Map edge ring part numbers to slot numbers using identifiers

Abstract

A method and system for tracking an edge ring includes capturing an edge ring identifier from a source associated with the edge ring. Inserting the edge ring into a slot of an edge ring carrier, wherein the edge ring is assigned to the edge ring carrier. Tracking the edge ring identifier to determine transfers to and from the edge ring carrier and to and from a processing station. Tracking the edge ring identifier creates a metadata file that provides life information about the edge ring.

Description

Technical Field

[0001] The present embodiments relate to semiconductor wafer processing, and more particularly to tracking and verifying that the correct consumable parts are provided to a process module. Background Art

[0002] A typical manufacturing system includes multiple cluster tool assemblies or processing stations. Each processing station used in the production process of semiconductor wafers includes one or more process modules, each of which is used to perform specific production operations. Some of the production operations performed in different process modules include cleaning operations, etching operations, deposition operations, cleaning operations, drying operations, etc. The process chemistry and process conditions used to perform these operations in these process modules cause damage to some hardware components that are continuously exposed to these harsh conditions in the process modules. These damaged or broken hardware components need to be replaced periodically and in a timely manner to ensure that the damaged hardware components do not expose other hardware components in the process module to these harsh conditions and to ensure the quality of the semiconductor wafer. For example, an edge ring configured adjacent to a semiconductor wafer in a process module may be damaged due to its position and continuous exposure to ion bombardment from the plasma generated in the process module for etching operations. The damaged edge ring must be replaced in a timely manner to ensure that the damaged edge ring does not expose the underlying hardware components (such as a chuck) to the harsh process conditions. Replaceable hardware components are referred to as consumable parts herein.

[0003] Consumable parts, such as edge rings, are critical to process performance. Typically, these consumable parts are replaced manually and require process module venting to exchange the edge ring. Alternatively, these consumable parts are replaced using an automated method that includes: loading a new edge ring into a carrier (e.g., a FORP (Front Opening Ring Transport Box), which is similar to a Front Opening Wafer Box (FOUP) for wafer transport / exchange); transporting the FORP to a load port of a processing station; and using a system robot to remove the old edge ring from the process module and install a new edge ring. The replacement of the consumable parts is performed under vacuum conditions in a manner similar to transporting wafers into and out of a process module. The carrier can be transported manually or by a wafer fab automated material handling system (AMHS) used to transport wafer FOUPs. A single carrier can be used to store both new edge rings and broken edge rings removed from a process module, or different carriers can be used to separately store new edge rings and used edge rings. Broken edge rings need to be removed promptly, and when completely exhausted, new edge rings need to be loaded.

[0004] The exact shape and height of the edge ring are optimized based on the process application. As a result, there are many different edge rings in use and need to be managed efficiently. The differences between the different types of edge rings are often very subtle and difficult to detect with the naked eye. In addition, once in a carrier, it is almost impossible to distinguish between different edge rings. In a production environment, an edge ring carrier may contain a single type of edge ring, more than one type of edge ring, or a single type or multiple types of edge rings mixed with other consumable parts. Care should be taken to ensure that broken edge rings are not returned to the process module or that carriers with incorrect edge rings are not loaded into the wrong processing station. Incorrect edge rings accidentally loaded into a process module can result in unacceptable wafer scrap events. Such problems may go undetected for a considerable period of time and may significantly affect the quality of the wafers processed, thereby seriously affecting the profitability of semiconductor manufacturers. Currently, there is no efficient way to automatically verify that the correct edge rings are loaded into the FORP or determine their location (i.e., slot number) in the FORP.

[0005] It is against this background that embodiments of the present invention arise. Summary of the invention

[0006] Embodiments of the present disclosure include systems and methods for tracking an edge ring throughout its useful life, starting from the time the edge ring is inserted into a carrier such as a front opening ring transfer box (FORP) (similar to a wafer carrier - a front opening wafer box (FOUP)), through a manufacturing system, and back to the FORP. The edge ring is tracked throughout the manufacturing facility until the useful life of the edge ring is consumed, at which time it becomes a target for removal. The manufacturing facility includes multiple processing stations that are serviced by an automated material handling system. A processing station is a location where one or more manufacturing operations are performed. Therefore, a processing station is also referred to herein as a "manufacturing system." Each processing station may include one or more process modules that use a specific type of edge ring based on the process performed therein. These process modules are designed to replace worn consumable parts (such as edge rings) that are damaged during wafer processing, and the replacement is performed in situ without opening the process module for wet cleaning. The edge ring is replaced under vacuum in a manner similar to how wafers are transported within the process module. A new edge ring for replacement is brought into the processing station in an edge ring carrier (e.g., FORP) similar to a front opening pod (FOUP). The edge ring carrier can be manually transported or brought into the processing station by an automated material handling system (AMHS) used in a manufacturing facility, which is typically used to transport wafer FOUPs.

[0007] Different process modules in different processing stations may use different types of edge rings. Different types of edge rings may differ slightly or significantly from each other. It is important to track the different types of edge rings used in different process modules and to deliver the correct type of edge ring to each process module in different processing stations to optimize the processes performed therein. Manufacturing facilities use multiple edge ring carriers for transporting and removing edge rings from different process modules in one or more processing stations (i.e., manufacturing systems). When an edge ring needs to be replaced in a process module of a processing station, a new edge ring suitable for the process module is identified and loaded onto the appropriate edge ring carrier. The edge ring carrier with the appropriate new edge ring is moved to the load port of the processing station containing the process module for delivery of the edge ring.

[0008] Various implementations ensure that the correct edge rings are delivered to the processing station by identifying and tracking edge rings using edge ring identifiers. These edge rings are tracked from the time they are loaded into the FORP and then brought into the manufacturing facility (also known as the "wafer factory") as new edge rings until the end of their useful life. Information from edge ring tracking within the manufacturing facility is used to create a metadata file that provides information about the life of the edge rings. Tracking each edge ring ensures that the correct edge ring with sufficient useful life is delivered to each process module, thereby eliminating any loading errors (e.g., avoiding loading a used edge ring or an incorrect edge ring with insufficient remaining life into a process module). These edge rings are tracked at multiple levels. For example, when the edge rings are loaded into an edge ring carrier, the edge rings are tracked by linking their edge ring identifiers with the carrier identifier of the edge ring carrier and the slot number of the slot within the edge ring carrier into which the edge ring is loaded. This linking enables the tracking system to track the location of each edge ring within different edge ring carriers as they are moved within the wafer factory and loaded into the manufacturing system. Further tracking of the edge ring is performed at the processing tool (i.e., processing station or manufacturing system) level within the manufacturing facility, when the edge ring is delivered to the processing station. Tracking at the processing tool level is performed via the tool control system, or alternatively by querying a module (such as a production execution system) executing on a server in the manufacturing facility. Tracking at the processing tool level will determine that the correct edge ring with sufficient remaining useful life is delivered to the process module within the processing station. This multi-level tracking ensures that used edge rings or incorrect edge rings are not mistakenly loaded into the process module, thereby avoiding wafer scrapping due to such errors. This tracking operation also ensures that the edge ring carrier contains the correct edge ring expected for a specific process module.

[0009] In one implementation, a method for edge ring tracking is disclosed. The method includes capturing an edge ring identifier from a source, wherein the source may be a packaging material of the edge ring or a surface of the edge ring or an item embedded in the edge ring. The ring identifier information may be used to authenticate the ring, information that may be used later within the processing station. The edge ring is inserted into a slot of an edge ring carrier, wherein the edge ring is assigned to the edge ring carrier. The edge ring identifier is tracked to keep track of transfers to and from the edge ring carrier and to and from the processing station. A metadata file is established for the tracking of the edge ring identifier, the metadata file providing life information about the edge ring.

[0010] In some implementations, inserting the edge ring includes linking the edge ring identifier with a slot identifier of the slot and a carrier identifier of the edge ring carrier.

[0011] In some implementations, the capture and insertion operations are performed during the time the edge ring is loaded into the edge ring carrier.

[0012] In some implementations, the tracking of the edge ring identifier includes receiving information captured by one or more sensors of the edge ring carrier when the edge ring moves in and out of a particular slot of the edge ring carrier. The information received from the one or more sensors is used to update the lifetime information in the metadata file of the edge ring.

[0013] In some implementations, the information received from the one or more sensors of the edge ring carrier is used to update a table of contents maintained for the edge ring carrier.

[0014] In some implementations, the tracking of the edge ring identifier includes: receiving information captured by one or more sensors distributed within the processing station of a manufacturing facility as the edge ring moves within the processing station. The information received from the one or more sensors is used to update the lifespan information in the metadata file of the edge ring.

[0015] In some implementations, the processing station includes at least a load port, an atmospheric pressure transfer module, a load lock chamber, a vacuum transfer module, a process module in which the edge ring is to be used, and one or more robots that move the edge ring within the processing station. The information received from the one or more sensors distributed within the processing station includes one or more of the following: the position of the edge ring, the time when the edge ring was introduced into the position, the time when the edge ring was removed from the position, the condition of the edge ring before being moved to the position, the condition of the edge ring after being moved out of the position, the process expected to be used for the edge ring, the process module expected to be used for the edge ring, or a record of the use of the edge ring within the process module.

