A slit extrusion type high-precision flat plate coating machine and coating method

Abstract

The invention discloses a slit extrusion type high-precision flat plate coating machine and a coating method, belonging to the technical field of coating machines, comprising a workbench frame, the coating machine further comprising: an adsorption platform positioning device arranged on the workbench frame; a coating head Z-axis motion mechanism arranged on the workbench frame, the coating head Z-axis motion mechanism is equipped with a coating die head mechanism and drives the coating die head mechanism to perform lifting movement in the Z-axis direction, and the coating die head mechanism cooperates with the Y-axis direction movement of the adsorption platform positioning device to coat the workpiece; a coating head cleaning device arranged on the workbench frame and adapted to the coating die head mechanism, and the coating die head mechanism is cleaned by the X-axis direction movement of the coating head cleaning device; wherein the coating die head mechanism is connected to a coating liquid supply device through a pipeline control system, and the coating head cleaning device is connected to a cleaning liquid supply device, so as to achieve the purpose of coating various materials with different viscosities and realizing high performance, high uniformity and high efficiency coating.

Description

Technical Field

[0001] The present invention belongs to the technical field of coating machines, and in particular, relates to a slit extrusion type high-precision flat plate coating machine and a coating method. Background Art

[0002] Typically in the manufacturing process of semiconductor devices and flat panel displays (FPD), a process is performed in which a photosensitive material that reacts to a light source is coated on a thin film that performs a specific function on a processed substrate (glass substrate), such as an oxide film, a metal film, a semiconductor film, etc., in a desired shape in order to pattern the thin film.

[0003] Slot coating is a coating technology that presses the coating liquid out along the gap of the mold under a certain pressure and transfers it to the moving substrate. It represents the future development direction of wet coating with its fast coating speed, good coating uniformity, wide coating window and other characteristics. Slot coating (Slot Die Coating) is a high-precision coating method, which is not only used for optical films (brightness enhancement films, hardcoat, polarizing films, diffusion films, etc.), OLED coating, etc., but also can be used for coating roll substrates such as organic solar cells OPV and perovskite solar cells PVK, and is also used for non-continuous substrates such as LCD glass substrate photoresist coating.

[0004] Slit coating technology is suitable for various coating liquids and can be widely used in coating on different substrate surfaces, such as glass, stainless steel and plastic substrates, etc. It can achieve efficient, uniform and high-performance coating of different functional materials.

[0005] With the rapid development of the panel industry, the requirements for coating technology are getting higher and higher. The viscosity of the coating liquid can reach up to 10000cps, and the coating thickness must be uniform and consistent, better than ±2%; high efficiency / high material utilization, the material utilization rate can reach more than 98%; to achieve full-automatic loading and unloading methods and the yield must reach more than 99%. In response to these new process requirements, the existing coating machines on the market have poor coating thickness uniformity, bubbles and impurities in the coating, and a yield of about 95%. The viscosity of the coating liquid is within 5000cps and the loading method is manual loading. Summary of the invention

[0006] In view of this, in order to solve the above-mentioned problems existing in the prior art, the purpose of the present invention is to provide a slit extrusion high-precision flat plate coater and a coating method so as to achieve the purpose of coating various materials with different viscosities and achieving high performance, high uniformity and high efficiency coating.

[0007] The technical solution adopted by the present invention is: a slit extrusion type high-precision flat plate coating machine, including a workbench frame, and the coating machine also includes:

[0008] An adsorption platform positioning device provided on the workbench frame;

[0009] A coating head Z-axis motion mechanism is arranged on the workbench frame, wherein the coating head Z-axis motion mechanism is equipped with a coating die head mechanism and drives the coating die head mechanism to move up and down in the Z-axis direction, and the coating die head mechanism cooperates with the Y-axis direction movement of the adsorption platform positioning device to coat the workpiece;

[0010] A coating head cleaning device is arranged on the workbench frame and matched with the coating die head mechanism, and the coating die head mechanism is cleaned by the coating head cleaning device moving in the X-axis direction;

[0011] Wherein, the coating die head mechanism is connected to a coating liquid supply device through a pipeline control system, and the coating head cleaning device is connected to a cleaning liquid supply device.

[0012] Furthermore, the adsorption platform positioning device comprises:

[0013] A linear motor that moves along the Y-axis;

[0014] The platform component is used for placing the workpiece and is mounted on the linear motor through the motor mounting plate. The platform component is driven by the linear motor to move along the Y-axis direction.

[0015] Furthermore, a buffer is provided at one end of the motion path of the linear motor, and the buffer provides a buffering force to the motion of the linear motor.

[0016] Furthermore, the platform components include:

[0017] A platform body, wherein a plurality of adsorption holes are distributed on the platform body, and the platform body is connected to the motor mounting plate through at least three supporting components;

[0018] At least three ejectors slidably disposed in the platform body, each of the ejectors being mounted on an ejector base frame and the ejector base frame being provided with an ejector lifting cylinder for driving the ejector to rise and fall;

[0019] At least three alignment components are arranged around the platform body, and the workpiece is positioned through the joint action of each alignment component.

[0020] Furthermore, the support assembly includes a connecting flange arranged on the platform body, an adjusting screw connected to the connecting flange, and a flange plate connected to the adjusting screw, and the flange plate is mounted on the motor mounting plate.

[0021] Furthermore, the correction component includes:

[0022] A return block, wherein the return block is connected to a return cylinder for driving the return block to move up and down;

[0023] The slide cylinder is installed on the platform body, and the alignment cylinder is slidably arranged on the slide along the side direction perpendicular to the platform body, and the alignment cylinder is driven to move by the slide cylinder.

[0024] Furthermore, the coating die head mechanism comprises:

[0025] A coating nozzle, wherein the coating nozzle is provided with a liquid discharge joint and a liquid inlet joint;

[0026] A nozzle mounting plate connected to the coating nozzle, wherein both ends of the nozzle mounting plate are hingedly connected to the coating head Z-axis motion mechanism;

[0027] The coating nozzle is hingedly installed. The relative position between the coating nozzle and the adsorption platform is measured by a contact displacement sensor. The coating gap between the coating nozzle and the glass substrate can be automatically adjusted, thereby enabling high-precision and dynamic control of the height of the coating nozzle.

[0028] Furthermore, the coating head Z-axis motion mechanism comprises:

[0029] Two symmetrically arranged stands, with a connecting plate connected between the two stands;

[0030] A servo modules are respectively arranged on each of the stands and are symmetrically arranged, wherein the A servo modules are equipped with a connector through a servo mounting plate and drive the servo mounting plate to move in the Z-axis direction, and the connector is connected to the nozzle mounting plate;

[0031] The balancing cylinders are respectively arranged on both sides of the connecting plate, and each of the balancing cylinders is connected to its corresponding servo mounting plate through a floating joint and drives the servo mounting plate to move in the Z-axis direction.

