On-machine measuring device, machine tool and on-machine measuring method

Abstract

The present invention relates to an on-machine measuring device (14) for determining the top position of a blade (50) of a machining tool (48) provided on a machining device (12). The on-machine measuring device (14) comprises: a measuring unit (74) for measuring the height of a reference plane (92) not machined by the machining tool (48) and the height of a machined surface (94) machined by the machining tool (48) in a workpiece (90) machined by the machining tool (48); and a determining unit (82) for determining the top position of the blade (50) of the machining tool (48) based on information on a machining depth specified when machining the workpiece (90) and the height of the reference plane (92) and the height of the machined surface (94) measured by the measuring unit (74).

Description

Technical Field

[0001] The present invention relates to an on-machine measuring device, a machine tool and an on-machine measuring method for determining the tip position of a cutting edge of a machining tool provided on a machining device. Background Art

[0002] When a machine tool is used for high-precision machining, it is necessary to find the tip position of the blade of the machining tool installed on the machine tool. As a technology for measuring the tip position of the blade, there is a contact-type tool length measuring device. However, the blade of a machine tool that performs machining in nanometers is sharp and may be damaged by external forces, so it is not preferred to use a contact-type tool length measuring device.

[0003] Japanese Patent Publication No. 2000-055628 discloses a method for measuring the tip position of a machine tool blade without using a contact-type tool length measuring device. In this method, a laser is projected onto the tip of a ball end mill mounted on a spindle of a machining center to detect a shadow and the tip position of the blade. Summary of the invention

[0004] Problems to be solved by the invention

[0005] There are machining tools made of transparent members (such as single crystal diamond, etc.). When laser light is projected onto a transparent machining tool, the laser light is transmitted through the blade. Thus, depending on the material of the machining tool, the tip position may not be detected by the method of projecting laser light.

[0006] Therefore, an object of the present invention is to provide an on-machine measuring device, a machine tool, and an on-machine measuring method capable of measuring the tip position of a cutting edge regardless of the material of a machining tool.

[0007] Technical means to solve problems

[0008] The first scheme of the present invention is an on-machine measuring device, which determines the top position of the blade of a processing tool set on a processing device, and the on-machine measuring device comprises: a measuring unit, which measures the height of a reference plane that has not been processed by the processing tool and the height of a processing surface processed by the processing tool in a processing workpiece processed by the processing tool; and a determining unit, which determines the top position of the blade of the processing tool based on information on a processing depth specified when processing the processing workpiece and the height of the reference plane and the height of the processing surface measured by the measuring unit.

[0009] A second aspect of the present invention is a machine tool including the on-machine measuring device according to the first aspect.

[0010] The third scheme of the present invention is an on-machine measurement method for determining the top position of the blade of a processing tool arranged on a processing device, the on-machine measurement method comprising: a measuring step of measuring the height of a reference plane that has not been processed by the processing tool and the height of a processing surface processed by the processing tool in a workpiece processed by the processing tool; and a determination step of determining the top position of the blade of the processing tool based on information on a processing depth specified when processing the workpiece and the height of the reference plane and the height of the processing surface measured in the measuring step.

[0011] Effects of the Invention

[0012] According to the present invention, the tip position of the cutting edge can be measured regardless of the material of the machining tool.

[0013] The above objects, features and advantages will be easily understood from the following description of the embodiments with reference to the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 This is a schematic diagram showing the appearance of the machine tool.

[0015] Figure 2 A block diagram showing a portion of the structure of a machine tool.

[0016] Figure 3 This is a block diagram showing a part of the structure of a machine tool.

[0017] Figure 4 It is a diagram showing a state where the height of the reference plane and the height of the bottom surface of the recessed portion are measured.

[0018] Figure 5 This is a flowchart showing a process of determining the tip position of the blade of a machining tool.

[0019] Figure 6 It is a figure which shows the cross section of the processed surface which forms a V-groove.

[0020] Figure 7 This is a diagram showing a state where a V-groove having an isosceles triangle cross-sectional shape is formed by a machining tool.

[0021] Figure 8 This is a diagram showing a state where a V-groove having a cross-sectional shape that is not an isosceles triangle is formed by a machining tool.

[0022] Fig. 9 A diagram showing a state where the contact has entered the V-groove.

[0023] Fig.10 It is a figure which shows the operation|movement of the contact in 3rd Embodiment.

[0024] Fig.11 It is a figure which shows the operation|movement of the contact in 4th Embodiment. DETAILED DESCRIPTION

[0025] The on-machine measuring device, the machine tool, and the on-machine measuring method of the present invention will be described in detail below with reference to the accompanying drawings, with reference to preferred embodiments thereof.

[0026] [1. Machine tool structure]

[0027] use Figure 1 to Figure 3 , the structure of the machine tool 10 is described. In the following description, two axes parallel to the horizontal plane and orthogonal to each other are set as the x-axis and the y-axis, and the axis parallel to the vertical plane is set as the z-axis. In addition, one side of the x-axis is set as the front, and the other side is set as the rear. In addition, one side of the y-axis is set as the right, and the other side is set as the left. In addition, one side of the z-axis is set as the top, and the other side is set as the bottom. However, any one of the x-axis, the y-axis, and the z-axis may be along the front-back direction, the left-right direction, or the up-down direction.

