An intake air flow regulating device for a vacuum pump test system

The vacuum pump testing system addresses the complexity of flow rate adjustments by using separate channels and valves, enabling efficient and accurate testing across different flow rates with fewer components and reduced noise.

CN112610466BActive Publication Date: 2025-07-15NINGBO BAOSI ENERGY EQUIP
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Patent Information

Application Number
CN202011525147.4
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2020-12-22
Publication Date
2025-07-15
Estimated Expiration
2040-12-22

AI Technical Summary

Technical Problem

The existing vacuum pump testing system needs to switch multiple accessories when simulating different flow conditions, resulting in a large number of accessories required for testing and a large workload, and it is difficult to adapt to the test requirements of large and large flow vacuum pumps at the same time.

Method used

Design an intake flow regulation device for a vacuum pump test system, including large-flow and small-flow intake pipes, with adjustment valves respectively, and reduce airflow vibration and noise through expansion joints and mufflers. Use the gas storage tank to stabilize the airflow, set up a vacuum pressure gauge to monitor in real time, and achieve flexible adjustment of multiple flows.

Benefits of technology

It realizes the testing requirements of vacuum pumps of different flows in a test system, reduces the number of accessories, simplifies the replacement process, reduces noise and vibration, and improves the accuracy and efficiency of the test.

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Patent Text Reader

Abstract

An air intake flow rate regulating device for a vacuum pump test system, comprising a box body, wherein an air inlet and an exhaust pipe are provided on the box body. It is characterized in that: at least one large-flow air intake pipe and at least one small-flow air intake pipe are provided inside the box body. The air intake sides of the large-flow air intake pipe and the small-flow air intake pipe are both connected to the air flow of the air inlet, and the air outlet sides are both connected to the exhaust pipe. A large-flow regulating valve is provided on the large-flow air intake pipe for regulating the flow rate of large-flow gas, and a small-flow regulating valve is provided on the small-flow air intake pipe for regulating the flow rate of small-flow gas. The air intake flow rate regulating device of this vacuum pump test system can be applicable to the whole machine of vacuum pumps with both large and small flow rates at the same time, with few accessories required for testing, convenient replacement, and small workload.
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Description

Technical Field

[0001] The invention relates to the technical field of vacuum pumps, and in particular to an air intake flow regulating device for a vacuum pump testing system. Background Art

[0002] The flow rate of the vacuum pump system has a wide range of applications, from 5m 3 / min to 90m 3 / min. During the test operation, in order to simulate the actual operating conditions of customers, vacuum pumps with different flow rates need to switch different intake flow control valves, pipelines, gas tanks and other accessories, and a single intake flow control solution is designed specifically, resulting in a large number of accessories required for the test and a large workload. Summary of the invention

[0003] The technical problem to be solved by the present invention is to provide an air intake flow regulating device for a vacuum pump testing system which can be used for vacuum pumps of both large and small flow rates, requires few accessories for testing, is easy to replace, and has a small workload.

[0004] The technical solution of the present invention is: an air intake flow regulating device for a vacuum pump testing system, comprising a box body, on which an air inlet and an exhaust duct are provided, and characterized in that: at least one large-flow air intake duct and at least one small-flow air intake duct are provided in the box body, the air intake sides of the large-flow air intake duct and the small-flow air intake duct are both connected to the airflow of the air inlet, and the air outlet sides are both connected to the exhaust duct, the large-flow air intake duct is provided with a large-flow regulating valve for regulating the flow of large-flow gas, and the small-flow air intake duct is provided with a small-flow regulating valve for regulating the flow of small-flow gas.

[0005] The large flow in the above-mentioned large flow intake pipeline and large flow regulating valve generally corresponds to a pipe diameter greater than DN80, and the small flow in the small flow intake pipeline and small flow regulating valve generally corresponds to a pipe diameter less than DN80.

[0006] After adopting the above method, the present invention has the following advantages:

[0007] The air intake flow regulating device of the vacuum pump testing system of the present invention respectively sets different air intake channels for large-flow vacuum pumps and small-flow vacuum pumps, and uses valves on the air intake channels to adjust the air intake volume. As long as the number of air intake channels is reasonable and the flow regulation of the valves on each air intake channel is coordinated, one testing system can be used to meet the testing requirements of vacuum pumps of various flow rates. It has a wide range of applications, a small number of accessories required for testing, easy replacement, and a small workload.

