Carrier, conveying path, and conveying system

Abstract

The present invention provides a transport vehicle, a transport path, and a transport system that can efficiently and safely transport workpieces. The transport vehicle travels on a transport path provided above a processing device to transport the workpiece, and the transport vehicle includes: a frame on which traveling wheels are mounted; a container for storing the workpiece; a lifting unit provided on the frame, which suspends the container so that the container passes through an opening that vertically penetrates the transport path to lift and lower the container; a power receiving terminal provided on the frame, which receives power supplied from the outside; and a charging wire that connects a secondary battery that supplies power to the lifting unit to the power receiving terminal. When the container is passed through the opening by the lifting unit, while charging the secondary battery by supplying the power received by the power receiving terminal to the secondary battery through the charging wire, the container is lifted and lowered by the lifting unit.

Description

Technical Field

[0001] The present invention relates to a transport vehicle, a transport path, and a transport system used in the transport of workpieces. Background Art

[0002] In the manufacturing process of device chips assembled in electronic devices or the like, plate-shaped workpieces such as semiconductor wafers or resin-encapsulated substrates are processed by various processing apparatuses. When transporting a workpiece to the processing apparatus, a cassette capable of accommodating a plurality of workpieces is usually used. When the processing apparatus receives a cassette in a state of accommodating a plurality of workpieces, the workpieces are sequentially taken out from the cassette and processed.

[0003] In order to improve the processing efficiency of workpieces, sometimes a plurality of processing apparatuses are used in parallel. In this case, it is necessary to transport workpieces to the plurality of processing apparatuses at appropriate timings. Therefore, a transport system has been proposed in which a plurality of processing apparatuses are connected by a transport path (transport route) to transport workpieces to each processing apparatus (for example, refer to Patent Document 1).

[0004] Patent Document 1: Japanese Patent Laid-Open No. 6-177244

[0005] In addition, in order to maximize the capabilities of a plurality of processing apparatuses, it is important to transport workpieces to each processing apparatus efficiently and safely. However, due to structural reasons of various apparatuses involved in the transport of workpieces, etc., smooth transport of workpieces may sometimes not be achieved. Summary of the Invention

[0006] The present invention has been made in view of this problem, and an object thereof is to provide a transport vehicle, a transport path, and a transport system that can transport workpieces efficiently and safely.

[0007] According to one aspect of the present invention, there is provided a transport vehicle that travels on a transport path provided above a processing apparatus to transport a workpiece, the transport vehicle being characterized by including: a frame on which traveling wheels are mounted; a container that accommodates the workpiece; a lifting unit that is provided on the frame and suspends the container so as to pass through an opening that vertically penetrates the transport path to lift and lower the container; a power receiving terminal that is provided on the frame and receives power supplied from the outside; and a charging wire that connects a secondary battery that supplies power to the lifting unit to the power receiving terminal. When the container is passed through the opening by the lifting unit, while charging the secondary battery by supplying the power received by the power receiving terminal to the secondary battery through the charging wire, the container is lifted and lowered by the lifting unit.

[0008] In the transporter, it preferably further has an electric motor that rotates the wheels, and the electric motor is driven by the electric power supplied from the secondary battery to rotate the wheels.

[0009] According to another aspect of the present invention, there is provided a transport path that is provided above a processing apparatus for processing a workpiece. A transporter travels on the transport path. The transporter includes: a container that houses the workpiece; a lifting unit that suspends the container and raises and lowers the container; a power receiving terminal that receives electric power supplied from the outside; and a charging wiring that connects a secondary battery that supplies electric power to the lifting unit to the power receiving terminal. The transport path is characterized by including: a traveling area where the transporter travels; a parking area where the transporter parks, and an opening is formed in the parking area, and the container that is raised and lowered by the lifting unit can pass through the opening; a power supply terminal that contacts the power receiving terminal of the transporter when the transporter parks in the parking area; and a power supply wiring that is connected to the power supply terminal.

[0010] In the transport path, when raising and lowering the container of the transporter parked in the parking area, it is preferable to supply electric power to the secondary battery via the power supply wiring, the power supply terminal, the power receiving terminal, and the charging wiring.

[0011] According to still another aspect of the present invention, there is provided a transport system that transports a workpiece to the processing apparatus by using a transporter that travels on a transport path provided above a processing apparatus for processing the workpiece. The transporter includes: a frame on which traveling wheels are mounted; a container that houses the workpiece; a lifting unit that is provided on the frame and suspends the container to raise and lower the container; a power receiving terminal that is provided on the frame and receives electric power supplied from the outside; and a charging wiring that is provided on the frame and connects a secondary battery that supplies electric power to the lifting unit to the power receiving terminal. The transport path includes: a traveling area where the transporter travels; a parking area where the transporter parks, and an opening is formed in the parking area, and the opening vertically penetrates the transport path in such a manner that the container that is raised and lowered by the lifting unit can pass through; a power supply terminal that contacts the power receiving terminal of the transporter when the transporter parks in the parking area; and a power supply wiring that is connected to the power supply terminal. The transporter is caused to travel on the traveling area of the transport path and park in the parking area. Electric power is supplied to the secondary battery via the power supply terminal, the power receiving terminal, and the charging wiring to charge the secondary battery. The lifting unit is driven by the electric power supplied from the secondary battery, and the container is raised and lowered through the opening, and the workpiece is transported to the processing apparatus provided below the parking area.

[0012] In this conveying system, it is preferable that the conveyance vehicle further includes an electric motor for rotating the wheels. The electric motor is disposed on the frame and is driven by the electric power supplied from the secondary battery to rotate the wheels.

[0013] In the conveyance vehicle, conveyance path, and conveyance system according to one aspect of the present invention, while charging the battery (secondary battery) of the conveyance vehicle, the container housing the workpiece is lifted and lowered by the lifting unit. Therefore, a large amount of electric power consumed by the lifting unit can be sufficiently supplied. As a result, the efficiency of conveying the workpiece can be improved.

[0014] Therefore, by using the conveyance vehicle, conveyance path, and conveyance system according to one aspect of the present invention, the workpiece can be conveyed efficiently and safely. The workpiece can be conveyed efficiently and safely. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 It is a plan view showing a structural example of the conveying system.

[0016] Figure 2 It is a functional block diagram showing an example of the connection relationship of the conveying system.

[0017] Figure 3 It is a side view schematically showing a structural example of the loader / unloader.

[0018] Figure 4 (A) thereof is a partially cut-away side view showing a state where the outer door is closed and the inner door is open, Figure 4 and (B) thereof is a partially cut-away side view showing a state where the outer door is open and the inner door is closed.

[0019] Figure 5 (A) thereof is a partially cut-away side view showing a box placement table or the like, Figure 5 and (B) thereof is a bottom view of the box placement table.

[0020] Figure 6 (A) thereof is a partially cut-away side view showing a case where the box placement table is pulled out from the inner storage area to the outside, Figure 6 and (B) thereof is a partially cut-away side view showing a case where the roller detaches from the support table. Figure 6 (C) thereof is a partially cut-away side view showing a case where the box placement table returns to the inner storage area.

[0021] Figure 7 (A) thereof is a partially cut-away side view showing a case where the workpiece unit is temporarily placed on the two upper guide rails, Figure 7 and (B) thereof is a partially cut-away side view showing a case where the workpiece unit is temporarily placed on the two lower guide rails.

[0022] Figure 8(A) is a top view showing two upper guide rails, etc. Figure 8 (B) is a top view showing the case where the interval between the two upper guide rails is narrowed.

[0023] Figure 9 (A) is a perspective view showing the upper surface side of the carrier vehicle. Figure 9 (B) is a perspective view showing the bottom surface side of the carrier vehicle 10.

[0024] Figure 10 is an enlarged perspective view showing the front end portion of the carrier vehicle.

[0025] Figure 11 (A) is a perspective view showing the container. Figure 11 (B) is a front view showing the container.

[0026] Figure 12 is a perspective view of the carrier vehicle showing the state where the container is placed on the placement area.

[0027] Figure 13 is a perspective view of the carrier vehicle showing that the container is connected to the suspension member by means of an elastic member (telescopic member).

[0028] Figure 14 (A) is a top view showing a structural example of the lifting unit. Figure 14 (B) is a side view showing a structural example of the lifting unit.

[0029] Figure 15 (A) is a top view showing another structural example of the lifting unit. Figure 15 (B) is a side view showing another structural example of the lifting unit.

[0030] Figure 16 (A) is a top view showing the reel. Figure 16 (B) is a side view showing the reel.

[0031] Figure 17 is an enlarged perspective view showing the cover.

[0032] Figure 18 (A) is a side view of the cover showing the state where no container is stored in the storage area. Figure 18 (B) is a side view of the cover showing the state where a container is stored in the storage area.

[0033] Figure 19 (A) is a side view of the carrier vehicle when the container stored in the storage area is placed on the placement area. Figure 19 (B) is a graph showing the current value of the motor when the container descends.

[0034] Figure 20(A) is a side view of the carrier vehicle when storing the container placed on the placement area in the storage area. Figure 20 (B) is a graph showing the current value of the motor when the container is rising.

[0035] Figure 21 is a perspective view showing the appearance of the processing device and the conveyance path.

[0036] Figure 22 is a perspective view showing the internal structure of the processing device.

[0037] Figure 23 is a perspective view showing a part of the conveyance path provided in the processing device.

[0038] Figure 24 (A) of Figure 24 (B) is a perspective view showing the lower frame unit constituting the lower frame.

[0039] Figure 25 is a top view showing the arrangement of the lower frame units constituting the lower frame.

[0040] Figure 26 (A) of Figure 26 (B) is a perspective view showing the upper frame unit constituting the upper frame.

[0041] Figure 27 is a top view showing the arrangement of the upper frame units constituting the upper frame.

[0042] Figure 28 is a top view showing the conveyance path formed by juxtaposing a plurality of road surface panels.

[0043] Figure 29 is a functional block diagram showing the control unit of the carrier vehicle.

[0044] Figure 30 is a diagram for explaining an example of the control method of the conveyance system.

[0045] Figure 31 is a perspective view showing the internal structure of the processing device of Embodiment 2.

[0046] Reference Numeral Explanation

[0047] 2: transport system; 4: processing device (cutting device); 4a: processing device; 4b: processing device; 6: transport path; 6a: opening; 8: loader / unloader (transport device); 10: transport vehicle; 10a: transport vehicle; 10b: transport vehicle; 12: control unit; 21: piping; 22: housing; 22a: ceiling; 22b: opening; 24: box storage mechanism; 24a: first box storage mechanism; 24b: second box storage mechanism; 26: support platform; 26a: upper surface; 26b: outer side surface; 28: box placement platform; 28a: lower surface; 28b: upper surface; 28c: through hole; 30: box; 30a: first box; 30b: second box; 32: loading and unloading port; 34: outer door (second door); 36: Rotating connecting member; 38a: External loading and unloading area (external area); 38b: Internal storage area (internal area); 40: Inner door (first door); 42: Lifting mechanism; 42a: Cylinder; 42b: Piston rod; 42c: Connecting member; 44: First sensor; 44a: Magnet; 46: Control device; 48: Second sensor; 48a: Magnet; 50: Stop member; 50a: Square rod; 50b: Roller; 52: Shaft mechanism; 52a: Rotating shaft; 52b: Bearing; 54: Pin (pressing part); 54a: Ring; 54b: Button; 56: Lifting mechanism; 56a: Support column; 58: Lifting platform; 60: Temporary storage unit; 62: Shell; 62a: Upper plate; 62b: Lower plate; 62c: Side plate; 62c1: 1st side plate; 62c2: 2nd side plate; 62d: opening; 62e1: 1st opening; 62e2: 2nd opening; 64: conveying unit (conveying mechanism); 64a: 1st conveying unit; 64b: 2nd conveying unit; 66: loading platform; 68: receiver; 70: transmitter; 72a: upper rail (1st temporary storage section); 72b: lower rail (2nd temporary storage section); 72c: interval; 74a: 1st air actuator; 74b: 2nd air actuator; 76a: 1st guide mechanism; 76b: 2nd guide mechanism; 78: interval adjustment mechanism; 82: frame; 84: axle; 86: wheel (front wheel); 88: wheel (rear wheel); 90: drive unit; 92: motor; 9 2a: rotating shaft (output shaft); 94: pulley; 96: battery (secondary battery); 98: wiring (charging wiring); 100: terminal (power receiving terminal); 102: container (box); 102a: storage part (storage space); 102b: opening; 102c: upper wall; 102d: bottom wall; 104: storage area; 106: first guide rail; 106a: holding surface; 106b: side surface; 108: second guide rail; 108a: holding surface; 110: lifting unit (lifting mechanism); 112: suspension member; 114: driving mechanism; 116: contact member; 118: elastic member (elastic member); 120: cover; 122: first sensor; 124: second sensor; 126: third sensor;128: Support table; 130: Control unit (control unit); 130a: First sensor control unit; 130b: Travel indication unit; 130c: Second sensor control unit; 130d: Steering indication unit; 130e: Entry control unit; 130f: Parking control unit; 132: Receiver; 134: Transmitter; 142: Motor; 142a: Rotating shaft (output shaft); 144a: First rotating shaft (first shaft); 144b: Second rotating shaft (second shaft); 146: Pulley; 148: Connecting member; 150a: Pulley; 150b: Pulley; 152: Connecting member; 154a: Reel; 154b: Reel; 156a: Roller; 156b: Roller; 162: Driving mechanism; 164: Motor; 164a: Rotating shaft (output shaft); 166a: First rotating shaft (first shaft); 166b: Second rotating shaft (second shaft); 166c: Third rotating shaft (third shaft); 168: Pulley; 170: Connecting member; 172: Reel; 172a: Groove (recess); 172b: Protrusion (protrusion); 174: Fixed member; 176: Guide; 182: Cover part; 182a: Plate-like member; 182b: Soft member; 184: Contact part; 184a: Fixed member; 184b: Roller; 186: Fixed block; 188: Connecting block (L-shaped block); 188a: Connecting part; 188b: Fixed part; 190: Connecting shaft; 202: Base; 202a: Recess; 202b: Recess; 202c: Pipe connection part; 204: Lifting table; 206: X-axis moving mechanism (processing feed unit); 206a: Workbench cover; 206b: Dust and drip-proof cover; 208: Chuck workbench; 208a: Holding surface; 210: Fixture; 212: Guide rail; 214: First support structure; 216: First track; 218: First moving mechanism; 220: First holding unit; 220a: Gripping mechanism; 222: Second track; 224: Second moving mechanism; 226: Second holding unit; 228: Second support structure; 230: Y-axis Z-axis moving mechanism (indexing feed unit, plunge feed unit); 232: Processing unit (cutting unit); 234: Cutting tool; 236: Shooting unit (camera); 238: Cleaning unit; 240: Rotary table; 242: Spray nozzle; 244: Cover; 244a: Ceiling; 244b: Door; 246: Control device; 248: Receiver; 250: Transmitter; 262: Lower frame; 264: Upper frame; 266: Road surface panel; 268: Screw; 270: Lower frame unit; 270a: Lower frame unit; 270b: Lower frame unit; 270c: Lower frame unit; 270d: Lower frame unit; 272: Upper frame unit; 272a: Upper frame unit; 272b: Upper frame unit; 274a: Bridging panel; 274b: Bridging panel; 276: Guide part; 278: Travel area; 280: Parking area;282: Opening; 284: Standby area; 286: Mark; 286a: First mark; 286b: Second mark; 286c: Third mark; 286d: Fourth mark; 288: Terminal (power supply terminal); 290: Terminal support part; 292: Wiring (power supply wiring); 302: Control part; 304: Receiver; 306: Transmitter; 402: Processing device (cutting device); 404: Lift table; 406: Cassette storage mechanism; 406a: First cassette storage mechanism; 406b: Second cassette storage mechanism; 11: Workpiece; 13: Tape (dicing tape); 15: Frame; 17: Workpiece unit; 17a: Workpiece unit; 17b: Workpiece unit; A: Placement area; A1a: First placement area; A1b: First placement area; A2: Second placement area; B1a: First transfer area; B1b: First transfer area; B2: Second transfer area; C1: Arrow; C2: Arrow; C3: Arrow; D1: Arrow; D2: Arrow; D3: Arrow; E1: Arrow; E2: Arrow; F1: Arrow; F2: Arrow; G: Arrow; Detailed implementation mode

[0048] With reference to the accompanying drawings, the implementation modes of the present invention will be described. In addition, in the following implementation modes, the case where multiple processing devices that are the transfer destinations of the workpiece are all cutting devices will be described, but the transfer system only needs to be configured to be able to transfer the workpiece and the like to any type of processing device. That is, the transfer destination of the workpiece and the like can be a processing device other than the cutting device.

[0049] For example, the transfer system may be configured to be able to transfer the workpiece to multiple laser processing devices. In addition, the transfer system may sometimes be configured to sequentially transfer the workpiece to multiple types of processing devices used in a series of processing. In addition, the transfer system can be configured to be able to transfer the workpiece to various devices used in any process attached to the processing of the workpiece. That is, the transfer destination of the workpiece and the like can include a tape sticking device, an ultraviolet irradiation device, a cleaning device, etc. that are not for the purpose of processing the workpiece.

[0050] (Embodiment 1)

[0051] Figure 1 It is a top view showing a structural example of the transfer system 2 of this embodiment, Figure 2 It is a functional block diagram showing an example of the connection relationship of the transfer system 2. As Figure 1 shown, the transfer system 2 of this embodiment includes a transfer path 6 for transferring a plate-shaped workpiece 11 (refer to Figure 8 (A) of Figure 8 (B), etc.) processed by a processing device (cutting device) 4.

[0052] The workpiece 11 is, for example, a disk-shaped wafer made of a semiconductor material such as silicon. The front side of the workpiece 11 is divided into a plurality of small regions by a plurality of dividing predetermined lines (streets) that intersect each other, and devices such as ICs (Integrated Circuits) and MEMS (Micro Electro Mechanical Systems) are formed in each small region.

[0053] A tape (dicing tape) 13 having a diameter larger than that of the workpiece 11 is adhered to the back side of the workpiece 11. The outer peripheral portion of the tape 13 is fixed to an annular frame 15 that surrounds the workpiece 11. Thus, in the transfer system 2 of the present embodiment, the workpiece 11 is transferred to the processing device 4 in a state of a workpiece unit 17 supported by the frame 15 via the tape 13.

[0054] In addition, although the workpiece 11 of the present embodiment is a disk-shaped wafer made of a semiconductor material such as silicon, there are no restrictions on the material, shape, structure, size, etc. of the workpiece 11. For example, a substrate made of other semiconductor, ceramic, resin, metal, etc. may also be used as the workpiece 11.

[0055] Similarly, there are no restrictions on the type, number, shape, structure, size, arrangement, etc. of the devices. Devices may not be formed on the workpiece 11. In addition, in the present embodiment, the workpiece unit 17 obtained by supporting the workpiece 11 on the frame 15 via the tape 13 is the object to be transferred, but sometimes the workpiece 11 without the tape 13 adhered thereto, the workpiece 11 not supported on the frame 15, etc. are also the objects to be transferred.

