A flexible parallel static pressure air thrust bearing

Abstract

The present application provides a flexible parallel static-pressure air thrust bearing, which includes at least three air-floating slider modules, namely a first air-floating slider module, a second air-floating slider module and a third air-floating slider module. An air passage is arranged inside each air-floating slider module. Each two adjacent air-floating slider modules are movably connected through a flexible connection module. When the flexible parallel static-pressure air thrust bearing encounters a raised object during the movement relative to the working surface of the guide rail, since multiple air-floating slider modules connected by flexible connection blocks are adopted in the present invention, the vibration generated by each air-floating slider module when encountering a raised object during the movement is eliminated under the action of the flexible connection block and will not be transmitted to the adjacent air-floating slider modules. Therefore, the stability of the static-pressure air thrust bearing during the movement can be ensured, and the adaptability to the working surface of the guide rail can be improved.

Description

Technical Field

[0001] The present application relates to the field of static pressure air bearings, and in particular to a flexible parallel static pressure air thrust bearing. Background Art

[0002] Static air thrust bearings are often used to achieve stable, low-damping planar relative motion with high performance requirements. They are often used in ground installation and deployment testing of satellite payloads, as well as in high-precision machine tools and high-precision measuring equipment. Static air thrust bearings eject high-pressure clean air through the capillary channels machined (or built-in) on the working surface of static air thrust bearings, forming a high-pressure air film between the bearing and the motion base, thereby achieving planar motion of the bearing relative to the motion base.

[0003] In the related technology, the conventional hydrostatic air thrust bearing has protruding points on the roughness or flatness of the working surface of the moving base, which causes the high-speed gas to be discharged from the side with the larger opening at an accelerated speed when the hydrostatic air thrust bearing tilts, causing the internal pressure of the air film to drop further, causing the hydrostatic air thrust bearing to contact the moving base, further causing it to get stuck. Summary of the invention

[0004] In view of the defects in the prior art, the purpose of the present application is to provide a flexible parallel static pressure air thrust bearing to solve the above problems.

[0005] The present application provides a flexible parallel static pressure air thrust bearing, the thrust bearing comprising at least three air floating slider modules, each of the air floating slider modules being provided with a ventilation cavity inside;

[0006] Wherein, every two adjacent air-floating slider modules are movably connected via a flexible connection module, thereby enhancing the adaptability of the air-floating slider assembly to pits and protrusions when the air-floating slider assembly moves relative to the working surface of the guide rail.

[0007] In a possible implementation, air communication pipelines are provided between adjacent air floating slider modules to achieve compressed air communication between a plurality of parallel air floating slider modules, thereby realizing a simple air supply method.

[0008] In a possible implementation, each of the air-floating slider modules is respectively connected to an air inlet pipeline, and no air communication pipeline is provided between adjacent air-floating slider modules to ensure flexibility between the adjacent air-floating slider modules.

[0009] In a possible implementation, the air outlet of the air-floating slider module is arranged on the lower surface, and the upper surface of the air-floating slider module is provided with a rigid connection module.

[0010] In a possible implementation, the flexible connection module is arranged between the rigid connection module and the air-bearing slider module.

[0011] In a possible implementation, the air-bearing slider assembly is composed of at least 3 parallel-connected air-bearing slider modules.

[0012] Compared with the prior art, the present application has at least the following beneficial effects:

[0013] The air-bearing slider assembly in the high-adaptability and high-load-capacity flexible parallel static-pressure air thrust bearing provided by the present invention is composed of at least 3 parallel-connected air-bearing slider modules. Each two adjacent air-bearing slider modules are movably connected through a flexible connection module. When the air-bearing slider assembly moves relative to the working surface of the guide rail and encounters a pit or a protrusion, its adaptability can be effectively improved.

[0014] The solution provided by the present invention has the advantages of low movement resistance, high load capacity, low requirement for the precision of the movement base surface, economical implementation method, and reliable operation compared with the prior art. The present invention can be applied to industrial scenarios where a flexible parallel static-pressure air thrust bearing is required to achieve low-damping and high-load movement. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the following will briefly introduce the drawings required for the description of the embodiments. Obviously, the following drawings are only some embodiments of the present application. For those of ordinary skill in the art, without creative efforts, other drawings can be obtained based on these drawings.

