Universal combined and thermally distributed micro mass flow meters for gases

Abstract

The present invention relates to a universal gas combined and heat-distributed micro mass flowmeter, comprising: a detection base, a control valve base, a bypass and a sensor, a flow control valve, a detection and temperature compensator, a flow control driver, a flow alarm display screen, a flow signal processor, a DB15 electrical interface, an RS485 interface and a gas selection switch. It has the advantages of being a modern industrial product, and can respectively realize the functions of measuring, displaying and alarming, measuring and controlling, and studying various measurement and control methods for various types of mass flow gases, and can realize the advantages of flexible module combined application according to user needs.

Description

Technical Field

[0001] The present invention relates to a universal combined and thermally distributed micro mass flow meter for gas. The user can implement mass flow detection, display, control and various method research on the intelligent thermally distributed mass flow device for existing gas according to the needs, belonging to the field of detection control and instrument technology. Background Art

[0002] Among the various parameters in modern industrial production and research, flow is one of the parameters that needs to be measured and controlled frequently. Flow is a dynamically changing component parameter. There are many types of fluids involved in flow measurement and control, such as single-phase fluids of gas and liquid and multiphase fluids of gas-liquid mixtures. There are many variables in the environmental factors in flow measurement and control, including environmental factors such as measurement temperature, pressure, flow and components. For example, the temperature of measurement and control is extensive and can be measured and controlled from high temperature to low temperature. The pressure during measurement and control can also be from high pressure to low pressure. The flow size of the measured fluid can change from a small flow to a large flow, etc. In addition, the measurement and control of mixed gas flow is a problem often encountered in the industrial production process, and it occupies a very important position in the field of measurement and control. Due to the complexity of flow measurement and control technology and the rapid development of science and technology, in the measurement and control of modern industrial production, newer and higher requirements for flow measurement and control are put forward. The current status of flow measurement and control is far from meeting the needs of production. Therefore, it is very important to study new mass flow measurement and control methods.

[0003] Thermal distributed mass flowmeter, referred to as thermal mass flowmeter, is a type of mass flowmeter that has developed rapidly in recent years. It is an instrument that measures the mass flow of fluid based on the principle of heat conduction and balance, using the heat exchange relationship between the flowing fluid and the external heating source. Compared with other mass flowmeters, thermal mass flowmeter is mainly used to measure the mass flow of low flow rate. Because there are no moving parts in its structure, the structure is strong, the pressure loss is small, the reliability is high, the mass flow can be measured in a vibrating or bumpy environment, and it is easy to install, so it can be used in the measurement and research of mass flow in a small space.

[0004] Thermal gas mass flow meters are mainly used to measure the following media, such as air, argon, hexafluoroethane, acetylene, ethylene, ethane, octafluoropropane, propylene, propane, octafluorocyclobutane, carbon tetrafluoride, methane, chlorine, carbon monoxide, carbon dioxide, hydrogen, hydrogen chloride, helium, butane, n-butane, isobutane, isobutylene, krypton, nitrogen, nitric oxide, nitrous oxide, neon, nitrogen trifluoride, ammonia, oxygen, sulfur hexafluoride, silicon tetrafluoride, silane, sulfur dioxide, blast furnace gas, coke oven gas, coal gas, phosgene, natural gas, liquefied petroleum gas, hydrogen peroxide, flue gas, fuel gas, biogas, compressed air, toluene and hydrogen sulfide and other gases.

[0005] Through a recent literature review, the current research in the field of thermal mass flowmeters at home and abroad is mainly in the following directions: improving the sensor structure of thermal mass flowmeters, improving measurement and control accuracy, in order to enhance environmental adaptability; using nonlinear modeling methods to achieve gas flow measurement in complex flow fields; using multi-sensor flow measurement and control methods to measure and control large diameters, irregular diameters and multiphase flows; gas micro-flow measurement; compensation algorithm research; using advanced signal processing technology and methods, and adopting various advanced algorithms; analyzing the impact of measurement environment and flow field distribution on accuracy; using non-immersion heating methods and temperature measurement methods to reduce the impact of measurement on gas flow velocity distribution; high-precision, large range ratio flow sensor research; or using a variety of devices to process the output signal of thermal mass flowmeters.

