A quick pick-and-place device for a seed crystal chuck for rotating a seed crystal
By setting the power source on the robot and connecting the rotating spindle through the quick connection mechanism, the problem of poor ellipticity of the silicon core caused by the inability to rotate the seed crystal chuck is solved, and efficient driving of multi-seed crystal rotation is achieved, reducing equipment maintenance costs.
Patent Information
- Application Number
- CN202011091972.8
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- Filing Date
- 2020-10-13
- Publication Date
- 2025-03-28
- Estimated Expiration
- 2040-10-13
AI Technical Summary
In the prior art, the seed crystal chuck cannot rotate, resulting in poor ellipticity of the silicon core, and each seed crystal chuck needs to be equipped with a power source, resulting in high equipment costs and difficult maintenance.
The power source is set on the robot, and the spindle of the power source is connected to the rotating spindle on the robot through a quick connection mechanism to realize the function of one power source to drive multiple seed rotating discs.
The rotation of seed crystals is achieved, the ellipticity of the silicon core is improved, the equipment maintenance cost is reduced, and it is suitable for large-scale promotion and application.
Smart Images

Figure CN112173702B_ABST
Abstract
Description
[Technical field]
[0002] The present invention relates to the technical field of artificial crystal preparation, in particular to a quick pick-up and placement device, and specifically to a quick pick-up and placement device for a seed crystal chuck used for rotating a seed crystal. [Background technology]
[0004] It is known that the existing silicon core furnace can draw five silicon cores at a time, and one furnace can draw three groups of fifteen silicon cores in total, that is, a material tray rotating motor is arranged on the upper end face of the upper furnace chamber, and the power output shaft of the material tray rotating motor is connected to the upper end of the material tray connecting shaft, and the lower end of the material tray connecting shaft is connected to the material tray, two material taking stations are arranged on the left side of the material tray, and two material discharging stations are arranged on the right side of the material tray, and a flexible shaft is arranged at the front part of the material tray, the upper end of the flexible shaft is connected to the lifting mechanism arranged on the upper end face of the upper furnace chamber, the lower end of the flexible shaft is connected to a manipulator, and a seed crystal chuck is arranged under the manipulator. The specific drawing method is that before drawing, first place the seed crystal chuck to be used on the material picking station on the left side of the material tray, place the seed crystal chuck under the manipulator, and then start to evacuate the furnace chamber, fill with argon, heat the raw material rod, draw the silicon core, etc. During the drawing process of the silicon core, the seed crystal needs to be used for seeding, and the silicon core is drawn after the seeding is completed; in this process, the seed crystal needs to be clamped by the seed crystal chuck, and after the high-frequency coil partially melts the end of the raw material rod into liquid, the seed crystal chuck drives the seed crystal to descend until The raw material rod is inserted into the melt at the upper end through the drawing hole of the high-frequency coil, and then the seed crystal is driven up by the seed crystal chuck. At this time, the seed crystal drives the solution to rise and recrystallize, and finally forms a silicon core of the required length. After a group of silicon cores are drawn, the tray rotates to place the drawn silicon cores on the unloading station on the right side of the tray. Then the tray is reversed to allow the robot to re-grasp a seed crystal chuck to be used at the picking station on the left side of the tray, and start drawing a new group of silicon cores. Repeat the above steps until multiple groups of silicon cores are drawn.
[0005] At present, when drawing silicon cores, the technicians in this field usually use a seed crystal chuck that fixes a certain number of clamps containing seed crystals under the connection plate, and then provides a hanging mechanism on the connection plate, which is hung on the manipulator; for example, the Chinese patent, patent number is 200810231413.5, publication number is CN101532170A, application date is December 17, 2008, the patent name is a seed crystal chuck with adjustable chuck number, and the specific disclosed structure is to fix a certain number of clamps containing seed crystals under the connection plate. The seed crystal clamp cannot rotate the seed crystal chuck during the drawing process, and the ellipticity of the drawn silicon core cannot be corrected when the silicon core is drawn. That is to say, the silicon core ellipse drawn by the seed crystal chuck of this structure, taking the silicon core with a diameter of 8mm as an example, has a difference of about 0.6mm between its major axis and minor axis, and a difference of about 1.1mm between its major axis and minor axis for a 10mm silicon core, and a difference of about 2.2mm between its major axis and minor axis for a 12mm silicon core. The elliptical silicon core is not easy to clamp during reduction in the reduction furnace.
