Cathode mounting system in continuous PVD coating plant

Abstract

The application relates to a mounting system of a cathode in a continuous PVD coating equipment, which comprises a forklift type transfer device and a guide structure. The forklift type transfer device comprises a base with opposite first and second ends in a first direction, the first end being provided with a guide part; a vertical lifting mechanism installed at the second end of the base; a left-right adjusting assembly connected to the vertical lifting mechanism; a load fork connected to the left-right adjusting assembly and capable of reciprocating along a second direction, the second direction being perpendicular to the first direction and a vertical direction; the load fork comprising a fork arm extending along the first direction, the side of the fork arm facing the base being provided with a hook; and the guide structure being arranged below a coating process chamber and used for cooperating with the guide part of the base to guide the forklift type transfer device to move towards the coating process chamber and limit the moving position of the forklift type transfer device. Compared with a traditional overhead crane, the forklift type transfer device has lower requirements on the structural strength and height of a workshop.

Description

Technical Field

[0001] The present invention relates to the technical field of coating equipment, and in particular to an installation system for installing cathodes in continuous coating PVD equipment. Background Art

[0002] The continuous coating PVD (Physical Vapour Deposition) equipment with a lifting cathode design currently on the market is maintained by crane lifting. Among them, the continuous coating PVD equipment is a vacuum coating equipment used to achieve continuous film feeding, generally with a 7-chamber structure. The 7 chambers are named C1-C7, and their functions are the input end lock chamber, input end buffer chamber, input end transition chamber, process chamber, output end transition chamber, output end buffer chamber, and output end lock chamber. In traditional technology, maintenance is carried out by crane lifting, specifically for the cathode of C4, the coating process chamber. The cathode here refers to the cathode structure of the PVD equipment that can be disassembled by lifting method, and the cathode structure has a lifting part that can be used for lifting, and the lifting part is generally a lifting ring.

[0003] The maintenance is carried out by hoisting with a crane 1, and the cathode 2 is hoisted into the coating process chamber 3 by the crane. Figure 1 The figure shows the working state of the cathode during the process of lifting in or out. The hook 11 of the overhead crane 1 is connected to the lifting ring 21 on the top of the cathode 2 via a lifting rope 4. The hook 11 of the overhead crane 1 is raised and lowered in the vertical direction to lift the cathode 2 above the coating process chamber 3 for the next step.

[0004] In the process of practicing the prior art, the inventors found that the above-mentioned hoisting method has at least the following disadvantages. First, it has high requirements for the factory building: the overhead crane 1 is set on the roof of the factory building, and the height of the coating process chamber 3 is X1m, the height of the cathode 2 is X2m, the height of the overhead crane 1 itself (plus the hook) is X3m, the height of the reserved hoisting space (the extension space of the hoisting rope 4) is X4m, and the total height of the factory building is ≥ (X1+X2+X3+X4)m. Based on this height relationship, in the existing equipment, the height of the factory building is at least 5m. Second, the current industry equipment is large in size and weight, and the configured overhead crane needs to reach 5 tons or more. Since the overhead crane is set on the roof of the factory building, the strength requirements for the factory building are relatively high.

[0005] Due to the above two shortcomings, many manufacturers' factories are unable to install overhead cranes due to insufficient height or strength, resulting in the overhead crane hoisting method being unable to meet the cathode hoisting requirements. Summary of the Invention

[0006] Therefore, it is necessary to propose a cathode installation system in a continuous PVD coating equipment to solve the problem that the installation of the overhead crane cannot meet the hoisting requirements of the cathode due to insufficient height or insufficient strength of the workshop.

