Iron Removal Device for Silicon Carbide Fine Powder for Semiconductors

Abstract

The present invention discloses a semiconductor silicon carbide micropowder iron removal device, comprising a main housing, an air pump is fixedly installed on one side of the main housing, a motor is fixedly installed on the side of the main housing near the air pump, a reducer is fixedly installed on the other side of the main housing near the motor, and the input shaft of the reducer is connected to the motor through a coupling, a cam is fixedly installed on the output shaft of the reducer, a connecting rod is fixedly installed on the other end of the cam, a screening housing is fixedly installed on the other end of the connecting rod, a blowing hole is opened on the inner side wall of the screening housing, an electromagnet is fixedly installed on the top of the screening housing, a first discharge port is arranged on one side of the main housing, a second discharge port is arranged on the side of the main housing away from the first discharge port, and a feed port is arranged on the top of the main housing. The semiconductor silicon carbide micropowder iron removal device has a simple and reasonable structure, is easy to use, effectively realizes the iron removal of silicon carbide micropowder, and has a high practical value.

Description

Technical Field

[0001] The invention relates to the technical field of silicon carbide micropowder processing, and specifically to a silicon carbide micropowder iron removal device for semiconductors. Background Art

[0002] Silicon carbide powder refers to micron-sized silicon carbide powder that is ultra-finely crushed and graded using JZFZ equipment. Silicon carbide powder is mainly 1200# and 1500#. Since silicon carbide powder is mainly used in the abrasive industry, there are special requirements for the grading of the powder. No large particles can appear in the powder. Therefore, in order to meet international and domestic product requirements, JZF grading equipment is generally used in production for high-precision grading. Domestic silicon carbide powder is mainly black silicon carbide powder and green silicon carbide powder.

[0003] Some iron powder will be mixed into the existing silicon carbide micropowder during the production process. In order to ensure the performance of the silicon carbide micropowder, the iron powder needs to be removed. At present, the silicon carbide micropowder is mainly deironed by chemical methods. First, the silicon carbide micropowder mixed with iron powder is slurried with water, and stirred and mixed to make it evenly dispersed in the water, and then an acidic solvent such as sulfuric acid or hydrochloric acid is added. The acidic solvent reacts chemically with the iron powder but does not react chemically with silicon carbide to achieve the purpose of deironing the silicon carbide micropowder. However, this method consumes a large amount of production auxiliary materials such as sulfuric acid or hydrochloric acid, which increases the production cost of silicon carbide powder. In addition, a large amount of acidic wastewater is generated during the use of sulfuric acid or hydrochloric acid, which causes harm to the ecological environment. The production cost is high, the deironing efficiency is low, and it cannot meet the actual use needs. Although another method of deironing by magnet effectively solves the drawbacks of the chemical method, it is inconvenient to clean up the iron-containing substances. Therefore, we have made improvements to this and proposed a silicon carbide micropowder deironing device for semiconductors. Summary of the invention

[0004] In order to solve the above technical problems, the invention provides the following technical solutions:

[0005] The invention discloses a device for removing iron from silicon carbide powder for semiconductors, comprising a main housing, an air pump is fixedly installed on one side of the main housing, a motor is fixedly installed on the side of the main housing close to the air pump, a reducer is fixedly installed on the other side of the main housing close to the motor, and the input shaft of the reducer is transmission-connected to the motor through a coupling, a cam is fixedly installed on the output shaft of the reducer, a connecting rod is fixedly installed on the other end of the cam, a screening housing is fixedly installed on the other end of the connecting rod, blowing holes are provided on the inner side wall of the screening housing, and the blowing holes are connected to the air pump through pipelines, an electromagnet is fixedly installed on the top of the screening housing, a first discharge port is provided on the outer side of the main housing, a second discharge port is provided on the outer side of the main housing away from the first discharge port, and a feed port is provided on the top of the main housing.

[0006] As a preferred technical solution of the invention, discharge openings are provided on both sides of the screening box body, and the discharge openings are respectively a first discharge opening and a second discharge opening.

[0007] As a preferred technical solution of the invention, telescopic cylinders are provided on both sides of the screening box body close to the discharge openings. The piston rods of the telescopic cylinders are fixedly connected with fixing plates, and the other sides of the fixing plates are fixedly installed with baffle plates, and the baffle plates are fixedly installed in grooves close to the discharge openings.

[0008] As a preferred technical solution of the invention, a plurality of air blowing holes are provided and are uniformly arranged inside the screening box body. The air blowing holes are interconnected through internal pipelines of the screening box body. The air pump is interconnected with the internal pipelines of the screening box body through a pipeline, and a solenoid valve is provided on the pipeline.

[0009] As a preferred technical solution of the invention, an observation window is provided on the outside of the main box body close to the screening box body, and the observation window is made of an acrylic board.