[0028] The machine tool 10 functions as a machining device 12 that performs machining on a workpiece 90 in units of nanometers, and also functions as an on-machine measuring device 14 that performs on-machine measurement of the machined workpiece 90 after machining.

[0029] like Figure 1 As shown, the machine tool 10 includes a bed 16 , a table driving unit 18 , a table 20 , a column 22 , a rotating body driving unit 24 , a rotating body 26 , a rotating plate 28 , and a control device 30 .

[0030] The bed 16 supports all components of the machine tool 10. Figure 2 As shown, the table driving unit 18 includes an x-axis servo amplifier 32x, an x-axis servo motor 34x, an x-axis encoder 36x, an x-axis moving mechanism 38x, a y-axis servo amplifier 32y, a y-axis servo motor 34y, a y-axis encoder 36y, and a y-axis moving mechanism 38y. The x-axis moving mechanism 38x and the y-axis moving mechanism 38y include a power transmission mechanism such as a ball screw. When the x-axis servo amplifier 32x inputs a target value from the control device 30 and outputs a power signal to the x-axis servo motor 34x, the x-axis servo motor 34x rotates, and the x-axis moving mechanism 38x moves the table 20 along the x-axis. Similarly, when the y-axis servo amplifier 32y inputs a target value from the control device 30 and outputs a power signal to the y-axis servo motor 34y, the y-axis servo motor 34y rotates, and the y-axis moving mechanism 38y moves the table 20 along the y-axis.

[0031] Back to Figure 1 The column 22 supports the rotating body driving unit 24. Figure 2As shown, the rotating body driving unit 24 includes a rotating body driver 40, a rotating motor 42, a rotating mechanism 44, a z-axis servo amplifier 32z, a z-axis servo motor 34z, a z-axis encoder 36z, and a z-axis moving mechanism 38z. The rotating mechanism 44 includes a power transmission mechanism such as a gear. The z-axis moving mechanism 38z includes a power transmission mechanism such as a ball screw. When the rotating body driver 40 inputs a rotation instruction from the control device 30 and outputs a power signal to the rotating motor 42, the rotating motor 42 rotates, and the rotating mechanism 44 rotates the rotating body 26 around an axis parallel to the x-axis. Through the rotation of the rotating body 26, any one of the machining tool 48 and the probe 52 is directed downward. When the z-axis servo amplifier 32z inputs a target value from the control device 30 and outputs a power signal to the z-axis servo motor 34z, the z-axis servo motor 34z rotates, and the z-axis moving mechanism 38z causes the rotating body 26 to move along the z-axis.

[0032] The rotating body 26 extends in the front-to-back direction, and moves in the up-down direction relative to the column 22 by the action of the rotating body driving unit 24. A rotating plate 28 is installed at the front end of the rotating body 26. A set of tool mounting parts 46 and a probe 52 are fixed to the front surface of the rotating plate 28. The tool mounting part 46 supports a processing tool 48 having a blade 50. The processing tool 48 can be freely installed on the tool mounting part 46 and removed from the tool mounting part 46. The top end of the probe 52 has a contact piece 54 with a curved surface. The contact piece 54 is, for example, a sphere. The probe 52 is installed at a position that is offset by 90 degrees relative to the tool mounting part 46. As Figure 2 , Figure 3 As shown, the probe 52 has a pressure sensor 56 .

[0033] like Figure 3 As shown, the control device 30 is connected to the table drive unit 18, the rotating body drive unit 24 and the probe 52 by a signal line. The control device 30 has a computing unit 60 and a storage unit 62. The computing unit 60 is composed of a processor such as a CPU. The computing unit 60 functions as a switching control unit 64, a processing control unit 66 and a measurement control unit 68 by executing a program stored in the storage unit 62. When the machine tool 10 is used as a processing device 12, the computing unit 60 functions as the processing control unit 66. On the other hand, when the machine tool 10 is used as an on-board measuring device 14, the computing unit 60 functions as the measurement control unit 68.

[0034] The switching control unit 64 controls the rotational movement of the rotating body 26 in response to a switching operation performed by an operator using an operating device (not shown), or in response to a transition from machining processing to on-machine measurement processing or from on-machine measurement processing to machining processing, so that either the machining tool 48 or the probe 52 is directed downward.

[0035] The machining control unit 66 also functions as a position correction unit 70 and a machining operation instruction unit 72. When the position of the tip of the blade 50 of the machining tool 48 is determined by the on-machine measuring device 14, the position correction unit 70 corrects the information of the tip position of the blade 50 of the machining tool 48 stored in the storage unit 62. The machining operation instruction unit 72 outputs the target value of the machining operation to the x-axis servo amplifier 32x, the y-axis servo amplifier 32y, and the z-axis servo amplifier 32z based on the machining program 84 during machining.