[0006] In order to overcome the above technical problems, technicians in this field have invented a seed crystal chuck that can rotate the seed crystal, such as the Chinese patent with patent number 201410169006.1, publication number CN103993353A, application date April 18, 2014, and the patent name is a seed crystal chuck that can rotate the seed crystal. Although the technical solution specifically disclosed can rotate the seed crystal and solve the problem of silicon core ellipticity, the power source in the technical solution is directly connected to the rotating mechanism, that is, each seed crystal chuck of the seed crystal chuck of this structure needs to be equipped with a power source, and the power source cannot be disconnected from the seed crystal chuck. Furthermore, the connecting plate is directly connected to the pulling device, and each furnace chamber is generally provided with a pulling device, and thus the technical demand of drawing multiple groups of silicon cores in one furnace cannot be achieved. Even if multiple pulling devices are provided in one furnace chamber to achieve the technical demand of drawing multiple groups of silicon cores in one furnace, then multiple power sources need to be provided, which leads to an increase in equipment cost and increases the difficulty of equipment maintenance. Therefore, how to provide a quick pick-up and placement device for a seed crystal chuck for rotating the seed crystal has become a long-term technical demand of those skilled in the art. [Summary of the invention]
[0008] In order to achieve the above-mentioned purpose of the invention, the present invention provides a quick pick-up and placement device for a seed crystal chuck for rotating the seed crystal. The present invention sets the power source on the manipulator, and the main shaft of the power source is connected to the rotating main shaft hung on the manipulator through a quick connection mechanism. In this way, the technical demand of one power source driving multiple seed crystal rotating disks can be realized, and at the same time, the maintenance cost of the equipment is greatly reduced.
[0009] In order to achieve the above-mentioned invention object, the present invention adopts the following technical scheme:
[0010] A quick pick-and-place device for a seed crystal chuck for rotating a seed crystal, comprising a power source, a rotating spindle, a manipulator, a positioning block, a hollow shaft and a quick-connect mechanism, wherein the lower end of the rotating spindle is connected to the power input end of a seed crystal rotating disk, the hollow shaft is sleeved on the outer edge surface of the rotating spindle, the lower end of the hollow shaft is connected to the seed crystal rotating disk, an outwardly extending hanging block is provided on the outer edge surface of the upper end of the hollow shaft, a positioning block is provided on the outer edge surface of the hollow shaft below the hanging block, the hanging block is hung on the manipulator, a power source is provided on top of the manipulator, and the spindle of the power source is connected to the upper end of the rotating spindle through a quick-connect mechanism to form the quick pick-and-place device for a seed crystal chuck for rotating a seed crystal.
[0011] The quick-pick-and-place device for the seed crystal chuck used to rotate the seed crystal, the quick-connect mechanism includes a rotating cross bar and a cross bar transmission sleeve, the upper end of the cross bar transmission sleeve is connected to the main shaft of the power source, the rotating cross bar is arranged at the upper end of the rotating main shaft, and the rotating cross bar is clamped in the slot at the lower end of the cross bar transmission sleeve.
[0012] The quick-pick-and-place device for the seed crystal chuck used to rotate the seed crystal, the replacement structure of the quick-connect mechanism is that the quick-connect mechanism includes a transmission sleeve and an intermediate transmission disk, the upper end of the transmission sleeve is connected to the main shaft of the power source, an intermediate transmission disk through-hole is provided on the outer edge surface of the transmission sleeve, a hollow shaft through-hole is provided at the bottom of the intermediate transmission disk through-hole, at least one active key is provided on the bottom surface of the intermediate transmission disk through-hole, the intermediate transmission disk is arranged at the upper end of the rotating main shaft, and at least one transmission key is provided under the intermediate transmission disk, and the transmission key is engaged with the active key to realize power transmission.
