Vertical batch furnace assembly

Abstract

A vertical batching furnace assembly for processing wafers includes a cassette loading / unloading space with a cassette storage device and a cassette loading / unloading mechanism. The cassette loading / unloading mechanism includes a cassette loader configured to transfer wafer cassettes between a cassette storage position and a wafer transport position by supporting and moving the wafer cassettes on a cassette loading / unloading arm. The cassette loading / unloading arm has a detector to detect cassettes in a detection area. The cassette loader moves the detection area of ​​the detector toward one of the cassette storage positions to detect the presence of a cassette.

Description

Technical Field

[0001] This disclosure generally relates to a vertical batching furnace assembly for processing wafers. More specifically, this disclosure relates to a vertical batching furnace assembly for processing wafers having a cassette loading / unloading space configured and arranged for loading and unloading wafer cassettes for storing wafers, the space comprising:

[0002] A cartridge storage device having multiple cartridge storage locations and configured to store multiple wafer cartridges; and

[0003] A cassette loader is configured to support the wafer cassette on a cassette loading arm while transferring the wafer cassette back and forth from the cassette storage location. Background Technology

[0004] Most vertical batching furnace assemblies have a cassette loading / unloading space for receiving and storing wafer cassettes. This cassette loading / unloading space typically has a cassette loading / unloading mechanism for transferring wafer cassettes between the cassette inlet / outlet, cassette storage unit, and wafer transfer position. At the cassette inlet / outlet, wafer cassettes can be exchanged between the vertical batching furnace assembly and the cleanroom environment in which the vertical batching furnace assembly is housed. Received wafer cassettes can be placed in the wafer transfer position, from which wafers can be unloaded from the wafer cassettes and loaded into a wafer boat for processing.

[0005] The cassette storage device may have multiple cassette storage positions, each of which can store a wafer cassette. The cassette storage positions may be arranged in a storage rack, which has, for example, a storage turntable. To enable access to the inlet / outlet, wafer transfer positions, and all wafer storage positions, a typical cassette loading / unloading mechanism may include a lifting mechanism and a robotic arm. The lifting mechanism provides vertical movement for the cassette loading / unloading mechanism to reach cassette storage positions at different vertical heights. The robotic arm provides two-dimensional horizontal movement to reach at least some of the storage positions.

[0006] Sensors may be required to detect the presence and correct orientation of a wafer cassette at at least one of the following locations: the inlet / outlet in the cassette loading / unloading space, the cassette storage location, and the wafer transfer location. Since a large number of wafer cassettes may be stored in the cassette storage device, a large number of cassette storage locations may be required. Therefore, a large number of sensors may be needed to detect the presence and / or correct orientation of wafer cassettes at storage locations, which can complicate the design. Summary of the Invention

[0007] This overview is provided to introduce a set of concepts in a simplified form. These concepts are described in more detail below in the detailed description of exemplary embodiments of this disclosure. This overview is not intended to identify key or essential features of the claimed subject matter, nor is it intended to limit the scope of the claimed subject matter.

[0008] Therefore, an object of the present invention may be to provide a vertical batching furnace assembly with an improved design for detecting at least one of the following: the presence of a wafer cassette in the assembly, and the correct orientation of the wafer cassette in the assembly.

[0009] Therefore, a vertical batching furnace assembly according to claim 1 can be provided. More specifically, the vertical batching furnace assembly may include a cassette loading / unloading space configured and arranged for loading and unloading wafer cassettes for storing wafers. The space may include: a cassette storage device having a plurality of cassette storage locations and configured to store a plurality of wafer cassettes; and a cassette loader configured to transfer wafer cassettes back and forth from the cassette storage locations. The cassette loader may have a cassette loading / unloading arm to support the wafer cassettes. The cassette loading / unloading arm may have a detector to detect cassettes in a detection area.

[0010] A cartridge loader can be configured and arranged to move the detection area of ​​a detector toward one of a plurality of cartridge storage locations to detect the presence of a cartridge at said storage location. By mounting the detector on a cartridge loading arm, multiple storage locations can be monitored using the detector. The detector can move along the storage locations with the cartridge loader while detecting the presence of a wafer cartridge in the detection area. Therefore, a separate detector is not necessarily required for each of the storage locations.

