Method and apparatus for Marangoni drying

Abstract

A method and apparatus for drying Marangoni substrates is disclosed, comprising an adjustable spray wand assembly having: a mounting bracket coupled to a support structure of a drying system; a base assembly coupled to the mounting bracket and disposed parallel to a surface of the support structure; and a mounting assembly coupled to and parallel to the base assembly. The mounting assembly is vertically adjustable at two distal ends. The mounting assembly includes an arm to which one or more spray wands are mounted. When secured to the mounting assembly, the one or more spray wands are rotatable about a longitudinal axis.

Description

Background Art Technical Field

[0002]

[0006] Embodiments described herein generally relate to methods and apparatus for cleaning substrates. More specifically, embodiments described herein relate to methods and apparatus for drying wet substrates in a post-chemical mechanical polishing system.

[0003] Related technical notes

[0004] As the geometry of semiconductor components continues to decrease, the utilization of processes for achieving ultra-clean processing of substrates has increased significantly. Traditionally, post-chemical mechanical polishing (CMP) cleaning is a wet process that is performed to clean and dry the substrate without leaving particles or residues on the substrate, which can negatively impact yield and cause subsequent device failure. In the process of drying the wet substrate, particles in the solution may adhere to the substrate, or particles present on the substrate may not be adequately removed prior to drying and may remain on the substrate after drying. Therefore, much attention has been focused on improved methods for drying substrates after CMP processing.

[0005] Marangoni drying creates a surface tension gradient, directing the bath fluid so that it flows away from the substrate in a manner that leaves little or no bath fluid behind. Thus, Marangoni drying can avoid streaks, spots, and residual marks on the substrate. The Marangoni drying technique utilizes a solvent with a lower surface tension than the bath fluid (i.e., isopropyl alcohol (IPA) vapor). The solvent is introduced into the fluid meniscus formed as the substrate is lifted from the bath. The solvent vapor dissolves into the fluid meniscus, creating a surface tension gradient. The presence of the surface tension gradient causes the bath fluid to flow away from the substrate through the low surface tension region at the tip of the drying meniscus, leaving the substrate dry and virtually free of streaks, spots, and residual marks.

[0006] Current Marangoni drying systems utilize static spray wands to deliver solvent vapor to the front and back sides of substrates after aqueous cleaning in a fluid bath. However, this approach has limitations, such as variability between chamber conditions, which produces inconsistent drying results between processed batches of substrates. For example, variations in bath fluid levels and mechanical chamber characteristics can result in inconsistent amounts of streaks, spots, and residue marks left on dried substrates from one chamber to the next.

[0007] Therefore, what is needed in the art is an improved apparatus for providing more consistent substrate drying results between chambers. Summary of the Invention

[0008] In one embodiment, an apparatus is provided. The apparatus includes a base and a mounting assembly. The mounting assembly further includes a crossbar having a plurality of apertures extending from a top surface of the crossbar to a bottom surface of the crossbar; guide pins disposed within the plurality of apertures of the crossbar and in contact with the base; a leveler disposed within the plurality of apertures and in contact with the base; and two arms coupled to the crossbar. The guide pins are configured to align the base and the mounting assembly, and the leveler is configured to vertically position the crossbar relative to the base. Each arm is orthogonally disposed at opposite distal ends of the crossbar and configured to support one or more spray wands.

[0009] In one embodiment, an apparatus is provided. The apparatus includes a base and a mounting assembly. The mounting assembly further includes: a crossbar having a plurality of first apertures extending from a top surface of the crossbar to a bottom surface of the crossbar; two or more guide pins disposed within the plurality of first apertures of the crossbar and in contact with the base; two or more levelers disposed within the plurality of first apertures and in contact with the base; and two arms coupled to the crossbar. At least one of the two or more guide pins and at least one of the two or more levelers are located at each distal end of the crossbar. The two arms are orthogonally disposed at opposite distal ends of the crossbar and further include one or more second apertures. One or more spray bars are disposed on the one or more second apertures of the two arms.

