Detection structure and chip detection mechanism

Through the inclined track and synchronous moving driving structure, the high cost and low efficiency problems caused by multiple drive parts of the chip detection equipment are solved, and the equipment is lightweight and efficient detection is achieved.

CN112684316BActive Publication Date: 2025-07-11SHENZHEN SHENGSHI INTELLIGENT EQUIP
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Patent Information

Application Number
CN202011426443.9
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2020-12-09
Publication Date
2025-07-11
Estimated Expiration
2040-12-09

AI Technical Summary

Technical Problem

Existing chip detection equipment requires multiple sets of drive equipment to achieve displacement at different angles, resulting in high costs, increased load and low detection efficiency.

Method used

The first track and driving member arranged inclined are adopted to realize the synchronous movement of the detector and the positioning member through one driving member, reduce the number of driving members, and combine the inclined surface and parallel track structure to realize the multi-directional movement of the detector and the positioning member.

Benefits of technology

It effectively saves the number of driving equipment, reduces the weight and production cost of the testing equipment, and improves the detection efficiency.

✦ Generated by Eureka AI based on patent content.

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Abstract

The present invention discloses a detection structure and a chip detection mechanism. The detection structure includes a detection member, a first moving block, a driving member, and a first track. The detection member is provided with a detection surface, and light enters the detection member through the detection surface. The detection member is connected to the first moving block, the driving member is connected to the first moving block, the first track is inclined relative to the detection surface, and the first moving block can move along the first track. Since the first track is inclined, when the detection member moves on the first track through the first moving block, the first detection member can be driven by the first driving member to complete movements in two directions, such as the vertical direction and the horizontal direction. Compared with the related art, the number of driving members is saved. The present invention also discloses a chip detection mechanism, including the above detection structure.
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Description

Technical Field

[0001] The present invention relates to the technical field of chip detection, and in particular to a detection structure and a chip detection mechanism. Background Art

[0002] In the process of chip detection, it is often necessary to detect the chip through a detection device. During the detection process, the detection device often needs to change its position. In the related art, multiple sets of driving devices are often required to be arranged on the detection device to complete the driving of the detection device at different angles, so that the detection device can complete the movement of different displacements. This structure not only wastes driving parts, increases the manufacturing cost, but also increases the load of the detection device, making its movement inconvenient, causing its movement speed to decrease, and reducing the detection efficiency. Summary of the Invention

[0003] The present invention aims to at least solve one of the technical problems existing in the prior art. For this purpose, the present invention provides a detection structure and a chip detection mechanism, which can save the number of driving parts.

[0004] An embodiment of the present invention discloses a detection structure, including:

[0005] A detection piece, the detection piece is provided with a detection surface, and light enters the detection piece through the detection surface;

[0006] A first moving block, the detection piece is connected to the first moving block;

[0007] A driving piece, the driving piece is connected to the first moving block;

[0008] A first track, the first track is inclined relative to the detection surface, and the first moving block can move along the first track.

[0009] The detection structure according to the embodiment of the present invention has at least the following beneficial effects: Since the first track is inclined, when the detection piece moves on the first track through the first moving block, the first detection piece can be driven by the first driving piece to complete the movement in two directions, such as the up-down direction and the horizontal direction. Compared with the related art, the number of driving parts is saved.

[0010] According to some embodiments of the present invention, the detection structure further includes a positioning piece and a second moving block, the positioning piece is connected to the second moving block, and the second moving block can move along the first track.

[0011] According to some embodiments of the present invention, it further includes a connecting block, the output end of the driving piece is connected to the connecting block, the connecting block is connected to the first moving block, and the connecting block is connected to the second moving block.

[0012] According to some embodiments of the present invention, it further includes a connecting block, a first adjustment block, and a second adjustment block. The first adjustment block is connected to the first moving block, the detecting member is connected to the second adjustment block. The first adjustment block is provided with an adjustment slideway along the height direction, and the second adjustment block is provided with a plurality of positioning holes along the height direction. The positioning holes can be positioned at any position of the adjustment slideway through fasteners.

