Acceleration sensor and acceleration measuring device

Abstract

The application provides an acceleration sensor and an acceleration measuring device. The acceleration sensor comprises a first structure layer and a second structure layer; the two structure layers are oppositely arranged to form an electrification interface, and the two structure layers each comprise a layer structure as the electrification interface, and the layer structure as the electrification interface in any one or both of the two structure layers at least comprises a layer structure with a hollow grid structure; at least a layer structure as an output electrode is included in any one or both of the two structure layers; when one of the two structure layers moves, an electric signal generated between the electrification interfaces is output by the layer structure as the output electrode included in the first structure layer and the second structure layer. The acceleration sensor and the acceleration measuring device provided by the application can not only measure the acceleration in any period according to the requirement of a user, but also can meet the requirement of the user on the accuracy of the measured acceleration by adjusting the width of the hollow and the grid, and the structure and the manufacturing process are simple, the cost is low, and the application is suitable for large-scale industrial production.

Description

Technical Field

[0001] This invention relates to the field of sensing technology, and in particular to an accelerometer and an acceleration measuring device. Background Technology

[0002] Accelerometers are among the most widely used sensors in real life and industrial manufacturing. Existing technologies typically employ piezoelectric, piezoresistive, capacitive, and servo-type accelerometers depending on the specific application requirements.

[0003] However, sensors made using these technologies all require a power source to drive them and often need to use special materials or components, such as piezoelectric materials, piezoresistive materials, and gyroscopes. This results in high cost and complex structure for existing accelerometers. Furthermore, the accuracy of existing accelerometers is fixed, and the accuracy cannot be adjusted as needed when applied to various fields, which limits their application scenarios. In addition, most existing accelerometers can only measure instantaneous or average acceleration, and cannot accurately measure and calculate the magnitude of variable acceleration or acceleration between any two moments.

[0004] Therefore, the existing technology lacks an accelerometer and acceleration measurement device that can measure acceleration in any time period according to user needs, and can meet the user's accuracy requirements for acceleration measurement by adjusting the width of the cutout and grid, without requiring external power supply, with simple structure and manufacturing process, low cost, and suitable for large-scale industrial production. Summary of the Invention

[0005] The purpose of this invention is to address the shortcomings of existing technologies by providing an acceleration sensor and acceleration measurement device that can measure acceleration over any time period according to user needs, and can meet user requirements for acceleration measurement accuracy by adjusting the width of the cutouts and grids. Furthermore, it does not require external power supply, has a simple structure and manufacturing process, is low in cost, and is suitable for large-scale industrial production.

[0006] According to one aspect of the present invention, an accelerometer is provided, comprising: a first structural layer and a second structural layer; wherein the first structural layer and the second structural layer are disposed opposite to each other, and an electrification interface is formed between the first structural layer and the second structural layer, and both the first structural layer and the second structural layer include a layer structure serving as an electrification interface; the layer structure serving as an electrification interface in either or both of the first structural layer and the second structural layer includes at least a layer structure having a perforated grid structure; and the layer structure serving as an output electrode in either or both of the first structural layer and the second structural layer includes at least a layer structure serving as an output electrode; when the first structural layer moves relative to the second structural layer at an applied velocity or when the second structural layer moves relative to the first structural layer at an applied velocity, the electrical signal generated between the first structural layer and the second structural layer is output by the layer structure serving as an output electrode included in the first structural layer and the second structural layer.

[0007] According to another aspect of the present invention, an acceleration measuring device is provided, comprising: the aforementioned acceleration sensor, and a signal processing and analysis module; wherein the signal processing and analysis module is connected to the layer structure of the output electrode in the acceleration sensor, and is used to process and analyze the electrical signal output by the layer structure of the output electrode, and to analyze and calculate the acceleration to be measured based on the processed and analyzed electrical signal.

[0008] The accelerometer and acceleration measuring device provided by this invention comprise a first structural layer and / or a second structural layer, each including a layer structure with a perforated grid structure. Movement between the two structural layers causes periodic changes in the charge generated by friction or induction in the perforated grid structure, resulting in a periodic electrical signal output by the layer structure as an output electrode. The acceleration to be measured is then calculated based on this periodic electrical signal. The accelerometer and acceleration measuring device provided by this invention can not only measure acceleration over any time period according to user needs, but also meet user requirements for accuracy by adjusting the width of the perforations and grid. Furthermore, the accelerometer and acceleration measuring device provided by this invention do not require an external power supply, have a simple structure and manufacturing process, are low in cost, and are suitable for large-scale industrial production. Attached Figure Description

[0009] Figure 1a This is a schematic diagram of the structure of an example of an acceleration sensor provided by the present invention;

[0010] Figure 1b This is another structural schematic diagram of an example one of the acceleration sensors provided by the present invention;

[0011] Figure 1c This is another exploded structural schematic diagram of an example of an acceleration sensor provided by the present invention;

[0012] Figure 2This is a schematic diagram of a second example of the acceleration sensor provided by the present invention;

[0013] Figure 3 This is a schematic diagram of a third example of the acceleration sensor provided by the present invention;

[0014] Figure 4 This is a schematic diagram of the structure of Example 4 of the acceleration sensor provided by the present invention;

[0015] Figure 5 This is a schematic diagram of a structure in which at least one composite electrification component is provided in the hollow area of ​​a layered structure with a hollow grid structure, based on the accelerometer sensor provided in Figure 1 of this invention.

[0016] Figure 6a This is a schematic diagram of a module structure of the acceleration measuring device provided by the present invention;

[0017] Figure 6b A schematic diagram of a module structure of the signal preprocessing module in the acceleration measurement device provided by the present invention;

[0018] Figure 6c This is a schematic diagram of another module structure of the acceleration measuring device provided by the present invention;

[0019] Figure 7a This is a schematic diagram of the structure of the acceleration sensor provided by the present invention;

[0020] Figure 7b This is a schematic diagram of the initial state of the working principle of the acceleration sensor provided by the present invention;

[0021] Figure 7c This is a second-state schematic diagram illustrating the working principle of the accelerometer provided by the present invention;

[0022] Figure 7d A schematic diagram of the third state of the working principle of the acceleration sensor provided by the present invention;

[0023] Figure 7e A fourth-state schematic diagram illustrating the working principle of the accelerometer provided by this invention;

[0024] Figure 7f A fifth-state schematic diagram illustrating the working principle of the accelerometer provided by this invention;

[0025] Figure 8 A schematic diagram of a specific embodiment of the acceleration sensor provided by the present invention;

[0026] Figure 9 An electrical signal test diagram for an embodiment of the accelerometer sensor provided by the present invention;

[0027] Figure 10 This is a schematic diagram showing the relationship between the output voltage and time of an embodiment of the accelerometer provided by the present invention. Detailed Implementation

[0028] To fully understand the purpose, features and effects of the present invention, the implementation of the technical solution of the present invention will be described in detail below with reference to the accompanying drawings, but the present invention is not limited thereto.

[0029] This invention provides an accelerometer, comprising: a first structural layer and a second structural layer. The first and second structural layers are disposed opposite to each other, forming an electrical interface between them. Both the first and second structural layers include a layer structure serving as the electrical interface. The layer structure serving as the electrical interface in either or both of the first and second structural layers includes at least a layer structure with a perforated grid structure. Either or both of the first and second structural layers include at least a layer structure serving as an output electrode. When the first structural layer moves relative to the second structural layer at an applied velocity, or when the second structural layer moves relative to the first structural layer at an applied velocity, the electrical signal generated between the first and second structural layers is output by the layer structure containing the output electrode in both the first and second structural layers.

[0030] To enable those skilled in the art to more clearly understand the acceleration sensor of the present invention, examples one through four are provided below in conjunction with... Figures 1a to 5 The specific structure of the accelerometer sensor of the present invention will be described in detail below. It should be noted that the examples are merely illustrative and should not be construed as limiting the present invention.

[0031] Example 1

[0032] Figure 1a This is a schematic diagram of an example of an acceleration sensor provided by the present invention. Figure 1a As shown, the accelerometer includes a first structural layer 10 and a second structural layer 20.

[0033] The first structural layer 10 includes a first electrode layer 11, and the second structural layer 20 includes a second polymer insulating layer 22. The first electrode layer 11 is the layer structure in the first structural layer 10 that serves as the output electrode, and also serves as the layer structure in the first structural layer 10 that serves as the charging interface; the second polymer insulating layer 22 is the layer structure in the second structural layer 20 that serves as the charging interface; the first electrode layer 11 and the second polymer insulating layer 22 are disposed opposite to each other, and a charging interface is formed between the first electrode layer 11 and the second polymer insulating layer 22; the second polymer insulating layer 22 includes a layer structure with a hollow grid structure.

[0034] Optionally, the accelerometer in Example 1, in addition to the following... Figure 1aThe diagram shows that, in addition to the second polymer insulating layer 22 including only the layer structure with a hollow grid structure, the first electrode layer 11 may also include only the layer structure with a hollow grid structure, or both the first electrode layer 11 and the second polymer insulating layer 22 may include layer structures with hollow grid structures. Those skilled in the art can choose according to actual needs, and no limitation is made here.

