Cutting device

Abstract

The present invention provides a cutting device that suppresses input errors in processing conditions. The cutting device includes: a chuck table that holds a workpiece using a holding surface; a cutting unit that cuts the workpiece held by the chuck table using a cutting tool; a processing condition registration unit that registers processing conditions for processing the workpiece; a display panel that displays the processing conditions input using an input unit; and a control unit that controls each component. The shape and size of the workpiece and the cutting depth of the cutting tool are registered in the processing condition registration unit, and the control unit has a three-dimensional image data generation unit that simulates the machining of the workpiece under the processing conditions registered in the processing condition registration unit and generates three-dimensional stereoscopic image data of the machined workpiece. The control unit displays the stereoscopic image data on the display panel.

Description

Technical Field

[0001] The present invention relates to a cutting device. Background Art

[0002] There is known a cutting device (see Patent Document 1) that cuts and divides or forms grooves in various plate-shaped workpieces such as semiconductor wafers, glass substrates, and resin-encapsulated substrates using a cutting tool. An operator registers machining conditions for machining the workpiece in the cutting device, and the cutting tool machines the workpiece according to the machining conditions.

[0003] Patent Document 1: Japanese Patent Application Laid-Open No. 2003-197564

[0004] At this time, as the machining conditions, the shape and dimensions (width, thickness) of the workpiece, the thickness of the scribe tape, the cutting depth of the cutting tool, the pitch dimension (indexing dimension) of the grooves, etc. are registered. However, on the registration screen, the operator inputs numbers, so it is actually difficult to visualize the machining results (such as the shape after machining), and there is a possibility of inputting incorrect machining conditions. Therefore, although it is desired to set machining conditions for removing only the easily peelable front-side functional layer using a specific tool and then performing full cutting of the substrate using a different tool, there may be a problem as follows due to incorrect input of a single digit: If machining is actually performed, not only will the functional layer be removed, but the workpiece will be completely cut and the functional layer of the workpiece will be peeled off, etc. Summary of the Invention

[0005] Therefore, an object of the present invention is to provide a cutting device that suppresses incorrect input of machining conditions.

[0006] To solve the above problems and achieve the object, the cutting device of the present invention has: a chuck table that holds a workpiece using a holding surface; a cutting unit that cuts the workpiece held by the chuck table using a cutting tool; a machining condition registration unit that registers machining conditions for machining the workpiece; a display panel that displays the machining conditions input using an input unit; and a control unit that controls each component. In the machining condition registration unit, the shape and size of the workpiece and the cutting depth of the cutting tool are registered. The control unit has a three-dimensional image data generation unit that simulates the machining of the workpiece under the machining conditions registered in the machining condition registration unit and generates three-dimensional stereoscopic image data of the machined workpiece, and the control unit displays the three-dimensional image data on the display panel.

[0007] In the above cutting device, it is also possible that the display magnification of the three-dimensional image data can be arbitrarily adjusted.

[0008] In the above cutting device, it is also possible that the display angle of the stereoscopic image data can be adjusted arbitrarily.

[0009] The cutting device according to the invention of the present application has the effect of suppressing input errors of processing conditions. BRIEF DESCRIPTION OF THE DRAWINGS

[0010] Figure 1 is a perspective view of the cutting device according to the embodiment.

[0011] Figure 2 shows Figure 1 a perspective view of an example of a workpiece to be machined by the cutting device shown.

[0012] Figure 3 shows a machining condition registration screen displayed on the display panel of the cutting device shown in Figure 1 FIG.

[0013] Figure 4 shows a three-dimensional stereoscopic image data of the workpiece displayed on the display panel of the cutting device shown in Figure 1 FIG.

[0014] Figure 5 is a figure in which a part of the stereoscopic image data shown in Figure 4 FIG. is enlarged and displayed on the display panel.

[0015] Figure 6 is a figure in which a part of the stereoscopic image data shown in Figure 5 FIG. is further enlarged and displayed on the display panel.

[0016] Figure 7 is a cross-sectional view showing a state in which the workpiece is being cut by a cutting tool.

[0017] Figure 8 is a cross-sectional view showing a state in which the cutting of the workpiece by the cutting tool has been completed.