[0032] Furthermore, the connector comprises:

[0033] Nut connecting plate mounted on the servo mounting plate;

[0034] An adjustment plate mounted on the nut connecting plate, with fixed plates symmetrically arranged at both ends of the adjustment plate;

[0035] The rotating plate is in a U-shape, wherein two arms of the rotating plate are mounted on a fixed plate through bearings, and a pad is arranged at the bottom of the rotating plate.

[0036] Furthermore, the coating head cleaning device comprises:

[0037] A mounting seat installed between the two stands;

[0038] A B servo module is arranged on the mounting seat, wherein the B servo module is connected to a cleaning scraper, and a cleaning nozzle is arranged on one side of the cleaning scraper;

[0039] The coating head cleaning device can better remove the residual coating liquid on the coating head and effectively improve the coating uniformity.

[0040] Furthermore, the coating head cleaning device also includes:

[0041] A waste liquid collection box is arranged below the coating die head mechanism, and the waste liquid collection box is connected to an adjusting cylinder and driven by the adjusting cylinder to move along the Y-axis direction;

[0042] The scraper installed on the side of the waste liquid collection box cleans the nozzle.

[0043] Furthermore, the coating head cleaning device also includes:

[0044] A mounting base plate mounted between the two stands;

[0045] A coating head soaking box is arranged below the coating die head mechanism, the coating head soaking box is connected to at least one telescopic cylinder driving it to move along the Y-axis direction, and the telescopic cylinder is installed on the mounting base plate;

[0046] The coating head soaking box can reduce the cleaning cycle of the coating nozzle, thereby improving efficiency.

[0047] Furthermore, the coating liquid supply device and the cleaning liquid supply device both include:

[0048] At least two stirring pressure barrels, each of which is provided with a weighing sensor below, and each of which is connected with a nitrogen pipe and a liquid supply pipe, and each of which is connected in parallel to form a liquid supply output joint;

[0049] The compressed air pipes are respectively connected to the stirring pressure barrels, and the stirring pressure barrels are evacuated through the compressed air pipes, thereby reducing coating defects caused by bubbles and improving the yield of the equipment.

[0050] Furthermore, the pipeline control system includes:

[0051] A nitrogen pressure sensor is respectively arranged on each of the nitrogen pipes, and each of the nitrogen pressure sensors is connected to a nitrogen pressure display instrument;

[0052] A coating liquid pipe connected to a liquid supply output joint in a coating liquid supply device, wherein the coating liquid pipe is connected to a temporary storage tank and the temporary storage tank is provided with a liquid level sensor for monitoring its liquid level, the temporary storage tank is connected to a filter via an intermediate pipeline and a hydraulic control valve and a servo injection pump are provided on the intermediate pipeline, the filter is connected to a coating die mechanism via a liquid inlet pipeline and the coating die mechanism is connected to a liquid discharge pipeline;

[0053] Wherein, the liquid inlet pipeline and the liquid discharge pipeline are respectively provided with a liquid inlet hydraulic control valve and a liquid discharge hydraulic control valve.

[0054] The present invention also provides a slit extrusion high-precision flat plate coating method, which comprises:

[0055] S1: Place the workpiece on the adsorption platform positioning device through the manipulator, and position the workpiece through the adsorption platform positioning device and adsorb it firmly;

[0056] S2: The adsorption platform positioning device moves toward the Y-axis direction, and the coating die head mechanism is driven by the coating head Z-axis motion mechanism to descend to a preset position, and the coating die head mechanism coats the workpiece according to preset parameters;

[0057] S3: The adsorption platform positioning device continues to move in the Y-axis direction until the coating of the workpiece is completed;

[0058] S4: the coating die head mechanism stops and returns to the initial position, and the coating head cleaning device is started to clean the coating die head mechanism;

[0059] S5: The adsorption platform positioning device switches to the unloading state. After the workpiece is taken out by the robot, the adsorption platform positioning device returns to the loading state to carry out the coating process of the next workpiece.

[0060] The beneficial effects of the present invention are:

[0061] 1. The slit extrusion high-precision flat-plate coating machine and coating method provided by the present invention cooperate with each other through the adsorption platform positioning device, the coating head Z-axis motion mechanism, the coating die head mechanism, the coating head cleaning device, the coating liquid supply device and the cleaning liquid supply device. The coating head can be automatically cleaned by the coating head cleaning device and the pipeline control system can achieve stable coating liquid supply control, thereby realizing full-automatic coating of the glass substrate, and various materials with different viscosities can be coated on the glass substrate. At the same time, it has the advantages of high precision, high yield, good coating consistency and high reliability. Furthermore, the coating machine has the advantages of high performance, high uniformity and high efficiency during operation, and has wide promotion value. BRIEF DESCRIPTION OF THE DRAWINGS

[0062] Figure 1 It is a schematic diagram of the overall structure of the slit extrusion type high-precision flat plate coating machine provided by the present invention;

[0063] Figure 2 It is a schematic diagram of the overall internal layout of the slit extrusion type high-precision flat plate coating machine provided by the present invention;

[0064] Figure 3It is a structural schematic diagram of the adsorption platform positioning device in the slot extrusion type high-precision flat plate coating machine provided by the present invention;

[0065] Figure 4 It is a structural schematic diagram of a platform component in the adsorption platform positioning device provided by the present invention;

[0066] Figure 5 It is a structural schematic diagram of a coating die head mechanism in a slot extrusion type high-precision flat plate coating machine provided by the present invention;

[0067] Figure 6 It is a structural schematic diagram of the Z-axis motion mechanism of the coating head in the slit extrusion type high-precision flat-plate coating machine provided by the present invention;

[0068] Figure 7 It is a structural schematic diagram of the Z-axis motion mechanism of the coating head in the slit extrusion type high-precision flat-plate coating machine provided by the present invention from another perspective;

[0069] Figure 8 It is a schematic diagram of the assembly of the coating head Z-axis motion mechanism and the coating head cleaning device in the slot extrusion type high-precision flat plate coating machine provided by the present invention;

[0070] Fig. 9 It is a structural schematic diagram of a coating head cleaning device in a slit extrusion type high-precision flat-plate coating machine provided by the present invention;

[0071] Fig.10 It is a structural schematic diagram of a coating liquid supply device in a slit extrusion type high-precision flat plate coating machine provided by the present invention;

[0072] Fig.11 It is a structural schematic diagram of a pipeline control system in a slot extrusion type high-precision flat plate coating machine provided by the present invention;

[0073] Fig.12 It is a schematic diagram of pipeline connection in the slit extrusion type high-precision flat plate coating machine provided by the present invention;

[0074] Fig.13 It is an overall schematic diagram of the slit extrusion type high-precision flat plate coating method provided by the present invention during operation;

