Gas abatement equipment

Abstract

Embodiments of the present disclosure relate to gas abatement equipment and effluent management. The equipment described herein includes a high pressure processing chamber and a containment chamber surrounding the processing chamber. A high pressure fluid delivery module is in fluid communication with the high pressure processing chamber, and the high pressure fluid delivery module is configured to deliver a high pressure fluid to the processing chamber. The effluent management module includes a muffler assembly for reducing the effluent pressure and a plurality of scrubbers for treating the effluent.

Description

Technical Field

[0001] Embodiments of the present disclosure generally relate to equipment for semiconductor processing. More specifically, embodiments of the present disclosure relate to gas abatement equipment for high pressure processing systems. Background Art

[0002] The semiconductor manufacturing field utilizes various processes to manufacture devices incorporated into integrated circuits. As device complexity increases, integrated circuit manufacturers seek improved methods to manufacture advanced node devices. For example, advanced processing features may include utilizing more extreme process variables to achieve advanced device manufacturing.

[0003] One example of a process variable that is increasingly being studied for use in semiconductor manufacturing is high pressure processing. High pressure processing at pressures above atmospheric pressure has shown promising material modulation properties. However, when considering the necessary degree of control required to perform advanced node device manufacturing processes, there is generally a lack of equipment suitable for safely and efficiently performing high pressure processing. More specifically, conventional processing equipment generally lacks suitable exhaust modules for high pressure management of effluents such as toxic gases and the like.

[0004] Therefore, there is a need in the art for improved gas abatement equipment and methods of managing high pressure effluents. Summary of the invention

[0005] In one embodiment, a muffler assembly device is provided. The device includes a first muffler, wherein the first muffler defines a first volume, the first muffler having a first port formed in a first end and a second port formed in a second end, the second port being opposite to the first port. The second muffler defines a second volume therein. The second muffler has a third port formed in a third end and a fourth port formed in the second muffler, the fourth port being substantially opposite to the third port. The third muffler defines a third volume therein. The third muffler has a fifth port formed therein and a sixth port formed therein, the sixth port being substantially opposite to the fifth port. The fourth muffler defines a fourth volume therein. The fourth muffler has a seventh port formed therein and an eighth port formed through the fourth end, the eighth port being substantially opposite to the seventh port. The first conduit extends between the seventh port and the fifth port, and the second conduit extends between the fourth port and the sixth port.

[0006] In another embodiment, an effluent management device is provided. The device includes a muffler assembly, the muffler assembly including: a first muffler defining a first volume therein, the first muffler having a first port formed in a first end and a second port formed in a second end, the second port being opposite to the first port. A second muffler defining a second volume therein. The second muffler having a third port formed in a third end and a fourth port formed in the second muffler, the fourth port being substantially opposite to the third port. A third muffler defining a third volume therein. The third muffler having a fifth port formed therein and a sixth port formed therein, the sixth port being substantially opposite to the fifth port. A fourth muffler defining a fourth volume therein. The fourth muffler having a seventh port formed therein and an eighth port formed through a fourth end, the eighth port being substantially opposite to the seventh port. A first conduit extends between the seventh port and the fifth port, and a second conduit extends between the fourth port and the sixth port. A third conduit extends from the third port to a valve, a first scrubber being in fluid communication with the valve, and a second scrubber being in fluid communication with the valve via a fourth conduit.

[0007] In yet another embodiment, a high pressure processing apparatus is provided. The apparatus includes a first chamber and a second chamber, wherein the first chamber and the second chamber define a processing volume. The second chamber is disposed in the first chamber. The muffler assembly includes a first muffler, wherein the first muffler defines a first volume, wherein the first muffler has a first port formed in a first end and a second port formed in a second end, the second port being opposite to the first port. The second muffler defines a second volume therein. The second muffler has a third port formed in a third end and a fourth port formed in the second muffler, the fourth port being substantially opposite to the third port. The third muffler defines a third volume therein. The third muffler has a fifth port formed therein and a sixth port formed therein, the sixth port being substantially opposite to the fifth port. The fourth muffler defines a fourth volume therein. The fourth muffler has a seventh port formed therein and an eighth port formed through the fourth end, the eighth port being substantially opposite to the seventh port. The first conduit extends between the seventh port and the fifth port, and the second conduit extends between the fourth port and the sixth port. A third conduit extends from the third port to a valve, the first scrubber is in fluid communication with the valve, and the second scrubber is in fluid communication with the valve via a fourth conduit.A fifth conduit is disposed between the processing volume and the first port of the first muffler. BRIEF DESCRIPTION OF THE DRAWINGS

[0008] The above briefly summarizes the manner in which the above-described detailed features of the present disclosure can be understood in detail, as well as a more specific description of the present disclosure, which can be obtained by referring to the embodiments, some of which are illustrated in the accompanying drawings. However, it should be noted that the accompanying drawings only illustrate exemplary embodiments and are not to be construed as limiting the scope thereof, and the present disclosure may allow other equally effective embodiments.

