Crucible device and evaporation machine having the same

Abstract

The present invention discloses a crucible device and an evaporation machine. The crucible device includes a crucible, on which a reaction container is arranged; the crucible device also includes: a rotating table, on which a plurality of raw material containers are arranged, the rotating table can rotate around its central axis as a rotating axis, the plurality of raw material containers are distributed circumferentially around the central axis of the rotating table, and a feeding port is arranged on the raw material container; a feeding mechanism, the feeding mechanism includes a feeding channel, one end of the feeding channel can be selectively matched with the feeding port, and the other end of the feeding channel is connected to the reaction container. The evaporation machine includes an evaporation chamber, an electron gun arranged in the evaporation chamber, and a crucible device. The present invention introduces the raw materials on the rotating table into the reaction container through the feeding mechanism, which makes the operation of replenishing raw materials simple and improves work efficiency. When replenishing raw materials, there is no need to open the evaporation chamber, which further improves the convenience of replenishing raw materials. In addition, the present invention can fill raw materials of different materials into the reaction container.

Description

Technical Field

[0001] The present invention relates to chip manufacturing equipment, in particular to a crucible device and an evaporation machine having the same. Background Art

[0002] During the LED chip manufacturing process, an evaporation machine melts the material into vapor, which is then deposited onto a semiconductor substrate. The evaporation machine consists of a deposition chamber, a crucible within the chamber, and an electron gun. The crucible houses a reaction chamber, which holds the raw material. The electron beam generated by the electron gun heats the raw material inside the reaction chamber, turning it into vapor. As the raw material depletes, the reaction chamber needs to be replenished.

[0003] Because the deposition chamber is sealed during the deposition process, adding raw materials to the reaction chamber requires stopping the deposition reaction, opening the chamber, and then pouring the raw materials into the reaction chamber. This makes the replenishment process complex, and the high temperature of the crucible poses a safety risk, posing a risk to operators and potentially causing burns. Summary of the Invention

[0004] The object of the present invention is to provide a crucible device with convenient material filling and a vapor deposition machine having the same.

[0005] To achieve one of the above-mentioned objects of the invention, one embodiment of the present invention provides a crucible device, comprising a crucible, wherein a reaction container is provided on the crucible;

[0006] The crucible device also includes:

[0007] A rotating table, on which a plurality of raw material containers are arranged, the rotating table being rotatable about its central axis, the plurality of raw material containers being distributed circumferentially around the central axis of the rotating table, and the raw material containers being provided with a feed port;

[0008] The feeding mechanism includes a feeding channel, one end of which can be selectively matched with the feeding port, and the other end of which is connected to the reaction container.

[0009] As a further improvement of one embodiment of the present invention, a pushing piece is provided in the raw material container, the pushing piece is in contact with the inner wall of the raw material container, and the pushing piece can move closer to or away from the feeding port in the raw material container.

[0010] As a further improvement of one embodiment of the present invention, the crucible device also includes a pushing drive assembly, the pushing drive assembly includes a movable block, the raw material container is provided with an opening on one side of the moving direction of the pushing member, the movable block can pass through the opening and can move close to or away from the feeding port.

[0011] As a further improvement of an embodiment of the present invention, the feeding mechanism includes an upper assembly part and a lower assembly part, and the upper assembly part and the lower assembly part are detachably connected.

[0012] As a further improvement of one embodiment of the present invention, an upper groove is provided at the bottom of the upper assembly, and a lower groove is provided at the top of the lower assembly. The upper groove corresponds to the lower groove, and the upper groove and the lower groove cooperate to form the feeding channel.

[0013] As a further improvement of one embodiment of the present invention, the feeding port is arranged on the outer periphery of the raw material container, the height of the feeding port is higher than the height of the reaction container, and the feeding channel is inclined and the end close to the raw material container is higher than the end away from the raw material container.

[0014] As a further improvement of one embodiment of the present invention, the reaction container is movably mounted on the crucible and the moving direction is longitudinal. The crucible device also includes a sensing mechanism arranged below the reaction container. The sensing mechanism includes a support member, an elastic member, and a first photoelectric sensor. The support member is arranged between the elastic member and the reaction container. A laterally protruding protrusion is provided on the support member. The first photoelectric sensor can sense the lateral distance between the first photoelectric sensor and the support member.

[0015] As a further improvement of an embodiment of the present invention, the sensing mechanism further includes a second photoelectric sensor, which can sense the lateral distance between the second photoelectric sensor and the support member, and the second photoelectric sensor is lower than the first photoelectric sensor.

[0016] As a further improvement of one embodiment of the present invention, the sensing mechanism can move closer to or away from the reaction container.