[0010] As a preferred technical solution of the invention, a control panel is provided on the outside of the main box body close to the observation window. The control panel includes a display, and a plurality of control buttons are provided at the bottom of the display.

[0011] As a preferred technical solution of the invention, a maintenance door is fixedly installed on the outside of the main box body close to the bottom of the observation window. The maintenance door is fixedly installed on the side close to the motor, and the maintenance door is provided with a lock catch.

[0012] As a preferred technical solution of the invention, heat dissipation windows are fixedly installed on the outside of the main box body close to the first discharge port and the second discharge port, and a plurality of air guiding plates inclined downward are fixedly installed in the heat dissipation windows.

[0013] The beneficial effects of the invention are as follows: For this iron removal device for silicon carbide micropowder used in semiconductors, by installing a screening box body, through vibration and counter blowing of air flow, the silicon carbide micropowder is evenly dispersed inside the screening box body, and then the iron-containing substances in the silicon carbide micropowder are separated by an electromagnet, thus realizing the iron removal of silicon carbide micropowder. By setting a first discharge port and a second discharge port, it is convenient to discharge the silicon carbide micropowder and the iron-containing substances from different discharge ports respectively. By setting a baffle plate, it is convenient to control the discharging. By setting air blowing holes, it is convenient to evenly disperse the silicon carbide micropowder and to clean the inside of the screening box body. By setting an observation window, it is convenient to observe the production condition. By setting a control panel, it is convenient to operate this equipment, thereby reducing the labor intensity of personnel. By setting a maintenance door, it is convenient to check and repair the internal structure of the machine. By setting a heat dissipation window, it is convenient for the heat dissipation of the internal structure of the equipment; This equipment has a simple and reasonable structure, is convenient to use, effectively realizes the iron removal of silicon carbide micropowder, and has a relatively high practical value. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] The drawings are used to provide a further understanding of the invention and constitute a part of the specification, and are used to explain the invention together with the embodiments of the invention, and do not constitute a limitation to the invention. In the drawings:

[0015] Figure 1 is a three-dimensional structural schematic diagram of an iron removal device for silicon carbide micropowder used in semiconductors according to the invention;

[0016] Figure 2 is a front sectional structural schematic diagram of an iron removal device for silicon carbide micropowder used in semiconductors according to the invention;

[0017] Figure 3 is an enlarged structural view of part A of an iron removal device for silicon carbide micropowder used in semiconductors according to the invention.

[0018] In the figures: 1, main box body; 2, air pump; 3, motor; 4, reducer; 5, cam; 6, connecting rod; 7, screening box body; 8, air blowing holes; 9, electromagnet; 10, first discharge port; 11, second discharge port; 12, feed inlet; 13, telescopic cylinder; 14, fixing plate; 15, baffle plate; 16, first discharge opening; 17, second discharge opening; 18, observation window; 19, control panel; 20, heat dissipation window; 21, maintenance door. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0019] The following is a description of the preferred embodiments of the invention with reference to the drawings. It should be understood that the preferred embodiments described herein are only for the purpose of illustrating and explaining the invention and are not intended to limit the invention.

[0020] Embodiment: As Figures 1-3As shown, a silicon carbide micropowder iron removal device for semiconductors is invented, including a main box body 1, an air pump 2 is fixedly installed on one side of the main box body 1, a motor 3 is fixedly installed on the side of the main box body 1 close to the air pump 2, a reducer 4 is fixedly installed on the other side of the main box body 1 close to the motor 3, and the input shaft of the reducer 4 is transmission-connected to the motor 3 through a coupling, a cam 5 is fixedly installed on the output shaft of the reducer 4, a connecting rod 6 is fixedly installed on the other end of the cam 5, a screening box body 7 is fixedly installed on the other end of the connecting rod 6, a blowing hole 8 is opened on the inner side wall of the screening box body 7, and the blowing hole 8 is connected with the air pump 2 through a pipeline, an electromagnet 9 is fixedly installed on the top of the screening box body 7, a first discharge port 10 is arranged on one side of the outside of the main box body 1, a second discharge port 11 is arranged on the outside of the main box body 1 away from the first discharge port 10, and a feed port 12 is arranged on the top of the main box body 1.

[0021] Among them, discharge ports are opened on both sides of the screening box 7, which are respectively a first discharge port 16 and a second discharge port 17. By setting the first discharge port 16 and the second discharge port 17, it is convenient to discharge silicon carbide powder and iron-containing materials from different discharge ports respectively.

[0022] Among them, the screening box 7 is provided with a telescopic cylinder 13 on one side close to the discharge port, the piston rod of the telescopic cylinder 13 is fixedly connected to a fixed plate 14, and a baffle plate 15 is fixedly installed on the other side of the fixed plate 14, and the baffle plate 15 is fixedly installed in a groove close to the discharge port. By setting the baffle plate 15, it is convenient to control the discharge of materials.

