A semiconductor silicon rod transfer device for high-end equipment manufacturing

Abstract

The present invention relates to a transfer device, and in particular to a semiconductor silicon rod transfer device for high-end equipment manufacturing. The present invention provides a semiconductor silicon rod transfer device for high-end equipment manufacturing that can replace manual labor and can accurately transfer in a spatial position. A semiconductor silicon rod transfer device for high-end equipment manufacturing includes: a bottom plate, a support frame is arranged on one side of the top of the bottom plate; a transfer mechanism, a transfer mechanism is arranged on the side of the top of the bottom plate away from the support frame; a clamping mechanism, a clamping mechanism is arranged on one side of the transfer mechanism. The rotation of the rotating block drives the rocker to rotate, thereby generating relative sliding with the cam disk and driving the rocker to rotate a specified angle around the second rotating shaft through the sliding pin, thereby driving the lower clamping block to rotate and cooperate with the upper clamping block to clamp the silicon rod.

Description

Technical Field

[0001] The present invention relates to a transfer device, and in particular to a semiconductor silicon rod transfer device for high-end equipment manufacturing. Background Art

[0002] Taking the cutting of crystalline silicon rods as an example, the general operation process includes a cutting machine cutting the original long silicon rods to form multiple short silicon rods. After the cutting is completed, a squarer is used to square the cut short silicon rods to form a crystalline silicon cube. However, in the relevant technology, the operations required for each process are arranged independently, and the operating equipment is scattered in different production areas. The conversion of workpieces performing different process operations requires transfer and allocation.

[0003] The traditional process requires more manpower to transfer silicon rods. There are many mechanical parts and wires between different operating equipment, and there are great safety risks in manual operation. In addition, different operating equipment are distributed in different locations, and general conveying devices can only transfer them in a plane. Therefore, it is urgent to design a semiconductor silicon rod transfer device for high-end equipment manufacturing that can replace manual labor and can accurately transfer in space to solve the above problems. Summary of the invention

[0004] In order to overcome the potential safety hazard of manual silicon rod transportation and the disadvantage that general conveying devices can only transport silicon rods in a plane, the technical problem of the present invention is to provide a semiconductor silicon rod transport device for high-end equipment manufacturing that can replace manual labor and can accurately transport silicon rods in space.

[0005] The technical implementation scheme of the present invention is: a semiconductor silicon rod transfer device for high-end equipment manufacturing, comprising: a base plate, a support frame is arranged on one side of the top of the base plate; a transfer mechanism, a transfer mechanism is arranged on the side of the top of the base plate away from the support frame; a clamping mechanism, a clamping mechanism is arranged on one side of the transfer mechanism.

[0006] In addition, it is particularly preferred that the transfer mechanism includes: a first bearing seat, a first bearing seat is arranged on the top side of the base plate away from the support frame; a first rotating shaft, a first rotating shaft is rotatably arranged on the first bearing seat; a rotating block, a rotating block is arranged in the middle of the first rotating shaft; a fixed seat, a fixed seat is arranged on the top side of the base plate close to the first rotating shaft; a first servo motor, a first servo motor is arranged on the top of the fixed seat, and the output shaft of the first servo motor is connected to the first rotating shaft through a coupling.

[0007] In addition, it is particularly preferred that the clamping mechanism includes: a second rotating shaft, which is rotatably arranged in a through hole on one side of the rotating block; a rocker, which is arranged on an end of the second rotating shaft close to the first servo motor; a sliding pin, which is arranged on a side of the rocker close to the bottom plate; a cam plate, which is fixedly arranged on one side of the first bearing seat, a through hole is opened at the center of the cam plate and passes through the first rotating shaft, and the outer surface of the cam plate cooperates with the sliding pin; a lower clamping block, which is arranged on the end of the second rotating shaft away from the first servo motor; an upper clamping block, which is rotatably arranged on the upper part of the lower clamping block close to the rotating block; a fixed block, which is arranged on the top of the rotating block, and the fixed block is connected to the upper clamping block.

