Embedded miniature stretching platform for in-situ test of atomic force microscope

Abstract

The invention provides an embedded miniature stretching platform for an atomic force microscope in-situ test, and relates to the technical field of material stretching, the embedded miniature stretching platform comprises a base, a transmission case, a transmission unit, a first displacement block, a second displacement block, a third fixed block, a fine tuning block, a fine tuning rod, a force sensor, a temperature control base, a scanning head and the like, and all the parts cooperate to support sample stretching and testing. The motor drives the lead screw to rotate in the same direction through the transmission unit, and the two displacement blocks are driven to move reversely by means of the opposite internal threads of the two lead screw nuts to achieve sample stretching; the first fine-tuning knob drives the fine-tuning rod, the fine-tuning block and the fourth fixing block to move in a small range to adjust the stretching amount, the second fine-tuning knob fixes the fine-tuning effect, and the high-precision in-situ test requirement is met in cooperation with temperature regulation and control and the scanning head.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of material stretching, in particular to an embedded micro tensile platform for in-situ testing of an atomic force microscope. BACKGROUND

[0002] With the deepening of the research on micro-nano scale in material science, the in-situ testing of the atomic force microscope is widely used because it can observe the mechanical behavior of the material in real time. The accuracy and stability of the matching micro tensile platform are increasingly demanding. The existing tensile platform mostly relies on single lead screw transmission or manual adjustment, and it is difficult to achieve efficient synchronous control of the sample stretching process. In the micro-nano scale test, the traditional transmission structure is prone to motion lag, uneven stress and other problems, and cannot meet the high-precision stretching demand. Therefore, it is necessary to innovate the transmission design to improve the performance of the platform.

[0003] Most of the traditional tensile devices for atomic force microscopes adopt the transmission mode of single lead screw driving a single displacement block. If the sample needs to be stretched in opposite directions, additional driving components need to be added, which not only has a complex structure, but also easily causes the sample to be out of balance due to the asynchronization of double driving. Although some platforms try to use double lead screws, the screw nut threads are in the same direction, and the displacement block moves in the same direction when the motor rotates in the same direction, which cannot directly realize stretching. Therefore, it is necessary to control the motor direction through a complex program, which is tedious to operate and affects the efficiency and accuracy of in-situ testing.

[0004] Therefore, it is necessary to design an embedded micro tensile platform for in-situ testing of an atomic force microscope to solve the problem that the existing tensile device mostly relies on single lead screw or double lead screw with consistent thread direction, and needs complex structure or program control to realize sample stretching. SUMMARY

[0005] In view of this, the present application provides an embedded micro tensile platform for in-situ testing of an atomic force microscope, which aims to solve the problem that the existing tensile device mostly relies on single lead screw or double lead screw with consistent thread direction, and needs complex structure or program control to realize sample stretching.

[0006] In one aspect, the present application provides an embedded micro tensile platform for in-situ testing of an atomic force microscope, comprising: a base arranged in a horizontal direction, a first sliding rail is arranged on the top surface of the base, two moving blocks are slidably connected with the first sliding rail, and a first fixed protrusion is arranged at one end of the base; a transmission box arranged at the other end of the base in a vertical direction, the transmission box is fixedly connected with the base; The transmission unit comprises a first gear, a second gear, a first screw rod, a first screw rod nut, a second screw rod, a second screw rod nut, a reduction box and a motor, one end of the reduction box is detachably connected with the first gear, the other end of the reduction box is detachably connected with the motor, the first gear is engaged with the second gear, one end of the first screw rod is detachably connected with the second gear, the other end of the first screw rod is fixedly connected with one end of the second screw rod, the first screw rod is rotationally connected with the first screw rod nut through a first external thread and a first internal thread, the first external thread and the first internal thread are engaged, the second screw rod is rotationally connected with the second screw rod nut through the first external thread and a second internal thread, the first external thread and the second internal thread are engaged, the screw thread directions of the first internal thread and the second internal thread are opposite, the other end of the second screw rod is slidingly connected with the first fixed protrusion, and the first gear and the second gear are arranged in the transmission box. A first displacement block is detachably connected with the first screw rod nut, and the bottom of the first displacement block is fixedly connected with one of the moving blocks. A second displacement block is detachably connected with the second screw rod nut, and the bottom of the second displacement block is fixedly connected with the other moving block. A third fixed block is arranged between the first displacement block and the second displacement block, and the bottom of the third fixed block is fixedly connected with the base.

[0007] Further, a first sliding groove is formed in the bottom of the moving block, and the first sliding groove is slidingly connected with the first sliding rail. A first connecting through hole and a second connecting through hole are formed in the side surface of the transmission box, the reduction box is fixedly connected with the first gear through the first connecting through hole, and the first screw rod is fixedly connected with the second gear through the second connecting through hole.

[0008] Further, a first screw rod through hole is formed in the top surface of the first screw rod nut, and the first internal thread is formed in the inside of the first screw rod through hole. A second screw rod through hole is formed in the top surface of the second screw rod nut, and the second internal thread is formed in the inside of the second screw rod through hole. The first external thread is formed in the side surface of the first screw rod and the second screw rod.

[0009] Further, the first displacement block comprises: A first nut groove is formed in the side surface of the first displacement block. A first nut through hole is formed in the bottom of the first nut groove. A motor groove is formed in the side surface of the first displacement block. The top surface of the first displacement block is provided with a second fixed block.

