Probe module for multiple UUTs with tilted conductive contacts

Abstract

The present invention relates to a probe module, which is used for simultaneously detecting first and second units to be tested whose side edges are adjacent, wherein the first and second units to be tested respectively have first and second junction points adjacent to their first main edges and adjacent side edges; the probe module comprises a probe seat, and first and second junction probes arranged at different heights on the probe seat; when the probe module detects the first and second units to be tested, the first main edge of each unit to be tested is closer to the probe seat than the second main edge; the first and second junction probes respectively pass over the first main edges of the first and second units to be tested with their cantilever sections and extend to the first and second junction points respectively, and then touch the first and second junction points with their touch sections; thereby, the first and second junction probes can avoid mutual interference.

Description

Technical Field

[0001] The present invention relates to a probe module of a probe card, and in particular to a probe module suitable for a multi-UUT with inclined conductive contacts. Background Art

[0002] See also Figure 1 , which shows a unit under test 10 (UUT) with inclined conductive contacts. The UUT 10 may be an unpackaged chip (die) or a packaged chip (chip). The UUT 10 has a plurality of first conductive contacts 11 arranged in one or more rows for outputting signals, and a plurality of second conductive contacts 12 arranged in a row for inputting signals, for example Figure 1 The unit under test 10 shown has three rows of first conductive contacts 11 arranged from a first long side 131 of a substrate 13 toward a second long side 132, and a row of second conductive contacts 12 disposed along the second long side 132 of the substrate 13. The first and second conductive contacts 11, 12 are arranged in a plurality of rows, and the arrangement direction of each row is substantially parallel to an imaginary dividing axis L perpendicular to the first and second long sides 131, 132, and the rows close to the imaginary dividing axis L, for example Figure 1 The long sides 111 and 121 of the first and second conductive contacts 11 and 12 included in the middle block 14 are substantially parallel to the imaginary dividing axis L, and the first and second conductive contacts 11 and 12 in the row farther from the imaginary dividing axis L are inclined conductive contacts, and the ends thereof closer to the first long side 131 of the substrate 13 are also closer to the imaginary dividing axis L, and the ends thereof farther from the first long side 131 of the substrate 13 are also farther from the imaginary dividing axis L, that is, the inclined conductive contacts are arranged in a manner similar to the first long side 131 of the substrate 13. Figure 1 The first and second conductive contacts 11 and 12 are inclined from top to bottom and from inside to outside in the direction of the imaginary dividing axis L, and the farther the first and second conductive contacts 11 and 12 are from the imaginary dividing axis L, the greater the angle relative to the imaginary dividing axis L. For example, Figure 1 The angles θ1 and θ2 of the long sides 111 and 121 of the first and second conductive contacts 11 and 12 included in the two outer blocks 15 and 16 relative to the imaginary boundary axis L are the largest.

[0003] The unit under test 10 can be tested using a probe card with a cantilever probe. To simplify the diagram, Figure 1 Only a probe 17 corresponding to the second conductive contact 12 on the far left is schematically shown. In fact, each conductive contact 11, 12 corresponds to a probe. The cantilever section 171 of the probe 17 can extend from a probe base 18 located above the outer side of the second long side 132 of the unit under test 10 to above the conductive contact 12, so that a contact section (not shown in the figure) extending downward from the end of the cantilever section 171 of the probe 17 can touch the corresponding conductive contact 12.

[0004] However, since the UUT 10 has inclined conductive contacts with inconsistent inclination angles, the probes required for its detection are difficult to be arranged on the probe holder. Especially for the detection of multiple UUTs, that is, detecting at least two UUTs 10 at the same time, there will be a concern that the probes 17 will interfere with each other. Therefore, there is still no suitable detection device. Summary of the invention

[0005] In view of the above problems, the main purpose of the present invention is to provide a probe module which is suitable for testing multiple UUTs with inclined conductive contacts similar to the above, so as to avoid mutual interference of probes.

[0006] To achieve the above-mentioned purpose, the present invention provides a probe module suitable for multiple units to be tested with inclined conductive contacts, which is used to simultaneously detect multiple units to be tested, and is characterized in that: each of the units to be tested has a first main edge, a second main edge, a first side edge and a second side edge connecting the first main edge and the second main edge, and a plurality of conductive contacts, the multiple units to be tested include a first unit to be tested and a second unit to be tested, the second side edge of the first unit to be tested is adjacent to the first side edge of the second unit to be tested, the conductive contacts of the first unit to be tested include a first junction contact adjacent to the first main edge and the second side edge of the first unit to be tested, and the conductive contacts of the second unit to be tested include a second junction contact adjacent to the first main edge and the first side edge of the second unit to be tested; the probe module includes: at least one probe seat; a plurality of probes, each The probe includes a cantilever section and a touch section, the cantilever section has a fixed portion fixed to the probe seat, and an exposed portion connected to the fixed portion and extending from an inner side surface of the probe seat, and the touch section is connected to the exposed portion; wherein, the at least one probe seat includes a first probe seat, and the plurality of probes include a first junction probe and a second junction probe arranged on the first probe seat and located at different heights. When the probe module detects each of the units to be tested, the first main edge of each of the units to be tested is closer to the first probe seat than the second main edge. The first junction probe and the second junction probe pass over the first main edges of the first unit to be tested and the second unit to be tested with their cantilever sections respectively and extend to the first junction contact and the second junction contact respectively, and then touch the first junction contact and the second junction contact with their touch sections respectively.

[0007] In the technical solution of the present invention, the conductive contacts of each unit to be tested include a plurality of first conductive contacts arranged in a row along the first main edge of the unit to be tested, the first conductive contacts of the first unit to be tested include the first boundary contacts, and the first conductive contacts of the second unit to be tested include the second boundary contacts; the plurality of probes include a plurality of first probes and a plurality of second probes arranged on the first probe seat, each of the first probes forms a first needle layer on the first probe seat, each of the second probes forms a second needle layer at a height different from the first needle layer on the first probe seat, each of the first probes includes the first boundary probes, and each of the second probes includes the second boundary probes; when the probe module detects each unit to be tested, each of the first probes respectively touches the first conductive contact of the first unit to be tested with its contact segment, and each of the second probes respectively touches the first conductive contact of the second unit to be tested with its contact segment.

