Expansion method and expansion device

Abstract

Provided are an expansion method and an expansion device capable of preventing chip separation from contacting each other and causing damage. The expansion method includes: a frame fixing step, wherein a frame fixing portion is used to fix the annular frame of a workpiece unit; an expansion step, after the frame fixing step is performed, an expansion drum is used to press an expansion piece between the outer periphery of the workpiece and the inner periphery of the annular frame to expand the expansion piece; and a heating step, after the expansion step is performed, a slack portion of the expansion piece formed by the expansion is heated to shrink the slack portion. The heating step includes a full-circle heating step, wherein the entire periphery of the workpiece is heated; and an additional heating step, wherein a portion of the periphery of the workpiece is heated.

Description

Technical Field

[0001] The present invention relates to an expansion method and an expansion device for expanding an expansion piece of a workpiece unit. The workpiece unit is composed of a workpiece, an expansion piece attached to the workpiece, and an annular frame on the outer periphery of which the expansion piece is attached. Background Art

[0002] The following expansion device is used: the expansion device expands an expansion sheet attached to the workpiece, thereby dividing the workpiece with a modified layer formed by irradiation of a laser beam, or a workpiece with a laser-processed groove or a cut groove formed therein into individual chips (for example, refer to Patent Document 1).

[0003] When the expansion sheet is expanded using the expansion device disclosed in Patent Document 1, the expansion sheet between the outer periphery of the workpiece and the inner periphery of the frame becomes loose, potentially causing adjacent chips to come into contact and break. Therefore, the expansion device disclosed in Patent Document 1 includes a heater that heats the expansion sheet between the outer periphery of the wafer and the inner periphery of the frame, causing it to shrink.

[0004] Patent Document 1: Japanese Patent Application Laid-Open No. 2010-206136

[0005] However, the applicant of the present invention has discovered that the shrinkage of the expansion sheet wound into a roll differs depending on the width direction and the extension direction. Therefore, even if the expansion device shown in Patent Document 1 heats the expansion sheet equally in the areas surrounding the wafer periphery and the inner periphery of the frame, the expansion sheet cannot shrink sufficiently in the extension direction. Consequently, adjacent chips after expansion cannot be sufficiently spaced apart, potentially causing contact and damage. Summary of the Invention

[0006] Therefore, an object of the present invention is to provide an expansion method and an expansion device that can prevent divided chips from coming into contact with each other and being damaged.

[0007] According to one aspect of the present invention, an expansion method is provided for expanding an expansion piece of a workpiece unit, wherein the workpiece unit is composed of a workpiece, the expansion piece adhered to the workpiece, and an annular frame to which the outer periphery of the expansion piece is adhered, wherein the expansion method has the following steps: a frame fixing step, fixing the annular frame of the workpiece unit by using a frame fixing member; an expansion step, after implementing the frame fixing step, pressing the expansion piece between the outer periphery of the workpiece and the inner periphery of the annular frame by using a pressing member to expand the expansion piece; and a heating step, after implementing the expansion step, heating a relaxed portion of the expansion piece formed by the expansion of the expansion piece to shrink the relaxed portion, the heating step comprising the following steps: a full-circle heating step, heating the entire periphery of the workpiece; and an additional heating step, heating a portion of the periphery of the workpiece.

[0008] Preferably, the expansion piece of the workpiece unit of the expansion method is cut from a strip-shaped expansion piece having a constant width. When the width direction of the strip-shaped expansion piece is set as the first direction and the direction perpendicular to the first direction is set as the second direction, in the additional heating step, the two outer sides of the workpiece in the second direction are heated.

[0009] According to another aspect of the present invention, an expansion device is provided for expanding an expansion piece of a workpiece unit, wherein the workpiece unit is composed of a workpiece, the expansion piece attached to the workpiece, and an annular frame attached to the outer periphery of the expansion piece, wherein the expansion device comprises: a frame fixing member for fixing the annular frame of the workpiece unit; a pressing member for pressing the expansion piece between the outer periphery of the workpiece unit to which the annular frame is fixed by the frame fixing member and the inner periphery of the annular frame; and a heating member for expanding the expansion piece. The slack portion of the expansion piece formed is heated to shrink the slack portion; and a control unit that controls at least the heating component, the heating component comprising: a first heating part and a second heating part, which are arranged on a circle corresponding to the annular area between the inner periphery of the annular frame and the workpiece, and are opposite to the expansion piece of the annular area; and a rotating component that rotates the heating part around a rotation axis passing through the center of the circle, and during the rotation of the rotating component, the control unit stops heating one of the first heating part and the second heating part.

[0010] Preferably, the expansion piece of the workpiece unit of the expansion device is cut from a strip-shaped expansion piece having a constant width. When the width direction of the strip-shaped expansion piece is set as the first direction and the direction perpendicular to the first direction is set as the second direction, during the rotation by the rotating member, the control unit stops heating the first heating part and the second heating part on the side opposite to the two end portions of the expansion piece in the first direction.

[0011] The present invention has the effect of preventing the divided chips from coming into contact with each other and being damaged. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] Figure 1 It is a perspective view showing a configuration example of an expansion device according to an embodiment of the present invention.

[0013] Figure 2 It is a perspective view showing an example of a workpiece unit to be processed by the expansion device according to the embodiment.

[0014] Figure 3 It shows the composition Figure 2 A perspective view of a structural example of a belt-shaped expansion piece of a workpiece unit shown.

[0015] Figure 4 It shows Figure 1 A perspective view of an expansion unit of the expansion device shown.

[0016] Figure 5 It shows Figure 1 A perspective view of the heating unit of the expansion device is shown.

[0017] Figure 6 This is a flowchart showing the flow of the expansion method according to the embodiment.

[0018] Figure 7 is Figure 6 This is a cross-sectional view showing a state in which the annular frame of the workpiece unit is placed on the upper surface of the frame placement plate of the expansion unit in the frame fixing step of the expansion method.

[0019] Figure 8 is Figure 6 This is a cross-sectional view showing a state in which the annular frame of the workpiece unit is fixed by the frame fixing portion of the expansion unit in the frame fixing step of the expansion method.

