Plasma cleaning machine

Abstract

The present invention discloses a plasma cleaning machine, which includes a material support jig circulation mechanism, wherein the material support jig circulation mechanism includes a material support jig, a feeding module, a return material module and a first lifting device. The material support jig is used to place the material to be cleaned, and the feeding module includes two feeding guide rails arranged in parallel and at intervals, and a feeding piece slidably mounted on the two feeding guide rails. The interval between the two feeding guide rails is greater than the width of the material support jig in the arrangement direction of the two feeding guide rails. The feeding piece has an opening and is a semi-enclosed structure capable of positioning and driving the material support jig to move. The return material module is arranged between the two feeding guide rails of the feeding module and below the feeding piece, and is capable of driving the material support jig to move. The first lifting device is arranged below the return material module, and the lifting device is capable of driving the material support jig to cyclically switch between the feeding module and the return material module. The plasma cleaning machine of the present invention can improve cleaning efficiency.

Description

Technical Field

[0001] The present invention relates to the technical field of plasma cleaning machines, and in particular to a plasma cleaning machine. Background Art

[0002] In the IC industry, substrates and lead frames often retain contaminants such as excess glue and oxides during production, which can affect wire bonding. Currently, plasma cleaning is the primary method for cleaning these devices. However, some plasma cleaning machines have low cleaning efficiency, impacting production costs.

[0003] The above content is only used to assist in understanding the technical solution of the invention and does not constitute an admission that the above content is prior art. Summary of the Invention

[0004] The main purpose of the present invention is to provide a plasma cleaning machine, aiming to solve the technical problem that some existing plasma cleaning machines have low cleaning efficiency, which in turn affects production costs.

[0005] To achieve the above objectives, the plasma cleaning machine proposed in the present invention includes a material cartridge mounting mechanism, a cavity module, and a material support fixture circulation mechanism. The material cartridge mounting mechanism is used to mount a material cartridge containing material, and the cavity module is used to clean the material. The material support fixture circulation mechanism is capable of transporting the material between the material cartridge mounting mechanism and the cavity module. The material support fixture circulation mechanism includes a material support fixture, a feeding module, a material return module, and a first lifting device.

[0006] The material supporting jig is used to place the material to be cleaned, and the feeding module includes two feeding guide rails arranged in parallel and at intervals, and a feeding piece slidably mounted on the two feeding guide rails. The interval between the two feeding guide rails is greater than the width of the material supporting jig in the arrangement direction of the two feeding guide rails, and the feeding piece is a semi-enclosed structure with an opening and can position and drive the material supporting jig to move. The return material module is arranged between the two feeding guide rails of the feeding module and below the feeding piece, and can drive the material supporting jig to move. The first lifting device is arranged below the return material module, and the lifting device can drive the material supporting jig to cyclically switch between the feeding module and the return material module.

[0007] In one embodiment, the feeding member has two sliding parts that are slidably connected to the two feeding guide rails in a one-to-one correspondence, and each of the sliding parts is connected to a positioning block protruding toward the other sliding part, and the positioning block is used to support and position the material supporting fixture.

[0008] In one embodiment, the positioning block is rotatably connected to the feeding member, and its rotation axis is parallel to the extension direction of the feeding guide rail, so that the positioning block can flip upward.

[0009] In one embodiment, the return material module includes two return material guide rails arranged in parallel and at intervals, and a return material piece is slidably mounted on at least one of the return material guide rails, and the return material piece can position and drive the supporting fixture to move.

[0010] In one embodiment, the material support fixture is further provided with a second positioning groove adapted to the return material piece, and the return material piece can be snapped into the second positioning groove; and / or,

[0011] The bottom surface and / or side surface of the material supporting fixture are convexly provided with a ball structure, and the ball structure can be in rolling contact with the return guide rail of the return module.

[0012] In one embodiment, the plasma cleaning machine further includes a pushing mechanism for pushing out the material to be cleaned in the material box and pushing the cleaned material back into the material box. The pushing mechanism includes a pushing module, an adjustment module and a pushing piece.

[0013] The pusher module includes a pusher guide rail and a pusher drive member, and the adjustment module includes an adjustment guide rail and an adjustment drive member. The adjustment guide rail is slidably mounted on the pusher guide rail and arranged crosswise with the pusher guide rail. The adjustment guide rail can be driven to slide by the pusher drive member. The pusher member is slidably mounted on the adjustment guide rail and can be driven to slide by the adjustment drive member.

[0014] In one embodiment, the cartridge mounting mechanism includes a cartridge mounting seat, a clamping handle driver, and a clamping assembly. The clamping assembly is mounted on the cartridge mounting seat and includes a first clamping member and a second clamping member spaced opposite each other along a straight line. At least one of the first clamping member and the second clamping member can be driven by the clamping driver to slide toward the other. The first clamping member and the second clamping member are used to jointly clamp the cartridge to be installed.

[0015] In one embodiment, the magazine mounting mechanism further comprises a lifting module and a transverse module. The lifting module comprises a lifting drive and a vertically extending first lifting guide rail. The transverse module comprises a transverse drive and a horizontally extending transverse guide rail, wherein the transverse guide rail is slidably mounted on the first lifting guide rail and can be driven to slide by the lifting drive. The magazine mounting seat is slidably mounted on the transverse guide rail and can be driven to slide by the transverse drive.