[0010] Further comprising: A first fixed block, the bottom surface of the first fixed block is detachably connected with the top surface of the second fixed block; A fixed groove, a plurality of fixed grooves are arranged on the bottom surface of the first fixed block and the top surface of the second fixed block.

[0011] Further, the second displacement block comprises: A second nut groove is arranged on the side surface of the second displacement block; A second nut through hole is arranged at the bottom of the second nut groove; Two second sliding rails are symmetrically arranged on the top surface of the second displacement block; The top surface of the second displacement block is provided with a fourth fixed block, the top surface of the fourth fixed block is provided with a plurality of fixed grooves, the bottom surface of another first fixed block is detachably connected with the top surface of the fourth fixed block, the bottom of the fourth fixed block is symmetrically provided with two third sliding grooves, and the third sliding groove is in sliding connection with the second sliding rail.

[0012] Further, the third fixed block comprises: A first fixed plate is arranged on the top of the third fixed block; A temperature control base is arranged on the bottom of the third fixed block, and the first fixed plate is detachably connected with the temperature control base; A temperature control groove is arranged on the top surface of the temperature control base; A screw rod groove is arranged on the bottom surface of the temperature control base.

[0013] Further comprising: A fine adjustment block is arranged on the top surface of the second displacement block, the fine adjustment block is in sliding connection with the second displacement block, and the fine adjustment block is fixedly connected with the fourth fixed block; A fine adjustment rod is arranged in the horizontal direction, one end of the fine adjustment rod is fixedly connected with a force sensor, the other end of the fine adjustment rod is fixedly connected with a first fine adjustment knob, and a second external thread is arranged on the side surface of the fine adjustment rod; A fine adjustment shaft is arranged in the horizontal direction, a first fine adjustment through hole is arranged on the top surface of the fine adjustment shaft, a third internal thread is arranged in the first fine adjustment through hole, the third internal thread is engaged with the second external thread, and the fine adjustment shaft is in rotational connection with the fine adjustment rod through the third internal thread and the second external thread.

[0014] Further, the fine adjustment block comprises: Sensor groove, open in the top surface of the fine adjustment block, the force sensor is arranged in the sensor groove, and the sensor is in sliding connection with the sensor groove; Second sliding groove, two second sliding grooves are symmetrically arranged at the bottom of the fine adjustment block, and the second sliding groove is in sliding connection with the second sliding rail; Second fine adjustment through hole, arranged in the side surface of the fine adjustment block, the second fine adjustment knob is rotatably connected with the fine adjustment block through the second fine adjustment through hole.

[0015] Further, it also includes: Second fixed convex, arranged on the side surface of the fine adjustment shaft; Second fixed plate, arranged in the horizontal direction, the second fixed convex is fixedly connected with the second fixed plate; Scanning head, arranged on the bottom surface of the second fixed plate in the vertical direction, the scanning head is used for measuring the stretching distance.

[0016] Compared with the prior art, the embedded micro stretching platform for in-situ testing of atomic force microscope has the beneficial effects that through the double screw nut reverse internal thread design, when the motor drives the screw rod to rotate in the same direction, the two displacement blocks can move in the opposite direction synchronously, without the need for complex structure or program control, the sample can be stably stretched; by means of the first fine adjustment knob driving the fine adjustment rod, the fine adjustment block and the fourth fixed block to move in a small range, the sample stretching amount can be accurately adjusted, the second fine adjustment knob can fix the fine adjustment effect, and the high-precision testing requirement is met. At the same time, the sample is fixed reliably, the test temperature can be controlled through the temperature control structure, the scanning head can accurately measure the stretching distance, the overall structure is compact without component interference, the transmission is stable, and the accuracy and efficiency of the in-situ testing of the atomic force microscope are effectively improved. BRIEF DESCRIPTION OF DRAWINGS

