Processing equipment

Abstract

A processing device is provided, which prevents a predetermined operation from being forgotten or from being performed after the scheduled operation date and time. A processing device (1) having a processing unit (2), a control unit (3), an input unit (4), and a notification unit (5) is used. The notification unit (5) notifies an operator of the scheduled operation at a predetermined timing based on the operation date and time stored in a date and time storage unit (30) of the control unit (3). After the notification is stopped by a notification stop button (40) of the input unit (4), if the completion of the operation is not detected by a scheduled operation completion detection unit (32) of the control unit (3) after a predetermined time has passed since the notification was stopped, an additional notification is given again, thereby repeatedly notifying the operator of the scheduled operation, thereby preventing the operator from forgetting to perform the operation.

Description

Technical Field

[0001] The present invention relates to a processing device. Background Art

[0002] In various processing devices, various components and sensors of the devices deteriorate as the devices operate and change over time. Therefore, in order to achieve proper operation of the processing devices, regular maintenance and regular inspections are recommended (for example, see Patent Document 1).

[0003] Patent Document 1: Japanese Patent Application Laid-Open No. 2015-098063

[0004] The timing for maintenance and periodic inspections is managed by each processing equipment user. However, users may forget to perform maintenance and periodic inspections due to other tasks. Furthermore, maintenance and periodic inspections require stopping equipment and interrupting production. Even if users remember to schedule maintenance and periodic inspections, they may be delayed if the inspection period overlaps with a busy period.

[0005] The problem to be solved by the present invention is to prevent scheduled operations such as maintenance and periodic inspection of a processing device from being forgotten, and to prevent operations from being delayed beyond the scheduled timing. Summary of the Invention

[0006] An object of the present invention is to provide a processing device that reduces the possibility of forgetting a task or delaying a task.

[0007] The present invention is a processing device, which comprises: a processing unit that processes a workpiece; a control unit that controls at least the processing unit; and an input unit that inputs information, wherein the control unit comprises: a date and time storage unit that stores the date and time of a scheduled operation; and a scheduled operation completion detection unit that detects the completion of the scheduled operation. The processing device comprises a notification unit that notifies the scheduled occurrence of the operation at a specified time before the date and time stored in the date and time storage unit. As a scheduled occurrence notification, the input unit comprises a notification stop button that stops the notification from the notification unit. When the scheduled occurrence notification is notified and the scheduled occurrence notification is stopped using the notification stop button, if the completion of the operation is not detected by the scheduled operation completion detection unit after a specified time, an additional notification is notified from the notification unit.

[0008] The present invention is the above-mentioned processing device, wherein the control unit also has a notification stop invalidation unit, which invalidates the stop of the notification based on the notification stop button when the completion of the job is not detected by the scheduled job completion detection unit when the date and time stored in the date and time storage unit is reached.

[0009] In the present invention, a notification unit issues a notification of scheduled tasks, such as maintenance and periodic inspections, prior to a specific date and time. Furthermore, if the task remains incomplete after a specified period of time has passed after the notification ceases, the notification unit issues an additional notification, thereby preventing the task from being forgotten. Furthermore, the notification is issued at a specified time prior to the scheduled date and time, allowing for adequate preparation.

[0010] If the completion of the job is not detected when the date and time stored in the date and time storage unit arrives, the notification stop button is disabled, thereby further reducing the possibility of forgetting the job or delaying the job. BRIEF DESCRIPTION OF THE DRAWINGS

[0011] Figure 1 It is a perspective view showing the entire processing device.

[0012] Figure 2 This is an explanatory diagram showing a state where the touch panel displays a maintenance screen.

[0013] Figure 3 It is an explanatory diagram showing a state where the tool replacement screen is displayed on the touch panel.

