Rotary table limiting device and initialization method thereof

Abstract

The application relates to the field of semiconductor silicon wafer manufacturing and detection, and discloses a rotary table limiting device and an initialization method thereof. The rotary table limiting device comprises a limiting fixing part and a limiting trigger part. The limiting fixing part comprises a base, a guide part, a limiting block and a magnetic assembly. The base is configured to be mounted on a fixed component of a rotary table. The base is provided with a first limiting position and a second limiting position. The guide part is mounted on the base. The limiting block is movably connected with the guide part. The limiting block can move along the guide part between the first limiting position and the second limiting position. The magnetic assembly is used for adsorbing the limiting block to the first limiting position or the second limiting position. The limiting trigger part is configured to be mounted on a rotating component of the rotary table. When the limiting trigger part rotates with the rotating component, the limiting trigger part can be in contact with the limiting block and drive the limiting block to move. The application reduces the size of the rotary limiting mechanism, ensures the stability of the limiting block, and avoids the shaking of the limiting block when the limiting block is impacted.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of semiconductor silicon wafer manufacturing and detection, and in particular to a rotary table limiting device and an initialization method thereof. BACKGROUND

[0002] In the field of semiconductor silicon wafer manufacturing and detection, a rotary table is needed to rotate and position a silicon wafer. When there are too many internal lines and pipelines in the rotary table, unlimited rotation of the rotary table may cause the lines or pipelines to be pulled off. Therefore, a rotary table limiting device is needed to limit the rotary motion of the rotary table while ensuring that the rotatable angle of the rotary table exceeds 360 degrees.

[0003] The existing rotary table limiting device occupies a large space and is not suitable for small rotary tables with limited size and space. Moreover, when the rotary table is placed on a planar motion device with large acceleration impact, the swing member of the existing rotary table limiting device cannot be fixed, and the swing will affect the positioning accuracy of the rotary table.

[0004] In summary, to solve the problems of the existing rotary limiting mechanism, such as large size and swing under large acceleration impact of planar motion, a rotary table limiting device and an initialization method thereof are needed. SUMMARY

[0005] Based on the above, the purpose of the present application is to provide a rotary table limiting device and an initialization method thereof to solve the problems of the existing rotary limiting mechanism, such as large size and instability under large acceleration impact of planar motion.

[0006] To achieve the above purpose, the present application adopts the following technical solutions:

[0007] A rotary table limiting device includes a limiting and fixing member and a limiting trigger member. The limiting and fixing member includes a base, a guide member, a limiting block, and a magnetic assembly. The base is configured to be installed on a fixed component of the rotary table. The base is provided with a first limiting position and a second limiting position. The guide member is installed on the base. The limiting block is movably connected with the guide member and can move along the guide member between the first limiting position and the second limiting position. The magnetic assembly is used to attract the limiting block to the first limiting position or the second limiting position. The limiting trigger member is configured to be installed on a rotating component of the rotary table. When the limiting trigger member rotates with the rotating component, it can contact the limiting block and drive the limiting block to move along the guide member between the first limiting position and the second limiting position.

[0008] As a preferred scheme of the rotary table limiting device, the limiting block can make the rotary table rotate more than 360° in the same direction by cooperating with the first limiting position and the second limiting position.

[0009] As a preferred scheme of the rotary table limiting device, the magnetic assembly comprises a limiting magnet, which is installed on the base and / or the limiting block.

[0010] As a preferred scheme of the rotary table limiting device, the base further comprises two opposite mounting seats, and the limiting block and the guide are arranged between the two mounting seats; the first limiting position and the second limiting position are arranged on opposite sides of the two mounting seats respectively, and the two limiting magnets are installed on the first limiting position and the second limiting position respectively.

[0011] As a preferred scheme of the rotary table limiting device, the guide comprises a slidingly connected guide rail and a sliding block, the guide rail is installed on one of the limiting block and the base, the sliding block is installed on the other one of the limiting block and the base, and the limiting block can slide relative to the base.