[0016] In one embodiment, the plasma cleaning machine further comprises a material guide mechanism, which is disposed between the material box mounting mechanism and the material support fixture circulation mechanism and is used to guide the material in the material box to the material support fixture; the material guide mechanism comprises a material guide mounting seat, a width adjustment drive, and a material guide module. The material guide module is mounted on the material guide mounting seat and comprises two material guide assemblies spaced opposite each other along a straight line. Each material guide assembly is provided with a conveying structure on a surface facing the other material guide assembly, and the two conveying structures jointly support and convey the material to be conveyed. At least one of the two material guide assemblies can be driven by the width adjustment drive and moved toward the other to adjust the spacing between the two material guide assemblies.

[0017] In one embodiment, the cavity module includes a second lifting device and a limiting device. The first cavity is installed in the cleaning machine body and is used to clean the material to be cleaned. The second lifting device can drive the first cavity to move up and down. The limiting device is used to limit the position of the first cavity after the second lifting device lifts the first cavity.

[0018] When cleaning materials, the plasma cleaning machine of the present invention can first place the materials in the material box on the material support jig, then use the feeding module to send the material support jig to the cavity module, and then use the first lifting device to lift the material support jig into the cavity module for cleaning. After cleaning, the first lifting device can be lowered to bring the material support jig to the return module, which then brings the material support jig back to the material box mounting mechanism for material replacement. After the material replacement is completed, the first lifting device can return the material support jig to the feeding member on the feeding module to clean the next batch of materials.

[0019] It can be understood that because the feeding piece is a semi-enclosed structure with an opening, when the first lifting device lifts the supporting fixture on the feeding piece and cleans it, the feeding piece can avoid the obstruction of the first lifting device through its opening and move back to the material box installation mechanism, so that the cleaning machine can simultaneously perform the material changing process by positioning another supporting fixture on the feeding piece while performing the cleaning process, which greatly improves the cleaning efficiency of the plasma cleaning machine and helps to reduce production costs.

[0020] In addition, the first lifting device can also bring the supporting fixture on the return module back to the feeding module, so that the plasma cleaning machine can realize the cycle of material replacement and cleaning through the two supporting fixtures, thereby improving the cleaning efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on the structures shown in these drawings without paying any creative work.

[0022] Figure 1 This is a structural diagram of an embodiment of a plasma cleaning machine of the present invention;

[0023] Figure 2 Based Figure 1 Schematic diagram of the jig circulation mechanism for the middle support jig;

[0024] Figure 3 for Figure 1 A schematic structural diagram of an embodiment of a middle support fixture circulation mechanism;

[0025] Figure 4 for Figure 3 A schematic structural diagram of an embodiment of a feeding member;

[0026] Figure 5 for Figure 3 A schematic structural diagram of an embodiment of a middle support fixture;

[0027] Figure 6 for Figure 1 A schematic diagram of a jig circulation mechanism according to another embodiment of the middle support jig circulation mechanism;

[0028] Figure 7 Based Figure 1 A schematic structural diagram of an embodiment of a middle material pushing mechanism;

[0029] Figure 8 Based Figure 1 A schematic structural diagram of another embodiment of the middle pushing mechanism;

[0030] Figure 9 Based Figure 1 A schematic structural diagram of an embodiment of a medium material box installation mechanism;

[0031] Figure 10 Based Figure 9 A schematic structural diagram of an embodiment of a medium material box mounting base;

[0032] Figure 11 Based Figure 1 A schematic structural diagram of an embodiment of a middle material guiding mechanism;

[0033] Figure 12 Based Figure 1 A partial structural diagram of an embodiment of a middle cavity module.

[0034] Description of Figure Numbers:

[0035]

[0036]

[0037] The purpose, features and advantages of the present invention will be further described with reference to the accompanying drawings and in conjunction with the embodiments. DETAILED DESCRIPTION

[0038] It should be noted that if the embodiments of the present invention involve directional indications (such as up, down, left, right, front, back, etc.), the directional indications are only used to explain the relative position relationship, movement status, etc. between the various components under a certain specific posture (as shown in the accompanying drawings). If the specific posture changes, the directional indications will also change accordingly.

[0039] In addition, if there are descriptions involving "first", "second", etc. in the embodiments of the present invention, the descriptions of "first", "second", etc. are only for descriptive purposes and cannot be understood as indicating or suggesting their relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of such features. In addition, the meaning of "and / or" appearing in the full text is to include three parallel solutions. Taking "A and / or B" as an example, it includes solution A, or solution B, or a solution in which both A and B are satisfied. In addition, the technical solutions between the various embodiments can be combined with each other, but it must be based on the ability of ordinary technicians in this field to implement. When the combination of technical solutions is mutually contradictory or cannot be implemented, it should be deemed that such a combination of technical solutions does not exist and is not within the scope of protection required by the present invention.

[0040] The present invention provides a plasma cleaning machine.

[0041] In the embodiment of the present invention, Figure 1 As shown, the plasma cleaning machine includes a material box mounting mechanism 40, a material pushing mechanism 30, a material guiding mechanism 50, a material conveying mechanism (such as a material support fixture circulation mechanism 20, the same below) and a cavity module 60. Before the plasma cleaning machine 10 cleans materials such as substrates and lead frames, multiple materials are stored in a material box 70. The material box 70 has a box-shaped structure and has an opening that passes through from front to back. The material box 70 has multiple layers of material placement arranged in an upper and lower manner, and each layer can hold a piece of material to be cleaned or that has been cleaned. The opening that passes through from front to back of the material box 70 allows the material to be pushed out or pushed back, thereby realizing the loading and unloading of materials in the material box 70.

