Pop-up cavity structure, device and method

Abstract

The present disclosure provides a pop-up cavity structure, equipment and method. The pop-up cavity structure includes: a test cavity; the test cavity is connected to a driving mechanism and can enter and exit a test environment chamber under the drive of the driving mechanism; the carrier gas outlet port of the test cavity is connected to a sensor element through a first metal hose, and the carrier gas inlet port of the test cavity is connected to a carrier gas supply device through a second metal hose; the present disclosure can realize the extension and retraction of the test cavity, the structure is compact, occupies little space, and is safe and convenient to operate; it can conveniently form a multi-test cavity structure and occupies little space.

Description

Technical Field

[0001] The present disclosure relates to the technical field of penetration testing, and in particular to a pop-up cavity structure, equipment, and method. Background Art

[0002] The statements in this section merely provide background information related to the present disclosure and do not necessarily constitute prior art.

[0003] When conducting film penetration testing, the existing test structure consists of an upper test chamber and a lower test chamber, with the test sample (film) placed between the upper and lower chambers. During the test, the upper test chamber presses the test sample against the lower chamber.

[0004] The inventors of the present disclosure discovered that when conducting film penetration testing, the existing test structure consists of an upper test chamber and a lower test chamber, and the test sample (film) is placed between the upper and lower chambers. During testing, the upper test chamber presses the test sample against the lower chamber; when replacing the test sample, the upper test chamber is opened to complete the sample replacement. This structure takes up a large amount of space, and two or more multi-chamber structures can only be arranged in a flat manner. When replacing the sample, the upper test chamber needs to be opened. Once the operation is incorrect, the upper test chamber can easily slide onto the lower test chamber, injuring the operator and causing damage to parts. Summary of the Invention

[0005] In order to address the deficiencies of the prior art, the present disclosure provides a pop-up cavity structure, equipment and method, which can realize the extension and retraction of the test cavity. It has a compact structure, occupies a small space, is safe and convenient to operate, and can be easily arranged in layers to form a multi-test cavity structure, which occupies a small space.

[0006] In order to achieve the above objectives, the present disclosure adopts the following technical solutions:

[0007] A first aspect of the present disclosure provides a pop-up cavity structure.

[0008] A pop-up cavity structure, comprising:

[0009] Test chamber;

[0010] The test chamber is connected to the driving mechanism and can enter and exit the test environment chamber under the drive mechanism. The carrier gas outlet port of the test chamber is connected to the sensing element through a first metal hose, and the carrier gas inlet port of the test chamber is connected to the carrier gas supply device through a second metal hose.

[0011] As some possible implementations, the inner surface of the metal hose is a polished surface.

[0012] As some possible implementations, the sensing element is a trace oxygen sensor or a trace water sensor or a combination of a trace oxygen sensor and a trace water sensor.

[0013] As some possible implementations, the metal hose sealing leakage rate is less than 1×10 -5 std cm 3 / s.

[0014] As some possible implementations, the bending radius of the metal hose is less than or equal to 20 cm.

[0015] As some possible implementations, the inner diameter of the metal hose is less than or equal to 20 mm.

[0016] As some possible implementations, the driving mechanism is fixed on the first substrate, and the first substrate is provided with a first guide groove for accommodating the first metal hose and a second guide groove for accommodating the second metal hose.

[0017] As a further limitation, a second substrate parallel to the first substrate is provided on the upper side of the first substrate, and a third guide groove for accommodating the first metal hose and a fourth guide groove for accommodating the second metal hose are provided on the side of the second substrate facing the first substrate.

[0018] As a further limitation, the top wall of the cavity where the pop-up cavity structure is located is parallel to the first substrate, and a third guide groove for accommodating the first metal hose and a fourth guide groove for accommodating the second metal hose are provided on the side of the top wall facing the first substrate.

[0019] As a further limitation, the first guide groove and the third guide groove are arranged opposite to each other, and the second guide groove and the fourth guide groove are arranged opposite to each other.

[0020] As some possible implementations, a groove for facing the sample is provided on one side of the opening of the test cavity, an exhaust port connected to the groove is provided in the test cavity, and a carrier gas inlet port and a carrier gas outlet port are respectively provided in the test cavity and are connected to the inner cavity of the test cavity.

[0021] As some possible implementation methods, a plurality of holes for facing the sample are opened on one side of the opening of the test cavity, an exhaust port connected to each hole is opened in the test cavity, and a carrier gas inlet port and a carrier gas outlet port are respectively opened in the test cavity and are connected to the inner cavity of the test cavity.

[0022] The second aspect of the present disclosure provides a gas permeation testing device, which is characterized in that it includes a testing chamber, in which the pop-up cavity structure described in the first aspect of the present disclosure is provided, and a through groove for the pop-up cavity structure to pass through is opened on the side wall of the testing chamber.

[0023] A third aspect of the present disclosure provides a gas permeation testing method, utilizing the pop-up cavity structure described in the first aspect of the present disclosure, comprising the following steps:

[0024] Before the test begins, the driving mechanism pushes the pop-up cavity structure out of the test environment chamber. After the test sample is replaced, the driving mechanism pulls the pop-up cavity structure back.

[0025] The test sample is exposed to the test environment chamber space. When the composition of the gas in the environment chamber space is stable, the gas penetrates the test sample into the inner cavity of the pop-up cavity structure. The carrier gas carries the permeated gas to the sensor element for analysis to obtain the test results.

[0026] Compared with the prior art, the present invention has the following advantages:

[0027] 1. The pop-up cavity structure, equipment and method disclosed in the present invention can realize the extension and retraction of the test cavity. The structure is compact, occupies little space, and is safe and convenient to operate. It can be easily arranged in layers to form a multi-test cavity structure, which occupies little space.

[0028] 2. The pop-up cavity structure, equipment and method disclosed in the present invention, through the cooperation of metal hoses and metal tubes, can achieve stable entry and exit of the cavity structure in the test environment chamber, effectively avoiding the impact of the movement of the cavity structure on the test accuracy of the sensor element.

