A polishing device

Abstract

The present invention relates to the field of precision machining technology. The present invention relates to a polishing device, and one scheme of the polishing device includes a stage, the stage is used to carry a workpiece to be processed; a liquid carrier plate and a first power component, the liquid carrier plate is connected to the output end of the first power component and can be driven to rotate by the first power component; a magnet, the magnet is used to generate a magnetic field that causes the magnetic polishing liquid to adhere to the liquid carrier plate; a slurry adding component, the slurry adding component is used to transport unused slurry to the liquid carrier plate; and a slurry recovery component, the slurry recovery component is used to collect used slurry on the liquid carrier plate. One scheme of the polishing device can realize automatic replacement of the magnetic polishing liquid, simplify the operation, and facilitate industrial use.

Description

Technical Field

[0001] The invention relates to the technical field of precision machining, in particular to a magnetic composite fluid polishing device. Background Art

[0002] Magnetic composite fluid (hereinafter referred to as MCF) polishing has been gradually applied to multiple fields. Its principle is to polish the workpiece surface with a magnetic composite fluid located in an external magnetic field. As the polishing proceeds, the magnetic composite fluid will continue to wear and consume. Therefore, it is necessary to regularly remove the used magnetic composite fluid from the liquid carrier plate and add new magnetic composite fluid to the liquid carrier plate. Most of the current polishing devices use manual replacement of the magnetic composite fluid, which is cumbersome to operate and difficult to meet the needs of industrial use. Summary of the invention

[0003] The present invention solves one of the technical problems in the related art to a certain extent. To this end, one purpose of the embodiments of the present invention is to provide a polishing device that can realize automatic replacement of magnetic polishing liquid, simplify the operation, and facilitate industrial use.

[0004] The technical solution adopted in the embodiment of the present invention is:

[0005] In a first aspect, a polishing device is provided, comprising:

[0006] A loading platform, the loading platform is used to carry a workpiece to be processed;

[0007] A liquid-carrying plate and a first power assembly, wherein the liquid-carrying plate is connected to an output end of the first power assembly and can be driven to rotate by the first power assembly;

[0008] A magnet, the magnet being used to generate a magnetic field that causes the magnetic polishing liquid to adhere to the liquid-carrying plate;

[0009] a slurry adding assembly, the slurry adding assembly being used to deliver unused slurry to the liquid carrying tray;

[0010] and a slurry recovery component, wherein the slurry recovery component is used to collect the used slurry on the liquid-carrying tray.

[0011] Furthermore, a second power assembly is included, and the magnet is connected to the output end of the second power assembly and can be driven by the second power assembly to revolve around the rotation axis of the liquid-carrying disk.

[0012] Furthermore, the slurry recovery component includes an electromagnet, a third power component and a recovery container. The electromagnet is connected to the output end of the third power component and can be driven by the third power component to move between the liquid carrying plate and the recovery container. When the electromagnet moves to above the liquid carrying plate, it is energized, and when the electromagnet moves to above the recovery container, it is de-energized.

[0013] Furthermore, it also includes a liquid carrying tray moving component, and at least two of the liquid carrying trays, the liquid carrying tray moving component includes a liquid carrying tray acquiring device corresponding to the number of the liquid carrying trays, and a fourth power component that drives the liquid carrying tray acquiring device to move, and with the drive of the fourth power component, one of the liquid carrying tray acquiring devices can separate the liquid carrying tray located at the output end of the first power component, and the other of the liquid carrying tray acquiring devices can transport the other of the liquid carrying tray to the output end of the first power component.

[0014] Furthermore, the liquid carrying pan can detach from the liquid carrying pan in a vertically upward direction, the liquid carrying pan moving assembly also includes a rotating seat, the liquid carrying pan is sequentially connected to the rotating seat along the rotation direction of the rotating base, and the fourth power assembly includes a rotating power device for driving the rotating seat to rotate, and a lifting power device for driving the rotating power device to lift and lower in a vertical direction.

[0015] Furthermore, a positioning hole extending in a vertical direction is provided on the output end of the first power component, and the liquid carrying pan comprises a bearing part, a connecting part and a positioning column, the connecting part is provided at the bottom of the bearing part and has a diameter smaller than the bearing part, the positioning column is provided at the bottom of the connecting part and extends in a vertical direction, the liquid carrying pan rotates synchronously with the output end of the first power component when the positioning column is inserted into the positioning hole, and the liquid carrying pan is detached from the output end of the first power component after the positioning column is pulled out of the positioning hole in a vertical upward direction, and the liquid carrying pan obtaining device comprises a retaining ring with a notch, the width of the notch is larger than the maximum width of the connecting part, and the inner ring diameter of the retaining ring is larger than the diameter of the connecting part and smaller than the diameter of the bearing part.