[0018] REFERENCE SIGNS

[0019] 1: Cutting device; 10: Chuck table; 11: Holding surface; 20: Cutting unit; 21: Cutting tool; 100: Control unit; 110: Machining condition registration unit; 120: Input unit; 130: Display panel; 140: Stereoscopic image data generation unit; 200: Workpiece; 401: Stereoscopic image data. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0020] With reference to the accompanying drawings, the embodiments for implementing the present invention will be described in detail. The present invention is not limited to the content described in the following embodiments. In addition, among the components described below, those that can be easily conceived by those skilled in the art and those that are substantially the same are included. In addition, the structures described below can be combined as appropriate. In addition, various omissions, substitutions, or changes in the structure can be made without departing from the gist of the present invention.

[0021] [Embodiment]

[0022] With reference to the drawings, a cutting device according to an embodiment of the present invention will be described. Figure 1 It is a perspective view of the cutting device according to the embodiment. Figure 2 It shows Figure 1 A perspective view of an example of the workpiece to be machined by the cutting device shown. Figure 3 It shows the Figure 1 A view showing a machining condition registration screen displayed on the display panel of the cutting device shown. Figure 4 It shows the Figure 1 A view showing three-dimensional stereoscopic image data of the workpiece to be machined displayed on the display panel of the cutting device shown. Figure 5 It is a Figure 4 View in which a part of the stereoscopic image data shown is enlarged and displayed by the display panel. Figure 6 It is a Figure 5 View in which a part of the stereoscopic image data shown is further enlarged and displayed by the display panel.

[0023] The cutting device 1 according to the embodiment is, for example, a device for cutting the workpiece 200 exemplified in Figure 2 . In the embodiment, the workpiece 200 to be machined by the cutting device 1 is a square workpiece having a plate shape that is rectangular when viewed from above, and is, for example, a glass substrate or a resin-encapsulated substrate. In the present invention, the workpiece 200 is not limited to the Figure 2 exemplified square workpiece, and may be, for example, a circular semiconductor wafer or the like, and in general, includes various plate-shaped workpieces. As shown in Figure 1 , a circular plate-shaped adhesive tape 210 larger than the workpiece 200 is adhered to the back surface of the workpiece 200, and an annular frame 211 is fixed to the front surface of the outer peripheral portion of the adhesive tape 210. Thus, the workpiece 200 is supported by the annular frame 211 via the adhesive tape 210. These workpiece 200, adhesive tape 210, and annular frame 211 are collectively referred to as the frame unit 220.

[0024] Figure 1The cutting device 1 shown holds the frame unit 220 having the workpiece 200 by means of the chuck table 10 and cuts the workpiece 200 with the cutting tool 21 parallel to the X-axis direction. Specifically, as Figure 1 shown, the cutting device 1 includes: a chuck table 10 that sucks and holds the workpiece 200 by means of the holding surface 11; a cutting unit 20 that cuts the workpiece 200 held by the chuck table 10 with the cutting tool 21; a photographing unit 30 that photographs the workpiece 200 held by the chuck table 10; a control unit 100 that is a control component for controlling each component; an input unit 120 that is used to input machining conditions and the like; and a display panel 130 that at least displays the machining conditions input by the input unit 120 and the three-dimensional stereoscopic image data of the workpiece after machining.

[0025] The display panel 130 is an image display device such as a display screen, for example, a touch panel type display device. The display panel 130 is connected to the control unit 100. The display panel 130 includes display devices such as a liquid crystal display screen (LCD: Liquid Crystal Display), an organic EL display screen (OELD: Organic Electro-Luminescence Display), or an inorganic EL display screen (ILED: Inorganic Electro-Luminescence Display). The display panel 130 displays objects such as characters, images, marks, and graphics within the screen. In the embodiment, when the machining condition registration unit 110 of the control unit 100 accepts the machining conditions, the display panel 130 displays Figure 3 the machining condition registration screen 300 shown, and displays the Figure 4 , Figure 5 and Figure 6 three-dimensional stereoscopic image data 401 of the workpiece 200 shown generated by the stereoscopic image data generation unit 140 of the control unit 100.

[0026] In the embodiment, the input unit 120 is a touch screen arranged to overlap with the display device of the display panel 130. However, in the present invention, the touch screen constituting the input unit 120 may be arranged side by side with the display device or may be separated from the display device.