[0017] To achieve one of the above-mentioned objects of the invention, one embodiment of the present invention provides a vapor deposition machine, comprising a vapor deposition chamber and an electron gun disposed in the vapor deposition chamber;

[0018] The evaporation machine further includes the above-mentioned crucible device, the crucible and the rotating table are arranged in the evaporation chamber, and the electron beam heating area of ​​the electron gun corresponds to the position of the reaction container.

[0019] Compared with existing technologies, the present invention has the following advantages: the raw materials on the rotating table are introduced into the reaction vessel through the loading mechanism, making the replenishment of raw materials simple and improving work efficiency. Moreover, the evaporation chamber does not need to be opened when replenishing raw materials, further improving the convenience of raw material replenishment.

[0020] When the rotating table rotates, the position of the raw material container can be switched, so that the feeding channel can be matched with different raw material containers. Therefore, the present invention has the function of filling raw materials of different materials into the reaction container. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 1 is a schematic structural diagram of a crucible device according to one embodiment of the present invention;

[0022] Figure 2 1 is a schematic structural diagram of a feeding mechanism according to an embodiment of the present invention;

[0023] Figure 3 1 is a schematic structural diagram of a vapor deposition machine according to an embodiment of the present invention;

[0024] Among them, 10. Crucible device; 11. Rotary table; 12. Loading mechanism; 121. Loading channel; 122. Upper assembly; 123. Lower assembly; 13. Crucible; 14. Raw material container; 141. Feeding port; 142. Pusher; 15. Reaction container; 16. Rotary table drive mechanism; 161. First servo motor; 162. First gear; 163. Second gear; 164. Third gear; 17. Crucible drive mechanism; 171. Second servo motor; 172. Fourth gear; 173. Fifth gear; 174. Sixth gear; 18. Pusher drive assembly; 181. Movable block; 182. Cylinder; 19. Sensing mechanism; 191. Support member; 192. Elastic member; 193. First photoelectric sensor; 194. Protrusion; 195. Second photoelectric sensor; 20. Evaporation chamber; 30. Electron gun. DETAILED DESCRIPTION

[0025] The present invention will be described in detail below with reference to the specific embodiments shown in the accompanying drawings. However, these embodiments do not limit the present invention, and any structural, methodological, or functional changes made by those skilled in the art based on these embodiments are all within the scope of protection of the present invention.

[0026] In the various drawings of the present invention, for the sake of convenience, some sizes of structures or parts are exaggerated relative to other structures or parts, and thus, only the basic structure of the subject matter of the present invention is illustrated.

[0027] like Figure 1 As shown, one embodiment of the present invention provides a crucible device 10 , which includes a rotating table 11 , a loading mechanism 12 and a crucible 13 .

[0028] A plurality of raw material containers 14 are mounted on the rotating platform 11. These containers can hold raw materials, and the materials in each container 14 can vary. The rotating platform 11 is rotatable about its central axis, and the plurality of raw material containers 14 are arranged in a circular pattern around the central axis. Each container 14 is provided with a feed port 141.

[0029] A reaction container 15 is provided on the crucible 13 , and the raw materials to be reacted or being reacted are placed in the reaction container 15 .

[0030] refer to Figure 2 The feeding mechanism 12 includes a feeding channel 121, one end of which can be selectively connected to the feeding port 141, and the other end of the feeding channel 121 is connected to the reaction container 15. In this embodiment, "selectively" means that the feeding channel 121 can be connected to the feeding port 141 of different raw material containers 14.

[0031] The raw materials are introduced into the reaction vessel 15 through the feeding mechanism 12 , and the operation of replenishing the raw materials is simple, which is more convenient than manual addition of raw materials, thereby improving work efficiency.

[0032] As the turntable 11 rotates, the feeding ports 141 of different raw material containers 14 can cooperate with the loading channel 121 to introduce raw materials from different raw material containers 14 into the reaction container 15. Since raw materials of different materials can be placed in different reaction containers 15, this embodiment can provide raw materials of different materials to the reaction containers 15, expanding the scope of use of the crucible device 10.

[0033] Furthermore, a rotating platform driving mechanism 16 is provided below the rotating platform 11. The function of the rotating platform driving mechanism 16 is to drive the rotating platform 11 to rotate.

