Faraday cup assembly, ion implantation apparatus, and method of using same

Abstract

The disclosure provides a Faraday cup assembly, an ion implantation device and a method of using the same, and relates to the technical field of semiconductors. The Faraday cup assembly comprises a base, a Faraday cup, a guard ring and a plurality of connecting pieces. The base has a mounting surface provided with a mounting groove, the bottom surface of the mounting groove is provided with at least one mounting hole; the Faraday cup is in the form of a circular ring and is arranged on the bottom surface of the mounting groove, the Faraday cup is provided with a circular ring-shaped cup cavity extending in the circumferential direction, the cup cavity has an open end facing the top of the mounting groove, and the bottom of the cup cavity is provided with a plurality of fixing holes uniformly distributed in the circumferential direction; the guard ring is arranged on the mounting surface and covers the mounting groove, the projection of the guard ring on the open end covers the cup cavity, the guard ring is provided with a plurality of arc-shaped slits distributed in the circumferential direction, and the slits and the fixing holes satisfy the following conditions: wherein n is the number of slits, c is the circumference of the circle where the slits are located, L is the arc length of the slits, and m is the number of fixing holes. The connecting pieces are detachably connected to the mounting holes and pass through the fixing holes opposite to the mounting holes.

Description

Technical Field

[0001] This disclosure relates to the field of semiconductor technology, and more specifically, to a Faraday cup assembly, an ion implantation apparatus, and a method of using the ion implantation apparatus. Background Technology

[0002] In the semiconductor field, ion implantation technology is widely used to introduce impurities that alter conductivity into wafers, thereby improving product performance. Currently, ion implantation equipment is typically used to generate an ion beam and bombard the wafer. To detect the incident intensity of the ions, the ion beam is usually introduced into a Faraday cup, and the change in current is detected by the Faraday cup to determine the incident intensity of the ion beam.

[0003] However, prolonged exposure of the ion beam to the same area of ​​the Faraday cup can thin or even penetrate that area, leading to inaccurate current measurements and deviations in wafer electrical properties, thus affecting product yield. Frequent inspection and replacement of the Faraday cup is also costly.

[0004] It should be noted that the information disclosed in the background section above is only used to enhance the understanding of the background of this disclosure, and therefore may include information that does not constitute prior art known to those skilled in the art. Summary of the Invention

[0005] The purpose of this disclosure is to overcome the shortcomings of the prior art and provide a Faraday cup assembly, an ion implantation device, and a method of using the ion implantation device, which can reduce costs and improve product yield.

[0006] According to one aspect of this disclosure, a Faraday cup assembly is provided, comprising:

[0007] A base having a mounting surface, the mounting surface having a mounting groove, and the bottom surface of the mounting groove having at least one mounting hole;

[0008] A Faraday cup, in the shape of a ring, is disposed on the bottom surface of the mounting groove. The Faraday cup has a ring-shaped cup cavity extending in the circumferential direction. The cup cavity has an open end facing the top of the mounting groove. The bottom of the cup cavity has a plurality of fixing holes evenly distributed in the circumferential direction, with each mounting hole facing one fixing hole.

[0009] A protective ring, disposed on the mounting surface and shielding the mounting groove, and coaxially arranged with the Faraday cup, the projection of the protective ring at the open end covering the cup cavity, the protective ring having multiple circumferentially evenly distributed arc-shaped slits, the slits communicating with the cup cavity, the slits and the fixing hole satisfying the following conditions:

[0010]

[0011]

[0012] Where n is the number of slits, c is the circumference of the circle in which the slit is located, L is the arc length of the slit, and m is the number of fixing holes;

[0013] A connector is detachably connected to the mounting hole and passes through a fixing hole opposite to the mounting hole.

[0014] In one exemplary embodiment of this disclosure, the slit and the fixing hole further satisfy the following conditions:

[0015] m = 2n.

[0016] In one exemplary embodiment of this disclosure, the connector has an external thread and is threadedly connected to the corresponding mounting hole.

[0017] In one exemplary embodiment of this disclosure, the Faraday cup assembly further includes:

[0018] Multiple connectors are located at the bottom of the cup cavity and distributed circumferentially. The central angle of two adjacent connectors is the same as the central angle of two adjacent fixing holes.