[0007] A cathode installation system in a continuous PVD coating equipment includes a forklift type transfer device and a guide structure, wherein the forklift type transfer device includes a base having opposite first and second ends in a first direction, the first end having a guide portion; a vertical lifting mechanism installed at the second end of the base, a left-right adjusting assembly connected to the vertical lifting mechanism to be lifted in a vertical direction under the drive of the vertical lifting mechanism; a load fork connected to the left-right adjusting assembly to be reciprocally moved in a second direction perpendicular to the first direction and perpendicular to the vertical direction, wherein the load fork includes at least one fork arm extending in the first direction, and a hook is arranged on the side of the fork arm facing the base; and the guide structure is arranged below the coating process chamber, and the guide structure is used to cooperate with the guide portion of the base to guide the forklift type transfer device to move towards the coating process chamber and define the moving position of the forklift type transfer device.

[0008] The cathode installation system in the continuous PVD coating equipment has the base of the forklift type transfer device arranged on the ground, which has lower requirements on the structural strength of the workshop than the traditional overhead crane; the base of the forklift type transfer device can be inserted into the gap between the bottom of the coating process chamber and the foundation, which can save the height dimension in the vertical direction, and the height dimension of the base of the forklift type transfer device itself is also much smaller than the height of the overhead crane, so that the height required by the forklift type transfer device of the cathode installation system in the continuous PVD coating equipment of the embodiment is extremely small under the condition that the height dimension of the coating process chamber, the height dimension of the cathode, and the safety distance of the cathode above the coating process chamber are unchanged.

[0009] In one embodiment, the base includes a pair of support legs arranged in parallel, and each end of the support leg away from the vertical lifting mechanism is provided with the guide portion.

[0010] In one embodiment, the guide structure includes a first guide and a second guide arranged at intervals, the first guide includes a first guide wall and a first blocking wall perpendicular to each other, and the second guide includes a second guide wall and a second blocking wall perpendicular to each other, wherein the first guide wall is parallel to the second guide wall and extends along the length direction of the support leg, and the first blocking wall and the second blocking wall extend oppositely.

[0011] In one of the embodiments, one end of the first guide wall is connected with the first blocking wall, and the other end of the first guide wall is provided with a first guide surface which extends away from the second guide wall and is inclined.

[0012] In one of the embodiments, the outer surface of the guide part is a cylindrical surface.

[0013] In one of the embodiments, the first guide part and the second guide part are integrally formed metal parts.

[0014] In one of the embodiments, the left-right adjusting assembly has an upper limit position in the vertical direction, and the upper limit position is spaced apart from the top end of the vertical lifting mechanism in the vertical direction.

[0015] In one of the embodiments, the vertical lifting mechanism is a hydraulic lifting mechanism.

[0016] In one of the embodiments, the fork truck type transfer device further comprises a first traveling wheel and a second traveling wheel, wherein the first traveling wheel is arranged at the bottom side of the vertical lifting mechanism, and the second traveling wheel is arranged at the bottom of the base.

[0017] In one of the embodiments, the number of the fork arms is two, and the two fork arms are arranged in parallel, and the lifting hooks on the two fork arms are in one-to-one correspondence. BRIEF DESCRIPTION OF DRAWINGS

[0018] Figure 1 It is a working state diagram when the cathode is moved by the crown block in the conventional technology.

[0019] Figure 2 It is a perspective view of the alignment of the fork truck type transfer device and the guide structure at the bottom of the coating process chamber in the installation system of one embodiment of the present application.

[0020] Figure 3 It is a front view of the alignment of the fork truck type transfer device and the guide structure at the bottom of the coating process chamber in the installation system of one embodiment of the present application.

[0021] Figure 4 It is a bottom view of the alignment of the fork truck type transfer device and the guide structure at the bottom of the coating process chamber in the installation system of one embodiment of the present application.

[0022] Figure 5 It is a perspective view of the alignment of the fork truck type transfer device and the opening of the coating process chamber in the installation system of one embodiment of the present application.

[0023] Figure 6 Figure 1 is a front view of a mounting system according to an embodiment of the present application, in which a forklift-type transfer device is aligned with an opening of a coating process chamber when the forklift-type transfer device is carrying a cathode.