[0014] Label Description

[0015] 1: Processing device; 2: Processing unit; 20: 1st cutting unit; 200: 1st cutting unit; 21:

[0016] 2 Cutting unit; 210: 2nd cutting unit; 22: Guide rail; 3: Control unit; 30: Date and time storage unit; 32: Scheduled job completion detection unit; 34: Notification stop invalidation unit; 4: Input unit; 4A: Touch panel; 40: Notification stop button; 41: Enter button; 42: Various inspection items; 42a: Tool replacement detail display button; 5: Notification unit; 50: Indicator light; 51: Speaker; 6: Holding unit; 60: Chuck workbench; 61: Cover; 62: Bellows cover; 7: Box loading mechanism; 70: Box loading table; 71: Box presence detection sensor; 8: Alignment unit; G1: Maintenance screen; G2: Tool replacement screen. DETAILED DESCRIPTION

[0017] 1 Structure of processing device

[0018] Figure 1 The processing device 1 shown is a device for processing a workpiece. The processing device 1 in this embodiment is a cutting device for cutting a semiconductor wafer or the like, but the processing device may also be a laser processing device or a grinding device.

[0019] The processing device 1 has a processing unit 2. In the present embodiment, the processing unit 2 is a unit that cuts a workpiece such as a semiconductor wafer. The processing unit 2 has a first cutting unit 20 and a second cutting unit 21. The first cutting unit 20 has: a first cutting tool 200; a first spindle (not shown) having the first cutting tool 200 mounted on one end thereof; and a motor (not shown) connected to the other end of the first spindle for rotating the first cutting tool via the first spindle. Similarly, the second cutting unit 21 has: a second cutting tool 210; a second spindle (not shown) having the second cutting tool 210 mounted on one end thereof; and a motor (not shown) connected to the other end of the second spindle for rotating the second cutting tool via the second spindle.

[0020] The first cutting unit 20 and the second cutting unit 21 are each independently movable in the Y-axis direction. In addition, the first cutting unit 20 and the second cutting unit 21 are each independently movable in the Z-axis direction.

[0021] The processing device 1 has a holding unit 6, which has a chuck table 60, a cover 61 and a bellows 62. The chuck table 60 is, for example, roughly circular in shape, and is capable of holding the workpiece by placing it on the chuck table 60. The chuck table 60 is capable of moving in the X-axis direction by a moving unit not shown in the figure, and of rotating by a rotating unit not shown in the figure. The cover 61 and the bellows 62 serve to protect the cutting water blown to the workpiece during the cutting process, the cutting chips generated by the cutting process, etc. from entering the interior of the device. The cover 61 is capable of moving in the X-axis direction by a moving unit not shown in the figure, and moves in the X-axis direction together with the chuck table 60 during grinding. As the cover 61 moves, the bellows 62 is capable of extending and retracting.

[0022] The machining apparatus 1 includes an alignment unit 8. The alignment unit 8 includes a camera (not shown) and the like, which is used to align the two cutting tools and the workpiece during cutting. The camera in the alignment unit 8 captures the workpiece, aligning the machining unit 2 and the workpiece.

[0023] The machining apparatus 1 includes a control unit 3 for controlling at least the machining unit 2. For example, the control unit 3 controls the movement of the machining unit 2 in the Y-axis direction when aligning the machining unit 2 with the workpiece, and the vertical movement of the machining unit 2 in the Z-axis direction when the first cutting tool 200 or the second cutting tool 210 cuts into the workpiece.

[0024] The control unit 3 includes a date and time storage unit 30, which stores the date and time of scheduled operations, and a scheduled operation completion detection unit 32, which detects the completion of a scheduled operation. Examples of scheduled operations include device inspection, tool replacement, cartridge removal, and other maintenance, inspection, repair, and replacement, among others. In this embodiment, tool replacement is included as a scheduled operation. The scheduled operation completion detection unit 32 detects the completion of the operation when it receives a signal indicating the completion of the operation.

[0025] The processing device 1 has a box loading mechanism 7, which has a box loading table 70 and a box presence detection sensor 71. A box containing a workpiece is loaded on the box loading table 70. The box presence detection sensor 71 detects whether the box is loaded on the box loading table 70. The workpiece is taken out of the box loaded on the box loading table 70 and processed, and then stored in the box after processing. When the processing of all the workpieces is completed and stored in the box, the operator or the like removes the box. The structure is such that when the box is removed, the box presence detection sensor 71 detects the completion of the removal of the box and sends a signal to the predetermined operation completion detection unit 32, thereby recognizing the completion of the box removal operation.

