second rail 15 extending in the Y-axis direction is fixed above the first rail 12 on the front surface (the surface on the side of the temporary placement mechanism 10) of the first support structure 11. A second transfer mechanism 17 is connected to the second rail 15 via a second moving mechanism 16. The second transfer mechanism 17 is lifted and lowered by the second moving mechanism 16 and moves in the Y-axis direction along the second rail 15.

[0033] A gantry-shaped second support structure 18 is disposed on the back side of the first support structure 11. Two sets of cutting units (processing units) 20 are provided on the front surface (the surface on the side of the first support structure 11) of the second support structure 18 by means of a moving mechanism (indexing feed unit) 19, respectively. The cutting unit 20 has a cutting tool 21 mounted on a rotation spindle (not shown) that is rotationally driven. While rotating the cutting tool 21, the chuck table 8 (wafer 100) is processed and fed in the X-axis direction, so as to cut the wafer 100 along the dicing line.

[0034] In addition, a camera 22 for photographing the front side of the wafer 100 is provided at a position adjacent to the cutting unit 20. The cutting unit 20 and the camera 22 move in the Y-axis direction and the Z-axis direction by the moving mechanism 19. In addition, as the camera 22, a structure that also serves as an infrared camera can be adopted.

[0035] A cleaning unit 24 is disposed at a position opposite to the opening 2b with respect to the opening 2a. The cleaning unit 24 has a rotary table 25 in a cylindrical cleaning space for sucking and holding the wafer 100. A rotary drive source (not shown) for rotating the rotary table 25 at a predetermined speed is connected to the lower part of the rotary table 25. A spray nozzle 26 for spraying a cleaning fluid (typically a two-fluid mixture of water and air) toward the wafer 100 is disposed above the rotary table 25. By rotating the rotary table 25 holding the wafer 100 and spraying the cleaning fluid from the spray nozzle 26, the wafer 100 can be cleaned.

[0036] The wafer 100 processed by the cutting unit 20 is carried into the cleaning unit 24 by the second transfer mechanism 17, for example. The wafer 100 cleaned by the cleaning unit 24 is placed on the temporary placement mechanism 10 by the first transfer mechanism 14 and stored in the cassette 4, for example.

[0037] The structural elements such as the table moving mechanism 6, the chuck table 8, the first transfer mechanism 14, the second transfer mechanism 17, the moving mechanism 19, the cutting unit 20, the camera 22, and the cleaning unit 24 are respectively connected to the control unit 30. The control unit 30 controls the above-mentioned respective structural elements according to a series of processes required for the processing of the wafer 100. In addition, an operation panel (touch panel) 40 having a display panel 41 is connected to the control unit 30, and the display panel 41 displays an input screen, an operation screen, etc. for inputting the state and information of the processing operation.

[0038] As Figure 2 shown, the display panel 41 of the operation panel 40 has a liquid crystal drive circuit board 43, a liquid crystal panel 44, and a touch panel 45, which are stacked in this order. The touch panel 45 uses, for example, a touch panel of the resistive film type and has a high transparency (light transmittance), so that the display of the liquid crystal panel 44 can be visually recognized through the touch panel 45. Therefore, when an input screen or an operation screen for setting various processing conditions is displayed on the liquid crystal panel 44, various operations can be performed by touching the touch panel 45 with a fingertip or the like (for example, tapping, swiping, etc.). In addition, for example, an organic EL (Electro-Luminescence) panel or the like can be used instead of the above-mentioned liquid crystal panel 44.

[0039] As Figure 3 shown, the control unit 30 has a control section 31 and an input screen registration section 32. The control section 31 has: a display control section 33 that controls the liquid crystal panel 44 via the liquid crystal drive circuit board 43 to generate images of various input screens; and a touch panel control section 34 that controls the operations of each section according to the touch operation of the touch panel 45. The display control section 33 generates a plurality of layers and overlaps and displays these plurality of layers on the liquid crystal panel 44. In the present embodiment, the display control section 33 overlaps and displays on the layer of the input screen showing the images of various input screens: a layer of a mask (mask) that shows an image of a mask covering a specified area of the input screen; a layer of a memo screen (memo information) that shows an image of memo information such as a character string generated in the area corresponding to the mask; and a layer of a delete button (delete button) that shows an image of a delete button generated in the area corresponding to the above-mentioned mask and deleting the corresponding layer of the memo screen and / or the layer of the mask.