[0008] The conductive contacts of each of the units to be tested include a plurality of first conductive contacts arranged in a row along a first main edge of the unit to be tested, the first conductive contacts of the first unit to be tested include the first junction contact, and the first conductive contacts of the second unit to be tested include the second junction contact; the plurality of probes include a plurality of first probes and a plurality of second probes arranged on the first probe seat, each of the first probes includes the first junction probe, and each of the second probes includes the second junction probe; when the probe module detects each of the units to be tested, each of the first probes respectively touches the first conductive contact of the first unit to be tested with its contact segment, and each of the second probes respectively touches the first conductive contact of the second unit to be tested with its contact segment; each of the first probes and the second probes form a plurality of needle layers of different heights on the first probe seat, and the first junction probes and the second junction probes are located in different needle layers.

[0009] The needle layer of the first probe seat includes a first needle layer and a second needle layer lower than the first needle layer. One of the first interface probe and the second interface probe is located in the first needle layer, and the other first probes and second probes are located in the second needle layer.

[0010] Each of the first probes can define a first imaginary dividing line perpendicular to the inner side surface of the first probe seat, and the direction in which the exposed portion of each of the first probes extends from the inner side surface is parallel to the first imaginary dividing line or is inclined relative to the first imaginary dividing line approaching the first imaginary dividing line; each of the second probes can define a second imaginary dividing line perpendicular to the inner side surface of the first probe seat, and the direction in which the exposed portion of each of the second probes extends from the inner side surface is parallel to the second imaginary dividing line or is inclined relative to the second imaginary dividing line approaching the second imaginary dividing line.

[0011] The conductive contacts of each of the units to be tested include a plurality of second conductive contacts adjacent to the second main edge of the unit to be tested; at least one probe seat of the probe module further includes a second probe seat, and the probes of the probe module include a plurality of third probes arranged on the second probe seat. When the probe module detects each of the units to be tested, the second main edge of each of the units to be tested is closer to the second probe seat than the first main edge, and at least part of the third probes extend with their cantilever sections over the second main edge of each of the units to be tested to above each of the second conductive contacts and then touch each of the second conductive contacts with their contact sections.

[0012] The second conductive contacts of each of the units under test are arranged in a plurality of rows substantially parallel to a horizontal imaginary axis, and are arranged in an order from the second main edge toward the first main edge; each of the third probes forms a plurality of needle layers of different heights in a manner substantially corresponding to the arrangement of each of the second conductive contacts, and their order corresponds to the order of the plurality of rows of the second conductive contacts from bottom to top.

[0013] The plurality of units under test also include a third unit under test and a fourth unit under test, wherein the first main edge of the third unit under test is adjacent to the second main edge of the first unit under test, and the first main edge of the fourth unit under test is adjacent to the second main edge of the second unit under test; when the probe module detects each of the units under test, part of the third probes touch all the conductive contacts of the third unit under test and the fourth unit under test with their contact segments.

[0014] The third probes form multiple needle layers with different heights. The third probes in the higher needle layers are used to touch the conductive contacts farther from the second probe seat, and the third probes in the higher needle layers have longer cantilever sections.

[0015] The second probe seat can define an imaginary dividing axis, a first imaginary dividing line and a second imaginary dividing line perpendicular to its inner side surface, the first imaginary dividing line and the second imaginary dividing line are respectively located on a first side and a second side of the imaginary dividing axis, the direction in which the exposed portion of the probe located on the first side of the imaginary dividing axis extends from the inner side surface is parallel to the first imaginary dividing line or is inclined relative to the first imaginary dividing line away from the first imaginary dividing line, and the direction in which the exposed portion of the probe located on the second side of the imaginary dividing axis extends from the inner side surface is parallel to the second imaginary dividing line or is inclined relative to the second imaginary dividing line away from the second imaginary dividing line.

[0016] The fixing portion and the exposed portion of each probe are substantially in a straight line.

[0017] The fixing part of each probe comprises an inner section and an outer section. The inner section of the fixing part of each probe is connected to the exposed part and substantially forms a straight line with the exposed part. The outer sections of the fixing part of each probe are substantially parallel to each other.

[0018] To achieve the above-mentioned purpose, the present invention also provides a probe module suitable for multiple units under test with inclined conductive contacts, characterized in that it includes: at least one probe seat; multiple probes, each of the probes includes a cantilever section and a touch section, the cantilever section has a fixed portion fixed to the probe seat, and an exposed portion connected to the fixed portion and extending from an inner side surface of the probe seat, and the touch section is connected to the exposed portion; wherein the at least one probe seat includes a first probe seat, and the multiple probes include a first junction probe and a second junction probe arranged on the first probe seat and located at different heights, and the vertical distances between the ends of the touch sections of the first junction probe and the inner side surface of the first probe seat are substantially the same.

[0019] The exposed portion of the first junction probe and the exposed portion of the second junction probe are inclined non-perpendicular to the inner side surface of the first probe seat, and the inclination directions thereof are substantially symmetrical to each other.

[0020] The plurality of probes include a plurality of first probes and a plurality of second probes disposed on the first probe seat, each of the first probes forms a first needle layer on the first probe seat, each of the second probes forms a second needle layer at a height different from the first needle layer on the first probe seat, each of the first probes includes the first boundary probe, each of the second probes includes the second boundary probe, and a vertical distance between a tip of a contact segment of each of the first probes and the second probe and an inner side surface of the first probe seat is substantially the same.

[0021] The plurality of probes include a plurality of first probes and a plurality of second probes disposed on the first probe seat, the vertical distances between the ends of the contact segments of the first probes and the inner side surface of the first probe seat being substantially the same, the first probes include the first junction probes, the second probes include the second junction probes, the first probes and the second probes form a plurality of needle layers of different heights on the first probe seat, and the first junction probes and the second junction probes are located in different needle layers.

[0022] The needle layer of the first probe seat includes a first needle layer and a second needle layer lower than the first needle layer. One of the first interface probe and the second interface probe is located in the first needle layer, and the other first probes and second probes are located in the second needle layer.

[0023] Each of the first probes can define a first imaginary dividing line perpendicular to the inner side surface of the first probe seat, and the direction in which the exposed portion of each of the first probes extends from the inner side surface is parallel to the first imaginary dividing line or is inclined relative to the first imaginary dividing line approaching the first imaginary dividing line; each of the second probes can define a second imaginary dividing line perpendicular to the inner side surface of the first probe seat, and the direction in which the exposed portion of each of the second probes extends from the inner side surface is parallel to the second imaginary dividing line or is inclined relative to the second imaginary dividing line approaching the second imaginary dividing line.

[0024] At least one probe seat of the probe module further includes a second probe seat, and the probes of the probe module include a plurality of third probes arranged on the second probe seat, each of the third probes forms a plurality of needle layers with different heights on the second probe seat, and the exposed portion of the cantilever segment of the third probe in a needle layer with a higher position is longer.

