Method of using a processing device

Abstract

The present application provides a machining device which can suppress the cost increase and can suppress the machining precision decrease. The machining device includes a machining feed unit and a control unit. The machining feed unit moves a holding unit along a guide rail between a machining area and a photographing area where a workpiece is photographed by a camera. The control unit has a correction amount calculation section which calculates a correction value in the Y-axis direction or a correction angle of the chuck table according to Y coordinates of two points separated in the machining feed direction of one cutting groove after machining feeding the chuck table and making a cutting groove on the workpiece by a cutting unit, and photographs the cutting groove by the camera. The position of the camera in the Y direction is corrected or the chuck table is rotated by the correction angle when machining feeding the chuck table in the photographing area.

Description

TECHNICAL FIELD

[0001] The present application relates to a method using a processing apparatus. BACKGROUND

[0002] A processing apparatus is known which processes a workpiece such as a device wafer in which various devices are formed in regions divided by a separation lane, such as silicon, sapphire, gallium arsenide, SiC (silicon carbide), and the like, along the separation lane (see, for example, Patent Literature 1). Such a processing apparatus is a cutting apparatus which mounts a cutting tool to a spindle and cuts the separation lane, or a laser processing apparatus which converges laser light to the separation lane and forms a laser processing groove or forms a modified layer inside.

[0003] In the above processing apparatus, the workpiece is held to a chuck table and is processed while being moved in a processing feed direction (X-axis direction) along a guide rail. At this time, if the chuck table is rotated so that the orientation of the separation lane is parallel to the X-axis direction, processing along the separation lane can be performed by moving the chuck table.

[0004] Patent Literature 1: Japanese Patent Application Publication No. 2017-199777

[0005] In the above processing apparatus, the chuck table is moved by a linear actuator which moves a holding unit (moving base) along the guide rail, but the linearity of the linear actuator can be guaranteed only in a guaranteed range except for both ends. In comparison with the guaranteed range, the linearity is poor near both ends of the guide rail, and the chuck table is slightly rotated or is processed in a rotated state when viewed from above (from a camera). Thus, when the workpiece is aligned (the processing position is determined) or kerf inspection (the position offset of the cutting position is measured or adjusted) is performed in the region of the both ends, there is a concern that the processing precision will decrease due to processing at a wrong position. However, when the guaranteed range is expanded to both ends or the length of the linear actuator is increased in order to expand the guaranteed range, the cost of the linear actuator will increase or the area required for the installation will increase. SUMMARY

[0006] Thus, an object of the present application is to provide a method using a processing apparatus which can suppress an increase in cost and can suppress a decrease in processing precision.

[0007] According to one embodiment of the present application, a machining device is provided, which includes: a holding unit having a rotatable chuck table that holds a workpiece; a machining unit that machines the workpiece held by the chuck table; a machining feed unit that feeds the holding unit in an X-axis direction; an indexing feed unit that indexes the machining unit in a Y-axis direction; a camera that photographs the workpiece held by the chuck table, and is movable in the indexing feed direction; and a control unit that controls each component, the machining feed unit moving the holding unit along a guide rail between a machining region, in which the workpiece is machined by the machining unit, and a photographing region, in which the workpiece is photographed by the camera at a position that is separated from the machining region by a prescribed distance in the X-axis direction, the control unit having a correction amount calculation section that, after the chuck table is machined and a linear machining mark is made on the workpiece by the machining unit, moves the chuck table to the photographing region and photographs the machining mark by the camera, the correction amount calculation section calculating a correction value in the Y-axis direction or a correction angle of the chuck table based on Y coordinates of two points of the machining mark that are separated in the machining feed direction, and correcting the position of the camera in the Y direction or rotating the chuck table by the correction angle when the chuck table is machined in the photographing region.

[0008] Preferably, in the machining device, the chuck table has a transparent member on a holding surface that holds the workpiece, the camera has a first camera near the machining unit and a second camera farther from the machining unit than the first camera in positions sandwiching the transparent member, the control unit further has a coordinate storage section that stores a positional offset of the first and second cameras using X and Y coordinates with the second camera positioned in an area photographed by the first camera, and the control unit positions the second camera in the area photographed by the first camera based on the X and Y coordinates stored in the coordinate storage section.

[0009] Preferably, in the machining device, a display unit is further provided that displays a first image photographed by the first camera and a second image photographed by the second camera, and the first and second images are displayed on the display unit in a state in which the machining feed direction of one of the first and second images is reversed, or the first and second images are displayed side by side.

[0010] According to another aspect of the present application, there is provided a machining device, wherein the machining device includes: a holding unit having a rotatable chuck table that holds a workpiece; a machining unit that machines the workpiece held by the chuck table; a machining feed unit that feeds the holding unit in an X-axis direction; an indexing feed unit that indexes the machining unit in a Y-axis direction; a camera that photographs the workpiece held by the chuck table, and is movable in the Y-axis direction; and a control unit that controls each component, the machining feed unit moves the holding unit along a guide rail between a machining region where the workpiece is machined by the machining unit and a photographing region where the workpiece is photographed by the camera at a position that is separated from the machining region by a prescribed distance, the camera has a first camera in the vicinity of the machining unit and a second camera that is farther from the machining unit than the first camera, the control unit has a correction amount calculation section that, after photographing a straight mark of the workpiece or the chuck table by the first camera and adjusting the orientation of the mark to be parallel to the machining feed direction by rotating the chuck table, moves the chuck table to the photographing region and photographs the mark by the second camera, and calculates a correction value or a correction angle in the Y-axis direction based on the X and Y coordinates of two points of the mark that are separated in the machining feed direction, and indexes the camera or rotates the chuck table based on the correction value when photographing while machining feeding the chuck table in the photographing region.

[0011] Preferably, in the machining device, the chuck table has a transparent member on a holding surface that holds the workpiece, the first camera and the second camera are provided at positions that sandwich the transparent member and are upper and lower, the control unit further has a coordinate storage section that stores the positional offset of the first camera and the second camera using X and Y coordinates with the second camera positioned in the region photographed by the first camera, and the control unit positions the second camera in the region photographed by the first camera based on the X and Y coordinates stored in the coordinate storage section.

[0012] Preferably, in the machining device, there is further provided a display unit that displays a first image photographed by the first camera and a second image photographed by the second camera, and the first image and the second image are displayed on the display unit in a state where the machining feed direction of one of the first image and the second image is flipped and the first image and the second image are overlaid or displayed side by side.

[0013] The present application has an effect of being able to suppress an increase in cost and to suppress a decrease in machining precision. BRIEF DESCRIPTION OF DRAWINGS

[0014] Figure 1is a perspective view showing a part of the processing apparatus of the first embodiment.

[0015] Figure 2 is a perspective view of a workpiece that is a processing target of the processing apparatus shown in Figure 1

[0016] Figure 3 is a perspective view showing a part of the processing apparatus of the first embodiment. Figure 1

[0017] Figure 4 is a plan view schematically showing a processing region and a photographing region of the processing apparatus shown in Figure 1

[0018] Figure 5 is a view showing an example of a first image and a second image displayed by the display unit of the processing apparatus shown in Figure 1

[0019] Figure 6 is a view showing another example of a first image and a second image displayed by the display unit of the processing apparatus shown in Figure 1

[0020] Figure 7 is a perspective view of a workpiece on which a cutting groove is to be formed when a correction amount is calculated by the correction amount calculation section of the processing apparatus shown in Figure 1

[0021] Figure 8 is a plan view schematically showing a state in which a cutting groove is made on the workpiece shown in Figure 1 Figure 7

[0022] Figure 9 is a plan view schematically showing a state in which a cutting groove is made on the workpiece shown in Figure 1 Figure 7

[0023] Figure 10 is a view showing a first image obtained by the first camera of the processing apparatus shown in Figure 1

[0024] Figure 11 is a view showing a first image obtained by the first camera of the processing apparatus shown in Figure 1

[0025] Figure 12 Figure 1 ​​​​​​​​​​​​​The correction amount calculation section of the processing apparatus shown below is a plan view of the machined object in a state in which the machined object in which the cutting groove is formed is moved to the imaging region.

[0026] Figure 13 is a view from below Figure 12 is a plan view of the machined object of the imaging region shown.

[0027] Figure 14 is a view showing Figure 1 is a view of a second image obtained by the second camera of the processing apparatus shown below imaging one end portion of the cutting groove.

[0028] Figure 15 is a view showing Figure 1 is a view of a second image obtained by the second camera of the processing apparatus shown below imaging the other end portion of the cutting groove.