[0020] Figure 9 is Figure 6 A cross-sectional view showing a state in which an expansion drum of an expansion unit is raised to expand expansion sheets in an expansion step of the expansion method shown.

[0021] Figure 10 is Figure 6A cross-sectional view showing a state in which the expansion drum is lowered after expansion in the expansion step of the expansion method shown.

[0022] Figure 11 is Figure 6 A cross-sectional view showing a state in which the annular frame of the workpiece unit is placed on the upper surface of the frame placement plate of the heating unit in the second frame fixing step of the expansion method shown.

[0023] Figure 12 is Figure 6 A cross-sectional view showing a state in which the annular frame of the workpiece unit is fixed by the frame fixing portion of the heating unit in the second frame fixing step of the expansion method shown.

[0024] Figure 13 is Figure 6 A cross-sectional view showing a state in which the expansion piece is sucked and held by a holding table after the expansion piece has been expanded in the second expansion step of the expansion method shown.

[0025] Figure 14 is Figure 6 A cross-sectional view showing a state where a slack portion is heated in the entire circumference heating step of the heating step of the expansion method shown.

[0026] Figure 15 It is shown in Figure 6 A plan view of each heating portion of a heating member for heating a slack portion in the entire circumference heating step of the heating step of the expansion method shown.

[0027] Figure 16 It is shown in Figure 6 FIG. 1 is a plan view of each heating portion of the heating member at the start of heating in the additional heating step of the heating step of the expansion method shown.

[0028] Figure 17 It is shown in Figure 6 FIG. 1 is a plan view of each heating portion of a heating member during heating in an additional heating step of a heating step of an expansion method shown.

[0029] Figure 18 It is shown in Figure 6 FIG. 1 is a plan view of each heating portion of the heating member at the end of heating in the additional heating step of the heating step of the expansion method shown.

[0030] Label Description

[0031] 1: Workpiece unit; 2: Workpiece; 3: Extension piece; 3-1: First direction; 3-2: Second direction; 3-3: Strip-shaped extension piece; 3-5: Relaxed portion; 4: Annular frame; 10: Extension device; 21: Frame fixing portion (frame fixing member); 22: Extension drum (pressing member); 38: Heating member; 100: Control unit; 102: Annular area; 382: Rotational moving unit (rotational member); 383: Rotational axis; 391: First heating portion; 392: Second heating portion; ST1: Frame fixing step; ST2: Extension step; ST5: Heating step; ST51: Whole-circle heating step; ST52: Additional heating step. DETAILED DESCRIPTION

[0032] The following describes embodiments of the present invention in detail with reference to the accompanying drawings. The present invention is not limited to the contents described in the following embodiments. Furthermore, the components described below include substantially the same components that can be easily imagined by those skilled in the art. Furthermore, the structures described below can be appropriately combined. Furthermore, various omissions, substitutions, or modifications of the structures can be made without departing from the scope of the present invention.

[0033] An expansion device according to an embodiment of the present invention will be described with reference to the drawings. Figure 1 It is a perspective view showing a configuration example of an expansion device according to an embodiment. Figure 2 It is a perspective view showing an example of a workpiece unit to be processed by the expansion device according to the embodiment. Figure 3 It shows the composition Figure 2 A perspective view of a structural example of a belt-shaped expansion piece of a workpiece unit shown. Figure 4 It shows Figure 1 A perspective view of an expansion unit of the expansion device shown. Figure 5 It shows Figure 1 A perspective view of the heating unit of the expansion device is shown.

[0034] Implementation Figure 1 The expansion device 10 shown is a Figure 2 The device for expanding the expansion piece 3 of the workpiece unit 1 shown in FIG. Figure 2 As shown, the workpiece unit 1 comprises a workpiece 2, an expansion sheet 3 attached to the workpiece 2, and an annular frame 4 having an inner diameter larger than the outer diameter of the workpiece 2 and attached to the outer periphery of the expansion sheet 3.

[0035] In the embodiment, the workpiece 2 is a wafer such as a disk-shaped semiconductor wafer or an optical device wafer with a substrate such as silicon, sapphire, gallium arsenide or SiC (silicon carbide). Figure 2As shown, the workpiece 2 has devices 7 formed in each area divided by a plurality of mutually intersecting predetermined dividing lines 6 on the front surface 5. The workpiece 2 has an expansion sheet 3 attached to the back surface 8 on the back side of the front surface 5, and an annular frame 4 attached to the outer periphery of the expansion sheet 3. Laser light of a wavelength that is transparent to the substrate is irradiated from the back surface 8 along the predetermined dividing lines 6, and a modified layer 101 (at the beginning of the division) is formed inside the substrate along the predetermined dividing lines 6. Figure 2 indicated by dotted lines).

[0036] In addition, the modified layer 101 refers to a region where the density, refractive index, mechanical strength or other physical properties are in a state different from the properties of the surrounding area, and examples include a melt processing region, a crack region, an insulation breakdown region, a refractive index change region, and a region where these regions are mixed.

[0037] The expansion sheet 3 is made of a stretchable resin and has thermal shrinkage properties, shrinking when heated. The expansion sheet 3 comprises a base layer, formed into a circular plate with a larger diameter than the workpiece 2 and made of a stretchable and thermally shrinkable synthetic resin; and an adhesive layer, laminated on the base layer and adhered to the workpiece 2, also made of a stretchable and thermally shrinkable synthetic resin.

[0038] The extension piece 3 is formed from a piece having a constant width Figure 3 The strip-shaped expansion sheet 3-3 shown is cut into a disc shape. The expansion sheet 3 is formed into a long sheet-like member and wound on the outer circumference of a roller 3-4. In the embodiment, when the width direction of the expansion sheet 3 is defined as the first direction 3-1 and the longitudinal direction of the expansion sheet 3 perpendicular to the first direction 3-1 is defined as the second direction 3-2, the heat shrinkage in the second direction 3-2 is lower than that in the first direction 3-1. In other words, when the expansion sheet 3 is heated, the dimension that shrinks in the second direction is shorter than the dimension that shrinks in the first direction.