[0016] One advantage of tracking edge rings is that the location of the edge ring and the condition of the edge ring are known at all times as the edge ring travels through the fab and its manufacturing systems. The location and condition information provides a history of the edge ring's use within the manufacturing facility so that the correct edge ring is delivered to the process module when needed. These and other advantages will be discussed below and will become apparent to those skilled in the art upon reading the specification, drawings, and claims. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 A simplified block diagram of a manufacturing system that, in one implementation, uses an edge ring execution system used in tracking edge rings is shown.

[0018] Figure 2 A simplified edge ring capture system in one implementation is shown that is communicatively coupled to a manufacturing system to track the edge ring.

[0019] Figure 3 An overall view is shown in one implementation where an edge ring execution system within a manufacturing system uses edge ring identifier information to build a metadata file for an edge ring.

[0020] Figure 4 A simplified diagram of an edge ring carrier having multiple slots for storing edge rings and sensors for tracking the positions of different edge rings housed therein is shown in one implementation.

[0021] Figures 5A-5D Sensors distributed throughout a processing station for tracking the position and condition of an edge ring are shown according to one embodiment.

[0022] Figure 6 The movement of an edge ring to different process modules within a manufacturing system is shown in one implementation.

[0023] Figure 7The advancement of an edge ring within a processing station is shown in one implementation.

[0024] Figure 8 An operational flow of a method for tracking an edge ring through a manufacturing system is shown according to one embodiment. DETAILED DESCRIPTION

[0025] In the following description, many specific details are described to provide a complete understanding of the features of the present invention. However, it is apparent to those skilled in the art that the present invention can be implemented without all or part of these specific details. On the other hand, well-known process operations are no longer described in detail to avoid unnecessarily obscuring the present invention.

[0026] Embodiments of the present disclosure provide details regarding the use of edge ring identifiers to track edge rings and the establishment of a metadata file for the edge ring based on the tracking. When a new edge ring is first introduced into a manufacturing facility, the edge ring identifier is scanned and the edge ring is loaded onto an edge ring carrier for further transport to a processing station (manufacturing system). Tracking of edge ring identifiers provides information about the current status of edge rings within a wafer fab and its manufacturing system. Information from edge ring tracking is updated to the metadata file of the edge ring. As the edge ring advances through one or more processing stations, sensors distributed within the one or more processing stations are used to collect additional information about the edge ring. The additional information obtained from the tracking of the edge ring provides the current location, current condition, and usage history of the edge ring within the manufacturing system. The usage history of the edge ring contains details of the lifetime hours used and the lifetime hours remaining within a process module. The additional information is updated to the metadata file maintained for the edge ring to establish the lifetime information (i.e., usage history) of the edge ring. The tracking of the edge ring starts when the edge ring is introduced into the FORP as a new edge ring and continues throughout the life of the edge ring to capture the details of the edge ring moving through various manufacturing systems. This tracking assists in determining when a specific edge ring needs to be replaced within a process module, what edge ring to replace it with, etc. Based on the above general understanding of the implementation, various specific details are now described with reference to the various drawings.

[0027] Figure 1A simplified block diagram of an overall manufacturing facility 200 is shown in one implementation in which edge rings used within various process modules are tracked. When a new edge ring 10 is received, the edge ring is loaded onto the FORP 100. During loading, an edge ring identifier (ERID) 11 of the edge ring 10 is captured by an edge ring (ER) identification system 110. The ER identification system 110 may use an ERID capture system 111 to capture the ERID 11. The edge ring identifier may be in the form of a combination of alphabetic characters, numeric characters, or alphanumeric characters, a bar code, an RFID tag, an image, a QR (quick response) code, a label, an imprint or other visual mark or icon, a notch, an infrared mark, a two-dimensional bar code, or any other form of identification disposed on the packaging of the edge ring or on the surface of the edge ring that will not degrade or be adversely affected over time when exposed to processing conditions in the process module. In the case where the edge ring identifier is disposed on the surface, the edge ring identifier may be disposed on the underside surface of the edge ring or on the outer side surface of the edge ring. Alternatively, the edge ring identifier may be disposed below the surface of the edge ring (e.g., a chip embedded within the edge ring). Depending on the type of edge ring identifier, the ERID capture system may employ any of a number of sensors / readers to obtain the edge ring identifier. For example, a camera or image capture device may be used to capture an image of the ERID. Additionally, if desired, optical character recognition (OCR) software may be used to extract any textual content captured in the image. Alternatively, a barcode reader, or RFID reader, or sensor, or any other capture or detection device may be used to capture the edge ring identifier.

[0028] The received edge ring is placed into an edge ring carrier (e.g., a front opening ring transport box—FORP) 100 and transported to a processing station (e.g., any of processing stations 210-1 to 210-6) within the manufacturing facility 200 to be supplied to the process module. At the same time, the edge ring identifier captured by the ER identification system 110 is transmitted to the edge ring execution system (ERES) 310, which processes the edge ring identifier, including decrypting the identifier (if the ERID is encrypted), and using the edge ring identifier to generate a metadata file for the edge ring. The edge ring identifier of the edge ring is used to query the production execution system 320 (FAB MES or FMES for short) executed on a server in the manufacturing facility, which tracks all the different parts used and / or processed within the manufacturing facility 200 to obtain additional information for defining the edge ring usage history.

[0029] When the edge ring is used within the manufacturing facility, one or more sensors distributed throughout the manufacturing facility track the edge ring using the edge ring identifier. For example, sensors may be set within the FORP 100, along the automated material handling system (AMHS) that transports the edge ring carrier 100 to different processing stations, and within processing stations S1-S6 to track the edge ring to determine the location and condition of the edge ring. The information of the edge ring captured by the sensors is passed to the ERES 310 to update different process tables. The information passed by the sensors may include details of the edge ring within the manufacturing system. In addition to the edge ring details obtained by tracking the edge ring's edge ring identifier, additional details about different types of edge rings used in different process modules can also be obtained by querying the FMES 320. The information returned by the FMES 320 is used by the edge ring execution engine 310 to update the metadata file of the edge ring 10. Updates to the edge ring's metadata file provide a usage history of the edge ring, including the various locations the edge ring has traveled through within the manufacturing system, the edge ring's current location, the different processes to which the edge ring was exposed within the different process modules in which the edge ring was inserted, the edge ring's current condition, and other lifetime details.

[0030] The usage history can be used to determine when edge rings delivered to different process modules are nearing the end of their useful life and must be replaced. Tracking of edge rings enables automated identification of edge ring designs, edge ring locations in a manufacturing system, and verification that the correct edge rings are delivered to and installed in process modules. Various implementations ensure that an edge ring with the correct design is targeted to a particular process module and has sufficient remaining life to perform one or more processes scheduled at that particular process module.

[0031] The tracking of edge rings can be broken down into two main elements. The first element is when the edge ring is reintroduced into the manufacturing system, and the second element is when the edge ring is used in a processing station (manufacturing system).

[0032] Figure 2 The first elements involved in a process of tracking an edge ring within a manufacturing facility 200 in one implementation are described. The edge ring can be introduced into the manufacturing facility 200 through an automated process or a manual process.

[0033] In the automated process, a new edge ring 10 is received and processed by an ERID capture system 110-A. The edge ring identifier may be provided on a surface (underside surface or outside surface) of the edge ring or embedded in the edge ring. Alternatively, the edge ring identifier may be provided on the packaging of the edge ring. The edge ring (ER) is processed by an ER inventory handling system 112. The ER inventory handling system may be executed on a server of a computer at a receiving station or at a location within or outside the manufacturing facility 200 where the new edge ring is received. The ER inventory handling system 112 includes an ERID capture system 111 (e.g., a sensor, an image capture device, a reader, etc.) to capture the edge ring identifier provided on the edge ring surface, embedded in the edge ring, or on the packaging and other related information. For example, other related information may include the type of edge ring, the expected process, life use hours, etc. The captured edge ring information is processed by the ER inventory handling system 112 to generate a unique encrypted code (e.g., a serial number or other encrypted information) for the edge ring including the edge ring identifier.

[0034] In one implementation, as part of processing the captured information, the ER inventory handling system 112 may authenticate that the edge ring being loaded is a valid edge ring for use within the manufacturing facility 200. As part of authenticating the edge ring, the ER inventory handling system 112 may query the FAB production execution system 320 over a network to obtain information about different types of edge rings used in various processing stations within the manufacturing facility 200. The ER inventory handling system 112 may then verify the type of edge ring being loaded against the information obtained from the FAB production execution system 320 to determine whether the edge ring being loaded is a valid edge ring. If the edge ring is not the type used in the manufacturing facility, a signal may be generated by the ER inventory handling system 112 to indicate that an inappropriate or incorrect edge ring will be introduced into the manufacturing facility. In response to the signal, the ER inventory handling system 112 ensures that the incorrect edge ring is not loaded onto the FORP and further transported to the manufacturing facility. On the other hand, if the edge ring is the type used in one or more process modules within the manufacturing facility, a unique encryption code is generated for the edge ring. Thus, the ER inventory handling system 112 acts as a virtual sentinel, ensuring that only valid edge rings are loaded onto the FORPs that supply edge rings to processing stations within the manufacturing facility.