[0029] Figure 16 is a view showing Figure 1 is a view of a state in which the display unit of the processing apparatus shown below displays the first image and the second image side by side.

[0030] Figure 17 is a view showing Figure 1 is a view of a state in which the display unit of the processing apparatus shown below displays the first image and the second image superimposed.

[0031] Figure 18 is a perspective view showing a structure of a part of the processing apparatus of the second embodiment.

[0032] Figure 19 is a perspective view showing Figure 18 is a perspective view of the holding unit and the second camera of the processing apparatus shown below.

[0033] Figure 20 is a perspective view showing a state in which Figure 2 is a perspective view of a state in which the tape is attached to the back surface of the machined object shown below.

[0034] Explanation of Reference Signs

[0035] 1.1-2: Processing device; 3: Processing area; 4: Specified distance; 5: Shooting area; 10: Holding unit; 12: Chuck table; 20: Cutting unit (processing unit); 30: Processing feed unit; 33: Guide rail; 40: Indexing feed unit; 50: Camera; 51: First camera; 52: Second camera; 61: Marker; 100: Control unit; 101: Correction amount calculation unit; 103: Coordinate storage unit; 110: Display unit Element; 123: transparent component; 124: holding surface; 200, 200-1: workpiece; 208: mark; 301, 301-2, 301-3, 301-4, 301-5: first image; 302, 302-2, 302-3, 302-4, 302-5: second image; 400: cutting groove (machining mark); 402, 403: two end portions (two points); X: machining feed direction; Y: indexing feed direction. DETAILED DESCRIPTION

[0036] The following describes embodiments of the present invention with reference to the accompanying drawings. The present invention is not limited to the contents described in the following embodiments. In addition, the constituent elements described below include those that can be easily imagined by those skilled in the art and are substantially the same. In addition, the structures described below can be appropriately combined. In addition, various omissions, replacements, or changes in the structure can be made within the scope of the present invention.

[0037] [First embodiment]

[0038] A processing apparatus according to a first embodiment of the present invention will be described with reference to the accompanying drawings. Figure 1 It is a perspective view showing a part of the processing device according to the first embodiment. Figure 2 As Figure 1 A perspective view of a workpiece to be processed by the processing device shown. Figure 3 It shows Figure 1 A perspective view of the holding unit and the second camera of the processing device shown. Figure 4 It is schematically shown Figure 1 A top view of the processing area and the imaging area of ​​the processing device is shown. Figure 5 It shows Figure 1 FIG. 1 is a diagram showing an example of a first image and a second image displayed on a display unit of a processing device shown. Figure 6 It shows Figure 1 FIG. 2 is a diagram showing another example of the first image and the second image displayed on the display unit of the processing device shown. Figure 7 is Figure 1 The illustrated perspective view of a workpiece on which a cut groove is to be formed when a correction amount calculation unit of a machining device calculates a correction amount.

[0039] The processing device 1 of the first embodiment isFigure 2 The machining device shown in FIG. 1 is a cutting device that cuts (equivalent to machines) the workpiece 200 shown. Figure 1 The workpiece 200 that is the machining object of the machining device 1 shown is a wafer such as a semiconductor wafer or an optical device wafer that includes a substrate 201 made of silicon, sapphire, gallium arsenide, or SiC (silicon carbide), or the like. The workpiece 200 has a device 204 formed on a front surface 202 of the substrate 201 in an area divided in a lattice shape by a plurality of division lines 203.

[0040] The device 204 is, for example, an integrated circuit such as an IC (Integrated Circuit) or an LSI (Large Scale Integration), an image sensor such as a CCD (Charge Coupled Device) or a CMOS (Complementary Metal Oxide Semiconductor). In the first embodiment, the workpiece 200 has a metal film 206 formed on a back surface 205 on the back surface side of the front surface 202 of the substrate 201. The workpiece 200 has the metal film 206 formed on the back surface 205, and therefore even if the workpiece 200 is imaged from the back surface 205 side by an infrared camera, the division lines 203 cannot be detected.

[0041] In addition, the workpiece 200 has a key pattern 207 formed on the device 204 that is a detection object at the time of alignment, that is, at the time of alignment of the workpiece 200 with the cutting tool 21 of the machining device 1. As the key pattern 207, for example, a characteristic portion of a circuit in the device 204 is used. In the first embodiment, the key pattern 207 is formed in a cross shape constituted by two straight line-shaped marks 208, 209 that are parallel to the division lines 203 and cross each other. In the first embodiment, the workpiece 200 is supported by the annular frame 210 with the front surface 202 attached to the tape 211 having the annular frame 210 attached to the outer periphery, with the metal film 206 on the back surface 205 side facing upward.

[0042] Figure 1 The machining device 1 shown is a cutting device that cuts (equivalent to machines) the workpiece 200 shown. Figure 1As shown, the machining device 1 is configured to include: a holding unit 10; a cutting unit 20; a machining feed unit 30 that feeds the holding unit 10 in an X-axis direction (machining feed direction) parallel to the horizontal direction; an index feed unit 40 that indexes the cutting unit 20 in a Y-axis direction (index feed direction) parallel to the horizontal direction and perpendicular to the X-axis direction; a plunge feed unit (not shown) that plunges the cutting unit 20 in a Z-axis direction perpendicular to both the X-axis direction and the Y-axis direction; a camera 50; and a control unit 100.

[0043] As shown, the holding unit 10 has: a housing 11 that moves in the X-axis direction by the machining feed unit 30; a chuck table 12 that is provided on the housing 11 in a rotatable manner; and a rotation unit 13 that rotates the chuck table 12 about an axis parallel to the Z-axis direction. Figure 1 Figure 3 As shown, the holding unit 10 has: a housing 11 that moves in the X-axis direction by the machining feed unit 30; a chuck table 12 that is provided on the housing 11 in a rotatable manner; and a rotation unit 13 that rotates the chuck table 12 about an axis parallel to the Z-axis direction.

[0044] The chuck table 12 holds the workpiece 200 on a holding surface 124 and is rotatable about an axis parallel to the Z-axis direction. The chuck table 12 is formed in a disc shape, has a frame 122 in which a recess 121 is provided in the center of an upper surface, and a transparent member 123 in the shape of a circular plate that is fitted into the recess 121 of the frame 122.

[0045] The frame 122 is composed of a metal such as stainless steel and is rotated about an axis parallel to the Z-axis direction by the rotation unit 13. The transparent member 123 is composed of a transparent material such as quartz glass, borosilicate glass, sapphire, calcium fluoride, lithium fluoride, magnesium fluoride, and the like, and an upper surface in which a large number of fine holes (not shown) are opened serves as the holding surface 124. The front surface 202 side of the workpiece 200 is placed on the holding surface 124 with the tape 211 interposed therebetween.

[0046] The chuck table 12 is connected to a vacuum suction source (not shown) through a space inside the recess 121 and holds the workpiece 200 placed on the holding surface 124 by suction by the vacuum suction source. In the first embodiment, the chuck table 12 holds the front surface 202 side of the workpiece 200 with the tape 211 interposed therebetween. In the first embodiment, when the workpiece 200 is held by the chuck table 12, the tape 211 and the annular frame 210 project to the outer peripheral side of the chuck table 12.

[0047] ​The rotation unit 13 rotates the chuck table 12 around an axis parallel to the Z-axis direction. The rotation unit 13 rotates the chuck table 12 around the axis in a range of more than 180 degrees and less than 360 degrees. The rotation unit 13 is provided to the housing 11 that is subjected to machining feed in the X-axis direction by the machining feed unit 30. The rotation unit 13 has a motor 131 fixed to a side surface of the housing 11, a pulley 132 coupled to an output shaft of the motor 131, and a transmission belt 133 wound around an outer periphery of the chuck table 12 and rotated around the axis by the pulley 132. When the motor 131 of the rotation unit 13 is rotated, the chuck table 12 is rotated around the axis by the pulley 132 and the transmission belt 133. In addition, in the first embodiment, the rotation unit 13 is capable of rotating the chuck table 12 by 220 degrees in one direction around the axis and the other direction opposite to the one direction.

[0048] The cutting unit 20 is a machining unit that cuts the workpiece 200 held by the chuck table 12 with the cutting tool 21. The cutting unit 20 is disposed so as to be movable in the Y-axis direction by the indexing feed unit 40 and so as to be movable in the Z-axis direction by the plunge feed unit with respect to the workpiece 200 held by the chuck table 12. The cutting unit 20 is disposed to the support frame erected from the device main body 2 by the indexing feed unit 40 and the plunge feed unit.