[0019] In one exemplary embodiment of this disclosure, the number of slits is four, and the number of fixing holes is eight.

[0020] In one exemplary embodiment of this disclosure, the Faraday cup assembly further includes:

[0021] A ranging device is disposed on the surface of the protective ring near the Faraday cup and located inside the cup cavity. The ranging device is located between two adjacent slits and is used to detect the distance between the ranging device and the bottom of the cup cavity.

[0022] A processing device, connected to the ranging device, is used to output a reminder signal when the distance between the ranging device and the bottom of the cup cavity is greater than a threshold.

[0023] In one exemplary embodiment of this disclosure, the Faraday cup assembly further includes:

[0024] An alarm device, connected to the processing device, is used to issue an alarm when the alert signal is received.

[0025] In one exemplary embodiment of this disclosure, the Faraday cup assembly further includes:

[0026] At least one shielding element is detachably disposed on the surface of the protective ring away from the Faraday cup for shielding at least one of the slits.

[0027] In one exemplary embodiment of this disclosure, the material of the shielding member includes at least one of aluminum, silicon, and silicon carbide.

[0028] According to one aspect of this disclosure, an ion implantation apparatus is provided, comprising the Faraday cup assembly described in any of the preceding claims.

[0029] According to one aspect of this disclosure, a method of using an ion implantation apparatus is provided, wherein the ion implantation apparatus is any one of the ion implantation apparatuses described above, and the method of use includes:

[0030] Detect the distance between the protective ring and the bottom of the cup cavity;

[0031] When the distance between the protective ring and the cup cavity is greater than a threshold, the connector is removed from the mounting hole;

[0032] The Faraday cup is rotated by an angle that is an integer multiple of the included angle between the centers of two adjacent fixing holes;

[0033] Reconnect the connector to the mounting hole.

[0034] The ion implantation device and Faraday cup assembly disclosed herein allow an ion beam to enter the cup cavity through a slit during use, enabling measurement of the ion beam intensity. Simultaneously, since the Faraday cup and base are detachably connected via a connector, the Faraday cup can be separated from the base. The area of ​​action of the ion beam within the cup cavity can be adjusted by rotating the Faraday cup. The rotation angle can be an integer multiple of the included angle between the centers of two adjacent fixing holes, allowing for continued connection via the connector after each rotation. The conditions satisfied by the slit and fixing holes ensure that the area of ​​the cup cavity directly opposite the slit does not overlap before and after rotation, thereby preventing excessive thinning or perforation of localized areas of the Faraday cup, extending its service life, avoiding frequent replacements, reducing costs, ensuring the accuracy of test results, and thus improving product yield.

[0035] It should be understood that the above general description and the following detailed description are exemplary and explanatory only, and are not intended to limit this disclosure. Attached Figure Description

[0036] The accompanying drawings, which are incorporated in and form part of this specification, illustrate embodiments consistent with this disclosure and, together with the description, serve to explain the principles of this disclosure. It is obvious that the drawings described below are merely some embodiments of this disclosure, and those skilled in the art can obtain other drawings based on these drawings without any inventive effort.

[0037] Figure 1 This is a partial cross-sectional view of one embodiment of the Faraday cup assembly of this disclosure.

[0038] Figure 2 This is a schematic diagram of the Faraday cup in one embodiment of the Faraday cup components of this disclosure.

[0039] Figure 3 for Figure 2 AA sectional view.

[0040] Figure 4 This is a schematic diagram of the protection ring, ranging device, processing device, and alarm device in one embodiment of the Faraday cup assembly of this disclosure.

[0041] Figure 5 for Figure 4 BB cross-sectional view.

[0042] Figure 6 This is a schematic diagram of another embodiment of the Faraday cup component disclosed herein.

[0043] Explanation of reference numerals in the attached figures:

[0044] 100. Base; 1. Faraday cup; 101. Cup cavity; 102. Fixing hole; 2. Protective ring; 201. Slit; 3. Connector; 4. Joint; 41. First contact; 42. Second contact; 5. Distance measuring device; 6. Processing device; 7. Alarm device; 8. Shielding device; 9. Magnetic component. Detailed Implementation

[0045] Exemplary embodiments will now be described more fully with reference to the accompanying drawings. However, these exemplary embodiments can be implemented in many forms and should not be construed as limited to the embodiments set forth herein; rather, they are provided so that this disclosure will be thorough and complete, and will fully convey the concept of the exemplary embodiments to those skilled in the art. The same reference numerals in the drawings denote the same or similar structures, and therefore detailed descriptions of them will be omitted. Furthermore, the drawings are merely illustrative of this disclosure and are not necessarily drawn to scale.