[0010] In one embodiment, a Marangoni drying method is provided. The method includes positioning a spray wand assembly, the spray wand assembly comprising: a mounting bracket; a base coupled to the mounting bracket; a mounting assembly coupled to the base; and one or more spray wands disposed on the mounting assembly. The one or more spray wands are adapted to direct vapor toward a substrate. The method further includes adjusting the spray wand to a desired position and rotating the spray wand about x-, y-, and z-axes; lifting the substrate from a rinse tank and passing it through the spray wand assembly; and directing vapor onto a surface of the substrate. BRIEF DESCRIPTION OF THE DRAWINGS

[0011] Therefore, in order that the manner in which the above-described features of the present disclosure may be understood in detail, a more particular description of the disclosure, briefly summarized above, may be obtained by reference to embodiments, some of which are illustrated in the accompanying drawings. It should be noted, however, that the drawings illustrate only exemplary embodiments and are therefore not to be considered limiting of its scope, and may admit to other equally effective embodiments.

[0012] Figure 1 A perspective view of a substrate drying system according to one embodiment of the present disclosure is shown.

[0013] Figure 2 A perspective view of an adjustable spray wand assembly is shown according to one embodiment of the present disclosure.

[0014] Figure 3A Shown is a side view of an adjustable spray wand assembly in a raised position according to one embodiment of the present disclosure.

[0015] Figure 3B Shown is a side view of an adjustable spray wand assembly in a lowered position according to one embodiment of the present disclosure.

[0016] Figure 3C Shown is a side view of an adjustable spray wand assembly in a tilted orientation according to one embodiment of the present disclosure.

[0017] Figure 4 is a flow chart depicting a method of drying a substrate according to one embodiment of the present disclosure.

[0018] To facilitate understanding, identical reference numerals have been used, where possible, to designate identical elements that are common to the figures. It is contemplated that elements and features of one embodiment may be beneficially incorporated in other embodiments without further recitation. DETAILED DESCRIPTION

[0019] A method and apparatus for drying Marangoni substrates is disclosed, comprising an adjustable spray wand assembly having: a mounting bracket coupled to a support structure of a drying system; a base assembly coupled to the mounting bracket and disposed parallel to a surface of the support structure; and a mounting assembly coupled to and parallel to the base assembly. The mounting assembly is vertically adjustable at two distal ends. The mounting assembly includes an arm to which one or more spray wands are mounted. When secured to the mounting assembly, the one or more spray wands are rotatable about a longitudinal axis.

[0020] Figure 1 A perspective view of a substrate drying system 100 including a spray assembly 104 is shown according to one embodiment. Drying system 100 includes a rinse tank 102 and spray assembly 104. Rinse tank 102 is configured to be filled with a rinse fluid 108, such as deionized water or another suitable fluid for removing particles from substrate 106. In one embodiment, substrate 106 is a semiconductor substrate. In one embodiment, substrate 106 is a 300 mm substrate. In other embodiments, substrate 106 is a 200 mm substrate or a 450 mm substrate.

[0021] Rinse tank 102 is made of the material that is suitable for accommodating rinsing fluid 108, such as aluminum, stainless steel and its alloy or various polymeric materials.Rinse tank 102 has a plurality of sidewalls 110A, 110B, 110C, and these sidewalls limit the volume that size is designed to accommodate substrate 106.Spray assembly 104 is arranged above the rinse tank 102 in drying system 100.Spray assembly 104 comprises two or more spray bars 120a, 120b (generally referred to as 120) that are arranged to pass through the opening (not shown) in spray assembly 104 and on the top of rinsing fluid 108.Spray bar 120 can be located in drying system 100, to form channel 123, and substrate 106 can be transmitted along substrate travel path 112 by channel 123.