[0056] The size of the above-described frame 15 is set according to the size of the workpiece 11 (such as the diameter of the workpiece 11). For example, the outer diameter of the frame 15 that supports the workpiece 11 with a diameter of about 300 mm is larger than the outer diameter of the frame 15 that supports the workpiece 11 with a diameter of about 200 mm. That is, when a larger workpiece 11 is used, the outer diameter of the workpiece unit 17 also increases.

[0057] In addition, the processing device 4 that processes the workpiece 11 is connected to the transfer system 2 as the transfer destination of the workpiece 11, but is not necessarily an element of the transfer system 2. Thus, the processing device 4 can be changed or omitted as described above according to the usage mode of the transfer system 2.

[0058] In addition, in Figure 1 for ease of explanation, only one processing device 4a is shown. In Figure 2In this figure, two processing devices 4a and 4b are shown. However, in the present embodiment, two or more processing devices 4 are required as the conveyance destinations of the workpiece 11. That is, the number of processing devices 4 connected to the conveyance system 2 is two or more.

[0059] The conveyance path 6 is provided above each processing device 4 in a manner that connects a plurality of processing devices 4. The workpiece 11 is conveyed to each processing device 4 through this conveyance path 6. In addition, since the conveyance path 6 is provided above the processing device 4, the conveyance path 6 does not interfere with the piping 21 or the like connected to the side surface of each processing device 4.

[0060] Below the conveyance path 6, in addition to the processing device 4, a loader / unloader (conveyance device) 8 for storing the workpiece 11 before processing or after processing is also provided. The workpiece 11 before processing stored in the loader / unloader 8 is carried into the conveyance vehicle 10 at an arbitrary timing.

[0061] The conveyance vehicle 10 travels on the conveyance path 6 to carry the workpiece 11 before processing received from the loader / unloader 8 into each processing device 4. In addition, when the conveyance vehicle 10 receives the workpiece 11 after processing from the processing device 4, it travels on the conveyance path 6 to carry the workpiece 11 after processing to the loader / unloader 8.

[0062] However, in the case where a plurality of types of devices (such as the processing device 4) are connected to the conveyance system 2, when the conveyance vehicle 10 receives the workpiece 11 after processing from a certain processing device 4, it sometimes travels on the conveyance path 6 to carry the workpiece 11 after processing to the device used in the next process. In addition, in Figure 1 and Figure 2 two conveyance vehicles 10a and 10b are shown, but the number of conveyance vehicles 10 is not limited.

[0063] As Figure 2 shown, the processing device 4, the loader / unloader 8, and the conveyance vehicle 10 are wirelessly connected to the control unit 12 that controls their operations. However, the control unit 12 only needs to be configured to be able to control the operations of the processing device 4, the loader / unloader 8, the conveyance vehicle 10, etc., and sometimes it is also connected to them in a wired manner.

[0064] Figure 3 is a side view schematically showing a structural example of the loader / unloader 8. In addition, in Figure 3 a part of the components are shown as functional blocks. As Figure 3 shown, the loader / unloader 8 includes a housing 22 for storing various components. In addition, in Figure 3 for the sake of easy explanation, only the outline of the housing 22 is shown.

[0065]

[0065] Two box storage mechanisms 24 are respectively provided at positions at two different heights along the height direction (Z1 axis direction) inside the housing 22. That is, the loader / unloader 8 of the present embodiment includes a first box storage mechanism 24a and a second box storage mechanism 24b disposed above the first box storage mechanism 24a. However, there is no limit to the number of box storage mechanisms 24 provided in the loader / unloader 8. The loader / unloader 8 only needs to have one or more box storage mechanisms 24.

[0066]

[0066] Each box storage mechanism 24 has a flat support table 26. A guiding mechanism (not shown) is provided on the upper surface side of the support table 26, and a flat box placement table 28 is mounted on the guiding mechanism so as to be slidable along the depth direction (Y1 axis direction) of the housing 22.

[0067]

[0067] A box 30 capable of accommodating a plurality of (for example, 10 or more) workpieces 11 is placed on the upper surface of the box placement table 28. The box 30 is used when collectively transporting a plurality of workpiece units 17. By using such a box 30, the operator can collectively carry a plurality of workpiece units 17 into the loader / unloader 8.

[0068]

[0068] An inlet / outlet 32 through which the box placement table 28 carrying the box 30 can pass is formed at a position of the housing 22 corresponding to each box storage mechanism 24. When the box 30 is carried in and out, the box placement table 28 carrying the box 30 is slid so that the box 30 passes through the inlet / outlet 32.

[0069]

[0069] An outer door (second door) 34 capable of closing each inlet / outlet 32 is disposed at a position of the housing 22 corresponding to each inlet / outlet 32. The lower part of the outer door 34 is connected to the outer end of the support table 26 by a rotary connection member 36 such as a hinge having a horizontal rotation axis, and the outer door 34 rotates about the rotation axis of the rotary connection member 36 to open and close.

[0070]

[0070] In a state where the outer door 34 is open, the box placement table 28 can be pulled out to an external loading / unloading area (external area) 38a located outside the inlet / outlet 32 (refer to Figure 6 Figure 6 (A) etc.). In addition, an air-driven locking mechanism (not shown) for fixing the outer door 34 in a closed state so as not to open is provided at a position of the housing 22 corresponding to each inlet / outlet 32.

[0071] For example, an operator places the conveyed cassette 30 on the cassette placement table 28 that has been pulled out to the external loading / unloading area 38a. Then, when the operator pushes the cassette placement table 28 into the interior of the housing 22, the cassette placement table 28 and the cassette 30 move to the internal storage area (internal area) 38b located on the inner side of the loading / unloading port 32 (refer to Figure 6 such as (A) of

[0072] In addition, in this specification, the internal storage area 38b is sometimes referred to as the first placement area for placing the cassette 30. When removing the cassette 30 from the cassette storage mechanism 24, after opening the outer door 34, it is only necessary to pull the cassette placement table 28 from the internal storage area 38b to the external loading / unloading area 38a.

[0073] An inner door (first door) 40 that can move in the height direction is provided at a position on each cassette storage mechanism 24 that is on the side opposite to the loading / unloading port 32 with respect to the internal storage area 38b. The inner door 40 of the first cassette storage mechanism 24a moves between a closed position above and an open position below adjacent to the internal storage area 38b of the first cassette storage mechanism 24a, and the inner door 40 on the side of the second cassette storage mechanism 24b moves between an open position above and a closed position below adjacent to the internal storage area 38b of the second cassette storage mechanism 24b. Thus, the two inner doors 40 do not interfere with each other.

[0074] Figure 4 (A) of Figure 4 is a partial cross-sectional side view of the first cassette storage mechanism 24a showing a state where the outer door 34 is closed and the inner door 40 is open. In addition, in

[0075] As shown in Figure 4 such as (A) of

[0076] a lifting mechanism 42 is connected to the inner door 40. The lifting mechanism 42 is, for example, a pneumatic actuator (cylinder) that moves an object using air pressure, and it has a cylinder 42a and a piston rod 42b that can move relative to the cylinder 42a.

[0077] If the intake and exhaust of the opposing cylinder 42a are controlled to move the piston and the piston rod 42b downward from above, the inner door 40 of the first cassette storage mechanism 24a moves from the closed position to the open position. Further, if the piston and the piston rod 42b are moved upward from below, the inner door 40 of the first cassette storage mechanism 24a moves from the open position to the closed position. Further, the elevating mechanism 42 may also be implemented by another mechanism such as a rodless cylinder.

[0078] At a position of the support table 26 facing the inner door 40, a first sensor 44 for detecting whether the inner door 40 is open is provided. The first sensor 44 is, for example, a magnetic sensor that detects the intensity of the magnetic field of a magnet 44a (refer to Figure 4 (B)) installed at a specified position of the inner door 40.

[0079] For example, as shown in Figure 4 (A), when the inner door 40 is opened and the magnet 44a moves away from the first sensor 44, the intensity of the magnetic field of the magnet 44a weakens at the position of the first sensor 44. Therefore, it is possible to determine whether the inner door 40 is open based on the intensity of the magnetic field detected by the first sensor 44.

[0080] A control device 46 that controls each component of the loader / unloader 8 is connected to the first sensor 44, and the first sensor 44 transmits information related to the detected magnetic field intensity to the control device 46. The control device 46 determines that the inner door 40 is open when the magnetic field intensity detected by the first sensor 44 is weaker than a reference, and determines that the inner door 40 is closed when the magnetic field intensity detected by the first sensor 44 is stronger than the reference. Further, the first sensor 44 may also be connected to the control device 46 in a wireless manner.

[0081] The control device 46 is, for example, composed of a computer, and includes a processing device such as a CPU (Central Processing Unit), a main storage device such as a DRAM (Dynamic Random Access Memory), and an auxiliary storage device such as a flash memory. The functions of the control device 46 are realized by causing the processing device and the like to operate according to software stored in the auxiliary storage device.

[0082] At a position of the housing 22 corresponding to the loading / unloading port 32, a second sensor 48 for detecting whether the outer door 34 is open is provided. The second sensor 48 is, for example, a magnetic sensor that detects the intensity of the magnetic field of a magnet 48a installed at a specified position of the outer door 34. The second sensor 48 is connected to the control device 46. Further, the second sensor 48 may also be connected to the control device 46 in a wireless manner.

[0083] Figure 4 View (B) is a partially sectional side view showing the state where the outer door 34 is open and the inner door 40 is closed. Additionally, in Figure 4 View (B), the control device 46 is shown by a functional block. As Figure 4 shown in View (B), when the outer door 34 is opened and the magnet 48a moves away from the second sensor 48, the intensity of the magnetic field of the magnet 48a weakens at the position of the second sensor 48.

[0084] Therefore, it is possible to determine whether the outer door 34 is open by using the intensity of the magnetic field detected by the second sensor 48. Specifically, the second sensor 48 sends information related to the intensity of the detected magnetic field to the control device 46. When the intensity of the magnetic field detected by the second sensor 48 is weaker than the reference, the control device 46 determines that the outer door 34 is open, and when the intensity of the magnetic field detected by the second sensor 48 is stronger than the reference, the control device 46 determines that the outer door 34 is closed.

[0085] The control device 46 has a function as a first safety mechanism for restricting access from the outside to the inside of the loader / unloader 8. The first safety mechanism is achieved by the control device 46 appropriately controlling an air-driven locking mechanism that is fixed in such a way that the closed outer door 34 cannot be opened.

[0086] Specifically, when it is determined that the outer door 34 is closed and the inner door 40 is open, the control device 46 fixes the outer door 34 using the locking mechanism in a manner that does not open the outer door 34. In this way, by controlling whether the outer door 34 can be opened or closed by the control device 46, it is possible to prevent the operator from mistakenly accessing the movable parts etc. in the operation inside the loader / unloader 8.

[0087] Additionally, the control device 46 has a function as a second safety mechanism for restricting access from the outside to the inside of the loader / unloader 8. The second safety mechanism is achieved by the control device 46 appropriately managing the power supply of the loader / unloader 8. Specifically, when it is determined that the outer door 34 is open and the inner door 40 is closed, and the inner door 40 is opened for some reason, the control device 46 cuts off the power supply of the loader / unloader 8.

[0088] With the second safety mechanism, when the outer door 34 and the inner door 40 are both open, the loader / unloader 8 is stopped. In this way, by appropriately managing the power supply of the loader / unloader 8 by the control device 46, it is possible to prevent the operator from mistakenly accessing the movable parts etc. in the operation inside the loader / unloader 8.

[0089] Figure 5 View (A) is a partially sectional side view showing the cassette placement table 28 etc., Figure 5(B) is a bottom view showing the cassette mounting table 28. A stopper member 50 is disposed on the lower surface 28a side of the cassette mounting table 28. The stopper member 50 has, for example, a square bar 50a that is long in the depth direction. However, the length of the square bar 50a in the depth direction is shorter than the length of the cassette mounting table 28 in the depth direction. Further, the square bar 50a is formed of a metal such as stainless steel, for example. However, there are no particular limitations on the material or shape of the square bar 50a, etc.

[0090] At one end of the square bar 50a that is located inside in the depth direction (i.e., the end on the inner door 40 side), a rotation axis (not shown) along the width direction (X1 axis direction) that is substantially perpendicular to the height direction and the depth direction is provided, and a roller 50b is supported rotatably on this rotation axis. The diameter of the roller 50b is smaller than the distance between the lower surface 28a of the cassette mounting table 28 and the upper surface 26a of the support table 26.

[0091] An axial mechanism 52 that supports the square bar 50a rotatably is provided at a position between one end on the inner side and the other end on the outer side of the square bar 50a. The axial mechanism 52 has a rotation axis 52a along the width direction. The rotation axis 52a is connected to a position on the other end side (outer side) of the square bar 50a that is closer to the center in the length direction (depth direction).

[0092] Both end portions in the width direction of the rotation axis 52a are inserted into the bearing holes of a pair of bearings 52b fixed to the lower surface 28a side of the cassette mounting table 28. Thus, the square bar 50a is supported by the bearings 52b so as to be able to rotate about the rotation axis 52a within a plane parallel to the height direction and the depth direction (within a plane perpendicular to the width direction).

[0093] As described above, the rotation axis 52a is connected to a position on the other end side of the square bar 50a that is closer to the center. Thus, the direction of the moment about the rotation axis 52a of the gravity acting on the stopper member 50 becomes a direction in which one end of the square bar 50a moves downward. That is, as long as a sufficient force is not applied to the square bar 50a, the position of one end of the square bar 50a is lower than the position of the other end of the square bar 50a due to the action of gravity.

[0094] Therefore, for example, in a state where the entire cassette mounting table 28 is positioned in the internal storage area 38b, the roller 50b is in contact with the upper surface 26a of the support table 26. Further, when the cassette mounting table 28 is moved above the support table 26, the roller 50b rotates on the upper surface 26a of the support table 26.

[0095] The lower end of a pin (pressing portion) 54, which is long in the height direction, is connected to the other end portion of the square bar 50a. A through hole 28c that penetrates the cassette mounting table 28 in the height direction is formed at a position of the cassette mounting table 28 corresponding to the pin 54, and the pin 54 is inserted into the through hole 28c. The through hole 28c is formed to have a size that does not hinder the movement of the inserted pin 54 in the height direction.

[0096] The length of the pin 54 in the height direction is greater than the thickness of the cassette mounting table 28. Therefore, in a state where the roller 50b is in contact with the upper surface 26a of the support table 26, the upper portion of the pin 54 protrudes to the upper surface 28b side of the cassette mounting table 28. A disk-shaped button 54b is fixed to the protruding portion of the pin 54, and the button 54b has an outer diameter larger than the diameter of the pin 54.

[0097] When the button 54b fixed to the pin 54 is pressed from above, the other end of the square bar 50a moves downward, and one end of the square bar 50a moves upward. That is, the roller 50b moves upward. In addition, a ring 54a is fixed near the lower portion of the pin 54, and the ring 54a has an outer diameter larger than the diameter of the through hole 28c.

[0098] Figure 6 (A) is a partial cross-sectional side view showing the case where the cassette mounting table 28 is pulled out from the internal storage area 38b to the outside. The cassette mounting table 28 is installed so as to be slidable relative to the support table 26 by the above-described guide mechanism (not shown), and is pulled out toward the outside of the loading / unloading port 32.

[0099] When the cassette mounting table 28 slides outward and the roller 50b extends beyond the outer end of the upper surface 26a of the support table 26, due to the moment of the gravity acting on the stopper member 50 about the rotation axis 52a, one end of the square bar 50a moves downward. That is, the roller 50b is in a state of being detached from the support table 26.

[0100] Figure 6 (B) is a partial cross-sectional side view showing the case where the roller 50b is detached from the support table 26. When the roller 50b is detached from the support table 26, the roller 50b is positioned at a position lower than the upper surface 26a. As a result, the movement of the cassette mounting table 28 inward is restricted by the contact of the stopper member 50 with the outer side surface 26b of the support table 26. In addition, as the roller 50b is detached, the pin 54 rises, and the ring 54a comes into contact with the lower surface 28a of the cassette mounting table 28.

[0101] In this way, when the cassette mounting table 28 is pulled out, the stopper member 50 and the shaft mechanism 52 function as a movement restricting mechanism for restricting the inward movement of the cassette mounting table 28. By providing the movement restricting mechanism, for example, it is easy to carry in and out a relatively heavy cassette 30, and thus the risk of breakage of the workpiece 11 stored in the cassette 30 during loading and unloading can be reduced.

[0102] That is, when the cassette 30 is placed (loaded) on the cassette placement table 28, as the cassette placement table 28 moves inward, the risk that the operator will drop the cassette 30 and the risk that the operator will cause the cassette 30 to collide with the outer door 34 increase. However, by restricting the inward movement of the cassette placement table 28 with the movement restricting mechanism, these risks are suppressed to a sufficiently low level.

[0103] In addition, when the operator removes the cassette 30 from the cassette placement table 28, as the cassette placement table 28 moves inward, the risk that the cassette 30 to be removed will collide with a part of the housing 22 located above the loading / unloading port 32 increases. However, by restricting the inward movement of the cassette placement table 28 with the movement restricting mechanism, this risk is also suppressed to a sufficiently low level.

[0104] The movement restricting mechanism of the present embodiment is achieved by the rotation of the square bar 50a in a plane parallel to the height direction and the depth direction. Therefore, unlike the case where a movement restricting mechanism is provided at a portion outside the width direction of the cassette placement table 28, the cassette storage mechanism 24 does not increase in the width direction. Therefore, it is easier to implement a cassette storage mechanism 24 that is compact in the width direction than in the case where a movement restricting mechanism is provided at a portion outside the width direction of the cassette placement table 28.

[0105] In addition, conditions such as the length of the square bar 50a and the position of the shaft mechanism 52 are set such that the area for placing the cassette 30 on the cassette placement table 28 is completely exposed from the housing 22 in a state where the square bar 50a has fallen off the support table 26. Therefore, the operator can place (load) the cassette 30 on the cassette placement table 28 in a state where the cassette 30 is completely exposed from the housing 22.

[0106] Figure 6 Figure (C) is a partial cross-sectional side view showing the case where the cassette placement table 28 is returned to the internal storage area 38b. When returning the cassette placement table 28 to the internal storage area 38b, the operator presses the button 54b. The operator, for example, presses the button 54b until the lower part of the button 54b comes into contact with the upper surface 28b of the cassette placement table 28. Thereby, the pin 54 is pressed downward, and the roller 50b moves to a position above the upper surface 26a of the support table 26.

[0107] The roller 50b, for example, rises until it comes into contact with the lower surface 28a of the cassette placement table 28. As a result, the restriction on the inward movement of the cassette placement table 28 is released, and the cassette placement table 28 can be returned to the internal storage area 38b. The operator can push the cassette placement table 28 into the internal storage area 38b while pressing the button 54b.

[0108] In addition, the cassette storage mechanism 24 is not limited to the above example. For example, stopper members 50 may be provided at two different positions in the width direction of the cassette mounting table 28. In this case, through holes 28c are formed at positions corresponding to the respective pins 54. In addition, in this case, the two square rods 50a constituting the two stopper members 50 may be connected to each other at an arbitrary position. If the two square rods 50a are connected to each other, one of the pins 54 may be omitted.

