Atomic force microscope and mechanical sectioning based tomographic apparatus and method

Abstract

The application provides a kind of based on atomic force microscope and mechanical cutting tomography detection device and method, wherein the tomography detection device, including the equipment shell for forming vacuum environment inside, atomic force microscope, mechanical cutting device, control device and sample bearing device;The sample bearing device, the mechanical cutting device and the atomic force microscope are all arranged in the vacuum environment;The atomic force microscope includes probe, and probe drive structure for driving the movement of the probe;The mechanical cutting device includes cutting tool, and cutting tool drive structure for driving the movement of the cutting tool;The control device controls the probe drive structure and the cutting tool drive structure by signal respectively, further, three-dimensional physical property tomography imaging can be formed by the alternative use of probe physical property measurement and in situ cutting.

Description

Technical Field

[0001] This invention relates to the field of object detection, and more particularly to a tomographic detection device and method based on atomic force microscopy and mechanical cutting. Background Technology

[0002] When inspecting objects, their three-dimensional shape can be detected visually, or their external shape can be detected using sensors to obtain corresponding shape information. However, existing detection methods can only detect the surface shape of objects and cannot obtain information about the object's internal structure (such as its internal shape, physical properties, etc.).

[0003] Therefore, in existing related technologies, a diamond cutter can be used to cut the object to be tested layer by layer. After each cut, the object to be tested is sent to an image acquisition device. The image acquisition device can acquire an image of the current surface to be tested. Then, based on the acquired image, relevant information about the object can be analyzed and determined.

[0004] However, the information contained in the image is relatively limited, making it difficult to fully reflect the actual physical properties of the surface under test (for example, the image cannot effectively reflect the undulations and changes of the surface under test). Summary of the Invention

[0005] This invention provides a chromatographic detection device and method based on atomic force microscopy and mechanical cutting to solve the problem that the detected information is relatively simple and cannot meet the requirements.

[0006] According to a first aspect of the present invention, a tomographic detection device based on atomic force microscopy and mechanical cutting is provided, comprising a device housing for forming a vacuum environment inside, an atomic force microscope, a mechanical cutting device, a control device, and a sample holding device; wherein the sample holding device, the mechanical cutting device, and the atomic force microscope are all disposed in the vacuum environment;

[0007] The atomic force microscope includes a probe and a probe driving structure for driving the probe to move; the mechanical cutting device includes a cutting tool and a cutting tool driving structure for driving the cutting tool to move; the control device controls the probe driving structure and the cutting tool driving structure respectively through signals;

[0008] The control device is used for:

[0009] The cutting tool drive structure controls the cutting tool to reach the cutting preparation position.

[0010] The cutting blade is controlled to cut the sample surface on the sample support device through the cutting blade drive structure and / or the sample support device to form the current test surface;

[0011] The probe driving structure controls the probe to be in an interactive position with the current test surface, and the probe driving structure and / or the sample carrying device control the probe to perform scanning motion relative to the sample, and the probe is used to measure the physical properties of the current test surface; wherein, the changes in physical signals at multiple measurement points of the scanning motion will constitute a physical property map of the current test surface;

[0012] Repeat the above process to use mechanical cutting to cut the sample surface again and form a new current measurement surface, and repeat the probe surface property measurement and scanning.

[0013] Optionally, the sample carrying device includes a sample stage, the sample stage being provided with a freezing component, the freezing component being used to provide a cold source to the sample on the sample stage so that the sample is in a frozen state.

[0014] Optionally, the freezing temperature of the cold source is between liquid nitrogen temperature and room temperature.

[0015] Optionally, the sample carrier further includes a nanodisplacement platform, on which the sample stage is mounted; the nanodisplacement platform is electrically connected to the control device.

[0016] The control device, through the cutting blade drive structure and / or the sample carrier, controls the cutting blade to cut the sample surface on the sample carrier to form the current test surface, specifically for:

[0017] The cutting tool is controlled to cut the surface of the sample using the nano-displacement platform.

[0018] Optionally, when the control device controls the probe to perform scanning motion relative to the sample through the probe driving structure and / or the sample carrying device, it is specifically used for:

[0019] The probe is controlled to perform scanning motion relative to the sample through the probe-driven structure and the nano-displacement platform.

[0020] Optionally, the chromatography detection device further includes an optical device mounted on the device housing, the optical device facing the area to which the sample carrier belongs, and the sample being located between the sample carrier and the optical device; the position of the sample carrier is matched to the focal plane of the optical device, so that the sample on the sample carrier can be located on the focal plane;

[0021] The optical device is used for:

[0022] The system acquires real-time images within its coverage area and sends the real-time images to the control device.

[0023] The control device is also used for:

[0024] When the probe performs the scanning motion relative to the sample, the probe position information of the probe tip relative to the sample at different times is determined based on the real-time image;

[0025] When the control device uses the probe to perform physical property measurements on the current surface to be measured, it is specifically used for:

[0026] Based on the probe position information and the physical signal at different times, the physical property map of the current surface to be tested is determined.

[0027] Optionally, the optical device is further configured to introduce a first auxiliary light and guide the first auxiliary light to the current test surface to form a first light spot on the current test surface;

[0028] The first auxiliary light is configured to enable:

[0029] In the current image, the spectral information exhibited by the tip segment of the probe is different from the spectral information of other areas within the area covered by the first spot, and the size range of the tip segment is less than 20 nm.

[0030] Optionally, the optical device is further configured to introduce a second auxiliary light and guide the second auxiliary light to the current test surface to form a second light spot on the current test surface;

[0031] The second auxiliary light is configured to enable:

[0032] Deformation occurs within the area covered by the second light spot on the current surface to be tested.

[0033] Optionally, the chromatography detection device further includes an electrical measuring device, which is electrically connected to the probe and the sample to form a circuit between the probe and the sample; the electrical measuring device is also electrically connected to the control device to obtain probe position information at different times;

[0034] The electrical measuring device is used for:

[0035] Obtain the electrical parameters of the circuit at different times;

[0036] Based on the electrical parameters at different times and the probe position information at different times, the surface electrical information of the current test surface is determined. The surface electrical information characterizes the change of electrical parameters when the probe tip reaches different positions relative to the sample.