[0022] The drying system 100 also includes a lift mechanism (not shown) adapted to vertically lift the substrate 106 away from the rinse fluid 108 and through the spray assembly 104 along a path 112. In one embodiment, the lift mechanism is coupled to the rinse tank 102. In another embodiment, the lift mechanism is coupled to a support surface 114, which can serve as a sidewall of the drying system 100.

[0023] As the substrate 106 is lifted through the spray assembly 104, volatile organic compound (VOC) vapor is directed by one or more spray wands 120 toward the air / liquid interface on either side of the substrate 106 to dry the substrate 106. In one embodiment, the VOC vapor is isopropyl alcohol (IPA) or another suitable compound and is supplied to the spray assembly 104 via a flexible vapor supply fitting 116 and a vapor line 118. In one embodiment, the spray assembly 104 is coupled to a support surface 114. In other embodiments, the spray assembly 104 is coupled to other surfaces within the drying system 100, including the sidewalls 110A, 110B, and 110C of the rinse tank 102.

[0024] Figure 2 1 shows a perspective view of the spray assembly 104 according to one embodiment. The spray assembly 104 includes a mounting bracket 202, a base assembly 204, and a mounting assembly 206. The mounting bracket 202 is coupled to a support structure within the drying system 100, such as the support surface 114, as shown. Figure 1 In some embodiments, mounting bracket 202 is coupled to sidewalls 110A, 110B, and 110C of rinse tank 102. Mounting bracket 202 can be coupled to the support structure via one or more screws, pins, hooks, clamps, latches, etc. Thus, mounting bracket 202 provides an attachment point for spray assembly 104 within drying system 100.

[0025] The base assembly 204 is coupled to the mounting bracket 202. The base assembly 204 and the mounting bracket 202 together provide static mechanical support for the spray assembly 104. In one embodiment, the base assembly 204 is an elongated square rail coupled to the mounting bracket 202 at both distal ends of the base assembly, such as Figure 2 . However, in other embodiments, the size, shape, and coupling point of the base assembly 204 to the mounting bracket 202 may vary. For example, the base assembly 204 may be a short, circular rod that couples to the mounting bracket 202 at its midpoint. In some embodiments, the base assembly 204 is permanently secured to the mounting bracket 202 to form a single fixture. The base assembly 204 and the mounting bracket 202 are positioned along the support surface 114 or other support structure such that the base assembly 204 is positioned perpendicular to the travel path 112 along which the substrate 106 travels within the drying system 100.

[0026] The mounting assembly 206 is coupled to the base assembly 204. The mounting assembly 206 can be disposed above, below, or adjacent to the base assembly 204. The mounting assembly 206 includes one or more arms 208 extending from the crossbar 205. In one embodiment, the arms 208 are oriented perpendicularly relative to the longitudinal length of the crossbar 205 and the base assembly 204. In one embodiment, two arms 208 are disposed at opposite distal ends 219a and 219b (collectively 219) of the crossbar 205 to approximate a "C" shape when viewed from a top or bottom angle, as shown in FIG. Figure 2 In another embodiment, one or more arms 208 extend from the mounting assembly 206 at a non-orthogonal angle relative to the crossbar 205. In yet another embodiment, one or more arms 208 extend from an intermediate point on the crossbar 205.

[0027] The arms 208 provide a coupling point for one or more spray wands 120. The spray wands 120 are removably coupled to the arms 208. In one embodiment, two spray wands 120 ( Figure 1 The spray wands 120 are positioned parallel to each other at a distance that allows the substrate 106 to be lifted between the two spray wands 120 on the travel path 112, allowing steam to be sprayed simultaneously toward two opposing sides of the substrate 106. The spray wands 120 are secured to the arm 208 via clamps 210 or other suitable means. In one embodiment, the spray wands 120 can be positioned through horizontal bores 209 in the arm 208. When secured to the arm 208, the spray wands 120 can be rotated about their longitudinal axis to facilitate spraying steam toward the substrate 106 at any desired angle on the travel path 112.

