A vibration-resistant area array sweep frequency measurement device and method

Abstract

The present invention provides a vibration-resistant surface array frequency sweeping measurement device and method, belonging to the field of laser ranging technology, the device includes a tunable laser, a collimator, a beam expander, a beam splitter, a reflective element, a lens, a camera and an acquisition control unit; the tunable laser is used to control the camera to collect interference images by sending a trigger signal and provide an original light beam; the beam splitter is used to reflect the original light beam to the reflective element; the reflective element is used to reflect the original light beam in a certain proportion to form a reference light, and is used to transmit the last remaining original light beam to the object to be measured; the object to be measured is used to reflect the last remaining original light beam to form a signal light; the lens is used to image the interference image on the camera; the acquisition control unit is used to analyze the surface morphology of the object to be measured according to the interference image; the signal light interferes with the reference light to form an interference image. The present invention improves the vibration-resistant effect of the surface array frequency sweeping measurement device, thereby achieving an improvement in measurement accuracy.

Description

Technical Field

[0001] The present invention belongs to the technical field of laser ranging, and more specifically, relates to a vibration-resistant area array frequency sweeping measurement device and method. Background Art

[0002] In modern industrial production, the precision of parts processing is increasingly becoming the key to high-performance equipment. It is very important to accurately and stably produce parts of the required specific size and morphology. Therefore, accurate inspection of the produced parts is an important part of ensuring high-quality production. In existing technologies, it is often necessary to obtain the morphology of parts by point scanning. Although the measurement range is expanded, the measurement process depends on mechanical movement, which will inevitably introduce mechanical scanning errors and cause the equipment to face problems such as aging and instability of moving parts. Moreover, the measurement speed is also limited by the scanning speed, and it is difficult to obtain high measurement speed while having high sensitivity. This is determined by the characteristics of point scanning. Therefore, there is a need to develop a large-format, high-precision, and fast method for measuring the thickness and distance of objects without scanning the sample.

[0003] As a new generation of non-contact precision ranging method, frequency scanning interferometry has many advantages, such as high sensitivity and fast imaging speed. However, it generally uses traditional balanced detectors and high-speed data acquisition cards to collect interference data, and its point detection collection method has certain limitations. In addition, in the principle of traditional laser interferometry, there are two major problems that limit its practical application. First, there is a fixed interference peak in the signal transformation spectrum. When the signal peak and the interference peak are overlapped, the measurement is difficult to achieve, that is, the corresponding distance range is "unmeasurable". This unmeasurable area is also called a dead zone. Another problem is that due to the limitation of Fourier transform, there is a non-ambiguous distance for the measured distance. As the measured distance continues to increase, the measurement result will oscillate repeatedly within the non-ambiguous distance range. Therefore, for a rising measurement result, the experiment cannot determine the axial movement direction of the measured point. This is the directional ambiguity caused by the non-ambiguous distance. At the same time, in actual distance measurement / thickness applications, due to unavoidable weak vibrations and temperature fluctuations and other external factors, the two optical paths are subject to different external influence factors in the dual-optical path measurement using the Michelson interferometer method, which will affect the measurement accuracy and thus affect the measurement results. Summary of the invention

[0004] In view of the defects of the prior art, the purpose of the present invention is to provide a vibration-resistant area array frequency sweeping measurement device and method, aiming to solve the problem that the existing frequency sweeping interferometry ranging is difficult to avoid vibration and temperature fluctuations, resulting in low measurement accuracy.

[0005] To achieve the above-mentioned purpose, in scheme 1, the present invention provides a vibration-resistant array frequency sweeping measurement device under a general field of view, comprising a tunable laser, a collimator, a beam expander, a beam splitter, a reflective element, a lens, a camera and an acquisition control unit;

[0006] A collimator, a beam expander and a beam splitter are sequentially arranged in the transmission direction of the original light beam; a reflective element, a beam splitter, a lens and a camera are sequentially arranged in the direction in which the original light beam is reflected by the beam splitter; the output end of the tunable laser is connected to the input end of the camera; the reflective element and the beam splitter are connected through a rigid structure;

[0007] The tunable laser is used to control the camera to collect the interference image by sending a trigger signal and provide the original light beam; the beam splitter is used to reflect the original light beam to the reflective element; the reflective element is used to reflect the original light beam in a certain proportion to form a reference light, and is used to transmit the last remaining original light beam to the object under test; the object under test is used to reflect the last remaining original light beam to form a signal light; the lens is used to image the interference image on the camera; the acquisition control unit is used to analyze the surface morphology of the object under test according to the interference image; the signal light interferes with the reference light to form an interference image.