[0109] In addition, the through holes 28c may also be formed in the area of the cassette mounting table 28 where the cassette 30 is disposed. In this case, when the cassette 30 is placed on the cassette mounting table 28, the pin 54 is pressed down due to the self-weight of the cassette 30. That is, it is not necessary for the operator to press down the pin 54 to release the restriction of the stopper member 50.

[0110] As Figure 3 shown, the loader / unloader 8 has a lifting mechanism 56 disposed on the side of the inner door 40 opposite to the internal storage area 38b. The lifting mechanism 56 has a support column 56a that is long in the height direction. A pair of guide rails (not shown) along the length direction (i.e., the height direction) of the support column 56a are provided on the inner door 40 side of the support column 56a.

[0111] A plate-like lifting table 58 is mounted on the pair of guide rails of the lifting mechanism 56 so as to be slidable in the height direction. The upper surface of the lifting table 58 is formed substantially flat. The lifting table 58 slides in the height direction along the pair of guide rails while keeping its upper surface substantially perpendicular to the height direction.

[0112] A motor (not shown) and a drive pulley (not shown) connected to the rotating shaft of the motor are provided at the lower part of the support column 56a. In addition, a driven pulley (not shown) is provided at the upper part of the support column 56a. A toothed endless belt (not shown) is stretched between the drive pulley and the driven pulley, and a part of the toothed endless belt is fixed to the lifting table 58. Therefore, when the rotating shaft of the motor is rotated in one direction, the lifting table 58 rises, and when the rotating shaft of the motor is rotated in the other direction, the lifting table 58 descends.

[0113] A temporary storage unit 60 for temporarily storing the workpiece 11 carried out from the cassette 30 in the cassette storage mechanism 24 or the workpiece 11 of the cassette 30 to be carried into the cassette storage mechanism 24 is provided on the upper surface side of the lifting table 58. The temporary storage unit 60 has a square tube-shaped housing 62 having an opening formed on the cassette storage mechanism 24 side. A plurality of transfer units (transfer mechanisms) 64 capable of respectively gripping the workpiece 11 and moving it in the depth direction are arranged inside the housing 62.

[0114] When transferring the workpiece unit 17 between the temporary storage unit 60 and the first cassette 30a of the first cassette storage mechanism 24a, align the height of the temporary storage unit 60 with the height of the first cassette storage mechanism 24a. That is, arrange the temporary storage unit 60 in the first transfer area B1a adjacent to the inner door 40 side in the depth direction with respect to the first placement area A1a of the first cassette storage mechanism 24a.

[0115] When the temporary storage unit 60 is arranged in the first transfer area B1a and the inner door 40 of the first cassette storage mechanism 24a is opened, the transfer unit 64 can access the first cassette 30a in the first placement area A1a. For example, the transfer unit 64 holds the workpiece unit 17 stored in the first cassette 30a and pulls out the workpiece unit 17 to the temporary storage unit 60.

[0116] In addition, the transfer unit 64 holds the workpiece unit 17 temporarily placed in the temporary storage unit 60 and stores the workpiece unit 17 in the first cassette 30a. In this way, the transfer unit 64 can transfer the workpiece 11 between the temporary storage unit 60 in the first transfer area B1a and the first cassette 30a in the first placement area A1a.

[0117] When transferring the workpiece unit 17 between the temporary storage unit 60 and the second cassette 30b of the second cassette storage mechanism 24b, align the height of the temporary storage unit 60 with the height of the second cassette storage mechanism 24b. That is, arrange the temporary storage unit 60 in the first transfer area B1b adjacent to the inner door 40 side in the depth direction with respect to the first placement area A1b of the second cassette storage mechanism 24b.

[0118] When the temporary storage unit 60 is arranged in the first transfer area B1b and the inner door 40 of the second cassette storage mechanism 24b is opened, the transfer unit 64 can access the second cassette 30b in the first placement area A1b. For example, the transfer unit 64 holds the workpiece unit 17 stored in the second cassette 30b and pulls out the workpiece unit 17 to the temporary storage unit 60.

[0119] In addition, the transfer unit 64 holds the workpiece unit 17 temporarily placed in the temporary storage unit 60 and stores the workpiece unit 17 in the second cassette 30b. In this way, the transfer unit 64 can transfer the workpiece 11 between the temporary storage unit 60 in the first transfer area B1b and the second cassette 30b in the first placement area A1b.

[0120] A mounting table 66 is provided above the second cassette storage mechanism 24b. In addition, an opening 22b is provided in the ceiling 22a of the housing 22 that penetrates vertically above the mounting table 66. In addition, an opening 6a is provided in the transfer path 6 that penetrates vertically above the mounting table 66 and the opening 22b.

[0121] When transporting the workpiece unit 17 between the transport cart 10 and the temporary storage unit 60, first move the transport cart 10 having the container (box) 102 capable of accommodating the workpiece unit 17 above the opening 6a. Then, lower the container 102 in a manner that it is suspended by the suspension member 112 and place the container 102 on the upper surface of the placement table 66 (the second placement area A2).

[0122] In addition, align the height of the temporary storage unit 60 with the height of the container 102 placed on the placement table 66. That is, arrange the temporary storage unit 60 in the second transport area B2 adjacent to the placement table 66 in the depth direction. Thereby, the transport unit 64 can access the container 102 placed in the second placement area A2. For example, the transport unit 64 holds the workpiece unit 17 accommodated in the container 102 and pulls out the workpiece unit 17 to the temporary storage unit 60.

[0123] In addition, the transport unit 64 holds the workpiece unit 17 temporarily stored in the temporary storage unit 60 and accommodates the workpiece unit 17 in the container 102. In this way, the transport unit 64 can transport the workpiece 11 between the temporary storage unit 60 in the second transport area B2 and the container 102 placed on the placement table 66. In addition, the lifting mechanism 56 for lifting the temporary storage unit 60 and the transport unit 64 in the temporary storage unit 60 are connected to the control device 46. The operations of the lifting mechanism 56 and the transport unit 64 are controlled by this control device 46.

[0124] A receiver 68 and a transmitter 70 are also connected to the control device 46. The receiver 68 receives a signal (information) from the outside and sends it to the control device 46, and the transmitter 70 sends the signal (information) received from the control device 46 to the outside. The receiver 68 receives, for example, a signal sent from the control unit 12 of the transport system 2 and sends it to the control device 46.

[0125] The control device 46 controls the operations of the respective components of the loader / unloader 8, for example, based on the signal received from the receiver 68. In addition, the control device 46 generates a signal for notification and sends it to the transmitter 70, for example. The transmitter 70 sends the signal received from the control device 46 to the control unit 12 of the transport system 2, for example.

[0126] The loader / unloader 8 of the present embodiment can transport the workpiece unit 17 between the box 30 accommodating a plurality of workpiece units 17 and the container 102 of the transport cart 10 with the help of the temporary storage unit 60. Thereby, the workpiece unit 17 can be transported to each processing device 4 in a timely manner, and the workpiece unit 17 processed by each processing device 4 can be recycled in a timely manner.

[0127] Figure 7FIG. (A) is a partial cross-sectional side view showing a state in which the workpiece unit 17 is placed on the upper layer of the temporary storage unit 60. Figure 7 FIG. (B) is a partial cross-sectional side view showing a state in which the workpiece unit 17 is placed on the upper layer of the temporary storage unit 60. The housing 62 of the temporary storage unit 60 includes, for example, an upper plate 62a disposed at the upper part and a lower plate 62b disposed at the lower part.

[0128] The upper ends of columns (not shown) are respectively connected to both end portions in the width direction of the upper plate 62a. In addition, the lower ends of the columns are respectively connected to both end portions in the width direction of the lower plate 62b. That is, the upper plate 62a and the lower plate 62b are interconnected by two sets of columns. A pair of side plates 62c separated in the width direction are disposed in the space between the upper plate 62a and the lower plate 62b. In addition, an opening 62d is formed at the end of the housing 62 on the side of the cassette storage mechanism 24.

[0129] Upper layer guide rails (first temporary storage portions) 72a that are long in the depth direction are respectively disposed at the same height positions inside the pair of side plates 62c. Each upper layer guide rail 72a has a support surface that supports the workpiece unit 17 (frame 15) from below and a side surface that defines the position of the workpiece unit 17 (frame 15) in the width direction.

[0130] Lower layer guide rails (second temporary storage portions) 72b that are long in the depth direction are respectively disposed at positions below the upper layer guide rails 72a inside the pair of side plates 62c. Each lower layer guide rail 72b has a support surface that supports the workpiece unit 17 (frame 15) from below and a side surface that defines the position of the workpiece unit 17 (frame 15) in the width direction.

[0131] In this way, the upper layer guide rail 72a and the lower layer guide rail 72b are provided at different height positions inside the housing 62, so that the temporary storage unit 60 can simultaneously store two workpiece units 17. Therefore, compared with the case where the temporary storage unit can only store one workpiece unit 17, the workpiece unit 17 can be efficiently transported between the container 102 or the cassette 30 of the transport cart 10 and the temporary storage unit 60.

[0132] For example, the upper layer guide rail 72a is used for storing the workpiece unit 17 before processing, and the lower layer guide rail 72b is used for storing the workpiece unit 17 after processing. However, there is no limitation on the storage method of the workpiece unit 17. It is also possible that the upper layer guide rail 72a is used for storing the workpiece unit 17 after processing, and the lower layer guide rail 72b is used for storing the workpiece unit 17 before processing.

[0133] A first transfer unit 64a is provided at a position corresponding to the height of the upper guide rail 72a, and a second transfer unit 64b is provided at a position corresponding to the height of the lower guide rail 72b. Each transfer unit 64 has a gripping portion, which includes two plate members arranged vertically. The two plate members are arranged such that the lower surface of the upper plate member is substantially parallel to the upper surface of the lower plate member.

[0134] The gripping portion of each transfer unit 64 further includes an actuator (not shown) for adjusting the distance between the two plate members. By this actuator, the distance between the two plate members is narrowed to grip the frame 15 of the workpiece unit 17. Further, the distance between the two plate members is expanded to release the frame 15 of the workpiece unit 17 from the two plate members.

[0135] In addition, each transfer unit 64 has a horizontal movement mechanism (not shown) for moving the gripping portion in the depth direction. The horizontal movement mechanism has a linear guide (not shown) provided along the depth direction. The transfer unit 64 is slidably connected to the linear guide.

[0136] For example, a driven pulley (not shown) having a rotation axis substantially parallel to the width direction is provided on one end side of the linear guide. In addition, on the other end side of the linear guide, a driving pulley (not shown) having a rotation axis substantially parallel to the width direction and a motor (not shown) whose rotation axis is connected to the driving pulley are provided.

[0137] A toothed endless belt (not shown) is mounted on the driven pulley and the driving pulley, and a part of the toothed endless belt is fixed to the gripping portion. Therefore, when the rotation axis of the motor is rotated in one direction, the gripping portion moves to one side in the depth direction, and when the rotation axis of the motor is rotated in the other direction, the gripping portion moves to the other side in the depth direction.

[0138] When the workpiece unit 17 is temporarily placed on the upper guide rail 72a, as shown in (A) of Figure 7 , first, the height of the temporary placement unit 60 is adjusted by the lifting mechanism 56 so that the height of the upper guide rail 72a is aligned with the height of the container 102 or the box 30 storing the workpiece unit 17.

[0139] Next, the gripping portion of the first transfer unit 64a is moved into the container 102 or the box 30. Then, the frame 15 of the workpiece unit 17 stored in the container 102 or the box 30 is gripped by the gripping portion of the first transfer unit 64a. Then, the gripping portion of the first transfer unit 64a is moved in a direction away from the container 102 or the box 30. Thereby, the workpiece unit 17 is placed on the upper guide rail 72a.

[0140] The operation of storing the workpiece unit 17 temporarily placed on the upper guide rail 72a in the container 102 or the cassette 30 is the same. In this case, after gripping the workpiece unit 17 temporarily placed on the upper guide rail 72a with the gripping portion of the first transfer unit 64a, it is only necessary to move the gripping portion of the first transfer unit 64a to the inside of the container 102 or the cassette 30.

[0141] When the workpiece unit 17 is temporarily placed on the lower guide rail 72b, as Figure 7 shown in (B), first, the height of the temporary placement unit 60 is adjusted by the lifting mechanism 56 so that the height of the lower guide rail 72b is aligned with the height of the container 102 or the cassette 30 storing the workpiece unit 17.

[0142] Next, the gripping portion of the second transfer unit 64b is moved to the inside of the container 102 or the cassette 30. Then, the frame 15 of the workpiece unit 17 stored in the container 102 or the cassette 30 is gripped by the gripping portion of the second transfer unit 64b. Then, the gripping portion of the second transfer unit 64b is moved in a direction away from the container 102 or the cassette 30. Thus, the workpiece unit 17 is placed on the lower guide rail 72b.

[0143] The operation of storing the workpiece unit 17 temporarily placed on the lower guide rail 72b in the container 102 or the cassette 30 is the same. In this case, after gripping the workpiece unit 17 temporarily placed on the lower guide rail 72b with the gripping portion of the second transfer unit 64b, it is only necessary to move the gripping portion of the second transfer unit 64b to the inside of the container 102 or the cassette 30.

[0144] The operation related to the transfer of the workpiece unit 17 between the cassette 30 and the container 102 is as follows, for example. First, the height of the temporary placement unit 60 is adjusted by the lifting mechanism 56, and the workpiece unit 17 before processing stored in the cassette 30 is pulled out to the upper guide rail 72a. Next, the temporary placement unit 60 is lifted by the lifting mechanism 56, and the workpiece unit 17 after processing stored in the container 102 on the placement table 66 is pulled out to the lower guide rail 72b.

[0145] Furthermore, the height of the temporary placement unit 60 is adjusted by the lifting mechanism 56, and the workpiece unit 17 before processing temporarily placed on the upper guide rail 72a is stored in the container 102 on the placement table 66. Through this operation, the unloading (recovery) of the workpiece unit 17 after processing from the container 102 and the loading (distribution) of the workpiece unit 17 before processing into the container 102 are performed efficiently. However, the operation related to the transfer of the workpiece unit 17 is not limited to this. In addition, the relationship between the upper guide rail 72a and the lower guide rail 72b can be switched as needed.

[0146] Figure 8The top view of (A) shows two upper guide rails 72a, etc. The upper guide rail 72a and the lower guide rail 72b on one side in the width direction are fixed to the first side plate 62c1. Additionally, the upper guide rail 72a and the lower guide rail 72b on the other side in the width direction are fixed to the second side plate 62c2.

[0147] At one end side in the depth direction of the lower plate 62b, a first opening 62e1 that penetrates the upper and lower parts of one side in the width direction of the lower plate 62b and a second opening 62e2 that penetrates the upper and lower parts of the other side in the width direction of the lower plate 62b are formed. A part of one end side in the depth direction of the first side plate 62c1 is inserted into the first opening 62e1, and a part of one end side in the depth direction of the second side plate 62c2 is inserted into the second opening 62e2.

[0148] At the regions on the lower surface of the lower plate 62b adjacent to the first opening 62e1 and the second opening 62e2, the base of the first air actuator 74a and the base of the second air actuator 74b are fixed. The movable part (e.g., the piston rod) of the first air actuator 74a is connected to a part of the first side plate 62c1 inserted into the first opening 62e1. The movable part (e.g., the piston rod) of the second air actuator 74b is connected to a part of the second side plate 62c2 inserted into the second opening 62e2.

[0149] At the other end side in the depth direction of the lower plate 62b, a first guiding mechanism 76a and a second guiding mechanism 76b are provided. The first guiding mechanism 76a includes: a guide rail fixed on the upper surface of the lower plate 62b and longer in the width direction; and a slider fixed to the lower side of the first side plate 62c1 and installed on the guide rail in a state capable of sliding in the width direction. Additionally, the second guiding mechanism 76b includes: a guide rail fixed on the upper surface of the lower plate 62b; and a slider fixed to the lower side of the second side plate 62c2 and installed on the guide rail in a state capable of sliding in the width direction.

[0150] Thus, if the interval between the first side plate 62c1 and the second side plate 62c2 is changed using the first air actuator 74a and the second air actuator 74b, the interval between the two upper guide rails 72a can be changed while maintaining a parallel state with each other, and the interval between the two lower guide rails 72b can be changed while maintaining a parallel state with each other.

[0151] That is, the first side plate 62c1, the first air actuator 74a, the first guiding mechanism 76a, the second side plate 62c2, the second air actuator 74b, and the second guiding mechanism 76b function as an interval adjustment mechanism 78 for adjusting the interval between the two upper guide rails 72a and the interval between the two lower guide rails 72b.

[0152] The operations of the first air actuator 74a and the second air actuator 74b are controlled by the above-described control device 46. That is, the control device 46 controls the operations of the first air actuator 74a and the second air actuator 74b according to the size of the workpiece unit 17 (workpiece 11), thereby adjusting the interval between the two upper guide rails 72a and the interval between the two lower guide rails 72b.

[0153] For example, when the diameter of the workpiece 11 is 300 mm, the frame 15 having a width of about 400 mm is used. In this case, the control device 46 operates the first air actuator 74a and the second air actuator 74b such that the interval 72c between the sides of the two upper guide rails 72a (the interval 72c between the sides of the two lower guide rails 72b) is slightly (e.g., several mm) larger than 400 mm.

[0154] In addition, for example, when the diameter of the workpiece 11 is 200 mm, the frame 15 having a width of about 300 mm is used. In this case, the control device 46 operates the first air actuator 74a and the second air actuator 74b such that the interval 72c between the sides of the two upper guide rails 72a (the interval 72c between the sides of the two lower guide rails 72b) is slightly (e.g., several mm) larger than 300 mm.

[0155] Figure 8 (B) is a plan view showing a case where the interval between the two upper guide rails 72a is narrowed. In addition, when the interval between the two upper guide rails 72a is narrowed, the interval between the two lower guide rails 72b is also narrowed. Thus, by adjusting the interval between the two upper guide rails 72a and the interval between the two lower guide rails 72b according to the diameter of the workpiece 11, workpieces 11 of different sizes can be temporarily placed on the temporary placement unit 60. That is, it is possible to handle the conveyance of workpiece units 17 of multiple types and sizes using a single temporary placement unit 60.

[0156] Figure 9 (A) is a perspective view of the upper surface side of the transport vehicle 10 that travels on the transport path 6 to transport the workpiece unit 17, Figure 9 (B) is a perspective view of the bottom surface side of the transport vehicle 10. As Figure 9 shown in (A) and Figure 9 (B), the transport vehicle 10 has a plate-shaped frame 82 on which various components are mounted. A pair of axles 84 are arranged at both end portions on the front side of the frame 82. The axles 84 are mounted on the lower surface side of the frame 82 such that one end side protrudes from the side surface of the frame 82.

[0157] At one end side of a pair of axles 84, wheels (front wheels) 86 are respectively fixed. That is, a pair of wheels 86 are arranged at two positions separated in the width direction (vehicle width direction) of the frame 82. In addition, a pair of wheels (rear wheels) 88 are arranged at two positions separated in the width direction at the rear end portion of the frame 82. The wheels 88 are, for example, casters that can rotate 360° around a rotation axis along the height direction, and are installed on the lower surface side of the frame 82. The wheels 86 and the wheels 88 are traveling wheels when the transport vehicle 10 travels on the transport path 6.

