A surface impedance recognition method and device based on flexible piezoelectric sensing technology

Abstract

The present disclosure relates to a surface impedance recognition method and recognition device based on flexible piezoelectric sensing technology. The method comprises the following steps: fixing an impedance recognition system to a surface to be measured, the impedance recognition system comprising an electrode, an electrostrictive module connected to the electrode, an insulating layer located below the electrostrictive module, a sensor module located below the insulating layer, and a hard material located above the electrostrictive module; energizing the electrostrictive module to cause the electrostrictive module to deform, the insulating layer transmitting the load caused by the deformation of the electrostrictive module to the sensor module, and the load being further transmitted to the surface to be measured, causing the output of the sensor module to differ in electrical signal; and measuring the electrical signal difference by an electrical device connected to the upper and lower electrodes of the sensor module, and recognizing the impedance of the surface to be measured according to the electrical signal difference.

Description

TECHNICAL FIELD

[0001] The present disclosure relates to surface impedance recognition, in particular to a surface impedance recognition method and device based on flexible piezoelectric sensing technology. BACKGROUND

[0002] In daily life, it is often necessary to determine the location of an acupoint. It is known that the tissue modulus at the muscle boundary and the muscle and tendon origin and termination points is lower than that of the muscle and tendon around the acupoint. Traditionally, an object hardness recognition method based on a Gaussian mixture noise generative adversarial network is used.

[0003] Figure 1 is a schematic diagram of a surface impedance recognition method in the prior art. Referring to Figure 1 In the prior art object hardness recognition method based on a Gaussian mixture noise generative adversarial network, small-scale labeled hardness level haptic data is used as the true value to train a Gaussian mixture noise generative adversarial network, Gaussian mixture noise is input into the Gaussian mixture noise generative adversarial network to obtain large-scale generated samples, the parameters of the discriminator of the Gaussian mixture noise generative adversarial network are used as the initial value of the hardness recognition network parameters, the hardness recognition network is pre-trained using the large-scale generated samples, the hardness recognition network is retrained using the labeled hardness level haptic data to determine the parameters of the hardness recognition network, and the haptic data to be predicted is input into the hardness recognition network to obtain the hardness level of the haptic data to be predicted. The specific steps are as follows: Step 1.1: touch the target object with the sensor at the front end of the mechanical arm to collect haptic data, divide the collected haptic data into L hardness levels according to their hardness physical properties, and label the corresponding labels as 1, 2, 3,..., L to obtain L classes of labeled hardness level haptic data.

[0004] A sensor is attached to the surface of a hard mechanical hand, and the degree of softness and hardness of the surface is determined according to the readings of the sensor by controlling the mechanical hand to exert pressure on the surface. This method relies heavily on the movement of the mechanical hand. For mechanical systems, the current technical level cannot guarantee control accuracy. The thickness of flexible sensors is in the order of microns, and the deformation size under pressure is smaller. It is difficult to achieve control in the order of microns for the mechanical hand, and the servo control system is extremely inefficient to achieve such high precision. Therefore, the recognition accuracy of impedance is not accurate, and the surface impedance recognition problem cannot be effectively solved, i.e., the resistance type acupoint recognition method is greatly limited by the skin surface environment, and the acupoint recognition accuracy is poor. SUMMARY

[0005] To solve the above technical problems, the present disclosure determines the acupoint position by pressure measurement, and combines an electro-deformation module and a capacitive pressure sensing module to prepare a flexible pressure sensing device. The inverse piezoelectric effect of piezoelectric material is utilized, and the electro-deformation module deforms under voltage driving, and at the same time, pressure is applied to the pressure sensor. Due to the different moduli of muscle groups and acupoints, the pressure sensors at the corresponding parts of muscles and acupoints obtain different reaction forces, and the voltage distribution cloud map of different parts is obtained by the array pressure sensor. The acupoint position is identified according to the voltage distribution point array data.

[0006] According to one aspect of the present disclosure, a surface impedance identification method based on a flexible piezoelectric sensing technology is provided, characterized by comprising the following steps: fixing an impedance identification system to a surface to be measured, the impedance identification system comprising an electrode, an electro-deformation module connected to the electrode, an insulating layer located below the electro-deformation module, a sensor module located below the insulating layer, and a hard material located above the electro-deformation module; energizing the electro-deformation module to cause the electro-deformation module to deform, the insulating layer transmitting the load caused by the deformation of the electro-deformation module to the sensor module, and the load being further transmitted to the surface to be measured, causing the output of the sensor module to differ in electrical signal; measuring the electrical signal difference by an electrical device connected to the upper and lower electrodes of the sensor module, and identifying the impedance of the surface to be measured according to the electrical signal difference.