[0049] The cutting unit 20 is capable of positioning the cutting tool 21 at any position of the holding surface 124 of the chuck table 12 by the indexing feed unit 40 and the plunge feed unit. The cutting unit 20 has the cutting tool 21, a spindle housing 22 disposed so as to be movable in the Y-axis direction and the Z-axis direction by the indexing feed unit 40 and the plunge feed unit, and a spindle 23 disposed in the spindle housing 22 so as to be rotatable around an axis and rotated by a motor, and the cutting tool 21 is attached to a front end thereof.

[0050] The cutting tool 21 is an extremely thin cutting abrasive having a substantially ring shape. In the first embodiment, the cutting tool 21 is a so-called hub cutter having a circular ring-shaped circular base and a circular ring-shaped cutting edge provided to an outer periphery of the circular base to cut the workpiece 200. The cutting edge is composed of abrasive grains such as diamond or CBN (Cubic Boron Nitride) and a bonding material such as metal or resin, and formed in a prescribed thickness. In addition, in the present application, the cutting tool 21 can be a so-called washer cutter composed of only the cutting edge.

[0051] The spindle 23 is rotated around the axis by the motor, thereby rotating the cutting tool 21 around the axis. In addition, the cutting tool 21 and the axis of the spindle 23 of the cutting unit 20 are parallel to the Y-axis direction.

[0052] The processing feed unit 30 moves the chuck table 12 and the cutting unit 20 relative to each other in the X-axis direction. In the first embodiment, the chuck table 12 is moved in the X-axis direction. Thus, in the present invention, processing feed refers to moving the chuck table 12 in the X-axis direction. Figure 1 and Figure 3 As shown, the processing feed unit 30 includes: a well-known ball screw 31 rotatable about its axis; a well-known pulse motor 32 for rotating the ball screw 31 about its axis; and a well-known guide rail 33 for supporting the housing 11 so that it can move freely in the X-axis direction. The ball screw 31 and the guide rail 33 are parallel to the X-axis direction.

[0053] The processing feed unit 30 uses the housing 11 to move the holding unit 10 along the guide rail 33 in the processing area 3 ( Figure 4 ) and at a predetermined distance 4 from the processing area 3 along the X-axis direction ( Figure 4 The photographing area 5 (shown) is used to photograph the workpiece 200 using the camera 50. Figure 4 Move between the

[0054] In the first embodiment, the processing area 3 includes the X-axis direction of the workpiece 200 held by the chuck table 12 by the cutting unit 20. Figure 4 The position of the chuck table 12 when cutting the right end ( Figure 4 The solid line in the middle) and the X-axis direction of the workpiece 200 held by the chuck table 12 by the cutting unit 20 Figure 4 The position of the chuck table 12 when cutting the other end on the left side ( Figure 4 The shooting area 5 is from the processing area 3 to the Figure 4 The image is captured in an area 4 meters to the right of the center. Furthermore, processing area 3 is a guaranteed range within which the linearity of the chuck table 12 based on the guide rail 33 maintains the required accuracy for separating the workpiece 200 into individual components 204. Imaging area 5 is a non-guaranteed range within which the linearity of the chuck table 12 based on the guide rail 33 does not maintain the required accuracy for separating the workpiece 200 into individual components 204. The linearity of the chuck table 12 based on the guide rail 33 refers to the degree to which the movement trajectory of the chuck table, achieved by the guide rail 33, deviates from the X-axis direction.

[0055] The indexing feed unit 40 moves the chuck table 12 and the cutting unit 20 relative to each other in the Y-axis direction. In the first embodiment, the indexing feed unit 40 moves the cutting unit 20 in the Y-axis direction. The plunge feed unit moves the chuck table 12 and the cutting unit 20 relative to each other in the Z-axis direction. In the first embodiment, the plunge feed unit moves the cutting unit 20 in the Z-axis direction. The indexing feed unit 40 and the plunge feed unit include: a conventional ball screw rotatable about its axis; a conventional pulse motor for rotating the ball screw about its axis; and a conventional guide rail for supporting the cutting unit 20 so that it can move freely in the Y-axis direction or the Z-axis direction.

[0056] The camera 50 captures the workpiece 200 held by the chuck table 12 and is movable in the Y-axis direction. Figure 1 As shown, the camera 50 includes a first camera 51 provided near the cutting unit 20 and a second camera 52 located farther from the cutting unit 20 than the first camera 51 , at upper and lower positions with the transparent member 123 interposed therebetween.

[0057] The first camera 51 captures an image of the workpiece 200 held by the chuck table 12 from a position above the holding surface 124. In the first embodiment, the first camera 51 is fixed to the spindle housing 22 of the cutting unit 20 so as to move integrally with the cutting unit 20 and is positioned near the cutting unit 20. Furthermore, the first camera 51 is fixed to the spindle housing 22 of the cutting unit 20 so as to be movable in the Y-axis direction via the indexing feed unit 40. In the first embodiment, the first camera 51 is positioned so that the center of the imaging range is aligned with the cutting tool 21 in the X-axis direction.

[0058] The first camera 51 has an imaging element for imaging the workpiece 200 held by the holding unit 10 in the processing area 3 as the guaranteed range from above. Therefore, the first camera 51 is set in the guaranteed range. The imaging element is, for example, a CCD (Charge-Coupled Device) imaging element or a CMOS (Complementary MOS) imaging element. The first camera 51 images the workpiece 200 held by the chuck table 12 from above and displays the first image 301 ( Figure 5 and Figure 6 as shown) is output to the control unit 100.

[0059] The second camera 52 takes an image of the workpiece 200 held by the chuck table 12 from a position below the holding surface 124 across the holding surface 124. In the first embodiment, the second camera 52 is arranged below the feed unit 30. Figure 1The second camera 52 is disposed on a moving plate 54 that moves in the Y-axis direction by a Y-axis moving unit 53 provided on the device main body 2, and is thus movable in the Y-axis direction by the Y-axis moving unit 53. The second camera 52 is movable in the Z-axis direction by a Z-axis moving unit 55 provided on the moving plate 54.

[0060] The Y-axis moving unit 53 and the Z-axis moving unit 55 have a known ball screw provided so as to be rotatable about an axis, a known pulse motor that rotates the ball screw about the axis, and a known guide rail that supports the moving plate 54 or the second camera 52 so as to be movable in the Y-axis direction or the Z-axis direction.

[0061] The second camera 52 has a photographing element that photographs the workpiece 200 held by the holding unit 10 in the photographing region 5 that is the non-guaranteed range, through the transparent member 123 from below. Therefore, the second camera 52 is disposed in the non-guaranteed range. The photographing element is, for example, a CCD (Charge-Coupled Device) photographing element or a CMOS (Complementary MOS) photographing element. The second camera 52 photographs the workpiece 200 held by the chuck table 12, through the transparent member 123 from below, and outputs a second image 302 (shown in FIG. 3) obtained by the photographing to the control unit 100. In the first embodiment, the second image 302 is also used to perform the alignment. Figure 5 and Figure 6

[0062] The control unit 100 controls each of the above-described components of the processing device 1 to cause the processing device 1 to perform a processing operation on the workpiece 200. The control unit 100 is a computer that has an arithmetic processing device having a microprocessor such as a CPU (central processing unit), a storage device having a memory such as a ROM (read only memory) or a RAM (random access memory), and an input / output interface device. The arithmetic processing device of the control unit 100 performs an arithmetic processing operation in accordance with a computer program stored in the storage device, and outputs a control signal for controlling the processing device 1 to each of the above-described components of the processing device 1 via the input / output interface device.

[0063] ​The processing device 1 is also connected to a display unit 110, which is connected to the control unit 100 and is composed of a liquid crystal display device or the like that displays the status of the processing operation or images, and an input unit, which is connected to the control unit 100 and is used when the operator registers processing content information, etc. In the first embodiment, the input unit is composed of at least one of an external input device such as a touch panel and a keyboard provided on the display unit 110.

[0064] The display unit 110 displays the first image 301 captured by the first camera 51 and the second image 302 captured by the second camera 52 on the display screen. The control unit 100 receives the operator's operation via the input unit, and the display unit 110 displays the first image 301 captured by the first camera 51 and the second image 302 captured by the second camera 52 on the display screen. Figure 5 The first image 301 and the second image 302 are displayed side by side in the X-axis direction as shown, or as Figure 6 As shown, the first image 301 and the second image 302 are displayed overlapping each other.

