Mask drying device and method thereof

Abstract

The embodiment of the present invention discloses a mask drying device and a method thereof. The device includes a first drying component, the first drying component includes a first drying porous layer, and the first drying porous layer is disposed opposite to the first surface of the mask. , the first drying porous layer is used to output and heat the wind in the first direction; the first direction is the direction in which the first drying porous layer points to the first surface; the second drying component, the second drying component includes the second drying porous layer, the first drying The second drying porous layer is arranged opposite to the second surface of the mask, and the second drying porous layer is used to output and heat the wind in the second direction; the second direction is the direction in which the second drying porous layer points to the second surface; One surface is the vapor deposition surface of the mask, and the second surface is the opposite surface of the first surface. The technical solutions provided by the embodiments of the present invention improve the stability of the drying effect and reduce the operating cost.

Description

technical field

[0001] Embodiments of the present invention relate to the field of display technology, and in particular, to a mask drying device and a method thereof. Background technique

[0002] The mask plate will accumulate a large amount of organic materials and metal materials during the evaporation process. In order to prevent the mask accuracy deviation and peeling caused by the thickening of the material from contaminating the evaporation chamber, the mask plate needs to be cleaned regularly.

[0003] The existing technology for drying the mask after cleaning is mainly to first dehydrate the dehydration and drying solvent such as isopropanol or acetone, and then put it in a drying tank to blow the mask on both sides with an air knife. Some drying mask methods have the problems of poor drying effect stability and high operating costs. SUMMARY OF THE INVENTION

[0004] Embodiments of the present invention provide a mask drying device and a method thereof, so as to...

Examples

Embodiment Construction

[0041] The present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention, but not to limit the present invention. In addition, it should be noted that, for the convenience of description, the drawings only show some but not all structures related to the present invention.

[0042] In the production process of the organic light-emitting diode (OLED) display panel, a precision mask can be used to evaporate the light-emitting layer in the OLED display panel, and the mask will accumulate a large amount of organic materials during the evaporation process. And metal materials, in order to prevent the problem of mask accuracy deviation and peeling contamination of the evaporation chamber caused by the thickening of the material, the mask plate needs to be cleaned regularly. figure 1 It is a schematic struct...

technical field

[0001] Embodiments of the present invention relate to the field of display technology, and in particular, to a mask drying device and a method thereof. Background technique

[0002] The mask plate will accumulate a large amount of organic materials and metal materials during the evaporation process. In order to prevent the mask accuracy deviation and peeling caused by the thickening of the material from contaminating the evaporation chamber, the mask plate needs to be cleaned regularly.

[0003] The existing technology for drying the mask after cleaning is mainly to first dehydrate the dehydration and drying solvent such as isopropanol or acetone, and then put it in a drying tank to blow the mask on both sides with an air knife. Some drying mask methods have the problems of poor drying effect stability and high operating costs. SUMMARY OF THE INVENTION

[0004] Embodiments of the present invention provide a mask drying device and a method thereof, so as to...

Examples

Embodiment Construction

[0041] The present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention, but not to limit the present invention. In addition, it should be noted that, for the convenience of description, the drawings only show some but not all structures related to the present invention.

[0042] In the production process of the organic light-emitting diode (OLED) display panel, a precision mask can be used to evaporate the light-emitting layer in the OLED display panel, and the mask will accumulate a large amount of organic materials during the evaporation process. And metal materials, in order to prevent the problem of mask accuracy deviation and peeling contamination of the evaporation chamber caused by the thickening of the material, the mask plate needs to be cleaned regularly. figure 1 It is a schematic struct...

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