An axial tandem Roots vacuum pump module

Abstract

This invention provides an axially tandem Roots vacuum pump module, including a drive motor with a left-side motor shaft; and at least one Roots vacuum pump group, each Roots vacuum pump group including at least one Roots vacuum pump, and the total number of Roots vacuum pumps in all Roots vacuum pump groups is greater than or equal to two; wherein each Roots vacuum pump includes a drive shaft, and the drive shafts of all Roots vacuum pumps are connected in series with the drive motor, so that the drive motor can synchronously drive the drive shafts of all Roots vacuum pumps to rotate together. In this invention, the suction ports of all Roots vacuum pumps can be connected in parallel to a suction pipe, and the exhaust ports of all Roots vacuum pumps can be connected in parallel to an exhaust pipe, so that all Roots vacuum pumps can perform suction, evacuation, and exhaust operations simultaneously. Alternatively, the suction and exhaust ports of all Roots vacuum pumps can be connected in series, so that fluid can sequentially pass through each Roots vacuum pump for multi-stage evacuation operations.

Description

Technical Field

[0001] This invention relates to Roots vacuum pumps, and more particularly to an axially serial Roots vacuum pump module. By applying the structure of this invention, the basic performance of the original Roots vacuum pump can remain unchanged, but energy savings and cost reduction can be achieved by sharing the same components. Furthermore, its pumping capacity can be significantly improved when the fluid channels are connected in parallel. Therefore, it is suitable for large-scale industrial applications such as mechanical vacuum pumps for secondary steel refining in steel plants and ultra-large-scale chemical applications. Background Technology

[0002] Roots vacuum pumps are rotary variable displacement vacuum pumps widely used in metallurgy, machinery, chemical industry, petroleum, light industry, food, transportation, environmental protection, and other fields requiring vacuum systems. They offer advantages such as high pumping speed, low energy consumption, simple structure, and reliable operation. Depending on the pressure difference before and after evacuation, the appropriate energy efficiency of the Roots vacuum pump and its quantity must be selected to achieve satisfactory vacuum results; the greater the pressure difference, the greater the power consumption and pumping capacity required. Previously, to meet different pressure difference requirements, a series of individual Roots vacuum pumps with varying energy efficiencies needed to be manufactured.

[0003] The aforementioned existing Roots vacuum pumps often require multiple individual Roots vacuum pumps when outputting large quantities of evacuated gas. Each individual Roots vacuum pump needs to be driven by a corresponding drive motor, thus increasing the overall power consumption. Furthermore, configuring multiple individual Roots vacuum pumps also increases the overall system cost.

[0004] Therefore, the inventors of this invention aim to propose a novel modular Roots vacuum pump series structure that can connect multiple Roots vacuum pumps in series, allowing a single drive motor to drive multiple Roots vacuum pumps simultaneously, and multiple Roots vacuum pumps can also share the same components, thus achieving the purpose of saving energy and reducing costs. Summary of the Invention