[0037] After completing N cuts on the sample and obtaining the corresponding surface electrical information after each cut, the N sets of surface electrical information corresponding to the N cuts are integrated.

[0038] Optionally, the chromatography detection device further includes a laser assembly, which includes a laser and a detector, and the control device is electrically connected to the laser and the detector respectively; the probe includes a cantilever and a contact portion, and the cantilever is connected between the contact portion and the probe driving structure;

[0039] The laser and the detector are positioned relative to the device housing. The interaction position and the positions of the laser and the detector are matched so that when the probe performs the scanning motion relative to the sample, the laser beam of the laser can be incident on the cantilever of the probe.

[0040] The control device is also used for:

[0041] While the probe is performing the scanning motion relative to the sample, the laser is controlled to incident a laser beam onto the cantilever, and the signal of the returned light received by the detector is acquired.

[0042] The physical signal is determined based on the signal of the corresponding return light.

[0043] Optionally, the laser and the detector are directly or indirectly mounted on the device housing, or mounted on an optical device;

[0044] If the laser and the detector are directly or indirectly installed on the device housing, then: a heat conduction structure is provided between the laser and the device housing, and a heat conduction structure is also provided between the detector and the device housing.

[0045] Optionally, the control device is further configured to:

[0046] After completing N cuts on the sample and obtaining the corresponding physical property map after each cut, a corresponding three-dimensional tomographic image is constructed based on the N physical property maps; where N is an integer greater than or equal to 2.

[0047] Optionally, the probe includes a cantilever, a contact portion, and a sensing component, wherein the cantilever is connected between the contact portion and the probe driving structure;

[0048] The sensing component is used to detect the cantilever deformation and / or deformation stress, and obtain the corresponding sensing signal;

[0049] The sensing component is electrically connected to the control device to feed back the sensing signal to the control device;

[0050] The physical signal is determined based on the corresponding inductive signal.

[0051] Optionally, the chromatography detection device further includes a needle changing station, the probe driving structure is provided with a probe mounting part, the probe is detachably mounted on the probe mounting part by a probe holder, and the needle changing station is provided with at least two probe receiving positions.

[0052] If the at least two probe receiving positions include an empty first receiving position and a second receiving position that has received a spare probe and its probe holder, then:

[0053] The control device is also used for:

[0054] The probe driving structure controls the probe and its probe holder to enter the first receiving position.

[0055] The probe mounting part is controlled to separate from the corresponding probe holder so that the probe and its probe holder can remain in the first receiving position;

[0056] The probe driving structure controls the probe mounting part to move to the outside of the second receiving position;

[0057] The probe mounting part is controlled to dock with the probe holder of the spare probe so that the spare probe can be used as the probe currently in use.

[0058] Optionally, the probe driving structure includes a probe driving component and a scanner, wherein the probe is directly or indirectly mounted on the scanner, and the scanner is mounted on the probe driving component;

[0059] The probe driving component is electrically connected to the control device to change the position of the scanner and the probe under the control of the control device;

[0060] The scanner is electrically connected to the control device to drive the probe to perform the scanning motion under the control of the control device.

[0061] According to a second aspect of the present invention, a chromatographic detection method based on atomic force microscopy and mechanical cutting is provided, employing a chromatographic detection device based on atomic force microscopy and mechanical cutting. The chromatographic detection device includes a housing for creating a vacuum environment inside, an atomic force microscope, a mechanical cutting device, a control device, and a sample holding device; the sample holding device, the mechanical cutting device, and the atomic force microscope are all disposed in the vacuum environment.

[0062] The atomic force microscope includes a probe and a probe driving structure for driving the probe to move; the mechanical cutting device includes a cutting tool and a cutting tool driving structure for driving the cutting tool to move; the control device controls the probe driving structure and the cutting tool driving structure respectively through signals;

[0063] The chromatography detection method is applied to the control device, including:

[0064] The cutting tool drive structure controls the cutting tool to reach the cutting preparation position.

[0065] The cutting blade is controlled to cut the sample surface on the sample support device through the cutting blade drive structure and / or the sample support device to form the current test surface;

[0066] The probe driving structure controls the probe to be in an interactive position with the current surface under test.

[0067] The probe is controlled to perform scanning motion relative to the sample via the probe driving structure and / or the sample carrying device, and the physical properties of the current test surface are measured using the probe; wherein, the changes in physical signals at multiple measurement points during the scanning motion constitute a physical property map of the current test surface;

[0068] Repeat the above process. After N cuts are completed on the sample and a corresponding physical property map is obtained after each cut, a corresponding three-dimensional tomographic image is constructed based on the N physical property maps; where N is an integer greater than or equal to 2.

[0069] The tomographic detection device and method based on atomic force microscopy and mechanical cutting provided by this invention can obtain a physical property map characterizing the physical properties of the current surface by controlling the interaction between the probe of the atomic force microscope and the current surface to be tested, and controlling the probe to perform scanning motion relative to the sample. Compared with the prior art of obtaining the image of the current surface to be tested using an image acquisition device, the surface detection information of this invention can cover the depth information of the surface to be tested, and thus, richer information can be obtained.

[0070] Since atomic force microscopes are typically used in atmospheric environments, this invention further proposes to create a vacuum environment when using an atomic force microscope. This allows for both atomic force microscope detection and mechanical cutting of samples within the same vacuum environment, avoiding contamination of the detection and cutting effects by atmospheric impurities (gas molecules, water vapor, etc.). Consequently, this effectively improves the cutting and detection effects, as well as the efficiency of both processes.