[0039] In addition, the first direction 3-1 is the so-called transverse direction (TD: Transverse Direction), and the second direction 3-2 is the so-called flow direction (MD: Machine Direction). The expansion sheet 3 is manufactured, for example, by moving the heated resin along the second direction 3-2 while extending it along the second direction 3-2 and the first direction 3-1 and winding it on the outer peripheral surface of the roller 3-4. The adhesive layer of the expansion sheet 3 is covered by a peeling sheet not shown. The peeling sheet is used to protect the adhesive layer of the expansion sheet 3, and is located on the inner side of the base material layer when it is wound on the outer peripheral surface of the roller 3-4. In addition, Figure 3 The peel-off tab is omitted.

[0040] Figure 1The expansion device 10 shown is a device for dividing a workpiece 2 having a modified layer 101 as a dividing starting point into individual chips 9 along a predetermined dividing line 6. The chip 9 includes a portion of a substrate obtained by dividing along the predetermined dividing line 6 and a device 7 formed on the front surface of the substrate. Figure 1 As shown, the expansion device 10 includes a cassette elevator 12 provided in a device main body 11 , an expansion unit 20 , a heating unit 30 , a cleaning unit 40 , a transport unit 50 , and a control unit 100 serving as a control unit.

[0041] The cassette elevator 12 is located at one end of the apparatus main body 11 in the Y-axis direction, which is parallel to the horizontal direction. It holds a cassette 13 that contains multiple workpiece units 1, allowing for easy loading and unloading. The cassette 13 stores the multiple workpiece units 1 at intervals along the Z-axis direction, which is parallel to the vertical direction. The cassette 13 is placed on the cassette elevator 12 with its opening 14, through which the workpiece units 1 can be freely loaded and unloaded, facing the center of the apparatus main body 11 in the Y-axis direction. The cassette elevator 12 raises and lowers the cassette 13 in the Z-axis direction.

[0042] Furthermore, the expansion device 10 has: a pair of first guide rails 15 for temporarily placing the workpiece unit 1 taken out and placed in relative to the box 13; and a pair of second guide rails 16. The pair of first guide rails 15 are parallel to the Y-axis direction and are arranged at intervals from each other in the X-axis direction which is parallel to the horizontal direction and perpendicular to the Y-axis direction. The pair of first guide rails 15 are arranged in the center of the device body 11 in the Y-axis direction in a manner aligned with the two ends in the X-axis direction of the opening 14 of the box 13 placed on the box elevator 12 along the Y-axis direction. The pair of first guide rails 15 are configured to be freely movable in the X-axis direction by a driving mechanism not shown in the figure, and to approach or move away from each other by the driving mechanism. The pair of first guide rails 15 carry the workpiece unit 1 taken out and placed in relative to the box 13, and when approaching each other by the driving mechanism, the workpiece unit 1 is positioned in the X-axis direction.

[0043] A pair of second guide rails 16 is a component for temporarily placing the workpiece unit 1 and the like transported from the first guide rail 15 by the transport unit 50. The pair of second guide rails 16 are parallel to the Y-axis direction and are arranged at intervals from each other in the X-axis direction which is parallel to the horizontal direction and perpendicular to the Y-axis direction. The pair of second guide rails 16 are arranged in the center of the device body 11 in the Y-axis direction and are arranged next to the first guide rail 15 in the X-axis direction. The pair of second guide rails 16 are configured to be movable along the X-axis direction by a driving mechanism not shown in the figure, and to approach or move away from each other by the driving mechanism. The pair of second guide rails 16 carry the workpiece unit 1 and the like transported from the first guide rail 15, and when they approach each other by the driving mechanism, they position the workpiece unit 1 in the X-axis direction.

[0044] The conveying unit 50 includes: a first conveying unit 51, which conveys the workpiece unit 1 between the first guide rail 15 and the box 13; a second conveying unit 52, which conveys the workpiece unit 1 between the first guide rail 15 and the second guide rail 16 and between the second guide rail 16 and the heating unit 30; and a third conveying unit 53, which conveys the workpiece unit 1 between the second guide rail 16 and the expansion unit 20.

[0045] The expansion unit 20 is arranged beside one side of the pair of second guide rails 16 in the Y-axis direction. Figure 4 As shown, the expansion unit 20 includes a frame fixing portion 21 as a frame fixing member and an expansion drum 22 as a pressing member. The frame fixing portion 21 fixes the annular frame 4 of the workpiece unit 1.

[0046] The frame fixing portion 21 is a component that fixes the annular frame 4 of the workpiece unit 1, and includes a frame loading plate 23 and a frame pressing plate 24. The frame loading plate 23 is provided with an opening portion 231 having a circular planar shape, and an upper surface 232 is formed in the shape of a plate that is flat and parallel to the horizontal direction. The inner diameter of the opening portion 231 of the frame loading plate 23 is formed to be equal to the inner diameter of the annular frame 4. The frame loading plate 23 loads the annular frame 4 of the workpiece 2 on the upper surface 232 when the workpiece 2 is located on the opening portion 231. In the embodiment, the frame loading plate 23 is raised in the Z-axis direction by the cylinder 25 from a position where the upper surface 232 of the frame loading plate 23 is flush with the lower surface of the annular frame 4 of the workpiece unit 1 positioned in the X-axis direction by the second guide rail 16.

[0047] That is, the frame mounting plate 23 is attached to the front end of the telescopic rod 251 of the cylinder 25 and is provided so as to be movable upward and downward in the Z-axis direction by the extension and contraction of the rod 251 of the cylinder 25 .

[0048] The frame pressing plate 24 is fixed above the frame mounting plate 23. The frame pressing plate 24 is formed into a plate shape with approximately the same size as the frame mounting plate 23, and has a circular opening 241 at the center that is the same size as the opening 231. The opening 241 of the frame pressing plate 24 is coaxial with the opening 231 of the frame mounting plate 23.