[0046] Although relative terms such as "up" and "down" are used in this specification to describe the relative relationship of one component of an icon to another, these terms are used only for convenience, such as according to the orientation of the examples shown in the accompanying drawings. It is understood that if the device of the icon is flipped upside down, the component described as "up" will become the component described as "down." When a structure is "up" of another structure, it may mean that the structure is integrally formed on the other structure, or that the structure is "directly" mounted on the other structure, or that the structure is "indirectly" mounted on the other structure through another structure.

[0047] The terms “a,” “one,” “the,” “the,” and “at least one” are used to indicate the presence of one or more elements / components / etc.; the terms “including” and “having” are used to indicate an open-ended inclusion and to mean that there may be other elements / components / etc. in addition to those listed. The terms “first,” “second,” and “third,” etc., are used only as markers and are not a limitation on the number of objects.

[0048] This disclosure provides a Faraday cup assembly included in an ion implantation apparatus for ion implantation of wafers or other semiconductor devices. Figure 1 As shown, the Faraday cup assembly may include a base 100, a Faraday cup 1, a protective ring 2, and a connector 3, wherein:

[0049] The base 100 has a mounting surface, a mounting groove, and at least one mounting hole on the bottom surface of the mounting groove.

[0050] The Faraday cup 1 is annular in shape and located on the bottom surface of the mounting groove. The Faraday cup 1 has a cup cavity 101, and the bottom of the cup cavity 101 has multiple fixing holes 102. The cup cavity 101 extends circumferentially along the Faraday cup 1 and is annular in shape, with an open end facing the top of the mounting groove, i.e., towards the opening of the mounting groove. The fixing holes 102 are evenly distributed circumferentially on the bottom of the cup cavity 101. Simultaneously, each mounting hole is directly opposite a fixing hole 102.

[0051] The protective ring 2 is disposed on the mounting surface of the base 100 and covers the mounting groove. The protective ring 2 is directly opposite the open end of the cup cavity 101, thus covering the cup cavity 101. Simultaneously, the protective ring 2 is coaxially arranged with the Faraday cup 1, and the protective ring 2 has multiple arc-shaped slits 201, evenly distributed circumferentially and communicating with the cup cavity 101. The slits 201 and the fixing hole 102 satisfy the following conditions:

[0052]

[0053]

[0054] Where n is the number of slits 201, c is the circumference of the circle where the slit 201 is located, L is the arc length of the slit 201, and m is the number of fixing holes 102.

[0055] The connector 3 is detachably connected to the mounting hole and passes through the fixing hole 102 opposite to the mounting hole.

[0056] The Faraday cup assembly of this embodiment allows for the disassembly of connector 3, detaching the Faraday cup 1 from the base 100. By rotating the Faraday cup 1, the area where the cup cavity 101 and the slit 201 face each other can be adjusted. The rotation angle can be an integer multiple of the included angle between the centers of two adjacent fixing holes 102, ensuring that the connection can be maintained using connector 3 after each rotation. Simultaneously, the conditions satisfied by the slit 201 and the fixing holes 102 guarantee that the area where the cup cavity 101 and the slit 201 face each other does not overlap before and after rotation. This prevents localized thinning or puncture of the Faraday cup 1, extending its service life, avoiding frequent replacements, reducing costs, and ensuring the accuracy of test results, thereby improving product yield.