[0008] In addition, it is particularly preferred that it also includes: a shell, a shell is arranged on one side of the upper part of the support frame; a lower hopper, a lower hopper is arranged on the top of the shell; a second bearing seat, a second bearing seat is arranged on the top of the bottom plate close to the shell side; a third rotating shaft, a third rotating shaft is rotatably arranged between the second bearing seat and the shell; a circular groove cylindrical wheel, a circular groove cylindrical wheel is arranged in the middle of the third rotating shaft.

[0009] In addition, it is particularly preferred that it also includes: a fixing frame, a fixing frame is arranged in the middle of the top of the bottom plate close to the shell side; an inclined slide plate, an inclined slide plate is arranged on the top of the fixing frame; and a groove plate, a groove plate is arranged on the side of the inclined slide away from the shell.

[0010] In addition, it is particularly preferred that it also includes: a third bearing seat, a third bearing seat is arranged on the top of the base plate near the side of the circular groove cylindrical wheel; a fourth rotating shaft, a fourth rotating shaft is rotatably arranged on the third bearing seat; a dividing cam, a dividing cam is arranged in the middle of the fourth rotating shaft; a toothed turntable, a toothed turntable is arranged on the side of the third rotating shaft near the dividing cam, and the toothed turntable is meshed with the dividing cam; a second servo motor, a second servo motor is arranged on the side of the support frame near the fourth rotating shaft, and the output shaft of the second servo motor is connected to the fourth rotating shaft through a coupling.

[0011] In addition, it is particularly preferred that it also includes: a disc, a disc is arranged on the side of the fourth rotating shaft close to the groove plate; a connecting rod, a connecting rod is hingedly arranged at an eccentric part of one side of the disc; a push block, a push block is hingedly arranged at one end of the connecting rod, and the push block is slidably matched with the groove plate.

[0012] Furthermore, it is particularly preferred that the cam disc is composed of two semi-circular discs with different radii.

[0013] Compared with the prior art, the present invention has the following advantages: 1. The rotating block rotates to drive the rocker to rotate, thereby generating relative sliding with the cam plate and driving the rocker to rotate a specified angle around the second rotating axis through the sliding pin. The rocker rotates at a specified angle to drive the lower clamping block to rotate and cooperate with the upper clamping block to clamp the silicon rod.

[0014] 2. The transfer mechanism and the clamping mechanism are linked to clamp the silicon rod, and the silicon rod is driven to rotate a certain angle to complete the precise transfer in space, realizing the function of a simple manipulator.

[0015] 3. The indexing cam rotates half a circle, driving the toothed turntable to rotate one grid, and then driving the circular groove cylindrical wheel to rotate one grid to complete the single unloading of silicon rods.

[0016] 4. The fourth rotating shaft rotates to drive the disc to rotate, and then the push block is pushed through the connecting rod to slide in the groove plate to push the silicon rod to the specified position of the clamping mechanism, thereby achieving positioning clamping. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a schematic diagram of the three-dimensional structure of the present invention.

[0018] Figure 2 It is a schematic diagram of the three-dimensional structure of the transfer mechanism of the present invention.

[0019] Figure 3 It is a schematic diagram of the exploded structure of the clamping mechanism of the present invention.

[0020] Figure 4 It is a schematic diagram of a first partial three-dimensional structure of the present invention.

[0021] Figure 5 It is a schematic diagram of a second partial three-dimensional structure of the present invention.

[0022] Among them, the above-mentioned drawings include the following figure marks: 1, base plate, 2, support frame, 3, transfer mechanism, 31, first bearing seat, 32, first rotating shaft, 33, rotating block, 34, fixed seat, 35, first servo motor, 4, clamping mechanism, 41, second rotating shaft, 42, rocker, 43, sliding pin, 44, cam plate, 45, lower clamping block, 46, upper clamping block, 47, fixed block, 5, shell, 6, lower hopper, 7, second bearing seat, 8, third rotating shaft, 9, circular groove cylindrical wheel, 10, fixed frame, 11, inclined slide plate, 12, groove plate, 13, third bearing seat, 14, fourth rotating shaft, 15, dividing cam, 16, toothed turntable, 17, second servo motor, 18, disc, 19, connecting rod, 20, push block. DETAILED DESCRIPTION