[0065] Furthermore, when displaying the first image 301 and the second image 302, the display unit 110 displays one of the first image 301 and the second image 302 in a state in which the image is flipped in the X-axis direction. Furthermore, flipping one of the first image 301 and the second image 302 in the X-axis direction means that both the first image 301 and the second image 302 are images obtained by photographing the workpiece 200 held by the chuck table 12 from above, or images obtained by photographing the workpiece 200 held by the chuck table 12 from below. In the first embodiment, the display unit 110 displays both the first image 301 and the second image 302 on the display screen in a state in which the image is obtained by photographing the workpiece 200 held by the chuck table 12 from above. In the first embodiment, the display unit 110 can display the images 301 and 302 side by side in the X-axis direction and can display the images 301 and 302 superimposed on each other. However, in the present invention, it is sufficient to be able to display at least one of the two.

[0066] The machining apparatus 1 also includes an X-axis position detection unit for detecting the X-axis position of the chuck table 12; a Y-axis position detection unit for detecting the Y-axis position of the cutting unit 20; a Z-axis position detection unit for detecting the Z-axis position of the cutting unit 20; and an angle detection unit for detecting the rotation angle of the chuck table 12 about its axis. The X-axis position detection unit and the Y-axis position detection unit may include a linear scale parallel to the X-axis or Y-axis direction, and a reading head that is movable in the X-axis or Y-axis direction by the machining feed unit or the indexing feed unit 140 and reads the graduations of the linear scale. The Z-axis position detection unit may be configured to detect the Z-axis position of the cutting unit 20 using the pulse count of a pulse motor that rotates the ball screw about its axis. Furthermore, the machining apparatus 1 includes a second Y-axis position detection unit for detecting the Y-axis position of the second camera 52. Each detection unit outputs the detection result to the control unit 100 .

[0067] In addition, the control unit 100 includes a correction amount calculation unit 101 that calculates the correction amount. Figure 7 The chuck table 12 that attracts and holds the workpiece 200 (hereinafter referred to as 200-1) is moved in the X-axis direction from the processing area 3 toward the imaging area 5, and the cutting unit 20 forms a cutting groove 400 ( Figure 4 、 Figure 8 and Figure 9 ); a coordinate calculation unit 102, which detects the cutting groove 400 based on the first image 301 and the second image 302 and calculates the X coordinate and Y coordinate of the center 401 of the cutting groove 400; a coordinate storage unit 103, which stores the X coordinate and Y coordinate of the center 401 of the cutting groove 400 of the images 301 and 302 calculated by the coordinate calculation unit 102; an image control unit 104; and a shooting range control unit 105.

[0068] In the first embodiment, Figure 7 The workpiece 200-1 shown is a so-called dummy wafer consisting only of a substrate 201, with no device 204 formed on the front surface 202 and no metal film 206 formed on the back surface 205. The same reference numerals are given to the same parts of the workpiece 200-1 as those of the workpiece 200 to be processed by the processing apparatus 1, and their description is omitted. The workpiece 200-1 is similar to the workpiece 200 to be processed by the processing apparatus 1, as shown in FIG. Figure 7As shown, the front surface 202 is attached to a belt 211 having an annular frame 210 mounted on its outer periphery, supported by the annular frame 210, and held by suction on the chuck table 12. Furthermore, the cutting groove 400 penetrates the substrate 201 of the workpiece 200 from the back surface 205 to the front surface 202, and the processing area 3 is a guaranteed range, so the cutting groove 400 is formed linearly along the X-axis direction.

[0069] The coordinate calculation unit 102 extracts the cut groove 400 based on the images 301 and 302 captured by the cameras 51 and 52. The coordinate calculation unit 102 calculates the X-axis direction X-coordinate and the Y-axis direction Y-coordinate of the center 401 of the cut groove 400 in the first image 301 based on the detection results of the X-axis direction position detection unit and the Y-axis direction position detection unit. Furthermore, the coordinate calculation unit 102 calculates the X-axis direction X-coordinate and the Y-axis direction Y-coordinate of the center 401 of the cut groove 400 in the second image 302 based on the detection results of the X-axis direction position detection unit and the second Y-axis direction position detection unit. In the first embodiment, the coordinate calculation unit 102 represents the X coordinate using the distance in the X-axis direction from a predetermined reference position on the holding surface 124, and represents the Y coordinate using the distance in the Y-axis direction from the predetermined reference position on the holding surface 124.

[0070] In addition, the shooting area 5 is a non-guaranteed range, so the image extracted from the second image 302 Figure 13 The cut groove 400 shown by the solid line is the same as the cut groove 400 extracted from the first image 301 when viewed from above. Figure 13 The cut groove 400 indicated by the middle dotted line is inclined. Therefore, each position in the first image 301 captured by the first camera 51 and each position in the second image 302 captured by the second camera 52 are offset in the X-axis direction and the Y-axis direction.

[0071] The correction amount calculation unit 101, the coordinate calculation unit 102, the coordinate storage unit 103, and the image control unit 104 perform a correction amount calculation operation to calculate the correction amount for each position in the first image 301 captured by the first camera 51 and each position in the second image 302 captured by the second camera 52. This allows the first camera 51 and the second camera 52 to capture the same position of the workpiece 200 held by the chuck table 12. Furthermore, this correction amount calculation operation is performed at the time of factory shipment of the processing apparatus 1 or at regular intervals thereafter (e.g., every year).

[0072] Next, the calculation operation of the correction amount will be described while describing each component of the control unit 100 . Figure 8 It is schematically shown Figure 1 The correction amount calculation unit of the processing device shown is Figure 7A plan view of a state in which a cutting groove is made on a workpiece. Figure 9 is a plan view schematically showing Figure 1 A correction amount calculating section of the processing device shown in Figure 7 A plan view of a state in which a cutting groove is made on a workpiece. Figure 10 is a plan view schematically showing Figure 1 is a view of a first image obtained by the first camera of the processing device shown in Figure 11 is a view of a first image obtained by the first camera of the processing device shown in Figure 1 is a view of a first image obtained by the first camera of the processing device shown in Figure 12 is a plan view schematically showing Figure 1 is a plan view of a state in which the workpiece on which the cutting groove is formed is moved to a photographing region by the correction amount calculating section of the processing device shown in Figure 13 is a plan view of a state in which the workpiece on which the cutting groove is formed is moved to a photographing region by the correction amount calculating section of the processing device shown in Figure 12 is a plan view of a workpiece in a photographing region. Figure 14 is a plan view schematically showing Figure 1 is a view of a second image obtained by the second camera of the processing device shown in Figure 15 is a view of a second image obtained by the second camera of the processing device shown in Figure 1 is a view of a second image obtained by the second camera of the processing device shown in Figure 16 is a view of a second image obtained by the second camera of the processing device shown in Figure 1 is a view of a state in which the display unit of the processing device shown in Figure 17 is a view of a state in which the display unit of the processing device shown in Figure 1 is a view of a state in which the display unit of the processing device shown in

[0073] In the correction amount calculating operation, the operator places the workpiece 200 on the holding surface 124 of the chuck table 12 of the holding unit 10 through the belt 211. Then, the processing device 1 starts the correction amount calculating operation when the control unit 100 accepts a start instruction from the operator.

[0074] In the correction amount calculating operation, the control unit 100 rotates the cutting tool 21 of the cutting unit 20 and attracts and holds the workpiece 200 on the holding surface 124 of the chuck table 12 of the holding unit 10 through the belt 211. The correction amount calculating section 101 moves the chuck table 12 in the X-axis direction from the processing region 3 to the photographing region 5 via the position shown by the dotted line and makes the cutting tool 21 cut into the position reaching the belt 211. Figure 8 In the correction amount calculating operation, the control unit 100 rotates the cutting tool 21 of the cutting unit 20 and attracts and holds the workpiece 200 on the holding surface 124 of the chuck table 12 of the holding unit 10 through the belt 211. The correction amount calculating section 101 moves the chuck table 12 in the X-axis direction from the processing region 3 to the photographing region 5 via the position shown by the dotted line and makes the cutting tool 21 cut into the position reaching the belt 211. Figure 8 and Figure 9The cutting groove 400 shown is photographed by the first camera 51 at predetermined positions of both end portions 402, 403 of the manufactured cutting groove 400.