[0025] The second probe seat can define an imaginary dividing axis, a first imaginary dividing line and a second imaginary dividing line perpendicular to its inner side surface, the first imaginary dividing line and the second imaginary dividing line are respectively located on a first side and a second side of the imaginary dividing axis, the direction in which the exposed portion of the probe located on the first side of the imaginary dividing axis extends from the inner side surface is parallel to the first imaginary dividing line or is inclined relative to the first imaginary dividing line away from the first imaginary dividing line, and the direction in which the exposed portion of the probe located on the second side of the imaginary dividing axis extends from the inner side surface is parallel to the second imaginary dividing line or is inclined relative to the second imaginary dividing line away from the second imaginary dividing line.

[0026] The fixing portion and the exposed portion of each probe are substantially in a straight line.

[0027] The fixing part of each probe comprises an inner section and an outer section. The inner section of the fixing part of each probe is connected to the exposed part and substantially forms a straight line with the exposed part. The outer sections of the fixing part of each probe are substantially parallel to each other.

[0028] By adopting the above technical solution, the present invention mainly targets the conductive contacts at the adjacent side edges of the adjacent units to be tested, i.e., the first and second junction contacts. The probe module of the present invention is a first probe seat adjacent to the first main edge of the unit to be tested, and the first and second junction probes extending from different heights respectively touch the first and second junction contacts. The probe configuration used by the probe module to touch other conductive contacts of each unit to be tested is not limited.

[0029] Since the first and second junction probes are located at different heights, even if the first and second junction contacts are close to each other in the extension direction toward the first main edge, the directions in which the exposed portions of the cantilever sections of the first and second junction probes extend from the first probe seat can still match the extension directions of the first and second junction contacts, so as to prevent the probes from accidentally sliding onto non-corresponding conductive contacts during point measurement, that is, the exposed portions of the cantilever sections of the first and second junction probes can extend obliquely from the first probe seat and gradually approach the corresponding junction contacts. Even if the required inclination angle is large, so that the cantilever sections of the first and second junction probes are quite close to each other or even have to be partially located on the same vertical plane, the first and second junction probes can avoid mutual interference because they are located at different heights.

[0030] In fact, the probes extending from the first probe seat at different heights are not limited to being used for contacting the first and second junction contacts adjacent to the first main edge as mentioned above, but can be applied to conductive contacts at any position that may cause probes at the same height to be too close or interfere with each other, so as to avoid probe interference by arranging the probes corresponding to the conductive contacts that may cause the aforementioned problems (both referred to as the first and second junction probes in the present invention) at different heights. BRIEF DESCRIPTION OF THE DRAWINGS

[0031] Figure 1 It is a top view schematic diagram of a unit under test with an inclined conductive contact, a probe and a probe holder;

[0032] Figure 2 It is a top view schematic diagram of a probe module, a first unit to be tested and a second unit to be tested provided by a first preferred embodiment of the present invention, but does not show a third probe of the probe module;

[0033] Figure 3 Probably Figure 2 A right side view of the probe module further showing a third probe and a circuit board;

[0034] Figure 4 Similar to Figure 2 , wherein the probe shown is only a portion of the third probe;

[0035] Figure 5 Similar to Figure 4 , where the probe shown is only the third probe of another part;

[0036] Figure 6 Similar to Figure 5 , wherein the probe shown is only a third probe of yet another part;

[0037] Figure 7 Similar to Figure 2 ,but Figure 7 The fixed part and the exposed part of the middle probe are in a straight line;

[0038] Figure 8 is a top view schematic diagram of a probe module and first to fourth units under test provided by a second preferred embodiment of the present invention, but the probe shown therein is only a portion of the third probe;

[0039] Fig. 9 yes Figure 8 but showing more of the other probes of the probe module. DETAILED DESCRIPTION

[0040] The following embodiments are now given in conjunction with the accompanying drawings to describe in detail the structure, features, assembly or use methods and effects of the present invention. However, those with ordinary knowledge in the field of the present invention should understand that these detailed descriptions and specific embodiments listed for implementing the present invention are only used to illustrate the present invention and are not used to limit the scope of patent protection of the present invention.

[0041] The applicant first explains that in the embodiments and drawings to be introduced below, the same reference numbers represent the same or similar elements or their structural features. It should be noted that the elements and structures in the drawings are for illustration purposes only and are not drawn according to the actual proportions and quantities, and if it is possible in practice, the features of different embodiments can also be applied interchangeably.

[0042] See also Figures 2 to 6 As shown, a probe module 20 provided in a first preferred embodiment of the present invention mainly includes a first probe base 21, a second probe base 22, and a plurality of probes 30a-30e.

[0043] Each probe 30a-30e is formed by bending a straight needle made of a conductive material (such as metal) through mechanical processing. Figure 3 As shown, each probe 30a-30e includes a cantilever section 31 and a contact section 32. The cantilever section 31 has a fixing portion 311 fixedly connected to the first probe seat 21 or the second probe seat 22, and an exposed portion 312 connected to the fixing portion 311 and extending from an inner side surface 211 of the first probe seat 21 or an inner side surface 221 of the second probe seat 22. Figure 2 and Figures 4 to 6 As shown, the cantilever sections 31 of some probes 30a-30e are not bent so that their fixed portion 311 and exposed portion 312 are in a straight line, while the cantilever sections 31 of other probes 30a-30e are bent so that their fixed portion 311 and exposed portion 312 are not in a straight line. Figure 3 As shown, the contact section 32 of each probe 30 a - 30 e extends downward from the end of the exposed portion 312 .

[0044] The first probe seat 21 and the second probe seat 22 are made of insulating material (such as epoxy resin commonly known as black glue). The first and second probe seats 21 and 22 are arranged with their inner side surfaces 211 and 221 facing each other, and are usually fixed to the bottom surface 41 of a circuit board 40 (such as Figure 3 As shown in FIG. 1 , the circuit board 40 , the first and second probe seats 21 , 22 and the probes 30 a - 30 e are combined into a probe card.

[0045] In the embodiment of the present invention, the fixing portion 311 of each probe 30a-30e is located in the first or second probe seat 21, 22, and the fixing method is to use black glue to simultaneously set the probes of the same needle layer (described in detail below) at predetermined positions on the probe seat, and then bake the black glue to fix the probes on the probe seat. However, the fixing portion 311 of each probe 30a-30e can also be fixed to the outer surface of the first or second probe seat 21, 22 by adhesive. Each probe 30a-30e can further have a connecting section (not shown in the figure) extending from an outer side surface 212 of the first probe seat 21 or an outer side surface 222 of the second probe seat 22, so as to be electrically connected to the conductive contact (not shown in the figure) on the bottom surface 41 of the circuit board 40 through the connecting section.