[0023] In order to make the purpose, technical scheme and advantages of the present invention clearer, the present invention is further described in detail below in conjunction with specific embodiments and with reference to the accompanying drawings. It should be understood that these descriptions are only exemplary and are not intended to limit the scope of the present invention. In addition, in the following description, the description of well-known structures and technologies is omitted to avoid unnecessary confusion of the concept of the present invention. Example 1

[0024] like Figure 1As shown, a semiconductor silicon rod transfer device for high-end equipment manufacturing includes a base plate 1, a support frame 2, a transfer mechanism 3 and a clamping mechanism 4. The support frame 2 is arranged on the top left side of the base plate 1, the transfer mechanism 3 is arranged on the top right side of the base plate 1, and the clamping mechanism 4 is arranged on the left side of the transfer mechanism 3.

[0025] A semiconductor silicon rod transfer device for high-end equipment manufacturing, which clamps the silicon rod through the linkage of a transfer mechanism 3 and a clamping mechanism 4, and drives the silicon rod to rotate a certain angle to complete precise transfer in space, thereby realizing the function of a simple manipulator. Example 2

[0026] like Figure 2 and Figure 3 As shown, on the basis of Example 1, the transfer mechanism 3 includes a first bearing seat 31, a first rotating shaft 32, a rotating block 33, a fixed seat 34 and a first servo motor 35. The first bearing seat 31 is arranged on the top right side of the base plate 1, the first rotating shaft 32 is rotatably arranged on the first bearing seat 31, a rotating block 33 is arranged in the middle of the first rotating shaft 32, a fixed seat 34 is arranged on the top right side of the base plate 1, and a first servo motor 35 is arranged on the top of the fixed seat 34. The output shaft of the first servo motor 35 is connected to the first rotating shaft 32 through a coupling.

[0027] The clamping mechanism 4 includes a second rotating shaft 41, a rocker 42, a sliding pin 43, a cam plate 44, a lower clamping block 45, an upper clamping block 46 and a fixed block 47. The second rotating shaft 41 is rotatably arranged in the through hole on the left side of the rotating block 33, a rocker 42 is arranged at the front end of the second rotating shaft 41, and a sliding pin 43 is arranged on the side of the rocker 42 close to the bottom plate 1, a cam plate 44 is fixedly arranged on the rear side of the first bearing seat 31, a through hole is opened at the center of the cam plate 44 and passes through the first rotating shaft 32, the outer surface of the cam plate 44 cooperates with the sliding pin 43, a lower clamping block 45 is arranged at the rear end of the second rotating shaft 41, an upper clamping block 46 is rotatably arranged on the upper front side of the lower clamping block 45, a fixed block 47 is arranged on the top of the rotating block 33, and the fixed block 47 is connected to the upper clamping block 46.

[0028] When the silicon rod needs to be accurately transported in space at the workplace, the staff starts the first servo motor 35 by arranging the clamping arm in the specified position. The output shaft of the first servo motor 35 rotates to drive the first rotating shaft 32 to rotate and then drive the rotating block 33 to rotate. The rotating block 33 rotates to drive the rocker 42 to rotate and then slide relative to the cam plate 44 and drive the rocker 42 to rotate around the second rotating shaft 41 by a specified angle through the sliding pin 43. The rocker 42 rotates by a specified angle to drive the lower clamping block 45 to rotate and cooperate with the upper clamping block 46 to clamp the silicon rod. At this time, the first rotating shaft 32 continues to rotate, which drives the overall clamping mechanism 4 and the silicon rod to rotate around the first rotating shaft 32 by a certain angle to complete the accurate transportation in space. After rotating by a certain angle, the cam plate 44 and the sliding pin 43 are separated from the interactive state, that is, the clamping state of the silicon rod is released. At this time, the first servo motor 35 can be controlled to stop working, and then after other receivers complete the acceptance of the silicon rod, the first servo motor 35 is reversely controlled to achieve reset. Example 3

[0029] like Figure 4 and Figure 5 As shown, on the basis of Example 2, it also includes a shell 5, a lower hopper 6, a second bearing seat 7, a third rotating shaft 8 and a circular groove cylindrical wheel 9. The shell 5 is arranged on the upper right side of the support frame 2, the lower hopper 6 is arranged on the top of the shell 5, the second bearing seat 7 is arranged on the front side of the top of the base plate 1, the third rotating shaft 8 is rotatably arranged between the second bearing seat 7 and the shell 5, and the circular groove cylindrical wheel 9 is arranged in the middle of the third rotating shaft 8.