[0028] The crossbar 205 has a plurality of holes disposed therethrough. The plurality of holes extend perpendicularly through the crossbar 205 from the top surface 207 to a bottom surface (not shown) facing the base assembly 204. The plurality of holes include guide holes 213, locking holes 215, and leveling holes 217. In one embodiment, the plurality of holes 211 on the crossbar 205 include a pair of guide holes 213, a pair of locking holes 215, and a pair of leveling holes 217. In one embodiment, one of each pair of guide holes 213, locking holes 215, and leveling holes 217 is disposed at each distal end 219 of the crossbar 205, as shown in FIG. Figure 2 shown.

[0029] A guide hole 213, a locking hole 215, and a leveling hole 217 are disposed laterally adjacent to each other at each distal end 219 of the crossbar 205. Each guide hole 213 may be centrally disposed on the crossbar 205 relative to the locking hole 215 and the leveling hole 217. Each leveling hole 217 may be disposed at a distal end of the crossbar 205 relative to the guide hole 213 and the locking hole 215. Each locking hole 215 may be disposed midway between the guide hole 213 and the leveling hole 217 at each distal end 219 of the crossbar 205, as shown. Figure 2 However, the spatial arrangement and order of the guide holes 213, locking holes 215 and leveling holes 217 are contemplated to be interchangeable.

[0030] The guide pin 212, leveler 214, and locking screw 216 extend through the guide hole 213, the leveling hole 217, and the locking hole 215, respectively. In one embodiment, each of a pair of the guide pin 212, leveler 214, and locking screw 216 extends through the guide hole 213, the leveling hole 217, and the locking hole 215 at each distal end 219 of the crossbar 205. The guide pin 212, leveler 214, and locking screw couple the mounting assembly 206 to the base assembly 204.

[0031] The guide pin 212 extends through the guide hole 213 and is coupled to the base assembly 204 (e.g., in contact with the base assembly 204) to stabilize the mounting assembly 206 relative to the base assembly 204. The guide hole 213 has a wider diameter than the guide pin 212 and is smoothly drilled to provide alignment of the mounting assembly 206 with the base assembly 204 while also facilitating tilting of the spray assembly 104. That is, the guide hole 213 provides some wiggle room for the guide pin 212 so that the mounting assembly 206 can be tilted in the horizontal plane about an axis perpendicular to the crossbar 205 while still being aligned with the base assembly 204 along a vertical plane (e.g., in the vertical direction).

[0032] The leveler 214 extends through the leveling hole 217 and is coupled to the base assembly 204 (e.g., in contact with the base assembly 204) to enable vertical adjustment and tilting of the spray assembly 104. The leveling hole 217 and the leveler 214 are threaded to allow the leveler 214 to be twisted through the leveling hole 217. Twisting the leveler 214 within the leveling hole 217 vertically raises or lowers the mounting assembly 206 relative to the base assembly 204.

[0033] exist Figure 2 In the illustrated embodiment, the mounting assembly 206 can be raised or lowered uniformly at each distal end 219 by equally twisting the levelers 214, thereby making the mounting assembly 206 substantially parallel to the horizontal plane. Alternatively, the mounting assembly 206 can be tilted vertically toward either distal end 219 by variably twisting each leveler 214. That is, twisting only one of a pair of levelers 214, twisting both levelers 214 in the same direction by unequal amounts, or twisting each leveler 214 in different directions will tilt the mounting assembly 206 relative to the base assembly 204, as shown. Figure 3C shown.