[0046] In detail, the fixing portion 311 of the tilted probe 30a-30e (the exposed portion 312 is tilted) in this embodiment includes an inner section 311a connected to the exposed portion 312, and an outer section 311b extending from the inner section 311a to the outer side of the probe seat and connected to the aforementioned connecting section. The inner section 311a is in a straight line with the exposed portion 312 and is tilted, and the outer section 311b is in a straight line with the aforementioned connecting section and is perpendicular to the inner and outer sides of the probe seat (i.e., parallel to the non-tilted probe). The probe is tilted in this way by firstly adjusting the probe according to the corresponding The extension direction D2 of the conductive contact (described in detail below) is to place the linear needle on the probe seat and fix the inner section 311a of its fixing portion 311 with black glue to fix the exposed portion 312 of the probe at the required angle (i.e. parallel to the extension direction D2 of the corresponding conductive contact). At this time, the probe has been fixed on the probe seat, and then bend its fixing portion 311 so that its outer section 311b together with the connecting section are perpendicular to the inner and outer sides of the probe seat, and then fix the outer section 311b with black glue. This method can facilitate the bending operation and can make the bending angle of the probe well fixed and not easy to rebound.

[0047] The probe module of the present invention is used to detect multiple units under test, that is, to detect multiple units under test at the same time. For example, the probe module 20 of the present embodiment is used to detect a first unit under test 50A and a second unit under test 50B at the same time. The units under test in the embodiment of the present invention are different from the units under test 10 (such as the units under test 10 described in the prior art) Figure 1However, in order to more clearly describe the features of the present invention, different descriptions are used in the embodiments. Figure 1 The different component numbers in the figure further illustrate the unit under test.

[0048] like Figure 2 and Figure 3 As shown, an upper surface 56 of each unit under test 50A, 50B has a first and a second main edge 51, 52 (usually long edges) facing opposite directions, a first and a second side edge 53, 54 (usually short edges) connecting the first and the second main edges 51, 52 and facing opposite directions, and a plurality of conductive contacts 55a~55d, and the second side edge 54 of the first unit under test 50A is adjacent to the first side edge 53 of the second unit under test 50B. When the probe module 20 detects each unit under test 50A, 50B, the first and second probe seats 21, 22 are respectively located above the outer side of the first main edge 51 and the outer side of the second main edge 52 of the unit under test 50A, 50B. In other words, the first main edge 51 of each unit under test 50A, 50B is closer to the first probe seat 21 than the second main edge 52, and the second main edge 52 of each unit under test 50A, 50B is closer to the second probe seat 22 than the first main edge 51. The probe module 20 moves downward as a whole (together with the aforementioned circuit board 40) and then touches each conductive contact 55a~d with each probe 30a~30e.

[0049] It should be noted that the present invention is to point the probes 30a-30e in the direction D1 (eg Figure 3 As shown in the figure, it is defined as downward, and this is used as a reference to describe the directionality of other features (such as terms such as up, down, top, and bottom). For example, the upper surface 56 of each unit under test 50A, 50B having conductive contacts 55a~55d is the surface facing the opposite direction of the touch direction D1, and the bottom surface 41 of the circuit board 40 on which the first and second probe seats 21, 22 are fixed is the surface facing the touch direction D1. However, the aforementioned directionality only describes that each feature tends to the touch direction D1 (for example, downward) or the opposite direction of the touch direction D1 (for example, upward), rather than conforming to the touch direction D1 or the opposite direction of the touch direction D1 without error. For example, the touch segment 32 of each probe 30a~30e extends downward from the end of the exposed portion 312, which may include the touch segment 32 extending toward the touch direction D1, or the touch segment 32 is as shown in the figure. Figure 3 As shown, the portion tending toward the touching direction D1 is inclined relative to the touching direction D1 .

[0050] In each of the units under test 50A and 50B, each of the conductive contacts 55a-55d has a first end 551 facing the first main edge 51 and a second end 552 facing the second main edge 52. To simplify the diagram, only the conductive contacts 55a-55d are shown in FIG. Figure 4The three conductive contacts in FIG. 5 are marked with their first ends 551 and second ends 552, and each conductive contact 55a-55d can define an extension direction D2 from its second end 552 to the first end 551. Figure 2 As shown, in this embodiment, each unit under test 50A, 50B can define an imaginary dividing axis A1, and the extension direction D2 of the conductive contacts 55a-55d between the imaginary dividing axis A1 of each unit under test 50A, 50B and the first side edge 53 is parallel to the imaginary dividing axis A1 (for example, located at Figure 4 The conductive contact of the middle block 57 indicated by the marking) or is inclined relative to the imaginary dividing axis A1 close to the first side edge 53 (for example, at Figure 4 The extension direction D2 of the conductive contacts 55a-55d between the imaginary boundary axis A1 of each unit under test 50A, 50B and the second side edge 54 is parallel to the imaginary boundary axis A1 (for example, located at Figure 4 The conductive contact of the middle block 57 indicated by the marking) or is inclined toward the second side edge 54 relative to the imaginary dividing axis A1 (for example, at Figure 4 More specifically, the extension direction D2 of the conductive contacts 55a-55d (those located in the middle block 57) near the imaginary dividing axis A1 is parallel to the imaginary dividing axis A1, and the farther the conductive contacts 55a-55d are from the imaginary dividing axis A1, the greater the degree of inclination relative to the imaginary dividing axis A1.

[0051] like Figure 2 and Figures 4 to 6 As shown, in each of the units under test 50A and 50B, each of the conductive contacts 55a-55d is divided into a first conductive contact 55a adjacent to the first main edge 51 and a second conductive contact 55b-55d adjacent to the second main edge 52, wherein the second conductive contact 55b is substantially parallel to a horizontal imaginary axis A2 and arranged in a first row L1 along the second main edge 52 (as shown in FIG. Figure 4 The second conductive contacts 55c are arranged substantially parallel to the horizontal imaginary axis A2 in a second row L2 adjacent to the first row L1 (as shown in FIG. Figure 5 The second conductive contacts 55d are arranged substantially parallel to the horizontal imaginary axis A2 in a third row L3 adjacent to the second row L2 (as shown in FIG. Figure 6 As shown in FIG. 5 , the first to third rows L1 to L3 are arranged in sequence from the second main edge 52 to the first main edge 51. Figure 2As shown, the first conductive contacts 55a of each unit under test 50A, 50B are arranged in a row along the first main edge 51 substantially parallel to the horizontal imaginary axis A2. The first conductive contacts 55a of the first unit under test 50A include a first boundary contact 61 adjacent to the second side edge 54 of the first unit under test 50A, and the first conductive contacts 55a of the second unit under test 50B include a second boundary contact 62 adjacent to the first side edge 53 of the second unit under test 50B.