[0029] 3. The pop-up cavity structure, device and method disclosed in the present invention can detect whether a sample is placed on the test cavity, effectively avoiding invalid tests and damage to the sensor.

[0030] 4. The pop-up cavity structure, equipment and method disclosed in the present invention can achieve effective adsorption of the sample by setting grooves or air holes on the test cavity and combining with a vacuum pumping device, thereby effectively detecting whether the sample is placed on the test cavity.

[0031] 5. The pop-up cavity structure, equipment and method disclosed in the present invention, when the groove is deep, by providing a porous mesh support body, the support body serves as a medium between the groove and the sample, and combined with a vacuum pumping device, effective adsorption of the sample can be achieved, thereby avoiding serious deformation of the sample.

[0032] 6. The pop-up cavity structure, device and method disclosed in the present invention do not require a porous mesh support when the groove is shallow or at least one small hole is used for sample adsorption. Effective adsorption can be achieved directly without causing significant sample deformation. BRIEF DESCRIPTION OF THE DRAWINGS

[0033] The accompanying drawings, which constitute a part of the present disclosure, are used to provide a further understanding of the present disclosure. The exemplary embodiments of the present disclosure and their descriptions are used to explain the present disclosure and do not constitute an improper limitation to the present disclosure.

[0034] Figure 1This is a structural schematic diagram of the pop-up cavity structure provided in Example 1 of the present disclosure.

[0035] Figure 2 Schematic diagram of the cavity structure for thin film penetration detection provided in Example 2 of the present disclosure.

[0036] Figure 3 Schematic diagram of the cavity structure for thin film penetration detection provided in Example 3 of the present disclosure.

[0037] Figure 4 This is a schematic structural diagram of the film penetration testing equipment provided in Example 6 of the present disclosure.

[0038] Among them, 1. sensor chamber; 2. valve assembly; 3. sensor chamber drain outlet; 4. metal pipe; 5. sealing gasket; 6. wind shield; 7. pop-up test chamber; 8. test chamber chamber drain outlet; 9. test chamber; 10. test chamber chamber temperature control assembly; 11. sensor chamber temperature control assembly; 12. control valve; 13. electrical component; 14. sensing element; 15. test gas outlet; 16. temperature sensor; 17. humidity sensor; 18. test gas inlet; 19. humidity generator;

[0039] 7-1. Substrate; 7-2. Connector; 7-3. Test chamber; 7-4. Guide groove; 7-5. Metal hose; 7-3-1. Test sample; 7-3-2. Test chamber body; 7-3-3. Carrier gas inlet channel; 7-3-4. Carrier gas outflow channel; 7-3-5. Vacuum pipe; 7-3-6. Vacuum ring. DETAILED DESCRIPTION

[0040] The present disclosure will be further described below with reference to the accompanying drawings and embodiments.

[0041] It should be noted that the following detailed descriptions are exemplary and intended to provide further explanation of the present disclosure. Unless otherwise specified, all technical and scientific terms used herein have the same meaning as commonly understood by those skilled in the art to which the present disclosure belongs.

[0042] It should be noted that the terms used herein are only for describing specific embodiments and are not intended to limit the exemplary embodiments according to the present disclosure. As used herein, unless the context clearly indicates otherwise, the singular form is intended to include the plural form. In addition, it should be understood that when the terms "comprise" and / or "include" are used in this specification, they indicate the presence of features, steps, operations, devices, components and / or combinations thereof.

[0043] In the absence of conflict, the embodiments of the present disclosure and the features thereof may be combined with each other.

[0044] Example 1:

[0045] like Figure 1 As shown, embodiment 1 of the present disclosure provides a pop-up cavity structure, including:

[0046] Test chamber 7-3;

[0047] The test chamber 7-3 is connected to the driving mechanism and can enter and exit the test environment chamber under the drive of the driving mechanism. The carrier gas outlet port and the carrier gas inlet port of the test chamber 7-3 are connected to the metal tube 4 through different metal hoses 7-5 respectively. The carrier gas outlet port of the test chamber 7-3 is connected to the sensor element through the first metal hose, and the carrier gas inlet port of the test chamber 7-3 is connected to the carrier gas supply device through the second metal hose.

[0048] In this embodiment, the inner surface of the metal hose is a polished surface.

[0049] In this embodiment, the sensing element is a trace oxygen sensor. Alternatively, in some other embodiments, the sensing element may also be a trace water sensor or a combination of a trace oxygen sensor and a trace water sensor.

[0050] In this embodiment, the metal hose sealing leakage rate is less than 1×10 -5 std cm 3 / s, the bending radius of the metal hose is less than or equal to 20cm, and the inner diameter of the metal hose is less than or equal to 20mm. The specific sealing leakage rate, the bending radius of the metal hose or the inner diameter of the metal hose can be set by those skilled in the art according to the above range and will not be repeated here.

[0051] In this embodiment, preferably, the test environment chamber is a shell for allowing the test cavity to enter and exit the through slot.

[0052] In this embodiment, the driving mechanism is fixed on the substrate 7-1 (i.e., the first substrate), and the first substrate is provided with a first guide groove for accommodating the first metal hose and a second guide groove for accommodating the second metal hose, and the first guide groove and the second guide groove are arranged in parallel.

[0053] A second substrate parallel to the first substrate is provided on the upper side of the first substrate, and a third guide groove for accommodating the first metal hose and a fourth guide groove for accommodating the second metal hose are provided on a side of the second substrate facing the first substrate.

[0054] It is understandable that in some other embodiments, the top wall of the cavity where the pop-up cavity structure is located is parallel to the first substrate, and the side of the top wall facing the first substrate is provided with a third guide groove for accommodating the first metal hose and a fourth guide groove for accommodating the second metal hose.

[0055] The first guide groove and the third guide groove are arranged opposite to each other, and the second guide groove and the fourth guide groove are arranged opposite to each other. It can be understood that in some other embodiments, the first guide groove and the third guide groove may not be arranged opposite to each other (such as staggered arrangement), as long as the same metal hose can be guided up and down and limited. The second guide groove and the fourth guide groove may not be arranged opposite to each other (such as staggered arrangement). Those skilled in the art can make a choice according to the specific working conditions, which will not be repeated here.