[0027] The input unit 120 detects contact or proximity of a finger, a pen, a stylus, etc. relative to the touch screen. The touch screen can detect positions on the touch screen when multiple fingers, pens, styli, etc. come into contact with or approach the touch screen. In the following description, the positions on the touch screen where multiple fingers, pens, styli, etc. detected by the touch screen come into contact with or approach the touch screen are referred to as "detection positions". The touch screen outputs the contact or proximity of the finger relative to the touch screen together with the detection positions to the control unit 100.

[0028] The control unit 100 discriminates the type of gesture of the operator operating the input unit 120 based on at least one of the contact or proximity detected by the touch screen of the input unit 120, the detection position, the change in the detection position, the duration of the contact or proximity, the interval at which the contact or proximity is detected, and the number of times the contact is detected. A gesture is an operation performed on the touch screen using a finger. Gestures discriminated by the control unit 100 via the touch screen include, for example, touch, long touch, release, swipe, click, double click, long tap, drag, slide, pinch in, and pinch out, but in the present invention, it is not limited to these.

[0029] In addition, as Figure 1 shown, the cutting device 1 has: an X-axis moving unit (not shown) that feeds the chuck table 10 in the X-axis direction parallel to the horizontal direction for machining; a Y-axis moving unit 32 that indexes and feeds the cutting unit 20 in the Y-axis direction parallel to the horizontal direction and perpendicular to the X-axis direction; and a Z-axis moving unit 33 that feeds the cutting unit 20 in the Z-axis direction parallel to the vertical direction perpendicular to both the X-axis direction and the Y-axis direction for plunge cutting.

[0030] The chuck table 10 is disk-shaped, and the holding surface 11 for holding the workpiece 200 is formed of porous ceramics or the like. The holding surface 11 of the chuck table 10 is connected to a vacuum suction source (not shown), and the workpiece 200 placed on the holding surface 11 is attracted and held by suction through the vacuum suction source. In the embodiment, the chuck table 10 attracts and holds the workpiece 200 with an adhesive tape 210 interposed therebetween. In addition, two jigs 12 are provided on the outer peripheral side of the chuck table 10. The jigs 12 hold the annular frame 211 of the frame unit 220.

[0031] The cutting unit 20 is a cutting assembly to which a cutting tool 21 for cutting the workpiece 200 held by the chuck table 10 is detachably attached. The cutting unit 20 is respectively provided to be movable in the Y-axis direction relative to the workpiece 200 held by the chuck table 10 by the Y-axis moving unit 32 and to be movable in the Z-axis direction by the Z-axis moving unit 33.

[0032] AsFigure 1 As shown, the cutting unit 20 on one side is supported by the Y-axis moving unit 32, the Z-axis moving unit 33, etc. on one column portion 51 of the gantry-shaped support frame 5 erected from the apparatus main body 4. As Figure 1 shown, the cutting unit 20 on the other side is supported by the Y-axis moving unit 32, the Z-axis moving unit 33, etc. on the other column portion 52 of the support frame 5. In addition, the support frame 5 connects the upper ends of the column portions 51 and 52 to each other by a horizontal beam 53.

[0033] The cutting unit 20 can position the cutting tool 21 at any position on the holding surface 11 of the chuck table 10 by the Y-axis moving unit 32 and the Z-axis moving unit 33.

[0034] The cutting unit 20 includes: a spindle housing 22 which is arranged to be movable in the Y-axis direction and the Z-axis direction by the Y-axis moving unit 32 and the Z-axis moving unit 33; a spindle 23 which is rotatably arranged about its axis within the spindle housing 22; and a cutting tool 21 which is mounted on the spindle 23.

[0035] The photographing unit 30 has a photographing element for photographing the area to be divided of the workpiece 200 before cutting held by the chuck table 10. The photographing element is, for example, a CCD (Charge-Coupled Device) photographing element or a CMOS (Complementary MOS) photographing element. The photographing unit 30 photographs the workpiece 200 held by the chuck table 10 to obtain an image for performing alignment, that is, for aligning the workpiece 200 and the cutting tool 21, etc., and outputs the obtained image to the control unit 100.