[0075] The following are marked in the attached figure:

[0076] 1-frame cover, 2-coating liquid supply device, 3-cleaning liquid supply device, 4-workbench frame, 5-adsorption platform positioning device, 6-coating head cleaning device, 7-coating head Z-axis motion mechanism, 8-pipeline control system, 9-coating die head mechanism, 10-platform body, 11-reset block, 12-thrust needle head, 13-motor mounting plate, 14-linear motor, 15-cable protection chain, 16-high-precision linear guide rail, 17-buffer, 18-grating ruler, 19-slide cylinder, 20-reset cylinder, 21-contact displacement sensor, 22 - Ejector lifting cylinder, 23- ejector, 24- cylindrical magnet seat, 25- ejector base, 26- connecting flange, 27- adjusting screw, 28- flange plate, 29- eyebolt, 30- nozzle mounting plate, 31- coating nozzle, 32- liquid inlet connector, 33- liquid discharge connector, 34- connecting plate, 35- shock absorbing rubber pad, 36- servo mounting plate, 37- photoelectric sensor, 38- stand, 39- A servo module, 40- servo motor, 41- balancing cylinder, 42- floating joint, 43- adjustment plate, 44- nut connecting plate, 45- adjustment Connecting plate, 46-bearing mounting plate, 47-bearing rib, 48-rotating shaft, 49-bearing, 50-shim plate, 51-rotating plate, 52-fixed plate, 53-mounting base plate, 54-mounting seat, 55-cleaning nozzle, 56-cleaning scraper, 57-B servo module, 58-waste liquid collection box, 59-scraper cleaning nozzle, 60-adjusting cylinder, 61-coating head soaking box, 62-telescopic cylinder, 63-weighing sensor, 64-stirring pressure barrel, 65-safety door, 66-weighing sensor controller, 67-nitrogen pressure display instrument, 68 -protective cabinet, 69-coating liquid pipe, 70-fire sprinkler, 71-nitrogen pipeline, 72-temperature sensor, 73-compressed air pipe, 74-hydraulic control valve, 75-nitrogen pressure sensor, 76-fire control cabinet, 77-nozzle zero point display instrument, 78-pressure display instrument, 79-liquid discharge hydraulic control valve, 80-liquid inlet hydraulic control valve, 81-discharge port, 82-feed port, 83-nitrogen gas control valve, 84-shockproof pad, 85-temporary storage tank, 86-liquid level sensor, 87-lower frame, 88-servo injection pump, 89-filter, 90-needle valve. DETAILED DESCRIPTION

[0077] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Generally, the components of the embodiments of the present invention described and shown in the drawings here can be arranged and designed in various different configurations.

[0078] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the invention claimed for protection, but merely represents selected embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0079] It should be noted that, in the absence of conflict, the embodiments of the present invention and the features in the embodiments may be combined with each other.

[0080] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, further definition and explanation thereof is not required in subsequent drawings.

[0081] In the description of the embodiments of the present invention, it should be noted that the indicated orientation or positional relationship is based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship in which the invention product is usually placed when in use, or the orientation or positional relationship commonly understood by those skilled in the art, or the orientation or positional relationship in which the invention product is usually placed when in use, which is only for the convenience of describing the present invention and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention. In addition, the terms "first" and "second" are only used to distinguish the description, and cannot be understood as indicating or implying relative importance.

[0082] In the description of the embodiments of the present invention, it is also necessary to explain that, unless otherwise clearly specified and limited, the terms "setting" and "connection" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a direct connection, or an indirect connection through an intermediate medium. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances; the drawings in the embodiments are used to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. The components of the embodiments of the present invention generally described and shown in the drawings herein can be arranged and designed in various different configurations.

[0083] Example 1

[0084] In this embodiment, a slit extrusion high-precision flat-plate coater is specifically provided. The coater is suitable for coating liquids of various viscosities, and by optimizing the coater, it has high uniformity, high precision, high efficiency and high performance characteristics compared with traditional coaters.

[0085] like Figure 1As shown, the workbench frame 4 is the main part of the coating machine. The workbench frame 4 is the basis for the stable operation of the coating machine, the premise for ensuring the normal operation of the coating machine, and the main component of the coating machine. A lower frame 87 is provided below the workbench frame 4 to support it, and a shockproof pad is provided between the workbench frame 4 and the lower frame 87 for shock absorption.

[0086] like Figure 2 As shown, the coating machine also includes: an adsorption platform positioning device 5, a coating die head mechanism 9, a coating head Z-axis motion mechanism 7, a coating head cleaning device 6, a coating liquid supply device 2, a cleaning liquid supply device 3 and a pipeline control system 8. In actual production, a frame cover 1 placed outside is also provided, and various parts of the coating machine are arranged inside the frame cover 1.

[0087] ①Adsorption platform positioning device

[0088] like Figure 3 , Figure 4 As shown, the adsorption platform positioning device 5 is arranged on the workbench frame 4. The adsorption platform positioning device 5 uses a high-precision linear motor 14 and a high-precision linear slide rail 16 to drive the platform body 10 to move in the coating direction (Y-axis direction), and can accurately control the movement trajectory (including acceleration and deceleration parameters). At the same time, since the platform body 10 can accurately position the glass substrate, the basic flatness of the glass substrate can be guaranteed through the scientific and reasonable arrangement of vacuum adsorption holes. The design of the adsorption platform positioning device 5 is as follows:

[0089] The adsorption platform positioning device 5 includes: a linear motor 14 and a platform assembly, wherein the linear motor 14 drives the platform assembly to move along the Y-axis direction, and high-precision linear slide rails 16 are symmetrically arranged on both sides of the linear motor 14, and a plurality of sliders slide on each of the high-precision linear slide rails 16, and each slider is connected to the motor mounting plate 13, so that the motor mounting plate 13 can move along the direction of the high-precision linear slide rail 16 (i.e., the Y-axis direction) under the driving action of the linear motor 14. At the same time, a cable protection chain 15 is connected to the motor mounting plate 13, and the other end of the cable protection chain 15 is fixed in the wire groove of the workbench frame 4 on one side of the high-precision linear slide rail 16, so as to ensure that when the motor mounting plate 13 moves, the various electrical components thereon can be normally powered by the cables in the cable protection chain 15.

[0090] In order to further ensure that the linear motor 14 drives the motor mounting plate 13 to move in the Y-axis direction, it can operate safely, a buffer 17 is provided at one end of the linear motor 14, and the buffer 17 provides a buffering force for the movement of the linear motor 14. The buffer 17 includes: a buffer plate and buffer rods symmetrically arranged on both sides of the buffer plate, the buffer rods are slidably sleeved on the buffer plate, one end of the buffer rod is provided with a buffer rubber, and the other end is sleeved with a buffer spring; when the motor mounting plate 13 moves to the end of the linear motor 14, the motor mounting plate 13 first collides with the buffer rubber, and the buffer rod moves accordingly. When the buffer rod moves, the buffer spring will provide a buffering force to it, thereby providing a buffer for the movement of the motor mounting plate 13, and preventing the motor mounting plate 13 from moving too fast and causing a large collision and damage.