[0024] Figure 7 Figure 1 is a front view of a mounting system according to an embodiment of the present application, in which a forklift-type transfer device is aligned with an opening of a coating process chamber when the forklift-type transfer device is carrying a cathode.

[0025] The corresponding numbers of the relevant elements in the figures are as follows:

[0026] 1, crown block; 11, lifting hook; 2, cathode; 21, lifting ring; 3, coating process chamber; 4, lifting rope;

[0027] 100, forklift-type transfer device; 110, base; 101, first end; 102, second end; 111, guide portion; 112, support leg; 120, vertical lifting mechanism; 121, portal; 122, power system; 123, lifting component; 130, left-right adjustment assembly; 140, load-bearing fork; 141, fork arm; 142, lifting hook; 150, first walking wheel; 160, second walking wheel; 200, guide structure; 210, first guide element; 211, first guide wall; 212, first blocking wall; 213, first guide surface; 220, second guide element; 221, second guide wall; 222, second blocking wall; 223, second guide surface;

[0028] 300, cathode; 310, lifting ring; 400, coating process chamber; 410, support leg. DETAILED DESCRIPTION

[0029] In order to make the above objectives, features and advantages of the present application more apparent, specific embodiments of the present application will be described in detail below with reference to the accompanying drawings. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present application. It will be apparent, however, to one skilled in the art that the present application can be practiced without some or all of these specific details. In other instances, well known process operations have not been described in detail in order to not unnecessarily obscure the present application.

[0030] In the description of the present application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and therefore cannot be understood as indicating or implying that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the present application.

[0031] In addition, the terms "first", "second", etc. are used only for descriptive purposes and are not to be construed as indicating or implying relative importance or an ordered sequence. Thus, features referring to "first", "second" etc. can include at least one of the features, explicitly or implicitly.

[0032] In the present application, unless specifically defined otherwise, the terms "mounting", "connecting", "connecting", "fixing" and the like are to be construed broadly, for example, can be fixed connection, can also be detachable connection, or integral; can be mechanical connection, can also be electrical connection; can be directly connected, can also be indirectly connected through an intermediate medium, can be the internal communication of two elements or the interaction relationship between two elements, unless specifically defined otherwise. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0033] In the present application, unless specifically defined otherwise, the first feature is "on" or "under" the second feature can be that the first and second features are in direct contact, or the first and second features are indirectly in contact through an intermediate medium. Moreover, the first feature "above", "over" and "on" the second feature can be that the first feature is directly above or obliquely above the second feature, or only indicates that the horizontal height of the first feature is higher than that of the second feature. The first feature "below", "under" and "under" the second feature can be that the first feature is directly below or obliquely below the second feature, or only indicates that the horizontal height of the first feature is less than that of the second feature.

[0034] It should be noted that when an element is referred to as "fixed to" or "provided on" another element, it can be directly on the other element or there can be a middle element. When an element is referred to as "connected to" another element, it can be directly connected to the other element or there can be a middle element. The terms "vertical", "horizontal", "up", "down", "left", "right" and similar expressions used herein are for illustrative purposes only and are not intended to be the only implementation.

[0035] As described in the background, the traditional way of hoisting the cathode by the overhead crane has many defects, and is limited by the height and strength of the workshop, and cannot meet the installation requirements of large cathodes. In view of the above problems, an embodiment of the present application proposes a mounting system for cathodes in a continuous PVD coating equipment, which can meet the hoisting requirements of large cathodes, and at the same time overcome the shortcomings of the prior art, and the requirements for the height and strength of the workshop are relatively low.

[0036] The preferred embodiments of the present application will be described below with reference to the accompanying drawings.

[0037] Referring to Figures 2 to 7 , a working process of the mounting system of the cathode in the continuous PVD coating equipment according to an embodiment of the present application is shown, wherein Figures 2 to 4 a working state of the mounting system when the cathode 300 is directed towards the coating process chamber 400 (i.e. C4 chamber) is shown, Figures 5 to 7 and a working state of the mounting system when the cathode 300 is aligned towards the coating process chamber 400 is shown.