[0034] Preferably, the turntable drive mechanism 16 includes a first servo motor 161, a first gear 162, a second gear 163, and a third gear 164. The output shaft of the first servo motor 161 is centrally connected to the first gear 162. The third gear 164 is fixedly mounted on the bottom of the turntable 11, and the central axis of the third gear 164 coincides with the central axis of the turntable 11. The second gear 163 connects the first gear 162 and the third gear 164. The first gear 162, the second gear 163, and the third gear 164 allow for fine adjustment of torque. Compared to a case where the first servo motor 161 is directly connected to the turntable 11, the turntable 11 of this embodiment has a stable rotational speed, and the situation in which the feeding port 141 cannot cooperate with the feeding channel 121 due to unstable rotational speed will not occur.

[0035] Specifically, the output shaft of the first servo motor 161 is arranged vertically, and the center of the first gear 162 is connected to the top of the output shaft of the first servo motor 161, that is, the first gear 162 is arranged horizontally. The third gear 164 is also arranged horizontally. The second gear 163 can be arranged horizontally or vertically, both of which can achieve the purpose of adjusting torque.

[0036] In one embodiment of the present invention, the crucible 13 can rotate around its central axis as a rotating shaft, so that the position of the reaction container 15 can be adjusted. The reaction container 15 has a feeding position and a vapor deposition position. When the reaction container 15 reaches the feeding position, the reaction container 15 can communicate with the end of the feeding channel 121. When the reaction container 15 reaches the vapor deposition position, it can cooperate with the electron gun to perform the vapor deposition operation. This arrangement can avoid the position conflict between the electron gun and the feeding mechanism 12 and the rotating table 11, and prevent the heat generated by the electron gun from evaporating the raw materials in the raw material container 14 and the feeding mechanism 12.

[0037] Furthermore, a crucible driving mechanism 17 is provided below the crucible 13. The function of the crucible driving mechanism 17 is to drive the crucible 13 to rotate.

[0038] Preferably, the crucible drive mechanism 17 includes a second servo motor 171, a fourth gear 172, a fifth gear 173, and a sixth gear 174. The output shaft of the second servo motor 171 is centrally connected to the fourth gear 172. The sixth gear 174 is fixedly mounted to the bottom of the crucible 13, with the central axis of the sixth gear 174 coinciding with the central axis of the crucible 13. The fifth gear 173 connects the fourth and sixth gears 172, 174. The fourth, fifth, and sixth gears 173, 174 allow for fine adjustment of torque. Compared to a system in which the second servo motor 171 is directly connected to the crucible 13, the crucible 13 in this embodiment has a stable rotational speed, and unstable rotational speed will not prevent the feeding port 141 from failing to mate with the feeding channel 121.

[0039] Specifically, the output shaft of the second servo motor 171 is arranged vertically, and the center of the fourth gear 172 is connected to the top of the output shaft of the second servo motor 171, that is, the fourth gear 172 is arranged horizontally. The sixth gear 174 is also arranged horizontally. The fifth gear 173 can be arranged horizontally or vertically, both of which can achieve the purpose of adjusting torque.

[0040] Preferably, there are a plurality of reaction containers 15 distributed circumferentially around the central axis of the crucible 13. Different numbers of reaction containers 15 can be used to store raw materials of different materials to avoid mixing of raw materials of different materials during evaporation.

[0041] Preferably, a pusher 142 is provided in the raw material container 14. The pusher 142 is in contact with the inner wall of the raw material container 14 and can move toward or away from the feeding port 141 in the raw material container 14. The function of the pusher 142 is to push the raw material in the raw material container 14 out of the feeding port 141 so that the raw material can enter the loading mechanism 12.

[0042] The moving direction of the pushing member 142 can be horizontal or vertical.

[0043] Preferably, the crucible device 10 further includes a push drive assembly 18, which includes a movable block 181. The raw material container 14 is provided with an opening on one side of the pusher 142 in the direction of movement. The movable block 181 can pass through the opening and move toward or away from the feeding port 141. The movable block 181 can push the pusher 142 to move it.

[0044] In one embodiment of the present invention, the pusher 142 moves vertically, and the opening in the raw material container 14 is located at the bottom of the container 14. The pusher drive assembly 18 is a pneumatic cylinder, with its cylinder body 182 located below the rotary table 11. The movable block 181 is a telescopic rod of the cylinder. The movable block 181 is movable vertically. Furthermore, a hole is provided in the rotary table 11 for the movable block 181 to pass through.

[0045] refer to Figure 2 Preferably, the feeding mechanism 12 includes an upper assembly 122 and a lower assembly 123. The upper assembly 122 and the lower assembly 123 are detachably connected. Specifically, the upper assembly 122 and the lower assembly 123 can be snap-fitted or connected by screws. An upper groove is provided at the bottom of the upper assembly 122, and a lower groove is provided at the top of the lower assembly 123. The upper groove and the lower groove correspond to each other, and the upper groove and the lower groove cooperate to form the feeding channel 121. Therefore, the feeding mechanism 12 is easy to disassemble and assemble. The upper assembly 122 and the lower assembly 123 of the feeding mechanism 12 can be separated to facilitate cleaning of the feeding channel 121.