[0052] The probes 30a to 30e of the probe module 20 are divided into a first probe 30a (eg, Figure 2 ), and a second probe 30b (as shown) disposed on the right half of the first probe seat 21. Figure 2 As shown), and the third probes 30c-30e (as shown) disposed on the second probe seat 22 Figures 4 to 6 As shown in FIG. 1 , each first probe 30a is used to touch the first conductive contact 55a of the first unit under test 50A, each second probe 30b is used to touch the first conductive contact 55a of the second unit under test 50B, and each third probe 30c-30e is used to touch the second conductive contact 55b-55d.

[0053] like Figure 2 and Figure 3 As shown, the first probes 30a are arranged in a row in a manner substantially corresponding to the arrangement of the first conductive contacts 55a of the first unit under test 50A to form a first probe layer P1 on the first probe seat 21, and the second probes 30b are arranged in a row in a manner substantially corresponding to the arrangement of the first conductive contacts 55a of the second unit under test 50B to form a second probe layer P2 with a height lower than the first probe layer P1 on the first probe seat 21. Figure 3 and Figure 4 As shown, the third probes 30c are arranged in a row substantially corresponding to the arrangement of the second conductive contacts 55b to form a third probe layer P3 in the second probe base 22. Figure 3 and Figure 5 As shown, the third probes 30d are arranged in a row substantially corresponding to the arrangement of the second conductive contacts 55c to form a fourth probe layer P4 with a height higher than the third probe layer P3 on the second probe seat 22. Figure 3 and Figure 6 As shown, the third probes 30 e are arranged in a row substantially corresponding to the arrangement of the second conductive contacts 55 d to form a fifth probe layer P5 on the second probe base 22 whose height is higher than the fourth probe layer P4 .

[0054] In other words, the third probes 30c-30e are arranged in three rows (the same number of rows as the second conductive contacts 55b-55d), and the order corresponds to the order of the first to third rows L1-L3 of the second conductive contacts 55b-55d from bottom to top. The third probes in the higher needle layers are used to touch the conductive contacts farther from the second probe base 22, and the third probes in the higher needle layers have longer cantilever sections. Figure 2 The top view shown appears to be in a row, but in fact Figure 3 As shown, the first and second probes 30a, 30b are arranged in two rows at different heights. However, the first and second probes 30a, 30b in the two rows extend to the first conductive contacts 55a arranged in the same row. Therefore, the vertical distance d between the ends of the contact segments 32 of the first and second probes 30a, 30b and the inner side surface 211 of the first probe base 21 is substantially the same.

[0055] When the probe module 20 detects each unit under test 50A, 50B, each first probe 30a extends with its cantilever section 31 over the first main edge 51 of the first unit under test 50A to the first conductive contact 55a of the first unit under test 50A (eg, Figure 2 ) and then use their touch sections to touch the first conductive contact 55a of the first unit under test 50A respectively, and each second probe 30b extends its cantilever section 31 through the first main edge 51 of the second unit under test 50B to the first conductive contact 55a of the second unit under test 50B (as shown in FIG. Figure 2 The third probes 30c extend their cantilever sections 31 through the second main edges 52 of the respective units under test 50A and 50B and extend to the tops of the respective second conductive contacts 55b (as shown in FIG. Figure 4 ) and then touch each second conductive contact 55b with its touch section 32, and each third probe 30d extends to each second conductive contact 55c with its cantilever section 31 through the second main edge 52 of each unit under test 50A, 50B (as shown in FIG. Figure 5 As shown in FIG. 1 , the third probe 30e further touches each second conductive contact 55c with its touch section 32, and each third probe 30e extends to each second conductive contact 55d with its cantilever section 31 through the second main edge 52 of each unit under test 50A, 50B (as shown in FIG. 1 ). Figure 6 As shown) the contact section 32 then contacts each second conductive contact 55d.

[0056] In the present embodiment, the direction in which the exposed portion 312 of each probe 30a-30e extends from the probe base 21, 22 substantially corresponds to the extension direction D2 of the conductive contact 55a-55d to be touched by the corresponding probe 30a-30e. The term "substantially corresponding" herein means that the direction in which the exposed portion 312 extends from the probe base 21, 22 is not necessarily the same as or opposite to the extension direction D2 of the corresponding conductive contact 55a-55d, but rather, when viewed from top to bottom (i.e., Figure 2 and Figures 4 to 6 The exposed portion 312 is generally parallel to the extension direction D2 of the corresponding conductive contacts 55a-55d, so that the contact segments 32 of the probes 30a-30e can be prevented from deviating from the corresponding conductive contacts 55a-55d during contact and causing an inaccurate contact. In other words, the tilt angle configuration of the exposed portion 312 of each probe 30a-30e is similar to the tilt angle configuration of each conductive contact 55a-55d.

[0057] Specifically, the second probe seat 22 can define an imaginary dividing axis L4 perpendicular to its inner side surface 221, and a first imaginary dividing line L5 (coinciding with the imaginary dividing axis A1 of the first unit under test 50A) and a second imaginary dividing line L6 (coinciding with the imaginary dividing axis A1 of the second unit under test 50B) located at a first side (left side) and a second side (right side) of the imaginary dividing axis L4, respectively. For the probe disposed on the left half of the second probe seat 22, the direction in which the exposed portion 312 extends from the inner side surface 221 is parallel to the first imaginary dividing line L5 (for example, corresponding to Figure 4 The probe of the middle block 57 indicated by the marking) or is inclined relative to the first imaginary dividing line L5 away from the first imaginary dividing line L5 (for example, corresponding to Figure 4 For the probe disposed on the right half of the second probe holder 22, the exposed portion 312 extends from the inner side surface 221 in a direction parallel to the second imaginary dividing line L6 (eg corresponding to Figure 4 The probe of the middle block 57 indicated by the marking) or is inclined relative to the second imaginary dividing line L6 away from the second imaginary dividing line L6 (for example, corresponding to Figure 4 For the first probe seat 21, the first probe layer P1 can define a first imaginary boundary line perpendicular to the inner side surface 211 of the first probe seat 21 (coinciding with the first imaginary boundary line L5 of the second probe seat 22), and the direction in which the exposed portion 312 of each first probe 30a extends from the inner side surface 211 is parallel to the first imaginary boundary line L5 (for example, corresponding to Figure 4 The probe of the middle block 57 indicated by the marking) or is inclined relative to the first imaginary dividing line L5 close to the first imaginary dividing line L5 (for example, corresponding to Figure 4The second probe layer P2 can define a second imaginary dividing line perpendicular to the inner side surface 211 of the first probe seat 21 (coinciding with the second imaginary dividing line L6 of the second probe seat 22), and the direction in which the exposed portion 312 of each second probe 30b extends from the inner side surface 211 is parallel to the second imaginary dividing line L6 (for example, corresponding to Figure 4 The probe of the middle block 57 indicated by the marking) or is inclined relative to the second imaginary dividing line L6 close to the second imaginary dividing line L6 (for example, corresponding to Figure 4 The probes of the marked left and right blocks 58 and 59).

