A skid-mounted semi-enclosed cleaning apparatus and method of cleaning

Abstract

The present application relates to the technical field of cleaning device, specifically a sliding type semi-closed cleaning device and a cleaning method, comprising: a cleaning mechanism; a protection mechanism arranged along the circumference of the cleaning mechanism, and the inner side of the protection mechanism is provided with a circumferential air pipe, the air outlet direction of the circumferential air pipe is inclinedly directed to the direction of the protection mechanism from top to bottom; and a bearing mechanism, the bearing mechanism is provided with a bearing position, the bottom of the bearing position is provided with an inclined liquid discharge surface, and the bottom of the liquid discharge surface is provided with a liquid discharge hole. Compared with the prior art, the present application has the advantages that: the cleaning of the to-be-cleaned objects on the work position can be realized, the air showering and air drying functions can be realized; the bearing mechanism has the function of automatically adsorbing the to-be-cleaned objects, and the absolute fixation of the to-be-cleaned objects can be realized; the cleaning liquid can be prevented from polluting other work positions and equipment; the rapid recovery of waste liquid can be realized, the waste liquid can be quickly extracted to prevent accumulation; residual gas can be extracted to reduce the influence on the external environment and prevent waste liquid vapor from polluting the working environment.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of cleaning devices, in particular to a sliding type semi-closed cleaning device and a cleaning method. BACKGROUND

[0002] Before the substrate is subjected to relevant operations, such as plating, etching, etc., the substrate needs to be cleaned, because the cleanliness of the substrate itself is of vital importance to the subsequent operations and the quality of the product after the operations. However, after the substrate is cleaned by the existing cleaning device, liquid remains on the bearing mechanism that bears the substrate, and vapor gas is also generated during the cleaning process. The remaining liquid and vapor gas will pollute the working environment, and the random discharge of the remaining liquid and gas generated during the cleaning process will also pollute the external environment.

[0003] At the same time, during the cleaning process, the high-pressure cleaning liquid will impact the substrate, causing the substrate to displace or even fall off the bearing mechanism. SUMMARY

[0004] The present application aims to solve the problems of the prior art, and provides a sliding type semi-closed cleaning device and a cleaning method, which solve at least one of the following technical problems: the problem that the remaining liquid after cleaning accumulates on the lower side of the object to be cleaned and is difficult to recover immediately; the problem of pollution of the working environment after cleaning; the problem of pollution of the external environment by waste liquid and waste gas; and the problem that the object to be cleaned is difficult to fix during the cleaning process.

[0005] In order to achieve the above-mentioned purpose, a sliding type semi-closed cleaning device is designed, which comprises: a cleaning mechanism; a protection mechanism arranged along the circumference of the cleaning mechanism, and the inner side of the protection mechanism is provided with a circumferential air pipe, the air outlet direction of the circumferential air pipe is inclinedly directed to the direction of the protection mechanism from top to bottom; and a bearing mechanism, the bearing mechanism is provided with a bearing position for bearing the object to be cleaned, the bottom of the bearing position is provided with an inclined liquid discharge surface, and the bottom of the liquid discharge surface is provided with a liquid discharge hole.

[0006] The present application also has the following preferred technical solutions:

[0007] The cleaning mechanism comprises a base, and the base is provided with an air knife assembly and a cleaning spray pipe assembly.

[0008] The cleaning spray pipe assembly comprises: a plurality of liquid path pipes and nozzles; a liquid path pipe mounting hole located on the base, the liquid path pipe mounting hole corresponds to the liquid path pipe; and a liquid path pipe clamping structure located on the lower side of the base, the liquid path pipe clamping structure is provided with a liquid path pipe positioning hole corresponding to the liquid path pipe mounting hole.

[0009] The inner cross section of the liquid path pipe clamp structure is gradually contracted from top to bottom.

[0010] The cleaning device further comprises a gas extraction pipeline connected to the protective cover.

[0011] The bearing position is internally provided with a plurality of support tables for bearing the to-be-cleaned objects, and the support tables are provided with a retaining edge corresponding to the edge of the to-be-cleaned objects.

[0012] The bearing position is internally provided with a negative pressure adsorption assembly for fixing the to-be-cleaned objects.