[0075] The correction amount calculating section 101 calculates the correction amount after the cutting groove 400 shown is manufactured. Figure 9 After the cutting groove 400 shown is manufactured, the first camera 51 photographs one end portion 402 of the cutting groove 400 to obtain the first image 301 shown. Figure 10 The first image 301 shown (hereinafter indicated by reference numeral 301-2) and the first camera 51 photographs the other end portion 403 of the cutting groove 400 to obtain the first image 301 shown. Figure 11 The first image 301 shown (hereinafter indicated by reference numeral 301-3).

[0076] The coordinate calculating section 102 calculates the X coordinate (Xl) and Y coordinate (Yl) of the center 401 of the cutting groove 400 of the first image 301-2, and the coordinate storing section 103 stores the coordinates (Xl, Yl) of the center 401 of the cutting groove 400 of the first image 301-2. The coordinate calculating section 102 calculates the X coordinate (X2) and Y coordinate (Yl) of the center 401 of the cutting groove 400 of the first image 301-3, and the coordinate storing section 103 stores the coordinates (X2, Yl) of the center 401 of the cutting groove 400 of the first image 301-3. In this way, the coordinate calculating section 102 calculates and the coordinate storing section 103 stores the coordinates (Xl, Yl) of the center 401 of one end portion 402 of the cutting groove 400 in the processing region 3 and the coordinates (X2, Yl) of the center 401 of the other end portion 403 of the cutting groove 400 in the processing region 3.

[0077] When the chuck table 12 is moved as described above, the chuck table 12 approaches the photographing region 5 as shown by the broken line in FIG. 5. The correction amount calculating section 101 causes the chuck table 12 to further move toward the photographing region 5 after the chuck table 12 approaches the photographing region 5 as shown by the broken line in FIG. 5, and photographs predetermined positions (the same positions as the photographing positions of the first camera 51) of both end portions 402, 403 of the cutting groove 400 shown. Figure 8 Figure 12 The correction amount calculating section 101 causes the chuck table 12 to further move toward the photographing region 5 after the chuck table 12 approaches the photographing region 5 as shown by the broken line in FIG. 5, and photographs predetermined positions (the same positions as the photographing positions of the first camera 51) of both end portions 402, 403 of the cutting groove 400 shown. Figure 13 The correction amount calculating section 101 obtains the second image 302 shown (hereinafter indicated by reference numeral 302-2) by photographing one end portion 402 of the cutting groove 400 by the second camera 52 and the second image 302 shown (hereinafter indicated by reference numeral 302-3) by photographing the other end portion 403 of the cutting groove 400 by the second camera 52. Figure 14 The correction amount calculating section 101 obtains the second image 302 shown (hereinafter indicated by reference numeral 302-2) by photographing one end portion 402 of the cutting groove 400 by the second camera 52 and the second image 302 shown (hereinafter indicated by reference numeral 302-3) by photographing the other end portion 403 of the cutting groove 400 by the second camera 52. Figure 15 The correction amount calculating section 101 obtains the second image 302 shown (hereinafter indicated by reference numeral 302-2) by photographing one end portion 402 of the cutting groove 400 by the second camera 52 and the second image 302 shown (hereinafter indicated by reference numeral 302-3) by photographing the other end portion 403 of the cutting groove 400 by the second camera 52.

[0078] ​The coordinate calculating section 102 calculates the X coordinate (Xl) and the Y coordinate (Y2) of the center 401 of the cutting groove 400 of the second image 302-2, and the coordinate storing section 103 stores the coordinates (Xl, Y2) of the center 401 of the cutting groove 400 of the second image 302-2. The coordinate calculating section 102 calculates the X coordinate (X2) and the Y coordinate (Y3) of the center 401 of the cutting groove 400 of the second image 302-3, and the coordinate storing section 103 stores the coordinates (X2, Y3) of the center 401 of the cutting groove 400 of the second image 302-3. In this way, the coordinate calculating section 102 calculates and the coordinate storing section 103 stores the coordinates (Xl, Y2) of the center 401 of one end portion 402 of the cutting groove 400 and the coordinates (X2, Y3) of the center 401 of the other end portion 403 of the cutting groove 400 in the photographing region 5.

[0079] The correction amount calculating section 101 calculates the angle θ of the cutting groove 400 shown by the solid line in FIG. 6 and the cutting groove 400 extracted from the first image 301 shown by the broken line in FIG. 6, based on the above-mentioned coordinates (Xl, Yl), (X2, Yl), (Xl, Y2), and (X2, Y3). Specifically, the angle θ is calculated by the following formula 1. Figure 13 Figure 13

[0080] θ = tan -1 {(Y3 - Y2) / (X2 - Xl)}... Formula 1

[0081] The correction amount calculating section 101 stores the angle θ calculated by the formula 1 as a correction value, that is, a correction angle of the chuck table 12, in the coordinate storing section 103.

[0082] In addition, the correction amount calculating section 101 calculates the difference in the Y coordinate of the same position (position having the same X coordinate) on the holding surface 124 of the machining region 3 and the photographing region 5, based on the above-mentioned coordinates (Xl, Yl), (X2, Yl), (Xl, Y2), and (X2, Y3). Specifically, at the position of the coordinate (Xl), the difference in the Y coordinate is calculated as (Y2 - Yl), and at the position of the coordinate (X2), the difference in the Y coordinate is calculated as (Y3 - Yl). Furthermore, the difference in the Y coordinate at each position between the coordinate (Xl) and the coordinate (X2) is calculated using the above-mentioned difference in the Y coordinate (Y2 - Yl), the difference in the Y coordinate (Y3 - Yl), and the above-mentioned angle θ.

[0083] ​​The correction amount calculation section 101 stores the difference in Y coordinates (Y2-Y1), the difference in Y coordinates (Y3-Y1), and the difference in Y coordinates at each position between the coordinates (X1) and the coordinates (X2) as the correction value in the Y-axis direction in the imaging area 5 in the coordinate storage section 103. That is, the correction amount calculation section 101 calculates the correction value in the Y-axis direction in the imaging area 5 and the correction angle of the chuck table 12 based on the phenomenon that the second prescribed value (mm) is shifted in the Y-axis direction when the first prescribed value (mm) is machined in the X-axis direction, and stores it in the coordinate storage section 103.

[0084] Thus, the correction amount calculation section 101 calculates the correction value in the Y-axis direction in the imaging area 5 and the correction angle of the chuck table 12 based on the Y coordinates (Y1), (Y2), (Y3), etc. of the center 401 of the cutting groove 400 of the two end portions 402, 403 that are two points separated in the X-axis direction by the cutting groove 400, and stores it in the coordinate storage section 103. Also, in the first embodiment, the correction amount calculation section 101 calculates both the correction value in the Y-axis direction and the correction angle of the chuck table 12 and stores it in the coordinate storage section 103, but in the present application, at least one of them is calculated and stored.

[0085] Also, the second camera 52 is positioned below the area imaged by the first camera 51, that is, the two end portions 402, 403 of the cutting groove 400, and images it, and the coordinate storage section 103 stores the difference in Y coordinates (Y2-Y1) at the coordinates (X1), the difference in Y coordinates (Y3-Y1) at the coordinates (X2), and the difference in Y coordinates at each position between the coordinates (X1) and the coordinates (X2) calculated by the correction amount calculation section 101, thereby storing the positional shift of the imaging range of the first camera 51 and the imaging range of the second camera 52 using the X coordinates and the Y coordinates. Thus, the difference in Y coordinates (Y2-Y1) at the coordinates (X1), the difference in Y coordinates (Y3-Y1) at the coordinates (X2), and the difference in Y coordinates at each position between the coordinates (X1) and the coordinates (X2) indicate the positional shift of the imaging range of the first camera 51 and the imaging range of the second camera 52 using the X coordinates and the Y coordinates.

[0086] Also, in the correction amount calculation operation, the image control section 104 accepts the operation of the operator via the input unit, outputs a control signal according to the operation of the operator to the display unit 110, and displays the first image 301 and the second image 302 on the display unit 110 as shown in FIG. 10, side by side in the X-axis direction, or as shown in FIG. 11, overlapping each other. Figure 16 Figure 17 Also, in the correction amount calculation operation, the image control section 104 accepts the operation of the operator via the input unit, outputs a control signal according to the operation of the operator to the display unit 110, and displays the first image 301 and the second image 302 on the display unit 110 as shown in FIG. 10, side by side in the X-axis direction, or as shown in FIG. 11, overlapping each other. Figure 16 Figure 17 ​​An example is shown in which the display unit 110 displays the images 301-3, 302-3 of the other end portion 403. The control action of the correction amount ends when the coordinate storage unit 103 stores the correction value in the Y-axis direction and the correction angle of the chuck table 12.

