Joining device

Abstract

The bonding device according to an embodiment of the present invention includes a heating part, a pressurizing part, a protruding part, and a sensor part, wherein: the heating part includes a heat source and moves in a vertical direction; the pressurizing part is arranged below the heating part; the protruding part is arranged on a side surface of the pressurizing part; and the sensor part is spaced apart from the protruding part in a horizontal direction. When the pressurizing part contacts a pressurized object, the sensor part measures vertical displacements of a plurality of measuring parts defined on the protruding part.

Description

Technical Field

[0001] The present invention relates to a bonding device, and more particularly, to a bonding device capable of measuring the flatness of a pressurizing tip in real time. Background Art

[0002] Generally, a display device includes a display panel and a driver chip, wherein: the display panel includes a plurality of pixels, and the driver chip is used to drive the pixels. The driver chip is arranged on a flexible film, and the flexible film is connected to the display panel. The driver chip is connected to the pixels of the display panel through the flexible film. This connection method is defined as a chip-on-film method.

[0003] A plurality of pads connected to the driving chip are arranged on the flexible film, and the display panel includes a plurality of connection pads connected to the pixels. The pads are respectively contacted and connected to the connection pads, thereby connecting the driving chip to the pixels.

[0004] The pad and the connecting pad are connected in various ways. For example, a bonding device is arranged on the upper part of the pad, and the bonding device applies heat and pressure to the pad. Therefore, the pad and the connecting pad can be electrically connected to each other through an anisotropic conductive film (ACF). Summary of the invention

[0005] Technical issues solved

[0006] An object of the present invention is to provide a bonding device capable of measuring the flatness of a pressurizing portion of the bonding device in real time.

[0007] Solution to the problem

[0008] The bonding device according to an embodiment of the present invention includes a heating part, a pressurizing part, a protruding part, and a sensor part, wherein: the heating part includes a heat source and moves in a vertical direction; the pressurizing part is arranged below the heating part; the protruding part is arranged on a side surface of the pressurizing part; and the sensor part is spaced apart from the protruding part in a horizontal direction. When the pressurizing part contacts a pressurized object, the sensor part measures vertical displacements of a plurality of measuring parts defined on the protruding part.

[0009] Effects of the Invention

[0010] According to an embodiment of the present invention, the protrusion is arranged on a side surface of the pressurizing part that pressurizes the pressurized object, and the sensor part is arranged spaced apart from the protrusion in the horizontal direction. When the pressurizing part contacts the pressurized object, the sensor part can measure the vertical displacement of a plurality of measuring parts defined on the protrusion, thereby measuring the flatness of the pressurizing part. BRIEF DESCRIPTION OF THE DRAWINGS

[0011] Figure 1is a perspective view of a bonding device according to an embodiment of the present invention.

[0012] Figure 2 Viewed from one direction Figure 1 A first side view of the .

[0013] Figure 3 Viewed from the other direction Figure 1 Second side view of .

[0014] Figure 4A , Figure 4B and Figure 4C It is shown Figure 2 A diagram showing a state in which the engaging device is moved in the vertical direction.

[0015] Figure 5 It is shown in Figure 4A , Figure 4B and Figure 4C Graph showing the capacitance value measured by the sensor unit.

[0016] Figure 6 It is an example showing Figure 3 FIG. 1 is a diagram showing a state where the pressing portion of the bonding device is deformed.

[0017] Figure 7 It is shown in Figure 6 Graph of the electrostatic capacitance values ​​measured by each sensor.

[0018] Figure 8 It is an example showing Figure 3 FIG. 2 is a diagram showing another state of the pressing portion of the bonding device after being deformed.

[0019] Fig. 9 It is shown in Figure 8 Graph of the electrostatic capacitance values ​​measured by each sensor.

[0020] Description of Reference Numerals

[0021] BD: Bonding device HP: Heating unit

[0022] CP: Pressurizing part BO1, BO2: First body, second body

[0023] CT: Pressurized Tip HS: Heat Source

[0024] TA: protrusion SP: sensor part

[0025] CO: Bolt DETAILED DESCRIPTION

[0026] In this specification, when a certain component (or region, layer, part, etc.) is mentioned as being "on", "connected to" or "coupled to" another component, it means that it can be directly arranged on, directly connected to or directly coupled to the other component, or a third component may be arranged therebetween.