[0013] According to some embodiments of the present invention, it further includes a base. The base is provided with an inclined surface, and the first track is arranged along the inclined surface, and the first track extends from high to low on the inclined surface.

[0014] According to some embodiments of the present invention, it further includes a base, an output block, an identification structure, a first identification member, and a second identification member. The first track is arranged on the base. One end of the output block is connected to the driving member, and the other end of the output block is connected to the connecting block. The identification structure is connected to the output block. The first identification member and the second identification member are respectively connected to the base. Both the first identification member and the second identification member can identify the identification structure. The first identification member is electrically connected to the driving member, and the second identification member is electrically connected to the driving member.

[0015] According to some embodiments of the present invention, the base is further provided with a second track. The first track and the second track are arranged in parallel, and the first identification member and the second identification member can move on the second track.

[0016] According to some embodiments of the present invention, it further includes a lead screw. The lead screw is connected to the output end of the driving member. The lead screw can penetrate through the output block, and the output block can be connected to the working part of the lead screw.

[0017] The present invention also provides a chip detection mechanism having the above detection structure, which further includes a probe for detecting the chip.

[0018] According to some embodiments of the present invention, it further includes a moving platform located below the detection structure. The moving platform is used for carrying the chip and moving the position of the chip.

[0019] The additional aspects and advantages of the present invention will be partially given in the following description, partially become obvious from the following description, or be understood through the practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] The following further describes the present invention in conjunction with the drawings and embodiments, where:

[0021] Figure 1 is a three-dimensional schematic diagram of the detection structure in the embodiment of the present invention;

[0022] Figure 2 is the right view of Figure 1 ;

[0023] Figure 3 is Figure 2 the top view of

[0024] Figure 4 a three-dimensional schematic diagram of the chip detection mechanism in the embodiment of the present invention.

[0025] Reference numerals: detection structure 101, detection piece 102, first moving block 103, driving piece 104, first track 105, positioning piece 106, connecting block 107, first adjusting block 108, second adjusting block 109, base 110, inclined surface 111, adjusting slide rail 112, output block 201, identification structure 202, first identification piece 203, second identification piece 204, second moving block 205, detection surface 206, second track 301, lead screw 302, probe 401, frame 402, moving platform 403. Detailed Embodiment

[0026] The embodiments of the present invention will be described in detail below. The examples of the embodiments are shown in the drawings, in which the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the drawings are exemplary and are only used to explain the present invention and should not be construed as a limitation to the present invention.

[0027] In the description of the present invention, it should be understood that the orientation or positional relationship indicated by terms such as up, down, front, back, left, right, etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as a limitation to the present invention.

[0028] In the description of the present invention, the meaning of several is more than one, the meaning of multiple is more than two, and understandings such as greater than, less than, exceeding, etc. do not include the present number, and understandings such as above, below, within, etc. include the present number. If there is a description of first and second, it is only for the purpose of distinguishing technical features and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features or implicitly indicating the sequence relationship of the indicated technical features.

[0029] In the description of the present invention, unless otherwise clearly defined, words such as setting, installing, connecting, etc. should be understood in a broad sense, and those skilled in the art can reasonably determine the specific meanings of the above words in the present invention in combination with the specific content of the technical solution.

[0030] In the description of the present invention, the descriptions with reference to terms such as "one embodiment", "some embodiments", "schematic embodiments", "examples", "specific examples", or "some examples" mean that the specific features, structures, materials, or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0031] During the chip detection process, it is often necessary to use an image detection device to detect the shape of the chip. In this process, due to the change in the position of the chip, a driving structure is required to change the position of the detection device. In the related art, due to the change in the position of the chip, the driving structure needs to change the displacement of the detection device in at least two directions. For example, the front-back direction and the up-down direction, or for example, the left-right direction and the up-down direction. This makes it necessary to include two sets of driving devices in the driving structure, which not only increases the manufacturing and use costs, but also increases the load of the driving structure, making it unable to drive the detection device to move at high speed and affecting the detection rate.