[0046] Preferably, the feeding port 141 is provided on the outer periphery of the raw material container 14. In the present invention, the opposite sides of different raw material containers 14 are referred to as the inner side, and the opposite sides are referred to as the outer side.

[0047] The height of the feeding port 141 is higher than that of the reaction container 15 . The feeding channel 121 is tilted and the end close to the raw material container 14 is higher than the end away from the raw material container 14 .

[0048] The raw materials enter the feeding channel 121 through the feeding port 141 . Since the feeding channel 121 is tilted, the raw materials slide down under their own gravity and enter the reaction container 15 .

[0049] Preferably, the reaction container 15 is movably mounted on the crucible 13 and its moving direction is longitudinal.

[0050] The crucible device 10 further includes a sensing mechanism 19 disposed below the reaction vessel 15. The sensing mechanism 19 is used to detect whether the amount of raw materials in the reaction vessel 15 is sufficient, so that the operator can determine whether refilling is required.

[0051] Specifically, the sensing mechanism 19 includes a support member 191, an elastic member 192, and a first photoelectric sensor 193. The support member 191 is disposed between the elastic member 192 and the reaction vessel 15. The support member 191 is provided with a laterally protruding protrusion 194. The first photoelectric sensor 193 can sense the lateral distance between the first photoelectric sensor 193 and the support member 191.

[0052] Specifically, the support member 191 is a rod with a certain height, and its transverse width is the same except for the protrusion 194. The elastic member 192 is a component with a certain elasticity and longitudinal expansion and contraction, such as a spring.

[0053] As the raw materials in reaction vessel 15 are gradually consumed, the pressure exerted on support member 191 and elastic member 192 gradually decreases. As this occurs, elastic member 192 increases in height, supporting member 191 moves upward, and protrusion 194 on supporting member 191 also increases in height. When protrusion 194 moves to the position corresponding to first photoelectric sensor 193, first photoelectric sensor 193 detects a decrease in the lateral distance between first photoelectric sensor 193 and supporting member 191, indicating that the raw materials in reaction vessel 15 are insufficient and that refilling is necessary.

[0054] Compared with providing a pressure sensor in the reaction vessel 15 , the above-mentioned sensing mechanism 19 can prevent the sensor from being damaged by the high temperature of the reaction vessel 15 during evaporation, thereby improving the reliability of the crucible device 10 .

[0055] Preferably, the sensing mechanism 19 is disposed below the reaction vessel 15 located at the evaporation position to monitor in real time whether the raw materials inside the reaction vessel 15 are sufficient during the evaporation process.

[0056] Preferably, the sensing mechanism 19 further includes a second photoelectric sensor 195. The second photoelectric sensor 195 can sense the lateral distance between the second photoelectric sensor 195 and the support member 191, and the second photoelectric sensor 195 is lower than the first photoelectric sensor 193. The function of the second photoelectric sensor 195 is to detect whether the raw material in the reaction container 15 is sufficient after the feed is added.

[0057] The first photoelectric sensor 193 and the second photoelectric sensor 195 are both located on the side of the support member 191 , and their sensing areas face the support member 191 .

[0058] Preferably, the sensing mechanism 19 can move closer to or farther from the reaction vessel 15. When the first photoelectric sensor 193 detects that a refilling operation is required, the sensing mechanism 19 moves away from the reaction vessel 15, thereby preventing the crucible 13 from colliding with the sensing mechanism 19 during rotation, thereby improving the reliability of the crucible device 10.

[0059] Specifically, the elastic member 192 is installed on a cylinder. Driven by the cylinder, the sensing mechanism 19 can move longitudinally so that the sensing mechanism 19 is close to or away from the reaction container 15.

[0060] refer to Figure 3 One embodiment of the present invention further provides an evaporation machine, including an evaporation chamber 20 and an electron gun 30 disposed in the evaporation chamber 20 .

[0061] The evaporation machine also includes the above-mentioned crucible device 10, the crucible 13 and the rotating table 11 are arranged in the evaporation chamber 20, the electron beam heating area of ​​the electron gun 30 corresponds to the position of the reaction vessel 15, and the electron gun 30 can heat the reaction vessel 15 to convert the raw materials in the reaction vessel 15 into steam.