[0057] The following is a detailed description of each part of the Faraday cup assembly according to the present disclosure:

[0058] like Figure 2 and Figure 3 As shown, the base 100 can be cylindrical, with a mounting surface. The mounting surface has an axially recessed mounting groove, the sidewall of which can be cylindrical. The shape and size of the mounting groove can match the outer circumference of the Faraday cup 1. Simultaneously, the bottom surface of the mounting groove has mounting holes. The number of mounting holes can be the same as or less than the number of fixing holes 102 in the Faraday cup 1, as long as it is greater than one. For example, the number of mounting holes can be half the number of fixing holes 102, and the number of connectors 3 can be the same as the number of mounting holes. At any given time, only half of the fixing holes 102 can be connected to the mounting holes through the connectors 3. After rotating the Faraday cup 1, only the other half of the fixing holes 102 can be connected to the mounting holes through the connectors 3. Achieving the installation and fixation of the Faraday cup 1 with fewer mounting holes simplifies the structure of the base 100 and reduces the number of connectors 3 used. In addition, the bottom of the base 100 may be provided with a magnetic element 9 to place the Faraday cup 1 in the mounting groove in a magnetic field so as to perform electromagnetic induction. The magnetic element 9 may be a device that can generate a magnetic field, such as a natural magnet or an electromagnet.

[0059] like Figure 2 and Figure 3 As shown, the Faraday cup 1 can be made of graphite and is annular in shape. The Faraday cup 1 may include a cup cavity 101 and a fixing hole 102, wherein:

[0060] The cup cavity 101 is annular and extends circumferentially along the Faraday cup 1. The cup cavity 101 has an open end for the ion beam to enter the cup cavity 101. The cup cavity 101 can be formed by the axial recess of the open end. The radial cross section of the cup cavity 101 can be U-shaped, rectangular or other shapes, without any special limitation.

[0061] Each fixing hole 102 can be located at the bottom of the cup cavity 101 and evenly distributed along the circumference of the Faraday cup 1, that is, the fixing holes 102 can be evenly distributed along a circular trajectory. The fixing holes 102 allow the connector 3 to pass through so as to connect the Faraday cup 1 and the protective ring 2.

[0062] The Faraday cup 1 can be disposed within a mounting groove, with the bottom of the cup cavity 101 contacting the bottom of the mounting groove, and the outer periphery of the Faraday cup 1 fitting against the side wall of the mounting groove. Simultaneously, each mounting hole is directly opposite a fixing hole 102, meaning the central axis of each mounting hole is collinear with the central axis of a fixing hole 102. For example, the number of fixing holes 102 is the same as the number of mounting holes, and they are arranged in a one-to-one correspondence. Alternatively, the number of mounting holes may be less than the number of fixing holes 102, with each mounting hole directly opposite a fixing hole 102.

[0063] like Figure 3 and Figure 4 As shown, the protective ring 2 can be made of metal and has a circular structure. It can be placed on the mounting surface of the base 100, covering the mounting groove, and can be detachably connected to the base 100 by means of snap-fit ​​or bolt connection. The protective ring 2 is coaxially arranged with the Faraday cup 1, that is, the central axis of the protective ring 2 is collinear with the central axis of the Faraday cup 1. The protective ring 2 is directly opposite the open end of the cup cavity 101. The inner diameter of the protective ring 2 is not greater than the inner diameter of the cup cavity 101, and the outer diameter of the protective ring 2 is not less than the outer diameter of the cup cavity 101, thereby covering the cup cavity 101.

[0064] The protective ring 2 has multiple slits 201, each slit 201 being arc-shaped and identical in shape, with the center of each slit 201 located at the center of the protective ring 2. Simultaneously, the slits 201 are evenly distributed circumferentially and penetrate the protective ring 2 axially. The projection of the slit 201 onto the open end face of the cup cavity 101 lies within the cup cavity 101, ensuring that any slit 201 communicates with the cup cavity 101, thus allowing an ion beam to be injected into the cup cavity 101 through the slit 201.

[0065] The slit 201 and the fixing hole 102 satisfy the following conditions:

[0066]

[0067]

[0068] Where n is the number of slits 201, c is the circumference of the circle where the slit 201 is located, L is the arc length of the slit 201, and m is the number of fixing holes 102.

[0069] The derivation process of the above conditions is explained below:

[0070] Since slit 201 is arc-shaped and its center is the center of protective ring 2, as Figure 2As shown, assume: the central angle of slit 201 is α; the included angle between two adjacent slits 201 is β; the number of slits 201 is n; the circumference of the circle containing slit 201 is c; the arc length of slit 201 is L; and the number of fixing holes 102 is m. Wherein, the included angle β between two adjacent slits 201 is equal to the included angle between the midpoints of two adjacent slits 201, or the included angle between the two ends of two adjacent slits 201 that are rotationally symmetrical.