[0016] Figure 1 is a schematic structural principle diagram of the flexible parallel static-pressure air thrust bearing provided by the present application;

[0017] Figure 2 is a schematic structural diagram of each air-bearing slider module and the internal air passage in the present application;

[0018] Figure 3 is a schematic state structure diagram of each air-bearing slider module during the movement of the flexible parallel static-pressure air thrust bearing provided by the present application. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0019] The following will describe the present application in detail with reference to specific embodiments. The following embodiments will help those skilled in the art to further understand the present application, but do not limit the present application in any form. It should be noted that for those of ordinary skill in the art, without departing from the concept of the present application, several changes and improvements can be made. These all belong to the protection scope of the present application.

[0020] The following will be combined withFigures 1 to 3 A further detailed description is given to a flexible parallel static pressure air thrust bearing of the present application.

[0021] The flexible parallel static pressure air thrust bearing provided by the present invention includes at least three air floating slider modules, namely a first air floating slider module 100, a second air floating slider module 200 and a third air floating slider module 300. An air passage 600 is arranged inside each of the air floating slider modules. Each two adjacent air floating slider modules are movably connected through a flexible connection module 400. As Figure 3 shown, when the flexible parallel static pressure air thrust bearing encounters a convex object during the movement relative to the working surface of the guide rail, since multiple air floating slider modules connected by flexible connection blocks 400 are adopted in the present invention, the vibration generated by each air floating slider module encountering a convexity during the movement is eliminated under the action of the flexible connection block 400 and will not be transmitted to the adjacent air floating slider modules. Therefore, the stability during the movement of the static pressure air thrust bearing can be ensured, and the adaptability to the working surface of the guide rail can be improved.

[0022] Optionally, an air communication pipeline is arranged between adjacent air floating slider modules to realize the intercommunication of compressed air between multiple parallel air floating slider modules, so as to realize a simple air supply mode. It should be noted that the present application is not limited to the air supply mode for each air floating slider module. In a possible embodiment, an independent air inlet can also be arranged for each air floating slider module, without interfering with each other, to ensure the flexibility between the adjacent air floating slider modules. In another possible exemplary embodiment, a part of the air floating slider modules can share an air inlet, and the part of the air floating slider modules are connected by an air communication pipeline.

[0023] In the embodiment provided by the present application, the air outlet holes of the air floating slider module are arranged on the lower surface, a rigid connection module 500 is arranged on the upper surface of the air floating slider module, and the flexible connection module 400 is arranged between the rigid connection module 500 and multiple air floating slider modules. It should be noted that the flexible connection module 400 can be arranged only at the connection between two adjacent air floating slider modules, or can fully cover the upper surfaces of multiple or all air floating slider modules. The present application does not limit this.

[0024] Those skilled in the art will readily think of other implementation schemes of the present application after considering the specification and practicing the invention disclosed herein. The present application aims to cover any variations, uses or adaptive changes of the present application, and these variations, uses or adaptive changes follow the general principles of the present application and include the common general knowledge or conventional technical means in the technical field not disclosed in the present application. The specification and the embodiments are only regarded as exemplary, and the true scope and spirit of the present application are pointed out by the above claims.

[0025] It should be understood that the present application is not limited to the exact structures described above and shown in the drawings, and various modifications and changes can be made without departing from its scope. The scope of the present application is only limited by the appended claims.

[0026] It should be understood that the "plurality" mentioned herein refers to two or more. "And / or" describes the relationship between associated objects and indicates that there can be three relationships. For example, A and / or B can represent three situations: A exists alone, A and B exist simultaneously, and B exists alone. The character " / " generally indicates that the associated objects before and after are in an "or" relationship.

[0027] The above are only the preferred embodiments of the present application and are not intended to limit the present application. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present application shall be included within the protection scope of the present application.

Claims

1. A flexible parallel static pressure air thrust bearing, characterized in that, The thrust bearing includes three air bearing slider modules, and an air passage is arranged inside each air bearing slider module; Wherein, every two adjacent air bearing slider modules are movably connected through a flexible connection module, so as to enhance the adaptability of the air bearing slider assembly to pits and protrusions when moving relative to the working surface of the guide rail; The air outlet holes of the air bearing slider module are arranged on the lower surface, and a rigid connection module is arranged above the upper surface of the air bearing slider module; the flexible connection module is arranged between the rigid connection module and the air bearing slider module; An air communication pipeline is arranged between the adjacent air bearing slider modules to realize the intercommunication of compressed air between multiple parallel air bearing slider modules, so as to realize a simple air supply mode; or, Each air bearing slider module is respectively connected to an air inlet pipeline, and no air communication pipeline is arranged between the adjacent air bearing slider modules to ensure the flexibility between the adjacent air bearing slider modules.

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