[0091] The workpiece to be coated is placed on the platform assembly, and the platform assembly is mounted on the linear motor 14 through the motor mounting plate 13. Under the action of the linear motor 14, the platform assembly is driven by the linear motor 14 to move along the Y-axis direction. The linear motor 14 runs smoothly with high repeatability and positioning accuracy. Compared with the lead screw transmission, there is no speed fluctuation, which can improve the thickness uniformity of the coating. When moving along the Y-axis, the motion trajectory of the adsorption platform (including acceleration and deceleration parameters) can be accurately controlled.

[0092] The design of the platform assembly mainly includes: a platform body 10 for adsorbing the glass substrate, a plurality of support assemblies for installing the platform body 10, and a correction assembly for positioning the glass substrate. The platform body 10 adopts a marble platform, which has high processing accuracy and stable dimensions and can meet the flatness requirements of the equipment. The platform body 10 is provided with a plurality of adsorption holes, and negative pressure is formed through each adsorption hole, which mainly serves to adsorb and position the glass substrate. Preferably, in this embodiment, a chessboard-shaped vacuum groove is provided on the marble platform, and each vacuum groove is provided with the adsorption holes, thereby effectively increasing the adsorption area of ​​the glass substrate, which is beneficial to the adsorption stability of the coated glass substrate.

[0093] In this embodiment, the platform body 10 is designed as a rectangular structure, and is connected to the motor mounting plate 13 through support assemblies at the four corners of the platform body 10. As for the design of the support assembly, the support assembly includes a connecting flange 26 provided on the platform body 10, an adjusting screw 27 connected to the connecting flange 26, and a flange plate 28 connected to the adjusting screw 27, and the flange plate 28 is installed on the motor mounting plate 13, thereby realizing the assembly of the platform body 10. In actual application, the flatness of the marble platform can be effectively adjusted by twisting the adjusting screw 27, eliminating the flatness deviation caused by the processing error itself.

[0094] Four ejectors 23 are slidably arranged in the platform body 10. Each of the ejectors 23 is mounted on an ejector base frame 25, and the ejector base frame 25 is equipped with an ejector lifting cylinder 22 for driving the ejector base frame 25 to lift and lower. The lifting and lowering movement of the ejector base frame 25 is realized by the lifting cylinder. When the four ejectors 23 are driven by the ejector base frame 25 to rise to the same height, they can be used to carry the glass substrate. At this time, it is also called the loading and unloading state of the adsorption platform positioning device 5; conversely, when the four ejectors 23 are driven by the ejector base frame 25 to descend, the glass substrate is adsorbed on the platform body 10, and then the glass substrate can be coated. In order to achieve stable and rapid installation of each ejector 23, a cylindrical magnet seat 24 is set at one end of each ejector 23, and is mounted on the ejector base frame 25 through the cylindrical magnet seat 24. The other end of each ejector 23 is an ejector head 12.

[0095] Six alignment components are arranged around the platform body 10, and every two alignment components form a pair, and the alignment components of the same pair are arranged on opposite sides of the platform body 10. In this embodiment, based on the size of the platform body 10, a pair of alignment components are arranged on the short side of the platform body 10 and two pairs of alignment components are arranged on the long side, and the workpiece is positioned by the joint action of each alignment component.

[0096] As for the design of the correction component, the correction component includes: a correction block 11 and a slide cylinder 19 installed on the platform body 10. The correction block 11 is connected to a correction cylinder 20 that drives it to move up and down. Under the action of the correction cylinder 20, the correction block 11 rises so that it can correspond to the side height position of the glass substrate. Preferably, the correction block 11 is set to a cylindrical structure to ensure point-to-point contact between the correction block 11 and the glass substrate. At the same time, the correction block 11 and the piston rod of the correction cylinder 20 should be movably sleeved.

[0097] The return cylinder 20 is slidably arranged on the slide table in a direction perpendicular to the side of the platform body 10, and the return cylinder 20 is driven to move by the slide cylinder 19, and then the return block 11 connected to the return cylinder 20 also slides in a direction perpendicular to the side of the platform body 10. In order to ensure that the return block 11 can well contact the glass substrate, a notch groove matching the return block 11 is opened on the side of the platform body 10 to leave room for the movement of the return block 11.

[0098] Its working principle is: when the glass substrate is placed on the surface of the platform body 10, the return block 11 is first raised by the return cylinder 20 until it can correspond to the side of the glass substrate; then the slide cylinder 19 is retracted, and the retraction distance of each slide cylinder 19 is preset, so that under the action of each slide cylinder 19, the glass substrate can be accurately positioned. At this time, the adsorption function of the platform body 10 is started to firmly adsorb the glass substrate, and then the return cylinder 20 and the slide cylinder 19 are returned to their original positions.

[0099] ②Coating head Z-axis motion mechanism

[0100] like Figure 6 , Figure 7 as well as Figure 8 As shown, a coating head Z-axis motion mechanism 7 is provided on the workbench frame 4. The coating head Z-axis motion mechanism 7 is composed of high-precision servo modules on both sides, a high-precision grating ruler 18, and the coating head is hingedly mounted on the coating head Z-axis motion mechanism 7, so that the coating head can be adjusted in angle. In practical application, the coating head Z-axis motion mechanism 7 has the advantages of high precision in controlling the coating gap and dynamically controlling the height of the coating head in the Z-axis direction.

[0101] The coating head Z-axis motion mechanism 7 comprises: two symmetrically arranged stands 38 with a connecting plate 34 connected between the two stands 38, A servo modules 39 symmetrically arranged on each stand 38, and balancing cylinders 41 respectively arranged on both sides of the connecting plate 34. A shock-absorbing rubber pad 35 is provided between the ends of the connecting plate 34 and the stands 38.

