A robotic arm that controls the spacing between multiple components

By designing a mechanical arm unit including robotic arms, connecting rods, and undertaking groups, the problem of high cost and unstable spacing of two wafers in the existing technology is solved. Portal control.

CN112349640BActive Publication Date: 2025-01-28SAMHWA ENG
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Patent Information

Application Number
CN202011229774.3
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2020-11-06
Publication Date
2025-01-28
Estimated Expiration
2040-11-06

AI Technical Summary

Technical Problem

When existing robotic arms carry two wafers at the same time, they require two sets of robotic arms and complex power mechanisms, resulting in high production costs and unadjustable spacing, which makes them prone to errors.

Method used

Design a mechanical arm unit, including robotic arms, first connecting rods, first and second withdrawal groups, servo motors and mobile units. Through the first connecting rod drive the undertaking group along the groove, the control of multiple bearing parts is achieved.

Benefits of technology

A realization of the distance between multiple bearing parts through a single servo motor, reducing the production cost of the overall machine, and ensuring the stability of the spacing, avoiding the occurrence of errors.

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Abstract

The present invention relates to a robotic arm for controlling the spacing between multiple supporting parts. The method mainly involves setting two grooves on the side of a robotic arm body. The supporting group bodies of two supporting groups are respectively set in each groove, and each supporting group body is against the side of a connecting rod. Therefore, when a servo motor drives one end of the connecting rod to rotate, it will simultaneously drive each supporting group body to move upward. During the movement, the spacing between the supporting parts on the front side of each supporting group body will gradually increase. The spacing can be controlled by the rising degree of each supporting group body, and it is not easy to cause spacing errors due to the influence of usage time.
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Description

[0001] Technical field: The invention relates to a robotic arm, in particular to a robotic arm for controlling the spacing between multiple receiving parts. Background technology:

[0002] Please refer to Taiwan Patent Certificate No. M447821 "Vibration Detection Device", which discloses: a vibration detection device for detecting vibration information generated during the operation of taking and placing a wafer component, the vibration detection device includes a robotic arm, a detection mechanism, and an information collection device, the robotic arm includes a placement mechanism for taking and placing the wafer component, the wafer component has a wafer vibration position when it is a test wafer, the detection mechanism includes a detection component that can detect vibration, the detection component is set at a vibration sampling position or a wafer vibration position of the robotic arm to detect and sample a vibration sampling information corresponding to the vibration sampling position or the wafer vibration position, the information collection device is connected to the detection mechanism, receives the vibration sampling information detected by the detection component, and collects the vibration information generated during the operation of the robotic arm.

[0003] Although the patent has the above advantages, when the patent is used to simultaneously handle two wafers, two sets of robotic arms must be set up at the same time, and the horizontal height of the gripping components of each robotic arm must have a certain spacing, which will result in: 1. The overall production cost increases, and two sets of power mechanisms must be used to control the movement of each robotic arm separately. 2. The spacing cannot be adjusted as needed, or the spacing is prone to errors due to use. Therefore, the inventor of the present invention believes that this problem really needs to be improved. Summary of the invention:

[0004] In view of the problems described in the background art, the inventors of the present invention propose an improved means, which is a mechanical arm for controlling the spacing between multiple receiving parts, including:

[0005] A robotic arm unit comprises: a robotic arm body: the side of the robotic arm body facing the object to be received is defined as the front side, one of the left and right sides of the robotic arm body is defined as the first side, and the other is defined as the second side, and a first groove and a second groove are provided at intervals along the vertical direction of the first side of the robotic arm body.

[0006] 1. First connecting rod:

[0007] The mechanical arm for controlling the spacing between multiple receiving members, wherein the first connecting rod is arranged on the first side, and one end of the first connecting rod adjacent to the front side is pivotally connected to the first side.

[0008] 1. The first receiving group:

[0009] The robotic arm that controls the spacing between multiple supporting parts, wherein the first supporting group has a first supporting group body and a first supporting part, the first supporting group body is received in the first groove for up and down movement along the first groove, and the bottom of the first supporting group body is pivotally connected to the first connecting rod, and the first supporting part is arranged on the front side of the first supporting group body.

[0010] 1. The second receiving group:

[0011] The robot arm for controlling the spacing between multiple receiving members, wherein the second receiving group comprises a second receiving group body and a second receiving member, the second receiving group body is received in the second groove for moving up and down along the second groove, the bottom of the second receiving group body is pivotally connected to the first connecting rod, and the second receiving member is arranged at the front side of the second receiving group body;

[0012] A servo motor:

[0013] In the robotic arm for controlling the spacing between multiple receiving parts, the output end of the servo motor is directly or indirectly connected to the other end of the first connecting rod to drive the other end of the first connecting rod to rotate upward.