[0008] Preferably, expansion joints are provided in the middle of each large-flow intake pipe and small-flow intake pipe. This setting enables flexible connection in the middle of the large-flow intake pipe and the small-flow intake pipe, thereby reducing the influence caused by valve and air flow vibration and being convenient for installation.

[0009] Preferably, there are two or more large-flow intake pipes and two or more small-flow intake pipes. For large-flow vacuum pumps and small-flow vacuum pumps, two or more intake pipes are provided, which can make the flow regulation range wider, the adaptability stronger, and the cost, test accuracy and efficiency more optimized.

[0010] Preferably, a first muffler is provided on the intake side of the large-flow intake pipe, and a second muffler is provided on the intake side of the small-flow intake pipe. This setting can reduce the noise of the gas in the intake passage.

[0011] Preferably, there are two or more large-flow intake pipes and two or more small-flow intake pipes. A first gas storage tank is further provided between the intake side of the large-flow intake pipe and the first muffler. The intake side of the first muffler is in communication with the air flow of the intake port, and the outlet side is in communication with the intake side of the first gas storage tank. The outlet side of the first gas storage tank is in communication with the intake side of each large-flow intake pipe. A second gas storage tank is further provided between the intake side of the small-flow intake pipe and the second muffler. The intake side of the second muffler is in communication with the air flow of the intake port, and the outlet side is in communication with the intake side of the second gas storage tank. The outlet side of the second gas storage tank is in communication with the intake side of each small-flow intake pipe. For large-flow vacuum pumps and small-flow vacuum pumps, two or more intake pipes are provided, which can make the flow regulation range wider, the adaptability stronger, and the cost, test accuracy and efficiency more optimized; and for multiple intake pipes, gas storage tanks are provided, which can not only stabilize the air flow and further reduce noise, but also facilitate connecting the intake sides of multiple intake pipes by using the gas storage tanks.

[0012] Preferably, the first muffler, the second muffler, the first gas storage tank and the second gas storage tank are all arranged below the box body. The first muffler and the first gas storage tank are arranged on the front side of the box body, and the second muffler and the second gas storage tank are arranged on the rear side of the box body. The number of intake ports is two and they are arranged side by side in the front and back above one side of the box body. A first chamber with an opening facing downwards is provided at the intake port in the front of the box body, and a second chamber with an opening facing downwards is provided at the intake port in the back of the box body. This setting not only makes the component layout reasonable, but also enables the gas entering from the intake port not to directly enter the box body, but to bend into the box body through an L-shaped air flow path, so that the gas entering from the intake port can be preliminarily noise-reduced and then dispersed into the box body. And by providing intake ports on both the front and back sides, the air flow entering the large-flow intake pipe and the small-flow intake pipe can be reliably noise-reduced.

[0013] Preferably, a first vacuum pressure gauge is provided near the large-flow regulating valve inside the box body, and a second vacuum pressure gauge is provided near the small-flow regulating valve inside the box body. This setting can directly obtain the pressure value inside the intake pipe.

[0014] Preferably, it further includes a third gas storage tank. The outlet sides of the large-flow intake pipe and the small-flow intake pipe are both connected to the inlet side of the third gas storage tank, and the outlet side of the third gas storage tank is connected to the exhaust pipe. This setting can further stabilize the airflow for noise reduction and also facilitate the convergence of the outlet sides of multiple intake pipes by using the third gas storage tank.

[0015] Preferably, the first muffler includes an outer cylinder with both ends closed. One side of the outer cylinder is the intake side, and the other side is the outlet side. A first partition and a second partition are vertically and spacedly arranged inside the outer cylinder. The first partition is closer to the intake side than the second partition. A number of first intake holes are provided on the side surface of the outer cylinder and between the intake side and the first partition. An inner cylinder is coaxially provided on the side of the second partition closer to the outlet side inside the outer cylinder. One end of the inner cylinder away from the second partition extends outside the outer cylinder, and a number of outlet holes are provided on the end surface of the end extending outside the outer cylinder. A number of second intake holes are evenly provided on the first partition. A number of third intake holes are evenly provided on the second partition outside the inner cylinder. A number of fourth intake holes are evenly provided on the side surface of the inner cylinder and on the part located inside the outer cylinder. By using the method of dispersing intake with evenly distributed holes and multi-section L-shaped zigzag channels for sound absorption, the noise can be significantly reduced.