[0102] The A servo module 39 is equipped with a connector through the servo mounting plate 36 and drives the servo mounting plate 36 to move in the Z-axis direction. The A servo module 39 includes a servo motor 40, and the A servo module 39 is equipped with a photoelectric sensor 37 during operation. Two groups of photoelectric sensors 37 respectively detect the origin and end point of the A servo module 39 during movement. It is connected to the nozzle mounting plate 30 through a connector. In actual application, the connector includes: a nut connecting plate 44 installed on the servo mounting plate 36, an adjustment plate 43 installed on the nut connecting plate 44, and a U-shaped rotating plate 51. The two ends of the adjustment plate 43 are symmetrically arranged with fixed plates 52. The two arms of the rotating plate 51 are installed on the fixed plate 52 through bearings 49. The interior of the bearing 49 is connected to the fixed plate 52 through a rotating shaft 48. The exterior of the bearing 49 is provided with a bearing 49 baffle, and the arm of the rotating plate 51 is used as a bearing mounting plate 46 for fixing the bearing retaining edge 47. A pad 50 is provided at the bottom of the rotating plate 51 to buffer the nozzle mounting plate 30 in the coating die head mechanism 9. Since the coating die head mechanism 9 is installed in a hinged manner, this installation method is conducive to the adjustment of the parallelism between the coating nozzle 31 and the surface of the platform body 10. Through the contact displacement sensor 21 on the platform body 10 and the size measurement on both sides of the coating nozzle 31, the error between the coating nozzle 31 and the platform body 10 can be automatically corrected, which greatly improves the coating uniformity. In actual application, a grating ruler 18 is also installed on the servo mounting plate 36 to realize real-time feedback of the position through the grating ruler 18.

[0103] When driving the coating die head mechanism 9 in the Z-axis direction, in addition to the A servo module 39, each of the balancing cylinders 41 is connected to an adjustment connecting plate 45 through a floating joint 42, and the adjustment connecting plate 45 is connected to its corresponding servo mounting plate 36 and drives the servo mounting plate 36 to move in the Z-axis direction. Furthermore, the entire mechanism is driven by two power sources at the same time, and the coordinated action of the two balancing cylinders 41 and the A servo module 39 can eliminate the difference caused by the possible asynchronization of the servo dual drive.

[0104] ③Coating die head mechanism

[0105] like Figure 5 As shown, the coating die head mechanism 9 adopts a high-precision coating nozzle, and the mold is designed and manufactured for high consistency, chemical compatibility, low filling capacity and strip coating. The changes in the internal pressure and flow rate of the coating nozzle can be detected in real time and uploaded to the central control system.

[0106] The coating die head mechanism 9 is mounted on the coating head Z-axis motion mechanism 7, and the coating die head mechanism 9 is driven by the coating head Z-axis motion mechanism 7 to move up and down in the Z-axis direction, and the coating die head mechanism 9 is used to coat the workpiece in cooperation with the Y-axis motion of the adsorption platform positioning device 5. In actual application, a contact displacement sensor 21 is installed on the side of the platform body 10 to measure the distance between the coating nozzle 31 and the surface of the platform body 10 in real time. The contact displacement sensor 21 has high measurement accuracy and can dynamically monitor the coating gap through direct measurement with the coating head.

[0107] The coating die head mechanism 9 includes: a coating nozzle 31 and a nozzle mounting plate 30 connected to the coating nozzle 31, wherein the coating nozzle 31 is provided with a liquid discharge joint 33 and a liquid inlet joint 32, and both ends of the nozzle mounting plate 30 are hingedly connected to the coating head Z-axis motion mechanism 7, that is, connected to the rotating plate 51 in the coating head Z-axis motion mechanism 7 described above, and the hinged assembly is realized by the rotating plate 51. In actual application, in order to facilitate the installation of the coating die head mechanism 9, two eye bolts 29 are also connected to the surface of the nozzle mounting plate 30 to realize the lifting of the nozzle mounting plate 30.

[0108] In actual application, the coating nozzle 31 is of slit extrusion type, and its internal pipeline performs flow channel analysis according to the flow rate, liquid viscosity, pressure, and inlet and outlet diameters to simulate the internal pressure of the hole and the deviation of the coating thickness; at the same time, the super-hard alloy material used in the nozzle cutter head is greatly improved compared with the previous SUS630 material. For example, the straightness of the flow channel surface can reach 0.75um, and the surface roughness can reach Rz0.1. Its hardness is 2 times higher than that of SUS630, and its wear is greatly reduced, which can reduce the interference caused by glass and cause damage to the cutter head.

[0109] ④Coating head cleaning device

[0110] like Fig. 9 As shown, the coating head cleaning device 6 is arranged on the workbench frame 4 and the coating head cleaning device 6 is adapted to the coating die head mechanism 9 so as to clean the coating die head mechanism 9 through the X-axis direction movement of the coating head cleaning device 6 .

[0111] The coating head cleaning device 6 includes: a mounting seat 54 installed between the two stands 38 and a B servo module 57 arranged on the mounting seat 54, the B servo module 57 is connected to a cleaning scraper 56, and a cleaning nozzle 55 is installed on one side of the cleaning scraper 56. Driven by the B servo module 57, the cleaning scraper 56 can reciprocate in the length direction of the coating nozzle 31, thereby removing the residual liquid on the coating nozzle 31. At the same time, during the cleaning process, the coating head is sprayed with white alcohol liquid through the cleaning nozzle 55 to dilute the coating liquid, which is beneficial to the cleaning action of the cleaning scraper 56.

[0112] To further improve the collection of waste liquid, the coating head cleaning device 6 also includes: a waste liquid collection box 58 disposed below the coating die head mechanism 9, the waste liquid collection box 58 is connected to an adjustment cylinder 60 and is driven by the adjustment cylinder 60 to move along the Y-axis direction, so as to drive the waste liquid collection box 58 to move to an appropriate position to quickly collect the waste liquid. At the same time, to ensure timely cleaning of the cleaning scraper 56, a scraper cleaning nozzle 59 is installed on one side of the waste liquid collection box 58.

[0113] In order to prevent the coating liquid of the coating nozzle 31 from solidifying and even clogging the coating head, the coating head cleaning device 6 also includes: a mounting base plate 53 installed between the two stands 38 and a coating head soaking box 61 provided below the coating die head mechanism 9, wherein the coating head soaking box 61 is connected to a telescopic cylinder 62 that drives it to move along the Y-axis direction, and the telescopic cylinder 62 is installed on the mounting base plate 53. Under the drive of the telescopic cylinder 62, the coating head soaking box 61 is pushed to a proper position so that the coating nozzle 31 can be soaked in the coating head soaking box 61. At the same time, guide shafts are provided on both sides of the telescopic cylinder 62, one end of the guide shaft is connected to the coating head soaking box 61, and the other end of the guide shaft is installed on the mounting base plate 53 through a linear bearing.

[0114] Based on the above coating head cleaning device 6, its working principle is as follows:

[0115] After the coating is completed, the coating nozzle 31 returns to the starting position, the waste liquid collection box 58 extends out, the coating nozzle 31 cleaning device is started, and the coating nozzle 31 begins to be sprayed with white alcohol liquid through the cleaning nozzle 55 to dilute the coating liquid. At the same time, the coating liquid on the coating nozzle 31 is removed by the reciprocating motion of the cleaning scraper 56 until the cleaning is completed; after completion, the coating nozzle 31 cleaning device returns to the starting position. At this time, the scraper cleaning nozzle 59 sprays cleaning liquid to clean the cleaning scraper 56 until the cleaning is completed, the waste liquid collection box 58 retracts, and the coating nozzle starts the next coating action, thereby improving the coating yield rate, making the production efficiency high without polluting the machine, and increasing the maintenance cycle of the coating head.