[0027] The same reference numerals refer to the same constituent elements. In addition, in the drawings, in order to effectively describe the technical content, the thickness, proportion and size of the constituent elements are exaggerated.

[0028] “And / or” includes all of more than one combinations that can be defined by the relevant components.

[0029] Although the terms first, second, etc. can be used to describe various constituent elements, the above constituent elements should not be limited by the above terms. The above terms are only used for the purpose of distinguishing one constituent element from another constituent element. For example, without departing from the scope of the present invention, the first constituent element can be referred to as the second constituent element, and similarly, the second constituent element can also be referred to as the first constituent element. Unless the context clearly indicates otherwise, the expression of the singular includes the expression of the plural number.

[0030] In addition, terms such as "below", "lower side", "upper side", and "upper side" are used to describe the relationship between the components shown in the drawings. The above terms are relative concepts and are described based on the directions indicated in the drawings.

[0031] Unless otherwise defined, all terms (including technical terms and scientific terms) used in this specification have the same meaning as those commonly understood by those skilled in the art to which the present invention belongs. In addition, terms, such as those defined in commonly used dictionaries, should be interpreted as having a meaning consistent with their meaning in the context of the relevant technology, and should not be interpreted in an idealized or overly formalized meaning unless explicitly defined herein.

[0032] It should be understood that terms such as “including” or “having” are intended to specify the presence of features, numbers, steps, operations, constituent elements, parts or a combination thereof recorded in the specification, but do not exclude in advance the possibility of the presence or addition of one or more other features or numbers, steps, operations, constituent elements, parts or a combination thereof.

[0033] The bonding device according to the embodiment of the present invention can be used to connect the chip on film to the display panel. Specifically, the bonding device can connect the chip on film to the display panel by applying heat and pressure. An anisotropic conductive film can be arranged between the chip on film and the display panel. When the bonding device applies heat and pressure to the chip on film, inside the anisotropic conductive film, a plurality of conductive balls can be arranged between the pads arranged on the chip on film and the connection pads arranged on the display panel. Therefore, the chip on film and the display panel can be electrically connected to each other.

[0034] Hereinafter, a bonding device according to an embodiment of the present invention will be described in detail with reference to the accompanying drawings.

[0035] Figure 1 is a perspective view of a bonding device according to an embodiment of the present invention.

[0036] Figure 2 Viewed from one direction Figure 1 A first side view of the .

[0037] Figure 3 Viewed from the other direction Figure 1 Second side view of .

[0038] Figure 2 is "viewed from the first direction DR1" Figure 1 FIG. 10 shows the bonding device when the Figure 3 is "viewed from the second direction DR2" Figure 1 For ease of description, Figure 1 and Figure 3 The fixing portion supporting the sensor portion is omitted.

[0039] refer to Figures 1 to 3 , the bonding device BD may include a pressurizing portion CP, a heating portion HP, a plurality of bolts CO, a protruding portion TA, and a sensor portion SP.

[0040] The pressurizing part CP may be disposed under the heating part HP. The pressurizing part CP may include a pressurizing tip CT and a first body BO1.

[0041] The pressurizing tip CT may be arranged at the lower part of the pressurizing part CP. The pressurizing tip CT may extend from the first body BO1 toward the lower part. The pressurizing tip CT may contact the pressurizing object (not shown). The bonding device BD may apply pressure and heat to the pressurizing object through the pressurizing tip CT. For example, the pressurizing object may be a chip on film.

[0042] The pressurizing tip CT may extend in the first direction DR1. When viewed from the second direction DR2, the pressurizing tip CT may have a long side in the first direction DR1, and a short side in the third direction DR3.

[0043] Hereinafter, the second direction DR2 indicates a direction vertically crossing the first direction DR1. A plane defined by the first direction DR1 and the second direction DR2 may be parallel to a horizontal plane. The third direction DR3 may indicate a direction perpendicular to the horizontal plane. The "vertical position" or "height" of any structure may indicate the position of the third direction DR3.

[0044] The first body BO1 may be disposed on the upper portion of the pressurizing tip CT. The width of the first body BO1 in the second direction DR2 may be varied (see Figure 2 ). Specifically, the first body BO1 may include a first sub-body SBO1 and a second sub-body SBO2.

