A radio frequency chip testing device
By designing RF chip testing equipment, using mechanical positioning and automated needle lowering technology, combined with height and horizontal position detection devices, the automation and efficiency of chip testing are achieved, solving the problems of complex and low accuracy of traditional test operations.
Patent Information
- Application Number
- CN202010843749.8
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- Filing Date
- 2020-08-20
- Publication Date
- 2025-03-28
- Estimated Expiration
- 2040-08-20
AI Technical Summary
During the chip testing process, tiny and precise circuits are difficult to observe through the human eye, and the lack of standard connection interfaces, resulting in the need to use a microscope and microneedle to perform the test. The operation is complex and demanding, which can easily cause poor testing and economic losses.
A radio frequency chip testing equipment is designed, using mechanical positioning and lower needles, combined with a height position detection device and a horizontal position detection device, and driving the micro-needle holder for precise connection through the first moving mechanism to realize automated testing.
It improves the degree of automation and efficiency of tests, reduces the requirements for testers, enhances the accuracy of the connection between microneedles and chips, and reduces losses and errors during the test process.
Smart Images
Figure CN112114241B_ABST
Abstract
Description
Technical Field
[0001] The present invention relates to the field of chip testing, and in particular to a radio frequency chip testing device. Background Art
[0002] Due to the rapid development of microwave integrated circuits and micro-assembly technology, circuit miniaturization has become an inevitable trend, especially in the chip and semiconductor industries. The tiny and precise circuits are no longer observable with the naked eye. The micro-assembly circuits are later used with gold wire bonding technology. There is no standard connection interface and external devices cannot be directly connected. Microscope observation is required. At the same time, micro-needles are used to connect the gold surface test points. In order to ensure the reliability of the test, the micro-needles need to be reliably connected to the test points. At the same time, the force should not be too large to cause damage to the gold surface, which will affect the later bonding process. The micro-needles cannot withstand excessive force. Excessive force will cause damage to the micro-needles. At the same time, the micro-needles are expensive and cannot be repaired. Poor contact will cause the product to ignite and burn, resulting in considerable economic losses (the current price of micro-assembly high-frequency RF chips is high). Combined with the above reasons, the industry's testing has extremely high requirements for operators and does not allow errors. Designing a device that can perform automated testing on chips has become an urgent problem to be solved. Summary of the invention
[0003] In view of the above problems, the present invention provides a radio frequency chip testing device, which has the advantages of mechanical positioning and needle insertion, high positioning accuracy, higher needle insertion accuracy, low requirements for testers, and higher testing efficiency.
[0004] The technical solution of the present invention is:
[0005] A radio frequency chip testing device, comprising:
[0006] A limiting device, the limiting device is used to limit the chip to be tested;
[0007] A height position detection device, the height position detection device is arranged outside the limit device, and the height position detection device is used to detect the height error value of the chip to be tested;
[0008] A horizontal position detection device, the horizontal position detection device is arranged in the height direction of the limit device, and the horizontal position detection device is used to detect the horizontal position of the chip to be tested;
[0009] A microneedle holder, on which microneedles for connecting to a chip to be tested are arranged;
[0010] A first motion mechanism, the microneedle holder is arranged on the first motion mechanism, and the first motion mechanism is used to drive the microneedle holder to connect the microneedles according to the height error value detected by the height position detection device and the horizontal position detected by the horizontal position detection device;
[0011] A testing system is connected to the microneedle, and the testing system is used to test the chip to be tested through the microneedle.
[0012] The working principle of the above technical solution is as follows:
[0013] After the chip to be tested is placed on the limiting device for limiting, the height position detection device and the horizontal position detection device perform height error value detection and horizontal position detection on the chip to be tested located on the limiting device, and the first motion mechanism drives the microneedle holder to move the lower needle according to the height error value and the horizontal position, so that the microneedle is connected to the test point of the chip to be tested, and the test system tests the chip to be tested through the microneedle.
[0014] The testing device of the present invention is provided with a first motion mechanism, so that the needle insertion process does not require manual operation, the testing of the equipment has lower requirements on the level of the tester, and the test efficiency is higher. By setting up a height position detection device and a horizontal position detection device, the height error and horizontal position of the chip to be tested on the limiting device are detected, so that the first motion mechanism drives the microneedle to insert the needle with higher accuracy, which greatly reduces the loss caused in the test process, and also ensures the connection between the microneedle and the chip to be tested, ensuring the test effect.