[0016] Furthermore, it also includes a sensor, and a trigger device and a positioning hole extending in the vertical direction are provided on the output end of the first power component, and a positioning column extending in the vertical direction extends from the liquid carrying plate. The trigger device triggers the sensor after rotating a set number of circles and to a set position, so that the output end of the first power component stops in a current state, and the liquid carrying plate moves in the vertical direction relative to the output end of the first power component, so that the positioning column is inserted into the positioning hole, or the positioning column is pulled out of the positioning hole.

[0017] Furthermore, it also includes a fifth power component, the sample carrier is connected to the output end of the fifth power component, the sample carrier is arranged above the liquid carrier tray, and can be driven by the fifth power component to move in a vertical direction relative to the liquid carrier tray.

[0018] Furthermore, the slurry adding component includes a liquid storage container, a switching device, a pump and a pipeline. The suction port of the pump is connected to the liquid storage container through the pipeline. The pump cyclically performs start and stop operations, and the switching device cuts off the pipeline at time t1 after the pump is turned on, and the pump stops at time t2 after being turned on, and t2 is later than t1.

[0019] Furthermore, the slurry adding component includes a vibrating liquid storage container.

[0020] Beneficial effects of the embodiments of the present invention:

[0021] The embodiment of the present invention can realize automatic replacement of magnetic polishing liquid by arranging a stage, a liquid carrier plate, a first power component, a magnet, a slurry adding component and a slurry recovery component, thereby simplifying the operation and facilitating industrial use. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 is a top view layout diagram of the first embodiment;

[0023] Figure 2 is a partial cross-sectional view of a side view of the first embodiment;

[0024] Figure 3 is a cross-sectional view of the connection between the first power assembly and the liquid carrier plate of the first embodiment;

[0025] Figure 4 is a cross-sectional view of the connection between the liquid carrier tray moving assembly and the liquid carrier tray in the first embodiment;

[0026] Figure 5 is a cross-sectional view of the connection between the slurry recovery assembly, the liquid carrier plate and the liquid carrier plate moving assembly of the first embodiment;

[0027] Figure 6 It is a cross-sectional view of the connection between the first power assembly and the liquid carrier plate of the second embodiment. DETAILED DESCRIPTION

[0028] This section will describe the embodiments of the present invention in detail. The embodiments of the present invention are shown in the accompanying drawings. The purpose of the accompanying drawings is to supplement the description of the text part of the specification with graphics, so that each technical feature and the overall technical solution of the embodiments of the present invention can be understood intuitively and figuratively, but they cannot be understood as limiting the scope of protection of the present invention.

[0029] In the description of the present invention, if it involves a description of orientation, for example, the orientation or position relationship indicated by "upper", "lower", "front", "back", "left", "right", etc. is based on the orientation or position relationship shown in the drawings, which is only for the convenience of describing the present invention and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation of the present invention. If a feature is referred to as being "set", "fixed", or "connected" to another feature, it may be directly set, fixed, or connected to the other feature, or it may be indirectly set, fixed, or connected to the other feature.

[0030] In the description of the embodiments of the present invention, if "several" is involved, it means more than one, if "multiple" is involved, it means more than two, if "greater than", "less than" or "exceed" is involved, it should be understood as not including the number itself, if "above", "below" or "within" is involved, it should be understood as including the number itself. If "first" or "second" is involved, it should be understood as being used to distinguish technical features, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features or implicitly indicating the order of the indicated technical features.

[0031] In addition, unless otherwise defined, the technical terms and scientific terms used in the embodiments of the present invention have the same meanings as those commonly understood by those skilled in the art. The terms used in the present invention are only for describing specific embodiments, not for limiting the present invention.