[0045] The first sub-body SBO1 is defined as a portion where the width in the second direction DR2 of the first body BO1 changes along the third direction DR3 , and the second sub-body SBO2 is defined as a portion where the width in the second direction DR2 of the first body BO1 remains uniform.

[0046] The first sub-body SBO1 may be arranged on the press tip CT. The width of the first sub-body SBO1 in the second direction DR2 may be changed. The lower portion of the first sub-body SBO1 is connected to the press tip CT, and the upper portion of the first sub-body SBO1 may be connected to the second sub-body SBO2. The width of the first sub-body SBO1 in the second direction DR2 may be smallest at the lower portion and largest at the upper portion.

[0047] When viewed from the first direction DR1, the outer side surface ( Figure 2 The inner surface of the first sub-body SBO1 ( Figure 2 The left side in the figure) can include both inclined surfaces and vertical surfaces.

[0048] When viewed from the second direction DR2 , the first sub-body SBO1 may have a rectangular shape having long sides in the first direction DR1 and short sides in the third direction DR3 .

[0049] The second sub-body SBO2 may extend from the first sub-body SBO1 toward the upper portion. A width of the second sub-body SBO2 in the second direction DR2 may be uniform.

[0050] When viewed from the first direction DR1, both the outer and inner surfaces of the second sub-body SBO2 may be parallel to the third direction DR3.

[0051] When viewed from the second direction DR2 , the second sub-body SBO2 may have a rectangular shape having long sides in the first direction DR1 and short sides in the third direction DR3 .

[0052] Hereinafter, the outer side surface OSF of the first body BO1 is defined as the outer side surface of the second sub-body SBO2 , and the inner side surface of the first body BO1 may be defined as the inner side surfaces of the first sub-body SBO1 and the second sub-body SBO2 .

[0053] The press tip CT of the press part CP and the first body BO1 may include a conductive body. For example, the press part CP may include a metal substance.

[0054] The pressurizing tip CT of the pressurizing part CP and the first body BO1 may be integrally formed. However, the present invention is not limited thereto, and the pressurizing tip CT and the first body BO1 may be separately manufactured and connected to each other.

[0055] The heating part HP may be arranged on the pressurizing part CP. The heating part HP may apply heat to the pressurizing part CP. The upper part of the heating part HP may be connected to a pressure transmitting part (not shown) and a moving part (not shown). The pressure transmitting part may transmit pressure to the pressurizing part CP through the heating part HP, and the moving part may move the bonding device BD. Through the moving part, the heating part HP and the pressurizing part CP may move in the vertical direction (third direction DR3).

[0056] The heating part HP may include a second body BO2 and a heat source HS. The second body BO2 may extend in the first direction DR1.

[0057] When viewed from the first direction DR1, a portion of a lower portion of the second body BO2 may have a protruding rectangular shape.

[0058] When viewed from the second direction DR2, the second body BO2 may have a rectangular shape having long sides in the first direction DR1 and short sides in the third direction DR3. The length of the second body BO2 in the first direction DR1 may be the same as that of the first body BO1.

[0059] The second body BO2 may be disposed on the inner side surface or upper surface of the first body BO1 of the pressurizing part CP. Specifically, the lower surface of the second body BO2 may face the upper surface of the first body BO1 of the pressurizing part CP. The inner side surface of the second body BO2 may face the inner side surface of the first body BO1.

[0060] The second body BO2 may include a conductor. For example, the second body BO2 may include a metal substance.

[0061] The heat source HS may be arranged inside the second body BO2. The heat source HS may be implemented as more than one hot wire. The heat source HS may extend in the first direction DR1. The heat source HS may be arranged at a position higher than the pressurizing part CP in the third direction DR3. The heat source HS generates heat, and the heat may be transferred to the pressurizing part CP through the second body BO2.

[0062] The pressurizing part CP and the heating part HP may be manufactured separately and connected to each other. For example, the pressurizing part CP may be a consumable that is replaced at the end of its life.

[0063] The pressurizing part CP may be fixed to the heating part HP by a plurality of bolts CO.

[0064] Although in Figure 1 and Figure 3 Five bolts CO are shown in FIG. 1 , but this is merely exemplary, and the number of bolts is not limited thereto.