[0038] As shown, the mounting system of the cathode 300 in the continuous PVD coating equipment according to an embodiment of the present application comprises a forklift type transfer device 100 and a guide structure 200, wherein the forklift type transfer device 100 is used to transport the cathode 300 and can hoist the cathode 300 into or out of the coating process chamber 400, and the guide structure 200 is used to guide the advancement of the forklift type transfer device 100 and to limit the moving position of the forklift type transfer device 100 when the forklift type transfer device 100 moves the cathode 300, thereby playing a positioning role.

[0039] As shown in Figure 2 , the forklift type transfer device 100 comprises a base 110, a vertical lifting mechanism 120, a left-right adjusting assembly 130 and a load fork 140, the vertical lifting mechanism 120 is installed on the base 110, the left-right adjusting assembly 130 is connected to the vertical lifting mechanism 120, and the load fork 140 is connected to the left-right adjusting assembly 130.

[0040] As shown in Figure 2 and Figure 3 , in the first direction X, the base 110 has opposite first and second ends 101 and 102, wherein the first end 101 is provided with a guide portion 111, and the vertical lifting mechanism 120 is installed on the second end 102 of the base 110. Under the drive of the vertical lifting mechanism 120, the left-right adjusting assembly 130 can drive the load fork 140 to move in the vertical direction Z. The left-right adjusting assembly 130 itself can drive the load fork 140 to reciprocate in the second direction Y, which is perpendicular to the first direction X and perpendicular to the vertical direction.

[0041] Specifically, in this embodiment, as shown in Figure 3 , the vertical lifting mechanism 120 can drive the left-right adjusting assembly 130 to move in the vertical direction Y (up and down direction in the figure); the first direction X is the horizontal direction, and the second direction Y is the direction perpendicular to the plane of the figure. The left-right adjusting assembly 130 is used to drive the load fork 140 to move left and right in the second direction.

[0042] The specific type of the vertical lifting mechanism 120 is not limited, and specifically, it is a hydraulic lifting mechanism. As shown in Figure 2As shown, the vertical lifting mechanism 120 includes a gantry 121, a power system 122, and a lifting component 123, wherein the gantry 121 is fixed to the second end 102 of the base 110, the power system 122 is installed at the bottom of the gantry 121, and the lifting component 123 can be movably arranged relative to the gantry 121. The left and right adjustment component 130 is slidably connected to the lifting component 123 of the vertical lifting mechanism 120. The left and right adjustment component 130 can drive the load-bearing fork 140 to move up and down in the vertical direction under the drive of the vertical lifting mechanism 120. During specific implementation, the left and right adjustment component 130 and the vertical lifting mechanism 120 can share a power system, or various power systems can be independently set. The power system includes but is not limited to a hydraulic system, a pneumatic system, a motor, etc.

[0043] In addition, in a specific implementation, the left-right adjustment assembly 130 has an upper limit position in the vertical direction, and the upper limit position is vertically spaced from the top end of the vertical lifting mechanism 120. This ensures the safety of the vertical lifting mechanism 120 when driving the left-right adjustment assembly 130 to rise.

[0044] The load-bearing fork 140 includes at least one fork arm 141 extending along a first direction, and a plurality of hooks 142 are provided on the side of the fork arm 141 facing the base 110, and the plurality of hooks 142 are arranged at intervals along the first direction (which is also the length direction of the fork arm 141). The hooks 142 are used to cooperate with the lifting ring 310 on the top of the cathode 300, so that the load-bearing fork 140 can lift the cathode 300. In the specific setting, the number of fork arms 141 is two, and the two fork arms 141 are arranged in parallel, and the hooks 142 on the two fork arms 141 correspond to each other one by one. By using the two fork arms 141 to lift the cathode 300 together, the cathode 300 is subjected to a stable force, is not easy to shake, and has a higher safety.