[0009] Figure 1 is a schematic diagram of a high pressure processing apparatus according to an embodiment described in the present disclosure.

[0010] Figure 2 is a schematic diagram of an effluent management module according to an embodiment described in the present disclosure.

[0011] Figure 3 is a schematic cross-sectional view of a muffler assembly according to an embodiment described in the present disclosure.

[0012] To facilitate understanding, identical reference numerals have been used, where possible, to designate common elements among the figures. It is contemplated that elements and features of one embodiment may be beneficially incorporated in other embodiments without further description. DETAILED DESCRIPTION

[0013] Embodiments of the present disclosure relate to a high pressure processing apparatus for semiconductor processing. The apparatus described in the specification includes a high pressure processing chamber and a receiving chamber surrounding the processing chamber. A high pressure fluid delivery module is in fluid communication with the high pressure processing chamber, and the high pressure fluid delivery module is configured to deliver a high pressure fluid to the processing chamber.

[0014] Figure 1 1 is a schematic diagram of a high pressure processing apparatus 100 according to an embodiment described in the present disclosure. The apparatus 100 includes a first chamber 116, wherein the first chamber 116 defines a first volume 118. In one embodiment, the volume of the first volume 118 is between about 80 liters and about 150 liters, such as between about 100 liters and about 120 liters. The first chamber 116 is made of a process compatible material, such as aluminum, stainless steel, alloys thereof, and combinations thereof. The material selected for making the first chamber 116 is suitable for operation at sub-atmospheric pressures, such as pressures less than about 700 Torr, such as 650 Torr or less.

[0015] The effluent management module 115 is coupled to the first chamber 116 and is in fluid communication with the first chamber 116. The first chamber 116 has an exhaust port 128 formed therein. The exhaust conduit 103 is coupled to the first chamber 116 at the exhaust port 128 so that the exhaust conduit 103 is in fluid communication with the first volume 118. An isolation valve 105 and a throttle valve 107 are disposed on the exhaust conduit 103. The isolation valve 105 is disposed on the exhaust conduit 103 between the throttle valve 107 and the exhaust port 128. The isolation valve 105 is operable to initiate and extinguish fluid communication between the first volume 118 and the exhaust device 113. The throttle valve 107 controls the flow rate of effluent flowing from the first volume 118 through the exhaust conduit 103.

[0016] A pump 109 is also coupled to the exhaust conduit 103, and the pump 109 is operable to draw fluid from the first volume 118 to the exhaust 113. The pump 109 is disposed on the exhaust conduit 103 between the throttle valve 107 and the exhaust 113. In one embodiment, the pump 109 generates a pressure in the first volume 118 that is below atmospheric pressure, such as less than about 700 Torr. A scrubber 111 is also disposed on the exhaust conduit 103 between the pump 109 and the exhaust 113. The scrubber 111 is in fluid communication with the first volume 118 via the exhaust conduit 103, and the scrubber 111 is configured to treat effluent from the first volume 118 before the effluent exits the exhaust conduit 103 to the exhaust 113.

[0017] The first chamber 116 has an outer surface 124 that is not exposed to the first volume 118. A first slit valve 120 is formed in the chamber 116 to enable a substrate to enter and exit through the first slit valve. A first slit valve door 122 is coupled to the outer surface 124 adjacent to the first slit valve 120. In operation, the first slit valve door 122 opens to enable a substrate to pass through and closes before processing the substrate.

[0018] The second chamber 102 is disposed within a first volume 118 defined by the first chamber 116. The second chamber 102 defines a second volume 104 therein. Similar to the first chamber 116, the second chamber 102 is made of a process compatible material, such as aluminum, stainless steel, alloys thereof, and combinations thereof. In one embodiment, the second chamber 102 is made of a nickel-containing steel alloy, for example, a nickel-molybdenum-containing steel alloy or a nickel-chromium-molybdenum-containing steel alloy. The material selected for making the second chamber 102 is suitable for operating the second volume 104 at high pressures, such as greater than about 30 bar, for example, about 50 bar or more.