[0065] A plurality of bolts CO may be disposed between an inner side surface of the pressurizing part CP and an inner side surface of the heating part HP. The plurality of bolts CO may physically fix the pressurizing part CP to the heating part HP.

[0066] Specifically, a plurality of bolts CO may be arranged spaced apart from each other along the first direction DR1. A plurality of bolts CO may be respectively inserted into bolt holes (not shown) defined in the outer side surface OSF of the first body BO1 of the pressurizing part CP. Each bolt CO may pass through the first body BO1 of the pressurizing part CP and be fastened to the heating part HP. That is, a plurality of bolts CO may fix the pressurizing part CP to the heating part HP in the second direction DR2.

[0067] The user may tighten or loosen the plurality of bolts CO. For example, when the pressurizing part CP needs to be replaced, the user may loosen the plurality of bolts CO to separate the installed pressurizing part CP from the heating part HP. The user may arrange a new pressurizing part CP under the heating part HP and tighten the plurality of bolts CO to fix the pressurizing part CP to the heating part HP.

[0068] However, the plurality of bolts CO do not necessarily have to be fastened in the second direction DR2. The plurality of bolts CO may be fastened in different directions. For example, the plurality of bolts CO may fix the pressurizing part CP to the heating part HP in the third direction DR3. Specifically, the plurality of bolts CO may penetrate the upper surface of the first body BO1 of the pressurizing part CP and the lower surface of the second body BO2 of the heating part HP to be fastened to the lower part of the heating part HP. The plurality of bolts CO may be arranged spaced apart from each other in the first direction DR1.

[0069] The protrusion TA may be arranged on the side surface of the pressurizing part CP. Specifically, the protrusion TA may be arranged on the outer side surface OSF of the first body BO1. The protrusion TA may extend in the first direction DR1. When viewed from the second direction DR2, the protrusion TA may have a rectangular shape having a long side in the first direction DR1 and a short side in the third direction DR3.

[0070] The protrusion TA may be arranged at a height different from that of the plurality of bolts CO with reference to the third direction DR3. The protrusion TA may be arranged in a lower region of the outer side surface OSF of the first body BO1, and the plurality of bolts CO may be arranged in an upper region of the outer side surface OSF of the first body BO1. Therefore, the user may tighten or loosen the plurality of bolts CO even in a state where the protrusion TA is arranged.

[0071] The protrusion TA may extend from the pressurizing portion CP. For example, the protrusion TA may be formed by molding an object including a metal substance, thereby being formed integrally with the pressurizing portion CP. However, the protrusion TA and the pressurizing portion CP may also be separately manufactured and connected to each other.

[0072] The protrusion TA may include a conductor. For example, the protrusion TA may include a metal substance. However, the present invention is not limited thereto, and the protrusion TA may also include an insulator.

[0073] A plurality of measuring portions may be defined on the projection TA, specifically, a first measuring portion TA1, a second measuring portion TA2, and a third measuring portion TA3 may be defined on the projection TA.

[0074] When viewed from the second direction DR2 , the first measurement portion TA1 and the third measurement portion TA3 are defined as sides of both sides of the projection TA, and the second measurement portion TA2 may be defined as a central portion of the projection TA.

[0075] The first measurement portion TA1 may be disposed at one side corner portion of the outer side surface OSF of the first body BO1.

[0076] The second measurement portion TA2 may be disposed at a central portion of the outer side surface OSF of the first body BO1 .

[0077] The third measurement portion TA3 may be disposed at the other side corner portion of the outer side surface OSF of the first body BO1.

[0078] like Figure 1As shown, the protrusion TA may be formed integrally. That is, the first measurement portion TA1, the second measurement portion TA2, and the third measurement portion TA3 may be connected to each other. However, the present invention is not limited thereto, and the first measurement portion TA1, the second measurement portion TA2, and the third measurement portion TA3 may be arranged spaced apart from each other in the first direction DR1. For example, three protrusions may be separately formed and arranged on the outer side surface OSF of the first body BO1. In this case, the first measurement portion TA1, the second measurement portion TA2, and the third measurement portion TA3 may be defined as one protrusion, respectively.

[0079] The sensor part SP may be disposed spaced apart from the projection part TA in the horizontal direction. When the pressing part CP contacts the pressing object, the sensor part SP may measure vertical displacements of a plurality of measurement portions defined on the projection part TA in real time.