[0006] However, the thermal mass flowmeters currently produced at home and abroad are almost all integrated measurement and control products for modern industrial production, and each product is limited to the measurement and control of a certain gas. When colleges and universities, quality inspection institutes and research institutes plan to carry out research on inventions in the field of related measurement and control, they often need to redesign a thermal micro mass flowmeter, and these designed thermal micro mass flowmeters are only research devices and systems, which do not meet the requirements of modern industrial products.

[0007] Therefore, the present invention relates to a universal combined thermal micro mass flowmeter for gas, which is both a modern industrial product and a thermal mass flow research and development system. By adopting a flexible module combination method, users can implement detection, display, control and research on various technologies and methods for the existing gas mass flow according to their needs.

[0008] In summary, in the technical field, various techniques and methods are proposed to accurately study and measure the mass flow rate of a fluid that exhibits characteristics different from those of an ideal gas by considering the type of fluid whose mass flow rate is to be measured as described above. According to these techniques, it is possible to more accurately study and measure the mass flow rate of various gases in the form of modern industrial products by considering not only the type of gas whose mass flow rate is to be measured and controlled, but also various combinations when measuring and controlling the mass flow rate. Summary of the invention

[0009] The purpose of the present invention is to overcome the shortcomings of the prior art and provide a universal gas combined and thermally distributed micro mass flow meter in the form of a modern industrial product. It can respectively realize the functions of measurement, display and alarm, measurement and control, and research on various measurement and control methods for various types of mass flow gases, and can realize flexible module combined application according to user needs.

[0010] In order to achieve the above-mentioned purpose, the technical solution of the present invention is implemented as follows: it is a universal gas combined and thermally distributed micro mass flowmeter, characterized in that it includes: a detection base, a control valve base, a bypass and a sensor, a flow control valve, a detection and temperature compensator, a flow control driver, a flow alarm display screen, a flow signal processor, a DB15 electrical interface, an RS485 interface and a gas selection switch; wherein the control valve base is installed at the gas outlet of the detection base, the bypass and the sensor are installed on the detection base and connected to the detection base, and the flow control valve is installed on the control valve base; the input end of the detection and temperature compensator is connected to the bypass The circuit is electrically connected to the sensor, the output end of the detection and temperature compensator is electrically connected to the input end of the flow alarm display screen and the input end of the flow control driver respectively, the input and output ends of the detection and temperature compensator are electrically connected to the input and output ends of the flow signal processor and the input and output ends of the DB15 electrical interface respectively, the input and output ends of the flow control driver are electrically connected to the DB15 electrical interface and the input and output ends of the flow signal processor, the output end of the flow control driver is electrically connected to the input end of the flow control valve, and the input and output ends of the flow signal processor are electrically connected to the input and output ends of the RS485 interface and the input and output ends of the gas selection switch.

[0011] In the present technical solution, the detection base includes a shell, a turbulence filter and a laminar flow element; wherein the turbulence filter and the laminar flow element are embedded in the shell so that the gas passes through the turbulence filter and the laminar flow element in sequence; the bypass and sensor include a bypass measuring tube, a heating coil RH, an upstream sensor Rt1 and a downstream sensor Rt2, the heating coil RH, the upstream sensor Rt1 and the downstream sensor Rt2 are respectively wound around the outer wall of the bypass measuring tube, the heating coil RH is located in the middle of the bypass measuring tube, the upstream sensor Rt1 and the downstream sensor Rt2 are respectively located on both sides of the heating coil and are symmetrical to each other, the air inlet and the air outlet of the bypass measuring tube are respectively connected to the shell, the air inlet of the bypass measuring tube is located between the turbulence filter and the laminar flow element, and the air outlet of the bypass measuring tube is located between the laminar flow element and the air outlet of the detection base.

[0012] In the present technical solution, the detection and temperature compensator includes a resistor R1, a resistor R2, a flow detection circuit IC1, a temperature compensation circuit IC2, a heating power supply IC3, a power regulator IC4 and a CPU monitoring circuit IC5; wherein the resistor R1, the resistor R2 are connected with the upstream sensor Rt1 and the downstream sensor Rt2 to form a Whittens bridge circuit, the output end of the Whittens bridge circuit is electrically connected to the input end of the temperature compensation circuit IC2 and the input end of the flow detection circuit IC1, the input end of the Whittens bridge circuit is electrically connected to the output end of the upstream sensor Rt1 and the output end of the downstream sensor Rt2 of the bypass and sensor, and the output end of the temperature compensation circuit IC2 is connected to the emitter of the power tube Q1 through the resistor R3. It is also electrically connected to the input end of the Whittens bridge circuit. The output end of the flow detection circuit IC1 is electrically connected to the input end of the flow control driver, the input end of the flow alarm display screen and the input and output ends of the flow signal processor respectively. The input end of the flow detection circuit IC1 is also electrically connected to the output end of the CPU monitoring circuit IC5. The input end of the heating power supply IC3 is electrically connected to the heating coil RH of the detection and bypass sensor; the input end of the power regulator IC4 is electrically connected to the DB15 electrical interface, and the output end of the power regulator IC4 provides working power for the detection and temperature compensator; the input and output ends of the CPU monitoring circuit IC5 are electrically connected to the input and output ends of the flow control driver and the input and output ends of the flow signal processor.