[0056] In this embodiment, the driving mechanism is preferably a cylinder. It can be understood that in some other embodiments, the driving mechanism can also be an electric cylinder mechanism, an electromagnetic driving mechanism, or a hydraulic driving mechanism. Those skilled in the art can make a choice based on the specific working conditions, which will not be elaborated here.

[0057] The gas permeation test method using the above-mentioned pop-up cavity structure is as follows:

[0058] Before the test begins, the driving mechanism pushes the pop-up cavity structure out of the test environment chamber. After the test sample is replaced, the driving mechanism pulls the pop-up cavity structure back.

[0059] The test sample is exposed to the test environment chamber space. When the composition of the gas in the environment chamber space is stable, the gas penetrates the test sample into the inner cavity of the pop-up cavity structure. The carrier gas carries the permeated gas to the sensor element for analysis to obtain the test results.

[0060] Example 2:

[0061] Embodiment 2 of the present disclosure provides a pop-up cavity structure, including:

[0062] Test cavity 7-3, the test cavity 7-3 includes a test cavity body 7-3-2, such as Figure 2 As shown;

[0063] A groove is provided on one side of the opening of the test chamber body 7-3-2 for being opposite to the test sample 7-3-1, and a vacuum ring 7-3-6 is provided in the groove. The test chamber body 7-3-2 is provided with an exhaust port connected to the groove, and the connecting channel constitutes a vacuum pipe 7-3-5, that is, the exhaust port is connected to one end of the vacuum tube, and the other end of the vacuum tube is connected to the vacuum pumping device, which can preferably be a vacuum pump or a vacuum generator.

[0064] It can be understood that in some other embodiments, a vacuum tube is provided in the communicating channel, one end of the vacuum tube is communicated with the groove, and the other end of the vacuum tube is communicated with the vacuum pumping device; of course, one end of the vacuum tube can also be sealed and communicated with the inner part of the communicating channel close to the groove, and the other end of the vacuum tube passes through the remaining part of the communicating channel and is communicated with the vacuum pumping device. Those skilled in the art can make a choice according to the specific working conditions, which will not be elaborated here.

[0065] The test chamber body also has a carrier gas inlet port connected to the inner cavity of the test chamber body respectively, and the connecting channel constitutes a carrier gas inlet channel 7-3-3, that is, the port of the carrier gas inlet channel 7-3-3 is connected to one end of the carrier gas inlet pipe, and the other end of the carrier gas inlet pipe is connected to the carrier gas supply device, and the carrier gas supply device is preferably a carrier gas generator.

[0066] It can be understood that in some other embodiments, a carrier gas inlet pipe is provided in the connecting channel, one end of the carrier gas inlet pipe is connected to the inner cavity of the test chamber body, and the other end of the carrier gas inlet pipe is connected to the carrier gas supply device; of course, one end of the carrier gas inlet pipe can also be sealed and connected to the part of the inner cavity of the connecting channel close to the test chamber body, and the other end of the carrier gas inlet pipe is connected to the carrier gas supply device after passing through the remaining part of the connecting channel. Those skilled in the art can make a choice according to the specific working conditions, which will not be repeated here.

[0067] The test cavity body is also provided with carrier gas outlet ports respectively connected to the inner cavity of the test cavity body. The connecting channels constitute carrier gas outflow channels 7-3-4, and the other end of the carrier gas outflow channels 7-3-4 is connected to the outside of the test cavity body.

[0068] It can be understood that in some other embodiments, a carrier gas outlet pipe is provided in the connecting channel, one end of the carrier gas outlet pipe is connected to the inner cavity of the test cavity body, and the other end of the carrier gas outlet pipe is connected to the outside world; of course, one end of the carrier gas outlet pipe can also be sealed and connected to the part of the inner cavity of the connecting channel close to the test cavity body, and the other end of the carrier gas outlet pipe is connected to the outside world after passing through the remaining part of the connecting channel. Those skilled in the art can make a choice according to the specific working conditions, and will not go into details here.

[0069] In this embodiment, the groove is a closed-loop groove around the inner cavity opening of the test cavity body. It can be understood that in some other embodiments, the groove is a non-closed-loop groove around the inner cavity opening of the test cavity body, such as a semicircular groove or an arc-shaped groove or a square groove, etc. Of course, the groove here can also be a plurality of intermittent grooves arranged at intervals, or at least one hole connected to the exhaust port can be set between two adjacent intermittent grooves. Those skilled in the art can select the groove shape according to the specific working conditions; it will not be repeated here.

[0070] Each test cavity body includes at least one inner cavity. In this embodiment, one inner cavity is preferred. Those skilled in the art can select the number of inner cavities according to specific working conditions, which will not be described in detail here.

[0071] In this embodiment, the vacuum ring is a porous mesh support body. The mesh support body can be a metal sintered mesh, porous ceramics, metal mesh, etc., or a metal part or non-metal part with small holes. Technical personnel in this field can choose according to the specific working conditions, which will not be repeated here.

[0072] When the vacuum device is evacuating, a vacuum is generated in the groove, and the test sample is tightly adsorbed on the test chamber body, and a certain vacuum degree is maintained at the vacuum ring;

[0073] The test sample is exposed to the inner cavity space of the chamber. When the composition of the gas in the inner cavity space of the cavity structure is stable (such as the introduction of oxygen or water vapor), this gas passes through the test sample into the inner cavity of the test cavity body. The carrier gas carries the permeated gas to the sensor for analysis to obtain the test results.

[0074] Example 3:

[0075] Embodiment 3 of the present disclosure provides a pop-up cavity structure, including:

[0076] Test cavity 7-3, the test cavity 7-3 includes a test cavity body 7-3-2, such as Figure 3 As shown;

[0077] A groove is provided on one side of the opening of the test cavity body 7-3-2 for being opposite to the test sample 7-3-1. The test cavity body 7-3-2 is provided with an exhaust port connected to the groove. The connecting channel constitutes a vacuum pipe 7-3-5, that is, the exhaust port is connected to one end of the vacuum tube, and the other end of the vacuum tube is connected to the vacuum device. The vacuum device can preferably be a vacuum pump or a vacuum generator.