[0008] Preferably, the reflective element is a thin film reflector, which is used to reflect the original light beam in a certain proportion to form a reference light;

[0009] Or the reflective element is an optical window, the upper surface of the optical window is used to reflect the original light beam at a first ratio to form a first reference light; the lower surface of the optical window is used to reflect the remaining original light beam at a second ratio to form a second reference light.

[0010] Preferably, the reflective element is a tilted reflective element.

[0011] Solution 2, the present invention provides a vibration-resistant surface array scanning measurement device under a small field of view, including a tunable laser, a collimator, a beam expander, a beam splitter, a microscope, a sleeve lens, a reflective element, a camera and an acquisition control unit;

[0012] A collimator, a beam expander and a beam splitter are sequentially arranged in the transmission direction of the original light beam; a reflective element, a microscope, a beam splitter, a sleeve lens and a camera are sequentially arranged in the direction in which the original light beam is reflected by the beam splitter; the output end of the tunable laser is connected to the input end of the camera; the reflective element is connected to the microscope through a rigid structure;

[0013] The tunable laser is used to control the camera to collect the interference image by sending a trigger signal and provide the original light beam; the beam splitter is used to reflect the original light beam to the reflective element; the reflective element is used to reflect the original light beam in a certain proportion to form a reference light, and is used to transmit the last remaining original light beam to the object under test; the object under test is used to reflect the last remaining original light beam to form a signal light; the lens is used to image the interference image on the camera; the acquisition control unit is used to analyze the surface morphology of the object under test according to the interference image; the signal light interferes with the reference light to form an interference image.

[0014] Preferably, the reflective element is a thin film reflector, which is used to reflect the original light beam in a certain proportion to form a reference light;

[0015] Or the reflective element is an optical window, the upper surface of the optical window is used to reflect the original light beam at a first ratio to form a first reference light; the lower surface of the optical window is used to reflect the remaining original light beam at a second ratio to form a second reference light.

[0016] Preferably, the reflective element is a tilted reflective element.

[0017] Solution 3, the present invention provides a vibration-resistant array frequency sweeping measurement device under a large field of view, including a tunable laser, a collimator, a beam expander, a beam splitter, a lens, a reflective element, a camera, and an acquisition control unit;

[0018] A collimator, a beam expander and a beam splitter are sequentially arranged in the transmission direction of the original light beam; a reflective element, a lens, a beam splitter and a camera are sequentially arranged in the direction in which the original light beam is reflected by the beam splitter; the output end of the tunable laser is connected to the input end of the camera; the reflective element and the lens are connected through a rigid structure;

[0019] The tunable laser is used to control the camera to collect the interference image by sending a trigger signal and provide the original light beam; the beam splitter is used to reflect the original light beam to the reflective element; the reflective element is used to reflect the original light beam in a certain proportion to form a reference light; and is used to transmit the last remaining original light beam to the object to be measured; the object to be measured is used to reflect the last remaining original light beam to form a signal light; the lens is used to image the interference image on the camera; the acquisition control unit is used to analyze the surface morphology of the object to be measured according to the interference image; the signal light interferes with the reference light to form an interference image.

[0020] Preferably, the reflective element is a thin film reflector, which is used to reflect the original light beam in a certain proportion to form a reference light;

[0021] Or the reflective element is an optical window, the upper surface of the optical window is used to reflect the original light beam at a first ratio to form a first reference light; the lower surface of the optical window is used to reflect the remaining original light beam at a second ratio to form a second reference light.

[0022] Preferably, the reflective element is a tilted reflective element.

[0023] On the other hand, the present invention provides a vibration-resistant area array frequency sweeping measurement method, characterized in that it comprises the following steps:

[0024] The original light beam is decomposed into reference light and transmitted light by using a reflective element; and the transmitted light is reflected by the object to be measured to form a signal light;

[0025] The interference image formed by the interference of reflected light and reference light is collected by using a camera;

[0026] Analyze the surface morphology of the object under test based on the interference image;

[0027] The reference light is the light reflected by the original light beam through the reflective element; the transmitted light is the light transmitted by the original light beam through the reflective element; and the signal light and the reference light are located on the same optical path.

