Hydraulic control thin film feedback throttling device and its testing method

Abstract

The present invention provides a liquid-controlled thin-film feedback throttling device, which includes a liquid-controlled thin-film feedback throttle. The liquid-controlled thin-film feedback throttle includes a throttle oil supply port for high-pressure oil to enter, a static pressure bearing oil supply port for high-pressure oil to flow into the static pressure bearing, an elastic metal diaphragm that can be elastically deformed under pressure, an upper pressure chamber and a lower pressure chamber separated by the elastic metal diaphragm, and the lower pressure chamber is in clearance seal with the elastic metal diaphragm; the upper pressure chamber is directly communicated with the throttle oil supply port, and the lower pressure chamber is communicated with the throttle oil supply port through a first-stage fixed throttle; the static pressure bearing oil supply port is communicated with the lower pressure chamber through a second-stage fixed throttle, and when the clearance between the lower pressure chamber and the elastic metal diaphragm becomes larger, the static pressure bearing oil supply port is communicated with the lower pressure chamber through this clearance. The structure of the present invention is simple, the application is flexible, and it is not restricted by working conditions.

Description

Technical Field

[0001] The present invention relates to the technical field of hydrostatic support, and particularly relates to a liquid-controlled thin-film feedback throttling device and a testing method thereof. Background Art

[0002] Equipment based on hydrostatic support technology mainly includes capillary restrictors, orifice restrictors, and thin-film feedback restrictors. Capillary restrictors and orifice restrictors are fixed restrictors, and their characteristic is that the liquid resistance of the restrictor is a fixed value and does not change with the change of load; the liquid-controlled thin-film feedback restrictor is a variable restrictor, and its characteristic is that the liquid resistance can change with the change of load, and the pressure can be adjusted with the change of load. The hydrostatic bearing using a variable restrictor has high oil film rigidity.

[0003] The traditional thin-film feedback restrictor adopts a two-way thin-film feedback method, and the elastic metal diaphragm acts bidirectionally. During use, a double thin-film feedback restrictor must be used to achieve the dynamic balance of the hydrostatic bearing. The thin-film feedback restrictor with a two-way thin-film feedback method is restricted by working conditions and is not flexible enough in application. Summary of the Invention

[0004] The present invention aims to solve the technical problem that the traditional thin-film feedback restrictor is restricted by working conditions due to the adoption of a two-way thin-film feedback method and is not flexible enough in application, and provides a liquid-controlled thin-film feedback throttling device and a testing method thereof.

[0005] To achieve the above object, the present invention adopts the following specific technical solutions:

[0006] The liquid-controlled thin-film feedback throttling device provided by the present invention includes a liquid-controlled thin-film feedback restrictor, which includes a restrictor oil supply port for high-pressure oil to enter, a hydrostatic bearing oil supply port for high-pressure oil to flow into the hydrostatic bearing, an elastic metal diaphragm that can elastically deform under pressure, an upper pressure chamber and a lower pressure chamber separated by the elastic metal diaphragm, and the lower pressure chamber is in clearance seal with the elastic metal diaphragm; the upper pressure chamber is directly communicated with the restrictor oil supply port, and the lower pressure chamber is communicated with the restrictor oil supply port through a first-stage fixed restrictor; the hydrostatic bearing oil supply port is communicated with the lower pressure chamber through a second-stage fixed restrictor, and when the clearance between the lower pressure chamber and the elastic metal diaphragm becomes larger, the hydrostatic bearing oil supply port is communicated with the lower pressure chamber through this clearance.

[0007] Preferably, the elastic metal diaphragm is elastically deformed by the pressure difference between the upper pressure chamber and the lower pressure chamber to close or increase the clearance between the lower pressure chamber and the elastic metal diaphragm.

[0008] Preferably, the pressure chamber is surrounded by a sealed upper housing and a lower housing, and the elastic metal diaphragm is installed between the upper housing and the lower housing to divide the pressure chamber into an upper pressure chamber and a lower pressure chamber.