[0036] The measurement control unit 68 also functions as a measurement action instruction unit 76, a contact detection unit 78, a height measurement unit 80, and a determination unit 82. Among them, the measurement action instruction unit 76, the contact detection unit 78, and the height measurement unit 80 are collectively referred to as the measurement unit 74. When the measurement action instruction unit 76 performs on-machine measurement processing, it outputs the target value of the measurement action to the x-axis servo amplifier 32x, the y-axis servo amplifier 32y, and the z-axis servo amplifier 32z based on the measurement program 86. The contact detection unit 78 monitors the pressure value detected by the pressure sensor 56 to determine whether the workpiece 90 is in contact with the contact member 54. The height measurement unit 80 determines the detection value detected by the z-axis encoder 36z as the measured value of the height. Furthermore, the height measurement unit 80 corrects the measured value as needed. The correction of the measured value will be described in the second embodiment and later. The determination unit 82 determines the top position of the blade 50 of the processing tool 48.

[0037] The storage unit 62 is composed of various memories such as RAM, ROM, and a hard disk. The storage unit 62 stores a machining program 84, a measurement program 86, and tool information 88. The machining program 84 is a program for specifying the operation of the machining tool 48. The measurement program 86 is a program for specifying the operation of the probe 52. The tool information 88 is information indicating the type, shape, size, and mounting angle of the machining tool 48. The tool information 88 includes information on the tip position of the blade 50 of the machining tool 48.

[0038] [2. Operation of the on-board measuring device 14]

[0039] [2.1. First embodiment]

[0040] When the operator performs a predetermined operation on the operating device (not shown), the switching control unit 64 rotates the rotating plate 28 so that the machining tool 48 faces downward. At this time, the machine tool 10 functions as the machining device 12. At this time, the operator measures the axis 108 (reference Figure 7 The angle is input into the storage unit 62 as the installation angle of the blade 50 of the processing tool 48.

[0041] like Figure 4As shown, the machining operation instruction unit 72 executes the machining program 84 to form a concave portion 96 of a predetermined depth in the workpiece 90. In this embodiment, the unmachined surface of the workpiece 90 is set as the reference plane 92, and the bottom surface 98 of the concave portion 96 is set as the machining surface 94.

[0042] The switching control unit 64 rotates the rotating plate 28 and directs the probe 52 downward, based on a switching signal output by the operator operating an operating device (not shown) or the end of the machining program 84. At this time, the machine tool 10 functions as the on-machine measuring device 14. The measuring unit 74 starts the execution of the measuring program 86 based on a measurement start signal output by the operator operating an operating device (not shown) or the end of the rotation of the rotating plate 28.

[0043] When the measurement procedure 86 is executed, Figure 4 As shown, the measuring unit 74 moves the probe 52 relatively to measure the height of the reference plane 92 and the height of the processing surface 94, and the determining unit 82 determines the tip position of the blade 50 of the processing tool 48 based on the measurement result obtained by the measuring unit 74. Figure 5 , explain the specific processing.

[0044] In step S1, the measuring unit 74 measures the height of the reference plane 92. Here, the measuring unit 74 (the measuring action instruction unit 76, the contact detection unit 78, and the height measurement unit 80) performs the following processing. The measuring action instruction unit 76 moves the worktable 20 relatively in the x-y plane so that the reference plane 92 approaches directly below the contact piece 54 of the probe 52. The position of the reference plane 92 close to the contact piece 54 is predetermined in the measurement program 86. Furthermore, the measuring action instruction unit 76 moves the rotating body 26 along the z-axis so that the contact piece 54 of the probe 52 approaches the reference plane 92. When the pressure value detected by the pressure sensor 56 exceeds the threshold value stored in the storage unit 62, the contact detection unit 78 detects that the contact piece 54 is in contact with the reference plane 92. At this time, the height measurement unit 80 stores the detection value detected by the z-axis encoder 36z in the storage unit 62 as the height of the reference plane 92. Furthermore, the measurement operation instruction unit 76 moves the rotating body 26 along the z-axis to move the contactor 54 of the probe 52 away from the reference plane 92 .

[0045] In step S2, the measuring unit 74 measures the height of the bottom surface 98 of the concave portion 96. The basic process is the same as that in step S1. The measurement operation instructing unit 76 relatively moves the worktable 20 in the x-y plane so that the concave portion 96 is positioned directly below the contact member 54 of the probe 52. The position of the concave portion 96 close to the contact member 54 is predetermined in the measurement program 86. Further, the measurement operation instructing unit 76 moves the rotating body 26 along the z-axis so that the contact member 54 of the probe 52 approaches the bottom surface 98 of the concave portion 96. The contact detection unit 78 detects that the contact member 54 is in contact with the bottom surface 98 when the pressure value detected by the pressure sensor 56 exceeds the threshold value stored in the storage unit 62. At this time, the height measuring unit 80 stores the detection value detected by the z-axis encoder 36z as the height of the bottom surface 98 in the storage unit 62. Further, the measurement operation instructing unit 76 moves the rotating body 26 along the z-axis so that the contact member 54 of the probe 52 moves away from the bottom surface 98 of the concave portion 96.