[0030] It also includes a fixing frame 10, an inclined slide plate 11 and a groove plate 12. The fixing frame 10 is arranged in the middle of the top left side of the bottom plate 1, the inclined slide plate 11 is arranged on the top of the fixing frame 10, and the groove plate 12 is arranged on the right side of the inclined slide plate 11.

[0031] On the other hand, the silicon rods are fed individually in the feeding hopper 6 by the intermittent rotation of the circular groove cylindrical wheel 9, so that they can be stably coordinated with the clamping mechanism 4 to eliminate the accumulation of materials during the feeding process. After being fed individually, the silicon rods roll down on the inclined slide plate 11 and then fall into the groove plate 12, which is convenient for clamping.

[0032] It also includes a third bearing seat 13, a fourth rotating shaft 14, a dividing cam 15, a toothed turntable 16 and a second servo motor 17. The third bearing seat 13 is arranged on the top of the base plate 1 near the circular groove cylindrical wheel 9. The fourth rotating shaft 14 is rotatably arranged on the third bearing seat 13. The dividing cam 15 is arranged in the middle of the fourth rotating shaft 14. A toothed turntable 16 is arranged on the front side of the third rotating shaft 8, and the toothed turntable 16 is meshed with the dividing cam 15. A second servo motor 17 is arranged on the front side of the support frame 2, and the output shaft of the second servo motor 17 is connected to the fourth rotating shaft 14 through a coupling.

[0033] In addition, the staff starts the second servo motor 17. The output shaft of the second servo motor 17 rotates to drive the fourth rotating shaft 14 to rotate and then drives the dividing cam 15 to rotate. The dividing cam 15 cooperates with the toothed turntable 16 for half a circle. Therefore, the dividing cam 15 rotates half a circle to drive the toothed turntable 16 to rotate one grid and then drives the circular groove cylindrical wheel 9 to rotate one grid to complete the single unloading of silicon rods.

[0034] It also includes a disc 18, a connecting rod 19 and a push block 20. The disc 18 is arranged at the right end of the fourth rotating shaft 14. The connecting rod 19 is hingedly arranged at an eccentric part of one side of the disc 18. The push block 20 is hingedly arranged at one end of the connecting rod 19. The push block 20 is slidably matched with the groove plate 12.

[0035] At the same time, the fourth rotating shaft 14 rotates to drive the disc 18 to rotate, and then pushes the push block 20 to slide in the groove plate 12 through the connecting rod 19 to push the silicon rod to the specified position of the clamping mechanism 4, thereby achieving positioning and clamping. When the indexing cam 15 is engaged with the toothed rotating disc 16, the disc 18 drives the connecting rod 19 to be in the resetting process, and the installation cooperation of the two devices realizes the continuous cooperation of material feeding and material pushing.

[0036] The cam plate 44 is composed of two semi-circular plates with different radii, and the angle ratio of the two semi-circular plates with different radii can be calculated and set according to the rotation angle to achieve automatic clamping and loosening states.

[0037] The above-mentioned embodiments only express the preferred implementation modes of the present invention, and the descriptions thereof are relatively specific and detailed, but they cannot be understood as limiting the scope of the present invention. It should be pointed out that, for a person skilled in the art, several modifications, improvements and substitutions can be made without departing from the concept of the present invention, and these all belong to the protection scope of the present invention. Therefore, the protection scope of the present invention patent shall be subject to the attached claims.