[0080] Specifically, the sensor part SP may include a first sensor SP1, a second sensor SP2, and a third sensor SP3. The first sensor SP1 may be arranged to be spaced apart from the first measuring part TA1 in the second direction DR2. The second sensor SP2 may be arranged to be spaced apart from the second measuring part TA2 in the second direction DR2. The third sensor SP3 may be arranged to be spaced apart from the third measuring part TA3 in the second direction DR2.

[0081] The first sensor SP1 , the second sensor SP2 , and the third sensor SP3 may be arranged to be spaced apart from each other in the first direction DR1 .

[0082] The position of the sensor portion SP can be fixed by the fixing portion FP (see Figure 2 ). For example, the upper portion of the fixing portion FP may be connected to a supporting structure (not shown) of the engaging device, and the lower portion may be connected to the sensor portion SP. Therefore, the sensor portion SP may be fixed in the vertical direction.

[0083] The height of the central portion of the sensor part SP may be defined as a reference height H S .

[0084] When the reference altitude H S When the virtual line passes through the center of the protruding portion TA, the pressing tip CT of the pressing portion CP may contact the pressing object to transfer heat and pressure to the pressing object.

[0085] At this time, the first sensor SP1 may measure a vertical displacement of the first measurement portion TA1, the second sensor SP2 may measure a vertical displacement of the second measurement portion TA2, and the third sensor SP3 may measure a vertical displacement of the third measurement portion TA3.

[0086] The sensor part SP may include an electrostatic capacity sensor. The first sensor SP1, the second sensor SP2, and the third sensor SP3 may be electrostatic capacity sensors. The sensor part SP may include an electrode plate (not shown) to measure electrostatic capacity. The electrostatic capacity value measured by the sensor part SP may be inversely proportional to the distance between the electrode plate of the sensor part SP and the conductor adjacent to the electrode plate. Here, the conductor may be a protrusion TA.

[0087] Hereinafter, the relationship between the vertical position H of the projection portion TA and the electrostatic capacitance value C measured by the sensor portion SP will be described in detail.

[0088] Figure 4A , Figure 4B and Figure 4C It is shown Figure 2 A diagram showing a state in which the engaging device is moved in the vertical direction.

[0089] Figure 5 It is shown in Figure 4A , Figure 4B and Figure 4C Graph showing the capacitance value measured by the sensor unit.

[0090] exist Figure 4A , Figure 4B and Figure 4C , it is assumed that the vertical positions of the first measurement portion TA1, the second measurement portion TA2, and the third measurement portion TA3 of the projection TA are all the same, and the pressing portion CP, the heating portion HP, and the projection TA include electrical conductors.

[0091] refer to Figure 4A and Figure 5 The center of the protrusion TA is located at a first height H 1 The first height H 1 Lower than the reference height H which is the center height of the sensor portion SP S In this case, the conductive body facing the sensor part SP is the first body BO1 of the pressurizing part CP. The sensor part SP is spaced apart from the first body BO1 by a first distance d in the second direction DR2. 1 .

[0092] When the distance between the sensor portion SP and the first body BO1 is the first distance d 1 When the electrostatic capacitance value C measured by the sensor portion SP is the first capacitance C 1 .

[0093] As the heating portion HP moves upward, the height H of the center of the protrusion TA can be increased from the first height H to the 1The sensor part SP starts to gradually rise. A portion of the sensor part SP may face the first body BO1, and the remaining portion may face the protrusion TA. As the heating part HP moves upward, the area of ​​the protrusion TA facing the sensor part SP may gradually increase. A portion of the protrusion TA facing the sensor part SP may serve as a conductor. Since the distance between the sensor part SP and the protrusion TA is smaller than the distance between the sensor part SP and the first body BO1, the electrostatic capacitance value C measured by the sensor part SP is equal to the first capacitance C. 1 Compared to can be gradually increased.

[0094] refer to Figure 4B and Figure 5 The height H of the center of the protrusion TA gradually increases and is located at the second height H 2 The second height H 2 Can be compared with the reference height H S In this case, the conductive body facing the sensor portion SP is the protrusion TA. The sensor portion SP is spaced apart from the protrusion TA by a second distance d in the second direction DR2. 2 .