[0034] The locking screws 216 extend through the locking holes 215 and are coupled to (e.g., contacting) the base assembly 204 to secure the mounting assembly 206 in place. The locking screws 216 and locking holes 215 are threaded to allow the locking screws 216 to be twisted through the locking holes 215. Once the mounting assembly 206 is adjusted to the desired height and tilt using the twist leveler 214, the locking screws 216 are twisted through the locking holes 215 to secure the mounting assembly 206 in the desired position. To accommodate tilting of the mounting assembly 206 without causing the locking screws 216 to become stuck within the locking holes 215, each locking screw 216 is coupled to a pair of annular washers 225. Each of the pair of annular washers 225 is disposed at one opening of each locking hole 215, located on the top surface 207 and bottom surface (not shown) of the crossbar 205. Annular washer 225 automatically adjusts the orientation of locking screw 216 within locking hole 215 so that locking screw 216 extends substantially straight through locking hole 215 , thereby compensating for any angular deviation caused by tilting of mounting assembly 206 .

[0035] In addition to rotating the spray wand 120 disposed in the arm 208, the combination of tilting, raising, and lowering the mounting assembly 206 via the leveler 214 enables the spray wand 120 to be adjusted to a desired position about the x-axis, y-axis, and z-axis for directing vapor onto a passing substrate. More specifically, the spray wand 120 can rotate about the x-axis and the z-axis, and move linearly about the y-axis. Figure 2As shown, the x-axis is a horizontal line parallel to the longitudinal axis of the mounting assembly 206 and the spray wand 120. The y-axis is a line perpendicular to the longitudinal axis of the mounting assembly 206 and the spray wand 120 in the vertical direction. The z-axis is a line perpendicular to the longitudinal axis of the mounting assembly 206 and the spray wand 120 in the horizontal direction.

[0036] Figures 3A-3C The adjustable properties of the spray assembly 104 are shown according to some embodiments. Figure 3A FIG. 1 shows a side view of the spray assembly 104 in a raised position according to one embodiment. Figure 3A , a pair of leveling screws 214, respectively located at opposite distal ends 219 of crossbar 205, have been torqued equally in one direction (e.g., clockwise). The equal torqueing of threaded leveling screws 214 through threaded leveling holes 217 causes mounting assembly 206, and therefore spray wand 120, to be uniformly raised a distance 302 from baseline B at both distal ends 219 of mounting assembly 206. While the leveling screws 214 are being torqued, base assembly 204 remains stationary, serving as a mechanical support and coupling point for the leveling screws 214. This widens any gap between base assembly 204 and mounting assembly 206 prior to adjustment. Once mounting assembly 206 is raised to the desired position, threaded locking screws 216 are torqued through threaded locking holes 215 to secure mounting assembly 206 in place.

[0037] Figure 3B FIG. 1 shows a side view of the spray assembly 104 in a lowered position according to one embodiment. Figure 3B In the embodiment, a pair of leveling screws 214 located at opposite distal ends 219 of the crossbar 205 are already in contact with the Figure 3A The threaded leveling screws 214 are twisted equally in opposite directions (e.g., counterclockwise). Equal twisting of the threaded leveling screws 214 through the threaded leveling holes 217 uniformly lowers the mounting assembly 206, and therefore the spray wand 120, at both distal ends 219 of the mounting assembly 206 by a distance 306 from the baseline B. During the twisting of the leveling screws 214, the base assembly 204 remains stationary, serving as a mechanical support and coupling point for the leveling screws 214. Thus, any gap between the base assembly 204 and the mounting assembly 206 prior to adjustment is reduced. Once the mounting assembly 206 is lowered to the desired position, the threaded locking screws 216 are twisted through the threaded locking holes 215 to secure the mounting assembly 206 in place.

[0038] exist Figure 3A and Figure 3B In the depicted embodiment, the maximum vertical adjustment allowance of the spray assembly 104 is envisioned to be 10 mm or 5 mm in the upward or downward directions. However, the maximum adjustment allowance may vary depending on the horizontal length of the spray assembly 104.