[0019] A susceptor 106 is disposed in the second chamber 102 and has a substrate support surface 108 for supporting a substrate thereon during processing. In one embodiment, the susceptor 106 includes a resistive heater operable to maintain a temperature of a substrate disposed on the substrate support surface 108 at a temperature up to about 550° C. Although not shown, a stem of the susceptor 106 extends through the second chamber 102 and the first chamber 116. The stem of the susceptor 106 may be isolated from the first volume 118 by a bellows assembly operable to isolate the susceptor 106 from the first volume 118.

[0020] A second slit valve 110 is formed through the second chamber 102 to enable a substrate to enter and exit therethrough. The second slit valve 110 is substantially aligned with the first slit valve 120 on approximately the same plane. The second slit valve door 112 is coupled to an inner surface 114 of the second chamber 102 adjacent to the second slit valve 110. The positioning of the second slit valve door 112 on the inner surface 114 enables a more secure sealing of the second volume 104 during high pressure processing because the high pressure maintained within the second volume 104 forces the second slit valve door 112 against the inner surface 114 to create a substantially airtight seal. In operation, the second slit valve door 112 is opened to enable a substrate to pass through the first slit valve 120. After the substrate is positioned on the substrate support surface 108 of the susceptor 106, the second slit valve door 112 is closed before processing the substrate.

[0021] The fluid management device 140 is configured to deliver one or more fluids to the second volume 104 of the second chamber 102. The fluid management device 140 includes a first fluid delivery module 144, a second fluid delivery module 142, and a third fluid delivery module 146. The first fluid delivery module 144 is operable to generate steam and deliver the steam to the second volume 104. The first fluid delivery module 144 is in fluid communication with a first fluid source 150. In one embodiment, the first fluid source 150 is a water source, and more specifically, a deionized water source. The second fluid delivery module 142 is in fluid communication with the second fluid source 152. In one embodiment, the second fluid source 152 is a hydrogen source, and more specifically, a H2 source. The third fluid delivery module 146 is in fluid communication with a third fluid source 148. In one embodiment, the third fluid source 148 is a nitrogen source, such as an ammonia source.

[0022] The first fluid delivery module 144 is in fluid communication with the second volume 104 via a first conduit 156. A valve 164 is disposed between the first fluid delivery module 144 and the first conduit 156. The valve 164 is operable to enable fluid to flow from the first fluid delivery module 144 through the first conduit 156. A containment housing 166 surrounds the valve 164 and the connection of the valve 164 between the first fluid delivery module 144 and the first conduit 156. The first conduit 156 extends from the first valve 164 through the first chamber 116, the first volume 118, and the second chamber 102 to a port 132 formed on the inner surface 114 of the second chamber 102. In one embodiment, a heater jacket 157 surrounds the first conduit 156 and extends along the length of the first conduit 156 between the valve 164 and the first chamber 116.

[0023] The second fluid delivery module 142 is in fluid communication with the second volume 104 via a second conduit 154. A valve 160 is disposed between the second fluid delivery module 142 and the second conduit 154. The valve 160 is operable to enable fluid to flow from the second fluid delivery module 142 through the second conduit 154. A containment housing 162 surrounds the valve 160 and the connection between the valve 160 and the second fluid delivery module 142 and the second conduit 154. The second conduit 154 extends from the second valve 160 through the first chamber 116, the first volume 118, and the second chamber 102 to a port 130 formed on an inner surface 114 of the second chamber 102. In one embodiment, a heater sheath 155 surrounds the second conduit 154 and extends along the length of the second conduit 154 between the valve 160 and the first chamber 116.

[0024] The third fluid delivery module 146 is in fluid communication with the second volume 104 via a third conduit 158. A valve 168 is disposed between the third fluid delivery module 146 and the third conduit 158. The valve 168 is operable to enable fluid to flow from the third fluid delivery module 146 through the third conduit 158. A containment housing 170 surrounds the valve 168 and the connection of the valve 168 between the third fluid delivery module 146 and the third conduit 158. The third conduit 158 ​​extends from the third valve 168 through the first chamber 116, the first volume 118, and the second chamber 102 to a port 134 formed on the inner surface 114 of the second chamber 102. In one embodiment, a heater sheath 159 surrounds the third conduit 158 ​​and extends along the length of the third conduit 158 ​​between the valve 168 and the first chamber 116.

[0025] Each of the heater jackets 155, 157, 159 is operable to maintain the temperature of the corresponding conduit 154, 156, 158 at about 300°C or higher, such as 350°C or higher. In one embodiment, the heater jackets 155, 157, 159 include a resistive heater. In another embodiment, the heater jackets 155, 157, 159 include a fluid passage through which a heated fluid flows. By maintaining the conduits 154, 156, 158 at an elevated temperature, the desired property characteristics of the steam and other high pressure fluids are maintained during the transfer of the steam and other high pressure fluids from the corresponding fluid transfer modules 142, 144, 146 to the second volume 104. In one example, the steam generated in the fluid transfer module 144 is maintained at an elevated temperature in the conduit 156 by the heater jacket 157 to prevent or substantially reduce the possibility of condensation during the transfer of the steam.