[0012] As a preferred scheme of the rotary table limiting device, the base further comprises a mounting groove, the first limiting position and the second limiting position are arranged on opposite sides of the mounting groove respectively, the limiting block is rotatably installed in the mounting groove through the guide, and the two limiting magnets are embedded on two sides of the limiting block respectively.

[0013] As a preferred scheme of the rotary table limiting device, the guide comprises a bearing, the inner ring of the bearing is fixedly connected with the base, and the outer ring of the bearing is fixedly connected with the limiting block, so that the limiting block can rotate relative to the base; or the outer ring of the bearing is fixedly connected with the base, and the inner ring of the bearing is fixedly connected with the limiting block, so that the limiting block can rotate relative to the base.

[0014] As a preferred scheme of the rotary table limiting device, the guide further comprises a bearing limiting piece for limiting the axial direction of the bearing, and the bearing limiting piece is fixedly connected with the base.

[0015] As a preferred scheme of the rotary table limiting device, the limiting fixing piece further comprises a buffer piece, which is installed on the base and / or the limiting block, and is used for buffering the movement of the limiting block.

[0016] As a preferred scheme of the rotary table limiting device, the buffer piece is a rubber pad.

[0017] A kind of initialization method of rotary table limiting device, for the rotary table limiting device described in any of the above schemes, including the following steps:

[0018] System initialization starts;

[0019] Driving force along the first direction is applied, so that rotary table rotates along the first direction;

[0020] Whether the position feedback of the rotary table changes is detected, if yes, then return to the previous step, if no, then proceed to the next step;

[0021] Driving force along the second direction is applied, so that the rotary table rotates along the second direction;

[0022] Whether the position feedback of the rotary table changes is detected, if yes, then return to the previous step, if no, then proceed to the next step;

[0023] Whether the angle of the rotary table rotating along the second direction is greater than 360 ° is detected, if yes, then driving force along the first direction is applied, so that the rotary table rotates along the first direction to zero position, at this time initialization is successful;If no, then initialization fails.

[0024] The beneficial effects of the present application are:

[0025] The guide piece of the present application is installed on the base, the limiting block is connected with the guide piece, the limiting block is moved between the first limiting position and the second limiting position of the base by the limiting trigger piece, the rotation angle of the rotary table along the same direction is greater than 360 °, the above structure is simple and compact, which greatly reduces the size of the rotation limiting mechanism;The limiting block is firmly adsorbed at the first limiting position or the second limiting position by the magnetic force of the magnetic assembly, so that the limiting block can be stably fixed after reaching the limiting position, the shaking problem of the limiting block under the condition of large acceleration impact of plane motion is avoided, and the positioning accuracy of the rotary table is improved. BRIEF DESCRIPTION OF DRAWINGS

[0026] Figure 1 It is the structure schematic view of the rotary table limiting device provided by the embodiment one of the present application;

[0027] Figure 2 It is the structure schematic view of the limiting fixing piece in the rotary table limiting device provided by the embodiment one of the present application;

[0028] Figure 3 It is Figure 2 The sectional view of the limiting fixing piece shown in the figure;

[0029] Figure 4 It is the structure schematic view of the rotary table limiting device provided by the embodiment two of the present application;

[0030] Figure 5is a structure diagram of a limiting fixing part in a rotary table limiting device provided by the second embodiment of the present application;

[0031] Figure 6 is Figure 5 is a sectional view of the limiting fixing part shown in the figure;

[0032] Figure 7 is a flow chart of an initialization method of a rotary table limiting device provided by the third embodiment of the present application.