[0071] Based on the geometric relationships between circles and arcs, it can be deduced that:

[0072] but

[0073] but

[0074] Since the Faraday cup 1 or the protective ring 2 can rotate at least once, in order to ensure that the areas of the cup cavity 101 and the slits 201 do not overlap before and after rotation, the total length of all slits 201 should be less than half the circumference of the circle in which the slits 201 are located, that is... It can then be deduced that:

[0075]

[0076] Meanwhile, the fixing holes 102 are evenly distributed, and the rotation angle of the Faraday cup 1 or the protective ring 2 is... To ensure that the areas of the cup cavity 101 and the slit 201 do not overlap before and after rotation, the rotation angle of the Faraday cup 1 or the protective ring 2 should be greater than α and less than β-α, that is... And β>2α, that is: Therefore, it can be deduced that:

[0077]

[0078] Therefore, when α, L, c, and n are known, the range of the number m of the fixing holes 102 can be determined. For example, if α is 30°, the number n of the slits 201 is 4, and L is 1 and c is 12, then according to the above formula (2), 6 < m < 12, then m can be 7, 8, 9, 10, or 11.

[0079] Based on the above conditions, the slit 201 and the fixing hole 102 can also satisfy the following conditions:

[0080] m = 2n; (3)

[0081] That is, the number m of fixed holes 102 is equal to twice the number n of slits 201.

[0082] In the case of one rotation, in order to ensure that the area of ​​the cup cavity 101 and the slit 201 directly opposite each other is in the middle position of the adjacent slit 201 before the rotation, the rotation angle can be [missing value]. Then it can be deduced that: Then we can derive the above equation (3).

[0083] For example, when the number of slits 201 n is 4, m is 8, that is, the number of slits 201 is four and the number of fixing holes 102 is eight.

[0084] The number of connectors 3 is at least one, with a maximum of one connector 3 in each mounting hole. Each connector 3 is detachably connected to its corresponding mounting hole, and also passes through a fixing hole 102 corresponding to that mounting hole, thereby detachably fixing the Faraday cup 1 to the mounting groove. For example, the number of connectors 3 is the same as the number of mounting holes, with each connector 3 threadedly connected to its corresponding mounting hole and passing through the fixing hole 102 of each mounting hole.

[0085] Connector 3 is a screw, bolt, etc. The threaded part of connector 3 passes through the mounting hole and is threadedly connected. Of course, connector 3 can also be snapped into the mounting hole without threading, as long as it can be disassembled.

[0086] For ease of wiring, such as Figure 2 As shown, the Faraday cup assembly of this embodiment may further include a connector 4, which is located at the bottom of the cup cavity 101 and does not coincide with the fixing hole 102. The connector 4 can be connected to a detection device to transmit electrical signals to it. The connector 4 may have a first contact 41 and a second contact 42, and may also include more contacts. The number of connectors 4 can be multiple, distributed circumferentially along the Faraday cup 1. Furthermore, the central angle of two adjacent connectors 4 is the same as the central angle of two adjacent fixing holes 102, ensuring that after the Faraday cup 1 rotates, connectors 4 remain connected to the detection device without changing the position of the detection device. The number of connectors 4 should correspond to the number of rotations required to ensure proper wiring after each rotation. The central angle of two adjacent connectors 4 is the central angle of the line connecting their centers, and the central angle of two fixing holes 102 is the central angle of the line connecting their centers.

[0087] In one implementation, such as Figure 1 As shown, the Faraday cup assembly of this embodiment may further include a ranging device 5 and a processing device 6, wherein:

[0088] The ranging device 5 can be disposed on the surface of the protective ring 2 near the Faraday cup 1 and located inside the cup cavity 101. Simultaneously, the ranging device 5 is located between two adjacent slits 201, used to detect the distance between the ranging device 5 and the bottom of the cup cavity 101. This distance reflects the thickness of the area measured at the bottom of the cup cavity 101. The ranging device 5 can be an infrared ranging sensor, an ultrasonic ranging sensor, etc., without special limitations, as long as it can detect the distance between the ranging device 5 and the bottom of the cup cavity 101.