[0026] The apparatus 100 also includes a purge gas source 172. In one embodiment, the purge gas source 172 is an inert gas source, such as a nitrogen source or a noble gas source. The purge gas source 172 is in fluid communication with the first volume 118. A conduit 174 extends from the purge gas source 172 to a port 126 formed in the first chamber 116. The fluid communication between the purge gas source 172 and the first volume 118 enables the first volume 118 to be purged with an inert gas. It is conceivable that if the second volume 104 experiences an unplanned decompression event, the first volume 118 is a containment volume used as a failsafe. By having a sufficiently large volume to serve as an expansion volume and by having a purge gas capability, the first volume 118 can improve the operational safety of the second chamber 102 under elevated pressure.

[0027] The purge gas source 172 is also in fluid communication with each of the conduits 156, 154, 158. A conduit 176 extends from the purge gas source 172 to each of the valves 160, 164, 168. When the valves 160, 164, 168 are opened to receive purge gas from the purge gas source 172 flowing through the conduit 176, the conduits 154, 156, 158 are purged to eliminate fluid in the conduits 154, 156, 158 that was previously delivered from the fluid delivery modules 142, 144, 146. The fluid communication between the purge gas source 172 and the conduits 154, 156, 158 also enables purging of the second volume 104.

[0028] To remove fluid from the second volume 104, an exhaust port 136 is formed in the second chamber 102. A conduit 180 extends from the exhaust port 136 to a regulating valve 184, which is configured to enable a pressure drop across the regulating valve 184. In one embodiment, the pressurized fluid discharged from the second volume 104 travels through the exhaust port 136, through the conduit 180, and through the valve 182 to the regulating valve 184, where the pressure of the fluid is reduced from greater than about 30 bar to between about 0.5 bar and about 3 bar, such as from about 50 bar to between about 0.5 bar and about 3 bar. The valve 182 is arranged inline with the regulating valve 184 and enables the reduced pressure fluid to be transferred from the conduit 180 to the conduit 188.

[0029] A pressure relief port 138 is also formed in the second chamber 102. A conduit 186 extends from the pressure relief port 138 to the conduit 188, and the conduit 186 is coupled to the conduit 188 downstream of the regulating valve 184 and the valve 182. The pressure relief port 138 and the conduit 186 are configured to bypass the regulating valve 184 and serve as a secondary pressure reduction for the second volume 104. A valve 196 is disposed on the conduit 188, which is downstream of the conduit 186, the regulating valve 184, and the valve 182. The valve 196 is used to enable fluid to flow from the second volume 104 via the pressure relief port 138 without passing through the regulating valve 184. Thus, the second volume 104 has a bifurcated pressure relief structure, first through the exhaust port 136, the conduit 180, and the regulating valve 184, and then through the pressure relief port 138 and the conduit 186. It is believed that the bifurcated pressure relief structure can improve the control of the pressure generated in the second volume 104.

[0030] Conduit 190 is coupled to and extends from conduit 188 between valve 184 and valve 196. More specifically, conduit 190 is coupled to conduit 188 at a location downstream of where conduit 186 is coupled to conduit 188. Valve 192 is disposed on conduit 190 and is operable to enable selective fluid communication between the second volume 104 and a steam trap 194. The steam trap 194 is configured to condense steam released from the second volume 104 when a high pressure steam process is performed in the second volume 104. In one embodiment, when valve 192 is open and valve 182 is closed, the steam trap 194 is in fluid communication with the second volume 104 via conduits 190, 188, and 186. The steam trap 194 may also be used as a secondary pressure reducing device for high pressure steam released from the second volume 104.

[0031] The containment shell 198 is coupled to the first chamber 116, and each of the regulating valve 184, the valve 182, the valve 196, and the valve 192 is disposed in the containment shell 198. The conduits 188, 190 are disposed in the containment shell 198, and at least a portion of each of the conduits 180, 186 is disposed in the containment shell 198. In one embodiment, the steam trap 194 is disposed in the containment shell 198. In another embodiment, the steam trap 194 is disposed outside the containment shell 198.