[0005] Therefore, the purpose of this invention is to solve the problems of the prior art mentioned above. This invention proposes an axially serial Roots vacuum pump module, which connects the drive shafts of multiple independent Roots vacuum pumps in series, forming a coaxial series connection. Furthermore, the suction ports of all the Roots vacuum pumps are connected in parallel to a single suction pipe, and the exhaust ports of all the Roots vacuum pumps are connected in parallel to a single exhaust pipe. Using this structure, only a single drive motor is needed to drive the drive shaft of one Roots vacuum pump, which synchronously drives the rotors of all the Roots vacuum pumps to rotate, achieving simultaneous suction, vacuuming, and exhaust operations. Because this invention uses a Roots vacuum pump design with a large pump chamber volume, the suction ports of all the Roots vacuum pumps, after being connected in parallel, can achieve a very high pumping capacity, with pumping speeds reaching thousands to tens of thousands of cubic meters per hour. Moreover, the rotor structure of this invention is simple, easy to maintain and clean. The series connection of the drive shafts of multiple Roots vacuum pumps in this invention allows for the connection of different numbers of Roots vacuum pumps as needed, thus adjusting the overall vacuum level and pumping capacity of the system. By connecting different numbers of Roots vacuum pumps in series, a series of cascaded Roots vacuum pump structures with different specifications and efficiencies can be formed, which can replace a corresponding number of single Roots vacuum pumps and achieve the same vacuuming effect. In this invention, the intake and exhaust ports of all Roots vacuum pumps can also be connected in series, allowing fluid to pass through each Roots vacuum pump sequentially for multi-stage vacuuming. When the input pressure is high, or when the pressure difference between the intake and exhaust ports of the Roots vacuum pumps is large, generating high heat, heat exchangers can be installed on the pipes between the Roots vacuum pumps. Through the application of this invention, the number of Roots vacuum pumps can be configured with high flexibility according to actual usage, accelerating product research and development and reducing design workload. For example, a design with two Roots vacuum pumps connected in series can reduce workload by nearly 40%, and the more Roots vacuum pumps connected in series, the greater the workload reduction. In addition to optimizing the structure of the same series, this invention also saves space in the entire system, improves production efficiency, reduces power consumption and costs, and improves economic benefits. This invention modularizes existing large Roots vacuum pumps through coaxial series connection and parallel pumping and exhaust connection, creating an ultra-large single-stage Roots vacuum pump structure with high pumping capacity. The pumping capacity remains unchanged, and the basic performance of the original Roots vacuum pump is also preserved, while its pumping capacity is significantly improved. Therefore, it is suitable for large-scale industrial applications such as mechanical vacuum pumps for secondary steel refining in steel plants and ultra-large-scale chemical applications.

[0006] To achieve the above objectives, the present invention proposes an axially serial Roots vacuum pump module, including a drive motor and a left-side motor spindle; and at least one Roots vacuum pump group, each Roots vacuum pump group including at least one Roots vacuum pump, and the total number of Roots vacuum pumps in all Roots vacuum pump groups is greater than or equal to two; wherein each Roots vacuum pump includes a drive shaft, and the drive shafts of all Roots vacuum pumps are connected in series with the drive motor.

[0007] Each Roots vacuum pump includes a pump body with a hollow working chamber; a drive shaft passes through the pump body, with its left and right ends located on the outer sides of the pump body; an intake port connects to the working chamber of the pump body; an exhaust port connects to the working chamber of the pump body; two rotors are located within the pump body, maintaining a certain gap between the two rotors and the pump body; the two rotors are a driving rotor and a driven rotor; the driving rotor is mounted on the drive shaft and is assembled as an integral structure with the drive shaft; a rotating shaft is located within the pump body, and the driven rotor is mounted on the rotating shaft; two gears are located within the pump body, meshing with each other, with one gear located on the drive shaft and the other gear located on the rotating shaft; and when the drive shaft rotates, it drives the driving rotor and its corresponding gear on the drive shaft to rotate, while simultaneously driving the other gear on the rotating shaft to rotate in the opposite direction, thus driving the rotating shaft to rotate, and driving the driven rotor to rotate in the opposite direction to the driving rotor.

[0008] The at least one Roots vacuum pump group includes a first Roots vacuum pump group; and the total number of Roots vacuum pumps in the first Roots vacuum pump group is greater than or equal to two; the first Roots vacuum pump group is connected in series to the left motor spindle of the drive motor; and the left motor spindle of the drive motor and the drive shaft of its adjacent Roots vacuum pump, as well as the drive shafts of two adjacent Roots vacuum pumps, are connected in series via a coupling to form a series configuration.

[0009] The at least one Roots vacuum pump assembly includes a first Roots vacuum pump assembly and a second Roots vacuum pump assembly; each first Roots vacuum pump assembly and each second Roots vacuum pump assembly includes at least one Roots vacuum pump; the first Roots vacuum pump assembly is connected in series to the left motor spindle of the drive motor; the drive motor also includes a right motor spindle; the second Roots vacuum pump assembly is connected in series to the right motor spindle of the drive motor; the left or right motor spindle of the drive motor is connected in series with the drive shaft of each adjacent Roots vacuum pump, and when there are more than two Roots vacuum pumps in the same Roots vacuum pump, the drive shafts of two adjacent Roots vacuum pumps are connected in series through a coupling, thus forming a series configuration.