[0095] The second distance d 2 It can be defined as the distance when the distance between the sensor portion SP and the conductor is the smallest.

[0096] When the distance between the sensor portion SP and the protrusion TA is the second distance d 2 When the electrostatic capacitance value C measured by the sensor portion SP is the second capacitance C 2 The second capacitor C 2 It can be defined as the maximum electrostatic capacitance value measured by the sensor portion SP.

[0097] refer to Figure 4C and Figure 5 As the heating portion HP continues to move upward, the height H of the center of the protrusion TA increases from the second height H 2 Move to the third height H 3 .

[0098] As the height H of the center of the projection TA increases, the area of ​​the projection TA facing the sensor portion SP may gradually decrease. In this interval, the electrostatic capacitance value C measured by the sensor portion SP may gradually decrease.

[0099] When the height H of the center of the protrusion TA reaches the third height H 3 At this time, the conductive body facing the sensor part SP may be the first body BO1 of the pressurizing part CP.

[0100] The sensor part SP may be spaced apart from the first body BO1 of the pressurizing part CP by a third distance d3 The third distance d 3 Can be greater than the second distance d 2 .

[0101] When the distance between the sensor portion SP and the protrusion TA is the third distance d 3 When the electrostatic capacitance value C measured by the sensor portion SP is the third capacitance C 3 The third capacitor C 3 Can be smaller than the second capacitor C 2 .

[0102] As a result, the electrostatic capacitance value C measured by the sensor portion SP can be determined by the distance d between the sensor portion SP and the conductive body facing the sensor portion SP.

[0103] Figure 6 It is an example showing Figure 3 FIG. 1 is a diagram showing a state where the pressing portion of the bonding device is deformed.

[0104] Figure 7 It is shown in Figure 6 Graph of the electrostatic capacitance values ​​measured by each sensor.

[0105] Figure 8 It is an example showing Figure 3 FIG. 2 is a diagram showing another state of the pressing portion of the bonding device after being deformed.

[0106] Fig. 9 It is shown in Figure 8 Graph of electrostatic capacitance values ​​measured by each sensor. Figures 6 to 9 , changes in the electrostatic capacity values ​​measured by each sensor according to changes in the flatness or inclination of the pressurizing portion will be described.

[0107] refer to Figure 6 and Figure 7 In the process of bonding the chip on film to the display panel, the flatness of the pressing part CP' may vary. Specifically, the flatness may refer to the flatness of the lower surface of the pressing tip CT' contacting the pressing object.

[0108] The flatness of the pressurizing tip CT' may be deformed according to many factors. For example, the change in the flatness of the pressurizing tip CT' may occur due to the temperature difference between the pressurizing part CP' and the heating part HP, the difference in the physical properties (e.g., thermal expansion coefficient) of the materials included in the pressurizing part CP' and the heating part HP, etc.

[0109] During the bonding process, the shape of the pressurizing tip CT' may be deformed to bulge downward. If the shape of the pressurizing tip CT' is deformed to bulge downward, appropriate pressure and heat may not be transferred to the pressurizing object (i.e., the chip on film) in contact with both sides of the pressurizing tip CT'. As a result, defects may occur in the display device.

[0110] As the shape of the pressurizing tip CT' is deformed, the shape of the protrusion TA' arranged on the side surface of the pressurizing portion CP' may also be deformed to bulge downward.

[0111] As the shape of the projection TA' is deformed, the electrostatic capacitance value C measured by the sensors SP1, SP2, and SP3 may change. Specifically, the vertical position of the second measurement portion TA2' defined on the projection TA' may become different. Here, the vertical position may mean the height of the center.

[0112] The vertical position of the second measuring portion TA2' may become lower than the reference height H S The vertical position of the first measurement portion TA1' may be identical to the vertical position of the third measurement portion TA3'. The vertical positions of the first measurement portion TA1' and the third measurement portion TA3' may also be lower. However, the vertical displacement of the first measurement portion TA1' and the third measurement portion TA3' may be quite small compared to the vertical displacement of the second measurement portion TA2'.

[0113] As the vertical positions of the first measuring portion TA1′ and the third measuring portion TA3′ become lower, the electrostatic capacity values ​​C measured by the first sensor SP1 and the third sensor SP3 are a Can be smaller than the second capacitor C 2 .