[0009] Preferably, the center of the lower housing is an oil supply port for the hydrostatic bearing. An annular boss forming a closed loop protrudes from the oil supply port of the hydrostatic bearing. The elastic metal diaphragm and the upper housing enclose an upper pressure chamber. The elastic metal diaphragm, the lower housing and the boss enclose a lower pressure chamber. A clearance seal is formed between the boss and the elastic metal diaphragm.

[0010] Preferably, the upper housing and the lower housing are sealed by a sealing ring; the process holes of the upper housing and the lower housing are respectively sealed by sealing steel balls.

[0011] Preferably, a pressure measuring hole for monitoring the pressure of the upper pressure chamber is provided on the upper housing, and a plug is installed in the pressure measuring hole.

[0012] Preferably, the liquid-controlled thin-film feedback throttling device further includes a pressure measuring module fixed to the liquid-controlled thin-film feedback throttle. A sealing ring is used to seal between the liquid-controlled thin-film feedback throttle and the pressure measuring module. The pressure measuring module includes an oil supply interface, a hydrostatic bearing chamber, an oil drain groove, an oil drain port, a hydrostatic chamber oil supply port, an oil hole and a clearance oil return interface; wherein, the oil supply interface is communicated with the throttle oil supply port through the oil hole, the hydrostatic bearing chamber is communicated with the oil supply port of the hydrostatic bearing through the hydrostatic chamber oil supply port, and the oil drain groove is communicated with the clearance oil return interface through the oil drain port.

[0013] Preferably, an oil suction pump is installed at the clearance oil return interface.

[0014] Preferably, a hydrostatic bearing chamber pressure measuring interface for monitoring the pressure of the hydrostatic bearing chamber is provided on the pressure measuring module.

[0015] The test method of the liquid-controlled thin-film feedback throttling device provided by the present invention includes the following steps:

[0016] S1. After the high-pressure oil enters the liquid-controlled thin-film feedback throttle, it is divided into two paths. One path enters the upper pressure chamber, and the pressure of the upper pressure chamber is P0. The other path enters the lower pressure chamber through the first-stage fixed throttle, and the pressure of the lower pressure chamber is P1. The high-pressure oil in the lower pressure chamber enters the hydrostatic bearing chamber through the second-stage fixed throttle and the oil supply port of the hydrostatic bearing, and the pressure of the hydrostatic bearing chamber is P2, realizing the normal operation of the hydrostatic bearing in the hydrostatic bearing chamber; wherein, P1 < P0, P2 < P1;

[0017] S2. The pressure difference between the upper pressure chamber and the lower pressure chamber drives the elastic metal diaphragm to bend towards the lower pressure chamber, closes the gap between the elastic metal diaphragm and the lower pressure chamber to form a clearance seal, and is in a critical state;

[0018] S3. When the hydrostatic bearing bears a load, the internal pressure of the hydrostatic bearing chamber increases, the flow rate of the high-pressure oil entering the hydrostatic bearing chamber through the oil supply port of the hydrostatic bearing decreases, the pressure at the oil supply port of the hydrostatic bearing chamber increases, and the elastic metal diaphragm is pushed to bend towards the upper pressure chamber, increasing the gap between the elastic metal diaphragm and the lower pressure chamber;

[0019] S4. As the gap increases, the high-pressure hydraulic oil in the lower pressure chamber rapidly flows into the hydrostatic bearing chamber. At the same time, the pressure in the lower pressure chamber drops from P1 to P3, driving the elastic metal diaphragm to bend downward again towards the lower pressure chamber to close the gap. At this time, the internal pressure in the hydrostatic bearing chamber increases from P2 to P4 and is again in a critical state.

[0020] The present invention can achieve the following technical effects:

[0021] 1. When the hydrostatic bearing bears a load, the liquid-controlled thin-film feedback throttle provides auxiliary pressure support and flow output through the elastic deformation of the elastic metal diaphragm, enabling the stiffness of the hydrostatic bearing to exceed five times that of a capillary throttle or a small-hole throttle.