[0035] In Example 1, the first electrode layer 11 and the second polymer insulating layer 22 can move in two ways. The first way is that the first electrode layer 11 remains stationary, while the second polymer insulating layer 22 moves relative to the first electrode layer 11 at an applied velocity. The second way is that the second polymer insulating layer 22 remains stationary, while the first electrode layer 11 moves relative to the second polymer insulating layer 22 at an applied velocity. Those skilled in the art can flexibly choose the movement method according to actual needs; no limitation is made here.

[0036] When the first electrode layer 11 moves relative to the second polymer insulating layer 22 at an applied speed or the second polymer insulating layer 22 moves relative to the first electrode layer 11 at an applied speed, the electrical signal generated between the first electrode layer 11 and the second polymer insulating layer 22 is output by the first electrode layer 11.

[0037] In Example 1, since only one first electrode layer 11 is used as an output electrode, during use, it is necessary to select any potential point (such as zero potential point) in the external circuit as another output electrode, so that the external circuit can generate voltage or voltage and current.

[0038] like Figures 1a to 1c As shown, the accelerometer in Example 1 may further include a fixed movable substrate 100. A second polymer insulating layer 22 (i.e., a second structural layer 20) is disposed on the fixed movable substrate 100, and a first electrode layer 11 (i.e., a first structural layer 10) is slidably connected to the fixed movable substrate 100 to move on the second polymer insulating layer 22 (i.e., the second structural layer 20).

[0039] It should be understood that, Figure 1b and Figure 1cThe accelerometer shown is configured such that when the first structural layer 10 moves relative to the second structural layer 20 at an applied velocity, the first structural layer 10 and the second structural layer 20 are positioned on the fixed moving substrate 100. When the second structural layer 20 moves relative to the first structural layer 10 at an applied velocity, the first electrode layer 11 (i.e., the first structural layer 10) is disposed on the fixed moving substrate 100, and the second polymer insulating layer 22 (i.e., the second structural layer 20) moves on the first electrode layer 11 (i.e., the first structural layer 10) by sliding connection with the fixed moving substrate 100.

[0040] Furthermore, such as Figure 1b and Figure 1c As shown, the fixed moving substrate 100 in Example 1 may include at least one guide groove 31 and a substrate 32. The at least one guide groove 31 is located on the substrate 32 in the lateral direction of the second polymer insulating layer 22 (i.e., the second structural layer 20), and the first electrode layer 11 (i.e., the first structural layer 10) is slidably connected to the substrate 32 via the at least one guide groove 31 to move on the second polymer insulating layer 22 (i.e., the second structural layer 20).

[0041] It should be understood that, Figure 1b and Figure 1c The accelerometer shown is configured such that when the first structural layer 10 moves relative to the second structural layer 20 at an applied velocity, the first structural layer 10 and the second structural layer 20 are positioned on the fixed moving substrate 100. When the second structural layer 20 moves relative to the first structural layer 10 at an applied velocity, at least one guide groove 31 is located on the substrate 32 in the side direction of the first electrode layer 11 (i.e., the first structural layer 10), and the second polymer insulating layer 22 (i.e., the second structural layer 20) is slidably connected to the substrate 32 through at least one guide groove 31 to move on the first electrode layer 11 (i.e., the first structural layer 10).

[0042] In addition, such as Figure 1b and Figure 1c As shown, when the fixed movable substrate 100 includes at least one guide groove 31 and substrate 32, the first electrode layer 11 (i.e., the first structural layer 10) may further include at least one guide rail 40. The at least one guide rail 40 is disposed in the at least one guide groove 31, so that the first electrode layer 11 (i.e., the first structural layer 10) is slidably connected to the substrate 32 (i.e., the fixed movable substrate 100); and the shape and size of the at least one guide rail 40 match the shape and size of the at least one guide groove 31.

[0043] It should be understood that, Figure 1b and Figure 1cThe accelerometer shown is configured such that when the first structural layer 10 moves relative to the second structural layer 20 at an applied velocity, the first structural layer 10 is provided with at least one guide rail 40. When the second structural layer 20 moves relative to the first structural layer 10 at an applied velocity, the second polymer insulating layer 22 (i.e., the second structural layer 20) may further include at least one guide rail 40. The at least one guide rail 40 is disposed in at least one guide rail groove 31, allowing the second polymer insulating layer 22 (i.e., the second structural layer 20) to be slidably connected to the substrate 32 (i.e., the fixed movable substrate 100); and the shape and size of the at least one guide rail 40 match the shape and size of the at least one guide rail groove 31.

[0044] It should be noted that the number of at least one guide rail groove 31 and at least one guide rail 40 can be one or more. Those skilled in the art can choose the number of at least one guide rail groove 31 and at least one guide rail 40 according to actual needs, and there is no limitation here. Preferably, the number of at least one guide rail groove 31 is two, and the number of at least one guide rail 40 is the same as the number of at least one guide rail groove 31, which is also two.

[0045] Furthermore, such as Figure 1b and Figure 1c As shown, the fixed movable substrate 100 in Example 1 may further include a structural layer fixing part 33. The structural layer fixing part 33 is disposed on the fixed movable substrate 100 and is used to fix the second polymer insulating layer 22 (i.e., the second structural layer 20) onto the fixed movable substrate 100. Specifically, when the fixed movable substrate 100 includes at least one guide groove 31 and a substrate 32, the structural layer fixing part 33 is disposed on the substrate 32 (i.e., the fixed movable substrate 100) and is used to fix the second polymer insulating layer 22 (i.e., the second structural layer 20) onto the substrate 32 (i.e., the fixed movable substrate 100).

[0046] It should be understood that, Figure 1b and Figure 1c The accelerometer shown is configured such that the second structural layer 20 is positioned on the fixed moving substrate 100 when the first structural layer 10 moves relative to the second structural layer 20 at an applied velocity. When the second structural layer 20 moves relative to the first structural layer 10 at an applied velocity, a structural layer fixing part 33 is disposed on the fixed moving substrate 100 to fix the first electrode layer 11 (i.e., the first structural layer 10) to the fixed moving substrate 100. Specifically, when the fixed moving substrate 100 includes at least one guide groove 31 and a substrate 32, the structural layer fixing part 33 is disposed on the substrate 32 (i.e., the fixed moving substrate 100) to fix the first electrode layer 11 (i.e., the first structural layer 10) to the substrate 32 (i.e., the fixed moving substrate 100).

[0047] Optionally, the accelerometer in Example 1 further includes a reciprocating module (not shown in the figure); the reciprocating module is connected to the first electrode layer 11 (i.e., the first structural layer 10) or the second polymer insulating layer 22 (i.e., the second structural layer 20), and is used to control the first electrode layer 11 (i.e., the first structural layer 10) to move back to the starting position after the first electrode layer 11 (i.e., the first structural layer 10) moves relative to the second structural layer 20 at an applied velocity, or to control the second polymer insulating layer 22 (i.e., the second structural layer 20) to move back to the starting position after the second polymer insulating layer 22 (i.e., the second structural layer 20) moves relative to the first electrode layer 11 (i.e., the first structural layer 10) at an applied velocity.

[0048] Example 2

[0049] Figure 2 This is a schematic diagram of a second example of the acceleration sensor provided by the present invention. Figure 2 As shown, the accelerometer includes a first structural layer 10 and a second structural layer 20.

[0050] The first structural layer 10 includes a first electrode layer 11, and the second structural layer 20 includes a second electrode layer 21 and a second polymer insulating layer 22. The first electrode layer 11 is the layer structure in the first structural layer 10 that serves as an output electrode, and also serves as the layer structure in the first structural layer 10 that serves as a charging interface; the second electrode layer 21 is disposed on the surface of the second polymer insulating layer 22 away from the first electrode layer 11, and the second electrode layer 21 is the layer structure in the second structural layer 20 that serves as an output electrode; the second polymer insulating layer 22 is the layer structure in the second structural layer 20 that serves as a charging interface; a charging interface is formed between the first electrode layer 11 and the second polymer insulating layer 22; the second polymer insulating layer 22 includes a layer structure with a perforated grid structure.

[0051] Optionally, the accelerometer in Example 2, in addition to the following... Figure 2 The diagram shows that, in addition to the second polymer insulating layer 22 including only the layer structure with a hollow grid structure, the first electrode layer 11 may also include only the layer structure with a hollow grid structure, or both the first electrode layer 11 and the second polymer insulating layer 22 may include layer structures with hollow grid structures. Those skilled in the art can choose according to actual needs, and no limitation is made here.