[0026] The processing device 1 includes a notification unit 5. The notification unit 5 notifies the scheduled operation of a scheduled operation as a scheduled occurrence notification at a predetermined timing prior to the scheduled operation date and time stored in the date and time storage unit 30. The predetermined timing may be, for example, several days, hours, or minutes before the scheduled operation date and time. When an operator inputs the scheduled operation date and time and stores it in the date and time storage unit 30, the operator also sets the predetermined timing. Alternatively, the scheduled operation date and time may be calculated by the processing device 1. In such cases, the predetermined timing is also calculated by the processing device 1.

[0027] The notification unit 5 includes, for example, an indicator lamp 50 and a speaker 51. Alternatively, the notification unit 5 may be a display monitor that performs notification by displaying characters, symbols, or the like on a screen.

[0028] The indicator light 50 is, for example, an LED. When a predetermined timing arrives, the indicator light 50 lights up or flashes to notify the operator, etc., that a task is scheduled to occur. When the indicator light 50 lights up or flashes, it emits a predetermined color, such as red. However, the color of the light and the flashing pattern are not limited to these.

[0029] Furthermore, speaker 51 emits a notification sound when a predetermined notification occurs. The notification sound may vary in volume, pitch, or timbre, as long as the sound is audible to the user. Furthermore, the notification sound may be, for example, a sound of a predetermined pitch or a song.

[0030] The processing device 1 has an input unit 4 for inputting information. The input unit 4 in this embodiment is a touch panel 4A. Figure 2 and Figure 3 As shown, there are a notification stop button 40 and an enter button 41.

[0031] When the notification stop button 40 is touched during the scheduled notification, for example, the notification is stopped. Specifically, the indicator light 50, which is lit when the scheduled notification is issued, turns off, and the notification sound emitted from the speaker 51 stops. Furthermore, when the enter button 41 is touched, a signal is sent to the scheduled job completion detection unit 32, which detects the completion of the scheduled job.

[0032] exist Figure 2 In the process, the maintenance screen G1 is displayed on the touch panel 4A. Figure 3 In the process, a tool replacement screen G2 indicating replacement of a tool among items to be maintained is displayed on the touch panel 4A.

[0033] exist Figure 2 The maintenance screen G1 shown displays various inspection items 42. Each inspection item 42 displays, for example, the name of the inspection item and the scheduled date and time of the inspection item.

[0034] exist Figure 3 In the display on the tool replacement screen G2 shown, Z1 represents the first cutting tool 200 , and Z2 represents the second cutting tool 210 .

[0035] The configuration is such that, when the scheduled notification is notified by the notification unit 5 and the notification stop button 40 stops the scheduled notification, and the scheduled task completion detection unit 32 does not detect task completion after a predetermined time has passed, the notification unit 5 sends an additional notification.

[0036] The additional notification made by the notification unit 5 is, for example, the lighting or flashing of the indicator light 50, the sending of a notification sound from the speaker 51, etc. In this case, the lighting of the indicator light 50 in the additional notification may be the same lighting pattern as the lighting of the initial scheduled notification, or a different lighting pattern. In addition, the notification sound of the additional notification sent from the speaker 51 may be the same as or different from the notification sound of the initial scheduled notification. For example, it may be a warning sound that gives the operator the impression that the scheduled operation time is closer than the notification sound sent by the initial scheduled notification, or a voice-type notification that announces the time until the start time of the scheduled operation. The notification sound during the additional notification is not limited to the notification sound mentioned above.

[0037] When the scheduled operation is a job that is performed at a predetermined date and time, such as an equipment inspection, the date and time storage unit 30 of the control unit 3 stores information such as the date and time of the operation entered from a predetermined input field displayed on the touch panel 4A. Furthermore, when the scheduled operation is a tool replacement, for example, the replacement period for the first cutting tool 200 (Z1) and the second cutting tool 210 (Z2) calculated by the control unit 3 is stored in the date and time storage unit 30. Therefore, the control unit 3 first identifies the amount of tool tip protrusion in the unused stage. Regarding the amount of tool tip protrusion in the unused stage, for example, in the case of a hub tool having a cutting edge formed on the periphery of a base, the type of tool tip protrusion is entered by the operator from a predetermined input screen, or automatically entered by reading a barcode attached to the base using a barcode reader. Furthermore, in the case of a second-hand cutting tool, the value of the tip protrusion is manually entered from a predetermined input screen.