[0045] The guide structure 200 is disposed below the coating process chamber 400. Figure 2 As shown, the bottom of the coating process chamber 400 is provided with a plurality of legs 410 for placement on the foundation. Gaps are formed between the legs 410, and the legs 410 also ensure that when the coating process chamber 400 is placed on the foundation, there is a gap in the vertical direction between the bottom of the coating process chamber 400 and the foundation. In a specific configuration, the guide structure 200 is provided on the foundation below the coating process chamber 400 and is located within the above-mentioned gap. In other embodiments, the guide structure 200 can also be provided at the bottom of the coating process chamber 400, and it protrudes so that the height of the bottom of the coating process chamber 400 is less than the height of the legs 410.

[0046] In conjunction with the accompanying drawings, the working process of the cathode installation system in the continuous PVD coating equipment will be briefly described by first taking the example of hanging the cathode 300 into the coating process chamber 400.

[0047] refer to Figures 2 to 4When the cathode 300 needs to be hoisted into the coating chamber 400, the vertical lifting mechanism 120 and the left-right adjustment assembly 130 are first controlled so that the hook 142 of the load-bearing fork 140 hooks the lifting ring 310 on the cathode 300. The vertical lifting mechanism 120 drives the load-bearing fork 140 upward, and the load-bearing fork 140 lifts the cathode 300 to a position above the top of the coating chamber 400 and a safe distance.

[0048] Before the forklift-type transfer device 100 moves to the coating process chamber 400, the base 110 is inserted into the gap between the bottom of the coating process chamber 400 and the foundation. The guide portion 111 of the base 110 is aligned with the guide structure 200 until the forklift-type transfer device 100 moves into position, so that the cathode 300 is roughly above the opening of the coating process chamber 400.

[0049] like Figures 5 to 7 As shown, the cathode 300 is moved left and right by the left and right adjustment assembly 130 so that the cathode 300 is aligned with the opening of the coating process chamber 400. The vertical lifting mechanism 120 is then operated to control the cathode 300 to descend and place the cathode 300 into the coating process chamber 400. Afterwards, the forklift-type transfer device 100 is removed for the next lifting operation, or the forklift-type transfer device 100 is placed at a designated location, completing the operation.

[0050] When lifting the cathode 300 out of the coating chamber 400, the cathode mounting system in the PVD coating equipment operates as follows: The forklift-type transfer device 100 moves to the front of the coating chamber 400, inserting the base 110 into the gap between the bottom of the coating chamber 400 and the foundation. The guide portion 111 of the base 110 aligns with the guide structure 200 until the forklift-type transfer device 100 is in place.

[0051] Operate the vertical lifting mechanism 120 to lower the load-bearing fork 140. Simultaneously, operate the left and right adjustment components 130 so that the hook 142 of the load-bearing fork 140 hooks the lifting ring 310 on the cathode 300. Operate the vertical lifting mechanism 120 to raise the load-bearing fork 140 and lift the cathode 300 out of the coating process chamber 400, leaving a safe distance in the vertical direction. Move the forklift-type transfer device 100 and place the cathode 300 in a designated location, such as on a dedicated maintenance cart.

[0052] The base 110 of the forklift type moving device 100 is arranged on the ground, and the structural strength requirement of the factory building is lower than that of the traditional overhead crane; the base 110 of the forklift type moving device 100 can be inserted into the gap between the bottom of the film coating process chamber 400 and the foundation, so that the vertical height dimension can be saved, and the height dimension of the base 110 of the forklift type moving device 100 itself is also much smaller than the height of the overhead crane. Therefore, in the continuous PVD film coating equipment of the embodiment of the present application, the height required by the forklift type moving device 100 is extremely small, under the condition that the height dimension of the film coating process chamber 400, the height dimension of the cathode 300 and the safety distance of the cathode 300 above the film coating process chamber 400 are unchanged. In a specific comparative example, the inventors ensure that the height dimension and the safety distance are the same as above, and the height of the factory building required by the overhead crane is at least 5 m, while the height required by the forklift type moving device 100 of the present application is as low as 4.067 m, saving at least 1 m.