[0042] The material box installation mechanism 40 is used to install and position the material box 70, and can drive the material box 70 to move up and down so that the materials in each material placement layer can be pushed out or pushed back.

[0043] The pushing mechanism 30 is mainly used to push the substrate or lead frame in the material box 70 onto the material conveying mechanism (such as the material support fixture 21), thereby completing the loading process. In addition, the pushing mechanism 30 is also used to push the substrate or lead frame cleaned on the material support fixture 21 back into the material box 70, thereby completing the unloading process. Of course, there can be multiple pushing mechanisms 30, for example, there are two pushing mechanisms 30, one of which is located behind the material box mounting mechanism 40 and is responsible for pushing the material in the material box 70, and the other can be located in front of the material box mounting mechanism 40 and is responsible for pushing the cleaned material on the material support fixture 21 back into the material box 70.

[0044] The material guide mechanism 50 is located between the material box mounting mechanism 40 and the material conveying mechanism, and is primarily used to transfer material between the material box 70 and the material conveying mechanism (such as the material support fixture 21). This not only prevents the pushing mechanism 30 from incompletely pushing the material, which affects loading and unloading, but also reduces the generation of dust pollution. Specifically, after the pushing mechanism 30 pushes the material out of the material box 70, the material guide mechanism 50 transfers the material to the material conveying mechanism. After the pushing mechanism 30 pushes the material from the material conveying mechanism, the material guide mechanism 50 returns the material to the material box 70, ensuring smooth loading and unloading.

[0045] The material transport mechanism is primarily used to transport materials from the magazine mounting mechanism 40 to the cavity module 60 for cleaning, and to transport cleaned materials from the cavity module 60 back to the magazine mounting mechanism 40 for storage. When transporting materials, the material transport mechanism can first place and position the materials using the material support fixture 21, and then transport the material support fixture 21 to the cavity module 60 or the magazine mounting mechanism 40 using a drive member, transport rails, etc.

[0046] The cavity module 60 includes a reaction cavity for cleaning materials. After the materials are transported to the cavity module 60, the materials can be placed in the reaction cavity. The electric field in the reaction cavity will generate plasma by ionizing the gas (such as argon), and then the materials will be cleaned with the help of the properties of the plasma with active components.

[0047] However, the cleaning efficiency of some existing plasma cleaning machines 10 is low, which in turn affects the production cost. Therefore, the present invention proposes a material support fixture circulation mechanism 20 to improve the cleaning efficiency of the plasma cleaning machine 10 by improving the material transportation efficiency, thereby solving the above technical problems.

[0048] In the embodiment of the present invention, Figures 2 to 6As shown, the material support fixture circulation mechanism 20 includes a material support fixture 21, a feeding module 22, a return module 23 and a first lifting device 24. The material support fixture 21 is used to place the material to be cleaned. The material support fixture 21 can position the placed material by clamping, pressing, adsorption, etc., and the specific method can be set according to actual needs. In this embodiment, a plurality of material clamping grooves for clamping materials can be provided on the pushing fixture. The material clamping groove can have a front-to-back through opening like the material box 70 to facilitate the advancement and exit of the material. The width of the material clamping groove is adjustable, which facilitates the advancement and push-out of the material, and can also better clamp the material and adapt to materials of different widths.

[0049] The feeding module 22 includes two feeding rails 221 arranged in parallel and spaced apart, and a feeding member 222 slidably mounted on the two feeding rails 221. When the material support fixture circulation mechanism 20 of the present invention is applied to a plasma cleaning machine 10, the two ends of the feeding module 22 (or the return module 23) can correspond to the material box mounting mechanism 40 and the cavity module 60 of the plasma cleaning machine 10, that is, to the material changing station and the cleaning station, respectively, and one end of the feeding module 22 (or the return module 23) can be located below the reaction chamber of the cavity module 60.

[0050] The spacing between the two feeding guide rails 221 is greater than the width of the supporting jig 21 in the arrangement direction of the two feeding guide rails 221. Specifically, taking the supporting jig 21 as an example, when the supporting jig 21 is transported, the two feeding guide rails 221 are parallel to the two wide sides of the supporting jig 21, and the spacing between the two feeding guide rails 221 is greater than the long sides of the supporting jig 21. The supporting jig 21 is able to slide on the two feeding rails by being positioned on the feeding member 222.

[0051] The feeder 222 has an open semi-enclosed structure and is capable of positioning and driving the support fixture 21. Specifically, the feeder 222 has a generally C-shaped opening structure and comprises two sliding portions 2221 and a connecting portion connecting the two sliding portions 2221. The connecting portion is capable of maintaining the relative position of the two sliding portions 2221, thereby preventing the two sliding portions 2221 from shifting relative to each other and affecting the positioning of the support fixture 21.

[0052] There are many ways to position the support fixture 21 on the feeding member 222. Positioning grooves can be provided on the feeding member 222, and the support fixture 21 can be placed directly on the feeding member 222. Alternatively, the support fixture 21 can be positioned by clamping, snapping, or bracketing. The specific method can be set according to actual needs. Of course, the feeding module 22 can also include a drive component such as a motor or a cylinder to drive the feeding member 222 to slide on the feeding guide rail 221, thereby driving the support fixture 21 to slide.

[0053] It is understandable that because the feeder 222 is a semi-enclosed structure with an opening, when the first lifting device 24 passes through the feeder 222 from below and lifts the material on the feeder 222, the feeder 222 can avoid the first lifting device 24 through its opening and move back along the feed guide rail 221 without being affected by the first lifting device 24. Moreover, after the feeder 222 moves back, it will no longer restrict the vertical movement of the supporting jig 21, and the first lifting device 24 can then bring the lifted supporting jig 21 to the return module 23.