[0052] In Example 2, the first electrode layer 11, the second electrode layer 21, and the second polymer insulating layer 22 can move in two ways. The first way is that the first electrode layer 11 remains stationary, while the second electrode layer 21 and the second polymer insulating layer 22 move relative to the first electrode layer 11 at an applied velocity. The second way is that the second electrode layer 21 and the second polymer insulating layer 22 remain stationary, while the first electrode layer 11 moves relative to the second polymer insulating layer 22 and the second electrode layer 21 at an applied velocity. Those skilled in the art can flexibly choose the movement method according to actual needs; no limitation is made here.

[0053] When the first electrode layer 11 moves relative to the second polymer insulating layer 22 and the second electrode layer 21 at an applied speed, or when the second electrode layer 21 and the second polymer insulating layer 22 move relative to the first electrode layer 11 at an applied speed, the electrical signal generated between the first electrode layer 11 and the second polymer insulating layer 22 is output by the first electrode layer 11 and / or the second electrode layer 21.

[0054] It should be noted that there are three ways to output the electrical signal generated between the first electrode layer 11 and the second polymer insulating layer 22. The first output method is: only the first electrode layer 11 is used as an output electrode. In this case, during use, any potential point (such as zero potential point) in the external circuit needs to be selected as the other output electrode, thereby generating voltage or voltage and current in the external circuit. The second output method is: only the second electrode layer 21 is used as an output electrode. In this case, any potential point (such as zero potential point) in the external circuit needs to be selected as the other output electrode, thereby generating voltage or voltage and current in the external circuit. The third output method is: both the first electrode layer 11 and the second electrode layer 21 are used as output electrodes. In this case, during use, the first electrode layer 11 and the second electrode layer 21 are directly connected to the external circuit, thereby generating voltage or voltage and current in the external circuit.

[0055] Furthermore, the accelerometer in Example 2 may also include any one or more of the following: a fixed moving substrate, at least one guide rail groove and substrate and structural layer fixing part provided on the fixed moving substrate, at least one guide rail provided on the first structural layer 10 or the second structural layer 20, and a reciprocating module. The description of the fixed moving substrate, at least one guide rail groove and substrate and structural layer fixing part, at least one guide rail provided on the first structural layer 10 or the second structural layer 20, and the reciprocating module that the accelerometer in Example 2 may include is the same as that in Example 1 regarding the fixed moving substrate 100, the at least one guide rail groove and substrate and structural layer fixing part provided on the fixed moving substrate 10, and the reciprocating module. The description of the fixed moving substrate, the base plate 32 and the structural layer fixing part 33, the at least one guide rail 40 provided on the first structural layer 10 or the second structural layer 20, and the reciprocating module is similar. It is only necessary to replace the first structural layer 10 and the second structural layer 20 in Example 1 with the layer structure included in the first structural layer 10 and the second structural layer 20 in Example 2. This is the description of the fixed moving substrate, the at least one guide rail groove and the base plate and structural layer fixing part provided on the fixed moving substrate, the at least one guide rail provided on the first structural layer 10 or the second structural layer 20, and the reciprocating module that the acceleration sensor in Example 2 may include. It will not be repeated here.

[0056] Example 3

[0057] Figure 3 This is a schematic diagram of a third example of the acceleration sensor provided by the present invention. Figure 3 As shown, the accelerometer includes a first structural layer 10 and a second structural layer 20.

[0058] The first structural layer 10 includes a first electrode layer 11 and a first polymer insulating layer 12, and the second structural layer 20 includes a second polymer insulating layer 22. The first electrode layer 11 is disposed on the surface of the first polymer insulating layer 12 away from the second polymer insulating layer 22. The first electrode layer 11 is the layer structure in the first structural layer 10 that serves as the output electrode. The first polymer insulating layer 12 is the layer structure in the first structural layer 10 that serves as the charging interface. The second polymer insulating layer 22 is the layer structure in the second structural layer 20 that serves as the charging interface. A charging interface is formed between the first polymer insulating layer 12 and the second polymer insulating layer 22. The second polymer insulating layer 22 includes a layer structure with a perforated grid structure.

[0059] Optionally, the accelerometer in Example 3, in addition to the following... Figure 3The second polymer insulating layer 22 may include only the layer structure with a perforated grid structure, or only the first polymer insulating layer 12 may include the layer structure with a perforated grid structure. Alternatively, both the first polymer insulating layer 12 and the second polymer insulating layer 22 may include the layer structure with a perforated grid structure. Those skilled in the art can choose according to actual needs, and no limitation is made here.

[0060] In Example 3, the first electrode layer 11, the first polymer insulating layer 12, and the second polymer insulating layer 22 can move in two ways. The first way is that the first electrode layer 11 and the first polymer insulating layer 12 remain stationary, while the second polymer insulating layer 22 moves relative to the first polymer insulating layer 12 and the first electrode layer 11 at an applied velocity. The second way is that the second polymer insulating layer 22 remains stationary, while the first electrode layer 11 and the first polymer insulating layer 12 move relative to the second polymer insulating layer 22 at an applied velocity. Those skilled in the art can flexibly choose the movement method according to actual needs; no limitation is made here.

[0061] When the first electrode layer 11 and the first polymer insulating layer 12 move relative to the second polymer insulating layer 22 at an applied speed, or when the second polymer insulating layer 22 moves relative to the first polymer insulating layer 12 and the first electrode layer 11 at an applied speed, the electrical signal generated between the first polymer insulating layer 12 and the second polymer insulating layer 22 is output by the first electrode layer 11.

[0062] It should be noted that in Example 3, since only one first electrode layer 11 is used as an output electrode, during use, any potential point (such as zero potential point) in the external circuit needs to be selected as another output electrode so that the external circuit can generate voltage or voltage and current.

[0063] Furthermore, the accelerometer in Example 3 may also include any one or more of the following: a fixed moving substrate, at least one guide rail groove and substrate and structural layer fixing part provided on the fixed moving substrate, at least one guide rail provided on the first structural layer 10 or the second structural layer 20, and a reciprocating module. The description of the fixed moving substrate, at least one guide rail groove and substrate and structural layer fixing part provided on the fixed moving substrate, at least one guide rail provided on the first structural layer 10 or the second structural layer 20, and the reciprocating module that the accelerometer in Example 3 may include is the same as that in Example 1 regarding the fixed moving substrate 100, the at least one guide rail groove and substrate and structural layer fixing part provided on the fixed moving substrate 10, and the reciprocating module. The description of the fixed moving substrate, the base plate 32 and the structural layer fixing part 33, the at least one guide rail 40 provided on the first structural layer 10 or the second structural layer 20, and the reciprocating module is similar. It is only necessary to replace the first structural layer 10 and the second structural layer 20 in Example 1 with the layer structure included in the first structural layer 10 and the second structural layer 20 in Example 3. This is the description of the fixed moving substrate, the at least one guide rail groove and the base plate and structural layer fixing part provided on the fixed moving substrate, the at least one guide rail provided on the first structural layer 10 or the second structural layer 20, and the reciprocating module that the acceleration sensor in Example 3 may include. It will not be repeated here.

[0064] Example 4

[0065] Figure 4 This is a schematic diagram of a fourth example of the acceleration sensor provided by the present invention. Figure 4 As shown, the accelerometer includes a first structural layer 10 and a second structural layer 20.

[0066] The first structural layer 10 includes a first electrode layer 11 and a first polymer insulating layer 12, and the second structural layer 20 includes a second electrode layer 21 and a second polymer insulating layer 22. The first electrode layer 11 is disposed on the surface of the first polymer insulating layer 12 away from the second polymer insulating layer 22, and the first electrode layer 11 serves as an output electrode in the first structural layer 10; the first polymer insulating layer 12 serves as a charging interface in the first structural layer 10; the second electrode layer 21 is disposed on the surface of the second polymer insulating layer 22 away from the first polymer insulating layer 12, and the second electrode layer 21 serves as an output electrode in the second structural layer 20; the second polymer insulating layer 22 serves as a charging interface in the second structural layer 20; a charging interface is formed between the first polymer insulating layer 12 and the second polymer insulating layer 22; the second polymer insulating layer 22 includes a layer structure with a perforated grid structure.

[0067] Optionally, the accelerometer in Example 4, in addition to the following... Figure 4The second polymer insulating layer 22 may include only the layer structure with a perforated grid structure, or only the first polymer insulating layer 12 may include the layer structure with a perforated grid structure. Alternatively, both the first polymer insulating layer 12 and the second polymer insulating layer 22 may include the layer structure with a perforated grid structure. Those skilled in the art can choose according to actual needs, and no limitation is made here.

[0068] In Example 4, the first electrode layer 11 and the first polymer insulating layer 12, and the second electrode layer 21 and the second polymer insulating layer 22 can move in two ways. The first way is that the first electrode layer 11 and the first polymer insulating layer 12 remain stationary, while the second electrode layer 21 and the second polymer insulating layer 22 move relative to the first polymer insulating layer 12 and the first electrode layer 11 at an applied velocity. The second way is that the second electrode layer 21 and the second polymer insulating layer 22 remain stationary, while the first electrode layer 11 and the first polymer insulating layer 12 move relative to the second polymer insulating layer 22 and the second electrode layer 21 at an applied velocity. Those skilled in the art can flexibly choose the movement mode according to actual needs; no limitation is made here.