[0071] Furthermore, unlike the cutting and inspection processes in an atmospheric environment, this invention is designed for a vacuum environment. By controlling the probe driving structure and the cutting blade driving structure through a control device, precise control of the cutting blade and probe is achieved during the cutting and inspection process, ensuring the accurate implementation of cutting and inspection. Attached Figure Description

[0072] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0073] Figure 1 This is a schematic diagram of the structure of a chromatographic detection device based on atomic force microscopy and mechanical cutting in one embodiment of the present invention. Figure 1 ;

[0074] Figure 2 This is a schematic diagram of the structure of a chromatographic detection device based on atomic force microscopy and mechanical cutting in one embodiment of the present invention. Figure 2 ;

[0075] Figure 3 This is a schematic diagram of the structure of a chromatographic detection device based on atomic force microscopy and mechanical cutting in one embodiment of the present invention. Figure 3 ;

[0076] Figure 4 This is a schematic diagram of the chromatographic detection device when the sample stage is in the cutting preparation position according to one embodiment of the present invention;

[0077] Figure 5 This is a schematic diagram of the scanning chromatography detection device in one embodiment of the present invention;

[0078] Figure 6 This is a schematic diagram of the structure of a tomographic detection device using a laser component in one embodiment of the present invention. Figure 1 ;

[0079] Figure 7 This is a schematic diagram of the structure of a tomographic detection device using a laser component in one embodiment of the present invention. Figure 2 ;

[0080] Figure 8 This is a schematic diagram of the chromatographic detection device when changing the probe in one embodiment of the present invention;

[0081] Figure 9 This is a schematic flowchart of a tomographic detection method based on atomic force microscopy and mechanical cutting in one embodiment of the present invention.

[0082] Explanation of reference numerals in the attached figures:

[0083] 1-Mechanical cutting device;

[0084] 11-Cutting tool;

[0085] 12-Cutting tool drive structure;

[0086] 13-Cutting tool movement path;

[0087] 2-Equipment casing;

[0088] 3-Sample carrier device;

[0089] 31 - Sample stage;

[0090] 32-nanometer displacement platform;

[0091] 33-Needle changing station;

[0092] 4-Atomic force microscope;

[0093] 41-Probe;

[0094] 42-Probe driving structure;

[0095] 421 - Probe driver assembly;

[0096] 422-Scanner;

[0097] 43 - Probe holder;

[0098] 5-Control device;

[0099] 6-sample;

[0100] 7-Optical devices;

[0101] 71-Extracavity optical structure;

[0102] 72 - Optical window;

[0103] 73 - Objective lens;

[0104] 8-Laser assembly;

[0105] 81-Laser;

[0106] 82-Detector;

[0107] 83 - Thermal conductivity structure;

[0108] 9-Electrical measuring device. Detailed Implementation

[0109] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0110] The terms “first,” “second,” “third,” “fourth,” etc. (if present) in the specification, claims, and accompanying drawings of this invention are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that such data can be interchanged where appropriate so that embodiments of the invention described herein can be implemented in orders other than those illustrated or described herein. Furthermore, the terms “comprising” and “having,” and any variations thereof, are intended to cover a non-exclusive inclusion; for example, a process, method, system, product, or apparatus that comprises a series of steps or units is not necessarily limited to those steps or units explicitly listed, but may include other steps or units not explicitly listed or inherent to such processes, methods, products, or apparatus.

[0111] The technical solution of the present invention will be described in detail below with reference to specific embodiments. These specific embodiments can be combined with each other, and the same or similar concepts or processes may not be described again in some embodiments.

[0112] Please refer to Figure 1 A chromatography detection device based on atomic force microscopy and mechanical cutting includes a housing 2 for creating a vacuum environment inside, an atomic force microscope 4, a mechanical cutting device 1, a control device 5, and a sample carrier 3. The sample carrier 3, the atomic force microscope 4, and the mechanical cutting device 1 are all located within the vacuum environment.

[0113] The atomic force microscope includes a probe 41 and a probe drive structure 42 for driving the movement of the probe 41.

[0114] The probe driving structure 42 can be any structure or combination of structures that can drive the probe 41 to move. The movement can include translation with three degrees of freedom, or rotation with one or more degrees of freedom. In further optional embodiments described below, the probe driving structure 42 can be further configured to meet the movement requirements of the probe 41. No matter how it is configured, it does not depart from the scope of the embodiments of the present invention.

[0115] The sample carrier 3 may include a sample stage 31 for carrying the sample 6. In some embodiments, the position of the sample stage 31 may be fixed. In other embodiments, the sample carrier 3 may further include a sample stage driving structure for driving the sample stage 31 and the sample 6 thereon to move. This sample stage driving structure may be, for example, a nano-displacement platform 32. The nano-displacement platform 32 is electrically connected to the control device 5.

[0116] The sample stage 31 is equipped with a freezing assembly (not shown), which provides a cold source to the sample on the sample stage, keeping the sample in a frozen state. Furthermore, the cold source can be maintained during any process of cutting or probing, keeping the sample frozen and thus facilitating mechanical cutting. The freezing temperature of the cold source is between liquid nitrogen temperature and room temperature, and more specifically, it can be a stable temperature between liquid nitrogen temperature and room temperature.

[0117] The nanoscale displacement platform 32 can be understood as being able to move the sample 6 within a small scale range. This movement can be lateral, which can be understood as movement parallel to the cutting plane. The nanoscale displacement platform 32 can be used in the cutting process or in the detection process, which will be further described later in the relevant description.

[0118] In this embodiment of the invention, the control device 5 controls the probe driving structure 42 and the cutting tool driving structure 12 respectively via signals. Please refer to [reference needed]. Figures 1 to 3 The control device 5 is electrically connected to the probe drive structure 42 and the cutting blade drive structure 12; therefore, the probe drive structure 42 and the cutting blade drive structure 12 can be controlled to perform corresponding movements by corresponding electrical signals.

[0119] Any processing procedure of the control device 5 can be understood as the steps of the tomographic detection method based on atomic force microscopy and mechanical cutting provided in the embodiments of the present invention. Please refer to the following: Figure 1 and Figure 9 The control device 5 is used to implement the following steps:

[0120] S101: The cutting tool is controlled to reach the cutting preparation position by means of the cutting tool drive structure 12;

[0121] S102: Control the cutting tool to cut the sample surface on the sample support device through the cutting tool drive structure and / or the sample support device to form the current test surface.

[0122] Please refer to Figure 4 This can be viewed as the cutting tool 11 being in a cutting preparation position, thus preparing for being cut by the cutting tool 11 of the mechanical cutting device. In this embodiment of the invention, the cutting tool 11 moves to the cutting preparation position under the drive of the cutting tool drive structure 12.

[0123] In addition, the cutting tool drive structure 12 can drive the cutting tool 11 to move along the cutting tool motion track 13.

[0124] The cutting process can be achieved by the movement of the cutting tool or by the movement of the sample.