[0032] First embodiment

[0033] Reference Figure 1 , Figure 2 , Figure 1 shows a top view of the first embodiment, Figure 2 The partial cross-sectional view of the side view of the first embodiment is shown. As shown in the figure, the present embodiment includes a liquid carrier plate 100, a first power assembly 200, a fifth power assembly 300, a slurry adding assembly 400, a slurry recovery assembly 500, a liquid carrier plate moving assembly 600 and a base 700. In addition, the present embodiment also includes Figure 1 The liquid carrier plate 100 is used to carry the magnetic polishing liquid for polishing. The liquid carrier plate 100 is connected to the output end of the first power assembly 200 and can be driven to rotate by the first power assembly 200. Figure 1In the direction shown in , the fifth power assembly 300 is located above the first power assembly 200, and the output end of the fifth power assembly 300 is connected to a stage, which is used to carry the workpiece to be processed. The stage in this embodiment is arranged above the liquid carrier 100, and can be driven by the fifth power assembly 300 to move in the vertical direction relative to the liquid carrier 100. When the stage is lowered to a set height until the workpiece to be processed contacts the magnetic composite fluid on the liquid carrier 100, polishing can be achieved. The magnet is located below the liquid carrier 100, and is used to generate an external magnetic field to make the magnetic composite fluid adhere to the liquid carrier 100. The magnet in this embodiment is a permanent magnet, and the magnetic polishing liquid is a magnetic composite fluid. The liquid carrier moving assembly 600 is located below the first power assembly 200, and is used to transfer the liquid carrier 100 that needs to recover the magnetic composite fluid to the recovery position, and transfer the empty liquid carrier 100 to the output end of the first power assembly 200, and improve the processing efficiency of the polishing device through the recycling of the liquid carrier 100. The slurry adding assembly 400 and the slurry recovery assembly 500 are both located on the right side of the first power assembly 200 . The slurry adding assembly 400 is used to transport unused slurry to the liquid carrier plate 100 , while the slurry recovery assembly 500 is used to collect used slurry on the liquid carrier plate 100 .

[0034] Reference Figure 1 , Figure 3 , Figure 3 A cross-sectional view of the connection between the first power assembly and the liquid carrying plate of this embodiment is shown. As shown in the figure, the liquid carrying plate 100 is circular, and the first power assembly 200 includes a motor 210, a driving wheel 220, a belt 230 and a driven wheel 240. The motor 210 is fixed on the base 700. The driven wheel 240 serves as the output end of the first power assembly 200, is rotatably connected to the base 700 through a bearing, and is connected to the driving wheel 220 fixed on the rotating shaft of the motor 210 through a belt 230. When the motor 210 rotates, the driven wheel 240 is driven to rotate through the belt 230.

[0035] The upper end surface of the driven wheel 240 is provided with a positioning hole 241 extending in the vertical direction, and a positioning column 110 extending in the vertical direction extends from the bottom of the liquid carrying plate 100. There are two positioning holes 241 and two positioning columns 110. When the positioning column 110 is inserted into the positioning hole 241, the liquid carrying plate 100 can rotate synchronously with the driven wheel 240. When the positioning column 110 is pulled out of the positioning hole 241 in the upward direction, the liquid carrying plate 100 is separated from the driven wheel 240, that is, the liquid carrying plate 100 can both rotate synchronously with the liquid carrying plate 100 and be separated from the liquid carrying plate 100 in the vertical upward direction.

[0036] Reference Figure 1 , Figure 4 , Figure 4A cross-sectional view of the connection between the liquid carrier tray moving assembly and the liquid carrier tray in this embodiment is shown. As shown in the figure, the liquid carrier tray moving assembly 600 includes a rotating seat 610, two liquid carrier tray acquisition devices 620 and a fourth power assembly. In this embodiment, a rotating shaft 611 extends from the bottom of the rotating seat 610, and two connecting arms 612 extend symmetrically in the horizontal direction from the top, and the end of each connecting arm 612 is connected to the liquid carrier tray acquisition device 620. The fourth power assembly includes a rotating power device (not shown) for driving the rotating seat 610 to rotate, and a lifting power device (not shown) for driving the rotating power device to rise and fall in the vertical direction, that is, the liquid carrier tray acquisition device 620 can both rotate around the axis of the rotating shaft 611 and rise and fall in the vertical direction.

[0037] Reference Figure 1 , the liquid carrier plate obtaining device 620 is a semicircular clamp ring, and a notch is formed on one side of the clamp ring. Figure 4 The liquid carrier 100 further includes a bearing portion 120 and a connecting portion 130. The connecting portion 130 is located at the bottom of the bearing portion 120 and has a diameter smaller than the diameter of the bearing portion 120. The positioning column 110 is located at the bottom of the connecting portion 130. The width of the notch of the snap ring is larger than the maximum width (diameter) of the connecting portion 130. At the same time, the inner diameter of the snap ring is larger than the diameter of the connecting portion 130 and smaller than the diameter of the bearing portion 120. In this way, when the snap ring is located at the same height as the connecting portion 130, the connecting portion 130 can be inserted into the snap ring by horizontal movement of the snap ring, and then the snap ring can move upward to lift the liquid carrier 100.