[0040] The layer of the mask is located above the layer of the input screen and can be seen by the operator in the front side near the layer of the input screen. Therefore, a prescribed area of the input screen is covered by the mask. The display control unit 33 can display layers of a plurality of masks that cover different areas of the input screen on the layer of the input screen. In addition, the display control unit 33 can display by separately adjusting the shade of the color of each mask layer overlapping with the layer of the input screen. Accordingly, when the color of the mask layer is made darker, it is possible to easily identify the area where the mask is set and the area where the mask is not set. In addition, when the color of the mask layer is made lighter, the visibility of the input screen displayed through the mask can be improved.

[0041] The layer of the memo screen is located above the layer of the mask and can be seen by the operator in the front side near the layer of the mask. Therefore, memo information composed of an arbitrary string can be displayed in an arbitrary area on the mask, and necessary precautions can be conveyed to other operators. This memo information is generated by handwriting or using an input device such as a keyboard. The display control unit 33 may also display a plurality of memo information on one mask, and in the case where there is a plurality of memo information, the layer of the memo screen may also be generated for each memo information.

[0042] In addition, the layer of the delete button is located above the layer of the mask and can be seen by the operator in the front side near the layer of the mask. Therefore, the delete button can be displayed in an arbitrary area on the mask. In addition, since the display control unit 33 generates the memo information and the delete button at positions where they do not interfere with each other on the mask, either the layer of the memo screen or the layer of the delete button may be located above. The layer of the delete button is set corresponding to the layer of the memo screen. Therefore, when a touch operation is performed on the touch panel 45 in the area corresponding to the delete button, the corresponding layer of the memo screen is deleted. At this time, the layer of the operated delete button is also deleted together. In addition, when operating the delete button, it may be required to input a preset password.

[0043] In addition, the layer of the delete button may be set corresponding to the layer of the mask. For example, in a setting where two masks are provided on the input screen, a plurality of memo information and delete buttons are displayed on one mask, and no delete button is displayed on the other mask. When operating all the delete buttons of one mask, not only the layer of one mask can be deleted, but also the layer of the other mask can be deleted. Accordingly, the delete button provided on one mask can be used as a release condition for the other mask, and when the delete button is not operated according to the prescribed steps, the other mask cannot be deleted, so that a reduction in the operator's operation error can be achieved.

[0044] The touch panel control unit 34 controls each unit based on a touch or input operation on an operation button or a numerical input unit displayed on the input screen. Coordinate information indicating a touched portion on the surface of the touch panel 45 is transmitted as touch information to the touch panel control unit 34, enabling the touched portion on the touch panel 45 to be recognized. In this configuration, when a touch operation on the input screen corresponding to the area where the mask is set is not received, the touch panel control unit 34 disables the input based on the operator's input. Additionally, when a handwritten memo information is indicated on the mask, the touch panel control unit 34 generates a trajectory of the coordinate information of the touched portion on the touch panel 45 (mask) as memo information and outputs the memo information to the display control unit 33. Further, when a delete button is generated on the mask, the touch panel control unit 34 receives a touch operation on the area corresponding to the delete button.

[0045] The input screen registration unit 32 registers an input screen including processing conditions and the like when cutting the wafer 100. In the present embodiment, processing condition information 35, tool information 36, dressing condition information 37, and the like are registered. For example, three processing conditions are registered in the processing condition information 35, one tool information is registered in the tool information 36, and two dressing conditions are registered in the dressing condition information 37, but these numbers can be appropriately changed. The display control unit 33 displays an input screen layer generated by selecting appropriate processing conditions, tool information, and dressing conditions according to the content of the cutting process performed on the liquid crystal panel 44.

[0046] The input screen registration unit 32 has a mask setting unit 38. The mask setting unit 38 sets a mask that restricts operations on a specified area of the input screen for each input screen and associates them with the processing conditions, tool information, and dressing conditions, respectively. Additionally, conditions (release conditions) for deleting the mask can be set for each mask. For example, it can be set to delete the mask when an operation is performed on all the delete buttons formed on the mask, or it can be set to delete other masks together with one mask when an operation is performed on all the delete buttons formed on one mask.

[0047] When the display control unit 33 sets a mask corresponding to the input screen, it overlays and displays the corresponding mask layer with the layer of the input screen. These masks prevent the operator from erroneously inputting on the input screen. Memo information that can be input by the operator on the mask and a delete button having a function of deleting the memo information from the mask or deleting the mask from the input screen are displayed on these masks.

[0048] Next, the setting operation of the mask for the input screen, the setting operations of the memo information and the delete button, and the deletion operations of the memo information and the mask will be described. Figure 4This is a diagram showing an example of an input screen. Figure 5 and Figure 6 This is a diagram explaining the operation steps when setting a mask on the input screen. Figure 7 、 Figure 8 and Figure 9 This is a diagram explaining the operation steps when setting memo information and a delete button on the mask. Figure 10 and Figure 11 This is a diagram explaining the operation steps when deleting the memo information and the mask.