[0013] In the present technical solution, the detection base, control valve base, bypass and sensor, flow control valve, detection and temperature compensator, flow control driver, flow alarm display screen, flow signal processor, DB15 electrical interface, RS485 interface and gas selection switch are combined to realize mass flow measurement, display and control of gas.

[0014] In the technical solution, the three components of the detection base, the bypass and sensor, and the detection and temperature compensator are combined to measure the gas mass flow rate.

[0015] In the present technical solution, the combination of the detection base, bypass and sensor, detection and temperature compensator and flow alarm display screen is used to measure and display the gas mass flow in real time.

[0016] In the present technical solution, the six components of the detection base, control valve base, bypass and sensor, flow control valve, detection and temperature compensator and flow control driver are combined to measure and control the gas mass flow.

[0017] In the present technical solution, the combination of the control valve base, the flow control valve and the flow control driver is used to provide users with a proposed new mass flow detection method and control research.

[0018] The advantages of the present invention compared with the prior art are: in the form of a modern industrial product, it can respectively realize the functions of measurement, display and alarm, measurement and control, and research of various measurement and control methods for various types of mass flow gases, and can realize flexible module combination application according to user needs. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 It is a structural block diagram of the present invention;

[0020] Figure 2 It is a structural block diagram of the detection and temperature compensator of the present invention in cooperation with other components;

[0021] Figure 3 It is a structural schematic diagram of the detection base of the present invention. DETAILED DESCRIPTION

[0022] The specific embodiments of the present invention are further described below in conjunction with the accompanying drawings. It should be noted that the description of these embodiments is used to help understand the present invention, but does not constitute a limitation of the present invention. In addition, the technical features involved in the various embodiments of the present invention described below can be combined with each other as long as they do not conflict with each other.

[0023] like Figures 1 to 3As shown, it is a universal combined and heat-distributed miniature mass flowmeter for gas, comprising: a detection base 1, a control valve base 2, a bypass and sensor 3, a flow control valve 4, a detection and temperature compensator 5, a flow control driver 6, a flow alarm display screen 7, a flow signal processor 8, a DB15 electrical interface 9, an RS485 interface 10 and a gas selection switch 11; wherein, the control valve base 2 is mounted at the gas outlet of the detection base 1, the bypass and sensor 3 is mounted on the detection base 1 and communicated with the detection base 1, and the flow control valve 4 is mounted on the control valve base 2; the input end of the detection and temperature compensator 5 is electrically connected to the bypass and sensor 3, The output end of the detection and temperature compensator 5 is electrically connected to the input end of the flow alarm display screen 7 and the input end of the flow control driver 6, respectively. The input and output ends of the detection and temperature compensator 5 are electrically connected to the input and output ends of the flow signal processor 8 and the input and output ends of the DB15 electrical interface 9, respectively. The input and output ends of the flow control driver 6 are electrically connected to the DB15 electrical interface 9 and the input and output ends of the flow signal processor 8. The output end of the flow control driver 6 is electrically connected to the input end of the flow control valve 4. The input and output ends of the flow signal processor 8 are electrically connected to the input and output ends of the RS485 interface 10 and the input and output ends of the gas selection switch 11.