[0125] In one corresponding example, the control device controls the cutting blade to cut the sample surface on the sample carrier device via the cutting blade drive structure and / or the sample carrier device to form the current test surface, specifically for:

[0126] The cutting tool is controlled to cut the surface of the sample using the nano-displacement platform.

[0127] In another corresponding example, the control device controls the cutting blade to cut the sample surface on the sample carrier via the cutting blade drive structure and / or the sample carrier to form the current test surface, specifically for:

[0128] The cutting tool drive structure controls the cutting tool to cut the surface of the sample.

[0129] Please refer to Figure 5 The control device 5 is also used to perform the following steps:

[0130] S103: The probe driving structure controls the probe to be in an interaction position with the current surface under test. This allows an interaction force to be formed between the probe and the current surface under test.

[0131] S104: The probe is controlled to perform scanning motion relative to the sample through the probe driving structure and / or the sample carrying device, and the physical properties of the current test surface are measured using the probe; wherein, the changes in physical signals at multiple measurement points of the scanning motion constitute a physical property map of the current test surface.

[0132] The interaction forces involved can be, for example, the repulsive forces (in contact or non-contact) between the atoms at the probe tip and the atoms on the sample surface. In one example, by controlling the constantness of this force during scanning, the tip of probe 41 can be made to undulate with the surface being measured. If sample 6 is set horizontally or can be understood as being set laterally, then this undulation can be understood as being vertical or lateral.

[0133] The physical property map can be any information capable of characterizing the surface properties. The control device controls the probe-driven structure and sample stage-driven structure via signals. This can be understood as: based on a corresponding feedback loop, controlling the probe to maintain the same (or within a specific range) force between itself and the sample surface, and scanning under this condition. This force feedback loop can be acquired, for example, by measuring the cantilever (e.g., the induced signal obtained by detecting cantilever deformation stress, as discussed later). Based on this acquisition result, control can be implemented to maintain the force. On this basis, physical property measurements and the construction of the physical property map can be achieved.

[0134] For example, the control device acquires the induced signal of the probe's deformation stress in real time (which can also be understood as the force deformation signal), performs filtering and other processing on the signal, and controls the vibration excitation of the probe, the three-dimensional displacement drive of the scanner, the bias voltage between the tip and the sample, the illumination and other signals based on the signal and a specific scanning strategy, so as to obtain the physical properties of the sample (such as surface morphology and physicochemical properties information).

[0135] Furthermore, a physical property map can be obtained based on the physical signals when the probe scans to different positions.

[0136] The physical properties measured may include, for example, three-dimensional morphology, roughness, adhesion, elastic modulus, hardness, conductivity, work function, piezoelectric response, charge distribution, magnetic domain distribution, and thermal distribution.

[0137] The physical signal can be the signal itself obtained directly from detecting the probe (such as the sensing signal and the signal of the returned light mentioned later), or any information obtained based on the signal.

[0138] Furthermore, after step S104, the following may also be included:

[0139] S105: Whether the sample has been cut N times and a corresponding physical property map has been obtained after each cut; where N is an integer greater than or equal to 2.

[0140] If the judgment result of step S105 is yes, then step S106 can be implemented: N physical property maps are used to form a corresponding three-dimensional tomographic image, and then the detection result for the sample can be obtained.

[0141] In the specific implementation of step S106, taking two physical property maps as an example, the spatial coherence of the first physical property map and the second physical property map can be used to construct a three-dimensional tomographic image of the two physical property maps. Furthermore, for N physical property maps, at least two three-dimensional tomographic images of the physical property maps can be constructed based on the spatial coherence of the N physical property maps.

[0142] In some solutions, steps S105 and S106 can be implemented by the control device 5; in other solutions, steps S105 and S106 can also be implemented by other devices.

[0143] As can be seen, in the above scheme, by controlling the interaction between the probe of the atomic force microscope and the current surface to be tested, and by controlling the probe to perform scanning motion, a physical property map characterizing the physical properties of the surface to be tested can be obtained. Compared with the existing technology of using an image acquisition device to obtain an image of the current surface to be tested, the physical property map of the present invention can cover the depth information of the surface to be tested, and thus, richer information can be obtained.

[0144] Three-dimensional tomographic imaging can be formed by alternating the use of probe property measurement and in-situ cutting.

[0145] Since atomic force microscopes are typically used in atmospheric environments, this invention further proposes to create a vacuum environment when using an atomic force microscope. This allows for both atomic force microscope detection and mechanical cutting of samples within the same vacuum environment, avoiding contamination of the detection and cutting effects by atmospheric impurities (gas molecules, water vapor, etc.). Consequently, this effectively improves the cutting and detection effects, as well as the efficiency of both processes.

[0146] Furthermore, unlike the cutting and inspection processes in an atmospheric environment, this invention is designed for a vacuum environment. By controlling the probe driving structure and the cutting blade driving structure through a control device, precise control of the cutting blade and probe is achieved during the cutting and inspection process, ensuring the accurate implementation of cutting and inspection.

[0147] To integrate the physical signals from different probe locations, it is necessary to know which location each acquired physical signal corresponds to. Therefore, in one implementation method, please refer to... Figure 2As shown in Figure 8, the chromatography detection device further includes an optical device 7, which is installed on the device housing 2. The optical device 7 faces the area of ​​the sample carrier 3 (e.g., the sample stage 31 therein), and the sample 6 is located between the sample carrier 3 (e.g., the sample stage 31 therein) and the optical device 7. In one example, the coverage area of ​​the image acquired by the optical device 7 can cover various movement positions of the sample stage 31 and the sample 6. At the same time, the focusing distance of the optical device 7 can be fixed. Therefore, in actual use, the image to be acquired can specifically refer to the image at the focal plane.

[0148] The interaction position is matched with the focal plane of the optical device 7; therefore, because it is located on the focal plane, the actual position of the probe scanning motion during scanning can be accurately and clearly observed through the optical device 7.

[0149] The optical device 7 is used for:

[0150] The system acquires real-time images within its coverage area and sends the real-time images to the control device.

[0151] Correspondingly, the control device 5 is also used for:

[0152] As the probe performs the scanning motion, the probe tip position relative to the sample at different times is determined based on the real-time image.

[0153] Furthermore, in the chromatographic detection method, the above process can also be performed after step S104.