[0011] For the purpose of summarizing the invention and its advantages over the prior art, certain objectives and advantages of the invention have been described in the foregoing. It should be understood, of course, that not all such objectives or advantages may be achieved according to any particular embodiment of the invention. Therefore, by way of example, those skilled in the art will recognize that the invention may be embodied or practiced in a manner that achieves or optimizes one or more advantages taught or stated herein, without necessarily achieving other objectives or advantages that may be taught or stated herein.

[0012] Various embodiments are claimed in the appended claims, which will be further illustrated with reference to the examples shown in the accompanying drawings. The embodiments may be combined or applied separately from each other.

[0013] All these embodiments are intended to be within the scope of the disclosed invention. These and other embodiments will become apparent to those skilled in the art from the following detailed description of certain embodiments with reference to the accompanying drawings, and the invention is not limited to any particular embodiment disclosed. Attached Figure Description

[0014] Although this specification concludes with claims that specifically point out and expressly claim protection to the contents regarded as embodiments of the invention, the advantages of embodiments of the present disclosure can be more readily determined by reading in conjunction with the accompanying drawings, which illustrate certain examples of embodiments of the present disclosure:

[0015] Figure 1 A top partial cross-sectional view of an example of a vertical batch furnace assembly as described;

[0016] Figure 2 Show Figure 1 A top-view cross-sectional view of the loading and unloading space of an example box;

[0017] Figure 3 A side cross-sectional view showing another example of the loading and unloading space of the carcass, as described; and

[0018] Figure 4 A detailed cross-sectional view of the box loader as described is shown. Detailed Implementation

[0019] In this disclosure, similar or corresponding features are indicated by similar or corresponding reference numerals. The description of various embodiments is not limited to the examples shown in the drawings, and the reference numerals used in the detailed description and claims are not intended to limit the description of the embodiments, but are included to illustrate the embodiments by referring to the examples shown in the drawings.

[0020] Although certain embodiments and examples are disclosed below, those skilled in the art will understand that the invention extends beyond the specific embodiments and / or uses disclosed herein, as well as obvious modifications and equivalents thereof. Therefore, it is intended that the scope of the invention be limited not to the specific disclosed embodiments described below. Furthermore, the illustrations presented herein are not intended to be actual views of any particular material, structure, or device, but are merely idealized representations used to describe embodiments of this disclosure.

[0021] As used herein, the term “wafer” can refer to any one or more underlying materials that can be used or on which devices, circuits or films can be formed.

[0022] In the most general sense, this disclosure provides as follows Figure 1 The top view depicts a vertical batching furnace assembly 10 for processing wafers. The vertical batching furnace assembly 10 may include a cassette loading / unloading space 12, a wafer loading / unloading space 14, and a first wall 16 separating the cassette loading / unloading space 12 and the wafer loading / unloading space 14. A wafer loader 56 may be located within the wafer loading / unloading space. The assembly may further include a processing chamber 60 and a wafer boat loading / unloading device located below the processing chamber 60.

[0023] The first wall 16 may have at least one wafer transfer opening 18, and in front of the wafer transfer opening, on one side of the first wall 16 pointing toward the cassette loading / unloading space 12, a wafer transfer position 20 for the wafer cassette 22 may be provided, such as... Figure 2As shown in the top view, the cassette loading / unloading space 12 may include a cassette storage device and cassette loading / unloading mechanisms 26, 28. The cassette storage device may have multiple cassette storage positions 24 and may be configured to store multiple wafer cassettes 22 having multiple wafers. The cassette loading / unloading mechanisms 26, 28 may include a first cassette loader 26 configured to transfer wafer cassettes 22 between a first set 30 of cassette storage positions 24 and wafer transfer positions 20.