[0033] The reference signs in the figure are as follows:

[0034] 1, limiting fixing part; 11, base; 111, first limiting position; 112, second limiting position; 113, mounting seat; 114, mounting groove; 12, guide part; 121, guide rail; 122, sliding block; 123, bearing; 124, bearing limiting part; 13, limiting block; 14, magnetic assembly; 15, buffer part; 2, limiting trigger part; 100, fixing assembly; 200, rotating assembly. DETAILED DESCRIPTION

[0035] The present application will be further described below in conjunction with the drawings and embodiments. It can be understood that the specific embodiments described herein are only used to explain the present application, but not to limit the present application. In addition, it should be noted that, for the convenience of description, only the parts related to the present application are shown in the drawings, but not all the structures.

[0036] In the description of the present application, unless otherwise explicitly specified and limited, the terms "connected", "connected", "fixed" should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or it can be integrated; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium; it can be the internal communication of two elements or the interaction relationship between two elements. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0037] In the present application, unless otherwise explicitly specified and limited, the "upper" or "lower" of the first feature to the second feature can include the direct contact of the first and second features, or can include the contact of the first and second features through another feature between them. Moreover, the "upper", "upper" and "upper" of the first feature to the second feature include the vertical and oblique upward of the first feature to the second feature, or only indicate that the horizontal height of the first feature is higher than that of the second feature. The "lower", "lower" and "lower" of the first feature to the second feature include the vertical and oblique downward of the first feature to the second feature, or only indicate that the horizontal height of the first feature is less than that of the second feature.

[0038] In the description of this embodiment, the terms "upper," "lower," "left," "right," etc., refer to the orientation or positional relationship shown in the accompanying drawings. They are used only for ease of description and simplification of operation, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the present invention. In addition, the terms "first" and "second" are used only for distinction in description and have no special meaning.

[0039] Example 1

[0040] like Figures 1-3 As shown, this embodiment of the invention provides a rotary table limiting device to limit the rotation angle of the rotary table and prevent the risk of tearing lines or pipes due to unrestricted rotation. The rotary table involved in this embodiment includes a fixed component 100 and a rotating component 200. The fixed component 100 is a platform extending along the XY plane on its top surface, and its position is fixed and cannot rotate. The rotating component 200 is located in the middle region of the fixed component 100 and can be driven by a motor or other drive mechanism to rotate around the Z-axis. The rotary table limiting device includes a limiting fixing member 1 disposed on the fixed component 100 of the rotary table and a limiting trigger member 2 disposed on the rotating component 200 of the rotary table. The rotation of the rotary table is limited by the cooperation of the limiting fixing member 1 and the limiting trigger member 2. Specifically, the limiting and fixing component 1 includes a base 11, a guide 12, a limiting block 13, and a magnetic component 14. The base 11 is fixed to the fixing component 100 of the rotary table, and the base 11 has a first limiting position 111 and a second limiting position 112. The guide 12 is installed on the base 11 and is located between the first limiting position 111 and the second limiting position 112. The limiting block 13 is movably connected to the guide 12 and can move along the guide 12 between the first limiting position 111 and the second limiting position 112. The magnetic component 14 is installed on the limiting block 13 or the base 11 to attract the limiting block 13 to the first limiting position 111 or the second limiting position 112, so that the limiting block 13 is fixed at the corresponding limiting position, and under the impact of the rotational force of the limiting trigger 2, it prevents the limiting block 13 from generating a strong reaction force at the first limiting position 111 or the second limiting position 112, thus preventing rebound. In this embodiment, the limiting trigger 2 can be a trigger rod or similar structure, and is fixed to the top of the rotating assembly 200. The limiting trigger 2 can rotate with the rotating assembly 200 and comes into contact with the limiting block 13 during rotation. When the driving force of the rotating table is greater than the attraction force of the magnetic component 14, the limiting trigger 2 can push the limiting block 13 from the first limiting position 111 to the second limiting position 112 or from the second limiting position 112 to the first limiting position 111. In this embodiment, through the cooperation of the limiting block 13 with the first limiting position 111 and the second limiting position 112, the rotating table can rotate at an angle greater than 360° in the same direction.