[0013] The bottom of the bearing position is funnel-shaped, and the liquid discharge hole is located in the middle of the bottom end of the funnel-shaped bearing position.

[0014] The cleaning device further comprises a movement driving mechanism connected to the cleaning mechanism.

[0015] The application also relates to a cleaning method of the sliding type semi-closed cleaning device, and the method comprises the following steps: performing a cleaning operation through the cleaning mechanism; limiting the flow range of cleaning liquid and gas generated in the cleaning process through the protective mechanism; blowing the cleaning liquid on the inner wall of the protective mechanism to the bearing mechanism through the circumferential air pipe; bearing the to-be-cleaned objects through the bearing mechanism, and collecting the cleaning liquid through the liquid discharge surface and then discharging the cleaning liquid through the liquid discharge hole.

[0016] Advantages of the application

[0017] Compared with the prior art, the combined structure is simple and feasible, easy to install and disassemble, and has the advantages that the to-be-cleaned objects on the workstations can be cleaned, the air shower and air drying functions can be realized, the bearing mechanism has the function of automatically adsorbing the to-be-cleaned objects, the absolute fixation of the to-be-cleaned objects can be realized, the cleaning liquid can be prevented from polluting other workstations and equipment, the waste liquid can be quickly recovered, the waste liquid can be quickly extracted to prevent accumulation in the bearing mechanism, residual gas can be extracted to reduce the influence on the external environment, and the waste liquid vapor can be prevented from polluting the working environment. BRIEF DESCRIPTION OF DRAWINGS

[0018] Figure 1 Fig. 1 is a front view of the sliding type semi-closed cleaning device of the application.

[0019] Figure 2 Fig. 2 is a top view of the sliding type semi-closed cleaning device of the application.

[0020] Figure 3 Fig. 3 is a structural schematic view of the cleaning mechanism of the application.

[0021] Figure 4 Fig. 4 is a schematic view of a bearing position of the bearing mechanism of the application.

[0022] Figure 5 Figure 1 shows a cross-sectional view of the sliding semi-enclosed cleaning device of the present application.

[0023] Figure 6 Figure 2 shows an exploded view of the sliding semi-enclosed cleaning device of the present application.

[0024] Figure 1 shows a cross-sectional view of the sliding semi-enclosed cleaning device of the present application. DETAILED DESCRIPTION

[0025] The present application will be further described with reference to the drawings, the structure and principles of which are clear to those skilled in the art. It should be understood that the specific embodiments described herein are merely intended to explain the present application and should not be used to limit the present application.

[0026] The present embodiment provides a sliding semi-enclosed cleaning device, which comprises a moving driving mechanism, a cleaning mechanism 1, a protection mechanism 2 and a bearing mechanism 3, wherein the cleaning mechanism 1 is connected to the moving driving mechanism, and the moving driving mechanism can drive the cleaning mechanism 1 to move; the protection mechanism 2 comprises a protection cover, the protection cover is arranged along the circumference of the cleaning mechanism 1, and the inner side of the protection cover is provided with a circumferential air pipe 21, the air outlet direction of the circumferential air pipe 21 is obliquely directed to the direction of the protection cover from top to bottom; the bearing mechanism 3 is provided with a bearing position for bearing the object to be cleaned, the bottom of the bearing position is provided with an inclined liquid discharge surface 36, and the bottom of the liquid discharge surface 36 is provided with a liquid discharge hole 31.

[0027] In use, the moving driving mechanism drives the cleaning mechanism 1 and the protection mechanism 2 to move, the cleaning mechanism 1 performs cleaning operation, the protection cover limits the flow range of the cleaning liquid and the gas generated in the cleaning process, the circumferential air pipe 21 blows the cleaning liquid on the inner wall of the protection cover to the bearing mechanism 3, the bearing mechanism 3 bears the object to be cleaned, and the liquid discharge surface 36 collects the cleaning liquid and then discharges the cleaning liquid through the liquid discharge hole 31.

[0028] In some embodiments, the moving driving mechanism adopts a multi-axis robot or the like capable of multi-directional displacement or a linear moving guide rail 23 or the like capable of unidirectional movement, so that the moving driving mechanism is connected to the cleaning mechanism 1, and the cleaning mechanism 1 is moved by the moving driving mechanism.