[0024] Optionally, the cassette loading and unloading mechanisms 26, 28 may have a second cassette loader 28 configured to transport wafer cassettes between the second set 32 ​​of cassette storage positions 24 and the wafer transfer position 20. An advantage of having two cassette loaders 26, 28 is that each cassette loader 26, 28 can reach at least a portion of the cassette storage positions 24 within the cassette loading and unloading space. There is no need for a single robotic arm capable of reaching every cassette storage position. It is sufficient for the first cassette loader 26 to transport back and forth from the first set 30 of cassette storage positions 24 and the second cassette loader 28 to transport back and forth from the second set 32 ​​of cassette storage positions 24, provided that the first set 30 and the second set 32 ​​together encompass all cassette storage positions 24 of the cassette storage device. By carefully selecting the positions of the first cassette loader 26 and the second cassette loader 28 relative to the cassette storage positions 24 within the cassette loading and unloading space 12, each cassette loader can have a limited reach, while together they still cover all cassette storage positions 24 within the entire cassette loading and unloading space 12. The first carton loader 26 may be positioned, for example, at or near a first end of the carton loading / unloading space 12, while the second carton loader 28 may be positioned at or near a second end of the carton loading / unloading space 12 opposite to the first end. Then, the first set 30 of the carton storage positions 24 will cover approximately half of the carton loading / unloading space 12 near the first end, while the second set 32 ​​of the carton storage positions 24 will cover approximately the other half of the carton loading / unloading space 12 near the second end. Because both the first carton loader 26 and the second carton loader 28 only need to cover approximately half the area relative to a known carton loader, the reach can be small. A smaller reach means less precision, and therefore allows for the use of cheaper carton loaders.

[0025] Secondly, by having two cassette loaders 26 and 28, both of which can transport wafer cassettes toward the wafer transfer position, they can transport wafer cassettes simultaneously. This means that while the first cassette loader 26 is placing a wafer cassette 22 at the wafer transfer position 20, the second cassette loader 28 may already be retrieving another wafer cassette 22 from the cassette storage position 24 of the cassette storage device. By cleverly selecting where to store the wafer cassette 22 and choosing the order in which to transport the wafer cassette 22 from the cassette storage device to the wafer transfer position 20, a high overall transport capacity of the cassette loading and unloading mechanisms 26 and 28 can be achieved. Using this scheme, the total transport capacity of the cassette loading and unloading mechanism can simply be the sum of the transport capacities of the first cassette loader 26 and the second cassette loader 28. To improve the total transport capacity of the cassette loading and unloading mechanisms 26 and 28, the transport speed of both the first cassette loader 26 and the second cassette loader 28 may only need to be more than half the transport speed of the cassette loader used previously. Lower transport speeds mean less stability, and therefore even cheaper cassette loaders can be used. Due to the lower transport speed, the wafer cassette 22 can also transport wafers more smoothly, thereby reducing the risk of particle release, which could damage the wafers. The reach of both the first cassette loader 26 and the second cassette loader 28 can be improved and transport capacity increased by using them.

[0026] In an embodiment, the first cassette loader 26 and the second cassette loader 28 may each have a cassette loading arm 34 and a lifting mechanism 36. The lifting mechanism 36 may be configured to reach the wafer cassette 22 placed at different vertical heights in the cassette loading space 12 at the cassette storage positions 24.

[0027] In one embodiment, the lifting mechanism 36 of the first case loader 26 may be arranged on or adjacent to the second wall 38, and the lifting mechanism 36 of the second case loader 28 may be arranged on or adjacent to the third wall 40. The second wall 38 and the third wall 40 may define the case loading and unloading space 12 at opposite ends.

[0028] When the lifting mechanisms 36 of the first carton loader 26 and the second carton loader 28 are arranged at or near the opposite ends of the carton loading / unloading space 12, the carton loaders 26, 28 themselves are also arranged at or near the opposite ends of the carton loading / unloading space 12. Then, the first group 30 and the second group 32 of carton storage positions will be arranged at or near the opposite ends of the carton loading / unloading space 12. The first group 30 of carton storage positions 24 may be arranged on or near the second wall 38, while the second group 32 of carton storage positions 24 may be arranged on or near the third wall 40. The first group 30 of carton storage positions 24 will cover approximately half of the carton loading / unloading space 12 closest to the first end, while the second group 32 of carton storage positions 24 will cover approximately the other half of the carton loading / unloading space closest to the second end. Because the first carton loader 26 and the second carton loader 28 only need to cover approximately half the area relative to a known carton loader, the reach of each carton loader may be small. The smaller reach means that less complex and more robust box loaders 26, 28 can be implemented, which is advantageous considering manufacturing costs.