[0028] Preferably, the reflective element is a thin film reflector, which reflects the original light beam in a certain proportion to form a reference light;

[0029] Or the reflective element is an optical window, the upper surface of the optical window reflects the original light beam at a first ratio to form a first reference light; the lower surface of the optical window reflects the remaining original light beam at a second ratio to form a second reference light.

[0030] Preferably, the reflective element is a tilted reflective element.

[0031] In general, the above technical solution conceived by the present invention has the following advantages compared with the prior art:

[0032] Beneficial effects:

[0033] The reflective element provided by the present invention is located in the direction in which the original light beam is reflected by the beam splitter, and the obtained reference light and signal light belong to the same optical path, that is, the common Fizeau interference optical path. At the same time, the reflective element is connected to the entire device with a rigid structure. Therefore, when vibration occurs, the interference to the signal light and the reference light remains basically consistent, thereby improving the anti-vibration effect of the area array scanning frequency measurement device, thereby achieving an improvement in measurement accuracy.

[0034] The present invention adopts a camera to collect interference data, avoids point detection, realizes area array detection, greatly improves the performance of the area array frequency sweeping measurement device, and realizes large-scale, high-precision and high-efficiency measurement.

[0035] When the reflective element is an optical window, the first reference light and the second reference light can be obtained, which effectively solves two problems existing in the traditional laser interferometer ranging principle, namely the non-ambiguous distance problem and the dead zone distance, and improves the accuracy of laser interferometer ranging.

[0036] When the reflective element provided by the present invention is a tilted reflective element, the dead zone and the image signal peak can be effectively suppressed, thereby expanding the measurement range of the area array frequency sweep. BRIEF DESCRIPTION OF THE DRAWINGS

[0037] Figure 1 Schematic diagram of a vibration-resistant area array sweep frequency measurement device of a general field of view provided in Example 1 of the present invention;

[0038] Figure 2 Schematic diagram of a small-field-of-view anti-vibration area array frequency sweeping measurement device provided in Example 2 of the present invention;

[0039] Figure 3 Schematic diagram of a large-field-of-view anti-vibration area array frequency sweeping measurement device provided in Embodiment 3 of the present invention;

[0040] Figure 4 It is the transform domain signal characteristic obtained by the measuring device when the distance between the measured point and the reference point provided by the present invention is a positive odd multiple;

[0041] Figure 5 It is the transform domain signal characteristic obtained by the measuring device when the distance between the measured point and the reference point provided by the present invention is a positive even multiple;

[0042] Throughout the drawings, the same reference numerals are used to denote the same elements or structures, wherein

[0043] 1. Tunable laser; 2. Collimator; 3. Beam expander; 4. Beam splitter; 5. Reflection element; 6. Object to be measured; 7. Lens; 8. Camera; 9. Computer; 10. Tube lens; 11. Microscope. DETAILED DESCRIPTION

[0044] In order to make the purpose, technical solution and advantages of the present invention more clearly understood, the present invention is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not intended to limit the present invention.

[0045] The present invention uses a camera to collect interference images, realizes area array detection, breaks through the limitations of point detection, can greatly improve the performance of the frequency sweeping measurement device, and realizes large-scale, high-precision, and high-efficiency measurement. At the same time, a common-path Fizeau interference optical path is used, and the reference light and the signal light are in the same optical path and are subject to the same interference, so it has a better anti-vibration effect.

[0046] Example 1

[0047] like Figure 1 The figure shows a vibration-resistant area array frequency sweeping measurement device, comprising a tunable laser 1, a collimator 2, a beam expander 3, a beam splitter 4, a reflective element 5, a lens 7, a camera 8 and a computer 9;

[0048] A collimator 2, a beam expander 3 and a beam splitter 4 are sequentially arranged in the transmission direction of the original light beam; a reflective element 5, a beam splitter 4, a lens 7 and a camera 8 are sequentially arranged in the direction in which the original light beam is reflected by the beam splitter 4; the output end of the tunable laser 1 is connected to the input end of the camera 8; the object to be measured 6, the reflective element 5 and the beam splitter 4 are sequentially connected through a rigid structure;