[0032] The sensor 121 is coupled to the containment shell 198 and is in fluid communication with the volume defined within the containment shell 198. The sensor 121 is constructed to detect gas leakage within the containment shell volume. In one embodiment, the sensor 121 is an ammonia detector. In another embodiment, the sensor 121 is a hydrogen detector. In certain embodiments, the sensor 121 includes a plurality of sensors, such as an ammonia detector and a hydrogen detector. The containment shell 198 is constructed to isolate and contain leakage of any effluent discharged from the second volume 104. If a leakage of an effluent such as the above-mentioned gas is detected, the volume defined by the containment shell 198 is purged with an inert gas from a gas source 131. In one embodiment, the gas source 131 is constructed to deliver nitrogen to the volume defined by the containment shell 198. Effluent leaking into the volume is discharged from the containment shell 198. In this embodiment, the containment housing 198 volume is in fluid communication with the scrubber 111 to enable treatment of effluent confined within the containment housing 198 as the effluent is discharged from the containment housing 198 .

[0033] When valve 196 is open, fluid from conduit 188 travels to conduit 101, which is in fluid communication with effluent management module 115. Figure 2 Described in greater detail is the effluent management module 115 , which handles and manages exhaust gases from both the first volume 118 and the second volume 104 .

[0034] Figure 2 1 is a schematic diagram of an effluent management module 115 according to an embodiment described in the present disclosure. Module 115 includes discharge conduit 103, isolation valve 105, throttle valve 107, pump 109, scrubber 111 and exhaust device 113, as described above with respect to Figure 1 The module 115 also includes a muffler assembly 202. The muffler assembly 202 is in fluid communication with the second volume 104 via the conduit 101. The muffler assembly 202 includes a plurality of mufflers 204, 208, 212, 216 operable to reduce the pressure of the effluent flowing through the muffler stack 202.

[0035] The muffler assembly 202 includes a first muffler 204 defining a volume 206, a second muffler 208 defining a volume 210, a third muffler 212 defining a volume 214, and a fourth muffler 216 defining a volume 218. The conduit 101 is coupled to and extends between the valve 196 and the first muffler 204. The conduit 220 extends from the first muffler 204 opposite the conduit 101 to the exhaust conduit 103. The conduit 220 is coupled to the exhaust conduit 103 between the throttle valve 107 and the pump 109.

[0036] Conduit 222 extends from pump 109 to fourth muffler 216. Conduit 224 extends between fourth muffler 216 and third muffler 212. Conduit 226 extends between third muffler 212 and second muffler 208. In operation, the effluent flowing through conduit 101 enters volume 206 of first muffler 204 and flows through volume 206 to conduit 220. The pressure of the effluent in the conduit is between about 15 psi and about 30 psi. The pressure of the effluent leaving volume 206 at conduit 220 is between about 0 psi and about 5 psi. Therefore, first muffler 204 acts as a pressure relief device, which allows the effluent to undergo volume expansion to reduce the pressure of the effluent.

[0037] The effluent continues from conduit 220 through exhaust conduit 103 to pump 109. In some embodiments, if the effluent escapes from the second volume 104 into the first volume 118, the effluent from the first volume 118 is also present in the exhaust conduit. Pump 109 increases the pressure of the effluent to less than about 16.5 psi, such as between about 5 psi and about 15 psi, to move the effluent through the remainder of the muffler assembly 202. The pump pressurized effluent travels through conduit 222 to the fourth muffler 216 and expands in volume 218. The effluent then flows from volume 218 through conduit 224 to volume 214 of the third muffler 212. Volume 214 further reduces the pressure of the effluent, and the effluent travels from volume 214 through conduit 226 to volume 210 of the second muffler 208. The volume 210 further reduces the pressure of the effluent such that when the effluent exits the volume 210, the pressure of the effluent is less than about 14.5 psi, such as less than about 10 psi, for example, between about 0 psi and about 5 psi.

[0038] The effluent leaves the volume 210 through a conduit 228, which is coupled to and in fluid communication with the volume 210. The conduit 228 extends from the second muffler 208 to a bypass valve 230. During normal operation, the bypass valve 230 enables fluid to flow from the conduit 228 to the scrubber 111 and the exhaust 113. However, if an equipment failure occurs that results in an unplanned or uncontained release of effluent (pressurized or unpressurized), the bypass valve 230 opens, which enables fluid flowing through the module 115 to enter the conduit 232 instead of flowing to the scrubber 111. The bypass valve 230 also opens when the scrubber 111 is unable to prevent the release of untreated effluent to the exhaust 113.