[0017] By reading the detailed description of the preferred embodiments below, various other advantages and benefits will become apparent to those of ordinary skill in the art. The drawings are only for the purpose of illustrating the preferred embodiments and are not considered to be limiting on the present application. Moreover, the same reference symbols are used throughout the drawings to denote the same components. In the drawings: Figure 1 A structure schematic view of an embedded micro stretching platform for in-situ testing of atomic force microscope is provided for the embodiments of the present application; Figure 2 A side view of an embedded micro stretching platform for in-situ testing of atomic force microscope is provided for the embodiments of the present application; Figure 3 A structure schematic view of a moving block is provided for the embodiments of the present application; Figure 4 A structure schematic view of a transmission box is provided for the embodiments of the present application; Figure 5 A schematic structural diagram of a transmission unit provided for an embodiment of the present application is shown in FIG. 1; Figure 6 A schematic structural diagram of a first screw nut provided for an embodiment of the present application is shown in FIG. 2; Figure 7 A schematic structural diagram of a second screw nut provided for an embodiment of the present application is shown in FIG. 3; Figure 8 A schematic structural diagram of a first displacement block provided for an embodiment of the present application is shown in FIG. 4; Figure 9 A schematic structural diagram of a first fixed block provided for an embodiment of the present application is shown in FIG. 5; Figure 10 A schematic structural diagram of a second fixed block provided for an embodiment of the present application is shown in FIG. 6; Figure 11 A schematic structural diagram of a third fixed block provided for an embodiment of the present application is shown in FIG. 7; Figure 12 A schematic structural diagram of a second displacement block provided for an embodiment of the present application is shown in FIG. 8; Figure 13 A schematic structural diagram of a fine adjustment block provided for an embodiment of the present application is shown in FIG. 9; Figure 14 A schematic structural diagram of a fine adjustment rod provided for an embodiment of the present application is shown in FIG. 10; Figure 15 A schematic structural diagram of a fine adjustment shaft provided for an embodiment of the present application is shown in FIG. 11; Figure 16 A schematic structural diagram of a fourth fixed block provided for an embodiment of the present application is shown in FIG. 12; In the figure: 100 - base; 110 - first sliding rail; 120 - moving block; 121 - first sliding groove; 130 - first fixed protrusion; 200 - transmission box; 210 - first connecting through hole; 220 - second connecting through hole; 300 - transmission unit; 310 - first gear; 320 - second gear; 330 - speed reducer; 340 - motor; 350 - first lead screw; 360 - first lead screw nut; 361 - first lead screw through hole; 362 - first internal thread; 370 - second lead screw; 380 - second lead screw nut; 381 - second lead screw through hole; 382 - second internal thread; 390 - first external thread; 400 - first displacement block; 410 - first nut groove; 420 - first nut through hole; 430 - motor groove; 440 - first fixed block; 450 - second fixed block; 460 - fixed groove; 500 - third fixed block; 510 - first fixed plate; 520 - temperature control base; 521 - temperature control groove; 530 - lead screw groove; 600 - second displacement block; 610 - second nut groove; 620 - second nut through hole; 630 - second sliding rail; 640 - fine adjustment block; 641 - sensor groove; 642 - second sliding groove; 643 - second fine adjustment through hole; 650 - first fine adjustment knob; 660 - second fine adjustment knob; 670 - fine adjustment rod; 671 - second external thread; 680 - fine adjustment shaft; 681 - first fine adjustment through hole; 682 - third internal thread; 690 - force sensor; 691 - fourth fixed block; 692 - third sliding groove; 700 - second fixed protrusion; 800 - second fixed plate; 900 - scanning head. DETAILED DESCRIPTION

[0018] The specific embodiments of the present application will be further described in conjunction with the drawings and examples. The following examples are used to illustrate the present application, but are not used to limit the scope of the present application.

[0019] In the description of the present application, it should be understood that the terms "center", "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and therefore cannot be understood as indicating or implying that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the present application.

[0020] The terms "first", "second" are only for descriptive purposes, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the technical features indicated. Therefore, the features defined with "first", "second" can explicitly or implicitly include one or more of the features. In the description of the present application, unless otherwise stated, the meaning of "a plurality of" is two or more.

[0021] In the description of the present application, it should be explained that, unless otherwise explicitly specified and limited, the terms "mounting", "connecting", "connection" should be understood in a broad sense, for example, it can be fixed connection, or detachable connection, or integral connection; it can be mechanical connection, or electrical connection; it can be direct connection, or indirect connection through intermediate medium, or internal communication of two elements. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0022] Referring to Figure 1 and Figures 3-7 As shown in the drawings, in some embodiments of the present application, one kind, comprising: base 100, transmission box 200, transmission unit 300, first displacement block 400, second displacement block 600, third fixed block 500; the base 100 is arranged along the horizontal direction, the top surface of the base 100 is provided with a first sliding rail 110, two moving blocks 120 are slidably connected with the first sliding rail 110, one end of the base 100 is provided with a first fixed protrusion 130; the transmission box 200 is arranged along the vertical direction at the other end of the base 100, the transmission box 200 is fixedly connected with the base 100; the transmission unit 300 comprises: first gear 310, second gear 320, first lead screw 350, first lead screw nut 360, second lead screw 370, second lead screw nut 380, reduction box 330 and motor 340, one end of the reduction box 330 is detachably connected with the first gear 310, the other end of the reduction box 330 is detachably connected with the motor 340, the first gear 310 is engaged with the second gear 320, one end of the first lead screw 350 is detachably connected with the second gear 320, the other end of the first lead screw 350 is fixedly connected with one end of the second lead screw 370, the first lead screw 350 is rotatably connected with the first lead screw nut 360 through the first external thread 390 and the first internal thread 362, the first external thread 390 and the first internal thread 362 are engaged, the second lead screw 370 is rotatably connected with the second lead screw nut 380 through the first external thread 390 and the second internal thread 382, the first external thread 390 and the second internal thread 382 are engaged, the screw directions of the first internal thread 362 and the second internal thread 382 are opposite, the other end of the second lead screw 370 is slidably connected with the first fixed protrusion 130, the first gear 310 and the second gear 320 are arranged in the transmission box 200; the first displacement block 400 is detachably connected with the first lead screw nut 360, the bottom of the first displacement block 400 is fixedly connected with one moving block 120; the second displacement block 600 is detachably connected with the second lead screw nut 380, the bottom of the second displacement block 600 is fixedly connected with the other moving block 120; the third fixed block 500 is arranged between the first displacement block 400 and the second displacement block 600, and the bottom of the third fixed block 500 is fixedly connected with the base 100.

[0023] Specifically, when the sample is stretched, one end of the sample is fixed between the first fixed block 440 and the second fixed block 450, the sample is placed on the top surface of the first fixed plate 510, and the other end of the sample is fixed between another first fixed block 440 and the fourth fixed block 691. The first fixed plate 510 is provided with a small slope at each end, and the height of the first fixed plate 510 is higher than the height of the two first fixed blocks 440, so that the sample is in a stretching state after being fixed, with the middle part being pushed by the third fixed block 500. The two small slopes can increase the stress area of the sample and ensure that the sample is not damaged when it is pushed by the third fixed block 500.