[0069] When the first electrode layer 11 and the first polymer insulating layer 12 move relative to the second polymer insulating layer 22 and the second electrode layer 21 at an applied velocity, or when the second electrode layer 21 and the second polymer insulating layer 22 move relative to the first polymer insulating layer 12 and the first electrode layer 11 at an applied velocity, the electrical signal generated between the first polymer insulating layer 12 and the second polymer insulating layer 22 is output by the first electrode layer 11 and / or the second electrode layer 21.

[0070] It should be noted that there are three ways to output the electrical signal generated between the first polymer insulating layer 12 and the second polymer insulating layer 22. The first output method is: only one first electrode layer 11 is used as an output electrode. In this case, during use, any potential point (such as zero potential point) in the external circuit needs to be selected as the other output electrode, thereby generating voltage or voltage and current in the external circuit. The second output method is: only one second electrode layer 21 is used as an output electrode. In this case, any potential point (such as zero potential point) in the external circuit needs to be selected as the other output electrode, thereby generating voltage or voltage and current in the external circuit. The third output method is: both the first electrode layer 11 and the second electrode layer 21 are used as output electrodes. In this case, during use, the first electrode layer 11 and the second electrode layer 21 are directly connected to the external circuit, thereby generating voltage or voltage and current in the external circuit.

[0071] Furthermore, the accelerometer in Example 4 may also include any one or more of the following: a fixed moving substrate, at least one guide rail groove and substrate and structural layer fixing part provided on the fixed moving substrate, at least one guide rail provided on the first structural layer 10 or the second structural layer 20, and a reciprocating module. The description of the fixed moving substrate, at least one guide rail groove and substrate and structural layer fixing part provided on the fixed moving substrate, at least one guide rail provided on the first structural layer 10 or the second structural layer 20, and the reciprocating module that the accelerometer in Example 4 may include is the same as that in Example 1 regarding the fixed moving substrate 100, the at least one guide rail groove and substrate and structural layer fixing part provided on the fixed moving substrate 10, and the reciprocating module. The description of the fixed moving substrate, the base plate 32 and the structural layer fixing part 33, the at least one guide rail 40 provided on the first structural layer 10 or the second structural layer 20, and the reciprocating module is similar. It is only necessary to replace the first structural layer 10 and the second structural layer 20 in Example 1 with the layer structure included in the first structural layer 10 and the second structural layer 20 in Example 4. This is the description of the fixed moving substrate, the at least one guide rail groove and the base plate and structural layer fixing part provided on the fixed moving substrate, the at least one guide rail provided on the first structural layer 10 or the second structural layer 20, and the reciprocating module that the acceleration sensor in Example 4 may include. It will not be repeated here.

[0072] In the examples described above, the layer structures serving as the electrification interface in the first structural layer 10 and the second structural layer 20 can be in contact with each other or have an electrification gap. Those skilled in the art can choose the appropriate gap based on actual needs, and no limitation is imposed here. However, it should be noted that the electrification gap between the first structural layer 10 and the second structural layer 20 must ensure that both layers can generate an electrical signal. Furthermore, depending on the materials used in the first structural layer 10 and the second structural layer 20, those skilled in the art can flexibly select the size of the electrification gap based on actual needs, and no limitation is imposed here.

[0073] When the layer structure serving as the charging interface in the first structural layer 10 and the layer structure serving as the charging interface in the second structural layer 20 are in contact with each other, when the first structural layer 10 moves relative to the second structural layer 20 at an applied speed or the second structural layer 20 moves relative to the first structural layer 10 at an applied speed, an electrical signal is generated between the layer structure serving as the charging interface in the first structural layer 10 and the layer structure serving as the charging interface in the second structural layer 20 through contact friction. This electrical signal is output by the layer structure serving as the output electrode included in the first structural layer 10 and the second structural layer 20.

[0074] In addition, to improve the intensity of the electrical signal generated by contact friction in this case, a protrusion array structure can be provided on the surface of at least one of the two contacting layer structures. The protrusion array structure in this invention adopts the protrusion array structure in the prior art, and there is no limitation on the type and number of depressions and protrusions included in the protrusion array structure. Those skilled in the art can flexibly set the type and number of depressions and protrusions included in the protrusion array structure, which is not limited here. For example, the protrusion array structure is composed of multiple protrusions arranged in a rectangular or rhomboid pattern, or multiple strip structures arranged geometrically on both sides, four corners, four edges, or the entire surface of at least one surface. Among them, the shape of the protrusions can be cylindrical, square prism, or square pyramid, etc.; the strip structures can be arranged in a grid, cross, zebra stripe, cross, or square pattern.

[0075] When there is an electrification gap between the layer structure serving as the electrification interface in the first structural layer 10 and the layer structure serving as the electrification interface in the second structural layer 20, when the first structural layer 10 moves relative to the second structural layer 20 at an applied speed or the second structural layer 20 moves relative to the first structural layer 10 at an applied speed, an electrical signal is generated between the layer structure serving as the electrification interface in the first structural layer 10 and the layer structure serving as the electrification interface in the second structural layer 20 through induction. This electrical signal is output by the layer structure serving as the output electrode included in the first structural layer 10 and the second structural layer 20.

[0076] Optionally, in this invention, the layer structure with the perforated grid structure further includes at least one composite electrifying component. The at least one composite electrifying component is correspondingly disposed in the perforated area of ​​the layer structure with the perforated grid structure. The shape and size of each composite electrifying component match the shape and size of the perforated area in the corresponding layer structure with the perforated grid structure, and at least one composite electrifying component is made of a different material than the layer structure with the perforated grid structure. Specifically, as shown... Figure 5 As shown, at least one composite electrifying component 30 is provided in the hollow area of ​​the layer structure with a hollow grid structure. The shape and size of each composite electrifying component 30 match the shape and size of the hollow area in the corresponding layer structure with a hollow grid structure. Moreover, at least one composite electrifying component 30 is made of a different material than the layer structure with a hollow grid structure.

[0077] It should be understood that, Figure 5 Is Figure 1aBased on the accelerometer sensor shown, at least one composite charging component 30 is provided in the hollowed-out region of the layer structure with a hollowed-out grid structure included in the second polymer insulating layer 22. Of course, those skilled in the art can also provide at least one composite charging component 30 in the hollowed-out region of the layer structure with a hollowed-out grid structure included in the first structural layer 10 and the second structural layer 20 according to actual needs, which is not limited here. For example, it can be... Figures 2 to 4 Based on any of the acceleration sensors shown, at least one composite electrification component 30 is provided in the hollowed-out area of ​​the layer structure with a hollowed-out grid structure included in the second polymer insulating layer 22. The structures of other acceleration sensors in this invention that are provided with at least one composite electrification component 30 are similar and will not be described in detail here.

[0078] The number of at least one composite electrifying component 30 can be one or more, and those skilled in the art can choose according to actual needs, which is not limited here. When the number of at least one composite electrifying component 30 is one, the number of hollow areas in the layer structure with the hollow grid structure should be greater than or equal to the number of at least one composite electrifying component 30. When the number of at least one composite electrifying component 30 is multiple, the number of at least one composite electrifying component 30 should be less than or equal to the number of hollow areas in the layer structure with the hollow grid structure. Specifically, when the number of composite electrifying components 30 is less than the number of hollow areas in the layer structure with the hollow grid structure, one composite electrifying component 30 is provided in one hollow area of ​​the layer structure with the hollow grid structure, and each composite electrifying component 30 can be set in any hollow area of ​​the layer structure with the hollow grid structure; when the number of composite electrifying components 30 is equal to the number of hollow areas in the layer structure with the hollow grid structure, the composite electrifying components 30 are set in a one-to-one correspondence with the hollow areas in the layer structure with the hollow grid structure.

[0079] Optionally, the materials of the first electrode layer 11 and / or the second electrode layer 21 in this invention can be non-metallic conductive materials or metallic conductive materials; wherein, the non-metallic conductive materials can be indium tin oxide, graphene, or silver nanowire films; the metallic conductive materials can be gold, silver, platinum, palladium, aluminum, nickel, copper, titanium, chromium, tin, iron, manganese, molybdenum, tungsten or vanadium, aluminum alloys, titanium alloys, magnesium alloys, beryllium alloys, copper alloys, zinc alloys, manganese alloys, nickel alloys, lead alloys, tin alloys, cadmium alloys, bismuth alloys, indium alloys, gallium alloys, tungsten alloys, molybdenum alloys, niobium alloys, or tantalum alloys. Furthermore, the materials of the first electrode layer 11 can be the same as or different from the materials of the second electrode layer 21; those skilled in the art can choose according to actual needs, and this is not limited here. In one optional specific embodiment, the material of the first electrode layer 11 is copper, and the material of the second electrode layer 21 is aluminum.