[0054] The return module 23 is located between the two feed rails 221 of the feed module 22 and below the feed member 222, and is capable of driving the support fixture 21. The return module 23 can be a conveyor mechanism such as a conveyor belt or roller, or it can be composed of a return rail 231 and a return member 232. The return module 23 can be equipped with only one return rail 231 or multiple return rails, and the specific configuration can be determined based on actual needs.

[0055] The first lifting device 24 is provided below the return material module 23. The first lifting device 24 can drive the material support jig 21 to cyclically switch between the feed module 22 and the return material module 23. Specifically, during cleaning, the material to be cleaned can be first placed on the material support jig 21, and then the material support jig 21 can be sent to the cleaning station through the feed module 22. Then, the material support jig 21 can be lifted into the reaction chamber by the first lifting device 24 for cleaning. After the cleaning is completed, the material support jig 21 can be brought to the return material module 23 by descending the first lifting device 24. The return material module 23 then drives the material support jig 21 to the material replacement station for material replacement. After the material replacement is completed, the first lifting device 24 can bring the material support jig 21 back to the feeding piece 222 on the feed module 22 for cleaning the next batch of materials.

[0056] There are various ways for the first lifting device 24 to bring the supporting jig 21 from the return module 23 back to the feeder 222 on the feeder module 22. For example, the feeder 222 and the supporting jig 21 can be vertically offset, and then the first lifting device 24 can lift the supporting jig 21 above the feeder module 22 before positioning the supporting jig 21 on the feeder 222. Alternatively, the feeder 222 can be equipped with a movable, flippable, or foldable structure to prevent the feeder 222 from obstructing the supporting jig 21 from returning to the feeder module 22.

[0057] When replacing materials, the material can be replaced directly on the return module 23, after returning the support jig 21 to the feeder 222, or by other replacement methods. For example, in one embodiment, the material is primarily replaced above the feeder module 22. In this case, the support jig 21 can be lifted to the top of the support module by the first lifting device 24 and the material can be replaced. After the replacement is completed, the first lifting device 24 drives the support jig 21 downward, while the feeder 222 intercepts and positions the support jig 21 below, so that the support jig 21 does not continue to move downward with the first lifting device 24, so that the material can continue to be circulated and cleaned.

[0058] It is understandable that because the feeder 222 is a semi-enclosed structure with an opening, when the first lifting device 24 lifts the supporting fixture 21 on the feeder 222 and performs cleaning, the feeder 222 can avoid the obstruction of the first lifting device 24 through its opening and move back to the material change station, thereby allowing the cleaning machine to simultaneously perform the material change process by positioning another supporting fixture 21 on the feeder 222 while performing the cleaning process, greatly improving the cleaning efficiency of the plasma cleaning machine 10, thereby helping to reduce production costs. In addition, the first lifting device 24 can also bring the supporting fixture 21 on the return module 23 back to the feed module 22, allowing the plasma cleaning machine 10 to achieve a material change and cleaning cycle through the two supporting fixtures 21, thereby improving cleaning efficiency.

[0059] In one embodiment, combining Figures 3 to 5 The feed member 222 has two sliding portions 2221 that are slidably connected to the two feed guide rails 221 in a one-to-one correspondence. Each sliding portion 2221 is connected to a positioning block 2222 that protrudes toward the other sliding portion 2221. The positioning block 2222 is used to support and position the material support fixture 21. Each sliding portion 2221 is generally plate-shaped, and a connecting portion is further connected between the two sliding portions 2221 to ensure that the relative position between the two sliding portions 2221 remains stable. The positioning block 2222 protruding from the sliding portion 2221 can be fixedly connected to the sliding portion 2221 or flexibly connected, and only needs to be able to support the material support fixture 21.

[0060] There are many ways to position the support jig 21 with the positioning block 2222. For example, the support jig 21 may be provided with a first positioning groove 211 that matches the positioning block 2222, and the positioning block 2222 may be snap-fitted into the first positioning groove 211. Of course, the positioning block 2222 may also be provided with a groove, and the support jig 21 may be provided with a corresponding protrusion, so that the support jig 21 can be positioned by snapping the protrusion into the groove.

[0061] In other embodiments, Figure 4As shown, the positioning block 2222 on each sliding portion 2221 has a limiting surface 2223 facing the other sliding portion 2221. The multiple limiting surfaces 2223 jointly limit the displacement of the supporting jig 21 in the arrangement direction of the two feeding guide rails 221. Specifically, when the supporting jig 21 is positioned on the feeding member 222, the limiting surface 2223 on each positioning block 2222 can abut against the side surface of the supporting jig 21 to prevent the supporting jig 21 from shifting in the arrangement direction of the two feeding guide rails.

[0062] In one embodiment, if Figure 4 As shown, the positioning block 2222 is rotatably connected to the feed member 222, and its rotation axis is parallel to the extension direction of the feed guide 221, so that the positioning block 2222 can flip upward. This allows the support jig 21 to pass directly through the feed member 222 from below and be lifted to above the feed member 222 without the feed member 222 having to move to avoid it, simplifying the switching process of the support jig 21. Of course, it should be noted that it is necessary to ensure that the positioning block 2222 does not flip downward when the support jig 21 abuts against the positioning block 2222. To achieve this goal, a limiting structure can be provided on the rotation axis of the positioning block 2222 or the contact surface between the positioning block 2222 and the feed member 222 to ensure that the support jig 21 does not fall downward when positioned on the positioning block 2222, while at the same time being able to push the positioning block 2222 from below the feed member 222 to flip and move to above the feed member 222.