[0024] It can be understood that the base 100 is arranged in the horizontal direction, which can provide a stable support foundation for the entire platform and ensure that the platform does not deviate during the stretching test; the first sliding rail 110 is in sliding connection with the two moving blocks 120, which provides guidance for the movement of the first displacement block 400 and the second displacement block 600 and ensures the linearity of their movement; the first fixed protrusion 130 can limit the end of the second lead screw 370 to prevent axial movement when the second lead screw 370 rotates; the transmission box 200 can wrap the first gear 310 and the second gear 320 inside to avoid the influence of external dust and impurities on the gear meshing transmission, and to protect the gear structure from being damaged by collision; in the transmission unit 300, the motor 340 drives the first gear 310 to rotate through the speed reducer 330, the first gear 310 meshes with the second gear 320 to drive the first lead screw 350 and the second lead screw 370 to rotate in the same direction, and because the first internal thread 362 of the first lead screw nut 360 and the second internal thread 382 of the second lead screw nut 380 have opposite screw directions, the first lead screw nut 360 and the second lead screw nut 380 can drive the first displacement block 400 and the second displacement block 600 to move in opposite directions, finally realizing stable stretching of the sample, and the transmission structure has high transmission efficiency and controllable stretching process; the first displacement block 400 and the first lead screw nut 360 are detachably connected, and the second displacement block 600 and the second lead screw nut 380 are detachably connected, which facilitates maintenance and replacement of the displacement block or the lead screw nut in the later stage; the third fixed block 500 is arranged between the first displacement block 400 and the second displacement block 600, which can provide support for the middle part of the sample to prevent the middle part of the sample from collapsing during stretching and ensure that the stretching stress is concentrated in the sample test area.

[0025] Referring to Figure 1 and Figure 3As shown, in some embodiments of the present application, the bottom of the moving block 120 is provided with a first sliding groove 121, and the first sliding groove 121 is in sliding connection with the first sliding rail 110; the side of the transmission box 200 is provided with a first connecting through hole 210 and a second connecting through hole 220, and the reduction box 330 is fixedly connected with the first gear 310 through the first connecting through hole 210, and the first lead screw 350 is fixedly connected with the second gear 320 through the second connecting through hole 220.

[0026] Specifically, the groove type of the first sliding groove 121 is matched with the cross-sectional shape of the first sliding rail 110, which ensures the stability of the moving block 120 when sliding along the first sliding rail 110. The diameters of the first connecting through hole 210 and the second connecting through hole 220 are matched with the diameters of the output shaft of the reduction box 330 and the first lead screw 350 respectively, which ensures the tightness of the connection.

[0027] It can be understood that the first sliding groove 121 at the bottom of the moving block 120 is in sliding connection with the first sliding rail 110, and through the precise matching of the sliding groove and the sliding rail, the movement direction of the moving block 120 is further limited, which prevents the moving block 120 from deviating left and right when sliding, and improves the stability and straightness of the movement of the first displacement block 400 and the second displacement block 600; the first connecting through hole 210 on the side of the transmission box 200 can provide positioning for the connection between the reduction box 330 and the first gear 310, which ensures that the output shaft of the reduction box 330 is coaxially connected with the first gear 310, and reduces the transmission gap; the second connecting through hole 220 can provide positioning for the connection between the first lead screw 350 and the second gear 320, which ensures that the first lead screw 350 is coaxially fixed with the second gear 320, improves the coaxiality of the transmission structure, and further ensures the stability of the rotation of the lead screw, and reduces the stretching error caused by insufficient coaxiality.

[0028] Referring to Figure 1 and Figures 3-7 As shown, in some embodiments of the present application, the top surface of the first lead screw nut 360 is provided with a first lead screw through hole 361, and the first internal thread 362 is arranged inside the first lead screw through hole 361; the top surface of the second lead screw nut 380 is provided with a second lead screw through hole 381, and the second internal thread 382 is arranged inside the second lead screw through hole 381; the first external thread 390 is arranged on the side surface of the first lead screw 350 and the second lead screw 370.

[0029] Specifically, the machining precision of the first external thread 390 on the side surface of the first lead screw 350 and the second lead screw 370 is consistent, which ensures the stability of the meshing transmission of the first internal thread 362 and the second internal thread 382. The axes of the first lead screw through hole 361 and the second lead screw through hole 381 respectively coincide with the center lines of the first lead screw nut 360 and the second lead screw nut 380, which ensures the coaxiality when the lead screw rotates.

[0030] It can be understood that the first screw hole 361 in the top surface of the first screw nut 360 provides space for the first screw 350 to pass through, and the first internal thread 362 inside the first screw hole 361 precisely engages with the first external thread 390 on the side surface of the first screw 350, which can ensure that the first screw 350 rotates smoothly to drive the first screw nut 360 to move, reducing transmission jamming; the second screw hole 381 in the top surface of the second screw nut 380 provides space for the second screw 370 to pass through, and the second internal thread 382 inside the second screw hole 381 precisely engages with the first external thread 390 on the side surface of the second screw 370, which ensures that the second screw 370 rotates smoothly to drive the second screw nut 380 to move; the first external thread 390 has the same machining precision on the side surfaces of the first screw 350 and the second screw 370, and cooperates with the opposite first internal thread 362 and second internal thread 382, which can ensure the synchronization of the reverse movement of the first screw nut 360 and the second screw nut 380, avoid the displacement block moving out of sync due to the difference in thread precision, and thus improve the uniformity of sample stretching and reduce damage to the sample due to uneven stress during stretching.