[0035] When the encryption code is generated, information about the edge ring and the encryption code are updated to the ER inventory (113), which maintains all edge rings that have been successfully processed by the ER inventory handling system 112. In addition to the ER identifier of the processed edge ring, the ER inventory handling system 112 can also identify the edge ring carrier into which the edge ring is to be loaded for further transportation to different processing stations. In some embodiments, several of the edge ring carriers can store edge rings that can be used for a specific process (e.g., a dielectric etching process, a metal etching process, a wet etch, a dry etch, etc.). In these implementations, the ER inventory handling system 112 can identify the edge ring for a specific process and load it onto a specific edge ring carrier. In alternative implementations, the edge ring can be loaded into any edge ring carrier 100 that the ER inventory handling system 112 can use. The loaded edge ring carrier 100 is then transported to different processing stations within the manufacturing facility 200 using an automated material handling system (AMHS) (e.g., an overhead transport (OHT) vehicle 201). The OHT vehicle 201 may be one form of a material handling system used by the AMHS, and other forms of material handling systems for transferring FOUPs may also be used, such as conveyor belts, buffer storage, etc. In some implementations, the OHT may be part of a larger automated material handling system, wherein the OHT may be used to place the edge ring carrier on a conveyor belt, or to a load port, or buffer storage, or stacker, and a robot or other automated handler may be used to move the edge ring carrier from the conveyor belt, buffer storage, stacker, etc. to a load port of a processing station.

[0036] A manufacturing facility may contain multiple processing stations (i.e., manufacturing systems). Figure 2 The exemplary manufacturing system shown in FIG. 1 includes six processing stations S1-S6 (210-1 to 210-6). Figure 2 The number of processing stations shown is only an example, and a typical manufacturing system may include dozens or hundreds of processing stations. Each processing station may include one or more load ports (load ports L1-L3 are shown as examples) at which edge ring carriers and wafer carriers are received for exchange of edge rings and wafers. Figure 2In the example shown, each processing station (S1-S6) includes: a plurality of load ports 211a-211c; an atmospheric transfer module (ATM) 212; a pair of load lock chambers 213a, 213b arranged between the ATM 212 and a vacuum transfer module (VTM) 214; and a plurality of process modules 215a-215f symmetrically distributed around the VTM 214. In an alternative implementation, the plurality of process modules 215a-215m may be asymmetrically distributed around the VTM 214. In an alternative implementation, the processing station may include a fewer or greater number of load ports, a fewer or greater number of process modules, one or more than two load lock chambers. A robot (not shown) is provided in the ATM 212 and the VTM 214 to transport edge rings and wafers into and out of different process modules.

[0037] The ER inventory handling system 112 is executed on a server computing device that is located at a location to receive new edge rings for further delivery to a processing station of the manufacturing facility 200. The server computing device may be part of the manufacturing facility 200, or located outside the manufacturing facility but communicatively connected to an ER execution system (ERES) so that edge ring information can be delivered to the ERES. For example, a unique encrypted code identifying an edge ring identifier and other related information of the edge ring is delivered to the ERES by the ER inventory handling system 112 via a network 250 (e.g., the Internet, an intranet, a virtual private network, etc.). In some implementations, the ERES may be executed on a computer within the manufacturing facility 200. In other implementations, the ERES may be executed on a cloud server and communicatively connected to the ER identification system 110 and other systems via the network 250. Information associated with the edge ring is used to further track the edge ring as it is delivered to and from an edge ring carrier and to and from a processing station within the manufacturing facility 200. This tracking information is updated to the metadata file for the edge ring, which provides a history of edge ring usage from the time the edge ring enters the ER inventory handling system 112 until the time the edge ring leaves the manufacturing facility.

[0038] In the manual process, a user manually scans a new edge ring received in the manufacturing facility and provides information to different modules within the ER identification system 110-M for processing. Scanning the new edge ring includes scanning an edge ring identifier 11 via a sensor, reader, or any other capture device 111'. The edge ring identifier 11 may be provided as a tag (e.g., having alphabetic characters, numeric characters, alphanumeric characters, RFID, etc.) on the surface of the edge ring or on the packaging of the edge ring, or as a chip embedded in the edge ring. In addition to the edge ring identifier 11, the capture device also captures other information about the edge ring, including the type of edge ring, the desired process, life use hours, etc., which are provided along with the identifier. The capture device 111' may be communicatively connected to the computer 102 on the truck 101 via wired or wireless means, and the information captured by the capture device 111' is transmitted to the computer 102 by the capture device. The computer 102 authenticates the edge ring to confirm that the received edge ring is a valid edge ring used in the manufacturing facility before generating a unique encrypted code for the edge ring identifier. Upon successful verification, the edge ring is inserted into an open slot of an edge ring carrier 100 received on the transport vehicle 101. The edge ring carrier 100 includes a plurality of vertically oriented slots, each slot being identified using a slot number. In some implementations, the slot number of the edge ring is manually entered into the computer by the user when the user loads the edge ring into the open slot. Alternatively, the user may use a capture device for capturing the edge ring identifier to capture the slot number of the slot into which the edge ring is manually loaded by the user. In some alternative implementations, a sensor may be disposed within the edge ring carrier to verify the information manually provided by the user (e.g., the slot number of the slot into which the edge ring is inserted) before the information is transmitted to the computer 102. During verification, when the information provided by the user does not match the information detected by the sensor within the edge ring carrier (e.g., a mismatch in slot number), an alarm may be generated to alert the user of the mismatch. In this case, information related to the edge ring identifier and the slot number of the edge ring may be transmitted to the computer 102 after the detected error (i.e., the mismatch) has been corrected.

[0039] In some implementations, the computer 102 is configured to communicate with the tag of the edge ring carrier to verify the carrier identifier of the edge ring carrier captured by the capture device 111', and upon successful verification, link the edge ring carrier information with the edge ring related information. The ER inventory handling system 112 executed in the computer 102 is used to link the carrier identifier of the edge ring carrier with the edge ring identifier and the slot number associated with the edge ring to generate a unique encryption code. Information related to the edge ring and the encryption code of the edge ring is updated to the ER inventory 113, which is used to track all edge rings received for various manufacturing systems (i.e., processing stations) within the manufacturing facility. The encryption code of the edge ring is also sent to the ER execution system. The ER execution system uses the edge ring information to generate a metadata file for the edge ring. The movement of the edge ring within the manufacturing facility is tracked by querying the FAB production execution system, and the metadata file of the edge ring is updated to reflect the transfer of edge rings in and out of the edge ring carrier and in and out of the processing station.

[0040] Figure 3 In one implementation, how edge ring information captured by the ER identification system 110 is used to generate and update metadata files for edge rings and update information associated with edge ring carriers is shown. Information associated with edge rings captured by the ER identification system 110, which includes a carrier identifier of the edge ring carrier and a slot number within the edge ring carrier within which the edge ring is placed, is provided as an encrypted code over a network 250 to an ER inventory processor 311 executed on a server within a manufacturing facility. The server may be a remote server accessed via a network, and in some examples, may be a cloud server in communication with the ER identification system 110. The edge ring information is also used to update an edge ring inventory stored locally within the ER identification system 110.

[0041] The ER inventory processor module 311 may be part of the edge ring execution system (ERES) 310 or may be a separate module that provides information to the ERES 310. The ER inventory processor module 311 decrypts the encrypted code to extract information about the new edge ring. The decrypted information is provided to the edge ring tracking module 312, which is executed on the same server as the ER inventory processor module 311 or may be executed on a different server. The edge ring (ER) tracking module 312 processes the information and provides the processed information to the ERES 310 to generate a metadata file for the new edge ring. The processing of the information for the new edge ring may include identifying the type associated with the new edge ring, the process for which the edge ring is designed, and determining the process station and process module within the manufacturing facility that executes the process. The ER tracking module 312 interacts with the ERES 310 to exchange edge ring related information. Using the information, the ERES 310 generates a metadata file for the new edge ring.

[0042] In some implementations, during processing, it may be determined that the ERES 310 does not have the expected usage information for a new edge ring of a particular type. This may be the case when a non-dedicated edge ring or an unknown edge ring or an unlabeled edge ring is imported into a manufacturing system. In this case, the ERES 310 may generate a message that is transmitted to the ER identification system 110. The message may provide a request to the user to provide additional information related to the expected usage of the edge ring. In this case, no metadata file is generated for the new edge ring.