[0024] When working, in the first working mode of the present invention, when the user only needs to measure the gas but does not need to control it, in the gas universal combined thermal distributed micro mass flowmeter, it only needs to include a detection base 1, a bypass and sensor 3, a detection and temperature compensator 5 and a DB15 electrical interface 9. The detection base 1 is only mechanically connected to the bypass and sensor 3, but not to the control valve base 2. The output end of the bypass and sensor 3 is electrically connected to the input end of the detection and temperature compensator 5, and the output end of the detection and temperature compensator 5 is electrically connected to the input end or output end of the DB15 electrical interface 9. The measured mass flow is output through the DB15 electrical interface 9, and the output voltage signal is 0-5VDC and the output current signal is 4-20mA; the second working mode of the present invention, as a further optimization scheme of a gas universal combined thermal distributed micro mass flowmeter described in the present invention, if the user needs to measure the gas and display the mass flow in real time, the second working mode of the present invention is based on the first working mode of the present invention, and the input end of the flow alarm display screen 7 is connected to the detection and The output end of the temperature compensator 5 is electrically connected, and the current mass flow and the accumulated mass flow measured can be displayed in real time through the flow alarm display screen 7; the third working mode of the present invention is based on the first working embodiment of the present invention, the control valve base 2 is mechanically connected with the detection base 1 and the flow control valve 4; the input end of the flow control driver 6 is electrically connected with the output end of the detection and temperature compensator 5 and the input end or output end of the DB15 electrical interface 9, and the input end of the flow control valve 4 is electrically connected with the output end of the flow control driver 6. The user inputs a given flow signal 0-5VDC or an input current signal of 4-20mA through the input end of the DB15 electrical interface 9. The flow control driver 6 generates a deviation signal based on the comparison between the given flow signal and the mass flow signal fed back from the output end of the detection and temperature compensator 5 to control and adjust the flow control valve 4, wherein the flow control valve 4 is an electromagnetic proportional control valve, and the control circuit of the flow control driver 6 controls the current applied to the electromagnetic coil to change the valve opening accordingly, thereby achieving the purpose of controlling the gas mass flow;The fourth working mode of the present invention is a further optimization scheme of a universal combined thermal distributed micro mass flowmeter for gas described in the present invention. If the user needs to measure and control the mass flow of any gas, the fourth working mode of the present invention is based on the third working mode of the present invention. The input end or output end of the flow signal processor 8 is electrically connected to the input end or output end of the detection and temperature compensator 5, the RS485 interface 10 and the gas selection switch 11 respectively. The input end or output end of the DB15 electrical interface 9 is electrically connected to the input end or output end of the detection and temperature compensator 5 and the flow control driver 6 respectively. The input end or output end of the RS485 interface 10 is electrically connected to the input end or output end of the flow signal processor 8. The output end of the gas selection switch 11 is electrically connected to the input end of the flow signal processor 8. The flow signal processor 8 and the gas selection switch 11 are electrically connected. The gas selection switch 11 is an eight-bit coded switch, and the gas selection switch 11 is pre-set according to the type of gas whose mass flow is to be measured and controlled. The mass flow parameters, such as gas conversion coefficient, minimum flow rate, flow rate zero point, pipeline diameter, medium coefficient, flow rate full speed, instrument address, flow calculation formula calibration parameters, etc., are stored in advance in the data storage unit of the mass flow signal processor. In the technical field, the thermal distributed micro mass flowmeter can realize the measurement and control of 256 kinds of gases; the fifth working mode of the present invention is a further optimization scheme of a gas universal combined thermal distributed micro mass flowmeter described in the present invention. If the user needs to study various algorithms such as measurement and control of any gas mass flow, the fifth working mode of the present invention is based on the fourth working mode of the present invention. The RS485 interface 10 transmits various measurement and control algorithm software compiled by the host computer PC to the CPU of the flow signal processor 8. The CPU of the flow signal processor 8 adopts the DSP digital processing chip TMS320F28335, which can carry out various measurement and control algorithm research. The thermal distributed micro mass flowmeter can realize the research of various measurement and control algorithms of 256 kinds of gases. ;

[0025] In this embodiment, the detection base 1 includes a shell 14, a turbulence filter 12 and a laminar flow element 13; wherein the turbulence filter 12 and the laminar flow element 13 are embedded in the shell 14 so that the gas passes through the turbulence filter 12 and the laminar flow element 13 in sequence; the bypass and sensor 3 include a bypass measuring tube 31, a heating coil RH, an upstream sensor Rt1 and a downstream sensor Rt2, wherein the heating coil RH, the upstream sensor Rt1 and the downstream sensor Rt2 are respectively wound around the outer wall of the bypass measuring tube 31, the heating coil RH is located in the middle of the bypass measuring tube 31, the upstream sensor Rt1 and the downstream sensor Rt2 are respectively located on both sides of the heating coil and are symmetrical to each other, the air inlet and the air outlet of the bypass measuring tube 31 are respectively connected to the shell 14, the air inlet of the bypass measuring tube 31 is located between the turbulence filter 12 and the laminar flow element 13, and the air outlet of the bypass measuring tube 31 is located between the laminar flow element 13 and the air outlet of the detection base 1.