[0013] The quick-pick-and-place device for the seed crystal chuck used to rotate the seed crystal, the second replacement structure of the quick-connect mechanism is that the quick-connect mechanism includes a driving gear, a driven gear, a manipulator transition sleeve, a lower transition gear, a gear shaft and an upper transition gear, a power source is provided on the manipulator transition sleeve, and the driving gear is sleeved on the main shaft of the power source, the driving gear and the upper transition gear, the upper transition gear is sleeved on the upper part of the outer edge surface of the gear shaft, and a lower transition gear is provided on the lower part of the outer edge surface of the gear shaft, the driven gear is sleeved on the upper end of the rotating main shaft, and the lower transition gear is meshed with the driven gear to realize power transmission.
[0014] The quick pick-and-place device for the seed crystal chuck used to rotate the seed crystal, the manipulator transition sleeve is a barrel-shaped structure, a driven gear through-hole is provided on the outer edge surface of the manipulator transition sleeve, an arc groove A is provided at the bottom of the driven gear through-hole and passes through to the bottom of the manipulator transition sleeve, a gear shaft mounting hole is provided on the left side or right side or both sides of the arc groove A, and a manipulator is provided under the manipulator transition sleeve.
[0015] The device for quickly taking and placing the seed crystal chuck used to rotate the seed crystal, the manipulator is a barrel-shaped structure, a hanging block through hole is provided on the outer edge surface of the manipulator, and a hanging block positioning groove is provided at the bottom of the hanging block through hole that passes through to the bottom of the manipulator.
[0016] The quick-pick-and-place device for the seed crystal chuck used to rotate the seed crystal has hanging block guide grooves with a larger upper end and a smaller lower end respectively provided on the side walls on the left and right sides of the hanging block positioning groove.
[0017] The quick-pick-and-place device for the seed crystal chuck used to rotate the seed crystal has a hanging block limiting inclined surface below the hanging block guide groove.
[0018] The quick pick-and-place device for the seed crystal chuck used to rotate the seed crystal has an arc groove B on the top of the manipulator so that the manipulator forms a split structure, and the arc groove B is arranged corresponding to the arc groove A.
[0019] The quick-taking and placing device of the seed crystal chuck used for rotating the seed crystal has a guiding cone surface on the outer edge surface of the hanging block.
[0020] The quick-pick-and-place device for the seed crystal chuck used to rotate the seed crystal has a limiting inclined surface at the transition between the bottom of the hanging block and the outer edge of the hollow shaft.
[0021] The quick-pick-and-place device for the seed crystal chuck used to rotate the seed crystal has a positioning platform on the outer edge surface of the hollow shaft below the hanging block.
[0022] Due to the adoption of the above-mentioned technical solution, the present invention has the following beneficial effects:
[0023] The present invention arranges the power source on the manipulator, and the main shaft of the power source is connected to the rotating main shaft hung on the manipulator through a quick-connect mechanism, so that the technical demand of one power source driving multiple seed crystal rotating disks can be achieved, that is, an upper shaft pulling system is adopted to achieve the purpose of drawing multiple groups of silicon cores at the same time. The present invention corrects the silicon core ellipse caused by the inconsistent temperature in the drawing hole of the high-frequency coil and improves the qualified rate of the finished silicon cores, while also greatly reducing the maintenance cost of the equipment. The present invention has the characteristics of simple structure and easy operation, and is suitable for large-scale promotion and application.