[0043] In an alternative implementation, when no expected usage information is available for a new edge ring, the ERES 310 may continue to generate a metadata file. The metadata file generated for the new edge ring may identify the new edge ring as an "unknown part." As more information is received from the ER identification system 110 for the type associated with the new edge ring, the expected usage information is provided to the ERES 310 so that the metadata file for the new edge ring can be dynamically updated with the expected usage information.

[0044] The metadata file generated for the new edge ring is stored in the ER metadata database 325. The ER metadata database 325 is a repository for metadata files generated for all edge rings that have entered the manufacturing facility. The information provided in the metadata file is used to generate metadata tables (325-1 to 325-n) for each edge ring used in different manufacturing systems within the manufacturing facility (i.e., wafer fab) 200. The initial information for the new edge ring in the metadata file is provided by the ER identification system and includes information captured during loading of the new edge ring into the edge ring carrier, such as edge ring identifier, edge ring type, intended process, carrier identifier of the edge ring carrier, edge ring position (i.e., slot number) within the edge ring carrier, condition of the edge ring, service life, etc. For example, the condition of the edge ring may include new, used, or partially used. It should be noted that the aforementioned fields captured for the new edge ring during loading of the new edge ring are provided as examples and should not be considered limiting.

[0045] When an additional edge ring is imported into a manufacturing facility, information related to the additional edge ring is captured and the additional edge ring is loaded onto an edge ring carrier. When a new edge ring is received into an edge ring carrier, the useful life of the edge ring is updated using information provided by the edge ring manufacturer. In some implementations, not all edge rings imported into a manufacturing facility are new. For example, an edge ring that was previously partially used at another manufacturing facility may be imported into the manufacturing facility for use in a process module within the manufacturing facility. The partially used edge ring does not have any metadata within the manufacturing facility. As a result, when the partially used edge ring is received at the manufacturing facility, metadata for the partially used edge ring is generated in a manner similar to when a new edge ring is received. Because the partially used edge ring has undergone some processes in a different manufacturing system, the useful life of the partially used edge ring is less than that of a new edge ring of the corresponding type. As a result, the information of the partially used edge ring captured during loading will contain any remaining useful life for the partially used edge ring, and the metadata file generated for the partially used edge ring will reflect such details.

[0046] In some implementations, the edge ring carrier may be configured to store and transport only new edge rings, or only used edge rings, or a mixed combination of new and used edge rings. In some implementations, where a mixed combination of new and used edge rings are loaded into the edge ring carrier, new edge rings may be received in the top portion and used edge rings may be received in the bottom portion to prevent contamination of the new edge rings. In some implementations, the used edge ring portion defined within the edge ring carrier may be configured to also receive partially used edge rings. For example, in an edge ring carrier with 12 slots, slot numbers 1-6 may be used to receive only new edge rings, and slot numbers 7-12 may be used to receive used and partially used edge rings. Partially used edge rings may be reused in a process module depending on the amount of time and type of process required to execute a process in the process module. The edge ring tracking module 312 uses the edge ring identifiers to continuously track new, used, and partially used edge rings in the manufacturing system and provides this information to the edge ring execution system (ERES) 310.

[0047] As the edge ring carrier 100 enters the fabrication facility and moves in and out of processing stations, the FORP tracking module 322 is used to track the movement of the edge ring carrier and provide this information to the ERES 310. The FORP tracking module 322 is similar to the wafer management system (WMS) 321, which tracks the movement of wafer carriers (e.g., FOUPs) within the fabrication facility. As the FOUP moves to different locations within the fabrication facility 200, the wafer management system 321 obtains information related to the current location and current status of the FOUP from the AMHS by querying the FAB manufacturing execution system (FMES) 320. Similarly, the FORP tracking module 322 queries the FAB manufacturing execution system 320 to obtain information related to the current location of the edge ring carrier.

[0048] The FORP arrival tracker 322-a within the FORP tracking module 322 interacts with the FMES 320 to obtain information when the edge ring carrier arrives at the load port of a particular processing station. The FMES 320 uses information obtained from the automated material handling system (AMHS) to provide this information. The FORP departure tracker 322-b within the FORP tracking module 322 interacts with the FMES 320 to obtain information when the edge ring carrier leaves the load port of the particular processing station. Information about the current location and current status of the edge ring carrier is provided to the edge ring execution system (ERES) 310 so that the ERES 310 can update the metadata file of each edge ring contained in the edge ring carrier. The metadata file of each edge ring uses the initial information obtained from the ER identification system 110 to establish the life information, and uses the information obtained from the production execution system 320 of the manufacturing system.

[0049] The information collected by the FORP tracking module 322 related to the edge ring carrier is also used to update the status of the edge ring carrier and store the status and other related information in the FORP status database 326. The FORP status database 326 is a repository that is used to maintain the status of various edge ring carriers used in the manufacturing facility. The information stored in the FORP status database 326 (e.g., carrier identifier, type, current status of the edge ring carrier, current location, expected process modules for different edge rings included, expected processes for the edge ring, etc.) is used to generate edge ring carrier status tables 326-1 to 326-n for each edge ring carrier (FORP001-00n, where n is an integer) used in the manufacturing facility. Exemplary status tables for different edge ring carriers are provided in Table D below:

[0050] Table D: FORP status table

[0051]

[0052] As shown, the status table for the various edge ring carriers may include details identifying the location of the edge ring carrier within the manufacturing facility and the status of the edge ring carrier. For example, the status table may include the type of edge ring carrier (e.g., edge ring carriers that carry only used edge rings, edge ring carriers that carry only new edge rings, edge ring carriers that carry both new and used edge rings (including partially used edge rings), the current location of each edge ring carrier (e.g., whether it is at a processing station or queued in a stocker), the status of the edge ring carrier, the intended process module, and the type of process for which the edge ring is to be transported using the edge ring carrier. The intended process module and type of process information may be provided based on the type of edge ring loaded onto the edge ring carrier. A sample set of states of the edge ring carrier is shown in Table D above, such as en route to a processing station, scheduled for transport to a processing station, transported to and removed from a processing station, queued in a stocker, en route to a processing station for pickup, and the like. Each of these states provides sufficient detail to determine the location of the edge ring carrier, and from there, the location of the edge ring within the fabrication facility.

[0053] As edge rings are moved in and out of edge ring carriers, the edge ring tracking module 312 tracks the movement of the edge rings and provides this information to the ER execution system (ERES) 310. The ER removal tracker 312-a of the edge ring tracking module 312 interacts with the FAB production execution system 320 to obtain the current location of the edge ring carrier and the purpose of the edge ring carrier at that location (e.g., loading edge rings, transporting edge rings, exchanging edge rings, leaving edge rings, etc.) using information provided by the AMHS. For example, the FAB production execution system 320 may provide the current location of the edge ring carrier as a load port for a particular processing station and identify the purpose of the edge ring carrier when the edge ring is at the load port. In addition to the information provided by the FAB production execution system 320, one or more sensors distributed on and / or within the processing stations may be used to obtain additional information as the edge ring moves within the processing station. As shown in FIG. Figure 2 As described, the processing station may include multiple modules, such as a loading port, an atmospheric transfer module (ATM), an aligner within the ATM, a robot within the ATM, one or more load lock chambers, a vacuum transfer module, a robot within the VTM, and one or more process modules.

[0054] Sensors provided in one or more modules within the processing station can be used to obtain additional information about the current position and current status of the edge ring within the processing station. The information collected by the FAB production execution system 320 from the AMHS and various sensors is fed forward to the edge ring execution system (ERES) 310 through the edge ring tracking module 312. The ERES 310 processes the information to determine the current status and current position of each edge ring carrier and each edge ring, and updates the ER metadata table of each edge ring in the ER metadata database 325, and the current status of each edge ring carrier in the FORP state database 326. In addition, changes to the edge ring carrier content are updated to the FORP content database 327. The FORP content database 327 is a dynamic repository that stores details of each edge carrier used in the manufacturing facility. The information provided in the FORP content database 327 is used to update the edge ring carrier content tables 327-1 to 327-n for the corresponding edge ring carriers FORP ID 001-FORP ID 00n.

[0055] When the edge ring carrier is moved to a load port of a processing station and the new edge ring is moved out of the edge ring carrier and into a process module within the processing station, the metadata file of the new edge ring is updated to identify the current position of the edge ring within the process module. The current position may be identified using a processing station identifier and a process module identifier within the processing station. An insertion time identifying when the new edge ring was introduced into the process module is also recorded in the metadata file of the new edge ring. When a process is performed within the process module after the new edge ring is inserted, the metadata file of the new edge ring is updated to identify the type of process performed within the process module, and a usage time for identifying when the process starts and ends. The insertion time may not coincide with the usage time because the edge ring may be inserted into the process module before the wafer is inserted to undergo a process. The usage time is used by the ERES 310 to determine the remaining life of the edge ring. In addition, in response to detecting that the new edge ring is used within the process module, the current status of the new edge ring is updated from "new" to "used". When the edge ring is moved from a current process module to a second process module within the same processing station, sensors disposed within the processing station provide details of when the edge ring was removed from the current process module and inserted into the second process module. As processes are performed within the second process module, the life time of the edge ring is updated with information from the second process. After completing the process in the second process module, the edge ring may be moved to a second edge ring carrier that has arrived at a load port of the processing station. The second edge ring carrier may transport the edge ring to a different processing station or remove the edge ring from the manufacturing facility for disposal when its life use has been fully or mostly exhausted.

