An online spin-drying and drying device

Abstract

The present invention discloses an online spin-drying and drying device, which includes a tank body. A rotating flower basket is arranged in the inner cavity of the tank body, and a carrier box is placed in the rotating flower basket. One end of the rotating flower basket is connected to a rotating driving component, and an air-electric slip ring is connected to the rotating driving component. A baffle mechanism is arranged on one side of the carrier box, and a flap pressing mechanism is arranged on the other side. A flat air duct is also arranged in the inner cavity of the tank body near the flap pressing mechanism; it reduces the pollution of silicon wafers or wafers, reduces the water ripple marks of silicon wafers or wafers, reduces or avoids water mark wafers, reduces the energy consumption of the equipment, saves energy, has no emission of volatile organic compounds, and is green and environmentally friendly.

Description

Technical Field

[0001] The present invention relates to an online spin-drying and drying device, belonging to the technical field of cleaning processes. Background Art

[0002] The cleaning process is one of the main processes in the production processes of solar cells and semiconductors, and the wet cleaning process is the most widely used cleaning process in solar photovoltaic cleaning and semiconductor cleaning.

[0003] The last process of the wet cleaning process is drying. The quality of the drying of silicon wafers or wafers directly affects the yield of silicon wafers or wafers.

[0004] In the initial stage of the large-scale development of the domestic photovoltaic industry, off-line spin-drying technology was generally used to dry solar silicon wafers. The off-line spin-drying process added a process to photovoltaic production enterprises, increased the number of personnel, and brought about an increase in costs. In the latter part of 2011, during the production line upgrade process of photovoltaic enterprises, the off-line spin-drying technology process was basically phased out in the wet cleaning process.

[0005] Compared with the photovoltaic industry, the wafer production volume of semiconductor industry enterprises is small. In the cleaning process, some still use the off-line spin-drying and drying process, and some often use volatile IPA or alcohol to dry wafers. Although the production volume is small, the control of the volatilization of IPA or alcohol is still related to the safe production of enterprises.

[0006] At present, photovoltaic enterprises generally use centrifugal fans or high-pressure vortex fans to drive heated air to blow dry or dry silicon wafers. Although this drying process solves the two major disadvantages of off-line spin-drying mentioned above, it also brings new silicon wafer process defects. The main manifestations are: 1. Water mark wafers; 2. Re-particle contamination on the surface of silicon wafers. With the rapid development of the current high-efficiency solar cell process, these two major defects are becoming more and more obvious, and process changes or innovations are needed. In the drying of semiconductor wet process cleaning, off-line spin-drying or IPA / alcohol volatilization dehydration methods are generally used to dry wafers. Off-line spin-drying increases labor costs and will also cause secondary pollution; the IPA / alcohol volatilization dehydration drying method, on the one hand, pollutes the environment, produces organic matter emissions, and at the same time brings potential safety hazards of flammability and explosiveness. Summary of the Invention

[0007] The present invention provides an online spin-drying and drying device to overcome the defects of re-particle contamination on the surface of silicon wafers and water mark wafers in the existing drying process.

[0008] In order to solve the above technical problems, the present invention provides the following technical solutions:

[0009] The present invention discloses an on-line spin-drying and drying device, which includes a tank body. A rotating flower basket is arranged in the inner cavity of the tank body, and a bearing box is placed in the rotating flower basket. One end of the rotating flower basket is connected to a rotating drive component, and an air-electric slip ring is connected to the rotating drive component. A baffle mechanism is arranged on one side of the bearing box, and a flap pressing mechanism is arranged on the other side. A flat air duct is also arranged in the inner cavity of the tank body near the flap pressing mechanism.

[0010] The rotating drive component includes a mounting seat, on which a motor reduction unit is mounted. The motor reduction unit is connected to a rotating main shaft through a rotating part. One end of the rotating main shaft is installed on a support bearing seat combination, and an air-electric slip ring is arranged at the other end.