[0114] As the vertical position of the second measuring portion TA2' becomes lower, the electrostatic capacity value C measured by the second sensor SP2 b Can be smaller than the second capacitor C 2 .

[0115] The electrostatic capacitance value C measured by the first sensor SP1 and the third sensor SP3 a can be greater than the electrostatic capacitance value C measured by the second sensor SP2 b .

[0116] The user can confirm the electrostatic capacity values ​​C measured by the first sensor SP1, the second sensor SP2, and the third sensor SP3 in real time, and can measure the flatness of the pressurizing tip CT' by the difference between the measured electrostatic capacity values ​​C in real time.

[0117] As a result, the sensor part SP can measure in real time the vertical displacements of the first measurement part TA1', the second measurement part TA2', and the third measurement part TA3' defined on the protrusion TA' integrally deformed with the pressurizing tip CT', thereby measuring the flatness of the pressurizing part CP'. Therefore, in the event that there is a problem with the flatness of the pressurizing part, it can be confirmed in real time and measures can be taken, thereby reducing the defect rate of the display device.

[0118] refer to Figure 8 and Fig. 9 , the inclination of the pressurizing part CP" can be changed. Here, the inclination of the pressurizing part CP" may represent the inclination of the pressurizing tip CT" in contact with the pressurizing object. For example, when viewed from the second direction DR2, the heights of the left and right sides of the pressurizing tip CT" may become different from each other. The inclination of the pressurizing tip CT" may be generated depending on the degree of combination of each bolt BO.

[0119] As shown in the figure, when the right side of the press tip CT" is tilted downward, appropriate pressure and heat may not be transferred to the portion of the chip on the film that contacts the left side of the press tip CT", and thus the display device may be defective.

[0120] The protrusion TA" can be tilted together with the pressurizing tip CT". The protrusion TA" can be tilted at an angle α in a clockwise direction relative to the first direction DR1. Therefore, the second measuring portion TA2" and the third measuring portion TA3" can be moved to a position lower than the original position. The vertical displacement of the third measuring portion TA3" can be greater than the vertical displacement of the second measuring portion TA2". The first measuring portion TA1" can also move downward, but the vertical displacement of the first measuring portion TA1" can be quite small compared with the vertical displacement of the second measuring portion TA2" and the third measuring portion TA3".

[0121] The electrostatic capacitance value C measured by the first sensor SP1 c Can be smaller than the second capacitor C 2 .

[0122] The electrostatic capacitance value C measured by the second sensor SP2 d can be smaller than the electrostatic capacitance value C measured by the first sensor SP1 c .

[0123] The electrostatic capacity value C measured by the third sensor SP3 f can be smaller than the electrostatic capacity value C measured by the second sensor SP2 d .

[0124] That is, among the electrostatic capacity values ​​C measured by the first sensor SP1 , the second sensor SP2 , and the third sensor SP3 , the electrostatic capacity values ​​C are the largest at the first sensor SP1 and the smallest at the third sensor SP3 .

[0125] The user can measure the inclination of the pressurizing tip CT″ in real time based on the electrostatic capacity values ​​C measured by the first sensor SP1, the second sensor SP2, and the third sensor SP3.

[0126] As a result, the sensor part SP can measure in real time the vertical displacements of the first measuring part TA1", the second measuring part TA2" and the third measuring part TA3" defined on the protrusion TA" that is deformed integrally with the press tip CT", thereby measuring the inclination of the press tip CT". Therefore, in the event that there is a problem with the inclination of the press tip CT", measures can be taken immediately on the inclination of the press tip CT", thereby reducing the defect rate of the display device.

[0127] According to an embodiment of the present invention, the bonding device BD may further include a control unit. The control unit may control the operation of the moving unit, the heating unit, etc. The control unit may control the operation of the moving unit, the heating unit based on the vertical displacement of the plurality of measurement parts measured by the sensor unit SP.

[0128] Reference again Figure 7 , the electrostatic capacitance value C measured by the first sensor SP1 and the third sensor SP3 a The electrostatic capacitance value C measured by the second sensor SP2 b When the difference is greater than a specified value, the control unit may determine that there is a problem with the flatness of the pressurizing tip CT and interrupt the operation of the heating unit HP. The specified value may be set by the user. For example, the user may set the specified value in consideration of the degree of flatness of the pressurizing tip required in the bonding process.