[0032] In view of the above problems, the present invention discloses a detection structure 101, as Figures 1 to 3 shown. The detection structure 101 in this embodiment includes a detection member 102, a first moving block 103, a driving member 104, and a first track 105. The detection member 102 is used to absorb the light emitted when the chip is subjected to an electrical test, so as to determine whether the chip can work normally. A detection surface 206 is provided on the detection member 102, and the light enters the detection device through the detection surface 206, so as to form an image in the detection device. In this embodiment, the detection surface may not be the imaging surface, as long as the light entering the detection device passes through the detection surface. The output end of the driving member 104 is connected to the first moving block 103. The first moving block 103 can move along the first track 105, and the first track 105 is inclined relative to the detection surface. This enables the output end of the driving member 104 to drive the first moving block 103 to move downward to the left as Figure 2 shown when the output end of the driving member 104 extends outward, so that through the drive of the driving member 104, the detection member 102 can simultaneously complete a leftward movement and a downward movement. Similarly, when the output end of the driving member 104 retracts, the detection member 102 can complete a movement upward to the right through the first moving block 103.

[0033] In the embodiment of the above detection structure 101, only by the drive of one drive member 104, the detection member 102 can complete the movement in the left - right direction and the up - down direction. Compared with the prior art, the detection structure 101 in this embodiment can effectively save the number of drive devices while ensuring the drive of the detection member 102. At the same time, the detection structure 101 in this embodiment can also indirectly reduce the load of the drive structure and reduce the weight of the overall detection structure 101.

[0034] Specifically, as Figures 1 to 3 shown, the detection structure 101 further includes a positioning member 106 and a second moving block 205. The positioning member 106 is used to position the chip, and the second moving block 205 can move along the first track 105 to adjust the position of the positioning member 106. Specifically, since the first track 105 is inclined, when the second moving block 205 moves along the first track 105, the positioning member 106 can complete the movement, and the movement track of the positioning member 106 is parallel to the movement track of the detection member 102, (the positioning member can move to the lower left as Figure 2 shown, or move to the upper right as Figure 2 shown). Compared with the structure that needs to move on two perpendicular tracks in the related art, the structure in this embodiment simplifies the movement track of the positioning member 106, enabling the positioning member 106 to move quickly in response.

[0035] Specifically, as Figures 1 to 3 shown, the detection structure 101 further includes a connection block 107. The connection block 107 is connected to the output end of the drive member 104, and the connection block 107 is respectively connected to the first moving block 103 and the second moving block 205. This enables the first moving block 103 and the second moving block 205 to move synchronously by driving the connection block 107 by the drive member 104, and further enables the detection member 102 and the positioning member 106 to move synchronously. When the chip needs to be positioned, first, the drive member 104 adjusts the positioning member 106 so that the positioning member 106 can position the chip. During this process, the detection member 102 and the positioning member 106 move synchronously but do not work. When the positioning member 106 finishes working, the drive member 104 drives the positioning member 106 and the detection member 102 to move until the detection member 102 is directly above the chip and detects the chip.

[0036] In the above embodiment, a driving member 104 drives the detecting member 102 and the positioning member 106 to move together. Compared with the structure in the related art where different driving devices drive the detecting member 102 and the positioning member 106 to move respectively, the detecting structure 101 in this embodiment can save the number of driving devices. At the same time, through the connecting block 107, both the detecting member 102 and the positioning member 106 can move along the first track 105, which enables the driving member 104 to simultaneously move the positioning member 106 and the detecting member 102 to the lower left as shown in Figure 2 or to the upper right as shown in Figure 2 . Compared with the structure that requires several driving devices to drive the positioning member 106 and the detecting member 102 to move at different angles, the detecting structure 101 in this embodiment can effectively save the number of driving devices and reduce the weight of the overall device.