[0015] In a further technical solution, the limiting device includes a vacuum plate and a limiting frame, the limiting frame is arranged on the vacuum plate, the vacuum plate is provided with a vacuum suction port, the limiting frame is provided with a limiting port, the shape of the limiting port matches the shape of the chip to be tested, and the position of the limiting port matches the position of the vacuum suction port. The vacuum plate is connected to a vacuum suction device.
[0016] When limiting the position of the chip to be tested, the vacuum adsorption port performs vacuum adsorption, and the chip to be tested located in the limiting frame is limited by vacuum adsorption.
[0017] It uses vacuum adsorption to limit the position, which has good limiting effect and little damage to the chip. It is also simple to operate and has high limiting efficiency. It can also limit multiple groups of chips to be tested at the same time, which can achieve more efficient testing.
[0018] In a further technical solution, the height position detection device includes a laser generator and a laser receiver.
[0019] The height error of the chip to be tested is detected by laser, with higher detection accuracy.
[0020] In a further technical solution, the horizontal position detection device includes a microscope vision system.
[0021] The microscope vision system is used to detect the horizontal position of the chip to be tested, with high detection accuracy and efficiency. Multiple groups of chips to be tested can also be detected at the same time, which can achieve more efficient testing.
[0022] In a further technical solution, a second motion mechanism is further included, the microscope vision system is arranged on the second motion mechanism, and the second motion mechanism is used to drive the microscope vision system to adjust its position.
[0023] By setting up the second motion mechanism, the position of the microscope vision system can be adjusted, thereby improving the practicability of the device and being able to adapt to a wider range of tests.
[0024] In a further technical solution, a third motion mechanism is further included, the limiting device is arranged on the third motion mechanism, and the third motion mechanism is used to drive the limiting device to adjust the position.
[0025] By providing the third motion mechanism, the position of the limiting device can be adjusted, thereby improving the practicability of the device and being able to adapt to a wider range of tests.
[0026] The beneficial effects of the present invention are:
[0027] 1. The testing device of the present invention is provided with a first motion mechanism, so that the process of inserting the needle does not require manual operation, the testing of the device has lower requirements on the level of the tester, and the testing efficiency is higher. The height error and horizontal position of the chip to be tested on the limit device are detected by the height position detection device and the horizontal position detection device, so that the first motion mechanism drives the microneedle to insert the needle with higher accuracy, which greatly reduces the loss caused during the test process, and also ensures the connection between the microneedle and the chip to be tested, and ensures the test effect;
[0028] 2. It uses vacuum adsorption to limit the position, which has good limiting effect and little damage to the chip. It is also simple to operate and has high limiting efficiency. It can also limit multiple groups of chips to be tested at the same time, which can achieve more efficient testing;
[0029] 3. The height error of the chip to be tested is detected by laser, with higher detection accuracy;
[0030] 4. The horizontal position of the chip to be tested is detected by the microscope vision system, which has high detection accuracy and efficiency. It can also detect multiple groups of chips to be tested at the same time, which can achieve more efficient testing;
[0031] 5. By setting up the second motion mechanism, the position of the microscope vision system can be adjusted, which improves the practicality of the equipment and can adapt to a wider range of tests;
[0032] 6. By setting up the third motion mechanism, the position of the limit device can be adjusted, which improves the practicality of the equipment and can adapt to a wider range of tests. BRIEF DESCRIPTION OF THE DRAWINGS
[0033] Figure 1 It is a schematic diagram of the overall structure of a radio frequency chip testing device according to an embodiment of the present invention;
[0034] Figure 2 yes Figure 1 A schematic diagram of the local enlarged structure at point A in the middle;
[0035] Figure 3 It is a schematic diagram of the working state of a height position detection device of a radio frequency chip testing device according to an embodiment of the present invention;
[0036] Figure 4 It is a structural schematic diagram of a limiting device of a radio frequency chip testing device described in an embodiment of the present invention.
[0037] Description of reference numerals:
[0038] 10. Cabinet; 20. Test bench; 30. Limit device; 31. Vacuum plate; 311. Vacuum suction port; 32. Limit frame; 321. Limit port; 40. First motion mechanism; 50. Microneedle holder; 60. Microscope vision system; 70. Second motion mechanism; 80. Height position detection device. DETAILED DESCRIPTION
[0039] The embodiments of the present invention will be further described below in conjunction with the accompanying drawings.