[0036] In addition, the cutting apparatus 1 includes: a cassette elevator 40 which mounts a cassette 41 for storing the workpiece 200 before and after cutting and moves the cassette 41 in the Z-axis direction; a cleaning unit 50 which cleans the workpiece 200 after cutting; and a conveying unit (not shown) which moves the workpiece 200 in and out of the cassette 41 and conveys the workpiece 200 between the cassette 41, the chuck table 10, and the cleaning unit 50.

[0037] The control unit 100 controls the above-described components of the cutting device 1 respectively to cause the cutting device 1 to perform a machining operation on the workpiece 200. In addition, the control unit 100 is a computer, and the control unit 100 includes: an arithmetic processing device having a microprocessor such as a CPU (Central Processing Unit); a storage device having a memory such as a ROM (Read Only Memory) or a RAM (Random Access Memory); and an input / output interface device. The arithmetic processing device of the control unit 100 performs arithmetic processing in accordance with a computer program stored in the storage device, and outputs a control signal for controlling the cutting device 1 to the above-described components of the cutting device 1 via the input / output interface device.

[0038] In addition, as Figure 1 shown, the control unit 100 includes a machining condition registration unit 110, a stereoscopic image data generation unit 140, and a panel control unit 150.

[0039] The machining condition registration unit 110 displays the Figure 3 shown machining condition registration screen 300 on the display panel 130, accepts the input of the machining conditions of the cutting device 1, and registers the machining conditions. When the machining condition registration unit 110 accepts an operation for registering the machining conditions from the operator based on the detection result of the input unit 120, the Figure 3 shown machining condition registration screen 300 is displayed on the display panel 130.

[0040] The machining condition registration screen 300 is provided with a first condition input unit 310, a second condition input unit 320, and a third condition input unit 330. The first condition input unit 310 is used to input the shape of the workpiece 200 (represented as the workpiece shape in Figure 3 ) and various dimensions of the workpiece 200 (represented as dimensions in Figure 3 ). In the embodiment, as Figure 3 shown, the workpiece 200 is a square workpiece, so the first condition input unit 310 selects SQUARE (square) in the input field 311 for the workpiece shape for inputting the shape of the workpiece 200. In addition, in the embodiment, the length 81 in the X direction of the workpiece 200 is 80 mm, and the length 82 in the Y direction is 150 mm. Therefore, the first condition input unit 310 inputs 80 mm in the input field 312 of Ch1 for inputting the length 81, and inputs 150 mm in the input field 313 of Ch2 for inputting the length 82. In addition, in the embodiment, the thickness 83 in the Z direction of the workpiece 200 is 2 mm, and the thickness 84 of the adhesive tape 210 (refer to Figure 1 ) (refer toFigure 6 ) is 1 mm. Therefore, the first condition input unit 310 inputs 2 mm in the input field 314 for inputting the thickness of the workpiece with a thickness of 83, and inputs 1 mm in the input field 315 for inputting the thickness of the tape with a thickness of 84.

[0041] In addition, the second condition input unit 320 of the machining condition registration screen 300 is used to input the cutting prohibition range where cutting machining is prohibited on the workpiece 200. The cutting prohibition range refers to the non-cutting range provided at both ends in the Y direction. Specifically, as Figure 2 shown, when the -Y direction side is called the front side and the +Y direction side is called the rear side, in the embodiment, the cutting prohibition range 85 on the front side (-Y direction side) is as Figure 2 shown by the shaded line of the double-dot dash line in the figure, which is the range from the end on the -Y direction side (front side) to the length 86 = 20 mm toward the +Y direction side (rear side). In the embodiment, the cutting prohibition range 87 on the +Y direction side (rear side) is as Figure 2 shown by the shaded line of the double-dot dash line in the figure, which is the range from the end on the +Y direction side (rear side) to the length 88 of 10 mm toward the -Y direction side (front side). Therefore, the second condition input unit 320 inputs 20 mm in the input field 321 for inputting the length 86, and inputs 10 mm in the input field 322 for inputting the length 88.