Brief Description of the Drawings
[0025] Figure 1 It is a schematic structural diagram of an embodiment of the present invention;
[0026] Figure 2 yes Figure 1 A schematic diagram of a partial cross-sectional structure;
[0027] Figure 3 It is a schematic diagram of the three-dimensional structure of the manipulator A in the present invention;
[0028] Figure 4 It is a schematic cross-sectional view of the hollow shaft of the present invention;
[0029] Figure 5 It is a schematic diagram of the structure of the present invention using key transmission;
[0030] Figure 6 It is a three-dimensional structural schematic diagram of the transmission sleeve in the present invention;
[0031] Figure 7 It is a three-dimensional structural schematic diagram of the intermediate transmission plate in the present invention;
[0032] Figure 8 It is a schematic diagram of the structure of the present invention using gear transmission;
[0033] Fig. 9 It is a three-dimensional structural schematic diagram of the manipulator transition sleeve in the present invention;
[0034] Fig.10 yes Fig. 9 A schematic diagram of a top view structure;
[0035] Fig.11 It is a schematic diagram of the three-dimensional structure of the robot B in the present invention;
[0036] Fig.12 It is a schematic diagram of the application of the present invention;
[0037] In the figure: 1, power source; 2, connecting seat; 3, rotating cross bar; 4, rotating main shaft; 5, manipulator; 6, positioning block; 7, hollow shaft; 8, seed crystal rotating disk; 9, seed crystal chuck; 10, connecting screw; 11, hanging block; 12, cross bar transmission sleeve; 13, hanging block limit inclined surface; 14, flaring; 15, hanging block positioning groove; 16, hanging block guide groove; 17, hanging block perforation; 18, guiding cone; 19, limit inclined surface; 20, positioning platform; 21, transmission Sleeve; 22. Intermediate transmission plate; 23. Driving key; 24. Intermediate transmission plate through hole; 25. Hollow shaft through hole; 26. Screw fixing hole; 27. Transmission key; 28. Driving gear; 29. Driven gear; 30. Manipulator transition sleeve; 31. Lower transition gear; 32. Gear shaft; 33. Upper transition gear; 34. Driven gear through hole; 35. Gear shaft mounting hole; 36. Arc groove A; 37. Arc groove B; 38. Material tray station; 39. Arc groove C; 40. Material tray. [Specific implementation method]
[0039] The present invention can be explained in more detail by the following examples. The purpose of disclosing the present invention is to protect all changes and improvements within the scope of the present invention. The present invention is not limited to the following examples.
[0040] First of all, it should be explained that the directions or positional relationships indicated by “upper”, “lower”, “front”, “back”, “left”, “right”, “top”, “bottom”, “inside”, and “outside” when describing the structure of the present invention are based on the directions or positional relationships shown in the accompanying drawings and are only for the convenience of description and simplified description, and do not indicate or imply that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore cannot be understood as a limitation on the present invention.
[0041] Combined with Figures 1 to 12 A quick pick-and-place device for a seed crystal chuck for rotating a seed crystal, comprising a power source 1, a rotating spindle 4, a manipulator 5, a positioning block 6, a hollow shaft 7 and a quick connection mechanism, such as Figure 1 As shown, the lower end of the rotating main shaft 4 is connected to the power input end of the seed crystal rotating disk 8, and the power output ends below the seed crystal rotating disk 8 are respectively connected to the seed crystal chucks 9, in which the seed crystals are clamped respectively. Since the seed crystal rotating disk 8 is not the focus of protection of the present invention, and the inventor has applied for a patent in the name of Luoyang Jinnuo Mechanical Engineering Co., Ltd., its specific structure will not be described in detail here (see patent No. 201410169006.1, publication No. CN103993353A, application date April 18, 2014, and the patent name is a seed crystal chuck for rotating seed crystals). A hollow shaft 7 is sleeved on the outer edge surface of the rotating main shaft 4, and the lower end of the hollow shaft 7 is connected to the seed crystal rotating disk 8. A hanging block 11 extending outward is provided on the outer edge surface of the upper end of the hollow shaft 7, and a positioning block 6 is provided on the outer edge surface of the hollow shaft 7 below the hanging block 11. Block 11 is hung on the manipulator 5, and a power source 1 is provided on the top of the manipulator 5. During specific implementation, in order to improve the stability of the device operation, a connecting seat 2 can be provided on the top of the manipulator 5, and the power source 1 is provided on the connecting seat 2, and the connecting seat 2 is connected to the upper shaft lifting system. During implementation, the power source 1 is any one of an electric motor, a hydraulic motor or a pneumatic motor, among which an electric motor is preferred. When selecting a motor, a high-temperature resistant motor is preferably used. During the implementation of the present invention, in order to better protect the motor, a protective cover is provided on the outside of the motor, and the material of the protective cover is a high-temperature resistant material, such as polytetrafluoroethylene or stainless steel. At the same time, a protective cover is provided on the outside of the power cord of the motor, and the motor is externally connected to a power supply. The main shaft of the power source 1 is connected to the upper end of the rotating main shaft 4 through a quick-connect mechanism. During specific implementation, it is necessary to ensure that the rotating main shaft 4, the hollow shaft 7 and the manipulator 5 are concentrically arranged.