[0007] In one embodiment of the present disclosure, one side of the sensor module in contact with the surface to be measured is in a flat plate structure.

[0008] In one embodiment of the present disclosure, one side of the sensor module in contact with the surface to be measured is provided with a microstructure, and the microstructure comprises a conical, hemispherical, cylindrical or spherical shell structure.

[0009] In one embodiment of the present disclosure, a plurality of impedance identification systems are arranged as a flexible identification array, and each impedance identification system is connected by an S-shaped wire or a split wire.

[0010] In one embodiment of the present disclosure, the hard material is an insulating ceramic or an insulating crystal with a modulus greater than 200 GPa and a thickness of 50-200 μm.

[0011] And / or, the electro-deformation module is a piezoelectric ceramic or a piezoelectric crystal with a thickness of 50-200 μm.

[0012] And / or, the electrode material is a copper foil, a gold foil or a silver foil with a thickness of 0.5-10 μm.

[0013] And / or, the insulating layer is an insulating ceramic material with a thickness of 5-30 μm.

[0014] And / or, the sensor module is a resistive pressure sensor, a capacitive pressure sensor or a piezoelectric pressure sensor.

[0015] According to the method of the present disclosure, the inverse piezoelectric effect of piezoelectric material is utilized, and the electro-actuated deformation module deforms under voltage driving, while pressure is applied to the pressure sensor. Due to the different moduli of muscle groups and acupoints, the pressure sensor at the corresponding position of the muscle and acupoint obtains different reaction forces, and the surface impedance can be obtained with high precision.

[0016] According to another aspect of the present disclosure, a surface impedance recognition device based on flexible piezoelectric sensing technology is provided, characterized in that it comprises: an impedance recognition system fixing module for fixing the impedance recognition system to the surface to be measured, the impedance recognition system comprising an electrode, an electro-actuated deformation module connected to the electrode, an insulating layer located below the electro-actuated deformation module, a sensor module located below the insulating layer, and a hard material located above the electro-actuated deformation module; an electro-actuated deformation module power supply module for supplying power to the electro-actuated deformation module to cause the electro-actuated deformation module to deform, the insulating layer transmitting the load caused by the deformation of the electro-actuated deformation module to the sensor module, and the load being further transmitted to the surface to be measured, causing the output of the sensor module to differ in electrical signal; and an impedance recognition module for measuring the electrical signal difference by an electrical device connected to the upper and lower electrodes of the sensor module, and recognizing the impedance of the surface to be measured according to the electrical signal difference.

[0017] According to the surface impedance recognition device based on flexible piezoelectric sensing technology of the present disclosure, the inverse piezoelectric effect of piezoelectric material is utilized, and the electro-actuated deformation module deforms under voltage driving, while pressure is applied to the pressure sensor. Due to the different moduli of muscle groups and acupoints, the pressure sensor at the corresponding position of the muscle and acupoint obtains different reaction forces, and the surface impedance can be obtained with high precision.

[0018] According to still another aspect of the present disclosure, an impedance recognition system is provided, characterized in that it comprises: an electrode; an electro-actuated deformation module connected to the electrode; an insulating layer located below the electro-actuated deformation module; a sensor module located below the insulating layer; and a hard material located above the electro-actuated deformation module.

[0019] In one embodiment of the present disclosure, one side of the sensor module in contact with the surface to be measured is in a flat plate structure; and / or,

[0020] One side of the sensor module in contact with the surface to be measured has a microstructure, and the microstructure comprises a conical, hemispherical, cylindrical or spherical shell structure.

[0021] In one embodiment of the present disclosure, the hard material is an insulating ceramic or insulating crystal with a modulus greater than 200 GPa and a thickness of 50-200 μm;

[0022] And / or, the electro-deformation module is a piezoelectric ceramic or piezoelectric crystal with a thickness of 50-200 μm;

[0023] And / or, the electrode material is a copper foil, gold foil or silver foil with a thickness of 0.5-10 μm;

[0024] And / or, the insulating layer is an insulating ceramic material with a thickness of 5-30 μm;

[0025] And / or, the sensor module is a resistive pressure sensor, capacitive pressure sensor or piezoelectric pressure sensor.