[0056] The ER return tracker module 312-b within the edge ring tracking module 312 tracks when the edge ring is returned to the second edge ring carrier and records the time when the edge ring is removed from the process module. As previously mentioned, the edge ring carrier can be configured to accommodate only new edge rings, only used edge rings, or a mixed combination of new and used edge rings. When an edge ring is replaced within a process module, the used edge ring is removed from the process module and returned to the edge ring carrier that can accommodate the used edge ring. The new edge ring (or partially used edge ring) is retrieved from the edge ring carrier that accommodates the new edge ring (or partially used edge ring) and inserted into the process module. The removal of the used edge ring and the insertion of the new edge ring is accomplished using a robot within the processing station (e.g., an ATM, VTM robot, and in some examples, a robot within the edge ring carrier), and this replacement is performed without breaking vacuum. The edge ring carrier to which the used edge ring is returned can be the same as the edge ring carrier from which the new edge ring is retrieved, or can be a different edge ring carrier. The ER removal tracker 312 - a and the ER return tracker 312 - b provide details of edge rings removed from or returned to different edge ring carriers, and this information is provided to the edge ring execution system 310 .

[0057] The edge ring execution system 310 uses various data collected from different modules (e.g., edge ring tracking module, FORP tracking module) to determine the current contents within each edge ring carrier and the current status / condition of each edge ring within each edge ring carrier, including the lifetime used, the lifetime remaining of the edge ring, the process history of the edge ring, etc. When a change in the contents of an edge ring carrier is detected, the information related to the edge ring stored in each edge ring carrier is dynamically updated to the corresponding FORP content table 327 maintained for each edge ring carrier type. An example table A of the contents of a particular edge ring carrier is provided below.

[0058] Table A: Details of the Edge Ring Carrier FORP001

[0059]

[0060] The information provided in Table A above for edge ring carrier FORP001 may include the type of edge ring carrier (an edge ring carrier that carries only used edge rings, an edge ring carrier that carries only new edge rings, or an edge ring carrier that carries a mixed combination of new and used edge rings, slot locations for carrying new edge rings or used edge rings, etc. This information may be used to determine which empty slots may be used to insert new edge rings received into the manufacturing facility, which empty slots may be used to insert partially used or fully used edge rings, the remaining life of each edge ring, etc.

[0061] The information provided in the various tables (ER metadata table, FORP status table, FORP content table) provides relevant details using data obtained from the ER identification system and data obtained from the FAB manufacturing execution system (MES) to determine when a particular edge ring is replaced within a process module, when a used edge ring needs to be discarded, which edge ring carrier is used to load a new edge ring, which edge ring carrier is used to load a used edge ring, whether the type of edge ring used in a process module within a particular processing station is contained within the edge ring carrier scheduled for transport to the particular processing station, whether the edge ring used in a particular process module is expected to have sufficient remaining life to undergo one or more processes within the particular process module, etc. Additional information (e.g., what type of processes are performed in each process module, what type of chemicals are used, where in the manufacturing system a problem was detected, when the problem occurred, where the edge ring and edge ring carrier were when the problem was detected, the condition of the edge ring when the problem was detected, where the wafer was when the problem was detected, the condition of the wafer, etc.) can be obtained from interrogating the FAB's MES and used to provide a deeper investigation into the conditions of the various process modules within the manufacturing facility.

[0062] In some implementations, once imported into a process module within a processing station, the edge ring may remain in the same process module until its useful life expires or approaches expiration. In alternative implementations, the edge ring may follow the wafer as it moves to a different process module within the same processing station or to a different processing station. The ER removal tracker 312-a tracks the edge ring to determine when the edge ring is removed from a process module within the processing station. The ER removal tracker 312-a obtains information related to the current location and the type of process to which the edge ring has been exposed to determine the condition of the edge ring within the processing station. The various information updated to the metadata table for the edge ring provides a rich history of edge ring usage. For example, the edge ring may have a useful life of 200 hours, and the information provided in the edge ring metadata table can be used to track the edge ring's usage history to determine where the edge ring is currently located and when the edge ring needs to be replaced. A sample metadata table for edge ring A-1 imported and used in a manufacturing system is provided in Table B below:

[0063] Table B: Metadata of edge ring A-1:

[0064]

[0065] As shown in Table B, edge ring A-1 may have undergone different processes in different process modules. The table shows the edge ring usage time (in hours), the process type in which edge ring A-1 was used, the processing station in which edge ring A-1 was used, and the process module within the processing station. For example, edge ring A-1 was loaded onto edge ring carrier FORP001 and transported to processing station S-087 to be inserted into process module PM-01X1 to undergo an etch 1 operation. After the etch 1 operation, edge ring A-1 may be moved to process module PM-01X3 within the same processing station S-087, where another etch (etch 2) operation is performed. Etch ring A-1 may be removed from process module PM-01X3 using an ATM / VTM robot and loaded onto a second edge ring carrier FORP002 and moved to a second processing station S-172 to be inserted into a different process module PM-07Y3, where an additional etch (etch 3) operation may be performed. After the etch 3 operation, the edge ring A-1 can be moved to process module PM-27X5 within the same process station S-172, where another etch (etch 4) operation can be performed. Depending on the type of process (e.g., etch) performed in each process module, the etch time can be different or the same in each process station, or the same in the etch and each process module.

[0066] For simplicity, the processes for which the edge ring is exposed in various process modules are shown as etching operations in Table B. It should be noted that the etching operation is not limited to any particular type of etching, but can include various types of etching, including metal etching, dielectric etching, etc. This can be indicated by the different amounts of time spent in various process modules for the etching operation, indicating different types of etching performed in different process modules. The details captured in the metadata of the edge ring are not limited to the fields provided in Table B, but can include additional fields that can be used to determine the usage history of the edge ring.

[0067] The ERES 310 stores information of all edge rings and edge ring carriers used in the manufacturing facility in corresponding files / databases. The ERES 310 uses the information provided in various files / databases (e.g., metadata files / databases for edge rings, FORP status files / databases for each edge ring carrier, and FORP content files / databases) to provide additional details, such as the transmission history of each edge ring within the manufacturing facility, etc. The transmission history provides details of the edge ring's movement within the manufacturing / database. In some implementations, the information provided in the transmission history of the edge ring can be accessed from a link provided in the Edge Ring field of the metadata table of the edge ring shown in Table B (the Edge Ring field is shown with a highlighted box). An exemplary transmission history for edge ring A-1 accessed from a link provided in the Edge Ring field of Table B is provided in Table C below:

[0068] Table C: Transmission History of ER A-1 (via FORP)

[0069]

[0070] Details of edge rings moving in and out of edge ring carriers and in and out of processing stations captured by the AMHS and sensors are used to provide a transport history. The information provided in the transport history can be used to track the useful life of edge rings. When an edge ring approaches the end of its useful life, a signal can be generated by the edge ring execution system to indicate that the edge ring in a particular process module is approaching the end of its useful life and must be replaced.

[0071] The FAB production execution system 320 and the edge ring execution system (ERES) 310 may be executed by two different servers within the manufacturing facility, but connected by network communication to exchange information related to edge rings and edge ring carriers within the manufacturing facility. The edge ring execution system 310 tracks edge rings and edge ring carriers, and dynamically queries the FAB production execution system 320 to obtain additional information related to the overall condition of various parts within the manufacturing facility, and uses the obtained information to provide details of edge ring status, edge ring carrier status, and overall status of different parts and modules within the manufacturing facility so that intelligent transmission and / or processing decisions can be made so that optimized use of edge rings can be achieved.

[0072] The FAB production execution system 320 and the edge ring execution system 310 can be part of an overall equipment information management (EIM) system 300 that executes on a computing device within a manufacturing facility or is part of a cloud server. The EIM system can be a stand-alone system within a manufacturing facility, or can be part of a network of systems that exchange information with other manufacturing facilities and part manufacturers. Information from different systems can be queried to extract details related to the overall condition and status of edge rings, wafers, and process modules. Automated tracking of edge rings and detailed analysis of information obtained from tracking operations ensure that the correct type of edge ring is loaded onto the FORP and provided to process modules within different manufacturing systems (i.e., processing stations). This eliminates any loading errors, unnecessary wafer scrapping caused by loading errors, and prevents used edge rings from being accidentally provided to process modules, thereby improving the service life of edge rings and increasing wafer processing yields. The information obtained from tracking can be used to accurately determine the edge ring life to establish a statistical and cost model of ownership. In some implementations, the query to the FAB MES may need to filter out any proprietary information before providing the query results to the edge ring execution system 310. For example, some processes executed in some of the process modules may include proprietary processes that are not shared. In order to avoid returning this proprietary information from the FAB MES for query, obfuscation filtering can be used in the FAB MES or in the edge ring execution system so that only sharable information is included in the table and proprietary information is excluded.