[0037] Specifically, as shown in Figures 1 to 3 , the detecting structure 101 further includes a first adjusting block 108 and a second adjusting block 109. The first adjusting block 108 is connected to the connecting block 107, and the detecting member 102 is connected to the second adjusting block 109. An adjusting slide rail 112 is provided on the first adjusting block 108 in the vertical direction as shown in Figure 1 . A plurality of positioning holes (not shown) are provided on the second adjusting block 109 in the vertical direction as shown in Figure 1 . Through fasteners, the positioning holes can be connected to the adjusting slide rail 112 (the fasteners press the second adjusting block 109 against the first adjusting block 108), so that the first adjusting block 108 positions the second adjusting block 109, and the position of the detecting member 102 relative to the connecting block 107 is fixed. When it is necessary to adjust the height of the detecting member 102 relative to the connecting block 107 according to the detection requirements, the fasteners can be loosened to connect the positioning holes to other positions of the adjusting slide rail 112, or connect the positioning holes at different positions to the same position of the adjusting slide rail 112, so as to change the distance between the detecting member 102 and the connecting block 107 in the vertical direction as shown in Figure 2 , thereby adjusting the distance between the detecting member 102 and the chip during the detection process.

[0038] Specifically, as shown in Figures 1 to 3 , the detecting structure 101 includes a base 110. The driving member 104, the detecting member 102, and the positioning member 106 are all connected to the base 110, and the base 110 supports the driving member 104, the detecting member 102, and the positioning member 106. An inclined surface 111 is provided on the base 110, and the first track 105 is arranged on the inclined surface 111, so that the first track 105 is inclined. When the connecting block 107 moves on the first track 105, the connecting block 107 can move to the lower left as shown in Figure 2 or to the upper right as shown in Figure 2The upper right movement shown drives the positioning member 106 and the detection member 102 to move downward to the left as shown in Figure 2 or to move upward to the right as shown in Figure 2 In this embodiment, due to the setting of the inclined surface 111, the connecting block 107 can move downward to the left as shown in Figure 2 or move upward to the right as shown in Figure 2 In other embodiments, if the inclination direction of the inclined surface 111 changes, the connecting block 107 can drive the positioning member 106 and the detection member 102 to move in other directions.

[0039] Specifically, as shown in Figures 1 to 3 , the detection structure 101 further includes a base 110, an output block 201, an identification structure 202, a first identification member 203, and a second identification member 204. The output block 201 is connected to the output end of the driving member 104. The output block 201 can also be connected to the connecting block 107 to drive the connecting block 107 to move, so that the positioning member 106 and the detection member 102 move. The identification structure 202 is connected to the output block 201. The first identification member 203 and the second identification member 204 are arranged along the direction of the first track 105, and the first identification member 203 is electrically connected to the driving member 104, and the second identification member 204 is electrically connected to the driving member 104. When the driving member 104 drives the output block 201 to move, the output block 201 drives the identification structure 202 to move. When the identification structure 202 moves to the first identification member 203, the driving member 104 stops moving to prevent the first moving block 103 and the second moving block 205 from disengaging from the first track 105. During the reset process of the positioning member 106 and the detection member 102, when the identification structure 202 moves to the second identification member 204, the driving member 104 stops moving, and the positioning member 106 and the detection member 102 complete the reset.

[0040] Specifically, as shown in Figures 1 to 3 , a second track 301 is further provided on the base 110, and the second track 301 is arranged parallel to the first track 105. The first identification member 203 and the second identification member 204 can both move relative to the second track 301 to meet the detection requirements of different chips. The above structure also has at least the following effects: Since the first track 105 and the second track 301 are arranged in parallel, no matter where the first identification member 203 and the second identification member 204 move on the second track 301, they can identify the identification structure 202 connected to the output block 201, ensuring the use safety of the positioning member 106 and the detection member 102 while ensuring the accuracy of the reset of the positioning member 106 and the detection member 102.

[0041] Specifically, in the above embodiments, the detection structure 101 further includes a lead screw 302. The lead screw 302 is connected to the output end of the driving member 104 through a coupling. The lead screw 302 can penetrate through the output block 201. The inner wall of the hole on the output block 201 through which the lead screw 302 passes is provided with internal threads. The working portion of the lead screw 302 with external threads can be connected to the internal threads of the output block 201. By rotating the lead screw 302, the driving member 104 can drive the output block 201 to move, thereby driving the positioning member 106 and the detection member 102 to move.