[0040] Example:
[0041] like Figure 1-Figure 3 As shown, a radio frequency chip testing device comprises:
[0042] A limiting device 30, the limiting device 30 is used to limit the chip to be tested;
[0043] The direction perpendicular to the limiting device 30 is defined as the Z-axis direction, and the two directions parallel to the limiting device 30 and perpendicular to each other are defined as the X-axis direction and the Y-axis direction.
[0044] A height position detection device 80, which is arranged outside the limiting device 30, and is used to detect the height error value of the chip to be tested;
[0045] In this embodiment, the height position detection device 80 is arranged in the X-axis direction of the limit device 30, and what is detected is the error value of the chip to be tested in the Z-axis direction; the error value is detected because the size of the chip to be tested is known, and its original height is known. In order to avoid test errors or damage caused by height errors, height error value detection is performed to improve detection accuracy, safety and effect.
[0046] A horizontal position detection device, which is arranged above the limit device 30 and is used to detect the horizontal position of the chip to be tested;
[0047] In this embodiment, the horizontal position detection device is arranged in the Z-axis direction of the limiting device 30. The horizontal position detection device detects the position of the chip to be tested in the X-axis direction and the Y-axis direction.
[0048] A microneedle holder 50, on which microneedles for connecting the chip to be tested are arranged;
[0049] A first motion mechanism 40, a microneedle holder 50 is disposed on the first motion mechanism 40, and the first motion mechanism 40 is used to drive the microneedle holder 50 to perform microneedle connection according to the height error value detected by the height position detection device 80 and the horizontal position detected by the horizontal position detection device;
[0050] In this embodiment, the first motion mechanism 40 is an electric three-axis motion mechanism. The motion directions of the first motion mechanism 40 are the X-axis direction, the Y-axis direction and the Z-axis direction.
[0051] The testing system is connected with the microneedle, and the testing system is used to test the chip to be tested through the microneedle.
[0052] A test bench 20, on which the above structures are installed;
[0053] The cabinet 10 and the test bench 20 are installed on the cabinet 10 . The cabinet 10 is also provided with a power supply device for supplying power to the whole set of equipment, a communication device for communicating with the outside world and other auxiliary devices.
[0054] It can be understood that the above-mentioned positions for detecting the chip to be tested and the positions for connecting the chip to be tested are both positions of test points on the chip to be tested.
[0055] The working principle of the above technical solution is as follows:
[0056] After the chip to be tested is placed on the limiting device 30 for limiting, the height position detection device 80 and the horizontal position detection device perform height error value detection and horizontal position detection on the chip to be tested located on the limiting device 30, and the first motion mechanism 40 drives the microneedle holder 50 to move the lower needle according to the height error value and the horizontal position, so that the microneedle is connected to the test point of the chip to be tested, and the test system tests the chip to be tested through the microneedle.
[0057] The testing device of the present invention is provided with a first motion mechanism 40, so that the needle insertion process does not require manual operation, the testing of the equipment has lower requirements on the level of the tester, and the test efficiency is higher. By setting up a height position detection device 80 and a horizontal position detection device, the height error and horizontal position of the chip to be tested on the limiting device 30 are detected, so that the first motion mechanism 40 drives the microneedle to insert the needle with higher accuracy, which greatly reduces the loss caused during the test process, and also ensures the connection between the microneedle and the chip to be tested, ensuring the test effect.
[0058] Connecting the chip to be tested by microneedles and connecting the test system to the chip to be tested is a prior art in the art and will not be described in detail here.
[0059] In another embodiment, if Figure 4 As shown, the limiting device 30 includes a vacuum plate 31 and a limiting frame 32. The limiting frame 32 is arranged on the vacuum plate 31. The vacuum plate 31 is provided with a vacuum suction port 311. The limiting frame 32 is provided with a limiting port 321. The shape of the limiting port 321 matches the shape of the chip to be tested, and the position of the limiting port 321 matches the position of the vacuum suction port 311. The vacuum plate 31 is connected to a vacuum suction device.
[0060] When the chip to be tested is limited in position, the vacuum adsorption port 311 performs vacuum adsorption, and the chip to be tested located in the limiting frame 32 is limited in position by vacuum adsorption.
[0061] It uses vacuum adsorption to limit the position, which has good limiting effect and little damage to the chip. It is also simple to operate and has high limiting efficiency. It can also limit multiple groups of chips to be tested at the same time, which can achieve more efficient testing.
[0062] In another embodiment, if Figure 4 As shown, a plurality of vacuum suction ports 311 are provided on the vacuum plate 31 , and each vacuum suction port 311 matches at least one limiting port 321 .