[0049] The process in which the wavelength output by the tunable laser 1 changes with time is called optical frequency scanning, or frequency sweeping for short; the tunable laser 1 can emit trigger signals with equal wave number intervals, that is, each time its output light changes by the same wave number, a trigger signal is emitted, and the trigger signal is used to control the camera 8 to start collecting; the computer 9 has the function of collecting signals from devices such as cameras; the interference image formed between the signal light reflected by the object to be measured 6 and the reference light reflected by the reflective element 5 is recorded by the camera 8; the computer 9 collects the interference image transmitted by the camera 8 for analyzing the surface morphology of the object to be measured; the lens 7 is used to image the interference image on the camera 8.

[0050] When the measured object vibrates, the reflective element 5 also generates the same vibration, so the relative optical path difference between the reflective element 5 and the measured object 6 is little affected by the vibration, so that the area array sweep frequency measurement device has an anti-vibration function.

[0051] Preferably, the lens 7 may be a telecentric lens with an adjustable aperture. If the lens 7 has an adjustable aperture, the aperture can be adjusted to a suitable size to improve the speckle phenomenon of the camera.

[0052] Preferably, the reflective element 5 is a thin film reflector, which reflects a certain proportion of light back to the camera 8, such as 8% of the original light beam returns to the camera 8 to form a reference light; the remaining original light beam penetrates the thin film reflector 5 and is reflected on the object to be measured 6 to form a signal light. The reference light interferes with the signal light to form an interference image, which is recorded by the camera 8 through the lens 7.

[0053] Preferably, when the reflective element 5 is an optical window, the upper surface of the optical window will reflect a certain proportion of light back to the camera 8, such as 1%, to form the first reference light; the remaining original light beam will reflect a certain proportion of light to the camera 8 through the lower surface of the optical window, such as 0.8, to form the second reference light; finally, the remaining light beam transmits the reflective element 5 to irradiate the object 6 to be measured, and is reflected by the object 6 to form the signal light; the signal light, the first reference light and the second reference light interfere with each other, and the interference image formed is recorded by the camera 8 through the lens 7, and the camera 8 transmits the interference image to the computer 9 for analyzing and displaying the surface morphology of the object 6 to be measured. When the reflected light intensity of the upper and lower surfaces of the optical window is uneven, the intensity of the signal can be changed to determine whether a certain interference peak comes from the first reference light or the second reference light.

[0054] like Figure 4 In the signal transformation domain shown in the figure, given φ = φ1-φ2, the interference peak P formed by the first reference light and the signal light p The interference peak P formed by the second reference light and the signal light s When n is on the left side, it can be judged that n is an odd number. Otherwise, Figure 5 As shown, when P p In P s When it is on the right, it can be determined that n is an even number; n is the number of the unambiguous distance interval; φ1 is the optical path of the first reference light, and φ2 is the optical path of the second reference light.

[0055] Preferably, the reflective element 5 is a tilted reflective element, that is, tilted at an angle θ relative to the optical axis, which can suppress the dead zone and extend the measurement range. For example, the angle between the reflective element 5 and the x-axis is 2°; the specific principle of suppressing the dead zone by tilting the reflective element is as follows:

[0056] Assuming (x, y) is the surface coordinate of the object to be measured, when the reflective element 5 is not tilted, the optical path difference between the signal light and the reference light is l(x, y), and the spectrum obtained by the camera 8 is For S1 After the domain is Fourier transformed, the first transformed spectrum obtained will have a pair of signal peaks that are symmetrical along the zero point and mirror images of each other, and a dead zone with a certain width near the zero point. The horizontal coordinates of the signal peaks are ±l(x, y), and the dead zone is the Fourier transform of the spectrum I(λ) of the tunable laser 1.