[0087] The photographing range control unit 105 performs alignment in order to perform photographing of the workpiece 200 held by the chuck table 12 with the second camera 52 during the machining action of the machining device 1, and corrects the position in the Y-axis direction of the second camera 52 by controlling the Y-axis moving unit 53 in accordance with the correction value in the Y-axis direction stored in the coordinate storage unit 103 when the chuck table 12 is moved in the photographing area 5 in the X-axis direction in a manner that the second camera 52 can photograph the same position as the first camera 51 of the workpiece 200. Alternatively, the photographing range control unit 105 performs alignment, and corrects the position in the Y-axis direction of the second camera 52 by controlling the rotation unit 13 in accordance with the correction angle of the chuck table 12 stored in the coordinate storage unit 103 when the chuck table 12 is moved in the photographing area 5 in the X-axis direction in a manner that the second camera 52 can photograph the same position as the first camera 51 of the workpiece 200.

[0088] Specifically, the photographing range control unit 105 performs alignment, and moves the second camera 52 to the lower side of the arrow 501 in accordance with the stored correction value in the Y-axis direction by controlling the Y-axis moving unit 53 in accordance with the correction value in the Y-axis direction stored in the coordinate storage unit 103 when the chuck table 12 is moved in the photographing area 5 in the X-axis direction in a manner that the same position of the workpiece 200 is located on the upper side of the arrow 501 in the photographing area 5 compared to the machining area 3. Figure 12 Figure 12 Similarly, the photographing range control unit 105 moves the second camera 52 to the upper side of the arrow 501 in accordance with the stored correction value in the Y-axis direction when the correction value in the Y-axis direction stored in the coordinate storage unit 103 at the time of alignment is a value indicating that the same position of the workpiece 200 is located on the lower side of the arrow 501 in the photographing area 5 compared to the machining area 3. Figure 12 Figure 12

[0089] In addition, the photographing range control unit 105 performs alignment, and rotates the chuck table 12 to the arrow 501 side in accordance with the stored correction angle by controlling the rotation unit 13 in accordance with the correction angle of the chuck table 12 stored in the coordinate storage unit 103 when the chuck table 12 is moved in the photographing area 5 in the X-axis direction in a manner that the same position of the workpiece 200 is located on the arrow 501 side in the photographing area 5 compared to the machining area 3. Figure 12 Figure 12 ​​​​Similarly, the imaging range control unit 105, when the correction angle of the chuck table 12 stored in the coordinate storage unit 103 during alignment, indicates that the same position of the workpiece 200 is located in the imaging area 5 compared to the processing area 3. Figure 12 When the value on the arrow 502 side is reached, the chuck table 12 is moved to the correct angle stored in the chuck table. Figure 12 The side of arrow 501 is rotated.

[0090] Furthermore, the imaging range control unit 105 also calibrates the position of the second camera 52 in the Y-axis direction when performing the following notch inspection during the machining operation of the machining apparatus 1. This notch inspection uses the first camera 51 to image the cut groove 400 from above and uses the second camera 52 to image the cut groove 400 from below, thereby determining whether the deviation from the desired position of the cut groove 400 formed in the workpiece 200 and the size of the chipping generated at both edges of the cut groove 400 are within a specified range. The notch inspection is performed at a specified timing, such as each time a specified number of cut grooves 400 are formed or each time a specified number of workpieces 200 are cut.

[0091] When performing the incision inspection, the shooting range control unit 105 uses the difference (Y2-Y1) of the Y coordinate at the coordinate (X1), the difference (Y3-Y1) of the Y coordinate at the coordinate (X2), and the difference of the Y coordinate of each position between the coordinate (X1) and the coordinate (X2) stored in the coordinate storage unit 103 as the position offset between the shooting range of the first camera 51 and the shooting range of the second camera 52, and controls the Y-axis moving unit 53 so that the second camera 52 of the workpiece 200 can shoot the same position as the first camera 51, thereby correcting the position of the second camera 52 in the Y-axis direction.

[0092] Specifically, in order to perform the incision inspection, the shooting range control unit 105 shoots the workpiece 200 with the first camera 51, and when the correction value in the Y-axis direction stored in the coordinate storage unit 103 indicates that the same position of the workpiece 200 is located in the shooting area 5 compared with the processing area 3, Figure 12 When the value on the upper side is set, the Y-axis moving unit 53 is controlled according to the stored correction value in the Y-axis direction to move the second camera 52 to Figure 12 51, and then uses the second camera 52 to photograph the workpiece 200. Similarly, during the incision inspection, the photographing range control unit 105 photographs the workpiece 200 with the first camera 51, and when the correction value in the Y-axis direction stored in the coordinate storage unit 103 indicates that the same position of the workpiece 200 is located in the photographing area 5 compared to the processing area 3, Figure 12 When the value on the lower side is , the second camera 52 is moved to the direction of the Y axis according to the stored correction value. Figure 12The upper side of the workpiece 200 is moved, and then the workpiece 200 is imaged by the second camera 52.

[0093] Further, each function of the correction amount calculation section 101, the coordinate calculation section 102, the image control section 104, and the imaging range control section 105 is realized by an arithmetic processing device executing a computer program stored in a storage device of the control unit 100. The function of the coordinate storage section 103 is realized by a storage device of the control unit 100.

[0094] Next, the machining operation of the machining device 1 will be described. First, in the machining operation, the operator registers machining content information in the control unit 100, and places the workpiece 200 before machining, separated by the belt 211, on the holding surface 124 of the chuck table 12 of the holding unit 10. Then, the machining device 1 starts the machining operation when the control unit 100 receives a start instruction of the machining operation from the operator.

[0095] In the machining operation, the machining device 1 controls each component by the control unit 100, and after attracting and holding the workpiece 200 on the holding surface 124 of the chuck table 12 separated by the belt 211, rotates the cutting tool 21 of the cutting unit 20, moves the chuck table 12 to the imaging area 5, and stops the chuck table 12 in the imaging area 5. The machining device 1 adjusts the position of the Y-axis direction of the second camera 52 and the orientation of the chuck table 12 around the axis by the imaging range control section 105 according to the correction value of the Y-axis direction stored in the coordinate storage section 103 and the correction angle of the chuck table 12.

[0096] In the machining operation, the machining device 1 controls each component by the control unit 100, and images the workpiece 200 on the chuck table 12 from below by the second camera 52, and performs alignment, that is, alignment of the workpiece 200 and the cutting tool 21. In the machining operation, the chuck table 12 and the cutting tool 21 of the cutting unit 20 are relatively moved along the division 203, and the cutting tool 21 is cut into the position reaching the belt 211 on the division 203. The cutting unit 20 cuts the workpiece 200 held by the chuck table 12 along the division 203, and forms a cutting groove on the division 203 of the workpiece 200.

[0097] Further, in the machining operation, the machining device 1 performs a cutout check at a prescribed timing. In the machining operation, when the machining device 1 cuts all the divisions 203 of the workpiece 200, the machining operation is ended.

[0098] The processing apparatus 1 of the first embodiment described above has a correction amount calculation section 101 that calculates a correction value in the Y-axis direction in the photographing region 5 and a correction angle of the chuck table 12, based on coordinates (X1, Y1) and (X2, Y1) of the center 401 of the cutting groove 400 calculated from the first images 301-2, 301-3 obtained by photographing the both end portions 402, 403 of the cutting groove 400 with the first camera 51, and coordinates (X1, Y2) and (X2, Y3) of the center 401 of the cutting groove 400 calculated from the second images 302-2, 302-3 obtained by photographing the both end portions 402, 403 of the cutting groove 400 with the second camera 52.

[0099] In addition, the processing apparatus 1 has a photographing range control section 105 that moves the second camera 52 in the Y-axis direction and rotates the chuck table 12 around the axis, in a manner that the first camera 51 and the second camera 52 photograph the same position of the workpiece 200, based on the correction value in the Y-axis direction and the correction angle of the chuck table 12 calculated by the correction amount calculation section 101, when performing the alignment.

[0100] Further, the processing apparatus 1 positions the second camera 52 in a manner that the first camera 51 and the second camera 52 photograph the same position of the workpiece 200 held by the chuck table 12, when performing the alignment by photographing the workpiece 200 held by the chuck table 12 with the second camera 52 provided in the non-secured range. Therefore, the processing apparatus 1 can accurately perform the alignment, and can suppress processing of the wrong position in the processing operation.