[0080] Optionally, the materials of the first polymer insulating layer 12, the second polymer insulating layer 22, and / or at least one composite electrifying component 30 in this invention may be selected from any one of polydimethylsiloxane, polyimide, polyvinylidene fluoride, aniline formaldehyde resin, polyoxymethylene, ethyl cellulose, polyamide, melamine formaldehyde, polyethylene glycol succinate, cellulose, cellulose acetate, polyethylene adipate, diallyl phthalate, fiber (recycled) sponge, polyurethane elastomer, styrene-propylene copolymer, styrene-butadiene copolymer, synthetic fiber, polymethyl methacrylate, polyvinyl alcohol, polyvinyl alcohol, polyester, polyisobutylene, polyurethane flexible sponge, polyethylene terephthalate, polyvinyl butyral, formaldehyde phenol, chloroprene rubber, butadiene-propylene copolymer, natural rubber, polyacrylonitrile, acrylonitrile chloride, and polyvinylpropene carbonate.

[0081] The material of the first polymer insulating layer 12 can be the same as or different from the material of the second polymer insulating layer 22. Those skilled in the art can choose according to actual needs, and this is not limited here. Preferably, to improve the intensity of the generated electrical signal, the materials of the first polymer insulating layer 12 and the second polymer insulating layer 22 are different; more preferably, the materials of the first polymer insulating layer 12 and the second polymer insulating layer 22 have a significant difference in polarity in the triboelectric electrode sequence to improve the intensity of the generated electrical signal. In an optional specific embodiment, the material of the first polymer insulating layer 12 is polyvinylidene fluoride, and the material of the second polymer insulating layer 22 is polyethylene terephthalate.

[0082] Those skilled in the art can select the material of the fixed movable substrate, the at least one guide rail groove provided on the fixed movable substrate, the substrate and structural layer fixing part, and the at least one guide rail provided on the first structural layer 10 or the second structural layer 20 according to actual needs, without limitation. For example, the fixed movable substrate can be an acrylic sheet.

[0083] To measure acceleration more accurately and simplify the calculation method, it is preferable that the width of each hollow region in the layer structure with the hollow grid structure of the present invention is equal to the width of each grid region. In a more preferred embodiment, the width of each hollow region in the layer structure with the hollow grid structure of the present invention is equal to the width of each grid region and the length of the moving layer structure (first structural layer 10 or second structural layer 20). Those skilled in the art can also select the number of hollow regions in the layer structure with the hollow grid structure of the present invention according to actual needs, which is not limited here.

[0084] Figure 6aThis is a schematic diagram of a module structure of the acceleration measuring device provided by the present invention. Figure 6a As shown, the present invention also provides an acceleration measurement device, including: an acceleration sensor 50 and a signal processing and analysis module 51; wherein, the acceleration sensor 50 is the acceleration sensor in the above examples; the signal processing and analysis module 51 is connected to the layer structure of the output electrode of the acceleration sensor 50, and is used to process and analyze the electrical signal output by the layer structure of the output electrode of the acceleration sensor 50, and to analyze and calculate the acceleration to be measured based on the processed and analyzed electrical signal.

[0085] Optionally, such as Figure 6a As shown, the signal processing and analysis module 51 includes a signal preprocessing module 52 and a central control module 53. The signal preprocessing module 52 is connected to the layered structure of the output electrodes of the accelerometer 50 and is used to preprocess the electrical signals output from the layered structure of the output electrodes of the accelerometer 50. The central control module 53 is connected to the signal preprocessing module 52 and is used to analyze and calculate the acceleration to be measured based on the electrical signals output by the signal preprocessing module 52.

[0086] Optionally, such as Figure 6a and 6b As shown, the signal preprocessing module 52 further includes: a rectification module 521, an amplification module 522, a filtering module 523, and an analog-to-digital conversion module 524. The rectification module 521 is connected to the layered structure of the output electrodes of the accelerometer 50 and is used to rectify the electrical signal output from the layered structure of the output electrodes of the accelerometer 50. The amplification module 522 is connected to the rectification module 521 and is used to amplify the electrical signal output by the rectification module 521. The filtering module 523 is connected to the amplification module 522 and is used to filter out interference noise in the electrical signal output by the amplification module 522. The analog-to-digital conversion module 524 is connected to the filtering module 523 and is used to convert the analog electrical signal output by the filtering module 523 into a digital electrical signal and output it to the central control module 53.

[0087] It should be noted that the aforementioned rectifier module 521, amplification module 522, filtering module 523, and analog-to-digital conversion module 524 are optional modules, and those skilled in the art can select them according to actual needs; no limitation is made here. For example, if rectification is not required, the rectifier module 521 can be omitted, and the layer structure of the output electrode of the accelerometer 50 can be directly connected to the amplification module 522, and so on; further details are omitted here.

[0088] Optionally, such as Figure 6cAs shown, the acceleration measuring device provided by the present invention further includes an alarm module 54. The alarm module 54 is connected to the central control module 53 and is used to trigger an alarm based on an alarm control signal sent by the central control module 53. At this time, the central control module 53 is also used to generate an alarm control signal based on the calculated acceleration to be measured.

[0089] The central control module 53 generates an alarm control signal based on the calculated acceleration to be measured as follows: Those skilled in the art can set a preset acceleration threshold in the central control module 53. When the magnitude of the calculated acceleration to be measured is greater than or equal to the preset acceleration threshold, an alarm control signal is generated and output to the alarm module 54; conversely, when the magnitude of the acceleration to be measured is less than the preset acceleration threshold, the central control module 53 does not generate an alarm control signal. Those skilled in the art can set the preset acceleration threshold and other judgment conditions according to actual needs; these are not limited here.

[0090] Optionally, the alarm module 54 may employ a sound alarm module and / or a light alarm module as known in the prior art. Those skilled in the art may choose according to actual needs, and no limitation is made here.

[0091] The specific method by which the central control module 53 in the acceleration measuring device provided by the present invention analyzes and calculates the acceleration to be measured is as follows:

[0092] In the central control module 53, the width of each hollow area and each grid area in the layer structure with hollow grid structure is preset to a preset width. The sum of the widths of adjacent hollow areas and grid areas is calculated and this sum of widths is used as the movement distance of a cycle.

[0093] Based on the electrical signal output by the signal preprocessing module 52, the time elapsed for each cycle is analyzed and calculated.

[0094] Substituting the distance traveled in one cycle and the time elapsed in each cycle into the velocity formula v = s / t, we can analyze and calculate the average velocity in each cycle, where v is the average velocity in one cycle, s is the distance traveled in one cycle, and t is the time elapsed in one cycle.

[0095] Find the corresponding initial average velocity period and final average velocity period based on the acceleration to be measured, and obtain the average velocity corresponding to the initial average velocity period and final average velocity period respectively.

[0096] Based on the time elapsed for each cycle obtained from the analysis and calculation, calculate the time elapsed from the initial average velocity cycle to the final average velocity cycle.

[0097] Substituting the average velocity corresponding to the initial average velocity period, the average velocity corresponding to the final average velocity period, and the time elapsed from the initial average velocity period to the final average velocity period into the acceleration formula a = (v / t) t -v0) / t', the acceleration to be measured is obtained through analysis and calculation, where a is the acceleration to be measured, v t v0 is the average velocity corresponding to the final average velocity period, v0 is the average velocity corresponding to the initial average velocity period, and t' is the time elapsed from the initial average velocity period to the final average velocity period.

[0098] To enable those skilled in the art to more clearly understand the working principle of the acceleration sensor in the acceleration sensor and acceleration measuring device of the present invention generating periodic electrical signals, the following describes... Figures 7a to 7f The illustrated accelerometer sensor provides a detailed description of the accelerometer sensor and acceleration measuring device of the present invention. It should be noted that the embodiments are merely illustrative and should not be construed as limiting the invention.

[0099] Figure 7a This is a schematic diagram of the structure of the acceleration sensor provided by the present invention. Figure 7a As shown, the first structural layer 10 includes a first polymer insulating layer 12, and the second structural layer 20 includes a second electrode layer 21 and a second polymer insulating layer 22. The first polymer insulating layer 12 is a layer structure in the first structural layer 10 that serves as a charging interface. The second electrode layer 21 is disposed on the surface of the second polymer insulating layer 22 away from the first polymer insulating layer 12, and the second electrode layer 21 is a layer structure in the second structural layer 20 that serves as an output electrode. The second polymer insulating layer 22 is a layer structure in the second structural layer 20 that serves as a charging interface. There is a charging gap between the first polymer insulating layer 12 and the second polymer insulating layer 22, and a charging interface is formed between the first polymer insulating layer 12 and the second polymer insulating layer 22. The second polymer insulating layer 22 has a hollow grid structure.