[0031] Referring to Figure 8 In some embodiments of the present application, the first displacement block 400 includes a first nut slot 410, a first nut through hole 420, and a motor slot 430. The first nut slot 410 is formed on the side surface of the first displacement block 400. The first nut through hole 420 is formed at the bottom of the first nut slot 410. The motor slot 430 is formed on the side surface of the first displacement block 400. The top surface of the first displacement block 400 is provided with a second fixed block 450.

[0032] Specifically, the motor slot 430 is provided to avoid interference between the first displacement block 400 and the motor 340 and the reduction box 330 during sliding, ensuring smooth movement of the first displacement block 400. The size of the first nut slot 410 is adapted to the shape of the first screw nut 360, and the axis of the first nut through hole 420 is aligned with the axis of the first screw hole 361, ensuring the transmission precision after the first screw nut 360 is connected to the first displacement block 400.

[0033] It can be understood that the first nut groove 410 on the side of the first displacement block 400 is matched with the shape of the first lead screw nut 360, which can facilitate the quick positioning and installation of the first lead screw nut 360 on the first displacement block 400, and improve the assembly efficiency; the motor groove 430 on the side of the first displacement block 400 reserves the displacement space for the motor 340 and the reduction box 330, which can avoid collision and interference between the first displacement block 400 and the motor 340 and the reduction box 330 when the first displacement block 400 slides, and ensure that the first displacement block 400 can smoothly slide to a position close to the transmission box 200, thereby expanding the range of sample stretching; the second fixing block 450 on the top surface of the first displacement block 400 provides a basis for the installation of the first fixing block 440, and the cooperation of the first fixing block 440 and the second fixing block 450 can realize the fixation of one end of the sample, thereby providing stable structural support for the end fixation of the sample stretching.

[0034] Referring to Figure 1 and Figures 9-10 In some embodiments of the present application, a first fixing block 440 and a fixing groove 460 are further included; the bottom surface of the first fixing block 440 is detachably connected to the top surface of the second fixing block 450; and a plurality of fixing grooves 460 are formed in the bottom surface of the first fixing block 440 and the top surface of the second fixing block 450.

[0035] Specifically, the number of fixing grooves 460 is at least two, and they are symmetrically distributed on the bottom surface of the first fixing block 440 and the top surface of the second fixing block 450, which can enhance the firmness of the connection between the first fixing block 440 and the second fixing block 450, and facilitate stable clamping of the end of the sample.

[0036] It can be understood that the detachable connection between the bottom surface of the first fixing block 440 and the top surface of the second fixing block 450 can facilitate the replacement of different specifications of the first fixing block 440 according to the thickness, width and other dimensions of the sample, thereby improving the adaptability of the platform to different types of samples, and facilitating the maintenance or replacement of the first fixing block 440 in the later stage; the plurality of fixing grooves 460 formed in the bottom surface of the first fixing block 440 and the top surface of the second fixing block 450 can increase the friction between the end of the sample and the fixing block, prevent the sample from slipping off from the end during stretching, and further clamp the end of the sample by cooperating with the clamp or fastener, thereby ensuring the stability of the end position of the sample during stretching and providing protection for accurate testing.

[0037] Referring to Figure 1 and Figure 12As shown, in some embodiments of the present application, the second displacement block 600 comprises: a second nut groove 610, a second nut through hole 620, and a second slide rail 630. The second nut groove 610 is formed on the side surface of the second displacement block 600. The second nut through hole 620 is formed on the bottom of the second nut groove 610. The two second slide rails 630 are symmetrically arranged on the top surface of the second displacement block 600. The top surface of the second displacement block 600 is provided with a fourth fixed block 691. The top surface of the fourth fixed block 691 is provided with a plurality of fixed grooves 460. The bottom surface of the other first fixed block 440 is detachably connected to the top surface of the fourth fixed block 691. The bottom of the fourth fixed block 691 is symmetrically provided with two third sliding grooves 692. The third sliding grooves 692 are in sliding connection with the second slide rails 630.

[0038] Specifically, the third sliding grooves 692 at the bottom of the fourth fixed block 691 have a very small cooperation gap with the second slide rails 630, which ensures the straightness of the fourth fixed block 691 when sliding along the second slide rails 630. The structure of the second nut groove 610 and the second nut through hole 620 is consistent with that of the first nut groove 410 and the first nut through hole 420, which ensures the reliability of the connection between the second screw nut 380 and the second displacement block 600.

[0039] It can be understood that the second nut groove 610 on the side surface of the second displacement block 600 is matched with the outer shape of the second screw nut 380. The structure of the second nut groove 610 is consistent with that of the first nut groove 410 and the first nut through hole 420 of the first displacement block 400, which ensures the reliability and stability of the movement of the second displacement block 600 driven by the second screw nut 380. The two second slide rails 630 symmetrically arranged on the top surface of the second displacement block 600 provide double guidance for the sliding of the fourth fixed block 691 and the fine adjustment block 640, which improves the stability of the sliding structure. The two third sliding grooves 692 at the bottom of the fourth fixed block 691 are in sliding connection with the second slide rails 630, which can limit the movement direction of the fourth fixed block 691, ensure the stable sliding of the fourth fixed block 691 along the second slide rails 630, and avoid deviation. The fixed grooves 460 on the top surface of the fourth fixed block 691 cooperate with the first fixed block 440 to realize the stable fixation of the other end of the sample. In cooperation with the second fixed block 450 and the first fixed block 440 on the first displacement block 400, a symmetrical fixation structure is formed at both ends of the sample, which ensures the balanced stress on both ends of the sample during stretching.