[0016] Preferably, the second muffler is a micro muffler. Two or more second mufflers are provided and evenly distributed on the surface of the second gas storage tank. This setting not only makes the structure more compact, but also the mufflers are arranged in different places, resulting in better sound absorption effect. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 is a front three-dimensional structure schematic diagram of the present invention;

[0018] Figure 2 is a rear three-dimensional structure schematic diagram of the present invention;

[0019] Figure 3 is a front three-dimensional internal structure schematic diagram of the present invention;

[0020] Figure 4 is a rear three-dimensional internal structure schematic diagram of the present invention;

[0021] Figure 5 is a three-dimensional structure schematic diagram of the first muffler of the present invention;

[0022] Figure 6 is Figure 5 the top view of

[0023] Figure 7 is Figure 6 the sectional view at A - A in

[0024] Figure 8 is Figure 7 the sectional view at B - B in

[0025] In the figure: 1 - air inlet, 2 - first muffler, 3 - box body, 4 - first gas storage tank, 5 - large - flow air inlet pipeline, 6 - large - flow regulating valve, 7 - third gas storage tank, 8 - second muffler, 9 - second gas storage tank, 10 - small - flow air inlet pipeline, 11 - small - flow regulating valve, 12 - 1 - first vacuum pressure gauge, 12 - 2 - second vacuum pressure gauge, 13 - exhaust pipeline, 14 - 1 - first transparent observation window, 14 - 2 - second transparent observation window, 15 - 1 - first sewage discharge valve, 15 - 2 - second sewage discharge valve, 16 - forklift opening, 17 - expansion joint, 18 - first chamber, 19 - second chamber, 20 - outer cylinder, 21 - air inlet side of the outer cylinder, 22 - air outlet side of the outer cylinder, 23 - first partition board, 24 - second partition board, 25 - first air inlet small hole, 26 - inner cylinder, 27 - air outlet small hole, 28 - second air inlet small hole, 29 - third air inlet small hole, 30 - fourth air inlet small hole, 31 - filter cotton interlayer. Specific embodiments

[0026] The present invention will be further described below with reference to the accompanying drawings and embodiments. Embodiment

[0027] An air intake flow regulating device for a vacuum pump test system, comprising a box body 3, an air inlet 1 and an exhaust pipeline 13 are provided on the box body 3, at least one large - flow air inlet pipeline 5 and at least one small - flow air inlet pipeline 10 are provided inside the box body 3, the air inlet sides of the large - flow air inlet pipeline 5 and the small - flow air inlet pipeline 10 are in air flow connection with the air inlet 1, and the air outlet sides are in connection with the exhaust pipeline 13. A large - flow regulating valve 6 is provided on the large - flow air inlet pipeline 5 for regulating the flow rate of large - flow gas, and a small - flow regulating valve 11 is provided on the small - flow air inlet pipeline 10 for regulating the flow rate of small - flow gas; in this embodiment, three large - flow air inlet pipelines 5 are provided, four small - flow air inlet pipelines 10 are provided, the specifications of the three large - flow air inlet pipelines 5 and the corresponding large - flow regulating valves 6 are DN200, DN150, DN100, and the specifications of the four small - flow air inlet pipelines 10 and the corresponding small - flow regulating valves 11 are DN65, DN40, DN40, DN40.

[0028] Preferably, expansion joints 17 are provided in the middle of each large-flow intake pipe 5 and small-flow intake pipe 10. This setting enables flexible connection in the middle of the large-flow intake pipe 5 and small-flow intake pipe 10, thereby reducing the influence caused by valve and air flow vibration, and being convenient for installation.

[0029] Preferably, there are two or more large-flow intake pipes 5 and two or more small-flow intake pipes 10. For large-flow vacuum pumps and small-flow vacuum pumps, setting two or more intake pipes can provide a wider flow regulation range, stronger adaptability, and more optimized cost, test accuracy, and efficiency.

[0030] Preferably, a first silencer 2 is provided on the intake side of the large-flow intake pipe 5, and a second silencer 8 is provided on the intake side of the small-flow intake pipe 10. This setting can reduce the noise of the gas in the intake passage.