Claims

1. A semiconductor silicon rod transfer device for high-end equipment manufacturing, characterized in that: include: A bottom plate (1), wherein a support frame (2) is provided on one side of the top of the bottom plate (1); A transfer mechanism (3), wherein a transfer mechanism (3) is arranged on a side of the top of the bottom plate (1) away from the support frame (2); A clamping mechanism (4), wherein a clamping mechanism (4) is disposed on one side of the transfer mechanism (3); Transfer agencies (3) include: A first bearing seat (31), wherein the first bearing seat (31) is arranged on a side of the top of the bottom plate (1) away from the support frame (2); A first rotating shaft (32), the first bearing seat (31) being rotatably provided with the first rotating shaft (32); A rotating block (33), wherein a rotating block (33) is disposed in the middle of the first rotating shaft (32); A fixing seat (34), wherein a fixing seat (34) is provided on a side of the top of the bottom plate (1) close to the first rotating shaft (32); A first servo motor (35), wherein the first servo motor (35) is disposed on the top of the fixing seat (34), and an output shaft of the first servo motor (35) is connected to the first rotating shaft (32) via a coupling; The clamping mechanism (4) comprises: A second rotating shaft (41), wherein the second rotating shaft (41) is rotatably disposed in a through hole on one side of the rotating block (33); A rocker (42), wherein a rocker (42) is disposed at one end of the second rotating shaft (41) close to the first servo motor (35); A sliding pin (43), wherein a sliding pin (43) is arranged on a side of the rocker arm (42) close to the bottom plate (1); A cam plate (44), wherein the cam plate (44) is fixedly disposed on one side of the first bearing seat (31), a through hole is opened at the center of the cam plate (44) and passes through the first rotating shaft (32), and an outer surface of the cam plate (44) cooperates with the sliding pin (43); A lower clamping block (45), wherein a lower clamping block (45) is disposed at one end of the second rotating shaft (41) away from the first servo motor (35); An upper clamping block (46) is rotatably provided on an upper portion of the lower clamping block (45) close to the rotating block (33); A fixed block (47), wherein the top of the rotating block (33) is provided with a fixed block (47), and the fixed block (47) is connected to the upper clamping block (46); Also includes: A shell (5), wherein a shell (5) is disposed on one side of an upper portion of the support frame (2); A lower hopper (6), wherein a lower hopper (6) is arranged on the top of the shell (5); A second bearing seat (7), wherein a second bearing seat (7) is arranged on a side of the top of the bottom plate (1) close to the housing (5); A third rotating shaft (8), wherein the third rotating shaft (8) is rotatably arranged between the second bearing seat (7) and the housing (5); A circular groove cylindrical wheel (9), wherein a circular groove cylindrical wheel (9) is arranged in the middle of the third rotating shaft (8); Also includes: A fixing frame (10), wherein a fixing frame (10) is disposed in the middle of a side of the top of the bottom plate (1) close to the housing (5); An inclined slide plate (11), wherein the top of the fixed frame (10) is provided with an inclined slide plate (11); A groove plate (12), wherein a groove plate (12) is provided on a side of the inclined sliding plate (11) away from the housing (5); Also includes: A third bearing seat (13), wherein a third bearing seat (13) is arranged on the top of the bottom plate (1) near the side of the circular groove cylindrical wheel (9); A fourth rotating shaft (14), the third bearing seat (13) being rotatably provided with the fourth rotating shaft (14); An indexing cam (15), wherein a middle portion of the fourth rotating shaft (14) is provided with an indexing cam (15); A toothed rotating disk (16), wherein a toothed rotating disk (16) is disposed on a side of the third rotating shaft (8) close to the indexing cam (15), and the toothed rotating disk (16) is meshed with the indexing cam (15); a second servo motor (17), wherein the second servo motor (17) is arranged on a side of the support frame (2) close to the fourth rotating shaft (14), and an output shaft of the second servo motor (17) is connected to the fourth rotating shaft (14) via a coupling; Also includes: A circular disc (18), wherein a circular disc (18) is arranged on a side of the fourth rotating shaft (14) close to the groove plate (12); A connecting rod (19) is hingedly provided at an eccentric position on one side of the disc (18); A push block (20) is hingedly provided at one end of the connecting rod (19), and the push block (20) is slidably matched with the groove plate (12).

2. A semiconductor silicon rod transfer device for high-end equipment manufacturing according to claim 1, characterized in that: The cam disc (44) is composed of two discs with unequal radii.

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