[0049] The frame fixing unit 21 retracts the rod 251, causing the workpiece unit 1 to be transported by the third transport unit 53 onto the upper surface 232 of the frame mounting plate 23 located below. After the annular frame 4 of the workpiece unit 1 is placed on the upper surface 232 of the frame mounting plate 23, the frame fixing unit 21 extends the rod 251 of the cylinder 25, raising the frame mounting plate 23. The frame fixing unit 21 secures the annular frame 4 of the workpiece unit 1 by sandwiching it between the frame pressing plate 24 and the raised frame mounting plate 23.

[0050] The expansion drum 22 presses the expansion piece 3 between the outer periphery of the workpiece 2 of the workpiece unit 1 fixed to the annular frame 4 by the frame fixing portion 21 and the inner periphery of the annular frame 4, thereby expanding the expansion piece 3. The expansion drum 22 is formed into a cylindrical shape, and its outer diameter is formed to be smaller than the inner diameter of the annular frame 4 placed on the upper surface 232 of the frame mounting plate 23, and its inner diameter is formed to be larger than the outer diameter of the workpiece 2 attached to the expansion piece 3. The expansion drum 22 is coaxially arranged with the openings 231 and 241 of the frame fixing portion 21. A roller component 221 ( Figure 7 etc.) and the roller component 221 can rotate freely.

[0051] The expansion drum 22 is mounted on the cylinder 26 and is raised and lowered in the Z-axis direction by the cylinder 26. In the embodiment, the expansion drum 22 is raised and lowered in the Z-axis direction by the cylinder 26 between a position where the roller member 221 is below the upper surface 232 of the frame mounting plate 23 of the frame fixing portion 21 to which the annular frame 4 is fixed and a position where the roller member 221 is above the upper surface 232 of the frame mounting plate 23 of the frame fixing portion 21 to which the annular frame 4 is fixed.

[0052] The expansion unit 20 fixes the annular frame 4 of the workpiece unit 1 using the frame fixing portion 21, and raises the expansion drum 22 from the roller member 221 to a position below the upper surface 232 of the frame mounting plate 23 of the frame fixing portion 21 to which the annular frame 4 is fixed, thereby pressing the expansion piece 3 between the outer periphery of the workpiece 2 of the workpiece unit 1 and the inner periphery of the annular frame 4, thereby expanding the expansion piece 3 in the surface direction. After temporarily expanding the expansion piece 3, the expansion unit 20 lowers the expansion drum 22 to form a slack portion 3-5 ( Figure 10 etc.).

[0053] The heating unit 30 is arranged next to the other side of the pair of second guide rails 16 in the Y-axis direction. Figure 5 As shown, the heating unit 30 includes a holding table 32 , a frame fixing portion 31 , a sheet spreading unit 37 , and a heating member 38 .

[0054] The holding table 32 has a holding surface 321 for suctioning and holding the workpiece 2 of the workpiece unit 1 through the expansion piece 3. The holding table 32 is in the shape of a circular plate with an outer diameter smaller than the inner diameter of the annular frame 4. It has a circular plate-shaped frame made of a metal such as stainless steel and a circular plate-shaped adsorption portion made of a porous material such as porous ceramic and surrounded by the frame. The upper surfaces of the frame and the adsorption portion are arranged on the same plane, forming the holding surface 321 for suctioning and holding the workpiece 2. The diameter of the adsorption portion is approximately the same as that of the workpiece 2.

[0055] The holding table 32 places the back surface 8 side of the workpiece 2 on the holding surface 321 via the expansion piece 3 of the workpiece unit 1 transported by the second transport unit 52. The adsorption portion of the holding surface 321 of the holding table 32 is connected to a suction portion 322 composed of a vacuum pump or the like. The suction portion 322 attracts the adsorption portion of the holding surface 321, thereby attracting and holding the back surface 8 side of the workpiece 2 on the holding surface 321.

[0056] The frame fixing portion 31 fixes the annular frame 4 of the workpiece unit 1. The frame fixing portion 31 has a frame loading plate 33 and a frame pressing plate 34. The frame loading plate 33 is provided with an opening portion 331 having a circular planar shape, and the upper surface 332 is formed into a plate-like shape that is flat and parallel to the horizontal direction. The inner diameter of the opening portion 331 of the frame loading plate 33 is formed to be equal to the inner diameter of the annular frame 4. The frame loading plate 33 is provided with a holding table 32 in the opening portion 331, and the opening portion 331 is coaxially arranged with the holding table 32. The frame loading plate 33 is provided with centering guides 333 at the four corners of the upper surface 332. The centering guides 333 are provided so as to be movable in the horizontal direction, and the position of the annular frame 4 is adjusted by moving in the horizontal direction, thereby positioning the workpiece 2 at a position coaxial with the adsorption portion of the holding surface 321 of the holding table 32.

[0057] The frame mounting plate 33 is provided so as to be movable upward and downward in the Z-axis direction by the cylinder 35. Specifically, the frame mounting plate 33 is attached to the distal end of a retractable rod 351 of the cylinder 35 and is provided so as to be movable upward and downward in the Z-axis direction by the extension and contraction of the rod 351 of the cylinder 35.

[0058] The frame pressing plate 34 is formed into a plate-like shape with approximately the same dimensions as the frame loading plate 33. A circular opening 341 having the same dimensions as the opening 331 is provided at its center. The frame pressing plate 34 is attached to the tip of a piston rod 361 of the cylinder 36. The frame pressing plate 34 is freely movable between a position above the frame loading plate 33 and a position retracted from above the frame loading plate 33 by the piston rod 361 extending and retracting along the Y-axis. The frame pressing plate 34 has elongated holes 342 at its four corners, into which the centering guides 333 can enter.

[0059] The frame fixing unit 31 is positioned so that the frame pressing plate 34 is retracted from above the frame loading plate 33. With the centering guides 333 spaced apart from one another, the annular frame 4 of the workpiece unit 1, transported by the second transport unit 52, is placed on the upper surface 332 of the frame loading plate 33. The frame fixing unit 31 brings the centering guides 333 closer together to position the workpiece 2 of the workpiece unit 1. The frame fixing unit 31 positions the frame pressing plate 34 above the frame loading plate 33. The frame loading plate 33 is then raised by the cylinder 35, thereby sandwiching and securing the annular frame 4 of the workpiece unit 1 between the frame loading plate 33 and the frame pressing plate 34.