[0040] Referring to Figure 1 and Figure 11As shown, in some embodiments of the present application, the third fixing block 500 comprises: a first fixing plate 510, a temperature control base 520, a temperature control groove 521, and a screw rod groove 530. The first fixing plate 510 is arranged at the top of the third fixing block 500. The temperature control base 520 is arranged at the bottom of the third fixing block 500, and the first fixing plate 510 is detachably connected with the temperature control base 520. The temperature control groove 521 is opened at the top surface of the temperature control base 520. The screw rod groove 530 is opened at the bottom surface of the temperature control base 520.

[0041] Specifically, the heating plate and the cooling plate are placed in the temperature control groove 521, and the temperature of the sample is controlled through the working of the heating plate and the cooling plate. The width of the screw rod groove 530 is greater than the diameter of the first screw rod 350 and the second screw rod 370, so as to avoid the spatial interference between the third fixing block 500 and the screw rod structure. The first fixing plate 510 and the temperature control base 520 are detachably connected through bolts, which facilitates the maintenance and replacement of components in the later stage.

[0042] It can be understood that the first fixing plate 510 at the top of the third fixing block 500 can directly contact the middle part of the sample, so as to provide support for the middle part of the sample, prevent the sample from collapsing due to the lack of support in the middle during the stretching process, ensure that the stretching force is concentrated on the test section of the sample, and guarantee the accuracy of the test data. The temperature control groove 521 opened on the temperature control base 520 at the bottom of the third fixing block 500 can place the heating plate and the cooling plate, and the temperature of the environment where the sample is located is controlled through heating by the heating plate or refrigeration by the cooling plate, so as to meet the sample stretching test requirements under different temperature conditions in the in-situ test of the atomic force microscope. The width of the screw rod groove 530 at the bottom surface of the temperature control base 520 is greater than the diameter of the first screw rod 350 and the second screw rod 370, so as to avoid the screw rod structure and prevent the spatial interference between the third fixing block 500 and the screw rod, so as to ensure that the components are compactly arranged and do not affect each other. The first fixing plate 510 and the temperature control base 520 are detachably connected, which facilitates the maintenance of the heating plate and the cooling plate in the temperature control groove 521 by disassembling the first fixing plate 510 in the later stage, or the replacement of the first fixing plate 510 with different materials and thicknesses according to the sample test requirements, so as to improve the maintenance convenience and flexibility of the platform.

[0043] Referring to Figure 1 and Figures 13-16As shown, in some embodiments of the present application, further comprising: a fine adjustment block 640, a fine adjustment rod 670, a fine adjustment shaft 680; the fine adjustment block 640 is arranged on the top surface of the second displacement block 600, the fine adjustment block 640 is in sliding connection with the second displacement block 600, and the fine adjustment block 640 is in fixed connection with the fourth fixed block 691; the fine adjustment rod 670 is arranged in the horizontal direction, one end of the fine adjustment rod 670 is in fixed connection with the force sensor 690, the other end of the fine adjustment rod 670 is in fixed connection with the first fine adjustment knob 650, and a second external thread 671 is arranged on the side surface of the fine adjustment rod 670; the fine adjustment shaft 680 is arranged in the horizontal direction, a first fine adjustment through hole 681 is arranged on the top surface of the fine adjustment shaft 680, a third internal thread 682 is arranged in the inside of the first fine adjustment through hole 681, the third internal thread 682 is in engagement with the second external thread 671, and the fine adjustment shaft 680 is in rotational connection with the fine adjustment rod 670 through the third internal thread 682 and the second external thread 671.

[0044] Specifically, the fine adjustment block 640 is in fixed connection with the fourth fixed block 691, and the first fine adjustment knob 650 rotates to drive the fine adjustment block 640 and the fourth fixed block 691 to slide along the second slide rail 630. The contact surface between the fine adjustment block 640, the fourth fixed block 691 and the second slide rail 630 is treated to be smooth to reduce the sliding friction resistance. Since the fine adjustment shaft 680 is in fixed connection with the second fixed plate 800 through the second fixed protrusion 700, and the second fixed plate 800 is in fixed connection with the scanning head 900, the gravity acting on the fine adjustment shaft 680 is increased. Therefore, when the first fine adjustment knob 650 rotates, the fine adjustment shaft 680 is kept fixed with the second fixed plate 800 through the second fixed protrusion 700, the fine adjustment rod 670 moves axially under the engagement of the third internal thread 682 and the second external thread 671, and then drives the fine adjustment block 640 and the fourth fixed block 691 to slide along the second slide rail 630.

[0045] It is understandable that the fine-tuning block 640 is located on the top surface of the second displacement block 600 and is slidably connected to the second displacement block 600, while being fixedly connected to the fourth fixed block 691. This allows the fourth fixed block 691 to move within a small range, providing a movable carrier for small-range tensile adjustments of the sample. The fine-tuning rod 670 is positioned horizontally, with one end fixed to the force sensor 690, which can detect the force on the sample during small-range tensile adjustments in real time, providing data support for precise adjustment of the tensile force. The other end is fixed to the first fine-tuning knob 650, allowing operators to easily perform fine-tuning control by rotating the knob. The second external screw on the side of the fine-tuning rod 670... The thread 671 precisely engages with the third internal thread 682 within the first fine-tuning through hole 681 of the fine-tuning shaft 680. When the first fine-tuning knob 650 is rotated, the position of the fine-tuning shaft 680 is fixed, and the fine-tuning rod 670 moves axially, thereby driving the fine-tuning block 640 and the fourth fixed block 691 to slide within a small range along the second slide rail 630. This achieves high-precision small-range tensile adjustment of the sample, meeting the high requirements for tensile accuracy in in-situ testing of atomic force microscopy. The relatively smooth surface between the fine-tuning block 640 and the second slide rail 630 reduces frictional resistance during small-range adjustments, preventing fine-tuning jamming due to excessive friction and improving the smoothness and accuracy of the fine-tuning process.