[0022] 2. The liquid-controlled thin-film feedback throttle adopts a one-way thin-film feedback method, that is, a self-feedback mode, which is flexible in application, not restricted by working conditions, and has a simple structure and low cost. Description of the Drawings

[0023] Figure 1 is a schematic diagram of the overall structure of a liquid-controlled thin-film feedback throttle device according to an embodiment of the present invention;

[0024] Figure 2 is a schematic diagram of the structure of a liquid-controlled thin-film feedback throttle according to an embodiment of the present invention;

[0025] Figure 3 is a schematic diagram of the structure of a pressure measurement module according to an embodiment of the present invention;

[0026] Figure 4 is a schematic flow diagram of a test method for a liquid-controlled thin-film feedback throttle device according to an embodiment of the present invention.

[0027] The reference numerals therein include: liquid-controlled thin-film feedback throttle 1, upper housing 101, elastic metal diaphragm 102, lower housing 103, sealing steel ball 104, throttle oil supply port 105, primary fixed throttle 106, secondary fixed throttle 107, hydrostatic bearing oil supply port 108, sealing ring 109, plug 110, upper pressure chamber 111, lower pressure chamber 112, gap 113, pressure measurement module 2, oil supply interface 201, oil hole 202, hydrostatic chamber oil supply port 203, hydrostatic bearing chamber 204, oil drain groove 205, oil drain port 206, gap oil return interface 207, screw hole 208, hydrostatic bearing chamber pressure measurement interface 209, screw 3. Detailed Embodiments

[0028] In order to make the objectives, technical solutions and advantages of the present invention more clearly understood, the present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and do not constitute a limitation to the present invention.

[0029] The liquid-controlled thin-film feedback throttling device provided by the embodiment of the present invention will be described in detail below.

[0030] Figure 1 The overall structure of the liquid-controlled thin-film feedback throttling device according to an embodiment of the present invention is shown.

[0031] As Figure 1 shown, the liquid-controlled thin-film feedback throttling device provided by the embodiment of the present invention includes: a liquid-controlled thin-film feedback throttle 1 and a pressure measurement module 2. The liquid-controlled thin-film feedback throttle 1 is fastened to the pressure measurement module 2 by screws 3. The liquid-controlled thin-film feedback throttle 1 adjusts the flow rate of the high-pressure oil flowing into the static pressure bearing in the pressure measurement module 2 by using a one-way thin-film feedback method, so that the static pressure bearing reaches dynamic balance.

[0032] The structures and working principles of the liquid-controlled thin-film feedback throttle 1 and the pressure measurement module 2 will be described in detail below.

[0033] Figure 2 The structure of the liquid-controlled thin-film feedback throttle according to an embodiment of the present invention is shown.

[0034] As Figure 2As shown in the figure, the hydraulically controlled thin-film feedback throttle 1 includes an upper housing 101, an elastic metal diaphragm 102, a lower housing 103, a sealing steel ball 104, a throttle oil supply port 105, a primary fixed throttle 106, a secondary fixed throttle 107, a static pressure bearing oil supply port 108, and a sealing ring 109. The upper housing 101 and the lower housing 103 are hermetically installed through the sealing ring 109, and the two enclose a pressure chamber. The elastic metal diaphragm 102 is installed between the upper housing 101 and the lower housing 103, separating the pressure chamber into an upper pressure chamber 111 and a lower pressure chamber 112. The upper pressure chamber 111 is directly connected to the throttle oil supply port 105. High-pressure oil flows into the upper pressure chamber 111 from the throttle oil supply port 105. The lower pressure chamber 112 is connected to the throttle oil supply port 105 through the primary fixed throttle 106. High-pressure oil enters the fixed throttle 106 from the throttle oil supply port 105 and enters the lower pressure chamber 112 after being depressurized by the primary fixed throttle 106. The static pressure bearing oil supply port 108 is connected to the lower pressure chamber 112 through the secondary fixed throttle 107. The high-pressure oil in the lower pressure chamber 112 further decreases in pressure through the secondary fixed throttle 107 and then flows into the static pressure bearing oil supply port 108. There is a gap 113 between the lower pressure chamber 112 and the elastic metal diaphragm 102. When this gap 113 is closed, a gap seal is formed, and the high-pressure oil in the lower pressure chamber 112 cannot flow into the static pressure bearing oil supply port 108 through this gap 113. When this gap 113 increases, the lower pressure chamber 112 is connected to the static pressure bearing oil supply port 108 through this gap 113, and the high-pressure oil in the lower pressure chamber 112 flows into the static pressure bearing oil supply port 108 through this gap 113.