[0029] In embodiments, the cassette storage device can be configured to store 10 to 50 wafer cassettes 22. The cassette storage device can, for example, be configured to store at least 20 wafer cassettes 22. The cassette storage device can also be configured to store at least 40 wafer cassettes 22. This means that the cassette storage device has at least 20 or 40 cassette storage positions 24. Typically, about 50 to 250 wafers are needed to fill a wafer boat 58. Typically, about 25 wafers are provided in a wafer cassette 22. This means that typically 2 to 10 wafer cassettes 22 are needed to fill one wafer boat 58. By having at least 20 or 40 cassette storage positions 24, enough wafer cassettes 22 can be stored to fill at least two wafer boats 58, specifically about four. Therefore, while the vertical batching furnace assembly 10 is processing wafers from the wafer cassettes 22 stored in the cassette loading / unloading space 12, loading the wafer cassettes 22 into and unloading the wafer cassettes from the cassette loading / unloading space can be delayed for a considerable period.

[0030] In this embodiment, the wafer cassette 22 may be embodied as a front-opening wafer transfer cassette (FOUP). FOUP is a standardized wafer cassette used in the industry for wafers. Using FOUP facilitates the interchangeability of wafer cassette 22 between the vertical batching assembly 10 and other wafer processing machines.

[0031] In an embodiment, the vertical batching furnace assembly 10 may further include at least one wafer inlet / outlet 42, 44 disposed in walls 16, 38, 40, 46 defining a wafer loading / unloading space 12. The walls may be the previously mentioned first wall 16, second wall 38, or third wall 40, but may also be a different fourth wall 46. Wafer loading / unloading mechanisms 26, 28 may be configured to additionally transfer wafer cassettes 22 back and forth from at least one wafer inlet / outlet 42, 44. At least one wafer inlet / outlet 42, 44 provides an inlet and outlet for exchanging wafer cassettes 22 between the vertical batching furnace assembly 10 and the external environment (particularly a cleanroom environment).

[0032] At least one cartridge inlet / outlet 42, 44 may include a first cartridge inlet / outlet 42 and a second cartridge inlet / outlet 44 in a fourth wall 46, which may define a cartridge loading / unloading space 12 at opposite ends of the first wall 16. The first cartridge inlet / outlet 42 may be accessible to a first cartridge loader / unloader 26. The second cartridge inlet / outlet 44 may be accessible to a second cartridge loader / unloader 28. Some of the cartridge inlets / outlets 42, 44 and optionally cartridge storage locations 24 may have a rotatable platform to rotate the cartridge to proper alignment with the first cartridge loader / unloader 26 or the second cartridge loader / unloader 28.

[0033] By associating the first cassette inlet / outlet 42 and the second cassette inlet / outlet 44 with the first cassette loader 26 and the second cassette loader 28 respectively, and thus utilizing the first set 30 and the second set 32 ​​of cassette storage locations 24, a clear separation is achieved within the cassette loading / unloading space 12. Each of the cassette loaders 26, 28 may have its own inlet / outlet 42, 44 and cassette storage location 24. This means they can operate independently of each other without waiting for or interfering with each other. This improves the efficiency of loading and unloading the wafer cassette 22 within the cassette loading / unloading space 12.

[0034] In this embodiment, the vertical batch furnace assembly 10 may include, for example, Figure 3 The storage rack 48 depicted in the text Figure 3 A side cross-sectional view showing another example of a cartridge loading / unloading space. A storage rack may have at least a portion of cartridge storage locations 24. A storage rack 48 may have all cartridge storage locations 24. The cartridge loading / unloading space 12 is accessible via a closable maintenance opening, through which at least one storage rack 48 can be removed from the cartridge loading / unloading space 12.

[0035] Storage rack 48 is essentially a row of shelves for holding wafer cassettes 22. This is a basic design that requires no moving parts. By arranging the wafer cassettes 22 on storage rack 48, sufficient cassette storage positions 24 are created. When such storage racks 48 can be removed from the cassette loading / unloading space 12, they can be easily removed, for example, by a trolley, when such removal is necessary or desired. One or more storage racks 48 can be removed, for example, to allow maintenance personnel easy access to, for example, the cassette door opener device 54, which may require maintenance of the first wall 16. The cassette loading / unloading arm 34 of the second cassette loader 28 can be moved in an upper position, for example, by means of a lifting mechanism 36, allowing maintenance personnel to pass under the cassette loading / unloading arm 34. For example, by removing three storage racks 48 from the area accommodating the second set 32 ​​of cassette storage positions 24, the cassette door opener device 54 (see Figure 1 ).