[0029] In some embodiments, referring to Figure 1 The cleaning mechanism 1 includes first and second connecting members 11 and 12 symmetrically arranged left and right, the first and second connecting members 11 and 12 are connected to the moving driving mechanism, and a base is connected between the first and second connecting members 11 and 12, the base is provided with a wind knife assembly 14 and a cleaning nozzle assembly.

[0030] The wind knife assembly 14 includes a wind knife and a wind pipe connected to the wind knife, the wind pipe is used to be connected to a positive pressure pump or the like, and the wind knife is preferably provided with a flat air outlet.

[0031] The cleaning nozzle assembly includes a plurality of liquid path pipes and nozzles, liquid path pipe mounting holes 17 on the base, the liquid path pipe mounting holes 17 correspond to the liquid path pipes, and a liquid path pipe clamping structure 13 on the lower side of the base, the liquid path pipe clamping structure 13 is provided with liquid path pipe positioning holes 19 corresponding to the liquid path pipe mounting holes 17.

[0032] For example, referring to Figure 2 , Figure 3 and Figure 6 The base is provided with six liquid path pipe mounting holes 17 and clamping member mounting holes, the clamping member mounting holes are used to connect the liquid path pipe clamping structure 13 through a connecting block 42, the inner cross section of the liquid path pipe clamping structure 13, i.e. the internal cross section, is gradually contracted from top to bottom, so as to accommodate and constrain the liquid path pipes, and the bottom of the liquid path pipe clamping structure 13 is further provided with six liquid path pipe positioning holes 19, the pattern formed by the six liquid path pipe positioning holes 19 is similar to the pattern formed by the six liquid path pipe mounting holes 17, and the size of the pattern formed by the six liquid path pipe positioning holes 19 is smaller than the pattern formed by the six liquid path pipe mounting holes 17, the six liquid path pipes and nozzles pass through the six liquid path pipe mounting holes 17 and the six liquid path pipe positioning holes 19 in sequence and are fixed.

[0033] Thus, through the 6-way liquid path pipe and the nozzle, the corresponding solution is sprayed from the liquid supply system to the upper side of the carrying mechanism 3, and the overall horizontal movement of the cleaning mechanism 1 is driven by the movement driving mechanism, so that the surface of the object to be cleaned is fully cleaned at each position. Then, under the action of the positive pressure pump, the air knife blows out a large amount of air, and cooperates with the horizontal movement of the entire cleaning mechanism 1 to blow all the residual liquid on the bottom plate away from the upper surface of the object to be cleaned to realize the overall air drying function.

[0034] In a preferred embodiment, an exhaust pipe is further arranged in the protective cover for sucking the exhaust gas in the protective cover after cleaning and air drying. For example, also in combination with Figure 2 As shown, the base is further provided with an air suction hole 15 which communicates with the space in the protective cover, and the air suction hole 15 is connected to the exhaust gas treatment system through a gas path pipeline, and a negative pressure device such as an exhaust pump is connected to the gas path pipeline, so that the exhaust gas generated in the local space after cleaning and air drying is quickly sucked into the exhaust gas treatment system by negative pressure, which reduces the pollution of the working environment by exhaust liquid vapor.

[0035] In some embodiments, the protective mechanism 2 adopts a glass cover 24 which is arranged around the cleaning mechanism 1, for example, the glass cover 24 is connected to the periphery of the base of the cleaning mechanism 1 through connecting bolts 41. Thus, during the cleaning and air drying process, the glass cover 24 can ensure that the liquid will not be blown into the entire working environment or the liquid droplets will not be blown onto other workstations and the bottom plate between the workstations, preventing the cleaning liquid from polluting other workstations.

[0036] Preferably, in combination with Figure 4 As shown, a guide rail 23 is arranged on the carrying mechanism 3 in the linear motion direction of the glass cover 24, and the length of the glass cover 24 in the linear motion direction is longer than the length of the guide rail 23. Under the driving of the movement driving mechanism, the glass cover 24 can move along the guide rail 23.

[0037] At the same time, the arrangement of the glass cover 24 also limits the flow range of the exhaust liquid. The exhaust liquid generated during the cleaning process cannot flow out of the limited range of the glass cover 24, so it can be effectively collected by the carrying position of the lower carrying mechanism 3 and discharged from the liquid discharge port.