[0049] In Figure 4 the input screen 80 is divided into: a data input area 81 for inputting machining conditions in the central part; an input key area 82 located below the data input area 81; an operation key area 83 provided on the side (right side) of the data input area 81; and a non-mask area 84 located above the data input area 81. The division of these areas is only an example, and the positions, sizes, types, etc. of each area can be appropriately changed.

[0050] The data input area 81 is an area for inputting machining conditions during cutting machining, and is an area with a high priority for setting a mask. The data input area 81 can, for example, set machining conditions corresponding to the machining order and the number of layers of the cassette for starting the machining. Keys (switches) for inputting various information, such as numbers and letters, are provided in the input key area 82. Keys (switches) that need to be operated during machining (manufacturing) are provided in the operation key area 83. For example, a start key 83a for starting the operation of the cutting device 1; a machining condition list key 83b for displaying a machining condition list; an enter key 83c for inputting an operator's instruction; and an exit key 83d for exiting from the current display page to the upper-level page are provided. In this embodiment, the start key 83a has the highest priority for setting a mask. In order to reduce operation errors, after the operator confirms the machining conditions, etc. according to the manufacturing information, the mask can be deleted (released). The non-mask area 84 is an area where no mask is set. In this non-mask area 84, for example, a set / reset key 84a for switching to each mode such as mask setting, memo information input, and delete button setting is provided. Since no mask is set in the non-mask area 84, the set / reset key 84a can be operated even when masks are set for the other areas 81 - 83 except the non-mask area 84.

[0051] In this embodiment, the operation of setting a mask for the data input area 81 and the start key 83a and the machining condition list key 83b in the operation key area 83 is described. When setting a mask, the mask setter (for example, the operator) touches the set / reset key 84a provided in the non-mask area 84 of the input screen 80. Then, as Figure 5As shown, a selection label 85 is displayed on the input screen 80. A mask setting label 85a, a mask depth adjustment label 85b, an information input label 85c, and a button production label 85d are set in the selection label 85. Touch the mask setting label 85a from the selection label 85. Thereby, the mask setting unit 38 shifts to the mask setting mode for registering the mask area specified for the input screen 80. In the mask setting mode, a mask layer is displayed overlapping on the layer of the input screen.

[0052] Next, specify the mask area. The specification of the mask area is performed by specifying the corners of the area to be masked. Specifically, as Figure 6 shown, after the mask setter touches the upper left corner 86a of the area to be masked (data input area 81), slide it towards the lower right corner 86b. Thereby, the first mask 86 of a rectangle having corners 86a and 86b at the diagonals is specified. Next, after the mask setter touches the upper left corner 87a of the area to be masked (the area including the start key 83a and the processing condition list key 83b), slide it towards the lower right corner 87b. Hereby, the second mask 87 of a rectangle having corners 87a and 87b at the diagonals is specified. The specification of the areas of these respective masks is not limited to the sliding operation, and the above-mentioned corners can be tapped, or the four corners (four corners) of the area (such as a rectangle) to be specified can be tapped respectively.

[0053] Finally, touch the setting / canceling key 84a again to end the mask setting mode. The mask setting unit 38 sets the first mask 86 and the second mask 87 specified for the input screen 80. These first mask 86 and second mask 87 are displayed overlapping with the input screen 80, and the touch operation on the input screen 80 within the areas where the first mask 86 and the second mask 87 are respectively set is disabled.

[0054] Next, the actions of setting memo information and a delete button on the set mask will be described. This memo information is used to convey information related to cutting processing to another operator when the operator who has set the mask needs to hand over to the other operator. When setting the memo information, the mask setter (for example, the operator) touches the setting / canceling key 84a provided in the non-mask area 84 of the input screen 80. Then, as Figure 7As shown, a selection label 85 is displayed on the input screen 80, so the information input label 85c is touched from this selection label 85. Then, a manual input label 85c1 and a keyboard input label 85c2 are displayed under the information input label 85c, so the manual input label 85c1 is touched. Thereby, it transfers to the memo information setting mode for setting the memo information composed of the specified character string to the first mask 86 or the second mask 87. In the memo information setting mode, the layer of the memo screen is overlapped and displayed on the layer of the mask.

[0055] As Figure 8 shown, the operator writes (inputs) an arbitrary character string (such as cassette replacement, tool replacement, machining condition check) in an arbitrary area on the first mask 86 by manual input (handwriting). The touch panel control unit 34 generates a locus of coordinate information of the touched part based on the manual input as the memo information, and outputs this memo information to the display control unit 33. The display control unit 33 generates the layer of the memo screen of this memo information, and overlaps and displays this layer of the memo screen on the layer of the mask. Thereby, three memo information 88a, 88b, and 88c are displayed on the first mask 86.