[0036] In an embodiment, the vertical batch furnace assembly 10 may have a generally rectangular occupying area, the generally rectangular occupying area having two opposing short sides defining a width 50 of the vertical batch furnace assembly 10 and two opposing long sides defining a length 52 of the vertical batch furnace assembly 10. The width 50 of the vertical batch furnace assembly 10 may be 2.2 meters or less, or preferably 1.7 meters or less. The length 52 of the vertical batch furnace assembly 10 may be 5 meters or less, preferably 4 meters or less.

[0037] By having a generally rectangular footprint, multiple vertical batch furnace assemblies 10 can be arranged adjacent to each other, thus making optimal use of the available floor space. Adjacent vertical batch furnace assemblies 10 with rectangular footprints may not have unused space between them. Considering interchangeability with other vertical batch furnace assemblies, for example, from other manufacturers / brands, a width 50 of less than 2.2 meters is advantageous. A length 52 of 5 meters or less, preferably 4 meters or less, is beneficial for significantly reducing the footprint.

[0038] In one embodiment, the vertical batching furnace assembly 10 may include a cassette door opener device 54. The cassette door opener device 54 may be placed at or near the wafer transport position 20. The cassette door opener device 54 may be arranged on the first wall 16. The cassette door opener device 54 may be configured to open the cassette door of the wafer cassette 22 placed in the wafer transport position 20. The cassette door opener device 54 may thus automatically open the cassette door of the wafer cassette 22 placed in the wafer transport position 20.

[0039] In an embodiment, the vertical batch furnace assembly 10 may further include a wafer loader 56, a processing chamber 60, and a wafer boat loading / unloading device located below the processing chamber 60. The wafer loader 56 may be located in the wafer loading / unloading space 14 and may be configured to transport wafers between the wafer cassette 22 and the wafer boat 58 in the wafer transfer position 20. The processing chamber 60 may be configured to process wafers contained in the wafer boat 58. The wafer boat loading / unloading device may be located adjacent to the wafer loading / unloading space 14. The wafer boat loading / unloading device may have a wafer boat 58 at the wafer boat transfer position and may be configured to transfer the wafer boat 58 to the processing chamber 60 and to the wafer boat transfer position.

[0040] When the wafer carrier 58 is in the wafer carrier transfer position, the wafer loading / unloading device 56 can transfer unprocessed wafers from the wafer cassette 22 in the wafer transfer position 20 to the wafer carrier 58, and transfer processed wafers from the wafer carrier 58 to the wafer cassette 22 in the wafer transfer position 20. When the wafer carrier 58 is loaded with one or more wafers, the wafer loading / unloading device can transfer the loaded wafer carrier 58 to the processing chamber 60. In the processing chamber 60, wafers can be processed. After processing, the wafer loading / unloading device can transfer the processed wafer carrier 58 from the processing chamber 60 back to the wafer carrier transfer position, where the wafer loading / unloading device 56 can transfer one or more processed wafers from the wafer carrier 58 to the wafer cassette 22 in the wafer transfer position 20, and transfer unprocessed wafers from the wafer cassette 22 in the wafer transfer position 20 to the wafer carrier 58, thereby completing the batch processing of the vertical batch furnace assembly 10.

[0041] In an embodiment, the first group 30 and the second group 32 of the cartridge storage location 24 may be different (see [link]). Figure 2 This means that the first group 30 and the second group 32 of the cartridge storage locations 24 are not the same group and do not overlap. The first group 30 and the second group 32 can be non-overlapping groups. Alternatively, they can be overlapping groups. The advantage of non-overlapping groups is that each cartridge storage location 24 is associated with only one cartridge loader 26, 28. This minimizes interference between the two cartridge loaders 26, 28, which improves the efficiency and reliability of the cartridge loaders 26, 28 and reduces the possibility of failure.