[0014] A mobile unit:

[0015] The robotic arm for controlling the spacing between multiple receiving parts, wherein the moving unit is connected to the robotic arm unit to drive the robotic arm unit to move in a three-dimensional rectangular coordinate system.

[0016] The invention is mainly created by arranging the first receiving group body and the second receiving group body in the first groove and the second groove. Therefore, when the servo motor drives the other end of the first connecting rod to rotate upward, the first connecting rod will drive the first receiving group body and the second receiving group body to move upward along the first groove and the second groove respectively. During the movement, the distance between the first receiving member and the second receiving member is continuously increased. In this way, the size of the spacing can be determined by the upward movement degree of each receiving group body. Since the size of the spacing is mainly determined by the distance between each groove and the upward movement degree of each receiving group body, and the distance between each groove is fixed, and the upward movement degree of each receiving group body is the same, therefore, the spacing is not easy to produce errors with the use time. Especially when the number of receiving groups is three or more, the spacing between each receiving member can be further controlled by the invention. Description of the drawings:

[0017] Figure 1 This is the appearance diagram of the present invention

[0018] Figure 2This is the appearance diagram of the robot arm body of the present invention

[0019] Figure 3 It is a side view of the robot arm body of the present invention

[0020] Figure 4 Schematic diagram of the connection of the components of the present invention

[0021] Figure 5 Schematic diagram of the servo motor, the first connecting rod, and the wheels of the present invention

[0022] Reference numerals:

[0023] A Telecommunications Service Provider

[0024] 1 Robotic arm unit

[0025] 11 Robotic arm body

[0026] 111 The First Ditch

[0027] 112 The Second Ditch

[0028] 12 First connecting rod

[0029] 13 The first receiving group

[0030] 131 The first receiving group

[0031] 132 First Receiver

[0032] 133 First Wheel

[0033] 14 The second receiving group

[0034] 141 The second receiving group

[0035] 142 Second receiving part

[0036] 143 First Wheel

[0037] 16 Servo motor

[0038] 161 Second Wheel

[0039] 2 Mobile Unit

[0040] 3 Steering unit

[0041] 4 Control unit

[0042] 5 Position detector

[0043] 6 Level Detector

[0044] 7 Siren Specific implementation method:

[0045] The following is an explanation of the structure, features and implementation methods of the present invention with the aid of diagrams, so that the examiner can have a further understanding of the present invention.

[0046] See also Figure 1 As shown, the present invention relates to a mechanical arm for controlling the spacing between multiple receiving parts, comprising:

[0047] A robotic arm unit 1, the robotic arm unit 1 comprising:

[0048] A robotic arm body 11:

[0049] See also Figure 1 Cooperate Figure 2 As shown, the side of the robot body 11 facing the object to be received is defined as the front side, one of the left and right sides of the robot body 11 is defined as the first side, and the other is defined as the second side. A first groove 111 and a second groove 112 are provided at intervals along the vertical direction of the first side of the robot body 11. The present invention can control the number of grooves 111 according to the number of objects to be received at the same time. In addition, the spacing between the grooves 111 and 112 can also be controlled according to the spacing required when receiving the objects. Figure 2 , Figure 3 Five grooves are used as an example.

[0050] A first connecting rod 12:

[0051] See also Figure 2 As shown, the first connecting rod 12 is disposed on the first side, and one end of the first connecting rod 12 adjacent to the front side is pivotally connected to the first side.

[0052] 1. The first receiving group 13:

[0053] See also Figure 2 , 3 As shown in Figure 5, the first receiving group 13 has a first receiving group body 131 and a first receiving member 132, the first receiving group body 131 is arranged in the first groove 111 for moving up and down along the first groove 111, and the bottom of the first receiving group body 131 is pivotally connected with the first connecting rod 12, and the first receiving member 132 is arranged at the front side of the first receiving group body 131. In this way, when the other end of the first connecting rod 12 rotates upward, it will drive the first receiving group body 131 to move upward along the first groove 111, and vice versa, when the other end rotates downward, the first receiving group body 131 moves downward. In addition, it is worth mentioning that, limited to the angle relationship presented in the diagram, the first groove 111 is blocked by the first receiving group body 131, so the first groove 111 presented in the diagram of this specification is presented in a dotted line manner.