[0154] When the control device uses the probe to measure the physical properties of the current surface to be tested, it is specifically used for: (i.e., step S104 may specifically include:)

[0155] Based on the probe position information and the physical signal at different times, the physical property map of the current surface to be tested is determined.

[0156] The probe position information can be understood as any information that can characterize the position of the probe tip. For example, the position of the probe tip in a real-time image can be identified. It can be seen that the recognition accuracy depends on the resolution of the optical device. The higher the resolution, the more accurate the identified position of the probe tip can be.

[0157] When the control device 5 controls the probe and the current surface to be tested to be in an interaction position, it is specifically used (i.e., step S103 specifically includes): according to the corresponding real-time image, control the probe and the current surface to be tested to be in the interaction position.

[0158] For example, based on real-time images, the positions of samples, probes, etc. can be identified, and then, based on the identified positions, the sample 6 and the probe 41 can be made to reach the cutting position and the interaction position.

[0159] by Figure 4 and Figure 5 For example, when sample 6 is in the cutting preparation position (and the cutting position), it is already in the position corresponding to the focal plane of the optical device. Then, the probe 41 can be mainly controlled to move laterally and vertically to reach the corresponding interaction position. At this time, sample 6 can remain stationary.

[0160] Furthermore, for ease of description, the horizontal direction can be considered as motion in the XY plane, the vertical direction as motion in the Z-axis, and the XY plane as motion in the X-axis and Y-axis. Correspondingly, the scanning motion mentioned above can be understood as oscillation around the Z-axis.

[0161] It is evident that sample 6 can achieve cutting and probe detection in situ, thus avoiding the impact of sample 6's movement on the accuracy of movement and detection.

[0162] Furthermore, the motion control in steps S101 and S103 can be automatically implemented by the control device 5, or it can be manually controlled by the control device 5.

[0163] Furthermore, in order to more accurately identify the position of the probe tip, thereby improving the accuracy of motion control (e.g., improving the control accuracy of steps S101 and S103), and the accuracy of position matching during probe detection (e.g., matching more accurate probe position information to the physical signals at each moment in step S104), in one example, the optical device 7 is also used to introduce a first auxiliary light ( Figure 7 The light rays obliquely incident on the sample (e.g., a first auxiliary light) are guided to the current test surface to form a first light spot on the current test surface.

[0164] The first auxiliary light is configured to enable:

[0165] In the current image, the spectral information exhibited by the tip segment of the probe is different from the spectral information of other areas within the area covered by the first spot, and the size range of the tip segment is less than 20 nm.

[0166] In one example, the first auxiliary light may be, for example, an auxiliary light capable of forming Raman light.

[0167] The tip segment can be understood as a portion within a certain length of the tip. It can be seen that based on less than 20nm, the recognition accuracy of the optical device can be effectively improved, thereby accurately determining the scanning position of the tip, thus matching the physical signal to a more accurate position, and making the physical property map have a higher resolution.

[0168] In one embodiment, in order to obtain information about changes in the physical properties of the sample, a second auxiliary light can be introduced. Specifically, the optical device 7 is also used to introduce the second auxiliary light ( Figure 7 The light beam obliquely incident on the sample (e.g., a second auxiliary light) is guided to the current test surface to form a second light spot on the current test surface;

[0169] The second auxiliary light is configured to enable:

[0170] Deformation occurs within the area covered by the second light spot on the current surface to be tested.

[0171] In one example, the second auxiliary light may be infrared light. When the infrared light is irradiated, the temperature in the area covered by the second light spot will change, and the area may deform accordingly. When the probe scans the area, the corresponding physical signal can characterize the deformation.

[0172] It is evident that when infrared light is used as the second auxiliary light, changes in the surface morphology of the sample as the temperature changes can be obtained.

[0173] Please refer to Figure 3 In one embodiment, the optical device 7 may include an external optical structure 71, an optical window 72, and an objective lens 73. The light signal of the acquired image can enter the external optical structure 71 through the objective lens and the optical window 72, thereby acquiring the light signal of the image to form the current image mentioned above.

[0174] The optical window 72 can be opened in the device housing 2, the external optical structure 71 can be located outside the device housing 2 and connected to the device housing 2, and the lens 73 can be located inside the device housing 2 and connected to the device housing 2.

[0175] In addition to collecting optical signals, the extracavity optical structure 71 can also emit optical signals, including the first auxiliary light and the second auxiliary light mentioned above, as well as illumination light, etc.

[0176] Please refer to Figure 3In one embodiment, the probe driving structure 42 may include a probe driving component 421 and a scanner 422. The probe 41 is directly or indirectly mounted on the scanner 422, and the scanner 422 is mounted on the probe driving component 421. The probe driving component 421 is electrically connected to the control device 5 to change the positions of the scanner 422 and the probe 41 under the control of the control device 5. The scanner 422 is electrically connected to the control device 5 to drive the probe 41 to perform the scanning motion under the control of the control device 5.

[0177] The probe can be driven to move by the probe driving component 421. For example, it can move at least one of the three degrees of freedom of the X-axis, Y-axis and Z-axis. Furthermore, the probe driving component 421 can also realize rotational motion around at least one of the X-axis, Y-axis and Z-axis. At the same time, this embodiment can also use a probe driving component 421 that does not realize rotational motion.

[0178] In a specific example, the probe driving component 421 can be driven by a motor. Therefore, the probe driving component 421 can be, for example, a probe motor assembly, which may have a drive motor with at least one degree of freedom and a corresponding transmission component. Any solution in the art that can realize at least one degree of freedom of movement can be applied to the probe driving component involved in the embodiments of the present invention. The probe driving component 421 can be installed on the device housing 2.

[0179] The scanning motion can be controlled by the scanner 422. In a specific example, the scanner 422 can be a piezoelectric ceramic scanner. However, this embodiment of the invention does not exclude the use of other types of scanners.

[0180] Specifically, probe 41 can be fixedly connected to probe holder 43 (for example, probe holder 43 can fix probe 41), probe holder 43 can be installed on scanner 422, so that scanning motion is performed under the drive of scanner 422, and scanner 422 can be installed on probe drive assembly 421, so that scanner 422, probe holder 43 installed on scanner 422 and probe 41 can be driven to move together by probe drive assembly 421.

[0181] To obtain the physical signal of probe 41, one can do as follows: Figure 6 and Figure 7 The laser component 8 shown is used to achieve this, but a sensing component located on the probe can also be used.