[0063] In one embodiment, combining Figure 3 and Figure 4 To ensure smoother upward movement of the support jig 21 through the feed piece 222, the positioning block 2222 on each sliding portion 2221 has a guide surface 2224 facing the return module 23. The guide surface 2224 gradually slopes toward the side where the other sliding portion 2221 is located as it moves away from the return module 23. The support jig 21 can effectively push the positioning block 2222 to flip by abutting against the guide surface 2224, thereby moving the positioning block 2222 more quickly to the top of the feed piece 222.

[0064] In one embodiment, if Figure 6As shown, the return module 23 includes two return rails 231 arranged in parallel and spaced apart. A return member 232 is slidably mounted on at least one of the return rails 231. This member 232 positions and drives the support jig 21. This allows the support jig 21 to land directly on the two return rails 231 and, driven by the return member 232, move along the rails. This eliminates the need for auxiliary devices to support the support jig 21, making the support jig circulation mechanism 20 simpler and more compact, and requiring less installation space.

[0065] In one embodiment, combining Figure 5 and Figure 6 The support jig 21 is further provided with a second positioning groove 212 adapted to the return material piece 232, and the return material piece 232 can be snapped into the second positioning groove 212. In this embodiment, the second positioning groove 212 is a through groove provided on the edge of the support jig 21. This not only facilitates the snapping of the return material piece 232, but also facilitates the processing of the support jig 21. Of course, the second positioning groove 212 can also be a non-through groove with an opening facing downward, and the number of second positioning grooves 212 can also be provided. There is no specific limitation here, as long as they can be snapped and adapted to the return material piece 232.

[0066] In one embodiment, if Figure 5 As shown, the bottom and / or side surfaces of the support fixture 21 are provided with a ball structure 213, which can roll in contact with the return guide rail 231 of the return module 23. This can reduce friction between the support fixture 21 and the return guide rail 231, allowing the support fixture 21 to slide more smoothly and quickly, thereby improving the cleaning efficiency of the plasma cleaning machine 10.

[0067] In one embodiment, if Figure 2 or Figure 3 As shown, the feeding module 22 and the return module 23 both have a material changing end and a cleaning end, and two first lifting devices 24 are provided, one of which corresponds to the material changing end and the other corresponds to the cleaning end. It can be understood that the two first lifting devices 24 are responsible for lifting and changing the material and lifting and cleaning the material support fixture 21 respectively, and thus there is no need to control the first lifting devices 24 to move back and forth along the extension direction of the feeding guide rail 221 (or the return guide rail 231). This not only helps to improve the cleaning efficiency of the plasma cleaning machine 10, but also eliminates the need to reserve space for the first lifting devices 24 to move back and forth, making the structure of the plasma cleaning machine 10 more compact.

[0068] In one embodiment, if Figure 6As shown, the first lifting device 24 has an abutting portion for abutting against the material supporting jig 21, and one of the abutting portion and the material supporting jig 21 is provided with a positioning protrusion 241, and the other is provided with a positioning hole 214 adapted to the positioning protrusion 241. Specifically, the abutting portion of the first lifting device 24 can be provided with a positioning protrusion 241, and the bottom surface of the material supporting jig 21 can be provided with a positioning hole 214. When the first lifting device 24 lifts the material supporting jig 21, the positioning protrusion 241 on the abutting portion extends into the positioning hole 214. Until the abutting portion abuts against the material supporting jig 21. This ensures that the material supporting jig 21 will not deviate or fall during the lifting and lowering process.

[0069] In one embodiment, if Figure 7 and Figure 8 As shown, in order to solve the technical problem that the pushing mechanism of some existing plasma cleaning machines is prone to pushing the material crookedly and causing material jamming when pushing the material, thereby affecting the cleaning efficiency of the cleaning machine, the pushing mechanism 30 includes a pushing module 31, an adjustment module 32 and a pushing member 33.

[0070] Specifically, the pushing module 31 includes a pushing guide rail 311 and a pushing drive 312. The pushing guide rail 311 extends along the pushing direction preset by the plasma cleaning machine 10, and its specific length and form can be set according to actual needs. The pushing drive 312 can be a motor, a cylinder, a hydraulic cylinder, etc. The adjustment module 32 includes an adjustment guide rail 321 and an adjustment drive. The adjustment guide rail 321 is slidably installed on the pushing guide rail 311 and is cross-arranged with the pushing guide rail 311, that is, the extension direction of the adjustment guide rail 321 is cross-arranged with the extension direction of the pushing guide rail 311, which can be perpendicular to each other or at other intersection angles, and can be specifically set according to actual needs. In addition, the adjustment guide rail 321 can be directly slidably installed on the pushing guide rail 311, or it can be indirectly slidably installed on the pushing guide rail 311 through an intermediate connector or a sliding member. At the same time, the adjustment guide rail 321 can be driven to slide by the pushing drive 312.

[0071] Furthermore, the pusher 33 is primarily used to abut and push the material within the magazine 70. The specific shape, size, and structure of the pusher 33 are not specifically limited herein; they only need to be able to push the material. In this embodiment, the pusher 33 is slidably mounted on the adjustment rail 321 and can be driven to slide by the adjustment drive member. Specifically, the pusher 33 slides along the adjustment rail 321 under the drive of the adjustment drive member.