[0158] At the front end portion of the frame 82, a drive unit 90 for driving a pair of wheels 86 is mounted. The drive unit 90 has a pair of electric motors 92 respectively connected to the wheels 86 via the axles 84 and the like. The electric motor 92 has a rotation axis (output axis) 92a and generates power for rotating the wheels 86.

[0159] As shown in Figure 9 (B) thereof, a pulley 94 is provided at the other end side of the axle 84. An annular connecting member (not shown), such as a belt or a chain, is mounted on the rotation axis 92a of the electric motor 92 and the pulley 94. A power transmission mechanism is constituted by the rotation axis 92a of the electric motor 92, the pulley 94, and the connecting member, and the axle 84 and the electric motor 92 are connected. Thus, the power (rotational force) generated by the electric motor 92 is transmitted to the wheels 86 to rotate the wheels 86.

[0160] The drive unit 90 independently controls the rotation directions of a pair of wheels 86 by a pair of electric motors 92. By rotating a pair of wheels 86 in the same direction, the transport vehicle 10 moves forward or backward. In addition, by rotating a pair of wheels 86 in opposite directions to each other, the transport vehicle 10 can be rotated around a rotation axis along the height direction to control the traveling direction of the transport vehicle 10. In addition, there is no limitation on the structures of the wheels 86 and the wheels 88. For example, as the wheels 86 and the wheels 88, so-called Mecanum wheels obtained by mounting a plurality of inclined barrel-shaped (cylindrical) rotating bodies on the outer peripheral surface in contact with the transport path 6 can also be used.

[0161] A battery (secondary battery) 96 for supplying power to the electric motor 92 and the like is connected to the drive unit 90 via a power supply wiring (not shown). The battery 96 is, for example, mounted at the front end portion of the frame 82 and supplies power for rotating the wheels 86 to the electric motor 92. As the battery 96, a lithium-ion battery or the like is used.

[0162] Figure 10FIG. 0 is an enlarged perspective view showing the front end portion of the transport vehicle 10. On the lower surface side of the front end portion of the frame 82, a pair of terminals (power receiving terminals) 100 connected to the battery 96 are provided via charging wiring (charging cable) 98. The pair of terminals 100 are connected to, for example, power supply terminals provided outside the transport vehicle 10, and receive power for charging the battery 96. In addition, the details of charging the battery 96 using the terminals 100 will be described later.

[0163] As Figure 9 shown in (A) of Figure 9 and (B) of

[0164] Figure 11 FIG. (A) is a perspective view showing the container 102, Figure 11 and FIG. (B) is a front view showing the container 102. The container 102 is formed, for example, in a hexagonal prism shape in plan view, and has a storage portion (storage space) 102a inside thereof that can store the workpiece unit 17. The storage portion 102a is connected to the space outside the container 102 through a slit-shaped opening 102b that opens on one side surface of the container 102. The workpiece unit 17 is carried into the storage portion 102a through the opening 102b, and is carried out of the storage portion 102a through the opening 102b.

[0165] As Figure 11 shown in (B) of

[0166] The pair of first guide rails 106 are fixed to the upper wall 102c of the storage portion 102a at a predetermined interval. The pair of first guide rails 106 have: a holding surface 106a that holds the lower surface side of the workpiece unit 17a from below; and a side surface 106b that defines the horizontal position of the workpiece unit 17a. In addition, the pair of second guide rails 108 are fixed to the bottom wall 102d of the storage portion 102a at a predetermined interval. The pair of second guide rails 108 have a holding surface 108a that holds the lower surface side of the workpiece unit 17b from below. In addition, the horizontal position of the workpiece unit 17b is defined by the inner side surface of the container 102.

[0167] The interval between a pair of first guide rails 106 is narrower than the interval between a pair of second guide rails 108. Therefore, a pair of first guide rails 106 can hold a workpiece unit 17a smaller than the workpiece unit 17b held by the second guide rails 108. For example, the workpiece 11 with a diameter of about 200 mm (8 inches) is held by a pair of first guide rails 106, and the workpiece 11 with a diameter of about 300 mm (12 inches) is held by a pair of second guide rails 108.

[0168] As described above, the container 102 is not configured to be able to accommodate a plurality of workpiece units 17 of the same type (same size). In this regard, the functions and uses of the container 102 are significantly different from those of the box 30 that can accommodate a plurality of workpiece units 17 of the same type.

[0169] However, there is no limitation on the structure of the container 102 and the storage portion 102a. For example, the storage portion 102a may be configured to be able to accommodate one or three or more workpiece units 17. In addition, the storage portion 102a may also be configured to be able to accommodate a plurality of workpiece units 17 of the same type.

[0170] When the workpiece unit 17 is transported by the transport vehicle 10, as shown in (A) of Figure 9 , the container 102 is stored in the storage area 104. At this time, the lower surface of the container 102 is positioned above the lower end of the wheel 86 or the lower end of the wheel 88. Therefore, during the travel of the transport vehicle 10, the container 102 does not contact the transport path 6.

[0171] An elevating unit (elevating mechanism) 110 for suspending and lifting the container 102 is provided in a region on the upper surface side of the frame 82 located above the storage area 104. The elevating unit 110 lowers the container 102 stored in the storage area 104 and places it on a specified placement area. In addition, the elevating unit 110 raises the container 102 placed on the specified placement area and stores the container 102 in the storage area 104.

[0172] Figure 12 It is a perspective view of the transport vehicle 10 showing the state where the container 102 is placed on the placement area A. The elevating unit 110 has: a suspension member 112, one end side (lower end side) of which is connected to the container 102; and a drive mechanism 114 that winds and unwinds the suspension member 112. In addition, the placement area A is, for example, the upper surface of the placement table 66 of the loader / unloader 8 (the second placement area A2, refer to Figure 3 ).

[0173] As Figure 12As shown, the lifting unit 110 has four suspension members 112. As the suspension members 112, for example, belts with a prescribed width are used. The front end portions (lower end portions) of the four suspension members 112 are respectively connected to four positions on the upper surface side of the container 102.

[0174] When the suspension members 112 are fed out by the drive mechanism 114 while the container 102 is stored in the storage area 104, the container 102 descends and is placed on the placement area A. Further, when the suspension members 112 are wound up by the drive mechanism 114 while the container 102 is placed on the placement area A, the container 102 ascends and is stored in the storage area 104.

[0175] In the case of using a belt as the suspension member 112, as Figure 12 shown, it is preferable to preliminarily adjust the orientation of the belt relative to the container 102 in such a manner that the width direction of the belt follows the orientation in which the workpiece unit 17 passes through the opening 102b when the workpiece unit 17 is carried out from the storage portion 102a. Since the container 102 is not likely to shake in the width direction of the belt, in this manner, the possibility that the workpiece unit 17 flies out from the opening 102b during the lifting of the container 102 is suppressed to a low level.

[0176] Further, the orientation of the belt relative to the container 102 can be adjusted such that the width direction of the belt follows the orientation in which the workpiece unit 17 passes through the opening 102b when the workpiece unit 17 is carried into the storage portion 102a. In the present embodiment, the belt and the container 102 are connected in such a manner that the width direction of the belt is arranged along a direction perpendicular to the surface including the opening 102b of the container 102. Further, as the suspension member 112, members other than the belt, such as wire ropes capable of being wound up and fed out, can also be used.

[0177] As Figure 9 shown in (B), a plurality of contact members 116 that come into contact with the upper surface side of the container 102 are provided on the lower surface side of the frame 82. The plurality of contact members 116 are each formed in a columnar shape with substantially the same height and are fixed to the frame 82 so as to protrude downward from the lower surface of the frame 82. When the container 102 is stored in the storage area 104, the upper surface side of the container 102 comes into contact with the lower end portions of the plurality of contact members 116 and pushes each contact member 116 upward.

[0178] The contact member 116 is formed of an elastic member that elastically deforms when pushed by the container 102, for example. That is, the contact member 116 is constituted by an elastic body that deforms along the shape of the upper surface side of the container 102 when pushed by the container 102 stored in the storage area 104 and generates a restoring force that pushes the container 102 downward.

[0179] When the contact member 116 uses an elastic member, for example, the impact when the container 102 contacts the contact member 116 is alleviated, and the container 102 or the workpiece unit 17 in the container 102 is not easily damaged. In addition, when the transport vehicle 10 travels on the transport path 6, the contact member 116 also serves as a buffer member, so that the vibration of the frame 82 is not easily transmitted to the container 102 or the workpiece unit 17.

[0180] As the contact member 116, for example, a columnar member made of rubber (such as polyurethane rubber, silicone rubber, etc.), sponge, etc. can be used. In particular, by using a contact member 116 made of rubber with a relatively large frictional force acting on the container 102, the positional deviation of the container 102 during transportation can be suppressed. In addition, it is not necessary for the entire contact member 116 to be composed of an elastic member, and at least the area (lower end portion) of the contact member 116 that contacts the container 102 may be composed of an elastic member.

[0181] In addition, it is preferable that the contact member 116 contacts the upper surface side of the container 102 at three or more positions. In the present embodiment, as shown in (B) of Figure 9 , three columnar contact members 116 are provided on the frame 82. In this case, the upper surface of the container 102 is arranged along a plane including the lower ends of the three contact members 116, so the container 102 is not easily tilted. However, conditions such as the shape, number, and arrangement of the contact member 116 can be arbitrarily changed. For example, a pair of linear (band-shaped) contact members 116 arranged substantially parallel to each other can be provided on the frame 82.

[0182] In addition, in order for the vibration of the frame 82 not to be easily transmitted to the container 102, the container 102 can be connected to the suspension member 112 by means of an elastic member. Figure 13 is a perspective view of the transport vehicle 10 in which the container 102 is connected to the suspension member 112 by means of an elastic member (telescopic member) 118. In this case, the contact member 116 can be omitted.

[0183] An elastic member 118 is provided between the front end side (lower end side) of the suspension member 112 and the container 102. The elastic member 118 is a member that expands and contracts along the length direction of the suspension member 112 when the suspension member 112 shakes, and is, for example, an elastic body such as rubber or a spring that can expand and contract. In addition, as the elastic member 118, a telescopic joint or other telescopic member can also be used.

[0184] When storing the container 102 in the storage area 104, the winding amount of the suspension member 112 is adjusted so that the upper surface side of the container 102 does not contact the frame 82 or the contact member 116. Thus, for example, even if the frame 82 vibrates, the vibration is not directly transmitted to the container 102. In addition, the vibration transmitted from the frame 82 via the lifting unit 110 and the suspension member 112 is alleviated by the expansion and contraction of the elastic member 118, and thus is not easily transmitted to the container 102. In this way, the elastic member 118 functions as a shockproof member.

[0185] However, in the case where the contact member 116 is provided on the lower surface side of the frame 82, the winding amount of the suspension member 112 can be adjusted so that the container 102 is stored in the storage area 104 in a state of contacting the contact member 116. In this case, the transmission of vibration from the frame 82 to the container 102 is alleviated by the contact member 116, and the transmission of vibration from the suspension member 112 to the container 102 is alleviated by the elastic member 118.

[0186] A cover 120 is provided below the rear end portion of the frame 82. The cover 120 covers the opening 102b (refer to Figure 11 (A)) of the container 102 when the container 102 is stored in the storage area 104. When the opening 102b is covered by the cover 120, it is possible to prevent foreign matter from entering the storage portion 102a of the container 102 during the travel of the transport vehicle 10, and it is possible to prevent foreign matter from adhering to the workpiece unit 17.

[0187] In addition, even if the container 102 tilts or vibrates during the travel of the transport vehicle 10, the cover 120 prevents the workpiece unit 17 from flying out of the opening 102b. In addition, the detailed structure and operation of the cover 120 will be described later (refer to Figure 17 、 Figure 18 (A), Figure 18 (B)).

[0188] A pair of first sensors 122 are provided at the front end portion and the rear end portion of the frame 82. That is, the pair of first sensors 122 are provided at two positions of the frame 82 separated in the longitudinal direction (vehicle length direction). In addition, a pair of second sensors 124 are provided at both side end portions of the frame 82. That is, the pair of second sensors 124 are arranged at two positions of the frame 82 separated in the width direction (vehicle width direction).

[0189] The first sensor 122 and the second sensor 124 are respectively installed in a manner facing the conveyance path 6 along which the conveyance vehicle 10 travels, and detect the marks provided on the conveyance path 6. Based on the detection results of the marks by the first sensor 122 and the second sensor 124, the traveling, steering, stopping, etc. of the conveyance vehicle 10 are controlled. The details of the control of the conveyance vehicle 10 using the first sensor 122 and the second sensor 124 will be described later.

[0190] The specific positions where the first sensor 122 and the second sensor 124 are provided are adjusted according to the specifications of the conveyance path 6 along which the conveyance vehicle 10 travels, etc. For example, a pair of the first sensors 122 are respectively installed near the center in the width direction of the frame 82 at the front end portion and the rear end portion of the frame 82. In addition, a pair of the second sensors 124 are respectively installed near the center in the length direction of the frame 82 at both end portions of the frame 82.

[0191] In addition, a pair of the second sensors 124 may be fixed to the frame 82 in a manner arranged in parallel on the straight line passing through the pair of wheels 86. For example, a pair of the second sensors 124 are arranged outside the pair of wheels 86 in a manner clamping the pair of wheels 86 in the width direction of the frame 82. In addition, a pair of the second sensors 124 may be arranged inside the pair of wheels 86 in a manner being clamped by the pair of wheels 86 in the width direction of the frame 82.

[0192] In this way, a pair of the second sensors 124 are arranged on the straight line passing through the pair of wheels 86, so that the pair of the second sensors 124 can detect the mark through the pair of the second sensors 124 simultaneously with the wheels 86 passing through the mark to be detected. Therefore, if the conveyance vehicle 10 is steered or stopped at the timing of detecting the mark, the traveling of the conveyance vehicle 10 can be appropriately controlled without any correction.

[0193] On the other hand, when the pair of the second sensors 124 are separated from the straight line passing through the pair of wheels 86, in addition to using the timing of detecting the mark, the distance between the pair of the second sensors 124 and the pair of wheels 86 (a pair of axles 84), the traveling speed of the conveyance vehicle 10, etc. can also be used to control the timing of steering and stopping of the conveyance vehicle 10.

[0194] In addition, as Figure 10 shown, a third sensor 126 for detecting the collision of the conveyance vehicle 10 with an obstacle is provided at the front end portion of the frame 82. For example, a pair of the third sensors 126 are installed at both end sides of the front end portion of the frame 82. As the third sensor 126, for example, a push-button type switch is used.

[0195] When the front end of the carrier vehicle 10 collides with an obstacle, the third sensor 126 operates to detect the collision of the carrier vehicle 10. And when the collision of the carrier vehicle 10 is detected by the third sensor 126, the carrier vehicle 10 stops operating. Additionally, as long as the collision of the carrier vehicle 10 can be detected, there is no limitation on the structure or type of the third sensor 126.

[0196] Sometimes the carrier vehicle 10 is covered by a soft outer cover that can, for example, reduce the impact caused by collisions or the like. In this case, when the outer cover covering the front side of the carrier vehicle 10 collides with an obstacle, the outer cover deforms and comes into contact with the third sensor 126, thereby detecting the collision of the carrier vehicle 10.

[0197] As Figure 9 shown in (A) of Figure 9 and (B) of

[0198] A plate-shaped support table 128 fixed to the frame 82 is provided above the lifting unit 110. A control unit (control unit) 130 that controls the operation of the carrier vehicle 10 is fixed on the upper surface of the support table 128. The control unit 130 is connected to each component of the carrier vehicle 10 (such as the drive unit 90, the lifting unit 110, the first sensor 122, the second sensor 124, the third sensor 126, etc.) and controls the operation of each component.

[0199] In addition, a receiver 132 and a transmitter 134 are fixed to the support table 128. The receiver 132 receives a signal (information) from the outside and sends it to the control unit 130, and the transmitter 134 sends the signal (information) received from the control unit 130 to the outside. The receiver 132 and the transmitter 134 are respectively connected to the control unit 130.

[0200] The receiver 132, for example, receives a signal sent from the control unit 12 of the conveying system 2 and sends it to the control unit 130. The control unit 130, for example, controls the operation of the carrier vehicle 10 based on the signal received from the receiver 132. Additionally, the control unit 130, for example, generates a signal for notification and sends it to the transmitter 134. The transmitter 134, for example, sends the signal received from the control unit 130 to the control unit 12 of the conveying system 2 (refer to Figure 2 ).

[0201] In addition, each component of the transport vehicle 10 (lifting unit 110, first sensor 122, second sensor 124, third sensor 126, control unit 130, receiver 132, transmitter 134, etc.) is connected to the battery 96 via a power supply wiring and operates using the power supplied from the battery 96.

[0202] Figure 14 (A) of FIG. shows a plan view of a structural example of the lifting unit 110, Figure 14 (B) of FIG. shows a side view of a structural example of the lifting unit 110. As described above, the lifting unit 110 has a drive mechanism 114 that winds and unwinds a plurality of suspension members 112. The drive mechanism 114 includes a motor 142 having a rotation shaft (output shaft) 142a.

[0203] The motor 142 rotates the rotation shaft 142a to generate power for winding and unwinding the suspension member 112. A first rotation shaft (first shaft) 144a and a second rotation shaft (second shaft) 144b that are arranged substantially parallel to each other are provided at two positions sandwiching the motor 142.

[0204] A pulley 146 is provided at one end side of the first rotation shaft 144a. An annular connecting member 148 such as a belt or a chain is mounted on the rotation shaft 142a of the motor 142 and the pulley 146. A power transmission mechanism is constituted by the rotation shaft 142a of the motor 142, the pulley 146, and the connecting member 148 to connect the motor 142 and the first rotation shaft 144a. On the other hand, no pulley or the like for connecting to the motor 142 is provided at one end side of the second rotation shaft 144b.

[0205] A pulley 150a is provided at the other end side of the first rotation shaft 144a, and a pulley 150b having the same diameter as the pulley 150a is provided at the other end side of the second rotation shaft 144b. An annular connecting member 152 such as a belt or a chain is mounted on the pulley 150a and the pulley 150b. A power transmission mechanism is constituted by the pulley 150a, the pulley 150b, and the connecting member 152 to connect the first rotation shaft 144a and the second rotation shaft 144b.

[0206] At both ends of the first rotation shaft 144a, cylindrical reels 154a for winding the suspension member 112 are respectively fixed. In addition, cylindrical rollers 156a for supporting the suspension member 112 are rotatably arranged at two positions outside (on the side opposite to the motor 142) and below each reel 154a. The rotation axes of the rollers 156a are substantially parallel to the first rotation shaft 144a.

[0207] On the other hand, cylindrical reels 154b for winding the suspension member 112 are respectively fixed to both ends of the second rotation shaft 144b. In addition, cylindrical rollers 156b for supporting the suspension member 112 are rotatably arranged at two positions outside (on the side opposite to the motor 142) and below each reel 154b. The rotation axes of the respective rollers 156b are substantially parallel to the second rotation shaft 144b.

[0208] The proximal ends of the suspension member 112 are respectively fixed to the reels 154a and 154b. The suspension member 112 fixed to the reel 154a hangs downward while being in contact with the outer portion of the roller 156a. In addition, the suspension member 112 fixed to the reel 154b hangs downward while being in contact with the outer portion of the roller 156b.

