An online fast vacuum plasma machine

Abstract

The present invention relates to the technical field of plasma machine structure, and in particular discloses an online fast vacuum plasma machine; comprising an outer frame, the outer frame is provided with an inner cavity; the inner cavity is provided with a negative pressure storage bin, and a plasma vacuum bin arranged on the lower side of the negative pressure storage bin; the inner cavity is also provided with a vacuum pump device, the vacuum pump device is connected with a vacuum non-return pipe; the vacuum non-return pipe is connected with a first branch pipe and a second branch pipe; the negative pressure storage bin and the vacuum non-return pipe are connected through the first branch pipe, the plasma vacuum bin and the vacuum non-return pipe are connected through the second branch pipe, and the first branch pipe and the second branch pipe are connected; the vacuum plasma machine also includes a moving platform, the moving platform is provided with a conveyor belt; the conveyor belt is also provided with a workpiece table; the vacuum plasma machine of the present invention can greatly shorten the vacuum pumping time and greatly improve the work efficiency.

Description

Technical Field

[0001] The invention relates to the technical field of plasma machine structures, and in particular to an online fast vacuum plasma machine. Background Art

[0002] At present, plasma cleaning machines are widely used in the market. Plasma cleaning machines are generally divided into normal pressure plasma cleaning machines and vacuum plasma cleaning machines, or plasma surface treatment machines. It is a new high-tech technology. The (active) components of plasma include: ions, electrons, atoms, active groups, excited nuclides (metastable states), photons, etc. Plasma cleaning machines use the properties of these active components to treat the sample surface, thereby achieving the purpose of cleaning and coating.

[0003] At present, vacuum plasma cleaning machines are used more and more widely. During use, traditional vacuum plasma cleaning machines need to run for a certain period of time for vacuuming, and the vacuuming time is relatively long, resulting in the operator having to wait for a long time during the entire program, low work efficiency, and increased production costs. Summary of the invention

[0004] The purpose of the present invention is to provide an online fast vacuum plasma machine with a preset negative pressure chamber, which can greatly shorten the vacuum pumping time and greatly improve the working efficiency.

[0005] In order to solve the above technical problems, the technical solution adopted by the present invention is: an online fast vacuum plasma machine, comprising an outer frame, the outer frame is provided with an inner cavity; the inner cavity is provided with a negative pressure storage bin and a plasma vacuum bin arranged on the lower side of the negative pressure storage bin; the inner cavity is also provided with a vacuum pump device, the vacuum pump device is connected with a vacuum non-return pipe; the vacuum non-return pipe is connected with a first branch pipe and a second branch pipe; the negative pressure storage bin and the vacuum non-return pipe are connected through the first branch pipe, the plasma vacuum bin and the vacuum non-return pipe are connected through the second branch pipe, and the first branch pipe and the second branch pipe are connected;

[0006] The vacuum plasma machine also includes a moving platform, on which a conveyor belt is provided; a workpiece platform is also provided on the conveyor belt; a cylinder column guide rail device is also provided below the moving platform, and the moving platform is lifted up and down by the cylinder column guide rail device; the vacuum plasma machine also includes a horizontal moving device, on which the cylinder column guide rail device is installed, and the horizontal moving device moves horizontally on a horizontal plane, driving the cylinder column guide rail device to move horizontally, thereby driving the moving platform to move horizontally;

[0007] A plasma generator is also provided in the inner cavity, and a high-voltage line is provided in the plasma generator. A copper plate is provided in the plasma vacuum chamber, and the high-voltage line is radio-frequency-connected to the copper plate.

[0008] The beneficial effects of the present invention include:

[0009] 1. By setting up a negative pressure chamber, the negative pressure chamber is kept in a negative pressure state in advance; when the plasma vacuum chamber needs to be evacuated, the negative pressure chamber and the vacuum pump device evacuate the plasma vacuum chamber at the same time, which greatly shortens the evacuation time and greatly improves work efficiency.

[0010] 2. Since the present invention is divided into a plasma vacuum chamber and a negative pressure storage chamber, the space capacity of each chamber is reduced by one half, and the efficiency of rapid vacuuming can be achieved.

[0011] 3. In the present invention, a plurality of vacuum angle valves are also provided on the pipeline to facilitate the control of airflow and prevent the plasma vacuum chamber from flowing back to the negative pressure chamber.