[0073] The various tables generated from the information obtained from tracking the edge rings through the manufacturing system can be in the form of relational database tables. These relational database tables can be queried or searched in real time to access information related to the edge rings and edge ring carriers. In addition, these relational databases can be queried, and the results from the queries can be combined with information obtained from other sources within or outside the manufacturing facility to generate additional tables that can be linked to existing tables to provide additional information, which can improve the information provided in the existing tables. For example, other tables can provide information from other manufacturing facilities or production execution systems or manufacturers, and such information can improve the information captured in the edge ring execution system to provide more details of the edge rings and the processes in which these edge rings can be used. It should be noted that storing various details related to the edge ring execution system in relational data tables is one way, and other ways or forms of storing information can also be envisioned.

[0074] Various implementations use edge ring identifiers and other information related to edge rings to track edge rings within a manufacturing facility. Thus, when an edge ring is delivered to a processing station, the edge ring identifier and related information related to the edge ring are used to verify that the part number read from the edge ring identifier is correct for installation into a process module within the processing station. If the part number is incorrect, controls within the edge ring execution system are used to issue an alarm and prevent the edge ring from being delivered to the process module. Various implementations enable automated identification and verification of the edge ring design before the edge ring is inserted for use in a process module, thereby avoiding unnecessary scrapping.

[0075] It should be noted that while various implementations have been described with reference to tracking edge rings, the implementations are not limited to tracking edge rings, but may be extended to tracking other consumable parts used within a manufacturing facility.

[0076] Figure 4 A simplified diagram of an edge ring carrier 100 in one implementation is described, which is used to track edge rings during an initial loading phase and during a removal / replacement phase. The edge ring carrier is identified using a carrier identifier 100-a. The carrier identifier can be provided as a label or on a plate, etc. A plurality of slots are defined therein to receive edge rings 10. Each of these slots is identified using a slot number 105. A plurality of sensors (107-a to 107-d) can be provided within the edge ring carrier 100 to track edge rings as they move in and out of the edge ring carrier. The information provided by these sensors can be used to verify information captured during automated loading, or provided by a user when the edge ring is manually loaded, and provided by the AMHS in the manufacturing system when the edge ring is used. This information is used to update metadata for the edge ring and information related to the edge ring carrier stored in the FORP state database and the FORP content database. The edge ring loaded onto the edge ring carrier can be a replaceable edge ring or an adjustable edge ring. An exemplary adjustable edge ring is shown in Figure 4 In the example of an adjustable edge ring, the edge ring can have a specific height. The height is used to extend the life of the edge ring before it must be replaced. For example, when the surface of the edge ring exposed to the caustic chemicals in the process module is damaged, the edge ring received on the base of the process module can be moved upward using lift pins to allow a fresher surface of the edge ring to be exposed to the caustic chemicals in the process module. When the height of the edge ring is reduced to a predetermined height, the edge ring may have to be replaced. The various implementations described herein can be extended to adjustable edge rings as well as replaceable edge rings (i.e., edge rings that do not have sufficient height).

[0077] Figures 5A-5DVarious modules within a processing station are shown on which sensors may be configured to track the movement of edge rings. When the AMHS has access only to a load port located outside the processing station, the AMHS is able to provide location and status information about the load port of the processing station. Information on the actual use of the edge ring within the processing station is important for determining the use history of the edge ring at the actual use location (i.e., process module). Sensors located in different modules of the processing station assist in tracking edge ring use within a processing module.

[0078] Figure 5A A simplified top view of a load lock chamber 213 is shown, which is located within the processing station between the atmospheric transfer module (ATM) and the vacuum transfer module (VTM). The load lock chamber 213 includes an opening to the ATM and an opening to the VTM. One or more sensors (213-s1, 213-s2) can be disposed on the inner sidewall adjacent to the opening to the ATM, and one or more sensors (213-s3, 213-s4) can also be disposed on the inner sidewall adjacent to the opening to the VTM. These sensors enable the edge ring to be tracked as it moves into the load lock chamber and as it leaves the load lock chamber 213.

[0079] Figure 5B A robot is shown that can be used to move an edge ring within a processing station. The robot (216 (ATM) / 216' (VTM)) can be part of an ATM or a VTM. The robot can include one or more sensors 216-a / 216'-a that track the edge ring as it moves between a process module and a load port to be loaded onto an edge ring carrier received by the load port. The VTM robot can be configured to move an edge ring between process modules and between a process module and a load lock chamber, and the ATM robot can be configured to move an edge ring from a load lock chamber to a specific slot within an edge ring carrier. Information captured by the robot's sensors and one or more sensors within the ATM and / or edge ring carrier can be used to verify the position of the edge ring within the edge ring carrier.

[0080] Figure 5CAn aligner 217 within the ATM 212 is shown that can be used to align the edge ring before it is transported to a process module within a processing station. The aligner 217 includes a rotator 218 that moves the edge ring 10 along a rotational axis (e.g., a horizontal axis). The aligner 217 can be used to position the edge ring 10 so that the edge ring identifier can be easily read by one or more sensors (217-a, 217-b) on the aligner and by one or more sensors distributed in other modules of the processing station. If the edge ring identifier is on the outside of the edge ring, the sensor may be able to easily read the edge ring identifier. The sensor 217-a can be strategically positioned based on the location of the edge ring identifier on the edge ring.

[0081] Figure 5D A process module 215 is shown in which sensors 215-a, 215-b may be positioned adjacent to an opening or door 219 leading to the process module 215. The edge ring 10 is placed adjacent to the wafer 15 received within the process module 215 to extend the surface of the wafer 15. When the edge ring needs to be replaced, the edge ring is lifted using a lift pin mechanism available at the wafer receiving surface and moved out of the process module 215 using the robot of the VTM. As the edge ring moves through the door 219, the sensors 215-a, 215-b may be able to capture an edge ring identifier. The location of the sensors 215-a, 215-b may be on the inner sidewall of the process module, on the bottom surface facing upward, on the top surface facing downward, or anywhere in between.

[0082] The number of sensors provided in the various modules is merely an example, and a fewer or greater number of sensors may be disposed in the various modules to capture edge ring identifiers of edge rings as they are transported in and out of the various modules.

[0083] Figure 6 Example tracking of edge rings as they are transported in and out of edge ring carriers and in and out of processing stations within a manufacturing facility in one implementation is shown. Various tables containing information obtained from the tracking are provided to reflect the tracking.

[0084] The initial process begins by loading edge ring A-1 into slot number 1 on edge ring carrier (FORP ID001) 100-1. Edge ring carrier 100-1 contains multiple edge rings, located in slot numbers 2-6 and 8-12, with slot number 7 being empty. Loading information is updated to the edge ring carrier content table to reflect the addition of edge ring A-1 to FORP ID 001, and the edge ring information of edge ring A-1 is updated to the metadata table for edge ring A-1. Overhead transport (OHT) vehicle 201 moves the edge ring carrier to processing station 210 (station identifier S-087). OHT vehicle 201 can be part of an AMHS material handling system that is used to move edge ring carriers and wafer carriers (i.e., FOUPs) to different processing stations. When the edge ring carrier arrives at processing station S-087, the edge ring carrier information associated with the location in the manufacturing facility is updated to the edge ring status table for FORP ID 001. The edge ring A-1 is then moved out of slot 1 of edge ring carrier FORP ID 001 using the atmospheric transfer module (ATM) and vacuum transfer module (VTM) robots and into process module 215 (process module identifier 01X1) in processing station S-087. After verifying that the edge ring A-1 intended for process module 01X1 is the correct edge ring and that edge ring A-1 has sufficient remaining useful life for etching operations and is inserted into process module 01X1, edge ring A-1 is moved into the process module. If edge ring A-1 has insufficient remaining useful life, a warning signal is generated and edge ring A-1 is not moved out of edge ring carrier FORP ID 001. Upon successful verification that edge ring A-1 has sufficient useful life, the carrier content information for FORP ID 001 is updated to indicate the removal of edge ring A-1.