[0038] In addition, during cutting, the cutting distance is calculated and estimated based on the actual cutting distance and the tool tip position (wear amount) measured during cutting, up to the usage limit pre-input into the control unit 3, that is, the blade tip protrusion amount at which the control unit 3 determines that the tool needs to be replaced.

[0039] In addition, conditions such as the processing distance of the workpiece being processed, the time required for cleaning and drying the workpiece after processing, and the time required for transporting the workpiece in the processing device 1 are also taken into consideration, and the time when the first cutting tool 200 (Z1) and the second cutting tool 210 (Z2) reach the usage limit (usage limit time) when the workpiece continues to be processed under these conditions is calculated.

[0040] In addition, before the usage limit time arrives, Figure 1 When the continuous processing of all the workpieces in the box on the box mounting table 70 shown has been completed, the usage limit time calculated by the control unit 3 and stored in the date and time storage unit 30 is reset (deleted), and the tool setting is performed to identify the front end positions of the first cutting tool 200 (Z1) and the second cutting tool 210 (Z2), and the usage limit time of the two cutting tools is calculated again based on the front end position.

[0041] The information of the usage limit time calculated in this way is sent to the date and time storage unit 30 , and the scheduled date and time is stored in the date and time storage unit 30 .

[0042] Similarly, regarding the storage of the job date and time in the date and time storage unit 30, when the scheduled job is a cassette removal job, for example, when the processing apparatus 1 is a fully automatic type that automatically performs all steps from the start of processing of the workpieces stored in the cassette to the completion of processing of all the workpieces stored in the cassette, a configuration is also conceivable in which the time from the start of processing to the completion of processing of all the workpieces is automatically calculated, and based on this calculated time, the scheduled date and time for the cassette removal job is automatically stored in the date and time storage unit 30. The configuration of the processing apparatus 1 for storing the job date and time in the date and time storage unit 30 is not limited to the configuration described above.

[0043] The control unit 3 includes a notification stop invalidating unit 34. If the scheduled job completion detecting unit 32 does not detect the completion of the job at the scheduled job date and time stored in the date and time storage unit 30, the notification stop invalidating unit 34 invalidates the stop of the notification by the notification stop button 40.

[0044] 2. Operation of processing equipment

[0045] The following describes the operation of the machining apparatus 1 having the above structure. In this embodiment, the tool replacement operation of replacing the first cutting tool 200 and the second cutting tool 210 used in the cutting process with other cutting tools is performed as a predetermined operation, but the operation is not limited to this.

[0046] (Storage of scheduled work date and time)

[0047] First, as described above, the control unit 3 calculates the usage limit time of the first cutting tool 200 ( Z1 ) and the second cutting tool 210 ( Z2 ), and stores the time in the date and time storage unit 30 as the scheduled operation date and time.

[0048] (Notification of scheduled occurrence)

[0049] For example, before starting continuous processing of all workpieces stored in a box, the number of workpieces in the box is counted using a sensor included in the processing apparatus 1. The total cutting distance is calculated by multiplying the cutting distance of each workpiece by the number of workpieces. Furthermore, when the control unit 3 determines that the usage limit time will arrive before the completion of cutting of the total cutting distance, a signal is sent from the date and time storage unit 30 to the notification unit 5 at a well-defined timing, such as after the completion of cutting of the workpiece preceding the workpiece currently being cut at the usage limit time and before the start of cutting of the next workpiece. The notification unit 5 then notifies the notification unit 5 of the scheduled occurrence of a tool replacement operation.

[0050] When a predetermined notification occurs, for example, the indicator light 50 of the notification unit 5 lights up a predetermined color (for example, red), and similarly, the speaker 51 of the notification unit 5 receives an electrical signal from a sound source (not shown) and emits a notification sound.

[0051] The notification may be only a display by lighting up the indicator lamp 50 , may be only a notification sound from the speaker 51 , or may be both lighting up the indicator lamp 50 and transmitting the notification sound from the speaker 51 .

[0052] At this time, the light of the indicator lamp 50 may be, for example, lighting or flashing a light of a predetermined color, but is not limited thereto. Similarly, the notification sound sent from the speaker 51 may be in the form of a song in addition to sending only a sound of a set pitch.