[0041] like Figures 2-3 As shown, in this embodiment of the invention, the base 11 further includes two opposing mounting seats 113. The mounting seats 113 are components extending upwards from the base 11 and can be integrally or separately disposed with the base 11. The limiting block 13 and the guide member 12 are both disposed between the two mounting seats 113. The first limiting position 111 and the second limiting position 112 are respectively disposed on opposite sides of the two mounting seats 113. Preferably, in this embodiment, both the mounting seats 113 and the limiting block 13 are provided with weight-reducing grooves to reduce structural weight and save manufacturing costs. Further, the magnetic component 14 includes limiting magnets, which are embedded in the base 11 and / or the limiting block 13. Optionally, in this embodiment, the two limiting magnets are respectively embedded on opposite sides of the two mounting seats 113, i.e., located at the first limiting position 111 and the second limiting position 112, while the limiting block 13 is made of metal to achieve attraction between the limiting block 13 and the corresponding limiting magnet. Furthermore, the guide member 12 includes a slider 122 and a guide rail 121 that are slidably connected. The guide rail 121 is mounted on one of the limiting block 13 and the base 11, and the slider 122 is mounted on the other of the limiting block 13 and the base 11, thereby allowing the limiting block 13 to slide relative to the base 11. Optionally, in this embodiment, the guide rail 121 is a linear guide rail and is fixed to the base 11. The slider 122 is fixedly connected to the bottom of the limiting block 13. This arrangement allows the limiting block 13 to move stably along the linear guide rail between the first limiting position 111 and the second limiting position 112.

[0042] This invention, through the use of linear guides to guide the limiting block 13 and the placement of limiting magnets at the first limiting position 111 and the second limiting position 112, significantly reduces the size of the rotary limiting mechanism, resulting in a smaller footprint and better meeting the needs of small rotary tables. The invention employs the magnetic force of the limiting magnets to firmly attract the limiting block 13, ensuring its stable fixation once it reaches the limiting position. This avoids problems such as wobbling of the limiting block 13 under the impact of large accelerations in planar motion, thus improving the positioning accuracy of the rotary table.

[0043] The limiting and fixing component 1 in this embodiment also includes a buffer component 15, which is installed on the base 11 and / or the limiting block 13 to prevent collisions caused by hard contact between the limiting block 13 and the first limiting position 111 and the second limiting position 112. Optionally, as Figure 2 and Figure 3 As shown, in this embodiment, the buffer 15 is respectively installed on two opposite sides of the two mounting bases 113, that is, at the first limiting position 111 and the second limiting position 112. The buffer 15 can be ring-shaped and partially cover the magnetic component 14 (e.g., Figure 2The buffering member 15 can be a rubber pad, an elastic colloid, foam, a sponge pad, etc., and can be selected according to actual requirements.

[0044] The working process of the embodiment one of the application is as follows:

[0045] As shown in Figure 1 , Figure 2 When the rotating table rotates clockwise, the limiting trigger 2 is rotated together, and is rotated to touch the limiting block 13, drives the limiting block 13 to overcome the magnetic attraction of the limiting magnet at the first limiting position 111, and drives the limiting block 13 to move along the linear guide to the second limiting position 112, and is fixed by being attracted to the limiting magnet at the second limiting position 112.

[0046] When the rotating table rotates counterclockwise, the limiting trigger 2 is rotated together, and is rotated to touch the limiting block 13, drives the limiting block 13 to overcome the magnetic attraction of the limiting magnet at the second limiting position 112, and drives the limiting block 13 to move along the linear guide to the first limiting position 111, and is fixed by being attracted to the limiting magnet at the first limiting position 111.

[0047] The limiting magnet at the first limiting position 111 and the second limiting position 112 can make the rotating table as a whole remain fixed and not shake when subjected to a large acceleration impact, so as to ensure that the limiting device does not affect the overall positioning accuracy of the rotating table.