[0026] In this embodiment, the detection and temperature compensator 5 includes a resistor R1, a resistor R2, a flow detection circuit IC1, a temperature compensation circuit IC2, a heating power supply IC3, a power regulator IC4 and a CPU monitoring circuit IC5. The flow detection circuit IC1, the temperature compensation circuit IC2, the heating power supply IC3, the power regulator IC4 and the CPU monitoring circuit IC5 can all adopt a Renesas RL78 / L13 single-chip microcomputer; wherein the resistor R1, the resistor R2 are connected with the upstream sensor Rt1 and the downstream sensor Rt2 to form a Whittens bridge circuit, the output end of the Whittens bridge circuit is electrically connected to the input end of the temperature compensation circuit IC2 and the input end of the flow detection circuit IC1, and the input end of the Whittens bridge circuit is electrically connected to the output end of the upstream sensor Rt1 and the output end of the downstream sensor Rt2 of the bypass and sensor 3, respectively. The output end of the temperature compensation circuit IC2 is also electrically connected to the input end of the Whittens bridge circuit after passing through the resistor R3 and the emitter of the power tube Q1. The output end of the flow detection circuit IC1 is electrically connected to the input end of the flow control driver 6, the input end of the flow alarm display screen 7 and the input and output ends of the flow signal processor 8 respectively. The input end of the flow detection circuit IC1 is also electrically connected to the output end of the CPU monitoring circuit IC5. The input end of the heating power supply IC3 is electrically connected to the heating coil RH of the detection and bypass sensor 3; the input end of the power regulator IC4 is electrically connected to the DB15 electrical interface 9, and the output end of the power regulator IC4 provides working power for the detection and temperature compensator 5; the input and output ends of the CPU monitoring circuit IC5 are electrically connected to the input and output ends of the flow control driver 6 and the input and output ends of the flow signal processor 8.

[0027] In this embodiment, the detection base 1, control valve base 2, bypass and sensor 3, flow control valve 4, detection and temperature compensator 5, flow control driver 6, flow alarm display screen 7, flow signal processor 8, DB15 electrical interface 9, RS485 interface 10 and gas selection switch 11 are combined to achieve mass flow measurement, display and control of 256 kinds of gases, and can carry out scientific research on various measurement and control algorithms proposed by users.

[0028] In this embodiment, the detection base 1, the bypass and sensor 3 and the detection and temperature compensator 5 are combined to measure the gas mass flow rate.

[0029] In this embodiment, the four components of the detection base 1, the bypass and sensor 3, the detection and temperature compensator 5 and the flow alarm display screen 7 are combined to measure the gas mass flow rate and display it in real time.

[0030] In this embodiment, the six components of the detection base 1, the control valve base 2, the bypass and sensor 3, the flow control valve 4, the detection and temperature compensator 5 and the flow control driver 6 are combined to measure and control the gas mass flow.

[0031] In this embodiment, the combination of the control valve base 2, the flow control valve 4 and the flow control driver 6 is used to provide users with a new type of mass flow detection method and control research.

[0032] The embodiments of the present invention are described in detail above with reference to the accompanying drawings, but the present invention is not limited to the described embodiments. For those skilled in the art, various changes, modifications, substitutions and deformations of these embodiments without departing from the principles and purposes of the present invention still fall within the scope of protection of the present invention.