[0038] Reference Figure 1 , Figure 5 , Figure 5 The cross-sectional view of the connection between the slurry recovery assembly, the liquid carrier plate and the liquid carrier plate moving assembly of this embodiment is shown. As shown in the figure, the slurry recovery assembly 500 includes an electromagnet 510, a third power assembly 520 and a recovery container ( Figure 1 , Figure 5 The third power assembly 520 includes a motor-screw drive device arranged in the horizontal direction. The electromagnet 510 is driven by the third power assembly 520 to slide horizontally. When the electromagnet 510 slides to the top of the liquid carrier tray 100, the electromagnet 510 is energized to absorb the magnetic composite fluid on the liquid carrier tray 100. When the electromagnet 510 slides to the top of the recovery container, the electromagnet 510 is de-energized, and the absorbed magnetic composite fluid falls into the recovery container under the action of gravity.

[0039] Reference Figure 1The slurry adding component 400 includes a nozzle 410, a pump 420, a liquid storage container 430 and a pipeline 440. The nozzle 410 and the pump 420, as well as the pump 420 and the liquid storage container 430 are connected through the pipeline 440. The nozzle 410 is located above the driven wheel 240 and can spray the magnetic composite fluid onto the liquid carrier plate 100 fixed on the driven wheel 240.

[0040] In addition, this embodiment also provides a human-machine interaction interface to facilitate operators to control polishing parameters.

[0041] Based on the above structure, and referring to Figure 1 , the workflow of this embodiment is:

[0042] First, an empty liquid carrier pan 100 (referred to as the first liquid carrier pan) is fixed on the driven wheel 240, and the magnetic composite fluid is sprayed onto the empty liquid carrier pan 100 through the slurry adding assembly 400. The workpiece to be processed is fixed to the bottom of the stage by bonding or other means, and the liquid carrier pan moving assembly 600 stays at Figure 1 In the state shown, the first liquid loading tray acquisition device 620 (referred to as the first liquid loading tray acquisition device) on the left side of the liquid loading tray moving assembly 600 is in an empty state, and an empty second liquid loading tray 100 (referred to as the second liquid loading tray, Figure 1 not shown).

[0043] Then the fifth power assembly 300 is started to drive the stage to move downward, and the first power assembly 200 is started to drive the first liquid carrier plate to rotate until the workpiece to be processed contacts the magnetic composite fluid for polishing. After polishing for a certain period of time, the rotary power device of the liquid carrier plate moving assembly 600 is started to drive the rotating seat 610 to move along the surface of the workpiece. Figure 1 The first liquid tray is rotated 90° clockwise in the driven wheel 240 until the connecting portion of the first liquid tray on the driven wheel 240 is inserted into the first liquid tray acquisition device. Then the lifting power device of the liquid tray moving assembly 600 is started, and the first liquid tray acquisition device drives the first liquid tray to move upward and disengage from the driven wheel 240. Then the rotating power device is started to drive the rotating seat 610 to move along the driven wheel 240. Figure 1 The second liquid tray acquisition device drives the second liquid tray to move above the driven wheel 240, and then the lifting power device is started. The second liquid tray acquisition device drives the second liquid tray to move downward until the second liquid tray is fixed on the driven wheel 240, and then the second liquid tray acquisition device is reset upward, and the rotating power device is started to drive the rotating seat 610 along Figure 1The first liquid carrier plate is rotated 90° counterclockwise, and the first liquid carrier plate acquisition device drives the first liquid carrier plate to move to the bottom of the electromagnet 510. The electromagnet 510 is powered on to absorb the magnetic composite fluid on the first liquid carrier plate, so that the first liquid carrier plate is in an empty state. Then the electromagnet 510 moves to the top of the recovery container and is powered off. The absorbed magnetic composite fluid falls into the recovery container under the action of gravity. Repeating the above process can realize the automatic replacement of the magnetic composite fluid. This embodiment can realize the simultaneous polishing and recycling work, which is conducive to improving the polishing efficiency.