[0100] The length of the first polymer insulating layer 12 is L, and the lengths of the second electrode layer 21 and the second polymer insulating layer 22 are both 6L. The width of each hollow area and each grid area in the hollow grid structure of the second polymer insulating layer 22 is equal to L. The second electrode layer 21 and the second polymer insulating layer 22 are fixed, and the first polymer insulating layer 12 moves relative to the second polymer insulating layer 22 and the second electrode layer 21 at an applied speed. The second electrode layer 21 (i.e., the Vout terminal) is grounded through the load R, and the electrical signal generated between the first polymer insulating layer 12 and the second polymer insulating layer 22 is output by the second electrode layer 21.

[0101] according to Figure 7a The accelerometer shown, taking the first polymer insulating layer 12 and the second polymer insulating layer 22 as examples, where the surface of the first polymer insulating layer 12 forming the electrification interface carries a negative charge, while the surface of the second polymer insulating layer 22 forming the electrification interface carries a positive charge, operates on the following principle to generate periodic electrical signals:

[0102] Figure 7b This is a schematic diagram illustrating the initial state of the working principle of the accelerometer provided by the present invention. Figure 7b As shown, the first grid regions of the first polymer insulating layer 12 and the second polymer insulating layer 22 are completely aligned, forming an electrification interface between them. Due to the difference in polarity between the materials of the first polymer insulating layer 12 and the second polymer insulating layer 22 in the triboelectric electrode sequence, according to the principles of charge induction and charge balance, the surface of the first polymer insulating layer 12 forming the electrification interface carries a negative charge, while the surface of the second polymer insulating layer 22 forming the electrification interface and the surface where the second electrode layer 21 is located respectively carry positive and negative charges. The surface of the second electrode layer 21 carries a positive charge, and the number of positive and negative charges on the aforementioned surfaces is equal. It should be noted that, due to... Figure 7b The accelerometer shown is in a state of charge balance. Although its surface has positive and negative charges, from the perspective of macroscopic measurement, there is no electrical signal output in this initial state, that is, the magnitude of the electrical signal is 0. In other words, there is no electrical signal in the external circuit formed by the second electrode layer 21 grounded through the load R.

[0103] Figure 7c This is a second-state schematic diagram illustrating the working principle of the accelerometer provided by the present invention. Figure 7cAs shown, when the first polymer insulating layer 12 moves at an applied velocity relative to the second polymer insulating layer 22 and the second electrode layer 21 from a distance of 0 (excluding 0) to L (excluding L), the area opposite to the first grid region of the first polymer insulating layer 12 and the second polymer insulating layer 22 gradually decreases. During this process, according to the principles of charge induction and charge balance, negative charges (i.e., electrons) flow from the ground terminal of the external circuit to the second electrode layer 21 through the load R. That is, there is a positive electrical signal output between the second electrode layer 21 and the ground terminal. This positive electrical signal initially increases gradually, reaching its maximum peak value when the first polymer insulating layer 12 moves to L / 2. Then, as the first polymer insulating layer 12 moves from L / 2 to L, the positive electrical signal gradually decreases from its maximum peak value. The description of the area opposite to the first grid region of the first polymer insulating layer 12 and the second polymer insulating layer 22 is consistent with... Figure 7b The difference in the description lies in the fact that the positive and negative charges induced on the surface gradually decrease; other descriptions can be found by referring to [the previous one]. Figure 7b The description will not be repeated here.

[0104] Figure 7d This is a third-state schematic diagram illustrating the working principle of the accelerometer provided by the present invention. Figure 7d As shown, when the first polymer insulating layer 12 moves at an applied speed relative to the second polymer insulating layer 22 and the second electrode layer 21 at a distance equal to L, the first polymer insulating layer 12 and the first grid region of the second polymer insulating layer 22 are completely misaligned (i.e., there is no overlap in the vertical projection) and are completely aligned with the first hollow region of the second polymer insulating layer 22. At this time, no induced charge is generated on the two surfaces forming the charging interface and other surfaces. In other words, there is no electrical signal output from the second electrode layer 21 and the ground terminal.

[0105] Figure 7e This is a fourth-state schematic diagram illustrating the working principle of the accelerometer provided by the present invention. (See diagram below.) Figure 7eAs shown, when the first polymer insulating layer 12 moves at an applied speed relative to the second polymer insulating layer 22 and the second electrode layer 21 from a distance L (excluding L) to 2L (excluding 2L), the area opposite to the second grid region of the first polymer insulating layer 12 and the second polymer insulating layer 22 gradually increases. During this process, according to the principles of charge induction and charge balance, negative charges (i.e., electrons) flow from the second electrode layer 21 through the load R to the ground terminal of the external circuit. That is, there is a negative electrical signal output between the second electrode layer 21 and the ground terminal. This negative electrical signal initially increases gradually, reaching its maximum negative peak when the first polymer insulating layer 12 moves to 3L / 2. Then, as the first polymer insulating layer 12 moves from 3L / 2 to 2L, the negative electrical signal gradually decreases from its maximum negative peak. The description of the area opposite to the first grid region of the first polymer insulating layer 12 and the second polymer insulating layer 22 is consistent with... Figure 7b The difference in the description lies in the fact that the positive and negative charges induced on the surface gradually increase; other descriptions can be found by referring to [the previous one]. Figure 7b The description will not be repeated here.

[0106] Figure 7f This is a fifth-state schematic diagram illustrating the working principle of the accelerometer provided by the present invention. (See diagram below.) Figure 7f As shown, when the first polymer insulating layer 12 moves a distance of 2L relative to the second polymer insulating layer 22 and the second electrode layer 21 at the applied velocity, the second grid region of the first polymer insulating layer 12 and the second polymer insulating layer 22 are completely aligned. At this time, although the two surfaces forming the electrostatic interface and other surfaces induce an electrostatic flux, the second grid region of the first polymer insulating layer 12 and the second polymer insulating layer 22 are completely aligned. Figure 7b The same positive and negative charges exist, but due to the principle of charge balance, there is no electrical signal output in the external circuit formed by the second electrode layer 21 being grounded through the load R.

[0107] According to the above Figures 7b to 7f As described in the state description, the first polymer insulating layer 12 moves a distance of 2L from its initial state, which constitutes one cycle. The process of the first polymer insulating layer 12 continuing to move relative to the second polymer insulating layer 22 and the second electrode layer 21 is the same as described above and will not be repeated here. Therefore, there will be a periodic electrical signal output between the second electrode layer 21 and the ground terminal.

[0108] To enable those skilled in the art to more clearly understand the specific usage of the accelerometer sensor and acceleration measuring device of the present invention, the following two specific embodiments provide a detailed description of the accelerometer sensor and acceleration measuring device of the present invention. It should be noted that the embodiments are merely illustrative and should not be construed as limiting the present invention.

[0109] The accelerometer used in Examples 1 and 2 below is... Figure 8 The accelerometer shown is related to Figure 7a The difference in the accelerometer shown is that it also includes a first electrode layer 11, which can serve as an output electrode, but its operating principle for generating periodic electrical signals is the same. Figures 7a to 7f The accelerometers shown operate on the same principle as the periodic electrical signals they generate, therefore, they will not be described in detail below. Figure 8 The structure of the accelerometer and the working principle of generating periodic electrical signals are shown.

[0110] Example 1

[0111] In Example 1, the first electrode layer 11 is made of aluminum, the first polymer insulating layer 12 is made of polyethylene terephthalate (PET), the second electrode layer 21 is made of copper, and the second polymer insulating layer 22 is made of polyvinylidene fluoride (PVDF). The lengths of both the first electrode layer 11 and the first polymer insulating layer 12 are L = 10 mm, and the lengths of both the second electrode layer 21 and the second polymer insulating layer 22 are 6L = 60 mm. The width of each hollow area and each grid area in the hollow grid structure of the second polymer insulating layer 22 is equal to L = 10 mm.

[0112] Will Figure 8 The first electrode layer 11 and the second electrode layer 21 in the accelerometer shown are respectively connected to the negative and positive terminals of the digital oscilloscope. The first electrode layer 11 and the first polymer insulating layer 12 are moved relative to the second polymer insulating layer 22 and the second electrode layer 21 at an applied velocity. After measurement, the following results are obtained: Figure 9 The test chart shown is used to obtain... Figure 10 The diagram shows the relationship between the output voltage and time. The specific analysis and calculation process is as follows:

[0113] according to Figure 9 and Figure 10 The time elapsed for each cycle was calculated and analyzed. In this embodiment, the time elapsed for the first cycle was T1 = t1 - t0 = 40ms, the time elapsed for the second cycle was T2 = t2 - t1 = 60ms, and the time elapsed for the third cycle was T3 = t3 - t2 = 75ms.

[0114] Substituting the distance traveled in one cycle and the time elapsed in each cycle into the velocity formula v = s / t, the average velocity within each cycle is calculated. In this embodiment, the average velocity in the first cycle is v1 = 2L / T1 = 2L / (t1-t0) = 20mm / 40ms = 0.5m / s, the average velocity in the second cycle is v2 = 2L / T2 = 2L / (t2-t1) = 20mm / 60ms = 0.33m / s, and the average velocity in the third cycle is v3 = 2L / T3 = 2L / (t3-t2) = 20mm / 75ms = 0.26m / s.