[0182] In one implementation method, please refer to Figure 6 and Figure 7The chromatography detection device further includes a laser assembly 8, which includes a laser 81 and a detector 82. The control device 5 is electrically connected to the laser 81 and the detector 82 respectively. The probe 41 includes a cantilever and a contact portion. The cantilever is connected between the contact portion and the probe driving structure, specifically between the contact portion and the probe holder 43. The cantilever and the contact portion can be integral or assembled together.

[0183] The positions of the laser 81 and the detector 82 relative to the device housing 2 are fixed, and the interaction position, the position of the laser 81 and the detector 82 are matched so that when the probe 41 performs the scanning motion, the laser of the laser 81 can be incident on the cantilever of the probe 41.

[0184] Correspondingly, the control device 5 is also used for:

[0185] When the probe 41 performs the scanning motion relative to the sample 6, the laser 81 is controlled to incident laser light onto the cantilever, and the signal of the returned light received by the detector 82 is acquired.

[0186] The physical signal can be determined based on the signal of the corresponding returned light.

[0187] In one example, such as Figure 6 As shown, the laser 81 and the detector 82 are directly or indirectly mounted on the device housing 2. In this case, the laser 81 and detector 82 will generate a large amount of heat in a vacuum environment, which will affect the light output and detection performance of the laser and detector, and may also increase the temperature within the vacuum environment, affecting the detection effect. Therefore, a heat conduction structure 83 is provided between the laser 81 and the device housing 2, and a heat conduction structure 83 can also be provided between the detector 82 and the device housing 2. The heat conduction structure 83 can be any material and structure that can conduct heat to the device housing 2.

[0188] In another example, such as Figure 7 As shown, the laser and the detector can also be installed on the optical device 7, specifically on the external optical structure 71 of the optical device 7, thereby avoiding the heat accumulation of the laser and the detector 82 from affecting the vacuum environment.

[0189] In another embodiment not shown, the probe 41 includes a cantilever, a contact portion, and a sensing component. The cantilever is connected between the contact portion and the probe driving structure. The cantilever and the contact portion can be understood with reference to the relevant descriptions above.

[0190] The sensing component can be used to detect the cantilever deformation and / or deformation stress to obtain the corresponding sensing signal; for example, the sensing component can be a component whose resistance value changes under the action of deformation stress, and the corresponding sensing signal can change with the change of the resistance value.

[0191] The sensing component is electrically connected to the control device 5 to feed back the sensing signal to the control device 5; the physical signal may be determined based on the corresponding sensing signal.

[0192] In addition, please refer to Figure 7 The atomic force microscope 4 (e.g., the probe drive structure 42 therein) and the sample carrier device 3 can be rigidly connected by a mechanical circuit 4-3, which can be a short-range (e.g., less than 10 cm) and rigid (greater than 10 N / m) mechanical circuit.

[0193] Please refer to Figure 2 In one embodiment, the chromatography detection device further includes an electrical measuring device 9, which is electrically connected to the probe 41 and the sample 6 to form a circuit between the probe 41 and the sample 6; the electrical measuring device 9 is also electrically connected to the control device 5 to obtain probe position information at different times; thereby, the probe position information and electrical parameters can be synchronized.

[0194] Specifically, the electrical measuring device 9 is used for:

[0195] Obtain the electrical parameters of the circuit at different times; these electrical parameters can be, for example, any one of the circuit's current, voltage, power, temperature, etc.

[0196] Based on the electrical parameters at different times and the probe position information at different times, the surface electrical information of the current test surface is determined. The surface electrical information characterizes the change of electrical parameters when the probe tip reaches different positions relative to the sample.

[0197] After completing N cuts on the sample and obtaining the corresponding surface electrical information after each cut, the N sets of surface electrical information corresponding to the N cuts are integrated.

[0198] exist Figure 2 In the scheme shown, the above process can be implemented using the electrical measuring device 9. In other schemes, the above process can also be implemented using the control device 5. That is, the above process can also be used as a step in the chromatography detection method.

[0199] Please refer to Figure 2 and combined Figure 1 , Figures 3 to 8 The structure shown is in relation to the structure described above:

[0200] Control device 5 can control the cutting tool drive structure through the cutting tool control signal S-0;

[0201] The control device 5 can control the laser to emit laser light through the laser control signal S-1, and obtain the signal of the returned light through the photodetector signal S-2.

[0202] If the probe drive assembly 421 adopts a probe motor assembly, then the control device 5 can control the probe drive assembly through the side motor control signal S-3.

[0203] If the scanner 422 is a piezoelectric ceramic scanner, then the control device 5 can control the scanner 422 to perform scanning motion through the piezoelectric scanner control signal S-4.

[0204] The control device 5 can also control the interaction force between the probe 41 and the sample 6 through the cantilever beam vibration excitation signal S-5. For example, the interaction force can be kept consistent so that the tip of the probe 41 can undulate with the surface of the sample 6 when scanning.

[0205] The control device 5 can also be electrically connected to a temperature control component (e.g., a freezing component) located on the sample stage 31, thereby controlling the temperature of the sample stage and the sample 6 on it via the sample stage temperature control signal S-6.

[0206] The control device 5 can control the nano-displacement platform 32 via the sample stage motor control signal S-7.

[0207] The control device 5 and the optical device 7 can also acquire real-time images through the optical system synchronization control signal S-8, thereby determining the probe position information based on the real-time images.

[0208] The control device 5 and the electrical measurement device 9 can also synchronize the probe position information through the electrical measurement unit control signal S-9, so that the electrical parameters can be integrated based on the probe position information.

[0209] The electrical measuring device 9 can also acquire corresponding electrical parameters through the probe electrical signal S-10 and the sample electrical signal S-11.

[0210] In addition to the functions described above, the probe can also be replaced during the implementation process, thanks to the vacuum environment.

[0211] Please refer to Figure 8The chromatography detection device further includes a needle changing stage 33, which can be located on the sample stage or the nano-displacement platform, or can be set independently of the sample stage and the nano-displacement platform. The probe driving structure is provided with a probe mounting part (for example, it can be an adsorption component capable of generating adsorption). The probe 41 is detachably mounted on the probe mounting part (for example, adsorbed on the probe mounting part) by a probe holder 43. The needle changing stage 33 is provided with at least two probe receiving positions.