[0085] An etch operation (Etch 1) is performed in process module 01X1 (215-1). After the Etch 1 operation is completed, edge ring A-1 is moved to a second process module 01X3 within the same processing station S-087 using a VTM robot. After the Etch 1 operation within processing station S-087, the edge ring metadata is updated to show the current position and current condition of the edge ring. A second etch operation (Etch 2) is performed in process module 01X3, and after the Etch 2 operation is completed, edge ring A-1 is moved out of processing station S-087 using a VTM / ATM robot of processing station S-087 to a second edge ring carrier FORP ID 002. Edge ring A-1 is loaded into the empty slot 5 of edge ring carrier FORP ID 002, leaving only slot 8 in the edge ring carrier empty. In this case, FORP ID 002 is a mixed ring edge ring carrier, and new and used edge rings are randomly placed into the empty slots. The edge ring carrier content table and edge ring status table for FORP ID 002 are updated, and the current position (in slot 5 in FORP ID 002) and current condition of the edge ring (after Etch 2 operation) are updated to the metadata table for edge ring A-1.

[0086] The OHT vehicle 201 of the AMHS is used to move the edge ring carrier to the second processing station S- 172. When the edge ring carrier arrives at the processing station S- 172, the edge ring carrier information is updated to the FORP status table for FORP ID 002.

[0087] Edge ring A-1 is then moved from edge ring carrier FORP ID 002 using the VTM / ATM robot of processing station S-172 and into process module 07Y3 in processing station S-172. After verifying that edge ring A-1 intended for process module 07Y3 is the correct edge ring and that edge ring A-1 has sufficient remaining useful life to be used in the etching operation to be inserted into process module 07Y3, edge ring A-1 is moved into process module 07Y3. The FORP content table for FORP ID 002 is updated to show that the edge ring was removed from slot 5 and inserted into process module 07Y3 in processing station S-172.

[0088] An etch operation (Etch 3) is performed in process module 07Y3. After the Etch 3 operation is completed, the edge ring information is updated to the metadata table for edge ring A-1. Next, edge ring A-1 is moved out of process module 07Y3 to a second process module 27X5 within the same process station S-172 using the VTM robot. An etch operation (Etch 4) is performed in process module 27X5. After the Etch 4 operation is completed, edge ring A-1 is moved out of process station S-172 to a third edge ring carrier FORP ID 003 using the ATM / VTM robot of process station S-172. The edge ring is loaded into the empty slot 8 of the third edge ring carrier FORP ID 003, leaving slots 3 and 11 in edge ring carrier FORP ID 003 empty. In response, the metadata table of edge ring A-1 and the state table and content table of edge ring carrier FORP ID 003 are updated with the current position and condition of the edge ring.

[0089] The OHT vehicle 201 of the AMHS moves the edge ring carrier FORP ID 003 to the third processing station S- 120 . When the edge ring carrier FORP ID 003 arrives at the processing station S- 120 , the edge ring carrier information is updated to the FORP status table for FORP ID 003 .

[0090] After verifying that edge ring A-1 has sufficient remaining useful life for the etch operation scheduled in process module 12W4 and that the edge ring is suitable for insertion into process module 12W4, edge ring A-1 is moved into process module 12W4 for an etch operation (Etch 5). Edge ring carrier information is updated to the FORP content table for FORP ID 003 to indicate that edge ring A-1 is removed from slot 8 and moved into processing station S-120. After the Etch 5 operation is completed, edge ring information is updated to the metadata table for edge ring A-1. Next, edge ring A-1 is moved out of process module 12W4 to a second process module 12W5 within the same processing station S-120 using the VTM robot. An etch operation (Etch 6) is performed in process module 12W5. After the Etch 4 operation is completed, the edge ring metadata file is updated to display the current condition of the edge ring. When changes in the state or position of edge rings or the state or position of edge ring carriers are detected by ERES, various tables associated with edge rings and edge ring carriers are dynamically updated to provide the current state or position of edge rings and edge ring carriers within the processing station.

[0091] The following tables show various entries that are updated during different stages of tracking edge rings as they are moved in and out of edge ring carriers and into and out of various process modules within different processing stations. Table A shows details of the contents of each FORP in use within the manufacturing system, Table B shows metadata for various edge rings loaded onto different FORPs, Table C shows edge ring transport history for each edge ring, and Table D shows a FORP status table for all FORPs used in the manufacturing system. For example, Table A for FORP ID 001 (or FORP001 for short) shows the condition of edge ring carrier FORP ID 001 when edge ring A-1 is initially loaded into empty slot 1. The contents shown in Table A for FORP001 are the same as Table A shown in the previous example. Table A for FORP002 shows details of the contents of the edge ring carrier when edge ring A-1 is inserted into empty slot 5, and Table A for FORP 003 shows details of the contents of the edge ring carrier when edge ring A-1 is inserted into empty slot 8. As the edge ring moves through the fabrication facility via the various edge ring carriers, the life of the edge ring is dynamically adjusted to reflect current life usage as determined by the different processes to which the edge ring is exposed in the different process modules. Similarly, the metadata for A-1 shown in Table B shows the various processes that edge ring A-1 undergoes in the different process modules in the different processing stations. The metadata shown in Table B can be accessed via the links provided in Table A. The details presented in Table B for edge ring A-1 are the same as Table B shown in the previous example. Table C shows the edge ring transport history for edge ring A-1 as it moves in and out of the edge ring carriers and into and out of the process modules in the different processing stations. The details presented in Table C for edge ring A-1 are the same as Table C shown in the previous example. The contents of Tables A, B, and C are shown below to provide an overview of the changes in the different FORPs and edge ring data as the edge ring travels through the various modules in the fabrication facility. The edge ring's transport history content shown in Table C can be accessed using the link provided at the Edge Ring A-1 field in Table B. Table D shows various edge ring carrier states during tracking of edge rings within a manufacturing system.

[0092] Table A: FORP ID001 Content details

[0093]

[0094] Table A: FORP002 Content details

[0095]

[0096] Table A: FORP003 Content details

[0097]

[0098] Table B: Metadata of edge ring A-1

[0099]

[0100] Table C: ER Transmission History of ER A-1 (via FORPS)

[0101]

[0102] Table D: ER Transmission History of ER A-1 (via FORPS)

[0103]

[0104] The above table reflects the edge rings traveling through the manufacturing facility and the status of various edge ring carriers to match the Figure 6 The example described in .

[0105] Figure 7 A graphical representation of edge ring movement within a processing station captured by various sensors distributed within the processing station in one implementation is described. Figure 4 and 5A-5D, sensors are provided within the edge ring carrier and in different modules of the processing station to capture the path taken by the edge ring within the processing station so that the current condition and position of the edge ring can be determined and used to provide the current status of the edge ring. For example, sensors in the edge ring carrier can be used to determine when the edge ring is moved out of the edge ring carrier for delivery to a process module within the processing station. As the edge ring moves through the ATM of the processing station, sensors provided in the ATM, ATM robot, and aligner can be used to track the edge ring traveling through the ATM. Sensors provided in the load lock chamber can be used to determine when the edge ring moves from the edge ring carrier into the process module and when the edge ring moves out of the process module to the edge ring carrier. Sensors on the VTM robot can be used to determine which process module the edge ring moves to, which type of operation is performed in the process module, when the process starts, and when the process ends. The process start and end times can be determined by identifying when the wafer is introduced into the process module and when the door to the process module is closed / opened. Sensors in the process modules can be used to verify when the edge ring is introduced / removed from the process module, when the wafer is introduced / removed from the process module, and when the door to the process module is closed or opened. This information is used to determine when a process starts in a process module, when a process ends in a process module, and when the edge ring is removed from the process module. The information from the sensors provides sufficient detail to determine the processes for which the edge ring is exposed and the amount of time the edge ring is actually used within each process module. Using this information, lifetime usage and remaining lifetime can be calculated and used to provide valuable information that can be used to streamline processes within a manufacturing system. Information related to edge ring usage within a process module is obtained from the FAB facility and is linked to the initial loading information from the ER identification system to provide comprehensive details of the use of the edge ring within the manufacturing system.

[0106] Figure 8Process operations of a method for tracking an edge ring in one implementation are described. The method begins at operation 810, where an edge ring identifier of an edge ring is captured from a source associated with the edge ring. The edge ring identifier may be disposed on the outside of the edge ring or on the underside of the edge ring, or embedded within the edge ring or on the packaging of the edge ring, and may be in the form of alphanumeric characters, RFID tags, bar codes, QR codes, imprints, notches, labels, and the like. An edge ring identifier capture device (e.g., a reader, an image capture device, or a sensor) automatically captures the edge ring identifier once the edge ring is detected within an edge ring identification system. In some implementations where an image of the edge ring identifier is captured by a sensor, optical character recognition (OCR) software may be used to convert the optical characters into text data. In some implementations where an image capture device is used, the image capture device may capture the entire edge ring without rotating the edge ring. In some implementations, the edge ring may be manually scanned using a sensor, and this information may be updated to a computer on a truck that receives the edge ring carrier. The captured edge ring identifier is verified to ensure that the correct edge ring is received for use in one or more process modules at one or more processing stations within the fabrication facility.