[0031] Preferably, there are two or more large-flow intake pipes 5 and two or more small-flow intake pipes 10. A first gas storage tank 4 is further provided between the intake side of the large-flow intake pipe 5 and the first silencer 2. The intake side of the first silencer 2 is connected to the air flow of the intake port 1, and the outlet side is connected to the intake side of the first gas storage tank 4. The outlet side of the first gas storage tank 4 is connected to the intake side of each large-flow intake pipe 5. A second gas storage tank 9 is further provided between the intake side of the small-flow intake pipe 10 and the second silencer 8. The intake side of the second silencer 8 is connected to the air flow of the intake port 1, and the outlet side is connected to the intake side of the second gas storage tank 9. The outlet side of the second gas storage tank 9 is connected to the intake side of each small-flow intake pipe 10. For large-flow vacuum pumps and small-flow vacuum pumps, setting two or more intake pipes can provide a wider flow regulation range, stronger adaptability, and more optimized cost, test accuracy, and efficiency. And for multiple intake pipes, setting gas storage tanks can not only stabilize the air flow and further reduce noise, but also facilitate connecting the intake sides of multiple intake pipes using the gas storage tanks.

[0032] Preferably, the first silencer 2, the second silencer 8, the first gas storage tank 4, and the second gas storage tank 9 are all arranged below in the box body 3. The first silencer 2 and the first gas storage tank 4 are arranged on the front side of the box body 3, the second silencer 8 and the second gas storage tank 9 are arranged on the rear side of the box body 3. The number of the air inlets 1 is two, and they are arranged side by side front and back above one side of the box body 3. A first chamber 18 with an opening facing downwards is provided at the air inlet 1 in the front of the box body 3, and a second chamber 19 with an opening facing downwards is provided at the air inlet 1 in the back of the box body 3. This setting not only makes the component layout reasonable, but also enables the gas entering from the air inlet 1 not to directly enter the box body 3, but to bend into the box body 3 through an L-shaped gas flow path. Thus, the gas entering from the air inlet 1 can be preliminarily noise-reduced and then dispersed into the box body 3. And by arranging the air inlets 1 on both the front and rear sides, the air flows entering the large-flow intake pipe 5 and the small-flow intake pipe 10 can be reliably noise-reduced.

[0033] Preferably, a first vacuum pressure gauge 12-1 is provided in the box body 3 near the large-flow regulating valve 6, and a second vacuum pressure gauge 12-2 is provided in the box body 3 near the small-flow regulating valve 11. This setting can directly obtain the pressure value in the intake pipe.

[0034] Preferably, first transparent observation windows 14-1 and second transparent observation windows 14-2 are respectively provided on the box body 3 at the positions of the first vacuum pressure gauge 12-1 and the second vacuum pressure gauge 12-2.

[0035] Preferably, a third gas storage tank 7 is further included. The outlet sides of the large-flow intake pipe 5 and the small-flow intake pipe 10 are both communicated with the inlet side of the third gas storage tank 7, and the outlet side of the third gas storage tank 7 is communicated with the exhaust pipe 13. This setting can further stabilize the air flow for noise reduction, and it is also convenient to use the third gas storage tank 7 to gather the outlet sides of multiple intake pipes together.

[0036] Preferably, the first muffler 2 includes an outer cylinder 20 with both ends closed. One side of the outer cylinder 20 is the intake side, and the other side is the outlet side. A first partition 23 and a second partition 24 are vertically and spaced apart inside the outer cylinder 20. The first partition 23 is closer to the intake side than the second partition 24. A number of first intake small holes 25 are provided on the side surface of the outer cylinder 20 and between the intake side and the first partition 23. An inner cylinder 26 is coaxially provided on the side of the outer cylinder 20 closer to the outlet side and near the second partition 24. One end of the inner cylinder 26 away from the second partition 24 extends out of the outer cylinder 20, and a number of outlet small holes 27 are provided on the end surface of the end extending out of the outer cylinder 20. A number of second intake small holes 28 are evenly provided on the first partition 23. A number of third intake small holes 29 are evenly provided on the second partition 24 outside the inner cylinder 26. A number of fourth intake small holes 30 are evenly provided on the side surface of the inner cylinder 26 and on the part inside the outer cylinder 20. By using the method of dispersing the intake air with evenly distributed small holes and a multi-section L-shaped tortuous channel for sound absorption, the noise can be significantly reduced.