[0046] In step S3, the height measuring unit 80 calculates the height of the machining surface 94. In the first embodiment, the height measuring unit 80 uses the height of the bottom surface 98 measured in step S2 as the height of the machining surface 94.

[0047] In step S4, the determining unit 82 determines the tip position of the cutting edge 50. The determining unit 82 determines the tip position of the cutting edge 50 of the machining tool 48 based on the information of the machining depth specified in the machining program 84 during machining of the workpiece 90, the measured height of the reference plane 92, and the measured height of the machining surface 94. For example, if the machining depth is set to D1 in the machining program 84, and on the other hand, the difference between the height of the reference plane 92 and the height of the machining surface 94 is D2 (<D1), the tip position of the cutting edge 50 deviates upward by (D1 - D2). The determining unit 82 determines such a deviation. The determining unit 82 sends the information of the deviation, that is, the direction and depth of the deviation, to the position correction unit 70 of the machining control unit 66. The position correction unit 70 that has received the deviation information corrects the information of the tip position of the cutting edge 50 of the machining tool 48 stored in the storage unit 62.

[0048] [2.2. Second Embodiment]

[0049] A second embodiment for further improving the measurement accuracy of the first embodiment will be described. Here, an embodiment in which the machining apparatus 12 performs groove machining in accordance with the machining program 84 is assumed.

[0050] The machine tool 10 sequentially performs groove machining in which the cutting edge 50 of the machining tool 48 is brought into contact with the workpiece 90 and relatively moved in the first direction while offsetting the machining tool 48 by a predetermined pitch in the second direction intersecting the first direction. For example, the first direction is set as the backward direction and the second direction is set as the leftward direction. As Figure 6As shown in the figure, a V-groove 100 having a V-shaped cross section is formed on the bottom surface 98 of the concave portion 96 of the workpiece 90. The angle formed by the two wall surfaces 106 of the V-groove 100 is the same as the opening angle of the top of the blade 50. The V-groove 100 is formed along the moving trajectory of the blade 50 during the groove processing. That is, the V-groove 100 extends in the first direction and is continuously arranged in the second direction.

[0051] In the first embodiment, the height measuring unit 80 sets the detection value detected by the z-axis encoder 36z when the contact piece 54 of the probe 52 contacts the bottom surface 98 as the height (depth) of the processing surface 94, and determines the tip position of the blade 50 of the processing tool 48. In the case of this measurement method, in order to accurately determine the tip position of the blade 50, it is necessary to make the contact piece 54 of the probe 52 contact the deepest part 102 of the V-groove 100. However, when the contact piece 54 of the probe 52 is larger than the width (=pitch) of the V-groove 100, the contact piece 54 does not enter the V-groove 100. Therefore, the contact piece 54 of the probe 52 does not contact the deepest part 102.

[0052] Therefore, in the second embodiment, the height measuring unit 80 corrects the detection value detected by the z-axis encoder 36z to calculate the height of the processed surface 94. Specifically, the height measuring unit 80 calculates the depth of the V-groove 100 (the length from the top 104 to the deepest part 102), and adds the calculated value to the detection value detected by the z-axis encoder 36z. Here, the detection value detected by the z-axis encoder 36z is the height of the top 104 of the V-groove 100. For example, the height measuring unit 80 performs the following calculation.

[0053] [When the cross-sectional shape of the AV slot 100 is an isosceles triangle]

[0054] use Figure 7 , a method for calculating the depth of a V-groove 100 having an isosceles triangle cross-sectional shape is described. For example, when the blade 50 of the machining tool 48 is line-symmetrical about the axis 108 and the axis 108 of the machining tool 48 is perpendicular to the workpiece 90, the cross-sectional shape of the V-groove 100 is an isosceles triangle.

[0055] The height measuring unit 80 inputs information on the tip shape of the blade 50 of the machining tool 48 and information on the angle of the axis 108 of the machining tool 48 from the tool information 88, and determines whether the V-groove 100 is an isosceles triangle. When the V-groove 100 is an isosceles triangle, the height measuring unit 80 calculates the depth of the V-groove 100 using the following formula (1).

[0056] D=(P / 2)×tan{90-(θ1 / 2)}…(1)

[0057] θ1: the opening angle of the tip of the blade 50 (known from the tool information 88)

[0058] P: Pitch of V-groove 100 (known from machining program 84)

[0059] D: Depth of V groove 100

[0060] The height measuring unit 80 adds the depth (D) of the V groove 100 calculated by the above formula (1) to the detection value detected by the z-axis encoder 36z, and uses the calculation result as the height of the processed surface 94. Here, the addition means adding the calculation result to the measured height in the depth direction.

[0061] [Case in which the cross-sectional shape of the BV groove 100 is not an isosceles triangle]

[0062] use Figure 8 , a method for calculating the depth of a V-groove 100 whose cross-sectional shape is not an isosceles triangle is described. For example, when the machining tool 48 is mounted on the machining device 12 in such a manner that the axis 108 is tilted relative to the workpiece 90 even if the blade 50 of the machining tool 48 is line symmetrical about the axis 108 as the center, the cross-sectional shape of the V-groove 100 is a triangle other than an isosceles triangle.