[0010] The features and advantages of the invention will be further understood from the following description, and please refer to the accompanying drawings while reading. Attached Figure Description

[0011] Figure 1 This is a schematic diagram of the component assembly of the present invention.

[0012] Figure 2 This is a schematic diagram of another component combination of the present invention, wherein the first Roots vacuum pump assembly has three Roots vacuum pumps connected in series.

[0013] Figure 3 This is a schematic diagram of another component combination of the present invention, wherein the first Roots vacuum pump group has a plurality of Roots vacuum pumps connected in series.

[0014] Figure 4 This is a cross-sectional schematic diagram of the Roots vacuum pump of the present invention.

[0015] Figure 5 This is a schematic diagram of the component combination according to another embodiment of the present invention.

[0016] Figure 6 This is a schematic diagram of another component combination according to another embodiment of the present invention, wherein the first Roots vacuum pump group and the second Roots vacuum pump group have a plurality of Roots vacuum pumps connected in series.

[0017] Figure 7 for Figure 1 A schematic diagram showing the assembly of all the Roots vacuum pumps whose intake and exhaust ports are connected in series.

[0018] Figure 8 for Figure 2 A schematic diagram showing the assembly of all the Roots vacuum pumps whose intake and exhaust ports are connected in series.

[0019] Figure 9 for Figure 3 A schematic diagram showing the assembly of all the Roots vacuum pumps whose intake and exhaust ports are connected in series.

[0020] Figure 10 for Figure 5 A schematic diagram showing the assembly of all the Roots vacuum pumps whose intake and exhaust ports are connected in series.

[0021] Figure 11 for Figure 6 A schematic diagram showing the assembly of all the Roots vacuum pumps whose intake and exhaust ports are connected in series. Detailed Implementation

[0022] The following is a detailed description of a preferred embodiment of the present invention, in conjunction with the accompanying drawings, regarding its structural composition, effects, and advantages.

[0023] Please refer to Figures 1 to 3As shown, the axial serial Roots vacuum pump module of the present invention provides a Roots vacuum pump structure with different energy efficiencies within the same series based on a modular product design. The axial serial Roots vacuum pump module includes the following components:

[0024] A drive motor 1 includes a left-side motor spindle 11.

[0025] At least one Roots vacuum pump assembly 100, each Roots vacuum pump assembly 100 including at least one Roots vacuum pump 3, and the total number of Roots vacuum pumps 3 in all Roots vacuum pump assemblies 100 is greater than or equal to two. For example... Figure 1 As shown, the at least one Roots vacuum pump assembly 100 includes a first Roots vacuum pump assembly 101, which in this example includes a plurality of Roots vacuum pumps 3.

[0026] Each of the Roots vacuum pumps 3 in the at least one Roots vacuum pump assembly 100 includes:

[0027] A pump body 33 has a hollow working chamber 331;

[0028] An air intake 31 is connected to the working chamber 331 of the pump body 33;

[0029] An exhaust port 32 is connected to the working chamber 331 of the pump body 33;

[0030] Two rotors 34 are located inside the pump body 33, maintaining a certain gap between the two rotors 34 and the pump body 33. The two rotors 34 are a driving rotor 341 and a driven rotor 342. Figure 4 As shown, the driving rotor 341 and the driven rotor 342 are figure-eight rotors.

[0031] A drive shaft 35 extends through the pump body 33, with its left and right ends located on the outer sides of the pump body 33. The drive rotor 341 is mounted on the drive shaft 35, forming an integral structure with it. Bearings 28 support the left and right sides of the drive shaft 35 on the pump body.

[0032] A rotating shaft 36 is located inside the pump body 33, and the driven rotor 342 is mounted on the rotating shaft 36.