[0042] like Figure 1 , 2As shown in Figures 4, 5, and 8, the main function of the hanging block 11 is to prevent the hollow shaft 7 from rotating with the rotating main shaft 4 and to connect the manipulator 5 and rise and fall with the manipulator 5. In specific implementation, the hanging block 11 can be set to any shape other than a circle, such as a square, a triangle, an ellipse, etc. When the hanging block 11 needs to be set to a circle, it is necessary to set a positioning platform 20 on the outer edge surface of the hollow shaft 7 below the hanging block 11, so that the hanging block 11 can be connected to the manipulator 5 and rise and fall with the manipulator 5. The positioning platform 20 can prevent the hollow shaft 7 from rotating with the rotating main shaft 4. When the hanging block 11 is set to a circle, a guide cone 18 for guiding can be set on the outer edge surface of the hanging block 11.
[0043] Furthermore, in order to improve the efficiency and accuracy of the gripping of the manipulator 5, a limiting inclined surface 19 is provided at the transition point between the bottom of the hanging block 11 and the outer edge of the hollow shaft 7, so as to achieve the purpose of guiding and multi-level limiting.
[0044] like Figure 1 , 2 , 3, 5, 8, and 11, the manipulator 5 is a barrel-shaped structure, and a hanging block through hole 17 is provided on the outer edge surface of the manipulator 5. The hanging block through hole 17 runs through the left and right sides of the outer edge surface of the manipulator 5. A hanging block positioning groove 15 is provided at the bottom of the hanging block through hole 17 and passes through to the bottom of the manipulator 5. The function of the hanging block positioning groove 15 is to drive the hanging block 11 to rise and fall, and at the same time, it is also necessary to prevent the hollow shaft 7 from rotating with the rotating spindle 4. During the implementation process, in order to ensure the efficiency and accuracy of the manipulator 5 grasping, the hanging block positioning groove 1 The side walls on the left and right sides are respectively provided with a hanging block guide groove 16 with a larger upper end and a smaller lower end, and a hanging block limiting inclined surface 13 is provided below the hanging block guide groove 16. When implemented, the guide cone surface 18, the limiting inclined surface 19, and the positioning platform 20 are respectively in contact with the hanging block guide groove 16, the hanging block limiting inclined surface 13, and the hanging block positioning groove 15, so that the guiding function, the limiting and positioning functions are realized. Further, in order to improve the accuracy of grasping, the expansion 14 is provided at the end of the hanging block positioning groove 15 to ensure that the hollow shaft 7 can smoothly enter the predetermined position.
[0045] like Figure 1 , 2 As shown in , 4 and 12, the quick-connect mechanism includes a rotating cross bar 3 and a cross bar transmission sleeve 12. The upper end of the cross bar transmission sleeve 12 is connected to the main shaft of the power source 1. The rotating cross bar 3 is arranged at the upper end of the rotating main shaft 4. The rotating cross bar 3 is clamped in the groove at the lower end of the cross bar transmission sleeve 12. When implemented, the rotating cross bar 3 is fixed to the upper end of the rotating main shaft 4 by the connecting screws 10.
[0046] When the quick-connect mechanism adopts the above structure, after a group of silicon cores are drawn, the tray 40 is rotated. At this time, the lower part of the hollow shaft 7 passes through the arc groove C39 on the tray 40 and enters the predetermined tray station 38, and then the manipulator 5 is lowered. At this time, the positioning block 6 enters the tray station 38. When the positioning block 6 contacts the tray station 38, the manipulator 5 continues to be lowered, and then the tray 38 is rotated. At this time, the rotating cross bar 3 is disengaged from the cross bar transmission sleeve 12, and the group of silicon cores that have been drawn are placed on the tray station 38. A new group of seed crystals are grabbed again. When the hanging block After 11 enters the through hole 17 of the hanging block on the manipulator 5, the manipulator 5 is lifted. At this time, the guide cone 18, the limiting slope 19, and the positioning platform 20 are respectively in contact with the hanging block guide groove 16, the hanging block limiting slope 13, and the hanging block positioning groove 15. The expansion 42 can play a guiding role. At this time, the manipulator 5 drives the positioning block 6 on the hollow shaft 7 to disengage from the tray station 38. At this time, the rotating cross bar 3 is inserted into the cross bar transmission sleeve 12 and is clamped, and then the tray 38 is rotated. After reaching the predetermined station, a new round of silicon core drawing begins.