[0063] The height measuring unit 80 inputs information on the shape of the tip of the blade 50 of the machining tool 48 and information on the angle of the axis 108 of the machining tool 48 from the tool information 88, and determines whether the V-groove 100 is an isosceles triangle. If it is determined that the V-groove 100 is not an isosceles triangle, the depth of the V-groove 100 is calculated by the following formula (2).

[0064] D=P×tanθ2×tanθ3 / (tanθ2+tanθ3)…(2)

[0065] θ2=90-{(θ1 / 2)-θ0}…(3)

[0066] θ3=90-{(θ1 / 2)+θ0}…(4)

[0067] θ0: Angle of axis 108 (known from tool information 88)

[0068] θ1: the opening angle of the tip of the blade 50 (known from the tool information 88)

[0069] P: Pitch of V-groove 100 (known from machining program 84)

[0070] D: Depth of V groove 100

[0071] [Calculation process of formula (2)]

[0072] D is represented by the following 2 formulas.

[0073] D=L×tanθ2

[0074] D=(P-L)×tanθ3

[0075] According to the above formula 2, L is represented by the following formula.

[0076] L=(P×tanθ3) / (tanθ2+tanθ3)

[0077] thus,

[0078] D=P×tanθ2×tanθ3 / (tanθ2+tanθ3)

[0079] The height measuring unit 80 adds the depth (D) of the V-groove 100 calculated by the above formula (2) to the detection value detected by the z-axis encoder 36 z and uses the calculation result as the height of the processed surface 94 .

[0080] In addition, the depth (D) of the V-groove 100 can be calculated by the following equations (5) and (6) instead of the above equation (2).

[0081] D=P×sinθ3×cos(θ1+θ3) / sinθ1…(5)

[0082] D=P×(1+tanθ1 / 2)×tanθ0 / 2tan(θ1 / 2)…(6)

[0083] [2.3. Third embodiment]

[0084] A third embodiment will be described which can further improve the measurement accuracy of the second embodiment.

[0085] The second embodiment described above is a method for calculating the height of the processing surface 94 when the detection value detected by the z-axis encoder 36z is assumed to be the height of the top 104 of the V-groove 100. Fig. 9 As shown, a part of the contact piece 54 of the probe 52 sometimes enters the V groove 100. In this case, the detection value detected by the z-axis encoder 36z is detected as a height slightly deeper than the height of the top 104 of the V groove 100. Thus, in the second embodiment, there is a possibility that a slight error is included. In the third embodiment, the measuring unit 74 performs the following processing to reduce the error.

[0086] like Fig.10As shown, the measurement operation instruction unit 76 controls the y-axis servo motor 34y to repeat the relative movement and stop of the probe 52 in the second direction at predetermined intervals. The measurement operation instruction unit 76 controls the z-axis servo motor 34z at each position where the y-axis servo motor 34y is stopped, so that the contact member 54 contacts the processing surface 94. The height measurement unit 80 stores the detection value detected by the z-axis encoder 36z in the storage unit 62. In the case where the interval between two adjacent measurement positions is other than the pitch of the V-groove 100, a plurality of different detection values ​​are stored. The height measurement unit 80 selects the detection value indicating the shallowest height from the stored detection values ​​and sets it as the height of the top 104 of the V-groove 100. The height measurement unit 80 adds the depth (D) of the V-groove 100 calculated by the method described in the second embodiment to the height of the top 104 of the V-groove 100 selected, and uses the calculation result as the height of the processing surface 94.

[0087] [2.4. Fourth embodiment]

[0088] A fourth embodiment that can further improve the measurement accuracy of the third embodiment will be described.

[0089] like Fig.11 As shown, the measurement operation instruction unit 76 controls the y-axis servo motor 34y and the z-axis servo motor 34z to make the contact piece 54 of the probe 52 contact the processing surface 94 and make it move relatively in the second direction. In order to improve the accuracy, it is necessary to make the movement amount at least greater than the pitch of the V-groove 100. When the probe 52 moves relatively, the height measurement unit 80 stores the detection value detected by the z-axis encoder 36z in the storage unit 62. The detection value is a value that increases and decreases continuously. The height measurement unit 80 selects the detection value indicating the shallowest height among the stored detection values ​​and sets it as the height of the top 104 of the V-groove 100.

[0090] [3. Modifications]

[0091] In the above embodiment, the machine tool 10 moves the table 20 along the xy plane and moves the rotating body 26 along the z axis. However, the machine tool 10 may move either the table 20 or the rotating body 26 along the x axis, the y axis, or the z axis.

[0092] The machine tool 10 has one set of tool mounting parts 46 on the rotating plate 28, which supports one machining tool 48. However, the machine tool 10 may also have a plurality of sets of tool mounting parts 46 on the rotating plate 28, which support two or more machining tools 48. In addition, a tool replacement device may be provided, which approaches the machine tool 10, takes out the machining tool 48 from the tool storage part, and mounts it on the tool mounting part 46.