[0035] More specifically, the center of the lower housing 103 is the static pressure bearing oil supply port 108. A closed-loop convex platform protrudes from the static pressure bearing oil supply port 108. There is a gap 113 between the convex platform and the elastic metal diaphragm 102, forming a gap seal. The elastic metal diaphragm 102 and the upper housing 101 enclose the upper pressure chamber 111. The elastic metal diaphragm 102, the lower housing 103, and the convex platform enclose the lower pressure chamber 112. Since the static pressure bearing oil supply port 108 occupies the area of the lower pressure chamber 112, the area of the lower pressure chamber 112 is smaller than the area of the upper pressure chamber 111.

[0036] The primary fixed throttle 106 and the secondary fixed throttle 107 are installed in the lower pressure chamber 112 and are used to gradually reduce the pressure of the high-pressure oil. The high-pressure oil first enters the lower pressure chamber 112 after being depressurized by the primary fixed throttle 106, and then flows to the static pressure bearing oil supply port 108 after being further depressurized by the secondary fixed throttle 107, realizing the normal operation of the static pressure bearing.

[0037] In an example of the present invention, the process holes of the upper housing 101 and the lower housing 103 are respectively sealed by the interference fit installation of the sealing steel ball 104.

[0038] In a specific embodiment of the present invention, the throttle oil supply ports 105 are respectively opened at corresponding positions on the upper housing 101 and the lower housing 103, and are used to connect the lower pressure chamber 112 and the upper pressure chamber oil supply 111 to supply oil to the lower pressure chamber 112 and the upper pressure chamber 111.

[0039] The high-pressure oil enters the hydraulic control thin-film feedback throttle 1 from the throttle oil supply port 105 and is divided into two paths. One path enters the upper pressure chamber 111, and the pressure of the high-pressure oil entering the upper pressure chamber 111 remains unchanged. The other path enters the lower pressure chamber 112 after passing through the first-stage fixed throttle 106 to reduce the pressure, and then flows to the static pressure bearing oil supply port 108 after passing through the second-stage fixed throttle 107 to reduce the pressure to the normal working pressure of the static pressure bearing.

[0040] Since the pressure in the upper pressure chamber 111 is greater than the pressure in the lower pressure chamber 112, and the force-bearing area of the upper pressure chamber 111 is greater than the force-bearing area of the lower pressure chamber 112, the elastic metal diaphragm 102 bends towards the lower pressure chamber 112 due to the pressure difference between the upper pressure chamber 111 and the lower pressure chamber 112, closing the gap 113 to form a gap seal. When the static pressure bearing bears a load, the pressure at the static pressure bearing oil supply port 108 increases, pushing the elastic metal diaphragm 102 to bend towards the upper pressure chamber 111.

[0041] The present invention realizes the closing or increasing of the gap seal 113 through the elastic deformation of the elastic metal diaphragm 102. Since only one elastic metal diaphragm 102 is used, the hydraulic control thin-film feedback throttle 1 is a one-way thin-film feedback mode, that is, a self-feedback mode. The hydraulic control thin-film feedback throttle 1 in the one-way thin-film feedback mode is simpler in structure, lower in cost, more flexible in application, and not restricted by working conditions compared with the control thin-film feedback throttle in the double-film feedback mode.