[0209] In addition, as shown in (B) of Figure 14 , the suspension member 112 fixed to the reel 154a passes above the reel 154a and is supported by the roller 156a. On the other hand, the suspension member 112 fixed to the reel 154b passes below the reel 154b and is supported by the roller 156b.

[0210] When the rotation shaft 142a of the motor 142 rotates in the first direction ( Figure 14 the direction indicated by the arrow C1 in (B) of Figure 14 ), the reel 154a fixed to the first rotation shaft 144a rotates in the direction of feeding out the suspension member 112 (

[0211] the direction indicated by the arrow C2 in (B) of Figure 14 ). Thereby, the suspension member 112 is fed out from the reel 154a via the roller 156a.

[0212] On the other hand, when the rotation shaft 142a of the motor 142 rotates in the second direction opposite to the first direction ( Figure 14 the direction indicated by the arrow D1 in (B) of Figure 14 ), the reel 154a fixed to the first rotation shaft 144a rotates in the direction of winding the suspension member 112 (

[0213] In addition, the torque of the first rotation shaft 144a is transmitted to the second rotation shaft 144b through the connecting member 152, and the reel 154b fixed to the second rotation shaft 144b rotates in the direction of winding the suspension member 112 ( Figure 14 the direction indicated by the arrow D3 in (B) of

[0214] ). Thus, the suspension member 112 is wound around the reel 154b by means of the roller 156b. Figure 12 When each suspension member 112 is sent out from the drive mechanism 114, the container 102 connected to the front end side of the suspension member 112 descends. Thus, the container 102 can be placed on the placement area A (see Figure 9 ). In addition, when each suspension member 112 is wound by the drive mechanism 114, the container 102 connected to the front end side of the suspension member 112 ascends. Thus, the container 102 can be stored in the storage area 104 of the transport cart 10 (see

[0215] ). Figure 15 (A) of Figure 15 is a top view showing another structural example of the lifting unit 110, Figure 15 and Figure 15 is a side view showing another structural example of the lifting unit 110. In the lifting unit 110 shown in

[0216] and

[0217] a drive mechanism 162 is mounted instead of the above-described drive mechanism 114.

[0218] The drive mechanism 162 includes a motor 164 having a rotation shaft (output shaft) 164a and a first rotation shaft (first shaft) 166a, a second rotation shaft (second shaft) 166b, and a third rotation shaft (third shaft) 166c that are arranged substantially parallel to each other. The first rotation shaft 166a is arranged between the second rotation shaft 166b and the third rotation shaft 166c.

[0219] A plurality of cylindrical reels 172 to which the winding suspension members 112 are fixed are attached to the first rotation shaft 166a. Specifically, a pair of reels 172 are attached to both end portions of the first rotation shaft 166a. Two suspension members 112 are fixed to each reel 172 and wound in the same direction.

[0220] Figure 16 (A) of FIG. shows a top view of the reel 172. Figure 16 (B) of FIG. shows a side view of the reel 172. The lifting unit 110 has a cylindrical fixing member 174 for fixing the suspension member 112 to the reel 172, and the two suspension members 112 are collectively fixed to the reel 172 by the fixing member 174.

[0221] As Figure 16 shown in (B) of FIG., a groove (recess) 172a along the rotation axis of the reel 172 (i.e., the first rotation shaft 166a) is provided in a part of the outer peripheral portion of the reel 172. The inner surface of the groove 172a is formed in a curved surface shape. In addition, both ends of the groove 172a reach both ends in the rotation axis direction of the reel 172. The two suspension members 112 are arranged in the same direction such that the base ends thereof overlap with the groove 172a.

[0222] The fixing member 174 has an outer peripheral surface with a curved surface shape corresponding to the shape of the inner surface of the groove 172a. The fixing member 174 is inserted into the groove 172a in a state where the base ends of the two suspension members 112 overlap with the groove 172a, so as to press the base ends of the two suspension members 112 against the inner surface of the groove 172a. Thereby, the base ends of the two suspension members 112 are clamped between the inner surface of the groove 172a and the outer peripheral surface of the fixing member 174 and fixed to the reel 172.

[0223] In addition, as Figure 16 shown in (A) of FIG., a pair of protrusions (convex portions) 172b are provided on the outer peripheral portion of the reel 172 so as to clamp the two suspension members 112 fixed to the reel 172 in the width direction thereof. The pair of protrusions 172b function as guides for preventing the displacement of the suspension members 112 in the width direction. By rotating the reel 172 configured in this way, the two suspension members 112 can be wound or the two suspension members 112 can be fed out.

[0224] As Figure 15 shown in (A) of FIG. and Figure 15 (B) of FIG., one of the two suspension members 112 fixed to the reel 172 hangs downward in contact with the second rotation shaft 166b. In addition, the other of the two suspension members 112 fixed to the reel 172 hangs downward in contact with the third rotation shaft 166c.

[0225] The second rotating shaft 166b and the third rotating shaft 166c are respectively supported in a state where they can easily rotate with an externally applied force, and the outer peripheral surfaces are in contact with the suspension member 112. A pair of guides 176 for preventing the deviation of the position in the width direction of the suspension member 112 are provided on both sides of the regions of the second rotating shaft 166b and the third rotating shaft 166c that are in contact with the suspension member 112.

[0226] When the rotating shaft 164a of the motor 164 is rotated in the first direction ( Figure 15 the direction indicated by the arrow E1 in (B) of Figure 15 ), the reel 172 rotates in the direction of feeding out the suspension member 112 ( Figure 16 the direction indicated by the arrow E2 in (B) of

[0227] and Figure 15 ). As a result, the two suspension members 112 are fed out from the reel 172 via the second rotating shaft 166b and the third rotating shaft 166c, and as a result, the container 102 connected to the suspension member 112 descends. Figure 15 ), the reel 172 rotates in the direction of winding the suspension member 112 ( Figure 16 the direction indicated by the arrow F2 in (B) of

[0228] As described above, Figure 15 the drive mechanism 162 shown in (A) of

[0229] fixes two reels 172 to the first rotating shaft 166a, and fixes two suspension members 112 to the two reels 172 respectively. Therefore, the feeding out and winding of the four suspension members 112 are controlled by the rotation of the first rotating shaft 166a. As a result, the number of components constituting the drive mechanism 114 can be reduced, thereby achieving the weight reduction of the transport vehicle 10, reducing the possibility of failure, and cutting costs.

[0230] In addition, the second rotation axis 166b and the third rotation axis 166c can be fixed in a non-rotating state. In this case, the suspension member 112 moves while sliding on the outer peripheral surface of the second rotation axis 166b or the third rotation axis 166c, and is fed out from or wound around the reel 172.

[0231] Figure 17 is an enlarged perspective view showing the cover 120. The cover 120 is disposed on the lower surface side of the rear end portion of the frame 82 so as to face one side surface (rear portion) of the container 102 stored in the storage area 104. The cover 120 includes a lid portion 182 connected to the frame 82 so as to be rotatable relative to the frame 82. The lid portion 182 is formed to be able to cover the opening 102b (refer to Figure 18 (B)) of the container 102 in terms of shape and size. In addition, a plurality of contact portions 184 are fixed to the upper portion of the lid portion 182 so as to contact the upper surface side of the container 102.

[0232] When the container 102 rises toward the storage area 104, the upper surface side of the container 102 contacts the lower end portion of the contact portion 184 and pushes the contact portion 184 upward. As a result, the lid portion 182 moves (rotates) in a direction closer to the container 102, and the opening 102b of the container 102 is covered by the lid portion 182.

[0233] Figure 18 (A) is a side view showing the cover 120 in a state where the container 102 is not stored in the storage area 104, Figure 18 (B) is a side view showing the cover 120 in a state where the container 102 is stored in the storage area 104. A fixing block 186 is fixed to the lower surface of the frame 82. A connecting block (L-shaped block) 188 having an L-shaped shape when viewed in the width direction (vehicle width direction) of the frame 82 is rotatably connected to the fixing block 186.

[0234] The connecting block 188 includes an upper connecting portion 188a (side of the frame 82) and a fixing portion 188b below the connecting portion 188a. A through hole penetrating in the width direction of the frame 82 is provided in the connecting portion 188a, and a connecting shaft 190 fixed to the fixing block 186 is inserted into the through hole. Thus, the connecting block 188 is connected to the fixing block 186 in a state where it can rotate around the connecting shaft 190.

[0235] The lid portion 182 is fixed to the storage area 104 side (front side) of the fixing portion 188b. In addition, since the connecting shaft 190 inserted into the through hole is substantially parallel to the width direction of the frame 82, the lid portion 182 rotates along a plane substantially perpendicular to the width direction of the frame 82 together with the connecting block 188.

[0236] The lid portion 182 has a plate-like member 182a that is fixed to the fixing portion 188b of the connection block 188. A soft member 182b is provided on the surface of the plate-like member 182a on the storage area 104 side (front side). The soft member 182b is formed into a shape and size capable of covering the entire opening 102b of the container 102.

[0237] In addition, a contact portion 184 is disposed on the storage area 104 side (front side) of the plate-like member 182a. The contact portion 184 includes, for example: a fixing member 184a that is fixed to the plate-like member 182a at a position above the soft member 182b; and a roller 184b that is supported by a portion of the fixing member 184a on the storage area 104 side (front side).

[0238] The roller 184b is formed of an elastic member such as rubber, and is supported by the fixing member 184a so as to be rotatable about a rotation axis substantially parallel to the width direction of the frame 82. In addition, the lower end of the roller 184b is positioned below the lower end of the fixing member 184a. Therefore, in a state where the upper surface side of the container 102 is in contact with the roller 184b, the roller 184b also rotates according to the rotation of the lid portion 182.

[0239] For example, when the container 102 rises toward the storage area 104, the upper surface side of the container 102 comes into contact with the roller 184b of the contact portion 184 and pushes the contact portion 184 upward. Then, the lower end side of the cover 120 rotates about the connection shaft 190 toward the container 102 (in the direction indicated by the arrow G in (B)), and the surface of the plate-like member 182a on the storage area 104 side (front side) is substantially parallel to the lower surface of the frame 82. And, the soft member 182b of the lid portion 182 comes into contact with one side surface (rear portion) of the container 102 to seal the opening 102b. Figure 18 For example, when the container 102 rises toward the storage area 104, the upper surface side of the container 102 comes into contact with the roller 184b of the contact portion 184 and pushes the contact portion 184 upward. Then, the lower end side of the cover 120 rotates about the connection shaft 190 toward the container 102 (in the direction indicated by the arrow G in (B)), and the surface of the plate-like member 182a on the storage area 104 side (front side) is substantially parallel to the lower surface of the frame 82. And, the soft member 182b of the lid portion 182 comes into contact with one side surface (rear portion) of the container 102 to seal the opening 102b.

[0240] In addition, when the opening 102b of the container 102 stored in the storage area 104 is exposed, there is a possibility that foreign matters such as dust may enter the storage portion 102a of the container 102. Especially during the travel of the transport vehicle 10, due to the static electricity generated by the friction between the transport path 6 and the wheels 88, for example, there is a high possibility that foreign matters rarely present in the clean room where the transport path 6 is provided are attracted by the transport vehicle 10 and enter the storage portion 102a.

[0241] Therefore, in the present embodiment, when the container 102 is stored in the storage area 104, the opening 102b of the container 102 is covered by the cover 120, so that foreign matters do not enter the storage portion 102a of the container 102 during the travel of the transport vehicle 10. In addition, even if the container 102 tilts or vibrates during the travel of the transport vehicle 10, the workpiece unit 17 does not fly out of the container 102.

[0242] On the other hand, during the lifting and lowering of the container 102 by the lifting unit 110, static electricity is not generated due to the friction between the conveying path 6 and the wheels 88, and foreign matter is not rolled up due to the movement of the transport cart 10. Therefore, even if the opening 102b of the container 102 is not covered during the lifting and lowering of the container 102, the possibility of foreign matter entering the storage portion 102a is low.

[0243] In addition, a soft member 182b is provided in a region of the cover 120 corresponding to the opening 102b. The soft member 182b deforms, for example, when it collides with the workpiece unit 17 stored in the container 102, thereby mitigating the impact acting on the workpiece unit 17. That is, the soft member 182b functions as a buffer member. Due to this soft member 182b, the workpiece 11 included in the workpiece unit 17 is not easily damaged.

[0244] There are no restrictions on the material or structure of the soft member 182b. For example, a soft member 182b that can mitigate the impact to such an extent that the workpiece 11 of the workpiece unit 17 is not damaged can be used. More specifically, as the soft member 182b, a member made of sponge, rubber, cotton, cloth, etc., expanded polystyrene, air bubble cushioning material, etc. can be used.

[0245] In particular, the sponge is soft and easily deformed. Therefore, when the sponge is used as the soft member 182b, the impact acting on the workpiece unit 17 can be effectively mitigated. In addition, when the sponge is used as the soft member 182b, the soft member 182b appropriately deforms along the shape of the side surface of the container 102 and reliably seals the opening 102b.

[0246] Adjust the weight of each part of the cover 120 so that when the container 102 is lowered from the storage area 104 as shown in (A) of Figure 18 , the cover 120 rotates by its own weight so that the lower end portion moves away from the storage area 104 (in a direction opposite to the direction indicated by the arrow G in (B) of Figure 18 . As a result, in a state where the container 102 is not stored in the storage area 104, the surface of the storage area 104 side (front side) of the plate-like member 182a is inclined with respect to the lower surface of the frame 82.

[0247] In addition, there are no restrictions on the number and configuration of the covers 120. For example, in addition to the rear end portion of the frame 82, covers 120 that contact the sides of the container 102 may also be provided at the front end portion of the frame 82. In this case, when the container 102 is stored in the storage area 104, two sides (front and rear) of the container 102 are clamped by a pair of covers 120. Thereby, the shaking (vibration) of the container 102 is suppressed. In addition, in this case, it is particularly easy to suppress the shaking (vibration) of the container 102 in the longitudinal direction (front-rear direction) of the frame 82.

[0248] Alternatively, covers 120 may be provided at the front end portion, rear end portion, and both side end portions of the frame 82, respectively. In this case, the four sides (front, rear, both sides) of the container 102 stored in the storage area 104 contact the covers 120, respectively. Thereby, the shaking (vibration) of the container 102 is suppressed. In addition, in this case, it is particularly easy to suppress the shaking (vibration) of the container 102 in the longitudinal direction (front-rear direction) and the width direction of the frame 82.

[0249] When the container 102 is lifted or lowered, the rotation of the motor 142 of the lifting unit 110 and the like is controlled by the control unit 130. Figure 19 Figure (A) shows a side view of the transport vehicle 10 when the container 102 stored in the storage area 104 is placed on the placement area A. When the container 102 is placed on the placement area A, the rotation direction and rotation speed of the motor 142 are controlled so that the suspension member 112 is sent out from the drive mechanism 114 at an arbitrary speed. For example, the control unit 130 controls the current value of the motor 142 so as to maintain the rotation speed of the motor 142.

[0250] Figure 19 Figure (B) shows a graph of the current value of the motor 142 when the container 102 is lowered. When the container 102 is lowered and reaches the placement area A, the container 102 is supported from below in the placement area A. As a result, the load acting on the rotation shaft 142a of the motor 142 is reduced, and the current value of the motor 142 decreases.

[0251] The control unit 130 stops the rotation of the motor 142 according to the change in the current value of the motor 142 when the container 102 is placed on the placement area A. For example, a predetermined threshold value is stored in advance in the control unit 130, and the control unit 130 compares this threshold value with the current value of the motor 142. And, when the current value of the motor 142 is below the threshold value (or less than the threshold value), the control unit 130 stops the rotation of the motor 142. Thereby, the placement of the container 102 on the placement area A is completed.

[0252] Figure 20FIG. (A) is a side view of the carrier 10 when storing the container 102 placed on the placement area A in the storage area 104. When storing the container 102 in the storage area 104, the rotation direction and speed of the motor 142 are controlled so that the suspension member 112 is wound at an arbitrary speed by the drive mechanism 114. For example, the control unit 130 controls the current value of the motor 142 so as to maintain the speed of the motor 142.

[0253] Figure 20 FIG. (B) is a graph showing the current value of the motor 142 when the container 102 is rising. When the container 102 rises and reaches the storage area 104, the container 102 is pushed against a plurality of contact members 116 provided on the lower surface side of the frame 82. As a result, the load acting on the rotary shaft 142a of the motor 142 increases, and the current value of the motor 142 increases.

[0254] The control unit 130 stops the rotation of the motor 142 according to the change in the current value of the motor 142 when the container 102 contacts the contact member 116. For example, a predetermined threshold value is stored in advance in the control unit 130, and the control unit 130 compares the threshold value with the current value of the motor 142. And when the current value of the motor 142 is equal to or higher than the threshold value (or exceeds the threshold value), the control unit 130 stops the rotation of the motor 142. Thus, the storage of the container 102 in the storage area 104 is completed.

[0255] As described above, when controlling the operation of the motor 142 when lifting and lowering the container 102 according to the current value of the motor 142, there is no need to provide a sensor for detecting the container 102 in the storage area 104 or the placement area A. Thus, the structure of the carrier 10 or the placement area A, etc. is simplified. In addition, the weight of the carrier 10 is also reduced.

[0256] However, there is no limitation on the control method of the motor 142. For example, a sensor (such as a push-button switch) for detecting the presence of the container 102 may be provided on the lower surface side of the frame 82 or the upper surface side of the placement area A. In this case, when the container 102 is detected by the sensor, the control unit 130 stops the rotation of the motor 142. In addition, the detection based on the sensor and the detection based on the current value of the motor 142 may be used in combination.

[0257] In addition, when it is detected only on the placement area A side (for example, on the side of the loader / unloader 8) that the container 102 is placed on the placement area A, the control unit 12 of the transfer system 2 (refer to Figure 2)After being notified from the placement area A side that the container 102 is placed on the placement area A, an instruction is issued to the carrier vehicle 10 to stop the rotation of the motor 142. Then, the control unit 130 of the carrier vehicle 10 stops the rotation of the motor 142.

[0258] In contrast, when it is detected on the carrier vehicle 10 side that the container 102 is placed on the placement area A as described above, the control unit 130 of the carrier vehicle 10 stops the rotation of the motor 142 based on its own judgment without waiting for an instruction from the control unit 12 of the conveying system 2. Thereby, the time interval from when the container 102 is placed on the placement area A until the rotation of the motor 142 is stopped can be reduced.

[0259] In addition, the lifting speed of the container 102 is not necessarily constant. For example, the rotational speed of the motor 142 can be reduced before the container 102 is about to be placed on the placement area A or stored in the storage area 104 to decelerate the container 102. Thereby, the impact when the container 102 contacts the placement area A or the contact member 116 can be alleviated. In addition, in this case, the control unit 130 can monitor the height of the container 102 based on, for example, the rotation amount of the motor 142.

[0260] When the container 102 is placed on the placement area A, the control unit 130 generates a signal for notifying the meaning that the placement of the container 102 has been completed, and transmits it from the transmitter 134 to the control unit 12 of the conveying system 2. In addition, when the container 102 is stored in the storage area 104, the control unit 130 generates a signal for notifying the meaning that the storage of the container 102 has been completed, and transmits it from the transmitter 134 to the control unit 12 of the conveying system 2 (refer to Figure 2 ). In addition, these signals can also be transmitted to the processing device 4.