[0115] The initial average velocity period and the final average velocity period are determined based on the acceleration to be measured, and the average velocity corresponding to the initial average velocity period and the final average velocity period is obtained respectively. In this embodiment, the initial average velocity period and the final average velocity period corresponding to the acceleration to be measured are the first period and the second period, respectively.

[0116] Based on the time elapsed for each cycle obtained from the analysis and calculation, the time elapsed from the initial average speed cycle to the final average speed cycle is calculated; in this embodiment, the time elapsed from the initial average speed cycle to the final average speed cycle is T1+T2=(t1-t0)+(t2-t1)=40ms+60ms=100ms.

[0117] Substituting the average velocity corresponding to the initial average velocity period, the average velocity corresponding to the final average velocity period, and the time elapsed from the initial average velocity period to the final average velocity period into the acceleration formula a = (v / t) t -v0) / t', the acceleration to be measured is obtained by analysis and calculation; in this embodiment, the acceleration to be measured from the first cycle to the second cycle is a1=(v2-v1) / (T1+T2)=(0.33m / s-0.5m / s) / 100ms=-1.7m / s 2 .

[0118] Similarly, if the initial average velocity period and the final average velocity period corresponding to the acceleration to be measured are the second and third periods, respectively, then the acceleration to be measured from the second period to the third period is a2=(v3-v2) / (T2+T3)=(0.26m / s-0.33m / s) / 135ms=-0.52m / s 2 .

[0119] Example 2

[0120] In Example 2, the first electrode layer 11 is made of aluminum, the first polymer insulating layer 12 is made of polyethylene terephthalate (PET), the second electrode layer 21 is made of copper, and the second polymer insulating layer 22 is made of polyvinylidene fluoride (PVDF). The lengths of both the first electrode layer 11 and the first polymer insulating layer 12 are L = 10 mm, and the lengths of both the second electrode layer 21 and the second polymer insulating layer 22 are 6L = 60 mm. The width of each hollow area and each grid area in the hollow grid structure of the second polymer insulating layer 22 is equal to L = 10 mm.

[0121] Will Figure 8 The first electrode layer 11 and the second electrode layer 21 in the accelerometer shown are respectively connected to the signal processing and analysis module 51 in the accelerometer of the present invention, that is, connected to the signal preprocessing module 52 and the central control module 53, and the first electrode layer 11 and the first polymer insulating layer 12 move relative to the second polymer insulating layer 22 and the second electrode layer 21 at an applied velocity. The specific analysis and calculation process of the central control module is as follows:

[0122] In the central control module 53, the width of each hollow area and each grid area of ​​the second polymer insulating layer 22 is preset to be L = 10 mm. The sum of the widths of adjacent hollow areas and grid areas is calculated to be 2L = 20 mm, and 2L is taken as the movement distance of a cycle.

[0123] Based on the electrical signal output by the signal preprocessing module 52, the time elapsed for each cycle is analyzed and calculated. In this embodiment, the time elapsed for the first cycle is T1 = t1 - t0 = 40ms, the time elapsed for the second cycle is T2 = t2 - t1 = 60ms, and the time elapsed for the third cycle is T3 = t3 - t2 = 75ms.

[0124] Substituting the distance traveled in one cycle and the time elapsed in each cycle into the velocity formula v = s / t, the average velocity within each cycle is calculated. In this embodiment, the average velocity in the first cycle is v1 = 2L / T1 = 2L / (t1-t0) = 20mm / 40ms = 0.5m / s, the average velocity in the second cycle is v2 = 2L / T2 = 2L / (t2-t1) = 20mm / 60ms = 0.33m / s, and the average velocity in the third cycle is v3 = 2L / T3 = 2L / (t3-t2) = 20mm / 75ms = 0.26m / s.

[0125] The initial average velocity period and the final average velocity period are determined based on the acceleration to be measured, and the average velocity corresponding to the initial average velocity period and the final average velocity period is obtained respectively. In this embodiment, the initial average velocity period and the final average velocity period corresponding to the acceleration to be measured are the first period and the third period, respectively.

[0126] Based on the time elapsed for each cycle obtained from the analysis and calculation, the time elapsed from the initial average speed cycle to the final average speed cycle is calculated. In this embodiment, the time elapsed from the initial average speed cycle to the final average speed cycle is T1+T2+T3==(t1-t0)+(t2-t1)+(t3-t2)=40ms+60ms+75=175ms.

[0127] Substituting the average velocity corresponding to the initial average velocity period, the average velocity corresponding to the final average velocity period, and the time elapsed from the initial average velocity period to the final average velocity period into the acceleration formula a = (v / t) t -v0) / t', the acceleration to be measured is obtained by analysis and calculation; in this embodiment, the acceleration to be measured from the first cycle to the third cycle is a3=(v3-v1) / (T1+T2+T3)=(0.26m / s-0.5m / s) / 175ms=-1.37m / s 2 .

[0128] It should be noted that, according to the limiting principle, the shorter the distance of a cycle, the closer the average velocity within each cycle is to the instantaneous velocity, and the more accurate the calculated acceleration to be measured. Those skilled in the art can adjust the value of L as needed to calculate an acceleration that meets the required accuracy; this is not limited here.

[0129] The accelerometer and acceleration measuring device provided by this invention comprise a first structural layer and / or a second structural layer, each including a layer structure with a perforated grid structure. Movement between the two structural layers causes periodic changes in the charge generated by friction or induction in the perforated grid structure, resulting in a periodic electrical signal output by the layer structure as an output electrode. The acceleration to be measured is then calculated based on this periodic electrical signal. The accelerometer and acceleration measuring device provided by this invention can not only measure acceleration over any time period according to user needs, but also meet user requirements for accuracy by adjusting the width of the perforations and grid. Furthermore, the accelerometer and acceleration measuring device provided by this invention do not require an external power supply, have a simple structure and manufacturing process, are low in cost, and are suitable for large-scale industrial production.

[0130] Those skilled in the art will understand that all or part of the steps in the methods of the above embodiments can be implemented by a program instructing related hardware, and the program can be stored in a computer-readable storage medium, such as ROM / RAM, magnetic disk, optical disk, etc.

[0131] It is also understood that the device structures shown in the accompanying drawings or embodiments are merely schematic, representing logical structures. Modules shown as separate components may or may not be physically separate, and components shown as modules may or may not be physical modules.

[0132] Obviously, those skilled in the art can make various modifications and variations to this invention without departing from its spirit and scope. Therefore, if these modifications and variations fall within the scope of the claims of this invention and their equivalents, this invention also intends to include these modifications and variations.

Claims

1. An acceleration sensor, characterized by The application relates to a structure for generating electricity, comprising: a first structure layer and a second structure layer and a fixed moving base plate; wherein, the first structure layer and the second structure layer are oppositely arranged, an electric interface is formed between the first structure layer and the second structure layer, and the first structure layer and the second structure layer both comprise a layer structure as the electric interface; when the first structure layer moves relative to the second structure layer at an applied speed, the second structure layer is arranged on the fixed moving base plate, the first structure layer moves on the second structure layer through sliding connection with the fixed moving base plate; or when the second structure layer moves relative to the first structure layer at the applied speed, the first structure layer is arranged on the fixed moving base plate, and the second structure layer moves on the first structure layer through sliding connection with the fixed moving base plate; the layer structure as the electric interface in the first structure layer and the second structure layer at least comprises a layer structure with a hollow grid structure; and any one or both of the first structure layer and the second structure layer at least comprises a layer structure as an output electrode; when the first structure layer moves relative to the second structure layer at the applied speed or the second structure layer moves relative to the first structure layer at the applied speed, an electric signal generated between the first structure layer and the second structure layer is output by the layer structure as the output electrode comprised in the first structure layer and the second structure layer; the layer structure with the hollow grid structure further comprises a plurality of composite electric generating components; each composite electric generating component is correspondingly arranged in a hollow region of the layer structure with the hollow grid structure, the shape and size of each composite electric generating component are matched with the shape and size of the hollow region of the layer structure with the hollow grid structure correspondingly arranged, and the plurality of composite electric generating components are different from the material of the layer structure with the hollow grid structure.

2. The acceleration sensor according to claim 1, characterized in that the first structure layer comprises a first electrode layer; the second structure layer comprises a second high polymer insulating layer; wherein, the first electrode layer is the layer structure as the output electrode in the first structure layer and simultaneously is the layer structure as the electric interface in the first structure layer; the second high polymer insulating layer is the layer structure as the electric interface in the second structure layer; an electric interface is formed between the first electrode layer and the second high polymer insulating layer; and any one or both of the first electrode layer and the second high polymer insulating layer at least comprises a layer structure with a hollow grid structure; when the first electrode layer moves relative to the second high polymer insulating layer at the applied speed or the second high polymer insulating layer moves relative to the first electrode layer at the applied speed, an electric signal generated between the first electrode layer and the second high polymer insulating layer is output by the first electrode layer.