[0062] The working process of the vapor deposition machine according to one embodiment of the present invention is as follows:

[0063] (1) Open the evaporation chamber 20 and add raw materials into the reaction container 15 and the raw material container 14;

[0064] (2) closing the evaporation chamber 20 and starting the electron gun 30 to convert the raw material in the reaction vessel 15 into vapor for evaporation operation;

[0065] (3) When the first photoelectric sensor 193 senses the protrusion 194, it indicates that the raw material in the reaction container 15 is insufficient, and the sensing mechanism 19 moves downward;

[0066] (4) The crucible 13 rotates, causing the reaction vessel 15 to move to the feeding position;

[0067] (5) The rotating table 11 rotates to rotate the corresponding raw material container 14 to a position where the feeding port 141 can cooperate with the feeding channel 121;

[0068] (6) The pushing member 142 moves in the raw material container 14 under the action of the pushing drive assembly 18 to push the raw material in the raw material container 14 to the feeding port 141, and the raw material enters the feeding channel 121 from the feeding port 141;

[0069] (7) The raw materials in the feeding channel 121 enter the reaction vessel 15 under the action of gravity;

[0070] (8) The crucible 13 rotates to move the reaction vessel 15 to the evaporation position;

[0071] (9) The sensing mechanism 19 rises to the initial position. If the second photoelectric sensor 195 does not detect the protrusion 194, it indicates that the amount of raw material for replenishment is insufficient and the replenishment operation needs to be performed again.

[0072] The series of detailed descriptions listed above are only specific descriptions of feasible implementation methods of the present invention. They are not intended to limit the scope of protection of the present invention. Any equivalent implementation methods or changes that do not deviate from the technical spirit of the present invention should be included in the scope of protection of the present invention.

Claims

1. A crucible device, comprising a crucible, wherein a reaction vessel is provided on the crucible; It is characterized by: The crucible device also includes: A rotating table, on which a plurality of raw material containers are arranged, the rotating table being rotatable about its central axis, the plurality of raw material containers being distributed circumferentially around the central axis of the rotating table, and the raw material containers being provided with a feed port; A feeding mechanism, the feeding mechanism comprising a feeding channel, one end of the feeding channel cooperates with the feeding port, and the other end of the feeding channel is connected to the reaction container; The crucible device further includes a sensing mechanism disposed below the reaction vessel, the sensing mechanism including a support member, an elastic member, and a first photoelectric sensor. The support member is disposed between the elastic member and the reaction vessel, and is provided with a laterally protruding protrusion. The first photoelectric sensor can sense a lateral distance between the first photoelectric sensor and the support member. The sensing mechanism further includes a second photoelectric sensor, which can sense a lateral distance between the second photoelectric sensor and the support member, and the second photoelectric sensor is lower than the first photoelectric sensor.

2. The crucible device according to claim 1, characterized in that A pushing piece is provided in the raw material container. The pushing piece is in contact with the inner wall of the raw material container and can move closer to or away from the feeding port in the raw material container.

3. The crucible device according to claim 2, characterized in that The crucible device also includes a push drive assembly, which includes a movable block. The raw material container is provided with an opening on one side of the pusher's movable direction. The movable block can pass through the opening and can move closer to or away from the feeding port.

4. The crucible device according to claim 1, characterized in that The feeding mechanism comprises an upper assembly part and a lower assembly part, and the upper assembly part and the lower assembly part are detachably connected.

5. The crucible device according to claim 4, characterized in that An upper groove is provided at the bottom of the upper assembly, and a lower groove is provided at the top of the lower assembly. The upper groove corresponds to the lower groove, and the upper groove and the lower groove cooperate to form the feeding channel.

6. The crucible device according to claim 1, characterized in that The feeding port is arranged on the outer periphery of the raw material container, the height of the feeding port is higher than the height of the reaction container, and the feeding channel is arranged obliquely and the end close to the raw material container is higher than the end away from the raw material container.

7. The crucible device according to claim 1, characterized in that The reaction container is movably mounted on the crucible and its moving direction is longitudinal; the reaction container has a feeding position and a vapor deposition position, and the crucible can rotate around its central axis as a rotating axis to adjust the position of the reaction container.

8. The crucible device according to claim 7, characterized in that The sensing mechanism can be moved closer to or farther away from the reaction container.

9. A vapor deposition machine comprising a vapor deposition chamber and an electron gun disposed in the vapor deposition chamber; It is characterized by: The evaporation machine further comprises the crucible device according to any one of claims 1 to 8, the crucible and the rotating table are arranged in the evaporation chamber, and the electron beam heating area of ​​the electron gun corresponds to the position of the reaction container.

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