[0058] Through the probe configuration of the probe module of the present invention, the aforementioned effect of ensuring the probe touch is achieved while arranging such a large number of probes at appropriate intervals on the probe seat. In addition, in the present embodiment, the outer sections 311b of the fixing portions 311 of each probe 30a to 30e are substantially parallel to each other, which makes it easier to arrange the probes on the probe seat; however, through the probe configuration of the probe module of the present invention, it is also convenient to arrange the probes whose fixing portions 311 and exposed portions 312 are substantially in a straight line (for example, Figure 7 The probe 30a) shown is disposed on a probe holder, which can further simplify the bending process of the probe.

[0059] More importantly, if Figure 2 As shown, although the extension direction D2 of the first interface contact 61 is inclined toward the second side edge 54 of the first unit under test 50A to a considerable extent, and the extension direction D2 of the second interface contact 62 is also inclined toward the first side edge 53 of the second unit under test 50B to a considerable extent, the probe module 20 of the present invention contacts the first interface contact 61 through the rightmost first probe 30a of the first needle layer P1, and contacts the second interface contact 62 through the leftmost second probe 30b of the second needle layer P2, and the first needle layer P1 and the second needle layer P2 are located at different heights. Therefore, even if the exposed portions 312 of the first and second probes 30a and 30b (respectively defined as the first and second interface probes 63 and 64) for contacting the first and second interface contacts 61 and 62 extend from the first probe seat 21 in a direction that matches the extension direction D2 of the first and second interface contacts 61 and 62, the first and second interface probes 63 and 64 can avoid mutual interference because they are located at different heights.

[0060] Depend on Figure 2It can be seen that if the first and second junction probes 63 and 64 are set at the same height, their fixed portions 311 or even the exposed portions 312 will have the problem of being too close to each other. Even when the inclination angles of the first and second junction points 61 and 62 are larger than those provided in the present embodiment, in order to make the inclination angles of the exposed portions 312 of the first and second junction probes 63 and 64 correspond to the inclination angles of the first and second junction points 61 and 62, the fixed portion 311 of the first junction probe 63 needs to be set further to the right, and the fixed portion 311 of the second junction probe 64 needs to be set further to the left. In this way, the fixed portions 311 or even the exposed portions 312 of the first and second junction probes 63 and 64 may have the problem of mutual interference. The first and second junction probes 63 and 64 of the present invention can avoid the aforementioned problem because they are located at different heights. It is conceivable that when the first side edge 53 of the first UUT 50A and the second side edge 54 of the second UUT 50B are also adjacent to other UUTs (ie, there are four UUTs arranged side by side), the leftmost first probe 30a and the rightmost second probe 30b can also perform the aforementioned functions.

[0061] In this embodiment, since the first probe 30a and the second probe 30b are located at different heights, no matter how large the tilt angle of the first conductive contact 55a is, the tilt angles of the first and second probes 30a and 30b can correspond to the tilt angle of the first conductive contact 55a they touch, and no interference problem will occur. However, the probe module of the present invention is not limited to the first probes 30a being located at the same height, nor is it limited to the second probes 30b being located at the same height. As long as the rightmost one or more first probes 30a and the leftmost one or more second probes 30b are located at different heights, the probe interference problem can be avoided. That is, the first probes 30a can include one or more first junction probes 63, and the second probes 30b can include one or more second junction probes 64. As long as the first junction probes 63 and the second junction probes 64 are located at different heights (different needle layers), mutual interference can be avoided. The heights of the remaining first probes 30a and second probes 30b are not limited. For example, among the first probes 30a and the second probes 30b, only the first junction probes 63 can be located at the higher first needle layer P1, and the remaining first probes 30a and second probes 30b can be located at the lower second needle layer P2. The number of the first and second junction probes 63 and 64 depends on the inclination angle of the first conductive contact 55a adjacent to the adjacent side edges of the first and second units under test 50A and 50B. In detail, for the first and second units under test 50A and 50B of the present embodiment, the first conductive contact 55a closest to the adjacent side edge of each unit under test 50A and 50B may cause the corresponding probes at the same height to be too close to each other, so there are only one first and second boundary contacts 61 and 62, and only one first and second boundary probes 63 and 64, respectively, so that the probe interference problem can be avoided as long as the two probes are located at different heights. In the case where the first conductive contact 55a adjacent to the adjacent side edge of the unit under test 50A and 50B has a larger inclination angle, the number of the first and second boundary contacts 61 and 62 (that is, the conductive contacts that may cause the probes at the same height to be too close to each other or interfere) will be set to be more, and the number of the first and second boundary probes 63 and 64 will also increase accordingly.

[0062] See also Figure 8 and Fig. 9 As shown, a probe module 20' provided in a second preferred embodiment of the present invention is used to simultaneously detect the first to fourth units under test 50A-D arranged in a matrix, wherein for Figure 8 The first and second units under test 50A and 50B in the lower left and lower right of the middle, the probe module 20 ′ adopts the same probe configuration as the probe module 20 of the first preferred embodiment, to simplify the diagram, Figure 8 The probes for this part are not shown. Figure 8In the third and fourth units under test 50C and 50D in the upper left and upper right of the middle diagram, since the first main edge 51 of the third unit under test 50C is adjacent to the second main edge 52 of the first unit under test 50A, and the first main edge 51 of the fourth unit under test 50D is adjacent to the second main edge 52 of the second unit under test 50B, the conductive contacts 55a-55d of the third and fourth units under test 50C and 50D are all closer to the second probe seat 22 than the first conductive contacts 55a of the first and second units under test 50A and 50B. Therefore, the conductive contacts 55a-55d of the third and fourth units under test 50C and 50D can all be touched by the third probes 30f-30i disposed on the second probe seat 22, and four rows of third probes 30f-30i can be added on the second probe seat 22, as shown in FIG. Fig. 9 As shown, the four rows of third probes 30f-30i are located below the third probes 30c-30e for contacting the first and second units under test 50A and 50B, and are used to contact the first conductive contacts 55a and the second conductive contacts 55b-55d of the third and fourth units under test 50C and 50D, respectively, from top to bottom. To simplify the diagram, Figure 8 Only the third probe 30f for touching the first conductive contacts 55a of the third and fourth UUTs 50C and 50D is shown.