[0047] like Figure 5 , 6 As shown in Figures 7 and 12, the replacement structure of the quick-connect mechanism is that the quick-connect mechanism includes a transmission sleeve 21 and an intermediate transmission disk 22, the upper end of the transmission sleeve 21 is connected to the main shaft of the power source 1, and during implementation, a locking mechanism can be provided at the upper end of the transmission sleeve 21, so that the transmission sleeve 21 can be fixedly connected to the main shaft of the power source 1 by a locking screw, an intermediate transmission disk through hole 24 is provided on the outer edge surface of the transmission sleeve 21, a hollow shaft through hole 25 is provided at the bottom of the intermediate transmission disk through hole 24, at least one active key 23 is provided on the bottom surface of the intermediate transmission disk through hole 24, a screw fixing hole 26 is provided in the middle of the intermediate transmission disk 22, and then a bolt is provided in the screw fixing hole 26, and the intermediate transmission disk 22 is fixedly connected to the upper end of the rotating main shaft 4 by the bolt, and at least one transmission key 27 is provided under the intermediate transmission disk 22, and the transmission key 27 is engaged with the active key 23 to realize power transmission.
[0048] When the quick-connect mechanism adopts the above structure, after a group of silicon cores are drawn, the tray 40 is rotated. At this time, the lower part of the hollow shaft 7 passes through the arc groove C39 on the tray 40 and enters the predetermined tray station 38, and then the manipulator 5 is lowered. At this time, the positioning block 6 enters the tray station 38. When the positioning block 6 contacts the tray station 38, the manipulator 5 continues to be lowered, and then the tray 38 is rotated. At this time, the transmission sleeve 21 and the intermediate transmission disc 22 are disengaged, and the group of silicon cores that have been drawn are placed on the tray station 38. A new group of seed crystals are grabbed again. When the hanging block 11 enters After reaching the hanging block perforation 17 on the manipulator 5, the manipulator 5 is lifted. At this time, the guide cone 18, the limiting slope 19, and the positioning platform 20 are respectively in contact with the hanging block guide groove 16, the hanging block limiting slope 13, and the hanging block positioning groove 15. The expansion 42 can play a guiding role. At this time, the manipulator 5 drives the positioning block 6 on the hollow shaft 7 to disengage from the tray station 38. At this time, the active key 23 on the transmission sleeve 21 is engaged with the transmission key 27 on the intermediate transmission disk 22, and then the tray 38 is rotated. After reaching the predetermined station, a new round of silicon core drawing is started.
[0049] like Figure 8 , 9 As shown in Figures 10, 11 and 12, the second replacement structure of the quick-connect mechanism is that the quick-connect mechanism includes a driving gear 28, a driven gear 29, a manipulator transition sleeve 30, a lower transition gear 31, a gear shaft 32 and an upper transition gear 33. A power source 1 is provided on the manipulator transition sleeve 30. The driving gear 28 is sleeved on the main shaft of the power source 1. The driving gear 28 and the upper transition gear 33 are sleeved on the upper part of the outer edge surface of the gear shaft 32. A lower transition gear 31 is provided on the lower part of the outer edge surface of the gear shaft 32. The gear shaft 32, the lower transition gear 31 and the upper transition gear 33 form a driven wheel mechanism. The central axis of the driven wheel mechanism is parallel to the central axis of the manipulator transition sleeve 30. The driven gear 29 is sleeved on the upper end of the rotating main shaft 4. The lower transition gear 31 meshes with the driven gear 29 to realize power transmission. The manipulator transition sleeve 30 is a barrel-shaped structure, and a driven gear through hole 34 is provided on the outer edge surface of the manipulator transition sleeve 30, and an arc groove A36 is provided at the bottom of the driven gear through hole 34 to the bottom of the manipulator transition sleeve 30, and a gear shaft mounting hole 35 is provided on the left or right side or both sides of the arc groove A36, so that one or two sets of driven wheel mechanisms can be provided, and a manipulator 5 is provided under the manipulator transition sleeve 30. Fig.11 As shown, the manipulator 5 needs to be set as a split structure, so as to ensure the movement of the rotating spindle 4, that is, an arc groove B37 is provided on the top of the manipulator 5 to make the manipulator 5 form a split structure, and the arc groove B37 is set corresponding to the arc groove A36.