[0038] However, during the cleaning and air drying process, the exhaust liquid may splash onto the inner wall of the glass cover 24, and the cleaning mechanism 1 and the glass cover 24 will be lifted upward to the waiting working position when not cleaning and air drying. When in the waiting working position, if there are too many liquid droplets inside the glass cover 24, there is a risk of dripping, and there may be a motor or other equipment that cannot tolerate corrosion directly below, which may cause serious damage to other components, so it is very important to keep the inside clean.

[0039] Therefore, the circumferential air pipe 21 is arranged on the inner side of the glass cover 24 to blow the liquid droplets from the glass cover 24 to the carrying position. In a preferred embodiment, a ring-shaped multi-channel air pipe is arranged on the base of the cleaning mechanism corresponding to the position of the inner side of the glass cover 24 as the circumferential air pipe 21, which is connected to a positive pressure pump or other equipment to generate air flow. The air flow blows from top to bottom to blow the liquid droplets on the inner wall of the glass cover 24 to the carrying mechanism 3 to ensure the cleanliness of the inner wall of the glass cover 24 and prevent the pollution or damage to the substrate or other objects to be cleaned.

[0040] In some embodiments, the carrying mechanism 3 is provided with a plurality of carrying positions for carrying the objects to be cleaned, and the bottom of each carrying position is provided with an inclined liquid discharge surface 36, and the bottom of the liquid discharge surface 36 is provided with a liquid discharge hole 31 for discharging the waste liquid.

[0041] For example, in combination with Figure 5 As shown, the bottom of the carrying position of the carrying mechanism 3 is funnel-shaped, the middle bottom end of the carrying position is the lowest end of the entire funnel-shaped carrying position, and the circumferential surface of the lowest end is provided with an inclined liquid discharge surface 36 from top to bottom to the lowest end. The liquid discharge hole 31 is located at the lowest end of the funnel-shaped carrying position, i.e., the middle bottom end.

[0042] In a preferred embodiment, the liquid discharge hole 31 is connected to an external pressure generating assembly, such as a negative pressure pump, through a pipeline, so that the pressure generating assembly forms a negative pressure in the liquid discharge hole 31 and the pipeline to suck out the residual liquid in the carrying mechanism 3.

[0043] When the cleaning liquid flows from the substrate to the bottom plate of the carrying position or from the glass cover 24 to the bottom plate, the cleaning liquid is collected to the liquid discharge hole 31 due to the inclined liquid discharge surface 36 of the bottom plate to the liquid discharge hole 31. When the bottom plate of the carrying position is funnel-shaped, the cleaning liquid is collected to the liquid discharge hole 31 at the middle bottom end. Preferably, the waste liquid collected at the funnel-shaped bottom plate is quickly collected into a waste liquid bottle through the negative pressure pipeline by the negative pressure pump. This process not only removes the waste liquid collected on the funnel-shaped bottom plate, but also sucks away the residual liquid on the bottom plate through the negative pressure, so that the bottom plate is finally in a state without residual liquid.

[0044] In some embodiments, the carrying position of the carrying mechanism 3 is provided with a plurality of supporting tables 32 for carrying the objects to be cleaned, and the supporting table 32 is provided with a retaining edge 35 corresponding to the edge of the object to be cleaned. In a preferred embodiment, the supporting table 32 is arranged at the edge position of the object to be cleaned, for example, in combination with Figure 4 and Figure 5As shown, the four corners of the to-be-cleaned object are provided with supporting tables 32, and the supporting tables 32 are provided with downward recessed grooves 34 along the edges of the four corners of the to-be-cleaned object, and the inner walls of the grooves 34 serve as stop edges 35 for limiting the edges of the four corners of the to-be-cleaned object, thereby positioning the to-be-cleaned object.

[0045] Therefore, by providing the four supporting tables 32 for placing the to-be-cleaned object, the to-be-cleaned object is not in direct contact with the bottom of the bearing mechanism 3, and the contact area is reduced, facilitating the feeding and discharging of the to-be-cleaned object, and avoiding that the solution on the surface of the to-be-cleaned object cannot be completely treated during the cleaning and drying process. The provision of the stop edges 35 ensures that the to-be-cleaned object will not slide off during the movement of the bearing mechanism 3 or during the cleaning and drying process, thereby affecting the normal operation of the equipment, and realizes the physical fixation and positioning of the to-be-cleaned object.