[0042] A wafer transport position 20 for a wafer cassette can be provided in front of at least one wafer transport opening 18, on one side of the first wall 16 pointing towards the cassette loading / unloading space 12. At least one wafer transport opening 18 may be associated with at least one cassette exchanger turntable 21. At least one cassette exchanger turntable 21 may include a plurality of cassette support surfaces, each configured to support a wafer cassette. The exchanger turntable 21 may be rotated by an actuator about a generally vertical exchanger axis 23 to convey each cassette support surface 34 to at least one cassette loading / unloading position 25, and to the wafer transport position 20 in front of the wafer transport opening 18. A vertical batching furnace assembly, specifically a cassette loading / unloading mechanism, may be configured to load wafer cassettes onto or retrieve wafer cassettes from the cassette support surfaces 34 of the exchanger turntable 21, the cassette support surfaces being in at least one loading / unloading position 25.

[0043] In one embodiment, the cartridge storage device may have a rotatable cartridge storage turntable having at least a portion of a cartridge storage position 24. The cartridge storage turntable may include a central vertical support that is rotatable about a vertical storage turntable axis. The vertical storage turntable axis may optionally be aligned with the vertical exchanger axis 23.

[0044] The cassette storage turntable may further include multiple platform stages connected to a central vertical support and having cassette storage positions 24. The cassette storage turntable may further include a drive assembly operably connected to the central vertical support for rotating the central vertical support together with the multiple platform stages about a vertical turntable axis. Such a cassette storage turntable is an efficient way to store wafer cassettes 22 in a limited space. Because the platform stages are rotatable, the cassette storage turntable can rotate unused or unoccupied cassette storage positions in the general direction of the associated cassette loaders 26, 28. The cassette loaders 26, 28 can therefore always place the wafer cassette at the nearest cassette storage position. Therefore, the cassette loaders 26, 28 only need a smaller reach range compared to when they themselves reach all cassette storage positions 24.

[0045] Cartridge loaders 26 and 28 can be configured to transport wafer cartons 22 back and forth from a carton storage location 24. The wafer cartons can be supported on a carton loading / unloading arm 34. The carton loading / unloading arm 34 may have a detector 35 to detect cartons in a detection area. The carton loaders 26 and 28 are constructed and arranged to move the detection area of ​​the detector 35 toward one of a plurality of carton storage locations to detect the presence of a carton at said one storage location. By positioning the detector 35 on the carton loading / unloading arm 34, the detector can be used for multiple storage locations. The detector 35 can move along the storage location with the carton loader while detecting the presence of a wafer carton in the detection area.

[0046] The cassette loading / unloading arm 34 may have a gripper 37, which is configured and arranged to move in a first direction 39 below the wafer cassette at the cassette storage location to pick up the cassette, such as Figure 4 The image is depicted in a top view. The gripper 37 may have a triangular shape, wherein one of the corners of the gripper extends in a first direction. A detector 35 may be mounted to the gripper 37. The detector 35 may be mounted to one of the corners of the gripper 37. The detector 35 may be mounted near said one corner of the gripper 37 that extends in the first direction 39. The detector 35 may have its detection area extend in the first direction 39. The detector 35 may be mounted near the edge of the gripper 37. The detector 35 may be constructed and arranged to detect cartridges in the detection area. The detector 35 may be mounted near the edge of the gripper 37, wherein the detection area is adjacent to the gripper 37.

[0047] Detector 35 may include: a laser or laser emitting diode that emits a radiation beam into the detection area; and a receiver surface that is sensitive to the returning laser beam radiation scattered or reflected from the cartridge when the cartridge is located in the detection area. Such detectors can be relatively simple, fast, inexpensive, and accurate.

[0048] The component further includes: at least one cartridge loading / removing position 25 associated with at least one wafer transfer position (20) located in front of at least one wafer transfer opening (18) in the walls (16, 38, 40, 46) defining the cartridge loading / unloading space (12); and at least one cartridge inlet / outlet (42, 44) located in the walls (16, 38, 40, 46). The cartridge loader may be configured and arranged to move the detection area of ​​a detector toward at least one cartridge loading / removing position 25 and / or at least one cartridge inlet / outlet (42, 44) to detect cartridges at at least one cartridge loading / removing position 25 and / or at least one cartridge inlet / outlet (42, 44). A separate detector at at least one cartridge loading / removing position 25 and / or at least one cartridge inlet / outlet (42, 44) may then be omitted, or an existing detector may be inspected in this manner.