[0212] Figure 8 The probe 41 on the needle changing station 33 shown can be regarded as a spare probe.

[0213] If the at least two probe receiving positions include an empty first receiving position and a second receiving position that has received a spare probe and its probe holder, then:

[0214] The control device 5 is also used for:

[0215] The probe driving structure 42 controls the probe 41 and its probe holder 43 to enter the first receiving position.

[0216] The probe mounting part is controlled to separate from the corresponding probe holder so that the probe and its probe holder can remain in the first receiving position; wherein, for example, separation can be achieved by controlling the adsorption component to stop adsorbing.

[0217] The probe driving structure controls the probe mounting part to move to the outside of the second receiving position;

[0218] The probe mounting part is controlled to mate with the probe holder of the spare probe so that the spare probe can be used as the probe currently in use; wherein, for example, the mate can be achieved by controlling the adsorption of the adsorption component.

[0219] Based on the above Figure 8 The process shown allows for probe replacement in a vacuum environment, thus avoiding the need to open the equipment casing and ensuring work efficiency during the testing process.

[0220] In some examples, the sample carrier device 3 may also include an active vibration isolation table, and the nano-displacement platform 32 and the sample stage 31 may be directly or indirectly installed on the active vibration isolation table, which may be housed in the equipment housing 2.

[0221] In some examples, the top of the device housing 2 may be provided with an observation window, and the side wall of the device housing 2 may be provided with an electrical connection 2 and an optical interface. The electrical interface can be used to realize the transmission of electrical signals between the internal structures and control devices 5 and electrical measuring devices 9.

[0222] The side wall of the device housing 2 may also be provided with an optical interface, so that the optical device 7 can act in a vacuum environment through the optical interface.

[0223] In summary, the tomographic detection device and method based on atomic force microscopy and mechanical cutting provided in this embodiment of the invention can obtain a physical property map characterizing the surface properties by controlling the interaction between the probe of the atomic force microscope and the current surface to be tested, and controlling the probe to perform scanning motion relative to the sample. Compared with the prior art of obtaining the current surface image using an image acquisition device, the surface detection information of this invention can cover the depth information of the surface to be tested, and thus, richer information can be obtained.

[0224] Since atomic force microscopes are typically used in atmospheric environments, this invention further proposes to create a vacuum environment when using an atomic force microscope. This allows for both atomic force microscope detection and mechanical cutting of samples within the same vacuum environment, avoiding contamination of the detection and cutting effects by atmospheric impurities (gas molecules, water vapor, etc.). Consequently, this effectively improves the cutting and detection effects, as well as the efficiency of both processes.

[0225] Furthermore, unlike the cutting and inspection processes in an atmospheric environment, this invention is designed for a vacuum environment. By controlling the probe driving structure and the cutting blade driving structure through a control device, precise control of the cutting blade and probe is achieved during the cutting and inspection process, ensuring the accurate implementation of cutting and inspection.

[0226] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, and not to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. A chromatographic detection device based on atomic force microscopy and mechanical cutting, characterized in that, The device includes a housing for creating a vacuum environment inside, an atomic force microscope, a mechanical cutting device, a control device, and a sample carrier; the sample carrier, the mechanical cutting device, and the atomic force microscope are all located within the vacuum environment. The atomic force microscope includes a probe and a probe driving structure for driving the probe to move; the mechanical cutting device includes a cutting tool and a cutting tool driving structure for driving the cutting tool to move; the control device controls the probe driving structure and the cutting tool driving structure respectively through signals; The control device is used for: The cutting tool drive structure controls the cutting tool to reach the cutting preparation position. The cutting blade is controlled to cut the sample surface on the sample support device through the cutting blade drive structure and / or the sample support device to form the current test surface; The probe driving structure controls the probe to be in an interactive position with the current test surface, and the probe driving structure and / or the sample carrying device control the probe to perform scanning motion relative to the sample, thereby using the probe to measure the physical properties of the current test surface; wherein, the changes in physical signals at multiple measurement points during the scanning motion constitute a physical property map of the current test surface. Repeat the above process to use mechanical cutting to cut the sample surface again and form a new current measurement surface. Repeat the probe surface property measurement and scanning. Three-dimensional property tomography is formed by alternating the use of the probe property measurement and in-situ cutting. The sample is cut and probed in situ; The chromatography detection device further includes an optical device, which is mounted on the device housing and faces the area to which the sample carrier belongs, with the sample located between the sample carrier and the optical device; the sample carrier is positioned to match the focal plane of the optical device, so that the sample on the sample carrier can be located on the focal plane. The optical device is used for: The system acquires real-time images within its coverage area and sends the real-time images to the control device. The control device is also used for: When the probe performs the scanning motion relative to the sample, the probe position information of the probe tip relative to the sample at different times is determined based on the real-time image; When the control device uses the probe to perform physical property measurements on the current surface to be measured, it is specifically used for: Based on the probe position information and the physical signal at different times, the physical property map of the current surface to be tested is determined; The optical device is further configured to introduce a first auxiliary light and guide the first auxiliary light to the current test surface to form a first light spot on the current test surface; the first auxiliary light is an auxiliary light capable of forming Raman light; The first auxiliary light is configured to enable: In the current image, the spectral information exhibited by the tip segment of the probe is different from the spectral information of other areas within the area covered by the first spot, and the size range of the tip segment is less than 20 nm; The optical device is also used to introduce a second auxiliary light and guide the second auxiliary light to the current test surface to form a second light spot on the current test surface; The second auxiliary light is configured to enable: Deformation occurs within the area covered by the second light spot on the current surface to be tested; The second auxiliary light is infrared light. When the infrared light is irradiated, the temperature in the area covered by the second light spot will change. Correspondingly, the area may deform. When the probe scans to the area, the corresponding physical signal can characterize this deformation.

2. The tomographic detection device based on atomic force microscopy and mechanical cutting according to claim 1, characterized in that, The sample carrying device includes a sample stage, which is equipped with a freezing component. The freezing component is used to provide a cold source to the sample on the sample stage so that the sample is in a frozen state.

3. The tomographic detection device based on atomic force microscopy and mechanical cutting according to claim 2, characterized in that, The freezing temperature of the cold source is between liquid nitrogen temperature and room temperature.