[0093] Instead of using the workpiece 90, a dummy workpiece may be used. In addition, the on-machine measuring device 14 may perform on-machine measurement on the workpiece 90 processed by another device to determine the tip position of the blade 50 of the processing tool 48 in the device. In addition, the reference plane 92 may also be a surface processed by another processing tool 48.

[0094] [4. Inventions derived from embodiments]

[0095] Hereinafter, the invention that can be grasped from the above-mentioned embodiment and modified examples will be described.

[0096] The first scheme of the present invention is an on-machine measuring device 14, which determines the top position of the blade 50 of the processing tool 48 arranged on the processing device 12, and the on-machine measuring device 14 comprises: a measuring unit 74, which measures the height of the reference plane 92 that has not been processed by the processing tool 48 and the height of the processing surface 94 processed by the processing tool 48 in the processing workpiece 90 processed by the processing tool 48; and a determining unit 82, which determines the top position of the blade 50 of the processing tool 48 based on the information of the processing depth specified when processing the processing workpiece 90 and the height of the reference plane 92 and the height of the processing surface 94 measured by the measuring unit 74.

[0097] According to the above configuration, the actual machining depth is measured by calculating the difference between the height of the reference plane 92 and the height of the machining surface 94, and the tip position of the blade 50 of the machining tool 48 in the machining device 12 is determined by comparing the machining depth with the machining depth specified during machining. The actual machining depth can be measured by a probe 52 or the like. Therefore, the tip position of the blade 50 can be measured regardless of the material of the machining tool 48.

[0098] In the first scheme of the present invention, the processing device 12 may also be configured to offset the processing tool 48 by a predetermined spacing in a second direction (for example, a left direction) intersecting the first direction, while performing groove processing to make the blade 50 of the processing tool 48 abut against the processing workpiece 90 and move it relatively in the first direction (for example, a rear direction), thereby forming a recess 96 of the processing depth in the processing workpiece 90, and the bottom surface 98 of the recess 96 has a plurality of V-grooves 100 with a cross-sectional shape consistent with the top end shape of the blade 50, extending in the first direction and continuously arranged in the second direction.

[0099] In the first embodiment of the present invention, it may also include: a probe 52 having a contact piece 54 that is larger than the width of the V-groove 100; a first motor (z-axis servo motor 34z) that causes the probe 52 to move relative to the workpiece 90 and the workpiece 90; and a first rotational position sensor (z-axis encoder 36z) that detects the rotational position of the first motor, and when the measuring unit 74 controls the first motor to bring the probe 52 close to the reference plane 92 so that the contact piece 54 contacts the reference plane 92, the measuring unit 74 calculates the height of the reference plane 92 based on the detection value detected by the first rotational position sensor, and when the measuring unit 74 controls the first motor to bring the probe 52 close to the processing surface 94 so that the contact piece 54 contacts the processing surface 94, the measuring unit 74 calculates the height of the processing surface 94 based on the detection value detected by the first rotational position sensor, the information of the predetermined spacing, and the information of the top shape of the blade 50.

[0100] In the first embodiment of the present invention, it may also include: a second motor (y-axis servo motor 34y), which causes the probe 52 to move relatively in the second direction (for example, the left direction); and a second rotational position sensor (y-axis encoder 36y), which detects the rotational position of the second motor, and the measuring unit 74 controls the second motor to cause the probe 52 to move relatively in the second direction, and calculates the height of the processing surface 94 based on the detection value indicating the shallowest height among the detection values ​​detected by the second rotational position sensor at multiple positions, the information of the predetermined spacing, and the information of the top shape of the blade 50.

[0101] According to the above configuration, a fine V-groove 100 is formed on the processing surface 94 due to the tip shape of the blade 50, and even if the contact piece 54 of the probe 52 cannot contact the deepest part 102 of the V-groove 100, the height of the deepest part 102 can be calculated. Therefore, the height of the processing surface 94 can be accurately obtained. As a result, the tip position of the blade 50 of the processing tool 48 can be accurately determined.

[0102] In the first embodiment of the present invention, it may also include: a second motor (y-axis servo motor 34y), which causes the probe 52 to move relatively in the second direction (for example, the left direction); and a second rotational position sensor (y-axis encoder 36y), which detects the rotational position of the second motor. The measuring unit 74 controls the second motor to make the contact piece 54 of the probe 52 contact the processing surface 94 and move it relatively in the second direction. The height of the processing surface 94 is calculated based on the detection value indicating the shallowest height among the detection values ​​detected by the second rotational position sensor, the information of the predetermined spacing, and the information of the top shape of the blade 50.

[0103] According to the above structure, a fine V-groove 100 caused by the tip shape of the blade 50 is formed on the processing surface 94, and even if the contact piece 54 of the probe 52 cannot contact the deepest part 102 of the V-groove 100, the height of the deepest part 102 can be calculated. In particular, the depth from the top 104 of the V-groove 100 to the deepest part 102 can be accurately calculated. Therefore, the height of the processing surface 94 can be more accurately obtained. As a result, the tip position of the blade 50 of the processing tool 48 can be determined more accurately.