[0054] 1. The second receiving group 14:

[0055] See also Figure 2 , 3 5, the second receiving set 14 has a second receiving set body 141 and a second receiving member 142, the second receiving set body 141 is received in the second groove 112 for moving up and down along the second groove 112, and the bottom of the second receiving set body 141 is pivotally connected to the first connecting rod 12, and the second receiving member 142 is disposed at the front side of the second receiving set body 141. The operating principle of the second receiving set 14 is the same as that of the first receiving set 13, so it is not repeated here. In addition, in order to accommodate different objects to be received, the first and second receiving members 132 and 142 may be implemented as a plurality of tooth forks, plates, or fork bodies. In order to prevent the objects to be received from slipping during the receiving process, a non-slip unit is preferably provided on the top surface of the first and second receiving members 132 and 142, respectively. The non-slip unit may be a pad with a high coefficient of friction, or a surface with a plurality of particles. When the invention is used in the semiconductor field, the non-slip unit may be a convex column for insertion into the bottom surface of the wafer box. In addition to the positioning function, it also has a non-slip function. In order to explain the advantages, features, and operating methods of the invention, this specification only takes two receiving groups as an example. When the invention is actually implemented, different numbers of receiving groups are still set based on individual needs. In addition, as shown in the figure, the number of receiving groups is preferably 5. Furthermore, it is worth mentioning that, due to the angle relationship presented in the drawings, the second groove 112 is blocked by the second receiving assembly body 141 , so the second groove 112 presented in the drawings of this specification is presented in a dotted line manner.

[0056] A servo motor 16:

[0057] See also Figure 3 The output end of the servo motor 16 is directly or indirectly connected to the other end of the first connecting rod 12 to drive the other end of the first connecting rod 12 to rotate upward.

[0058] A mobile unit 2:

[0059] See also Figure 1 The mobile unit 2 is connected to the robot arm unit 1 to drive the robot arm unit 1 to move in a three-dimensional rectangular coordinate system. In addition, a steering unit 3 is provided, and the steering unit 3 is connected to the mobile unit 2 to drive the mobile unit 2 to turn. In this way, the invention can have a multi-axial receiving direction, so as to receive the object to be received in various conditions.

[0060] A control unit 4:

[0061] See also Figure 4 The control unit 4 is respectively connected to the servo motor 16, the moving unit 2, and the steering unit 3 for controlling the movement of the moving unit 2 and the steering unit 3 to complete the work process of receiving and placing the object to be received.

[0062] See also Figure 3 , Figure 4 and Figure 5 Next, the operation process of the present invention is introduced. First, the control unit 4 controls the moving unit 2 and the steering unit 3 to operate according to the position of the object to be carried, so as to drive the robot arm unit 1 to move to the default position. Then, the servo motor 16 is controlled to start operating. The servo motor 16 drives the other end of the first connecting rod 12 to rotate upward. During the rotation process, the bottom of the first and second receiving group bodies 131 and 141 are pivotally connected with the connecting rod 12, so that the first and second receiving group bodies 131 and 141 move upward along the grooves 111 and 112. During the movement process, Figure 2 and Figure 3 As shown, the spacing between the receiving members 132, 142 will gradually increase until the spacing is sufficient to receive the object to be received, and then the moving unit 2 is actuated to enable the first and third receiving groups 13, 14 to receive the object to be received. Then, the control unit 4 controls the steering unit 3 and the moving unit 2 to actuate according to the desired placement location, so as to place the object to be received at the desired placement location, thus completing the entire receiving process.

[0063] The advantages of the invention are:

[0064] 1. By fixing the positions of the grooves 111, 112, after the receiving group bodies 131, 141 move upward, the spacing between the receiving parts 132, 142 is not likely to have errors over time.

[0065] 2. Only one servo motor 16 is used to control the distance between the receiving parts 132 and 142, thereby reducing the manufacturing cost of the entire machine.

[0066] Other embodiments of the present invention are described below: one,

[0068] See also Figure 4A position detector 5 is further provided, and the position detector 5 can be used to detect the vertical height of the bottom of the first receiving group body 131 at the first groove 111 to obtain a height detection value; the control unit 2 determines whether the servo motor 16 is stopped or not according to the height detection value.

[0069] Therefore, when the first receiving group body 131 moves to the preset height, the control unit 2 will control the servo motor 16 to stop operating, so that the purpose of controlling the width of the spacing between the receiving members 132 and 142 can be achieved. Since the width of each spacing is affected by the setting position of each groove 111 and 112, the purpose of controlling each spacing can be achieved by only monitoring the position of the first receiving group body 131 in the first groove 111. In addition, in actual implementation, the above purpose can also be achieved by monitoring the position of the second receiving group body 141 in the second groove 112. In addition, when the present invention is actually implemented, each receiving group body 131 and 141 can also be monitored simultaneously to achieve the purpose of monitoring the width of each spacing.