[0116] When the coating nozzle 31 does not work for a long time, the coating head soaking device is started, the coating head soaking box 61 is extended, and the coating nozzle 31 is lowered until it is immersed in the liquid. The coating nozzle 31 is automatically cleaned by the liquid in the coating head soaking box 61 (it can adapt to the cleaning of coating liquids with different high and low viscosities). Since it is equipped with a coating head soaking device, when the coating machine is shut down, the coating head is immersed in the cleaning liquid to prevent the coating liquid from solidifying and clogging the coating nozzle 31.

[0117] The coating head cleaning device 6 can automatically remove the residual coating liquid on the coating nozzle 31. At the same time, it has the functions of waste liquid collection and nozzle soaking, which can solve the problems that the high viscosity coating liquid is difficult to clean and easy to clog the coating head.

[0118] ⑤Coating liquid supply device

[0119] like Fig.10 As shown, when the coating die head mechanism 9 is in operation, it is connected to the coating liquid supply device 2 through the pipeline control system 8 to provide it with coating liquid.

[0120] The coating liquid supply device 2 includes: a protective cabinet 68, two stirring pressure barrels 64 arranged in the protective cabinet 68, and a safety door 65 arranged on the protective cabinet 68, so that the two stirring pressure barrels 64 are mutually redundant, and the coating liquid is stored in two 15L stirring pressure barrels 64. Even if one stirring pressure barrel 64 has no liquid, the other stirring pressure barrel 64 can be connected by opening the control valve to ensure the real-time supply of the coating liquid. A weighing sensor 63 is respectively arranged under each of the stirring pressure barrels 64, and the weighing sensor 63 is connected to a weighing sensor controller 66 for controlling it, and the weighing sensor controller 66 is connected to a weighing display instrument to sense the weight of the stirring pressure barrel 64 in real time. Since the stirring pressure barrels 64 are all equipped with weighing sensors 63, when the weight of the stirring pressure barrel 64 is lower than the set value, the operator is prompted to replenish it. In actual application, the stirring pressure barrel 64 is a drawer-type structure to facilitate personnel operation and maintenance. Each of the stirring pressure barrels 64 is connected to a nitrogen pipe and a liquid supply pipe, wherein the liquid supply pipes are connected in parallel to form a liquid supply output joint, and the coating liquid is provided to the coating liquid supply device 2 through the liquid supply output joint. The nitrogen pipeline 71 is connected to the stirring pressure barrel 64 to realize the coating liquid supply using clean nitrogen as a power source.

[0121] In order to prevent the bubbles in the stirring pressure barrel 64 from affecting the coating effect, the stirring pressure barrel 64 is equipped with a stirring motor. The coating liquid is stirred regularly according to the process requirements to prevent the mixture in the liquid from settling. A compressed air pipe 73 is connected to each of the stirring pressure barrels 64, and the compressed air pipe 73 is connected to a vacuum pump. The air in the stirring pressure barrel 64 is extracted by the compressed air pipe 73. After the stirring is completed, the vacuum pump evacuates the stirring pressure barrel 64 to extract the bubbles generated by the stirring to prevent the bubbles from affecting the coating effect.

[0122] Since the coating liquid is flammable, a fire sprinkler 70 and a temperature sensor 72 are provided in the cabinet so that if a fire occurs, it can be put out in time. The fire sprinkler 70 and the temperature sensor 72 are both connected to a fire control cabinet 76 .

[0123] In order to achieve the normal supply of coating liquid, the pipeline control system 8 includes: nitrogen pressure sensors 75 respectively arranged on each of the nitrogen pipes, each of the nitrogen pressure sensors 75 is connected to a nitrogen pressure display instrument 67, so as to monitor the nitrogen pressure value and the pressure value in the stirring pressure barrel 64 through the nitrogen pressure sensor 75; a nitrogen gas control valve 83 is also provided on the nitrogen pipe, and the nitrogen gas control valve 83 controls the opening and closing of the nitrogen pipeline. Through the opening and closing of the nitrogen gas control valve 83, nitrogen is introduced into the stirring pressure barrel 64, and the supply of coating liquid is achieved under the action of nitrogen pressure.

[0124] like Fig.11 , Fig.12 As shown, the pipeline control system 8 also includes a coating liquid pipe 69, which is connected to the liquid supply output connector in the coating liquid supply device 2, and the other end of the coating liquid pipe 69 is connected to a temporary storage tank 85, and the temporary storage tank 85 is provided with a liquid level sensor 86 for monitoring its liquid level, the temporary storage tank 85 is connected to a filter 89 through an intermediate pipeline, and a hydraulic control valve 74 and a servo injection pump 88 are provided on the intermediate pipeline, the filter 89 is connected to the coating die mechanism 9 through a liquid inlet pipeline, and the coating die mechanism 9 is connected to a discharge pipeline, and the discharge pipeline is connected to a waste liquid collection box 58. Among them, the liquid inlet pipeline and the liquid discharge pipeline are respectively provided with a liquid inlet hydraulic control valve 80 and a liquid discharge hydraulic control valve 79 to control the opening and closing of each coating liquid pipe 69; the servo injection pump 88 is mainly composed of a servo motor, a ball screw and a piston. This structure has high repeatability and positioning accuracy, which is conducive to the quantitative output of the coating liquid. It is used to transport the coating liquid to the temporary storage tank 85 and to the side of the coating nozzle 31 through the supply liquid inlet pipeline; the filter 89 filters impurities in the coating liquid; the temporary storage tank 85 is used to store a certain amount of coating liquid to reduce the speed loss caused by the friction resistance of the pipeline between the coating nozzle 31 and the stirring pressure barrel 64; the liquid level sensor 86 is used to detect the coating liquid capacity in the temporary storage tank 85.

[0125] The pipeline control system 8 also includes a nozzle zero point display instrument 77 and a pressure display instrument 78 arranged on the protective cabinet 68. The nozzle zero point display instrument 77 displays whether the coating nozzle 31 is reset to zero (by feedback signal from the photoelectric sensor); the pressure display instrument 78 displays the vacuum pressure of the platform body (measured by a pressure sensor arranged on the vacuum compression tube), the gas source pressure of the main pipeline (measured by a nitrogen pressure sensor), the internal pressure of the temporary storage tank (measured by a pressure sensor equipped with the temporary storage tank) and the pressure of the coating nozzle (measured by a pressure sensor equipped with the coating nozzle), etc.

[0126] The coating liquid supply device 2 includes a stirring pressure barrel 64 with a stirring function and a weighing sensor 63, which can evenly stir the coating liquid to ensure the coating effect.