[0057] When the reflective element 5 rotates by an angle θ along the x-axis at the point (x=0, y=0), the optical path difference between the signal light and the reference light is l(x, y)+xsin(θ), and the spectrum obtained by the camera 8 is For S2 After Fourier transform is performed in the domain, the second transform spectrum obtained will have a pair of signal peaks symmetrical along the zero point and a dead zone with a certain width near the zero point. The horizontal coordinate of the signal peak of the second transform spectrum is proportional to sin(θ). Since θ is a preset fixed value, the center value of the signal peak can be estimated. The dead zone of the second transform spectrum is also the Fourier transform of the spectrum I(λ) of the tunable laser 1, and will not be overlapped with the signal peak determined by sin(θ). Therefore, the dead zone and the signal of the negative half axis can be filtered out by a high-pass filtering algorithm, and then the filtered second transform spectrum is inversely transformed from Fourier to the x domain to obtain a complex spectral signal S3. The spectral signal S3 no longer contains the spectrum I(λ) of the tunable laser 1, and the mirror part will also be greatly suppressed. Therefore, S3 in The transformed spectrum obtained after Fourier transform in the domain contains only one signal peak, and both the dead zone and the image signal will be greatly suppressed. Therefore, the swept frequency measurement range of the array can be extended from the positive semi-axis to the entire positive and negative semi-axis without being affected by the dead zone.

[0058] The vibration-resistant surface array sweeping measurement device provided in Example 1 is a vibration-resistant surface array sweeping measurement device under a general field of view. In order to cope with different field of view requirements, the present invention provides Examples 2 and 3, but their principles are similar to those of the vibration-resistant surface array sweeping measurement device provided in the examples.

[0059] Example 2

[0060] like Figure 2 The figure shows a vibration-resistant area array frequency sweeping measurement device, comprising a tunable laser 1, a collimator 2, a beam expander 3, a beam splitter 4, a reflective element 5, a microscope 11, a tube lens 10, a camera 8 and a computer 9;

[0061] A collimator 2, a beam expander 3 and a beam splitter 4 are sequentially arranged in the transmission direction of the original light beam; a reflective element 5, a microscope 11, a beam splitter 4, a sleeve lens 10 and a camera 8 are sequentially arranged in the direction in which the original light beam is reflected by the beam splitter 4; the output end of the tunable laser 1 is connected to the input end of the camera 8; the object to be measured 6, the reflective element 5 and the microscope 11 are sequentially connected through a rigid structure;

[0062] The process in which the wavelength output by the tunable laser 1 changes with time is called optical frequency scanning, or simply frequency scanning; the tunable laser 1 can emit trigger signals with equal wave number intervals, that is, each time its output light changes by the same wave number, a trigger signal is emitted, and the trigger signal is used to control the camera 8 to start collecting; the computer 9 has the function of collecting signals from devices such as cameras; the interference image formed between the signal light reflected by the object to be measured 6 and the reference light reflected by the reflective element 5 is recorded by the camera 8; the computer 9 collects the interference image transmitted by the camera 8 for analyzing the surface morphology of the object to be measured; the microscope 11 is used to magnify the surface morphology of the object to be measured 6.

[0063] It should be noted that if the image side emits parallel light, the microscope 11 needs to be used in combination with the tube lens 10 to converge the parallel light on the image plane of the camera 8; if the image side emits convergent light, the tube lens 10 may not be used.

[0064] The vibration-resistant area array frequency sweeping measurement device provided in Example 2 is suitable for area array frequency sweeping measurement with a small field of view.

[0065] Example 3

[0066] like Figure 1The figure shows a vibration-resistant area array frequency sweeping measurement device, comprising a tunable laser 1, a collimator 2, a beam expander 3, a beam splitter 4, a reflective element 5, a lens 7, a camera 8 and a computer 9;

[0067] A collimator 2, a beam expander 3 and a beam splitter 4 are sequentially arranged in the transmission direction of the original light beam; a reflective element 5, a lens 7, a beam splitter 4 and a camera 8 are sequentially arranged in the direction in which the original light beam is reflected by the beam splitter 4; the output end of the tunable laser 1 is connected to the input end of the camera 8; the object to be measured 6, the reflective element 5 and the beam splitter 4 are sequentially connected through a rigid structure;

[0068] The process in which the wavelength output by the tunable laser 1 changes with time is called optical frequency scanning, or frequency sweeping for short; the tunable laser 1 can emit trigger signals with equal wave number intervals, that is, each time its output light changes by the same wave number, a trigger signal is emitted, and the trigger signal is used to control the camera 8 to start collecting; the computer 9 has the function of collecting signals from devices such as cameras; the interference image formed between the signal light reflected by the object to be measured 6 and the reference light reflected by the reflective element 5 is recorded by the camera 8; the computer 9 collects the interference image transmitted by the camera 8 for analyzing the surface morphology of the object to be measured; the lens 7 is used to image the interference image on the camera 8.