[0042] Next, the third condition input unit 330 in the machining condition registration screen 300 is used to input the height of the cutting tool 21 from the holding surface 11 when performing cutting machining on the workpiece 200, the machining feed speed of the chuck table 10 in the X direction, the indexing feed amount in the Y direction, the number of cutting passes, the thickness of the cutting tool 21, etc. Specific descriptions are given below. Figure 3 As shown in the figure, the third condition input unit 330 can input the cutting machining determined by the height of the cutting tool 21 from the holding surface 11, the machining feed speed of the chuck table 10 in the X direction, the indexing feed amount in the Y direction, and the number of cutting passes in multiple stages, and a column 335 for determining the order of these multiple stages of cutting machining is set.

[0043] The third condition input unit 330 inputs in the height 331 for inputting the height of the cutting tool 21 from the holding surface 11 as Figure 6 shown in the figure, the height 91 from the holding surface 11 (the lower surface 215 of the adhesive tape 210) of the chuck table 10 of the cutting tool 21 of each cutting machining upward (-Z direction side) (refer to Figure 6)。In an embodiment, the thickness 84 of the adhesive tape 210 is 1 mm. Thus, the distance from the lower surface 215 to the upper surface 216 of the adhesive tape 210 is the thickness 84 = 1 mm. Accordingly, in the embodiment, when the height 91 of the cutting tool 21 from the holding surface 11 of the chuck table 10 is 1.2 mm, 1.2 mm is input in the height 331.

[0044] In other words, when the height of the cutting tool 21 from the holding surface 11 of the chuck table 10 is 1.2 mm, the cutting tool 21 is at a height 0.2 mm above the upper surface 216 of the adhesive tape 210. Further in other words, when the height 91 of the cutting tool 21 from the holding surface 11 of the chuck table 10 is 1.2 mm, the cutting tool 21 is at a height 1.8 mm below the upper surface 201 of the workpiece 200 in the downward direction (+Z direction side). Therefore, when the height 91 of the cutting tool 21 from the holding surface 11 of the chuck table 10 is 1.2 mm, the cutting depth of the cutting tool 21 and the depth of the cutting groove 235 of the workpiece 200 are 1.8 mm.

[0045] In addition, Figure 3 The feed rate 332 of the third condition input unit 330 shown inputs the speed when the cutting tool 21 is fed in the X direction during cutting. Figure 3 The Y indexing 333 of the third condition input unit 330 shown represents the distance in the Y direction by which the cutting tool 21 is moved in the Y direction in order to machine the next cutting groove adjacent in the Y direction after machining a specified one cutting groove. That is, after cutting forms one cutting groove 230 along the X direction, when machining the next cutting groove 230, the cutting tool 21 is moved in the Y direction relative to the workpiece 200, and the distance in the Y direction input to the Y indexing 333 is the amount of movement of the cutting tool 21 in the Y direction relative to the workpiece 200. The number 334 of the third condition input unit 330 inputs the number of times the cutting tool 21 moves in the Y direction based on the same condition of the Y indexing 333.

[0046] In the embodiment, the above Figure 3The machining conditions for the first stage (No.1) of the third condition input unit 330 shown are that the height 91 of the cutting tool 21 from the holding surface 11 is 1.2 mm, the feed rate of the cutting tool 21 is 100 mm / s, and the cutting tool 21 is fed 5 times in the Y direction with a indexing feed amount in the Y direction of 1 mm. The machining conditions for the second stage (No.2) are that the height 91 of the cutting tool 21 from the holding surface 11 is 1.1 mm, the feed rate of the cutting tool 21 is 100 mm / s, and the cutting tool 21 is fed 2 times in the Y direction with a indexing feed amount in the Y direction of 3 mm. The machining conditions for the third stage (No.3) of the cutting are that the height 91 of the cutting tool 21 from the holding surface 11 is 0.95 mm, the feed rate of the cutting tool 21 is 100 mm / s, and the cutting tool 21 is fed 1 time in the Y direction with a indexing feed amount in the Y direction of 5 mm. In addition, in the embodiment, the third condition input unit 330 inputs 0.05 mm in the tool edge thickness input column 336 for inputting the thickness of the cutting tool 21.

[0047] The machining condition registration unit 110 stores the values input to the respective columns 311, 312, 313, 314, 315, 321, 322, 331, 332, 333, 334, 336 of the machining condition registration screen 300 as machining conditions. The function of the machining condition registration unit 110 is realized by the arithmetic processing unit executing a program stored in the storage device and storing the input values as machining conditions in the storage device.