[0261] Figure 21 is a perspective view showing the appearance of the processing device 4 and the conveying path 6, Figure 22 is a perspective view showing the internal structure of the processing device 4. In addition, in Figure 21 , some components are shown as functional blocks. As Figure 21 and Figure 22 show, the processing device 4 has a base 202 for supporting each component.

[0262] A recess 202a is formed at a corner of the abutment 202, and a lift table 204 that is lifted and lowered by a lifting mechanism (not shown) is disposed in the recess 202a. A container 102 of the transfer cart 10 is placed on a placement area A on the upper surface of the lift table 204. In addition, a plurality of position-limiting members (not shown) for limiting the horizontal position of the container 102 are provided on the upper surface of the lift table 204, and the container 102 lowered from the transfer cart 10 is placed on the placement area A determined by the plurality of position-limiting members.

[0263] Each position-limiting member has, for example, a curved guiding surface that guides the descending container 102 toward the placement area A, and is fixed to a position on the lift table 204 corresponding to the side surface of the container 102. When the container 102 is lowered toward the lift table 204, the container 102 is guided by the guiding surfaces of the respective position-limiting members. Therefore, even if the container 102 sways in the horizontal direction, the container 102 can be placed on the placement area A.

[0264] For example, a storage area capable of temporarily storing the processed workpiece unit 17 is formed in a region below the placement area A of the lift table 204. The processed workpiece unit 17 processed by the processing device 4 is stored in this storage area until the preparation for transferring it to the container 102 of the transfer cart 10 is completed. In addition, in a region below the placement area A of the lift table 204, in addition to the storage area, an irradiation unit that irradiates ultraviolet rays, a detection unit that detects the position of a notch, a reading unit that reads a barcode, etc. may be arranged.

[0265] A recess 202b that is long in the X2-axis direction (front-rear direction, machining feed direction) is formed on the side of the recess 202a. A ball screw type X-axis moving mechanism (machining feed unit) 206 that moves an X-axis moving table (not shown) in the X2-axis direction is disposed in the recess 202b. A table cover 206a is disposed above the X-axis moving table. In addition, corrugated dust and drip-proof covers 206b are attached to the front and rear of the table cover 206a.

[0266] A chuck table 208 for holding the workpiece 11 is disposed on the upper part of the X-axis moving table so as to be exposed from the table cover 206a. The chuck table 208 is connected to a rotational drive source such as an electric motor (not shown) and rotates about a rotation axis substantially parallel to the Z2-axis direction (vertical direction, plunge feed direction). In addition, the chuck table 208 is moved (machining fed) in the X2-axis direction by the above-described X-axis moving mechanism 206.

[0267] The upper surface of the chuck table 208 serves as a holding surface 208a for holding the workpiece 11 with the belt 13 interposed therebetween. The holding surface 208a is connected to a suction source (not shown) via a suction path (not shown) formed inside the chuck table 208. In addition, four jigs 210 are provided around the chuck table 208 for fixing the frame 15 that supports the workpiece 11 from the four sides.

[0268] Above the recess 202b, a pair of guide rails 212 are provided which approach and separate while maintaining a state parallel to the Y2-axis direction (left-right direction, indexing feed direction). The pair of guide rails 212 each have a support surface for supporting the frame 15 from below and a side surface substantially perpendicular to the support surface, and clamp the workpiece unit 17 (frame 15) pulled out from the container 102 in the placement area A in the X2-axis direction and align it at a specified position.

[0269] Above the base 202, a gantry-type first support structure 214 is arranged so as to straddle the recess 202b. A first rail 216 along the Y2-axis direction is fixed on the front surface (the surface on the side of the guide rail 212) of the first support structure 214, and a first holding unit 220 is connected to the first rail 216 by means of a first moving mechanism 218 or the like.

[0270] The first holding unit 220, for example, contacts the upper surface of the frame 15 and adsorbs the frame 15, is lifted and lowered by the first moving mechanism 218, and moves in the Y2-axis direction along the first rail 216. A holding mechanism 220a for gripping the frame 15 is provided on the lifting table 204 side of the first holding unit 220.

[0271] For example, if the frame 15 is gripped by the holding mechanism 220a and the first holding unit 220 is moved in the Y2-axis direction, the workpiece unit 17 can be pulled out from the container 102 in the placement area A to the pair of guide rails 212, or the workpiece unit 17 on the pair of guide rails 212 can be inserted into the container 102 in the placement area A. In addition, after the frame 15 is aligned by the pair of guide rails 212, the frame 15 is adsorbed by the first holding unit 220 and the workpiece unit 17 is carried into the chuck table 208.

[0272] In addition, on the front surface of the first support structure 214, a second rail 222 along the Y2-axis direction is fixed above the first rail 216. A second holding unit 226 is connected to the second rail 222 by means of a second moving mechanism 224 or the like. The second holding unit 226, for example, contacts the upper surface of the frame 15 and adsorbs the frame 15, is lifted and lowered by the second moving mechanism 224, and moves in the Y2-axis direction along the second rail 222.

[0273] A gantry-shaped second support structure 228 is disposed behind the first support structure 214. On the front surface (the surface on the side of the first support structure 214) of the second support structure 228, two sets of machining units (cutting units) 232 are provided by means of a Y-axis Z-axis moving mechanism (indexing feed unit, plunge feed unit) 230 respectively. Each machining unit 232 moves (indexing feed) in the Y2-axis direction and moves (plunge feed) in the Z2-axis direction through the corresponding Y-axis Z-axis moving mechanism 230.

[0274] Each machining unit 232 has a main shaft (not shown) that is a rotation axis substantially parallel to the Y2-axis direction. A ring-shaped cutting tool 234 is mounted on one end side of each main shaft. A rotation drive source such as an electric motor (not shown) is connected to the other end side of each main shaft. In addition, a nozzle for supplying a cutting fluid such as pure water to the workpiece 11 or the cutting tool 234 is disposed beside the cutting tool 234.

[0275] While supplying the cutting fluid from this nozzle, the rotating cutting tool 234 is plunged into the workpiece 11 held by the chuck table 208, so that the workpiece 11 can be machined (cut). A photographing unit (camera) 236 for photographing the workpiece 11 and the like held by the chuck table 208 is disposed at a position adjacent to the machining unit 232. This photographing unit 236 also moves in the Y2-axis direction and moves in the Z2-axis direction through the Y-axis Z-axis moving mechanism 230.

[0276] A cleaning unit 238 is disposed at a position opposite to the lift table 204 with respect to the concave portion 202b. The cleaning unit 238 has a rotary table 240 that holds the workpiece 11 in a cylindrical cleaning space. A rotation drive source (not shown) that rotates the rotary table 240 at a predetermined speed is connected to the lower part of the rotary table 240.

[0277] Above the rotary table 240, a spray nozzle 242 for spraying a cleaning fluid (representatively, a mixed fluid formed by mixing water and air) toward the workpiece 11 held by the rotary table 240 is disposed. By rotating the rotary table 240 holding the workpiece 11 and spraying the cleaning fluid from the spray nozzle 242, the workpiece 11 can be cleaned.

[0278] After the workpiece 11 is cut using the processing unit 232, the workpiece unit 17 is carried into the cleaning unit 238 by adsorbing the frame 15 using, for example, the second holding unit 226. After the workpiece 11 is cleaned using the cleaning unit 238, the workpiece unit 17 is placed on a pair of guide rails 212 by adsorbing the frame 15 using, for example, the first holding unit 220, and then the workpiece unit 17 is stored in the container 102 in the placement area A by gripping the frame 15 using the gripping mechanism 220a.

[0279] As Figure 21 shown, the upper surface side of the base 202 is covered by a cover 244, and the above-described respective components are housed inside the cover 244. An opening (not shown) of a ceiling 244a that penetrates the cover 244 vertically is provided in a region directly above the recess 202a. The container 102 of the transport cart 10 moves from the outside to the inside of the cover 244 through this opening, and moves from the inside to the outside of the cover 244 through this opening. There is no limitation on the shape or size of the opening, but the opening needs to be configured to enable at least the container 102 to pass through.

[0280] The respective components of the above-described processing apparatus 4 are connected to a control device 246. The control device 246 is constituted by, for example, a computer, and includes processing devices such as a CPU (Central Processing Unit), a main storage device such as a DRAM (Dynamic Random Access Memory), and an auxiliary storage device such as a flash memory. The functions of the control device 246 are realized by causing the processing device and the like to operate according to software stored in the auxiliary storage device.

[0281] A receiver 248 and a transmitter 250 are also connected to the control device 246. The receiver 248 receives a signal (information) from the outside and sends it to the control device 246, and the transmitter 250 sends the signal (information) received from the control device 246 to the outside. The receiver 248 receives, for example, a signal (control signal) sent from the control unit 12 of the transport system 2 and sends it to the control device 246.

[0282] The control device 246 controls the operation of the respective components of the processing apparatus 4, for example, according to the signal received from the receiver 248. In addition, the control device 246 generates, for example, a signal for notification and sends it to the transmitter 250. The transmitter 250 sends the signal received from the control device 246 to the control unit 12 of the transport system 2, for example.

[0283] A pipe connection portion 202c for connecting various pipes 21 is provided on the side wall of the base 202. In addition, a door 244b is provided on the side wall of the cover 244 to be opened and closed during maintenance, etc. In addition, an operation panel (not shown) for inputting instructions to the control device 246, a display (not shown) for displaying various information related to the processing device 4, etc. may be provided on the side wall of the cover 244.

[0284] The processing device 4 operates in conjunction with the conveying system 2 of the present embodiment. For example, the conveying vehicle 10 stops at the parking area on the conveying path 6, and places the container 102 containing the workpiece unit 17 on the upper surface (placement area A) of the lifting platform 204 of the processing device 4. When the container 102 is placed on the lifting platform 204, the control unit 130 of the conveying vehicle 10 generates a signal for notifying the same and sends it to the transmitter 134. The signal is sent from the transmitter 134 to the control unit 12 of the conveying system 2.

[0285] The control unit 12 generates a signal for instructing the processing device 4 to unload the pre-processed workpiece unit 17 from the container 102 and to load the processed workpiece unit 17 into the container 102 based on the signal transmitted from the transmitter 134 of the transport vehicle 10. When the receiver 248 of the processing device 4 receives the signal from the control unit 12 and the control device 246 receives the instruction based on the signal, the control device 246 carries the pre-processed workpiece unit 17 out of the container 102 placed on the upper surface (placement area A) of the lifting table 204 to the first holding unit 220. As a result, the workpiece unit 17 is pulled out onto the pair of guide rails 212, and processing of the workpiece 11 is started.

[0286] For example, when the processing of the workpiece 11 is started, the control device 246 adjusts the height of the lifting platform 204, and pulls the processed workpiece unit 17 from the storage area provided below the loading area A to the pair of guide rails 212. Then, the processed workpiece unit 17 on the pair of guide rails 212 is stored in the container 102 on the lifting platform 204.

[0287] When the processed workpiece unit 17 is stored in the container 102, the control device 246 of the processing device 4 generates a signal for notifying the same and transmits it from the transmitter 250 to the control unit 12 of the transport system 2. The control unit 12 generates a signal for instructing the transport vehicle 10 to proceed to the next destination based on the signal transmitted from the transmitter 250 of the processing device 4.

[0288] When the receiver 132 of the carrier vehicle 10 receives a signal from the control unit 12 and the control unit 130 receives an instruction based on the signal, the control unit 130 causes the carrier vehicle 10 to travel toward the next destination. In this way, by using the conveying system 2, the processing device 4 can timely receive the workpiece unit 17 before processing and can timely recover the workpiece unit 17 after processing.

[0289] As Figure 1 and Figure 21 shown, etc., the conveying path 6 constituting the conveying system 2 is provided on the upper surface side of the ceiling 244a of the hood 244 respectively possessed by each processing device 4, the upper surface side of the ceiling 22a of the housing 22 possessed by the loader / unloader 8, etc. That is, the conveying path 6 is arranged directly above the processing device 4, the loader / unloader 8, etc. in a manner that connects between the plurality of processing devices 4, the loader / unloader 8, etc.

[0290] Therefore, the conveying path 6 will not interfere with structures such as the pipe connection part 202c and the door 244b provided on the side of the processing device 4. That is, when designing the conveying path 6, it is not necessary to consider the structure on the side of the processing device 4. Thus, the conveying system 2 can be easily constructed. In addition, since the conveying path 6 is arranged at a position lower than the ceiling of the factory, etc., the work related to the setting of the conveying path 6 also becomes easy.

[0291] And, for example, when constructing the conveying path 6 in an environment where a plurality of processing devices 4, etc. are already installed, it is not necessary to move the processing devices 4, etc. to ensure a working space as in the case of setting the conveying path on the ceiling of the factory, etc. In addition, the already installed processing devices 4, etc. become the base of the conveying path 6, so the working hours are also less compared to the case of newly setting a base, etc.

[0292] Figure 23 is a perspective view showing a part of the conveying path 6 provided on the processing device 4. In addition, the structure of the conveying path 6 provided above the loader / unloader 8 is substantially the same as the structure of the conveying path 6 provided above the processing device 4. On the ceilings 244a of the plurality of processing devices 4, the ceilings 22a of the loader / unloader 8, etc., a lower layer frame 262 is fixed by screws, bolts, etc.

[0293] The lower layer frame 262 is, for example, a complex of rod-shaped frame members formed of a material containing a metal such as aluminum, and is assembled into a shape that connects between adjacent processing devices 4 and loader / unloaders 8. By fixing the lower layer frame 262 to the ceilings 244a of the respective processing devices 4, the ceilings 22a of the loader / unloader 8, etc., a base of the conveying path 6 is formed.

[0294] In addition, when fixing the lower frame 262 to each processing device 4, the loader / unloader 8, etc., the height of the lower frame 262 relative to each processing device 4, the loader / unloader 8, etc. is adjusted such that the upper surface of the lower frame 262 is substantially horizontal and the heights of the upper surfaces of the lower frame 262 are substantially equal.

[0295] Thus, even when the heights of the ceilings 244a of the respective processing devices 4, the ceilings 22a of the loader / unloader 8, etc. are not exactly equal, the conveyance path 6 can be formed horizontally and at the same height. There is no limitation on the method for adjusting the height of the lower frame 262 relative to the processing device 4, the loader / unloader 8, etc. For example, a method of disposing height-adjusting members between the ceilings 244a of the respective processing devices 4, the ceilings 22a of the loader / unloader 8, etc. and the lower surface of the lower frame 262 can be used.

[0296] Of course, the heights of the processing device 4 and the loader / unloader 8 can also be adjusted. For example, an adjustment mechanism for height adjustment is provided at the lower end portions (legs) of the processing device 4 and the loader / unloader 8. Thus, if the heights of the processing device 4 and the loader / unloader 8 are adjusted using this adjustment mechanism and the heights of the ceilings 244a of the respective processing devices 4, the ceilings 22a of the loader / unloader 8, etc. are made equal, a lower frame 262 suitable as a base for the conveyance path 6 can be achieved.

[0297] An upper frame 264 is fixed to the upper surface side of the lower frame 262 by screws, bolts, etc. The upper frame 264 is, for example, a composite body of rod-shaped frame members made of a material containing a metal such as aluminum, and is assembled into a shape conforming to the configuration of the conveyance path 6, etc. in such a manner that the conveyance path 6 can be appropriately fixed.

[0298] A conveyance path 6 is provided above the upper frame 264. The conveyance path 6 is formed, for example, by arranging a plurality of flat road surface panels 266 in the horizontal direction. In this way, by combining a plurality of road surface panels 266 to form the conveyance path 6, it is easy to implement various conveyance paths 6 corresponding to the configurations of the plurality of processing devices 4, the loader / unloader 8, etc.

[0299] The road surface panel 266 is formed, for example, in a rectangular shape in plan view using a lightweight and high-strength material such as polyamide, polycarbonate, CFRP (Carbon Fiber Reinforced Plastic), etc., and the road surface panel 266 has a flat upper surface suitable for the travel of the transport vehicle 10. In addition, through holes penetrating the road surface panel 266 vertically are formed at the ends of the road surface panel 266.

[0300] On the other hand, on the upper surface side of the upper frame 264, a threaded hole (not shown) having a diameter corresponding to the diameter of the screw 268 is opened at a position corresponding to the through-hole of the road surface panel 266. Thus, after the road surface panel 266 is disposed on the upper surface side of the upper frame 264, if the screw 268 is screwed into the threaded hole of the upper frame 264 through the through-hole (not shown), the road surface panel 266 can be fixed to the upper frame 264.

[0301] The lower frame 262 is formed, for example, by combining a plurality of lower frame units 270 each including a plurality of rod-shaped frame members. Similarly, the upper frame 264 is formed, for example, by combining a plurality of upper frame units 272 each including a plurality of rod-shaped frame members.

[0302] In the case where the lower frame 262 is formed using a plurality of lower frame units 270 and the upper frame 264 is formed using a plurality of upper frame units 272 in this way, the frame members are transported into a factory or the like provided with the processing device 4 in the form of the lower frame units 270 and the upper frame units 272.

[0303] That is, high-quality lower frame units 270 and upper frame units 272 produced in a stable environment are used to form high-quality lower frame 262 and upper frame 264. In addition, there is no complicated operation as in the case of connecting the rod-shaped frame members above the processing device 4. Thus, the high-quality conveyance path 6 can be formed in a short period of time.

[0304] Figure 24 (A) of is a perspective view showing the lower frame unit 270a constituting the lower frame 262, Figure 24 (B) of is a perspective view showing the lower frame unit 270b constituting the lower frame 262. The lower frame unit 270a and the lower frame unit 270b are selectively used, for example, according to the style of the conveyance path 6.

[0305] Figure 25 is a plan view showing the arrangement of the lower frame units 270 constituting the lower frame 262. In Figure 25 it shows a case where the conveyance path 6 for transporting the work unit 17 between a total of 8 devices (processing device 4, loader / unloader 8, etc.) is formed. For example, the lower frame unit 270a is used in a region corresponding to a portion other than the corners of the conveyance path 6 (a linear region of the conveyance path 6), and the lower frame unit 270b is used in a region corresponding to the corners of the conveyance path 6.

[0306] In addition, in Figure 25In the lower layer frame 262, a lower layer frame unit 270c having a structure for flipping the lower layer frame unit 270a and a lower layer frame unit 270d having a structure for flipping the lower layer frame unit 270b are used together. That is, in Figure 25 's lower layer frame 262, two of each of the four lower layer frame units 270 are used. Each lower layer frame unit 270 is configured such that the rod-shaped frame member does not overlap with the opening 282 formed in the conveyance path 6 (refer to Figure 28 , corresponding to Figure 3 's opening 6a).

[0307] When forming the lower layer frame 262, for example, after fixing the lower layer frame units 270 to the processing device 4, the loader / unloader 8, etc., the adjacent lower layer frame units 270 can be connected to each other. The connection of adjacent lower layer frame units 270 uses a joint, for example. However, it is also possible to fix the lower layer frame units 270 to the processing device 4, the loader / unloader 8, etc. after connecting the lower layer frame units 270.