[0050] When the quick-connect mechanism adopts the above structure, after a group of silicon cores are drawn, the tray 40 is rotated. At this time, the lower part of the hollow shaft 7 passes through the arc groove C39 on the tray 40 and enters the predetermined tray station 38, and then the manipulator 5 is lowered. At this time, the positioning block 6 enters the tray station 38. When the positioning block 6 contacts the tray station 38, the manipulator 5 continues to descend, and then the tray 38 is rotated. At this time, the driven gear 29 is disengaged from the lower transition gear 31, and the group of silicon cores that have been drawn are placed on the tray station 38. A new group of seed crystals are re-grabbed. When the hanging block 11 enters the hanging block through hole 17 on the lifting manipulator 5, the main shaft 4 is rotated. It passes through the driven gear through-hole 34, arc groove A36 and arc groove B37 provided on the manipulator transition sleeve 30, and then the driven gear 29 on the rotating main shaft 4 is engaged with the lower transition gear 31 to lift the manipulator 5. At this time, the guide cone 18, the limiting slope 19 and the positioning platform 20 are respectively in contact with the hanging block guide groove 16, the hanging block limiting slope 13 and the hanging block positioning groove 15, and the flaring 42 can play a guiding role. At this time, the manipulator 5 drives the positioning block 6 on the hollow shaft 7 to leave the tray station 38, and then rotates the tray 38. After reaching the predetermined station, a new round of silicon core drawing starts.
[0051] The quick-connect mechanism of the present invention can also adopt structures such as umbrella gear transmission, bevel gear transmission, worm gear transmission, spline hole and spline shaft transmission, etc.
[0052] The parts not described in detail in the above content are prior art, so they are not described in detail.
[0053] The embodiments selected herein for the purpose of disclosing the present invention are those presently considered suitable, but it should be understood that the present invention is intended to include all changes and modifications of the embodiments that fall within the scope of the present concept and invention.
Claims
1. A quick pick-up and placement device for a seed crystal chuck for rotating a seed crystal, comprising a power source (1), a rotating spindle (4), a manipulator (5), a positioning block (6), a hollow shaft (7) and a quick connection mechanism, wherein: The lower end of the rotating main shaft (4) is connected to the power input end of the seed crystal rotating disk (8), a hollow shaft (7) is sleeved on the outer edge surface of the rotating main shaft (4), the lower end of the hollow shaft (7) is connected to the seed crystal rotating disk (8), the outer edge surface of the upper end of the hollow shaft (7) is provided with a hanging block (11) extending outward, and a positioning block (6) is provided on the outer edge surface of the hollow shaft (7) below the hanging block (11), the hanging block (11) is hung on the manipulator (5), and a power source (1) is provided on the top of the manipulator (5), and the main shaft of the power source (1) is connected to the upper end of the rotating main shaft (4) through a quick connection mechanism to form the quick pick-up and placement device of the seed crystal chuck for rotating the seed crystal.
2. The quick-pick-and-place device for a seed crystal chuck for rotating a seed crystal according to claim 1, characterized in that: The quick-connect mechanism comprises a rotating cross bar (3) and a cross bar transmission sleeve (12), wherein the upper end of the cross bar transmission sleeve (12) is connected to the main shaft of the power source (1), the rotating cross bar (3) is arranged at the upper end of the rotating main shaft (4), and the rotating cross bar (3) is clamped in a clamping groove at the lower end of the cross bar transmission sleeve (12).