[0078] It can be understood that in some other embodiments, a vacuum tube is provided in the communicating channel, one end of the vacuum tube is communicated with the groove, and the other end of the vacuum tube is communicated with the vacuum pumping device; of course, one end of the vacuum tube can also be sealed and communicated with the inner part of the communicating channel close to the groove, and the other end of the vacuum tube passes through the remaining part of the communicating channel and is communicated with the vacuum pumping device. Those skilled in the art can make a choice according to the specific working conditions, which will not be elaborated here.

[0079] The test chamber body also has a carrier gas inlet port connected to the inner cavity of the test chamber body respectively, and the connecting channel constitutes a carrier gas inlet channel 7-3-3, that is, the port of the carrier gas inlet channel 7-3-3 is connected to one end of the carrier gas inlet pipe, and the other end of the carrier gas inlet pipe is connected to the carrier gas supply device, and the carrier gas supply device is preferably a carrier gas generator.

[0080] It can be understood that in some other embodiments, a carrier gas inlet pipe is provided in the connecting channel, one end of the carrier gas inlet pipe is connected to the inner cavity of the test chamber body, and the other end of the carrier gas inlet pipe is connected to the carrier gas supply device; of course, one end of the carrier gas inlet pipe can also be sealed and connected to the part of the inner cavity of the connecting channel close to the test chamber body, and the other end of the carrier gas inlet pipe is connected to the carrier gas supply device after passing through the remaining part of the connecting channel. Those skilled in the art can make a choice according to the specific working conditions, which will not be repeated here.

[0081] The test cavity body is also provided with carrier gas outlet ports respectively connected to the inner cavity of the test cavity body. The connecting channels constitute carrier gas outflow channels 7-3-4, and the other end of the carrier gas outflow channels 7-3-4 is connected to the outside of the test cavity body.

[0082] It can be understood that in some other embodiments, a carrier gas outlet pipe is provided in the connecting channel, one end of the carrier gas outlet pipe is connected to the inner cavity of the test cavity body, and the other end of the carrier gas outlet pipe is connected to the outside world; of course, one end of the carrier gas outlet pipe can also be sealed and connected to the part of the inner cavity of the connecting channel close to the test cavity body, and the other end of the carrier gas outlet pipe is connected to the outside world after passing through the remaining part of the connecting channel. Those skilled in the art can make a choice according to the specific working conditions, and will not go into details here.

[0083] In this embodiment, the groove is a closed-loop groove around the inner cavity opening of the test cavity body. It can be understood that in some other embodiments, the groove is a non-closed-loop groove around the inner cavity opening of the test cavity body, such as a semicircular groove or an arc-shaped groove or a square groove, etc. Of course, the groove here can also be a plurality of intermittent grooves arranged at segmented intervals. Those skilled in the art can select the groove shape according to the specific working conditions; it will not be repeated here.

[0084] Each test cavity body includes at least one inner cavity. In this embodiment, one inner cavity is preferred. Those skilled in the art can select the number of inner cavities according to specific working conditions, which will not be described in detail here.

[0085] During the film permeation test, when the vacuum generator is evacuating the vacuum, a vacuum is generated in the groove, and the test sample is tightly adsorbed on the test cavity body, maintaining a certain vacuum degree in the groove;

[0086] The test sample is exposed to the inner cavity space of the chamber. When the composition of the gas in the inner cavity space of the cavity structure is stable (such as the introduction of oxygen or water vapor), this gas passes through the test sample into the inner cavity of the test cavity body. The carrier gas carries the permeated gas to the sensor for analysis to obtain the test results.

[0087] Example 4:

[0088] Embodiment 4 of the present disclosure provides a pop-up cavity structure, including:

[0089] A test cavity, the test cavity comprising a test cavity body;

[0090] A plurality of holes are provided on one side of the opening of the test chamber body for facing the sample to be tested, and an exhaust port connected to the holes is provided on the test chamber body. The connecting channel constitutes a vacuum tube, that is, the exhaust port is connected to one end of the vacuum tube, and the other end of the vacuum tube is connected to the vacuum device. The vacuum device can preferably be a vacuum pump or a vacuum generator.

[0091] It can be understood that in some other embodiments, a vacuum tube is provided in the communicating channel, one end of the vacuum tube is communicated with the hole, and the other end of the vacuum tube is communicated with the vacuum pumping device; of course, one end of the vacuum tube can also be sealed and communicated with the inner part of the communicating channel close to the hole, and the other end of the vacuum tube passes through the remaining part of the communicating channel and is communicated with the vacuum pumping device. Those skilled in the art can make a choice according to the specific working conditions, which will not be elaborated here.

[0092] The test chamber body also has a carrier gas inlet port connected to the inner cavity of the test chamber body respectively, and the connecting channel constitutes a carrier gas inlet channel, that is, the port of the carrier gas inlet channel is connected to one end of the carrier gas inlet pipe, and the other end of the carrier gas inlet pipe is connected to the carrier gas supply device, and the carrier gas supply device is preferably a carrier gas generator.

[0093] It can be understood that in some other embodiments, a carrier gas inlet pipe is provided in the connecting channel, one end of the carrier gas inlet pipe is connected to the inner cavity of the test chamber body, and the other end of the carrier gas inlet pipe is connected to the carrier gas supply device; of course, one end of the carrier gas inlet pipe can also be sealed and connected to the part of the inner cavity of the connecting channel close to the test chamber body, and the other end of the carrier gas inlet pipe is connected to the carrier gas supply device after passing through the remaining part of the connecting channel. Those skilled in the art can make a choice according to the specific working conditions, which will not be repeated here.

[0094] The test cavity body is further provided with carrier gas outlet ports respectively connected with the inner cavity of the test cavity body. The connecting passages constitute carrier gas outflow passages, and the other ends of the carrier gas outflow passages are connected with the outside of the test cavity body.