[0056] When the setting of the memo information 88a, 88b, and 88c for the first mask 86 is completed, continue to write (input) an arbitrary character string (such as ○← all displayed as OK) in an arbitrary area on the second mask 87 by manual input (handwriting). The touch panel control unit 34 similarly generates a locus of coordinate information of the touched part based on the manual input as the memo information, and outputs this memo information to the display control unit 33. The display control unit 33 generates the layer of the memo screen of this memo information, and overlaps and displays this layer of the memo screen on the layer of the mask. Thereby, the memo information 89 is displayed on the second mask 87. Finally, touch the setting / canceling key 84a again to end the memo information setting mode. In addition, in this embodiment, the setting operation of the memo information based on manual input has been described, but by selecting the keyboard input label 85c2, it is also possible to set the memo information using various input keys in the input key area 82.

[0057] Next, a delete button is set on the first mask 86. When setting the delete button, the mask setter (such as the operator) touches the setting / canceling key 84a provided in the non-mask area 84 of the input screen 80. Then, it is displayed Figure 9Select tab 85 is shown, so from within select tab 85, touch button creation tab 85d. This transitions to delete button setting mode, where a delete button that performs a specified function is set for first mask 86 or second mask 87. At this point, mask delete button tab 85d1 and memo delete button tab 85d2 are displayed below the button creation tab. In delete button setting mode, the delete button layer is displayed superimposed on the mask layer.

[0058] The operator selects Figure 8 After selecting one of the three memo information 88a, 88b, and 88c (memo information 88a), the operator touches the memo delete button label 85d2. As a result, the display control unit 33 displays the memo delete button (deletion unit) 90a corresponding to the memo information 88a on the first mask 86. In addition, the touch panel control unit 34 allows the touch operation of the area corresponding to the memo delete button 90a, and sets the following function: the corresponding memo information 88a is deleted by touching the memo delete button 90a. Similarly, the operator also sets the memo delete buttons 90b and 90c for the memo information 88b and 88c, respectively. Finally, the set / release key 84a is touched again to end the delete button setting mode. In addition, when the touch Figure 9 As shown, by selecting the mask lightness adjustment tab 85b of the tab 85, the mask setting unit 38 can shift to a lightness adjustment mode for adjusting the lightness of the first mask 86 and the second mask 87 registered on the input screen 80. In this lightness adjustment mode, an adjustment bar 85b1 for adjusting the mask transmittance (lightness) is displayed. In this example, moving the adjustment point 85b2a to the right of the adjustment bar 85b1 increases the mask transmittance (lightening the mask color), while moving the adjustment point 85b2a to the left of the adjustment bar 85b1 decreases the mask transmittance (darkening the mask color). After adjusting the mask lightness to the desired value, the operator can exit the lightness adjustment mode by touching the set / release key 84a again.

[0059] Next, the operation of deleting the memo information and mask will be described. This operation is performed, for example, by an operator who has handed over the shift to the previous operator who set the mask and memo information. The mask setting unit 38 is pre-set with a function that deletes the first mask 86 and the second mask 87 when all of the memo delete buttons 90a, 90b, and 90c are touched.

[0060] After the shift is handed over, the operator replaces the box 4 with a box that is suitable for the specified processing conditions (processing items) according to the content of the memorandum information 88a. After replacing the box 4, the operator touches the memorandum delete button 90a displayed next to the memorandum information 88a. By this touch operation,Figure 10 As shown, the display control unit 33 deletes the display of the memo information 88a corresponding to the memo deletion button 90a from the first mask 86. In addition, the display control unit 33 may delete the display of the memo deletion button 90a together with the memo information 88a. Figure 8 The above operator replaces the cutting tool 21 with a cutting tool suitable for the machining conditions according to the content of the memo information 88b, and similarly touches the memo deletion button 90b displayed beside the memo information 88b. In addition, after the operator checks the machining conditions according to the content of the memo information 88c, the operator touches the memo deletion button 90c displayed beside the memo information 88c.

[0061] In the present embodiment, a function is set to delete the first mask 86 and the second mask 87 when all the memo deletion buttons 90a, 90b, and 90c are touched and operated. Therefore, the mask setting unit 38 deletes the first mask 86 and the second mask 87 from the input screen 80. Then, as

[0062] shown, the start button 83a covered by the second mask 87 is exposed, so that the start button 83a can be operated. Figure 11 As shown, the start button 83a covered by the second mask 87 is exposed, so that the start button 83a can be operated.