[0039] Figure 3C FIG. 1 shows a side view of the spray assembly 104 in an inclined or angled position according to one embodiment. Figure 3C , the leveling screws 214 have been twisted in opposite directions (e.g., clockwise and counterclockwise), causing one distal end 219b of the mounting assembly 206 to be raised while the opposite distal end 219a is lowered. Variable adjustment of each distal end 219 positions the mounting assembly 206 at an angle 304 relative to the base assembly 204. Although depicted in only one tilted orientation, the mounting assembly 206 can be tilted in either direction. Additionally, in Figure 3C In the illustrated embodiment, the maximum tilt adjustment allowed for the mounting assembly 206 is contemplated to be 0.5° or 0.25° in either direction. However, it is also contemplated that the maximum tilt adjustment allowed may vary depending on the horizontal length of the mounting assembly 206.

[0040] Figure 4 The present invention is a flow chart depicting an example method 400 for performing Marangoni drying on a substrate using the apparatus described above. In operation 402, a spray assembly is provided. The spray assembly includes a base assembly coupled to one or more mounting brackets. The mounting assembly is further coupled to the base assembly. Two spray wands are positioned and secured to the mounting assembly via a fixture at a distance sufficient for the substrate to pass through. In operation 404, a leveler extending through the mounting assembly and coupled to the base assembly is twisted to raise, lower, or tilt the mounting assembly, and thereby raise, lower, or tilt the spray wand. In operation 406, the spray wand is rotated about its longitudinal axis to a desired angle for directing vapor onto the substrate. As a result of operations 404 and 406, the combination of rotating, tilting, and raising or lowering the spray wand enables the spray wand to be adjusted to a desired position and orientation about the x-, y-, and z-axes for directing vapor toward a passing substrate. More specifically, the spray wand can rotate about the x- and z-axes and move linearly along the y-axis.

[0041] In operation 408, the substrate is removed from the rinse tank via a lifting mechanism within the drying system and passed between spray bars within the spray assembly. As the substrate passes through the spray bar assembly, vapor is expelled from the spray bars and directed onto both surfaces of the substrate. After the drying process, in operation 410, the dried substrate is inspected for any remaining defects, such as streaks, spots, and residue. Finally, in operation 412, the user adjusts the height and orientation of the spray bar to correct any defects found on the substrate surface. This adjustment can be made manually by twisting a leveling screw and rotating the spray bar within the spray assembly.

[0042] Alternatively, defect analysis and subsequent adjustments can be automated. For example, an automated defect inspection tool can be used to analyze substrates for defects. A user can then input the desired position and orientation of the spray wand using a graphical user interface located on the drying system itself or on a separate computer terminal. Once entered, the drying system can then automatically adjust the spray wand prior to the next drying cycle to correct the defects detected by the inspection tool. It is further contemplated that the entire process of defect inspection and spray wand assembly adjustment can be fully automated, eliminating the need for any user input or intervention.

[0043] Embodiments herein advantageously minimize surface defects in substrates caused by the Marangoni drying process. In conventional Marangoni drying systems, after water cleaning, a static spray bar delivers solvent vapor to the front and back sides of the substrate. Variations in chamber conditions between substrate batches (such as differences in the fluid levels and configuration of the rinse tank) can lead to inconsistent drying results with fluctuating streaks, spots, and other residual marks on the substrate surface. By utilizing a spray bar assembly adjustable along the x-, y-, and z-axes, embodiments herein provide an apparatus and method for minimizing inconsistencies or drying results between drying systems.

[0044] While the foregoing is directed to embodiments of the present disclosure, other and further embodiments of the disclosure may be devised without departing from the basic scope thereof, and the scope of the disclosure is determined by the claims that follow.

Claims

1. A device comprising: substrate; A mounting assembly is disposed on top of the base, the mounting assembly comprising: a crossbar having a plurality of apertures extending from a top surface of the crossbar to a bottom surface of the crossbar; a guide pin disposed within one of the plurality of apertures in the crossbar and in contact with the base, the guide pin configured to align the base and the mounting assembly and the one of the plurality of apertures having a wider diameter than the guide pin; a leveler disposed within one of the plurality of apertures in the crossbar and in contact with the base, the leveler configured to position the crossbar relative to the base; and two arms coupled to the crossbar, each arm being orthogonally disposed at opposite distal ends of the crossbar and configured to support one or more spray wands, The one or more spray bars can be adjusted to a desired position and orientation about the x-axis, y-axis and z-axis.