[0012] 4. The plasma vacuum chamber can be an aluminum vacuum chamber body, which is connected to the ground wire as the negative electrode. It has strong conductivity and good heat dissipation. When the plasma is working, it can release the arc instantly to achieve the plasma vacuum treatment effect.

[0013] 5. The workpiece table can be an aluminum plate, which is an aluminum conductive oxide plate. It is not easy to be scratched or damaged, and has strong conductivity. It is lightweight and can be easily pushed with a cylinder column guide device installed underneath.

[0014] 6. In the present invention, the workpiece table and the plasma vacuum chamber are sealed and integrated, and there is no need to manually open the vacuum chamber door to discharge the material, making loading and unloading more convenient and quick in operation. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] The present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments.

[0016] Figure 1 It is a schematic diagram of the external structure of the online fast vacuum plasma machine of the present invention;

[0017] Figure 2 It is a schematic diagram of the internal structure of the online fast vacuum plasma machine of the present invention;

[0018] Figure 3 It is another internal structure schematic diagram of the online fast vacuum plasma machine of the present invention;

[0019] Figure 4 It is a schematic structural diagram of a plasma vacuum chamber and a moving platform of the present invention;

[0020] Figure 5It is a structural schematic diagram of the conveyor belt of the present invention;

[0021] Figure 6 It is a structural schematic diagram of the cylinder column guide rail device of the present invention. DETAILED DESCRIPTION

[0022] The following is a clear and complete description of the technical solutions in the embodiments of the present invention in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0023] In the following description, many specific details are set forth to facilitate a full understanding of the present invention, but the present invention may also be implemented in other ways different from those described herein, and those skilled in the art may make similar generalizations without violating the connotation of the present invention. Therefore, the present invention is not limited to the specific embodiments disclosed below.

[0024] like Figure 1 As shown in FIG. 1 , it is a schematic diagram of the external structure of the online fast vacuum plasma machine of the present invention; Figure 2 As shown in FIG. 1 , it is a schematic diagram of the internal structure of the online fast vacuum plasma machine of the present invention; Figure 3 As shown in FIG. 1 , another internal structure schematic diagram of the online fast vacuum plasma machine of the present invention is shown; Figure 4 The figure is a schematic diagram of the structure of the plasma vacuum chamber and the moving platform of the present invention; the online fast vacuum plasma machine of the present invention comprises an outer frame 1, and the outer frame 1 is provided with an inner cavity; it is characterized in that the inner cavity is provided with a negative pressure storage chamber 21, and a plasma vacuum chamber 22 arranged on the lower side of the negative pressure storage chamber 21; the inner cavity is also provided with a vacuum pump device 31, and the vacuum pump device 31 is connected with a vacuum non-return pipe 32; the vacuum non-return pipe 32 is connected with a first branch pipe 321 and a second branch pipe 322; the negative pressure storage chamber 21 and the vacuum non-return pipe 32 are connected through the first branch pipe 321, the plasma vacuum chamber 22 and the vacuum non-return pipe 32 are connected through the second branch pipe 322, and the first branch pipe 321 and the second branch pipe 322 are connected;

[0025] The vacuum plasma machine also includes a moving table 5, on which a conveyor belt 51 is provided; a workpiece table 52 is also provided on the conveyor belt 51; illustratively, in the present invention, the workpiece table 52 can be an aluminum plate, which is an aluminum conductive oxide plate; a cylinder column guide rail device 6 is also provided below the moving table 5, and the moving table 5 is lifted up and down by the cylinder column guide rail device 6; the vacuum plasma machine also includes a horizontal moving device, and the cylinder column guide rail device 6 is installed on the horizontal moving device, and the horizontal moving device moves horizontally on a horizontal plane, driving the cylinder column guide rail device 6 to move horizontally, thereby driving the moving table 5 to move horizontally.

[0026] As a preferred embodiment, the lower side of the plasma vacuum chamber 22 is open, and the workpiece table 52 is a plate-like structure; the moving table 5 is horizontally moved by a horizontal moving device, and after the workpiece table 52 is driven to move horizontally to the bottom of the plasma vacuum chamber 22, the workpiece table 52 is driven to move upward to the lower side opening of the plasma vacuum chamber 22 by the cylinder column guide device 6, so that the plasma vacuum chamber 22 and the workpiece table 52 form a closed space; exemplarily, the plasma vacuum chamber 22 is a square structure, the lower side opening of the plasma vacuum chamber 22 is a square structure, the workpiece table 52 is a square structure, and the workpiece table 52 and the lower side opening of the plasma vacuum chamber 22 have the same size.