[0046] Reference Figure 1 and Figures 13-16 As shown, in some embodiments of this application, the fine-tuning block 640 includes: a sensor groove 641, a second sliding groove 642, and a second fine-tuning through hole 643; the sensor groove 641 is formed on the top surface of the fine-tuning block 640, and a force sensor 690 is disposed in the sensor groove 641 and slidably connected to the sensor groove 641; two second sliding grooves 642 are symmetrically formed on the bottom of the fine-tuning block 640, and the second sliding grooves 642 are slidably connected to the second slide rail 630; the second fine-tuning through hole 643 is formed on the side of the fine-tuning block 640, and the second fine-tuning knob 660 is rotatably connected to the fine-tuning block 640 through the second fine-tuning through hole 643.

[0047] Specifically, the rotational connection between the second fine-tuning knob 660 and the fine-tuning block 640 is achieved through external and internal threads. Specifically, the second fine-tuning through-hole 643 has an internal thread, and the connecting post of the second fine-tuning knob 660 has an external thread, with the threads of both meshing with each other. The second fine-tuning through-hole 643 penetrates the fine-tuning block 640, allowing the connecting post of the second fine-tuning knob 660 to contact the second slide rail 630 of the second displacement block 600 when the knob is turned inward, thereby fixing the fine-tuning block 640 and ensuring that the adjusted position is maintained.

[0048] It can be understood that the sensor groove 641 on the top surface of the fine adjustment block 640 provides a dedicated installation space for the force sensor 690, protects the force sensor 690 from external collision damage, and the two second sliding grooves 642 on the bottom of the fine adjustment block 640 are in sliding connection with the second sliding rails 630 of the second displacement block 600, which further strengthens the guidance of the fine adjustment block 640, ensures that the fine adjustment block 640 always moves in a straight line when moving in a small range, and improves the accuracy of fine adjustment; the inner thread is arranged in the second fine adjustment through hole 643 on the side surface of the fine adjustment block 640, and is engaged with the outer thread on the connecting column of the second fine adjustment knob 660, when the second fine adjustment knob 660 is screwed inward, the connecting column can be in close contact with the second sliding rail 630, and the position of the fine adjustment block 640 is fixed by friction, so that the state of the sample after small-range stretching adjustment can be maintained, the stretching position is prevented from deviating due to loosening of the fine adjustment block 640, and the stability of the high-precision adjustment effect is ensured.

[0049] Referring to Figures 1-2 In some embodiments of the present application, as shown in the drawings, further comprising: a second fixed protrusion 700, a second fixed plate 800, a scanning head 900; the second fixed protrusion 700 is arranged on the side surface of the fine adjustment shaft 680; the second fixed plate 800 is arranged in the horizontal direction, and the second fixed protrusion 700 is fixedly connected with the second fixed plate 800; the scanning head 900 is arranged on the bottom surface of the second fixed plate 800 in the vertical direction, and the scanning head 900 is used for measuring the stretching distance.

[0050] Specifically, the second fixed protrusion 700 and the second fixed plate 800 are fixedly connected by welding, which ensures the stability of the connection. The scanning head 900 is fixed on the bottom surface of the second fixed plate 800 by bolts, and the detection end of the scanning head 900 is vertically aligned with the middle stretching area of the sample, which ensures accurate measurement of the stretching distance of the sample.

[0051] It can be understood that the second fixed protrusion 700 on the side surface of the fine adjustment shaft 680 is fixedly connected with the second fixed plate 800, which can provide stable support and fixation for the fine adjustment shaft 680, ensure that the fine adjustment shaft 680 always maintains the same position during fine adjustment, provide a fixed reference for the axial movement of the fine adjustment rod 670, and further ensure the fine adjustment accuracy; the second fixed plate 800 is arranged in the horizontal direction, which is stable in structure and can provide a reliable installation carrier for the scanning head 900; the scanning head 900 is arranged on the bottom surface of the second fixed plate 800 in the vertical direction, and the detection end of the scanning head 900 can face the stretching area of the sample, which can measure the stretching distance of the sample in real time and accurately, feed back the stretching distance data to the test system, provide accurate data support for the quantitative analysis of the stretching amount of the sample in the in-situ test of the atomic force microscope, and meet the needs of the test for stretching distance monitoring.