[0101] Further, the processing apparatus 1 can accurately perform the alignment even when photographing the workpiece 200 held by the chuck table 12 with the second camera 52 provided in the non-secured range, and therefore can suppress an increase in cost of the guide rail 33 or an increase in the guide rail 33 for accurately performing the alignment.

[0102] As a result, the processing apparatus 1 has an effect of suppressing an increase in cost and suppressing a decrease in processing accuracy.

[0103] Further, the processing apparatus 1 controls the Y-axis moving unit 53 to correct the position in the Y-axis direction of the second camera 52 in a manner that the second camera 52 can photograph the same position as the first camera 51, using the difference (Y2-Y1) of the Y coordinate at the coordinate (X1), the difference (Y3-Y1) of the Y coordinate at the coordinate (X2), and the difference of the Y coordinate at each position between the coordinate (X1) and the coordinate (X2) of the position offset of the photographing range of the first camera 51 and the photographing range of the second camera 52 stored in the coordinate storage section 103, when performing the slit inspection.

[0104] Therefore, the processing device 1 can take an image of the same position of the workpiece 200 using the first camera 51 provided in the guaranteed range and the second camera 52 provided in the non-guaranteed range when performing the cutout inspection. Therefore, the processing device 1 can accurately perform the cutout inspection from both the top and the bottom of the workpiece 200, and can suppress erroneous determination of the processing result in the processing operation.

[0105] As a result, the processing device 1 functions to suppress an increase in cost and to accurately perform the cutout inspection.

[0106] [Second Embodiment]

[0107] A processing device according to a second embodiment of the present application will be described with reference to the drawings. Figure 18 is a perspective view showing the structure of a part of the processing device according to the second embodiment. Figure 19 is a perspective view showing Figure 18 is a perspective view showing the holding unit and the second camera of the processing device shown in Figure 18 and Figure 19 The same reference numerals are assigned to the same parts as those of the first embodiment, and the description thereof will be omitted.

[0108] The processing device 1-2 according to the second embodiment forms a linear mark 61 on the holding surface 124 of the chuck table 12, and in the calculation operation of the correction amount, the correction amount calculation unit 101 takes an image of the mark 61 using the first camera 51 and the second camera 52, calculates the correction value in the Y-axis direction, the positional offset of the imaging range of the first camera 51 and the imaging range of the second camera 52, and the correction angle of the chuck table 12, and the coordinate storage unit 103 stores the positional offset of the first camera 51 and the second camera 52 calculated by the correction amount calculation unit 101, and is otherwise the same as the first embodiment.

[0109] In the second embodiment, as shown in Figure 18 and Figure 19 In the second embodiment, as shown in

[0110] In the second embodiment, in the calculation of the correction amount, the control unit 100 does not rotate the cutting tool 21 of the cutting unit 20, but attracts and holds the workpiece 200 on the holding surface 124 of the chuck table 12 of the holding unit 10 with the tape 211, positions the chuck table 12 in the machining region 3, and causes the mark 61 and the first camera 51 to face in the Z-axis direction. In the calculation of the correction amount, the correction amount calculation section 101 captures the linear mark 61 of the chuck table 12 with the first camera 51, and rotates the chuck table 12 to adjust the length direction of the mark 61 to be parallel to the X-axis direction.

[0111] In the calculation of the correction amount, the correction amount calculation section 101 moves the chuck table 12 in the X-axis direction from the machining region 3 toward the capturing region 5, and captures the predetermined positions of both end portions of the mark 61 with the first camera 51, and acquires a first image 301 (hereinafter, indicated by a reference numeral 301-4) obtained by capturing one end portion of the mark 61 with the first camera 51 and a first image 301 (hereinafter, indicated by a reference numeral 301-5) obtained by capturing the other end portion of the mark 61 with the first camera 51.

[0112] The coordinate calculation section 102 extracts the mark 61 from the first image 301-4, calculates the X coordinate (X1) and the Y coordinate (Y1) of the center of the mark 61, and the coordinate storage section 103 stores the coordinates (X1, Y1) of the center of the mark 61 of the first image 301-4. The coordinate calculation section 102 extracts the mark 61 from the first image 301-5, calculates the X coordinate (X2) and the Y coordinate (Y1) of the center of the mark 61, and the coordinate storage section 103 stores the coordinates (X2, Y1) of the center of the mark 61 of the first image 301-5. In this way, the coordinate calculation section 102 calculates and stores the coordinates (X1, Y1) of the center of one end portion of the mark 61 and the coordinates (X2, Y1) of the center of the other end portion of the mark 61 in the machining region 3 by the coordinate storage section 103.

[0113] The correction amount calculation section 101 moves the chuck table 12 further toward the capturing region 5 after the chuck table 12 is positioned close to the capturing region 5, and captures the predetermined positions (the same positions as the capturing positions of the first camera 51) of both end portions of the mark 61 with the second camera 52. The correction amount calculation section 101 acquires a second image 302 (hereinafter, indicated by a reference numeral 302-4) obtained by capturing one end portion of the mark 61 with the second camera 52 and a second image 302 (hereinafter, indicated by a reference numeral 302-5) obtained by capturing the other end portion of the mark 61 with the second camera 52.

[0114] The coordinate calculating section 102 extracts the mark 61 from the second image 302-4, calculates the X coordinate (Xl) and the Y coordinate (Y2) of the center of the mark 61, and the coordinate storing section 103 stores the coordinates (Xl, Y2) of the center of the mark 61 of the second image 302-4. The coordinate calculating section 102 extracts the mark 61 from the second image 302-5, calculates the X coordinate (X2) and the Y coordinate (Y3) of the center of the mark 61, and the coordinate storing section 103 stores the coordinates (X2, Y3) of the center of the mark 61 of the second image 302-5. In this way, the coordinate calculating section 102 calculates the coordinates (Xl, Y2) of the center of one end portion of the mark 61 and the coordinates (X2, Y3) of the center of the other end portion of the mark 61 in the photographing region 5 and stores them in the coordinate storing section 103.

[0115] The correction amount calculating section 101 calculates the angle θ formed by the mark 61 extracted from the second image 302 and the mark 61 extracted from the first image 301 according to the above-mentioned coordinates (Xl, Yl), (X2, Yl), (Xl, Y2), (X2, Y3) by the same formula 1 as in the first embodiment, stores the calculated angle θ as the correction value, that is, the correction angle of the chuck table 12 in the coordinate storing section 103.

[0116] In addition, the correction amount calculating section 101 calculates the difference in the Y coordinate for each X coordinate of the same position on the holding surface 124 of the machining region 3 and the photographing region 5 according to the above-mentioned coordinates (Xl, Yl), (X2, Yl), (Xl, Y2), (X2, Y3) by the same method as in the first embodiment.

[0117] The correction amount calculating section 101 stores the difference in the Y coordinate (Y2-Yl), the difference in the Y coordinate (Y3-Yl), and the difference in the Y coordinate for each position between the coordinates (Xl) and the coordinates (X2) calculated by the same method as in the first embodiment as the correction value in the Y axis direction in the photographing region 5 in the coordinate storing section 103.

[0118] In this way, the correction amount calculating section 101 calculates the correction value in the Y axis direction and the correction angle of the chuck table 12 in the photographing region 5 according to the Y coordinates (Yl), (Y2), (Y3), etc. of the centers of the mark 61 which are two points separated in the X axis direction by one mark 61 and stores them in the coordinate storing section 103. In addition, in the second embodiment, the correction amount calculating section 101 calculates both the correction value in the Y axis direction and the correction angle of the chuck table 12 and stores them in the coordinate storing section 103, but in the present application, at least one of them is calculated and stored by the same method as in the first embodiment.

[0119] In addition, the coordinate storage unit 103 positions the second camera 52 at the area photographed by the first camera 51, that is, below the two ends of the mark 61, and stores the difference (Y2-Y1) of the Y coordinate at the coordinate (X1) calculated by the correction amount calculation unit 101, the difference (Y3-Y1) of the Y coordinate at the coordinate (X2), and the difference of the Y coordinate of each position between the coordinate (X1) and the coordinate (X2), thereby storing the position offset between the photographing range of the first camera 51 and the photographing range of the second camera 52 using the X coordinate and the Y coordinate.