[0089] The ranging device 5 can be a single unit. When ranging is required, the protective ring 2 can be rotated sequentially so that the ranging device 5 is successively positioned directly above each thinned measurement area at the bottom of the cup cavity 101, thereby enabling ranging measurements to be performed sequentially on each thinned measurement area at the bottom of the cup cavity 101. Each thinned measurement area at the bottom of the cup cavity 101 corresponds to the position of the slit 201 before rotation. Alternatively, there can be multiple ranging devices 5, each located within the central angle range of any two adjacent slits 201. When ranging is required, the protective ring 2 can be rotated so that each ranging device 5 is directly above each thinned measurement area at the bottom of the cup cavity 101, thereby enabling simultaneous ranging measurements on each thinned measurement area at the bottom of the cup cavity 101.

[0090] The ranging device 5 can also be positioned vertically to the circumference of the slit 201, so that the ranging device 5 can measure the position with the smallest thickness at the bottom of the cup cavity 101, that is, it can measure the position with the most severe wear at the bottom of the Faraday cup 1 in the thinned test area.

[0091] The processing device 6 is connected to the ranging device 5. When the distance between the ranging device 5 and the bottom of the cup cavity 101 exceeds a threshold, the processing device 6 indicates that the thickness of the bottom of the cup cavity 101 is less than a preset thickness specification. When the thickness of the bottom of the cup cavity 101 is less than the preset thickness specification, it indicates a risk of puncture at the bottom of the cup cavity 101. In this case, a warning signal can be output to remind the operator to rotate the Faraday cup 1 in time and adjust the area directly opposite the slit 201. The value of this threshold depends on the depth of the Faraday cup 1 and the thickness of the bottom of the cup cavity 101, and is not specifically limited here. The processing device 6 can be located on the surface of the protective ring 2 away from the Faraday cup 1. The processing device 6 can be a microcontroller or other integrated circuits with data processing functions.

[0092] To facilitate reminding operators, such as Figure 1As shown, the Faraday cup assembly of this embodiment may further include an alarm device 7. The alarm device 7 may be disposed on the surface of the protective ring 2 away from the Faraday cup 1 and connected to the processing device 6. It may receive the aforementioned reminder signal and, upon receiving the reminder signal, issue an alarm. The alarm device 7 may be a buzzer to issue an alarm by emitting a sound, or it may be an indicator light to issue an alarm by emitting light. Of course, the alarm device 7 may also include both a buzzer and an indicator light.

[0093] In one implementation, such as Figure 6 As shown, in one embodiment, the Faraday cup assembly of this disclosure may further include at least one shielding member 8. The shielding member 8 is detachably disposed on the surface of the protective ring 2 away from the Faraday cup 1, and can be used to shield at least one slit 201. The material of the shielding member 8 is a material capable of blocking ion beams. For example, the material of the shielding member 8 may include aluminum or other metals, or it may include non-metallic materials such as silicon or silicon carbide. The area of ​​the cup cavity 101 opposite the shielded slit 201 no longer accepts ions, preventing the thickness of this area from being too small. The number of shielding members 8 may be half the number of slits 201. In use, half of the slits 201 can be shielded, and when switching is required, the other half of the slits 201 can be shielded, which can also prevent the Faraday cup 1 from being locally too thin.

[0094] This disclosure also provides an ion implantation device, including a Faraday cup assembly as described above. The specific structure of the Faraday cup assembly can be found in the embodiments described above, and will not be repeated here. Furthermore, the ion implantation device may also include an ion source, which is located on the side of the protective ring 2 away from the Faraday cup 1 and directly opposite the protective ring 2, for outputting an ion beam to the protective ring 2. The ion beam can enter the Faraday cup 1 through the slit 201.

[0095] This disclosure also provides a method of using an ion implantation device, which can be any of the ion implantation devices described in the above embodiments, and its structure will not be detailed here. The method of use includes:

[0096] Step S110: Detect the distance between the protective ring and the bottom of the cup cavity;

[0097] Step S120: When the distance between the protective ring and the cup cavity is greater than a threshold, the connector is disassembled from the mounting hole;

[0098] Step S130: Rotate the Faraday cup by an angle that is an integer multiple of the included angle between the centers of two adjacent fixing holes;

[0099] Step S140: Reconnect the connector to the mounting hole.

[0100] The distance between the detection protection ring 2 and the bottom of the cup cavity 1 can be measured by the aforementioned ranging device 5; and whether the distance is greater than the threshold can be determined by the processing device 6.