[0011] The flap pressing mechanism includes a flipping side plate. Between the two flipping side plates, a rotating carbon rod shaft, a pressing strip plate and a support rod are respectively arranged from bottom to top. The rotating carbon rod shaft is connected to a plastic cylinder.

[0012] The baffle mechanism includes a cylinder mounting front plate. Mounting strip plates are installed on both sides of the cylinder mounting front plate. An inlay plate is inlaid on the mounting strip plates. A rubber strip is arranged on the inlay plate. The cylinder mounting front plate and the inlay plate are connected through a guide rod hole rod. One end of a threaded connection sleeve is fixedly connected to the inlay plate, and the other end passes through the cylinder mounting front plate.

[0013] Furthermore, a plastic cylinder is arranged between the rotating flower basket and the flap pressing mechanism, and the plastic cylinder controls the flipping action of the flap of the flap pressing mechanism.

[0014] Furthermore, a plastic cylinder is also arranged on the baffle mechanism, and the plastic cylinder controls the advancement and retraction of the baffle mechanism.

[0015] Furthermore, the flap pressing mechanism has the function of pressing the bearing box through the plastic cylinder.

[0016] Furthermore, the other end of the threaded connection sleeve passes through the cylinder mounting front plate through a process hole on the cylinder mounting front plate and is connected to the plastic cylinder.

[0017] Furthermore, the guide rod hole rod has the function of preventing the inlay plate from rotating when advancing or retracting.

[0018] Furthermore, the air-electric slip ring, the rotating drive component, the rotating flower basket and the bearing box are all on the same axis line.

[0019] Furthermore, the rotating drive component serves as the driving source for the rotating action, and drives the plastic cylinder, the rotating flower basket, the flap pressing mechanism, the bearing box and the baffle mechanism to perform rotational motion.

[0020] Further, spray holes or nozzles are provided on the flat air duct to serve as a wind brush for drying the surface of the object to be blown.

[0021] The beneficial effects achieved by the present invention are as follows: reducing the pollution of silicon wafers or wafers, reducing the water ripple marks on silicon wafers or wafers, reducing or avoiding water mark wafers, reducing the energy consumption of the equipment and saving energy, having no emission of volatile organic compounds, and being green and environmentally friendly. Description of the Drawings

[0022] The drawings are used to provide a further understanding of the present invention, and constitute a part of the specification. Together with the embodiments of the present invention, they are used to explain the present invention and do not constitute a limitation to the present invention. In the drawings:

[0023] Figure 1 is a schematic structural diagram of the present invention;

[0024] Figure 2 is a schematic structural diagram of the rotary drive component of the present invention;

[0025] Figure 3 is a schematic structural diagram of the flap pressing mechanism of the present invention;

[0026] Figure 4 is a schematic structural diagram of the baffle mechanism of the present invention.

[0027] In the figure: 1, air-electric slip ring; 2, rotary drive component; 21, mounting seat; 22, motor reduction unit; 23, rotating member; 24, rotary main shaft; 25, support bearing seat combination; 3, plastic cylinder; 4, rotary flower basket; 5, flap pressing mechanism; 51, rotary carbon rod shaft; 52, flipping side plate; 53, pressing strip plate; 54, support rod; 6, flat air duct; 7, carrier box; 8, baffle mechanism; 81, inlaid plate; 82, mounting strip plate; 83, threaded connection sleeve; 84, cylinder mounting front plate; 85, guide rod hole rod; 86, rubber strip; 9, tank body. Detailed Embodiments

[0028] The following describes the preferred embodiments of the present invention with reference to the drawings. It should be understood that the preferred embodiments described herein are only used to illustrate and explain the present invention and are not used to limit the present invention.