[0072] It is understood that, in a specific application of the plasma cleaning machine 10 of the present invention, the pusher guide rail 311 extends along a preset pushing direction, and the pusher driver 312 can drive the adjustment guide rail 321 to slide, so that the adjustment guide rail 321 can drive the pusher member 33 to slide along the pusher guide rail 311 to push the material. In addition, the adjustment driver can also drive the pusher member 33 to slide on the adjustment guide rail 321, thereby adjusting the pushing position of the pusher member 33 on the material to center the pushing position, ensure smooth pushing, and reduce the phenomenon of pushing skew, pushing tilt, and jamming.

[0073] In one embodiment of the invention, Figure 9 and Figure 10 As shown, the cartridge mounting mechanism 40 includes a cartridge mounting base 43, a clamping driver, and a clamping assembly 46. The specific structure, size, and shape of the cartridge mounting base 43 can be set according to actual needs. In this embodiment, the cartridge mounting base 43 includes an upper base 441 and a lower base 442. The upper base 441 and the lower base 442 are both plate-shaped and spaced relative to each other. The upper base 441 and the lower base 442 can be connected by a connecting post. The cartridge 70 can be placed and positioned on the top surface of the upper base 441. The clamping driver and the clamping assembly 46 can be installed between the upper base 441 and the lower base 442. The clamping assembly 46 is used to clamp the cartridge 70.

[0074] Specifically, the clamping assembly 46 includes a first clamping member 461 and a second clamping member 462 spaced opposite each other along a straight line. The size, shape, and material of the first clamping member 461 and the second clamping member 462 are not limited, as long as they can clamp the magazine 70. For example, if the magazine 70 is a square box, the first clamping member 461 and the second clamping member 462 can both be plate-shaped structures, or the portions of the first clamping member 461 and the second clamping member 462 used to clamp the magazine 70 can be adapted to the outer shape of the magazine 70. This ensures stable clamping of the magazine 70 and facilitates manufacturing and installation.

[0075] At least one of the first clamping member 461 and the second clamping member 462 can be driven by the clamping driver to slide toward the other. The first clamping member 461 and the second clamping member 462 are used to jointly clamp the magazine 70 to be installed. Specifically, at least one of the first clamping member 461 and the second clamping member 462 can be slidably mounted on the magazine mounting seat 43, such as on the first clamping guide rail 47, and can be driven to slide by the clamping driver. Only one of the first clamping member 461 and the second clamping member 462 can slide, or both can slide.

[0076] When installing the material box 70, the material box 70 can be first placed between the first clamping member 461 and the second clamping member 462. Then, the clamping driver drives the first clamping member 461 and the second clamping member 462 to move toward each other, thereby clamping the material box 70 in place. It can be understood that because the first clamping member 461 and the second clamping member 462 can slide relative to each other, material boxes 70 of different widths can be clamped. The operation process of clamping the material box 70 is simple and convenient, which can effectively solve the technical problem that some existing plasma cleaning machines 10 cannot flexibly install material boxes 70 of different widths.

[0077] In one embodiment, if Figure 9 and Figure 10 As shown, in order to reduce the problem of material jamming during loading and unloading of the plasma cleaning machine, the magazine installation mechanism 40 further includes a lifting module 41, a transverse movement module 42, and a magazine installation seat 43. Of course, the magazine installation mechanism 40 may also include a mounting base 430 for mounting and supporting the lifting module 41, the transverse movement module 42, the magazine installation seat 43 and other components, so as to make the magazine installation mechanism 40 modular, thereby making it easier to install the magazine installation mechanism 40 in the plasma cleaning machine 10.

[0078] The lifting module 41 is mainly used to drive the material box mounting mechanism 40 to lift and lower, so that the material box 70 mounted on the material box mounting mechanism 40 can reach the preset loading and unloading height, ensuring that the material in the material box 70 corresponds to the pushing mechanism 30. Specifically, the lifting module 41 includes a lifting drive 411 and a vertically extending lifting guide rail 412. The lifting drive 411 (and the transverse driving member 421 described below) can be any one of a motor, a cylinder, or a hydraulic cylinder. The lifting guide rail 412 can be mounted on the mounting base 430, and the number of lifting guide rails 412 can be provided in plurality to increase the stability of the lifting movement of the material box mounting mechanism 40.

[0079] The transverse movement module 42 is mainly used to drive the material box mounting seat 43 to move transversely relative to the pushing mechanism 30, so as to adjust the relative position between the material in the material box 70 and the pushing mechanism 30. Specifically, the transverse movement module 42 includes a transverse movement driving member 421 and a horizontally extending transverse movement guide rail 422. The transverse movement guide rail 422 is slidably mounted on the lifting guide rail 412 and can be driven to slide by the lifting driving member 411. The transverse movement guide rail 422 can be directly slidably mounted on the lifting guide rail 412, or it can be slidably connected to the lifting guide rail 412 through an intermediate connecting member. For example, in one embodiment, the lifting module 41 also includes a lifting mounting seat 413. The lifting mounting seat 413 is slidably mounted on the lifting guide rail 412 and can be driven to slide by the lifting driving member 411. The transverse movement guide rail 422 and the transverse movement driving member 421 are both mounted on the lifting mounting seat 413. Such a design can facilitate the disassembly and assembly of the transverse movement module 42 and can also provide sufficient support for the magazine mounting seat 43.