[0063] Finally, it must be stated again that the constituent elements disclosed in the aforementioned embodiments of the present invention are for illustrative purposes only and are not intended to limit the scope of patent protection of this case. Replacements or changes of other equivalent elements should also be covered by the scope of patent protection of this case.

Claims

1. A probe module suitable for multiple units under test with inclined conductive contacts, used for simultaneously detecting multiple units under test, characterized in that: Each of the units under test has a first main edge, a second main edge, a first side edge and a second side edge connecting the first main edge and the second main edge, and a plurality of conductive contacts, wherein the plurality of units under test include a first unit under test and a second unit under test, the second side edge of the first unit under test is adjacent to the first side edge of the second unit under test, the conductive contacts of the first unit under test include a first junction contact adjacent to the first main edge and the second side edge of the first unit under test, and the conductive contacts of the second unit under test include a second junction contact adjacent to the first main edge and the first side edge of the second unit under test; the probe module includes: at least one probe holder; A plurality of probes, each of the probes comprising a cantilever section and a contact section, the cantilever section having a fixed portion fixed to the probe base, and an exposed portion connected to the fixed portion and extending from an inner side surface of the probe base, the contact section being connected to the exposed portion; Among them, the at least one probe seat includes a first probe seat, and the multiple probes include a first junction probe and a second junction probe arranged on the first probe seat and located at different heights. When the probe module detects each of the units to be tested, the first main edge of each of the units to be tested is closer to the first probe seat than the second main edge. The first junction probe and the second junction probe pass over the first main edges of the first unit to be tested and the second unit to be tested with their cantilever sections respectively and extend to the first junction contact and the second junction contact respectively, and then touch the first junction contact and the second junction contact with their contact sections respectively.

2. The probe module for multiple UUTs with inclined conductive contacts as claimed in claim 1, characterized in that: The conductive contacts of each of the units to be tested include a plurality of first conductive contacts arranged in a row along a first main edge of the unit to be tested, the first conductive contacts of the first unit to be tested include the first boundary contacts, and the first conductive contacts of the second unit to be tested include the second boundary contacts; the plurality of probes include a plurality of first probes and a plurality of second probes arranged on the first probe seat, each of the first probes forms a first needle layer on the first probe seat, each of the second probes forms a second needle layer at a height different from the first needle layer on the first probe seat, each of the first probes includes the first boundary probes, and each of the second probes includes the second boundary probes; when the probe module detects each of the units to be tested, each of the first probes respectively touches the first conductive contacts of the first unit to be tested with its contact segment, and each of the second probes respectively touches the first conductive contacts of the second unit to be tested with its contact segment.

3. The probe module for multiple UUTs with inclined conductive contacts as claimed in claim 1, characterized in that: The conductive contacts of each unit under test include a plurality of first conductive contacts arranged in a row along a first main edge of the unit under test, the first conductive contacts of the first unit under test include the first boundary contacts, and the first conductive contacts of the second unit under test include the second boundary contacts; the plurality of probes include a plurality of first probes and a plurality of second probes arranged in the first probe seat, each of the first probes includes the first boundary probes, and each of the second probes includes the second boundary probes, and when the probe module detects each unit under test, each of the first probes touches the first conductive contact of the first unit under test with its contact section, and each of the second probes touches the first conductive contact of the second unit under test with its contact section; Each of the first probes and the second probes forms a plurality of probe layers with different heights on the first probe seat, and the first boundary probes and the second boundary probes are located in different probe layers.

4. The probe module for multiple UUTs with inclined conductive contacts as claimed in claim 3, characterized in that: The needle layer of the first probe seat includes a first needle layer and a second needle layer lower than the first needle layer. One of the first interface probe and the second interface probe is located in the first needle layer, and the other first probes and second probes are located in the second needle layer.

5. The probe module for multiple UUTs with inclined conductive contacts as claimed in any one of claims 2 to 4, characterized in that: Each of the first probes can define a first imaginary dividing line perpendicular to the inner side surface of the first probe seat, and the direction in which the exposed portion of each of the first probes extends from the inner side surface is parallel to the first imaginary dividing line or is inclined relative to the first imaginary dividing line approaching the first imaginary dividing line; each of the second probes can define a second imaginary dividing line perpendicular to the inner side surface of the first probe seat, and the direction in which the exposed portion of each of the second probes extends from the inner side surface is parallel to the second imaginary dividing line or is inclined relative to the second imaginary dividing line approaching the second imaginary dividing line.

6. The probe module for multiple UUTs with inclined conductive contacts as claimed in claim 1, characterized in that: The conductive contacts of each of the units to be tested include a plurality of second conductive contacts adjacent to the second main edge of the unit to be tested; at least one probe seat of the probe module further includes a second probe seat, and the probes of the probe module include a plurality of third probes arranged on the second probe seat. When the probe module detects each of the units to be tested, the second main edge of each of the units to be tested is closer to the second probe seat than the first main edge, and at least part of the third probes extend with their cantilever sections over the second main edge of each of the units to be tested to above each of the second conductive contacts and then touch each of the second conductive contacts with their contact sections.

7. The probe module for multiple UUTs with inclined conductive contacts as claimed in claim 6, characterized in that: The second conductive contacts of each of the units under test are arranged in a plurality of rows parallel to a horizontal imaginary axis, and are arranged in an order from the second main edge toward the first main edge; each of the third probes forms a plurality of needle layers of different heights in a manner corresponding to the arrangement of each of the second conductive contacts, and their order corresponds to the order of the plurality of rows of the second conductive contacts from bottom to top.

8. The probe module for multiple UUTs with inclined conductive contacts as claimed in claim 6, characterized in that: The plurality of units under test also include a third unit under test and a fourth unit under test, wherein the first main edge of the third unit under test is adjacent to the second main edge of the first unit under test, and the first main edge of the fourth unit under test is adjacent to the second main edge of the second unit under test; when the probe module detects each of the units under test, part of the third probes touch all the conductive contacts of the third unit under test and the fourth unit under test with their contact segments.