[0027] In the present invention, after the vacuum plasma machine is turned on, the vacuum pump device 31 pre-evacuates the negative pressure storage chamber 21 through the vacuum non-return pipe 32 and the first branch pipe 321, so that the negative pressure storage chamber 21 maintains a negative pressure state; therefore, in the present invention, before the plasma vacuum chamber is required to work, the negative pressure storage chamber 21 is always pre-maintained in a negative pressure state.

[0028] When the plasma vacuum chamber needs to start working, the horizontal moving device is moved; illustratively, in the present invention, a bottom plate 71 is provided below the outer frame 1; the horizontal moving device is located at the bottom side of the bottom plate 71, and the horizontal moving device is a universal wheel 72. That is, the workpiece table 52 is moved to the bottom of the plasma vacuum chamber 22 by the universal wheel 72 moving forward, backward, left and right on the horizontal plane; then the cylinder column guide rail device 6 is moved upward, driving the workpiece table 52 to move upward to the lower opening of the plasma vacuum chamber 22, and leaning upward, so that the workpiece table 52 and the plasma vacuum chamber 22 are connected to form a closed space. As a preferred embodiment, the cylinder column guide rail device 6 can be provided with multiple, or multiple leaning parts are provided with four corners, so that the four corners are respectively leaned upward against the surroundings of the workpiece table 52, so that it is pressed tightly and can be automatically sealed and locked. Moreover, as a preferred embodiment, a limiting device is also provided under the plasma vacuum chamber 22. When the workpiece table 52 moves to the lower opening of the plasma vacuum chamber 22, the limiting device drives the workpiece table 52 to be tightly connected to the lower opening of the plasma vacuum chamber 22. The vacuum plasma machine is also provided with a photoelectric detection device, which is used to detect whether the workpiece table 52 is tightly connected to the plasma vacuum chamber 22.

[0029] In the present invention, after forming a closed space, the vacuum pump device 31 evacuates the plasma vacuum chamber 22 through the vacuum non-return pipe 32 and the second branch pipe 322; at the same time, the negative pressure storage chamber 21 in a negative pressure state forms a pressure difference with the plasma vacuum chamber 22, and the plasma vacuum chamber 22 can be evacuated through the first branch pipe 321 and the second branch pipe 322. Therefore, the vacuum pump device 31 and the negative pressure storage chamber 21 evacuate the plasma vacuum chamber at the same time, which greatly shortens the evacuation time and greatly improves the work efficiency; and, because the present invention is divided into a plasma vacuum chamber and a negative pressure storage chamber, the space capacity of each chamber is reduced by one-half, so the space required for evacuating the plasma vacuum chamber is also greatly reduced, and the efficiency of rapid evacuation can be achieved.

[0030] In the present invention, a plasma generator 41 is further provided in the inner cavity, the plasma generator 41 is provided with a high-voltage line, a copper plate is provided in the plasma vacuum chamber 22, and the high-voltage line is RF-connected to the copper plate; when the plasma vacuum chamber 22 is evacuated, the plasma generator 41 generates plasma, and bombards the workpiece on the workpiece table 52 on the lower side of the plasma vacuum chamber 22 through the copper plate in the plasma vacuum chamber 22.

[0031] In the present invention, in order to prevent the plasma vacuum chamber from flowing back to the negative pressure chamber, or flowing back through the vacuum non-return pipe 32, and to facilitate the control of the direction of the airflow, the vacuum non-return pipe 32 is provided with a first vacuum angle valve 331, the first branch pipe 321 is provided with a second vacuum angle valve 332, and the second branch pipe 322 is provided with a third vacuum angle valve 333; for example, when the air pressure in the plasma vacuum chamber reaches a certain value, each vacuum angle valve is closed, or multiple vacuum angle valves are set as one-way angle valves to prevent the airflow from flowing back.