[0048] Next, the stereoscopic image data generation unit 140 will be described. In the stereoscopic image data generation unit 140, the machining of the workpiece 200 in the machining condition registration screen 300 registered by the simulation machining condition registration unit 110 is Figures 4 to 6 performed, and three-dimensional stereoscopic image data 401 of the machined workpiece 200 is generated and displayed on the display panel 130.

[0049] First, the stereoscopic image data generation unit 140 generates, as described above, stereoscopic image data 401 representing Figure 2 the workpiece 200 before machining as shown, based on the values input to the first condition input unit 310 and the second condition input unit 320 registered in the machining condition registration screen 300. When the stereoscopic image data generation unit 140 detects, based on the detection result of the input unit 120, an operation of the pre-machining simulation image display 340 for displaying the stereoscopic image data 400 of the workpiece 200 before machining set in the machining condition registration screen 300 on the display panel 130, the stereoscopic image data 400 is displayed on the display panel 130.

[0050] In addition, the three-dimensional image data generation unit 140 generates three-dimensional image data 401 representing the machined workpiece 200 shown in accordance with the values input to the first condition input unit 310, the second condition input unit 320, and the third condition input unit 330. The functions of the three-dimensional image data generation unit 140 are implemented by an arithmetic processing device executing a program stored in a storage device. Hereinafter, the content of the three-dimensional image data 401 will be specifically described. Figure 4 The three-dimensional image data generation unit 140 synthesizes the cutting grooves 230 formed under the machining conditions of the first-stage (No. 1) cutting process into the three-dimensional image data 401 according to the machining conditions of the first-stage (No. 1) cutting process. As shown in FIGS.

[0051] and Figure 4 and Figure 5 shown, the cutting grooves 230 in the three-dimensional image data 401 are five cutting grooves 231, 232, 233, 234, and 235 arranged from the -Y direction side (front side) toward the +Y direction side (rear side). The depth of the cutting groove 230 is 1.8 mm, the distance in the Y direction between adjacent cutting grooves in the Y direction is 1 mm, and the width is the same as the thickness of the cutting tool 21, which is 0.05 mm.

[0052] The three-dimensional image data generation unit 140 synthesizes the cutting grooves 240 formed under the machining conditions of the second-stage (No. 2) cutting process into the three-dimensional image data 401 according to the machining conditions of the second-stage (No. 2) cutting process. As shown in FIGS. Figure 4 and Figure 5 shown, the cutting grooves 240 in the three-dimensional image data 401 are two cutting grooves 241 and 242 arranged from the -Y direction side (front side) toward the +Y direction side (rear side). The depth of the cutting groove 240 is 1.9 mm, and the width is the same as the thickness of the cutting tool 21, which is 0.05 mm. In addition, the distance in the Y direction between the cutting groove 235 and the cutting groove 241 is 1 mm, and the distance in the Y direction between the cutting groove 241 and the cutting groove 242 is 3 mm.

[0053] The three-dimensional image data generation unit 140 synthesizes the cutting grooves 250 formed under the machining conditions of the third-stage (No. 3) cutting process into the three-dimensional image data 401 according to the machining conditions of the third-stage (No. 3) cutting process. As shown in FIG. Figure 4 shown, the cutting groove 250 in the three-dimensional image data 401 is one cutting groove 250. The depth of the cutting groove 250 is 2.05 mm, and the width is the same as the thickness of the cutting tool 21, which is 0.05 mm. That is, the cutting groove 250 cuts the workpiece 200 in the thickness direction. In addition, the distance in the Y direction between the cutting groove 242 and the cutting groove 250 is 3 mm.

[0054] The panel control unit 150 is configured to magnify or reduce the image displayed on the display panel 130 and change the orientation of the image displayed on the display panel 130 for display. The panel control unit 150 magnifies or reduces the image displayed on the display panel 130 for display and changes the orientation of the image displayed on the display panel 130 for display according to the gesture determined based on the detection result of the input unit 120.