[0063] By setting multiple vacuum suction ports 311, each vacuum suction port 311 matches at least one limiting port 321, it is possible to set multiple groups of chips to be tested on the same limiting device 30. Different limiting ports 321 can also be designed so that the models of the chips to be tested can be different, thereby achieving more efficient testing.
[0064] In another embodiment, if Figure 3 As shown, the height position detection device 80 includes a laser generator and a laser receiver.
[0065] The height error of the chip to be tested is detected by laser, with higher detection accuracy.
[0066] In this embodiment, the laser generator and the laser receiver are integrated in one housing. When performing height position detection, the laser receiver receives the laser reflected back by the chip to be tested. With this setting, the structure is more compact, easy to install and use, and convenient for wiring.
[0067] In another embodiment, if Figure 2 As shown, the horizontal position detection device includes a microscope vision system 60.
[0068] The microscope vision system 60 is used to detect the horizontal position of the chip to be tested, with high detection accuracy and efficiency. Multiple groups of chips to be tested can also be detected at the same time, which can achieve more efficient testing.
[0069] In another embodiment, if Figure 2 As shown, it also includes a second motion mechanism 70, and the microscope vision system 60 is arranged on the second motion mechanism 70. The second motion mechanism 70 is used to drive the microscope vision system 60 to adjust its position.
[0070] By providing the second motion mechanism 70, the position of the microscope vision system 60 can be adjusted, thereby improving the practicability of the device and being able to adapt to a wider range of tests.
[0071] In this embodiment, the second motion mechanism 70 is an electric three-axis motion mechanism. The motion directions of the second motion mechanism 70 are the X-axis direction, the Y-axis direction and the Z-axis direction.
[0072] In another embodiment, a third motion mechanism is further included, and the limiting device 30 is disposed on the third motion mechanism, and the third motion mechanism is used to drive the limiting device 30 to adjust the position.
[0073] By providing the third motion mechanism, the position of the limiting device 30 can be adjusted, thereby improving the practicability of the device and being able to adapt to a wider range of tests.
[0074] In this embodiment, the third motion mechanism is a lifting mechanism, which is used to adjust the height of the limiting device 30 .
[0075] In this embodiment, the third motion mechanism drives the limiting device 30 to move in the Z-axis direction.
[0076] In another embodiment, the third motion mechanism is a three-axis motion mechanism, which can adjust the position of the limiting device 30 in a wider range.
[0077] In this embodiment, the third motion mechanism drives the limiting device 30 to move in the X-axis direction, the Y-axis direction and the Z-axis direction.
[0078] The above-mentioned embodiments only express the specific implementation of the present invention, and the description thereof is relatively specific and detailed, but it cannot be understood as limiting the scope of the present invention. It should be pointed out that, for ordinary technicians in this field, several variations and improvements can be made without departing from the concept of the present invention, which all belong to the protection scope of the present invention.
Claims
1. A radio frequency chip testing device, characterized in that: include: A limiting device, the limiting device is used to limit the chip to be tested; A height position detection device, the height position detection device is arranged outside the limit device, and the height position detection device is used to detect the height error value of the chip to be tested; A horizontal position detection device, the horizontal position detection device is used to detect the horizontal position of the chip to be tested; A microneedle holder, on which microneedles for connecting to a chip to be tested are arranged; A first motion mechanism, the microneedle holder is arranged on the first motion mechanism, and the first motion mechanism is used to drive the microneedle holder to connect the microneedles according to the height error value detected by the height position detection device and the horizontal position detected by the horizontal position detection device; A testing system, the testing system is connected to the microneedle, and the testing system is used to test the chip to be tested through the microneedle; The limiting device comprises a vacuum plate and a limiting frame, wherein the limiting frame is arranged on the vacuum plate, the vacuum plate is provided with a vacuum suction port, the limiting frame is provided with a limiting port, the shape of the limiting port matches the shape of the chip to be tested, and the position of the limiting port matches the position of the vacuum suction port; The height position detection device includes a laser generator and a laser receiver; The horizontal position detection device includes a microscope vision system; It also includes a second motion mechanism, the microscope vision system is arranged on the second motion mechanism, and the second motion mechanism is used to drive the microscope vision system to adjust its position.
2. The radio frequency chip testing device according to claim 1, characterized in that: It also includes a third motion mechanism, the limiting device is arranged on the third motion mechanism, and the third motion mechanism is used to drive the limiting device to adjust the position.
Citation Information
Patent Citations
Radio frequency chip test equipment
CN212321785U