[0060] The sheet expansion unit 37 moves the holding table 32 and the frame fixing portion 31 relatively to positions away from each other along the axis in the vertical direction, thereby expanding the expansion sheet 3. Figure 11 As shown, the sheet expansion unit 37 includes a lift member 371 , a lift member lifting unit 372 , and a holding table lifting unit 373 .

[0061] The lifting member 371 is cylindrical in shape, with an outer diameter smaller than the inner diameter of the annular frame 4 mounted on the upper surface 332 of the frame mounting plate 33, and an inner diameter larger than the outer diameters of the workpiece 2 attached to the expansion sheet 3 and the holding table 32. The lifting member 371 is positioned coaxially with the holding table 32, with the holding table 32 positioned inside. A roller member 374 is rotatably mounted on the upper end of the lifting member 371.

[0062] The lift member elevating unit 372 elevates the lift member 371 in the Z-axis direction between a position where the roller member 374 is below the lowered upper surface 332 of the frame mounting plate 33 and a position below the raised upper surface 332 of the frame mounting plate 33 .

[0063] The holding table lifting unit 373 lifts the holding table 32 in the Z-axis direction between a position where the holding surface 321 is below the upper surface 332 of the lowered frame mounting plate 33 and a position below the upper surface 332 of the raised frame mounting plate 33 .

[0064] The heating member 38 heats and shrinks the slack portion 3-5 in the annular region 102 between the annular frame 4 of the expansion sheet 3 and the workpiece 2 formed by expanding the expansion sheet 3 by the expansion unit 20. The heating member 38 includes a disk-shaped unit body 381 and a plurality of heating sections 39 attached to the unit body 381.

[0065] The unit body 381 is positioned above the holding table 32 and coaxially therewith. Furthermore, the unit body 381 is configured to be freely raised and lowered by a rotational movement unit 382 serving as a rotating member, and is also configured to be freely rotatable about a rotation axis 383 parallel to the vertical direction. The rotation axis 383 is cylindrical and coaxially positioned with the unit body 381.

[0066] The heating units 39 are arranged at equal intervals along the circumference of the outer edge of the unit body 381 and on a circle corresponding to the annular region 102 of the expansion piece 3. The heating units 39 are positioned vertically opposite the annular region 102 of the expansion piece 3 of the workpiece unit 1 held by the worktable 32 and the frame fixing portion 31. In the embodiment, four heating units 39 are arranged at equal intervals along the circumference of the unit body 381, but the present invention is not limited to four. Therefore, the rotational movement unit 382 rotates the multiple heating units 39 about a rotation axis 383 that passes through the center of the circle in which the multiple heating units 39 are arranged.

[0067] The heating section 39 is a component that heats the annular region 102 of the expansion plate 3 by irradiating infrared rays downward. For example, it is an infrared ceramic heater that heats and radiates infrared rays when a voltage is applied. When multiple heating sections 39 are not distinguished from each other, they are hereinafter referred to simply as the heating section 39. When multiple heating sections 39 are distinguished from each other, they are hereinafter referred to as the first heating section 391 (hereinafter denoted by the reference numeral 391), the second heating section 392 (hereinafter denoted by the reference numeral 392), the third heating section 393 (hereinafter denoted by the reference numeral 393), and the fourth heating section 394 (hereinafter denoted by the reference numeral 394). Thus, the heating member 38 includes the first heating section 391, the second heating section 392, the third heating section 393, and the fourth heating section 394, which are arranged at equal intervals along the circumference.

[0068] Furthermore, an imaginary line passing through the center of the unit body 381 of the heating member 38 of the first heating portion 391 and the center of the circumference (at Figure 5 The imaginary line (indicated by a dotted line in FIG) and the imaginary line (indicated by a dotted line in FIG) passing through the center of the unit body 381 of the heating member 38 of the second heating portion 392 and the center of the circumference direction Figure 5 The angle formed by the imaginary line passing through the center of the unit body 381 of the heating component 38 of the second heating part 392 and the center of the circumference is 90 degrees, and the imaginary line passing through the center of the unit body 381 of the heating component 38 of the third heating part 393 and the center of the circumference is 90 degrees. Figure 5 The angle formed by the imaginary line passing through the center of the unit body 381 of the heating component 38 of the third heating part 393 and the center of the circumference is 90 degrees, and the imaginary line passing through the center of the unit body 381 of the heating component 38 of the fourth heating part 394 and the center of the circumference is 90 degrees. Figure 5 The angle formed by the imaginary line passing through the center of the unit body 381 of the heating component 38 of the fourth heating section 394 and the center of the circumference is 90 degrees, and the angle formed by the imaginary line passing through the center of the unit body 381 of the heating component 38 of the first heating section 391 and the center of the circumference is 90 degrees.

[0069] The cleaning unit 40 cleans the workpiece 2, primarily the workpiece 2, of the workpiece unit 1, which has been expanded by the expansion piece 3 of the expansion unit 20 and contracted by heating the slack portions 3-5 of the workpiece unit 1 by the heating unit 30. The cleaning unit 40 includes a rotary table 41 disposed below the pair of first guide rails 15 and configured to suction and hold the workpiece 2 via the expansion piece 3 of the workpiece unit 1; and a cleaning water supply nozzle (not shown) configured to supply cleaning water to the front surface 5 of the workpiece 2 suctioned and held by the rotary table 41.

[0070] When the pair of first guide rails 15 are separated from each other, the cleaning unit 40 places the workpiece unit 1, whose slack portions 3-5 have been heated and shrunk by the heating unit 30, on the rotary table 41 via the second transport unit 52. The cleaning unit 40 supplies cleaning water from the cleaning water supply nozzle to the front surface 5 of the workpiece 2 while rotating the rotary table 41 about an axis parallel to the Z-axis, thereby cleaning the workpiece 2.