[0080] In addition, in this embodiment, the magazine mounting seat 43 is slidably mounted on the transverse guide rail 422 and can be driven by the transverse driving member 421 to slide, specifically, slide along the extension direction of the transverse guide rail 422. This allows the relative position of the material in the magazine 70 and the pushing mechanism 30 to be adjusted (or the relative position of the material and the supporting fixture to be adjusted), so that the pushing position of the pushing mechanism 30 on the material is relatively centered, and the material is accurately aligned with the clamping groove on the supporting fixture, thereby ensuring smooth loading and unloading of the material and reducing material jamming.

[0081] In one embodiment of the invention, Figure 11 As shown, the material guide mechanism 50 includes a material guide mounting base 51, a width adjustment driver 52, and a material guide module 53. The material guide mounting base 51 primarily serves to provide a mounting base for the other components of the material guide mechanism 50. In this embodiment, the material guide mounting base 51 is constructed from multiple plates, resulting in a simple and easily accessible structure. Of course, the specific structure, size, and material of the mounting base can be customized based on actual needs.

[0082] The material guide module 53 is mounted on the material guide mounting base 51 and is the basic unit for material transfer, primarily used to transfer materials between the material box mounting mechanism 40 and the material support circulation mechanism. Specifically, the material guide module 53 includes two material guide components (a first material guide component 531 and a second material guide component 532) spaced opposite each other along a straight line. Specifically, the two material guide components, when spaced relative to each other, form an inlet end that can interface with the material inlet and outlet of the material box 70, and an outlet end that can interface with the material support fixture of the material support circulation mechanism 20, thereby achieving material transfer.

[0083] Among them, each of the material guide components is provided with a conveying structure 533 on the surface facing the other material guide component, and the two conveying structures 533 jointly support and convey the material to be conveyed. Specifically, the conveying structure can be a conveyor belt, a conveying roller, a conveying wheel or other combined structure, as long as it can convey the material. In this embodiment, the conveying structure 533 includes a conveyor belt, a conveying wheel and a pressure wheel. The conveyor belt is sleeved on the outside of the multiple conveying wheel groups and can be driven to move by the conveying wheel groups. The conveyor belt can drive the material to move by friction, thereby realizing the conveyance of the material. The pressure wheel group is used to press the material on the conveyor belt to prevent the material from tilting or hanging in the air and affecting the material conveyance. In some other embodiments, the pressure wheel elastically presses the material to prevent the pressing force from being too large or too small.

[0084] In this embodiment, at least one of the two material guide assemblies can be driven by the width adjustment drive 52 to move toward the other to adjust the spacing between the two material guide assemblies. Specifically, one of the two material guide assemblies can be slidably mounted on the material guide mounting base 51 and can be driven to slide by the width adjustment drive 52, or both material guide assemblies can be moved toward each other. This setting can be adjusted according to actual conditions.

[0085] It can be understood that by adjusting the distance between the two material guide components through the width-adjusting drive 52, materials of different widths can be flexibly guided, which effectively solves the technical problem that in some existing plasma cleaning machines 10, the material guide mechanism 50 can only guide materials of a single specification and cannot flexibly guide materials of different widths.

[0086] In one embodiment, the cavity module 60 may include a first cavity 61 and a second cavity. The first cavity 61 is located above the support fixture circulation mechanism 20, and the second cavity is installed below the support fixture circulation mechanism 20 and is opposite to the first cavity 61 in vertical relation. The first cavity 61 and the second cavity may enclose a vacuum chamber for cleaning materials. The first cavity 61 may be connected to a vacuum pump 67, and the second cavity may be connected to a matching box (such as an RF matching box). A cathode plate may also be installed on the second cavity to ensure that both the front and back sides of the material can be effectively cleaned during cleaning.

[0087] In some existing plasma cleaning machines 10, the first cavity 61 is fixed inside the cleaning machine, and as the plasma cleaning machine 10 becomes smaller, the first cavity 61 and other components are installed more compactly, which makes it inconvenient for the staff to clean and maintain the first cavity 61. Figure 12As shown, to facilitate the cleaning and maintenance of the first cavity 61 by the staff, the plasma cleaning machine 10 of the present invention further includes a second lifting device 62 and a limiting device 63. The second lifting device 62 can drive the first cavity 61 to move up and down, and the limiting device 63 is used to limit the position of the first cavity 61 after the second lifting device 62 lifts the first cavity 61.

[0088] Specifically, the second lifting device 62 can be a motor, a cylinder, a hydraulic cylinder, or other driving element. The second lifting device 62 can be connected to the first cavity 61 and lift the first cavity 61 when cleaning is required. It should be noted that the height to which the second lifting device 62 lifts the first cavity 61 should be such that the first cavity 61 is out of the working state and is separated from other components in the plasma cleaning machine 10, thereby providing sufficient space for personnel to move.

[0089] After the second lifting device 62 lifts the first cavity 61, the limiting device 63 limits the first cavity 61 to prevent the first cavity 61 from accidentally falling back during cleaning and maintenance, ensuring that the staff can clean and maintain the first cavity 61 in a safe environment.

[0090] The limiting device 63 can limit the first cavity 61 in a variety of ways, including clamping, supporting, or engaging with a corresponding limiting structure after the first cavity 61 is raised to the cleaning height. In this embodiment, the limiting device 63 includes a limiting cylinder 631 and a limiting member 633, which is connected to the piston rod 632 of the limiting cylinder 631. After the second lifting device 62 drives the sliding member to rise, the limiting member 633 can be driven by the limiting cylinder 631 to the bottom of the sliding member and abut against the sliding member.