[0026] In one embodiment of the present disclosure, a plurality of impedance recognition systems are arranged as a flexible recognition array, and each impedance recognition system is connected by an S-shaped wire or a split wire.

[0027] According to the impedance recognition system of the present disclosure, an accurate recognition and positioning technology and method of human acupoints are established by using a high-precision flexible pressure array sensor based on the inverse piezoelectric effect, which provides a guarantee for intelligent measurement of acupoint data. Moreover, according to the method of the embodiment of the present disclosure, acupoint pressure data can be quantitatively recognized, which provides data support for digital medicine.

[0028] It should be understood that the foregoing general description and the following detailed description are only exemplary and explanatory, and do not limit the present disclosure. BRIEF DESCRIPTION OF DRAWINGS

[0029] The accompanying drawings, which are incorporated into the specification and constitute a part of the specification, illustrate embodiments consistent with the present disclosure, and together with the specification serve to explain the principles of the present disclosure, and do not constitute an improper limitation on the present disclosure.

[0030] Figure 1 is a schematic diagram of a surface impedance recognition method according to the prior art.

[0031] Figure 2 is a flowchart of a surface impedance recognition method based on a flexible piezoelectric sensing technology according to an exemplary embodiment of the present disclosure.

[0032] Figure 3 is a front view of an impedance recognition system according to a first exemplary embodiment of the present disclosure.

[0033] Figure 4 is a front view of an impedance recognition system according to a second exemplary embodiment of the present disclosure.

[0034] Figure 5is a front view of an impedance identification system according to a third exemplary embodiment of the present disclosure.

[0035] Figure 6 is a schematic diagram of identification of a body acupoint using an impedance identification system according to an exemplary embodiment of the present disclosure.

[0036] Figure 7 is a block diagram of a surface impedance identification device based on a flexible piezoelectric sensing technology according to an exemplary embodiment of the present disclosure. DETAILED DESCRIPTION

[0037] In order for those skilled in the art to better understand the technical solutions of the present disclosure, the technical solutions in the embodiments of the present disclosure will be described clearly and completely below with reference to the drawings.

[0038] It should be noted that the terms "first", "second", and the like in the specification and claims of the present disclosure and the above drawings are used to distinguish similar objects, and do not necessarily have to describe a specific order or sequence. It should be understood that the data thus used can be interchanged under appropriate circumstances, so that the embodiments of the present disclosure described herein can be implemented in an order other than those illustrated or described herein. The embodiments described in the following exemplary embodiments do not represent all embodiments consistent with the present disclosure. Rather, they are merely examples of devices and methods consistent with some aspects of the present disclosure as detailed in the appended claims.

[0039] To solve the above problems, the present disclosure proposes a surface impedance identification method based on a flexible piezoelectric sensing technology, characterized in that it comprises the following steps: fixing an impedance identification system on a surface to be measured, the impedance identification system comprising an electrode, an electro-actuated deformation module connected to the electrode, an insulating layer located below the electro-actuated deformation module, a sensor module located below the insulating layer, and a hard material located above the electro-actuated deformation module; energizing the electro-actuated deformation module to cause the electro-actuated deformation module to deform, the insulating layer transmitting the load caused by the deformation of the electro-actuated deformation module to the sensor module, and the load being further transmitted to the surface to be measured, causing a difference in the output electrical signal of the sensor module; measuring the electrical signal difference by an electrical device connected to the upper and lower electrodes of the sensor module, and identifying the impedance of the surface to be measured according to the electrical signal difference.

[0040] Specifically, Figure 2 A flowchart of a surface impedance identification method based on a flexible piezoelectric sensing technology according to an exemplary embodiment of the present disclosure is shown.

[0041] Referring to Figure 2 In step 201, the impedance identification system is placed on the surface to be measured and the impedance identification system is fixed.

[0042] Specifically, as shown in Figure 3 The impedance recognition system includes electrodes, an electro- morphic module connected to the electrodes, an insulating layer located below the electro- morphic module, a sensor module located below the insulating layer, and a hard material located above the electro- morphic module. According to one example of the present disclosure, the impedance recognition system can be fixed using adhesive tape, adhesive strips, or other adhesive materials.