3. The quick-pick-and-place device for a seed crystal chuck for rotating a seed crystal according to claim 1, characterized in that: The replacement structure of the quick-connect mechanism is that the quick-connect mechanism includes a transmission sleeve (21) and an intermediate transmission disc (22), the upper end of the transmission sleeve (21) is connected to the main shaft of the power source (1), an intermediate transmission disc through hole (24) is provided on the outer edge surface of the transmission sleeve (21), a hollow shaft through hole (25) is provided at the bottom of the intermediate transmission disc through hole (24), at least one active key (23) is provided on the bottom surface of the intermediate transmission disc through hole (24), the intermediate transmission disc (22) is arranged at the upper end of the rotating main shaft (4), at least one transmission key (27) is provided below the intermediate transmission disc (22), and the transmission key (27) is engaged with the active key (23) to realize power transmission.
4. The quick-pick-and-place device for a seed crystal chuck for rotating a seed crystal according to claim 1, characterized in that: The second replacement structure of the quick connection mechanism is that the quick connection mechanism includes a driving gear (28), a driven gear (29), a manipulator transition sleeve (30), a lower transition gear (31), a gear shaft (32) and an upper transition gear (33); a power source (1) is provided on the manipulator transition sleeve (30); a driving gear (28) is sleeved on the main shaft of the power source (1); the driving gear (28) and the upper transition gear (33); the upper transition gear (33) is sleeved on the upper part of the outer edge surface of the gear shaft (32); a lower transition gear (31) is provided on the lower part of the outer edge surface of the gear shaft (32); the driven gear (29) is sleeved on the upper end of the rotating main shaft (4); the lower transition gear (31) and the driven gear (29) are meshed to realize power transmission.
5. The rapid pick-and-place device for a seed crystal chuck for rotating a seed crystal according to claim 4, characterized in that: The manipulator transition sleeve (30) is a barrel-shaped structure, and a driven gear through hole (34) is provided on the outer edge surface of the manipulator transition sleeve (30), and an arc groove A (36) is provided at the bottom of the driven gear through hole (34) and passes through to the bottom of the manipulator transition sleeve (30), and a gear shaft mounting hole (35) is provided on the left side or the right side or both sides of the arc groove A (36), and a manipulator (5) is provided under the manipulator transition sleeve (30).
6. The rapid pick-and-place device for a seed crystal chuck for rotating a seed crystal according to claim 1, characterized in that: The manipulator (5) is a barrel-shaped structure, a hanging block through hole (17) is provided on the outer edge surface of the manipulator (5), and a hanging block positioning groove (15) is provided at the bottom of the hanging block through hole (17) and passes through to the bottom of the manipulator (5).
7. The rapid pick-and-place device for a seed crystal chuck for rotating a seed crystal according to claim 6, characterized in that: The side walls on the left and right sides of the hanging block positioning groove (15) are respectively provided with hanging block guide grooves (16) with a larger upper end and a smaller lower end.
8. The rapid pick-and-place device for a seed crystal chuck for rotating a seed crystal according to claim 7, characterized in that: A hanging block limiting inclined surface (13) is provided below the hanging block guide groove (16).
9. The rapid pick-and-place device for a seed crystal chuck for rotating a seed crystal according to claim 5, characterized in that: An arc-shaped groove B (37) is provided on the top of the manipulator (5) so that the manipulator (5) forms a split structure, and the arc-shaped groove B (37) is arranged corresponding to the arc-shaped groove A (36).
10. The rapid pick-and-place device for a seed crystal chuck for rotating a seed crystal according to claim 1, characterized in that: A guide cone surface (18) is provided on the outer edge surface of the hanging block (11).
11. The rapid pick-and-place device for a seed crystal chuck for rotating a seed crystal according to claim 1, characterized in that: A limiting inclined surface (19) is provided at the transition point between the lower surface of the hanging block (11) and the outer edge surface of the hollow shaft (7).
12. The rapid pick-and-place device for a seed crystal chuck for rotating a seed crystal according to claim 1, characterized in that: A positioning platform (20) is provided on the outer edge surface of the hollow shaft (7) below the hanging block (11).
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