3. The acceleration sensor according to claim 1, characterized in that the first structure layer comprises a first electrode layer; the second structure layer comprises a second high polymer insulating layer and a second electrode layer; wherein, The second high polymer polymer insulation layer is a layer structure in the second structure layer as the electrification interface; the second electrode layer is arranged on the side surface of the second high polymer polymer insulation layer away from the first electrode layer, and the second electrode layer is a layer structure in the second structure layer as the output electrode; When the first electrode layer moves relative to the second high polymer polymer insulation layer and the second electrode layer at the application speed or the second electrode layer and the second high polymer polymer insulation layer move relative to the first electrode layer at the application speed, the electric signal generated between the first electrode layer and the second high polymer polymer insulation layer is output by the first electrode layer and / or the second electrode layer.

4. The acceleration sensor according to claim 1, characterized in that The first structure layer comprises a first electrode layer and a first high polymer polymer insulation layer; the second structure layer comprises a second high polymer polymer insulation layer; wherein, The first electrode layer is arranged on the side surface of the first high polymer polymer insulation layer away from the second high polymer polymer insulation layer, and the first electrode layer is a layer structure in the first structure layer as the output electrode; the first high polymer polymer insulation layer is a layer structure in the first structure layer as the electrification interface; The second high polymer polymer insulation layer is a layer structure in the second structure layer as the electrification interface; the first high polymer polymer insulation layer and the second high polymer polymer insulation layer form an electrification interface; Any one or both of the first high polymer polymer insulation layer and the second high polymer polymer insulation layer comprises at least a layer structure with a hollow grid structure; When the first electrode layer and the first high polymer polymer insulation layer move relative to the second high polymer polymer insulation layer at the application speed or the second high polymer polymer insulation layer moves relative to the first high polymer polymer insulation layer and the first electrode layer at the application speed, the electric signal generated between the first high polymer polymer insulation layer and the second high polymer polymer insulation layer is output by the first electrode layer.

5. The acceleration sensor according to claim 1, characterized in that The first structure layer comprises a first electrode layer and a first high polymer polymer insulation layer; the second structure layer comprises a second high polymer polymer insulation layer and a second electrode layer; wherein, The second high polymer polymer insulation layer is a layer structure in the second structure layer as the electrification interface; the second electrode layer is arranged on the side surface of the second high polymer polymer insulation layer away from the first high polymer polymer insulation layer, and the second electrode layer is a layer structure in the second structure layer as the output electrode; The first high polymer polymer insulation layer and the second high polymer polymer insulation layer form an electrification interface; any one or both of the first high polymer polymer insulation layer and the second high polymer polymer insulation layer comprises at least a layer structure with a hollow grid structure; When the first electrode layer and the first high polymer insulating layer move relative to the second high polymer insulating layer and the second electrode layer at the application speed or the second electrode layer and the second high polymer insulating layer move relative to the first high polymer insulating layer and the first electrode layer at the application speed, the electric signal generated between the first high polymer insulating layer and the second high polymer insulating layer is output by the first electrode layer and / or the second electrode layer.

6. The acceleration sensor according to any one of claims 1 to 5, characterized in that The layer structure in the first structure layer as the electrification interface and the layer structure in the second structure layer as the electrification interface are in mutual contact. Alternatively, there is an electrification gap between the layer structure in the first structure layer as the electrification interface and the layer structure in the second structure layer as the electrification interface.

7. The acceleration sensor according to claim 6, characterized in that The surface of at least one of the two layer structures in mutual contact is provided with a protrusion array structure.

8. The acceleration sensor according to any one of claims 1 to 5, characterized in that The width of each hollow area in the layer structure with the hollow grid structure is equal to that of each grid area.

9. The acceleration sensor according to claim 1, characterized in that The fixed moving base plate comprises at least one guide rail groove and a base plate. When the first structure layer moves relative to the second structure layer at the application speed, the at least one guide rail groove is located on the base plate in the side direction of the second structure layer, and the first structure layer is slidably connected with the base plate through the at least one guide rail groove to move on the second structure layer. Alternatively, when the second structure layer moves relative to the first structure layer at the application speed, the at least one guide rail groove is located on the base plate in the side direction of the first structure layer, and the second structure layer is slidably connected with the base plate through the at least one guide rail groove to move on the first structure layer.

10. The acceleration sensor according to claim 9, characterized in that The fixed moving base plate further comprises a structure layer fixing part. The structure layer fixing part is arranged on the fixed moving base plate, and is used to fix the first structure layer on the fixed moving base plate when the second structure layer moves relative to the first structure layer at the application speed, or to fix the second structure layer on the fixed moving base plate when the first structure layer moves relative to the second structure layer at the application speed.

11. Acceleration sensor according to claim 9 or 10, characterized in that When the second structure layer moves relative to the first structure layer at the application speed, the second structure layer further comprises at least one guide rail, which is arranged in the at least one guide rail groove to slidably connect the second structure layer with the fixed moving base plate; the shape and size of the at least one guide rail match those of the at least one guide rail groove. Alternatively, when the first structure layer moves relative to the second structure layer at the application speed, the first structure layer further comprises at least one guide rail, which is arranged in the at least one guide rail groove to slidably connect the first structure layer with the fixed moving base plate; the shape and size of the at least one guide rail match those of the at least one guide rail groove.

12. The acceleration sensor according to any one of claims 1 to 5, 7, 9 to 10, characterized in that, Further comprising: a reciprocating module; The reciprocating module is connected with the first structure layer or the second structure layer, and is used for controlling the first structure layer to return to the initial position after the first structure layer moves relative to the second structure layer at the applied acceleration, or controlling the second structure layer to return to the initial position after the second structure layer moves relative to the first structure layer at the applied acceleration.

13. An acceleration measuring device, characterized by The acceleration sensor according to any one of claims 1-12, and a signal processing and analysis module; wherein, The signal processing and analysis module is connected with the layer structure of the output electrode in the acceleration sensor, and is used for processing and analyzing the electrical signal output by the layer structure of the output electrode, and calculating the to-be-measured acceleration according to the processed and analyzed electrical signal. The signal processing and analysis module comprises a signal preprocessing module and a central control module; wherein, 14. The acceleration measuring device according to claim 13, characterized in that The signal preprocessing module is connected with the layer structure of the output electrode in the acceleration sensor, and is used for preprocessing the electrical signal output by the layer structure of the output electrode; The central control module is connected with the signal preprocessing module, and is used for calculating the to-be-measured acceleration according to the electrical signal output by the signal preprocessing module. The signal preprocessing module comprises a rectification module, an amplification module, a filtering module and an analog-to-digital conversion module; wherein, 15. The acceleration measuring device according to claim 14, characterized in that The rectification module is connected with the layer structure of the output electrode in the acceleration sensor, and is used for rectifying the electrical signal output by the layer structure of the output electrode; The amplification module is connected with the rectification module, and is used for amplifying the electrical signal output by the rectification module; The filtering module is connected with the amplification module, and is used for filtering out the interference and clutter in the electrical signal output by the amplification module; The analog-to-digital conversion module is connected with the filtering module and the central control module respectively, and is used for converting the analog electrical signal output by the filtering module into a digital electrical signal, and outputting the digital electrical signal to the central control module. The calculation of the acceleration by the central control module specifically comprises:

16. The acceleration measuring device according to claim 14, characterized in that In the central control module, the width of each hollow area and each grid area in the layer structure with the hollow grid structure is set as a preset width, the width sum of the adjacent hollow area and grid area is calculated, and the width sum is taken as a movement distance of one period; According to the electrical signal output by the signal preprocessing module, the time of each period is calculated; The movement distance of one period and the time of each period are substituted into a speed formula v=s / t to calculate the average speed in each period, wherein v is the average speed in one period, s is the movement distance of one period, and t is the time of one period; According to the to-be-measured acceleration, the initial average speed period and the final average speed period corresponding to the to-be-measured acceleration are found, and the average speeds corresponding to the initial average speed period and the final average speed period are obtained; According to the time of each period calculated by analysis, the time from the initial average speed period to the final average speed period is calculated. ​ The initial average speed period corresponding average speed, the final average speed period corresponding average speed and the time from the initial average speed period to the final average speed period are substituted into the acceleration formula a=(vt-v0) / t', and the to-be-measured acceleration is analyzed and calculated, wherein a is the to-be-measured acceleration, vt is the final average speed period corresponding average speed, v0 is the initial average speed period corresponding average speed, and t' is the time from the initial average speed period to the final average speed period.

17. Acceleration measuring device according to any of claims 14 to 16, characterized in that The signal processing and analysis module further comprises an alarm module. The alarm module is connected with the central control module, and is used for alarming according to the alarm control signal sent by the central control module. The central control module is further used for generating the alarm control signal according to the to-be-measured acceleration analyzed and calculated.

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