[0039] The conduit 232 has a restrictor 234 disposed thereon that reduces the flow of the effluent traveling through the conduit 232. In one embodiment, the amount of NH3 flowing through the conduit 232 is regulated by the restrictor 234 so that the concentration of NH3 is less than about 5% by volume, such as less than about 2% by volume. To further promote the reduction in the concentration of NH3, the purge gas source 172 is also in fluid communication with the conduit 232 via the conduit 242. The mass flow controller 244 controls the amount of purge gas, such as nitrogen, flowing from the purge gas source 172 through the conduit 242 so that the effluent in the conduit 232 is mixed with an appropriate amount of the purge gas before the effluent passes through the conduit 236 to the second scrubber 238.

[0040] Conduit 236 is tee'd from the intersection of conduits 232, 242 and extends to a second scrubber 238. When bypass valve 230 is open and the effluent NH3 concentration is adjusted to an acceptable disposal amount, the second scrubber 238 disposes the effluent. After treatment in the second scrubber 238, the treated effluent travels through conduit 240, which is in fluid communication between the second scrubber 238 and the exhaust 113.

[0041] Figure 3 2 is a schematic cross-sectional view of a muffler assembly 202 according to an embodiment described in the present disclosure. As described above, the muffler assembly 202 includes a plurality of mufflers 204, 208, 212, 216. In one embodiment, the mufflers 204, 208, 212, 216 are made of a stainless steel material or an alloy thereof. In another embodiment, the mufflers 204, 208, 212, 216 are made of an aluminum material or an alloy thereof. Each of the mufflers 204, 208, 212, 216 defines a corresponding volume 206, 210, 124, 218 therein. In one embodiment, each of the mufflers 204, 208, 212, 216 has substantially similar dimensions.

[0042] In one embodiment, the silencers 204, 208, 212, 216 are cylindrical. The diameter 342 of each of the silencers 204, 208, 212, 216 is between about 20 inches and about 40 inches, for example, about 30 inches. The length 344 of each of the silencers 204, 208, 212, 216 is between about 60 inches and about 100 inches, for example, about 80 inches. In one embodiment, the silencers 204, 208, 212, 216 are stacked in a substantially vertical arrangement. In one embodiment, the silencers 204, 208, 212, 216 are constructed of a frame assembly (not shown) so as to be arranged in a substantially vertical arrangement. It is also contemplated that the silencers 204, 208, 212, 216 can be arranged in a horizontal arrangement or other arrangements.

[0043] The first muffler 204 has a port 302 formed through a first end 346. In one embodiment, the port 302 is formed through a central region of the first end 346. The conduit 101 is coupled to the port 302 to enable fluid communication between the conduit 101 and the volume 206. The port 304 is formed through a second end 348 of the first muffler 204 opposite the port 302. In one embodiment, the port 304 is formed through a central region of the second end 348. In operation, effluent enters the volume 206 through the port 302 and exits the volume 206 through the port 304. The conduit 220 is coupled to the port 304 to enable fluid communication between the volume 206 and the exhaust conduit 103.

[0044] As described above, effluent from the second volume 104 flows sequentially through the first muffler 204, the fourth muffler 216, the third muffler 212, and the second muffler 208. The port 316 is formed in the second end 360 of the fourth muffler 216. The conduit 222 is coupled to the port 316 to enable fluid communication between the pump 109 and the volume 218. The port 314 is formed through the fourth muffler 216 and adjacent to the first end 358 of the fourth muffler 216, the first end 358 of the fourth muffler 216 being opposite the port 316. In operation, effluent enters the volume 218 through the port 316 and leaves the volume 218 through the port 314.

[0045] In the foregoing embodiment, the sequential flow of effluent proceeds from the first muffler 204 to the fourth muffler 216, the third muffler 212, and the second muffler 208. In this embodiment, the volume 218 of the fourth muffler 216 is in direct fluid communication with the volume 214 of the third muffler 212. Similarly, the volume 214 of the third muffler 212 is in direct fluid communication with the volume 210 of the second muffler 208. The volume 206 of the first muffler 204 is in indirect fluid communication with the volume 218 of the fourth muffler 216 via the exhaust conduit 103. In alternative embodiments, the direct and indirect fluid communication between the various volumes 206, 210, 214, 218 may vary depending on the desired effluent pressure reduction and / or physical space requirements.

[0046] Port 312 is formed in the third muffler 212 adjacent to a first end 354 of the third muffler 212. The conduit 224 extends between the port 312 and the port 314 to enable fluid communication between the volume 218 and the volume 214. Port 310 is formed in the third muffler 212 adjacent to a second end 356 of the third muffler 212 opposite the port 312. In operation, effluent enters the volume 214 through the port 312 and exits the volume 214 through the port 310.