[0042] When the static pressure bearing bears a load, the hydraulic control thin-film feedback throttle provides auxiliary pressure support and flow output through the elastic deformation of the elastic metal diaphragm, so that the stiffness of the static pressure bearing exceeds 5 times that of the capillary throttle or the orifice throttle.

[0043] In order to monitor the pressure in the upper pressure chamber 111, a pressure measuring hole for monitoring the pressure in the upper pressure chamber 111 is opened on the upper housing 101, and a plug 110 is installed in the pressure measuring hole.

[0044] Figure 3 The structure of the pressure measuring module according to an embodiment of the present invention is shown.

[0045] As Figure 3As shown in the figure, the pressure measurement module 2 includes an oil supply interface 201, an oil hole 202, a static pressure chamber oil supply port 203, a static pressure bearing chamber 204, an oil drain groove 205, an oil drain port 206, a clearance oil return interface 207, and a screw hole 208. Screw holes 209 are opened at the four corners of the pressure measurement module 2 for tightening the screws 3 to realize the fixed connection between the pressure measurement module 2 and the hydraulic control thin-film feedback throttle 1. A seal ring 109 is used for sealing between the pressure measurement module 2 and the hydraulic control thin-film feedback throttle 1. The oil supply interface 201 is used to connect the outside with the throttle oil supply port 105, so that the high-pressure oil enters the throttle oil supply port 105 from the oil supply interface 201. The static pressure bearing is located in the static pressure bearing chamber 204. The static pressure chamber oil supply port 203 is used to connect the static pressure bearing chamber 204 with the static pressure bearing oil supply port 108. The high-pressure oil in the lower pressure chamber 112 flows into the static pressure bearing chamber 204 through the static pressure bearing oil supply port 108 and the static pressure chamber oil supply port 203 in sequence. The oil drain port 206 is used to connect the oil drain groove 205 with the clearance oil return interface 207. An oil suction pump is installed at the clearance oil return interface 207. The clearance oil drain of the static pressure bearing is collected in the oil drain groove 205 and flows to the oil drain port 206, and the clearance oil drain is pumped back to the hydraulic station oil tank through the oil suction pump.

[0046] In order to realize the pressure monitoring of the static pressure bearing chamber 204, a static pressure bearing chamber pressure measurement interface 209 is opened on the pressure measurement module 2.

[0047] The above content details the structure of the hydraulic control thin-film feedback throttling device provided by the present invention. Relative to the above structure, the present invention also provides a test method for the hydraulic control thin-film feedback throttling device. When performing an overall performance test on the hydraulic control thin-film feedback throttling device, the hydraulic control thin-film feedback throttling device needs to be installed on the test platform, that is, the hydraulic control thin-film feedback throttling device is installed on the test platform through the four screws that fasten the hydraulic control thin-film feedback throttle 1 and the pressure measurement module 2.

[0048] Figure 4 The test method of the hydraulic control thin-film feedback throttling device according to an embodiment of the present invention is shown.

[0049] As Figure 4 shown, the test method of the hydraulic control thin-film feedback throttling device provided by the embodiment of the present invention:

[0050] S1. After the high-pressure oil enters the thin-film feedback throttle, it is divided into two paths. One path enters the upper pressure chamber, and the pressure of the upper pressure chamber is P0. The other path enters the lower pressure chamber through the first-stage fixed throttle. The pressure of the lower pressure chamber is P1. The high-pressure oil in the lower pressure chamber enters the static pressure bearing chamber through the second-stage fixed throttle and the static pressure bearing oil supply port. The pressure of the static pressure bearing chamber is P2, realizing the normal operation of the static pressure bearing in the static pressure bearing chamber; wherein, P1 < P0, P2 < P1.