[0048] Embodiment two

[0049] As shown in Figures 4-6 The embodiment of the application provides another rotating table limiting device, which has basically the same structure as the rotating table positioning device in the embodiment one, and the difference lies in that the base 11 and the guide 12 are arranged differently. The same structure as the embodiment one will not be described in detail, and only the difference will be described.

[0050] In the embodiment, the base 11 is provided with a mounting groove 114, the bottom of the mounting groove 114 is a U-shaped groove, the upper part of the mounting groove 114 extends outward along the two sides of the U-shaped groove, the two inclined walls form a first limiting position 111 and a second limiting position 112 respectively, and the top of the mounting groove 114 is in an open state. The bottom end of the limiting block 13 is rotatably installed in the U-shaped groove, and the upper part of the limiting block 13 is provided with two flat surfaces on the two sides, which are used for cooperating with the first limiting position 111 and the second limiting position 112 of the base 11 respectively. In the embodiment, a magnetic component 14 is also provided, which is used for adsorbing the limiting block 13 to the first limiting position 111 or the second limiting position 112. Alternatively, the magnetic component 14 of the embodiment includes a limiting magnet, and the limiting magnet can be provided with one or more pieces, and two pieces are preferably provided in the embodiment. The two limiting magnets are embedded on the two sides of the upper part of the limiting block 13, and the base 11 is made of metal, so that the limiting block 13 is attracted to the first limiting position 111 and the second limiting position 112. The guide 12 of the embodiment includes a bearing 123, the inner ring of the bearing 123 is fixedly connected with the base 11, and the outer ring of the bearing 123 is fixedly connected with the limiting block 13, so that the limiting block 13 can rotate smoothly relative to the base 11, and the rotating friction is reduced. Of course, in other embodiments, the outer ring of the bearing 123 can be fixedly connected with the base 11, and the inner ring of the bearing 123 can be fixedly connected with the limiting block 13, and the rotation of the limiting block 13 relative to the base 11 can also be realized. Further, the guide 12 also includes a bearing limiting piece 124, which is used for limiting the axial movement of the bearing 123 to prevent the bearing 123 from moving along the axial direction. Alternatively, the bearing limiting piece 124 includes a connecting shaft and a blocking part provided at one end of the connecting shaft, the connecting shaft is arranged in the bearing 123 and is fixedly connected with the base 11, and the blocking part is used for limiting the axial movement of the bearing 123 and the limiting block 13. In addition, the embodiment is also provided with a buffer 15, which can be arranged at the first limiting position 111 and the second limiting position 112 of the base 11, or arranged on the two sides of the limiting block 13, so that when the limiting block 13 rotates to the first limiting position 111 or the second limiting position 112, the buffer 15 can be elastically contacted with the base 11, avoiding collision damage, and playing a buffering role in the rotation collision of the limiting block 13.

[0051] The embodiment of the application uses a single bearing 123 to connect with the limiting block 13, and embeds the limiting magnet in the limiting block 13, which greatly reduces the size of the rotating limiting mechanism; by using the magnetic force of the limiting magnet to firmly adsorb the limiting block 13, and by providing the buffer 15, the limiting block 13 is stably fixed after reaching the limiting position, avoiding the shaking problem under the impact of large acceleration in plane movement, and improving the positioning accuracy of the rotating table.

[0052] The working process of the second embodiment of the application is as follows:

[0053] As Figure 4, Figure 5 As shown, when the rotary table rotates clockwise, it drives the limit trigger 2 to rotate together until it touches the limit block 13. This causes the limit block 13 to overcome the magnetic attraction of the limit magnet at the first limit position 111, and the limit block 13 rotates along the bearing 123 to the second limit position 112. It is then fixed by the attraction of the limit magnet at the second limit position 112.

[0054] When the rotary table rotates counterclockwise, it drives the limit trigger 2 to rotate together until it touches the limit block 13. This causes the limit block 13 to overcome the magnetic attraction of the limit magnet at the second limit position 112, and the limit block 13 rotates along the bearing 123 to the first limit position 111. It is then fixed by being attracted to the limit magnet at the first limit position 111.