[0043] In step 202, the electro- morphic module is powered to cause the electro- morphic module to deform, the insulating layer transmits the load caused by the deformation of the electro- morphic module to the sensor, and the load is further transmitted to the surface to be measured, causing the difference in the electrical signal.

[0044] Specifically, the upper and lower electrodes of the electro- morphic module are connected to the power supply, the electro- morphic module is powered, and the deformation of the module is caused. The deformation causes a load on the insulating layer, which transmits the load to the sensor; the load is further transmitted to the surface to be measured by the sensor, and the softness and hardness of the surface to be measured cause different deformations of the sensor, which in turn causes a difference in the electrical signal of the sensor.

[0045] In step 203, the electrical device connected to the upper and lower electrodes of the sensor module measures the difference in the electrical signal, and the impedance of the surface to be measured is recognized according to the difference in the electrical signal.

[0046] Figure 3 The impedance recognition system according to the first embodiment of the present disclosure is shown in the front view, but the device can be prepared in any shape, and the overall structure of the system includes electrodes, an electro- morphic module, an insulating layer, a sensor module, and a hard material.

[0047] Specifically, the working principle of the impedance recognition system is as follows: the system is placed on the surface to be measured, and the entire system position is fixed using medical adhesive tape. The upper and lower electrodes of the electro- morphic module are connected to the power supply, the electro- morphic module is powered, and the deformation of the module is caused; the deformation causes a load on the insulating layer, which transmits the load to the sensor; the load is further transmitted to the surface to be measured by the sensor, and the softness and hardness of the surface to be measured cause different deformations of the sensor, which in turn causes a difference in the electrical signal of the sensor. The electrical signal is measured by the electrical device connected to the upper and lower electrodes of the sensor module. The impedance of the surface to be measured can be determined according to the difference in the electrical signal.

[0048] Optionally, the hard material requires a high modulus, and an insulating ceramic or insulating crystal with a modulus greater than 200 GPa and a thickness of 50-200 μm can be selected.

[0049] Optionally, the selected electro- morphic module can be a piezoelectric ceramic or a piezoelectric crystal with a thickness of 50-200 μm.

[0050] Optionally, the electrode material can be selected from a metal material with excellent conductivity, such as copper foil, gold foil, silver foil, etc., and the thickness is 0.5-10 μm.

[0051] Optionally, the insulating layer requires an insulating ceramic material with thin thickness, and the thickness is 5-30 μm.

[0052] Optionally, the sensor module is a pressure sensor, which can be selected from a resistive pressure sensor, and the connected electrical device is an ohmmeter; or a capacitive pressure sensor, and the connected electrical device is a voltmeter; or a piezoelectric pressure sensor, and the connected electrical device is a voltmeter.

[0053] In the embodiment of the present disclosure, the hard material is selected from a hard insulating SiC ceramic film with a thickness of 100 μm.

[0054] The electrode material is selected from copper foil with a thickness of 5 μm.

[0055] The electro-deformation material is selected from PZT piezoelectric ceramic with a thickness of 100 μm.

[0056] The insulating layer is selected from an insulating SiC ceramic film with a thickness of 5 μm.

[0057] The sensor module is selected from a resistive pressure sensor prepared by mixing PDMS and carbon nanotubes, and in the deformation process, the resistance of the resistive sensor changes. The connected electrical measuring device is an ohmmeter, and the ohmmeter value can be read out.

[0058] Figure 4 is a front view of an impedance identification system according to a second exemplary embodiment of the present disclosure.

[0059] In Figure 3 the impedance identification system shown, the side of the sensor module in contact with the surface to be measured is in a flat plate structure. The flat plate structure has low sensitivity in measurement and poor ability to identify small differences. In order to more accurately identify the surface impedance, in the second embodiment according to the present disclosure, the side of the sensor module in contact with the surface to be measured is designed as a microstructure.

[0060] Specifically, referring to Figure 4 , the impedance identification system according to the second embodiment of the present disclosure includes an electrode, an electro-deformation module connected to the electrode, an insulating layer located below the electro-deformation module, a sensor module located below the insulating side, and a hard material located above the electro-deformation module. However, unlike Figure 3The first embodiment of the impedance recognition system shown differs in that the side of the sensor module that is in contact with the surface to be measured is designed as a microstructure. The microstructure can comprise a conical, hemispherical, cylindrical or spherical shell structure. With this microstructure, the sensitivity of the sensor is significantly increased by virtue of the fact that, due to the reduced area of application, the force per unit area is increased and the deformation is more pronounced, and the accuracy of the surface recognition for weak impedance differences is higher.