[0051] Combined with Figures 1 - 3, The high-pressure oil first enters the oil hole 202 through the oil supply interface 201 of the pressure measurement module 2, and then reaches the throttle oil supply port 105 of the thin-film feedback throttle 1 through the oil hole 202. At this time, the oil supply pressure is the system pressure P0. The high-pressure oil is separated into two paths. One path directly enters the upper pressure chamber 111 through the throttle oil supply port 105, and the pressure in the upper pressure chamber is P0. The other path enters the lower pressure chamber 112 after passing through the first-stage fixed throttle 106. Due to the damping effect, the pressure drops from P0 to P1. Part of the high-pressure oil in the lower pressure chamber 112 reaches the static pressure bearing oil supply port 108 after passing through the second-stage fixed throttle 107. Due to the damping effect, the pressure drops from P1 to P2 and flows into the static pressure bearing chamber 204 through the static pressure chamber oil supply port 203 of the pressure measurement module 2. At this time, the pressure P2 in the static pressure bearing chamber 204 enables the normal operation of the static pressure bearing.

[0052] The gap oil leakage of the static pressure bearing is collected in the oil leakage groove 205 of the pressure measurement module 2, then reaches the oil leakage port 206, and is pumped back to the hydraulic station oil tank through the oil suction pump installed at the gap oil return interface 207.

[0053] S2. The pressure difference between the upper pressure chamber and the lower pressure chamber drives the elastic metal diaphragm to bend downward into the lower pressure chamber, closing the gap between the elastic metal diaphragm and the lower pressure chamber to form a gap seal and being in a critical state.

[0054] Since the pressure P0 in the upper pressure chamber 111 is greater than the pressure P1 in the lower pressure chamber 112, and the force-bearing area of the upper pressure chamber 111 is larger than that of the lower pressure chamber 112, the elastic metal diaphragm 102 bends in the direction of the lower pressure chamber 112. When the pressure difference △P between the pressure P0 in the upper pressure chamber 111 and the pressure P1 in the lower pressure chamber 112 drives the elastic metal diaphragm 102 to undergo elastic deformation, and when the elastic deformation is just equal to the stroke between the elastic metal diaphragm 102 and the boss of the lower housing 103, the gap 113 between the elastic metal diaphragm 102 and the boss of the lower housing 103 is closed to form a gap seal and is in a critical state.

[0055] S3. When the static pressure bearing bears a load, the internal pressure of the static pressure bearing chamber rises, the flow rate of the high-pressure oil entering the static pressure bearing chamber through the static pressure bearing oil supply port decreases, the pressure at the static pressure bearing oil supply port rises, pushing the elastic metal diaphragm to bend upward into the upper pressure chamber, and increasing the gap between the elastic metal diaphragm and the lower pressure chamber.

[0056] When the static pressure bearing bears a load, the internal pressure of the static pressure bearing chamber 204 rises, the flow rate of the high-pressure liquid entering the static pressure bearing chamber 204 through the static pressure chamber oil supply port 203 decreases, and the pressure at the static pressure bearing oil supply port 108 rises accordingly, thus breaking the original balance state and pushing the elastic metal diaphragm 102 to bend in the direction of the upper pressure chamber 111. At this time, the gap 113 formed by the elastic metal diaphragm 102 and the boss increases.

[0057] S4. As the clearance increases, the high-pressure hydraulic fluid in the lower pressure chamber rapidly flows into the hydrostatic bearing chamber. Meanwhile, the pressure in the lower pressure chamber drops from P1 to P3, driving the elastic metal diaphragm to bend downward towards the lower pressure chamber again to close the clearance. At this time, the internal pressure in the hydrostatic bearing chamber increases from P2 to P4 and is once again in a critical state.