[0033] Two gears 37 are located inside the pump body 33 and mesh with each other. One gear 37 is located on the drive shaft 35 and the other gear 37 is located on the rotating shaft 36.

[0034] When the drive shaft 35 rotates, it drives the active rotor 341 and the corresponding gear 37 located on the drive shaft 35 to rotate, and at the same time drives another gear 37 located on the rotating shaft 36 to rotate in the opposite direction, thus driving the rotating shaft 36 to rotate, and driving the driven rotor 342 to rotate in the opposite direction to the active rotor 341.

[0035] The first Roots vacuum pump assembly 101 is connected in series to the left motor spindle 11 of the drive motor 1. The left motor spindle 11 of the drive motor 1 is connected in series to the drive shaft 35 of the adjacent Roots vacuum pump 3 via a coupling 12, and the drive shafts 35 of the two adjacent Roots vacuum pumps 3 are also connected in series via a coupling 15, thus forming a series connection overall.

[0036] A suction pipe 41 has an inlet 411 at one end and a plurality of outlets 412 at the other end. Each outlet 412 of the suction pipe 41 is connected to the suction port 31 of a corresponding Roots vacuum pump 33. That is, the suction pipe 41 is connected to the suction ports 31 of all Roots vacuum pumps 33 in the at least one Roots vacuum pump group 100 through its plurality of outlets 412.

[0037] An exhaust pipe 42 has multiple inlets 421 at one end and an outlet 422 at the other end. Each inlet 421 of the exhaust pipe 42 is connected to the exhaust port 32 of a corresponding Roots vacuum pump 33. That is, the exhaust pipe 42 is connected to the exhaust ports 32 of all Roots vacuum pumps 33 in the at least one Roots vacuum pump group 100 through its multiple inlets 421.

[0038] In operation, when the drive motor 1 drives the drive shaft 35 of the adjacent Roots vacuum pump 3 to rotate via the left motor main shaft 11, it will synchronously drive the drive shafts 35 of all the Roots vacuum pumps 3 in the first Roots vacuum pump group 101 to rotate together. This causes the two rotors 34 of all the Roots vacuum pumps 3 to rotate simultaneously, allowing gas from the external sealed system to enter each Roots vacuum pump 3 through the suction pipe 41. As the two rotors 34 of each Roots vacuum pump 3 rotate, the volume of the part in the working chamber 331 of each pump body 33 used to contain the input gas will decrease, thus forcing the input gas out of each Roots vacuum pump 3 and outputting it from the exhaust port 32 of each Roots vacuum pump 3 to the exhaust pipe 42, and then outputting it outward from the output port 422 of the exhaust pipe 42. The rotation of the two rotors 34 of each Roots vacuum pump 3 will continuously repeat the above operation process, so that the system forms a near-vacuum state. Therefore, by applying the above structure, all the working chambers 331 and 631 of the pump body 33 of the Roots vacuum pump 3 can simultaneously perform suction, vacuuming and exhaust operations.

[0039] In this invention, each Roots vacuum pump assembly 100 can be connected in series with different numbers of Roots vacuum pumps 3 as needed to meet operational requirements. Therefore, structures with different numbers of series stages can be formed. For example... Figure 1 The diagram showing the first Roots vacuum pump assembly 101 includes two Roots vacuum pumps 3 connected in series, or Figure 2 This diagram shows the first Roots vacuum pump assembly 101, which includes three Roots vacuum pumps 3 connected in series. Or as shown below... Figure 3 As shown, more Roots vacuum pumps 3 can be connected in series in the first Roots vacuum pump group 101, wherein each output port 412 of the suction pipe 41 is connected to the suction port 31 of all the Roots vacuum pumps 3, and each input port 421 of the exhaust pipe 42 is also connected to the exhaust port 32 of all the Roots vacuum pumps 3.