[0101] Furthermore, for an ion implantation apparatus equipped with an alarm device 7, the processing device 6 can control the alarm device 7 to issue an alarm when it determines that the distance between the protective ring 2 and the bottom of the cup cavity 101 is greater than a threshold. Details of the ranging device 5, the processing device 6, and the alarm device 7 can be found in the implementation method of the ion implantation apparatus described above. The beneficial effects of this method can also be found in the implementation method of the ion implantation apparatus described above, and will not be repeated here.

[0102] Other embodiments of this disclosure will readily occur to those skilled in the art upon consideration of the specification and practice of the invention disclosed herein. This application is intended to cover any variations, uses, or adaptations of this disclosure that follow the general principles of this disclosure and include common knowledge or customary techniques in the art not disclosed herein. The specification and examples are to be considered exemplary only, and the true scope and spirit of this disclosure are indicated by the appended claims.

Claims

1. A Faraday cup assembly, characterized in that, include: A base having a mounting surface, the mounting surface having a mounting groove, and the bottom surface of the mounting groove having at least one mounting hole; A Faraday cup, in the shape of a ring, is disposed on the bottom surface of the mounting groove. The Faraday cup has a ring-shaped cup cavity extending in the circumferential direction. The cup cavity has an open end facing the top of the mounting groove. The bottom of the cup cavity has a plurality of fixing holes evenly distributed in the circumferential direction, with each mounting hole facing one fixing hole. A protective ring, disposed on the mounting surface and shielding the mounting groove, and coaxially arranged with the Faraday cup, the projection of the protective ring at the open end covering the cup cavity, the protective ring having multiple circumferentially evenly distributed arc-shaped slits, the slits communicating with the cup cavity, the slits and the fixing hole satisfying the following conditions: Where n is the number of slits, c is the circumference of the circle in which the slit is located, L is the arc length of the slit, and m is the number of fixing holes; A connector is detachably connected to the mounting hole and passes through a fixing hole opposite to the mounting hole.

2. The Faraday cup assembly according to claim 1, characterized in that, The slit and the fixing hole also satisfy the following conditions: m = 2n.

3. The Faraday cup assembly according to claim 1, characterized in that, The connector has external threads and is threaded to the corresponding mounting hole.

4. The Faraday cup assembly according to claim 1, characterized in that, The Faraday cup assembly also includes: Multiple connectors are located at the bottom of the cup cavity and distributed circumferentially. The central angle of two adjacent connectors is the same as the central angle of two adjacent fixing holes.

5. The Faraday cup assembly according to claim 1, characterized in that, The number of slits is four, and the number of fixing holes is eight.

6. The Faraday cup assembly according to any one of claims 1-5, characterized in that, The Faraday cup assembly also includes: A ranging device is disposed on the surface of the protective ring near the Faraday cup and located inside the cup cavity. The ranging device is located between two adjacent slits and is used to detect the distance between the ranging device and the bottom of the cup cavity. A processing device, connected to the ranging device, is used to output a reminder signal when the distance between the ranging device and the bottom of the cup cavity is greater than a threshold.

7. The Faraday cup assembly according to claim 6, characterized in that, The Faraday cup assembly also includes: An alarm device, connected to the processing device, is used to issue an alarm when the alert signal is received.

8. The Faraday cup assembly according to any one of claims 1-5, characterized in that, The Faraday cup assembly also includes: At least one shielding element is detachably disposed on the surface of the protective ring away from the Faraday cup for shielding at least one of the slits.

9. The Faraday cup assembly according to claim 8, characterized in that, The material of the shielding component includes at least one of aluminum, silicon, and silicon carbide.

10. An ion implantation device, characterized in that, Includes the Faraday cup assembly as described in any one of claims 1-9.

11. A method of using an ion implantation device, wherein the ion implantation device is the ion implantation device according to claim 10, characterized in that, The method of use includes: Detect the distance between the protective ring and the bottom of the cup cavity; When the distance between the protective ring and the cup cavity is greater than a threshold, the connector is removed from the mounting hole; The Faraday cup is rotated by an angle that is an integer multiple of the included angle between the centers of two adjacent fixing holes; Reconnect the connector to the mounting hole.

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