[0023] Among them, a number of blowing holes 8 are provided and are evenly arranged inside the screening box 7. The blowing holes 8 are connected to each other through the internal pipes of the screening box 7. The air pump 2 is connected to the internal pipes of the screening box 7 through the pipes, and an electromagnetic valve is provided on the pipe. By providing the blowing holes 8, it is convenient to evenly disperse the silicon carbide micropowder and to clean the inside of the screening box 7.

[0024] Among them, an observation window 18 is arranged on the outside of the main box body 1 on a side close to the screening box body 7. The observation window 18 is made of an acrylic plate. By setting the observation window 18, it is convenient to observe the production status.

[0025] Among them, a control panel 19 is arranged on the outside of the main box body 1 on one side close to the observation window 18. The control panel 19 includes a display, and a plurality of control buttons are arranged at the bottom of the display. By setting the control panel 19, it is convenient to operate the equipment, thereby reducing the labor intensity of personnel.

[0026] Among them, an inspection door 21 is fixedly installed on the outside of the main box body 1 near the bottom of the observation window 18. The inspection door 21 is fixedly installed on the side close to the motor 3, and the inspection door 21 is provided with a lock. By setting the inspection door 21, it is convenient to inspect and repair the internal structure of the machine.

[0027] Wherein, on one side of the main box body 1 close to the first discharge port 10 and the second discharge port 11, a heat dissipation window 20 is fixedly installed, and a number of air guide plates inclined downward are fixedly installed in the heat dissipation window 20. By setting the heat dissipation window 20, it is convenient for the heat dissipation of the internal structure of the device.

[0028] Working principle: When the device works, the silicon carbide micropowder to be de-ironed is put into the screening box body 7 from the feed port 12, each opening of the screening box body 7 is closed, the motor 3 is started, the power of the motor 3 is transmitted to the cam 5 through the speed reducer 4, and then transmitted from the cam 5 to the connecting rod 6, and then transmitted to the screening box body 7 through the connecting rod 6. The screening box body 7 starts to vibrate. At the same time, the air pump 2 is turned on, the solenoid valve is opened, and the air flow reaches the air blowing holes 8 from the air pump 2. The silicon carbide micropowder is fully dispersed inside the screening box body 7. At this time, the electromagnet 9 is energized to adsorb the iron-containing substances in the silicon carbide micropowder to the top of the box body. After the separation is completed, it is left standing for a period of time, and then the screening box body 7 is tilted, with the lower end facing the first discharge port 10, the first blanking port 16 is opened, and the iron-removed silicon carbide micropowder is discharged from the first discharge port 10. The first discharge port 10 is closed, the screening box body 7 is tilted so that the lower end faces the second discharge port 11, the electromagnet 9 is powered off, and the iron-containing substances are discharged from the second discharge port 11. For this kind of iron removal device for silicon carbide micropowder used in semiconductors, by installing the screening box body 7, through vibration and air flow blowing, the silicon carbide micropowder is evenly dispersed inside the screening box body 7, and then the iron-containing substances in the silicon carbide micropowder are separated by the electromagnet 9, thereby realizing the iron removal of the silicon carbide micropowder. By setting the first blanking port 16 and the second blanking port 17, it is convenient to discharge the silicon carbide micropowder and the iron-containing substances from different blanking ports respectively. By setting the baffle plate 15, it is convenient to control the blanking. By setting the air blowing holes 8, it is convenient to evenly disperse the silicon carbide micropowder and is convenient for cleaning the inside of the screening box body 7. By setting the observation window 18, it is convenient to observe the production status. By setting the control panel 19, it is convenient to control the device, thereby reducing the labor intensity of personnel. By setting the maintenance door 21, it is convenient to check and repair the internal structure of the machine. By setting the heat dissipation window 20, it is convenient for the heat dissipation of the internal structure of the device; the structure of this device is simple and reasonable, easy to use, effectively realizes the iron removal of silicon carbide micropowder, and has high practical value.

[0029] Finally, it should be noted that in the description of the invention, it should be noted that the orientation or positional relationship indicated by the terms "vertical", "upper", "lower", "horizontal", etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation of the invention.

[0030] In the description of the invention, it should also be noted that, unless otherwise clearly defined and limited, the terms "arranged", "installed", "connected" and "coupled" should be understood in a broad sense. For example, it may be a fixed connection, a detachable connection, or an integral connection; it may be a mechanical connection or an electrical connection; it may be directly connected or indirectly connected through an intermediate medium, and it may be the communication inside two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the invention can be understood according to specific circumstances.

[0031] The above are only the preferred embodiments of the invention and are not intended to limit the invention. Although the invention has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent replacements for some of the technical features. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the invention shall be included in the protection scope of the invention.