[0037] Preferably, a filter cotton sandwich layer 31 is provided in the area on the side surface of the outer cylinder 20 corresponding to the first intake small holes 25. The filter cotton sandwich layer 31 can absorb part of the noise while filtering.

[0038] Preferably, the second muffler 8 is a micro muffler. Two or more second mufflers 8 are provided and evenly distributed on the surface of the second gas storage tank 9. This setting not only makes the structure more compact, but also the mufflers are arranged in different places, and the sound absorption effect is better.

[0039] Preferably, a first drain valve 15-1 is provided at the bottom of the first muffler 2, and a second drain valve 15-2 is provided at the bottom of the third gas storage tank 7. During the inhalation process, part of the condensed water will come out after the gas cools down through the muffler and the gas storage tank. The drain valve can be used to drain the condensed water, making the use safer.

[0040] Preferably, a forklift hole is provided at the bottom of the side surface of the box body 3. This setting can facilitate the movement of the box body 3.

[0041] The working principle of the intake air flow regulating device of the vacuum pump test system of the present invention is as follows:

[0042] Air enters from two air inlets 1, passes through the first chamber 18 and the "L"-shaped channel in the first chamber 18 for preliminary noise reduction, then disperses into the box body 3, enters the first muffler 2 through the first air inlet holes 25 distributed on the surface of the first muffler 2, and further reduces noise through multiple "L"-shaped channels. Then it enters the first air storage tank 4 through a pipeline for preliminary pressure stabilization and noise reduction. There are three groups of large-flow air inlet pipelines 5 and large-flow regulating valves 6 distributed on the first air storage tank 4. The air inlet flow rate can be adjusted by adjusting the opening degrees of the three groups of large-flow regulating valves 6. The inlet air pressure of the first vacuum pressure gauge 12-1 is observed through the first transparent observation window 14-1, which is convenient, fast and effective for observing the change of pressure. The gas coming out of the large-flow air inlet pipeline 5 enters the third air storage tank 7 again, and after secondary pressure stabilization and noise reduction, it enters the whole vacuum pump through the exhaust pipeline 13. At the same time, the small-flow regulation enters the second air storage tank 9 from the second muffler 8 at the rear. Similarly, there are four groups of small-flow air inlet pipelines 10 and small-flow regulating valves 11 here. The air inlet flow rate can be adjusted by adjusting the opening degrees of the four groups of small-flow regulating valves 11. The inlet air pressure of the second vacuum pressure gauge 12-2 is observed through the second transparent observation window 14-2, which is convenient, fast and effective for observing the change of pressure. The gas coming out of the small-flow air inlet pipeline 10 also enters the third air storage tank 7, and after secondary pressure stabilization and noise reduction, it enters the whole vacuum pump through the exhaust pipeline 13. During the air intake process, some condensed water will come out when the gas cools down after passing through the muffler and the air storage tank. The condensed water can be drained through the sewage valves under the first muffler 2 and the air storage tank.

[0043] The working principle of the first muffler 2 of the present invention is as follows:

[0044] Air passes through the first air inlet holes 25 on the side of the outer cylinder 20 and simultaneously passes through the filter cotton interlayer 31 into the outer cylinder 20. The first air inlet holes 25 here are conducive to dispersing the air intake to reduce noise, and the filter cotton interlayer 31 can filter and absorb part of the noise while filtering; then the gas passes through the second air inlet holes 28 of the first partition plate 23 along the "L"-shaped route, then passes through the third air inlet holes 29 of the second partition plate 24, and then passes through the fourth air inlet holes 30 along the "L"-shaped route into the interior of the inner cylinder 26, and finally horizontally passes through the air outlet holes 27 into the exhaust pipeline 13. Multiple "L"-shaped air inlet channels are used here, enabling the sound to be greatly reduced in noise through multiple reflections. At the same time, the gas is continuously dispersed by multiple air inlet holes, effectively reducing the aggregation of noise. Coupled with the sound absorption effect of the filter cotton interlayer 31, the intake noise is significantly reduced.