2. The apparatus of claim 1, wherein at least one of the plurality of apertures is a smooth hole adapted to mate with the guide pin.

3. The apparatus of claim 2, wherein the guide pins are configured to align the base and the mounting assembly in a vertical direction.

4. The apparatus of claim 3, wherein the smooth bore is conical to facilitate tilting of the mounting assembly.

5. The apparatus of claim 1, wherein at least one of the plurality of apertures is a threaded hole adapted to mate with the leveler.

6. The apparatus of claim 5, wherein twisting of the leveler within the threaded hole causes the mounting assembly to be raised or lowered.

7. The apparatus of claim 1, further comprising a locking screw disposed within one of the plurality of apertures, wherein at least one of the plurality of apertures is a threaded hole adapted to mate with the locking screw.

8. The apparatus of claim 7, wherein the locking screw is configured to secure the mounting assembly in a desired position relative to the base.

9. The apparatus of claim 8, wherein the locking screw is coupled to a spherical washer to facilitate tilting of the mounting assembly.

10. A device comprising: substrate; A mounting assembly is disposed on top of the base, the mounting assembly comprising: a crossbar having a plurality of first apertures extending from a top surface of the crossbar to a bottom surface of the crossbar and two distal ends; two or more guide pins disposed within the plurality of first apertures of the crossbar and in contact with the base, wherein at least one guide pin is located at each distal end of the crossbar, and wherein the plurality of first apertures have a wider diameter than the two or more guide pins; two or more levelers disposed within the plurality of first apertures and in contact with the base, wherein at least one leveler is located at each distal end of the crossbar; and two arms coupled to the crossbar, each arm being orthogonally disposed at opposite distal ends of the crossbar and comprising one or more second apertures; and one or more spray bars disposed in said one or more second orifices of said two arms, The one or more spray bars can be adjusted to a desired position and orientation about the x-axis, y-axis and z-axis.

11. The apparatus of claim 10, wherein two spray bars are disposed in the one or more second apertures, the spray bars being positioned to form a channel through which the substrate can be conveyed.

12. The apparatus of claim 11, wherein each spray bar is configured to direct vapor toward opposite sides of the substrate as the substrate is conveyed through the channel.

13. The apparatus of claim 10, wherein the one or more spray wands are rotatable about a longitudinal axis of the one or more spray wands when disposed within the mounting assembly.

14. The apparatus of claim 10, wherein each of the two or more levelers can be individually twisted by a different amount to tilt the mounting assembly.

15. The apparatus of claim 10, wherein each of the two or more levelers can be individually twisted by equal amounts to uniformly raise or lower the mounting assembly on a horizontal plane.

16. A method for drying a substrate using the apparatus of any one of claims 1 to 15, the method comprising: Positioning a spray wand assembly within a drying system, the spray wand assembly comprising: a mounting bracket; a base coupled to the mounting bracket; a mounting assembly coupled to the base; and one or more spray wands coupled to the mounting assembly and adapted to direct vapor toward a substrate; Adjusting the spray wand to a desired position and orientation about the x-axis, y-axis, and z-axis; lifting the substrate from the rinse tank and through the spray wand assembly; and Vapor is directed from the spray wand assembly onto the surface of the substrate.

17. The method of claim 16, further comprising: The surface of the substrate is analyzed for defects and the position and rotation of the one or more spray bars are adjusted to correct the defects.

18. The method of claim 17, wherein the defect analysis and spray wand adjustment are automated.

19. The method of claim 18, wherein a user can adjust position and rotation parameters of the one or more spray wands via a graphical user interface.

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