[0069] The vibration-resistant area array frequency sweeping measurement device provided in Example 3 is suitable for area array frequency sweeping measurement with a large field of view.

[0070] In summary, compared with the prior art, the present invention has the following advantages:

[0071] The reflective element provided by the present invention is located in the direction in which the original light beam is reflected by the beam splitter, and the obtained reference light and signal light belong to the same optical path, that is, the common Fizeau interference optical path. At the same time, the reflective element is connected to the entire device with a rigid structure. Therefore, when vibration occurs, the interference to the signal light and the reference light remains basically consistent, thereby improving the anti-vibration effect of the area array scanning frequency measurement device, thereby achieving an improvement in measurement accuracy.

[0072] The present invention adopts a camera to collect interference data, avoids point detection, realizes area array detection, greatly improves the performance of the area array frequency sweeping measurement device, and realizes large-scale, high-precision and high-efficiency measurement.

[0073] When the reflective element is an optical window, the first reference light and the second reference light can be obtained, which effectively solves two problems existing in the traditional laser interferometer ranging principle, namely the non-ambiguous distance problem and the dead zone distance, and improves the accuracy of laser interferometer ranging.

[0074] When the reflective element provided by the present invention is a tilted reflective element, the dead zone and the image signal peak can be effectively suppressed, thereby expanding the measurement range of the area array frequency sweep.

[0075] It will be easily understood by those skilled in the art that the above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A vibration-resistant area array frequency sweeping measurement device, characterized in that: It comprises a tunable laser (1), a collimator (2), a beam expander (3), a beam splitter (4), a reflective element (5), a lens (7), a camera (8) and a collection control unit; The collimator (2), the beam expander (3) and the beam splitter (4) are arranged in sequence in the transmission direction of the original light beam; the reflective element (5), the beam splitter (4), the lens (7) and the camera (8) are arranged in sequence in the direction in which the original light beam is reflected by the beam splitter (4); the output end of the tunable laser (1) is connected to the input end of the camera (8); the reflective element (5) and the beam splitter (4) are connected via a rigid structure; The tunable laser (1) is used to control the camera (8) to collect interference images by sending a trigger signal and provide an original light beam; the beam splitter (4) is used to reflect the original light beam to the reflective element (5); the reflective element (5) is used to reflect the original light beam in a certain proportion to form a reference light, and is used to transmit the last remaining original light beam to the object to be measured (6); the object to be measured (6) is used to reflect the last remaining original light beam to form a signal light; the lens (7) is used to image the interference image on the camera (8); the collection control unit is used to analyze the surface morphology of the object to be measured according to the interference image; the signal light interferes with the reference light to form an interference image; The wavelength of the original light beam output by the tunable laser (1) changes with time; the tunable laser (1) sends out trigger signals with equal wave number intervals.

2. The vibration-resistant area array sweep frequency measurement device according to claim 1, characterized in that: The reflecting element (5) is a thin film reflecting mirror, which is used to reflect the original light beam in a certain proportion to form a reference light; Or the reflective element (5) is an optical window, and the upper surface of the optical window is used to reflect the original light beam according to a first ratio to form a first reference light; The lower surface of the optical window is used to reflect the secondary remaining original light beam according to a second ratio to form a second reference light.

3. The vibration-resistant area array sweep frequency measurement device according to claim 1, characterized in that: The reflective element (5) is a tilted reflective element.