[0044] Second embodiment

[0045] This embodiment is an improved embodiment of the first embodiment. Figure 6 , Figure 6 A cross-sectional view of the connection between the first power assembly and the liquid carrier plate of this embodiment is shown. As shown in the figure, the second power assembly 800 is also included. The second power assembly 800 includes a motor 810, a magnet fixing seat 820, a coupling 830 and a bearing 840. The motor 810 is installed on the base 700. The driving shaft of the motor 810 is fixedly connected to the lower end connecting shaft of the magnet fixing seat 820 through the coupling 830. The magnet fixing seat 820 is rotatably connected to the base 700 through the bearing 840. The magnet 900 is installed on the upper end surface of the magnet fixing seat 820, and the magnet 900 deviates from the rotation axis of the magnet fixing seat 820. In this embodiment, the rotation axis of the magnet fixing seat 820 coincides with the rotation axis of the liquid carrier plate 100, that is, the magnet 900 revolves around the rotation axis of the liquid carrier plate 100, so that the magnetic composite fluid can be stirred.

[0046] Third embodiment

[0047] The present embodiment is an improved embodiment of the first embodiment. Since the liquid carrying pan 100 and the driven wheel 240 in the first embodiment are connected by positioning columns and positioning holes, and the liquid carrying pan 100 is transplanted by the liquid carrying pan moving assembly 600, the position of the positioning columns thereon is relatively fixed. Therefore, it is only necessary to fix the position of the positioning holes on the driven wheel 240 to achieve the docking of the liquid carrying pan 100 and the driven wheel 240 at a fixed position. The present embodiment provides a positioning method for the driven wheel 240. A black line is provided on the liquid carrying pan 100 as a trigger device, and a black and white line sensor is fixed on the base 700. When the liquid carrying pan 100 rotates to a set number of circles (it is considered that the magnetic composite fluid needs to be replaced at this time), when the liquid carrying pan 100 rotates again until the black line triggers the black and white line sensor, the driven wheel 240 stops rotating. Since the position of the black and white line sensor is fixed, the driven wheel 240 can be stationary at the same fixed position every time.

[0048] Fourth embodiment

[0049] This embodiment is an improved embodiment of the first embodiment. In order to make the volume of the magnetic composite fluid sprayed each time constant, this embodiment controls the cyclic start and stop of the pump through a single chip microcomputer. It takes 2 seconds for the suction port of the pump to absorb 1 ml of the magnetic composite fluid each time, and it takes 5 seconds for the magnetic composite fluid to spray 1 ml from the outlet of the pump. If the pump opening time is set to 5 seconds, the magnetic composite fluid sucked by the suction port of the pump is greater than 1 ml, and the excess magnetic composite fluid is retained in the pipeline. After a long time, it will deteriorate and affect the polishing effect. In order to solve the above problem, this embodiment adds an electromagnetic valve as a switching device on the pipeline between the suction port of the pump and the liquid storage container. The electromagnetic valve is set to cut off the pipeline at t1 time after the pump is turned on, and the pump stops at t2 time after it is turned on. t2 is later than t1, that is, when the magnetic composite fluid sucked by the pump reaches the required amount, the electromagnetic valve cuts off the pipeline, and the pump stops sucking the magnetic composite fluid in the liquid storage container. At the same time, the pump continues to run until all the magnetic composite fluid in the pipeline is sprayed clean, so that the retention of the magnetic composite fluid can be avoided.

[0050] Fifth embodiment

[0051] This embodiment is an improved embodiment of the first embodiment. The difference between this embodiment and the first embodiment is that the liquid storage container adopts a vibrating container, such as a vortex vibrator. The high-frequency vibration of the vortex vibrator drives the magnetic composite fluid in the liquid storage container to vibrate, thereby preventing the abrasive particles and hydroxyl iron powder from aggregating, so that the magnetic composite fluid maintains good polishing performance.

[0052] Sixth embodiment

[0053] This embodiment is an improved embodiment of the first embodiment. The difference between this embodiment and the first embodiment is that the liquid storage container and the recovery container are connected, and the used magnetic composite fluid in the recovery container will flow back to the liquid storage container to achieve the recycling of the magnetic composite fluid.

[0054] Seventh embodiment

[0055] This embodiment is an alternative embodiment of the first embodiment. The difference between this embodiment and the first embodiment is that no liquid carrier plate moving component is provided, and only one liquid carrier plate 100 is provided. When the magnetic composite fluid needs to be replaced, the electromagnet 510 directly moves to the top of the liquid carrier plate 100 to absorb the used magnetic composite fluid.