[0308] Figure 26 's (A) is a perspective view showing the upper layer frame unit 272a that constitutes the upper layer frame 264, Figure 26 's (B) is a perspective view showing the upper layer frame unit 272b that constitutes the upper layer frame 264. The upper layer frame unit 272a and the upper layer frame unit 272b are selectively used according to the style of the conveyance path 6, for example.

[0309] Figure 27 is a top view showing the arrangement of the upper layer frame units 272 that constitute the upper layer frame 264. In Figure 27 , the case of using Figure 25 's lower layer frame 262 to form the conveyance path 6 is shown. For example, the upper layer frame unit 272a is used in a part of the area where adjacent processing devices 4, loader / unloaders 8, etc. are connected, and the upper layer frame unit 272b is used in the area directly above the processing device 4, loader / unloader 8.

[0310] That is, in Figure 27 's upper layer frame 264, two upper layer frame units 272a and eight upper layer frame units 272b are used. Each upper layer frame unit 272 is configured such that the rod-shaped frame member does not overlap with the opening 282 formed in the conveyance path 6 (refer to Figure 28 ).

[0311] When forming the upper layer frame 264, for example, the upper layer frame units 272 are fixed to the lower layer frame 262. In addition, two adjacent upper layer frame units 272 may not be connected to each other but separated. In addition, upper layer frame units 272 having a structure for flipping the upper layer frame unit 272a and upper layer frame units 272 having a structure for flipping the upper layer frame unit 272b can also be used as needed.

[0312] Figure 28 is a top view schematically showing a conveyance path 6 formed by arranging a plurality of road surface panels 266 side by side. In Figure 28 , it shows the use of Figure 25 lower frame 262 and Figure 27 upper frame 264 to form the conveyance path 6. In addition, in Figure 28 , the boundaries of adjacent road surface panels 266 are shown by dashed lines.

[0313] When forming the conveyance path 6, for example, the road surface panel 266 is fixed to the upper frame 264. In addition, in Figure 27 upper frame 264, for example, a smaller gap is formed between adjacent upper frame units 272a and upper frame unit 272b, and a larger gap is formed between two adjacent upper frame units 272b. Thus, the conveyance path 6 cannot be formed in the portion corresponding to the gap only by the road surface panel 266 having a rectangular shape in plan view. That is, gaps are also formed in the conveyance path 6.

[0314] Therefore, in order to fill these gaps, flat bridging panels 274a and flat bridging panels 274b are used. The smaller bridging panel 274a is disposed in the smaller gap between adjacent upper frame units 272a and upper frame unit 272b. The larger bridging panel 274b is disposed in the larger gap between two adjacent upper frame units 272b.

[0315] The bridging panel 274a or the bridging panel 274b is fixed to the upper frame 264, for example, so that the gap or step difference formed in the conveyance path 6 is sufficiently small. Thus, the impact on the traveling conveyance vehicle 10 can be suppressed to be small, and breakage of the workpiece 11 or the like can be prevented. In addition, when a small gap remains in the conveyance path 6, for example, a tape having a core material along the traveling direction of the conveyance vehicle 10 can be used to seal the gap.

[0316] In addition, instead of the bridging panel 274a or the bridging panel 274b, a bridging panel having inclined surfaces formed at both end portions in the traveling direction of the conveyance vehicle 10 can be used. In this case, for example, the bridging panel can be used overlapping above the road surface panel 266, so that the requirement for the size of the bridging panel is alleviated. Thus, the bridging panel has high versatility. In addition, a thin plate-like bridging panel having flexibility can be used to connect adjacent road surface panels 266.

[0317] When the transport vehicle 10 travels on the transport path 6 configured in this way, for example, static electricity may be generated due to the friction between the wheels 86 of the transport vehicle 10 and the like and the transport path 6, which may have an adverse effect on the workpiece 11 stored in the container 102 of the transport vehicle 10. For example, when a semiconductor device is formed on the workpiece 11, the semiconductor device may be damaged by static electricity.

[0318] Therefore, it is preferable that the conductive member is exposed at the portion of the upper surface of the road surface panel 266 that serves as the transport path 6 and is contacted by the wheels 86 and the like. As the conductive member, for example, in addition to metals such as aluminum or copper, CFRP (carbon fiber reinforced plastic) or the like is used. In addition, when the road surface panel 266 is made of CFRP, the CFRP is also exposed on the upper surface of the road surface panel 266. That is, a state in which the conductive member is exposed on the upper surface of the road surface panel 266 is achieved.

[0319] By previously exposing the conductive member on the upper surface of the road surface panel 266 in this way, it is possible to suppress the generation and accumulation of static electricity due to friction, thereby preventing adverse effects on the workpiece 11. In addition, the conductive member exposed on the upper surface of the road surface panel 266 can be grounded by means of a wire (not shown) or the like. In this case, the static electricity generated by the contact between the wheels 86 and the like and the road surface panel 266 is discharged through the wire, so it will not accumulate on the road surface panel 266. Thus, the workpiece 11 is transported more safely by the transport vehicle 10.

[0320] In the transport system 2 of the present embodiment, as a principle, the operation of the transport vehicle 10 is controlled so that the transport vehicle 10 does not reach the end of the transport path 6. However, in the case where any failure occurs in the transport vehicle 10 or the control unit 12 or the like, there is also a possibility that the transport vehicle 10 reaches the end of the transport path 6 and the transport vehicle 10 falls from the end of the transport path 6.

[0321] Therefore, it is preferable that, as Figure 23 shown, a protection portion 276 serving as a barrier for preventing the transport vehicle 10 from falling from the transport path 6 is provided at the end of the transport path 6. The protection portion 276 is formed of a material containing a metal such as aluminum, for example, and is fixed to the upper layer frame 264 or the road surface panel 266. The height from the upper surface of the road surface panel 266 to the upper end of the protection portion 276 is, for example, greater than the radius of the wheel 86 of the transport vehicle 10. It is preferably greater than the diameter of the wheel 86.

[0322] In addition, the protection portion 276 can be formed to a height that contacts the third sensor 126 or the outer cover of the transport vehicle 10. In this case, when the protection portion 276 contacts the third sensor 126 or the outer cover of the transport vehicle 10, the transport vehicle 10 detects a collision with an obstacle and stops. Therefore, the transport vehicle 10 can travel more safely.

[0323] As shown Figure 28 in FIG. 2, the conveyance path 6 includes: a traveling area 278 mainly for the travel of the carrier vehicle 10; a parking area 280 mainly for the parking of the carrier vehicle 10; and a standby area 284 mainly for the standby of the carrier vehicle 10. The workpiece unit 17 is conveyed between the carrier vehicle 10 parked in the parking area 280 and the processing device 4, the loader / unloader 8, etc. located below the parking area 280.

[0324] The traveling area 278 is formed in a ring shape, for example, along the arrangement of the processing device 4, the loader / unloader 8, etc. The carrier vehicle 10 travels in one direction along the ring-shaped traveling area 278, for example, and does not travel in the other direction (i.e., one-way traffic). Thus, the carrier vehicle 10 can travel safely with simple control.

[0325] However, there is no limitation on the shape of the traveling area 278, the traveling mode of the carrier vehicle 10, etc. For example, the traveling area 278 may be configured to allow the carrier vehicle 10 to travel in both directions. In addition, the traveling area 278 does not need to be formed in a ring shape without a terminal, and may be formed in a linear shape with a terminal, for example.

[0326] On the other hand, an opening 282 penetrating the road surface panel 266 vertically is provided in the parking area 280. The opening 282 is formed slightly larger than the upper and lower surfaces of the container 102, for example, and allows the container 102 to pass through vertically. On the other hand, the width of the opening 282 in the direction perpendicular to the entry direction when the carrier vehicle 10 enters the parking area 280 is narrower than the interval between a pair of wheels 86 of the carrier vehicle 10. Thus, when the entry direction when the carrier vehicle 10 enters the parking area 280 is appropriate, the wheels 86 will not fall into the opening 282.

[0327] The standby area 284 is arranged in an area where the carrier vehicle 10 is likely to standby, for example. By having the carrier vehicle 10 standby in the standby area 284, other carrier vehicles 10 can overtake the standby carrier vehicle 10. In addition, when the carrier vehicle 10 is allowed to travel in both directions, by having the carrier vehicle 10 temporarily standby in the standby area 284, two carrier vehicles 10 can be staggered. In addition, the conveyance path 6 does not necessarily include the standby area 284.

[0328] On the upper surfaces of the road surface panel 266, the bridging panel 274a, the bridging panel 274b, etc. constituting the conveyance path 6, a variety of guiding marks 286 detected by sensors provided on the carrier vehicle 10 are provided (refer to Figure 23 ). The carrier vehicle 10 controls travel, steering, parking, etc. based on the various marks 286 detected by the sensors.

[0329] As shown Figure 23As shown, the marker 286 is configured, for example, as a straight line having a color different from other areas of the upper surface of the road surface panel 266 or the like. In the present embodiment, as Figure 28 shown, as the marker 286, the first marker 286a, the second marker 286b, the third marker 286c, and the fourth marker 286d are used.

[0330] However, there is no limitation on the form of the marker 286. The marker 286 may include curves, for example, or may be composed of dotted lines. In addition, as the marker 286, characters, numbers, patterns, etc. may also be used. In addition, there is no limitation on the color or the like of the marker 286. For example, a plurality of markers 286 having different colors may be used, and the transport vehicle 10 may be configured in such a manner that various controls are performed according to the color of the marker 286.

[0331] A first marker 286a is provided in the travel area 278 along the traveling direction of the transport vehicle 10. The first marker 286a is formed, for example, in an area through which the transport vehicle 10 traveling in the travel area 278 passes. More specifically, the first marker 286a is provided directly below a pair of first sensors 122 of the transport vehicle 10 traveling in the travel area 278.

[0332] Figure 29 is a functional block diagram showing the control unit 130 of the transport vehicle 10. As Figure 29 shown, the control unit 130 of the transport vehicle 10 includes: a first sensor control unit 130a that monitors the upper surface of the travel area 278 etc. (transport path 6) using a pair of first sensors 122 and detects the first marker 286a; and a travel instruction unit 130b that determines the orientation indicated by the first marker 286a detected by the first sensors 122 and causes the transport vehicle 10 to travel along the orientation.

[0333] The pair of first sensors 122 respectively detect the first marker 286a according to a control signal input from the first sensor control unit 130a. Information related to the first marker 286a detected by the first sensors 122 is transmitted to the travel instruction unit 130b via the first sensor control unit 130a.

[0334] The travel instruction unit 130b determines the orientation indicated by the first marker 286a based on the information of the first marker 286a transmitted from the first sensor control unit 130a. And the travel instruction unit 130b controls the drive unit 90 to cause the transport vehicle 10 to travel along the determined orientation. That is, the transport vehicle 10 can detect the first marker 286a using the pair of first sensors 122 and travel on the transport path 6 along the first marker 286a.

[0335] As Figure 28As shown, at a prescribed part of the travel area 278, two linear first markers 286a intersect. While the carrier 10 travels along one of the first markers 286a, the second sensor 124 detects the other first marker 286a that intersects with this one first marker 286a. When the other first marker 286a is detected by the second sensor 124, the carrier 10 steers as needed.

[0336] That is, the direction in which the carrier 10 travels is changed at any intersection where the two linear first markers 286a intersect. In this way, a part of the above-mentioned other first marker 286a detected by the second sensor 124 functions as a second marker 286b indicating the position where the carrier 10 steers. In addition, on the conveyance path 6, there are a number of second markers 286b corresponding to the number of intersections where the two first markers 286a intersect. That is, on Figure 28 the conveyance path 6, there are multiple second markers 286b.

[0337] As Figure 29 shown, the control unit 130 of the carrier 10 includes: a second sensor control unit 130c that monitors the upper surface of the travel area 278 etc. (conveyance path 6) using the second sensor 124 and detects the second marker 286b; and a steering instruction unit 130d that counts the number of second markers 286b detected by the second sensor 124 and steers the carrier 10 according to the counted number of second markers 286b.

[0338] The second sensor 124 detects the second marker 286b according to a control signal input from the second sensor control unit 130c. And, for example, whenever the second sensor 124 detects the second marker 286b, the second sensor control unit 130c notifies the steering instruction unit 130d of the control unit 130 of this fact.

[0339] The steering instruction unit 130d counts the number of second markers 286b detected by the second sensor 124 according to the notification from the second sensor control unit 130c, and for example, compares this number with the number of second markers 286b (prescribed number) corresponding to the instruction from the control unit 12 of the conveyance system 2. And when the number of second markers 286b detected by the second sensor 124 reaches the number of second markers 286b corresponding to the instruction from the control unit 12, the steering instruction unit 130d controls the drive unit 90 to steer the carrier 10.

[0340] That is, the turning indication unit 130d changes the orientation of the carrier vehicle 10 according to the detected number of the second markers 286b. In this way, the carrier vehicle 10 can detect the second markers 286b by the second sensors 124 and change the orientation as needed. In addition, the second markers 286b are provided, for example, at the corner portions of the traveling area 278 (the corner portions of the transfer path 6), the portions of the traveling area 278 adjacent to the parking area 280, the portions of the traveling area 278 adjacent to the standby area 284, and the like.

[0341] In addition, when a pair of second sensors 124 are arranged on the straight line passing through the pair of wheels 86, the second markers 286b can be detected by the pair of second sensors 124 while the wheels 86 pass over the second markers 286b. Therefore, when the carrier vehicle 10 is turned at the timing of detecting the second markers 286b, the pair of first sensors 122 will not deviate significantly from the first markers 286a to be detected after the turning. That is, the carrier vehicle 10 can be turned appropriately without any correction.

[0342] As Figure 28 shown, a third marker 286c is provided in the parking area 280 along the direction in which the carrier vehicle 10 enters. That is, the third marker 286c indicates the orientation of the carrier vehicle 10 entering the parking area 280. The third marker 286c is formed, for example, at two positions sandwiching the opening 282 in the direction perpendicular to the direction in which the carrier vehicle 10 enters, and is detected by the second sensors 124 of the carrier vehicle 10.

[0343] As Figure 29 shown, the control unit 130 of the carrier vehicle 10 includes an entry control unit 130e, and the entry control unit 130e causes the carrier vehicle 10 to enter the parking area 280 along the orientation indicated by the third marker 286c detected by the second sensors 124. The entry control unit 130e is connected to the second sensor control unit 130c.

[0344] The second sensor control unit 130c monitors the upper surface of the parking area 280 and the like (the transfer path 6) by the second sensors 124 to detect the third marker 286c. Information related to the third marker 286c detected by the second sensors 124 is sent to the entry control unit 130e via the second sensor control unit 130c.

[0345] The entry control unit 130e determines the orientation indicated by the third marker 286c based on the information of the third marker 286c input from the second sensor control unit 130c. Then, the entry control unit 130e controls the drive unit 90 to make the carrier vehicle 10 enter the parking area 280 along the determined orientation. The third marker 286c is typically set in the area where the wheels 86 of the carrier vehicle 10 pass. However, there is no limitation on the configuration of the third marker 286c, etc.

[0346] As Figure 28 shown, in the direction in which the carrier vehicle 10 enters the parking area 280 (or standby area 284), a fourth marker 286d that intersects the first marker 286a or the third marker 286c is provided at the rear side (near the front side) of the parking area 280 (or standby area 284). This fourth marker 286d indicates the position of the parking area 280 (or standby area 284).

[0347] As Figure 29 shown, the control unit 130 of the carrier vehicle 10 includes a parking control unit 130f. When the fourth marker 286d is detected by the first sensor 122 (one of the pair of first sensors 122) located at the rear side in the traveling direction of the carrier vehicle 10, the parking control unit 130f stops the carrier vehicle 10. The parking control unit 130f is connected to the first sensor control unit 130a.

[0348] The first sensor control unit 130a monitors the upper surface of the traveling area 278 or the parking area 280, etc. (transport path 6) using the first sensor 122 and detects the fourth marker 286d using the first sensor 122. When the fourth marker 286d is detected by the first sensor 122, this information is notified to the parking control unit 130f via the first sensor control unit 130a.

[0349] When the meaning of detecting the fourth marker 286d is notified from the first sensor control unit 130a to the parking control unit 130f, the parking control unit 130f controls the drive unit 90 to quickly stop the carrier vehicle 10. That is, when the carrier vehicle 10 detects the fourth marker 286d using the rear first sensor 122, for example, it stops immediately.

[0350] In addition, the fourth marker 286d may also be provided on the front side (inside) of the parking area 280 (or standby area 284) in the direction in which the carrier vehicle 10 enters the parking area 280 (or standby area 284). In this case, when the carrier vehicle 10 detects the fourth marker 286d using the front first sensor 122, it stops immediately.

[0351] In addition, the fourth marker 286d may be set at a position where it can be detected by the second sensor 124. In this case,Figure 29 The parking control unit 130f shown is connected to the second sensor control unit 130c. Moreover, when the second sensor 124 controlled by the second sensor control unit 130c detects the fourth marker 286d, the parking control unit 130f controls the drive unit 90 to stop the carrier 10.

[0352] In addition, the parking control unit 130f may also stop the carrier 10 after a predetermined time has elapsed since the fourth marker 286d was detected by the first sensor 122 or the second sensor 124. The time from the detection of the fourth marker 286d to the stop of the carrier 10 is adjusted, for example, according to the distance between the fourth marker 286d and the parking area 280, the traveling speed of the carrier 10, and the like.

[0353] As Figure 28 shown, in the direction in which the carrier 10 enters, a power supply terminal (power supply terminal) 288 connected to a power supply (not shown) is disposed at a position in front (inside) of the parking area 280 and the standby area 284. For example, if the carrier 10 is stopped in the parking area 280 or the standby area 284 and the terminal (power receiving terminal) 100 of the carrier 10 is brought into contact with the terminal 288, charging power is supplied to the battery (secondary battery) 96 through the terminal 100 and the charging wiring (charging wiring) 98. That is, the battery 96 can be charged.

[0354] As Figure 23 shown, the terminal 288 is supported by a terminal support portion 290 fixed to the road surface panel 266 or the upper frame 264 and is connected to the power supply wiring (power supply wiring) 292. That is, the terminal 288 is connected to the power supply through the power supply wiring 292.

[0355] The terminal support portion 290 has, for example, a biasing member (not shown) that biases the terminal 288 toward the parking area 280 or the standby area 284. By biasing the terminal 288 with the biasing member, the terminal 288 can be appropriately connected to the terminal 100. However, there are no restrictions on the structure of the terminal 288 or the terminal support portion 290.

[0356] For example, after the carrier 10 stops in the parking area 280, the container 102 is lifted and lowered by the lifting unit 110. In the present embodiment, since the power supply terminal 288 is disposed in the parking area 280, the battery 96 can also be charged when the container 102 is lifted and lowered. Thereby, a large amount of power consumed by the lifting unit 110 when the container 102 is lifted and lowered can be sufficiently supplied.

[0357] In addition, in the present embodiment, the terminal 288 is also disposed in the standby area 284. Thus, for example, when the carrier vehicle 10 is made to standby in the standby area 284, the battery 96 can also be charged. Thereby, the operation time that the carrier vehicle 10 can operate can be extended, and the conveyance efficiency of the workpiece 11 can be improved.