[0070] In addition, this embodiment can be further implemented as follows: when the control unit 2 controls the servo motor 16 to operate, if the height detection value fails to meet a default height value after a preset time, the control unit 16 controls an alarm 7 to operate. In this way, when the height detection value fails to meet a default height value after a period of time, it means that each receiving group body 131, 141 may be stuck in each groove 111, 112, and therefore it is necessary to use the alarm 7 to warn the relevant staff to handle it.

[0071] When the invention is used to receive wafers, since wafers are expensive and quite fragile, no accidents are allowed during the receiving process. In order to reduce the probability of wafers slipping, the invention can be further implemented as follows: two,

[0073] See also Figure 4 A horizontal detector 6 connected to the control unit 4 is provided. The horizontal detector 6 can be used to detect the tilt condition of each receiving member 132, 142 to obtain a horizontal detection result. When the horizontal detection result exceeds a horizontal default value, the control unit 4 controls the servo motor 16, the moving unit 2, and the steering unit 3 to stop operating, and activates the alarm 7.

[0074] In this way, when one of the receiving parts is tilted too much, in order to prevent the wafer from slipping, the servo motor 16, the moving unit 2, and the steering unit 3 stop working, and the alarm 7 is activated at the same time to alert the relevant staff. In addition, the alarm 7 can be a flasher, a buzzer, or through the setting of the human-machine interface, the warning effect can be achieved in a significant manner, such as by flashing the receiving part icon in the figure.

[0075] In order to achieve the above-mentioned purpose, the invention can also be implemented as follows: three,

[0077] See also Figure 4 The control unit 4 can provide information connection to a telecommunications service provider A for receiving earthquake text messages. When the control unit 4 receives the earthquake text message, if each receiving component 132, 142 is in the state of receiving the object to be received, the servo motor 16, the mobile unit 2, and the steering unit 3 are controlled to operate so as to place the object to be received in the original position, and then the servo motor 16, the mobile unit 2, and the steering unit 3 are controlled to stop operating; if each receiving component 132, 142 is not in the state of receiving the object to be received, the servo motor 16, the mobile unit 2, and the steering unit 3 are controlled to stop operating.

[0078] Before an earthquake occurs, the invention can immediately place the objects to be received in advance, and then control the servo motor 16, the moving unit 2, and the steering unit 3 to stop operating. In this way, even when an earthquake occurs, the objects to be received are unlikely to fall and be damaged, thereby improving the overall receiving safety of the invention and minimizing the damage caused by the earthquake.

[0079] The following describes three implementations of how the servo motor 16 and the first connecting rod 12 drive the receiving groups 13 and 14: one,

[0081] See also Figure 2 As shown, the bottom outer sides of the first receiving group body 131 and the second receiving group body 141 are respectively pivotally connected to the first connecting rod 12. In this way, when the servo motor 16 drives one end of the first connecting rod 12 to rotate upward or downward, because the bottom outer sides of the first receiving group body 131 and the second receiving group body 141 are respectively pivotally connected to the first connecting rod 12, each receiving group body 131, 141 will move upward or downward along each groove 111, 112. This driving mode belongs to the first connecting rod 12 pulling each receiving group body 131, 141 to move downward or pushing each receiving group body 131, 141 to move upward. two,

[0083] See also Figure 5 As shown, the first receiving group body 131 and the second receiving group body 141 are respectively provided with a first wheel body 133, 143 at the outer side of the bottom, and each first wheel body 133, 143 is respectively pressed against the ring side of the first connecting rod 12. In this embodiment, the principle of the method in which the first connecting rod 12 drives each receiving group body 131, 141 is similar, and the difference is that: this embodiment mainly uses the gravity of each receiving group body 131, 141, so that when the servo motor 16 drives one end of the first connecting rod 12 to rotate downward, each receiving group body 131, 141 will naturally move downward, so that compared with the previous embodiment, the service life between the first connecting rod 12 and each receiving group body 131, 141 can be extended. three,

[0085] See also Figure 5 As shown, the servo motor 16 and the first connecting rod 12 are preferably connected by a wheel body, and the implementation method is as follows: the servo motor 16 is abutted against the bottom of the other end of the first connecting rod 12 with a second wheel body 161, and the servo motor 16 can be used to drive the second wheel body 161 to move upward, and at the same time, the first connecting rod 12 is linked to rotate. The principle of the servo motor 16 driving the first connecting rod 12 is similar to the aforementioned embodiment 2, so it will not be repeated here.