[0040] Figure 5 and Figure 6 This invention illustrates another embodiment. In this example, components identical to those in the above embodiments are represented by the same symbols and have the same functions and connections, so their details will not be repeated. In this example, the drive motor 1 further includes a right motor spindle 11'. The left motor spindle 11 and the right motor spindle 11' of the drive motor 1 can rotate synchronously.

[0041] The at least one Roots vacuum pump assembly 100 further includes a second Roots vacuum pump assembly 102. The second Roots vacuum pump assembly 102 includes at least one Roots vacuum pump 3.

[0042] Figure 5 The first Roots vacuum pump assembly 101 includes a Roots vacuum pump 3, and the second Roots vacuum pump assembly 102 also includes a Roots vacuum pump 3. The left motor shaft 11 of the drive motor 1 is connected to the drive shaft 35 of the Roots vacuum pump 3 of the first Roots vacuum pump assembly 101 via a coupling 12, and the right motor shaft 11' of the drive motor 1 is connected to the drive shaft 35 of the Roots vacuum pump 3 of the first Roots vacuum pump assembly 101 via another coupling 12'.

[0043] Figure 6 The first Roots vacuum pump assembly 101 may include multiple Roots vacuum pumps 3, and the second Roots vacuum pump assembly 102 may also include multiple Roots vacuum pumps 3. The first Roots vacuum pump assembly 101 is connected in series with the left motor spindle 11 of the drive motor 1, and the connection method is the same as in the previous embodiment, so it will not be described again. The second Roots vacuum pump assembly 102 is connected in series with the right motor spindle 11' of the drive motor 1, and the connection method is the same as that of the first Roots vacuum pump assembly 101.

[0044] Similarly, in the first Roots vacuum pump group 101 and the second Roots vacuum pump group 102, the suction ports 31 of all Roots vacuum pumps 3 are connected in parallel to the suction pipe 41, and the exhaust ports 32 of all Roots vacuum pumps 3 are also connected in parallel to the exhaust pipe 42.

[0045] Therefore, the drive motor 1 can synchronously drive all the Roots vacuum pumps 3 of the first Roots vacuum pump group 101 and the second Roots vacuum pump group 102 to perform suction, vacuuming and exhaust operations.

[0046] In this invention, sealing structures 2 can be respectively configured between the drive motor 1 and the connected Roots vacuum pump 3, between two adjacent Roots vacuum pumps 3, and at the rear end of the Roots vacuum pump 3, so that the drive motor 1 and the at least one Roots vacuum pump group 100 form a sealed structure as a whole.

[0047] In the above embodiments of the present invention, the intake port 31 and exhaust port 32 of all Roots vacuum pumps 3 can also be connected in series. Figures 7 to 11 This invention illustrates another embodiment of the present invention. In this example, the same components as those in the above embodiments are represented by the same symbols and have the same functions and connections, so their details will not be repeated. Figures 7 to 9 The schematic diagram is for illustrating the above embodiments. Figures 1 to 3 A schematic diagram showing that the intake ports 31 and exhaust ports 32 of all the Roots vacuum pumps 3 in the first Roots vacuum pump group 101 are connected in series. Figures 10 to 11 The schematic diagram is for illustrating the above embodiments. Figures 5 to 6 A schematic diagram showing that the intake ports 31 and exhaust ports 32 of all the Roots vacuum pumps 3 in the first Roots vacuum pump group 101 and the second Roots vacuum pump group 102 are connected in series.

[0048] In this embodiment, the suction pipe 41 has an inlet 411 and an outlet 412, and the outlet 412 of the suction pipe 41 is connected to the suction port 31 of the rightmost Roots vacuum pump 3. The exhaust pipe 42 has an inlet 421 and an outlet 422, and the inlet 421 of the exhaust pipe 42 is connected to the exhaust port 32 of the leftmost Roots vacuum pump 3. The corresponding exhaust ports 32 and suction ports 31 of two adjacent Roots vacuum pumps 3 are connected in series by a connecting pipe 43. Therefore, gas from the external sealed system passes sequentially through the inlet 411 of the suction pipe 41 through each Roots vacuum pump 3 for multi-stage vacuuming, and finally exits from the outlet 422 of the exhaust pipe 42.