[0129] Reference again Fig. 9 , the electrostatic capacitance value C measured by the first sensor SP1 c The electrostatic capacitance value C measured by the third sensor SP3 f When the difference is greater than a prescribed value, the control unit may determine that there is a problem with the inclination of the pressurizing tip CT and interrupt the operation of the heating unit HP. The prescribed value may be set in consideration of the inclination of the pressurizing tip CT required in the bonding process.

[0130] As a result, in the case where there is a problem with the flatness or inclination of the pressurizing tip CT, the control part of the bonding device BD can interrupt the operation of the heating part HP, thereby improving the completion of the bonding process and reducing the defect rate of the display device.

[0131] Although described above with reference to the embodiments, it will be appreciated by those skilled in the art that various modifications and changes may be made to the present invention without departing from the spirit and scope of the invention as described in the appended claims.

[0132] For example, the protrusion may include an insulator. In this case, the protrusion may be used as a dielectric having a specific dielectric constant. The electrostatic capacitance values ​​measured by each sensor may become different depending on the dielectric constant. As another example, the sensor portion may also be implemented as a laser device. In this case, the sensor portion may determine the vertical position of each site based on the time information of the laser being reflected to the object and returned.

[0133] The embodiments described in the present invention are not intended to limit the technical concept of the present invention, but should be interpreted as the appended claims and all technical concepts within the scope of equivalents thereof being included in the scope of rights of the present invention.

Claims

1. A joining device comprising: a heating portion including a heat source and moving in a vertical direction; A pressurizing part, arranged below the heating part, wherein the pressurizing part comprises a main body; a protrusion arranged on a side surface of the pressurizing portion; and a sensor portion spaced apart from the protruding portion in a horizontal direction, wherein, when the pressurizing portion is deformed due to the heat generated by the heat source, the protruding portion is deformed, When the pressurizing part contacts the pressurized object, the sensor part measuring vertical displacements of a first measuring portion, a second measuring portion, and a third measuring portion defined on the protrusion, The first measuring portion, the second measuring portion and the third measuring portion are arranged at uniform intervals from each other in a first direction, The first measuring portion is arranged at a corner portion of one side of an outer side surface of the main body, and the second measuring portion is arranged at a central portion of the outer side surface of the main body, and The third measuring portion is disposed at the other side corner portion of the outer side surface of the body.

2. The joining device according to claim 1, wherein: The pressing portion extends in a first direction, and The protrusion is arranged on any one of two side surfaces of the pressing portion that are opposite to each other in a second direction intersecting the first direction.

3. The joining device according to claim 2, wherein: The pressurizing unit further comprises: a pressurizing tip extending downward from the main body, Wherein, the protrusion is arranged on an outer surface of the main body extending in the first direction.

4. The joining device according to claim 1, wherein: The sensor unit includes: A plurality of sensors respectively correspond to the plurality of measuring portions of the protrusion.

5. The joining device according to claim 4, wherein: The sensor unit includes a plurality of electrostatic capacity sensors.

6. The joining device according to claim 1, wherein: The protrusion includes an electrical conductor.

7. The bonding device according to claim 1, wherein: The protrusion includes an insulator.

8. The joining device according to claim 1, wherein: The protrusion extends from the pressing portion.

9. The joining device according to claim 1, wherein: The pressurizing portion is fixed to the heating portion by a plurality of bolts.

10. The joining device according to claim 9, wherein: The plurality of bolts are arranged between another side surface of the pressurizing portion opposite to the side surface and a side surface of the heating portion, the side surface of the heating portion facing the another side surface of the pressurizing portion.

11. The joining device according to claim 9, wherein: The plurality of bolts are arranged between an upper surface of the pressurizing portion and a lower surface of the heating portion, the lower surface of the heating portion facing the upper surface of the pressurizing portion.

12. The engagement device according to claim 1, further comprising: A control portion receives the vertical displacement measured by the sensor portion and controls an operation of the heating portion based on the measured vertical displacement.

13. The joining device according to claim 12, wherein: The control portion stops the operation of the heating portion when a difference between a vertical displacement of one of the first, second and third measuring portions and a vertical displacement of another of the first, second and third measuring portions is greater than a prescribed value.

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