[0071] The control unit 100 controls the aforementioned components of the expansion device 10, namely, at least the heating element 38, so that the expansion device 10 performs processing operations on the workpiece 2. Furthermore, the control unit 100 is a computer and includes: a processing unit including a microprocessor such as a CPU (central processing unit); a storage device including memory such as ROM (read only memory) or RAM (random access memory); and an input / output interface device. The processing unit of the control unit 100 performs processing according to a computer program stored in the storage device, thereby outputting control signals for controlling the expansion device 10 to the aforementioned components of the expansion device 10 via the input / output interface device.

[0072] The control unit 100 is connected to a display unit (not shown), which is comprised of a liquid crystal display device or the like that displays the status of machining operations or images, and an input unit (not shown), which is used by an operator to register machining details and the like. The input unit is comprised of at least one of an external input device such as a touch panel provided on the display unit and a keyboard.

[0073] Next, the expansion method of the embodiment will be described. Figure 6 The flowchart of the expansion method of the embodiment is a method of expanding the expansion piece 3 of the workpiece unit 1 to break the workpiece 2 with the modified layer 101 as the starting point to divide the workpiece 2 into individual chips 9. Figure 6 As shown, the expansion method includes a frame fixing step ST1 , an expansion step ST2 , a second frame fixing step ST3 , a second expansion step ST4 , a heating step ST5 , and a cleaning step ST6 .

[0074] (Frame fixing steps)

[0075] Figure 7 is Figure 6 This is a cross-sectional view showing a state in which the annular frame of the workpiece unit is placed on the upper surface of the frame placement plate of the expansion unit in the frame fixing step of the expansion method. Figure 8 is Figure 6 This is a cross-sectional view showing a state in which the annular frame of the workpiece unit is fixed by the frame fixing portion of the expansion unit in the frame fixing step of the expansion method.

[0076] The frame fixing step ST1 is a step in which the annular frame 4 of the workpiece unit 1 is fixed using the frame fixing portion 21 of the expansion unit 20. In the frame fixing step ST1, the control unit 100 receives processing content information via the input unit and stores it in the storage device. The cassette 13 containing a plurality of workpiece units 1 is placed on the cassette elevator 12. In the frame fixing step ST1, when the control unit 100 receives a processing start instruction from the operator, the expansion device 10, while lowering the expansion drum 22 of the expansion unit 20, removes a workpiece unit 1 from the cassette 13 using the first transport unit 51. After temporarily placing the workpiece unit 1 on the pair of first guide rails 15, the pair of first guide rails 15 are brought closer together to position the workpiece unit 1 in the X-axis direction.

[0077] In the frame fixing step ST1, the expansion device 10 uses the second conveying unit 52 to convey the workpiece unit 1 on the first guide rail 15 to the second guide rail 16, so that the pair of second guide rails 16 approach each other to position the workpiece unit 1 in the X-axis direction. Figure 7 As shown, the expansion device 10 uses the third conveying unit 53 to convey the workpiece unit 1 on the pair of second guide rails 16 to the upper surface 232 of the frame mounting plate 23 of the expansion unit 20 after it is lowered. In the frame fixing step ST1, as shown in FIG. Figure 8 As shown, the expansion device 10 raises the frame placement plate 23 of the expansion unit 20 to sandwich the annular frame 4 between the frame pressing plate 24 and the frame placement plate 23 to fix the workpiece unit 1 .

[0078] (Extension Step)

[0079] Figure 9 is Figure 6 A cross-sectional view showing a state in which an expansion drum of an expansion unit is raised to expand expansion sheets in an expansion step of the expansion method shown. Figure 10 is Figure 6 A cross-sectional view showing a state in which the expansion drum is lowered after expansion in the expansion step of the expansion method is shown.

[0080] After the frame fixing step ST1 is completed, the expansion step ST2 involves expanding the expansion sheet 3 by pressing the annular region 102 of the expansion sheet 3 between the outer periphery of the workpiece 2 and the inner periphery of the annular frame 4 using the expansion drum 22. In the expansion step ST2, the expansion device 10 raises the expansion drum 22. The roller member 221 disposed at the upper end of the expansion drum 22 then abuts against the annular region 102 of the expansion sheet 3. The roller member 221 presses the expansion sheet 3 upward from below within the annular region 102, expanding the sheet 3 in the planar direction. In the expansion step ST2, as a result of the expansion of the expansion sheet 3, a tensile force acts radially on the sheet 3.

[0081] Thus, when a tensile force is applied radially to the expansion sheet 3 attached to the back surface 8 of the workpiece 2, Figure 9 As shown in FIG. 1 , the workpiece 2 is formed with a modified layer 101 along the predetermined dividing line 6. Therefore, the workpiece 2 is divided into individual chips 9 along the predetermined dividing line 6 with the modified layer 101 as the base point. In addition, the gaps between the chips 9 of the workpiece 2 are widened, and spaces are formed between the chips 9. In the expansion step ST2, the expansion device 10 lowers the expansion drum 22 of the expansion unit 20. Then, the workpiece unit 1 is temporarily expanded due to the expansion sheet 3. Figure 10 As shown, slack portions 3-5 are formed in the expanded piece 3 in the annular region 102.

[0082] (Second frame fixing step)

[0083] Figure 11 is Figure 6 A cross-sectional view showing a state in which the annular frame of the workpiece unit is placed on the upper surface of the frame placement plate of the heating unit in the second frame fixing step of the expansion method shown. Figure 12 is Figure 6 A cross-sectional view showing a state in which the annular frame of the workpiece unit is fixed by the frame fixing portion of the heating unit in the second frame fixing step of the expansion method shown.

[0084] The second frame fixing step ST3 is a step of fixing the annular frame 4 of the workpiece unit 1 using the frame fixing portion 31 of the heating unit 30. In the second frame fixing step ST3, the expansion device 10 lowers the frame mounting plate 23 of the frame fixing portion 21 of the expansion unit 20 and uses the third transport unit 53 to transport the workpiece unit 1 on the frame mounting plate 23 onto the pair of second guide rails 16.

[0085] In the second frame fixing step ST3, the expansion device 10 lowers the lifting member 371 of the heating unit 30 and the holding table 32, and uses the second conveying unit 52 to move the workpiece unit 1 on the second guide rail 16 while positioning the frame pressing plate 34 of the frame fixing portion 31 at the retracted position. Figure 11 As shown, the frame is conveyed onto the upper surface 332 of the frame mounting plate 33.