[0127] The pipeline control system 8 is composed of a high-precision injection pump, a PFA pipeline, a pressure sensor, a filter 89, etc., and can perform high-precision digital control of the coating rate (steady-state coating) and the coating profile (front and rear edges).

[0128] ⑥Cleaning liquid supply device

[0129] The coating head cleaning device 6 is connected to the cleaning liquid supply device 3 to supply the cleaning liquid through the cleaning liquid supply device 3. Its internal design is the same as that of the coating liquid supply device 2, and will not be described again here.

[0130] Based on the coating machine provided above, its working principle is:

[0131] Preparation stage

[0132] Before the coating work begins, pour the coating liquid into the stirring pressure barrel 64, and the motor on the stirring pressure barrel 64 starts to stir the coating liquid. After a certain period of time, the stirring is stopped. The purpose is to stir the mixed liquids in the coating liquid evenly.

[0133] Turn on the vacuum pump to extract the bubbles generated by stirring in the stirring pressure barrel 64. After a certain period of time, turn off the vacuum pump, then open the nitrogen gas control valve 83 on the stirring pressure barrel 64, open the liquid control valve 74 between the stirring pressure barrel 64 and the temporary storage tank 85, and transport the coating liquid to the temporary storage tank 85 by nitrogen as the power. After reaching the set amount of the liquid level sensor 86, close the nitrogen gas control valve 83 and the liquid control valve 74;

[0134] Start the servo injection pump 88. When the piston on the servo injection pump 88 retreats, open the hydraulic control valve 74 between the temporary storage tank 85 and the servo injection pump 88 and the needle valve 90 on the filter 89, so that the coating liquid is filled in the cylinder of the servo injection pump 88. Then observe the needle valve 90 on the filter 89. When no bubbles are generated on the pipeline on the needle valve 90 and the coating liquid is filled to the top of the needle valve 90, close the needle valve 90.

[0135] Then, the liquid inlet hydraulic control valve 80 and the liquid discharge hydraulic control valve 79 are opened to discharge the coating liquid into the waste liquid collection box 58 through the coating nozzle 31;

[0136] Then close all control valves. At this point, the preparation work before coating is completed. The purpose of this step is to eliminate the bubbles of coating liquid in the pipeline and check whether each pipeline is blocked.

[0137] Entering the coating stage

[0138] Open the nitrogen gas-controlled valve 83 on the pressure barrel, open the liquid-controlled valve 74 between the pressure barrel and the temporary storage tank 85, and transport the coating liquid to the temporary storage tank 85 using nitrogen as the power. When the liquid reaches the set amount of the liquid level sensor 86, the nitrogen gas-controlled valve 83 and the liquid-controlled valve 74 are closed;

[0139] Then the servo injection pump 88 is started. When the piston on the servo injection pump 88 retreats, the nitrogen gas control valve 83 and the hydraulic control valve 74 between the temporary storage tank 85 and the servo injection pump 88 are opened, so that the coating liquid is filled in the pump cylinder. The nitrogen pressure sensor 75 detects the internal pressure of the supply pipeline, compares the current detection pressure with the predetermined pressure, and when the comparison result is that the detection pressure is greater than or equal to the predetermined pressure, the liquid inlet hydraulic control valve 80 is opened, and the coating nozzle 31 starts coating. Among them, the predetermined pressure is set based on the length of the supply pipeline and the viscosity of the coating liquid in the supply pipeline. The predetermined pressure means the pressure value when the opening time of the liquid inlet hydraulic control valve 80 coincides with the discharge time of the coating liquid from the coating nozzle 31.

[0140] After the platform body 10 adsorbs the glass substrate, it starts to move in the Y-axis direction to perform coating. During this process, when the coating liquid is about to be discharged, it is necessary to set a signal delay time from the start time of the servo injection pump 88 to the moment when the coating liquid is discharged through the coating nozzle 31. This time is set based on the length of the supply pipeline and the viscosity of the coating liquid in the supply pipeline; it is judged whether the signal delay time reaches the predetermined time. When the judgment result is that the predetermined time has been reached, the adsorption positioning platform stops moving.

[0141] Example 2

[0142] The present invention also provides a slot extrusion high-precision flat plate coating method, such as Fig.13 As shown, the coating method comprises:

[0143] S1: each ejector pin 23 is raised to place the workpiece on the plane where each ejector pin 23 of the adsorption platform positioning device 5 is located through the manipulator through the feed port 82, and each ejector pin 23 is lowered, and the glass substrate is accurately positioned on the surface of the platform body 10 in coordination with the action of the return cylinder 20 and the slide cylinder 19, and the workpiece is positioned and firmly adsorbed by the adsorption platform positioning device 5, and the vacuum generator generates vacuum to generate negative pressure on the surface of the platform body 10, and the platform body 10 adsorbs the glass substrate;

[0144] S2: The adsorption platform positioning device 5 moves in the Y-axis direction, and the coating die head mechanism 9 is driven by the coating head Z-axis motion mechanism 7 to descend to a preset position (the position information is fed back in real time by the contact displacement sensor 21), and the coating die head mechanism 9 coats the workpiece according to the preset parameters. At this time, the coating liquid supply device 2 connected to the coating die head mechanism 9 is also started and supplies liquid normally;

[0145] S3: the adsorption platform positioning device 5 continues to move in the Y-axis direction until the coating of the workpiece is completed, at which time the coating liquid supply device 2 stops;

[0146] S4: the coating die head mechanism 9 stops and rises back to the initial position, and the coating head cleaning device 6 is started to clean the coating die head mechanism 9 to remove the residual coating liquid;

[0147] S5: The adsorption platform positioning device 5 is switched to the unloading state (i.e., the adsorption vacuum is released, and each ejector pin 23 rises). After the workpiece is taken out from the discharge port 81 by the robot, the adsorption platform positioning device 5 returns to the loading state to carry out the coating process of the next workpiece.

[0148] The present invention is not limited to the above-mentioned optional implementation modes. Anyone can derive other various forms of products under the inspiration of the present invention. However, no matter what changes are made in the shape or structure, all technical solutions that fall within the scope defined by the claims of the present invention fall within the protection scope of the present invention.