[0095] It can be understood that in some other embodiments, a carrier gas outlet pipe is provided in the connecting channel, one end of the carrier gas outlet pipe is connected to the inner cavity of the test cavity body, and the other end of the carrier gas outlet pipe is connected to the outside world; of course, one end of the carrier gas outlet pipe can also be sealed and connected to the part of the inner cavity of the connecting channel close to the test cavity body, and the other end of the carrier gas outlet pipe is connected to the outside world after passing through the remaining part of the connecting channel. Those skilled in the art can make a choice according to the specific working conditions, and will not go into details here.

[0096] Each test cavity body includes at least one inner cavity. In this embodiment, one inner cavity is preferred. Those skilled in the art can select the number of inner cavities according to specific working conditions, which will not be described in detail here.

[0097] In this embodiment, the holes are multiple holes arranged at intervals. The holes can be arranged in a circular manner, or in other random arrangements. At least one groove connected to the exhaust port can be set between adjacent holes. Those skilled in the art can make a choice based on the specific working conditions, which will not be repeated here.

[0098] During the film permeation test, when the vacuum generator is evacuated, a vacuum is generated at the hole, and the test sample is tightly adsorbed on the test cavity body, maintaining a certain vacuum degree at the hole;

[0099] The test sample is exposed to the inner cavity space of the chamber. When the composition of the gas in the inner cavity space of the cavity structure is stable (such as the introduction of oxygen or water vapor), this gas passes through the test sample into the inner cavity of the test cavity body. The carrier gas carries the permeated gas to the sensor for analysis to obtain the test results.

[0100] Example 5:

[0101] Embodiment 5 of the present disclosure provides a pop-up cavity structure, including:

[0102] A test cavity, the test cavity comprising a test cavity body;

[0103] A plurality of holes are provided on one side of the opening of the test chamber body for facing the test sample, and a porous mesh support body is provided in the holes. The test chamber body is provided with an exhaust port connected to the holes, and the connecting channel constitutes a vacuum tube, that is, the exhaust port is connected to one end of the vacuum tube, and the other end of the vacuum tube is connected to the vacuum device, which can preferably be a vacuum pump or a vacuum generator.

[0104] It can be understood that in some other embodiments, a vacuum tube is provided in the communicating channel, one end of the vacuum tube is communicated with the hole, and the other end of the vacuum tube is communicated with the vacuum pumping device; of course, one end of the vacuum tube can also be sealed and communicated with the inner part of the communicating channel close to the hole, and the other end of the vacuum tube passes through the remaining part of the communicating channel and is communicated with the vacuum pumping device. Those skilled in the art can make a choice according to the specific working conditions, which will not be elaborated here.

[0105] The test chamber body also has a carrier gas inlet port connected to the inner cavity of the test chamber body respectively, and the connecting channel constitutes a carrier gas inlet channel, that is, the port of the carrier gas inlet channel is connected to one end of the carrier gas inlet pipe, and the other end of the carrier gas inlet pipe is connected to the carrier gas supply device, and the carrier gas supply device is preferably a carrier gas generator.

[0106] It can be understood that in some other embodiments, a carrier gas inlet pipe is provided in the connecting channel, one end of the carrier gas inlet pipe is connected to the inner cavity of the test chamber body, and the other end of the carrier gas inlet pipe is connected to the carrier gas supply device; of course, one end of the carrier gas inlet pipe can also be sealed and connected to the part of the inner cavity of the connecting channel close to the test chamber body, and the other end of the carrier gas inlet pipe is connected to the carrier gas supply device after passing through the remaining part of the connecting channel. Those skilled in the art can make a choice according to the specific working conditions, which will not be repeated here.

[0107] The test cavity body is further provided with carrier gas outlet ports respectively connected with the inner cavity of the test cavity body. The connecting passages constitute carrier gas outflow passages, and the other ends of the carrier gas outflow passages are connected with the outside of the test cavity body.

[0108] It can be understood that in some other embodiments, a carrier gas outlet pipe is provided in the connecting channel, one end of the carrier gas outlet pipe is connected to the inner cavity of the test cavity body, and the other end of the carrier gas outlet pipe is connected to the outside world; of course, one end of the carrier gas outlet pipe can also be sealed and connected to the part of the inner cavity of the connecting channel close to the test cavity body, and the other end of the carrier gas outlet pipe is connected to the outside world after passing through the remaining part of the connecting channel. Those skilled in the art can make a choice according to the specific working conditions, and will not go into details here.

[0109] Each test cavity body includes at least one inner cavity. In this embodiment, one inner cavity is preferred. Those skilled in the art can select the number of inner cavities according to specific working conditions, which will not be described in detail here.

[0110] In this embodiment, the porous mesh support body can be a metal sintered mesh, porous ceramics, metal mesh, etc., or a metal part or non-metal part with small holes, etc. Those skilled in the art can choose according to the specific working conditions, which will not be repeated here.

[0111] In this embodiment, the holes are multiple holes arranged at intervals. The holes can be arranged in a ring manner (can be a circular ring or a square ring or other types of rings), or the holes can be arranged in other random arrangements. At least one groove connected to the exhaust port can be set between adjacent holes. Those skilled in the art can make a choice based on the specific working conditions, which will not be repeated here.

[0112] During the film permeation test, when the vacuum generator is evacuated, a vacuum is generated at the hole, and the test sample is tightly adsorbed on the test cavity body, maintaining a certain vacuum degree at the hole;

[0113] The test sample is exposed to the inner cavity space of the chamber. When the composition of the gas in the inner cavity space of the cavity structure is stable (such as the introduction of oxygen or water vapor), this gas passes through the test sample into the inner cavity of the test cavity body. The carrier gas carries the permeated gas to the sensor for analysis to obtain the test results.

[0114] Example 6:

[0115] Embodiment 6 of the present disclosure provides a film penetration testing device, comprising the pop-up cavity structure described in embodiment 1, embodiment 2, embodiment 3, embodiment 4, or embodiment 5 of the present disclosure.