4. A vibration-resistant array frequency sweeping measurement device, characterized in that: It comprises a tunable laser (1), a collimator (2), a beam expander (3), a beam splitter (4), a microscope (11), a tube lens (10), a reflective element (5), a camera (8) and a collection control unit; The collimator (2), the beam expander (3) and the beam splitter (4) are arranged in sequence in the transmission direction of the original light beam; the reflective element (5), the microscope (11), the beam splitter (4), the tube lens (10) and the camera (8) are arranged in sequence in the direction in which the original light beam is reflected by the beam splitter (4); the output end of the tunable laser (1) is connected to the input end of the camera (8); the reflective element (5) and the microscope (11) are connected via a rigid structure; The tunable laser (1) is used to control the camera (8) to collect interference images by sending a trigger signal and provide an original light beam; the beam splitter (4) is used to reflect the original light beam to the reflective element (5); the reflective element (5) is used to reflect the original light beam in a certain proportion to form a reference light, and is used to transmit the last remaining original light beam to the object to be measured (6); the object to be measured (6) is used to reflect the last remaining original light beam to form a signal light; the lens (7) is used to image the interference image on the camera (8); the collection control unit is used to analyze the surface morphology of the object to be measured according to the interference image; the signal light interferes with the reference light to form an interference image; The wavelength of the original light beam output by the tunable laser (1) changes with time; the tunable laser (1) sends out trigger signals with equal wave number intervals.

5. The vibration-resistant area array frequency sweeping measurement device according to claim 4, characterized in that: The reflecting element (5) is a thin film reflecting mirror, which is used to reflect the original light beam in a certain proportion to form a reference light; Or the reflective element (5) is an optical window, and the upper surface of the optical window is used to reflect the original light beam according to a first ratio to form a first reference light; The lower surface of the optical window is used to reflect the secondary remaining original light beam according to a second ratio to form a second reference light.

6. The vibration-resistant area array sweep frequency measurement device according to claim 4, characterized in that: The reflective element (5) is a tilted reflective element.

7. A vibration-resistant array frequency sweeping measurement device, characterized in that: It comprises a tunable laser (1), a collimator (2), a beam expander (3), a beam splitter (4), a lens (7), a reflective element (5), a camera (8) and a collection control unit; The collimator (2), the beam expander (3) and the beam splitter (4) are arranged in sequence in the transmission direction of the original light beam; the reflective element (5), the lens (7), the beam splitter (4) and the camera (8) are arranged in sequence in the direction in which the original light beam is reflected by the beam splitter (4); the output end of the tunable laser (1) is connected to the input end of the camera (8); the reflective element (5) and the lens (7) are connected via a rigid structure; The tunable laser (1) is used to control the camera (8) to collect interference images by sending a trigger signal and provide an original light beam; the beam splitter (4) is used to reflect the original light beam to the reflective element (5); the reflective element (5) is used to reflect the original light beam in a certain proportion to form a reference light; and is used to transmit the last remaining original light beam to the object to be measured (6); the object to be measured (6) is used to reflect the last remaining original light beam to form a signal light; the lens (7) is used to image the interference image on the camera (8); the collection control unit is used to analyze the surface morphology of the object to be measured according to the interference image; the signal light interferes with the reference light to form an interference image; The wavelength of the original light beam output by the tunable laser (1) changes with time; the tunable laser (1) sends out trigger signals with equal wave number intervals.

8. The vibration-resistant area array sweep frequency measurement device according to claim 7, characterized in that: The reflecting element (5) is a thin film reflecting mirror, which is used to reflect the original light beam in a certain proportion to form a reference light; Or the reflective element (5) is an optical window, and the upper surface of the optical window is used to reflect the original light beam according to a first ratio to form a first reference light; The lower surface of the optical window is used to reflect the secondary remaining original light beam according to a second ratio to form a second reference light.

9. The vibration-resistant area array sweep frequency measurement device according to claim 7, characterized in that: The reflective element (5) is a tilted reflective element.

10. A vibration-resistant surface array sweep frequency measurement method based on the vibration-resistant surface array sweep frequency measurement device according to claim 1, characterized in that: The following steps are involved: The original light beam is decomposed into reference light and transmitted light by using a reflective element; and the transmitted light is reflected by the object to be measured to form a signal light; The interference image formed by the interference of reflected light and reference light is collected by using a camera; Analyze the surface morphology of the object under test based on the interference image; The reference light is the light reflected by the original light beam through the reflective element; the transmitted light is the light transmitted by the original light beam through the reflective element; and the signal light and the reference light are located on the same optical path.

11. The vibration-resistant area array frequency sweeping measurement method according to claim 10, characterized in that: The reflective element is a thin film reflector, which reflects the original light beam in a certain proportion to form a reference light; Or the reflective element is an optical window, and the upper surface of the optical window reflects the original light beam according to a first ratio to form a first reference light; The lower surface of the optical window reflects the remaining original light beam in a second proportion to form a second reference light.

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