[0091] Specifically, the piston rod 632 of the limiting cylinder 631 is arranged horizontally, and the free end of the piston rod 632 is connected to the limiting member 633. After the second lifting device 62 lifts the first cavity 61 to a preset height, the limiting cylinder 631 drives the piston rod 632 to extend, and drives the limiting member 633 to move below the first cavity 61, thereby limiting the position of the first cavity 61. It can be understood that the limiting device 63 is formed by the limiting cylinder 631 and the limiting member 633. It is not only simple in structure and easy to obtain, but also can effectively limit the position of the first cavity 61.

[0092] It should be noted that the limiting member 633 can directly abut against the first cavity 61 to limit the first cavity 61, or it can abut against other components connected to the first cavity 61 to limit the first cavity 61. The limiting member 633 can be a block-shaped structure to well support and limit the first cavity 61.

[0093] The above description is only a preferred embodiment of the present invention and does not limit the patent scope of the present invention. All equivalent structural transformations made by using the contents of the present invention description and drawings under the inventive concept of the present invention, or direct / indirect application in other related technical fields are included in the patent protection scope of the present invention.

Claims

1. A plasma cleaning machine, characterized in that: include: A material box installation mechanism, used for installing a material box containing materials; A cavity module, used for cleaning the material; as well as, A material support fixture circulation mechanism is capable of transporting the material between the material box mounting mechanism and the cavity module, and the material support fixture circulation mechanism includes: Material support fixture, used to place the materials to be cleaned; The feeding module includes two feeding rails arranged in parallel and at intervals, and a feeding member slidably mounted on the two feeding rails; the interval between the two feeding rails is greater than the width of the supporting fixture in the arrangement direction of the two feeding rails, and the feeding member is a semi-enclosed structure with an opening and is capable of positioning and driving the supporting fixture to move; A return material module is provided between the two feeding guide rails of the feeding module and below the feeding member, and is capable of driving the supporting fixture to move; and A first lifting device is provided below the return module, and the first lifting device can drive the supporting fixture to cyclically switch between the feeding module and the return module; The plasma cleaning machine further includes a material pushing mechanism, which is used to push the material to be cleaned out of the material box and push the cleaned material back into the material box. The material pushing mechanism includes: A pushing module, including a pushing guide rail and a pushing drive component; An adjustment module, comprising an adjustment guide rail and an adjustment drive member, wherein the adjustment guide rail is slidably mounted on the pusher guide rail and arranged in a cross pattern with the pusher guide rail, and the adjustment guide rail can be driven by the pusher drive member to slide; and A pusher is slidably mounted on the adjustment guide rail and can be driven to slide by the adjustment drive member; The plasma cleaning machine further includes a material guiding mechanism, which is provided between the material box mounting mechanism and the material supporting fixture circulation mechanism and is used to guide the material in the material box to the material supporting fixture; the material guiding mechanism includes: Material guide mounting seat; a width adjustment drive member; and a material guide module, mounted on the material guide mounting base and comprising two material guide assemblies spaced opposite to each other in a straight line, each material guide assembly being provided with a conveying structure on a surface facing the other material guide assembly, the two conveying structures jointly supporting and conveying the material to be conveyed; At least one of the two material guiding components can be driven by the width-adjusting driving member and move toward the other so as to adjust the distance between the two material guiding components.

2. The plasma cleaning machine according to claim 1, wherein: The feeding piece has two sliding parts that are slidably connected to the two feeding guide rails in a one-to-one correspondence. Each sliding part is connected to a positioning block that protrudes toward the other sliding part. The positioning block is used to support and position the supporting fixture.

3. The plasma cleaning machine according to claim 2, wherein: The positioning block is rotatably connected to the feeding piece so that the positioning block can be turned upward.

4. The plasma cleaning machine according to claim 1, wherein: The return material module includes two return material guide rails arranged in parallel and at intervals, and a return material piece is slidably installed on at least one of the return material guide rails, and the return material piece can position and drive the supporting fixture to move.

5. The plasma cleaning machine according to claim 4, wherein: The material support fixture is further provided with a second positioning groove adapted to the return material piece, and the return material piece can be snapped into the second positioning groove; and / or, The bottom surface and / or side surface of the material supporting fixture are convexly provided with a ball structure, and the ball structure can be in rolling contact with the return guide rail of the return module.

6. The plasma cleaning machine according to any one of claims 1 to 5, characterized in that: The material box installation mechanism includes: Material box mounting seat; a clamping drive; and, A clamping assembly is mounted on the magazine mounting seat and includes a first clamping member and a second clamping member spaced opposite to each other in a straight line direction, at least one of the first clamping member and the second clamping member can be driven by the clamping driving member and slide toward the other, and the first clamping member and the second clamping member are used to jointly clamp the magazine to be installed.

7. The plasma cleaning machine according to claim 6, wherein: The material box installation mechanism includes: A lifting module, comprising a lifting drive member and a first lifting guide rail extending vertically; a transverse movement module, comprising a transverse movement driving member and a horizontally extending transverse movement guide rail, wherein the transverse movement guide rail is slidably mounted on the first lifting guide rail and can be driven to slide by the lifting driving member; and The material box mounting seat is slidably mounted on the transverse guide rail and can be driven to slide by the transverse driving member.

8. The plasma cleaning machine according to any one of claims 1 to 5, characterized in that: The cavity module includes: a first cavity; A second lifting device is capable of driving the first cavity to perform lifting motion; and The limiting device is used to limit the first cavity after the second lifting device lifts the first cavity.

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