[0358] When moving the carrier vehicle 10 from a certain position (starting point) on the conveyance path 6 to another position (destination), the operation is as follows, for example. First, the control unit 12 of the conveyance system 2 transmits a signal corresponding to an instruction to move from the starting point to the destination to the carrier vehicle 10 that is the object of movement.

[0359] The control unit 130 of the carrier vehicle 10 that has received the instruction from the control unit 12 first determines the path to the destination with its current position as the starting point, and obtains the number of the second markers 286b existing between the positions where the carrier vehicle 10 is to turn from the starting point and the turning directions at the respective positions where the carrier vehicle 10 is to turn along this path. Then, the control unit 130 of the carrier vehicle 10 controls the drive unit 90 and the like according to the number of the second markers 286b and the turning directions obtained by itself.

[0360] For example, the control unit 130 of the carrier vehicle 10 makes the carrier vehicle 10 travel while monitoring the upper surface of the conveyance path 6 using the first sensor 122 and the second sensor 124. That is, the control unit 130 makes the carrier vehicle 10 travel along the direction indicated by the first marker 286a detected by the first sensor 122, and uses the second sensor 124 to detect the second marker 286b that the second sensor 124 has passed through.

[0361] When the number of the second markers 286b passed through by the second sensor 124 reaches the number of the second markers 286b obtained by itself, the control unit 130 makes the carrier vehicle 10 turn in the turning direction required by itself. Then, the control unit 130 makes the carrier vehicle 10 travel again along the direction indicated by the first marker 286a. When the carrier vehicle 10 reaches the destination, the control unit 130 transmits a signal for notifying this meaning to the control unit 12.

[0362] In addition, when the carrier vehicle 10 enters the parking area 280, the control unit 130 detects the third marker 286c using the second sensor 124 and finely adjusts the traveling direction of the carrier vehicle 10. Thereby, it is possible to prevent the wheels 86 of the carrier vehicle 10 from falling off into the opening 282. At this time, the traveling speed can be suppressed to be lower than when the carrier vehicle 10 travels along the direction indicated by the first marker 286a. Then, the control unit 130 detects the fourth marker 286d using the first sensor 122 and makes the carrier vehicle 10 stop in the parking area 280.

[0363] The transport vehicle 10 generally travels with the wheel 86 in front of the traveling direction and the wheel 88 behind the traveling direction. However, when moving from the parking area 280 or the standby area 284 to the traveling area 278, the transport vehicle 10 travels with the wheel 86 behind the traveling direction and the wheel 88 in front of the traveling direction.

[0364] When the transport vehicle 10 stops in the parking area 280, the container 102 is positioned directly above the opening 282. In addition, the terminal 100 on the transport vehicle 10 side contacts the terminal 288 on the transport path 6 side. Thereby, the transport vehicle 10 can lower the container 102 while charging the battery 96 and place the container 102 on the placement area A located below the opening 282.

[0365] In addition, in the above-described operation mode, the control unit 130 calculates the number of the second markers 286b and the turning direction, but the judgment of the control unit 130 can also be limited to the minimum. In this case, for example, a signal including information related to the number of the second markers 286b existing between the starting point and each position where the transport vehicle 10 is to turn and the turning direction at each position to be turned is sent from the control unit 12. In this operation, the control unit 130 does not need to calculate the number of the second markers 286b and the turning direction, so the control unit 130 can be simplified.

[0366] Next, an example of the control method of the transport system 2 of the present embodiment will be described. Figure 30 This is a diagram for explaining an example of the control method of the transport system 2. For example, when the control device 246 of the processing device 4 becomes in a state where the workpiece 11 before processing is required, a signal (workpiece request signal) for notifying this intention is generated. The signal (workpiece request signal) generated by the control device 246 is sent from the transmitter 250 to the control unit 12.

[0367] As Figure 30 shown, the control unit 12 has a control unit (signal generation unit) 302 that generates signals for performing various controls. This control unit 302 is constituted by, for example, a computer, and includes a processing device such as a CPU (Central Processing Unit), a main storage device such as a DRAM (Dynamic Random Access Memory), and an auxiliary storage device such as a flash memory. The functions of the control unit 302 are realized by causing the processing device and the like to operate according to the software stored in the auxiliary storage device.

[0368] A receiver 304 and a transmitter 306 are connected to the control unit 302. The receiver 304 receives signals sent from the processing device 4, the loader / unloader 8, the transport vehicle 10, etc., and the transmitter 306 sends signals to the processing device 4, the loader / unloader 8, the transport vehicle 10, etc.

[0369] When the receiver 304 of the control unit 12 receives the notification signal (workpiece requirement signal) sent from the transmitter 250 of the processing device 4, the signal is sent to the control unit 302. When the control unit 302 confirms the notification signal (workpiece requirement signal) from the processing device 4, an instruction is given to any transport vehicle 10 to move the transport vehicle 10 to the parking area 280 directly above the loader / unloader 8 and place the container 102 on the upper surface of the placement table 66 of the loader / unloader 8 (the second placement area A2). Specifically, the control unit 302 generates a control signal (the first placement instruction signal) corresponding to the instruction and sends it from the transmitter 306 to the transport vehicle 10.

[0370] When the receiver 132 of the transport vehicle 10 receives the signal (the first placement instruction signal) from the control unit 12, the signal is sent to the control unit 130. The control unit 130 controls the drive unit 90, etc. according to the signal (the first placement instruction signal) to make the transport vehicle 10 travel along the transport path 6. When the transport vehicle 10 stops at the parking area 280 directly above the loader / unloader 8, the container 102 is positioned directly above the opening 282.

[0371] In a state where the transport vehicle 10 is stopped at the parking area 280, the control unit 130 controls the lifting unit 110 to send out the suspension member 112. Thus, the container 102 can be lowered through the opening 282, etc. to place the container 102 on the upper surface of the placement table 66.

[0372] After the container 102 is placed on the upper surface of the placement table 66, the control unit 130 generates a notification signal (the first placement completion signal) for notifying the meaning of the completion of the placement of the container 102 on the upper surface of the placement table 66. The signal (the first placement completion signal) generated by the control unit 130 is sent from the transmitter 134 to the control unit 12.

[0373] When the receiver 304 of the control unit 12 receives the signal (the first placement completion signal) transmitted from the transmitter 134 of the transport vehicle 10, it transmits the signal to the control section 302. When the control section 302 confirms the signal (the first placement completion signal) from the transport vehicle 10, it notifies the loader / unloader 8 of the meaning that the placement of the container 102 on the upper surface of the placement table 66 has been completed. Specifically, the control section 302 generates a signal for notification (the second placement completion signal) for notifying the meaning that the placement of the container 102 on the upper surface of the placement table 66 has been completed and transmits it from the transmitter 306 to the loader / unloader 8.

[0374] When the receiver 68 of the loader / unloader 8 receives the signal (the second placement completion signal) from the control unit 12, it transmits the signal to the control device 46. When the control device 46 receives this signal (the second placement completion signal), it controls the operations of the respective components to load the workpiece 11 before processing into the container 102. In addition, in the case of storing the processed workpiece 11 in the container 102, after the processed workpiece 11 is unloaded from the container 102, the workpiece 11 before processing is loaded into the container 102.

[0375] When loading the workpiece 11 before processing into the container 102, the control device 46 generates a signal for notification (the first transfer completion signal) for notifying the meaning that the transfer of the workpiece 11 into the container 102 has been completed. The signal (the first transfer completion signal) generated by the control device 46 is transmitted from the transmitter 70 to the control unit 12.

[0376] When the receiver 304 of the control unit 12 receives the signal (the first transfer completion signal) transmitted from the transmitter 70 of the loader / unloader 8, it transmits the signal to the control section 302. When the control section 302 confirms the signal (the first transfer completion signal) from the loader / unloader 8, it gives an instruction to the transport vehicle 10 to move to the parking area 280 directly above the processing device 4 and place the container 102 on the upper surface of the lifting table 204 of the processing device 4 (placement area A). Specifically, the control section 302 generates a control signal (the second placement instruction signal) corresponding to this instruction and transmits it from the transmitter 306 to the transport vehicle 10.

[0377] When the receiver 132 of the transport vehicle 10 receives the signal (the second placement instruction signal) from the control unit 12, it transmits the signal to the control section 130. The control section 130 controls the lifting unit 110 according to this signal (the second placement instruction signal) and winds up the suspension member 112. As a result, the container 102 can be lifted and stored in the storage area 104 by passing through the opening 282 or the like. Then, the control section 130 controls the drive unit 90 and the like to make the transport vehicle 10 travel along the transport path 6.

[0378] When the carrier vehicle 10 stops at the parking area 280 directly above the processing device 4, the container 102 is positioned directly above the opening 282. In a state where the carrier vehicle 10 is stopped at the parking area 280, the control unit 130 controls the lifting unit 110 to send out the suspension member 112. Thus, the container 102 can be lowered in a manner of passing through the opening 282 or the like, and the container 102 can be placed on the upper surface of the lifting table 204 of the processing device 4.

[0379] After the container 102 is placed on the upper surface of the lifting table 204, the control unit 130 generates a signal (third placement completion signal) for notification to indicate the meaning of the completion of the placement of the container 102 on the upper surface of the lifting table 204. The signal (third placement completion signal) generated by the control unit 130 is sent from the transmitter 134 to the control unit 12.

[0380] When the receiver 304 of the control unit 12 receives the signal (third placement completion signal) sent from the transmitter 134 of the carrier vehicle 10, the signal is sent to the control unit 302. When the control unit 302 confirms the signal (third placement completion signal) from the carrier vehicle 10, it notifies the processing device 4 of the meaning of the completion of the placement of the container 102 on the upper surface of the lifting table 204. Specifically, the control unit 302 generates a signal (fourth placement completion signal) for notification to indicate the meaning of the completion of the placement of the container 102 on the upper surface of the placement table 66 and sends it from the transmitter 306 to the processing device 4.

[0381] When the receiver 248 of the processing device 4 receives the signal (fourth placement completion signal) from the control unit 12, the signal is sent to the control device 246. When the control device 246 receives this signal (fourth placement completion signal), it controls the operations of the respective components to carry out the workpiece 11 before processing from the container 102. In addition, when there is a workpiece 11 after processing in the processing device 4, after carrying out the workpiece 11 before processing from the container 102, the workpiece 11 after processing is carried into the container 102.

[0382] When carrying out the workpiece 11 before processing from the container 102, for example, the control device 246 generates a signal (second conveyance completion signal) for notification to indicate the meaning of the completion of the conveyance of the workpiece 11 from the container 102. The signal (second conveyance completion signal) generated by the control device 246 is sent from the transmitter 250 to the control unit 12.

[0383] According to such steps, the workpiece 11 before processing stored in the loader / unloader 8 can be transported to any processing device 4. Additionally, although the steps for transporting the workpiece 11 from the loader / unloader 8 to the processing device 4 are mainly described here, the steps for transporting the workpiece 11 from the processing device 4 to the loader / unloader 8 are the same.

[0384] Furthermore, the above steps can be arbitrarily changed within the range where the workpiece 11 can be appropriately transported. For example, multiple steps included in the above steps can be performed simultaneously, or the order of the steps can be switched within the range that does not hinder the transportation of the workpiece 11. Similarly, any steps can be added, changed, or omitted within the range that does not hinder the transportation of the workpiece 11.

[0385] As described above, the transport path 6, loader / unloader (transport device) 8, transport vehicle 10, cassette storage mechanism 24, and lifting unit (lifting mechanism) 110 of the present embodiment are all configured to be able to transport the workpiece 11 efficiently and safely. Therefore, by using the transport system 2 assembled with them, the workpiece 11 can be transported efficiently and safely.

[0386] (Embodiment 2)

[0387] In the present embodiment, a processing device of a different method from the above embodiment will be described. Figure 31 It is a perspective view showing the internal structure of the processing device (cutting device) 402 of the present embodiment. Additionally, in the following description, the same reference numerals are given to the constituent elements common to the above embodiment, and the detailed description is omitted.

[0388] On the lifting table 404 of the processing device 402, the container 102 of the transport vehicle 10 is not placed. Instead, a two-layer cassette storage mechanism 406 (the first cassette storage mechanism 406a and the second cassette storage mechanism 406b) similar to the two-layer cassette storage mechanism 24 (i.e., the first cassette storage mechanism 24a and the second cassette storage mechanism 24b) of the loader / unloader 8 in the above embodiment is provided on the lifting table 404 of the processing device.

[0389] That is, the cassette 30 is carried into the processing device 402 of the present embodiment. Additionally, a movement restriction mechanism composed of a stopper member 50 and a shaft mechanism 52 is also mounted in the processing device 402. Thereby, it is easy to carry in and out the relatively heavy cassette 30, so the risk of damage to the workpiece 11 stored in the cassette 30 during carrying in and out can be reduced. Additionally, it is easy to implement a cassette storage mechanism 406 that is compact in the width direction.

[0390] In addition, in the processing apparatus 402 of the present embodiment, a first safety mechanism and a second safety mechanism for restricting entry from the outside to the inside of the processing apparatus 402 are also implemented. Thereby, it is possible to prevent an operator from erroneously accessing a movable part or the like that is in operation inside the processing apparatus 402.

[0391] In addition, the processing apparatus 402 of the present embodiment can be independent of the above-described conveyance system 2. That is, the processing apparatus 402 of the present embodiment is not necessarily connected to the above-described conveyance system 2.

[0392] The cassette storage mechanism 406 of the present embodiment is configured in the same manner as the cassette storage mechanism 24 of the above-described embodiment so as to be able to convey the workpiece 11 efficiently and safely. Therefore, by using the processing apparatus 4 equipped with this cassette storage mechanism 406, the workpiece 11 can be conveyed efficiently and safely.

[0393] In addition to the above, the configurations, methods, etc. of the above-described embodiments or modifications can be appropriately changed and implemented as long as they do not depart from the scope of the object of the present invention.

Claims

1. A transfer cart that travels on a transfer path provided above a processing device to transfer a workpiece, characterized in that: The transfer cart has: A frame on which traveling wheels are mounted; A container for accommodating the workpiece; A lifting unit provided on the frame, which suspends the container so that the container can pass through an opening that vertically penetrates the transfer path, thereby lifting and lowering the container; A cover provided on the frame; A power receiving terminal provided on the frame, which receives power supplied from the outside; And A charging wire that connects a secondary battery that supplies power to the lifting unit to the power receiving terminal, The lifting unit has: A suspension member that is connected to the upper surface side of the container; and A drive mechanism that winds and unwinds the suspension member, When the container is passed through the opening by the lifting unit, while charging the secondary battery by supplying the power received by the power receiving terminal to the secondary battery through the charging wire, the suspension member is wound and unwound by the drive mechanism to lift and lower the container by the lifting unit, The container has an opening through which the workpiece passes when the workpiece is loaded into or unloaded from the container, When the workpiece is being transferred on the transfer path, the lifting unit positions the container in a storage area, The cover has: A lid portion that covers the opening of the container, and the lid portion is connected to the frame so as to be rotatable relative to the frame; and A contact portion that is fixed to the lid portion so as to contact the container disposed in the storage area, When the container is disposed in the storage area and contacts the contact portion, the lid portion moves to a position covering the opening of the container along with the movement of the contact portion, thereby covering the opening of the container disposed in the storage area.

2. The transfer cart according to claim 1, characterized in that: The transfer cart further has a motor that rotates the wheels, The motor is driven by the power supplied from the secondary battery to rotate the wheels.

3. A transfer path provided above a processing device for processing a workpiece, on which a transfer cart travels, The transfer cart has: A frame; A container for accommodating the workpiece; A lifting unit that suspends the container to lift and lower the container; A cover provided on the frame; A power receiving terminal that receives power supplied from the outside; and A charging wire that connects a secondary battery that supplies power to the lifting unit to the power receiving terminal, The lifting unit has: A suspension member that is connected to the upper surface side of the container; and A drive mechanism that winds and unwinds the suspension member, Characterized in that: The transfer path includes: A traveling area where the transfer cart travels; A parking area where the transfer cart parks, and an opening is formed in the parking area, and the container that is lifted and lowered by the lifting unit can pass through the opening; A power supply terminal that contacts the power receiving terminal of the transfer cart when the transfer cart parks in the parking area; and A power supply wire that is connected to the power supply terminal, When lifting and lowering the container of the transfer cart parked in the parking area, While charging the secondary battery by supplying power to the secondary battery via the power supply wiring, the power supply terminal, the power receiving terminal, and the charging wiring, the container is lifted and lowered by winding and feeding out the suspension member by the drive mechanism. The container has an opening through which the workpiece passes when the workpiece is loaded into or unloaded from the container. When the workpiece is being transported on the transport path, the lifting unit positions the container in the storage area. The cover has: A lid portion that covers the opening of the container, and the lid portion is connected to the frame so as to be rotatable relative to the frame; and A contact portion that is fixed to the lid portion so as to contact the container disposed in the storage area. When the container is disposed in the storage area and contacts the contact portion, the lid portion moves to a position covering the opening of the container as the contact portion moves, thereby covering the opening of the container disposed in the storage area.

4. A transport system that transports a workpiece to a processing device using a transport vehicle that travels on a transport path above a processing device for processing the workpiece, characterized in that: The transport vehicle has: A frame on which traveling wheels are mounted; A container that houses the workpiece; A lifting unit that is provided on the frame and suspends the container to lift and lower the container; A cover that is provided on the frame; A power receiving terminal that is provided on the frame and receives power supplied from the outside; And A charging wiring that is provided on the frame and connects a secondary battery that supplies power to the lifting unit to the power receiving terminal. The lifting unit has: A suspension member that is connected to the upper surface side of the container; and A drive mechanism that winds and feeds out the suspension member. The transport path has: A traveling area where the transport vehicle travels; A parking area where the transport vehicle parks, and an opening is formed in the parking area, and the opening vertically penetrates the transport path in such a manner that the container lifted and lowered by the lifting unit can pass through; A power supply terminal that contacts the power receiving terminal of the transport vehicle when the transport vehicle parks in the parking area; And A power supply wiring that is connected to the power supply terminal. The transport vehicle is made to travel on the traveling area of the transport path and is made to park in the parking area. Power is supplied to the secondary battery via the power supply terminal, the power receiving terminal, and the charging wiring to charge the secondary battery. The lifting unit is driven using the power supplied from the secondary battery. The container is lifted and lowered through the opening by winding and feeding out the suspension member by the drive mechanism, and the workpiece is transported to the processing device provided below the parking area. The container has an opening through which the workpiece passes when the workpiece is loaded into or unloaded from the container. When the workpiece is being transported on the transport path, the lifting unit positions the container in the storage area. The cover has: A lid portion that covers the opening of the container, and the lid portion is connected to the frame so as to be rotatable relative to the frame; and A contact portion, which is fixed to the lid portion in a manner of contacting the container disposed in the storage area, When the container is disposed in the storage area and contacts the contact portion, the lid portion moves to a position covering the opening of the container along with the movement of the contact portion, thereby covering the opening of the container disposed in the storage area.

5. The conveying system according to claim 4, wherein The carrier vehicle further has a motor for rotating the wheels, and the motor is disposed on the frame, The motor is driven by the electric power supplied from the secondary battery to rotate the wheels.

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