[0055] Therefore, in the embodiment, when the panel control unit 150 detects a gesture of magnifying and displaying a part of the stereoscopic image data 401 based on the detection result of the input unit 120 overlapping with the display panel 130 displaying the stereoscopic image data 401 as Figure 4 shown, as exemplified in Figure 5 , a part of the stereoscopic image data 401 is magnified and displayed on the display panel 130. In addition, in the embodiment, when the panel control unit 150 detects a gesture of magnifying a part of the stereoscopic image data 401 and displaying it with the opposite orientation based on the detection result of the input unit 120 overlapping with the display panel 130 displaying the stereoscopic image data 401 as Figure 4 shown, as exemplified in Figure 6 , a part of the stereoscopic image data 401 is magnified and displayed on the display panel 130 with the opposite orientation. In this way, the panel control unit 150 can arbitrarily adjust the display magnification of the stereoscopic image data 400 and 401 displayed on the display panel 130, and can arbitrarily adjust the display angle of the stereoscopic image data 400 and 401 displayed on the display panel 130. The function of the panel control unit 150 is implemented by the arithmetic processing device executing the program stored in the storage device.

[0056] In this way, in the Figure 6 shown stereoscopic image data 401, it is possible to more clearly recognize that the depth of the cutting groove 235 is 1.8 mm, the width of the cutting groove 235 is 0.05 mm, and the thickness of the workpiece 200 is 2.0 mm.

[0057] In addition, when the display screen of the display panel 130 displays the Figure 4 , Figure 5 and Figure 6 shown stereoscopic image data 401, a return 600 for returning to the machining condition registration screen 300 is set. When the control unit 100 detects an operation of the return 600 on the display screen of the display panel 130 of the stereoscopic image data 401 according to the detection result of the input unit 120, the machining condition registration screen 300 is displayed on the display panel 130.

[0058] The cutting device 1 with the above structure starts from Figure 3The processing condition registration screen 300 shown registers each processing condition. When registering the processing conditions, the operator confirms Figure 4 , Figure 5 and Figure 6 the three-dimensional image data 401 shown and proceeds. The cutting device 1 registers the processing conditions, sets the cassette 41 containing the frame unit 220 with the workpiece 200 before processing in the cassette elevator 40. For example, when the operation of starting processing 342 on the processing condition registration screen 300 is detected, the processing operation starts.

[0059] During the processing operation, the frame unit 220 with the workpiece 200 is taken out from the cassette 41 and placed on the chuck table 10. The workpiece 200 is attracted and held on the holding surface 11 of the chuck table 10, and the ring-shaped frame 211 is held by the clamp 12. The workpiece 200 held by the chuck table 10 is photographed by the photographing unit 30, and alignment is performed, that is, the workpiece 200 and the cutting tool 21 are aligned. Among them, as will be described in detail later, the workpiece 200 is cut by the cutting tool 21. Then, after the workpiece 200 after cutting is cleaned by the cleaning unit 50, it is returned to the cassette 41. In this way, when all the workpieces 200 inside the cassette 41 are cut, the processing operation ends.

[0060] The following specifically describes the process of cutting the workpiece 200 with a cutting tool. Figure 7 is a cross-sectional view showing the state of cutting the workpiece with a cutting tool. Figure 8 is a cross-sectional view showing the state where the cutting of the workpiece by the cutting tool is completed.

[0061] As Figure 7 shown, the cutting tool 21 rotates around the rotation axis 24. When the rotation axis 24 is arranged parallel to the upper surface 201 of the workpiece 200, the cutting tool 21 is arranged perpendicular to the upper surface 201 of the workpiece 200. When the cutting unit 20 is lowered while maintaining the rotation axis 24 parallel to the upper surface 201, a cutting groove is formed from the upper surface 201 of the workpiece 200 downward. In Figure 7 , the state of processing the cutting groove 533 is shown. When cutting is performed according to the processing conditions in the processing condition registration screen 300 described in Figure 3 , a Figure 8 shown cutting groove is formed. Figure 4 and Figure 5 the cutting groove 230 in the three-dimensional image data 401 shown and Figure 8The cutting grooves 530 shown correspond. The cutting grooves 530 are five cutting grooves 531, 532, 533, 534, 535 provided from the -Y direction side (front side) toward the +Y direction side (rear side). The five cutting grooves 531, 532, 533, 534, 535 respectively correspond to the five cutting grooves 231, 232, 233, 234, 235 of the stereoscopic image data 401. Figure 4 and Figure 5 the cutting groove 240 of the stereoscopic image data 401 shown corresponds to Figure 8 the cutting grooves 540 shown. The two cutting grooves 541, 542 respectively correspond to the two cutting grooves 241, 242 of the stereoscopic image data 401. Figure 4 the cutting groove 250 of the stereoscopic image data 401 shown corresponds to Figure 8 the cutting grooves 550 shown.