[0049] The detector can be an acoustic sensor, which is constructed and arranged to emit acoustic waves into a detection area and receive acoustic wave reflections from the cartridge when the cartridge is located in the detection area. Such detectors are relatively simple, fast, inexpensive, and accurate.

[0050] Although exemplary embodiments of the invention have been described above with reference to the accompanying drawings, it should be understood that the invention is not limited to these embodiments. Variations of the disclosed embodiments can be understood and implemented by those skilled in the art when practicing the claimed invention, based on a study of the drawings, the disclosure, and the appended claims.

[0051] Throughout this specification, the reference to "an embodiment" or "an embodiment" means that a particular feature, structure, or characteristic described in connection with the embodiment is included in at least one embodiment of the invention. Therefore, the phrases "in one embodiment" or "in an embodiment" appearing in different places throughout this description do not necessarily refer to the same embodiment.

[0052] Furthermore, it should be noted that specific features, structures, or characteristics of one or more of the various embodiments described above may be used and implemented independently of each other, and may be combined in any suitable manner to form new, not explicitly described embodiments. Reference numerals used in the detailed description and claims do not limit the description of the embodiments, nor do they limit the claims. Reference numbers are for illustrative purposes only.

[0053] legend

[0054] 10-Vertical batch furnace assembly

[0055] 12-Box loading and unloading space

[0056] 14-Wafer loading and unloading space

[0057] 16-First Wall

[0058] 18-Chip Transfer Opening

[0059] 20-Chip Transfer Location

[0060] 21-Switcher Turntable

[0061] 22-Chip Casing

[0062] 23-Vertical switch axis

[0063] 24-Crate Storage Location

[0064] 26-First box loading and unloading device

[0065] 25-Cartridge loading / removal position

[0066] 28-Second Box Loader

[0067] 30-First group (box storage location)

[0068] 32-Second Group (Cartridge Storage Location)

[0069] 34-Box loading and unloading arm

[0070] 35-detector

[0071] 36-Lifting Mechanism

[0072] 37-Clamping device

[0073] 38-Second Wall

[0074] 39-First Direction

[0075] 40-Third Wall

[0076] 42-First box import / export

[0077] 44-Second Box Inlet / Outlet

[0078] 46-Fourth Wall

[0079] 48-Storage rack

[0080] 50-width

[0081] 52-Length

[0082] 54-Box door opener device

[0083] 56-Wafer Loader

[0084] 58-Jingzhou

[0085] 60-Processing Room

Claims

1. A vertical batching furnace assembly (10) for processing wafers, having a cassette loading / unloading space (12) configured and arranged for loading and unloading wafer cassettes for storing wafers, the space comprising: A cartridge storage device having multiple cartridge storage locations (24) and configured to store multiple wafer cartridges (22); The first box loader includes a first box loader arm; The second box loader includes a second box loader arm; At least one box inlet / outlet (42, 44); as well as At least one wafer transfer position (20) in front of at least one wafer transfer opening (18), The plurality of cartridge storage locations includes a first group of cartridge storage locations and a second group of cartridge storage locations, wherein the first group of cartridge storage locations does not include the cartridge storage locations in the second group of cartridge storage locations, and wherein the second group of cartridge storage locations does not include the cartridge storage locations in the first group of cartridge storage locations. The first carton loading / unloading arm is configured to reach the first set of carton storage locations among the plurality of carton storage locations. The second carton loading / unloading arm is configured to reach the second set of carton storage locations among the plurality of carton storage locations. Each of the cartridge loaders is configured to transport a wafer cartridge (22) back and forth from a cartridge storage location (24) while supporting the wafer cartridge on a cartridge loading arm (34), wherein the cartridge loading arm (34) has a detector (35) to detect a cartridge in a detection area, and the cartridge loader is constructed and arranged to move the detection area of ​​the detector toward one of the plurality of cartridge storage locations to detect the presence of a cartridge at said cartridge storage location. The cassette inlet / outlet is disposed in the walls (16, 38, 40, 46) defining the cassette loading / unloading space (12), and the cassette loaders (26, 28) are configured to additionally transfer the wafer cassette (22) back and forth from the at least one cassette inlet / outlet (42, 44). The at least one wafer transfer opening is disposed in the wall (16, 38, 40, 46) defining the cassette loading / unloading space (12), wherein the cassette loader (26, 28) is configured to transfer the wafer cassette (22) back and forth from at least one cassette loading / unloading position (25) associated with the at least one wafer transfer position (20).