9. The probe module for multiple UUTs with inclined conductive contacts as claimed in claim 6, characterized in that: The third probes form multiple needle layers with different heights. The third probes in the higher needle layers are used to touch the conductive contacts farther from the second probe seat, and the third probes in the higher needle layers have longer cantilever sections.

10. The probe module for multiple UUTs with inclined conductive contacts as claimed in claim 6, characterized in that: The second probe seat can define an imaginary dividing axis, a first imaginary dividing line and a second imaginary dividing line perpendicular to its inner side surface, the first imaginary dividing line and the second imaginary dividing line are respectively located on a first side and a second side of the imaginary dividing axis, the direction in which the exposed portion of the probe located on the first side of the imaginary dividing axis extends from the inner side surface is parallel to the first imaginary dividing line or is inclined relative to the first imaginary dividing line away from the first imaginary dividing line, and the direction in which the exposed portion of the probe located on the second side of the imaginary dividing axis extends from the inner side surface is parallel to the second imaginary dividing line or is inclined relative to the second imaginary dividing line away from the second imaginary dividing line.

11. The probe module for multiple UUTs with inclined conductive contacts as claimed in claim 1, characterized in that: The fixing portion and the exposed portion of each probe are in a straight line.

12. The probe module for multiple UUTs with inclined conductive contacts as claimed in claim 1, wherein: The fixing part of each probe comprises an inner section and an outer section. The inner section of the fixing part of each probe is connected to the exposed part and is in a straight line with the exposed part. The outer sections of the fixing part of each probe are parallel to each other.

13. A probe module suitable for multiple units under test with inclined conductive contacts, characterized in that Contains: at least one probe holder; A plurality of probes, each of the probes comprising a cantilever section and a contact section, the cantilever section having a fixed portion fixed to the probe base, and an exposed portion connected to the fixed portion and extending from an inner side surface of the probe base, the contact section being connected to the exposed portion; Among them, the at least one probe seat includes a first probe seat, and the multiple probes include a first junction probe and a second junction probe arranged on the first probe seat and located at different heights. The exposed parts of the cantilever sections of the first junction probe and the second junction probe extend obliquely from the first probe seat to gradually approach two adjacent and parallel conductive contacts. The vertical distances between the ends of the contact sections of the first junction probe and the second junction probe and the inner side surface of the first probe seat are the same, so that the ends of the contact sections of the first junction probe and the second junction probe are adjacent and parallel to each other to touch the two adjacent and parallel conductive contacts.

14. The probe module for multiple UUTs with inclined conductive contacts as claimed in claim 13, characterized in that: The exposed portion of the first junction probe and the exposed portion of the second junction probe are inclined non-perpendicular to the inner side surface of the first probe seat, and the inclination directions thereof are symmetrical to each other.

15. The probe module for multiple UUTs with inclined conductive contacts as claimed in claim 13, wherein: The plurality of probes include a plurality of first probes and a plurality of second probes disposed on the first probe seat, each of the first probes forms a first needle layer on the first probe seat, each of the second probes forms a second needle layer at a height different from the first needle layer on the first probe seat, each of the first probes includes the first boundary probe, each of the second probes includes the second boundary probe, and a vertical distance between a tip of a contact segment of each of the first probe and the second probe and an inner side surface of the first probe seat is the same.

16. The probe module for multiple UUTs with inclined conductive contacts as claimed in claim 13, wherein: The plurality of probes include a plurality of first probes and a plurality of second probes disposed on the first probe seat, the vertical distance between the end of the contact segment of each of the first probes and the inner side surface of the first probe seat is the same, each of the first probes includes the first junction probe, each of the second probes includes the second junction probe, each of the first probes and the second probes forms a plurality of needle layers of different heights on the first probe seat, and the first junction probes and the second junction probes are located in different needle layers.

17. The probe module for multiple UUTs with inclined conductive contacts as claimed in claim 16, characterized in that: The needle layer of the first probe seat includes a first needle layer and a second needle layer lower than the first needle layer. One of the first interface probe and the second interface probe is located in the first needle layer, and the other first probes and second probes are located in the second needle layer.

18. The probe module for multiple UUTs with inclined conductive contacts as claimed in any one of claims 15 to 17, characterized in that: Each of the first probes can define a first imaginary dividing line perpendicular to the inner side surface of the first probe seat, and the direction in which the exposed portion of each of the first probes extends from the inner side surface is parallel to the first imaginary dividing line or is inclined relative to the first imaginary dividing line approaching the first imaginary dividing line; each of the second probes can define a second imaginary dividing line perpendicular to the inner side surface of the first probe seat, and the direction in which the exposed portion of each of the second probes extends from the inner side surface is parallel to the second imaginary dividing line or is inclined relative to the second imaginary dividing line approaching the second imaginary dividing line.

19. The probe module for multiple UUTs with inclined conductive contacts as claimed in claim 13, wherein: At least one probe seat of the probe module further includes a second probe seat, and the probes of the probe module include a plurality of third probes arranged on the second probe seat, each of the third probes forms a plurality of needle layers with different heights on the second probe seat, and the exposed portion of the cantilever segment of the third probe in a needle layer with a higher position is longer.

20. The probe module for multiple UUTs with inclined conductive contacts as claimed in claim 19, wherein: The second probe seat can define an imaginary dividing axis, a first imaginary dividing line and a second imaginary dividing line perpendicular to its inner side surface, the first imaginary dividing line and the second imaginary dividing line are respectively located on a first side and a second side of the imaginary dividing axis, the direction in which the exposed portion of the probe located on the first side of the imaginary dividing axis extends from the inner side surface is parallel to the first imaginary dividing line or is inclined relative to the first imaginary dividing line away from the first imaginary dividing line, and the direction in which the exposed portion of the probe located on the second side of the imaginary dividing axis extends from the inner side surface is parallel to the second imaginary dividing line or is inclined relative to the second imaginary dividing line away from the second imaginary dividing line.

21. The probe module for multiple UUTs with inclined conductive contacts as claimed in claim 13, wherein: The fixing portion and the exposed portion of each probe are in a straight line.

22. The probe module for multiple UUTs with inclined conductive contacts as claimed in claim 13, wherein: The fixing part of each probe comprises an inner section and an outer section. The inner section of the fixing part of each probe is connected to the exposed part and is in a straight line with the exposed part. The outer sections of the fixing part of each probe are parallel to each other.

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