[0046] In a preferred embodiment, a negative pressure adsorption assembly is further provided in the bearing position for fixing the to-be-cleaned object. For example, in combination with the above-mentioned embodiment, the negative pressure adsorption assembly is provided in the downward recessed groove 34. Figure 4 As shown, the downward recessed groove 34 is provided with a negative pressure adsorption hole 33, and the negative pressure adsorption hole 33 is connected to a negative pressure generating device such as a pump through an air passage, thereby further realizing the fixation of the to-be-cleaned object through the provision of the negative pressure adsorption assembly.

Claims

1. A skid-mounted semi-enclosed washing apparatus, characterized in that The application relates to a cleaning device, which comprises: a cleaning mechanism; a protection mechanism arranged along the circumference of the cleaning mechanism, and the inner side of the protection mechanism is provided with a circumferential air pipe, the air outlet direction of the circumferential air pipe is obliquely directed from top to bottom towards the protection mechanism; and a bearing mechanism, the bearing mechanism is provided with at least two bearing positions for bearing the objects to be cleaned, the bottom of the bearing position is provided with an inclined liquid discharge surface, and the bottom of the liquid discharge surface is provided with a liquid discharge hole; the bearing position of the bearing mechanism is internally provided with a plurality of supporting tables for bearing the objects to be cleaned, the supporting table is provided with a downwardly recessed groove along the four corners of the object to be cleaned, and the inner wall of the groove serves as a stopper for limiting the four corners of the object to be cleaned, thereby positioning the object to be cleaned, the protection mechanism is a glass cover, and the circumferential air pipe can blow the liquid in the glass cover into the bearing position, the glass cover corresponds to one bearing position, and the glass cover is configured so that the waste liquid generated in the cleaning process cannot flow out of the limited range of the glass cover, so that the liquid cannot be blown to the whole working environment or other bearing positions and the bottom plate between the bearing positions, and the liquid can be effectively collected by the bearing position of the bearing mechanism on the lower side and discharged from the liquid discharge hole.

2. The skid half-enclosed washing apparatus according to claim 1, wherein The cleaning mechanism comprises a base, and the base is provided with an air knife assembly and a cleaning spray pipe assembly.

3. The skid half-enclosed washing apparatus according to claim 2, wherein The cleaning spray pipe assembly comprises: a plurality of liquid path pipes and nozzles; liquid path pipe mounting holes on the base, which correspond to the liquid path pipes; a liquid path pipe clamping structure on the lower side of the base, which is provided with liquid path pipe positioning holes corresponding to the liquid path pipe mounting holes.

4. The skid half-enclosed washing apparatus according to claim 3, wherein The inner cross section of the liquid path pipe clamping structure gradually shrinks from top to bottom.

5. The skid half-enclosed washing apparatus according to claim 1, wherein The application further comprises an air extraction pipeline connected to the protection cover.

6. The skid half-enclosed washing apparatus of claim 1, wherein The bearing position is internally provided with a plurality of supporting tables for bearing the objects to be cleaned, and the supporting table is provided with a stopper corresponding to the edge of the object to be cleaned.

7. The skid half-enclosed washing device according to claim 1 or 6, characterized in that The bearing position is internally provided with a negative pressure adsorption assembly for fixing the object to be cleaned.

8. The skid half-enclosed washing apparatus according to claim 1, wherein The bottom of the bearing position is funnel-shaped, and the liquid discharge hole is located in the middle of the bottom end of the funnel-shaped bearing position.

9. The skid half-enclosure cleaning device of claim 1, wherein The application further comprises a moving driving mechanism connected to the cleaning mechanism.

10. A method of cleaning with a slide-on semi-enclosed cleaning apparatus as claimed in claim 1, characterized in that The method is as follows: performing a cleaning operation through the cleaning mechanism; limiting the flow range of the cleaning liquid and the gas generated in the cleaning process through the protection mechanism; blowing the cleaning liquid on the inner wall of the protection mechanism to the bearing mechanism through the circumferential air pipe; bearing the object to be cleaned through the bearing mechanism, and collecting the cleaning liquid through the liquid discharge surface and discharging the cleaning liquid through the liquid discharge hole.

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