[0042] In the above embodiments, the detection member 102 may include a light-absorbing element, such as an integrating sphere, and the positioning member 106 may be a camera.

[0043] An embodiment of the present invention also discloses a chip detection mechanism. The chip detection mechanism includes a frame 402 and a probe. The base 110 of the detection structure 101 is connected to the frame 402. The chip detection mechanism further includes a moving platform 403 and a probe 401. The moving platform 403 can move relative to the frame 402 to adjust the position of the chip. The moving platform 403 is located below the detection structure 101. After the position of the chip is identified by the positioning member 106, the detection member 102 is adjusted by driving of the driving member 104 so that the detection member 102 is located above the moving platform 403. At this time, the probe 401 is connected to the frame 402 to perform electrical detection on the chip. The detection member 102 collects the light emitted by the chip and determines whether the chip can emit light normally. In the detection structure 101, only one driving member 104 can be used to move the detection member 102 and the positioning member 106 together. This not only reduces the overall weight of the chip detection mechanism but also can reduce the production cost of the chip detection mechanism.

[0044] The above has described in detail the embodiments of the present invention with reference to the accompanying drawings. However, the present invention is not limited to the above embodiments. Within the knowledge scope of those of ordinary skill in the art to which the present invention pertains, various changes can be made without departing from the gist of the present invention. In addition, the embodiments of the present invention and the features in the embodiments can be combined with each other without conflict.

Claims

1. A detection structure, characterized in that, Comprising: A detection piece, the detection piece is provided with a detection surface, and light enters the detection piece through the detection surface; A first moving block, the detection piece is connected to the first moving block; A driving piece, the driving piece is connected to the first moving block; A first track, the first track is arranged obliquely relative to the detection surface, and the first moving block can move along the first track; The detection structure further includes a connecting block, a first adjusting block and a second adjusting block. The first adjusting block is connected to the first moving block, the detection piece is connected to the second adjusting block. The first adjusting block is provided with an adjusting slideway along the height direction, and the second adjusting block is provided with a plurality of positioning holes along the height direction. The positioning holes can be positioned at any position of the adjusting slideway through fasteners; The detection structure further includes a positioning piece and a second moving block. The positioning piece is connected to the second moving block, and the second moving block can move along the first track; The output end of the driving piece is connected to the connecting block, the connecting block is connected to the first moving block, and the connecting block is connected to the second moving block.

2. The detection structure according to claim 1, wherein It further includes a base, the base is provided with an inclined surface, the first track is arranged along the inclined surface, and the first track extends from high to low on the inclined surface.

3. The detection structure according to claim 1, wherein It further includes a base, an output block, an identification structure, a first identification piece and a second identification piece. The first track is arranged on the base. One end of the output block is connected to the driving piece, the other end of the output block is connected to the connecting block. The identification structure is connected to the output block. The first identification piece and the second identification piece are respectively connected to the base. Both the first identification piece and the second identification piece can identify the identification structure. The first identification piece is electrically connected to the driving piece, and the second identification piece is electrically connected to the driving piece.

4. The detection structure according to claim 3, wherein The base is further provided with a second track, the first track and the second track are arranged in parallel, and the first identification piece and the second identification piece can move on the second track.

5. The detection structure according to claim 3, wherein, It further includes a lead screw, the lead screw is connected to the output end of the driving piece, the lead screw can penetrate through the output block, and the output block can be connected to the working part of the lead screw.

6. A chip detection mechanism, characterized in that, Comprising a probe and the detection structure according to any one of claims 1 to 5, the probe is used for detecting a chip.

7. The chip detection mechanism according to claim 6, characterized in that, It further includes a moving platform, the moving platform is located below the detection structure, and the moving platform is used for carrying the chip and moving the position of the chip.

Citation Information

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