[0052] Those skilled in the art can understand that the above only describes the preferred embodiments of the present application and is not used to limit the present application, and although the present application has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments, or make equivalent replacements to some technical features. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. An embedded miniature tensile platform for in-situ testing using atomic force microscopy, characterized in that, include: The base is arranged horizontally, and a first slide rail is provided on the top surface of the base. Two movable blocks are slidably connected to the first slide rail, and a first fixed protrusion is provided at one end of the base. A transmission box is vertically disposed at the other end of the base, and the transmission box is fixedly connected to the base; The transmission unit includes: a first gear, a second gear, a first lead screw, a first lead screw nut, a second lead screw, a second lead screw nut, a gearbox, and a motor. One end of the gearbox is detachably connected to the first gear, and the other end of the gearbox is detachably connected to the motor. The first gear meshes with the second gear. One end of the first lead screw is detachably connected to the second gear, and the other end of the first lead screw is fixedly connected to one end of the second lead screw. The first lead screw is rotatably connected to the first lead screw nut via a first external thread and a first internal thread, and the first external thread and the first internal thread mesh. The second lead screw is rotatably connected to the second lead screw nut via a first external thread and a second internal thread, and the first external thread and the second internal thread mesh. The thread directions of the first internal thread and the second internal thread are opposite. The other end of the second lead screw is slidably connected to the first fixed protrusion. The first gear and the second gear are disposed inside the transmission box. The first displacement block is detachably connected to the first lead screw nut, and the bottom of the first displacement block is fixedly connected to a moving block. The second displacement block is detachably connected to the second lead screw nut, and the bottom of the second displacement block is fixedly connected to another moving block. The third fixing block is disposed between the first displacement block and the second displacement block, and the bottom of the third fixing block is fixedly connected to the base.

2. The embedded micro tensile platform for in-situ testing using atomic force microscopy according to claim 1, characterized in that, The bottom of the movable block has a first sliding groove, which is slidably connected to the first slide rail; The transmission box has a first connecting through hole and a second connecting through hole on its side. The gearbox is fixedly connected to the first gear through the first connecting through hole, and the first lead screw is fixedly connected to the second gear through the second connecting through hole.

3. The embedded micro tensile platform for in-situ testing using atomic force microscopy according to claim 2, characterized in that, The top surface of the first lead screw nut has a first lead screw through hole, and the first internal thread is formed inside the first lead screw through hole; The top surface of the second lead screw nut has a second lead screw through hole, and the second internal thread is formed inside the second lead screw through hole; The first external thread is formed on the side of the first lead screw and the second lead screw.

4. An embedded micro tensile platform for in-situ testing using atomic force microscopy according to claim 3, characterized in that, The first displacement block includes: The first nut groove is formed on the side of the first displacement block; The first nut through hole is formed at the bottom of the first nut groove; The motor slot is formed on the side of the first displacement block; A second fixing block is provided on the top surface of the first displacement block.

5. An embedded micro tensile platform for in-situ testing using atomic force microscopy according to claim 4, characterized in that, Also includes: The bottom surface of the first fixing block is detachably connected to the top surface of the second fixing block; The fixing grooves are formed on the bottom surface of the first fixing block and the top surface of the second fixing block.

6. An embedded micro tensile platform for in-situ testing using atomic force microscopy according to claim 5, characterized in that, The second displacement block includes: The second nut groove is formed on the side of the second displacement block; The second nut through hole is located at the bottom of the second nut groove; The second slide rails are symmetrically arranged on the top surface of the second displacement block; The top surface of the second displacement block is provided with a fourth fixing block, and the top surface of the fourth fixing block is provided with a plurality of fixing grooves. The bottom surface of the other first fixing block is detachably connected to the top surface of the fourth fixing block. The bottom of the fourth fixing block is symmetrically provided with two third sliding grooves, and the third sliding grooves are slidably connected to the second slide rail.

7. An embedded micro tensile platform for in-situ testing in atomic force microscopy according to claim 6, characterized in that, The third fixing block includes: The first fixing plate is disposed on top of the third fixing block; A temperature control base is located at the bottom of the third fixing block, and the first fixing plate is detachably connected to the temperature control base; A temperature control slot is formed on the top surface of the temperature control base; The lead screw groove is formed on the bottom surface of the temperature control base.

8. An embedded micro tensile platform for in-situ testing using atomic force microscopy according to claim 7, characterized in that, Also includes: A fine-tuning block is disposed on the top surface of the second displacement block, the fine-tuning block is slidably connected to the second displacement block, and the fine-tuning block is fixedly connected to the fourth fixing block; A fine-tuning rod is set in a horizontal direction. One end of the fine-tuning rod is fixedly connected to a force sensor, and the other end of the fine-tuning rod is fixedly connected to a first fine-tuning knob. A second external thread is provided on the side of the fine-tuning rod. A fine-tuning shaft is arranged in a horizontal direction. A first fine-tuning through hole is formed on the top surface of the fine-tuning shaft. A third internal thread is formed inside the first fine-tuning through hole. The third internal thread meshes with the second external thread. The fine-tuning shaft is rotatably connected to the fine-tuning rod through the third internal thread and the second external thread.

9. An embedded micro tensile platform for in-situ testing using atomic force microscopy according to claim 8, characterized in that, The fine-tuning block includes: A sensor slot is formed on the top surface of the fine-tuning block, and the force sensor is disposed in the sensor slot and slidably connected to the sensor slot. The second slide groove is symmetrically formed at the bottom of the fine-tuning block, and the second slide groove is slidably connected to the second slide rail; A second fine-tuning through hole is provided on the side of the fine-tuning block, and a second fine-tuning knob is rotatably connected to the fine-tuning block through the second fine-tuning through hole.

10. An embedded micro tensile platform for in-situ testing in atomic force microscopy according to claim 9, characterized in that, Also includes: The second fixing protrusion is provided on the side of the fine-tuning shaft; The second fixing plate is arranged in a horizontal direction, and the second fixing protrusion is fixedly connected to the second fixing plate; A scanning head is vertically positioned on the bottom surface of the second fixed plate, and the scanning head is used to measure the stretching distance.

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