2. The vertical batching furnace assembly according to claim 1, wherein the cassette loading arm (34) has a gripper (37) configured and arranged to move in a first direction below the wafer cassette at the cassette storage location to pick up the cassette.

3. The vertical batch furnace assembly according to claim 2, wherein the detector (35) is mounted to the holder and its detection area extends in the first direction (39).

4. The vertical batch furnace assembly according to claim 3, wherein the detector (35) is mounted near the end of the clamp in the first direction.

5. The vertical batch furnace assembly according to claim 2, wherein the detector (35) is mounted near the edge of the clamp.

6. The vertical batch furnace assembly of claim 5, wherein the detector (35) is configured and arranged to detect the cartridge in the detection area, and the detector is mounted near the edge of the holder, wherein the detection area is adjacent to the holder.

7. The vertical batch furnace assembly according to claim 2, wherein the clamp (37) has a triangular shape, wherein one of the corners of the clamp extends in the first direction.

8. The vertical batch furnace assembly according to claim 1, wherein the cassette loaders (26, 28) have a lifting mechanism (36) configured to reach the wafer cassette (22) placed at different vertical heights in the cassette loading / unloading space (12) at different cassette storage positions (24).

9. The vertical batch furnace assembly according to claim 8, wherein the lifting mechanism (36) of the cassette loader (26) is arranged on or adjacent to the wall (38) of the cassette loading and unloading space (12).

10. The vertical batch furnace assembly of claim 1, wherein the cassette storage device is configured to store at least 20 wafer cassettes (22).

11. The vertical batch furnace assembly of claim 1, wherein the cassette storage device is configured to store at least 40 wafer cassettes (22).

12. The vertical batching furnace assembly according to claim 1, wherein the wafer cassette (22) is embodied as a front-opening wafer transfer box (FOUP).

13. The vertical batch furnace assembly according to claim 1, having a generally rectangular occupying area having two opposite short sides defining the width (50) of the vertical batch furnace assembly (10) and two opposite long sides defining the length (52) of the vertical batch furnace assembly (10), wherein the width (50) of the vertical batch furnace assembly (10) is 2.2 meters or less.

14. The vertical batch furnace assembly according to claim 13, wherein the width (50) of the vertical batch furnace assembly (10) is 1.7 meters or less.

15. The vertical batching furnace assembly according to any one of the preceding claims, wherein for each wafer transfer opening (18), the vertical batching furnace assembly (10) comprises: A door opener device (54) is configured to open the door of the wafer cassette (22) placed at the wafer transfer position (20).

16. The vertical batch furnace assembly according to any one of claims 1-14, wherein the cassette storage device has a rotatable cassette storage turntable having at least a portion of the cassette storage position (24).

17. The vertical batch furnace assembly according to claim 2, wherein... The detector (35) includes: A laser or laser emitting diode that emits a radiation beam into the detection area in the first direction (39); as well as The receiver surface is sensitive to laser beam radiation returning from the wafer cassette when the wafer cassette (22) is located in the detection area.

18. The vertical batching furnace assembly of claim 2, wherein the detector is an acoustic sensor configured and arranged to emit acoustic waves into the detection area in the first direction (39) and to receive reflections of the acoustic waves returned from the wafer cassette (22) when located in the detection area.

19. The vertical batch furnace assembly according to claim 1, wherein the assembly further comprises: At least one cassette loading / unloading position (25) is associated with at least one wafer transfer position (20) in front of at least one wafer transfer opening (18), the at least one wafer transfer position being disposed in the walls (16, 38, 40, 46) defining the cassette loading / unloading space (12); as well as At least one cartridge inlet / outlet (42, 44) is disposed in the walls (16, 38, 40, 46), and the cartridge loader / unloader is configured and arranged to move the detection area of ​​the detector toward the at least one cartridge loading / removal position (25) and / or the at least one cartridge inlet / outlet (42, 44) to detect the presence of a cartridge at the at least one cartridge loading / removal position (25) and / or the at least one cartridge inlet / outlet (42, 44).

Images