[0063] In addition, in the present embodiment, a structure is adopted in which the memo information 88a to 88c are respectively deleted by touching and operating the respective memo deletion buttons 90a to 90c. However, for example, a structure may be adopted in which when the memo deletion buttons 90a to 90c are touched and operated, a password input unit for cancellation (not shown; deletion unit) is displayed on the first mask 86, and a specified password is required to be input to the password input unit.

[0064] As described above, the cutting device 1 of the present embodiment includes: a chuck table 8 that holds the wafer 100; a cutting unit 20 that performs cutting on the wafer 100 held by the chuck table 8; an operation panel 40 that displays an input screen 80 for inputting the processing conditions of the wafer 100; and a control unit 30 that controls each structural element. The control unit 30 includes: an input screen registration unit 32 that registers information related to a plurality of input screens 80; and a mask setting unit 38 that sets a mask for each of the input screens. The mask covers a specified area of the input screen 80 to restrict operations in that area of the input screen 80. The memo information 88a to 88c input by the operator is displayed on the mask 86 displayed by the mask setting unit 38. Therefore, through the memo information 88a to 88c displayed on the mask 86, it is possible to easily convey the precautions between operators. In addition, memo deletion buttons 90a to 90c having a function of deleting the memo information 88a to 88c from the mask 86 or deleting the mask 86 from the input screen 80 are displayed on the mask 86. Therefore, after the operator confirms the content of the memo information 88a to 88c, the mask 86 can be deleted, and it is possible to reduce the operation errors of the operator.

[0065] In addition, in the present embodiment, as a deletion unit having a function of deleting the memo information 88a to 88c from the mask 86 or deleting the mask 86 from the input screen 80, the memo deletion buttons 90a to 90c are provided, so that the memo information 88a to 88c or the mask 86 can be easily deleted. In addition, by providing a password input unit for inputting a password for deleting the memo information 88a to 88c or the mask 86 as the above-mentioned deletion unit, it is possible to prevent the situation of erroneously deleting the memo information 88a to 88c or the mask 86 through an easy operation.

[0066] In addition, according to the present embodiment, the mask setting unit 38 is set to be able to display a plurality of masks on one input screen 80, and is set to be able to delete the second mask 87 by operating the memo deletion buttons 90a to 90c displayed on the first mask 86. Therefore, the memo deletion buttons 90a to 90c provided on the first mask 86 can be used as the release condition for the second mask 87. When the memo deletion buttons 90a to 90c are not operated according to the specified steps, the second mask 87 cannot be deleted. Therefore, it is possible to reduce the operation errors of the operator.

[0067] As described above, this embodiment has been explained, but this embodiment is presented as an example and is not intended to limit the scope of the invention. In this embodiment, a structure is adopted in which memo deletion buttons 90a to 90c are provided that have a function of deleting memo information 88a to 88c from the first mask 86 or deleting the first mask 86 from the input screen 80. However, a mask deletion button for deleting the first mask 86 and the second mask 87 may also be provided. In addition, in this embodiment, a structure is adopted in which each memo information 88a to 88c, 89 set on the first mask 86 or the second mask 87 is always displayed. However, a structure may also be adopted in which a password input section for inputting a password for displaying these memo information 88a to 88c, 89 is displayed, and when a password is input to the password input section, the memo information 88a to 88c, 89 is displayed. In addition, in this embodiment, the cutting device 1 is illustrated as a processing device having an operation panel 40 for displaying an input screen, but it is not limited thereto. The present invention can also be applied to a laser processing device that cuts a workpiece by irradiating laser light and a grinding device that grinds a workpiece with a rotating grinding tool.

Claims

1. A processing device, comprising: A chuck table for holding a workpiece; A processing unit for processing the workpiece held by the chuck table; A touch panel that displays an input screen for inputting processing conditions of a workpiece to be processed; And A control unit for controlling each structural element, Wherein, The control unit includes: A screen registration unit for registering a plurality of the input screens; and A mask setting unit for setting a mask for each of the input screens, the mask covering a specified area of the input screen to restrict operations on the area of the input screen, On the mask displayed by the mask setting unit, there is displayed: Memo information input by the operator on the mask; and A deletion unit having a function of deleting the memo information from the mask or deleting the mask from the input screen, The processing device is set such that a plurality of the masks can be displayed on one input screen, and is set such that the second mask can be deleted by operating the deletion unit of the first mask displayed.

2. The processing device according to claim 1, wherein, The deletion unit is a deletion button or a password input unit, and the password input unit inputs a password for deleting the memo information or the mask.

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