[0047] Port 308 is formed in the second muffler 208 and is adjacent to a second end 352 of the second muffler 208. Conduit 226 extends between port 308 and port 310 to enable fluid communication between volume 214 and volume 210. Port 306 is formed in the second muffler 208 through a first end 350 of the second muffler, the first end 350 being opposite to port 308. In one embodiment, port 306 is formed through a central region of the first end 350. In operation, effluent enters volume 210 through port 308 and exits volume 210 through port 306. Conduit 228 is coupled to port 306 to remove effluent from volume 210 and move the effluent to other equipment of module 115.

[0048] Each of the mufflers 204, 208, 212, 216 and the corresponding fluid inlets and outlets are disposed relative to one another along the length 344 of the mufflers 204, 208, 212, 216 to enable the volume expansion of the effluent as it travels through the volumes 206, 210, 214, 218. By enabling the effluent to substantially "see" the entire volume of each of the mufflers 204, 208, 212, 216, pressure reduction may be achieved in a more efficient manner.

[0049] As effluent travels through the mufflers 204, 208, 212, 216, condensate or other liquid may accumulate within the volumes 206, 210, 214, 218. A port 318 is formed through the second end 348 of the first muffler 204 and adjacent to the port 304. In one embodiment, the port 318 is formed through the port 304 radially outward from the second end 348. A conduit 320 is coupled to the port 318 and extends from the port 318 to the cap 334. When condensate or other fluid accumulates within the volume 206, the cap 334 is removed and the fluid is drained from the volume 206 via the port 318 and the conduit 320.

[0050] A port 322 is formed through the second end 352 of the second muffler 208. In one embodiment, the port 322 is formed through the second end 352 radially outward from the port 306. A conduit 324 is coupled to the port 322 and extends from the port 322 to the cap 336. When condensate or other fluid accumulates within the volume 210, the cap 336 is removed and the fluid is drained from the volume 210 via the port 322 and the conduit 324.

[0051] A port 326 is formed through the second end 356 of the third muffler 212. A conduit 328 is coupled to the port 326 and extends from the port 326 to the cap 338. When condensate or other fluid accumulates within the volume 214, the cap 338 is removed and the fluid is drained from the volume 214 via the port 326 and the conduit 328.

[0052] The port 330 is formed through the second end 360 of the fourth muffler 216 and is adjacent to the port 316. In one embodiment, the port 330 is formed through the second end 360 radially outward from the port 316. A conduit 332 is coupled to the port 330 and extends from the port 330 to the cap 340. When condensate or other fluid accumulates within the volume 218, the cap 340 is removed and the fluid is drained from the volume 218 via the port 330 and the conduit 332.

[0053] In summary, the present disclosure describes an effluent management apparatus for improving pressure reduction of effluent and for handling effluent. The muffler assembly is capable of depressurizing effluent used during high pressure processing operations by sequentially passing the effluent through a series of mufflers to allow for volume expansion (and associated pressure reduction) of the effluent. The apparatus described in the present disclosure also includes effluent handling apparatus for standard operation and high pressure processing equipment, as well as for emergency effluent control in the event of an unplanned or unrestricted effluent release.

[0054] While the foregoing is directed to embodiments of the present disclosure, other and further embodiments of the disclosure may be devised without departing from the basic scope thereof and the scope of the disclosure is to be determined by the following claims.

Claims

1. A muffler assembly device, comprising: a first muffler defining a first volume therein, the first muffler having a first port formed in a first end and a second port formed in a second end, the second port being opposite the first port; a second muffler defining a second volume therein, the second muffler having a third port formed in a third end and a fourth port formed in the second muffler, the fourth port being opposite the third port; a third muffler defining a third volume therein, the third muffler having a fifth port formed therein and a sixth port formed therein, the sixth port being opposite the fifth port; a fourth muffler defining a fourth volume therein, the fourth muffler having a seventh port formed therein and an eighth port formed through a fourth end, the eighth port being opposite the seventh port; a first conduit extending between the seventh port and the fifth port; a second conduit extending between the fourth port and the sixth port; discharge duct; a pump coupled to the discharge conduit; a third conduit extending from the first muffler to the exhaust conduit; and A fourth conduit extends from the pump to the fourth muffler.

2. The apparatus of claim 1, wherein each of the first muffler, the second muffler, the third muffler, and the fourth muffler have similar dimensions.

3. The apparatus of claim 2, wherein the length of each of the first muffler, the second muffler, the third muffler, and the fourth muffler is between 60 inches and 100 inches.

4. The apparatus of claim 2, wherein each of the first muffler, the second muffler, the third muffler, and the fourth muffler is cylindrical.