[0049] When the input pressure is high, or when the pressure difference between the suction port 31 and the exhaust port 32 of the Roots vacuum pump 3 is large, resulting in high heat generation, a heat exchanger 44 can be installed on each series pipe 43 to dissipate the heat within the series pipe 43. Figure 9and Figure 11 As shown.

[0050] The present invention also includes auxiliary component structures such as sealing components, lubrication structures, and cooling structures (not shown in the figure). These auxiliary component structures are configured in the system of the present invention, and their structures and functions are well known in the prior art, so their details will not be described in detail here.

[0051] This invention is based on the concept of modular product design. It divides and extracts the Roots vacuum pump from the traditional single-unit Roots vacuum pump system structure. By combining different numbers of Roots vacuum pumps, a series of Roots vacuum pumps of different specifications can be constructed to meet market demands for Roots vacuum pumps with varying energy efficiencies. The vacuum pumping performance of this invention is equivalent to that of a single-unit Roots vacuum pump with the same energy efficiency, while its overall energy consumption is lower, thus achieving energy and cost savings.

[0052] The structure of the present invention has the following advantages:

[0053] (1) Relative independence: Each module can be designed, manufactured, debugged and improved separately.

[0054] (2) Interchangeability: The structure, size and parameters of the interface parts of each module are standardized, making it easy to interchange between modules, so that the modules can be adapted to the needs of more Roots vacuum pumps with different energy efficiencies.

[0055] (3) Versatility: Some functional modules of the same series of Roots vacuum pumps can be used interchangeably.

[0056] The advantage of this invention lies in connecting the drive shafts of multiple independent Roots vacuum pumps in series, forming a coaxial series connection. Furthermore, the intake ports of all the Roots vacuum pumps are connected in parallel to a single intake pipe, and the exhaust ports are connected in parallel to a single exhaust pipe. Using this structure, only a single drive motor is needed to drive the drive shaft of one Roots vacuum pump, simultaneously driving the rotors of all the Roots vacuum pumps to rotate, achieving simultaneous intake, vacuuming, and exhaust operations. Because this invention employs a Roots vacuum pump design with a large pump chamber volume, the intake ports of all the Roots vacuum pumps, after being connected in parallel, can achieve a very high pumping capacity, with pumping speeds reaching thousands to tens of thousands of cubic meters per hour. Moreover, the rotor structure of this invention is simple, easy to maintain and clean. The series connection of the drive shafts of multiple Roots vacuum pumps allows for the connection of different numbers of Roots vacuum pumps as needed, thus adjusting the overall vacuum level and pumping capacity of the system. By connecting different numbers of Roots vacuum pumps in series, a series of cascaded Roots vacuum pump structures with different specifications and efficiencies can be formed, which can replace a corresponding number of single Roots vacuum pumps and achieve the same vacuuming effect. In this invention, the intake and exhaust ports of all Roots vacuum pumps can also be connected in series, allowing fluid to pass through each Roots vacuum pump sequentially for multi-stage vacuuming. When the input pressure is high, or when the pressure difference between the intake and exhaust ports of the Roots vacuum pumps is large, generating high heat, heat exchangers can be installed on the pipes between the Roots vacuum pumps. Through the application of this invention, the number of Roots vacuum pumps can be configured with high flexibility according to actual usage, accelerating product research and development and reducing design workload. For example, a design with two Roots vacuum pumps connected in series can reduce workload by nearly 40%, and the more Roots vacuum pumps connected in series, the greater the workload reduction. In addition to optimizing the structure of the same series, this invention also saves space in the entire system, improves production efficiency, reduces power consumption and costs, and improves economic benefits. This invention modularizes existing large Roots vacuum pumps by connecting drive shafts in series and parallel exhaust ports, creating an ultra-large single-stage Roots vacuum pump structure with high pumping capacity. The pumping capacity remains unchanged, and the basic performance of the original Roots vacuum pump is also preserved, while its pumping capacity is significantly improved. Therefore, it is suitable for large-scale industrial applications such as mechanical vacuum pumps for secondary steel refining in steel plants and ultra-large-scale chemical applications.