Claims

1. A universal combined and thermally distributed micro mass flow meter for gases, characterized in that include: A detection base (1), a control valve base (2), a bypass and a sensor (3), a flow control valve (4), a detection and temperature compensator (5), a flow control driver (6), a flow alarm display screen (7), a flow signal processor (8), a DB15 electrical interface (9), an RS485 interface (10) and a gas selection switch (11); wherein the control valve base (2) is detachably mounted at the gas outlet of the detection base (1), the bypass and the sensor (3) are detachably mounted on the detection base (1) and are in communication with the detection base (1), and the flow control valve (4) is mounted on the control valve base (2); the input end of the detection and temperature compensator (5) is connected to the detection base (1). The bypass is electrically connected to the sensor (3), the output end of the detection and temperature compensator (5) is electrically connected to the input end of the flow alarm display screen (7) and the input end of the flow control driver (6), the input and output ends of the detection and temperature compensator (5) are electrically connected to the input and output ends of the flow signal processor (8) and the input and output ends of the DB15 electrical interface (9), the input and output ends of the flow control driver (6) are electrically connected to the DB15 electrical interface (9) and the input and output ends of the flow signal processor (8), the output end of the flow control driver (6) is electrically connected to the input end of the flow control valve (4), and the input and output ends of the flow signal processor (8) are electrically connected to the input and output ends of the flow signal processor (8). The input and output ends of the RS485 interface (10) and the input and output ends of the gas selection switch (11) are electrically connected; the detection base (1) comprises a housing (14), a turbulence filter (12) and a laminar flow element (13); wherein the turbulence filter (12) and the laminar flow element (13) are embedded in the housing (14) so ​​that the gas passes through the turbulence filter (12) and the laminar flow element (13) in sequence; the bypass and sensor (3) comprises a bypass measuring tube (31), a heating coil RH, an upstream sensor Rt1 and a downstream sensor Rt2; the heating coil RH, the upstream sensor Rt1 and the downstream sensor Rt2 are respectively wound on the outer wall of the bypass measuring tube (31); the heating coil RH is located in the middle of the bypass measuring tube (31), the upstream sensor Rt1 and the downstream sensor Rt2 are respectively located on both sides of the heating coil and are symmetrical to each other, the air inlet and the air outlet of the bypass measuring tube (31) are respectively connected to the shell (14), the air inlet of the bypass measuring tube (31) is located between the turbulence filter (12) and the laminar flow element (13), and the air outlet of the bypass measuring tube (31) is located between the laminar flow element (13) and the air outlet of the detection base (1); the detection and temperature compensator (5) includes a resistor R1, a resistor R2, a flow detection circuit IC1, a temperature compensation circuit IC2, a heating power supply IC3, a power regulator IC4 and a CPU monitoring circuit IC5;The resistors R1 and R2 are connected with the upstream sensor Rt1 and the downstream sensor Rt2 to form a Whittens bridge circuit. The output end of the Whittens bridge circuit is electrically connected to the input end of the temperature compensation circuit IC2 and the input end of the flow detection circuit IC1 respectively. The input end of the Whittens bridge circuit is electrically connected to the output end of the upstream sensor Rt1 and the output end of the downstream sensor Rt2 of the bypass and sensor (3). The output end of the temperature compensation circuit IC2 is also electrically connected to the input end of the Whittens bridge circuit after passing through the resistor R3 and the emitter of the power tube Q1. The output end of the flow detection circuit IC1 is electrically connected to the input end of the flow control driver (6), the input end of the flow alarm display screen (7) and the input and output ends of the flow signal processor (8). The input end of the flow detection circuit IC1 is also electrically connected to the output end of the CPU monitoring circuit IC5. The input end of the heating power supply IC3 is electrically connected to the detection and bypass sensor (3). The heating coil RH is electrically connected; the input end of the power regulator IC4 is electrically connected to the DB15 electrical interface (9), and the output end of the power regulator IC4 provides working power for the detection and temperature compensator (5); the input and output ends of the CPU monitoring circuit IC5 are electrically connected to the input and output ends of the flow control driver (6) and the input and output ends of the flow signal processor (8); the detection base (1), the control valve base (2), the bypass and sensor (3), the flow control valve (4), the detection and temperature compensator (5), the flow control driver (6), the flow alarm display (7), the flow signal processor (8), the DB15 electrical interface (9), the RS485 interface (10) and the gas selection switch (11) are combined to measure, display and control the mass flow of the gas; the detection base (1), the bypass and sensor (3) and the detection and temperature compensator (5) are combined to measure the mass flow of the gas. ; 2. A universal combined and thermally distributed gas micro mass flowmeter according to claim 1, characterized in that The four components of the detection base (1), the bypass and sensor (3), the detection and temperature compensator (5) and the flow alarm display screen (7) are combined to measure the gas mass flow rate and display it in real time.

3. A universal combined and thermally distributed micro mass flow meter for gases according to claim 1, characterized in that The six components of the detection base (1), the control valve base (2), the bypass and sensor (3), the flow control valve (4), the detection and temperature compensator (5) and the flow control driver (6) are combined to measure and control the gas mass flow.

4. A universal combined and thermally distributed gas micro mass flowmeter according to claim 1, characterized in that The combination of the control valve base (2), the flow control valve (4) and the flow control driver (6) is used to provide users with a proposed new type of mass flow detection method and control research.

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