5. The apparatus of claim 4, wherein the diameter of each of the first muffler, the second muffler, the third muffler, and the fourth muffler is between 20 inches and 40 inches.

6. The apparatus of claim 1, further comprising: a ninth port formed in the first muffler and adjacent to the second port; a tenth port formed in the second muffler and adjacent to the fourth port; an eleventh port, the eleventh port being formed in the third muffler and adjacent to the sixth port; and A twelfth port is formed in the fourth muffler and is adjacent to the eighth port.

7. An effluent management device comprising: A muffler assembly, the muffler assembly comprising: a first muffler defining a first volume therein, the first muffler having a first port formed in a first end and a second port formed in a second end, the second port being opposite the first port; a second muffler defining a second volume therein, the second muffler having a third port formed in a third end and a fourth port formed in the second muffler, the fourth port being opposite the third port; a third muffler defining a third volume therein, the third muffler having a fifth port formed therein and a sixth port formed therein, the sixth port being opposite the fifth port; a fourth muffler defining a fourth volume therein, the fourth muffler having a seventh port formed therein and an eighth port formed through a fourth end, the eighth port being opposite the seventh port; a first conduit extending between the seventh port and the fifth port; and a second conduit extending between the fourth port and the sixth port; a valve; a third conduit extending between the second muffler and the valve; a first scrubber in fluid communication with the valve; and A second scrubber is in fluid communication with the valve via a fourth conduit, wherein a flow restrictor is disposed on the fourth conduit between the valve and the second scrubber.

8. The apparatus of claim 7, further comprising: discharge duct; a pump coupled to the discharge conduit; a fifth conduit extending from the second port to the exhaust conduit; and A sixth conduit extends from the pump to the eighth port.

9. A high pressure processing device comprising: First chamber; a second chamber defining a processing volume therein, the second chamber being disposed within the first chamber; A muffler assembly, the muffler assembly comprising: a first muffler defining a first volume therein, the first muffler having a first port formed in a first end and a second port formed in a second end, the second port being opposite the first port; a second muffler defining a second volume therein, the second muffler having a third port formed in a third end and a fourth port formed in the second muffler, the fourth port being opposite the third port; a third muffler defining a third volume therein, the third muffler having a fifth port formed therein and a sixth port formed therein, the sixth port being opposite the fifth port; a fourth muffler defining a fourth volume therein, the fourth muffler having a seventh port formed therein and an eighth port formed through a fourth end, the eighth port being opposite the seventh port; a first conduit extending between the seventh port and the fifth port; and a second conduit extending between the fourth port and the sixth port; a valve; a third conduit extending between the second muffler and the valve; a first scrubber in fluid communication with the valve; a discharge conduit extending from the first chamber; a pump coupled to the discharge conduit; a second scrubber in fluid communication with the valve via a fourth conduit, wherein the fourth conduit extends from the first muffler to the exhaust conduit; a fifth conduit disposed between the processing volume and the first port of the first muffler; and A sixth conduit extends from the pump to the fourth muffler.

10. The apparatus of claim 9, further comprising: a seventh conduit extending from the second port to the exhaust conduit; and The sixth conduit extends from the pump to the eighth port.

11. The apparatus of claim 9, wherein each of the first muffler, the second muffler, the third muffler, and the fourth muffler is cylindrical.

12. The apparatus of claim 9, further comprising: a ninth port formed in the first muffler and adjacent to the second port; a tenth port formed in the second muffler and adjacent to the fourth port; an eleventh port, the eleventh port being formed in the third muffler and adjacent to the sixth port; and A twelfth port is formed in the fourth muffler and is adjacent to the eighth port.

13. The apparatus of claim 9, further comprising: a first slit valve formed in the second chamber; and A first slit valve door is coupled to an inner surface of the second chamber.

14. The apparatus of claim 13, further comprising: a second slit valve formed in the first chamber; and A second slit valve door is coupled to an outer surface of the first chamber.

15. The apparatus of claim 7, wherein each of the first muffler, the second muffler, the third muffler, and the fourth muffler is cylindrical.

16. The apparatus of claim 15, wherein each of the first muffler, the second muffler, the third muffler, and the fourth muffler has a length between 60 inches and 100 inches.

17. The apparatus of claim 16, wherein the diameter of each of the first muffler, the second muffler, the third muffler, and the fourth muffler is between 20 inches and 40 inches.

18. The apparatus of claim 11, wherein each of the first muffler, the second muffler, the third muffler, and the fourth muffler has a length between 60 inches and 100 inches.

19. The apparatus of claim 18, wherein the diameter of each of the first muffler, the second muffler, the third muffler, and the fourth muffler is between 20 inches and 40 inches.

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