Claims

1. A slot extrusion type high-precision flat plate coating machine, comprising a workbench frame, characterized in that: The coating machine also includes: An adsorption platform positioning device provided on the workbench frame; A coating head Z-axis motion mechanism is arranged on the workbench frame, wherein the coating head Z-axis motion mechanism is equipped with a coating die head mechanism and drives the coating die head mechanism to move up and down in the Z-axis direction, and the coating die head mechanism cooperates with the Y-axis direction movement of the adsorption platform positioning device to coat the workpiece; A coating head cleaning device is arranged on the workbench frame and matched with the coating die head mechanism, and the coating die head mechanism is cleaned by the coating head cleaning device moving in the X-axis direction; Wherein, the coating die head mechanism is connected to a coating liquid supply device through a pipeline control system, and the coating head cleaning device is connected to a cleaning liquid supply device; The adsorption platform positioning device comprises: A linear motor that moves along the Y-axis; A platform assembly for placing a workpiece and the platform assembly is mounted on a linear motor through a motor mounting plate, the platform assembly is driven by the linear motor to move along the Y-axis direction, a buffer is provided at one end of the motion path of the linear motor, and a buffering force is provided to the motion of the linear motor through the buffer; The coating head Z-axis motion mechanism comprises: Two symmetrically arranged stands, with a connecting plate connected between the two stands; A servo modules are respectively arranged on each of the stands and are symmetrically arranged, wherein the A servo modules are equipped with a connector through a servo mounting plate and drive the servo mounting plate to move in the Z-axis direction, and the connector is connected to the nozzle mounting plate; The balancing cylinders are respectively arranged on both sides of the connecting plate, and each of the balancing cylinders is connected to its corresponding servo mounting plate through a floating joint and drives the servo mounting plate to move in the Z-axis direction; The adjusting connecting plate is connected to each of the balancing cylinders through the floating joint. The adjusting connecting plate is connected to the corresponding servo mounting plate and drives the servo mounting plate to move in the Z-axis direction.

2. The slot extrusion type high-precision flat plate coater according to claim 1, characterized in that: The platform components include: A platform body, wherein a plurality of adsorption holes are distributed on the platform body, and the platform body is connected to the motor mounting plate through at least three supporting components; At least three ejectors slidably disposed in the platform body, each of the ejectors being mounted on an ejector base frame and the ejector base frame being provided with an ejector lifting cylinder for driving the ejector to rise and fall; At least three alignment components are arranged around the platform body, and the workpiece is positioned through the joint action of each alignment component.

3. The slot extrusion type high-precision flat plate coater according to claim 2, characterized in that: The support assembly comprises a connecting flange arranged on the platform body, an adjusting screw connected to the connecting flange, and a flange plate connected to the adjusting screw, and the flange plate is mounted on the motor mounting plate.

4. The slot extrusion type high-precision flat plate coater according to claim 2, characterized in that: The correction components include: A return block, wherein the return block is connected to a return cylinder for driving the return block to move up and down; The slide cylinder is installed on the platform body, and the alignment cylinder is slidably arranged on the slide along the side direction perpendicular to the platform body, and the alignment cylinder is driven to move by the slide cylinder.

5. The slot extrusion type high-precision flat plate coater according to claim 1, characterized in that: The coating die head mechanism comprises: A coating nozzle, wherein the coating nozzle is provided with a liquid discharge joint and a liquid inlet joint; A nozzle mounting plate connected to the coating nozzle, wherein both ends of the nozzle mounting plate are hingedly connected to the coating head Z-axis motion mechanism.

6. The slot extrusion type high-precision flat plate coater according to claim 1, characterized in that: The connector comprises: Nut connecting plate mounted on the servo mounting plate; An adjustment plate mounted on the nut connecting plate, with fixed plates symmetrically arranged at both ends of the adjustment plate; The rotating plate is in a U-shape, wherein two arms of the rotating plate are mounted on a fixed plate through bearings, and a pad is arranged at the bottom of the rotating plate.

7. The slot extrusion type high-precision flat plate coater according to claim 1, characterized in that: The coating head cleaning device comprises: A mounting seat installed between the two upright seats; A B servo module is arranged on the mounting seat, wherein the B servo module is connected with a cleaning scraper, and a cleaning nozzle is arranged on one side of the cleaning scraper.

8. The slot extrusion type high-precision flat plate coater according to claim 1, characterized in that: The coating head cleaning device also includes: A waste liquid collection box is arranged below the coating die head mechanism, and the waste liquid collection box is connected to an adjusting cylinder and driven by the adjusting cylinder to move along the Y-axis direction; The scraper installed on the side of the waste liquid collection box cleans the nozzle.

9. The slot extrusion type high-precision flat plate coater according to claim 1, characterized in that: The coating head cleaning device also includes: A mounting base plate mounted between the two stands; A coating head immersion box is arranged below the coating die head mechanism, wherein the coating head immersion box is connected with at least one telescopic cylinder driving it to move along the Y-axis direction, and the telescopic cylinder is installed on the mounting base plate.

10. The slot extrusion type high-precision flat plate coater according to claim 1, characterized in that: The coating liquid supply device and the cleaning liquid supply device both include: At least two stirring pressure barrels, each of which is provided with a weighing sensor below, and each of which is connected with a nitrogen pipe and a liquid supply pipe, and each of which is connected in parallel to form a liquid supply output joint; The compressed air pipes are respectively connected to the stirring pressure barrels, and the stirring pressure barrels are evacuated through the compressed air pipes.

11. The slot extrusion type high-precision flat plate coater according to claim 10, characterized in that: The pipeline control system comprises: A nitrogen pressure sensor is respectively arranged on each of the nitrogen pipes, and each of the nitrogen pressure sensors is connected to a nitrogen pressure display instrument; A coating liquid pipe connected to a liquid supply output joint in a coating liquid supply device, wherein the coating liquid pipe is connected to a temporary storage tank and the temporary storage tank is provided with a liquid level sensor for monitoring its liquid level, the temporary storage tank is connected to a filter via an intermediate pipeline and a hydraulic control valve and a servo injection pump are provided on the intermediate pipeline, the filter is connected to a coating die mechanism via a liquid inlet pipeline and the coating die mechanism is connected to a liquid discharge pipeline; Wherein, the liquid inlet pipeline and the liquid discharge pipeline are respectively provided with a liquid inlet hydraulic control valve and a liquid discharge hydraulic control valve.

12. A slit extrusion type high-precision flat plate coating method, the coating method is applied to the slit extrusion type high-precision flat plate coating machine as described in any one of claims 1 to 11, the coating method comprising: S1: Place the workpiece on the adsorption platform positioning device through the manipulator, and position the workpiece through the adsorption platform positioning device and adsorb it firmly; S2: The adsorption platform positioning device moves toward the Y-axis direction, and the coating die head mechanism is driven by the coating head Z-axis motion mechanism to descend to a preset position, and the coating die head mechanism coats the workpiece according to preset parameters; S3: The adsorption platform positioning device continues to move in the Y-axis direction until the coating of the workpiece is completed; S4: the coating die head mechanism stops and returns to the initial position, and the coating head cleaning device is started to clean the coating die head mechanism; S5: The adsorption platform positioning device switches to the unloading state. After the workpiece is taken out by the robot, the adsorption platform positioning device returns to the loading state to carry out the coating process of the next workpiece.

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