[0116] Example 7:

[0117] like Figure 4 As shown, embodiment 7 of the present disclosure provides a film permeation testing device, the testing device includes a chamber structure, the chamber structure includes a test chamber 9 (i.e., a second chamber) and a sensor chamber 1 (i.e., a first chamber), both of which contain an inner cavity;

[0118] The sensor compartment 1 is arranged at the upper part of the test cavity compartment 9, and at least one sensor element 14 is arranged in the inner cavity of the sensor compartment 1. At least one pop-up test cavity 7 is arranged in the inner cavity of the test cavity compartment 9. The pop-up test cavity 7 is the pop-up cavity structure described in Example 1 or Example 2 or Example 3 or Example 4 or Example 5 of the present disclosure. The inner cavity of the sensor compartment 1 and the inner cavity of the test cavity compartment 9 are connected by at least one pipeline.

[0119] In this embodiment, a sensor chamber drain port 3 is further provided on the sensor chamber 1, and a test chamber drain port 8 is further provided on the test chamber 9. The air outlet port of the sensor element 14 is connected to the outside of the sensor chamber 1 through a pipeline, and a control valve 12 is provided on the pipeline.

[0120] At least one base plate 7-1 is fixed to the side wall of the inner cavity where the cavity structure 7-3 is located (in this embodiment, three base plates are preferably used in parallel up and down). At least one cavity structure is connected to the moving end of the driving mechanism on the plate. At least one through slot for the cavity structure to enter and exit is opened on the side wall of the inner cavity where the cavity structure is located.

[0121] The first end of the push-pull member passes through the through slot and is fixedly connected to the cavity structure 7-3. The second end of the push-pull member is provided with a windshield cover 6 and is located outside the warehouse body. A sealing gasket 5 is provided on the side of the windshield cover 6 opposite to the through slot.

[0122] In this embodiment, the driving mechanism is preferably a cylinder. It can be understood that in some other embodiments, the driving mechanism can also be an electric cylinder mechanism, an electromagnetic driving mechanism, or a hydraulic driving mechanism. Those skilled in the art can make a choice based on the specific working conditions, which will not be elaborated here.

[0123] It can be understood that in some other embodiments, at least two parallel substrates are included, and at least two parallel grooves for the carrier gas inlet pipe and the carrier gas outlet pipe to pass through are fixed on both sides of each plate. The top wall of the inner cavity where the cavity structure is located is provided with grooves for the passage of pipelines, and the openings of the grooves through which the same pipeline passes are opposite.

[0124] It is understandable that in some other embodiments, at least two parallel substrates are included, and at least two parallel grooves for the carrier gas inlet pipe and the carrier gas outlet pipe to pass through are fixed on both sides of each substrate, and the openings of the grooves through which the same pipeline passes are opposite.

[0125] In this embodiment, the carrier gas outlet port and the carrier gas inlet port of the cavity structure are respectively connected to one end of the corresponding metal tube 4 through different metal hoses 7-5. Preferably, the metal hose 7-5 is connected to the metal tube 4 through the connector 7-2, and the other end of one metal tube 4 is connected to the sensor element 14 through the valve assembly 2, and the other end of the other metal tube 4 is connected to the carrier gas generating device, and the metal hose 7-5 is located in the inner cavity where the cavity structure is located.

[0126] Specifically, the carrier gas outlet port of the cavity structure is connected to one end of the first metal tube through a first metal hose, and the other end of the first metal tube is connected to the sensing element. The carrier gas inlet port of the cavity structure is connected to one end of the second metal tube through a second metal hose, and the other end of the second metal tube is connected to the carrier gas generating device, and the metal hose is located in the inner cavity where the cavity structure is located; wherein, the first metal hose passes through two grooves with opposite openings, and the second metal hose passes through the other two grooves with opposite openings.

[0127] In this embodiment, each groove includes two parallel and opposite groove plates, which are fixedly connected to the plate. It can be understood that in some other embodiments, grooves can be directly opened on the plate. The grooves can be U-shaped grooves, rectangular grooves, trapezoidal grooves, etc. Those skilled in the art can make choices based on specific working conditions, which will not be elaborated here.

[0128] In this embodiment, a temperature control component is provided on the side wall of each independent inner cavity; preferably, a test cavity temperature control component 10 is provided in the inner cavity of the test cavity, and a sensor cavity temperature control component 11 is provided in the inner cavity of the sensor cavity 1;

[0129] The temperature control component includes at least one circulation fan for spatial air circulation; in this embodiment, a circulation fan is preferably provided in the sensor compartment and three circulation fans are provided in the test chamber compartment. The number of circulation fans can be designed according to the specific airflow direction and the size of the compartment body cavity, which will not be repeated here.

[0130] It is understandable that in some other embodiments, the temperature control component can be set only in the test cavity 9 or the sensor cavity 1. Those skilled in the art can make a choice according to the specific working conditions, which will not be described here.

[0131] At least one electrical element 13 connected to a sensing element 14 is disposed in the inner cavity of the sensor compartment 1 .

[0132] In this embodiment, the test chamber 9 and the sensor chamber 1 are surrounded by insulation boards. It can be understood that in some other embodiments, only the test chamber 9 or the sensor chamber 1 may be surrounded by insulation boards, or only the panels of the two chamber bodies that are in contact with each other may be made of insulation boards. Those skilled in the art can make a choice based on the specific working conditions, which will not be elaborated here.

[0133] In this embodiment, the test cavity 9 and the sensor cavity 1 have the same shape and size, and the sensor cavity 1 is fixed directly above the test cavity 9. It can be understood that in some other embodiments, the shapes and sizes of the test cavity 9 and the sensor cavity 1 may also be different; the sensor cavity 1 may also be arranged on the side of the test cavity 9, that is, the two are arranged horizontally side by side, as long as they are not arranged below the test cavity 9. Those skilled in the art can design it according to the specific working conditions, which will not be repeated here.

[0134] In this embodiment, a test gas outlet 15 and a test gas inlet 18 are further provided in the test chamber. A temperature sensor 16, a humidity sensor 17 and a humidity generator 19 are also provided in the test chamber.