[0053] In addition, during the process of hoisting the cathode 300 into or out of the film coating process chamber 400, the guide structure 200 is matched with the guide portion 111 on the forklift type moving device 100, which is easy to operate and beneficial to shorten the maintenance time.

[0054] In addition, the installation system of the cathode 300 in the continuous PVD film coating equipment can be adjusted by increasing or decreasing the size of the forklift type moving device 100 to cope with PVD equipment of different sizes.

[0055] As shown in Figure 2 and Figure 3 , the base 110 includes a pair of support legs 112 arranged in parallel, and each support leg 112 is provided with a guide portion 111 at the end away from the vertical lifting mechanism 120. The two support legs 112 have better support, and the two guide portions 111 are matched with the guide structure 200 at the same time, which is beneficial to the stable advancement of the forklift type moving device 100.

[0056] As shown in Figures 2 to 4 , in an embodiment, the guide structure 200 includes a first guide 210 and a second guide 220 arranged at intervals. The two support legs 112 of the base 110 can be inserted between the first guide 210 and the second guide 220, and are guided by the first guide 210 and the second guide 220, respectively.

[0057] Specifically, the first guide member 210 includes a first guide wall 211 and a first blocking wall 212 which are perpendicular to each other, and the second guide member 220 includes a second guide wall 221 and a second blocking wall 222 which are perpendicular to each other, wherein the first guide wall 211 is parallel to the second guide wall 221 and extends along the length direction of the support leg 112, and the first blocking wall 212 and the second blocking wall 222 extend oppositely. Preferably, the first guide member 210 and the second guide member 220 are both integrally formed metal plates, which are convenient for manufacturing.

[0058] Through the above arrangement, the first guide wall 211 and the second guide wall 221 are arranged along the advancing direction of the forklift type transfer device 100, so as to be able to cooperate with the side wall of the support leg 112; the first blocking wall 212 and the second blocking wall 222 are both located in front of the support leg 112. When the guide portion 111 abuts against the first blocking wall 212 and the second blocking wall 222, the forklift type transfer device 100 is moved to the position, at this time, the cathode 300 does not need to be adjusted in the front-rear direction (the direction of the advancing and the rear end of the forklift type transfer device 100), and only needs to be controlled to move left and right by the left-right moving assembly to ensure that the cathode 300 is aligned with the opening of the coating process chamber 400, which is easy to operate. In addition, the structure design of the forklift type transfer device 100 is also simplified, that is, the forklift type transfer device 100 does not need to be provided with a mechanism capable of controlling the front-rear movement of the fork relative to the base 110.

[0059] Further, as shown in Figure 4 , one end of the first guide wall 211 is connected with the first blocking wall 212, and the other end of the first guide wall 211 is provided with a first guide surface 213 which extends obliquely away from the second guide wall 221; one end of the second guide wall 221 is connected with the second blocking wall 222, and the other end of the second guide wall 221 is provided with a second guide surface 223 which extends obliquely away from the first guide wall 211. An entrance with a larger size for facilitating the insertion of the two support legs 112 is formed between the first guide surface 213 and the second guide surface 223.

[0060] Further, as shown in Figure 1 , the outer surface of the guide portion 111 is a cylindrical surface. When the forklift type transfer device 100 advances towards the coating process chamber 400, the guide portion 111 advances under the guidance of the first guide surface 213 or the second guide surface 223, so that the two support legs 112 are more easily inserted between the first guide wall 211 and the second guide wall 221.

[0061] It should be noted that the configuration of the guide structure 200 is not limited to the above example. For example, only the first guide member 210 or the second guide member 220 may be provided. In another example, the first guide member 210 and the second guide member 220 may also be configured to have an insertion channel for accommodating the support leg 112 to guide the forward movement of the forklift-type transfer device 100.