[0055] The present invention utilizes the adsorption force of the limiting magnet to keep the limiting block 13 fixed and prevent it from shaking when the entire rotary table is subjected to a large acceleration impact, thereby ensuring that the limiting device does not affect the overall positioning accuracy of the rotary table.

[0056] Example 3

[0057] like Figure 7 As shown, this embodiment provides a method for initializing the zero point position of the rotary table limiting device in Embodiment 1 or Embodiment 2, specifically including the following steps:

[0058] S1. System initialization begins;

[0059] In this step, the system initiates an initialization procedure. At this time, the rotary table may be located at the first limit position 111, the second limit position 112, or any position between the first limit position 111 and the second limit position 112. The purpose of this initialization procedure is to detect whether the rotation angle of the rotary table around a certain direction meets the requirement of being greater than 360 degrees. If the rotation angle of the rotary table is greater than 360 degrees, the rotary table is rotated a certain angle from the first limit position 111 or the second limit position 112 to determine the zero point position of the rotary table rotation. In this embodiment, the zero point position can be set by the operator according to actual needs. For example, when the limit block 13 is moved to the middle position between the first limit position 111 and the second limit position 112, the position of the rotary table is set as the zero point position.

[0060] S2. Apply a driving force along the first direction to rotate the rotary table along the first direction;

[0061] In this embodiment, the first direction can be counterclockwise or clockwise, but the first direction should be opposite to the second direction. Since the rotating table can be located at the first limit position 111, the second limit position 112 or any position between the first limit position 111 and the second limit position 112 in step S1, it is necessary to ensure that the driving force of the rotating table is greater than the adsorption force of the magnetic assembly 14 in this step, so that the limit trigger 2 can push the limit block 13 to move to the first limit position 111 or the second limit position 112.

[0062] S3, detecting whether the position feedback of the rotating table changes, if yes, returning to the previous step, if no, proceeding to the next step;

[0063] Through this step S3, it can be ensured that the limit block 13 moves to the limit position along the first direction.

[0064] S4, applying a driving force along the second direction to rotate the rotating table along the second direction;

[0065] In this step, it is also necessary to ensure that the driving force of the rotating table is greater than the adsorption force of the magnetic assembly 14, so that the limit trigger 2 can push the limit block 13 to move to the second limit position 112 or the first limit position 111.

[0066] S5, detecting whether the position feedback of the rotating table changes, if yes, returning to the previous step, if no, proceeding to the next step;

[0067] This step can ensure that the limit block 13 has moved to the limit position along the second direction.

[0068] S6, detecting whether the angle of the rotating table rotating along the second direction is greater than 360°, if yes, applying a driving force along the first direction to rotate the rotating table along the first direction to the zero position, at this time the initialization is successful; if no, the initialization fails, and manual inspection is needed to troubleshoot the failure.

[0069] This step detects whether the rotating angle of the rotating table is greater than 360° when the limit block 13 moves from one side limit position to the other side limit position along the second direction by reversing the movement of the limit block 13. That is, this step can detect whether the rotating angle of the rotating table is greater than 360 degrees when the limit block 13 moves from the limit position of the first direction to the limit position of the second direction, that is, whether the total rotatable angle of the rotating table is greater than 360 degrees. In this step, if the angle of the rotating table rotating along the second direction is greater than 360°, it means that the limit device is properly set and has no failure, at this time the rotating table is driven to rotate along the first direction to the zero position, that is, the initialization of the limit device is successfully completed. If the angle of the rotating table rotating along the second direction is not greater than 360°, it means that the limit device has a failure, which needs to be further repaired, and this initialization fails.

[0070] The embodiment of the present application determines the zero position of the rotating table through the initialization method, and facilitates accurate positioning of the position of the rotating table and accurate control of the motion angle of the rotating table in the subsequent process of using the rotating table.