[0104] A second aspect of the present invention is a machine tool 10 including the on-machine measuring device 14 according to the first aspect.

[0105] The third scheme of the present invention is an on-machine measurement method, which determines the top position of the blade 50 of the processing tool 48 arranged in the processing device 12, and the on-machine measurement method comprises: a measuring process, measuring the height of the reference plane 92 that has not been processed by the processing tool 48 and the height of the processing surface 94 processed by the processing tool 48 in the processing workpiece 90 processed by the processing tool 48; and a determination process, based on the information of the processing depth specified when processing the processing workpiece 90 and the height of the reference plane 92 and the height of the processing surface 94 measured in the measuring process, determine the top position of the blade 50 of the processing tool 48.

[0106] According to the above configuration, the actual machining depth is measured by calculating the difference between the height of the reference plane 92 and the height of the machining surface 94, and the tip position of the blade 50 of the machining tool 48 in the machining device 12 is determined by comparing the machining depth with the machining depth specified during machining. The actual machining depth can be measured by a probe 52 or the like. Therefore, the tip position of the blade 50 can be measured regardless of the material of the machining tool 48.

[0107] In the third scheme of the present invention, the processing device 12 can also be configured to offset the processing tool 48 by a predetermined interval in a second direction (for example, a left direction) intersecting the first direction, while sequentially performing groove processing in which the blade 50 of the processing tool 48 abuts against the processing workpiece 90 and moves relatively in the first direction (for example, a rear direction), thereby forming a recess 96 of the processing depth in the processing workpiece 90, and the bottom surface 98 of the recess 96 has a plurality of V-grooves 100 with a cross-sectional shape consistent with the top end shape of the blade 50, extending in the first direction and continuously arranged in the second direction.

[0108] In the third embodiment of the present invention, it may also include: a probe 52 having a contact piece 54 that is larger than the width of the V-groove 100; a first motor (z-axis servo motor 34z) that causes the probe 52 to move relative to the workpiece 90 and the workpiece 90; and a first rotational position sensor (z-axis encoder 36z) that detects the rotational position of the first motor, and the measuring process includes the following processes: when the first motor is controlled to bring the probe 52 close to the reference plane 92 so that the contact piece 54 contacts the reference plane 92, the height of the reference plane 92 is calculated based on the detection value detected by the first rotational position sensor; and when the first motor is controlled to bring the probe 52 close to the processing surface 94 so that the contact piece 54 contacts the processing surface 94, the height of the processing surface 94 is calculated based on the detection value detected by the first rotational position sensor, the information of the predetermined spacing, and the information of the top shape of the blade 50.

[0109] In the third scheme of the present invention, it may also include: a second motor (y-axis servo motor 34y), which causes the probe 52 to move relatively in the second direction (for example, the left direction); and a second rotational position sensor (y-axis encoder 36y), which detects the rotational position of the second motor, and the measuring process includes the following steps: controlling the second motor to cause the probe 52 to move relatively in the second direction, and calculating the height of the processing surface 94 based on the detection value indicating the shallowest height among the detection values ​​detected by the second rotational position sensor at multiple positions, the information of the predetermined spacing, and the information of the top shape of the blade.

[0110] According to the above configuration, a fine V-groove 100 is formed on the processing surface 94 due to the tip shape of the blade 50, and even if the contact piece 54 of the probe 52 cannot contact the deepest part 102 of the V-groove 100, the height of the deepest part 102 can be calculated. Therefore, the height of the processing surface 94 can be accurately obtained. As a result, the tip position of the blade 50 of the processing tool 48 can be accurately determined.

[0111] In the third scheme of the present invention, it may also include: a second motor (y-axis servo motor 34y), which causes the probe 52 to move relatively in the second direction (for example, the left direction); and a second rotational position sensor (y-axis encoder 36y), which detects the rotational position of the second motor, and the measuring process includes the following processes: controlling the second motor to make the contact piece 54 of the probe 52 contact the processing surface 94 and move it relatively in the second direction, and calculating the height of the processing surface 94 based on the detection value indicating the shallowest height among the detection values ​​detected by the second rotational position sensor, the information of the predetermined spacing, and the information of the top shape of the blade 50.

[0112] According to the above structure, a fine V-groove 100 caused by the tip shape of the blade 50 is formed on the processing surface 94, and even if the contact piece 54 of the probe 52 cannot contact the deepest part 102 of the V-groove 100, the height of the deepest part 102 can be calculated. In particular, the depth from the top 104 of the V-groove 100 to the deepest part 102 can be accurately calculated. Therefore, the height of the processing surface 94 can be more accurately obtained. As a result, the tip position of the blade 50 of the processing tool 48 can be determined more accurately.

[0113] Furthermore, the on-machine measuring device, the machine tool, and the on-machine measuring method of the present invention are not limited to the above-described embodiments and modifications, and it is needless to say that various configurations can be employed without departing from the gist of the present invention.