Claims

1. An intake air flow regulating device for a vacuum pump test system, comprising a box body (3), wherein an air inlet (1) and an exhaust pipeline (13) are arranged on the box body (3), and it is characterized in that: At least one large-flow intake pipe (5) and at least one small-flow intake pipe (10) are provided inside the box body (3). The intake sides of the large-flow intake pipe (5) and the small-flow intake pipe (10) are both in communication with the air flow of the intake port (1), and the outlet sides are both in communication with the exhaust pipe (13). A large-flow regulating valve (6) is provided on the large-flow intake pipe (5) for regulating the flow rate of the large-flow gas, and a small-flow regulating valve (11) is provided on the small-flow intake pipe (10) for regulating the flow rate of the small-flow gas; A first muffler (2) is provided on the intake side of the large-flow intake pipe (5), and a second muffler (8) is provided on the intake side of the small-flow intake pipe (10); There are two or more large-flow intake pipes (5) and small-flow intake pipes (10). A first gas storage tank (4) is further provided between the intake side of the large-flow intake pipe (5) and the first muffler (2). The intake side of the first muffler (2) is in communication with the air flow of the intake port (1), and the outlet side is in communication with the intake side of the first gas storage tank (4). The outlet side of the first gas storage tank (4) is in communication with the intake sides of the large-flow intake pipes (5). A second gas storage tank (9) is further provided between the intake side of the small-flow intake pipe (10) and the second muffler (8). The intake side of the second muffler (8) is in communication with the air flow of the intake port (1), and the outlet side is in communication with the intake side of the second gas storage tank (9). The outlet side of the second gas storage tank (9) is in communication with the intake sides of the small-flow intake pipes (10).

2. The intake air flow regulating device of a vacuum pump test system according to claim 1, characterized in that: Expansion joints (17) are provided in the middle of each large-flow intake pipe (5) and small-flow intake pipe (10).

3. The intake air flow regulating device of a vacuum pump test system according to claim 1, characterized in that: The first muffler (2), the second muffler (8), the first gas storage tank (4), and the second gas storage tank (9) are all provided below the box body (3). The first muffler (2) and the first gas storage tank (4) are provided on the front side of the box body (3), the second muffler (8) and the second gas storage tank (9) are provided on the rear side of the box body (3). The number of intake ports (1) is two and they are arranged side by side in the front and back above one side of the box body (3). A first chamber (18) with an opening facing downwards is provided at the intake port (1) in the front of the box body (3), and a second chamber (19) with an opening facing downwards is provided at the intake port (1) in the back of the box body (3).

4. The intake air flow regulating device of a vacuum pump test system according to claim 1 or 3, characterized in that: A first vacuum pressure gauge (12-1) is provided near the large-flow regulating valve (6) inside the box body (3), and a second vacuum pressure gauge (12-2) is provided near the small-flow regulating valve (11) inside the box body (3).

5. The intake air flow regulating device of a vacuum pump test system according to claim 1, characterized in that: It further includes a third gas storage tank (7). The outlet sides of the large-flow intake pipe (5) and the small-flow intake pipe (10) are both in communication with the intake side of the third gas storage tank (7), and the outlet side of the third gas storage tank (7) is in communication with the exhaust pipe (13).

6. The intake air flow regulating device of a vacuum pump test system according to claim 1, characterized in that: The first muffler (2) includes an outer cylinder (20) with both ends closed. One side of the outer cylinder (20) is the air inlet side, and the other side is the air outlet side. A first partition (23) and a second partition (24) are vertically and spacedly arranged in the outer cylinder (20). The first partition (23) is closer to the air inlet side than the second partition (24). A plurality of first air inlet holes (25) are provided on the side surface of the outer cylinder (20) and between the air inlet side and the first partition (23). An inner cylinder (26) is coaxially provided on the side of the second partition (24) closer to the air outlet side in the outer cylinder (20). One end of the inner cylinder (26) away from the second partition (24) extends out of the outer cylinder (20), and a plurality of air outlet holes (27) are provided on the end surface of the end extending out of the outer cylinder (20). A plurality of second air inlet holes (28) are evenly provided on the first partition (23). A plurality of third air inlet holes (29) are evenly provided on the second partition (24) on the outer side of the inner cylinder (26). A plurality of fourth air inlet holes (30) are evenly provided on the side surface of the inner cylinder (26) and on the part located inside the outer cylinder (20).

7. The intake air flow regulating device of a vacuum pump test system according to claim 1, characterized in that: The second muffler (8) is a micro muffler. Two or more second mufflers (8) are provided and are evenly distributed on the surface of the second gas storage tank (9).

Citation Information

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