[0135] Before the test begins, the driving mechanism pushes the cavity structure out through the through slot. After the test sample is replaced, the driving mechanism pulls the cavity structure back through the through slot and seals the through slot with a baffle and a sealing gasket.

[0136] When the vacuum device is working, the sample to be tested is adsorbed on the opening side of the test chamber and the preset vacuum degree in the groove or hole is maintained;

[0137] The test sample is exposed in the inner cavity space of the chamber, and the test gas is injected through the test gas inlet. When the composition of the gas in the inner cavity space where the cavity structure is located is stable, this gas penetrates the test sample into the inner cavity of the test cavity. The carrier gas carries the permeated gas to the sensor for analysis to obtain the test results.

[0138] When used for water vapor testing, the test gas outlet 15, the test gas inlet 18, the temperature sensor 16, the humidity sensor 17 and the humidity generating device 19 are combined to implement a water vapor penetration test at a preset humidity.

[0139] Example 7:

[0140] Embodiment 7 of the present disclosure provides a film permeation testing device, comprising a chamber body having an inner cavity, wherein a plate is provided in the inner cavity of the chamber body, the plate dividing the inner cavity into a first inner cavity and a second inner cavity, wherein the first inner cavity is provided above or to the side of the second inner cavity;

[0141] The chamber structure includes a test chamber (i.e., the second chamber) and a sensor chamber (i.e., the first chamber), both of which contain an inner cavity. The test chamber (i.e., the second chamber) and the sensor chamber are divided by a plate through an inner cavity in the chamber structure.

[0142] The sensor compartment is arranged at the upper part of the test cavity compartment, at least one sensing element is arranged in the inner cavity of the sensor compartment 1, and at least one pop-up cavity structure described in Example 1 or Example 2 or Example 3 or Example 4 or Example 5 of the present disclosure is arranged in the inner cavity of the test cavity compartment, and the inner cavity of the sensor compartment and the inner cavity of the test cavity compartment are connected by at least one pipeline.

[0143] In this embodiment, a sensor compartment drain port is provided on the sensor compartment, and a test cavity compartment drain port is provided on the test cavity compartment. The air outlet port of the sensing element is connected to the outside of the sensor compartment through a pipeline, and a control valve is provided on the pipeline.

[0144] At least one base plate is fixed to the side wall of the inner cavity where the cavity structure is located, at least one cavity structure is connected to the moving end of the driving mechanism on the plate, and at least one through slot for the cavity structure to enter and exit is opened on the side wall of the inner cavity where the cavity structure is located;

[0145] The first end of the push-pull member passes through the through slot and is fixedly connected to the cavity structure. The second end of the push-pull member is provided with a baffle and is located outside the bin body. A sealing gasket is provided on the side of the baffle opposite to the through slot.

[0146] In this embodiment, the driving mechanism is preferably a cylinder. It can be understood that in some other embodiments, the driving mechanism can also be an electric cylinder mechanism, an electromagnetic driving mechanism, or a hydraulic driving mechanism. Those skilled in the art can make a choice based on the specific working conditions, which will not be elaborated here.

[0147] It can be understood that in some other embodiments, at least two parallel substrates are included, and at least two parallel grooves for the carrier gas inlet pipe and the carrier gas outlet pipe to pass through are fixed on both sides of each plate. The top wall of the inner cavity where the cavity structure is located is provided with grooves for the passage of pipelines, and the openings of the grooves through which the same pipeline passes are opposite.

[0148] It is understandable that in some other embodiments, at least two parallel substrates are included, and at least two parallel grooves for the carrier gas inlet pipe and the carrier gas outlet pipe to pass through are fixed on both sides of each substrate, and the openings of the grooves through which the same pipeline passes are opposite.

[0149] In this embodiment, the carrier gas outlet port and the carrier gas inlet port of the cavity structure are respectively connected to one end of the corresponding metal tube 4 through different metal hoses 7-5. Preferably, the metal hose 7-5 is connected to the metal tube 4 through the connector 7-2, and the other end of one metal tube 4 is connected to the sensor element 14 through the valve assembly 2, and the other end of the other metal tube 4 is connected to the carrier gas generating device, and the metal hose 7-5 is located in the inner cavity where the cavity structure is located.

[0150] Specifically, the carrier gas outlet port of the cavity structure is connected to one end of the first metal tube through a first metal hose, and the other end of the first metal tube is connected to the sensing element. The carrier gas inlet port of the cavity structure is connected to one end of the second metal tube through a second metal hose, and the other end of the second metal tube is connected to the carrier gas generating device, and the metal hose is located in the inner cavity where the cavity structure is located; wherein, the first metal hose passes through two grooves with opposite openings, and the second metal hose passes through the other two grooves with opposite openings.

[0151] In this embodiment, each groove includes two parallel and opposite groove plates, which are fixedly connected to the plate. It can be understood that in some other embodiments, grooves can be directly opened on the plate. The grooves can be U-shaped grooves, rectangular grooves, trapezoidal grooves, etc. Those skilled in the art can make choices based on specific working conditions, which will not be elaborated here.

[0152] In this embodiment, a temperature control component is provided on the side wall of each independent inner cavity, a test cavity temperature control component is provided in the inner cavity of the test cavity, and a sensor cavity temperature control component is provided in the inner cavity of the sensor cavity; the temperature control component includes at least one circulation fan for spatial air circulation; in this embodiment, preferably one circulation fan is provided in the sensor cavity, and three circulation fans are provided in the test cavity. The number of circulation fans can be designed according to the specific airflow direction and the size of the cavity of the cavity, which will not be repeated here.

[0153] It is understandable that in some other embodiments, the temperature control component can be set only in the test cavity or the sensor cavity. Those skilled in the art can make a choice according to the specific working conditions, which will not be described here.

[0154] At least one electrical element connected to the sensing element is arranged in the inner cavity of the sensor compartment.