[0029] Embodiment 1

[0030] As Figures 1-4 shown, an on-line spin-drying and drying device includes a tank body 9. A rotary flower basket 4 is arranged in the inner cavity of the tank body 9. A carrier box 7 is placed in the rotary flower basket 4. One end of the rotary flower basket 4 is connected to a rotary drive component 2. An air-electric slip ring 1 is connected to the rotary drive component 2. A baffle mechanism 8 is arranged on one side of the carrier box 7, and a flap pressing mechanism 5 is arranged on the other side. A flat air duct 6 is further arranged in the inner cavity of the tank body 9 near the flap pressing mechanism 5;

[0031] The rotation drive component 2 includes a mounting base 21, on which a motor reduction unit 22 is mounted. The motor reduction unit 22 is connected to a rotation main shaft 24 through a rotating member 23. One end of the rotation main shaft 24 is mounted on a support bearing block assembly 25, and an air-electric slip ring 1 is provided at the other end.

[0032] The flap pressing mechanism 5 includes a turning side plate 52. Between the two turning side plates 52, a rotating carbon rod shaft 51, a pressing strip plate 53, and a support rod 54 are respectively provided from bottom to top. The rotating carbon rod shaft 51 is connected to a plastic cylinder 3.

[0033] The flapper mechanism 8 includes a cylinder mounting front plate 84. Mounting strip plates 82 are mounted on both sides of the cylinder mounting front plate 84. An inlay plate 81 is inlaid on the mounting strip plates 82. A rubber strip 86 is provided on the inlay plate 81. The cylinder mounting front plate 84 is connected to the inlay plate 81 through a guide rod hole rod 85. One end of a threaded connection sleeve 83 is fixedly connected to the inlay plate 81, and the other end thereof passes through the cylinder mounting front plate 84.

[0034] A plastic cylinder 3 is provided between the rotating flower basket 4 and the flap pressing mechanism 5, and the plastic cylinder 3 controls the flap action of the flap pressing mechanism 5.

[0035] A plastic cylinder 3 is also provided on the flapper mechanism 8, and the plastic cylinder 3 controls the advancement and retraction of the flapper mechanism 8.

[0036] The flap pressing mechanism 5 has the function of pressing the load-bearing box 7 through the plastic cylinder 3.

[0037] The other end of the threaded connection sleeve 83 passes through the cylinder mounting front plate 84 through a process hole on the cylinder mounting front plate 84 and is connected to the plastic cylinder 3.

[0038] The flat air duct 6 is provided with spray holes or nozzles, which are used as a wind brush to dry the surface of the object to be blown.

[0039] The guide rod hole rod 85 has the function of preventing the inlay plate 81 from rotating when advancing or retracting.

[0040] The rotation drive component 2 serves as a drive source for the rotation action, driving the plastic cylinder 3, the rotating flower basket 4, the flap pressing mechanism 5, the load-bearing box 7, and the flapper mechanism 8 to perform rotational motion.

[0041] The air-electric slip ring 1, the rotation drive component 2, the rotating flower basket 4, and the load-bearing box 7 are all on the same axis line.

[0042] The silicon wafer or wafer spin-drying and drying technology utilizes the silicon wafer or wafer loaded in the carrier box 7, and rotates the carrier box 7 at a set speed. When the adhesion force of the large droplet in the shape of beads on the surface of the silicon wafer or wafer and at the bottom of the carrier box 7 is less than the centrifugal force of the droplet, it will break away from the adhering surface. At the same time, through the flat air duct or pipeline 6 (with spray holes or nozzles), with pressurized gas, heating or not heating is selected, and it is blown towards the dynamically rotating silicon wafer or wafer and the surface of the carrier box 7, uniformly vaporizing and drying the remaining liquid on these surfaces, realizing the drying of the silicon wafer and the carrier box.

[0043] The rotating flower basket 4 can rotate driven by the motor speed reducer unit 22, and can hold the carrier box 7 transported by the manipulator when the flap pressing mechanism 5 is opened. The flap pressing mechanism 5 is used to press the carrier box 7 to prevent the carrier box 7 from falling off during the rotation of the rotating flower basket. The stop piece mechanism 8 is used to limit the displacement of the silicon wafer or wafer at the wafer insertion opening of the carrier box 7. The gas-electric slip ring 1 or pneumatic rotary joint is used to connect the rotating air pipe and the static air pipe, and connect the rotating wire and the static wire.