Claims

1. An on-machine measuring device for determining the tip position of a cutting edge of a machining tool provided in a machining device, the on-machine measuring device comprising: a measuring unit that measures a height of a reference plane not processed by the processing tool and a height of a processing surface processed by the processing tool in a processing workpiece in which a recessed portion having a predetermined depth is processed by the processing tool; and a determination unit that determines the tip position of the blade of the machining tool based on information on a machining depth specified when machining the workpiece and the height of the reference plane and the height of the machining surface measured by the measuring unit, The processing device shifts the processing tool by a predetermined pitch in a second direction intersecting the first direction, and sequentially performs groove processing by making the cutting edge of the processing tool contact the processing workpiece and relatively move the cutting tool in the first direction, thereby forming the recessed portion of the processing depth in the processing workpiece. The bottom surface of the recessed portion has the processed surface in which a plurality of V-grooves having a cross-sectional shape that matches the shape of the tip of the blade extend in the first direction and are continuously arranged in the second direction.

2. The on-board measuring device according to claim 1, characterized in that: have: a probe having a contact piece larger than the width of the V-groove; a first motor that relatively moves the probe toward and away from the workpiece; and a first rotation position sensor for detecting a rotation position of the first motor, The measuring part When the first motor is controlled to bring the probe closer to the reference plane so that the contactor contacts the reference plane, a height of the reference plane is calculated based on a detection value detected by the first rotation position sensor. When the first motor is controlled to bring the probe close to the processing surface so that the contact member contacts the processing surface, the height of the processing surface is calculated based on the detection value detected by the first rotation position sensor, the information of the predetermined interval, and the information of the tip shape of the blade.

3. The on-board measuring device according to claim 2, characterized in that: have: a second motor that relatively moves the probe in the second direction; and a second rotational position sensor for detecting a rotational position of the second motor, The measuring unit controls the second motor to move the probe relatively in the second direction, and calculates the height of the processed surface based on the detection value indicating the shallowest height among the detection values ​​detected by the second rotational position sensor at multiple positions, the information of the predetermined spacing, and the information of the top shape of the blade.

4. The on-board measuring device according to claim 2, characterized in that: have: a second motor that relatively moves the probe in the second direction; and a second rotational position sensor for detecting a rotational position of the second motor, The measuring unit controls the second motor to make the contact piece of the probe contact the processing surface and move it relatively in the second direction, and calculates the height of the processing surface based on the detection value indicating the shallowest height among the detection values ​​detected by the second rotational position sensor, the information of the predetermined spacing, and the information of the top shape of the blade.

5. A machine tool, characterized in that: The machine tool includes the on-machine measuring device according to any one of claims 1 to 4.

6. An on-machine measurement method for determining the tip position of a cutting edge of a machining tool provided in a machining device, the on-machine measurement method comprising: a measuring step of measuring a height of a reference plane not processed by the processing tool and a height of a processing surface processed by the processing tool in a processing workpiece in which a recessed portion of a predetermined depth is processed by the processing tool; and a determining step of determining the tip position of the blade of the machining tool based on information of a machining depth specified when machining the workpiece and the height of the reference plane and the height of the machining surface measured in the measuring step, The processing device sequentially performs groove processing by causing the cutting edge of the processing tool to abut against the workpiece and relatively move the workpiece in the first direction while shifting the processing tool by a predetermined pitch in a second direction intersecting the first direction, thereby forming the recessed portion of the processing depth in the workpiece. The bottom surface of the recessed portion has the processed surface in which a plurality of V-grooves having a cross-sectional shape that matches the shape of the tip of the blade extend in the first direction and are continuously arranged in the second direction.

7. The on-board measurement method according to claim 6, characterized in that: have: a probe having a contact piece larger than the width of the V-groove; a first motor that relatively moves the probe toward and away from the workpiece; and a first rotation position sensor for detecting a rotation position of the first motor, The measuring process comprises the following steps: When the first motor is controlled to bring the probe closer to the reference plane so that the contactor contacts the reference plane, a height of the reference plane is calculated based on a detection value detected by the first rotation position sensor; as well as When the first motor is controlled to bring the probe closer to the processing surface so that the contact member contacts the processing surface, the height of the processing surface is calculated based on the detection value detected by the first rotation position sensor, the information of the predetermined interval, and the information of the tip shape of the blade.

8. The on-board measurement method according to claim 7, characterized in that: have: a second motor that relatively moves the probe in the second direction; and a second rotational position sensor for detecting a rotational position of the second motor, The measuring process includes the following steps: controlling the second motor to move the probe relatively in the second direction, and calculating the height of the processed surface based on the detection value indicating the shallowest height among the detection values ​​detected by the second rotational position sensor at multiple positions, the information of the predetermined spacing, and the information of the top shape of the blade.

9. The on-board measurement method according to claim 7, characterized in that: have: a second motor that relatively moves the probe in the second direction; and a second rotational position sensor for detecting a rotational position of the second motor, The measuring process includes the following steps: controlling the second motor to make the contact piece of the probe contact the processing surface and move it relatively in the second direction, and calculating the height of the processing surface based on the detection value indicating the shallowest height among the detection values ​​detected by the second rotational position sensor, the information of the predetermined spacing, and the information of the top shape of the blade.

Images