[0056] The above is a specific description of the embodiments of the present invention, but the present invention is not limited to the embodiments. Those skilled in the art can make various equivalent modifications or substitutions without violating the spirit of the present invention, and these equivalent modifications or substitutions are all included in the scope defined by the claims of this application. In addition, the embodiments of the present invention and the features in the embodiments can be combined with each other without conflict.

Claims

1. A polishing device, characterized in that: include A loading platform, the loading platform is used to carry a workpiece to be processed; A liquid-carrying plate and a first power assembly, wherein the liquid-carrying plate is connected to an output end of the first power assembly and can be driven to rotate by the first power assembly; A magnet, the magnet being used to generate a magnetic field that causes the magnetic polishing liquid to adhere to the liquid-carrying plate; a slurry adding assembly, the slurry adding assembly being used to deliver unused slurry to the liquid carrying tray; and a slurry recovery component, the slurry recovery component is used to collect the used slurry on the liquid-carrying tray; It also includes a liquid-carrying tray moving assembly, and at least two of the liquid-carrying trays, the liquid-carrying tray moving assembly includes liquid-carrying tray obtaining devices corresponding to the number of the liquid-carrying trays, and a fourth power assembly driving the liquid-carrying tray obtaining devices to move, and with the driving of the fourth power assembly, one of the liquid-carrying tray obtaining devices can separate the liquid-carrying tray located at the output end of the first power assembly, and the other of the liquid-carrying tray obtaining devices can transport the other of the liquid-carrying trays to the output end of the first power assembly; The liquid-carrying tray can be separated from the output end of the first power assembly in a vertically upward direction, the liquid-carrying tray moving assembly further comprises a rotating seat, the liquid-carrying tray is sequentially connected to the rotating seat along the rotation direction of the rotating seat, and the fourth power assembly comprises a rotating power device for driving the rotating seat to rotate, and a lifting power device for driving the rotating power device to lift in a vertical direction; A positioning hole extending in a vertical direction is provided on the output end of the first power component, the liquid carrying pan comprises a bearing part, a connecting part and a positioning column, the connecting part is provided at the bottom of the bearing part and has a diameter smaller than the bearing part, the positioning column is provided at the bottom of the connecting part and extends in a vertical direction, the liquid carrying pan rotates synchronously with the output end of the first power component when the positioning column is inserted into the positioning hole, the liquid carrying pan is detached from the output end of the first power component after the positioning column is pulled out of the positioning hole in a vertical upward direction, the liquid carrying pan obtaining device comprises a retaining ring with a notch, the width of the notch is greater than the maximum width of the connecting part, the inner ring diameter of the retaining ring is greater than the diameter of the connecting part and smaller than the diameter of the bearing part.

2. The polishing device according to claim 1, characterized in that: The device further comprises a second power assembly, wherein the magnet is connected to an output end of the second power assembly and can be driven by the second power assembly to revolve around the rotation axis of the liquid-carrying disk.

3. The polishing device according to claim 2, characterized in that: The slurry recovery component includes an electromagnet, a third power component and a recovery container. The electromagnet is connected to the output end of the third power component and can be driven by the third power component to move between the liquid carrying plate and the recovery container. When the electromagnet moves to the top of the liquid carrying plate, it is energized, and when the electromagnet moves to the top of the recovery container, it is de-energized.

4. The polishing device according to claim 1, characterized in that: It also includes a sensor, and a trigger device and a positioning hole extending in a vertical direction are provided on the output end of the first power component. A positioning column extending in a vertical direction extends from the liquid carrying plate. The trigger device triggers the sensor after rotating a set number of circles and to a set position, so that the output end of the first power component stops in a current state, and the liquid carrying plate moves in a vertical direction relative to the output end of the first power component, so that the positioning column is inserted into the positioning hole, or the positioning column is pulled out of the positioning hole.

5. The polishing device according to claim 1, characterized in that: It also includes a fifth power assembly, the carrier is connected to the output end of the fifth power assembly, the carrier is arranged above the liquid carrier tray, and can be driven by the fifth power assembly to move in a vertical direction relative to the liquid carrier tray.

6. The polishing device according to claim 1, characterized in that: The slurry adding component includes a liquid storage container, a switch device, a pump and a pipeline. The suction port of the pump is connected to the liquid storage container through the pipeline. The pump cyclically performs start and stop operations, and the switch device cuts off the pipeline at time t1 after the pump is turned on. The pump stops at time t2 after being turned on, and t2 is later than t1.

7. The polishing device according to claim 1, characterized in that: The slurry addition assembly includes a vibrating liquid storage container.

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