[0086] In summary, this case meets the requirements set forth in the Patent Law, and a patent application is filed in accordance with the law. The above description only lists the preferred implementation methods of the invention, and the scope of rights in this case is still mainly based on the claims.

Claims

1. A robotic arm for controlling the spacing between multiple receiving parts, characterized in that: include: A robotic arm unit, comprising: A robot arm body: the side of the robot arm body facing the object to be received is defined as the front side, one of the left and right sides of the robot arm body is defined as the first side, and the other is defined as the second side, and a first groove and a second groove are provided at intervals along the vertical direction of the first side of the robot arm body; A first connecting rod is disposed on the first side, and one end of the first connecting rod adjacent to the front side is pivotally connected to the first side; A first receiving assembly: comprising a first receiving assembly body and a first receiving member, wherein the first receiving assembly body is received in the first groove so as to move up and down along the first groove, and the bottom of the first receiving assembly body is pivotally connected to the first connecting rod, and the first receiving member is disposed at the front side of the first receiving assembly body; A second receiving assembly: comprising a second receiving assembly body and a second receiving member, wherein the second receiving assembly body is received in the second groove so as to be movable up and down along the second groove, and the bottom of the second receiving assembly body is pivotally connected to the first connecting rod, and the second receiving member is disposed at the front side of the second receiving assembly body; a servo motor: an output end of the servo motor is directly or indirectly connected to the other end of the first connecting rod to drive the other end of the first connecting rod to rotate upward; A moving unit is connected to the robotic arm unit to drive the robotic arm unit to move in a three-dimensional rectangular coordinate system.

2. The robot arm for controlling the spacing between multiple receiving parts according to claim 1, characterized in that: A position detector is further provided, and the position detector can be used to detect the vertical height of the bottom of the first receiving assembly body at the first groove to obtain a height detection value.

3. The robot arm for controlling the spacing between multiple receiving parts according to claim 2, characterized in that: A control unit is further provided, and the control unit is respectively connected to the servo motor and the moving unit for controlling the actuation of the servo motor and the moving unit respectively; a horizontal detector is provided which is connected to the control unit, and the horizontal detector can detect the inclination condition of each receiving member to obtain a horizontal detection result. When the horizontal detection result exceeds a horizontal default value, the control unit controls the servo motor and the moving unit to stop actuating, and activates an alarm.

4. The mechanical arm for controlling the spacing between multiple receiving parts according to claim 3, characterized in that: The control unit can provide information connection to a telecommunications service provider for receiving earthquake text messages. When the control unit receives the earthquake text message, if the receiving member is in a state of receiving an object to be received, the control unit controls the servo motor and the mobile unit to operate so as to place the object to be received at the original position, and then controls the servo motor and the mobile unit to stop operating; if the receiving member is not in a state of receiving the object to be received, the control unit controls the servo motor and the mobile unit to stop operating.

5. The mechanical arm for controlling the spacing between multiple receiving parts according to claim 4, characterized in that: A signal is further provided to connect a steering unit of the control unit, and the steering unit is connected to the moving unit to drive the moving unit to turn.

6. The mechanical arm for controlling the spacing between multiple receiving parts according to claim 5, characterized in that: The top surfaces of the first and second receiving components are paved with an anti-slip unit, and the first and second receiving components can be selected from one of the following groups: a plurality of tooth forks, and a plate body.

7. The robot arm for controlling the spacing between multiple receiving parts according to claim 6, characterized in that: A first wheel body is respectively disposed on the outer side of the bottom of the first receiving group body and the second receiving group body, and each first wheel body is pressed against the ring side of the first connecting rod.

8. The robot arm for controlling the spacing between multiple receiving parts according to claim 6, characterized in that: The servo motor has a second wheel body abutting against the bottom of the other end of the first connecting rod. When the servo motor drives the second wheel body to move upward, the first connecting rod is simultaneously linked to rotate.

9. The robot arm for controlling the spacing between multiple receiving parts according to claim 6, characterized in that: The outer sides of the bottoms of the first receiving group body and the second receiving group body are respectively pivotally connected to the first connecting rod.

10. The mechanical arm for controlling the spacing between multiple receiving parts according to any one of claims 7, 8 or 9, characterized in that: After the control unit controls the servo motor to operate, if the height detection value fails to meet a default height value after a preset time, the control unit controls the alarm to operate.

Citation Information

Patent Citations

  • Mechanical arm for controlling distance between bearing pieces

    CN214336693U