[0053] When a predetermined notification occurs, the screen of the touch panel 4A is switched from a predetermined main screen or the like to a predetermined screen, for example, by the transmission of a signal from the date and time storage unit 30 of the control unit 3, together with the lighting of the indicator light 50 or the sound of the notification from the speaker 51. Figure 3 The tool replacement screen G2 is shown. The tool replacement screen G2 may be switched automatically or by an operator's operation.

[0054] Next, when the operator touches the notification stop button 40 , the light of the indicator lamp 50 that was on turns off, and the notification sound emitted from the speaker 51 stops.

[0055] (additional notice)

[0056] If the operator stops sending the scheduled notification by touching the notification stop button 40 and a predetermined time has passed without the scheduled task completion detection unit 32 detecting completion of the task, the notification is sent again. In this embodiment, the predetermined time is set to 10 minutes, for example. Ten minutes after the operator touches the notification stop button 40, the scheduled notification is sent again as an additional notification.

[0057] In the additional notification, similarly to the initial scheduled occurrence notification, the indicator lamp 50 is illuminated with a predetermined color, for example, red, and the speaker 51 emits a notification sound.

[0058] By touching the notification stop button 40 of the touch panel 4A, the lighted indicator lamp 50 turns off, and the transmission of the notification sound from the speaker 51 stops.

[0059] (Additional notifications that cannot be stopped)

[0060] When the additional notification is notified, when the scheduled job time is reached, as long as the completion of the job is not detected by the scheduled job completion detection unit 32, the notification will not be stopped even if the notification stop button 40 of the touch panel 4A is touched, the notification stop invalidation unit 34 of the control unit 3 will not stop the notification.

[0061] The operator is urged to perform the scheduled tool replacement operation by the above-mentioned configuration in which the notification stop disabling unit 34 disables the stop of notification by the notification stop button 40. Furthermore, for example, when the scheduled operation time arrives, a display urging the operator to perform the scheduled tool replacement operation may be displayed on the screen of the touch panel 4A together with an additional notification.

[0062] (Implementation of the work)

[0063] At the scheduled operation time, the cutting tool is replaced. Figure 3 In the screen shown, Z1 indicates the first cutting tool 200, and Z2 indicates the second cutting tool 210. The cutting tools are replaced as appropriate according to the screen display.

[0064] After completing the replacement of the two tools, the operator presses the Enter button 41. The scheduled operation completion detection unit 32 of the control unit 3 then detects the completion of the operation. After the scheduled operation completion detection unit 32 detects the completion of the operation, the operator presses the Notification Stop button 40 to stop the continuous notification. Specifically, by pressing the Notification Stop button 40, the previously illuminated indicator light 50 turns off, and the notification sound emitted from the speaker 51 stops.

[0065] As described above, for scheduled tasks such as maintenance and periodic inspections, notification means 5 issues a notification prior to a specific date and time. If the task is not completed after a specified time has passed after the notification stops, notification means 5 issues an additional notification. This prevents the operator from forgetting to perform the task. Furthermore, by providing notifications at a specified time prior to the scheduled date and time, sufficient preparations can be made.

[0066] Furthermore, if the completion of the job is not detected when the date and time stored in the date and time storage unit 30 arrives, the notification stop button 40 is disabled, thereby further reducing the possibility of forgetting or postponing the job.

Claims

1. A processing device comprising: A processing unit that processes a workpiece; a control unit that controls at least the processing unit; and Input unit, which inputs information, in, The control unit has: a date and time storage unit that stores the date and time of a scheduled job; and A scheduled operation completion detection unit detects the completion of the scheduled operation. The processing device includes a notification unit that notifies the user of the scheduled occurrence of the operation at a predetermined timing before the date and time stored in the date and time storage unit as a scheduled occurrence notification. The input unit has a notification stop button for stopping the notification from the notification unit. After the scheduled notification is notified and the scheduled notification is stopped by the notification stop button, if the scheduled job completion detection unit does not detect the completion of the job after a predetermined time has passed, the notification unit notifies an additional notification. The control unit also has a notification stop invalidation unit. When the completion of the job is not detected by the scheduled job completion detection unit when the date and time stored in the date and time storage unit is reached, the notification stop invalidation unit invalidates the stop of the notification based on the notification stop button and continues to send notifications.

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