[0057] The foregoing detailed description pertains to a feasible embodiment of the present invention. This embodiment is not intended to limit the scope of the patent of the present invention. All equivalent implementations or modifications that do not depart from the spirit of the art should be included within the scope of protection of the claims of the present invention.

Claims

1. An axially serial Roots vacuum pump module, characterized in that, include: A drive motor, including a left-side motor spindle; and At least one Roots vacuum pump group, each Roots vacuum pump group includes at least one Roots vacuum pump, and the total number of Roots vacuum pumps in all Roots vacuum pump groups is greater than or equal to two; wherein each Roots vacuum pump includes a drive shaft, and the drive shafts of all Roots vacuum pumps are connected in series with the drive motor. A pump body having a hollow working chamber; wherein the drive shaft passes through the pump body, and the left and right ends of the drive shaft are located on the two outer sides of the pump body; One air intake port connects to the working chamber of the pump body; One exhaust port connects to the working chamber of the pump body; Two rotors are located inside the pump body, and the two rotors maintain a certain gap with the pump body; the two rotors are a driving rotor and a driven rotor; the driving rotor is mounted on the drive shaft and is assembled with the drive shaft as an integral structure. A rotating shaft is located inside the pump body, and the driven rotor is mounted on the rotating shaft; Two gears, located within the pump body, mesh with each other; one gear is located on the drive shaft, and the other gear is located on the rotating shaft; and When the drive shaft rotates, it drives the driving rotor and its corresponding gear on the drive shaft to rotate, and at the same time drives another gear on the shaft to rotate in the opposite direction. Therefore, the shaft rotates, and the driven rotor rotates in the opposite direction to the driving rotor. The at least one Roots vacuum pump group includes a first Roots vacuum pump group; and the total number of Roots vacuum pumps in the first Roots vacuum pump group is greater than or equal to two. The first Roots vacuum pump unit is connected in series to the left motor spindle of the drive motor; the left motor spindle of the drive motor and the drive shaft of the adjacent Roots vacuum pump, as well as the drive shafts of the two adjacent Roots vacuum pumps, are connected in series through a coupling to form a series configuration. Sealing structures are provided around the drive shaft between the drive motor and the connected Roots vacuum pump, around the drive shaft between two adjacent Roots vacuum pumps and the coupling, and around the drive shaft at the rear end of the Roots vacuum pump, so that the drive motor and the at least one Roots vacuum pump group form a sealed structure as a whole.

2. The axial serial Roots vacuum pump module according to claim 1, characterized in that, The at least one Roots vacuum pump assembly further includes a second Roots vacuum pump assembly; each of the first and second Roots vacuum pump assemblies includes at least one Roots vacuum pump; the drive motor further includes a right-side motor spindle. The second Roots vacuum pump unit is connected in series to the right motor spindle of the drive motor.

3. The axial serial Roots vacuum pump module according to claim 1, characterized in that, Each Roots vacuum pump's suction port is connected to a suction pipe, and each Roots vacuum pump's exhaust port is connected to an exhaust pipe.

4. The axial serial Roots vacuum pump module according to claim 1, characterized in that, The driving rotor and the driven rotor of each Roots vacuum pump are figure-eight shaped rotors.

5. The axial serial Roots vacuum pump module according to claim 1, characterized in that, The intake and exhaust ports of all Roots vacuum pumps are connected in series; the intake port of the rightmost Roots vacuum pump is connected to an intake pipe, the exhaust port of the leftmost Roots vacuum pump is connected to an exhaust pipe, and the corresponding exhaust and intake ports of two adjacent Roots vacuum pumps are connected in series through a connecting pipe.

6. The axial serial Roots vacuum pump module according to claim 5, characterized in that, Each series pipe is equipped with a heat exchanger to remove heat from the series pipe.

Images