[0071] It should be noted that the above only describes the preferred embodiments of the present application and the technical principles applied. Those skilled in the art will understand that the present application is not limited to the specific embodiments described herein, and various obvious changes, readjustments and substitutions can be made by those skilled in the art without departing from the scope of the present application. Therefore, although the present application has been described in more detail through the above embodiments, the present application is not limited to the above embodiments, and can include more other equivalent embodiments without departing from the concept of the present application, and the scope of the present application is determined by the scope of the appended claims.

Claims

1. A rotary table position limiting device, characterized by, Comprise: Limiting fixing part (1), including base (11), guide piece (12), limiting block (13) and magnetic assembly (14), the base (11) is configured to be installed on the fixed assembly (100) of rotating table, the base (11) is provided with installation groove (114), the bottom of installation groove (114) is U-shaped groove, the upper portion of installation groove (114) is inclined and extends along the two sides of U-shaped groove, two inclined wall surfaces form first limiting position (111) and second limiting position (112) respectively, the top of installation groove (114) is in open state, the guide piece (12) is installed on the bottom of installation groove (114), the bottom end of limiting block (13) is rotatably installed on guide piece (12), limiting block (13) can move along guide piece (12) between first limiting position (111) and second limiting position (112), the upper portion of limiting block (13) has two flat surfaces on both sides, which are used for cooperating with first limiting position (111) and second limiting position (112) of base (11) respectively; The magnetic assembly (14) includes limiting magnet, two limiting magnets are embedded on both sides of limiting block (13), which is used for attracting limiting block (13) to first limiting position (111) or second limiting position (112); Limiting trigger part (2) is configured to be installed on the rotating assembly (200) of the rotating table, the limiting trigger part (2) can contact the limiting block (13) when the rotating assembly (200) rotates, and drive the limiting block (13) to move along the guide piece (12) between the first limiting position (111) and the second limiting position (112), through the cooperation of the limiting block (13) with the first limiting position (111) and the second limiting position (112), the rotating table rotates in the same direction and the angle is greater than 360°.

2. The rotary table position limiting device of claim 1, wherein, The guide piece (12) includes a bearing (123), the inner ring of the bearing (123) is fixedly connected with the base (11), and the outer ring of the bearing (123) is fixedly connected with the limiting block (13), so that the limiting block (13) can rotate relative to the base (11); Or the outer ring of the bearing (123) is fixedly connected with the base (11), and the inner ring of the bearing (123) is fixedly connected with the limiting block (13), so that the limiting block (13) can rotate relative to the base (11).

3. The rotary table position limiting device of claim 2, wherein, The guide piece (12) further comprises a bearing limiting piece (124) for limiting the axial direction of the bearing (123), and the bearing limiting piece (124) is fixedly connected with the base (11).

4. The rotary table positioner of claim 1, wherein, The limiting fixing part (1) further comprises a buffer (15), and the buffer (15) is installed on the base (11) and / or the limiting block (13), and is used for buffering the movement of the limiting block (13).

5. The rotary table positioner of claim 4, wherein, The buffer (15) is a rubber pad.

6. A method of initializing a rotary table positioner for use with the rotary table positioner of any one of claims 1-5, the method comprising: Comprise the following steps: System initialization starts; applying a driving force along the first direction to rotate the rotating table along the first direction; detecting whether the position feedback of the rotating table has a change, if yes, returning to the previous step, if no, proceeding to the next step; applying a driving force along the second direction to rotate the rotating table along the second direction; detecting whether the position feedback of the rotating table has a change, if yes, returning to the previous step, if no, proceeding to the next step; detecting whether the angle of the rotating table rotating along the second direction is greater than 360°, if yes, applying a driving force along the first direction to rotate the rotating table along the first direction to a zero point position, at this time, the initialization is successful, if no, the initialization fails.

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