[0058] Since the pressure P1 in the lower pressure chamber 112 is greater than the pressure P2 in the hydrostatic bearing chamber 204, the high-pressure liquid in the lower pressure chamber 112 will rapidly flow into the hydrostatic bearing chamber 204. The pressure in the hydrostatic bearing chamber 204 gradually increases. While the liquid flow rate in the hydrostatic bearing chamber 204 increases, the pressure in the lower pressure chamber 112 drops from P2 to P3. At this time, the pressure difference between the pressure P0 in the upper pressure chamber 111 and the pressure P3 in the lower pressure chamber 112 is △P'. Since △P' is greater than △P, the elastic modulus of the elastic metal diaphragm 102 is constant, and the area difference △S between the upper pressure chamber 111 and the lower pressure chamber 112 remains unchanged. Therefore, the elastic metal diaphragm 102 will bend downward towards the lower pressure chamber 112 again to close the clearance 113 and is once again in a critical state. At this time, the pressure in the hydrostatic bearing chamber 204 increases from P2 to P4. Since P4 is greater than P3, the pressure in the hydrostatic bearing chamber 204 is greater than the pressure in the lower pressure chamber 112.

[0059] This shows that while the pressure in the hydrostatic bearing chamber 204 increases, the input flow rate of the hydrostatic bearing chamber 204 also increases. This is exactly a function that fixed restrictors such as capillary restrictors and orifice restrictors cannot achieve. Because the damping of a fixed restrictor depends entirely on the mechanical structure. When the load on the hydrostatic bearing gradually increases, the pressure in the hydrostatic bearing chamber rises, and the input flow rate decreases until the input flow rate is zero, at which point the hydrostatic bearing fails. Therefore, using a variable-damping liquid-controlled thin-film feedback restrictor can greatly improve the oil film stiffness of a fixed-damping restrictor.

[0060] In the description of this specification, the description with reference to terms such as "one embodiment", "some embodiments", "example", "specific example", or "some examples" means that the specific features, structures, materials, or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described can be combined in a suitable manner in any one or more embodiments or examples. In addition, without contradiction, those skilled in the art can combine and combine the different embodiments or examples described in this specification and the features of different embodiments or examples.

[0061] Although the embodiments of the present invention have been shown and described above, it can be understood that the above embodiments are exemplary and should not be construed as limiting the present invention. Those of ordinary skill in the art can make changes, modifications, substitutions, and variations to the above embodiments within the scope of the present invention.

[0062] The specific implementation manners of the present invention above do not constitute a limitation to the protection scope of the present invention. Any other corresponding changes and deformations made according to the technical concept of the present invention shall be included in the protection scope of the claims of the present invention.

Claims

1. A liquid-controlled thin-film feedback throttling device, characterized in that, it includes a liquid-controlled thin-film feedback throttle. The liquid-controlled thin-film feedback throttle includes a throttle oil supply port for high-pressure oil to enter, a static pressure bearing oil supply port for high-pressure oil to flow into the static pressure bearing, an elastic metal diaphragm that can elastically deform under pressure, an upper pressure chamber and a lower pressure chamber separated by the elastic metal diaphragm. The lower pressure chamber is in clearance seal with the elastic metal diaphragm; the upper pressure chamber is directly communicated with the throttle oil supply port, and the lower pressure chamber is communicated with the throttle oil supply port through a first-stage fixed throttle; the static pressure bearing oil supply port is communicated with the lower pressure chamber through a second-stage fixed throttle, and when the clearance between the lower pressure chamber and the elastic metal diaphragm becomes larger, the static pressure bearing oil supply port is communicated with the lower pressure chamber through this clearance.

2. The liquid-controlled thin-film feedback throttling device according to claim 1, characterized in that, the elastic metal diaphragm is driven to elastically deform by the pressure difference between the upper pressure chamber and the lower pressure chamber to close or increase the clearance between the lower pressure chamber and the elastic metal diaphragm.

3. The liquid-controlled thin-film feedback throttling device according to claim 1, characterized in that, a pressure chamber is enclosed by a sealed upper housing and a lower housing, and the elastic metal diaphragm is installed between the upper housing and the lower housing, separating the pressure chamber into the upper pressure chamber and the lower pressure chamber.