[0086] In the second frame fixing step ST3, the expansion device 10 moves the centering guides 333 of the frame fixing portion 31 closer to each other to position the workpiece 2 of the workpiece unit 1. In the second frame fixing step ST3, the expansion device 10 moves the frame mounting plate 33 upwards. Figure 12 As shown, the annular frame 4 is sandwiched between the frame placement plate 33 and the frame pressing plate 34 to fix the workpiece unit 1 .

[0087] (2nd expansion step)

[0088] Figure 13 is Figure 6 The figure shows a cross-sectional view of the state in which the expansion sheet is being held by the holding table after expansion in the second expansion step of the expansion method. The second expansion step ST4 is a step in which the expansion sheet 3 is expanded by pressing the annular region 102 of the expansion sheet 3 with the lifting member 371, and the expansion sheet 3 is held by the holding table 32 by suction to maintain the spacing between the chips 9.

[0089] In the second expansion step ST4, the expansion device 10 raises the lifting member 371 of the heating unit 30 and the holding table 32, as shown in FIG. Figure 13As shown, the annular region 102 of the expanded expansion sheet 3 is enlarged, creating spaces between the components 7. In the second expansion step ST4, the expansion device 10 drives the suction portion 322, causing the suction portion 322 to attract the adsorption portion, thereby attracting and holding the back surface 8 of the workpiece 2 on the holding surface 321 through the expansion sheet 3, thereby maintaining the spaces between the components 7. In the second expansion step ST4, the expansion device 10 lowers the lift member 371 to a position below the upper surface 332 of the frame mounting plate 33 and lowers the holding table 32 to a position where the holding surface 321 and the upper surface 332 of the frame mounting plate 33 are flush with each other. This creates a slack portion 3-5 in the annular region 102 of the expansion sheet 3.

[0090] (Heating step)

[0091] The heating step ST5 is a step of heating and shrinking the slack portion 3-5 of the expansion sheet 3 formed by expanding the expansion sheet 3 after the expansion step ST2 is performed. The heating step ST5 includes a circumferential heating step ST51 and an additional heating step ST52.

[0092] (Whole week heating steps)

[0093] Figure 14 is Figure 6 A cross-sectional view showing a state where a slack portion is heated in the entire circumference heating step of the heating step of the expansion method shown. Figure 15 It is shown in Figure 6 A plan view of each heating portion of a heating member for heating a slack portion in the entire circumference heating step of the heating step of the expansion method shown.

[0094] The entire circumference heating step ST51 is a step of heating the entire circumference of the slack portion 3-5 of the annular region 102 on the outer periphery of the workpiece 2 using the heating member 38. In the entire circumference heating step ST51, the expansion device 10 causes the heating member 38 of the heating unit 30 to heat the entire circumference of the workpiece 2. Figure 14 Thus, in the embodiment, as Figure 15 As shown, the expansion device 10 makes the first heating section 391 opposite to one end of the annular region 102 in the first direction 3-1 and one end of the second direction 3-2, the second heating section 392 opposite to the other end of the annular region 102 in the first direction 3-1 and one end of the second direction 3-2, the third heating section 393 opposite to the other end of the annular region 102 in the first direction 3-1 and the other end of the second direction 3-2, and the fourth heating section 394 opposite to one end of the annular region 102 in the first direction 3-1 and the other end of the second direction 3-2.

[0095] In the embodiment, in the entire circumference heating step ST51, the expansion device 10 causes the heating unit 30 to apply a voltage or the like to all the heating portions 391, 392, 393, and 394 of the heating member 38 to heat the heating member 38 to a predetermined temperature. All the heating portions 391, 392, 393, and 394 are then caused to emit infrared rays. Furthermore, the unit body 381 is rotated 90 degrees counterclockwise by the rotational movement unit 382 of the heating member 38. Thus, in the entire circumference heating step ST51, the expansion device 10 heats the slack portions 3-5 of the annular region 102 over the entire circumference, thereby shrinking the slack portions.

[0096] (Additional heating step)

[0097] Figure 16 It is shown in Figure 6 FIG. 1 is a plan view of each heating portion of the heating member at the start of heating in the additional heating step of the heating step of the expansion method shown. Figure 17 It is shown in Figure 6 FIG. 1 is a plan view of each heating portion of a heating member during heating in an additional heating step of a heating step of an expansion method shown. Figure 18 It is shown in Figure 6 FIG. 1 is a plan view of each heating portion of the heating member at the end of heating in the additional heating step of the heating step of the expansion method shown.

[0098] The additional heating step ST52 is a step of heating a portion of the slack portion 3-5 of the annular region 102 on the outer periphery of the workpiece 2 using the heating member 38. In the additional heating step ST52, after the entire circumference heating step ST51, the expansion device 10 rotates the unit body 381 90 degrees clockwise using the rotation moving unit 382 of the heating member 38 of the heating unit 30. Figure 16 As shown, the expansion device 10 makes the first heating section 391 opposite to one end of the annular region 102 in the first direction 3-1 and one end of the second direction 3-2, the second heating section 392 opposite to the other end of the annular region 102 in the first direction 3-1 and one end of the second direction 3-2, the third heating section 393 opposite to the other end of the annular region 102 in the first direction 3-1 and the other end of the second direction 3-2, and the fourth heating section 394 opposite to one end of the annular region 102 in the first direction 3-1 and the other end of the second direction 3-2.

[0099] In the embodiment, in the additional heating step ST52, the expansion device 10 causes the heating unit 30 to apply voltage to the first heating portion 391 and the third heating portion 393 of the heating member 38 to heat the heating member 38 to a predetermined temperature, and does not apply voltage to the second heating portion 392 and the fourth heating portion 394. While radiating infrared rays from the first heating portion 391 and the third heating portion 393, the unit body 381 of the heating member 38 is rotated 90 degrees counterclockwise. Thus, the first heating portion 391 and the third heating portion 393 are heated to a predetermined temperature. Figure 17 As shown, after the center of the annular region 102 in the first direction 3-1 and the two ends in the second direction 3-2 are opposite, Figure 18 As shown, the first heating unit 391 faces the other end in the first direction 3 - 1 and one end in the second direction 3 - 2 , and the third heating unit 393 faces one end in the first direction 3 - 1 and the other end in the second direction 3 - 2 .