[0107] Next, the edge ring is inserted into an empty slot of the edge ring carrier, as shown in operation 820. The insertion may be manual or automated and is performed after successful verification of the edge ring. When the insertion is manual, the details of the slot may be entered into a computer by a user. One or more sensors disposed in the edge ring carrier may be used to verify the information provided by the user. In examples where the insertion is automated, a robot or other material handling mechanism may be used to insert the edge ring into the empty slot of the edge ring carrier. Information from the material handling mechanism may be automatically updated to the computer. The edge ring identifier is used to link the edge ring to the slot identifier of the slot within the edge ring carrier into which the edge ring is inserted. The link provides information about the edge ring position within the carrier. Information associated with the edge ring is used to generate a metadata file for the edge ring.

[0108] Next, as the edge ring is moved in and out of the edge ring carrier and into and out of the processing station within the manufacturing system, the edge ring is tracked using the edge ring identifier, as described in operation 830. The edge ring may be moved from the edge ring carrier to the processing station and from one processing station to another using different edge ring carriers. Each time the edge ring is moved, the movements are tracked using the edge ring identifier and details of the current position of the edge ring are updated to a metadata file for the edge ring. Updates to the metadata file are used to provide life information for the edge ring. The life information provides details of how many life hours have been used and, thus, the life hours remaining for this edge ring can be calculated. Each edge ring may have a defined amount of life use hours. As the edge ring is moved into a process module and exposed to a process, the life hours used increase and the life hours remaining decrease depending on the amount of time consumed by the process. Tracking of the edge ring continues and the life hours used and remaining are determined until all life hours have been used or are nearly used. This information can be used to determine which process module edge ring needs to be replaced and when the edge ring needs to be replaced.

[0109] The lifetime usage information provided by tracking can also be used to analyze conditions within the manufacturing system to detect when an error occurs, and pinpoint where the error occurred and what conditions caused the error so that appropriate measures can be taken to address the error. Automated uploading and tracking also handles common errors that may be encountered due to human interaction, such as double slotting or cross slotting of an edge ring within an edge ring carrier. Other advantages of various implementations will become apparent to those skilled in the art after studying the various implementations described herein.

[0110] The foregoing description of various implementations has been provided for purposes of description and illustration. The foregoing description is not intended to be exhaustive or to limit the invention. Individual elements and features of a particular embodiment are generally not limited to that particular embodiment, but are interchangeable and may be used in a selected embodiment, where applicable, even if not specifically shown or described. The foregoing elements or features may also be varied in a variety of ways. Such variations are not considered to depart from the invention, and all such modifications are intended to be included within the scope of the invention.

[0111] Although the foregoing embodiments have been described in some detail for purposes of clarity of understanding, it is apparent that several changes and modifications may be implemented within the scope of the appended claims. Therefore, the embodiments of the present invention are to be considered as illustrative and not restrictive, and the embodiments are not to be limited to the details provided herein, but may be modified within the scope and equivalents of the claims.

Claims

1. A method for tracking edge rings, comprising: capturing an edge ring identifier from a source associated with the edge ring; Inserting the edge ring into a slot of an edge ring carrier to which the edge ring is assigned, wherein inserting the edge ring comprises: linking the edge ring identifier with a slot identifier of the slot and a carrier identifier of the edge ring carrier; and tracking the edge ring identifier for transfers to and from the edge ring carrier and to and from a processing station, in, The tracking of the edge ring identifiers creates a metadata file that provides lifespan information about the edge rings. 2 . The method of claim 1 , wherein the source is a surface of the edge ring, or a part embedded in the edge ring, or a surface of a package housing the edge ring. 3 . The method of claim 1 , wherein the capture and insertion operations are performed during the time the edge ring is loaded into the edge ring carrier.

4. The method of claim 1 , wherein tracking the edge ring identifier comprises receiving information captured by one or more sensors of the edge ring carrier as the edge ring moves in and out of a particular slot of the edge ring carrier, the information received from the one or more sensors being used to update the lifetime information in the metadata file of the edge ring. 5 . The method of claim 4 , wherein the information received from the one or more sensors of the edge ring carrier is used to update a content table and a status table maintained for the edge ring carrier.

6. The method of claim 1 , wherein tracking the edge ring identifier comprises receiving information captured by one or more sensors distributed within the processing station as the edge ring moves within the processing station of a manufacturing system, the information received from the one or more sensors being used to update the lifetime information in the metadata file of the edge ring.

7. The method of claim 6, wherein the processing station comprises one or more of: a load port, an atmospheric pressure transfer module, a load lock chamber, a vacuum transfer module, a process module in which the edge ring is used, or one or more robots that move the edge ring within the processing station, and The information received from the one or more sensors includes one or more of: a location of the edge ring, a time when the edge ring is introduced into the location, a time when the edge ring is removed from the location, a condition of the edge ring before being moved to the location, the condition of the edge ring after being moved out of the location, a tool expected to be used for the edge ring, a process module expected to be used for the edge ring, or a usage record of the edge ring within the process module.

8. The method of claim 1, wherein tracking the edge ring identifier further comprises: querying a part tracking database maintained in a manufacturing system where the processing station is located to obtain a current location of the edge ring; and updating the metadata file with the current location.

9. The method of claim 1 , wherein tracking the edge ring identifier further comprises: detecting selection of the edge ring for transfer out of the edge ring carrier; querying a part tracking database maintained in a manufacturing system to determine a current location of the edge ring carrier containing the edge ring within the manufacturing system; When the current location of the edge ring carrier is a load port of the processing station, verification is performed that the edge ring associated with the edge ring identifier is an edge ring used in a process module within the processing station, the verification being used to enable the edge ring to be transferred out of the edge ring carrier.

10. The method of claim 9, when the verifying determines that the edge ring is not used in the process module, generating an alarm to indicate a mismatch of the edge ring selected to transfer out of the edge ring carrier and preventing the edge ring from being transferred out of the edge ring carrier.

11. The method of claim 1, wherein tracking the edge ring identifier further comprises: detecting selection of the edge ring for transfer out of the edge ring carrier; querying a part tracking database maintained in a manufacturing system to determine a current location of the edge ring carrier containing the edge ring within the manufacturing system; When the current location of the edge ring carrier is a load port of the processing station, verifying that the edge ring associated with the edge ring identifier is an edge ring used in a process module within the processing station; Life information of the edge ring provided in the metadata file is analyzed to determine a remaining useful life of the edge ring, the analysis being used to allow the edge ring to be transferred out of the edge ring carrier when the remaining useful life is sufficient to undergo a manufacturing operation within the process module in the processing station.

12. The method of claim 11 , when the remaining useful life of the edge ring is insufficient to perform at least one round of the manufacturing operation in the process module, generating an alarm to indicate that the edge ring selected to be transferred into the edge ring carrier has insufficient remaining useful life, and preventing the edge ring from being transferred out of the edge ring carrier and into the process module in the processing station.

13. The method of claim 1 , wherein tracking the edge ring identifier associated with the edge ring comprises: analyzing lifetime information of the edge ring provided in the metadata file to determine a remaining useful life of the edge ring, the useful life being used to determine when the edge ring needs to be removed from the processing station.

14. A system for tracking edge rings, comprising: an edge ring execution system configured to track the edge ring within the system, the edge ring execution system interacting with, an edge ring tracking module for receiving an edge ring identifier of the edge ring when the edge ring is received into the system and loaded onto an edge ring carrier to which the edge ring is assigned; an edge ring carrier tracking module for tracking the position of the edge ring carrier as the edge ring carrier moves within the system, information provided by the edge ring carrier tracking module being used to determine the current position of the edge ring within the system; and A production execution system is configured to provide information of the edge ring as the edge ring moves in and out of the edge ring carrier and in and out of a processing station within the system, the information provided by the production execution system being used by the edge ring execution system to establish a metadata file for the edge ring, wherein the metadata file provides lifespan information of the edge ring within the system.

15. The system of claim 14, wherein the edge ring execution system is different from the production execution system, and wherein within the system, the edge ring execution system is executed on a first server and the production execution system is executed on a second server, the first server being communicatively connected to the second server to exchange information related to the edge ring, thereby establishing the metadata file for the edge ring. The system according to claim 15 , wherein the first server and the second server are cloud servers.

17. The system of claim 14, wherein the edge ring execution system is integrated with the production execution system, and wherein the production execution system is configured to execute on a server within the system.

18. The system of claim 14, wherein the edge ring execution system is configured to assign the edge ring to the edge ring carrier by linking the edge ring identifier with a carrier identifier of the edge ring carrier and a slot identifier of a slot within the edge ring carrier into which the edge ring is to be loaded.

19. The system of claim 14, wherein the edge ring carrier includes one or more sensors to track the edge ring using the edge ring identifier as the edge ring moves in and out of the edge ring carrier, information provided by the one or more sensors within the edge ring carrier being processed by the production execution system to provide updates to the metadata file of the edge ring maintained by the edge ring execution system.

20. The system of claim 14, wherein the processing station comprises a plurality of modules and one or more sensors distributed within the plurality of modules, and information provided by the one or more sensors within the processing station is processed by the production execution system to provide updates to the metadata file of the edge ring stored by the edge ring execution system.

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