4. The liquid-controlled thin-film feedback throttling device according to claim 3, characterized in that, the center of the lower housing is the static pressure bearing oil supply port, and a closed-loop convex platform is protruded from the static pressure bearing oil supply port. The elastic metal diaphragm and the upper housing enclose the upper pressure chamber, and the elastic metal diaphragm, the lower housing and the convex platform enclose the lower pressure chamber, and a clearance seal is formed between the convex platform and the elastic metal diaphragm.

5. The liquid-controlled thin-film feedback throttling device according to claim 3, characterized in that, the upper housing and the lower housing are sealed by a sealing ring; the process holes of the upper housing and the lower housing are respectively sealed by sealing steel balls.

6. The liquid-controlled thin-film feedback throttling device according to any one of claims 3-5, characterized in that, a pressure measurement hole for monitoring the pressure of the upper pressure chamber is opened on the upper housing, and a plug is installed in the pressure measurement hole.

7. The liquid-controlled thin-film feedback throttling device according to claim 1, characterized in that, it further includes a pressure measurement module fixed to the liquid-controlled thin-film feedback throttle. The liquid-controlled thin-film feedback throttle and the pressure measurement module are sealed by a sealing ring. The pressure measurement module includes an oil supply interface, a static pressure bearing chamber, an oil drain groove, an oil drain port, a static pressure chamber oil supply port, an oil hole and a clearance oil return interface; wherein, the oil supply interface is communicated with the throttle oil supply port through the oil hole, the static pressure bearing chamber is communicated with the static pressure bearing oil supply port through the static pressure chamber oil supply port, and the oil drain groove is communicated with the clearance oil return interface through the oil drain port.

8. The liquid-controlled thin-film feedback throttling device according to claim 7, characterized in that, an oil suction pump is installed at the clearance oil return interface.

9. The liquid-controlled thin-film feedback throttling device according to claim 7, characterized in that, a static pressure bearing cavity pressure measurement interface for monitoring the pressure of the static pressure bearing cavity is provided on the pressure measurement module.

10. The test method of the liquid-controlled thin-film feedback throttling device according to claim 1, characterized in that, it includes the following steps: S1. After the high-pressure oil enters the liquid-controlled thin-film feedback throttle, it is divided into two paths. One path enters the upper pressure cavity, and the pressure of the upper pressure cavity is P0. The other path enters the lower pressure cavity after passing through the first-stage fixed throttle. The pressure of the lower pressure cavity is P1. The high-pressure oil in the lower pressure cavity enters the static pressure bearing cavity after passing through the second-stage fixed throttle and the static pressure bearing oil supply port. The pressure of the static pressure bearing cavity is P2, so as to realize the normal operation of the static pressure bearing in the static pressure bearing cavity; wherein, P1 < P0, P2 < P1; S2. The elastic metal diaphragm is driven by the pressure difference between the upper pressure cavity and the lower pressure cavity to bend towards the lower pressure cavity, closing the gap between the elastic metal diaphragm and the lower pressure cavity to form a gap seal and being in a critical state; S3. When the static pressure bearing bears a load, the internal pressure of the static pressure bearing cavity increases, the flow rate of the high-pressure oil entering the static pressure bearing cavity through the static pressure bearing oil supply port decreases, the pressure at the static pressure bearing cavity oil supply port increases, pushing the elastic metal diaphragm to bend towards the upper pressure cavity, and increasing the gap between the elastic metal diaphragm and the lower pressure cavity; S4. The high-pressure oil in the lower pressure cavity quickly flows into the static pressure bearing cavity as the gap increases. At the same time, the pressure of the lower pressure cavity drops from P1 to P3, driving the elastic metal diaphragm to bend towards the lower pressure cavity again and closing the gap. At this time, the internal pressure of the static pressure bearing cavity increases from P2 to P4 and is again in a critical state.

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