[0062] like Figure 3 As shown, in order to facilitate the movement of the forklift-type transfer device 100, the forklift-type transfer device 100 also includes a first running wheel 150 and a second running wheel 160, wherein the first running wheel 150 is arranged on the bottom side of the vertical lifting mechanism 120, and the second running wheel 160 is arranged at the bottom of the base 110.

[0063] The technical features of the above-mentioned embodiments can be combined arbitrarily. In order to make the description concise, not all possible combinations of the technical features in the above-mentioned embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0064] The above-described embodiments merely illustrate several implementations of the present invention, and while their descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the patent. It should be noted that a person skilled in the art would be able to make numerous variations and improvements without departing from the spirit of the present invention, all of which fall within the scope of protection of the present invention. Therefore, the scope of protection of the patent for this invention shall be determined by the appended claims.

Claims

1. A cathode installation system in a continuous PVD coating device, characterized in that: It includes a forklift type transfer device and a guide structure, wherein The forklift type transfer device comprises: A base, the base having a first end and a second end opposite to each other in a first direction, the first end having a guide portion; A vertical lifting mechanism is installed at the second end of the base. A left-right adjustment assembly connected to the vertical lifting mechanism to be raised and lowered in a vertical direction under the drive of the vertical lifting mechanism; a load-bearing fork connected to the left and right adjustment assemblies so as to be reciprocatingly movable along a second direction, the second direction being perpendicular to the first direction and perpendicular to the vertical direction, wherein the load-bearing fork comprises at least one fork arm extending along the first direction, a hook being provided on a side of the fork arm facing the base; and The guide structure is provided below the coating process chamber, and is used to cooperate with the guide portion of the base to guide the forklift-type transfer device to move toward the coating process chamber and limit the moving position of the forklift-type transfer device; The base comprises a pair of supporting legs arranged in parallel, and the end of each supporting leg away from the vertical lifting mechanism is provided with the guide portion; The guide structure includes a first guide member and a second guide member spaced apart from each other, the first guide member includes a first guide wall and a first blocking wall perpendicular to each other, and the second guide member includes a second guide wall and a second blocking wall perpendicular to each other. The first guide wall is parallel to the second guide wall and extends along the length direction of the support leg, and the first blocking wall and the second blocking wall extend in opposite directions; One end of the first guide wall is connected to the first retaining wall, and the other end of the first guide wall is provided with a first guide surface, which extends obliquely away from the second guide wall; one end of the second guide wall is connected to the second retaining wall, and the other end of the second guide wall is provided with a second guide surface, which extends obliquely away from the first guide wall; an entrance for inserting two supporting legs is formed between the first guide surface and the second guide surface; The outer surface of the guide portion is a cylindrical surface; A plurality of supporting legs are arranged at the bottom of the coating process chamber, gaps are formed between the supporting legs, and the guide structure is arranged in the gaps.

2. The cathode installation system in the continuous PVD coating equipment according to claim 1, characterized in that: The first guide member and the second guide member are both integrally formed sheet metal parts.

3. The cathode installation system in the continuous PVD coating equipment according to claim 1, characterized in that: The left-right adjustment assembly has an upper limit position in the vertical direction, and the upper limit position is spaced apart from the top end of the vertical lifting mechanism in the vertical direction.

4. The cathode installation system in the continuous PVD coating equipment according to claim 1, characterized in that: The vertical lifting mechanism is a hydraulic lifting mechanism.

5. The cathode installation system in the continuous PVD coating equipment according to claim 1, characterized in that: The forklift type transfer device further includes a first running wheel and a second running wheel, wherein the first running wheel is arranged on the bottom side of the vertical lifting mechanism, and the second running wheel is arranged on the bottom of the base.

6. The cathode installation system in the continuous PVD coating equipment according to claim 1, characterized in that: There are two fork arms, which are arranged in parallel, and the hooks on the two fork arms correspond to each other one by one.

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