[0100] Thus, in the additional heating step ST52, the expansion device 10 heats both ends of the slack portion 3-5 of the annular region 102 in the second direction 3-2 (i.e., both outer sides of the workpiece 2 in the second direction 3-2 of the slack portion 3-5 of the annular region 102) to shrink it.

[0101] Furthermore, in the embodiment, in the additional heating step ST52, the second heating unit 392 and the fourth heating unit 394 are Figure 17 As shown in FIG. 1 , the center of the annular region 102 in the second direction 3-2 and the two ends in the first direction 3-1 are opposite to each other. Figure 18 As shown, the second heating section 392 is opposite to the other end in the first direction 3-1 and the other end in the second direction 3-2, and the fourth heating section 394 is opposite to one end in the first direction 3-1 and one end in the second direction 3-2. Thus, in the additional heating step ST52, while the rotational movement unit 382 is rotating the heating sections 391, 392, 393, and 394, the control unit 100 stops heating the second heating section 392 and the fourth heating section 394, which are opposite to both ends of the annular region 102 of the expansion sheet 3 in the first direction 3-1.

[0102] (Cleaning Step)

[0103] Cleaning step ST6 is a step in which the workpiece 2 is cleaned using the cleaning unit 40 after the heating step ST5 is performed. In cleaning step ST6, the expansion device 10 stops suction and holding of the holding table 32 of the heating unit 30, and then uses the second conveying unit 52 to transport the workpiece unit 1 to the cleaning unit 40. In cleaning step ST6, after the expansion device 10 cleans the workpiece unit 1 using the cleaning unit 40, it stores the workpiece unit 1 in the cassette 13 using the first conveying unit 51. The expansion device 10 sequentially expands the expansion pieces 3 of the workpiece unit 1 in the cassette 13, dividing the workpiece 2 into individual chips 9. When all the expansion pieces 3 of the workpiece unit 1 in the cassette 13 have been expanded and the workpiece 2 has been divided into individual chips 9, the processing operation ends.

[0104] As described above, in the expansion method and expansion apparatus 10 of the embodiment, in addition to the full-circumference heating step ST51, an additional heating step ST52 is performed to heat the ends of the expansion piece 3 in the second direction 3-2, which is difficult to shrink, while stopping the heating of the ends in the first direction 3-1. Therefore, the difficult-to-shrink second direction 3-2 can also be fully shrunk, and sufficient spacing can be formed between the chips 9 regardless of the direction, thus preventing adjacent chips 9 from contacting and being damaged. As a result, the expansion method and expansion apparatus 10 of the embodiment can effectively prevent the divided chips 9 from contacting and being damaged.

[0105] The present invention is not limited to the above-described embodiment. That is, various modifications are possible without departing from the spirit of the present invention. In the embodiment, a modified layer 101 is formed as the starting point for division. However, the present invention is not limited to this and may also use a laser-machined or cut groove as the starting point for division. Furthermore, in the embodiment, the expansion device 10 includes an expansion unit 20 and a heating unit 30. However, in the present invention, a single unit that performs both the functions of the expansion unit 20 and the heating unit 30 may also be used to expand the expansion sheet 3 and heat and shrink the slack portion 3-5.

Claims

1. An expansion method for expanding an expansion sheet of a workpiece unit, wherein the workpiece unit is composed of a workpiece, the expansion sheet attached to the workpiece, and an annular frame on the periphery of the expansion sheet attached to the workpiece, wherein: This extension method has the following steps: a frame fixing step of fixing the annular frame of the workpiece unit using a frame fixing member; an expansion step, after the frame fixing step is performed, using a pressing member to press the expansion piece between the outer periphery of the workpiece and the inner periphery of the annular frame to expand the expansion piece; as well as a heating step, after the expansion step, heating the slack portion of the expansion sheet formed by the expansion of the expansion sheet to shrink the slack portion; The heating step comprises the following steps: a whole circumference heating step of heating the whole circumference of the slack portion of the outer periphery of the workpiece; and A heating step is added to heat a portion of the slack portion of the periphery of the workpiece. After the full heating step is performed, the additional heating step is performed. The expansion piece of the workpiece unit is cut out from a strip-shaped expansion piece having a constant width. When the width direction of the strip-shaped expansion piece is set as the first direction and the direction perpendicular to the first direction is set as the second direction, In the additional heating step, both outer sides of the workpiece in the second direction are heated. The heat shrinkage of the expansion sheet in the second direction is lower than the heat shrinkage in the first direction.

2. An expansion device for expanding an expansion piece of a workpiece unit, wherein the workpiece unit is composed of a workpiece, the expansion piece attached to the workpiece, and an annular frame on the periphery of the expansion piece attached to the workpiece, wherein: The expansion unit features: a frame fixing member for fixing the annular frame of the workpiece unit; a pressing member that presses the expansion piece between the outer periphery of the workpiece of the workpiece unit in which the annular frame is fixed by the frame fixing member and the inner periphery of the annular frame; a heating member for heating a slack portion of the expansion sheet formed by expanding the expansion sheet to shrink the slack portion; as well as a control unit that controls at least the heating member, The heating component comprises: a first heating portion and a second heating portion, which are arranged on a circle corresponding to the annular region between the inner periphery of the annular frame and the workpiece, and are opposite to the expansion piece of the annular region; as well as a rotating member that rotates the heating portion about a rotation axis passing through the center of the circle, The control unit stops heating of one of the first heating unit and the second heating unit during the rotation of the rotating member.

3. The expansion device according to claim 2, wherein: The expansion piece of the workpiece unit is cut out from a strip-shaped expansion piece having a constant width. When the width direction of the strip-shaped expansion piece is set as a first direction and the direction perpendicular to the first direction is set as a second direction, During the rotation by the rotating member, the control unit stops heating of one of the first heating unit and the second heating unit that is opposite to both end portions of the expansion piece in the first direction.

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