[0032] In the present invention, the plasma vacuum chamber can be an aluminum vacuum chamber body, which is connected to the ground wire as one end of the negative electrode, has strong conductivity and good heat dissipation. When the plasma is working, it can release the arc instantly to achieve the plasma vacuum treatment effect; the workpiece table can be an aluminum plate, which is an aluminum conductive oxide plate, which is not easy to be scratched and bruised, and has strong conductivity. The light weight makes it easy to push with a cylinder column guide device installed underneath. In addition, in the present invention, under normal conditions, the workpiece table and the plasma vacuum chamber are separated. When in use, after the workpiece is placed on the workpiece table, the workpiece table and the plasma vacuum chamber are sealed and integrated, and there is no need to manually open the vacuum chamber door to discharge the material, making loading and unloading more convenient and convenient and quick in operation.

[0033] In the present invention, the plasma vacuum chamber 22 is provided with a movable chamber door 221, and the plasma vacuum chamber 22 is also provided with an observation chamber 222, and the observation chamber 222 is provided with a transparent device for easy observation.

[0034] like Figure 6 As shown, it is a schematic diagram of the structure of the cylinder column guide rail device of the present invention; the cylinder column guide rail device 6 includes a fixed column 61, and a lifting column 62 installed on the fixed column 61; the lifting column 62 is lifted up and down along the fixed column 61; the fixed column 61 is fixedly installed on the bottom plate 71; the top end of the lifting column 62 is provided with a mounting plate 63; the mounting plate 63 is fixedly installed on the moving platform 5.

[0035] like Figure 5 , which is a schematic diagram of the structure of the conveyor belt of the present invention; the conveyor belt 51 includes fixed plates 511 located on both sides, a plurality of driven rods 512 are provided between the fixed plates 511 on both sides, and the workpiece table 52 is placed on the driven rods 512;

[0036] Each driven rod 512 is provided with a driven tooth 513; the conveyor belt 51 also includes a rotating rod 514, on which a plurality of driving teeth 515 are provided; a driven tooth 513 and a driving tooth 515 are meshingly connected; the vacuum plasma machine is also provided with a transmission belt motor 516; the transmission belt motor 516 drives the rotating rod 514 to rotate, drives the driving tooth 515 to rotate, and drives the driven tooth 513 to rotate; thereby driving the driven rod 512 to rotate; and drives the workpiece table 52 placed on the driven rod 512 to move.

[0037] In the present invention, a distribution box 42 is also provided in the inner cavity; a fan 43 is also provided under the outer frame 1; the inner cavity is blown to cool down, and the upper and lower ends of the outer frame 1 are respectively provided with switch doors 11; the vacuum plasma machine is also provided with a boom control device 9 for controlling the working state of the vacuum plasma machine.

[0038] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned embodiments, it is still possible for those skilled in the art to modify the technical solutions described in the aforementioned embodiments, or to make equivalent substitutions for some of the technical features therein. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. An online fast vacuum plasma machine, comprising an outer frame (1), wherein the outer frame (1) is provided with an inner cavity; characterized in that: The inner cavity is provided with a negative pressure storage chamber (21) and a plasma vacuum chamber (22) arranged on the lower side of the negative pressure storage chamber (21); the inner cavity is also provided with a vacuum pump device (31), and the vacuum pump device (31) is connected to a vacuum non-return pipe (32); the vacuum non-return pipe (32) is connected to a first branch pipe (321) and a second branch pipe (322); the negative pressure storage chamber (21) and the vacuum non-return pipe (32) are connected through the first branch pipe (321), the plasma vacuum chamber (22) and the vacuum non-return pipe (32) are connected through the second branch pipe (322), and the first branch pipe (321) and the second branch pipe (322) are connected; The vacuum plasma machine also includes a moving platform (5), on which a conveyor belt (51) is provided; a workpiece platform (52) is also provided on the conveyor belt (51); a cylinder column guide rail device (6) is also provided below the moving platform (5), and the moving platform (5) is lifted and lowered by the cylinder column guide rail device (6); the vacuum plasma machine also includes a horizontal moving device, and the cylinder column guide rail device (6) is installed on the horizontal moving device, and the horizontal moving device moves horizontally on a horizontal plane, driving the cylinder column guide rail device (6) to move horizontally, thereby driving the moving platform (5) to move horizontally; A plasma generator (41) is also provided in the inner cavity, the plasma generator (41) is provided with a high-voltage line, a copper plate is provided in the plasma vacuum chamber (22), and the high-voltage line is radio-frequency-connected to the copper plate; The lower side of the plasma vacuum chamber (22) is open, and the workpiece table (52) is a plate-shaped structure; the moving table (5) is moved horizontally by a horizontal moving device, and after the workpiece table (52) is driven to move horizontally to the bottom of the plasma vacuum chamber (22), the workpiece table (52) is driven to move upward to the lower side opening of the plasma vacuum chamber (22) by the cylinder column guide rail device (6), so that the plasma vacuum chamber (22) and the workpiece table (52) form a closed space; The plasma vacuum chamber (22) is a square structure, the lower opening of the plasma vacuum chamber (22) is a square structure, the workpiece platform (52) is a square structure, and the workpiece platform (52) and the lower opening of the plasma vacuum chamber (22) have the same size; After the vacuum plasma machine is turned on, the vacuum pump device (31) pre-evacuates the negative pressure storage bin (21) through the vacuum non-return pipe (32) and the first branch pipe (321), so that the negative pressure storage bin (21) maintains a negative pressure state; When the workpiece table (52) is connected to the plasma vacuum chamber (22) to form a closed space, the vacuum pump device (31) evacuates the plasma vacuum chamber (22) through the vacuum non-return pipe (32) and the second branch pipe (322); at the same time, the negative pressure storage chamber (21) in a negative pressure state evacuates the plasma vacuum chamber (22) through the first branch pipe (321) and the second branch pipe (322); A bottom plate (71) is provided below the outer frame (1); the horizontal moving device is located on the bottom side of the bottom plate (71), and the horizontal moving device is a universal wheel (72).