[0061] Figure 5 is a front view of an impedance recognition system according to a third exemplary embodiment of the present disclosure.

[0062] Figure 3 and Figure 4 The two solutions shown in and have good recognition ability for surfaces with good impedance uniformity, and single-point measurement can obtain the impedance value of the measured surface. However, for surfaces with inconsistent impedance, the measurement efficiency is very low. In the embodiment according to the third aspect of the present disclosure, a flexible recognition array is designed. Referring specifically to Figure 5 In the flexible recognition array, the individual recognition units are connected by S-shaped wires and separate wires, which improves the stretchability of the recognition system. Due to the design of the S-shaped wires, the system has a certain bendability and good conformability on curved surfaces, and has high accuracy for impedance recognition of curved structures. The planar impedance distribution is obtained by comparing multiple measurement data.

[0063] Figure 6 A block diagram of a surface impedance recognition device based on a flexible piezoelectric sensing technology according to an embodiment of the present disclosure is shown. As Figure 6 shown, the surface impedance recognition device includes an impedance recognition system fixing module for fixing the impedance recognition system to a surface to be measured, the impedance recognition system including electrodes, an electro- morphic module connected to the electrodes, an insulating layer located below the electro- morphic module, a sensor module located below the insulating layer, and a hard material located above the electro- morphic module. The surface impedance recognition device also includes an electro- morphic module power-on module for powering on the electro- morphic module to cause the electro- morphic module to deform, the insulating layer transmitting the load caused by the deformation of the electro- morphic module to the sensor module, and the load being further transmitted to the surface to be measured, causing a difference in the output electrical signal of the sensor module. The surface impedance recognition device also includes an impedance recognition module for measuring the electrical signal difference by an electrical device connected to the upper and lower electrodes of the sensor module, and recognizing the impedance of the surface to be measured according to the electrical signal difference.

[0064] It should be noted that the foregoing explanation and description of the embodiment of the surface impedance recognition method based on the flexible piezoelectric sensing technology also applies to the embodiment of the surface impedance recognition device based on the flexible piezoelectric sensing technology, which will not be described here.

[0065] According to the surface impedance recognition device based on the flexible piezoelectric sensing technology of the present disclosure, the inverse piezoelectric effect of the piezoelectric material is utilized, the electrostrictive module deforms under the driving of the voltage, and at the same time, the pressure sensor is applied with pressure. Due to the different modulus at the muscle group and the acupoint, the pressure sensor at the muscle and the acupoint obtains different reaction forces, and the surface impedance can be obtained with high precision.

[0066] Figure 7 A block diagram of the surface impedance recognition device based on the flexible piezoelectric sensing technology according to the exemplary embodiment of the present disclosure is shown.

[0067] Reference Figure 7 When the surface impedance recognition device according to the embodiment of the present disclosure is applied to the skin surface, the position of the acupoint part can be accurately determined.

[0068] Specifically, at the start and end points of the muscle tissue and the periosteum, the tissue modulus is lower than that of the muscle tendon around the acupoint. According to the surface impedance recognition method and recognition device based on the flexible piezoelectric sensing technology of the present disclosure, the inverse piezoelectric effect of the piezoelectric material is utilized, the electrostrictive module deforms under the driving of the voltage, and at the same time, the pressure sensor is applied with pressure. Due to the different modulus at the muscle group and the acupoint, the pressure sensor at the muscle and the acupoint obtains different reaction forces, and the surface impedance can be obtained with high precision, so that the acupoint position can be determined with high precision.

[0069] Other embodiments of the present disclosure will be apparent to those skilled in the art from consideration of the specification and practice of the application disclosed herein. This application is intended to cover any variations, uses, or adaptations of the present disclosure that are deemed to fall within the general principles of the present disclosure and include common general knowledge or custom in the art not specifically disclosed. The specification and examples are to be regarded as illustrative only, and the true scope and spirit of the present disclosure are indicated by the following claims.