[0062] As described above, the cutting device 1 of the present embodiment includes: a chuck table 10 that holds the workpiece 200 using the holding surface 11; a cutting unit 20 that cuts the workpiece 200 held by the chuck table 10 using a cutting tool 21; a machining condition registration unit 110 that registers machining conditions for machining the workpiece 200; a display panel 130 that displays the machining conditions input using the input unit 120; and a control unit 100 that controls each component. In the machining condition registration unit 110, the shape and size of the workpiece 200 and the cutting depth of the cutting tool 21 are registered. The control unit 100 has a stereoscopic image data generation unit 140 that generates three-dimensional stereoscopic image data 401 of the machined workpiece 200 by simulating the machining of the workpiece 200 under the machining conditions registered in the machining condition registration unit 110, and the control unit 100 displays the stereoscopic image data 401 on the display panel 130.

[0063] In this way, the three-dimensional stereoscopic image data 401 of the workpiece 200 to be machined according to the input machining conditions is displayed on the display panel 130. Therefore, by the operator visually recognizing the stereoscopic image data 401, the operator can intuitively determine whether the input machining conditions are correct or incorrect. That is, in the case of machining conditions with incorrect values input, the shape or size of the stereoscopic image data 401 is displayed differently from the correct shape or size, so it is intuitive and easy to notice incorrect machining conditions. Thus, according to the embodiment, input and registration of incorrect machining conditions are suppressed.

[0064] The display magnification of the stereoscopic image data 401 can be arbitrarily adjusted. Therefore, a smaller display part can be enlarged for easy observation, so that even for very fine machining, it is possible to more intuitively determine whether the machining conditions are correct or incorrect. For example, as described above, when it is desired toFigure 5 When the cutting groove 235 shown is further enlarged and the operator touches the part of the cutting groove 235 with a finger while specifying an arbitrary magnification, the Figure 6 magnified view shown is displayed. Thus, according to the embodiment, input errors in processing conditions are further suppressed.

[0065] Since the display angle of the stereoscopic image data 401 can be adjusted arbitrarily, it is easy to observe by changing the display angle of the determined display part, so that the details of the stereoscopic image data 400 can be accurately grasped, and it is possible to more intuitively judge whether the processing conditions are correct or incorrect. For example, when Figure 5 it is desired to change the display angle of the cutting groove 235 shown, when an arbitrary display angle is specified and the operator touches the part of the cutting groove 235 with a finger, as Figure 6 shown, a magnified view with the Figure 5 display angle changed is displayed. Thus, according to the embodiment, input errors in processing conditions are further suppressed.

[0066] In addition, the present invention is not limited to the above embodiments. That is, various modifications can be made and implemented without departing from the gist of the present invention.

Claims

1. A cutting device, comprising: A chuck table that holds a workpiece using a holding surface; A cutting unit that cuts the workpiece held by the chuck table using a cutting tool; A processing condition registration unit that registers processing conditions for processing the workpiece; A display panel that displays the processing conditions input using an input unit; And A control unit that controls each component, Wherein, In the processing condition registration unit, the shape and size of the workpiece, the cutting depth of the cutting tool, and a cutting prohibition range where cutting processing is prohibited on the workpiece are registered as the processing conditions; The control unit has a three-dimensional image data generation unit that simulates the processing of the workpiece under the processing conditions registered by the processing condition registration unit and generates three-dimensional stereoscopic image data of the processed workpiece; The control unit displays the stereoscopic image data on the display panel.

2. The cutting device according to claim 1, wherein The display magnification of the stereoscopic image data can be adjusted arbitrarily.

3. The cutting device according to claim 1 or 2, wherein The display angle of the stereoscopic image data can be adjusted arbitrarily.

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