[0120] The processing device 1-2 of the second embodiment operates in the same manner as the first embodiment after the correction value in the Y-axis direction in the shooting area 5 and the correction angle of the chuck worktable 12, and the position offset between the shooting range of the first camera 51 and the shooting range of the second camera 52 are calculated by the correction amount calculation unit 101 and stored by the coordinate storage unit 103.

[0121] The processing device 1-2 of the second embodiment described above calculates the correction value in the Y-axis direction in the shooting area 5 and the correction angle of the chuck worktable 12, and the position offset between the shooting range of the first camera 51 and the shooting range of the second camera 52 through the correction amount calculation unit 101, and stores them by the coordinate storage unit 103. It operates in the same way as the first embodiment, and therefore has the same effect as the first embodiment in suppressing the increase in cost and suppressing the reduction in processing accuracy.

[0122] In addition, in the second embodiment, as Figure 20 As shown, when the workpiece 200 has a tape 211 attached to its back surface 205 and the device 204 faces upward, the processing apparatus 1 can suction-hold the workpiece 200 on the holding surface 124 of the chuck table 12 via the tape 211. In this case, the processing apparatus 1 can, for example, use the first camera 51 and the second camera 52 to capture both ends of the mark 208 on one side of the key pattern 207, and the correction amount calculation unit 101 calculates the correction value in the Y-axis direction in the imaging area 5, the correction angle of the chuck table 12, and the positional offset between the imaging range of the first camera 51 and the imaging range of the second camera 52, and stores these values ​​in the coordinate storage unit 103, thereby operating in the same manner as in the first embodiment.

[0123] in addition, Figure 20 It is shown in Figure 2 A perspective view of a state where a tape is attached to the back of the workpiece shown in FIG. Figure 20 In the present invention, the same parts as those in the first embodiment are denoted by the same reference numerals and their descriptions are omitted.

[0124] In addition, the present application can confirm the chuck table 12 after rotating 90 degrees around the axis after calculating the correction value of the Y-axis direction in the photographing area 5 and the correction angle of the chuck table 12, the position offset of the photographing range of the first camera 51 and the photographing range of the second camera 52 by photographing the cutting groove 400, the marks 61, 208 with the first camera 51 and the second camera 52. Specifically, the correction amount calculation section 101 confirms whether the cutting groove 400, the marks 61, 208 are along the Y-axis direction after rotating 90 degrees around the axis of the chuck table 12 after calculating the correction value of the Y-axis direction in the photographing area 5 and the correction angle of the chuck table 12, the position offset of the photographing range of the first camera 51 and the photographing range of the second camera 52 by photographing the cutting groove 400, the marks 61, 208 with the first camera 51 and the second camera 52. In addition, in the case of the second embodiment, it is preferable to confirm the case where the marks 62, 209 are along the X-axis direction.

[0125] In addition, the present application is not limited to the above-described embodiments. That is, various modifications can be made and implemented within the scope of the gist of the present application. In addition, in the embodiments, the machining device 1, 1-2 is a cutting device that cuts the workpiece 200, 200-1, but in the present application, it is not limited to the cutting device, and for example, can be a laser machining device that irradiates a laser beam of a wavelength that is absorbent or transmissive to the workpiece 200, 200-1. In the case where the machining device 1, 1-2 is the laser machining device, the laser beam irradiation unit of the laser machining device that irradiates the laser beam corresponds to the machining unit, and the laser-machined groove or the modified layer formed in the workpiece 200, 200-1 corresponds to the machining mark. In addition, in the present application, the first camera 51 and the second camera 52 can be infrared cameras.

Claims

1. A method of using a processing device, wherein: The processing device comprises: A holding unit having a rotatable chuck table for holding a workpiece; a processing unit for processing a workpiece held by the chuck table; A processing feeding unit, which processes and feeds the holding unit in the X-axis direction; An indexing feeding unit, which indexes and feeds the machining unit in the Y-axis direction; a camera that photographs the workpiece held by the chuck table and is movable in the indexing feed direction; as well as a control unit that controls the holding unit, the machining unit, the machining feeding unit, the indexing feeding unit, and the camera, The processing feed unit includes a guide rail, and moves the holding unit along the guide rail between a processing area and a photographing area. In the processing area, the processing unit is used to process the workpiece. In the photographing area, the camera is used to photograph the workpiece at a position away from the processing area along the X-axis direction. The control unit includes a correction amount calculation unit, which controls the holding unit, the processing unit, the processing feed unit, the indexing feed unit, and the camera. The method includes: When the chuck table is being processed and fed, a linear processing mark is produced on the workpiece by using the processing unit; After the linear processing mark is made on the workpiece, the chuck table is moved to the shooting area; When the chuck worktable is in the shooting area, the processing mark is photographed by the camera; Calculating a correction value in the Y-axis direction or a correction angle of the chuck table according to the Y coordinates of two points of the machining mark separated in the machining feed direction; and When the position of the camera has been corrected along the Y-axis direction based on the correction value or the chuck table has been rotated according to the correction angle, the chuck table is machined and fed in the photographing area.

2. The method of using a processing device according to claim 1, wherein: The chuck table has a transparent component on the holding surface for holding the workpiece. The cameras include a first camera near the processing unit and a second camera farther from the processing unit than the first camera, at upper and lower positions sandwiching the transparent member. The control unit further includes a coordinate storage unit. The method also includes: The coordinate storage unit of the control unit stores a positional offset between the first camera positioned to image a predetermined area on the workpiece held by the chuck table and the second camera positioned to image the predetermined area using X coordinates and Y coordinates. The position of the second camera is collected based on the X coordinate and the Y coordinate stored in the coordinate storage unit, so that the second camera can capture the predetermined area captured by the first camera.

3. The method of using a processing device according to claim 2, wherein: capturing a first image by the first camera; capturing a second image by the second camera; displaying the first image and the second image on a display unit; as well as A signal is sent via the image control unit of the control unit to display the first image and the second image on the display unit in a state where the processing feed direction of one of the first image and the second image is reversed, so that the first image and the second image are overlapped or displayed side by side.

4. A method of using a processing device, wherein: The processing device comprises: A holding unit having a rotatable chuck table for holding a workpiece; a processing unit for processing a workpiece held by the chuck table; A processing feeding unit, which processes and feeds the holding unit in the X-axis direction; An indexing feeding unit, which indexes and feeds the machining unit in the Y-axis direction; a camera that captures a workpiece held by the chuck table and is movable in the Y-axis direction; as well as a control unit that controls the holding unit, the machining unit, the machining feeding unit, the indexing feeding unit, and the camera, The processing feed unit includes a guide rail and moves the holding unit along the guide rail between a processing area and a photographing area. In the processing area, the processing unit processes the workpiece. In the photographing area, the camera photographs the workpiece at a position a predetermined distance away from the processing area. The camera includes a first camera near the processing unit and a second camera farther away from the processing unit than the first camera. The control unit includes a correction amount calculation unit, which controls the holding unit, the processing unit, the processing feed unit, the indexing feed unit, and the camera to execute the method, which includes: Using the first camera to photograph the workpiece or the linear mark on the chuck table; Rotating the chuck table to adjust the orientation of the mark to be parallel to the X-axis direction; Moving the chuck table to the photographing area and photographing the mark with the second camera; Calculating a correction value in the Y-axis direction or a correction angle of the chuck table based on the X-coordinates and Y-coordinates of two points separated by the mark in the X-axis direction; as well as The chuck table is processed and fed in the shooting area and is photographed by the second camera, wherein the second camera performs indexing feeding according to the correction value or rotates the chuck table according to the correction angle.

5. The method of using a processing device according to claim 4, wherein: The chuck table has a transparent component on the holding surface for holding the workpiece. The camera includes a first camera and a second camera at upper and lower positions sandwiching the transparent member, the control unit further includes a coordinate storage unit, and the method further includes: The coordinate storage unit of the control unit stores a positional offset between the first camera positioned to image a predetermined area on the workpiece held by the chuck table and the second camera positioned to image the predetermined area using X coordinates and Y coordinates; as well as The position of the second camera is collected based on the X coordinate and the Y coordinate stored in the coordinate storage unit, so that the second camera can capture the predetermined area captured by the first camera.

6. The method of using a processing device according to claim 5, wherein: The method also includes: capturing a first image by the first camera; capturing a second image by the second camera; displaying the first image and the second image on a display unit; as well as A signal is sent via the image control unit of the control unit to display the first image and the second image on the display unit in a state where one of the first image and the second image is flipped in the X-axis direction, so that the first image and the second image are superimposed or displayed side by side.

Images