[0070] In the description of the present disclosure, the description of the terms "one embodiment", "some embodiments", "an example", "a specific example" or "some examples" and the like means that the specific features, structures, materials or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the present disclosure. In the present disclosure, the illustrative description of the above terms does not necessarily refer to the same real time or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner. In addition, the skilled in the art can combine and combine the different embodiments or examples described in the present disclosure and the features of the different embodiments or examples without contradiction.

[0071] It should be understood that the present disclosure is not limited to the precise construction that has been described above and shown in the accompanying drawings, and that various modifications and changes can be made by those skilled in the art without departing from the scope of the present disclosure. The scope of the present disclosure is limited only by the appended claims.

Claims

1. A surface impedance identification method based on flexible piezoelectric sensing technology, characterized in that, Includes the following steps: An impedance identification system is fixed to the surface to be tested. The impedance identification system includes an electrode, an electrodeformation module connected to the electrode, an insulating layer located below the electrodeformation module, a sensor module located below the insulating layer, and a rigid material located above the electrodeformation module. The electrodeformation module is energized to deform it. The insulating layer transfers the load caused by the deformation of the electrodeformation module to the sensor module, and the load is further transferred to the surface under test, causing a difference in the electrical signal output by the sensor module. The difference in electrical signals is measured by an electrical device connected to the upper and lower electrodes of the sensor module, and the impedance of the surface under test is identified based on the difference in electrical signals. The sensor module has a microstructure on the side that contacts the surface to be measured. The microstructure includes a conical, hemispherical, cylindrical, or spherical shell structure. The impedance identification systems are arranged in a flexible identification array, and the impedance identification systems are connected to each other by S-shaped wires or split wires.

2. The method according to claim 1, characterized in that, The side of the sensor module that contacts the surface to be measured has a flat plate structure.

3. The method according to claim 1, characterized in that, The hard material is an insulating ceramic or insulating crystal with a modulus greater than 200 GPa and a thickness of 50-200 μm; And / or, the electrodeformation module is a piezoelectric ceramic or piezoelectric crystal with a thickness of 50~200μm; And / or, the electrode material is copper foil, gold foil, or silver foil, with a thickness of 0.5~10μm; And / or, the insulating layer is an insulating ceramic material with a thickness of 5~30μm; And / or, the sensor module is a resistive pressure sensor, a capacitive pressure sensor, or a piezoelectric pressure sensor.

4. A surface impedance identification device based on flexible piezoelectric sensing technology, characterized in that, The method described by any one of claims 1-3 includes: An impedance identification system fixing module is used to fix the impedance identification system to the surface to be tested. The impedance identification system includes electrodes, an electrodeformation module connected to the electrodes, an insulating layer located below the electrodeformation module, a sensor module located below the insulating layer, and a rigid material located above the electrodeformation module. An electrodeformation module power supply module is used to energize the electrodeformation module to cause it to deform. The insulating layer transfers the load caused by the deformation of the electrodeformation module to the sensor module, and the load is further transferred to the surface under test, causing a difference in the electrical signal output by the sensor module. An impedance identification module is used to measure the difference in electrical signals by an electrical device connected to the upper and lower electrodes of the sensor module, and to identify the impedance of the surface under test based on the difference in electrical signals.

5. An impedance identification system, characterized in that, include: electrode; Electrodeformation module connected to the electrodes; An insulating layer located beneath the electrodeformation module; The sensor module is located beneath the insulating layer; as well as The rigid material located above the electrodeformation module; Wherein, the side of the sensor module that contacts the surface to be measured has a flat plate structure; and / or, The side of the sensor module that contacts the surface to be measured has a microstructure, which includes a conical, hemispherical, cylindrical, or spherical shell structure. The impedance identification systems are arranged in a flexible identification array, and the impedance identification systems are connected to each other by S-shaped wires or split wires.

6. The impedance identification system according to claim 5, characterized in that, The hard material is an insulating ceramic or insulating crystal with a modulus greater than 200 GPa and a thickness of 50-200 μm; And / or, the electrodeformation module is a piezoelectric ceramic or piezoelectric crystal with a thickness of 50~200μm; And / or, the electrode material is copper foil, gold foil, or silver foil, with a thickness of 0.5~10μm; And / or, the insulating layer is an insulating ceramic material with a thickness of 5~30μm; And / or, the sensor module is a resistive pressure sensor, a capacitive pressure sensor, or a piezoelectric pressure sensor.

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