[0155] In this embodiment, the test cavity and the sensor cavity are surrounded by insulation boards. It can be understood that in some other embodiments, only the test cavity or the sensor cavity may be surrounded by insulation boards, or only the panels of the two cavity bodies that are in contact with each other may be made of insulation boards. Those skilled in the art can make a choice based on the specific working conditions, which will not be elaborated here.

[0156] In this embodiment, the test cavity and the sensor cavity are of the same shape and size, and the sensor cavity is fixed directly above the test cavity. It can be understood that in some other embodiments, the shapes and sizes of the test cavity and the sensor cavity may also be different; the sensor cavity may also be arranged on the side of the test cavity, that is, the two are arranged side by side horizontally, as long as they are not arranged below the test cavity. Those skilled in the art can design it according to the specific working conditions, which will not be repeated here.

[0157] In this embodiment, a test gas outlet and a test gas inlet are further provided in the test chamber, and a temperature sensor, a humidity sensor and a humidity generating device are also provided in the test chamber;

[0158] Before the test begins, the driving mechanism pushes the cavity structure out through the through slot. After the test sample is replaced, the driving mechanism pulls the cavity structure back through the through slot and seals the through slot with a baffle and a sealing gasket.

[0159] When the vacuum device is working, the sample to be tested is adsorbed on the opening side of the test chamber and the preset vacuum degree in the groove or hole is maintained;

[0160] The test sample is exposed in the inner cavity space of the chamber, and the test gas is injected through the test gas inlet. When the composition of the gas in the inner cavity space where the cavity structure is located is stable, this gas penetrates the test sample into the inner cavity of the test cavity. The carrier gas carries the permeated gas to the sensor for analysis to obtain the test results.

[0161] When used for water vapor testing, the test gas outlet, test gas inlet, temperature sensor, humidity sensor and humidity generating device are combined to achieve water vapor penetration testing at a preset humidity.

[0162] The foregoing description is merely a preferred embodiment of the present disclosure and is not intended to limit the present disclosure. Those skilled in the art will readily appreciate that various modifications and variations are possible. Any modifications, equivalent substitutions, or improvements made within the spirit and principles of the present disclosure shall be included within the scope of protection of the present disclosure.

Claims

1. A pop-up cavity structure, characterized by: include: Test chamber; The test chamber is connected to the driving mechanism and can move in and out of the test environment chamber under the drive mechanism to achieve extension and retraction of the test chamber; The carrier gas outlet port of the test chamber is connected to the sensing element through a first metal hose, and the carrier gas inlet port of the test chamber is connected to the carrier gas supply device through a second metal hose; A groove is formed on one side of the opening of the test chamber for facing the sample, and the test chamber has an exhaust port connected to the groove. The test chamber also has a carrier gas inlet port and a carrier gas outlet port respectively connected to the inner cavity of the test chamber. A plurality of holes are formed on one side of the opening of the test chamber for facing the sample, and the test chamber has an exhaust port connected to each of the holes. When the composition of the gas in the environmental chamber space is stable, the gas passes through the test sample into the inner cavity of the pop-up cavity structure, and the carrier gas carries the permeated gas to the sensing element for analysis to obtain the test results.

2. The pop-up cavity structure according to claim 1, wherein: The inner surface of the metal hose is polished.

3. The pop-up cavity structure according to claim 1, wherein: The sensing element is a trace oxygen sensor or a trace water sensor or a combination of a trace oxygen sensor and a trace water sensor.

4. The pop-up cavity structure according to claim 1, wherein: The metal hose sealing leakage rate is less than 1×10 -5 std cm 3 / s.

5. The pop-up cavity structure according to claim 1, wherein: The bending radius of the metal hose is less than or equal to 20cm.

6. The pop-up cavity structure according to claim 1, wherein: The inner diameter of the metal hose is less than or equal to 20mm.

7. The pop-up cavity structure according to claim 1, wherein: The driving mechanism is fixed on the first base plate, and the first base plate is provided with a first guide groove for accommodating the first metal hose and a second guide groove for accommodating the second metal hose.

8. The pop-up cavity structure according to claim 7, wherein: A second substrate parallel to the first substrate is provided on the upper side of the first substrate, and a third guide groove for accommodating the first metal hose and a fourth guide groove for accommodating the second metal hose are provided on a side of the second substrate facing the first substrate.

9. The pop-up cavity structure according to claim 7, wherein: The top wall of the cavity where the pop-up cavity structure is located is parallel to the first substrate, and a third guide groove for accommodating the first metal hose and a fourth guide groove for accommodating the second metal hose are provided on the side of the top wall facing the first substrate.

10. The pop-up cavity structure according to claim 8 or 9, characterized in that: The first guide groove and the third guide groove are arranged opposite to each other, and the second guide groove and the fourth guide groove are arranged opposite to each other.

11. A gas permeation testing device, characterized in that: A test chamber is provided with at least one pop-up cavity structure according to any one of claims 1 to 10, and a through slot for the pop-up cavity structure to pass through is opened on the side wall of the test chamber; The apparatus further comprises a sensor compartment, the sensor compartment being disposed above the test cavity compartment, the inner cavity of the sensor compartment being provided with at least one sensing element, the inner cavity of the test cavity compartment being provided with at least one pop-up test cavity, the inner cavity of the sensor compartment being connected to the inner cavity of the test cavity compartment via at least one pipeline; The first end of the push-pull member passes through the through slot and is fixedly connected to the test cavity. The second end of the push-pull member is provided with a windshield cover and is located outside the chamber body. A sealing gasket is provided on the side of the windshield cover opposite to the through slot.

12. A gas permeation testing method, utilizing the pop-up cavity structure according to any one of claims 1 to 10, comprising the following steps: Before the test begins, the driving mechanism pushes the pop-up cavity structure out of the test environment chamber. After the test sample is replaced, the driving mechanism pulls the pop-up cavity structure back. The test sample is exposed to the test environment chamber space. When the composition of the gas in the environment chamber space is stable, the gas penetrates the test sample into the inner cavity of the pop-up cavity structure. The carrier gas carries the permeated gas to the sensor element for analysis to obtain the test results.

Images