4. The tomographic detection device based on atomic force microscopy and mechanical cutting according to claim 2, characterized in that, The sample carrier device further includes a nano-displacement platform, and the sample stage is mounted on the nano-displacement platform; the nano-displacement platform is electrically connected to the control device. The control device, through the cutting blade drive structure and / or the sample carrier, controls the cutting blade to cut the sample surface on the sample carrier to form the current test surface, specifically for: The cutting tool is controlled to cut the surface of the sample using the nano-displacement platform.

5. The tomographic detection device based on atomic force microscopy and mechanical cutting according to claim 4, characterized in that, When the control device controls the probe to perform scanning motion relative to the sample through the probe driving structure and / or the sample carrying device, it is specifically used for: The probe is controlled to perform scanning motion relative to the sample through the probe-driven structure and the nano-displacement platform.

6. The tomographic detection device based on atomic force microscopy and mechanical cutting according to claim 1, characterized in that, It also includes an electrical measuring device, which is electrically connected to the probe and the sample to form a circuit between the probe and the sample; the electrical measuring device is also electrically connected to the control device to obtain probe position information at different times; The electrical measuring device is used for: Obtain the electrical parameters of the circuit at different times; Based on the electrical parameters at different times and the probe position information at different times, the surface electrical information of the current test surface is determined. The surface electrical information characterizes the change of electrical parameters when the probe tip reaches different positions relative to the sample. After completing N cuts on the sample and obtaining the corresponding surface electrical information after each cut, the N sets of surface electrical information corresponding to the N cuts are integrated.

7. The tomographic detection device based on atomic force microscopy and mechanical cutting according to claim 1, characterized in that, It also includes a laser assembly, which includes a laser and a detector, and the control device is electrically connected to the laser and the detector respectively; the probe includes a cantilever and a contact portion, and the cantilever is connected between the contact portion and the probe driving structure; The laser and the detector are positioned relative to the device housing. The interaction position and the positions of the laser and the detector are matched so that when the probe performs the scanning motion relative to the sample, the laser beam of the laser can be incident on the cantilever of the probe. The control device is also used for: While the probe is performing the scanning motion relative to the sample, the laser is controlled to incident a laser beam onto the cantilever, and the signal of the returned light received by the detector is acquired. The physical signal is determined based on the signal of the corresponding return light.

8. The tomographic detection device based on atomic force microscopy and mechanical cutting according to claim 7, characterized in that, The laser and the detector are directly or indirectly mounted on the housing of the device, or mounted on an optical device; If the laser and the detector are directly or indirectly installed on the device housing, then: a heat conduction structure is provided between the laser and the device housing, and a heat conduction structure is also provided between the detector and the device housing.

9. The tomographic detection device based on atomic force microscopy and mechanical cutting according to claim 1, characterized in that, The control device is also used for: After completing N cuts on the sample and obtaining the corresponding physical property map after each cut, a corresponding three-dimensional tomographic image is constructed based on the N physical property maps; where N is an integer greater than or equal to 2.

10. The tomographic detection device based on atomic force microscopy and mechanical cutting according to claim 1, characterized in that, The probe includes a cantilever, a contact portion, and a sensing component, wherein the cantilever is connected between the contact portion and the probe driving structure; The sensing component is used to detect the cantilever deformation and / or deformation stress, and obtain the corresponding sensing signal; The sensing component is electrically connected to the control device to feed back the sensing signal to the control device; The physical signal is determined based on the corresponding inductive signal.

11. The tomographic detection device based on atomic force microscopy and mechanical cutting according to claim 1, characterized in that, It also includes a needle changing station, the probe driving structure is provided with a probe mounting part, the probe is detachably mounted on the probe mounting part by a probe holder, and the needle changing station is provided with at least two probe receiving positions; If the at least two probe receiving positions include an empty first receiving position and a second receiving position that has received a spare probe and its probe holder, then: The control device is also used for: The probe driving structure controls the probe and its probe holder to enter the first receiving position. The probe mounting part is controlled to separate from the corresponding probe holder so that the probe and its probe holder can remain in the first receiving position; The probe driving structure controls the probe mounting part to move to the outside of the second receiving position; The probe mounting part is controlled to dock with the probe holder of the spare probe so that the spare probe can be used as the probe currently in use.

12. The tomographic detection device based on atomic force microscopy and mechanical cutting according to claim 1, characterized in that, The probe driving structure includes a probe driving component and a scanner, wherein the probe is directly or indirectly mounted on the scanner, and the scanner is mounted on the probe driving component; The probe driving component is electrically connected to the control device to change the position of the scanner and the probe under the control of the control device; The scanner is electrically connected to the control device to drive the probe to perform the scanning motion under the control of the control device.

13. A tomographic detection method based on atomic force microscopy and mechanical cutting, characterized in that, The tomographic detection device based on atomic force microscopy and mechanical cutting as described in any one of claims 1 to 12 is adopted. The tomographic detection device includes a housing for forming a vacuum environment inside, an atomic force microscope, a mechanical cutting device, a control device, and a sample holding device; the sample holding device, the mechanical cutting device, and the atomic force microscope are all located in the vacuum environment. The atomic force microscope includes a probe and a probe driving structure for driving the probe to move; the mechanical cutting device includes a cutting tool and a cutting tool driving structure for driving the cutting tool to move. The control device controls the probe driving structure and the cutting tool driving structure respectively through signals; The chromatography detection method is applied to the control device, including: The cutting tool drive structure controls the cutting tool to reach the cutting preparation position. The cutting blade is controlled to cut the sample surface on the sample support device through the cutting blade drive structure and / or the sample support device to form the current test surface; The probe driving structure controls the probe to be in an interactive position with the current surface under test. The probe is controlled to perform scanning motion relative to the sample through the probe driving structure and / or the sample carrying device, and the physical properties of the current test surface are measured using the probe; wherein, the changes in physical signals at multiple measurement points of the scanning motion constitute a physical property map of the current test surface; Repeat the above process. After N cuts are completed on the sample and a corresponding physical property map is obtained after each cut, a corresponding three-dimensional tomographic image is constructed based on the N physical property maps; where N is an integer greater than or equal to 2. The sample is cut and probed in situ.

Images