Claims

1. A semiconductor silicon carbide powder iron removal device, comprising a main housing (1), It is characterized in that An air pump (2) is fixedly mounted on one side of the main housing (1), a motor (3) is fixedly mounted on one side of the main housing (1) close to the air pump (2), a reducer (4) is fixedly mounted on the other side of the main housing (1) close to the motor (3), and an input shaft of the reducer (4) is transmission-connected to the motor (3) via a coupling, a cam (5) is fixedly mounted on the output shaft of the reducer (4), a connecting rod (6) is fixedly mounted on the other end of the cam (5), a screening housing (7) is fixedly mounted on the other end of the connecting rod (6), a blowing hole (8) is provided on the inner side wall of the screening housing (7), and the blowing hole (8) is connected to the air pump (2) via a pipeline, an electromagnet (9) is fixedly mounted on the top of the screening housing (7), a first discharge port (10) is provided on one side of the outer side of the main housing (1), and the outer side of the main housing (1) away from the first discharge port (10) is provided. A second discharge port (11) is provided on one side of a discharge port (10), and a feed port (12) is provided on the top of the main box body (1); discharge ports are provided on both sides of the screening box body (7), and the discharge ports are respectively a first discharge port (16) and a second discharge port (17); a telescopic cylinder (13) is provided on one side of the screening box body (7) near the discharge port, a piston rod of the telescopic cylinder (13) is fixedly connected to a fixed plate (14), a baffle plate (15) is fixedly installed on the other side of the fixed plate (14), and the baffle plate (15) is fixedly installed in a groove near the discharge port; a plurality of blowing holes (8) are provided and evenly arranged inside the screening box body (7), the blowing holes (8) are connected to each other through an internal pipe of the screening box body (7), the air pump (2) is connected to the internal pipe of the screening box body (7) through a pipe, and an electromagnetic valve is provided on the pipe; The usage method of the iron removal device for silicon carbide micropowder for semiconductors is as follows: Put the silicon carbide micropowder to be iron-removed into the inside of the screening box body from the feed port, close all the openings of the screening box body, start the motor, the power of the motor is transmitted to the cam through the reducer, and then transmitted from the cam to the connecting rod, and then transmitted to the screening box body through the connecting rod. The screening box body starts to vibrate. At the same time, turn on the air pump and open the solenoid valve. The air flow reaches the air blowing holes from the air pump. The silicon carbide micropowder spreads out fully inside the screening box body. At this time, energize the electromagnet to adsorb the iron-containing substances in the silicon carbide micropowder to the top of the box body. After the separation is completed, let it stand for a period of time, then tilt the screening box body, with the lower end facing the first discharge port, open the first discharge port, and the iron-removed silicon carbide micropowder is discharged from the first discharge port. Close the first discharge port, tilt the screening box body so that the lower end faces the second discharge port, cut off the power supply of the electromagnet, and the iron-containing substances are discharged from the second discharge port; For this kind of iron removal device for silicon carbide micropowder for semiconductors, by installing a screening box body, through vibration and air blowing, the silicon carbide micropowder is evenly dispersed inside the screening box body, and then the iron-containing substances in the silicon carbide micropowder are separated by the electromagnet, so as to realize the iron removal of the silicon carbide micropowder. By setting the first discharge port and the second discharge port, it is convenient to discharge the silicon carbide micropowder and the iron-containing substances from different discharge ports respectively. By setting the baffle plate, it is convenient to control the discharge. By setting the air blowing holes, it is convenient to evenly disperse the silicon carbide micropowder and clean the inside of the screening box body.

2. The iron removal device for silicon carbide micropowder for semiconductors according to claim 1, characterized in that, An observation window (18) is provided on the outside of the main box body (1) on one side close to the screening box body (7), and the observation window (18) is made of acrylic board.

3. The iron removal device for silicon carbide micropowder for semiconductors according to claim 1 or 2, characterized in that, A control panel (19) is provided on the outside of the main box body (1) on one side close to the observation window (18). The control panel (19) includes a display, and a number of control buttons are provided at the bottom of the display.

4. The iron removal device for silicon carbide micropowder for semiconductors according to claim 1 or 2, characterized in that, A maintenance door (21) is fixedly installed on the outside of the main box body (1) on one side close to the bottom of the observation window (18). The maintenance door (21) is fixedly installed on one side close to the motor (3), and the maintenance door (21) is provided with a lock.

5. The iron removal device for silicon carbide micropowder for semiconductors according to claim 1, characterized in that, Heat dissipation windows (20) are fixedly installed on the outside of the main box body (1) on one side close to the first discharge port (10) and the second discharge port (11), and a number of downwardly inclined air guiding plates are fixedly installed in the heat dissipation windows (20).

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