2. The online fast vacuum plasma machine according to claim 1, characterized in that: The vacuum non-return pipe (32) is provided with a first vacuum angle valve (331), the first branch pipe (321) is provided with a second vacuum angle valve (332), and the second branch pipe (322) is provided with a third vacuum angle valve (333).

3. The online fast vacuum plasma machine according to claim 1, characterized in that: A limiting device is also provided below the plasma vacuum chamber (22); when the workpiece table (52) moves to the lower opening of the plasma vacuum chamber (22), the limiting device drives the workpiece table (52) to be tightly connected to the lower opening of the plasma vacuum chamber (22); the vacuum plasma machine is also provided with a photoelectric detection device, which is used to detect whether the workpiece table (52) is tightly connected to the plasma vacuum chamber (22); The plasma vacuum chamber (22) is provided with a movable chamber door (221), and the plasma vacuum chamber (22) is also provided with an observation chamber (222), and the observation chamber (222) is provided with a transparent device.

4. The online fast vacuum plasma machine according to claim 1, characterized in that: The cylinder column guide rail device (6) comprises a fixed column (61) and a lifting column (62) mounted on the fixed column (61); the lifting column (62) is lifted and lowered along the fixed column (61); the fixed column (61) is fixedly mounted on the bottom plate (71); a mounting plate (63) is provided at the top end of the lifting column (62); and the mounting plate (63) is fixedly mounted on the moving platform (5).

5. The online fast vacuum plasma machine according to claim 1, characterized in that: The conveyor belt (51) comprises fixed plates (511) located on two sides, a plurality of driven rods (512) are arranged between the fixed plates (511) on the two sides, and the workpiece platform (52) is placed on the driven rods (512); Each driven rod (512) is provided with a driven tooth (513); the conveyor belt (51) further comprises a rotating rod (514), and the rotating rod (514) is provided with a plurality of driving teeth (515); a driven tooth (513) and a driving tooth (515) are meshingly connected; the vacuum plasma machine is further provided with a transmission belt motor (516); the transmission belt motor (516) drives the rotating rod (514) to rotate, drives the driving teeth (515) to rotate, and drives the driven teeth (513) to rotate; thereby driving the driven rod (512) to rotate; and drives the workpiece table (52) arranged on the driven rod (512) to move.

6. The online fast vacuum plasma machine according to claim 1, characterized in that: A distribution box (42) is also provided in the inner cavity; a fan (43) is also provided below the outer frame (1); a switch door (11) is provided at the upper end and the lower end of the outer frame (1); and the vacuum plasma machine is also provided with a boom control device (9) for controlling the working state of the vacuum plasma machine.

Images