[0044] The on-line spin-drying and drying technology directly uses the centrifugal spin-drying and drying technology in the cleaning machine tool, and is installed in the process tank after the rinsing cleaning or slow lift dehydration treatment at the back end of the cleaning machine tool process.

[0045] Operation process: The manipulator lifts the rinsed or slowly lifted and rinsed carrier box 7 into the rotating flower basket 4 in the tank body 9. The flap pressing mechanism 5 presses the carrier box 7 under the push of the plastic cylinder 3. The stop piece mechanism 8 also extends under the push of the plastic cylinder 3 to block the silicon wafer or wafer. The upper tank cover of the spin-drying and drying tank body 9 is closed. The rotation drive component 2 drives the rotating flower basket 4 pressing the carrier box 7 to rotate under the drive of the motor speed reduction device. The flat air duct 6 sprays gas, heating or not heating is selected, to dry the silicon wafer or wafer and also dry the carrier box 7. The continuous execution of the whole action is controlled by the PLC or computer.

[0046] Finally, it should be noted that the above are only the preferred embodiments of the present invention and are not used to limit the present invention. Although the present invention has been described in detail with reference to the foregoing embodiments, for those skilled in the art, they can still modify the technical solutions recorded in the foregoing embodiments, or perform equivalent replacements for some of the technical features. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. An online spin-drying and drying device, characterized in that, it includes a tank body, a rotating flower basket is arranged in the inner cavity of the tank body, a carrying box is placed in the rotating flower basket, one end of the rotating flower basket is connected to a rotating drive component, an air-electric slip ring is connected to the rotating drive component, a baffle mechanism is arranged on one side of the carrying box, and a flap pressing mechanism is arranged on the other side. A flat air duct is also arranged in the inner cavity of the tank body near the flap pressing mechanism; The rotating drive component includes a mounting seat, a motor reduction unit is mounted on the mounting seat, the motor reduction unit is connected to a rotating main shaft through a rotating part, one end of the rotating main shaft is mounted on a support bearing seat combination, and an air-electric slip ring is arranged at the other end; The flap pressing mechanism includes a flipping side plate, a rotating carbon rod shaft, a pressing strip plate and a support rod are respectively arranged from bottom to top between the two flipping side plates, and the rotating carbon rod shaft is connected to a plastic cylinder; The baffle mechanism includes a cylinder mounting front plate, mounting strip plates are mounted on both sides of the cylinder mounting front plate, an inlay plate is inlaid on the mounting strip plates, a rubber strip is arranged on the inlay plate, the cylinder mounting front plate is connected to the inlay plate through a guide rod hole rod, and one end of a threaded connecting sleeve is fixedly connected to the inlay plate and the other end passes through the cylinder mounting front plate; A plastic cylinder is arranged between the rotating flower basket and the flap pressing mechanism, and the plastic cylinder controls the flipping action of the flap of the flap pressing mechanism; A plastic cylinder is also arranged on the baffle mechanism, and the plastic cylinder controls the advancement and retraction of the baffle mechanism.

2. The online spin-drying and drying device according to claim 1, characterized in that, the flap pressing mechanism has the function of pressing the carrying box through a plastic cylinder.

3. The online spin-drying and drying device according to claim 1, characterized in that, the guide rod hole rod has the function of preventing the inlay plate from rotating when moving forward or backward.

4. The online spin-drying and drying device according to claim 1, characterized in that, the rotating drive component serves as a driving source for the rotating action, and drives the plastic cylinder, the rotating flower basket, the flap pressing mechanism, the carrying box and the baffle mechanism to perform rotational motion.

5. The online spin-drying and drying device according to claim 1, characterized in that, the air-electric slip ring, the rotating drive component, the rotating flower basket and the carrying box are all on the same axis line.

6. The online spin-drying and drying device according to claim 1, characterized in that, spray holes or nozzles are arranged on the flat air duct to be used as a wind brush to dry the surface of the object to be blown.

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